JP2018036541A - Exposure equipment - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain exposure equipment capable of surely detecting an end of a long-sized work-piece, before a rear end tentative stationary part of the long-sized work-piece departs from a supply-side roll, irrespective of quality of material of the long-sized work-piece.SOLUTION: In exposure equipment that includes a supply side roll on which a long-sized work piece is wound and exposure means for exposing the long-sized work piece unreeled from the supply side roll, in which an end edge part of the supply-side roll of the long-sized work piece is tentatively fixed to the supply-side roll and is densely wound on the supply-side roll sequentially from the tentatively fixed end, work end detection means for detecting that any part that contacts with a surface of the supply-side roll from an end part tentatively fixed on the supply-side roll of the long-sized work piece departed from a surface of the supply-side roll is provided, the work end detection means detects from a shaft side of the supply-side roll.SELECTED DRAWING: Figure 2

Description

The present invention relates to an exposure apparatus that performs exposure while moving a long photosensitive material (long work) between a supply-side roll and a take-up roll, and particularly detects the end of a long work on a supply-side roll in advance. The present invention relates to an exposure apparatus.

  In this type of exposure apparatus, an exposure unit is disposed between a supply-side roll and a take-up roll, and a predetermined exposure pattern is repeatedly exposed on a predetermined area of a long workpiece that moves between both rolls. An end of the long workpiece (terminal end fixing portion in the transport direction) is temporarily fixed to a supply-side roll (core), and is wound tightly on the supply-side roll. For this reason, if the terminal temporary fixing part of the long workpiece is detached from the supply side roll (core) and becomes free from the supply side roll, the long workpiece is swung without being supported, and the long workpiece is damaged. To do. Further, since the end portion of the long work is swung without being supported, the connection work of the supply side roll to be set next with the long work is adversely affected.

  For this reason, conventionally, some device for detecting the end of the long work on the supply side roll is provided, and the end of the long work is detected before the temporary fixing part of the long work is detached (separated) from the supply side roll. The rotation was stopped, the supply side roll (the core around which the long work was wound) was replaced, and the long work on the old and new rolls was connected.

  In Patent Document 1, a distance measuring light of a photosensor is emitted from a radial direction toward a supply-side roll (core) around which a long workpiece is wound, and the measured distance is the outer diameter of the core (that is, a long workpiece). Has proposed a technique for detecting the end of a long workpiece when it coincides with the outer diameter of the winding core when no is present.

  Patent Document 2 detects whether or not the long workpiece being conveyed is on the correct conveyance path by detecting the pressure and flow rate when the long workpiece in the conveyance route is sucked.

JP 2006-013879 A JP 2002-145478 A

  However, the surface of the long work wound around the supply-side roll has undulations and warpage, and the tension of the long work is not always constant and changes, so it is difficult to maintain a stable posture. In addition, the surface reflectance of a long workpiece (photosensitive material) may be different for each long workpiece, and when the type of workpiece changes, it is difficult to obtain a stable detection result due to the difference in the reflectance. For this reason, there is a problem that the device of Patent Document 1 is prone to erroneous detection. In the prior art of Patent Document 2, it is impossible to detect the end of the long workpiece while remaining on the core.

  The present invention is based on the above problem awareness, before the rear end temporary fixing portion of the long workpiece is detached from the supply-side roll (core) regardless of the material (surface reflectance) of the long workpiece ( It is an object of the present invention to obtain an exposure apparatus that can reliably detect the end of a long workpiece (with the terminal temporary fixing portion of the long workpiece temporarily fixed to a supply-side roll).

  In the present invention, the innermost one turn (near end) on the core of the long workpiece is separated from the core in the state where the terminal temporary fixing portion of the long workpiece is temporarily fixed to the supply-side roll. This is based on the viewpoint of detecting the end.

  The present invention includes a supply-side roll wound with a long work, and an exposure unit that exposes the long work fed out from the supply-side roll. In the exposure apparatus that is temporarily fixed to the supply-side roll and is tightly wound around the supply-side roll in order from the temporary fixing end, the terminal end is temporarily fixed to the supply-side roll of the long workpiece. A workpiece end detecting means for detecting that the part that is in contact with the supply-side roll surface from the portion is separated from the supply-side roll surface, and the workpiece end detecting means detects from the axial center side of the supply-side roll. Exposure device.

  The workpiece end detection means is opened on the outer peripheral surface of the supply-side roll and is closed by a long workpiece wound around the supply-side roll, and an empty space that applies a negative pressure or a positive pressure to the detection opening. The pressure means and pressure detecting means for detecting that the negative pressure or the positive pressure fluctuates beyond an allowable value can be configured. With such a configuration, the portion that is in contact with the supply-side roll surface from the terminal portion temporarily fixed to the supply-side roll of the long work, that is, the portion that is in contact with the detection opening and the periphery thereof, Can be detected from the surface of the supply side roll.

  The workpiece end detection means can be constituted by a photoelectric sensor that detects whether or not the long workpiece is in contact with the supply-side roll.

  The workpiece end detection means may be constituted by a mechanical sensor that detects whether or not the long workpiece is in contact with the supply-side roll.

  In one aspect of the present invention, the supply-side roll includes a core around which the long workpiece is wound, and a roll shaft inserted into and removed from the center of the core, and the detection opening is provided in the core. A communication passage for spatially connecting the detection opening, the pneumatic means, and the pressure detection means is provided in the roll shaft.

  In another aspect of the present invention, the supply-side roll includes a core around which the long work is wound, and a roll shaft inserted into and removed from the center of the core, and the detection opening is formed in the core. A communication path is provided in the thickness of the winding core for spatially connecting the detection opening, the pneumatic means, and the pressure detection means.

  The winding core preferably includes an index indicating a temporarily fixed position of a terminal portion of the long work based on a detection position of the work end detection means.

  In the exposure apparatus of the present invention, the innermost winding (near end) on the core of the long workpiece is separated from the core in a state where the terminal temporary fixing portion of the long workpiece is temporarily fixed to the supply-side roll. Therefore, the end of the long workpiece is detected in advance, so that the end of the long workpiece can be reliably detected.

1 is a side perspective view of an entire exposure apparatus showing an embodiment of an exposure apparatus according to the present invention. It is sectional drawing which cut | disconnected longitudinally the winding core which wound the elongate workpiece along the axis line of the supply side roll contained in the exposure apparatus of FIG. It is sectional drawing which follows the III-III line of FIG. (A) And (B) is sectional drawing corresponding to FIG. 3 of a different operation | movement state which shows the relationship between the termination | terminus of a supply side roll, and a near end. It is sectional drawing corresponding to FIG. 2 which shows another embodiment of this invention. It is sectional drawing which follows the VI-VI line of FIG. It is a perspective view which shows an example of the vacuum piping structure of the supply side roll of FIG. 5, FIG. It is a flowchart which shows the example of control of the exposure apparatus by this invention. It is a perspective view of the supply side roll which shows another embodiment of the exposure apparatus by this invention. It is a perspective view of the supply side roll which shows another embodiment same as the above. It is a perspective view of the supply side roll which shows another embodiment same as the above.

  FIG. 1 shows an embodiment in which the present invention is applied to a so-called roll-to-roll direct exposure apparatus. The exposure apparatus 1 includes an electronic circuit that exposes a pattern on the surface of the long work W and a supply unit 10 that supplies the long work W in order from the upstream side to the downstream side in the conveyance direction of the long work W. Is provided, and a winding unit 20 that collects the exposed long workpiece W is provided.

  The long workpiece W is laminated with a photosensitive long film (synthetic resin flexible film with a photoconductor coated on the surface) on the base material of an electronic circuit board (printed circuit board) used in, for example, mobile phones and mobile devices. And rolled. The long workpiece W has a width of 25 to 50 cm and a length of several tens to several hundreds of meters. Hereinafter, of the front and back surfaces of the long workpiece W, the surface facing upward in the exposure unit 30 in FIG. 1 is referred to as “front surface”, and the surface facing downward in the drawing is referred to as “back surface”.

  In the following, the direction along the conveying direction M is “X”, the width direction of the long workpiece W perpendicular to the conveying direction M is “Y”, and the direction perpendicular to both X and Y (vertical direction) is “Z”. Represented by Moreover, when expressing the positional relationship of the elements in the exposure apparatus 1, the side close to the supply side roll is referred to as the upstream side, and the side close to the winding side roll is referred to as the downstream side.

  The supply unit 10 includes a supply side roll (supply side reel) 11, a guide roller 12, a supply side dancer roller 13, a guide roller 14, and a supply side in order from the upstream side to the downstream side in the conveyance direction of the long workpiece W. A braking roller 15 is provided, and a workpiece supply system for supplying the long workpiece W to the exposure unit 30 is configured. The winding unit 20 includes a winding side braking roller 25, a guide roller 24, a winding side dancer roller 23, a guide roller 22, and a winding side in order from the upstream side to the downstream side in the conveying direction of the long workpiece W. A roll (winding side reel) 21 is provided, and a work winding system for winding the long work W exposed by the exposure unit 30 is configured.

  The supply-side roll 11 holds a long workpiece W wound in a roll shape, and rotates the feed shaft 11 around its own rotation axis to supply the long workpiece W toward the downstream side (feed out). ) The winding-side roll 21 rotates around its own rotation axis to wind up and hold the long workpiece W supplied from the upstream side in a roll shape. The supply-side roll 11 and the winding-side roll 21 are provided with a rotation driving means (not shown) that intermittently drives the supply-side roll 11 and the winding-side roll 21 to rotate. The supply-side roll 11 and the winding-side roll 21 change their outer diameters when the supply amount and the winding amount of the long workpiece W change as the long workpiece W is conveyed.

  The guide rollers 12, 14, 22, 24, the supply-side braking roller 15 and the winding-side braking roller 25 span a long workpiece W between the supply-side roll 11 and the winding-side roll 21, and each rotation By rotating around the axis, the long workpiece W from the supply side roll 11 is conveyed toward the winding side roll 21.

  The supply-side braking roller 15 and the take-up-side braking roller 25 are arranged so that their rotation shafts are aligned in a substantially straight line in the horizontal direction. The supply-side braking roller 15 and the take-up-side braking roller 25 are constituted by nip rollers composed of two rollers disposed so as to face each other with the long workpiece W interposed therebetween. These two rollers are movable in the vertical direction (Z direction) by a mechanism (not shown) so as to sandwich or release the long workpiece W.

  The supply-side braking roller 15 and the take-up-side braking roller 25 can brake the long workpiece W by applying a brake so that the nip roller sandwiches the long workpiece W and the nip roller does not rotate. On the other hand, the supply-side braking roller 15 and the winding-side braking roller 25 separate the nip roller from the front and back surfaces of the long workpiece W so as not to hinder the movement of the long workpiece W when the long workpiece W is released.

  The supply-side braking roller 15 and the take-up-side braking roller 25 are each provided with a rotation driving means (not shown) that drives the rollers to rotate. In a state where the long workpiece W is sandwiched, the rotation driving means intermittently drives the supply-side braking roller 15 and the winding-side braking roller 25 with the substantially same rotational drive amount to rotate the supply-side roll 11 and the winding roll 11. The long workpiece W spanned between the take-up rolls 21 can be intermittently conveyed (frame advance) by a predetermined length. For example, a stepping motor is used as the rotation driving means, and the feed amount and acceleration of the long workpiece W are controlled with high accuracy.

  Note that the supply-side braking roller 15 and the take-up-side braking roller 25 may be suction rollers provided with suction means for sucking the back surface of the long workpiece W in place of the nip rollers that sandwich the long workpiece W. When the supply-side braking roller 15 and the winding-side braking roller 25 are rotationally driven by the rotation driving means in a state where the back surface of the long work W is attracted, the long work W can be conveyed.

  Further, the case where both the supply side brake roller 15 and the take-up side brake roller 25 have the rotation driving means is illustrated. However, when the brake roller conveys the long workpiece W only in one direction, the retract side (supply side) ) May be provided with rotational driving means, and the other (winding side) braking roller may be provided with only a brake. In that case, when the brake roller on the drawing side is driven to rotate, the brake roller on the other side (winding side) releases the brake while holding the long workpiece W, and the nip roller is rotated along with the movement of the long workpiece W. It is good to do so.

  The guide rollers 12, 14, 22, and 24 are auxiliary rollers that guide the long work W supplied (drawn) from the supply-side roll 11 to the downstream side. Of the guide rollers 12, 14, 22, and 24, at least the guide rollers 14 and 24 are arranged so that their rotation axes are arranged in parallel in the same horizontal plane. The guide rollers 12, 14, 22, 24 have flanges (not shown) that prevent the long workpiece W from shifting in the width direction (perpendicular direction in FIG. 1, FIG. 3, left-right direction in FIG. 2). You may have.

  The supply-side dancer roller 13 and the winding-side dancer roller 23 are lifted and lowered according to the conveyance of the long work W, and applying tension to the long work W prevents the long work W from being loosened or wrinkled. In addition, it has a function as a buffer for moving the long workpiece W by the exposure unit 30 for scanning exposure in the exposure unit described later.

  The exposure unit 30 is disposed between the supply-side braking roller 15 and the take-up-side braking roller 25. The exposure unit 30 includes an exposure stage 31 and an exposure unit 51.

  The exposure unit 51 includes a plurality of exposure heads (not shown), and is regularly arranged at a position away from the long workpiece W by a predetermined distance vertically upward. A light source and an illumination optical system (not shown) are arranged for each exposure head, and light emitted from the light source is guided to the corresponding exposure head via the corresponding illumination optical system. Each exposure head includes a DMD (Digital Micro-mirror Device) in which a plurality of micromirrors are two-dimensionally arranged, and an imaging optical system that forms an image of the DMD on a long work. The exposure unit 51 having a DMD is well known.

  The exposure stage 31 holds the back surface of the long workpiece W while holding it flat. The exposure stage 31 can be moved up and down between the upper end position where the exposure stage 31 contacts the back surface of the long workpiece W and the lower end position where the exposure stage 31 separates from the back surface of the long workpiece W by the lift drive means 34. It has become. Moreover, the stage moving part 32 for the exposure stage 31 to scan is provided. The stage moving unit 32 moves on a rail 33 that is horizontally disposed parallel to the conveying direction of the long workpiece W.

  In the exposure apparatus 1 described above, the first end of the long work W (work end detection means) is provided on the supply side roll 11 around which the long work W is wound. This embodiment will be described with reference to FIGS. As shown in FIGS. 2 and 3, the supply-side roll 11 includes a winding core 11 </ b> C that winds the long workpiece W, and a roll shaft 11 </ b> S that is inserted into the central cavity (hollow cylindrical portion) of the winding core 11 </ b> C. ing. On the outer periphery of the roll shaft 11S, an inscribed lug 114 that does not prevent insertion into the core 11C and ensures integration with the core 11C after insertion is provided at intervals in the circumferential direction. Such an inscribed lug 114 can be composed of, for example, a balloon body that expands and contracts by pneumatic pressure.

  As shown in FIGS. 3 and 4, the end portion (winding start end portion) Ws of the long workpiece W is temporarily fixed on the winding core 11 </ b> C by a temporary fixing tape 111. The term “temporarily fixed” refers to a fixed state in which the end portion Ws of the long workpiece W is not easily separated from the surface 11Ca of the core 11C in a state where no external force is applied, and is separated when an external force of a certain level or more is applied. The long workpiece W is densely wound on the core 11C, starting from a terminal end (winding start end) Ws fixed to the temporary fixing tape 111. A region in contact with the surface 11Ca of the winding core 11C from the end portion (winding start end portion) Ws of the long workpiece W (that is, the first one turn region, one turn length) is defined as “near end”. The symbol “We” is attached. A large number of cores 11C around which the long work W is wound are prepared outside the exposure apparatus and supplied to the roll shaft 11S of the exposure apparatus 1. Of course, a set of the roll shaft 11S and the core 11C can be prepared as the supply-side roll 11, and the set can be supplied to the exposure apparatus 1. Note that the winding direction of the long workpiece W around the supply-side roll 11 is depicted oppositely in FIGS. 4 and 1.

The roll shaft 11S is formed with an air suction path 112 at its axis, and the outer end of the air suction path 112 is connected to the vacuum pipe 122 shown in FIG. The vacuum pipe 122 is connected to a vacuum source 124, and a pressure sensor 123 is connected to the vacuum pipe 122. The detected pressure of the pressure sensor 123 is checked by the near end detection circuit 125. The rotary joint 119 is a known rotary joint that can be connected to the vacuum pipe 122 and the vacuum source 124 via the air suction path 112 regardless of the rotational position of the roll shaft 11S.

  An inner end portion of the air suction path 112 in the roll shaft 11S reaches a fitting portion with the core 11C, and a radial passage 112a communicating with the air suction path 112 is formed in the roll shaft 11S. The outer end of the radial passage 112a is opened to form a vacuum opening 113. On the other hand, the core 11C is provided with a detection opening 118 that communicates the inside and outside of the core 11C in the radial direction. Between the both ends of the core 11C and the roll shaft 11S, an annular sealing material 115 is provided to make the space between the outer peripheral surface of the roll shaft 11S and the inner peripheral surface of the core 11C airtight. That is, the cylindrical space 120 between the outer peripheral surface of the roll shaft 11S and the inner peripheral surface of the core 11C communicates only with the outside through the detection opening 118, and the core in which the long work W is wound tightly. The detection opening 118 of 11C is blocked by the long work W (near end We), and communication with the outside of the cylindrical space 120 is blocked. The temporary fixing position (position of the temporary fixing tape 111) of the long workpiece W with respect to the winding core 11C (the surface 11Ca thereof) is determined so that an appropriate circumferential distance (center angle A in FIG. 4) can be secured. .

  The roll shaft 11S is solid and has a small-diameter drive transmission shaft 11A extending coaxially from one end of the roll shaft 11S, and the drive transmission shaft 11A protrudes from the core 11C of the roll shaft 11S. The portion is pivotally supported by a pair of bearings 11B, and the tip of the drive transmission shaft 11A is connected to the rotation drive mechanism 11D. That is, the roll shaft 11S is pivotally supported by a cantilever structure in which the rotary joint 119 side is opened.

  The above apparatus operates as shown in FIG. A sufficient amount (number of windings) of the long work W exists on the outer periphery of the core 11C of the new supply-side roll 11 (FIG. 3). Therefore, the detection opening 118 of the core 11 </ b> C is blocked by the long work W. When the exposure apparatus 1 is operated, first, the vacuum source 124 is driven to reduce the pressure in the cylindrical space 120 to a negative pressure (lower than atmospheric pressure) via the vacuum pipe 122, the air suction path 112, and the radial path 112a. (Step S11). The pressure in the cylindrical space 120 is measured by the pressure sensor 123. As long as the long workpiece W blocks the detection opening 118, the pressure sensor 123 detects a negative pressure equal to or lower than a certain pressure. The near-end detection circuit 125 determines that an effective long workpiece W exists on the winding core 11C when the pressure detected by the pressure sensor 123 is a negative pressure equal to or lower than a predetermined pressure. The exposure apparatus 1 of this embodiment does not detect the radius (diameter) of the supply side roll 11 (core 11C) including the long workpiece W, but the supply side roll 11, which is a winding in this embodiment. Since it is detected that somewhere in the long work W in contact with the surface 11Ca of the core 11C, more specifically, the near end We is separated from the supply side roll 11 (the surface 11Ca of the core 11C), the long work W It is possible to reliably detect a state before the W end portion (winding start end portion) Ws is separated from the supply-side roll 11 (surface 11Ca of the core 11C).

  The exposure apparatus 1 starts roll exposure and the conveying operation (step-and-repeat operation) of the long workpiece W (step S13). When the detected pressure of the pressure sensor 123 has not reached the threshold value (less than a certain pressure), it is determined that the near end detection circuit 125 has not reached the near end, and the exposure apparatus 1 continues the production state, that is, roll exposure. The conveying operation of the long workpiece W is continued (S15: NO, S17, S15).

  When the long work W on the winding core 11C reaches the last turn, the long work W (its near end We) that has blocked the detection opening 118 as shown in FIG. ), The detection opening 118 is opened. Then, the cylindrical space 120 receiving the negative pressure of the vacuum source 124 via the radial passage 112a, the air suction path 112, and the vacuum pipe 122 communicates with the atmosphere, and the pressure detected by the pressure sensor 123 increases rapidly. To do. That is, when it is detected that the detected pressure of the pressure sensor 123 has exceeded the threshold value (that has fluctuated beyond the allowable value) (S15: YES), the near-end detection circuit 125 has reached the long-end workpiece W (end). It determines with having carried out (S19), and roll exposure and conveyance are stopped (S21). The drive of the supply side roll 11 (roll shaft 11S) and the winding side roll 21 is stopped.

  The exposure apparatus 1 of the present embodiment does not detect the radius (diameter) of the supply side roll 11 (core 11C) including the long workpiece W, but the surface of the supply side roll 11 (the core 11C). Since it is detected from the axial side of the supply-side roll 11 that somewhere in the near-end We of the long work W in contact with the surface 11Ca) is separated from the surface of the supply-side roll 11, the end portion of the long work W (Winding start end) The state before Ws leaves the surface of the supply-side roll 11, that is, it can be reliably detected that somewhere in the near-end We is separated from the surface of the supply-side roll 11.

  The operator releases the temporary fixing of the long workpiece W by the temporary fixing tape 111 and removes the winding core 11C from the roll shaft 11S. A new core 11C around which the long workpiece W is densely wound is set on the roll shaft 11S, and the end of the long workpiece W on the old core 11C side (the long workpiece W wound around the winding-side roll 21). And the start end of the long work W of the new core 11C. Thereafter, the operation of the exposure apparatus 1 is resumed.

  A plurality of detection openings 118 may be provided. For example, a plurality may be provided at the same position in the circumferential direction and a plurality at different positions in the circumferential direction. By providing a plurality, it is possible to more reliably detect that the long workpiece W has been fed from the core 11C to the near end We.

  5 to 7 are diagrams showing another embodiment of the present invention. The same members as those in the embodiment shown in FIG. 2 to FIG. In this embodiment, an air suction path 2112 extending in the axial direction is communicated with the air suction path 2112 in a thick cylindrical wall 130 in which the winding core 2011C is thick (a predetermined thickness in the radial direction). A radial passage 2112a whose outer end opens to the outer surface of the cylindrical wall 130 is formed. The opening of the radial passage 2112a constitutes a detection opening 2118. The air suction path 2112 projects in the axial direction from the core 2011C, and a crank passage 131 extending on the extension of the axis of the roll shaft 2011S is connected to the projecting end. A rotary joint 119 similar to that of the first embodiment is detachably attached to the distal end portion of the crank passage 131 so as to be coaxial with the core 2011C.

  The temporary fixing position (position of the temporary fixing tape 111) of the long workpiece W with respect to the winding core 2011C (cylindrical wall 130) is determined so as to ensure an appropriate circumferential distance (center angle A in FIG. 4) from the detection opening 2118. . An index 132 can be provided on the surface 2011Ca (surface of the supply-side roll 11) of the winding core 2011C (cylindrical wall 130) as shown in FIG. The indicator 132 can be composed of a plurality of distance indicators representing the circumferential distance from the detection opening 2118. Such an index 132 can be provided on the core 11C.

  In the embodiment shown in FIG. 5 to FIG. 7, the fact that the near end We of the long work W is separated from the surface of the supply side roll 11 (the surface 2011Ca of the winding core 2011C) from the axis side of the supply side roll 11. Since this is detected, it is ensured that the end portion (winding start end portion) Ws of the long workpiece W is in a state before leaving the surface of the supply-side roll 11, that is, somewhere in the near-end We is separated from the surface of the supply-side roll 11. Can be detected.

  The above is an embodiment in which the end of the long workpiece W is detected by negative pressure, but detection by positive pressure is also possible. In the positive pressure detection embodiment, the long workpiece W exists on the cores 11C and 2011C when the positive pressure is equal to or higher than a certain value, and the long workpiece W reaches the near end We when the positive pressure falls below a certain value. Detect.

  FIG. 9 shows a light emitting element 141 that emits detection light radially outward on the outer periphery of the roll shaft 11S (the axial center side of the supply side roll 11) and a light receiving sensor 142 that receives reflected light from the back surface of the long workpiece W. The example which provided the photoelectric sensor (light sensor) 140 which has is shown. A detection hole 143 penetrating in the radial direction corresponding to the photoelectric sensor 140 is formed in the winding core 11C. When the detection hole 143 is blocked by the near end We portion of the long work W, the light receiving sensor 142 receives the reflected light reflected by the long work W, but the long work W is separated from the roll shaft 2011S and detected. When the hole 143 is opened, the light receiving sensor 142 does not receive the reflected light, so that the near end We can be detected from the axial center side of the supply side roll 11.

  FIG. 10 shows an example in which a photoelectric sensor 140 similar to the example of FIG. 9 is provided on the outer periphery of a cylindrical wall 130 having a thick core 2011C similar to the examples of FIGS. The photoelectric sensor 140 is provided on the axial center side of the supply-side roll 11, and the photoelectric sensor 140 has a light emitting element 141 that emits detection light radially outward and a light receiving sensor 142 that receives reflected light from the back surface of the long workpiece W. The point that the near end We is detected from the axial center side of the supply-side roll 11 depending on whether or not the reflected light is received is the same as in the example of FIG.

  FIG. 11 shows a long length wound around the outer periphery of the core 2011C (cylindrical wall 130) on the outer periphery (axial center side of the supply-side roll 11) of the core 2011C instead of the photoelectric sensor 140 in the example of FIG. An example is shown in which a micro switch 150 is provided as a mechanical sensor that is turned on (turned off) when pressed by a workpiece W. When the long workpiece W is supplied from the winding core 2011C (cylindrical wall 130) and the near end We is separated from the micro switch 150, the state of the micro switch 150 is changed from on to off (or vice versa), whereby the near end We is changed. It can be detected from the axial center side of the supply side roll 11.

  As the power supply and signal transmission means for the sensors shown in FIGS. 9 to 11, for example, a known rotary connection connector (slip ring) can be used.

  In the above embodiment, the length in the transport direction of the near end We portion has been described as the length of one turn of the long substrate, but may be an arbitrary length of one turn or less. For example, the length may be 1/4. The length can be changed depending on the installation position of the detection opening.

  The above is an application of the present invention to a direct exposure apparatus using a DMD. However, the present invention relates to the long work W wound on the take-up roll while the long work W wound on the supply-side roll is taken up. As long as the exposure apparatus is an exposure apparatus, it can be applied to general exposure apparatuses such as a projection exposure apparatus and a contact exposure apparatus.

DESCRIPTION OF SYMBOLS 1 Exposure apparatus 2 Base 10 Supply part 11 Supply side roll (supply side reel)
11C 2011C core 11Ca 2011Ca surface (supply side roll surface)
11S 2011S Roll shaft 15 Supply side control roller 20 Winding part 21 Winding side roll (winding side reel)
25 Winding-side braking roller 30 Exposure section (exposure means)
31 Exposure Stage 32 Stage Moving Unit 33 Guide Rail 51 Exposure Unit (Exposure Means)
111 Temporary fixing tape 112 2112 Air suction path (communication path)
112a 2112a radial passage (communication passage)
113 vacuum opening 114 inscribed lug 118 2118 detection opening 119 rotary joint 120 cylindrical space 122 vacuum pipe 123 pressure sensor (pressure detection means)
124 Vacuum source (pneumatic means)
125 Near-end detection circuit (work end detection means)
130 Cylindrical wall 131 Crank passage 132 Indicator 140 Photoelectric (light) sensor 141 Light emitting element 142 Light receiving sensor 143 Detection hole 150 Micro switch (mechanical sensor)
W Long workpiece (photosensitive substrate)
Ws terminal part (winding start part)
We Near End

Claims (7)

A supply-side roll wound with a long workpiece;
Exposure means for exposing the long workpiece fed from the supply-side roll,
In the exposure apparatus in which the end portion of the supply side roll of the long work is temporarily fixed to the supply side roll and is tightly wound around the supply side roll in order from the temporary fixation end.
It is detected that a part of the long workpiece that is in contact with the surface of the supply side roll is separated from the surface of the supply side roll on the axial center side of the supply side roll. Provided with a workpiece end detection means
An exposure apparatus characterized by that. The exposure apparatus according to claim 1, wherein
The workpiece end detection means is opened on the outer peripheral surface of the supply-side roll and is closed by a long workpiece wound around the supply-side roll, and an empty space that applies a negative pressure or a positive pressure to the detection opening. An exposure apparatus comprising pressure means and pressure detection means for detecting that the negative pressure or the positive pressure fluctuates beyond an allowable value. The exposure apparatus according to claim 1, wherein
The workpiece end detection means is an exposure apparatus comprising a photoelectric sensor that detects whether or not the long workpiece is in contact with the supply-side roll. The exposure apparatus according to claim 1, wherein
The workpiece end detection means is an exposure apparatus comprising a mechanical sensor that detects whether the long workpiece is in contact with the supply-side roll. The exposure apparatus according to claim 2, wherein
The supply-side roll is composed of a core around which the long work is wound, and a roll shaft inserted into and removed from the center of the core,
An exposure apparatus in which the detection opening is provided in the core, and a communication path for spatially connecting the detection opening, the pneumatic unit, and the pressure detection unit is provided in the roll shaft. The exposure apparatus according to claim 2, wherein
The supply-side roll is composed of a core around which the long work is wound, and a roll shaft inserted into and removed from the center of the core,
The detection opening is provided in the core, and a communication path for spatially connecting the detection opening, the pneumatic means and the pressure detection means is provided in the thickness of the core. apparatus. In the exposure apparatus according to claim 5 or 6,
The said winding core is an exposure apparatus provided with the parameter | index which shows the temporarily fixed position of the termination | terminus part of the said elongate workpiece | work based on the detection position of the said workpiece | work completion | finish detection means.

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