JP2018054069A - Plug valve, liquid supplying process, liquid supplying device and coating equipment - Google Patents

Abstract

PROBLEM TO BE SOLVED: To suppress occurrence of air bubbles.SOLUTION: A plug valve capable of closing a liquid supply passage through turning operation of a plug member fixed to a valve main body is constituted in such a way that the plug member includes a plug side groove part formed at its outer surface, the valve main body comprises a liquid inlet for flowing the liquid into it; a liquid discharging outlet for discharging out the liquid; and a main body side groove part opposing against the outer surface of the plug member. A first state that the liquid inlet, the liquid outlet and the main body side groove part are bypassed by the plug side groove part and a second state that the liquid inlet, the liquid outlet and the main body side groove part are not bypassed by the plug side groove part are changed over and the plug side groove part is provided with a rectification part for rectifying the liquid flowed into it through the liquid inlet so as not to stagnate there.SELECTED DRAWING: Figure 5

Description

  The present invention relates to a plug valve, a liquid supply method, a liquid supply apparatus, and a coating apparatus.

  Conventionally, there has been known a plug valve capable of closing a liquid supply path by rotating a plug member attached to a valve body (see, for example, Patent Document 1). In this plug valve, a plug-side groove is formed on the outer surface of the plug member, and the valve main body is opposed to the liquid inflow port through which liquid flows in, the liquid outflow port through which liquid flows out, and the outer surface of the plug member. A main body side groove is formed. The plug valve has a first state in which a space between the liquid inlet and the liquid outlet and the main body side groove is bypassed by the plug side groove, and the liquid inlet and the liquid outlet according to the turning operation of the plug member. And the main body side groove portion are configured to be switched to the second state in which the plug side groove portion is not bypassed.

Japanese Patent Laying-Open No. 2015-206431

  However, in the first state, the liquid flowing in from the liquid inflow port once collides with the plug side groove when flowing into the liquid outflow port through the main body side groove and the plug side groove, so that the liquid stagnates in the plug side groove. There was a possibility that bubbles were generated in the liquid.

  This invention is made | formed in view of such a subject, and it aims at providing the plug valve which can suppress generation | occurrence | production of a bubble, the liquid supply method, the liquid supply apparatus, and the coating device.

  The plug valve according to the first aspect of the present invention is a plug valve capable of closing a liquid supply path by a rotating operation of a plug member attached to a valve body, wherein the plug member is formed on a plug side groove formed on an outer surface. The valve body includes a liquid inflow port for allowing the liquid to flow into the interior, a liquid outflow port for allowing the liquid to flow out to the outside, and a body side groove facing the outer surface of the plug member, In accordance with the pivoting operation of the plug member, a first state where the liquid inlet and the liquid outlet and the main body side groove are bypassed by the plug side groove, the liquid inlet and the liquid flow The outlet side and the main body side groove portion are configured to be switched to a second state in which the plug side groove portion is not bypassed, and the plug side groove portion is in the first state. , Rectifier is provided for rectifying such that the liquid flowing from the liquid inlet is not Yodoma.

  According to this configuration, the plug side groove portion is provided with the rectifying unit that rectifies the liquid flowing in from the liquid inflow port in the first state so as not to stagnate, so that it flows in from the liquid inflow port in the first state. When the liquid flows into the liquid outlet through the main body side groove portion and the plug side groove portion, even if it collides with the plug side groove portion once, it can be rectified so that the liquid does not spill. Therefore, the generation of bubbles can be suppressed.

In the plug valve described above, the rectifying unit may face the liquid inlet in the first state.
According to this configuration, in the first state, compared to the case where the rectifying unit is not opposed to the liquid inlet in the first state (that is, the rectifying unit is disposed at a position avoiding the liquid inlet). Since the liquid flowing in from the liquid inflow port easily flows toward the rectifying unit, the rectifying effect by the rectifying unit can be more effectively exhibited. Therefore, generation | occurrence | production of a bubble can be suppressed more reliably.

In the plug valve described above, the rectifying unit may include a through hole formed in the plug member.
According to this configuration, since the liquid that has flowed in from the liquid inlet in the first state passes through the through hole, the liquid can be prevented from stagnation in the plug-side groove. Therefore, generation | occurrence | production of a bubble can be suppressed more reliably. In addition, the liquid flowing in from the liquid inflow port not only flows into the liquid outflow port through the main body side groove and the plug side groove, but also flows into the liquid outflow port through the through hole, so that the liquid flow rate is reduced. Can be increased.

In the plug valve described above, only one through hole may be disposed at a position facing the liquid inlet in the first state.
According to this configuration, compared to a case where the through hole is not arranged at a position facing the liquid inlet in the first state (that is, a case where the through hole is arranged at a position avoiding the liquid inlet), In the first state, the liquid that has flowed in from the liquid inflow port easily passes through the through hole, so that the rectifying effect by the through hole can be more effectively exhibited. Therefore, generation | occurrence | production of a bubble can be suppressed more reliably. In addition, since only one through hole needs to be formed in the plug member, the processing cost of the plug member can be reduced compared to the case where a plurality of through holes are formed in the plug member.

In the plug valve, a plurality of the through holes may be arranged at positions facing the liquid inlet in the first state.
According to this configuration, compared to the case where only one through hole is arranged, the liquid flowing in from the liquid inlet in the first state can easily pass through the plurality of through holes. The effect can be exhibited more effectively. Therefore, generation | occurrence | production of a bubble can be suppressed more reliably. In addition, the liquid flowing in from the liquid inflow port not only flows into the liquid outflow port via the main body side groove portion and the plug side groove portion, but also flows into the liquid outflow port through a plurality of through holes. The flow rate can be increased.

In the plug valve, the plurality of through holes are formed in the first state in the first state, the first through hole disposed at a position facing the liquid inlet, and the first through hole in the circumferential direction of the plug member. And a second through hole arranged at an adjacent position.
According to this configuration, compared with the case where a plurality of through holes are randomly arranged in the plug member, the liquid flowing in from the liquid inflow port in the first state evenly distributes the first through hole and the second through hole. Since it becomes easy to pass, the rectification effect by a some through-hole can be exhibited more effectively. Therefore, generation | occurrence | production of a bubble can be suppressed more reliably.

In the plug valve described above, the rectifying unit may further include a partition unit disposed at a position facing the liquid inflow port in the first state.
According to this configuration, the liquid flowing in from the liquid inlet in the first state is diverted in the circumferential direction of the plug member starting from the partition, and the diverted liquid easily flows evenly in the circumferential direction of the plug member. The effect can be exhibited more effectively. Therefore, generation | occurrence | production of a bubble can be suppressed more reliably.

In the plug valve described above, the plurality of through holes sandwich the partition portion in the circumferential direction of the plug member with a third through hole disposed at a position adjacent to the partition portion in the circumferential direction of the plug member. A fourth through hole disposed on the opposite side of the third through hole.
According to this configuration, in the first state, the liquid that has flowed in from the liquid inlet splits in the circumferential direction of the plug member starting from the partition, and the split liquid passes through the third through hole and the fourth through hole evenly. Since it becomes easy to do, the rectification effect by a some through-hole can be exhibited more effectively. Therefore, generation | occurrence | production of a bubble can be suppressed more reliably.

In the plug valve described above, the rectifying unit may include a recess formed in the plug member.
According to this configuration, since the liquid that has flowed in from the liquid inlet in the first state enters the recess, the liquid can be prevented from stagnation in the plug-side groove. Therefore, generation | occurrence | production of a bubble can be suppressed more reliably.

In the plug valve, in the first state, the recess is a first recess disposed adjacent to each other in the circumferential direction of the plug member so that a boundary portion is formed at a position facing the liquid inlet. And a second recess may be included.
According to this configuration, in the first state, the liquid flowing in from the liquid inflow port diverts in the circumferential direction of the plug member starting from the boundary portion, and the diverted liquid easily enters the first concave portion and the second concave portion. Therefore, the rectification effect by the recess can be more effectively exhibited. Therefore, generation | occurrence | production of a bubble can be suppressed more reliably.

In the plug valve, in the first state, the main body side groove and the plug side groove are arranged so as to cross each other, and in the second state, the main body side groove and the plug side groove are arranged parallel to each other. May be.
According to this configuration, the first state and the second state can be switched by rotating the plug member by 90 degrees.

In the plug valve, the valve main body may be made of resin at least in the vicinity of the liquid inlet and the liquid outlet.
According to this configuration, the liquid inlet and the vicinity of the liquid outlet can be easily pressed and deformed using, for example, a nut or the like.

In the plug valve, the valve main body may be pressed against the outer surface of the plug member in the vicinity of the liquid inlet and the liquid outlet.
According to this configuration, the contact state between the valve main body and the plug member can be easily adjusted by pressing and deforming the liquid inflow port and the vicinity of the liquid outflow port.

In the above plug valve, the plug member has a columnar shape in which the plug side groove is formed, the valve body has a curved cross section of the body side groove, and the outer peripheral surface of the plug member The radius of curvature may be larger than the main body side groove.
According to this configuration, in the first state, a gap is generated between the outer peripheral surface of the plug member and the plug-side groove, so that the plug-side groove can function as a liquid flow path.

  The liquid supply method according to the second aspect of the present invention is the method of supplying liquid from a liquid supply source to a liquid supply destination by opening and closing a valve provided in a liquid supply path. A plug valve is used.

  According to this method, since the liquid supply path is opened and closed using the plug valve according to the first aspect, the generation of bubbles can be suppressed. Therefore, it is possible to provide a highly reliable liquid supply method in which bubbles are prevented from flowing into the liquid supply destination.

  A liquid supply apparatus according to a third aspect of the present invention is the liquid supply apparatus that supplies liquid from a liquid supply source to a liquid supply destination by opening and closing a valve provided in the liquid supply path. The plug valve which concerns on is provided.

  According to this configuration, since the liquid supply path is opened and closed using the plug valve according to the first aspect, the generation of bubbles can be suppressed. Therefore, it is possible to provide a highly reliable liquid supply apparatus in which bubbles are prevented from flowing into the liquid supply destination.

  An application apparatus according to a fourth aspect of the present invention includes an application unit that applies a liquid to an object to be applied, a liquid supply path that supplies the liquid to the application part, and a valve that is provided in the liquid supply path. , The plug valve according to the first aspect is provided as the valve.

  According to this configuration, since the liquid supply path is opened and closed using the plug valve according to the first aspect, the generation of bubbles can be suppressed. Therefore, generation | occurrence | production of the defect by a bubble is suppressed and the reliable coating device which can apply | coat a liquid with respect to a to-be-coated object favorably can be provided.

  ADVANTAGE OF THE INVENTION According to this invention, the plug valve which can suppress generation | occurrence | production of a bubble, a liquid supply method, a liquid supply apparatus, and a coating device can be provided.

It is a schematic diagram of the coating device which concerns on 1st Embodiment. It is sectional drawing of the valve | bulb which concerns on 1st Embodiment. It is a perspective view of the plug member concerning a 1st embodiment. It is sectional drawing which shows the non-connection state of the flow path which concerns on 1st Embodiment. It is sectional drawing which shows the connection state of the flow path which concerns on 1st Embodiment. It is a perspective view of the rectification | straightening part which concerns on 1st Embodiment. It is a perspective view which shows the 1st modification of the plug member which concerns on 1st Embodiment. It is a perspective view which shows the 2nd modification of the plug member which concerns on 1st Embodiment. It is a perspective view which shows the 3rd modification of the plug member which concerns on 1st Embodiment. It is a perspective view of the rectification | straightening part which concerns on 2nd Embodiment. It is sectional drawing which shows the 1st state of the rectification | straightening part which concerns on 2nd Embodiment. It is a perspective view of the rectification | straightening part which concerns on 3rd Embodiment. It is sectional drawing which shows the 1st state of the rectification | straightening part which concerns on 3rd Embodiment. It is a perspective view which shows the 1st modification of the rectification | straightening part which concerns on 3rd Embodiment. It is sectional drawing which shows the 1st state of the rectification | straightening part which concerns on the 1st modification of 3rd Embodiment. It is a perspective view which shows the 2nd modification of the rectification | straightening part which concerns on 3rd Embodiment. It is a perspective view of the rectification | straightening part which concerns on 4th Embodiment. It is sectional drawing which shows the 1st state of the rectification | straightening part which concerns on 4th Embodiment. It is a figure which shows the other modification of the plug side groove part which concerns on embodiment. It is a figure which shows the other modification of the plug side groove part which concerns on embodiment. It is a figure which shows the other modification of the plug side groove part which concerns on embodiment. It is a figure which shows the 1st modification of the valve | bulb which concerns on embodiment. It is a figure which shows the 2nd modification of the valve | bulb which concerns on embodiment. It is a figure which shows the 3rd modification of the valve | bulb which concerns on embodiment.

(First embodiment)
Hereinafter, a first embodiment of the present invention will be described with reference to FIGS. In the present embodiment, a coating apparatus provided with a plug valve in a liquid supply path will be described as an example. The coating apparatus of the present embodiment is for coating a chemical liquid (liquid) such as a photoresist, which has a relatively high viscosity and may cause a foreign substance, on a semiconductor substrate (an object to be coated).
In addition, in the drawings used in the following description, in order to make the features easy to understand, there are cases where the portions that become the features are enlarged for the sake of convenience, and the dimensional ratios of the respective components are not always the same as the actual ones. Absent.

<Coating device>
As shown in FIG. 1, the coating apparatus 100 is provided for a liquid supply source 10, a liquid supply path 11, a valve 20 (plug valve) that can close (open and close) the liquid supply path 11, and the semiconductor substrate 1. An application unit 40 that can apply liquid and a stage 50 that holds the semiconductor substrate 1 are provided.

The liquid supply source 10 includes a storage tank that stores liquid, and a transfer pump (both not shown) that transfers liquid from the storage tank.
The liquid supply path 11 is a flow path that connects between the liquid supply source 10 and the application unit 40. A liquid is supplied from the liquid supply source 10 toward the application unit 40 via the liquid supply path 11. The liquid supply path 11 includes an upstream supply path 11 a that connects the valve 20 and the liquid supply source 10, and a downstream supply path 11 b that connects the valve 20 and the application unit 40.
The valve 20 is provided in the middle of the liquid supply path 11.
For example, as the application unit 40, an inkjet head, a slit nozzle, or the like can be used.

<Valve>
As shown in FIG. 2, the valve 20 is a plug valve type valve. The valve 20 includes a columnar plug member 21 extending in a direction along the axis C <b> 1 (hereinafter referred to as “axis direction”), and a tubular valve body 22 extending coaxially with the plug member 21 so as to surround the outer periphery of the plug member 21. It is equipped with.

  The plug member 21 is attached with a drive device 30 that can rotate the plug member 21 with respect to the valve body 22. For example, as the driving device 30, an actuator, a motor, or the like can be used. The drive device 30 includes a rotating shaft 31 that rotates about the axis C1. The rotating shaft 31 is fixed to one end of the plug member 21.

<Plug member>
As shown in FIG. 3, the plug member 21 has a cylindrical shape. For example, the plug member 21 is formed of a metal member. An attachment hole 19 for attaching the rotation shaft 31 of the drive device 30 is formed at one end of the plug member 21. The plug member 21 has a smaller outer diameter on the other end surface 21B side than on the one end surface 21A side.

  A pair of plug side grooves 24 and 25 are formed on the outer peripheral surface 21 a of the plug member 21. The pair of plug-side groove portions 24 and 25 are disposed so as to be 180 degrees different from each other with respect to the outer peripheral surface 21a. The pair of plug side grooves 24 and 25 have the same shape.

  The pair of plug-side grooves 24 and 25 are formed along a direction parallel to a straight line that intersects the axis C1 (for example, in the present embodiment, a direction parallel to a straight line that is orthogonal to the axis C1). That is, the pair of plug-side groove portions 24 and 25 are formed along a direction parallel to the tangent line of the outer peripheral surface 21a.

  Specifically, the pair of plug-side groove portions 24, 25 includes rectangular bottom surfaces 24a, 25a extending in a direction parallel to the tangent to the outer peripheral surface 21a, and one end surfaces 24b, 25b continuous to one end side of the bottom surfaces 24a, 25a. , And other end surfaces 24c and 25c connected to the other end sides of the bottom surfaces 24a and 25a. The bottom surfaces 24a and 25a, the one end surfaces 24b and 25b, and the other end surfaces 24c and 25c are formed flat.

  Connecting portions 24d and 25d having rounded corners are formed between the bottom surfaces 24a and 25a and the one end surfaces 24b and 25b and between the bottom surfaces 24a and 25a and the other end surfaces 24c and 25c, respectively. The connecting portions 24d and 25d are curved so as to smoothly connect the bottom surfaces 24a and 25a and the one end surfaces 24b and 25b and the bottom surfaces 24a and 25a and the other end surfaces 24c and 25c, respectively.

  The depth of the pair of plug-side grooves 24 and 25 (that is, the distance from the outer peripheral surface 21a to the bottom surfaces 24a and 25a) is appropriately set according to the design requirements (liquid supply capability) of the valve 20.

<Valve body>
As shown in FIG. 2, the valve body 22 has a cylindrical shape that is coaxial with the plug member 21 and extends in the axial direction. For example, the valve body 22 is made of a resin material such as Duracon or ultra-high molecular weight polyethylene (UPE).

  The valve body 22 is formed with an insertion hole 32 for inserting the plug member 21, a liquid inflow path 36 for allowing the liquid to flow into the inside, and a liquid outflow path 37 for allowing the liquid to flow to the outside. The liquid inflow path 36 and the liquid outflow path 37 are arranged in a straight line along a direction orthogonal to the axial direction (hereinafter referred to as “radial direction”) so that the outer peripheral surface 22a of the valve main body 22 and the insertion hole 32 communicate with each other. It is out.

  The liquid inflow path 36 is connected to the upstream supply path 11a (see FIG. 1). As a result, the liquid is supplied from the liquid supply source 10 to the inside of the valve 20 via the upstream supply path 11 a and the liquid inflow path 36.

  The liquid outflow path 37 is connected to the downstream supply path 11b (see FIG. 1). Accordingly, the liquid is supplied from the inside of the valve 20 toward the application unit 40 via the liquid outflow path 37 and the downstream supply path 11b.

  As shown in FIG. 5, the opening communicating with the insertion hole 32 in the liquid inflow path 36 constitutes a liquid inflow port 36 a. An opening communicating with the insertion hole 32 in the liquid outflow passage 37 constitutes a liquid outlet 37a.

  A pair of flat contact surfaces 22 b and 22 c are formed on the outer peripheral surface 22 a of the valve body 22. The contact surface 22b is disposed on the liquid inflow path 36 side of the outer peripheral surface 22a. The contact surface 22c is disposed on the liquid outflow path 37 side of the outer peripheral surface 22a. The pair of contact surfaces 22b and 22c have the same shape.

  As shown in FIG. 2, a pair of bearings 33 a and 33 b separated in the axial direction are provided on the inner wall surface of the insertion hole 32 of the valve body 22. The bearing 33 a is disposed on the one end face 21 </ b> A side of the plug member 21. The bearing 33b is disposed on the other end surface 21B side of the plug member 21. The valve body 22 holds the plug member 21 via bearings 33a and 33b. Thereby, the plug member 21 can be easily rotated with respect to the valve body 22 by the driving device 30.

  On the inner wall surface of the insertion hole 32 of the valve body 22, a pair of seal members 26 and 27 are provided that are separated in the axial direction across the liquid inflow path 36 and the liquid outflow path 37. The pair of seal members 26 and 27 are disposed between the inner wall surface of the insertion hole 32 of the valve body 22 and the outer peripheral surface 21 a of the plug member 21. For example, an O-ring or the like can be used as the seal members 26 and 27.

  A pair of main body side groove portions 34 and 35 corresponding to the plug side groove portions 24 and 25 are formed on the inner wall surface of the insertion hole 32 of the valve main body 22. The pair of main body side groove portions 34 and 35 are formed at substantially the same height as the plug side groove portions 24 and 25 of the plug member 21 inserted into the insertion hole 32. That is, at least a part of the main body side groove portions 34 and 35 and the plug side groove portions 24 and 25 overlap in the radial direction. Therefore, the main body side groove portions 34 and 35 and the plug side groove portions 24 and 25 can communicate with each other by the turning operation of the plug member 21.

  The regions where the plug side grooves 24 and 25 and the main body side grooves 34 and 35 are formed are sealed by a pair of seal members 26 and 27. As a result, even if the liquid flows between the plug-side groove portions 24 and 25 and the main body-side groove portions 34 and 35, the flowing liquid leaks to the outside (that is, the axial direction outside the pair of seal members 26 and 27). Can be avoided.

  A pair of cylindrical pipe screws 38 and 39 are attached to the outer peripheral surface 22 a of the valve body 22. The inner surface of the pipe screw 38 constitutes a part of the liquid inflow path 36. The inner surface of the pipe screw 39 constitutes a part of the liquid outflow passage 37.

  Threaded portions 38a and 39a are formed at the bases of the pipe screws 38 and 39 (portions on the outer peripheral surface 22a side of the valve body 22), respectively. Nuts 28 and 29 are attached to the screw portions 38a and 39a, respectively. The nuts 28 and 29 are in contact with the contact surfaces 22b and 22c, respectively. By adjusting the tightening amount of the nuts 28 and 29 to the screw portions 38a and 39a, the pressing force of the nuts 28 and 29 against the contact surfaces 22b and 22c can be adjusted.

As described above, since the valve body 22 is formed of a resin material such as Duracon or UPE, when the nuts 28 and 29 are tightened into the screw portions 38a and 39a, the contact surfaces 22b and 22c are pressed by the nuts 28 and 29. And displaced inward in the radial direction.
On the other hand, when the nuts 28 and 29 are loosened, the displacement of the contact surfaces 22b and 22c in the radial direction is reduced. That is, when the nuts 28 and 29 are loosened, the contact surfaces 22b and 22c return to the positions before the nuts 28 and 29 are tightened.

For example, by adjusting the tightening amounts of the nuts 28 and 29, the contact surfaces 22b and 22c are pressed and displaced radially inward by a predetermined amount, whereby the outer peripheral surface 21a of the plug member 21 and the liquid inlet The contact state (sealed state) between 36a and the liquid outlet 37a can be easily adjusted.
In addition, since the valve body 22 is made of resin, even if the contact surfaces 22b and 22c are displaced radially inward, the contact resistance with respect to the metal plug member 21 (insertion hole 32) is increased. It is suppressed. Therefore, the plug member 21 inserted into the insertion hole 32 can be smoothly rotated.

<Flow channel disconnected state (second state)>
As shown in FIG. 4, the plug-side groove portions 24, 25 and the main body-side groove portions 34, 35 are arranged in parallel with each other by the turning operation of the plug member 21. At this time, the liquid inlet 36 a and the liquid outlet 37 a are closed by the outer peripheral surface 21 a of the plug member 21. Therefore, the liquid inlet 36a and the liquid outlet 37a are not bypassed (connected) by the plug side grooves 24 and 25 (hereinafter referred to as “second state”) between the main body side grooves 34 and 35. .

  For example, by adjusting the tightening amount of the nuts 28 and 29, the contact surfaces 22b and 22c are pressed and displaced radially inward by a predetermined amount, so that in the second state, the outer peripheral surface 21a and the liquid flow Since the inlet 36a and the liquid outlet 37a are in close contact with each other, the space S surrounded by the plug side grooves 24 and 25 and the main body side grooves 34 and 35 can be reliably sealed. That is, the liquid held in the space S does not flow into the liquid outflow path 37. Further, the liquid does not flow into the space S from the liquid inflow path 36.

  Thus, in the second state, the liquid supply path 11 (see FIG. 1) can be closed. Therefore, in the second state, it is possible to block the liquid flow from the upstream supply path 11a side to the downstream supply path 11b side shown in FIG.

<Connection state of flow path (first state)>
FIG. 5 is a diagram illustrating a state in which the plug member 21 in the second state is rotated 90 degrees about the axis C1. In FIG. 5, the plug member 21 in the second state is rotated 90 degrees counterclockwise so that the plug-side groove 24 faces the liquid inlet 36a and the plug-side groove 25 faces the liquid outlet 37a. Shows the case.

  As shown in FIG. 5, the plug-side groove portions 24, 25 and the main body-side groove portions 34, 35 are arranged so as to cross each other by the turning operation of the plug member 21. At this time, the plug-side grooves 24 and 25 face the liquid inlet 36a and the liquid outlet 37a, respectively. Thereby, the closed state of the liquid inflow port 36a and the liquid outflow port 37a by the outer peripheral surface 21a of the plug member 21 is released. Therefore, the liquid inlet 36a and the liquid outlet 37a and the main body side grooves 34 and 35 are bypassed (connected) by the plug side grooves 24 and 25 (hereinafter referred to as “first state”). Yes.

  The cross section of the main body side grooves 34 and 35 has a curved surface. The outer peripheral surface 21 a of the plug member 21 has a radius of curvature larger than that of the main body side groove portions 34 and 35. Accordingly, in the first state, a gap is generated between the outer peripheral surface 21a of the plug member 21 and the main body side groove portions 34 and 35, so that the main body side groove portions 34 and 35 can function as a liquid flow path.

<Rectification unit>
As shown in FIG. 5, the plug-side grooves 24 and 25 are provided with a rectifying unit 60 that rectifies the liquid flowing in from the liquid inlet 36a in the first state so as not to spill. The rectifying unit 60 faces the liquid inflow port 36a in the first state. That is, the rectifying unit 60 is disposed at a position overlapping the liquid inlet 36a in the radial direction in the first state.

  The rectifying unit 60 includes a through hole 61 formed in the plug member 21. In the first state, only one through hole 61 is disposed at a position facing the liquid inlet 36a. As shown in FIG. 6, the through hole 61 has a circular shape when viewed from the radial direction. In FIG. 6, the peripheral portion of the plug-side groove portion 24 of the plug member 21 is illustrated, and illustration of the one end surface 21A and the other end surface 21B side is omitted.

  As shown in FIG. 5, the through hole 61 linearly penetrates the plug member 21 at a position overlapping the axis C1. That is, the through hole 61 opens in the radial direction of the plug member 21. In the first state, the through holes 61 are lined up along the radial direction along with the liquid inflow path 36 and the liquid outflow path 37. The inner diameter of the through hole 61 is substantially the same as the inner diameter of the liquid inflow path 36 and the liquid outflow path 37.

  In the first state, the liquid supplied from the upstream supply path 11 a (see FIG. 1) flows into the plug-side groove portion 24 via the liquid inlet 36 a of the liquid inflow path 36. The liquid that has flowed into the plug-side groove 24 flows into the plug-side groove 25 via the main body-side grooves 34 and 35. In addition, the liquid that has flowed into the plug-side groove 24 flows into the plug-side groove 25 via the through hole 60. The liquid that has flowed into the plug-side groove 25 flows from the liquid outlet 37a into the liquid outlet 37. The liquid that has flowed into the liquid outflow path 37 is supplied to the application unit 40 (see FIG. 1) via the downstream supply path 11b.

  Accordingly, the liquid held in the space S surrounded by the plug-side groove portions 24 and 25 and the main body side groove portions 34 and 35 in the second state is changed into the main body side groove portions 34 and 35 and the plug side groove portion 24, 25, the liquid can be introduced into the liquid outlet 37a. That is, the main body side grooves 34 and 35 and the plug side grooves 24 and 25 forming the liquid holding space (space S) in the second state, and the liquid inflow path 36 and the liquid outflow path 37 in the first state. It can function as a flow path to be bypassed.

  Therefore, it is possible to suppress the liquid from remaining in the gap (space S) between the plug member 21 and the valve main body 22 for a long time in the second state. As a result, the generation of foreign matter due to the residual liquid in the gap is suppressed, and the occurrence of problems such as the foreign matter flowing out from the liquid outlet 37a to the application unit 40 side (see FIG. 1) with the opening and closing of the valve 20 is suppressed. can do.

As described above, the valve 20 according to the present embodiment is a plug valve capable of closing the liquid supply path 11 by the turning operation of the plug member 21 attached to the valve body 22, and the plug member 21 is formed on the outer surface. The valve body 22 includes a liquid inflow port 36a through which liquid flows in, a liquid outflow port 37a through which liquid flows out, and a main body side groove facing the outer surface of the plug member 21. 34, 35, and in accordance with the rotational movement of the plug member 21, the liquid inlet 36 a, the liquid outlet 37 a, and the main body side grooves 34, 35 are bypassed by the plug side grooves 24, 25. The first state is switched to the second state where the liquid inlet 36a, the liquid outlet 37a, and the main body side grooves 34, 35 are not bypassed by the plug side grooves 24, 25. It is configured urchin, the plug-side groove portions 24 and 25, in the first state, in which the rectifier unit 60 is provided for rectifying so as not Yodoma liquid that has flowed from the liquid inlet 36a.
According to this configuration, the plug-side grooves 24 and 25 are provided with the rectifying unit 60 that rectifies the liquid flowing in from the liquid inflow port 36a in the first state so that the liquid does not spill in the first state. Even if the liquid flowing in from the inflow port 36a collides with the plug side groove portion 24 once when flowing into the liquid outflow port 37a via the main body side groove portions 34, 35 and the plug side groove portions 24, 25, It can be rectified so that it does not hesitate. Therefore, the generation of bubbles can be suppressed.

  Further, since the rectifying unit 60 faces the liquid inlet 36a in the first state, the rectifying unit 60 does not face the liquid inlet 36a in the first state (that is, the rectifying unit 60 is not in contact with the liquid inlet 36a). Compared with the case where it is arranged at a position avoiding 36a), the liquid flowing in from the liquid inflow port 36a in the first state can easily flow toward the rectifying unit 60, so that the rectifying effect by the rectifying unit 60 is more effective. Can be demonstrated. Therefore, generation | occurrence | production of a bubble can be suppressed more reliably.

  In addition, since the rectifying unit 60 includes the through hole 61 formed in the plug member 21, the liquid flowing in from the liquid inflow port 36 a in the first state passes through the through hole 61, and thus the liquid in the plug side groove 24. Can be avoided. Therefore, generation | occurrence | production of a bubble can be suppressed more reliably. In addition, the liquid flowing in from the liquid inflow port 36a not only flows into the liquid outflow port 37a via the main body side groove portions 34 and 35 and the plug side groove portions 24 and 25, but also passes through the through hole 61 to reach the liquid outflow port. Since it flows into 37a, the flow rate of the liquid can be increased.

  In addition, since only one through hole 61 is disposed at a position facing the liquid inlet 36a in the first state, the through hole 61 is not disposed at a position facing the liquid inlet 36a in the first state. Compared to the case (that is, the case where the through hole 61 is disposed at a position avoiding the liquid inlet 36a), the liquid that has flowed from the liquid inlet 36a in the first state easily passes through the through hole 61. The rectification effect by the through-hole 61 can be exhibited more effectively. Therefore, generation | occurrence | production of a bubble can be suppressed more reliably. In addition, since only one through hole 61 needs to be formed in the plug member 21, the processing cost of the plug member 21 can be reduced compared to the case where a plurality of through holes are formed in the plug member 21.

  In addition, the coating apparatus 100 according to the present embodiment includes a coating unit 40 that applies a liquid to a semiconductor substrate (an object to be coated), a liquid supply path 11 that supplies the liquid to the coating unit 40, and a liquid supply path 11. In the coating apparatus 100 provided with the provided plug valve, since the valve 20 is provided as the plug valve, the liquid supply path 11 is opened and closed using the valve 20, thereby suppressing the generation of bubbles. can do. Therefore, generation | occurrence | production of the defect by a bubble is suppressed and the reliable coating apparatus 100 which can apply | coat a liquid with respect to a to-be-coated object favorably can be provided.

(Modification of the plug member according to the first embodiment)
Next, modified examples of the plug member 21 according to the first embodiment will be described with reference to FIGS.

FIG. 7 is a perspective view corresponding to FIG. 6 showing a first modification of the plug member 21 according to the first embodiment.
As shown in FIG. 7, in this modification, the aspect of the plug-side groove portion 124 is particularly different from the plug member 21 according to the first embodiment. In FIG. 7, the same components as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted. Since the pair of plug-side groove portions 124 and 125 have the same shape, only one plug-side groove portion 124 will be described, and description of the other plug-side groove portion 125 (see FIG. 11) will be omitted.

  The plug-side groove portion 124 has a rectangular bottom surface 24a extending in a direction parallel to the tangent to the outer peripheral surface 21a, one end surface 24b connected to one end side of the bottom surface 24a, and the other end surface 24c connected to the other end side of the bottom surface 24a, It has. The bottom surface 24a, the one end surface 24b, and the other end surface 24c are each formed flat.

  A connecting portion 124d having a right angle is formed between the bottom surface 24a and the one end surface 24b and between the bottom surface 24a and the other end surface 24c. The connecting portion 124d is bent so as to connect the bottom surface 24a and the one end surface 24b and the bottom surface 24a and the other end surface 24c at right angles.

FIG. 8 is a perspective view corresponding to FIG. 6 and showing a second modification of the plug member 21 according to the first embodiment.
As shown in FIG. 8, in this modification, the aspect of the through-hole 161 differs especially with respect to the rectification | straightening part 60 which concerns on a 1st modification. In FIG. 8, the same components as those of the first modification are denoted by the same reference numerals, and detailed description thereof is omitted.

  The through-hole 161 has an oval shape extending in the longitudinal direction of the bottom surface 24a when viewed from the radial direction. Most of the bottom surface 24 a is an opening region of the through hole 161. That is, the opening area of the through hole 161 is larger than the opening area of the through hole 61.

  According to this modification, the opening area of the through-hole 161 is large, and the liquid that has flowed from the liquid inlet 36a in the first state easily passes through the through-hole 161. Therefore, the rectifying effect by the through-hole 161 is further increased. It can be demonstrated effectively. Therefore, generation | occurrence | production of a bubble can be suppressed more reliably. In addition, since the liquid flowing in from the liquid inlet 36a passes through the through-hole 161 and flows into the liquid outlet 37a, the flow rate of the liquid can be increased.

FIG. 9 is a perspective view corresponding to FIG. 6 and showing a third modification of the plug member 21 according to the first embodiment.
As shown in FIG. 9, in this modification, the aspect of the plug side groove part 224 differs especially with respect to the plug member 21 which concerns on 1st Embodiment. In FIG. 9, the same components as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted. In addition, since a pair of plug side groove part has the same shape, respectively, one plug side groove part 224 is demonstrated and description about the other plug side groove part (not shown) is abbreviate | omitted.

  The plug-side groove 224 has a trapezoidal bottom surface 224a extending in a direction parallel to the tangent to the outer peripheral surface 21a, one end surface 224b connected to one end side of the bottom surface 224a, the other end surface 224c connected to the other end side of the bottom surface 224a, It has. The other end surface 224c has a trapezoidal shape in which the bottom surface 224a is inverted in the axial direction. The other end surface 224c is inclined so as to be separated from the one end surface 224b toward the radially outer side. The bottom surface 224a, the one end surface 224b, and the other end surface 224c are each formed flat.

  A connecting portion 224d having a right angle shape is formed between the bottom surface 224a and the other end surface 224c. The connecting portion 224d is bent so as to connect the bottom surface 224a and the other end surface 224c at a right angle. A through hole 61 is formed in the middle of the connecting portion 224d. That is, the connecting part 224 d is divided through the through hole 61.

(Second Embodiment)
Hereinafter, a second embodiment of the present invention will be described with reference to FIGS. 10 and 11.
FIG. 10 is a perspective view corresponding to FIG. 6 showing the plug member 21 according to the second embodiment.
As shown in FIG. 10, in this embodiment, the aspect of the rectification | straightening part 260 differs especially with respect to 1st Embodiment. In FIG. 10, the same components as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

  As shown in FIG. 11, the plug side groove portion 124 is provided with a rectifying portion 260 that rectifies the liquid flowing in from the liquid inlet 36a in the first state so as not to spill. The rectifying unit 60 includes a plurality of (for example, three in this embodiment) through holes 261 and 262 (one through hole 261 and two through holes 262) formed in the plug member 21. The plurality of through holes 261 and 262 are arranged at positions facing the liquid inflow port 36a in the first state.

  The plurality of through holes 261 and 262 are adjacent to the first through hole 261 in the circumferential direction of the plug member 21 and one first through hole 261 disposed at a position facing the liquid inlet 36 a in the first state. And two second through holes 262 arranged at positions. As shown in FIG. 10, the through holes 261 and 262 have a circular shape when viewed from the radial direction. The opening areas of the through holes 261 and 262 have substantially the same size.

  As shown in FIG. 11, the first through hole 261 passes through the plug member 21 linearly at a position overlapping the axis C1. That is, the first through hole 261 opens in the radial direction of the plug member 21. In the first state, the first through holes 261 are aligned along the radial direction along with the liquid inflow path 36 and the liquid outflow path 37. The inner diameter of the first through hole 261 is slightly smaller than the inner diameters of the liquid inflow path 36 and the liquid outflow path 37.

  Each of the second through holes 262 passes through the plug member 21 linearly at a position avoiding the axis C1. In other words, each second through hole 262 opens in a direction parallel to the first through hole 261 at a position adjacent to the first through hole 261. The inner diameter of the second through hole 262 is substantially the same as the inner diameter of the first through hole 261.

  In the first state, the liquid that has flowed into the plug-side groove 124 via the liquid inlet 36 a of the liquid inflow path 36 flows into the plug-side groove 125 via the main body-side grooves 34 and 35. In addition, the liquid that has flowed into the plug-side groove 124 flows into the plug-side groove 125 via the plurality of through holes 261 and 262. The liquid that has flowed into the plug-side groove 125 flows from the liquid outlet 37a to the liquid outlet 37, and is supplied to the application unit 40 (see FIG. 1).

  As described above, according to the present embodiment, a plurality of through holes 261 and 262 are arranged at positions facing the liquid inlet 36a in the first state, and thus only one through hole is arranged. In comparison, since the liquid flowing in from the liquid inlet 36a in the first state is likely to pass through the plurality of through holes 261, 262, the rectifying effect by the plurality of through holes 261, 262 can be more effectively exhibited. it can. Therefore, generation | occurrence | production of a bubble can be suppressed more reliably. In addition, the liquid flowing in from the liquid inflow port 36a not only flows into the liquid outflow port 37a via the main body side groove portions 34 and 35 and the plug side groove portions 124 and 125 but also passes through the plurality of through holes 261 and 262. Since the liquid flows into the liquid outlet 37a, the flow rate of the liquid can be increased.

  The plurality of through holes 261 and 262 are adjacent to the first through hole 261 in the circumferential direction of the plug member 21 and the first through hole 261 disposed at a position facing the liquid inflow port 36a in the first state. The second through-hole 262 arranged at the position includes the plurality of through-holes 261 and 262 in the first state from the liquid inflow port 36a as compared with the case where the plurality of through-holes 261 and 262 are randomly arranged in the plug member 21. Since the inflowing liquid easily passes through the first through hole 261 and the second through hole 262 equally, the rectification effect by the plurality of through holes 261 and 262 can be more effectively exhibited. Therefore, generation | occurrence | production of a bubble can be suppressed more reliably.

  In the present embodiment, the example in which the rectifying unit 260 includes the three through holes 261 and 262 (one through hole 261 and two through holes 262) has been described, but the present invention is not limited thereto. For example, the rectification | straightening part may be provided with the several through-hole of two or four or more.

(Third embodiment)
Hereinafter, a third embodiment of the present invention will be described with reference to FIGS.
FIG. 12 is a perspective view corresponding to FIG. 6 showing the plug member 21 according to the third embodiment.
As shown in FIG. 12, in this embodiment, the aspect of the rectification | straightening part 360 differs especially with respect to 1st Embodiment. In FIG. 12, the same components as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

  As shown in FIG. 13, the plug-side groove 124 is provided with a rectifying unit 360 that rectifies the liquid flowing in from the liquid inflow port 36 a in the first state so as not to spill. In the first state, the rectifying unit 360 includes a partition unit 361 disposed at a position facing the liquid inlet 36a, and a plurality of (for example, two in the present embodiment) through-holes 362 formed in the plug member 21. 363. The plurality of through-holes 362 and 363 have a third insertion hole 362 disposed at a position adjacent to the partition portion 361 in the circumferential direction of the plug member 21 and a third penetration through the partition portion 361 in the circumferential direction of the plug member 21. A fourth through hole 363 disposed on the opposite side of the hole 362.

  As shown in FIG. 12, each through-hole 362, 363 has a circular shape when viewed from the radial direction. The opening areas of the through holes 362 and 363 have substantially the same size. Most of the bottom surface 24 a is an opening region of the through holes 362 and 363. That is, the opening areas of the through holes 362 and 363 are larger than the opening areas of the plurality of through holes 261 and 262.

  As shown in FIG. 13, the partition 361 extends linearly in the radial direction of the plug member 21 at a position overlapping the axis C1. That is, the partition portion 361 forms a partition that partitions the third through hole 362 and the fourth through hole 363 in the plug member 21. The thickness of the partition portion 361 is sufficiently smaller than the inner diameters of the third through hole 362 and the fourth through hole 363.

  Each through-hole 362, 363 penetrates the plug member 21 linearly at a position avoiding the axis C1. That is, the through holes 362 and 363 are opened in a direction parallel to the partition wall 361 at positions adjacent to the partition wall 361. The inner diameter of the third through hole 362 is substantially the same as the inner diameter of the fourth through hole 363.

  In the first state, the liquid that has flowed into the plug-side groove 124 via the liquid inlet 36 a of the liquid inflow path 36 flows into the plug-side groove 125 via the main body-side grooves 34 and 35. In addition, the liquid that has flowed into the plug-side groove 124 flows into the plug-side groove 125 via the plurality of through holes 362 and 363. The liquid that has flowed into the plug-side groove 125 flows from the liquid outlet 37a to the liquid outlet 37, and is supplied to the application unit 40 (see FIG. 1).

  As described above, according to the present embodiment, the rectifying unit 360 further includes the partition part 361 disposed at a position facing the liquid inlet 36a in the first state, so that the liquid inlet in the first state is provided. Since the liquid flowing in from 36a is diverted in the circumferential direction of the plug member 21 from the partition 361, the diverted liquid is likely to flow evenly in the circumferential direction of the plug member 21, so that the rectifying effect is more effectively exhibited. Can do. Therefore, generation | occurrence | production of a bubble can be suppressed more reliably.

  A plurality of through holes 362 and 363 sandwich the partition part 361 in the circumferential direction of the plug member 21 and the third through hole 362 disposed at a position adjacent to the partition part 361 in the circumferential direction of the plug member 21. Including the fourth through hole 363 disposed on the opposite side of the third through hole 362, so that the liquid flowing in from the liquid inflow port 36a in the first state starts from the partition portion 361 and the plug member 21 Since the liquid that is diverted in the circumferential direction can easily pass through the third through hole 362 and the fourth through hole 363 evenly, the rectification effect by the plurality of through holes 362 and 363 can be more effectively exhibited. it can. Therefore, generation | occurrence | production of a bubble can be suppressed more reliably.

  The opening areas of the through holes 362 and 363 are larger than the opening areas of the plurality of through holes 261 and 262. In the first state, the liquid flowing in from the liquid inlet 36a passes through the through holes 362 and 363. Since it becomes easy, the rectification | straightening effect by the through-holes 362 and 363 can be exhibited more effectively. Therefore, generation | occurrence | production of a bubble can be suppressed more reliably. In addition, since the liquid flowing in from the liquid inlet 36a passes through the through holes 362 and 363 and flows into the liquid outlet 37a, the flow rate of the liquid can be increased.

(Modification of the plug member according to the third embodiment)
Next, a modification of the plug member 21 according to the third embodiment will be described with reference to FIGS.

FIG. 14 is a perspective view corresponding to FIG. 6 illustrating a first modification of the plug member 21 according to the third embodiment.
As shown in FIG. 14, in this modification, the aspect of the plug side groove part 324 and the partition part 365 differs especially with respect to the plug member 21 which concerns on 3rd Embodiment. In FIG. 14, the same components as those in the third embodiment are denoted by the same reference numerals, and detailed description thereof is omitted. Since the pair of plug-side groove portions 324 and 325 have the same shape, only one plug-side groove portion 324 will be described, and description of the other plug-side groove portion 325 (see FIG. 15) will be omitted.

  The plug-side groove 324 includes a bottom surface 324a that is bent and extended in the direction parallel to the tangent to the outer peripheral surface 21a, one end surface 324b that is continuous with one end side of the bottom surface 324a, and the other end surface 324c that is continuous with the other end side of the bottom surface 324a. It is equipped with.

  As shown in FIG. 15, the bottom surface 324a includes a first bottom surface 324e and a second bottom surface 324e disposed adjacent to each other in the circumferential direction of the plug member 21 so that a boundary portion 365a is formed at a position facing the liquid inlet port 36a. A bottom surface 324f. The boundary portion 365a extends linearly in a direction parallel to the axis C1. The first bottom surface 324e and the second bottom surface 324f extend so as to be gently curved so as to form a recess that is recessed radially inward as the distance from the boundary portion 365a increases.

  As shown in FIG. 14, the first bottom surface 324 e and the second bottom surface 324 f are formed in a curved surface shape that is recessed radially inward. The one end surface 324b and the other end surface 324c are each formed flat.

  A connecting portion 324d having a right angle is formed between the bottom surface 324a and the one end surface 324b and between the bottom surface 324a and the other end surface 324c. The connecting portion 324d is bent so as to connect the bottom surface 324a and the one end surface 324b and the bottom surface 324a and the other end surface 324c at right angles. The connecting portion 324d is bent at a portion intersecting with the boundary portion 365a and is gently curved so as to protrude radially inward along the edges of the first bottom surface 324e and the second bottom surface 324f.

  A boundary portion 365a is formed in the partition portion 365. In the cross-sectional view of FIG. 15, the partition portion 365 has a sharp shape with the boundary portion 365a as a tip. The boundary portion 365a is disposed so as to overlap with the center position of the liquid inflow port 36a in the radial direction.

  According to this modification, the liquid that has flowed in from the liquid inlet 36a in the first state is divided in the circumferential direction of the plug member 21 from the boundary portion 365a, and the divided liquid is the third through hole 362 and the fourth through hole. Therefore, the rectifying effect by the plurality of through holes 362 and 363 can be more effectively exhibited. Therefore, generation | occurrence | production of a bubble can be suppressed more reliably.

FIG. 16 is a perspective view corresponding to FIG. 6 and showing a second modification of the plug member 21 according to the third embodiment.
As shown in FIG. 16, in this modification, the aspect of the through hole 366 is particularly different from the plug member 21 according to the first modification of the third embodiment. In FIG. 16, the same components as those in the first modification of the third embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

  Only one through hole 366 is disposed at a position overlapping the partition portion 365 when viewed from the radial direction. When viewed from the radial direction, the through hole 366 has a contour along the curved surfaces of the first bottom surface 324e and the second bottom surface 324f. The through hole 366 is formed in the middle of the boundary portion 365a. That is, the boundary portion 365 a is divided through the through hole 366.

(Fourth embodiment)
Hereinafter, a fourth embodiment of the present invention will be described with reference to FIGS. 17 and 18.
FIG. 17 is a perspective view corresponding to FIG. 6 showing the plug member 21 according to the fourth embodiment.
As shown in FIG. 17, in this embodiment, the aspect of the rectification | straightening part 460 differs especially with respect to 1st Embodiment. 17 and 18, the same reference numerals are given to the same components as those in the first embodiment, and the detailed description thereof will be omitted.

  As shown in FIG. 17, the rectifying unit 460 includes recesses 462 and 463 formed in the plug member 21. As shown in FIG. 18, in the first state, the recesses 462 and 463 are arranged adjacent to each other in the circumferential direction of the plug member 21 so that a boundary portion 461 is formed at a position facing the liquid inflow port 36a. A first recess 462 and a second recess 463 are provided.

  As shown in FIG. 17, when viewed from the radial direction, each of the recesses 462 and 463 has a circular shape. As shown in FIG. 18, the first concave portion 462 and the second concave portion 463 extend so as to be gently curved so as to form a concave portion that is recessed inward in the radial direction as the distance from the boundary portion 461 increases. That is, the 1st recessed part 462 and the 2nd recessed part 463 are formed in the curved surface form which makes a convex in radial direction inner side. In the cross-sectional view of FIG. 18, the boundary portion 461 has a sharp shape protruding outward in the radial direction. The boundary portion 461 is disposed so as to overlap with the center position of the liquid inflow port 36a in the radial direction.

  In the first state, the liquid that has flowed into the recesses 462 and 463 via the liquid inlet 36 a of the liquid inflow path 36 flows into the plug-side groove 125 via the main body side grooves 34 and 35. That is, each recessed part 462,463 functions as a plug side groove part. At this time, the liquid that has flowed into the recesses 462 and 463 is diverted in the circumferential direction of the plug member 21 starting from the boundary 461, flows along the curved surface of the recesses 462 and 463, and passes through the main body side grooves 34 and 35. Then, it flows into the plug side groove 25. The liquid that has flowed into the plug-side groove 25 flows from the liquid outlet 37a to the liquid outlet 37, and is supplied to the application unit 40 (see FIG. 1).

  As described above, according to the present embodiment, since the rectifying unit 460 includes the recesses 462 and 463 formed in the plug member 21, the liquid flowing in from the liquid inlet 36 a in the first state is the recess 462. Since the liquid enters the 463, it is possible to avoid the liquid from stagnation in the plug-side groove 24. Therefore, generation | occurrence | production of a bubble can be suppressed more reliably.

  Further, in the first state, the first recesses 462 arranged adjacent to each other in the circumferential direction of the plug member 21 so that the boundary portion 461 is formed at a position facing the liquid inlet 36a in the first state. By including the second recess 463, the liquid flowing in from the liquid inflow port 36a in the first state is diverted in the circumferential direction of the plug member 21 from the boundary portion 461, and the diverted liquid is in contact with the first recess 462. Since it becomes easy to enter into the 2nd recessed part 463 equally, the rectification | straightening effect by the recessed part 462,463 can be exhibited more effectively. Therefore, generation | occurrence | production of a bubble can be suppressed more reliably.

  The present invention is not limited to the above-described embodiment, and can be appropriately changed without departing from the spirit or concept of the invention that can be read from the claims and the entire specification. For example, in the above embodiment, the case where the entire valve body 22 is made of a resin material has been described as an example. However, the present invention is not limited to this, and only a part of the valve body 22 is made of a resin material. May be. For example, in the valve body 22, at least a portion that needs to be deformed by pressing (in the vicinity of the liquid inlet port 36a and the liquid outlet port 37a) may be made of a resin material, and the other portion may be made of a metal material. .

  Moreover, in the said embodiment, although the case where the plug valve of this invention was applied to the coating device 100 which supplies the liquid to the application part 40 via the liquid supply path 11 from the liquid supply source 10 was mentioned as an example, to this, There is no limit.

For example, the plug valve of the present invention may be applied as a valve that closes a liquid supply path of a liquid supply apparatus that supplies a predetermined liquid from a liquid supply source to factory production equipment (liquid supply destination). According to this, since the liquid can be supplied to the liquid supply destination by opening and closing the liquid supply path using the plug valve of the present invention, the generation of bubbles can be suppressed. Therefore, it is possible to provide a highly reliable liquid supply method in which bubbles are prevented from flowing into the liquid supply destination. Further, it is possible to provide a highly reliable liquid supply apparatus in which bubbles are prevented from flowing into the liquid supply destination.
In this case, the type of liquid supplied to the liquid supply destination is not particularly limited, and any liquid may be used as long as it has a relatively high viscosity and may cause a foreign matter. The plug valve of the invention is preferred.

  Moreover, the shape of a pair of plug side groove parts 24 and 25 formed in the outer peripheral surface 21a of the plug member 21 is not restricted to the form mentioned above. 19-21 is a figure which shows the other modification of the plug side groove parts 24 and 25. As shown in FIG.

  For example, the pair of plug-side groove portions 24 and 25 may have a curved surface shape as shown in FIG. 19 or a triangular shape as shown in FIG. A quadrangular shape as shown in FIG.

  In the above-described embodiment, the contact surfaces 22b and 22c are pressed by adjusting the tightening amounts of the nuts 28 and 29, and the outer peripheral surface 21a of the plug member 21, the liquid inlet port 36a, and the liquid outlet port 37a. However, the present invention is not limited to this.

Here, as a modified example of the valve, another embodiment for adjusting the contact state between the outer peripheral surface 21a of the plug member 21 and the liquid inlet 36a and the liquid outlet 37a will be described.
22-24 is a figure which shows the 1st modification-3rd modification of a valve | bulb. 22 to 24, the same members and configurations as those of the above embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

  As shown in FIG. 22, the valve 20 </ b> A according to the first modification is attached by screwing pipe screws 38 and 39 into the valve body 22. In this modification, the valve main body 22 has bolts 41 and 42 attached at positions corresponding to the main body side grooves 34 and 35. The bolts 41 and 42 are screwed into screw holes formed in the valve body 22.

  Since the valve body 22 is formed of a resin material such as Duracon or UPE as described above, when the bolts 41 and 42 are screwed into the screw holes, the valve body 22 is pressed by the bolts 41 and 42 in the radial direction. Displaces inward. On the other hand, when the screwing by the bolts 41 and 42 is loosened, the displacement of the valve body 22 inward in the radial direction is reduced.

  As described above, according to this modification, the valve body 22 is displaced by screwing the bolts 41 and 42 into the screw holes of the valve body 22, so that the outer peripheral surface 21 a of the plug member 21, the liquid inlet 36 a, and the liquid flow The contact state (sealed state) with the outlet 37a can be easily adjusted.

  As shown in FIG. 23, the valve 20 </ b> B according to the second modification is attached by screwing pipe screws 38 and 39 into the valve main body 22. The valve 20B further includes a ring member 43 disposed so as to surround the outer periphery of the valve main body 22. The ring member 43 is obtained by bending a plate-like member into a ring shape. Both ends of the ring member 43 are fixed by screw members 44 with a gap formed. The ring member 43 reduces the inner diameter of the ring member 43 by tightening the screw member 44, and increases the inner diameter of the ring member 43 by loosening the tightening of the screw member 44.

  The valve body 22 is formed from a resin material such as Duracon or UPE as described above. Therefore, the valve main body 22 is pressed and displaced radially inward when the inner diameter of the ring member 43 is reduced by tightening the screw member 44. On the other hand, the valve body 22 is less displaced by increasing the inner diameter of the ring member 43 by loosening the tightening of the screw member 44.

  As described above, according to this modification, the valve main body 22 is displaced by screwing the screw member 44 of the ring member 43, whereby the outer peripheral surface 21a of the plug member 21, the liquid inlet port 36a, and the liquid outlet port 37a. The contact state (sealed state) can be easily adjusted.

  As shown in FIG. 24, the valve 20 </ b> C according to the third modification is attached by screwing pipe screws 38 and 39 into the valve main body 22. The nuts 46 and 47 are screwed into threaded portions provided on the outer surfaces of the pipe screws 38 and 39 via the O-ring 45.

  When the nuts 46 and 47 are screwed in, the O-ring 45 is pressed by being sandwiched between the nuts 46 and 47 and the valve body 22. As a result, the valve body 22 is displaced by being pressed radially inward by the pressed O-ring 45. On the other hand, the valve body 22 is less displaced by loosening the tightening of the nuts 46 and 47 to reduce the pressing amount of the O-ring 45.

  As described above, according to the present modification, the valve body 22 is displaced by screwing the nuts 46 and 47 so that the outer peripheral surface 21a of the plug member 21 is in contact with the liquid inlet 36a and the liquid outlet 37a ( (Sealed state) can be easily adjusted.

  In addition, each component described as embodiment or its modification in the above can be combined suitably, in the range which does not deviate from the meaning of this invention, and some components are combined among several combined components. It is also possible not to use as appropriate.

  EXAMPLES Hereinafter, although an Example demonstrates this invention more concretely, this invention is not limited to a following example.

  The present inventor has the following evaluation that the generation of bubbles can be suppressed by providing the plug side groove portion with a rectifying portion that rectifies the liquid flowing in from the liquid inflow port in the first state. Confirmed by

(Evaluation content)
A valve according to the following comparative example and Examples 1 to 9 is used as a valve for closing a liquid supply path of a liquid supply apparatus that supplies a predetermined liquid from a liquid supply source to the liquid supply destination, and is supplied to the liquid supply destination. The presence / absence of bubbles in the liquid, the weight of the liquid supplied to the liquid supply destination, and the presence / absence of foreign matter in the liquid supplied to the liquid supply destination were evaluated. The viscosity of the liquid supplied to the liquid supply destination was 5 Pa · s. The pressure applied to the valve was 0.4 MPa. The inner diameters of the liquid inflow path and the liquid outflow path of the valve were each 10 mm.

(Comparative example)
The valve of the comparative example used what was not provided with the rectification | straightening part. That is, in the comparative example, no through hole or recess is formed in the plug-side groove. In the comparative example, the volumetric fluid was 1125 μl / sec. Here, “volumetric fluid” means the volume of fluid flowing in the first state.

Example 1
As the valve of Example 1, a valve in which only one through hole was disposed at a position facing the liquid inlet in the first state (first embodiment shown in FIG. 6) was used. In Example 1, the volumetric fluid was 4500 μl / sec.

(Example 2)
In the valve of Example 2, a connecting portion having a right-angled shape is formed between the bottom surface and one end surface and between the bottom surface and the other end surface (first of the first embodiment shown in FIG. 7). Modification) was used. In Example 2, the volumetric fluid was 4500 μl / sec.

(Example 3)
In the valve of Example 3, a through hole having an oval shape extending in the longitudinal direction of the bottom surface when viewed from the radial direction (second modification of the first embodiment shown in FIG. 8) was used. In Example 3, the volumetric fluid was 4500 μl / sec.

Example 4
In the valve of Example 4, the plug-side groove has a trapezoidal bottom surface extending in a direction parallel to the tangent to the outer peripheral surface, one end surface connected to one end side of the bottom surface, and the other end surface connected to the other end side of the bottom surface, (3rd modification of 1st Embodiment shown in FIG. 9) was used. In Example 4, the volumetric fluid was 4500 μl / sec.

(Example 5)
In the valve of Example 5, the plurality of through holes are adjacent to the first through hole in the circumferential direction of the plug member, in the first state, one first through hole disposed at a position facing the liquid inlet. What was provided with the 2nd through-hole arrange | positioned in the position (2nd Embodiment shown in FIG. 10) was used. In Example 5, the volumetric fluid was 3800 μl / sec.

(Example 6)
The valve of Example 6 includes a third insertion hole in which a plurality of through holes are arranged at positions adjacent to the partition portion in the circumferential direction of the plug member, and a third through hole sandwiching the partition portion in the circumferential direction of the plug member. The thing provided with the 4th through-hole arrange | positioned on the opposite side to (3rd Embodiment shown in FIG. 12) was used. In Example 6, the volumetric fluid was 4500 μl / sec.

(Example 7)
The valve of Example 7 used what the partition part made the sharp shape which makes a boundary part a front-end | tip (1st modification of 3rd Embodiment shown in FIG. 14). In Example 7, the volumetric fluid was 4500 μl / sec.

(Example 8)
As the valve of Example 8, a valve in which only one through hole was disposed at a position overlapping the partition portion when viewed from the radial direction (second modification according to the third embodiment shown in FIG. 16) was used. In Example 8, the volumetric fluid was 4500 μl / sec.

Example 9
In the valve of Example 9, the first concave portion and the second concave portion are arranged adjacent to each other in the circumferential direction of the plug member so that the boundary portion is formed at a position facing the liquid inlet in the first state. (4th Embodiment shown in FIG. 17) was used. In Example 9, the volumetric fluid was 2200 μl / sec.

(Evaluation results)
Regarding the evaluation result of “the presence / absence of bubbles” in the liquid supplied to the liquid supply destination (indicated as “bubbles” in Table 1), bubbles must be generated in the liquid supplied to the liquid supply destination. In this case, “◯” indicates that some bubbles are generated, but “Δ” indicates that they are suppressed as compared with the comparative example. That is, “Δ” is a state in which bubbles are difficult to escape.
Regarding the evaluation result of “weight of liquid” supplied to the liquid supply destination (simply described as “weight” in Table 1), the weight of the liquid supplied to the liquid supply destination is three times the value of the comparative example. When it increased more than “◯”, it was evaluated as “Δ” when it increased 1.5 times or more and less than 3 times the value of the comparative example.
Regarding the evaluation result of “existence of foreign matter” in the liquid supplied to the liquid supply destination (indicated as simply “foreign matter” in Table 1), the foreign matter must be generated in the liquid supplied to the liquid supply destination. “◯”, “X” when foreign matter is generated, and “△” when partial foreign matter is observed but suppressed than “×”.
Table 1 shows the evaluation results of the “presence / absence of bubbles”, “weight of liquid”, and “presence / absence of foreign matter”. The presence or absence of bubbles was visually observed. The weight was measured with a general-purpose electronic balance after receiving a liquid that passed in one minute in a cup. Presence / absence of foreign matter was determined using a liquid particle counter.

DESCRIPTION OF SYMBOLS 1 ... Semiconductor substrate (to-be-coated object), 10 ... Liquid supply source, 11 ... Liquid supply path, 20, 20A, 20B, 20C ... Valve (plug valve), 21 ... Plug member, 21a ... Outer peripheral surface, 22 ... Valve body 24, 25, 124, 125, 224, 324, 325 ... plug side groove, 34, 35 ... main body side groove, 36 ... liquid inflow path, 36a ... liquid inlet, 37 ... liquid outflow path, 37a ... liquid outlet , 40 ... coating part, 60, 260, 360, 460 ... rectification part, 61, 161, 366 ... through hole, 100 ... coating device, 261 ... first through hole, 262 ... second through hole, 361, 365 ... partition Part, 362 ... third through hole, 363 ... fourth through hole, 461 ... boundary part, 462 ... first recess, 463 ... second recess

Claims (17)

In the plug valve capable of closing the liquid supply path by the rotation of the plug member attached to the valve body,
The plug member includes a plug-side groove formed on the outer surface,
The valve body includes a liquid inflow port through which the liquid flows in, a liquid outflow port through which the liquid flows out to the outside, and a main body side groove portion facing the outer surface of the plug member,
In accordance with the turning operation of the plug member,
A first state in which a gap between the liquid inlet and the liquid outlet and the main body side groove is bypassed by the plug side groove;
The liquid inlet and the liquid outlet and the main body side groove portion are configured to be switched to a second state that is not bypassed by the plug side groove portion,
The plug-side groove is provided with a rectifying unit that rectifies the liquid flowing in from the liquid inlet so as not to spill in the first state. The plug valve according to claim 1, wherein the rectifying unit faces the liquid inflow port in the first state. The plug valve according to claim 1, wherein the rectifying unit includes a through hole formed in the plug member. The plug valve according to claim 3, wherein only one through hole is disposed at a position facing the liquid inlet in the first state. The plug valve according to claim 3, wherein a plurality of the through holes are arranged at positions facing the liquid inflow port in the first state. In the first state, the plurality of through holes are arranged at positions adjacent to the first through holes in the circumferential direction of the plug member and the first through holes arranged at positions facing the liquid inlet. The plug valve according to claim 5, further comprising: a second through hole. The plug valve according to claim 5, wherein the rectifying unit further includes a partition portion disposed at a position facing the liquid inflow port in the first state. The plurality of through holes include a third through hole disposed at a position adjacent to the partition portion in the circumferential direction of the plug member, and the third through hole sandwiching the partition portion in the circumferential direction of the plug member. The plug valve according to claim 7, further comprising a fourth through hole disposed on the opposite side. The plug valve according to any one of claims 1 to 8, wherein the rectifying unit includes a recess formed in the plug member. In the first state, the recess includes a first recess and a second recess arranged adjacent to each other in the circumferential direction of the plug member so that a boundary portion is formed at a position facing the liquid inlet. The plug valve according to claim 9. In the first state, the main body side groove and the plug side groove are arranged to cross each other,
The plug valve according to any one of claims 1 to 10, wherein in the second state, the main body side groove and the plug side groove are arranged in parallel to each other. The plug valve according to any one of claims 1 to 11, wherein the valve main body is made of resin at least in the vicinity of the liquid inlet and the liquid outlet. The plug valve according to claim 12, wherein the valve main body is pressed against the outer surface of the plug member at a vicinity of the liquid inlet and the liquid outlet. The plug member has a cylindrical shape in which the plug side groove is formed,
The valve body has a curved cross section of the body side groove portion,
The plug valve according to any one of claims 1 to 13, wherein an outer peripheral surface of the plug member has a radius of curvature larger than that of the main body side groove portion. In a method of supplying liquid from a liquid supply source to a liquid supply destination by opening and closing a valve provided in the liquid supply path,
The liquid supply method using the plug valve as described in any one of Claims 1-14 as said valve | bulb. In a liquid supply apparatus that supplies liquid from a liquid supply source to a liquid supply destination by opening and closing a valve provided in the liquid supply path,
The liquid supply apparatus provided with the plug valve as described in any one of Claims 1-14 as said valve | bulb. In an application apparatus comprising: an application unit that applies a liquid to an object to be applied; a liquid supply path that supplies the liquid to the application unit; and a valve that is provided in the liquid supply path.
The coating device provided with the plug valve as described in any one of Claims 1-14 as said valve | bulb.

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