JP2018041788A5 - - Google Patents

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Publication number
JP2018041788A5
JP2018041788A5 JP2016173537A JP2016173537A JP2018041788A5 JP 2018041788 A5 JP2018041788 A5 JP 2018041788A5 JP 2016173537 A JP2016173537 A JP 2016173537A JP 2016173537 A JP2016173537 A JP 2016173537A JP 2018041788 A5 JP2018041788 A5 JP 2018041788A5
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JP
Japan
Prior art keywords
piezoelectric
thin film
piezoelectric element
stacked
during
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2016173537A
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English (en)
Japanese (ja)
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JP2018041788A (ja
JP6908322B2 (ja
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Priority to JP2016173537A priority Critical patent/JP6908322B2/ja
Priority claimed from JP2016173537A external-priority patent/JP6908322B2/ja
Publication of JP2018041788A publication Critical patent/JP2018041788A/ja
Publication of JP2018041788A5 publication Critical patent/JP2018041788A5/ja
Application granted granted Critical
Publication of JP6908322B2 publication Critical patent/JP6908322B2/ja
Active legal-status Critical Current
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JP2016173537A 2016-09-06 2016-09-06 圧電素子 Active JP6908322B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2016173537A JP6908322B2 (ja) 2016-09-06 2016-09-06 圧電素子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016173537A JP6908322B2 (ja) 2016-09-06 2016-09-06 圧電素子

Publications (3)

Publication Number Publication Date
JP2018041788A JP2018041788A (ja) 2018-03-15
JP2018041788A5 true JP2018041788A5 (he) 2019-09-12
JP6908322B2 JP6908322B2 (ja) 2021-07-21

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ID=61626328

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016173537A Active JP6908322B2 (ja) 2016-09-06 2016-09-06 圧電素子

Country Status (1)

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JP (1) JP6908322B2 (he)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7293655B2 (ja) * 2019-01-10 2023-06-20 ブラザー工業株式会社 圧電アクチュエータ
JP7156558B2 (ja) * 2019-12-25 2022-10-19 株式会社デンソー 圧電素子、圧電装置、および圧電素子の製造方法
JP7359169B2 (ja) * 2020-11-03 2023-10-11 株式会社デンソー 圧電素子、圧電装置、および圧電素子の製造方法
WO2022097578A1 (ja) * 2020-11-03 2022-05-12 株式会社デンソー 圧電素子、圧電装置、および圧電素子の製造方法
JP7528804B2 (ja) 2021-02-03 2024-08-06 株式会社デンソー 圧電素子、圧電装置、および圧電素子の製造方法
CN113596690B (zh) * 2021-08-13 2023-03-14 中北大学 新型压电式mems麦克风的结构及装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001077438A (ja) * 1999-09-07 2001-03-23 Matsushita Electric Ind Co Ltd 圧電素子、インクジェット式記録ヘッド、およびこれらの製造方法
JP2009170631A (ja) * 2008-01-16 2009-07-30 Panasonic Corp 圧電素子とその製造方法およびこれを用いた圧電応用デバイス
JP5707323B2 (ja) * 2008-06-30 2015-04-30 ザ・リージェンツ・オブ・ザ・ユニバーシティ・オブ・ミシガンThe Regents Of The University Of Michigan 圧電型memsマイクロフォン

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