JP2018020939A - Ozone generator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an ozone generator capable of generating high concentration ozone at high efficiency and further preventing the mixing of by-products.SOLUTION: There is provided an ozone generator comprising: a raw material gas flow passage mechanism having a translucent member passing through ultraviolet rays and forming a raw material gas flow passage passing through an oxygen-containing raw material gas; an ultraviolet light source irradiating the raw material gas passing through the raw material gas flow passage with ultraviolet rays via the translucent member; and a cooling mechanism cooling the face in contact with the raw material gas in the translucent member, in which the ultraviolet light source has a single tube type discharge container, and the translucent member is separated from the ultraviolet light source to surround the discharge container, and being a tubular one stretching to the same direction as the discharge container.SELECTED DRAWING: Figure 1

Description

  The present invention relates to an ozone generator that generates ozone using ultraviolet rays.

2. Description of the Related Art Conventionally, as an ozone generator for generating ozone, one having a configuration in which an ultraviolet ray having a wavelength of, for example, 180 to 200 nm is irradiated on a source gas containing oxygen as an ozone source (see Patent Document 1). The ozone generator includes a tubular source gas channel mechanism having a source gas channel through which oxygen-containing source gas flows, and an ultraviolet light source extending along the source gas channel in the source gas channel mechanism. It is comprised by.
In such an ozone generator, in order to efficiently generate high-concentration ozone from a raw material gas, it is necessary to irradiate the raw material gas with high-intensity ultraviolet rays with a light source having a high output.

However, when ultraviolet rays are irradiated by a light source with high output, there are the following problems.
A light source with high output generates heat at a high temperature. For this reason, the ozone generated in the vicinity of the light source is heated and thermally decomposed by the heat from the light source, and consequently it is difficult to generate high-concentration ozone with high efficiency.
Further, as an ultraviolet light source having a high output, an excimer lamp having an external electrode is generally used. When such an excimer lamp is used and the source gas contains oxygen and nitrogen such as air, nitrogen oxide (NO _x ) is formed in the gap between the external electrode and the discharge vessel during the operation of the excimer lamp. There is a problem that is generated and mixed.

  In order to solve such a problem, (a) an excimer lamp having a double tube type discharge vessel, and a double tubular source gas circulation tube which is spaced apart from the excimer lamp and surrounds the outer tube of the discharge vessel; (B) an excimer lamp having a double tube type discharge vessel, and a single tubular source gas flow tube inserted into the inner tube of the discharge vessel of the excimer lamp, spaced apart from the excimer lamp, (C) an excimer lamp having a double tube type discharge vessel, a double tubular source gas circulation tube that is spaced apart from the excimer lamp and surrounds the outer tube of the discharge vessel, and discharge in the excimer lamp There has been proposed an ozone generator having a configuration including a single tubular source gas circulation pipe inserted into an inner tube of a container so as to be separated from the excimer lamp (see Patent Document 2).

However, it has been found that the ozone generator described in Patent Document 2 has the following problems.
In the configuration of (a) above, the ultraviolet rays radiated from the discharge space in the discharge vessel toward the inner tube pass through the inner tube, pass through the inner tube again, and enter the discharge space. The raw material gas is irradiated by passing through the pipe and the inner pipe of the raw material gas circulation pipe.
Thus, the ultraviolet rays radiated from the discharge space toward the inner tube pass through the discharge vessel and the raw material gas circulation tube four times in total, and a part of the ultraviolet rays are absorbed in each, so that the raw material gas As a result, it becomes difficult to generate ozone with high efficiency.
Moreover, the translucent material which comprises a discharge vessel and a raw material gas distribution tube, for example, quartz glass, has the property that the transmittance | permeability of the ultraviolet-ray of low wavelength regions, such as a vacuum ultraviolet-ray, falls with the rise in the temperature. That is, when the temperature of the discharge vessel or the raw material gas flow tube rises due to the absorption of ultraviolet rays, the transmittance decreases. Then, as described above, when ultraviolet rays pass through the discharge vessel and the raw material gas circulation tube four times in total, the amount of attenuation of the ultraviolet rays becomes considerably large, so that it is difficult to irradiate the raw material gas with a stable amount of ultraviolet rays. It becomes.

  In the configuration (b), ultraviolet rays emitted from the discharge space in the discharge vessel toward the outer tube are not irradiated to the raw material gas, so that it is difficult to generate ozone with high efficiency. If a reflecting member is provided around the outer tube of the discharge vessel, the ultraviolet light that has passed through the outer tube is reflected by the reflecting member, passes through the outer tube again, and enters the discharge space. The raw material gas is irradiated by passing through the raw material gas flow pipe. That is, similarly to the configuration (A) above, the discharge vessel and the raw material gas flow tube are transmitted four times in total, so that it becomes difficult to generate ozone with high efficiency after all.

In the above configuration (c), the ultraviolet rays radiated from the discharge space in the discharge vessel toward the inner tube pass through the inner tube and the source gas flow tube inserted into the inner tube, so that the source gas Is irradiated. On the other hand, the ultraviolet rays radiated from the discharge space in the discharge vessel toward the outer tube pass through the outer tube and the source gas circulation tube surrounding the outer tube, and are irradiated to the source gas. Therefore, since ultraviolet rays are only transmitted through the discharge vessel and the raw material gas circulation pipe twice in total, it is avoided that the ultraviolet rays are greatly attenuated before being irradiated to the raw material gas.
However, the ultraviolet rays from the excimer lamp are irradiated to the raw material gas flowing through the raw material gas circulation tube inserted into the inner tube of the discharge vessel, and the raw material gas flowing through the raw material gas circulation tube surrounding the outer tube of the discharge vessel. Therefore, it is difficult to generate high-concentration ozone.
In the configuration (c), ozone requires a source gas supply pipe to be provided outside the outer tube and inside the inner tube of the discharge vessel, which complicates the piping structure and the like.

Japanese Patent Laid-Open No. 10-155887 JP 2003-165711 A

  The present invention has been made based on the circumstances as described above, and the object thereof is to generate high-concentration ozone with high efficiency, and further, no by-product is mixed, and it is simple. Is to provide an ozone generator having a simple structure.

The ozone generator of the present invention includes a raw material gas flow path mechanism that forms a raw material gas flow path through which a raw material gas containing oxygen flows, having a translucent member that transmits ultraviolet rays.
An ultraviolet light source that irradiates the source gas flowing through the source gas channel with ultraviolet rays via the translucent member;
A cooling mechanism for cooling a surface of the translucent member that contacts the source gas,
The ultraviolet light source has a single tube type discharge vessel,
The translucent member is a tubular member that is spaced apart from the ultraviolet light source, surrounds the discharge vessel, and extends in the same direction as the discharge vessel.

In the ozone generator of the present invention, the raw material gas flow path mechanism includes a tubular non-transparent member having an inner diameter larger than an outer diameter of the translucent member and the translucent member surrounding the translucent member. A light member,
It is preferable that the source gas flow path is formed between the translucent member and the non-translucent member.
Further, the cooling mechanism cools the translucent member with a cooling gas,
It is preferable that a cooling gas flow path through which the cooling gas flows is formed between the ultraviolet light source and the translucent member.
The cooling gas is preferably made of an inert gas.

In the ozone generator of the present invention, the ultraviolet light from the ultraviolet light source is irradiated to the raw material gas flowing through the raw material gas channel through the transparent member, and the transparent member is cooled by the cooling mechanism. . Therefore, the ozone generated in the raw material gas channel is prevented or suppressed from being decomposed by the heat from the ultraviolet light source.
Moreover, since the ultraviolet rays radiated from the discharge space in the discharge vessel in the ultraviolet light source are transmitted through the discharge vessel and the translucent member twice in total to irradiate the source gas, UV attenuation is small. Moreover, since the source gas flowing through the single source gas channel mechanism is irradiated with ultraviolet rays, the ultraviolet rays from the ultraviolet light source are not divided.
Therefore, according to the ozone generator of the present invention, high-concentration ozone can be generated with high efficiency.
Further, since the source gas flowing through the source gas channel is separated from the ultraviolet light source by the translucent member, even when an excimer lamp having an external electrode is used as the ultraviolet light source, for example, a by-product generated from the excimer lamp There is no contamination.
Further, since the source gas flow path mechanism only needs to be provided outside the single tube type discharge vessel, an ozone generator having a simple structure can be configured.

Further, the cooling mechanism cools the translucent member with the cooling gas, and the cooling gas flow path through which the cooling gas flows is formed between the ultraviolet light source and the translucent member. In this case, since the ultraviolet light source is cooled together with the translucent member, it is possible to prevent or suppress a decrease in illuminance of the ultraviolet light source.
In addition, by using an inert gas as the cooling gas, the ultraviolet rays from the ultraviolet light source are not absorbed by the cooling gas, so that it is possible to prevent a decrease in ozone generation efficiency. Further, when an excimer lamp having an external electrode, for example, is used as the ultraviolet light source, since the periphery of the excimer lamp becomes an inert gas atmosphere, it is possible to prevent the generation of by-products from the excimer lamp.

It is sectional drawing for description which shows the structure in an example of the ozone generator of this invention in the state cut | disconnected along the direction through which source gas distribute | circulates. It is a cutting part end view which shows the part which cut | disconnected the ozone generator shown in FIG. 1 along the AA line. It is a cutting part end view which shows the part which cut | disconnected the ozone generator shown in FIG. 1 along the BB line. It is sectional drawing for description which shows the structure of the ozone generator which concerns on a reference example in the state cut | disconnected along the direction through which source gas distribute | circulates. It is a graph which shows the time-dependent change of the ozone concentration of the gas discharged | emitted from the ozone generator which concerns on an Example, a comparative example, and a reference example.

Hereinafter, embodiments of the ozone generator of the present invention will be described in detail.
FIG. 1 is an explanatory cross-sectional view showing a configuration of an example of an ozone generator according to the present invention in a state cut along a direction in which a raw material gas flows. FIG. 2 is a cut end view showing a portion of the ozone generator shown in FIG. 1 cut along the line AA. FIG. 3 is a cut end view showing a portion of the ozone generator shown in FIG. 1 cut along the line BB.

  In this ozone generator, a raw material gas flow path mechanism 10 that forms a raw material gas flow path P1 through which a raw material gas flows is provided. In the illustrated example, the source gas flow path mechanism 10 has a straight tubular translucent member 11 that transmits ultraviolet rays and an inner diameter that surrounds the translucent member 11 and is larger than the outer diameter of the translucent member 11. The raw material gas flow path P <b> 1 is formed between the translucent member 11 and the non-translucent member 15. End walls 12 and 16 are formed at both ends of each of the translucent member 11 and the non-translucent member 15.

  A cooling gas supply pipe portion 13 for supplying a cooling gas to be described later is formed on the end wall 12 at one end (left end in FIG. 1) of the translucent member 11. The cooling gas supply pipe section 13 is connected to a cooling gas supply means (not shown) to be described later. Further, a cooling gas discharge pipe portion 14 for discharging the cooling gas is formed on the end wall 12 at the other end of the translucent member 11.

  Further, a source gas supply pipe portion 17 that supplies a source gas to the source gas flow path P1 is formed on one end side (left end side in FIG. 1) of the peripheral wall of the non-translucent member 15. The source gas supply pipe portion 17 is connected to source gas supply means (not shown). Further, an ozone gas discharge pipe portion 18 that discharges a gas containing ozone generated in the raw material gas flow path P1 is formed on the other end side of the peripheral wall of the non-translucent member 15.

  Further, each end wall 16 of the non-translucent member 15 has an opening having a diameter that matches the outer diameter of each of the cooling gas supply pipe portion 13 and the cooling gas discharge pipe portion 14 in the translucent member 11. 16a is formed. The translucent member 11 includes a cooling gas supply pipe portion 13 and a cooling gas discharge pipe portion 14 that are inserted through the opening 16 a of the non-translucent member 15 and project outside the non-translucent member 15. Arranged in a state.

The distance between the outer peripheral surface of the translucent member 11 and the inner peripheral surface of the non-translucent member 15 is preferably 1 to 5 mm.
The material of the translucent member 11 may be any material that can transmit ultraviolet rays from the excimer lamp 20 described later and has ozone resistance. Specific examples of the material of the translucent member 11 include synthetic quartz glass, fused silica glass, crystal, and magnesium fluoride.
The material of the non-translucent member 15 should just have ozone resistance. Specific examples of the material of the non-translucent member 15 include stainless steel, iron-chromium-aluminum-cobalt alloy (kanthal), and alumina.

  In the tube of the translucent member 11, an excimer lamp 20 is provided as an ultraviolet light source that irradiates the source gas flowing through the source gas flow path P <b> 1 through the translucent member 11. The excimer lamp 20 includes a straight tubular single-tube type discharge vessel 21 that forms a discharge space, a rod-like internal electrode 25 that extends in the discharge vessel 21 along the axial direction thereof, and an outer peripheral surface of the discharge vessel 21. And a net-like external electrode 26 provided.

One end of the discharge vessel 21 is closed, and a sealing portion 22 is formed at the other end. A metal foil 23 is embedded in the sealing portion 22.
The internal electrode 25 is electrically connected to the high voltage power supply 30 via the metal foil 23 and the external lead 27. The external electrode 26 is electrically connected to a low voltage power supply 31 through a lead 28.

The excimer lamp 20 is supported by a plurality of (two in the illustrated example) support members 35 in the tube of the translucent member 11. More specifically, each of the support members 35 is configured by a circular ring-shaped plate member having an outer diameter that matches the inner diameter of the translucent member 11 and an outer diameter that matches the outer diameter of the excimer lamp 20. Has been. Each of the support members 35 is arranged in the translucent member 11 such that the outer peripheral surface of the support member 35 is in contact with the inner peripheral surface of the translucent member 11, and the excimer is placed in the hole of the support member 35. A lamp 20 is inserted. In this way, the excimer lamp 20 is supported by the support member 35, so that the translucent member 11 is disposed away from the excimer lamp 20, surrounds the discharge vessel 21, and extends in the same direction as the discharge vessel 21. Has been.
Further, in the support member 35, a plurality of (eight in the illustrated example) gas flow holes 36 through which a cooling gas to be described later flows are arranged at equal intervals along the circumferential direction of the support member 35. The support member 35 is formed so as to penetrate in the thickness direction.
The distance between the surface of the excimer lamp 20 and the outer peripheral surface of the translucent member 11 is, for example, 5 to 50 mm.

  The ozone generator shown in FIG. 1 is provided with a cooling mechanism (not shown) that cools the surface (in the illustrated example, the inner peripheral surface) that contacts the source gas in the translucent member 11. The cooling mechanism in this example cools the translucent member 11 with a cooling gas. Specifically, the cooling mechanism includes a cooling gas flow path P2 formed by a gap between the translucent member 15 and the excimer lamp 20 through which the cooling gas flows, and a cooling gas for the translucent member 11. The cooling gas supply means supplies the cooling gas from the supply pipe section 13 to the cooling gas flow path P2.

In the above ozone generator, a gas containing ozone is generated as follows.
First, the source gas supply means and the cooling mechanism are operated. Accordingly, the source gas is supplied from the source gas supply pipe portion 17 of the non-translucent member 15 and flows through the source gas flow path P1, and the cooling gas is supplied from the cooling gas supply pipe portion 13 of the translucent member 11. Is supplied and flows through the cooling gas flow path P2. In this state, when the excimer lamp 20 is turned on, the raw material gas flowing through the raw material gas flow path P1 is irradiated with the ultraviolet rays from the excimer lamp 20 through the translucent member 11, thereby the raw material. Oxygen in the gas reacts to generate ozone. The generated gas containing ozone is discharged from the ozone gas discharge pipe portion 18 of the non-translucent member 15.

In the above, as the source gas, a gas containing oxygen serving as an ozone source is used. The oxygen concentration in the source gas is preferably 20% by volume or more, but a source gas having an oxygen concentration of less than 20% by volume can also be used. Specific examples of such source gas include air, oxygen gas, and a mixed gas of oxygen gas and nitrogen gas. When a source gas having a high oxygen gas concentration is used, an oxygen gas generator such as a PSA (Pressure Swing Adsorption) type can be used as the oxygen gas supply source.
The flow rate of the source gas is, for example, 0.05 to 1000 L / min, but may be outside the above range depending on the size of the excimer lamp 20 and the translucent member 11.

As the cooling gas, it is preferable to use a gas that does not absorb ultraviolet light from the excimer lamp 20. When the cooling gas has ultraviolet absorptivity, the ultraviolet rays from the excimer lamp 20 are absorbed by the cooling gas before reaching the translucent member 11, so that ozone can be efficiently generated. It may be difficult to generate.
Specific examples of such a cooling gas include inert gases such as nitrogen gas and rare gas. Among these, nitrogen gas is preferable from the viewpoint of economy.
The cooling gas may be at room temperature, but is preferably cooled. Specifically, the temperature of the cooling gas is preferably −20 to 10 ° C. Thereby, the translucent member 11 can be efficiently cooled by the cooling gas having a small flow rate.
The flow rate of the cooling gas is usually 1 to 10 L / min, although it depends on the temperature of the cooling gas.

In the above ozone generator, the ultraviolet light from the excimer lamp 20 is irradiated to the raw material gas flowing through the raw material gas flow path P1 through the light transmissive member 11, and the light transmissive member 11 is cooled by the cooling mechanism. To be cooled. Therefore, ozone generated in the source gas flow path P1 is prevented or suppressed from being decomposed by heat from the excimer lamp 20.
Further, since the ultraviolet rays radiated from the discharge space in the discharge vessel 21 in the excimer lamp 20 are transmitted through the discharge vessel 21 and the translucent member 11 twice in total to irradiate the source gas, the source gas is irradiated. The attenuation amount of ultraviolet rays until it is applied is small. Moreover, since the source gas flowing through the single source gas channel mechanism 10 is irradiated with ultraviolet rays, the ultraviolet rays from the excimer lamp 20 are not divided.
Therefore, according to the ozone generator, high-concentration ozone can be generated with high efficiency.
In addition, since the source gas flowing through the source gas flow path P1 is isolated from the excimer lamp 20 by the translucent member 11, byproducts such as nitrogen oxides generated from the excimer lamp 20 are not mixed.
Further, since the source gas flow path mechanism 10 need only be provided outside the single tube type discharge vessel 21 in the excimer lamp 20, an ozone generator having a simple structure can be configured.

In addition, since the excimer lamp 20 is cooled together with the translucent member 11 by circulating the cooling gas through the cooling gas flow path P2, it is possible to prevent or suppress a decrease in illuminance of the excimer lamp 20 due to heat generation.
In addition, by using an inert gas as the cooling gas, the ultraviolet rays from the excimer lamp 20 are not absorbed by the cooling gas, so that it is possible to prevent a decrease in ozone generation efficiency. Furthermore, since the periphery of the excimer lamp 20 is an inert gas atmosphere, by-products can be prevented from being generated from the excimer lamp 20.

<Example 1>
According to the configuration shown in FIGS. 1 to 3, an ozone generator having the following specifications was produced.
Translucent member: material = synthetic quartz glass (“Suprasil F-310”, manufactured by Shin-Etsu Quartz Co., Ltd.), inner diameter = 37 mm, outer diameter = 40 mm, length = 450 mm
Non-translucent member: material = stainless steel (SUS316), inner diameter = 44 mm, outer diameter = 48 mm, length = 500 mm
Ultraviolet light source: Type = xenon excimer lamp having a single tube type discharge vessel, outer diameter = 18.5 mm, emission length = 400 mm, discharge vessel material = synthetic quartz glass (“Suprasil F-310”, manufactured by Shin-Etsu Quartz Co., Ltd.) ), Thickness of discharge vessel = 2 mm

The above ozone generator was operated under the following conditions, and the ozone concentration of the discharged gas was measured over time. The results are shown in FIG.
Further, the maintenance rate of the ozone concentration φ of the exhaust gas after 250 seconds from the operation of the ozone generator [(to the maximum ozone concentration φ _max of the exhaust gas until 250 seconds have passed since the ozone generator was operated [( φ / φ _max ) × 100] was 52%.
[Operating conditions of ozone generator]
Source gas: Type = Air, Flow rate = 30L / min
Cooling gas: Type = nitrogen gas at room temperature, flow rate = 5 L / min

<Example 2>
The ozone generator produced in Example 1 was operated under the same conditions as in Example 1 except that the flow rate of the cooling gas was changed to 10 L / min, and the ozone concentration of the discharged gas was measured over time. did. The results are shown in FIG.
Further, the maintenance rate of the ozone concentration φ of the exhaust gas after 250 seconds from the operation of the ozone generator [(to the maximum ozone concentration φ _max of the exhaust gas until 250 seconds have passed since the ozone generator was operated [( φ / φ _max ) × 100] was 80%.

<Comparative example 1>
An ozone generator having the same specifications as in Example 1 was produced, except that no translucent member was provided. The ozone generator was operated while air having a flow rate of 30 L / min was circulated as a source gas in the non-translucent member of the ozone generator, and the ozone concentration of the discharged gas was measured over time. The results are shown in FIG.
Further, the maintenance rate of the ozone concentration φ of the exhaust gas after 250 seconds from the operation of the ozone generator [(to the maximum ozone concentration φ _max of the exhaust gas until 250 seconds have passed since the ozone generator was operated [( φ / φ _max ) × 100] was 3%.

<Reference Example 1>
According to the configuration of FIG. 4, an ozone generator having the following specifications was produced.
Ultraviolet light source (40): type = xenon excimer lamp having a double tube type discharge vessel, outer diameter of outer tube (41) = 18.5 mm, inner diameter of outer tube (41): 14.5 mm, inner tube (42 ) Outer diameter: 9.5 mm, inner tube (42) inner diameter: 5.5 mm, light emission length = 400 mm, discharge vessel material = synthetic quartz glass (“Suprasil F-310”, manufactured by Shin-Etsu Quartz Co., Ltd.)
Translucent member (11): material = synthetic quartz glass (“Suprasil F-310”, manufactured by Shin-Etsu quartz Co., Ltd.), inner diameter = 37 mm, outer diameter = 40 mm, length = 450 mm
Source gas supply pipe (51): material = synthetic quartz glass (“Suprasil F-310”, manufactured by Shin-Etsu Quartz Co., Ltd.), inner diameter = 2 mm, outer diameter = 4 mm, length = 500 mm
In FIG. 4, 43 is a low-pressure side electrode provided on the outer peripheral surface of the outer tube (41) in the discharge vessel, and 44 is a high-pressure side electrode provided on the inner peripheral surface of the inner tube (42) in the discharge vessel. , 48 are leads for electrically connecting the low voltage side electrode (43) to the low voltage power source (31), 49 is a lead for electrically connecting the high voltage side electrode (44) to the high voltage source (30), P3 Is a source gas flow path by a source gas supply pipe (51). The other symbols are the same as those of the ozone generator shown in FIG. 1, and they have the same specifications as those of the ozone generator according to Example 1 in Reference Example 1.

The ozone generator was operated under the following conditions, and the ozone concentration in the total amount of gas to be emitted and the translucent member was measured over time. The results are shown in FIG.
Further, the maintenance rate of the ozone concentration φ of the exhaust gas after 250 seconds from the operation of the ozone generator [(to the maximum ozone concentration φ _max of the exhaust gas until 250 seconds have passed since the ozone generator was operated [( φ / φ _max ) × 100] was 41%.
[Operating conditions of ozone generator]
Source gas: type = air, flow rate (total flow rate of two source gas flow paths P1, P3) = 30 L / min (flow rate of source gas flow path P1 = 29.65 L / min, flow rate of source gas flow path P3 = 0.35L / min)
Cooling gas: Type = nitrogen gas at room temperature, flow rate = 5 L / min
Ultraviolet light source: set so that the total radiation intensity is the same as the total radiation intensity of the ultraviolet light source in Example 1.

<Reference Example 2>
An ozone generator having the same specifications as in Reference Example 1 was prepared, except that no translucent member was provided. The ozone concentration in the total amount of gas discharged from the ozone generator was measured over time while air having a flow rate of 30 L / min was circulated in the non-translucent member of the ozone generator. The results are shown in FIG.
Further, the maintenance rate of the ozone concentration φ of the exhaust gas after 250 seconds from the operation of the ozone generator [(to the maximum ozone concentration φ _max of the exhaust gas until 250 seconds have passed since the ozone generator was operated [( φ / φ _max ) × 100] was 2%.

From the above result, according to the ozone generator which concerns on Examples 1-2, it was confirmed that high concentration ozone is produced | generated stably with high efficiency.
On the other hand, in the ozone generator according to Comparative Example 1, since no translucent member is provided, the ozone generator is heated and thermally decomposed by the heat from the excimer lamp. Could not be generated.
In the ozone generator according to Reference Examples 1 and 2, the ultraviolet rays from the excimer lamp are irradiated to the raw material gas flowing through the raw material gas circulation tube inserted in the inner tube of the discharge vessel, and the discharge vessel Since the raw material gas flowing through the raw material gas circulation pipe that surrounds the outer tube is divided into ultraviolet rays, the amount of ultraviolet irradiation to each raw material gas is small, and high-concentration ozone could not be generated.

DESCRIPTION OF SYMBOLS 10 Raw material gas flow path mechanism 11 Translucent member 12 End wall 13 Cooling gas supply pipe part 14 Cooling gas discharge pipe part 15 Non-translucent member 16 End wall 16a Opening 17 Raw material gas supply pipe part 18 Ozone gas discharge pipe part 20 Excimer lamp 21 Discharge vessel 22 Sealing portion 23 Metal foil 25 Internal electrode 26 External electrode 27 External lead 28 Lead 30 High voltage power supply 31 Low voltage power supply 35 Support member 36 Gas flow hole 40 Ultraviolet light source 41 Outer tube 42 Inner tube 43 Low pressure Side electrode 44 High voltage side electrodes 48, 49 Lead 51 Source gas supply pipes P1, P3 Source gas flow path P2 Cooling gas path

Claims (4)

A raw material gas flow path mechanism that forms a raw material gas flow path through which a raw material gas containing oxygen flows, having a translucent member that transmits ultraviolet rays;
An ultraviolet light source that irradiates the source gas flowing through the source gas channel with ultraviolet rays via the translucent member;
A cooling mechanism for cooling a surface of the translucent member that contacts the source gas,
The ultraviolet light source has a single tube type discharge vessel,
The translucent member is a tubular member that is spaced apart from the ultraviolet light source, surrounds the discharge vessel, and extends in the same direction as the discharge vessel. The source gas flow path mechanism includes the translucent member and a tubular non-translucent member that surrounds the translucent member and has an inner diameter larger than the outer diameter of the translucent member. ,
The ozone generator according to claim 1, wherein the source gas flow path is formed between the translucent member and the non-translucent member. The cooling mechanism cools the translucent member with a cooling gas,
The ozone generator according to claim 1 or 2, wherein a cooling gas passage through which the cooling gas flows is formed between the ultraviolet light source and the translucent member.   The ozone generator according to claim 3, wherein the cooling gas is an inert gas.

Images