JP2018015803A - X-ray transparent soldering device - Google Patents

X-ray transparent soldering device Download PDF

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JP2018015803A
JP2018015803A JP2016149853A JP2016149853A JP2018015803A JP 2018015803 A JP2018015803 A JP 2018015803A JP 2016149853 A JP2016149853 A JP 2016149853A JP 2016149853 A JP2016149853 A JP 2016149853A JP 2018015803 A JP2018015803 A JP 2018015803A
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base
container
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soldering
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JP6469616B2 (en
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可伸 安部
Yoshinobu Abe
可伸 安部
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AMBE SMT CO Ltd
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AMBE SMT CO Ltd
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Abstract

PROBLEM TO BE SOLVED: To allow monitoring with a moving image of behavior of molten solder during reflow soldering of a printed circuit board printed with solder paste and implemented with an electronic component in vacuum atmosphere or high-pressure atmosphere using an X-ray reflow simulator device.SOLUTION: An X-ray transparent soldering device includes a container 40 excellent in X-ray transparency, having a base 42 and a cover 44 formed of a high-thermal conductive metal and capable of vertically opening and closing; and heat-resistant packing 50 inserted into a clearance between the base 42 and the cover 44 and having a function for preventing gas leakage. The X-ray transparent soldering device itself does not have a heat source and is used with a device having a heat source.SELECTED DRAWING: Figure 1

Description

本発明は、X線透過性はんだ付装置に係り、特に、リフローはんだ付中の溶融はんだの挙動を観察する際に用いるのに好適な、真空雰囲気中あるいは高圧雰囲気中ではんだ付け可能な、それ自体は加熱源を持たないX線透過性はんだ付装置に関する。   The present invention relates to an X-ray transparent soldering apparatus, and in particular, can be soldered in a vacuum atmosphere or a high-pressure atmosphere, which is suitable for observing the behavior of molten solder during reflow soldering. As such, it relates to an X-ray transparent soldering apparatus having no heating source.

特許文献1〜3に示されるように、出願人が開発し特許を取得したX線リフローシミュレータ装置が知られている。このX線リフローシミュレータ装置によれば、試料等の被検査物を目的の温度に加熱もしくは予め設定された温度プロファイルに従って加熱し、そのX線透過画像の状態変化をリアルタイムに観察したり、温度変化や動画を記録することで、各種材料の温度変化による挙動及びはんだ接合部位の不良発生原因解析等が可能となる。   As shown in Patent Documents 1 to 3, an X-ray reflow simulator device developed by the applicant and obtained a patent is known. According to this X-ray reflow simulator device, an object such as a sample is heated to a target temperature or according to a preset temperature profile, and the state change of the X-ray transmission image is observed in real time, or the temperature change By recording or moving images, it becomes possible to analyze the causes of the occurrence of defects in solder joints, the behavior of various materials due to temperature changes, and the like.

又、特許文献4には、同じくX線を用いて回路モジュールのはんだ層におけるボイドの有無を検査する技術が提案されている。   Patent Document 4 also proposes a technique for inspecting the presence or absence of voids in a solder layer of a circuit module using X-rays.

特許第5290030号公報Japanese Patent No. 5290030 特許第4959844号公報Japanese Patent No. 4959844 特許第5818106号公報Japanese Patent No. 5818106 特開2012−84791号公報JP 2012-84791 A

しかしながら従来は、ソルダーペーストを印刷し電子部品を載せたプリント基板の真空雰囲気中あるいは高圧雰囲気中におけるリフローはんだ付け中の溶融はんだの挙動を検査するのが困難であった。   Conventionally, however, it has been difficult to inspect the behavior of molten solder during reflow soldering in a vacuum atmosphere or high-pressure atmosphere of a printed circuit board on which a solder paste is printed and an electronic component is placed.

本発明は、前記従来の問題点を解決するべくなされたもので、ソルダーペーストを印刷し電子部品を載せたプリント基板の真空雰囲気中あるいは高圧雰囲気中におけるリフローはんだ付け中の溶融はんだの挙動をX線検査装置により動画観察可能とすることを課題とする。   The present invention has been made to solve the above-mentioned conventional problems. The behavior of molten solder during reflow soldering in a vacuum atmosphere or high-pressure atmosphere of a printed circuit board on which a solder paste is printed and an electronic component is placed is described as X. It is an object to make it possible to observe a moving image with a line inspection apparatus.

本発明は、X線透過性に優れ、且つ、高熱伝導性の金属で形成されたベース及びカバーを有する、上下に開閉可能な容器と、前記ベースとカバーの隙間に挿入される、ガス漏れを防ぐ機能を有する耐熱性のパッキンとを備え、それ自体は加熱源を持たず、加熱源を有する装置と共に使用されることを特徴とするX線透過性はんだ付装置により、前記課題を解決するものである。   The present invention has a base and cover made of a metal having excellent X-ray transparency and high thermal conductivity, and a container that can be opened and closed vertically, and a gas leak inserted into a gap between the base and the cover. A heat-resistant packing having a function to prevent, having no heat source itself, and being used together with an apparatus having a heat source. It is.

ここで、前記容器を、固定具又は容器外側に加わる大気圧力により密封することができる。   Here, the container can be sealed by atmospheric pressure applied to the fixture or the outside of the container.

又、前記カバーの中央部が上方に膨らむことにより、前記カバーの中央部と前記ベースの間にはんだ付対象を載せる空間を形成することができる。   In addition, since the central portion of the cover swells upward, a space for placing the soldering object can be formed between the central portion of the cover and the base.

又、前記ベースの上面は平面であり、内部にはんだ付対象基板等を水平に密着してセットでき、周辺にいくに従い肉厚が厚くなる構造により容器内部が真空又は高圧となっても変形しにくい構造とすることができる。   In addition, the upper surface of the base is flat and can be set with the substrate to be soldered in close contact with the inside, and the thickness increases as it goes to the periphery. A difficult structure can be obtained.

又、前記容器の内側を真空又は高圧にできる配管を設け、真空ポンプあるいはコンプレッサへ接続されることができる。   In addition, a pipe capable of making the inside of the container vacuum or high pressure can be provided and connected to a vacuum pump or a compressor.

又、前記容器の内側に熱電対を挿入し、この熱電対の測定温度で外部の加熱源を制御することができる。   In addition, a thermocouple can be inserted inside the container, and an external heating source can be controlled by the measured temperature of the thermocouple.

又、前記X線透過性に優れ、且つ、高熱伝導性の金属としてマグネシウム合金あるいはアルミニウム合金を使用することができる。   In addition, a magnesium alloy or an aluminum alloy can be used as the metal having excellent X-ray permeability and high thermal conductivity.

本発明によれば、加熱源を持たない本発明に係るはんだ付装置を、例えば特許文献1〜3に記載したX線リフローシミュレータ装置の上下から熱風の突出する空間に、あたかもサンプル基板のように挿入することで、本はんだ付装置内に設置したソルダーペースト印刷基板を真空リフロー時は主として熱伝導加熱で、又、高圧リフロー時は熱伝導加熱及び対流加熱で加熱することによりリフローはんだ付けでき、真空中のリフローはんだ付けあるいは高圧下でのリフローはんだ付け中における溶融はんだの挙動をX線で拡大率を大きくした動画を撮影観察できる。従って、真空中あるいは高圧中での溶融はんだの挙動を観察できるようになり、ボイド、ブリッジ、不濡れ、更には基板内の湿度に起因するブローホール等のはんだ付不良の原因解析、更には、これらはんだ付不良の対策実験を行うことができ、効果的な不良対策を立てることが容易となる。   According to the present invention, the soldering apparatus according to the present invention that does not have a heating source can be applied to the space where hot air projects from above and below the X-ray reflow simulator apparatus described in Patent Documents 1 to 3, as if it were a sample substrate. By inserting, the solder paste printed circuit board installed in this soldering device can be reflow soldered mainly by heat conduction heating during vacuum reflow, and by heat conduction heating and convection heating during high pressure reflow, It is possible to photograph and observe a moving image in which the enlargement ratio is increased with X-rays of the behavior of the molten solder during reflow soldering in vacuum or reflow soldering under high pressure. Therefore, it becomes possible to observe the behavior of molten solder in vacuum or high pressure, analysis of the cause of soldering defects such as voids, bridges, non-wetting, and blowholes due to humidity in the board, It is possible to conduct an experiment for countermeasures against these soldering defects, and it is easy to make effective countermeasures against defects.

本発明の実施形態を示す断面図Sectional drawing which shows embodiment of this invention 同じく平面図Same top view 同じくベースの薄肉部を示す斜視図The perspective view which similarly shows the thin part of a base X線リフローシミュレータ装置の一例で本発明装置を加熱している状態を示す断面図Sectional drawing which shows the state which is heating this invention apparatus in an example of an X-ray reflow simulator apparatus 本発明の実施例の外観を示す図面代用写真Drawing substitute photograph which shows the external appearance of the Example of this invention 同じく分解した状態を示す図面代用写真Drawing substitute photo showing the disassembled state

以下、図面を参照して、本発明の実施の形態について詳細に説明する。なお、本発明は以下の実施形態及び実施例に記載した内容により限定されるものではない。又、以下に記載した実施形態及び実施例における構成要件には、当業者が容易に想定できるもの、実質的に同一のもの、いわゆる均等の範囲のものが含まれる。更に、以下に記載した実施形態及び実施例で開示した構成要素は適宜組み合わせてもよいし、適宜選択して用いてもよい。   Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In addition, this invention is not limited by the content described in the following embodiment and an Example. In addition, the constituent elements in the embodiments and examples described below include those that can be easily assumed by those skilled in the art, those that are substantially the same, and those in the so-called equivalent range. Furthermore, the constituent elements disclosed in the embodiments and examples described below may be appropriately combined or may be appropriately selected and used.

本実施形態は、図1(断面図)及び図2(平面図)に示す如く、マグネシウム合金あるいはアルミニウム合金等のX線透過性に優れ、且つ、高熱伝導性の金属で形成されたベース42及びカバー44を有する、上下に開閉可能な容器40と、前記ベース42とカバー44の隙間に挿入される、ガス漏れを防ぐ機能を有する耐熱性のバイトンゴムやシリコンゴム等の各種耐熱ゴム製又は金属製のパッキン(板状あるいはOリング状等)50とを備えている。   As shown in FIG. 1 (cross-sectional view) and FIG. 2 (plan view), the present embodiment has a base 42 made of a metal having excellent X-ray transparency, such as magnesium alloy or aluminum alloy, and high thermal conductivity. A container 40 having a cover 44 that can be opened and closed vertically, and a heat-resistant Viton rubber or silicon rubber that is inserted into a gap between the base 42 and the cover 44 and has a function of preventing gas leakage, or made of metal. Packing (plate-like or O-ring-like) 50.

前記ベース42の上面は平面であり、内部にはんだ付対象のプリント配線基板7を水平に密着してセットでき、周辺にいくに従い肉厚が厚くなる構造により、本体内部が真空又は高圧となっても変形しにくい構造とされている。該ベース42には、図2(平面図)及び図3(斜視図)に示す如く、例えば0°、90°、180°、270°の4方向に薄肉部42Aが設けられており、後は徐々に厚くなるようにされている。これは、後述する配管60や熱電対62を収容しやくすると共に、ベース42の中央凹部に下から当たった熱風が側面に逃げられるようにするための空間を設けるためである。   The upper surface of the base 42 is a flat surface, and the printed wiring board 7 to be soldered can be set in close contact with the inside of the base 42, and the thickness of the body becomes thicker toward the periphery. The structure is also difficult to deform. As shown in FIG. 2 (plan view) and FIG. 3 (perspective view), the base 42 is provided with thin portions 42A in four directions, for example, 0 °, 90 °, 180 °, and 270 °. It is gradually getting thicker. This is to make it easier to accommodate a pipe 60 and a thermocouple 62, which will be described later, and to provide a space for allowing hot air that hits the central concave portion of the base 42 from below to escape to the side surface.

前記プリント配線基板7のランド9上にはソルダーペースト10が印刷され、その上にリフローはんだ付けされる電子部品8が載置されている。   A solder paste 10 is printed on the lands 9 of the printed wiring board 7, and an electronic component 8 to be reflow soldered is placed thereon.

前記カバー44の中央部は、上方に膨らむことにより、前記カバー44の中央部と前記ベース42の間にはんだ付対象のプリント配線基板7を載せる空間が形成されている。このカバー44も周辺にいくに従い肉厚が厚くなるようにされ、容器40内部が真空又は高圧となっても変形しにくい構造とされている。   The center portion of the cover 44 bulges upward to form a space for placing the printed wiring board 7 to be soldered between the center portion of the cover 44 and the base 42. The cover 44 is also thickened as it goes to the periphery, and has a structure that does not easily deform even when the inside of the container 40 is in a vacuum or high pressure.

前記ベース42とカバー44は、例えば薄肉部42Aに配設したボルト46及びナット48により密封可能とされている。ナット48をベース42の薄肉部42A内に納めることにより、容器40を水平にセットできる。なお、ボルト46とナット48以外の固定具を用いることも可能であり、特に、容器40内を真空とする場合には、ボルト46及びナット48を省略することも可能である。   The base 42 and the cover 44 can be sealed by, for example, a bolt 46 and a nut 48 disposed in the thin portion 42A. By accommodating the nut 48 in the thin portion 42A of the base 42, the container 40 can be set horizontally. Note that a fixing tool other than the bolt 46 and the nut 48 can be used. In particular, when the inside of the container 40 is evacuated, the bolt 46 and the nut 48 can be omitted.

前記容器40の、例えばベース42の挿入口42Bにはアルミニウム管58が挿入され、該アルミニウム管58に、前記容器40内を真空又は高圧にするためのゴム管等の配管60が接続されている。この配管60は、真空ポンプ又は例えば窒素の高圧ガスボンベ又はコンプレッサ等に接続され、容器40の内部空間を真空又は高圧にすることが可能とされている。   For example, an aluminum pipe 58 is inserted into the insertion opening 42B of the base 42 of the container 40, and a pipe 60 such as a rubber pipe for making the inside of the container 40 vacuum or high pressure is connected to the aluminum pipe 58. . The pipe 60 is connected to a vacuum pump or a high-pressure gas cylinder of nitrogen or a compressor, for example, so that the internal space of the container 40 can be made vacuum or high-pressure.

又、前記容器40の、例えばベース42には、該容器40の内側に挿入される熱電対62の挿入口42Cが設けられ、該熱電対62は、例えば内部に設置したプリント配線基板7に貼り付けられている。そして、この熱電対62の測定温度で外部の加熱源(例えば後述熱風生成用面状ヒーター)を制御するようにされている。   Further, for example, the base 42 of the container 40 is provided with an insertion port 42C of a thermocouple 62 to be inserted inside the container 40, and the thermocouple 62 is attached to the printed wiring board 7 installed inside, for example. It is attached. An external heating source (for example, a hot air generating planar heater described later) is controlled by the measured temperature of the thermocouple 62.

前記アルミニウム管58及び熱電対62の挿入口42B、42Cは、シリコンラバー等の耐熱接着剤を充填し、封止されている。なお、熱電対62として、隔壁貫通用熱電対を使用することも可能である。   The aluminum tube 58 and the insertion ports 42B and 42C of the thermocouple 62 are filled with a heat-resistant adhesive such as silicon rubber and sealed. It is also possible to use a partition wall penetrating thermocouple as the thermocouple 62.

図4は、既に権利化されている特許第4959844号(特許文献2)に記載したX線リフローシミュレータ装置の一例で本発明装置を加熱している状態を示す断面図である。   FIG. 4 is a cross-sectional view showing a state in which the apparatus of the present invention is heated in an example of the X-ray reflow simulator apparatus described in Japanese Patent No. 4959844 (Patent Document 2) which has already been granted.

図4において、1は熱風生成用の面状ヒーター、14は遮蔽断熱部、15はガス供給管、20はX線照射装置のX線発生部、21は同じくX線照射範囲、22は窓部、23はX線受光装置、27は試料室、31は支持体、31aは、支持体31の例えば側面に形成された排気口、32は熱風吹き出し板、32aは熱風吹き出し穴である。   In FIG. 4, 1 is a planar heater for generating hot air, 14 is a shield heat insulating part, 15 is a gas supply pipe, 20 is an X-ray generating part of an X-ray irradiation apparatus, 21 is an X-ray irradiation range, and 22 is a window part. , 23 is an X-ray receiving device, 27 is a sample chamber, 31 is a support, 31a is an exhaust port formed on, for example, a side surface of the support 31, 32 is a hot air blowing plate, and 32a is a hot air blowing hole.

前記面状ヒーター1は上下に設置され、下側の面状ヒーター1と、プリント配線基板7が収容された本発明に係る容器40の間に絶縁スペーサ16が挿入されている。   The planar heater 1 is installed vertically, and an insulating spacer 16 is inserted between the lower planar heater 1 and the container 40 according to the present invention in which the printed wiring board 7 is accommodated.

前記ガス供給管15は、遮蔽断熱部14の熱風吹き出し穴にはめ込んで使用することができる。   The gas supply pipe 15 can be used by being fitted into a hot air blowing hole of the shielding heat insulating part 14.

上述のような構成からなる実施形態において、試料の加熱を行うためには、ガス供給管15からガスを供給しながら、面状ヒーター1に電圧を印加する。電圧印加は面状ヒーター1端部の、窓部22外の部分から行えば良い。また、印加電圧は直流、交流を問わない。尚、観察の際には、X線観察に支障のない部位に熱電対を設置して、温度モニターを行うこともできる。   In the embodiment configured as described above, in order to heat the sample, a voltage is applied to the planar heater 1 while supplying a gas from the gas supply pipe 15. The voltage may be applied from the end of the planar heater 1 outside the window 22. The applied voltage may be direct current or alternating current. In the case of observation, it is also possible to perform temperature monitoring by installing a thermocouple in a site that does not hinder X-ray observation.

面状ヒーター1の温度が上昇するにつれ、ガス供給管15から供給されたガスも昇温し、熱風吹き出し穴32aから熱風が吹き出し、試料室27内に熱した旋回流を発生させ、試料室27内の温度を上昇させる。すると、試料であるプリント配線基板7が収容された容器40も、急速かつ面内で均一に温度上昇し、ソルダーペースト10を溶融させ、電子部品8と銅ランド9とが濡れて接合する。   As the temperature of the planar heater 1 rises, the temperature of the gas supplied from the gas supply pipe 15 also rises, hot air blows out from the hot air blowing holes 32a, and a heated swirling flow is generated in the sample chamber 27. Increase the temperature inside. Then, the temperature of the container 40 in which the printed wiring board 7 as a sample is also rapidly and uniformly increased in the surface, the solder paste 10 is melted, and the electronic component 8 and the copper land 9 are wet and bonded.

本発明の加熱装置では、試料をX線観察する範囲である窓部22には、X線透過性の良好な材料のみが用いられているため、様々な温度条件下ではんだのぬれ挙動を明瞭に観察することができる。   In the heating device of the present invention, only the material having good X-ray permeability is used for the window portion 22 which is a range in which the sample is observed by X-ray, so that the solder wetting behavior is clearly observed under various temperature conditions. Can be observed.

また、予め設定した温度プロファイル下でのリアルタイム観察を行うことができ、ボイド発生メカニズムの解明などに役立てることができる。   In addition, real-time observation can be performed under a preset temperature profile, which can be used for elucidating the void generation mechanism.

更に、外部からの伝熱機構が不要であるため装置を小型化、薄型化することができるため、試料をX線検査装置に近づけることが可能となり、極小の部品を高倍率で鮮明に観察することが可能となる。   Furthermore, since an external heat transfer mechanism is not required, the apparatus can be made smaller and thinner, so that the sample can be brought closer to the X-ray inspection apparatus, and extremely small parts can be clearly observed at a high magnification. It becomes possible.

なお、本発明に係るはんだ付装置を用いる対象は図4に示したものに限定されず、特許文献1〜3に記載した他の構成の装置や、更に他の装置にも用いることができる。   In addition, the object which uses the soldering apparatus which concerns on this invention is not limited to what was shown in FIG. 4, It can use also for the apparatus of the other structure described in patent documents 1-3, and also another apparatus.

実施例の外観を示す図面代用写真を図5に、同じく分解した状態を示す図面代用写真を図6に示す。   FIG. 5 shows a drawing-substituting photograph showing the external appearance of the example, and FIG. 6 shows a drawing-substituting photograph showing the exploded state.

実施例の形状、配置は、図1乃至図3に示した実施形態と多少異なり、配管60及び熱電対62がカバー44側に配置されているが、本発明の権利範囲に含まれる。   The shape and arrangement of the examples are slightly different from the embodiment shown in FIGS. 1 to 3, and the pipe 60 and the thermocouple 62 are arranged on the cover 44 side, but are included in the scope of the present invention.

なお、前記実施形態及び実施例では、容器40の平面形状が円形とされていたが、他の平面形状、例えば四角形であってもよい。   In addition, in the said embodiment and Example, although the planar shape of the container 40 was circular, other planar shapes, for example, a square, may be sufficient.

7…基板
8…電子部品
9…ランド
10…ソルダーペースト
40…容器
42…ベース
44…カバー
46…ボルト
48…ナット
50…パッキン
60…配管
62…熱電対
DESCRIPTION OF SYMBOLS 7 ... Board | substrate 8 ... Electronic component 9 ... Land 10 ... Solder paste 40 ... Container 42 ... Base 44 ... Cover 46 ... Bolt 48 ... Nut 50 ... Packing 60 ... Piping 62 ... Thermocouple

Claims (7)

X線透過性に優れ、且つ、高熱伝導性の金属で形成されたベース及びカバーを有する、上下に開閉可能な容器と、
前記ベースとカバーの隙間に挿入される、ガス漏れを防ぐ機能を有する耐熱性のパッキンとを備え、
それ自体は加熱源を持たず、加熱源を有する装置と共に使用されることを特徴とするX線透過性はんだ付装置。
A container that is excellent in X-ray transmission and has a base and a cover formed of a metal having high thermal conductivity, and can be opened and closed vertically.
A heat-resistant packing inserted into the gap between the base and the cover and having a function of preventing gas leakage;
An X-ray transmissive soldering apparatus, which itself has no heating source and is used with an apparatus having a heating source.
前記容器が、固定具又は容器外側に加わる大気圧力により密封されることを特徴とする請求項1に記載のX線透過性はんだ付装置。   The X-ray transparent soldering apparatus according to claim 1, wherein the container is sealed by an atmospheric pressure applied to a fixture or the outside of the container. 前記カバーの中央部が上方に膨らむことにより、前記カバーの中央部と前記ベースの間にはんだ付対象を載せる空間が形成されていることを特徴とする請求項1又は2に記載のX線透過性はんだ付装置。   3. The X-ray transmission according to claim 1, wherein a space for placing an object to be soldered is formed between the central portion of the cover and the base by swelling the central portion of the cover upward. Soldering equipment. 前記ベースの上面は平面であり、内部にはんだ付対象を水平に密着してセットでき、周辺にいくに従い肉厚が厚くなる構造により容器内部が真空又は高圧となっても変形しにくい構造とされていることを特徴とする請求項1乃至3のいずれかに記載のX線透過性はんだ付装置。   The upper surface of the base is flat, and the soldering target can be set in close contact with the inside of the base, and the thickness increases as it goes to the periphery. The X-ray transparent soldering apparatus according to claim 1, wherein the X-ray transparent soldering apparatus is provided. 前記容器の内側を真空又は高圧にできる配管が設けられ、真空ポンプあるいはコンプレッサへ接続されることを特徴とする請求項1乃至4のいずれかに記載のX線透過性はんだ付装置。   The X-ray transparent soldering apparatus according to claim 1, wherein a pipe capable of making the inside of the container vacuum or high pressure is provided and connected to a vacuum pump or a compressor. 前記容器の内側に熱電対が挿入され、この熱電対の測定温度で外部の加熱源が制御されることを特徴とする請求項1乃至5のいずれかに記載のX線透過性はんだ付装置。   6. The X-ray transmissive soldering apparatus according to claim 1, wherein a thermocouple is inserted inside the container, and an external heating source is controlled at a temperature measured by the thermocouple. 前記X線透過性に優れ、且つ、高熱伝導性の金属としてマグネシウム合金あるいはアルミニウム合金を使用することを特徴とする請求項1乃至6のいずれかに記載のX線透過性はんだ付装置。   The X-ray transparent soldering apparatus according to claim 1, wherein a magnesium alloy or an aluminum alloy is used as the metal having excellent X-ray transparency and high thermal conductivity.
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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63263500A (en) * 1987-04-22 1988-10-31 株式会社ニコン Sample vessel for microscope observation
JP2005353712A (en) * 2004-06-09 2005-12-22 Okuhara Electric Inc Soldering equipment including radioscopy camera
JP2015123503A (en) * 2014-08-21 2015-07-06 千住金属工業株式会社 Vacuum soldering apparatus, and control method therein

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63263500A (en) * 1987-04-22 1988-10-31 株式会社ニコン Sample vessel for microscope observation
JP2005353712A (en) * 2004-06-09 2005-12-22 Okuhara Electric Inc Soldering equipment including radioscopy camera
JP2015123503A (en) * 2014-08-21 2015-07-06 千住金属工業株式会社 Vacuum soldering apparatus, and control method therein

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