JP2009053162A - Non-contact device for measuring three-dimensional shape - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a non-contact device for measuring three-dimensional shape with simple configuration and inexpensive. <P>SOLUTION: A table 1 where an measuring object 6 is laid on an X-Y plane and an autocollimator 2 deployed to be able to irradiate laser beam 2a from the Z-axis direction perpendicular to the table X-Y plane to receive reflected light from the measuring object 6 and detects a light reflective surface angle at the measuring object 6 are configured. A shifting device 3 scanning the laser beam 2a on the table X-Y plane and an arithmetic device 5 computing shape (a bump length and a bump angle) of the measuring object 6 based on input of both the position signal of the shifting device 3 and the light reflective surface angle signal from the autocollimator 2 are configured. Thus, three-dimensional shape of the measuring object 6 is to be measurable on basis of the table shifting distance and the light reflective surface angle detected by the autocollimator 2. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a non-contact three-dimensional shape measuring apparatus that measures a three-dimensional shape of a measurement object such as a workpiece in a non-contact manner.

Conventionally, this type of technology has been described in Patent Document 1.
In this method, the one-dimensional coordinate (Z coordinate) in the height direction of the measurement target position is detected from the in-focus position, and the two-dimensional coordinate (coordinate) in the plane direction of the measurement target position is detected by speckle image correlation. Thus, the three-dimensional shape of the measurement object is measured in a non-contact manner.

JP 2004-212333 A

  However, the above prior art has a complicated and expensive structure. For this reason, there has been a demand for a non-contact three-dimensional shape measuring apparatus that has a simple configuration and is inexpensive.

  The present invention has been made in view of the above-described demand, and an object thereof is to provide a non-contact three-dimensional shape measuring apparatus that is simple in configuration and inexpensive.

The said subject is solved by making a non-contact three-dimensional shape measuring apparatus the structure of each following aspect.
As with the claims, each aspect is divided into sections, each section is numbered, and is described in a form that cites the numbers of other sections as necessary. This is merely for the purpose of facilitating the understanding of the present invention, and the technical features described in this specification and combinations thereof should not be construed as being limited to those described in the following sections. . In addition, when a plurality of items are described in one section, it is not always necessary to employ the plurality of items together, and it is also possible to take out only a part of the items and employ them.

Of the following items, (1) corresponds to claim 1 and (2) corresponds to claim 2.
(1) A table on which an object to be measured is placed on the XY plane, and the measurement on the XY plane arranged so as to be able to irradiate light from a Z-axis direction perpendicular to the XY plane of the table. An autocollimator that receives the reflected light from the object and detects the angle of the light reflecting surface in the measurement object, a moving unit that scans the irradiation light from the autocollimator on the XY plane of the table, and the moving unit A non-contact three-dimensional shape measuring apparatus comprising: a calculation means for calculating a shape of a measurement object on the table by inputting a position signal of the light and a light reflection surface angle signal from the autocollimator.
(2) The non-contact three-dimensional shape measuring apparatus according to item (1), wherein the irradiation light from the autocollimator is laser light.

  According to the present invention, it is possible to provide a non-contact three-dimensional shape measuring apparatus that is simple in configuration and inexpensive.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In addition, the same code | symbol shows the same or an equivalent part between each figure.
FIG. 1 is a configuration diagram showing an embodiment of a non-contact three-dimensional shape measuring apparatus according to the present invention.
As shown in this figure, the present embodiment includes a table 1, an autocollimator 2, a moving device 3, position detectors 4a and 4b, and an arithmetic device 5.
The table 1 is a table that can move in the X-axis direction (left-right direction) and the Y-axis direction (front-rear direction), and the measurement object 6 is on a desired position on the upper surface thereof, that is, the XY plane forming a two-dimensional plane. It is placed.

The autocollimator 2 is disposed at a predetermined height above the table (predetermined position on the Z axis) so that light 2a can be emitted from the Z axis direction perpendicular to the XY plane of the table 1. The autocollimator 2 receives the reflected light from the measurement object 6 placed on the table XY plane of the irradiated light (irradiation light) 2a, and the angle (light reflection) of the light reflection surface of the measurement object 6 It is a non-contact angle sensor that detects (surface angle).
In the present embodiment, the autocollimator 2 includes a laser light source, a CCD camera, and an angle calculation circuit. The laser light from the laser light source is used as the irradiation light 2a, and the CCD camera receives the reflected light from the measurement target 6. The angle calculation circuit is configured to calculate (detect) the light reflection surface angle in the measurement object 6.
In order to enable adjustment of the position on the Z-axis of the autocollimator 2 (height from the table XY plane), the autocollimator 2 and / or the table 1 may be moved along the Z-axis.

The moving device 3 is a moving means of the table 1 or the autocollimator 2 that scans the laser beam 2a from the autocollimator 2 on the XY plane of the table 1, that is, the measurement object 6, and in the illustrated example, the linear movement that moves the table 1. It is a motor device.
The position detectors 4a and 4b are sensors for detecting the position of the moving device 3 (table position in the illustrated example), that is, the scanning position of the laser light 2a on the measurement object 6, and are linear encoders in the illustrated example. The position detector 4a is for the X axis, and the position detector 4b is for the Y axis.

The arithmetic device 5 receives the position signal of the moving device 3 and the light reflecting surface angle signal from the autocollimator 2 and calculates the shape of the measuring object 6 on the table 1 (step length and step angle on the upper surface of the measuring object). It is a calculation means. The arithmetic unit 5 calculates the moving length (distance) of the moving device 3 when there is no step.
In the present embodiment, the arithmetic device 5 receives signals from the position detectors 4a and 4b during scanning of the laser light 2a from the autocollimator 2 as position signals (scanning position signals of the laser light 2a) of the moving device 3. The shape of the measurement object 6 on the table 1 is calculated.
The arithmetic unit 5 is composed of a personal computer in the illustrated example, and can perform the shape calculation by executing a program stored therein and display the result on the display 5a.

Next, the operation of the present embodiment will be described with reference to FIG.
In the example shown in FIG. 1, the Y coordinate and the position of the autocollimator 2 on the Z-axis (the height of the laser beam emission position from the table XY plane) during scanning of the laser beam 2a from the autocollimator 2 are constant. is there.
The arithmetic device 5 calculates the step length of the upper surface of the measuring object 6 by acquiring the change position (X coordinate) of the light reflection surface angle θ detected by the autocollimator 2.
That is, in the example shown in FIG. 1, the laser beam 2a is scanned in the direction of the arrow A on the upper surface of the measuring object 6, specifically, the table 1 is moved in the X-axis direction (right direction in FIG. 1). X coordinates x1, x2, and x3, which are the change positions of the light reflection surface angle θ in FIG. 6, are acquired (see FIG. 2A). Then, the step lengths L1 and L2 on the upper surface of the measuring object 6 are calculated by the following equations (1) and (2) (see FIG. 2B).
L1 = (x1-x2) (1)
L2 = (x2-x3) (2)

The position of the table 1 in the X-axis direction (scanning position of the laser beam 2a) is detected by the X-axis position detector 4a, and the light reflection surface angle θ (θ1, θ2) in the measurement object 6 is detected by the autocollimator 2. Detected and input to the arithmetic unit 5 as a position signal and a light reflection surface angle signal. Then, the arithmetic device 5 calculates the angle change positions (X coordinates) x1, x2, x3 of the scanning surface (upper surface of the measurement object 6) of the laser light 2a of the measurement object 6, and the step length and the step angle of the measurement object upper surface, that is, The shape of the measurement object 6 is calculated. In the present embodiment, the illustrated front shape (projected shape on the XZ plane) 61 of the measurement object 6 is calculated.
The computing device 5 may be able to calculate the heights H1 and H2 from the shape 61 of the measurement object 6.

Next, a three-dimensional shape measurement procedure in the embodiment shown in FIG. 1 will be described with reference to the flowchart of FIG.
First, in step 301, the autocollimator 2 irradiates the measurement object 6 placed on the table 1 with the laser light 2a as shown in FIG.
The autocollimator 2 receives the reflected light from the measuring object 6 with a CCD camera, and calculates the light reflection surface angle θ in the measuring object 6 with an angle calculation circuit (steps 302 and 303). Note that the measurement start position is the laser beam irradiation position in step 301.

In step 304, it is determined whether the position when the light reflecting surface angle θ is calculated in step 303 is the final measurement position, that is, whether the movement distance X1 of the table 1 has reached the movement distance XL designated in advance. This is done by receiving a signal from the X-axis position detector 4a by a control device built in the arithmetic device 5 or provided separately from the control device.
If the table movement distance X1 has reached the designated movement distance XL, the control device terminates the measurement (the operation of the autocollimator 2, the movement device 3, and the computing device 5 is terminated). A predetermined distance Δx is moved in the X-axis direction (rightward in FIG. 1) (step 305).
Steps 301 to 303 are repeatedly executed until it is determined as Yes in Step 304, and when it is determined as Yes, the execution ends.

  The laser beam irradiation in step 301 may be performed only when the step 301 is executed, but is performed continuously here. When laser light irradiation is performed continuously, the reflected light is sampled at step 302 every time the table 1 moves Δx (synchronized with the Δx movement), and the angle is calculated at step 304. In any case, in step 304, the light reflection surface angle θ for each Δx movement point along the X axis on the upper surface of the measurement object 6 is calculated.

  During this time, the arithmetic device 5 receives the position signal of the moving device 3 from the X-axis position detector 4a and also receives the light reflection surface angle signal from the autocollimator 2, and the shape of the measuring object 6 on the table 1 ( Calculate the step length and step angle of the top surface to be measured.

That is, in the present embodiment, the scanning object (irradiation) of the laser beam 2a by the autocollimator 2 and the moving device 3 with respect to the measuring object 6 is gradually shifted in the X-axis direction, and the measuring object 6 has a total length in the X-axis direction ( ≦ XL), the arithmetic unit 5 calculates the shape 61 (see FIG. 2C) of the measurement object 6.
Then, the above-described laser beam scanning in the X-axis direction with respect to the measurement target 6 is performed over the entire length of the measurement target 6 in the Y-axis direction while moving the position in the Y-axis direction, and each step length calculation (when there is no step) Is calculating (measuring) the three-dimensional shape of the object 6 to be measured.
The point is that the three-dimensional shape of the measurement object 6 can be measured by the table moving distance from the measurement start position and the light reflection surface angle, and the configuration is extremely simple as compared with the above-described prior art as shown in FIG. .
In addition, the measurement accuracy can be changed depending on the beam diameter of the laser beam 2a to be used. That is, there is an effect that the measurement accuracy can be changed very easily.

  The laser beam scanning in the Y-axis direction is performed on the measurement object 6 over the entire length in the X-axis direction of the measurement object 6 while moving the position in the X-axis direction by a minute distance, and each step length calculation (no step) In some cases, the three-dimensional shape of the measuring object 6 may be calculated by calculating a movement distance in the Y-axis direction).

It is a block diagram which shows one Embodiment of the non-contact three-dimensional shape measuring apparatus by this invention. It is a figure for demonstrating operation | movement of embodiment shown in FIG. It is a flowchart for demonstrating operation | movement similarly.

Explanation of symbols

1: table, 2: autocollimator, 2a: laser beam (irradiation light), 3: moving device (moving means), 4a: position detector for X axis, 4b: position detector for Y axis, 5: arithmetic unit ( Calculation means), 6: measurement object.

Claims (2)

A table on which the measurement object is placed on the XY plane;
The angle of the light reflection surface of the measurement object is received so as to be able to irradiate light from the Z-axis direction perpendicular to the XY plane of the table, receives reflected light from the measurement object on the XY plane. An autocollimator to detect
Moving means for scanning the irradiation light from the autocollimator on the XY plane of the table;
Non-contact three-dimensional shape measurement, comprising: a calculation means for calculating a shape of a measurement object on the table by inputting a position signal of the moving means and a light reflection surface angle signal from the autocollimator. apparatus. The non-contact three-dimensional shape measuring apparatus according to claim 1, wherein the irradiation light from the autocollimator is laser light.

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