JP2017509918A5 - - Google Patents
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- JP2017509918A5 JP2017509918A5 JP2016553587A JP2016553587A JP2017509918A5 JP 2017509918 A5 JP2017509918 A5 JP 2017509918A5 JP 2016553587 A JP2016553587 A JP 2016553587A JP 2016553587 A JP2016553587 A JP 2016553587A JP 2017509918 A5 JP2017509918 A5 JP 2017509918A5
- Authority
- JP
- Japan
- Prior art keywords
- illumination
- mirror
- individual mirrors
- group
- mirror array
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005286 illumination Methods 0.000 claims description 28
- 230000003287 optical effect Effects 0.000 claims description 21
- 230000005855 radiation Effects 0.000 claims description 13
- 238000009826 distribution Methods 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 claims 6
- 230000001419 dependent effect Effects 0.000 claims 4
- 238000003491 array Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000001393 microlithography Methods 0.000 claims 1
- 210000001747 pupil Anatomy 0.000 description 9
- 230000005540 biological transmission Effects 0.000 description 3
- 238000009304 pastoral farming Methods 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102014203189.3A DE102014203189A1 (de) | 2014-02-21 | 2014-02-21 | Spiegel-Array |
| DE102014203189.3 | 2014-02-21 | ||
| PCT/EP2015/053287 WO2015124555A1 (de) | 2014-02-21 | 2015-02-17 | Spiegel-array |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017509918A JP2017509918A (ja) | 2017-04-06 |
| JP2017509918A5 true JP2017509918A5 (OSRAM) | 2018-03-29 |
| JP6568865B2 JP6568865B2 (ja) | 2019-08-28 |
Family
ID=52595296
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016553587A Active JP6568865B2 (ja) | 2014-02-21 | 2015-02-17 | ミラーアレイ |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US9874819B2 (OSRAM) |
| JP (1) | JP6568865B2 (OSRAM) |
| KR (1) | KR102424717B1 (OSRAM) |
| DE (1) | DE102014203189A1 (OSRAM) |
| WO (1) | WO2015124555A1 (OSRAM) |
Families Citing this family (42)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109040553B (zh) | 2013-06-13 | 2021-04-13 | 核心光电有限公司 | 双孔径变焦数字摄影机 |
| JP2016523389A (ja) | 2013-07-04 | 2016-08-08 | コアフォトニクス リミテッド | 小型望遠レンズアセンブリ |
| CN108718376B (zh) | 2013-08-01 | 2020-08-14 | 核心光电有限公司 | 具有自动聚焦的纤薄多孔径成像系统及其使用方法 |
| US9392188B2 (en) | 2014-08-10 | 2016-07-12 | Corephotonics Ltd. | Zoom dual-aperture camera with folded lens |
| CN107209404B (zh) | 2015-01-03 | 2021-01-15 | 核心光电有限公司 | 微型长焦镜头模块和使用该镜头模块的相机 |
| CN112305833A (zh) | 2015-04-16 | 2021-02-02 | 核心光电有限公司 | 紧凑型折叠式相机中的自动对焦和光学图像稳定 |
| KR102143309B1 (ko) | 2015-08-13 | 2020-08-11 | 코어포토닉스 리미티드 | 비디오 지원 및 스위칭/비스위칭 동적 제어 기능이 있는 듀얼-애퍼처 줌 카메라 |
| EP3518520B1 (en) | 2016-05-30 | 2020-08-26 | Corephotonics Ltd. | Rotational ball-guided voice coil motor |
| US10616484B2 (en) | 2016-06-19 | 2020-04-07 | Corephotonics Ltd. | Frame syncrhonization in a dual-aperture camera system |
| KR102226315B1 (ko) | 2016-07-07 | 2021-03-12 | 코어포토닉스 리미티드 | 폴디드 옵틱용 선형 볼 가이드 음성 코일 모터 |
| DE102016217735A1 (de) * | 2016-09-16 | 2018-03-22 | Carl Zeiss Smt Gmbh | Komponente für eine Spiegelanordnung für die EUV-Lithographie |
| KR102269547B1 (ko) | 2016-12-28 | 2021-06-25 | 코어포토닉스 리미티드 | 확장된 광-폴딩-요소 스캐닝 범위를 갖는 폴디드 카메라 구조 |
| CN113805405B (zh) | 2017-01-12 | 2023-05-23 | 核心光电有限公司 | 紧凑型折叠式摄影机及其组装方法 |
| US11111133B1 (en) * | 2017-01-30 | 2021-09-07 | Mirrorcle Technologies, Inc. | MEMS actuators with improved performance and cooling |
| WO2018167581A1 (en) | 2017-03-15 | 2018-09-20 | Corephotonics Ltd. | Camera with panoramic scanning range |
| EP4539440A3 (en) | 2017-11-23 | 2025-07-16 | Corephotonics Ltd. | Compact folded camera structure |
| EP4472224A3 (en) | 2018-02-05 | 2025-02-19 | Corephotonics Ltd. | Reduced height penalty for folded camera |
| EP4600732A3 (en) | 2018-02-12 | 2025-10-15 | Corephotonics Ltd. | Folded camera with optical image stabilization |
| EP3822588B1 (en) | 2018-04-23 | 2022-09-07 | Corephotonics Ltd. | An optical-path folding-element with an extended two degree of freedom rotation range |
| EP3818405A4 (en) * | 2018-07-04 | 2021-08-04 | Corephotonics Ltd. | CAMERAS WITH SCAN OPTICAL TRAIL FOLDING ELEMENTS FOR AUTOMOTIVE OR SURVEILLANCE APPLICATIONS |
| US11635596B2 (en) | 2018-08-22 | 2023-04-25 | Corephotonics Ltd. | Two-state zoom folded camera |
| BR112021006629A2 (pt) * | 2018-10-10 | 2021-07-06 | Vyas Trilok | sistema e método de moinho de vento vertical villanova ultraeficiente |
| DE102019206865B4 (de) * | 2019-05-13 | 2024-09-12 | Carl Zeiss Smt Gmbh | Verfahren und vorrichtung zum erzeugen eines mathematischen modells zum positionieren von einzelspiegeln eines facettenspiegels in einem optischen system |
| KR102425865B1 (ko) | 2019-07-31 | 2022-07-27 | 코어포토닉스 리미티드 | 카메라 패닝 또는 모션에서 배경 블러링을 생성하는 시스템 및 방법 |
| US11949976B2 (en) | 2019-12-09 | 2024-04-02 | Corephotonics Ltd. | Systems and methods for obtaining a smart panoramic image |
| EP4546027A3 (en) | 2020-02-22 | 2025-08-13 | Corephotonics Ltd. | Split screen feature for macro photography |
| KR20250052463A (ko) | 2020-04-26 | 2025-04-18 | 코어포토닉스 리미티드 | 홀 바 센서 보정을 위한 온도 제어 |
| EP4058978B1 (en) | 2020-05-17 | 2024-07-03 | Corephotonics Ltd. | Image stitching in the presence of a full field of view reference image |
| KR102617779B1 (ko) | 2020-05-30 | 2023-12-22 | 코어포토닉스 리미티드 | 슈퍼 매크로 이미지를 얻기 위한 시스템 및 방법 |
| EP4202521B1 (en) | 2020-07-15 | 2025-03-19 | Corephotonics Ltd. | Point of view aberrations correction in a scanning folded camera |
| US11637977B2 (en) | 2020-07-15 | 2023-04-25 | Corephotonics Ltd. | Image sensors and sensing methods to obtain time-of-flight and phase detection information |
| CN114270145B (zh) | 2020-07-31 | 2024-05-17 | 核心光电有限公司 | 用于大行程线性位置感测的霍尔传感器-磁体几何结构 |
| EP4038432A4 (en) | 2020-08-12 | 2022-12-14 | Corephotonics Ltd. | OPTICAL IMAGE STABILIZATION IN A FOLDED SCANNING CAMERA |
| KR20250165686A (ko) | 2021-03-11 | 2025-11-26 | 코어포토닉스 리미티드 | 팝-아웃 카메라 시스템 |
| EP4204885A4 (en) | 2021-06-08 | 2024-03-06 | Corephotonics Ltd. | SYSTEMS AND CAMERAS FOR FILTING A FOCAL PLANE OF A SUPERMACRO IMAGE |
| US12328505B2 (en) | 2022-03-24 | 2025-06-10 | Corephotonics Ltd. | Slim compact lens optical image stabilization |
| KR20250048255A (ko) * | 2022-08-16 | 2025-04-08 | 칼 짜이스 에스엠테 게엠베하 | 마이크로 광학 요소 |
| DE102022209411A1 (de) | 2022-09-09 | 2024-03-14 | Carl Zeiss Smt Gmbh | Mikrospiegelanordnung mit einer Anzahl von Einzelspiegelelementen |
| DE102022209427A1 (de) | 2022-09-09 | 2024-03-14 | Carl Zeiss Smt Gmbh | Mikrospiegelanordnung mit federnd gelagerten Einzelspiegelelementen |
| DE102022212167A1 (de) | 2022-11-16 | 2023-09-14 | Carl Zeiss Smt Gmbh | EUV-Quellen-Modul für eine EUV-Projektionsbelichtungsanlage |
| DE102022212168A1 (de) | 2022-11-16 | 2024-05-16 | Carl Zeiss Smt Gmbh | EUV-Optik-Modul für eine EUV-Projektionsbelichtungsanlage |
| DE102023126597A1 (de) * | 2023-09-29 | 2025-04-03 | Carl Zeiss Smt Gmbh | Verfahren zur Verarbeitung analoger elektrischer Ausgangssignale |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10138313A1 (de) | 2001-01-23 | 2002-07-25 | Zeiss Carl | Kollektor für Beleuchtugnssysteme mit einer Wellenlänge < 193 nm |
| US7145269B2 (en) | 2004-03-10 | 2006-12-05 | Asml Netherlands B.V. | Lithographic apparatus, Lorentz actuator, and device manufacturing method |
| JP2007052256A (ja) * | 2005-08-18 | 2007-03-01 | Fujifilm Corp | 回転変位型光変調素子及びこれを用いた光学装置 |
| DE102006023652B4 (de) | 2006-05-18 | 2008-10-30 | Esa Patentverwertungsagentur Sachsen-Anhalt Gmbh | Elektromotorische Einrichtung zur Betätigung von Gaswechselventilen |
| US7804603B2 (en) * | 2006-10-03 | 2010-09-28 | Asml Netherlands B.V. | Measurement apparatus and method |
| US20080100816A1 (en) * | 2006-10-31 | 2008-05-01 | Asml Netherlands B.V. | Lithographic apparatus and method |
| KR101446820B1 (ko) * | 2007-02-06 | 2014-10-01 | 칼 짜이스 에스엠테 게엠베하 | 마이크로리소그래피 투영 노광 장치의 조명 시스템 내의 다수의 미러 어레이들을 감시하는 방법 및 장치 |
| WO2008116886A1 (de) * | 2007-03-27 | 2008-10-02 | Carl Zeiss Smt Ag | Korrektur optischer elemente mittels flach eingestrahltem korrekturlicht |
| JP5487118B2 (ja) * | 2008-02-15 | 2014-05-07 | カール・ツァイス・エスエムティー・ゲーエムベーハー | マイクロリソグラフィのための投影露光装置に使用するファセットミラー |
| KR101769157B1 (ko) | 2008-10-20 | 2017-08-17 | 칼 짜이스 에스엠테 게엠베하 | 방사선 빔 안내를 위한 광학 모듈 |
| KR101258344B1 (ko) * | 2008-10-31 | 2013-04-30 | 칼 짜이스 에스엠티 게엠베하 | Ｅｕｖ 마이크로리소그래피용 조명 광학 기기 |
| DE102009045694B4 (de) * | 2009-10-14 | 2012-03-29 | Carl Zeiss Smt Gmbh | Beleuchtungsoptik für die Mikrolithographie sowie Beleuchtungssystem und Projektionsbelichtungsanlage mit einer derartigen Beleuchtungsoptik |
| DE102010040811A1 (de) * | 2010-09-15 | 2012-03-15 | Carl Zeiss Smt Gmbh | Abbildende Optik |
| DE102011006100A1 (de) | 2011-03-25 | 2012-09-27 | Carl Zeiss Smt Gmbh | Spiegel-Array |
| DE102012213515A1 (de) * | 2012-08-01 | 2014-02-06 | Carl Zeiss Smt Gmbh | Verfahren zum Betreiben einer mikrolithographischen Projektionsbelichtungsanlage |
| DE102014203188A1 (de) * | 2014-02-21 | 2015-08-27 | Carl Zeiss Smt Gmbh | Verfahren zur Beleuchtung eines Objektfeldes einer Projektionsbelichtungsanlage |
-
2014
- 2014-02-21 DE DE102014203189.3A patent/DE102014203189A1/de not_active Ceased
-
2015
- 2015-02-17 KR KR1020167025881A patent/KR102424717B1/ko active Active
- 2015-02-17 WO PCT/EP2015/053287 patent/WO2015124555A1/de not_active Ceased
- 2015-02-17 JP JP2016553587A patent/JP6568865B2/ja active Active
-
2016
- 2016-08-02 US US15/226,358 patent/US9874819B2/en active Active
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