JP2017223528A - Torque detecting device - Google Patents

Torque detecting device Download PDF

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JP2017223528A
JP2017223528A JP2016118618A JP2016118618A JP2017223528A JP 2017223528 A JP2017223528 A JP 2017223528A JP 2016118618 A JP2016118618 A JP 2016118618A JP 2016118618 A JP2016118618 A JP 2016118618A JP 2017223528 A JP2017223528 A JP 2017223528A
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Prior art keywords
torque
magnetic
outer ring
inner ring
angle
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小池 孝誌
Takashi Koike
孝誌 小池
靖之 福島
Yasuyuki Fukushima
靖之 福島
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NTN Corp
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NTN Corp
NTN Toyo Bearing Co Ltd
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Priority to JP2016118618A priority Critical patent/JP2017223528A/en
Priority to DE112017003008.0T priority patent/DE112017003008T5/en
Priority to CN201780036824.6A priority patent/CN109313092B/en
Priority to PCT/JP2017/021119 priority patent/WO2017217298A1/en
Publication of JP2017223528A publication Critical patent/JP2017223528A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L3/00Measuring torque, work, mechanical power, or mechanical efficiency, in general
    • G01L3/02Rotary-transmission dynamometers
    • G01L3/14Rotary-transmission dynamometers wherein the torque-transmitting element is other than a torsionally-flexible shaft
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C19/00Bearings with rolling contact, for exclusively rotary movement
    • F16C19/02Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows
    • F16C19/04Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for radial load mainly
    • F16C19/06Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for radial load mainly with a single row or balls
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L3/00Measuring torque, work, mechanical power, or mechanical efficiency, in general
    • G01L3/02Rotary-transmission dynamometers
    • G01L3/04Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft
    • G01L3/10Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft involving electric or magnetic means for indicating
    • G01L3/101Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft involving electric or magnetic means for indicating involving magnetic or electromagnetic means
    • G01L3/104Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft involving electric or magnetic means for indicating involving magnetic or electromagnetic means involving permanent magnets
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L3/00Measuring torque, work, mechanical power, or mechanical efficiency, in general
    • G01L3/02Rotary-transmission dynamometers
    • G01L3/14Rotary-transmission dynamometers wherein the torque-transmitting element is other than a torsionally-flexible shaft
    • G01L3/1407Rotary-transmission dynamometers wherein the torque-transmitting element is other than a torsionally-flexible shaft involving springs
    • G01L3/1428Rotary-transmission dynamometers wherein the torque-transmitting element is other than a torsionally-flexible shaft involving springs using electrical transducers
    • G01L3/1435Rotary-transmission dynamometers wherein the torque-transmitting element is other than a torsionally-flexible shaft involving springs using electrical transducers involving magnetic or electromagnetic means

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a torque detecting device which does not require mechanical adjustment at initial setting, has a simple structure, and can stably detect torque.SOLUTION: A torque detecting device 1 has an outer ring 2 and an inner ring 3 which can rotate mutually, and detects torque acting between the outer ring 2 and the inner ring 3. An elastic member 4 is provided, which directly or indirectly couples the outer ring 2 and the inner ring 3, and deforms according to the rotation displacement of the outer ring 2 and the inner ring 3. An angle sensor 40 detects rotation angles of the outer ring 2 and the inner ring 3. Torque calculating means 10 calculates torque from a detection value of the angle sensor 40.SELECTED DRAWING: Figure 2

Description

この発明は、シャフトに負荷されたトルクを検出するために用いるトルク検出装置に関し、特に産業ロボットの関節等に負荷されるトルクを検出する技術に関する。   The present invention relates to a torque detection device used for detecting torque applied to a shaft, and more particularly to a technique for detecting torque applied to a joint or the like of an industrial robot.

特許文献1に、産業用ロボットの関節部に負荷されるトルクを検出するトルク検出装置が開示されている。このトルク検出装置は、外輪と内輪とが弾性を有する複数のはりで連結されており、内輪から外輪側に直径上に張出して配置された一対の内輪張出片と外輪との間に生じる変位量を2個の変位センサでそれぞれ測定し、その測定された2つの変位量から内外輪に作用する軸トルクを検出する。   Patent Document 1 discloses a torque detection device that detects torque applied to a joint portion of an industrial robot. In this torque detection device, an outer ring and an inner ring are connected by a plurality of elastic beams, and a displacement is generated between a pair of inner ring protruding pieces and an outer ring that are arranged to protrude from the inner ring to the outer ring on the diameter side. The amount is measured by two displacement sensors, and the shaft torque acting on the inner and outer rings is detected from the two measured displacement amounts.

特許第3136816号公報Japanese Patent No. 3136816

特許文献1に開示されているトルク検出装置は、一対の内輪張出片と外輪との間に生じる変位量を2個の変位センサでそれぞれ測定するため、初期設定での一対の内輪張出片と外輪との機械的な隙間調整が難しい。また、特許文献1には、2個の変位センサの値からトルクを算出する手法についての記載はないが、2個の変位センサの値から外輪と内輪との回転変位量を推定する等の処理が必要であり、処理回路が煩雑になると考えられる。   The torque detection device disclosed in Patent Document 1 measures a displacement amount generated between a pair of inner ring projecting pieces and an outer ring with two displacement sensors, and thus a pair of inner ring projecting pieces in an initial setting. It is difficult to adjust the mechanical clearance between the outer ring and the outer ring. Further, Patent Document 1 does not describe a method for calculating torque from the values of two displacement sensors, but processing such as estimating the rotational displacement amount between the outer ring and the inner ring from the values of the two displacement sensors. Therefore, it is considered that the processing circuit becomes complicated.

この発明の目的は、初期設定時の機械的な調整が不要で、しかも簡単な機構でありながら、安定したトルク検出が可能なトルク検出装置を提供することである。   An object of the present invention is to provide a torque detection device that does not require mechanical adjustment at the time of initial setting and is capable of stable torque detection with a simple mechanism.

この発明のトルク検出装置は、互いに回転可能な外輪と内輪とを有し、これら外輪と内輪間に作用するトルクを検出するトルク検出装置であって、前記外輪と前記内輪とを直接または間接に連結し前記外輪と前記内輪との回転変位に応じて変形する弾性部材と、前記外輪と前記内輪との回転角を検出する角度センサと、この角度センサの検出値から前記トルクを算出するトルク算出手段10とを備えることを特徴とする。   A torque detection device according to the present invention includes an outer ring and an inner ring that are rotatable relative to each other, and detects torque acting between the outer ring and the inner ring, wherein the outer ring and the inner ring are directly or indirectly connected. An elastic member that is connected and deforms according to rotational displacement between the outer ring and the inner ring, an angle sensor that detects a rotation angle between the outer ring and the inner ring, and a torque calculation that calculates the torque from the detected value of the angle sensor And means 10.

この構成によると、外輪と内輪間にトルクが印加されると、外輪と内輪とを連結する弾性部材が変形し、外輪と内輪間に回転変位が発生する。この回転変位の角度を角度センサで検出し、その検出値からトルク算出手段10がトルクを算出する。このように、外輪と内輪間の回転変位を直接検出するため、従来のように2個の変位センサの値を外輪と内輪との回転変位量を推定する等の処理が不要であり、処理回路を簡略にできる。また、外輪と内輪間の微小な回転変位を測定してからトルクに換算するため、角度センサ装着後の機械的な調整が不要である。   According to this configuration, when torque is applied between the outer ring and the inner ring, the elastic member connecting the outer ring and the inner ring is deformed, and rotational displacement is generated between the outer ring and the inner ring. The angle of this rotational displacement is detected by an angle sensor, and torque calculation means 10 calculates torque from the detected value. As described above, since the rotational displacement between the outer ring and the inner ring is directly detected, processing such as estimating the rotational displacement amount between the outer ring and the inner ring by using the values of the two displacement sensors as in the prior art is unnecessary. Can be simplified. In addition, since a minute rotational displacement between the outer ring and the inner ring is measured and converted into torque, mechanical adjustment after mounting the angle sensor is unnecessary.

この発明において、前記角度センサが、前記外輪および前記内輪のいずれか一方に設けられ磁極が円周方向に並ぶ磁気エンコーダと、前記外輪および前記内輪のいずれか他方に設けられ前記磁気エンコーダの磁界を検出する磁気センサとを有する構成であっても良い。
角度センサが磁気エンコーダと磁気センサとを有する構成であると、回転変位の角度情報がデジタル値で検出されるため、アナログ信号のような出力オフセットがなく、安定したトルク出力が可能である。
In this invention, the angle sensor is provided on one of the outer ring and the inner ring and the magnetic poles are arranged in a circumferential direction, and the magnetic field of the magnetic encoder is provided on the other of the outer ring and the inner ring. The structure which has a magnetic sensor to detect may be sufficient.
When the angle sensor has a magnetic encoder and a magnetic sensor, the rotational displacement angle information is detected as a digital value, so that there is no output offset like an analog signal and stable torque output is possible.

角度センサが磁気エンコーダと磁気センサとを有する構成である場合、前記磁気エンコーダが、N極とS極とが交互に着磁された磁気エンコーダトラックを少なくとも1列有し、
前記角度センサが、前記磁気エンコーダと前記磁気センサとの回転変位により前記磁気センサが出力する磁気信号から、前記磁気エンコーダトラックのN極とS極の1極対の角度を電気的に逓倍した高分解能のパルス信号を生成する逓倍回路61と、この逓倍回路61で生成されたパルス信号をカウントしそのカウントした角度情報を前記トルク算出手段10へ送るカウンタ62とを有していても良い。
この構成であると、外輪と内輪との回転角を高分解能で検出できるため、外輪と内輪との間に作用するトルクを正確に検出できる。
When the angle sensor has a configuration including a magnetic encoder and a magnetic sensor, the magnetic encoder has at least one row of magnetic encoder tracks in which N poles and S poles are alternately magnetized,
The angle sensor is a high frequency obtained by electrically multiplying the angle of one pole pair of the N pole and the S pole of the magnetic encoder track from the magnetic signal output by the magnetic sensor due to the rotational displacement between the magnetic encoder and the magnetic sensor. A multiplying circuit 61 that generates a resolution pulse signal and a counter 62 that counts the pulse signal generated by the multiplying circuit 61 and sends the counted angle information to the torque calculation means 10 may be provided.
With this configuration, the rotation angle between the outer ring and the inner ring can be detected with high resolution, so that the torque acting between the outer ring and the inner ring can be accurately detected.

また、角度センサが磁気エンコーダと磁気センサとを有する構成である場合、前記磁気エンコーダが、互いに異なる着磁極対数でそれぞれN極とS極とが交互に着磁された複列の磁気エンコーダトラックを有し、かつ前記磁気センサが、前記複列の磁気エンコーダトラックの磁界をそれぞれ検出する複数の検出部を有し、
前記角度センサが、前記磁気エンコーダと前記磁気センサとの回転変位により前記磁気センサの前記複数の検出部がそれぞれ出力する磁気信号の位相差を検出する位相差検出部51と、この位相差検出部51で検出された位相差に基づき前記回転変位の絶対角を算出する絶対角算出部52と、この絶対角算出部52の絶対角情報を前記トルク算出手段10へ送る送信部54とを有していても良い。
この構成であると、着磁極対数が異なる複列の磁気エンコーダトラックと磁気センサの複数の検出部とが相対回転することで、複数の検出部の検出信号間に位相のずれが発生する。この位相差を位相差検出部51で検出し、その位相差に基づいて絶対角算出部52により外輪と内輪との回転変位の絶対角を算出する。算出された絶対角情報は、送信部54によりトルク算出手段10へ送られる。外輪と内輪との絶対角をトルクに換算するため、正確なトルクが得られる。
Further, when the angle sensor has a configuration including a magnetic encoder and a magnetic sensor, the magnetic encoder has a double-row magnetic encoder track in which N poles and S poles are alternately magnetized with different numbers of pole pairs. And the magnetic sensor has a plurality of detection units that respectively detect magnetic fields of the double-row magnetic encoder tracks,
The angle sensor detects a phase difference between magnetic signals output from the plurality of detection units of the magnetic sensor by rotational displacement between the magnetic encoder and the magnetic sensor, and the phase difference detection unit. An absolute angle calculation unit 52 that calculates the absolute angle of the rotational displacement based on the phase difference detected in 51, and a transmission unit 54 that sends the absolute angle information of the absolute angle calculation unit 52 to the torque calculation means 10. May be.
With this configuration, a double-row magnetic encoder track having a different number of magnetic pole pairs and a plurality of detection units of the magnetic sensor rotate relative to each other, thereby causing a phase shift between detection signals of the plurality of detection units. This phase difference is detected by the phase difference detection unit 51, and the absolute angle of the rotational displacement between the outer ring and the inner ring is calculated by the absolute angle calculation unit 52 based on the phase difference. The calculated absolute angle information is sent to the torque calculation means 10 by the transmission unit 54. Since the absolute angle between the outer ring and the inner ring is converted into torque, accurate torque can be obtained.

この発明において、前記磁気エンコーダの角度検出可能な範囲が円周の一部であっても良い。
外輪と内輪とは弾性部材で連結され、互いに微小回転しかしないので、磁気エンコーダの角度検出可能な範囲が円周の一部であっても問題ない。
In this invention, the range in which the angle of the magnetic encoder can be detected may be a part of the circumference.
Since the outer ring and the inner ring are connected by an elastic member and only slightly rotate with each other, there is no problem even if the range in which the angle of the magnetic encoder can be detected is a part of the circumference.

この発明において、前記外輪および前記内輪はそれぞれ軸受の外輪および内輪であり、前記軸受に前記角度センサが一体に設けられ、これら軸受と角度センサとで角度センサ付き軸受を構成していても良い。
これにより、既存の角度付き軸を使用してトルク検出装置を構成することができる。
In the present invention, the outer ring and the inner ring may be an outer ring and an inner ring of a bearing, respectively, and the angle sensor may be provided integrally with the bearing, and the bearing and the angle sensor may constitute a bearing with an angle sensor.
Thereby, a torque detection apparatus can be comprised using the existing shaft with an angle.

この発明のトルク検出装置は、互いに回転可能な外輪と内輪とを有し、これら外輪と内輪間に作用するトルクを検出するトルク検出装置であって、前記外輪と前記内輪とを直接または間接に連結し前記外輪と前記内輪との回転変位に応じて変形する弾性部材と、前記外輪と前記内輪との回転角を検出する角度センサと、この角度センサの検出値から前記トルクを算出するトルク算出手段とを備えるため、初期設定時の機械的な調整が不要で、しかも簡単な機構でありながら、安定したトルク検出が可能である。   A torque detection device according to the present invention includes an outer ring and an inner ring that are rotatable relative to each other, and detects torque acting between the outer ring and the inner ring, wherein the outer ring and the inner ring are directly or indirectly connected. An elastic member that is connected and deforms according to rotational displacement between the outer ring and the inner ring, an angle sensor that detects a rotation angle between the outer ring and the inner ring, and a torque calculation that calculates the torque from the detected value of the angle sensor Therefore, mechanical adjustment at the time of initial setting is unnecessary, and stable torque detection is possible with a simple mechanism.

この発明の一実施形態にかかるトルク検出装置の機構部の軸心を通る平面で破断した断面図である。It is sectional drawing fractured | ruptured in the plane which passes along the axial center of the mechanism part of the torque detection apparatus concerning one Embodiment of this invention. 図1のII−II断面図である。It is II-II sectional drawing of FIG. 同トルク検出装置の磁気エンコーダの着磁パターンを示す図であり、図1のIII−III断面から見た状態を示す。It is a figure which shows the magnetization pattern of the magnetic encoder of the torque detection apparatus, and shows the state seen from the III-III cross section of FIG. 同トルク検出装置の角度センサの構成を示すである。It shows a configuration of an angle sensor of the torque detection device. 同磁気エンコーダトラックの着磁パターンと磁気センサが出力する磁気信号との関係を示す図である。It is a figure which shows the relationship between the magnetization pattern of the magnetic encoder track | truck, and the magnetic signal which a magnetic sensor outputs. 同トルク検出装置のトルク算出手段のブロック図である。It is a block diagram of the torque calculation means of the torque detection device. この発明の異なる実施形態にかかるトルク検出装置の機構部の軸心を通る平面で破断した断面図である。It is sectional drawing fractured | ruptured in the plane which passes along the axial center of the mechanism part of the torque detection apparatus concerning different embodiment of this invention. 図7のVIII−VIII断面図である。It is VIII-VIII sectional drawing of FIG. 同トルク検出装置の磁気エンコーダの各磁気エンコーダトラックの着磁パターンを示す図であり、図7のIX−IX断面から見た状態を示す。It is a figure which shows the magnetization pattern of each magnetic encoder track | truck of the magnetic encoder of the same torque detection apparatus, and shows the state seen from the IX-IX cross section of FIG. この発明のさらに異なる実施形態にかかるトルク検出装置の機構部の軸心を通る平面で破断した断面図である。It is sectional drawing fractured | ruptured in the plane which passes along the axial center of the mechanism part of the torque detection apparatus concerning further different embodiment of this invention. 図10のXI矢視図である。It is a XI arrow line view of FIG. この発明のさらに異なる実施形態にかかるトルク検出装置の機構部の軸心を通る平面で破断した断面図である。It is sectional drawing fractured | ruptured in the plane which passes along the axial center of the mechanism part of the torque detection apparatus concerning further different embodiment of this invention. 図12のXIII−XIII断面図である。It is XIII-XIII sectional drawing of FIG. 異なる角度センサの磁気エンコーダの着磁パターンを示す図である。It is a figure which shows the magnetization pattern of the magnetic encoder of a different angle sensor. 図14の角度センサの構成を示すである。It is a structure of the angle sensor of FIG.

この発明の実施形態を図面と共に説明する。
図1はこの発明の一実施形態にかかるトルク検出装置の機構部の軸心を通る平面で破断した断面図、図2はそのII−II断面図である。このトルク検出装置1は、機構部1aと処理回路1bとで構成される。処理回路1bは、角度算出手段50とトルク算出手段10とからなる。これら角度算出手段50およびトルク算出手段10は、回路基板上にマイクロコンピュータと電子回路とを実装したものであるか、またはパーソナルコンピュータで構成されている。処理回路1bは、機構部1aに設けられていても良く、あるいは配線で接続された外部に設けられていても良い。処理回路1bの詳細については、後で説明する。
An embodiment of the present invention will be described with reference to the drawings.
FIG. 1 is a cross-sectional view taken along a plane passing through the axis of a mechanism portion of a torque detector according to an embodiment of the present invention, and FIG. The torque detection device 1 includes a mechanism unit 1a and a processing circuit 1b. The processing circuit 1 b includes an angle calculation unit 50 and a torque calculation unit 10. The angle calculation means 50 and the torque calculation means 10 are each configured by mounting a microcomputer and an electronic circuit on a circuit board, or are constituted by a personal computer. The processing circuit 1b may be provided in the mechanism unit 1a or may be provided outside connected by wiring. Details of the processing circuit 1b will be described later.

機構部1aは、外輪2と内輪3とを備える。外輪2の内径面2aと内輪3の外径面3aとが円周方向に摺動自在に接しており、外輪2と内輪3とは互いに回転可能である。図2に示すように、外輪2と内輪3とは、複数の弾性部材4で連結されている。図の例では、4つの弾性部材4が円周方向に等間隔で配置されている。各弾性部材4の両端は、外輪2の取付溝2bと内輪3の取付溝3bにそれぞれ挿入されている。外輪2の取付溝2bは、外輪2の内径面2aに形成された切欠き部2cの底部にあり、内輪3の取付溝3bは、内輪3の外径面3aに形成された切欠き部3cの底部にある。このため、切欠き部2c,3cに位置する弾性部材4の中央部は外輪2および内輪3に接しておらず、弾性部材4の変形が邪魔されない。   The mechanism unit 1 a includes an outer ring 2 and an inner ring 3. An inner diameter surface 2a of the outer ring 2 and an outer diameter surface 3a of the inner ring 3 are in slidable contact with each other in the circumferential direction, and the outer ring 2 and the inner ring 3 are rotatable relative to each other. As shown in FIG. 2, the outer ring 2 and the inner ring 3 are connected by a plurality of elastic members 4. In the illustrated example, four elastic members 4 are arranged at equal intervals in the circumferential direction. Both ends of each elastic member 4 are inserted into the mounting groove 2b of the outer ring 2 and the mounting groove 3b of the inner ring 3, respectively. The mounting groove 2b of the outer ring 2 is at the bottom of the notch 2c formed in the inner diameter surface 2a of the outer ring 2, and the mounting groove 3b of the inner ring 3 is notched 3c formed in the outer diameter surface 3a of the inner ring 3. At the bottom. For this reason, the center part of the elastic member 4 located in the notches 2c and 3c is not in contact with the outer ring 2 and the inner ring 3, and the deformation of the elastic member 4 is not obstructed.

なお、弾性部材4は、弾性変形可能な(可撓性を有する)部材であれば良く、例えば、板バネやゴム等であっても良い。また、弾性部材4の周方向厚さ、ならびに外輪2の取り付け溝2bおよび内輪3の取り付け溝3bの周方向の幅は、トルク検出装置1に入力されることが予想されるトルク等に応じて適宜設定される。   The elastic member 4 may be any member that can be elastically deformed (has flexibility), and may be, for example, a leaf spring or rubber. Further, the circumferential thickness of the elastic member 4 and the circumferential widths of the mounting groove 2b of the outer ring 2 and the mounting groove 3b of the inner ring 3 depend on the torque that is expected to be input to the torque detection device 1. Set as appropriate.

図1に示すように、外輪2は軸方向の一方端に内径側へ延びるつば状の肩部2dを有し、この肩部2dの側面(肩部2dの軸方向の端面)に内輪3の一方の端面3eが当接している。外輪2の軸方向の他方端には蓋5が取り付けられ、この蓋5の端面5aが内輪3の段面3fを軸方向に押えることで、内輪3が軸方向に抜けないようになっている。外輪2の肩部2dの側面と内輪3の端面3e、および蓋5の端面5aと内輪3の段面3fは、外輪2の内径面2aと内輪3の外径面3aと同様に、それぞれ互いに摺動可能である。   As shown in FIG. 1, the outer ring 2 has a collar-shaped shoulder 2d extending toward the inner diameter side at one end in the axial direction, and the side surface of the shoulder 2d (the end surface in the axial direction of the shoulder 2d) One end face 3e is in contact. A lid 5 is attached to the other end of the outer ring 2 in the axial direction, and the end surface 5a of the lid 5 presses the step surface 3f of the inner ring 3 in the axial direction so that the inner ring 3 does not come off in the axial direction. . The side surface of the shoulder portion 2d of the outer ring 2, the end surface 3e of the inner ring 3, the end surface 5a of the lid 5, and the step surface 3f of the inner ring 3 are respectively similar to the inner diameter surface 2a of the outer ring 2 and the outer diameter surface 3a of the inner ring 3. It is slidable.

上記各摺動面には摺動特性の良い滑り材、例えばフッ素樹脂等をコーティングすると良い。また、摺動面に滑り材をコーティングする代わりに、外輪2と内輪3の互いに回転変位する面の間に軸受(図示せず)を介在させても良い。   Each of the sliding surfaces may be coated with a sliding material having good sliding characteristics, such as a fluororesin. Further, instead of coating the sliding surface with the sliding material, a bearing (not shown) may be interposed between the surfaces of the outer ring 2 and the inner ring 3 that are rotationally displaced from each other.

図1、図2において、外輪2の内径面2aには、磁気センサ6が設けられている。磁気センサ6は、外輪2の内径面2aに固定された基板7に実装されている。磁気センサ6は、軸方向に並ぶ2つの検出部6a,6b(図1)を有する。   1 and 2, a magnetic sensor 6 is provided on the inner diameter surface 2 a of the outer ring 2. The magnetic sensor 6 is mounted on a substrate 7 fixed to the inner diameter surface 2 a of the outer ring 2. The magnetic sensor 6 has two detectors 6a and 6b (FIG. 1) arranged in the axial direction.

また、内輪3の外径面3aに形成された凹部3dに、前記磁気センサ6と径方向に対峙し、円周方向に延びる磁気エンコーダ8が設けられている。磁気エンコーダ8は、軸方向に並ぶ第1の磁気エンコーダトラック8a(図1)と第2の磁気エンコーダトラック8b(図1)とを有する。磁気エンコーダ8は円弧状であり、円周の一部の範囲のみに設けられている。外輪2と内輪3とは弾性部材4で連結され、互いに微小回転しかしないので、磁気エンコーダ8の角度検出可能な範囲が円周の一部であっても問題ない。   A magnetic encoder 8 is provided in a recess 3d formed on the outer diameter surface 3a of the inner ring 3 so as to face the magnetic sensor 6 in the radial direction and extend in the circumferential direction. The magnetic encoder 8 has a first magnetic encoder track 8a (FIG. 1) and a second magnetic encoder track 8b (FIG. 1) arranged in the axial direction. The magnetic encoder 8 has an arc shape and is provided only in a part of the circumference. Since the outer ring 2 and the inner ring 3 are connected by an elastic member 4 and only slightly rotate with each other, there is no problem even if the range in which the angle of the magnetic encoder 8 can be detected is a part of the circumference.

磁気センサ6の検出部6aにより第1の磁気エンコーダトラック8aの磁界が検出され、磁気センサ6の検出部6bにより第2の磁気エンコーダトラック8bの磁界が検出される。図4に示すように、磁気センサ6と磁気エンコーダ8とで、角度検出部40aが構成される。また、角度検出部40aと、処理回路1bの角度算出手段50とで、外輪2と内輪3との回転角を検出する角度センサ40が構成される。   The magnetic field of the first magnetic encoder track 8a is detected by the detection unit 6a of the magnetic sensor 6, and the magnetic field of the second magnetic encoder track 8b is detected by the detection unit 6b of the magnetic sensor 6. As shown in FIG. 4, the magnetic sensor 6 and the magnetic encoder 8 constitute an angle detector 40a. Further, the angle detection unit 40a and the angle calculation means 50 of the processing circuit 1b constitute an angle sensor 40 that detects the rotation angle between the outer ring 2 and the inner ring 3.

図1、図2において、内輪3の外径面にはキー9が設けられ、外輪2の内径面2aには、前記キー9よりも円周方向の幅が広いキー溝2eが形成されている。これにより、外輪2に対する内輪3の回転範囲が、キー溝2eの円周方向の幅とキー9の円周方向の幅の差の範囲内に制限されている。   1 and 2, a key 9 is provided on the outer diameter surface of the inner ring 3, and a key groove 2 e having a wider width in the circumferential direction than the key 9 is formed on the inner diameter surface 2 a of the outer ring 2. . Thereby, the rotation range of the inner ring 3 with respect to the outer ring 2 is limited to the range of the difference between the circumferential width of the key groove 2 e and the circumferential width of the key 9.

図3は、図1のIII−III断面から見た磁気エンコーダ8の各磁気エンコーダトラック8a,8bの着磁パターンを示している。第1および第2の磁気エンコーダトラック8a,8bは、それぞれN極とS極とが交互に着磁されている。両磁気エンコーダトラック8a,8bの着磁極数は互いに異なっている。図3の例では、第1の磁気エンコーダトラック8aの方が第2の磁気エンコーダトラック8bよりも着磁極数が多い。例えば、磁気エンコーダ8が360度の範囲で存在すると仮定した場合、第1の磁気エンコーダトラック8aの着磁極数が32極対とされ、第2の磁気エンコーダトラック8bの着磁極数が31極対とされている。   FIG. 3 shows the magnetization patterns of the magnetic encoder tracks 8a and 8b of the magnetic encoder 8 as seen from the III-III cross section of FIG. The first and second magnetic encoder tracks 8a and 8b are alternately magnetized with N and S poles, respectively. The number of magnetic poles of both magnetic encoder tracks 8a and 8b are different from each other. In the example of FIG. 3, the first magnetic encoder track 8a has a larger number of magnetic poles than the second magnetic encoder track 8b. For example, assuming that the magnetic encoder 8 exists in a range of 360 degrees, the number of magnetic poles of the first magnetic encoder track 8a is 32 pole pairs, and the number of magnetic poles of the second magnetic encoder track 8b is 31 pole pairs. It is said that.

図4は、角度センサ40角度算出手段50の構成を示すブロック図である。角度算出手段回路50には、磁気センサ6の各検出部6a,6bが出力する磁気信号(図5(A),(B)参照)が送られてくる。例えば、前述したように、円周当たりの着磁極数が第1の磁気エンコーダトラック8aで32極対、第2の磁気エンコーダトラック8bで31極対である場合、磁気センサ6と磁気エンコーダ8が相対的に回転すると、1回転につき1磁極対分の位相差(図5(C)参照)が発生する。この位相差を位相差検出部51で検出し、その位相差に基づいて絶対角算出部52が回転変位の絶対角を算出する。得られた絶対角情報は、送信部53によって後述のトルク算出手段10へ送られる。各検出部6a,6bが出力する磁気信号を逓倍回路(図示せず)で電気的に逓倍すれば、高分解能の絶対角情報が得られる。   FIG. 4 is a block diagram showing the configuration of the angle sensor 40 angle calculation means 50. Magnetic signals (see FIGS. 5A and 5B) output from the detection units 6a and 6b of the magnetic sensor 6 are sent to the angle calculation means circuit 50. For example, as described above, when the number of magnetic poles per circumference is 32 pole pairs in the first magnetic encoder track 8a and 31 pole pairs in the second magnetic encoder track 8b, the magnetic sensor 6 and the magnetic encoder 8 are When relatively rotated, a phase difference corresponding to one magnetic pole pair per rotation (see FIG. 5C) occurs. This phase difference is detected by the phase difference detector 51, and the absolute angle calculator 52 calculates the absolute angle of the rotational displacement based on the phase difference. The obtained absolute angle information is sent to the torque calculation means 10 described later by the transmission unit 53. High-resolution absolute angle information can be obtained by electrically multiplying the magnetic signals output from the detectors 6a and 6b by a multiplier circuit (not shown).

図6はトルク算出手段10のブロック図である。トルク算出手段10では、角度センサ40から送られてきた絶対角情報と、補正テーブル12に記録されている情報とを元にして、トルク算出部13で外輪2と内輪3との間に作用するトルクを算出する。なお、補正テーブル12には外輪2と内輪3の回転角とトルクとの関係が記録されている。トルク算出部13で算出されたトルク値は、出力部14を経由して外部に出力される、出力部14では、PWM出力、シリアル通信等から選択した出力仕様で外部に出力する。   FIG. 6 is a block diagram of the torque calculation means 10. In the torque calculation means 10, the torque calculation unit 13 acts between the outer ring 2 and the inner ring 3 based on the absolute angle information sent from the angle sensor 40 and the information recorded in the correction table 12. Calculate the torque. The correction table 12 records the relationship between the rotation angle of the outer ring 2 and the inner ring 3 and the torque. The torque value calculated by the torque calculation unit 13 is output to the outside via the output unit 14. The output unit 14 outputs the torque value to the outside with an output specification selected from PWM output, serial communication, or the like.

例えば、円周当たりの着磁極数が第1の磁気エンコーダトラック8aで32極対、第2の磁気エンコーダトラック8bで31極対である場合、磁気センサ6の角度分解能は16ビットから18ビット程度得られる。仮に1回転当たり18ビットの分解能とすれば、外輪2と内輪3の角度差が1度あれば728パルス(218/360)の変化量が得られる。出力信号はデジタル信号であるため、環境変化により出力オフセットが抑制される。 For example, when the number of magnetic poles per circumference is 32 pole pairs in the first magnetic encoder track 8a and 31 pole pairs in the second magnetic encoder track 8b, the angular resolution of the magnetic sensor 6 is about 16 bits to 18 bits. can get. If tentatively 1 resolution per revolution 18 bits, the amount of change in the angular difference of the outer ring 2 and the inner ring 3 are once if any 728 pulses (218/360) is obtained. Since the output signal is a digital signal, the output offset is suppressed due to environmental changes.

このトルク検出装置1は上記構成であり、以下のように動作する。すなわち、外輪2と内輪3間にトルクが印加されると、外輪2と内輪3とを連結する弾性部材4が変形し、外輪2と内輪3間に回転変位が発生する。この回転変位の角度を角度センサ40で検出し、その検出値からトルク算出手段10がトルクを算出する。   The torque detection device 1 has the above-described configuration and operates as follows. That is, when torque is applied between the outer ring 2 and the inner ring 3, the elastic member 4 connecting the outer ring 2 and the inner ring 3 is deformed, and rotational displacement occurs between the outer ring 2 and the inner ring 3. The angle of this rotational displacement is detected by the angle sensor 40, and the torque calculation means 10 calculates the torque from the detected value.

つまり、トルク検出装置1は、弾性部材4の撓み量を外輪2と内輪3との絶対角度変化として検出し、その角度をトルクに換算する。外輪2と内輪3の角度変化量と、トルクとの関係は、弾性部材4の剛性によって変わる。角度変化量は一般的に微小であるが、高分解能で絶対角を検出できるため、高精度で温度ドリフトが少ないトルク検出が可能である。   That is, the torque detection device 1 detects the amount of bending of the elastic member 4 as an absolute angle change between the outer ring 2 and the inner ring 3, and converts the angle into torque. The relationship between the amount of change in angle between the outer ring 2 and the inner ring 3 and the torque varies depending on the rigidity of the elastic member 4. Although the amount of change in angle is generally minute, since the absolute angle can be detected with high resolution, it is possible to detect torque with high accuracy and little temperature drift.

このように、外輪2と内輪3間の回転変位を角度センサ40で直接検出するため、回転以外の変位からトルクを求める場合のような、回転以外の変位を回転変位に換算する処理が不要であり、処理回路1bを簡略にできる。また、外輪2と内輪3間の微小な回転変位を測定してからトルクに換算するため、角度センサ40を装着した後の機械的な調整が必要である。さらに、この実施形態の場合、外輪2と内輪3との絶対角をトルクに換算するため、正確なトルクが得られる。   As described above, since the rotational displacement between the outer ring 2 and the inner ring 3 is directly detected by the angle sensor 40, there is no need to convert the displacement other than the rotation into the rotational displacement as in the case of obtaining the torque from the displacement other than the rotation. Yes, the processing circuit 1b can be simplified. Further, since a minute rotational displacement between the outer ring 2 and the inner ring 3 is measured and converted into torque, mechanical adjustment after mounting the angle sensor 40 is necessary. Furthermore, in the case of this embodiment, since the absolute angle between the outer ring 2 and the inner ring 3 is converted into torque, accurate torque can be obtained.

この実施形態では、磁気式の角度センサ40として、1回転の絶対角を検出することが可能な角度センサを用いた例を示したが、90度または180度の回転角範囲を絶対角で検出可能なセンサを用いても良い。例えば、軸倍角が2または4のレゾルバ(2X、4Xがこれに相当する。   In this embodiment, an example is shown in which an angle sensor capable of detecting an absolute angle of one rotation is used as the magnetic angle sensor 40, but a rotation angle range of 90 degrees or 180 degrees is detected by an absolute angle. Possible sensors may be used. For example, a resolver having a shaft angle multiplier of 2 or 4 (2X, 4X corresponds to this).

図7はこの発明の異なる実施形態にかかるトルク検出装置の機構部の軸心を通る平面で破断した断面図、図8はそのVIII−VIII断面図である。このトルク検出装置15は、磁気エンコーダ8が磁気センサ6と軸方向に対峙するアキシアルタイプとされている。図9は、図7のIX−IX断面から見た磁気エンコーダ8の各磁気エンコーダトラック8a,8bの着磁パターンを示す。図の例では、磁気エンコーダ8として円周方向に1周分あるものが設けられているが、図1、図2のものと同様に、磁気エンコーダ8を円周方向の必要な範囲のみに限定した扇形形状としても良い。それ以外は、図1、図2のトルク検出装置1と同じ構成であり、図1、図2のトルク検出装置1と同じ作用および効果が得られる。   FIG. 7 is a cross-sectional view taken along a plane passing through the axis of the mechanism of the torque detector according to a different embodiment of the present invention, and FIG. 8 is a cross-sectional view taken along the line VIII-VIII. The torque detector 15 is an axial type in which the magnetic encoder 8 faces the magnetic sensor 6 in the axial direction. FIG. 9 shows magnetization patterns of the magnetic encoder tracks 8a and 8b of the magnetic encoder 8 as seen from the IX-IX cross section of FIG. In the example shown in the figure, the magnetic encoder 8 is provided for one turn in the circumferential direction, but the magnetic encoder 8 is limited to only a necessary range in the circumferential direction as in the case of FIGS. It is good also as a sector shape. Other than that, it is the same structure as the torque detection apparatus 1 of FIG. 1, FIG. 2, and the same effect | action and effect as the torque detection apparatus 1 of FIG. 1, FIG. 2 are acquired.

図10はこの発明のさらに異なる実施形態にかかるトルク検出装置の機構部の軸心を通る平面で破断した断面図、図11はそのXI矢視図である。このトルク検出装置16は、角度センサ付き軸受17が角度検出部として組み込まれている。   FIG. 10 is a cross-sectional view taken along a plane passing through the axial center of the mechanism portion of the torque detection device according to still another embodiment of the present invention, and FIG. The torque detector 16 includes a bearing 17 with an angle sensor as an angle detector.

角度センサ付き軸受17は、軸受23と角度センサ40とからなる。軸受23は、回転輪である内輪18と、固定輪である外輪19と、転動体20と、保持器21と、シール22とで構成される。また、角度センサ40は、磁気エンコーダ24と、磁気センサ6と、角度算出手段50(図4)とで構成される。   The bearing 17 with an angle sensor includes a bearing 23 and an angle sensor 40. The bearing 23 includes an inner ring 18 that is a rotating wheel, an outer ring 19 that is a fixed ring, a rolling element 20, a cage 21, and a seal 22. The angle sensor 40 includes the magnetic encoder 24, the magnetic sensor 6, and the angle calculation means 50 (FIG. 4).

内輪18の端部外径面に、回転素子である磁気エンコーダ24が取り付けられている。磁気エンコーダ24は、芯金25と、2列の磁気エンコーダトラック26a,26bを有する複列磁気エンコーダトラック26とで構成される。2列の磁気エンコーダトラック26a,26bは、それぞれN極とS極とが交互に着磁されている。   A magnetic encoder 24 that is a rotating element is attached to the outer diameter surface of the end portion of the inner ring 18. The magnetic encoder 24 includes a cored bar 25 and a double-row magnetic encoder track 26 having two rows of magnetic encoder tracks 26a and 26b. The two rows of magnetic encoder tracks 26a and 26b are alternately magnetized with N and S poles, respectively.

外輪19の端部内径面には金属環27の一端が嵌合し、この金属環27に樹脂製で環状のセンサハウジング28が取り付けられている。センサハウジング28の内部には、磁気センサ6を実装したプリント基板29が取り付けられている。磁気センサ6は前記角度算出手段50(図4参照)に接続され、また角度算出手段50は前記トルク算出手段10(図6参照)に接続されている。これら角度算出手段50およびトルク算出手段10は、センサハウジング28に設けても良いし、角度センサ付き軸受17の外部に設けても良い。   One end of a metal ring 27 is fitted to the inner diameter surface of the end portion of the outer ring 19, and an annular sensor housing 28 made of resin is attached to the metal ring 27. A printed circuit board 29 on which the magnetic sensor 6 is mounted is attached inside the sensor housing 28. The magnetic sensor 6 is connected to the angle calculation means 50 (see FIG. 4), and the angle calculation means 50 is connected to the torque calculation means 10 (see FIG. 6). The angle calculation means 50 and the torque calculation means 10 may be provided in the sensor housing 28 or may be provided outside the bearing 17 with the angle sensor.

軸受23の外輪19は、ハウジング30の肩部30aに当接した状態で内径穴30bに組み込まれ、軸受カバー31をハウジング30に対してボルト(図示せず)で締結することで、ハウジング30と一体化されている。また、内輪18の内径穴18aにシャフト32が圧入固定され、内輪18とシャフト32とが一体化されている。   The outer ring 19 of the bearing 23 is assembled in the inner diameter hole 30b in a state of being in contact with the shoulder portion 30a of the housing 30, and the bearing cover 31 is fastened to the housing 30 with a bolt (not shown). It is integrated. Further, the shaft 32 is press-fitted and fixed in the inner diameter hole 18 a of the inner ring 18, and the inner ring 18 and the shaft 32 are integrated.

シャフト32の一方の端部32aとハウジング30とは、複数の弾性部材4を介して接合されている。弾性部材4の両端部は、シャフト32の端部外径面に設けられた軸方向溝32bと、ハウジング30の端部内径面に設けられた軸方向溝30cとに、圧入または接着剤により固定される。弾性部材4の一方の端部は、周方向のがたつきを拘束することが可能であれば、軸方向溝32bまたは30cに沿って摺動できるようにしてもよい。このようにシャフト32とハウジング30とを弾性部材4を介して連結することで、軸受23の内輪18と外輪19とが弾性部材4を介して間接的に連結される。   One end 32 a of the shaft 32 and the housing 30 are joined via a plurality of elastic members 4. Both ends of the elastic member 4 are fixed to an axial groove 32b provided on the outer diameter surface of the end portion of the shaft 32 and an axial groove 30c provided on the inner diameter surface of the end portion of the housing 30 by press-fitting or adhesive. Is done. One end of the elastic member 4 may be slidable along the axial groove 32b or 30c as long as it can restrain the rattling in the circumferential direction. By connecting the shaft 32 and the housing 30 via the elastic member 4 in this way, the inner ring 18 and the outer ring 19 of the bearing 23 are indirectly connected via the elastic member 4.

シャフト32にトルクが印加されると、弾性部材4が変形してシャフト32が微小回転する。この回転を角度センサ40が検出し、その角度情報をトルク算出手段10(図6参照)がトルクに換算することで、トルクが検出される。負荷トルクが印加されず、弾性部材4に撓みが無い状態で角度センサ付き軸受17の出力を零度に設定しておけば、トルク換算時のオフセット補正を省略することができる。   When torque is applied to the shaft 32, the elastic member 4 is deformed and the shaft 32 rotates slightly. The angle is detected by the angle sensor 40, and the torque is detected by the torque calculation means 10 (see FIG. 6) converting the angle information into torque. If the output of the bearing 17 with the angle sensor is set to zero degrees while no load torque is applied and the elastic member 4 is not bent, offset correction at the time of torque conversion can be omitted.

図12はこの発明のさらに異なる実施形態にかかるトルク検出装置の軸心を通る平面で破断した断面図、図13はそのXIII−XIII断面図である。このトルク検出装置33は、ハウジング30とシャフト32とが、弾性部材ユニット36を用いて連結している。図13に示すように、弾性部材ユニット36は、ハウジング30(図12)の端面に固定される外径輪34と、シャフト32(図12)の端部に固定される内径輪35と、これら外径輪34と内径輪35とを連結する複数本の弾性部材4とからなる。ハウジング30と外径輪34の固定、およびシャフト32と内径輪35の固定は、ボルト(図示せず)等を用いて行う。これ以外は、図10、図11のトルク検出装置16と同じ構成である。   FIG. 12 is a sectional view taken along a plane passing through the axis of a torque detector according to still another embodiment of the present invention, and FIG. 13 is an XIII-XIII sectional view thereof. In the torque detection device 33, the housing 30 and the shaft 32 are connected using an elastic member unit 36. As shown in FIG. 13, the elastic member unit 36 includes an outer diameter ring 34 fixed to the end face of the housing 30 (FIG. 12), an inner diameter ring 35 fixed to the end portion of the shaft 32 (FIG. 12), It comprises a plurality of elastic members 4 that connect the outer diameter ring 34 and the inner diameter ring 35. The housing 30 and the outer diameter ring 34 are fixed, and the shaft 32 and the inner diameter ring 35 are fixed using a bolt (not shown) or the like. Other than this, the configuration is the same as that of the torque detection device 16 of FIGS.

上記各実施形態のトルク検出装置1,15,16,33は、弾性部材4の撓み量を外輪2,19と内輪3,18との絶対角度変化として検出し、その角度をトルクに換算するが、絶対角検出機能がなくても、高分解能のパルス出力(90度位相差のA相、B相出力)をカウンタ(可逆カウンタ)でカウントすることで回転角を把握し、トルクを算出することも可能である。   The torque detectors 1, 15, 16, 33 of the above embodiments detect the amount of bending of the elastic member 4 as an absolute angle change between the outer rings 2, 19 and the inner rings 3, 18, and convert the angle into torque. Even without the absolute angle detection function, the rotation angle can be grasped and the torque calculated by counting high-resolution pulse outputs (90-phase phase difference A-phase and B-phase outputs) with a counter (reversible counter). Is also possible.

図14は、高分解能のパルス信号を出力する磁気エンコーダと磁気センサの例を示す。磁気エンコーダ8には、N極とS極とが交互に着磁された単列の磁気エンコーダトラック8aが形成されている。磁気センサ6は、N極、S極から得られる磁気信号を電気的に逓倍し、高分解能のパルス信号を出力する。   FIG. 14 shows an example of a magnetic encoder and a magnetic sensor that output a high-resolution pulse signal. The magnetic encoder 8 is formed with a single-row magnetic encoder track 8a in which N poles and S poles are alternately magnetized. The magnetic sensor 6 electrically multiplies the magnetic signal obtained from the N pole and the S pole, and outputs a high resolution pulse signal.

図15に示すように、磁気エンコーダ8と磁気センサ6とからなる角度検出部40aは、角度算出手段60と共に角度センサ40を構成する。角度検出手段60は、磁気センサ6から送られてくる磁気信号を、逓倍回路61で磁気エンコーダトラック8aのN極とS極の1極対の角度を電気的に逓倍して高分解能のパルス信号を生成する。例えば、N極、S極の1極対の幅を2.54mmとし、1極対の間を4096分割で逓倍すれば、1パルス当たり0.625μmと高分解の位置信号を得られる。そして、生成されたパルス信号をカウンタ37でカウントして角度情報を得る。この場合は、トルクが印加されない状態でカウンタ37をリセットすると良い。ここで得られた角度情報は、図6と同様のトルク検出手段10を用いてトルクに換算する。   As shown in FIG. 15, the angle detector 40 a including the magnetic encoder 8 and the magnetic sensor 6 constitutes the angle sensor 40 together with the angle calculation means 60. The angle detection means 60 electrically multiplies the magnetic signal sent from the magnetic sensor 6 by the multiplication circuit 61 to the angle of one pole pair of the N pole and the S pole of the magnetic encoder track 8a, and provides a high resolution pulse signal. Is generated. For example, if the width of one pole pair of N pole and S pole is 2.54 mm and the distance between the pole pairs is multiplied by 4096 divisions, a position signal with a high resolution of 0.625 μm per pulse can be obtained. The generated pulse signal is counted by the counter 37 to obtain angle information. In this case, the counter 37 may be reset in a state where no torque is applied. The angle information obtained here is converted into torque using the torque detection means 10 similar to that in FIG.

以上、実施例に基づいて本発明を実施するための形態を説明したが、ここで開示した実施の形態はすべての点で例示であって制限的なものではない。本発明の範囲は上記した説明ではなくて特許請求の範囲によって示され、特許請求の範囲と均等の意味および範囲内でのすべての変更が含まれることが意図される。   As mentioned above, although the form for implementing this invention based on the Example was demonstrated, embodiment disclosed here is an illustration and restrictive at no points. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

1,15,16,33…トルク検出装置
2,19…外輪
3,18…内輪
4…弾性部材
6…磁気センサ
6a,6b…検出部
8…磁気エンコーダ
8a,8b…磁気エンコーダトラック
10…トルク算出手段
17…角度センサ付き軸受
40…角度センサ
51…位相差検出部
52…絶対角算出部
53…送信部
61…逓倍回路
62…カウンタ
DESCRIPTION OF SYMBOLS 1,15,16,33 ... Torque detection apparatus 2, 19 ... Outer ring 3, 18 ... Inner ring 4 ... Elastic member 6 ... Magnetic sensor 6a, 6b ... Detection part 8 ... Magnetic encoder 8a, 8b ... Magnetic encoder track 10 ... Torque calculation Means 17 ... Bearing 40 with angle sensor ... Angle sensor 51 ... Phase difference detection unit 52 ... Absolute angle calculation unit 53 ... Transmission unit 61 ... Multiplication circuit 62 ... Counter

Claims (6)

互いに回転可能な外輪と内輪とを有し、これら外輪と内輪間に作用するトルクを検出するトルク検出装置であって、
前記外輪と前記内輪とを直接または間接に連結し前記外輪と前記内輪との回転変位に応じて変形する弾性部材と、前記外輪と前記内輪との回転角を検出する角度センサと、この角度センサの検出値から前記トルクを算出するトルク算出手段とを備えることを特徴とするトルク検出装置。
A torque detecting device that has an outer ring and an inner ring that are rotatable relative to each other, and detects torque acting between the outer ring and the inner ring,
An elastic member that connects the outer ring and the inner ring directly or indirectly and deforms according to rotational displacement between the outer ring and the inner ring, an angle sensor that detects a rotation angle between the outer ring and the inner ring, and the angle sensor And a torque calculating means for calculating the torque from the detected value.
請求項1に記載のトルク検出装置において、前記角度センサは、前記外輪および前記内輪のいずれか一方に設けられ磁極が円周方向に並ぶ磁気エンコーダと、前記外輪および前記内輪のいずれか他方に設けられ前記磁気エンコーダの磁界を検出する磁気センサとを有するトルク検出装置。   2. The torque detection device according to claim 1, wherein the angle sensor is provided on one of the outer ring and the inner ring, and a magnetic encoder in which magnetic poles are arranged in a circumferential direction, and one of the outer ring and the inner ring. And a magnetic sensor for detecting a magnetic field of the magnetic encoder. 請求項2に記載のトルク検出装置において、前記磁気エンコーダは、N極とS極とが交互に着磁された磁気エンコーダトラックを少なくとも1列有し、
前記角度センサは、前記磁気エンコーダと前記磁気センサとの回転変位により前記磁気センサが出力する磁気信号から、前記磁気エンコーダトラックのN極とS極の1極対の角度を電気的に逓倍した高分解能のパルス信号を生成する逓倍回路と、この逓倍回路で生成されたパルス信号をカウントしそのカウントした角度情報を前記トルク算出手段へ送るカウンタとを有するトルク検出装置。
3. The torque detector according to claim 2, wherein the magnetic encoder has at least one row of magnetic encoder tracks in which N and S poles are alternately magnetized.
The angle sensor is a high voltage obtained by electrically multiplying the angle of one pole pair of the N pole and the S pole of the magnetic encoder track from a magnetic signal output by the magnetic sensor due to a rotational displacement between the magnetic encoder and the magnetic sensor. A torque detector comprising: a multiplying circuit for generating a resolution pulse signal; and a counter for counting the pulse signals generated by the multiplying circuit and sending the counted angle information to the torque calculating means.
請求項2に記載のトルク検出装置において、前記磁気エンコーダは、互いに異なる着磁極対数でそれぞれN極とS極とが交互に着磁された複列の磁気エンコーダトラックを有し、かつ前記磁気センサは、前記複列の磁気エンコーダトラックの磁界をそれぞれ検出する複数の検出部を有し、
前記角度センサは、前記磁気エンコーダと前記磁気センサとの回転変位により前記磁気センサの前記複数の検出部がそれぞれ出力する磁気信号の位相差を検出する位相差検出部と、この位相差検出部で検出された位相差に基づき前記回転変位の絶対角を算出する絶対角算出部と、この絶対角算出部の絶対角情報を前記トルク算出手段へ送る送信部とを有するトルク検出装置。
3. The torque detector according to claim 2, wherein the magnetic encoder has a double-row magnetic encoder track in which N poles and S poles are alternately magnetized with different numbers of magnetic pole pairs, and the magnetic sensor. Has a plurality of detectors for detecting the magnetic fields of the double-row magnetic encoder tracks,
The angle sensor includes: a phase difference detection unit that detects a phase difference between magnetic signals output from the plurality of detection units of the magnetic sensor according to rotational displacement between the magnetic encoder and the magnetic sensor; and the phase difference detection unit. A torque detection apparatus comprising: an absolute angle calculation unit that calculates an absolute angle of the rotational displacement based on the detected phase difference; and a transmission unit that sends absolute angle information of the absolute angle calculation unit to the torque calculation unit.
請求項3または請求項4に記載のトルク検出装置において、前記磁気エンコーダの角度検出可能な範囲が円周の一部であるトルク検出装置。   5. The torque detection device according to claim 3, wherein a range in which the angle of the magnetic encoder can be detected is a part of a circumference. 請求項1ないし請求項5のいずれか1項に記載のトルク検出装置において、前記外輪および前記内輪はそれぞれ軸受の外輪および内輪であり、前記軸受に前記角度センサが一体に設けられ、これら軸受と角度センサとで角度センサ付き軸受を構成するトルク検出装置。   The torque detection device according to any one of claims 1 to 5, wherein the outer ring and the inner ring are an outer ring and an inner ring of a bearing, respectively, and the angle sensor is provided integrally with the bearing. A torque detection device that constitutes a bearing with an angle sensor together with the angle sensor.
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