JP2018010005A5 - Scan test data, scan test data creation method, and scan test apparatus - Google Patents
Scan test data, scan test data creation method, and scan test apparatus Download PDFInfo
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Description
本発明は、スキャンテストデータ、スキャンテストデータ作成方法、及びスキャンテスト装置に関する。 The present invention relates to scan test data, a scan test data creation method, and a scan test apparatus .
本発明の少なくとも一つの実施例において、周波数把握部(3430)は、少なくとも現在シフト周波数を決定しようとする対象スキャンセクションの前に位置するスキャンセクションと対象スキャンセクションに対する出力パターンが両方とも予測パターンと同一な場合のシフト周波数を対象スキャンセクションの使用可能なシフト周波数情報としてコンピューターで読み取り可能な記録媒体に格納する。さらに、図34で二つ以上の各部は互いに一つのモジュールに統合するか、またはより細分化することができる。例えば、周波数把握部(2030)は、ホストコンピューター(200、300)、テスター本体(210、310)、テストヘッド(220、320)、またはプロバー(350)などに備えられる。
In at least one embodiment of the present invention, the frequency grasping unit (3430) may determine that the output pattern for both the scan section and the target scan section at least before the target scan section for which the current shift frequency is to be determined is a predicted pattern. The shift frequency in the same case is stored in a computer-readable recording medium as usable shift frequency information of the target scan section. Furthermore, in FIG. 34, each of two or more parts can be integrated into one module or subdivided. For example, the frequency grasping unit (2030) is provided in the host computer (200, 300), the tester body (210, 310), the test head (220, 320), the prober (350), or the like.
Claims (26)
前記スキャン入力ポートに順次入力されるように構成された複数のスキャンセクションを含む第1データと、
前記第1データ内のそれぞれのスキャンセクションのタイミング情報を含む第2データと、
を含み、
前記第2データ内の使用可能なシフト周波数を検索する対象である対象スキャンセクションのタイミング情報と前記対象スキャンセクションの直前または直後に位置するスキャンセクションのタイミング情報は互いに異なる、
スキャンテストデータ。 A scan pattern is input to the scan input port of an IC chip having a scan input port, a scan path, and a scan output port, the output result output from the scan output port is compared with a predetermined prediction result, and based on the comparison result In a scan test for inspecting the IC chip for defects, a search is made for a shift frequency that can be used for a scan section constituted by a part or all of at least one scan pattern input to the scan input port. Scan test data for
First data including a plurality of scan sections configured to be sequentially input to the scan input port;
Second data including timing information of each scan section in the first data;
Including
Timing information of a target scan section that is a target for searching for usable shift frequencies in the second data is different from timing information of a scan section that is positioned immediately before or after the target scan section.
Scan test data.
前記第2データ内の前記複数の対象スキャンセクションのタイミング情報は互いに異なる、
請求項1に記載のスキャンテストデータ。 The first data includes a plurality of target scan sections;
Timing information of the plurality of target scan sections in the second data is different from each other;
The scan test data according to claim 1.
請求項1または2に記載のスキャンテストデータ。 The timing information includes at least one of first information corresponding to a shift frequency or a shift clock period for shifting a scan section to the scan input port and second information for identifying the scan section.
Scan test data according to claim 1 or 2.
前記第1スキャンパターンと前記第2スキャンパターンは前記スキャン入力ポートに順次入力されるように構成された、
請求項1ないし3の何れか一つに記載のスキャンテストデータ。 The first data includes a second scan pattern constituting the target scan section and a first scan pattern positioned immediately before the second scan pattern,
The first scan pattern and the second scan pattern are configured to be sequentially input to the scan input port.
Scan test data according to any one of claims 1 to 3.
第1スキャンパターンを前記スキャン入力ポートに入力して前記スキャン出力ポートから出力される出力パターンに対する第1予測パターンと、
前記第2スキャンパターンを前記スキャン入力ポートに入力して前記スキャン出力ポートから出力される出力パターンに対する第2予測パターンと、
をさらに含む、
請求項4に記載のスキャンテストデータ。 The first data is:
A first prediction pattern for an output pattern that is input to the scan input port and output from the scan output port;
A second prediction pattern for an output pattern that is input to the scan input port and output from the scan output port;
Further including
The scan test data according to claim 4.
請求項1ないし5の何れか一つに記載のスキャンテストデータ。 Said first data as a prediction pattern for output pattern outputted scan pattern is first input to the scan input port from the scan output port is input to the scan input port, Donkea (Do not Care) pattern Further including
The scan test data according to claim 1.
前記第2スキャンパターンと前記第3スキャンパターンは前記スキャン入力ポートに順次入力されるように構成された、
請求項4又は5に記載のスキャンテストデータ。 The first data further includes a third scan pattern located immediately after the second scan pattern,
The second scan pattern and the third scan pattern are configured to be sequentially input to the scan input port.
The scan test data according to claim 4 or 5.
請求項7に記載のスキャンテストデータ。 The first data further includes a third prediction pattern for an output pattern that is input to the scan input port and output from the scan output port.
The scan test data according to claim 7.
請求項1ないし8の何れか一つに記載のスキャンテストデータ。 The number of scan patterns used to search for usable shift frequencies of the target scan section is less than or equal to the total number of scan patterns for testing the IC chip.
Scan test data according to any one of claims 1 to 8.
前記スキャン入力ポートに順次入力されるように構成された複数のスキャンセクションを含む第1データを格納する工程と、
前記第1データ内のそれぞれのスキャンセクションのタイミング情報を含む第2データを格納する工程と、
を含み、
前記第2データ内の使用可能なシフト周波数を検索する対象である対象スキャンセクションのタイミング情報と前記対象スキャンセクションの直前または直後に位置するスキャンセクションのタイミング情報は互いに異なる、
スキャンテストデータ作成方法。 A computer inputs a scan pattern to the scan input port of an IC chip having a scan input port, a scan path, and a scan output port, compares the output result output from the scan output port with a predetermined prediction result, and compares Shift that can be used for a scan section composed of a part or all of at least one scan pattern input to the scan input port in a scan test for inspecting the IC chip for defects based on a result A scan test data creation method for creating scan test data for searching frequencies,
Storing first data including a plurality of scan sections configured to be sequentially input to the scan input port;
Storing second data including timing information of each scan section in the first data;
Including
Timing information of a target scan section that is a target for searching for usable shift frequencies in the second data is different from timing information of a scan section that is positioned immediately before or after the target scan section.
How to create scan test data.
前記第2データ内の前記複数の対象スキャンセクションのタイミング情報は互いに異なる、
請求項11に記載のスキャンテストデータ作成方法。 The first data includes a plurality of target scan sections;
Timing information of the plurality of target scan sections in the second data is different from each other;
The scan test data creation method according to claim 11.
請求項11または12に記載のスキャンテストデータ作成方法。 The timing information includes at least one of first information corresponding to a shift frequency or a shift clock period for shifting a scan section to the scan input port and second information for identifying the scan section.
The scan test data creation method according to claim 11 or 12.
前記第1スキャンパターンと前記第2スキャンパターンは前記スキャン入力ポートに順次入力されるように構成された、
請求項11ないし13の何れか一つに記載のスキャンテストデータ作成方法。 The first data includes a second scan pattern constituting the target scan section and a first scan pattern positioned immediately before the second scan pattern,
The first scan pattern and the second scan pattern are configured to be sequentially input to the scan input port.
The scan test data creation method according to any one of claims 11 to 13.
第1スキャンパターンを前記スキャン入力ポートに入力して前記スキャン出力ポートから出力される出力パターンに対する第1予測パターンと、
前記第2スキャンパターンを前記スキャン入力ポートに入力して前記スキャン出力ポートから出力される出力パターンに対する第2予測パターンと、
をさらに含む、
請求項14に記載のスキャンテストデータ作成方法。 The first data is:
A first prediction pattern for an output pattern that is input to the scan input port and output from the scan output port;
A second prediction pattern for an output pattern that is input to the scan input port and output from the scan output port;
Further including
The scan test data creation method according to claim 14.
請求項11ないし15の何れか一つに記載のスキャンテストデータ作成方法。 Said first data as a prediction pattern for output pattern outputted scan pattern is first input to the scan input port from the scan output port is input to the scan input port, Donkea (Do not Care) pattern Further including
The scan test data creation method according to any one of claims 11 to 15.
前記第2スキャンパターンと前記第3スキャンパターンは前記スキャン入力ポートに順次入力されるように構成された、
請求項14又は15に記載のスキャンテストデータ作成方法。 The first data further includes a third scan pattern located immediately after the second scan pattern,
The second scan pattern and the third scan pattern are configured to be sequentially input to the scan input port.
The scan test data creation method according to claim 14 or 15.
請求項17に記載のスキャンテストデータ作成方法。 The first data further includes a third prediction pattern for an output pattern that is input to the scan input port and output from the scan output port.
The scan test data creation method according to claim 17.
請求項11ないし18の何れか一つに記載のスキャンテストデータ作成方法。 Further comprising setting the number of scan patterns used to search for usable shift frequencies of the target scan section to be less than or equal to the total number of scan patterns for testing the IC chip;
The scan test data creation method according to any one of claims 11 to 18.
請求項11ないし19の何れか一つに記載のスキャンテストデータ作成方法。 Estimated time taken to find the optimal shift frequency from at least one scan pattern, the length of the scan section bits, the number of scan patterns divided into scan sections, boundary bits whose bit values change in the scan pattern, or Further comprising the step of partitioning the scan section on the basis of
20. The scan test data creation method according to any one of claims 11 to 19.
前記スキャン入力ポートに入力される少なくとも一つ以上のスキャンパターンは、その一部または全部が少なくとも一つ以上のスキャンセクションを構成し、
前記少なくとも一つ以上のスキャンセクション対して使用可能なシフト周波数を検索するためのスキャンテストデータは、
前記スキャン入力ポートに順次入力されるように構成された複数のスキャンセクションを含む第1データと、
前記第1データ内のそれぞれのスキャンセクションのタイミング情報を含む第2データと、
を含み、
前記第2データ内の使用可能なシフト周波数を検索する対象である対象スキャンセクションのタイミング情報と前記対象スキャンセクションの直前または直後に位置するスキャンセクションのタイミング情報は互いに異なる、
スキャンテスト装置。 A scan pattern is input to the scan input port of an IC chip having a scan input port, a scan path, and a scan output port, the output result output from the scan output port is compared with a predetermined prediction result, and based on the comparison result A scan test apparatus for inspecting the IC chip for defects,
At least one or more scan patterns input to the scan input port constitute at least one or more scan sections.
Scan test data for searching for usable shift frequencies for the at least one scan section is:
First data including a plurality of scan sections configured to be sequentially input to the scan input port;
Second data including timing information of each scan section in the first data;
Including
Timing information of a target scan section that is a target for searching for usable shift frequencies in the second data is different from timing information of a scan section that is positioned immediately before or after the target scan section.
Scan test device.
前記スキャン入力ポートに入力される少なくとも一つ以上のスキャンパターンは、その一部または全部が少なくとも一つ以上のスキャンセクションを構成し、
前記少なくとも一つ以上のスキャンセクション対して使用可能なシフト周波数を検索するためのスキャンテストデータは、
前記スキャン入力ポートに順次入力されるように構成された複数のスキャンセクションを含む第1データと、
前記第1データ内のそれぞれのスキャンセクションのタイミング情報を含む第2データと、
を含み、
前記第2データ内の使用可能なシフト周波数を検索する対象である対象スキャンセクションのタイミング情報と前記対象スキャンセクションの直前または直後に位置するスキャンセクションのタイミング情報は互いに異なる、
スキャンテスト方法。 A computer inputs a scan pattern to the scan input port of an IC chip having a scan input port, a scan path, and a scan output port, compares the output result output from the scan output port with a predetermined prediction result, and compares A scan test method for inspecting the presence or absence of defects of the IC chip based on a result,
At least one or more scan patterns input to the scan input port constitute at least one or more scan sections.
Scan test data for searching for usable shift frequencies for the at least one scan section is:
First data including a plurality of scan sections configured to be sequentially input to the scan input port;
Second data including timing information of each scan section in the first data;
Including
Timing information of a target scan section that is a target for searching for usable shift frequencies in the second data is different from timing information of a scan section that is positioned immediately before or after the target scan section.
Scan test method.
A computer-readable recording medium storing the program according to claim 25.
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KR1020170053361A KR101848480B1 (en) | 2016-04-28 | 2017-04-26 | Apparatus, method, and system for testing integrated circuit chip |
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