JP2018039656A - Container storage facility - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a container storage facility which can regulate jumping out of a content from a container with a simple structure and which is advantageous in an installation space.SOLUTION: A container W has an opening Wa on a side surface and in which a content T can be taken and from which a content T can be taken out, through the opening Wa, and comprises; a regulation body 4a which regulates jumping out of the content T from the opening Wa of the container W in a state in which the container W is stored in a storage part 21; a depressed part 4b which is depressed by a bottom part of the container W in a state in which the container W is stored in the storage part 21; and a linkage mechanism 4 for making the regulation body 4a and the depressed part 4b linked. The regulation body 4a can be moved between a regulation position where the regulation body regulates jumping out of the content T and a retreat position where the regulation body is separated from the regulation position. The linkage mechanism 4 makes the regulation body 4a positioned on the regulation position in a state in which the depressed part 4b is depressed by the container W, and makes the regulation body 4a positioned on the retreat position in a state in which the depressed part 4b is not depressed.SELECTED DRAWING: Figure 4

Description

  The present invention relates to a container storage facility including a container storage shelf having a storage unit for storing containers.

As a container storage facility including a container storage shelf for storing containers as described above, for example, there is one provided in a semiconductor manufacturing factory that processes and stores a semiconductor substrate as the contents of a container. In a semiconductor manufacturing factory, processing (processing, inspection, etc.) of a semiconductor substrate divided into a plurality of processes is performed. Then, the semiconductor substrate that has been processed in a certain process is transported by the transport device while being accommodated in the container, and is supplied to the processing apparatus in the next process, or is stored in a container such as a storage with a container storage shelf. It is stored in equipment. Thus, the semiconductor substrate is stored in the container storage shelf in a state of being stored in the container.
Moreover, in said container storage equipment, what has the opening part in a side surface and accommodates the container comprised so that the contents could be taken in / out freely from the said opening part is known. For example, as a container for housing a semiconductor substrate, there is a facility for housing a container having a slot for housing a substrate, which has an opening for taking in and out a semiconductor substrate on a side surface and is distributed in a plurality of layers on the upper and lower sides.
Here, in a state where the container is stored in the container storage shelf, when mechanical vibration due to the operation of the transfer device or vibration due to earthquake is transmitted to the container storage shelf, the semiconductor substrate swings in and out of the container, The semiconductor substrate in the container may jump out of the container from the opening, and the semiconductor substrate may fall or be damaged. In view of this, it is conceivable to provide a restricting body for restricting the semiconductor substrate from popping out at a position close to the opening of the container in a state where the container is stored in the container storage shelf. However, if a restricting body is provided in the container storage shelf at a position close to the opening of the container in a state where the container is stored, the container interferes with the restricting body when the container is stored in the container storage shelf. The possibility increases. That is, there is a high possibility that the restricting body becomes an obstacle when the container is stored.

Regarding a regulation body that regulates jumping out of a semiconductor substrate from a container, for example, in Patent Document 1, in an automatic guided vehicle that transports a container containing a semiconductor substrate, the semiconductor substrate is prevented from jumping out of the container. The thing provided with the control body which hold | suppresses a board | substrate from the opening side of a container to the back | inner side is disclosed.
In the automatic guided vehicle of Patent Document 1, when a semiconductor substrate is transferred, the regulating body is positioned at a position where the semiconductor substrate is pressed from the opening side of the cassette to the back side, and the semiconductor substrate is transferred by the single wafer transfer device. In some cases, the restricting body is positioned so as not to interfere with the transferred semiconductor substrate. The automatic guided vehicle of Patent Document 1 performs such switching of the position of the regulating body by a driving means such as an air cylinder.

Japanese Patent Laid-Open No. 2003-237941

  Although it is conceivable to provide the container storage shelf with a regulating body as in Patent Document 1 whose position is switched by the drive means, when the drive means is provided on the container storage shelf, a drive source such as a motor or an air cylinder is provided to the container storage shelf. Since it is necessary to install, it is disadvantageous in terms of installation space. Furthermore, since wiring and piping for supplying driving power and air to the driving source are required, the structure becomes complicated.

  The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a container storage facility that is advantageous in terms of installation space and can regulate the jumping of contents from a container with a simple structure. In the point.

  In order to solve the above problems, a characteristic configuration of a container storage facility according to the present invention includes a container storage shelf having a storage portion for storing a container, and the container has an opening on a side surface and the contents from the opening. In a container storage facility configured to be freely put in and out, a regulating body for restricting the contents from popping out from the opening of the container in a state in which the container is stored in the storage unit, and the container in the storage unit A pressed part that is pressed by the bottom of the container in a state where the container is stored, and an interlocking mechanism that interlocks the restricting body and the pressed part. The restricting body is stored in the storing part. The position of the container can be switched between a restriction position that is close to the opening of the container in the state in which the contents are put in and out and that restricts the jumping-out of the contents, and a retreat position that is separated from the restriction position. The interlocking mechanism is configured to position the restricting body at the restricting position in a state where the pressed portion is pressed by the container, and to move the restricting body in a state where the pressed portion is not pressed by the container. It is in the point comprised so that it may be located in the said retracted position.

According to this characteristic configuration, the regulating body and the pressed part are interlocked by the interlocking mechanism. This interlocking mechanism determines the position of the restricting body between the restricting position and the retracted position separated from the restricting position, depending on whether the pressed part is pressed or not pressed by the bottom of the container. Can be switched. When the pressed part is not pressed down by the bottom of the container, i.e., when the container is not stored in the storage part, the regulator is located in the retracted position, and when the pressed part is pressed down by the bottom of the container, That is, when the container is stored in the storage unit, the restricting body is located at the restricting position. Therefore, before the container is stored, the restricting body is in the retracted position, so that the restricting body does not prevent the container from being stored. On the other hand, when the container is stored, the pressed part is pressed by the bottom of the container, and the restricting body is switched to the restricted position in conjunction with the pressed part being pressed. In this way, the regulating body can be switched between the regulating position and the retracted position by the operation of storing and taking out the container regardless of the driving means.
The restricting position is a position that is close to the opening of the container in the state of being accommodated in the accommodating part in the direction in which the contents are put in and out, and restricts the jumping out of the contents. In other words, the movement of the contents of the container in the loading / unloading direction is restricted by the restriction body at the restriction position. Therefore, even when the container is vibrated, the contents can be prevented from jumping out of the container.
Since there is no need to install a drive source such as a motor or an air cylinder because the drive means is not used, this is advantageous in terms of installation space. Further, since wiring and piping for supplying driving power and air to the driving source are not required, the configuration can be simplified.
As described above, according to the present characteristic configuration, it is possible to obtain a container storage facility that is advantageous in terms of installation space and can regulate the jumping of the contents from the container with a simple structure.

  Further, it is preferable that the region occupied by the restricting body located at the restricting position and the region occupied by the restricting member located at the retracted position have an overlapping portion in the loading / unloading direction. is there.

  According to this configuration, it is possible to reduce the length in the insertion / removal direction of the pass region of the restricting body when the restricting body moves between the retracted position and the restricting position. Therefore, a space to be secured for installing the regulating body is small, which is advantageous in terms of installation space.

  The container further includes a conveying device that conveys the container to the storage unit, and the conveying device causes the contents to fall close to the opening in the container when the container is conveyed. It is preferable to have a fall prevention body to prevent.

  According to this configuration, since the transport device has the fall prevention body that is close to the opening of the container in the insertion / removal direction, even if the transport device vibrates when the container is transported, the contents are not It can be prevented from jumping out of the container and falling. In addition, after the container is transported to the storage unit by the transport device and the container is stored in the storage unit, the regulation body included in the container storage shelf prevents the contents from popping out of the container. Therefore, according to this configuration, it is possible to prevent the contents from jumping out of the container when the container is transported and after the container is stored.

  Further, when the transport device stores the container in the storage portion, the position of the fall prevention body is set to a position having a portion overlapping with the restriction body located at the restriction position in the loading / unloading direction. It is preferable to be configured.

  According to this configuration, the fall prevention body when the transport device stores the container in the storage section has a portion that overlaps with the restriction body located in the restriction position in the insertion / removal direction, so the container is stored in the storage section. In this case, the area in the direction of taking in / out occupied by the fall prevention body and the regulating body can be reduced in the in / out direction, and the space utilization efficiency is good.

  Further, the restricting body is formed in a long shape, and is configured such that the longitudinal direction thereof is in a standing posture along the vertical direction at the restricting position and the retracted position, and the interlocking mechanism is attached to the restricting body. It is preferable that the restricting body and the pressed part are interlocked while maintaining the standing posture.

  According to this configuration, since the restricting body maintains the standing posture at both the restricting position and the retracted position, the area occupied by the restricting body in the container storage shelf in a plan view can be reduced. Therefore, according to this configuration, the space utilization efficiency can be further improved.

  Further, it is preferable that a pair of the opening portions are formed in a state of being opposed to each other in the loading / unloading direction of the container, and a pair of the regulating bodies is provided corresponding to the opening portion.

  According to this configuration, even when a container that stores contents is used in a state in which a pair of openings are formed in a state of facing each other in the loading / unloading direction, regulation is performed corresponding to each opening. Since the body is provided, the contents can be prevented from jumping out from any opening.

  The container storage shelf includes a plurality of the storage units arranged in the loading / unloading direction, and the regulation body, the pressed portion, and the interlocking mechanism are separately provided for each of the plurality of storage units. It is preferable to be provided.

  According to this configuration, it is possible to provide, for each of the plurality of storage units, a regulating body that regulates the jumping out of the contents from the container with a simple structure that does not use the driving unit. Therefore, compared with the structure which switches the position of each control body about a some accommodating part with a drive means, it can be set as a simple structure as the whole installation. Furthermore, since the effect of space saving by not providing the driving means is exhibited for each of the plurality of storage units, it is possible to greatly improve the space utilization efficiency as a whole facility.

  Further features and advantages of the technology according to the present disclosure will become more apparent from the following description of exemplary and non-limiting embodiments described with reference to the drawings.

View of container storage shelf and transfer device as seen from the entry / exit direction The figure which looked at the container storage shelf and the conveyance device from the direction perpendicular to the taking in / out direction on the horizontal plane Perspective view of container Container storage shelf and container perspective view The figure which shows operation | movement of the interlock mechanism when a container is accommodated in an accommodating part. Plan view in the state of FIG. The figure which shows the next operation of FIG. Plan view in the state of FIG. Perspective view of container storage shelf and container according to second embodiment The figure which shows the control body in a retracted position in 2nd embodiment. The figure which shows the control body in a control position in 2nd embodiment.

[First embodiment]
A container storage facility 1 according to the present embodiment will be described with reference to the drawings. As shown in FIGS. 1 and 2, the container storage facility 1 includes a container storage shelf 2 having a storage unit 21 for storing containers W, and a transport device 3 for transporting the containers W to the storage unit 21.

  In this embodiment, the container W accommodates the semiconductor tray T as the contents, as shown in FIG. The semiconductor tray T is accommodated in the container W in a state where a plurality of layers are stacked in the vertical direction (see also FIG. 1). The container W has an opening Wa on a side surface and is configured to allow the semiconductor tray T to be taken in and out from the opening Wa. A pair of openings Wa are formed in a state of facing each other in the direction of taking in and out of the container W. In the following description, the direction in which the semiconductor tray T is put in and out of the container W is the X direction, and the direction along the horizontal plane and orthogonal to the X direction is the Y direction. For convenience of explanation, one of the X directions is a first X direction X1, and the other is a second X direction X2. Further, one of the Y directions is a first Y direction Y1, and the other is a second Y direction Y2.

  The container W has a pair of side walls Wc facing each other with an interval in the Y direction. The top and bottom of the container W are closed. Moreover, the upper part and the bottom part of the container W are formed shorter than the side wall Wc in the X direction. For this reason, the container W is formed in an H shape in which an end in the X direction is cut out in a plan view. Since the container W has such a shape, the inside of the container W is easily visible, and the semiconductor tray T can be easily taken in and out of the container W. A top flange Wb is provided on the top of the container W. The conveyance device 3 can convey the container W by the conveyance device 3 gripping the top flange Wb.

  As shown in FIG.1 and FIG.2, the conveying apparatus 3 is comprised so that it can drive | work the traveling rail 90 fixed to the ceiling with the suspending tool 91. FIG. The traveling rail 90 is provided along the X direction at least at a location corresponding to the container storage shelf 2. For this reason, the conveying apparatus 3 can convey the container W along the X direction.

The transport device 3 includes a travel drive unit 3R that travels on the travel rail 90, and a container support unit 3S that is supported by being suspended from the travel drive unit 3R so as to be positioned below the travel rail 90.
The travel drive unit 3R includes a travel wheel 3Ra that is rotationally driven by the drive motor 3Rc, and a guide wheel 3Rb that guides the travel drive unit 3R along the travel rail 90. The traveling wheel 3Ra has a horizontal rotation shaft and rolls on the upper surface of the traveling rail 90. The guide wheel 3 </ b> Rb has a vertical axis of rotation and rolls on a vertical surface formed on the traveling rail 90 in the vertical direction. Therefore, the traveling drive unit 3R can move along the traveling rail 90 by the traveling wheel 3Ra driven by the drive motor 3Rc while being guided along the traveling rail 90 by the guide wheel 3Rb.
The container support part 3S has a gripping part 31S that can grip the top flange Wb of the container W. The container support portion 3S includes a cover 32S that covers the grip portion 31S and covers the first X direction X1 and the second X direction X2. In other words, the cover 32S has a shape in which the first Y direction Y1 and the second Y direction Y2 are opened downward. Thereby, even if the grip part 31S is covered with the cover 32S, the grip part 31S can move downward and in the Y direction.

The container support portion 3S includes an elevating operation mechanism 34S that moves the grip portion 31S up and down, and a slide operation mechanism 33S that slides the grip portion 31S in the Y direction.
The gripping portion 31S includes a gripping claw 31Sa that can be switched between a gripping posture for gripping the container W and a release posture for releasing the gripping, and a gripping motor (not shown) that switches the gripping claw 31Sa between the gripping posture and the release posture. And have. In the present embodiment, the gripping claw 31Sa grips the top flange Wb of the container W, so that the gripper 31S can grip the container W.
The elevating operation mechanism 34S includes a drum 34Sa that can freely feed and wind up the elevating belt 34Sb. The raising / lowering operation mechanism 34S can raise / lower the holding | grip part 31S and the container W hold | gripped by it by rotating and driving the drum 34Sa with the raising / lowering motor 34Sc.
As shown in FIG. 1, the slide operation mechanism 33 </ b> S includes a pair of pulleys 33 </ b> Sa (only one pulley is illustrated in the drawing) arranged at intervals in the Y direction, and a slide spanned between the pair of pulleys 33 </ b> Sa. A belt 33Sb and a sliding motor (not shown) for rotating the pulley 33Sa are provided. The slide operation mechanism 33S can drive the slide belt 33Sb by rotating the pulley 33Sa with a slide motor, and can slide the grip portion 31S and the container W gripped thereby in the second Y direction Y2. Further, the slide operation mechanism 33S can slide the gripping portion 31S and the container W gripped thereby in the first Y direction Y1 by rotating the slide motor in the reverse direction to the above case. That is, the slide operation mechanism 33S can slide the container W between the protruding position where the container W and the container storage shelf 2 overlap in the Y direction and the retracted position where the container W is inside the cover 32S. it can.

  With the configuration described above, the transport device 3 can store the container W in the storage unit 21 of the container storage shelf 2. That is, the transport device 3 moves the traveling rail 90 in the X direction by the traveling drive unit 3R as shown in FIG. 2 in a state where the container W is gripped by the gripping claws 31Sa of the gripping unit 31S. And the conveying apparatus 3 stops in the position which overlaps with the storage part 21 of the container storage shelf 2 in a X direction. As shown in FIG. 1, the transport device 3 slides the grip portion 31S and the container W gripped by the slide operation mechanism 33S in the second Y direction Y2, and positions the grip portion 31S and the container W at the protruding positions. Let And the conveying apparatus 3 can accommodate the container W in the accommodating part 21 by lowering the container W by the raising / lowering operation mechanism 34S.

  In the present embodiment, the transport device 3 transports the container W such that the X direction of the container W is along the traveling direction, and the slide operation mechanism 33S slides the container W along the Y direction of the container W. That is, the sliding direction of the container W when the container W is stored in the storage unit 21 of the container storage shelf 2 is the second Y direction Y2. And the sliding direction of the container W when taking out the container W from the said accommodating part 21 is the 1st Y direction Y1. That is, the second Y direction Y2 is a shelf depth direction with respect to the container storage shelf 2, and the first Y direction Y1 is a front direction with respect to the container storage shelf 2.

  By the way, the semiconductor tray T may move in the X direction relative to the container W and jump out of the opening Wa of the container W due to a speed change during the conveyance of the container W. In order to prevent this, the transport device 3 according to the present embodiment prevents the semiconductor tray T from falling close to the opening Wa of the container W in the X direction (in / out direction) when transporting the container W. A fall prevention body 35S is provided (see FIGS. 1 and 2). Since the fall prevention body 35S is close to the opening Wa of the container W, the semiconductor tray T is prevented from moving in the X direction relative to the container W. Accordingly, the transport device 3 can prevent the semiconductor tray T from falling from the container W by the fall prevention body 35S.

  In the present embodiment, as shown in FIG. 1, the gripper 31 </ b> S is positioned at a distance from the central portion in the Y direction of the container W in the first Y direction Y <b> 1 in a state where the gripper 31 </ b> S is gripping the container W. In addition, the fall prevention body 35S is provided in the grip portion 31S. Further, the fall prevention body 35S is arranged so as to overlap all the regions in the vertical direction of the container W. In other words, the fall prevention body 35S is configured such that the vertical length is at least longer than the vertical length of the container W.

  In the present embodiment, as shown in FIG. 2, the fall prevention body 35S is a rod-like body that extends downward at each of both ends of the cylinder disposed along the X direction. The position can be switched with. Thereby, the separation distance in the X direction of the pair of fall prevention bodies 35S can be extended so that the fall prevention body 35S does not interfere with the container W when the grip portion 31S grips the container W. Then, after the gripping portion 31S grips the container W, the distance between the pair of fall prevention bodies 35S in the X direction can be reduced, and the fall prevention body 35S can be brought close to the opening Wa of the container W.

  As shown in FIGS. 2 and 4, the container storage shelf 2 has a mounting table 99 arranged with the X direction as a longitudinal direction. The mounting table 99 is configured to be suspended from the ceiling. The container storage shelf 2 has a plurality of storage units 21 arranged side by side in the X direction. In the present embodiment, two storage portions 21 are arranged in the X direction with respect to one container storage shelf 2. The mounting table 99 is provided with a guide 98 for performing positioning of the container W when the container W is stored in the storage unit 21. Four guides 98 are provided at positions corresponding to the four corners of the bottom of the container W in the mounting table 99 in order to support the four corners of the bottom of the container W in a state where the container W is stored in the storage unit 21. . The guide 98 has a shape in which a part of a rectangular parallelepiped is cut out. And the guide 98 supports the container W in the state which floated upward from the mounting base 99, regulating the movement along the horizontal surface of the container W accommodated in the accommodating part 21 (refer also FIG. 7). That is, the plurality of guides 98 support the container W in a state where a space is formed between the bottom surface of the container W and the top surface of the mounting table 99 and the container W is positioned.

  By the way, as described above, when the container W is transported by the transport device 3, the drop preventing body 35S prevents the semiconductor tray T from falling from the opening Wa of the container W. However, after the transport device 3 finishes transporting the container W, that is, after the container W is stored in the storage portion 21 of the container storage shelf 2, the transport device 3 holds the container W to perform the next operation or the like. It will be released and away from the storage unit 21. For this reason, the fall prevention body 35S moves away from a position close to the opening Wa of the container W, and the semiconductor tray T may jump out of the opening Wa of the container W when the container storage shelf 2 is shaken for some reason. There is.

  Therefore, as shown in FIG. 4, the container storage facility 1 according to the present embodiment restricts the semiconductor tray T from protruding from the opening Wa of the container W while the container W is stored in the storage unit 21. 4a, a pressed portion 4b that is pressed by the bottom of the container W in a state where the container W is stored in the storage portion 21, and an interlocking mechanism 4 that interlocks the regulating body 4a and the pressed portion 4b. . In the present embodiment, the regulating body 4 a and the pressed part 4 b constitute a part of the interlocking mechanism 4. As described above, in the present embodiment, a pair of openings Wa for taking in and out the semiconductor tray T are formed in a state in which the containers W face each other in the X direction. Therefore, a pair of regulating bodies 4a is provided corresponding to the opening Wa. Further, the regulating body 4a is formed in a long shape, and is configured such that the length in the vertical direction is at least longer than the length in the vertical direction of the container W. Moreover, in this embodiment, since the container storage shelf 2 has a plurality (two) of storage units 21, the regulation body 4a, the pressed portion 4b, and the interlocking mechanism 4 are provided for each of the plurality of storage units 21. Are provided separately. In the present embodiment, the interlocking mechanism 4 is a link mechanism, and includes an upper link body 4c, a lower link body 4d, and a fixed link body 4e. Each of the upper link body 4c, the lower link body 4d, and the fixed link body 4e is provided in pairs in the X direction at regular intervals.

  The ends of the fixed link body 4e and the lower link body 4d are supported by a bracket 97 attached to the upper surface of the mounting table 99. Specifically, the fixed link body 4e is supported in a state of being fixed to the bracket 97. On the other hand, the lower link body 4d is rotatably supported with respect to the bracket 97 and is urged upward by an urging member constituted by a spring (not shown) or the like.

  The pressed part 4b is arranged along the X direction. Each of both end portions in the X direction of the pressed portion 4b is supported by end portions of the pair of lower link bodies 4d. The pressed portion 4b is constituted by a long roller whose longitudinal direction is along the rotational axis direction. Therefore, the pressed part 4b is configured to rotate around the movement axis along the X direction located at the rotation end of the lower link body 4d. That is, the pressed part 4b is configured to rotate with the rotation of the lower link body 4d. When the container W is not stored in the storage part 21 and the pressed part 4b is not pressed by the bottom part of the container W, the lower link body 4d is supported by the bracket 97 because it is biased upward by the spring. The posture inclined upward with the end portion thus made as the lower end is maintained. Therefore, when the pressed portion 4b supported by the other end of the lower link body 4d is not pressed by the bottom of the container W, the pressed portion 4b is disposed at a position spaced upward from the mounting table 99.

  The end portion of the upper link body 4c is rotatably supported at the end portion of the fixed link body 4e opposite to the end portion supported by the bracket 97. The upper link body 4c is configured to always have the same inclination as the lower link body 4d when viewed in the X direction. The upper link body 4c is formed shorter than the lower link body 4d (see also FIG. 5 and the like). Further, the upper link body 4c rotatably supports the end portion of the restricting body 4a at the end portion opposite to the end portion supported by the fixed link body 4e. The other end of the restricting body 4a is rotatably supported at a position spaced from the end of the lower link body 4d in the center. In the present embodiment, the fixed link body 4e and the regulating body 4a are configured so as to always stand upright along the vertical direction. That is, the link mechanism as the interlocking mechanism in the present embodiment is a parallel link. The “standing posture along the vertical direction” is a concept including a posture slightly tilted with respect to the vertical direction in addition to a posture along the vertical direction.

  As shown in FIG. 5 to FIG. 8, the regulating body 4 a is located close to the opening Wa of the container W in the state of being accommodated in the accommodating portion 21 in the direction of inserting / removing the semiconductor tray T (X direction). The position can be switched between a restriction position RP for restricting the pop-out of T and a retracted position SP separated from the restriction position RP.

Here, the restriction position RP and the retracted position SP will be described in detail.
First, the opening Wa will be described. As shown in FIGS. 5 to 8, the opening Wa is formed between a pair of side walls Wc aligned in the Y direction, and a region occupied by the opening Wa in the Y direction is a pair of side walls aligned in the Y direction. It is a region between the inner surfaces of Wc.
The restriction position RP refers to a position that is closer to the opening Wa than the position of the end of the side wall Wc in the X direction and overlaps the opening Wa in the Y direction.
The retreat position SP refers to a position that does not overlap with the opening Wa in the Y direction.
The broken line in FIGS. 5-8 is a line extended along the surface of the 1st Y direction Y1 of the side wall Wc arrange | positioned in the 2nd Y direction Y2 in the container W. As shown in FIG. In the present embodiment, this broken line is a boundary line indicating a boundary between a region occupied by the opening Wa in the Y direction and a region adjacent to the region in the second Y direction Y2. A region in the first Y direction Y1 from this boundary line is a region including the restriction position RP. A region in the second Y direction Y2 from this boundary line is a region including the retreat position SP.

  The interlock mechanism 4 positions the restricting body 4a at the restricting position RP when the pressed part 4b is pressed by the container W, and moves the restricting body 4a to the retracted position SP when the pressed part 4b is not pressed by the container W. It is comprised so that it may be located in. Further, the restricting body 4a is configured such that the longitudinal direction thereof is in a standing posture along the vertical direction at the restricting position RP and the retracted position SP. The interlocking mechanism 4 is configured to interlock the restricting body 4a and the pressed portion 4b while maintaining the standing posture of the restricting body 4a.

Next, the operation of the interlocking mechanism 4 when the container W is stored in the storage unit 21 will be described with reference to FIGS.
After the container W is positioned at the protruding position by the slide operation mechanism 33S of the transport device 3, the container W is lowered toward the storage unit 21 by the lifting operation mechanism 34S. As shown in FIG. 5, until the container W is stored, the pressed part 4b is not pressed by the bottom of the container W, and therefore the lower link body 4d urges the lower link body 4d upward. The spring is tilted upward together with the upper link body 4c by a spring (not shown). Therefore, at this time, the regulating body 4a is located at the retracted position SP (see also FIG. 6). For this reason, the regulation body 4a does not hinder the storage of the container W. As the container W is lowered, the bottom of the container W comes into contact with the pressed part 4b from above.

  When the container W is further lowered from the state of FIG. 5, the bottom portion of the container W further presses the pressed portion 4b to be in the state of FIGS. While the container W is lowered along the vertical direction by the lifting operation mechanism 34S, the lower link body 4d rotates downward with the end supported by the bracket 97 as a fulcrum. Therefore, by this operation, the regulating body 4a supported by the lower link body 4d is displaced downward and displaced in the first Y direction Y1. Thereby, the restricting body 4a is switched from the retracted position SP to the restricting position RP. Further, while the container W descends in the vertical direction, the pressed part 4b pressed by the container W is displaced downward and in the first Y direction Y1 by the rotational movement. However, as described above, the pressed portion 4b is composed of a roller and can rotate around the X direction axis. Therefore, even if the pressed part 4b moves relative to the bottom of the container W (displaced in the first Y direction Y1), the pressed part 4b rotates around the rotation axis along the X direction, so that The friction generated between them can be reduced. Therefore, particles are hardly generated due to the bottom of the container W being scraped by the pressed portion 4b. Further, as shown in FIGS. 6 and 8, in this embodiment, the region occupied by the restricting body 4a located at the restricting position RP and the region occupied by the restricting body 4a located at the retracted position SP are in the X direction ( It is configured to have an overlapping portion in the (in / out direction). With such a configuration, the length in the X direction of the passing region of the restricting body 4a when the restricting body 4a moves between the retracted position SP and the restricting position RP can be suppressed small. Therefore, the space to be secured for installing the regulating body 4a is small, which is advantageous in terms of installation space.

  In this way, in the series of operations shown in FIGS. 5 to 8, the fall prevention body 35 </ b> S provided in the transport device 3 is placed in the opening Wa of the container W until the container W is completely stored in the storage unit 21. Located in close proximity. For this reason, the semiconductor tray T can be prevented from falling from the container W by the fall prevention body 35S during the transport by the transport device 3 and until the container W is completely stored. Then, after the container W is completely stored in the storage unit 21, the restricting body 4a can restrict the semiconductor tray T from jumping out of the container W. As shown in FIG. 8, in this embodiment, when the transport device 3 stores the container W in the storage unit 21, the position of the fall prevention body 35S overlaps with the restriction body 4a located at the restriction position RP in the X direction. It is comprised so that it may become a position which has a part to do. With such a configuration, the region in the X direction occupied by the fall prevention body 35S and the regulating body 4a in the storage portion 21 when the container W is stored in the storage portion 21 can be reduced. As a result, space saving can be achieved in the X direction.

[Second Embodiment]
Next, a container storage facility according to the second embodiment will be described. The second embodiment differs from the first embodiment in the configuration of the interlocking mechanism, and the other configurations are the same as those in the first embodiment. Below, it demonstrates centering on a different point from 1st embodiment. Points that are not particularly described are the same as in the first embodiment.

  As shown in FIG. 9, the container storage facility according to the second embodiment includes a restricting portion 5 a that restricts the semiconductor tray T from protruding from the opening Wa of the container W while the container W is stored in the storage portion 21. In addition, a pressed part 5b that is pressed by the bottom of the container W in a state where the container W is stored in the storage part 21, and an interlocking mechanism 5 that interlocks the restricting part 5a and the pressed part 5b are provided. In the second embodiment, the interlocking mechanism 5 is configured by a mechanism using the lever principle (hereinafter referred to as a lever mechanism).

  The interlocking mechanism 5 includes a connecting portion 5d that connects the restricting portion 5a and the pressed portion 5b, and a fulcrum shaft 5c that serves as a rotation center of the restricting portion 5a, the pressed portion 5b, and the connecting portion 5d. . The pressed part 5b and the fulcrum shaft 5c are arranged along the X direction. And the control part 5a and the connection part 5d are arrange | positioned in the edge part of the X direction in these to-be-pressed part 5b and the fulcrum shaft 5c.

  In 2nd embodiment, as shown in FIG.10 and FIG.11, the interlocking | linkage mechanism 5 is comprised so that the control part 5a and the connection part 5d may comprise L shape by X direction view. Moreover, in 2nd embodiment, the control part 5a is formed sufficiently long compared with the connection part 5d. Therefore, as shown in FIGS. 10 and 11, when the moment around the fulcrum shaft 5c due to the weight of the interlocking mechanism 5 is viewed in the direction along the first X direction X1 (hereinafter, the same applies to the rotation direction), the restricting portion The clockwise moment by 5a is larger than the counterclockwise moment by the connecting portion 5d. Therefore, when the pressed part 5b is not pressed by the container W, the interlocking mechanism 5 tries to rotate clockwise as a whole. In the second embodiment, a first spring (not shown) is provided around the fulcrum shaft 5c to bias the restricting portion 5a counterclockwise, so that the pressed portion 5b is not pressed by the container W. The whole interlocking mechanism 5 is configured to maintain an inclined posture (see FIG. 10). Note that the fulcrum shaft 5c is disposed at a position at a distance in the first Y direction Y1 from the boundary line indicated by a broken line in the drawing.

  When the container W is stored in the storage unit 21, as shown in FIG. 10, the bottom part of the descending container W comes into contact with the pressed part 5b located at the retracted position SP. At this time, the part located above the lower end part of the container W in the control part 5a is located in the 2nd Y direction Y2 rather than the boundary line. In the second embodiment, this state is a state in which the restricting portion 5a is located at the retracted position SP.

  When the bottom of the container W further presses the pressed part 5b, the interlocking mechanism 5 is in the state shown in FIG. When the container W depresses the pressed portion 5b, a counterclockwise moment is applied about the fulcrum shaft 5c, and the interlocking mechanism 5 rotates counterclockwise about the fulcrum shaft 5c. Thereby, the control part 5a becomes a standing posture along the up-down direction from the inclined posture. The connecting portion 5d is in a horizontal posture along the upper surface of the mounting table 99. At this time, the whole regulation part 5a is located in the position which overlaps with the fulcrum axis | shaft 5c arrange | positioned in the position of the 1st Y direction Y1 rather than a boundary line in a Y direction. Therefore, when the container W presses the pressed part 5b, the restricting part 5a is switched from the retracted position SP to the restricting position RP. The restricting portion 5a located at the restricting position RP is close to the opening Wa in the X direction and restricts the semiconductor tray T from jumping out from the opening Wa of the container W. Around the fulcrum shaft 5c, in addition to a first spring that biases the restricting portion 5a counterclockwise, a second spring (not shown) that biases the connecting portion 5d clockwise is also provided. . For this reason, after the container W is stored in the storage part 21, when the pressed part 5b is not pressed by the container W, the interlocking mechanism 5 is rotated clockwise by the second spring. Therefore, the restricting portion 5a is inclined from the standing posture in the second Y direction Y2. That is, the clockwise moment by the restricting portion 5a, the counterclockwise moment by the connecting portion 5d, the counterclockwise moment by the first spring, and the clockwise moment by the second spring interact to balance each other. The interlocking mechanism 5 is maintained in the inclined posture shown in FIG. Instead of the configuration in which the interlocking mechanism 5 is maintained in the inclined posture by the first spring, a rotation restricting portion that restricts the tilting posture interlocking mechanism 5 from rotating clockwise by its own weight is provided on the fulcrum shaft 5c. The interlocking mechanism 5 may be configured to maintain an inclined posture. Further, instead of the configuration in which the interlocking mechanism 5 is biased by the second spring so as to be inclined from the standing posture to the second Y direction Y2, the interlocking mechanism 5 is moved from the standing posture to the second Y by the weight of the interlocking mechanism 5. It is good also as a structure biased so that it may become the attitude | position which inclines in the direction Y2. In this case, the connecting angle between the restricting portion 5a and the connecting portion 5d is adjusted so that the restricting portion 5a is positioned in the restricting position RP so as to be inclined in the second Y direction Y2.

[Another embodiment]
(1) In the above embodiment, an example is described in which the retracted position SP is a position that is separated in the second Y direction Y2 from the area occupied by the opening Wa in the Y direction and does not overlap with the area. did. However, the retracted position is not limited to such an example. That is, the retracted position may be a position separated from the restricting position. For example, the retracted position may overlap with the region occupied by the opening Wa in the Y direction, but may be separated in the X direction (conveying direction) with respect to the restriction position RP.

(2) In the above embodiment, a region where the restricting body 4a located at the restricting position RP occupies and a region occupied by the restricting body 4a located at the retracted position SP overlap in the X direction (in / out direction). The example configured to have has been described. Further, when the transport device 3 stores the container W in the storage portion 21, the position of the fall prevention body 35S is configured to have a position overlapping with the restriction body 4a located at the restriction position RP in the X direction. An example has been described. Here, “overlap” includes not only the case where all of the target elements overlap, but also the case where some overlap. However, it is further preferable that all of the restriction positions RP and all of the retraction positions SP are configured to overlap with each other in the X direction (in / out direction). In that case, the area in the X direction occupied by the target element can be kept small, which is further advantageous in terms of installation space. Similarly, it is preferable that the position of the fall prevention body 35S when the transport device 3 stores the container W in the storage portion 21 and the regulation body 4a located at the regulation position RP are all overlapped in the X direction. .

(3) In the above embodiment, the example in which the restriction body 4a (5a) located at the restriction position RP is configured to be in the standing posture along the vertical direction has been described. However, the posture of the restricting body may not be a standing posture. That is, the restricting body located at the restricting position only needs to overlap the entire vertical region in the opening of the container. In this case, the restricting body is in a posture that is significantly inclined with respect to the vertical direction. There may be. Even in this case, the regulation body can regulate so that all the contents stored in the container do not jump out of the container.

(4) In the above embodiment, an example in which the two storage units 21 are arranged in the X direction with respect to one container storage shelf 2 has been described. However, the present invention is not limited to this, and three or more storage units 21 may be arranged in the X direction with respect to one container storage shelf 2. The present invention can reduce the space to be secured in order to install the regulating body, and thereby can save space. Therefore, as the container storage shelf has more storage units, the space saving effect of the present invention is exhibited for each of the plurality of storage units, so that the storage efficiency of the entire facility can be greatly improved. it can.

(5) In the above embodiment, the example in which the interlocking mechanism includes the link mechanism or the lever mechanism has been described. However, without being limited to such a configuration, the interlocking mechanism only needs to be configured to switch the position of the restricting body between the restricting position and the retracted position by interlocking the restricting body and the pressed portion. .

(6) In the above-described embodiment, an example in which the container W is transported by the transport device 3 and stored in the storage unit 21 of the container storage shelf 2 has been described. However, without being limited to such a configuration, the container storage shelf may be one in which containers are stored by a transport vehicle that travels on the floor surface. The container storage shelf may be one in which containers are stored artificially by human hands.

(7) In the above embodiment, the example in which the container storage shelf 2 is supported by being suspended from the ceiling has been described. However, without being limited to such a configuration, the container storage shelf may be provided on the floor surface.

(8) The above embodiment is merely an example. The present invention is not limited to the above embodiments, and various modifications can be made without departing from the scope of the invention. The above embodiments can be combined within a range where no contradiction occurs.

(9) In the second embodiment, in order to maintain the tilting posture of the interlock mechanism 5, the first and second springs are provided in the restricting portion 5a, and the clockwise moment by the restricting portion 5a, the connecting portion 5d. The example has been described in which the counterclockwise moment by, the counterclockwise moment by the first spring, and the clockwise moment by the second spring are caused to interact with each other to achieve a balance. However, the configuration is not limited to such a configuration, and the configuration may be such that the balance is achieved by one spring and the tilting posture of the interlocking mechanism is maintained. That is, in a state where the restricting portion is located at the retracted position, a force is applied to the spring in a direction in which the restricting portion stands (direction located at the restricting position), and the restricting portion is located at the restricting position. Then, it may be configured to apply a force in a direction in which the restriction portion falls down (a direction in the retracted position).

1: container storage equipment 2: container storage shelf 3: transport device 3R: travel drive unit 4: interlocking mechanism 4a: restricting body 4b: pressed part 21: storage part 35S: fall prevention body 90: travel rail RP: restricting position SP : Retraction position T: Semiconductor tray W: Container Wa: Opening X: X direction (in / out direction)

Claims (7)

A container storage shelf having a storage unit for storing containers;
The container is a container storage facility having an opening on a side surface and configured to allow the contents to be taken in and out from the opening,
A restricting body that restricts the content from popping out of the opening of the container in a state where the container is stored in the storage part;
A pressed part that is pressed by the bottom of the container in a state where the container is stored in the storage part;
An interlocking mechanism for interlocking the regulating body and the pressed part,
The restricting body is close to the opening of the container in the state of being housed in the housing portion in the direction in which the content is put in and out, and a restriction position that restricts the jumping-out of the content from the restriction position. It is configured to be switchable to a retreat position that is separated,
The interlocking mechanism positions the restricting body at the restricting position in a state in which the pressed portion is pressed by the container, and moves the restricting body in the retracted position in a state in which the pressed portion is not pressed by the container. Container storage facility configured to be located in   The area occupied by the restricting body located at the restricting position and the area occupied by the restricting body located at the retracted position are configured to have overlapping portions in the loading / unloading direction. Container storage equipment. A transport device for transporting the container to the storage unit;
The container according to claim 1, wherein the transport device includes a fall prevention body that prevents the contents from falling close to the opening of the container in the loading / unloading direction when the container is transported. Storage facilities.   When the transport device stores the container in the storage unit, the position of the fall prevention body is configured to overlap with the regulation body located at the regulation position in the loading / unloading direction. Item 4. Container storage equipment according to item 3. The restricting body is formed in a long shape, and is configured such that a longitudinal direction thereof is in a standing posture along the up-down direction at the restricting position and the retracted position,
The container according to any one of claims 1 to 4, wherein the interlocking mechanism is configured to interlock the restricting body and the pressed portion while maintaining the standing posture in the restricting body. Storage facilities. A pair of the openings are formed in a state of facing each other in the loading / unloading direction of the container,
6. The container storage facility according to claim 1, wherein a pair of the regulating bodies is provided corresponding to the opening. The container storage shelf includes a plurality of the storage units arranged in the loading / unloading direction,
The container storage facility according to any one of claims 1 to 6, wherein the restricting body, the pressed portion, and the interlocking mechanism are provided separately for each of the plurality of storage portions.

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