JP2018025535A - Ion detection device, cleaning air generation device, and measuring system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an ion detection device that can improve portability without causing a reduction in detection accuracy.SOLUTION: An ion detection device 10 comprises an ion generation part 100, an ion filter part 200, a detection part 600, and a control part. The ion generation part 100 includes a first ion generator 110, an ion selector 120, and a second ion generator 130. The ion selector 120 includes a first selection filter 121 and a second selection filter 122. The control part performs calibration before detecting measurement target molecules, refers to a result of the calibration, and adjusts a voltage applied to the second ion generator 130 so that the amount of ions generated in the second ion generator 130 reaches a prescribed value.SELECTED DRAWING: Figure 6

Description

  The present invention relates to an ion detection device, a cleaning air generation device, and a measurement system, and more specifically, an ion detection device that selects and detects ions, and a cleaning that generates air suitable for cleaning the ion detection device. The present invention relates to an air production device and a measurement system having the cleaning air production device.

  One method for analyzing gas and vaporized chemical substances is a method called Field Asymmetric Waveform Ion Mobility Spectroscopy (hereinafter also referred to as “FAIMS”) (for example, Patent Document 1). To 3).

  In this method, ionized gas molecules and chemical substances (hereinafter collectively referred to as “chemical substances”) are screened by an ion filter based on the difference in mobility and detected by a detector. The chemical substance or the like is specified by

  2. Description of the Related Art In recent years, portability has been required for analysis devices used in FAIMS (hereinafter also referred to as “ion detection devices”) so that analysis can be performed at various sites.

  However, it has been difficult for conventional ion detection devices to improve portability without degrading detection accuracy.

  The present invention includes a first ion generator, an ion selector that selects ions from the first ion generator, a second ion generator that ionizes molecules that have passed through the ion selector, An ion detection apparatus comprising: an ion filter that selects ions from a second ion generator; and a detector that detects ions selected by the ion filter.

  According to the ion detector of the present invention, portability can be improved without causing a decrease in detection accuracy.

It is a schematic block diagram of the ion detector which concerns on one Embodiment. It is a figure for demonstrating the electric field strength dependence of the mobility of ion. It is FIG. (1) for demonstrating the locus | trajectory of a movement of three ion (ion A, ion B, ion C) between the electrodes of an ion filter part. It is a figure for demonstrating the electric field waveform generated between the electrode A and the electrode B. FIG. It is FIG. (2) for demonstrating the movement locus | trajectory of three ion (ion A, ion B, ion C) between the electrodes of an ion filter part. It is a figure for demonstrating the ion detector of Example 1. FIG. It is FIG. (1) for demonstrating the effect | action of an ion selector. It is FIG. (2) for demonstrating the effect | action of an ion selector. It is a figure for demonstrating the ion detector of Example 3. FIG. It is a figure for demonstrating the ion detector of Example 4. FIG. It is a figure for demonstrating the cleaning air production apparatus of Example 1. FIG. It is FIG. (1) for demonstrating the creation principle of the clean air in the cleaning air production apparatus of Example 1. FIG. It is FIG. (2) for demonstrating the preparation principle of the clean air in the cleaning air preparation apparatus of Example 1. FIG. FIG. 6 is a diagram (No. 3) for explaining the principle of producing clean air in the cleaning air producing apparatus of Example 1; FIG. 6 is a diagram (No. 4) for explaining the principle of producing clean air in the cleaning air producing apparatus of Example 1; It is a figure for demonstrating the changeover switch for switching the polarity of the voltage in the air preparation apparatus for washing | cleaning of Example 1. FIG. It is a figure for demonstrating the exhaust port and the clean air supply port in the cleaning air production apparatus of Example 1. FIG. It is a figure for demonstrating the air filter added to the cleaning air production apparatus of Example 1. FIG. It is a figure for demonstrating the air preparation apparatus for washing | cleaning of Example 2. FIG. It is FIG. (1) for demonstrating the preparation principle of the clean air in the cleaning air preparation apparatus of Example 2. FIG. It is FIG. (2) for demonstrating the creation principle of the clean air in the cleaning air preparation apparatus of Example 2. FIG. It is a figure for demonstrating the exhaust port and the clean air supply port in the air preparation apparatus for washing | cleaning of Example 2. FIG. It is a figure for demonstrating the air filter added to the cleaning air production apparatus of Example 2. FIG. It is a figure for demonstrating the modification of the air preparation apparatus for washing | cleaning of Example 2. FIG. It is a figure for demonstrating the measurement system which has the air preparation apparatus for washing | cleaning of Example 1. FIG. It is a figure for demonstrating the measurement system which has the air preparation apparatus for washing | cleaning of Example 2. FIG. It is FIG. (1) for demonstrating the damper for flow path switching. It is FIG. (2) for demonstrating the damper for flow path switching. It is a figure for demonstrating the case where the air filter is provided in the duct. It is a figure for demonstrating the case where clean air is created with ion detection apparatus itself.

"Overview"
Hereinafter, an embodiment of the present invention will be described with reference to the drawings. FIG. 1 shows a schematic configuration of an ion detector 10 according to an embodiment.

  The ion detection apparatus 10 includes an ion generation unit 100, an ion filter unit 200, a detection unit 600, a control unit 900, and the like. Here, an XYZ three-dimensional orthogonal coordinate system is used, and the traveling direction of the molecule to be measured is the + Z direction.

  The ion generator 100 ionizes the molecule to be measured. The ion filter unit 200 selects ions from the ion generation unit 100. The detection unit 600 detects ions selected by the ion filter unit 200. The control unit 900 controls the entire apparatus.

  The basic detection principle of the ion detector 10 will be described.

  The ion filter unit 200 has two electrodes (electrode A and electrode B) arranged to face each other.

In the environment of the electric field E, the ions move at a moving speed V expressed by the following equation (1). Here, K is the mobility of the ions.
V = K × E (1)

  By the way, ion mobility has electric field strength dependency. And this electric field strength dependence changes with kinds of ion. FIG. 2 shows, as an example, the electric field strength dependence of the mobility of three different types of ions (ion A, ion B, and ion C). In FIG. 2, for ease of understanding, the mobility of each ion is normalized so that the electric field strength is equal to zero.

  The mobility of the three ions (ion A, ion B, and ion C) is almost unchanged at a low electric field strength of 9 kV / cm or less. As the electric field strength increases from about 10 kV / cm, characteristics specific to the type of ion appear in the mobility. The mobility of ions A greatly increases as the electric field strength increases, and reaches a maximum at Emax. The mobility of ions B increases more slowly than ions A. The mobility of ions C gradually decreases. In this way, the characteristics of the tripartite are shown. The ion filter unit 200 performs ion selection using the difference between the mobility at a low electric field strength and the mobility at a high electric field strength.

  FIG. 3 shows a trajectory of movement of three ions (ion A, ion B, ion C) between the electrodes of the ion filter unit 200. Here, for the sake of simplicity, the electrodes A and B are parallel plates made of a conductor for convenience.

  By making the waveform of the electric field generated between the electrode A and the electrode B an asymmetric electric field waveform, only arbitrary ions (ion B in FIG. 3) can reach the detection unit 600.

FIG. 4 shows an example of an electric field waveform generated between the electrode A and the electrode B. In this electric field waveform, a positive high electric field (Emax) and a negative low electric field (Emin) are alternately repeated. The high electric field period (t1) is shorter than the low electric field period (t2), and the ratio of t1 to t2 is 1: 3 to 1: 5. Thus, the electric field waveform is asymmetric with respect to the upper and lower sides. This asymmetric electric field waveform is set such that the time-average electric field is zero and the following equation (2) is satisfied.
| Emax | × t1 = | Emin | × t2 (2)

  That is, the area of the region A and the area of the region B in FIG.

In the following, as shown in the following equation (3), the value of | Emax | × t1 and the value of | Emin | × t2 are β.
| Emax | × t1 = | Emin | × t2 = β (3)

By the way, the velocity Vup at which ions move in the Y-axis direction during the high electric field period (t1) is expressed by the following equation (4). Here, K (Emax) is the ion mobility when the electric field is high (Emax).
Vup = K (Emax) × | Emax | (4)

  For example, when | Emax | is about 10 kV / cm or more, the mobility of three ions (ion A, ion B, ion C) differs for each ion (see FIG. 2). Are different in three ways. That is, as shown in FIG. 5, the inclinations of the movement trajectories of the three ions are different from each other in the period (t1) of the high electric field.

The displacement yup (see FIG. 5), which is the distance that the ions have moved in the Y-axis direction during the high electric field period (t1), is expressed by the following equation (5).
yup = Vup × t1 (5)

On the other hand, the velocity Vdown at which ions move in the Y-axis direction during the low electric field period (t2) is expressed by the following equation (6). Here, K (Emin) is ion mobility at a low electric field (Emin).
Vdown = −K (Emin) × | Emin | (6)

  For example, when | Emin | is about 5 kV / cm or less, the mobility of three ions (ion A, ion B, and ion C) is almost the same (see FIG. 2), so the movement speed Vdown of the three ions Are almost identical. That is, as shown in FIG. 5, the inclinations of the movement trajectories of the three ions are substantially the same during the low electric field period (t2).

The displacement ydown (see FIG. 5), which is the distance that the ions have moved in the Y-axis direction during the low electric field period (t2), is expressed by the following equation (7).
ydown = Vdown × t2 (7)

  Within one period (T) of the asymmetric electric field waveform, ions move in the + Z direction while moving in the + Z direction, move in the + Y direction during the period t1, and move in the −Y direction during the period t2.

  Therefore, as shown in FIG. 5, the head toward the electrode A while repeating the zigzag motion (ion A), the head toward the electrode B while repeating the zigzag motion (ion C), the displacement in the + Y direction, and the −Y direction. Is balanced with the displacement (ion B) toward the detection unit.

By the way, the average displacement ΔyRF in the Y-axis direction of ions in one cycle (T) in the asymmetric electric field waveform is expressed by the following equation (8).
ΔyRF = yup + ydown
= K (Emax) * | Emax | * t1-K (Emin) * | Emin | * t2 (8)

And said (8) Formula can be represented like the following (9) Formula using said (3) Formula.
ΔyRF = β {K (Emax) −K (min)} (9)

Here, when K (Emax) −K (min) is set to ΔK, the above equation (9) is expressed as the following equation (10).
ΔyRF = βΔK (10)

  β is a constant determined by an asymmetric electric field applied between the electrode A and the electrode B. Therefore, the displacement of the ions per cycle (T) of the asymmetric electric field waveform in the Y-axis direction depends on ΔK which is the difference between the mobility in the low electric field (Emin) and the mobility in the high electric field (Emax).

  Assuming that only the carrier gas transports ions in the Z-axis direction, the displacement Y of the ions in the Y-axis direction when the ions stay between the electrodes A and B is the following (11) It becomes an expression. Here, tres is an average time during which ions stay between the electrode A and the electrode B (average ion stay time).

  The average ion residence time tres is expressed by the following equation (12). Here, A is the cross-sectional area of the ion filter portion, L is the electrode length (electrode depth) in the Z-axis direction (see FIG. 5), and Q is the volumetric flow rate of the carrier gas. V is the volume (= AL) of the ion filter section.

  The above formula (11) can be expressed as the following formula (13) using the above formula (12) and the above formula (3). Here, D is the duty of the asymmetric electric field waveform, and D = t1 / T.

  When the same value is used for all ion species for the high electric field Emax in the asymmetric electric field waveform, the volume V of the ion filter section, the duty D of the asymmetric electric field waveform, and the volume flow rate Q of the carrier gas, the above equation (13) From this, it can be seen that the displacement Y is proportional to the difference ΔK between the mobility at the low electric field (Emin) inherent to the ion species and the mobility at the high electric field (Emax).

  In FIG. 5, only the ion B has a minimum displacement Y and can reach the detection unit 600, but by changing the duty D, an ion having ΔK different from the ion B reaches the detection unit 600. Can be made. Furthermore, by changing the duty D in small increments, it is possible to detect the presence and amount of various ions with different ΔK.

  In addition, as a method for detecting various ion species having different ΔK in the ion detector 10, there is a method of superimposing a low-intensity DC electric field on an asymmetric electric field waveform. According to this method, the amount of displacement in the Y-axis direction during the period t1 and the period t2 can be changed. Therefore, the ion species that can reach the detection unit 600 without contacting the electrode A or the electrode B can be continuously changed. The DC electric field superimposed on the asymmetric electric field waveform is called compensation voltage (CV: compensation voltage). In this method, the presence / absence and amount of various ion species having different ΔK are detected by sweeping the compensation voltage.

  By the way, the ions that have contacted the electrode A or the electrode B before reaching the detection unit 600 are neutralized and are not detected.

  In addition, since the control part 900 is substantially the same as the control part in the conventional ion detection apparatus, detailed description about operation | movement of the control part 900 is abbreviate | omitted here.

"Details"
An ion detector is a device that detects the type and amount of a trace amount of molecules contained in a gas. Ion detection devices are highly versatile and are used in a wide range of applications, including analysis of drugs and chemical components in samples, and analysis of harmful gases, biological gases, and odors in the environment. It was large and the usage environment was limited.

  In addition, a conventional ion detector requires a pump or the like, and no portable device has been found. Patent Document 3 discloses that a standard device (gas) is used for the purpose of calibrating the response of the analyzer. However, when a separate pump is used, the difference in the proportion of minute gas components contained in the environmental gas affects the detection accuracy, and portability is reduced. When a pressurized gas storage tank is used, portability is reduced. There was an inconvenience.

  By the way, as described above, the ion detector performs analysis by utilizing the difference in mobility depending on the ion species when the electric field intensity is 10 kV / cm or more. In the example of FIG. 2 described above, Emax, that is, an electric field strength of about 20 kV is generated between the two electrodes, whereby the ion species are separated.

  For example, if the distance between two electrodes is 1 mm (= 0.1 cm), the voltage applied between the two electrodes to generate an electric field of 20 kV / cm is 2 kV (= 20 kV / cm × 0.1 cm). ) In this case, if the ion detector is to be realized by battery driving, 2 kV must be generated based on several V to several tens of volts, and it is necessary to use a booster circuit or a high breakdown voltage component. This leads to an increase in the number of parts, an increase in the size of the ion detector, and an increase in power consumption.

  In order to achieve the same electric field strength at a low voltage, the distance between the two electrodes may be reduced. For example, when the distance between two electrodes is 1 μm (0.0001 cm), the voltage applied between the two electrodes to generate an electric field of 20 kV / cm is 2 V (= 20 kV / cm × 0.0001 cm). It becomes.

  In the present embodiment, the distance between the two electrodes in the ion filter unit 200 is made smaller than in the prior art.

<Example 1>
An ion detection apparatus 10 of Example 1 is shown in FIG. In the ion detection apparatus 10, the ion generation unit 100 includes a first ion generator 110, an ion selector 120, and a second ion generator 130.

  The first ion generator 110 ionizes molecules sucked into the ion generator 100 by corona discharge and generates an air flow.

  The ion selector 120 is disposed on the + Z side of the first ion generator 110 and has a first selection filter 121 and a second selection filter 122.

  The second ion generator 130 is arranged on the + Z side of the ion selector 120, ionizes the molecules that have passed through the second selection filter 122 by corona discharge, and generates an air flow. The ions that have passed through the second ion generator 130 are ions from the ion generation unit 100 and are sent to the ion filter unit 200.

  In the ion detector 10, calibration is performed prior to detection of the molecule to be measured.

  During calibration, outside air is inhaled into the ion generator 100. When ionization in the first ion generator 110 proceeds to some extent, an electric field having a polarity opposite to that of ions (negative polarity if the ions are positive, positive polarity if the ions are negative) is applied to the first sorting filter 121. The selection filter 122 is applied with an electric field having the same polarity as ions (positive polarity if the ions are positive, and negative polarity if the ions are negative).

  In this case, the molecules ionized by the first ion generator 110 are directed to the first sorting filter 121, pass through the first sorting filter 121, and discharged (see FIG. 7). On the other hand, molecules that have not been ionized by the first ion generator 110 go to the second sorting filter 122 and pass through the second sorting filter 122 (see FIG. 8).

  The gas passing through the second sorting filter 122 includes molecules having a small ionization tendency such as nitrogen and oxygen, and is a component close to air. In the present embodiment, this gas is referred to as “reference gas”.

  The reference gas is ionized by the second ion generator 130. The ionized reference gas is sent to the ion filter unit 200. The ion filter unit 200 is set so that all ions pass through. Ions that have passed through the ion filter unit 200 are detected by the detection unit 600. Here, the voltage applied to the second ion generator 130 is adjusted by the control unit 900 so that the amount of ion generation in the second ion generator 130 becomes a preset specified value. Yes. The specified value is set so that the detection amount of ions detected by the detection unit 600 is constant.

  The amount of ions generated in the second ion generator 130 varies depending on the contamination, wear, and other environments of the terminals in the second ion generator 130, but here, the voltage applied to the second ion generator 130 Therefore, the molecule to be measured can be detected with high accuracy.

  That is, the molecule to be measured can be detected with high accuracy without depending on the environmental conditions and conditions of the ion detector.

  Therefore, according to the ion detection apparatus 10 of the first embodiment, portability can be improved without causing a decrease in detection accuracy.

<Example 2>
The ion detection apparatus 10 according to the second embodiment is characterized in that the detection data in the detection unit 600 is stored as “environment data” in the calibration in the ion detection apparatus 10 according to the first embodiment described above. .

  Then, the control unit 900 refers to the environmental data when detecting the molecule to be measured, and corrects the detection data in the detection unit 600.

  Therefore, also in this case, the same effect as that of the ion detector 10 of the first embodiment can be obtained.

<Example 3>
An ion detection apparatus 10 of Example 3 is shown in FIG. The ion detector 10 is characterized in that a porous member 710 and a heating element 720 are added to the ion detector 10 of Example 1 described above.

  The porous member 710 is a member that is disposed on the −Z side of the ion generation unit 100, has air permeability, has high thermal conductivity, and has a large surface area. Here, the porous member 710 is made of porous metal or metal powder. The heating element 720 covers the entire apparatus and can control the temperature of the passing gas to an arbitrary temperature.

  By the way, when the temperature of the passing gas changes, the amount of ions generated by the first ion generator 110 and the second ion generator 130 changes, and the detection result of the detection unit 600 changes. As a result, an error occurs in the value of the quantitative analysis.

  In the ion detector 10 of Example 3, heat exchange between the heating element 720 and the passing gas can be quickly performed, and the temperature change of the passing gas can be suppressed.

  Therefore, for example, when the temperature of the passing gas is lower than room temperature, the ion detector 10 of the third embodiment is suitable.

<Example 4>
An ion detection apparatus 10 of Example 4 is shown in FIG. The ion detector 10 is characterized in that a heat retaining member 730 is added to the ion detector 10 of the third embodiment described above.

  The heat retaining member 730 covers the outer periphery of the heating element 720 and can suppress the escape of heat from the heating element 720 to the outside air. As a result, energy saving can be achieved and the influence of environmental temperature can be suppressed.

  By the way, if the molecule to be detected remains inside the ion detector 10, the detection accuracy in the next detection may be lowered. Therefore, in this case, prior to the next detection operation, it is preferable to clean the inside of the ion detector 10 and remove the remaining molecules to be detected. Hereinafter, a molecule to be removed is referred to as “a molecule to be removed”.

  As a method of cleaning the inside of the ion detection device 10, there is a method of supplying air to the ion detection device 10 and passing the inside of the ion detection device 10. In this method, molecules to be removed are discharged to the outside of the ion detector 10 by the air flow. Hereinafter, the air used to clean the inside of the ion detector 10 is also referred to as “cleaning air”.

  However, if the cleaning air contains molecules to be removed, the cleaning effect may not be obtained. Therefore, it is necessary that the cleaning air does not contain molecules to be removed. Hereinafter, air that does not contain molecules to be removed is also referred to as “clean air”. And the apparatus which produces this clean air is called "cleaning air production apparatus".

  Hereinafter, a cleaning air producing apparatus according to an embodiment will be described. Note that the atmosphere is composed of a large number of types of molecules. Here, for the sake of clarity, it is assumed that the atmosphere is composed of molecules of air components and molecules to be removed. Further, it is assumed that the molecules to be removed are more easily ionized than the air component molecules.

<Example 1>
FIG. 11 shows a cleaning air producing apparatus 150 according to the first embodiment. The cleaning air creation device 150 includes an ion generator 160 and an ion selector 170.

  The ion generator 160 is an ion generator similar to the first ion generator 110 in the ion detector 10 described above, and ionizes molecules to be removed included in the inhaled air.

  The ion sorter 170 is an ion sorter similar to the ion sorter 120 in the ion detector 10 described above, and is arranged on the + Z side of the ion generator 160, and the first sort filter 171 and the second sort filter 172. have.

(1) When a molecule to be removed is ionized to become a positive (plus) ion.

  In this case, as shown in FIG. 12, in the ion selector 170, the negative electrode of the battery (battery) is connected to the first selection filter 171, and the positive electrode of the battery is connected to the second selection filter 172. In the ion generator 160, a battery is connected so as to generate positive (plus) ions.

  When the atmosphere is introduced into the ion generator 160, the molecules to be removed are ionized into positive (plus) ions. Then, the ionized molecules to be removed are repelled by the second sorting filter 172 and travel toward the first sorting filter 171. On the other hand, air component molecules travel to the second sorting filter 172 having a low atmospheric pressure. In this way, in the ion selector 170, the air component molecules and the molecules to be removed are separated (see FIG. 13). Molecules that have passed through the second sorting filter 172 are air component molecules and are clean air.

(2) A case where a molecule to be removed becomes negative (minus) ion when ionized.

  In this case, as shown in FIG. 14, in the ion selector 170, the positive electrode of the battery is connected to the first selection filter 171, and the negative electrode of the battery is connected to the second selection filter 172. In the ion generator 160, a battery is connected so that negative (minus) ions are generated.

  When the atmosphere is introduced into the ion generator 160, the molecules to be removed are ionized to become negative (minus) ions. Then, the ionized molecules to be removed are repelled by the second sorting filter 172 and travel toward the first sorting filter 171. On the other hand, air component molecules travel to the second sorting filter 172 having a low atmospheric pressure. In this way, in the ion selector 170, the air component molecules and the molecules to be removed are separated (see FIG. 15). Molecules that have passed through the second sorting filter 172 are air component molecules and are clean air.

  By the way, as shown in FIG. 16 as an example, by providing a changeover switch 151 that can switch the polarity of the battery, when a molecule to be removed becomes a positive ion when it is ionized and removed It is possible to deal with both cases where the target molecule is made of a molecule that becomes a negative (minus) ion when ionized.

  As shown in FIG. 17, the molecules to be removed are released from the cleaning air creation device 150 through the exhaust port, and the clean air is released from the cleaning air creation device 150 through the clean air supply port.

  Further, when different particles are included in the atmosphere, as shown in FIG. 18 as an example, an air filter 152 may be added to the input side of the atmosphere in the cleaning air creating apparatus 150. Thereby, it is possible to suppress clogging of foreign particles and the like in the ion generator 160 and the ion selector 170.

<Example 2>
FIG. 19 shows a cleaning air production apparatus 150 according to the second embodiment. The cleaning air generating apparatus 150 includes a first ion generator 160A, a first ion selector 170A, a second ion generator 160B, and a second ion selector 170B.

  The first ion generator 160A is an ion generator similar to the first ion generator 110 in the ion detector 10 described above, and ionizes molecules to be removed contained in the inhaled air. Here, positive (plus) or negative (minus) ions are generated.

  The first ion selector 170A is an ion selector similar to the ion selector 120 in the ion detector 10 described above, and is arranged on the + Z side of the first ion generator 160A. A second sorting filter 172A is provided. In the first ion selector 170A, the molecules ionized by the first ion generator 160A and the molecules not ionized are separated.

  The second ion generator 160B is an ion generator similar to the first ion generator 110 in the ion detector 10 described above, and is a molecule to be removed contained in the atmosphere that has passed through the second sorting filter 172A. Is ionized. The second ion generator 160B generates ions having a polarity opposite to that of the first ion generator 160A.

  The second ion selector 170B is an ion selector similar to the ion selector 120 in the ion detector 10 described above, and is disposed on the + Z side of the second ion generator 160B. A second sorting filter 172B is provided. In the second ion selector 170B, the molecules ionized by the second ion generator 160B and the molecules not ionized are separated.

  That is, the cleaning air creation device 150 of the second embodiment is configured by connecting two similar configurations in series to the cleaning air creation device of the first embodiment. Therefore, in the following, a portion including the first ion generator 160A and the first ion selector 170A is also referred to as a “front stage portion”, and includes the second ion generator 160B and the second ion selector 170B. The part is also referred to as “rear part”.

  In FIG. 20, the same configuration as that of the cleaning air preparation device of the first embodiment shown in FIG. 12 is used as the front stage, and the same configuration as that of the cleaning air preparation device of the first embodiment shown in FIG. An example in which is used as a rear stage is shown.

  In this case, the negative electrode of the battery is connected to the first sorting filter 171A, and the positive electrode of the battery is connected to the second sorting filter 172A. In the first ion generator 160A, a battery is connected so that positive (plus) ions are generated. The positive electrode of the battery is connected to the first sorting filter 171B, and the negative electrode of the battery is connected to the second sorting filter 172B. In the second ion generator 160B, a battery is connected so as to generate negative (minus) ions.

  In the configuration of FIG. 20, when the atmosphere is introduced into the first ion generator 160A, some of the molecules to be removed are ionized to become positive (plus) ions. Then, the ionized molecules to be removed are repelled by the second sorting filter 172A and travel toward the first sorting filter 171A. On the other hand, air component molecules and molecules to be removed that have not been ionized by the first ion generator 160A are directed to the second sorting filter 172A having a low atmospheric pressure (see FIG. 21).

  Molecules of air components that have passed through the second sorting filter 172A and molecules to be removed that have not been ionized by the first ion generator 160A are directed to the second ion generator 160B.

  In the second ion generator 160B, molecules to be removed that have not been ionized by the first ion generator 160A are ionized to become negative (minus) ions. The ionized molecules to be removed are repelled by the second sorting filter 172B and travel toward the first sorting filter 171B. On the other hand, the air component molecules go to the second sorting filter 172B having a low atmospheric pressure (see FIG. 21). Molecules that have passed through the second sorting filter 172B are air component molecules and are clean air.

  That is, positive (plus) ionized molecules to be removed are separated at the front stage, and negative (minus) ionized molecules to be removed are separated at the rear stage. In this way, the air component molecules and the molecules to be removed are separated to create clean air.

  The cleaning air creation device 150 of the second embodiment includes a case where the molecules to be removed are composed of a plurality of types of molecules and include molecules that become positive (plus) ions and molecules that become negative (minus) ions when ionized. Even so, clean air can be created.

  As shown in FIG. 22, the molecules to be removed are released from the cleaning air preparation device 150 through the exhaust port, and the clean air is released from the cleaning air preparation device 150 through the clean air supply port.

  Further, when different particles are included in the atmosphere, as shown in FIG. 23 as an example, an air filter 152 may be added to the input side of the atmosphere in the cleaning air creating apparatus 150. Thereby, it can suppress that each particle | grain generator and each ion separator are clogged with foreign particles.

  As shown in FIG. 24, in contrast to the configuration of FIG. 21 described above, the configuration similar to that of the cleaning air creation device of Example 1 shown in FIG. A configuration similar to that of the cleaning air generating apparatus of the first embodiment shown may be used as the rear stage.

  In this case, the positive electrode of the battery is connected to the first sorting filter 171A, and the negative electrode of the battery is connected to the second sorting filter 172A. In the first ion generator 160A, a battery is connected so as to generate negative (minus) ions. The negative electrode of the battery is connected to the first sorting filter 171B, and the positive electrode of the battery is connected to the second sorting filter 172B. In the second ion generator 160B, a battery is connected so as to generate positive (plus) ions.

  In this configuration, molecules to be removed that are ionized negatively (minus) are separated at the front part, and molecules that are to be removed ionized positively (plus) are separated at the rear part.

  Next, a measurement system according to an embodiment will be described.

  In FIG. 25, the cleaning air generating device 150 of Example 1 and the clean air supply port of the cleaning air generating device 150 connected to the cleaning air generating device 150 are shown. A measurement system 180 including a duct 181 to be formed and an ion detection device 10 connected to the duct 181 and supplied with clean air via the duct 181 is shown.

  In FIG. 26, the cleaning air generating device 150 of Example 2 and the clean air supply port of the cleaning air generating device 150 connected to the cleaning air generating device 150 are shown. A measurement system 180 including a duct 181 to be formed and an ion detection device 10 connected to the duct 181 and supplied with clean air via the duct 181 is shown.

  As an example, as shown in FIGS. 27 and 28, a damper 182 for switching the flow path may be attached to the duct 181 so that the air for cleaning and the air for measurement can be easily selected. In this case, operability can be improved. Further, the cleaning air creation device 150 and the ion detection device 10 can be integrated. The flow path is switched in the order of cleaning (30 minutes) → calibration → measurement, for example.

  Further, when the air filter 152 is added to the cleaning air generating apparatus 150, as shown in FIG. 29 as an example, when the air filter 153 having a lower air permeation pressure than the air filter 152 is used, the damper 182 is used. Is unnecessary.

  As described above, the ion detection apparatus 10 according to the present embodiment includes the ion generation unit 100, the ion filter unit 200, the detection unit 600, the control unit 900, and the like. The ion generator 100 includes a first ion generator 110, an ion selector 120, and a second ion generator 130. Further, the ion selector 120 has a first selection filter 121 and a second selection filter 122.

  In this case, the ion detection apparatus 10 can perform calibration before detecting the molecule to be measured, and can accurately detect the molecule to be measured even if the usage environment or the condition of the apparatus changes. . That is, even if there is no pressurized gas storage tank, the molecule to be measured can be detected with high accuracy.

  Therefore, according to the ion detection apparatus 10, portability can be improved without causing a decrease in detection accuracy.

  Then, in the ion detection apparatus 10 of the first embodiment, the second ion is determined so that the ion generation amount in the second ion generator 130 becomes a preset value with reference to the result of calibration. The voltage applied to the generator 130 is adjusted.

  Furthermore, in the ion detection apparatus 10 of the second embodiment, the control unit 900 stores the detection data of the detection unit 600 at the time of calibration as “environment data”, and the environment is detected when detecting the molecule to be measured. The detection data in the detection unit 600 is corrected with reference to the data.

  Moreover, in the ion detector 10 of Example 3, the porous member 710 and the heat generating body 720 are added, and the temperature change of the sucked gas is suppressed.

  Moreover, in the ion detector 10 of Example 4, the heat retention member 730 is added, and while saving energy, the influence of environmental temperature is suppressed.

  Also for the ion detectors 10 of the first to fourth embodiments, the portability can be improved without causing a decrease in detection accuracy.

  Moreover, the cleaning air production apparatus 150 of Example 1 according to the present embodiment includes an ion generator 160 and an ion selector 170. The ion generator 160 ionizes molecules to be removed contained in the atmosphere. The ion sorter 170 sorts the molecules ionized by the ion generator 160 and the molecules not ionized.

  The cleaning air generating apparatus 150 of the first embodiment is a molecule that becomes a positive (plus) ion when the molecule to be removed is ionized or a molecule that becomes a negative (minus) ion when the molecule to be removed is ionized. The molecule to be removed can be efficiently removed from the atmosphere. Therefore, for example, cleaning air suitable for cleaning the ion detector 10 can be created.

  And the molecule | numerator of removal object is ionized by providing the changeover switch 151 which can switch the polarity of the voltage applied to the ion generator 160 and the ion selector 170 in the cleaning air production apparatus 150 of Example 1. And a molecule that becomes a positive (plus) ion, and a case that a molecule that becomes a negative (minus) ion when the molecule to be removed is ionized can be dealt with.

  The changeover switch 151 may be manually operated by the user, or may be electrically operated from the control unit, for example, by providing a control unit.

  Further, in the cleaning air generating apparatus 150 of the first embodiment, an air filter may be further provided in the previous stage of the ion generator 160. In this case, it is possible to suppress clogging of foreign particles and the like in the ion generator 160 and the ion selector 170.

  In addition, the cleaning air generation apparatus 150 of Example 2 according to the present embodiment includes a first ion generator 160A, a first ion selector 170A, a second ion generator 160B, and a second ion selector. 170B and the like.

  The first ion generator 160A ionizes molecules to be removed contained in the atmosphere. Here, positive (plus) or negative (minus) ions are generated. The first ion sorter 170A sorts the molecules ionized by the first ion generator 160A and the molecules not ionized.

  The second ion generator 160B is supplied with molecules that have not been ionized by the first ion generator 160A selected by the first ion selector 170A. The second ion generator 160B ionizes molecules to be removed. Here, ions having a polarity different from that of the first ion generator 160A are generated.

  The second ion sorter 170B sorts the molecules ionized by the second ion generator 160B and the molecules not ionized.

  In the case where the cleaning air generation device 150 of the second embodiment includes molecules that become positive (plus) ions and molecules that become negative (minus) ions when the molecules to be removed are ionized, they are efficiently used. Can be removed from the atmosphere. Therefore, for example, cleaning air suitable for cleaning the ion detector 10 can be created.

  In the cleaning air creation device 150 of the second embodiment, an air filter 152 may further be provided in front of the first ion generator 160A. In this case, it is possible to suppress clogging of foreign particles and the like in each ion generator and each ion selector.

  And since the air preparation apparatus 150 for washing | cleaning of Example 1 and 2 is small and can drive a battery, it can be taken out outdoors easily. This also supports improving the portability of the ion detector 10.

  The clean air created by the cleaning air creation device 150 can also be used for cleaning measuring devices other than the ion detector 10.

  In addition, the measurement system 180 according to the present embodiment includes a cleaning air creation device 150, a duct 181 and the ion detection device 10. The duct 181 forms a flow path for guiding the clean air (cleaning air) created by the cleaning air creation device 150 to the ion detection device 10.

  Since the measurement system 180 includes the ion detection device 10 and the cleaning air creation device 150, the measurement system 180 is small in size, excellent in portability, and battery driven. Therefore, according to the measurement system 180, outdoor ion detection can be easily performed. And the operativity can be improved by providing the damper 182 in the duct 181. It is also possible to integrate the ion detector 10 and the cleaning air preparation device 150.

  In the measurement system 180 of the above embodiment, a measurement device other than the ion detection device may be used instead of the ion detection device 10.

  As an example, as shown in FIG. 30, it is possible to clean the ion detector 10 by creating clean air by the ion detector 10 itself without using the cleaning air generator 150. In this case, the control unit 900 sets the magnitude and polarity of the voltage applied to the first ion generator 110 and the ion selector 120 according to the molecule to be removed.

  DESCRIPTION OF SYMBOLS 10 ... Ion detection apparatus, 100 ... Ion generator, 110 ... 1st ion generator, 120 ... Ion sorter, 121 ... 1st sort filter, 122 ... 2nd sort filter, 130 ... 2nd ion generation 150 ... Cleaning air generating device 151 ... Changeover switch (switching means for switching the polarity of voltage), 152 ... Air filter, 153 ... Air filter, 160 ... Ion generator, 160A ... First ion generator , 160B ... second ion generator, 170 ... ion selector, 170A ... first ion selector, 170B ... second ion selector, 171 ... first selection filter, 171A ... first selection filter, 171B ... first sorting filter, 172 ... second sorting filter, 172A ... second sorting filter, 172B ... second sorting filter, 180 ... total System: 181 ... Duct (tube member), 182 ... Damper (switching means for switching gas), 200 ... Ion filter part (ion filter), 600 ... Detection part (detector), 710 ... Porous member, 720 ... Heating element, 730 ... heat insulating member, 900 ... control unit (processing unit).

US Patent Application Publication No. 2015/0028196 Japanese Patent No. 40636676 Japanese Patent No. 5221954

Claims (16)

A first ion generator;
An ion selector for selecting ions from the first ion generator;
A second ion generator for ionizing molecules that have passed through the ion selector;
An ion filter for selecting ions from the second ion generator;
A detector for detecting ions selected by the ion filter.   The ion selector discharges ions from the first ion generator, and supplies molecules that have not been ionized by the first ion generator to the second ion generator. Item 12. The ion detector according to Item 1. A porous member through which a gas supplied to the first ion generator passes;
The ion detector according to claim 1, further comprising a heating element for adjusting a temperature of the porous member.   The ion detection apparatus according to claim 3, wherein the porous member is made of porous metal or metal powder.   The ion detector according to claim 3, further comprising a heat retaining member that covers the heating element. A controller for adjusting a voltage applied to the second ion generator;
The controller adjusts a voltage applied to the second ion generator so that an ion generation amount in the second ion generator becomes a predetermined value set in advance. The ion detector as described in any one of Claims 1-5.   A processing unit that corrects detection data at the detector when a molecule to be measured is introduced with reference to detection data at the detector when only outside air is introduced is provided. The ion detector according to any one of claims 6 to 6. An ion generator;
An air preparation device for cleaning, comprising: an ion selector for selecting molecules ionized by the ion generator and molecules not ionized.   9. The cleaning air production apparatus according to claim 8, further comprising switching means for switching the polarity of a voltage applied to the ion generator and the ion selector.   The cleaning air production apparatus according to claim 8 or 9, further comprising an air filter provided in a preceding stage of the ion generator. A first ion generator;
A first ion sorter that sorts molecules that have been ionized by the first ion generator and molecules that have not been ionized;
A second ion generator that is supplied with molecules that are not ionized by the first ion generator selected by the first ion selector and generates ions having a polarity different from that of the first ion generator. When,
A cleaning air production apparatus comprising: a second ion selector that sorts molecules ionized and non-ionized by the second ion generator.   The cleaning air production device according to claim 11, further comprising an air filter provided in front of the first ion generator. The cleaning air production device according to any one of claims 8 to 12,
A pipe member connected to the cleaning air generating device and forming a flow path of the cleaning air generated by the cleaning air generating device;
A measuring system comprising: a measuring device connected to the tube member and supplied with the cleaning air.   The measurement according to claim 13, further comprising a switching unit that is provided in the pipe member and switches a gas supplied to the measurement device to either the cleaning air or the measurement target gas. system.   The measurement system according to claim 13 or 14, wherein the cleaning air creation device and the measurement device are integrated. The measurement system according to any one of claims 13 to 15, wherein the measurement device is the ion detection device according to any one of claims 1 to 7.

Images