JP2018006747A5 - - Google Patents
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- JP2018006747A5 JP2018006747A5 JP2017123559A JP2017123559A JP2018006747A5 JP 2018006747 A5 JP2018006747 A5 JP 2018006747A5 JP 2017123559 A JP2017123559 A JP 2017123559A JP 2017123559 A JP2017123559 A JP 2017123559A JP 2018006747 A5 JP2018006747 A5 JP 2018006747A5
- Authority
- JP
- Japan
- Prior art keywords
- liquid
- flow path
- ejecting apparatus
- liquid ejecting
- discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000007788 liquid Substances 0.000 claims 47
- 230000003068 static Effects 0.000 claims 4
- 239000000758 substrate Substances 0.000 claims 4
- 238000007599 discharging Methods 0.000 claims 2
- 239000000463 material Substances 0.000 claims 2
- 239000012530 fluid Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 238000000926 separation method Methods 0.000 claims 1
Claims (15)
前記流路は、前記吐出部と前記圧力制御部とを接続する第１流路と、前記吐出部と前記圧力制御部とを接続する第２流路とを有し、前記第１流路と前記第２流路とは、前記第１方向における成分に関して互いに反対方向となる、前記圧力制御部に向かう第２方向を有する第１部分と前記圧力制御部に向かう第３方向を有する第２部分とをそれぞれ有する、ことを特徴とする液体吐出装置。 A liquid chamber filled with a liquid and a discharge port communicating with the liquid chamber, a discharge unit for discharging the liquid in the liquid chamber from the discharge port, a flow path connected to the discharge unit, and A pressure control unit that controls the pressure of the liquid chamber via a flow path; and a moving mechanism that moves the discharge unit along a first direction,
The flow path has a first flow path connecting the discharge unit and the pressure control unit, and a second flow path connecting the discharge unit and the pressure control unit, and the first flow path. The second channel has a first portion having a second direction toward the pressure control unit and a second portion having a third direction toward the pressure control unit, which are opposite to each other with respect to the component in the first direction. And a liquid ejecting apparatus.
ことを特徴とする請求項１に記載の液体吐出装置。 The flow path constitutes a circulation path that passes through the discharge section and the pressure control section,
The liquid ejecting apparatus according to claim 1, wherein:
ことを特徴とする請求項１に記載の液体吐出装置。 The discharge part is provided with a first common connection part, the pressure control part is provided with a second common connection part, and the first flow path is provided with the first common connection part and the second common connection part. The second flow path constitutes another path connecting the first common connection portion and the second common connection portion,
The liquid ejecting apparatus according to claim 1, wherein:
ことを特徴とする請求項１乃至３のいずれか１項に記載の液体吐出装置。 The pressure control unit includes a tank containing a liquid, the discharge unit is configured to discharge the liquid downward from the discharge port, and the pressure of the liquid chamber is a liquid level of the liquid in the tank. And controlled by the height difference between the liquid surface of the liquid in the discharge port,
The liquid ejecting apparatus according to claim 1, wherein the liquid ejecting apparatus is a liquid ejecting apparatus.
ことを特徴とする請求項１乃至４のいずれか１項に記載の液体吐出装置。 A pump disposed in the first flow path,
The liquid ejecting apparatus according to claim 1, wherein the liquid ejecting apparatus is a liquid ejecting apparatus.
ことを特徴とする請求項１乃至５のいずれか１項に記載の液体吐出装置。 A valve disposed in the second flow path,
The liquid ejecting apparatus according to claim 1, wherein the liquid ejecting apparatus is a liquid ejecting apparatus.
ことを特徴とする請求項６に記載の液体吐出装置。 The valve is opened at least during a period in which the moving mechanism moves the discharge unit at a changing speed.
The liquid ejection device according to claim 6, wherein
ことを特徴とする請求項１乃至７のいずれか１項に記載の液体吐出装置。 The discharge unit has a pressure control chamber partitioned from the liquid chamber by a separation unit, the pressure control unit, the pressure of the liquid chamber via the working fluid filled in the pressure control chamber and the flow path. To control the
The liquid ejecting apparatus according to claim 1, wherein the liquid ejecting apparatus is a liquid ejecting apparatus.
ことを特徴とする請求項１乃至７のいずれか１項に記載の液体吐出装置。 The pressure control unit communicates with the liquid chamber via the flow path,
The liquid ejecting apparatus according to claim 1, wherein the liquid ejecting apparatus is a liquid ejecting apparatus.
ことを特徴とする請求項１乃至９のいずれか１項に記載の液体吐出装置。 The second direction and the third direction are parallel to the first direction,
The liquid ejecting apparatus according to claim 1, wherein the liquid ejecting apparatus is a liquid ejecting apparatus.
ことを特徴とする請求項１乃至１０のいずれか１項に記載の液体吐出装置。 The first flow path and the second flow path are composed of a static pressure applied to the discharge part from the first flow path and a static pressure applied to the discharge part from the second flow path. The difference is configured to be within the allowable range,
Apparatus according to any one of claims 1 to 10, characterized in that.
前記流路は、前記吐出部と前記圧力制御部とを接続する第１流路と、前記吐出部と前記圧力制御部とを接続する第２流路とを有し、前記第１流路と前記第２流路とは、前記吐出部に対して前記第１流路から加えられる静圧と、前記吐出部に対して前記第２流路から加えられる静圧との差が許容範囲内に収まるように構成されている、ことを特徴とする液体吐出装置。 A liquid chamber filled with a liquid and a discharge port communicating with the liquid chamber, a discharge unit for discharging the liquid in the liquid chamber from the discharge port, a flow path connected to the discharge unit, and A pressure control unit that controls the pressure of the liquid chamber via a flow path; and a moving mechanism that moves the discharge unit along a first direction,
The flow path has a first flow path connecting the discharge unit and the pressure control unit, and a second flow path connecting the discharge unit and the pressure control unit, and the first flow path. The difference between the static pressure applied to the discharge part from the first flow path and the static pressure applied to the discharge part from the second flow path is within an allowable range. A liquid ejecting apparatus, which is configured to fit.
ことを特徴とするインプリント装置。 An imprint apparatus having a supply unit for supplying an imprint material onto a substrate, and forming a pattern by the imprint material supplied onto the substrate by the supply unit, wherein the supply unit is provided. The liquid ejecting apparatus according to any one of 1 to 12 is provided,
An imprint apparatus characterized by the above.
前記工程で前記パターンを形成された前記基板を加工する工程と、
を含むことを特徴とする物品製造方法。 Forming a pattern on a substrate by the imprint apparatus according to claim 13;
A step of processing the substrate on which the pattern is formed in the step,
A method for manufacturing an article, comprising:
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016125917 | 2016-06-24 | ||
| JP2016125917 | 2016-06-24 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2018006747A JP2018006747A (en) | 2018-01-11 |
| JP2018006747A5 true JP2018006747A5 (en) | 2020-08-06 |
| JP6997546B2 JP6997546B2 (en) | 2022-01-17 |
Family
ID=60950001
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017123559A Active JP6997546B2 (en) | 2016-06-24 | 2017-06-23 | Liquid discharge device, imprint device, printer, and article manufacturing method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6997546B2 (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7071196B2 (en) * | 2018-04-05 | 2022-05-18 | キヤノン株式会社 | Discharge material Discharge device and imprint device |
| US11193506B2 (en) * | 2018-11-15 | 2021-12-07 | Canon Kabushiki Kaisha | Pulsation dampener with gas retention |
| JP7134847B2 (en) * | 2018-11-28 | 2022-09-12 | キヤノン株式会社 | Discharge material discharge device and imprint device |
| JP7195906B2 (en) * | 2018-12-10 | 2022-12-26 | キヤノン株式会社 | Discharge material discharge device and imprint device |
| JP7374679B2 (en) | 2019-09-11 | 2023-11-07 | キヤノン株式会社 | Imprint device and imprint device control method |
| JP7391596B2 (en) | 2019-10-08 | 2023-12-05 | キヤノン株式会社 | imprint device |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6286905B2 (en) * | 2013-07-11 | 2018-03-07 | 大日本印刷株式会社 | Imprint apparatus and imprint method |
| JP6400090B2 (en) * | 2014-05-29 | 2018-10-03 | キヤノン株式会社 | Coating apparatus, imprint apparatus, and article manufacturing method |
| JP6530653B2 (en) * | 2014-07-25 | 2019-06-12 | キヤノン株式会社 | Liquid discharge apparatus, imprint apparatus, and article manufacturing method |
-
2017
- 2017-06-23 JP JP2017123559A patent/JP6997546B2/en active Active
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