JP2017222014A - Teaching device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a technology capable of carrying out accurate teaching in a short time.SOLUTION: A teaching device 10 teaches a position to which a substrate 9 should be carried, to a carrying robot 4 placing the substrate 9 on a hand 411 and carrying that in a surface inward direction and a surface outward direction of a surface parallel to the substrate 9. The teaching device includes: a feature shape part 53 which is provided on the hand 411 and has a cross section parallel to the surface of a predetermined shape; a guide pole 62 which is a columnar member disposed so as to extend in the surface outward direction on the substrate transport destination, and has a cross section parallel with the surface of a shape corresponding to the predetermined shape; and a guide point 63 which is provided a predetermined position in a longitudinal direction of the guide pole 62.SELECTED DRAWING: Figure 4

Description

  The present invention relates to teaching for a transfer robot that transfers a substrate.

  In a transfer robot that transfers a substrate, it is necessary to teach (teach) the transfer position of the substrate to the transfer robot before actually carrying out the transfer operation. Since the transfer robot performs a transfer operation based on the taught position information, if the teaching accuracy is poor, the substrate is not accurately placed at a predetermined position, leading to deterioration of processing accuracy.

Conventionally, this teaching is performed, for example, by an operator confirming the position of the hand of the transfer robot by visual observation or using a ruler and finely adjusting the position of the hand and placing the hand at a target delivery position. However, this is performed by storing the position in the transport robot.
However, skill of an operator is required to accurately arrange the hand of the transfer robot at a target delivery position visually. Further, even a skilled worker takes a considerable amount of time for this work.

Therefore, various teaching methods using a jig have been proposed in order to perform teaching accurately without depending on the skill of the operator (Patent Documents 1 to 3). In particular, Patent Document 3 proposes a technique of teaching by using a pair of jigs and fitting them together.
That is, in Patent Document 3, a hand side jig (fitting portion 42) is attached to the hand of the transfer robot (end effector 17 of the wafer handling robot 4) and the wafer cassette is placed at the mounting position (wafer cassette port 6). 2 jig | tool (board | substrate 41) is arrange | positioned. A downward projecting portion 43 is formed on the lower surface of the fitting portion 42 attached to the end effector 17, and the substrate 41 disposed in the wafer cassette port 6 is arranged when the wafer 41 is disposed in the wafer cassette port 6. A cylindrical recess 41 ″ having an axis that coincides with the axis passing through the center of the wafer in the wafer cassette is formed.
Then, the end effector 17 is moved to bring the convex portion 43 and the concave portion 41 ″ into a fitted state, and the position (position and height position in the horizontal plane) of the end effector 17 in this state is stored as a delivery position for the wafer cassette. To do.

JP 2009-090406 A JP 05-198656 A JP 2002-018753 A

  In the aspect described in Patent Document 3, when the end effector 17 is moved so that the convex portion 43 and the concave portion 41 ″ are fitted, first, the end effector 17 is moved in the horizontal plane and viewed from above. It moves to the position where the convex part 43 of the fitting part 42 and the recessed part 41 '' of the board | substrate 41 overlap (horizontal movement process). Then, the end effector 17 is lowered at this position and moved to a position where the convex portion 43 and the concave portion 41 ″ are fitted (lifting / moving step).

  However, since the convex portion 43 and the concave portion 41 ″ are located on the back surface side of the end effector 17 (that is, the position behind the end effector 17 when viewed from above), the positional relationship thereof should be confirmed visually from above. Therefore, in the horizontal movement process, the position of the end effector 17 (position in the horizontal plane) is such that the convex portion 43 and the concave portion 41 ″ are completely overlapped when viewed from above, relying only on visual observation from the side. Must be tweaked. Such position adjustment takes a considerable amount of time even for a skilled worker.

  In the up-and-down movement process, the convex portion 43 and the concave portion 41 ″ are completely fitted (that is, the top surface of the convex portion 43 and the bottom surface of the concave portion 41 ″ are in contact) Although it is necessary to finely adjust the position (height position) of the end effector 17, it is not possible to visually confirm whether or not the top surface of the convex portion 43 and the bottom surface of the concave portion 41 ″ are in contact with each other. Therefore, there is a problem that the reliability of teaching accuracy with respect to the height position is low.

  Thus, in the aspect described in Patent Document 3, it is difficult to sufficiently shorten the time required for teaching. In this aspect, it cannot be said that teaching accuracy is sufficiently guaranteed.

  The problem to be solved by the present invention is to provide a technique capable of performing accurate teaching in a short time.

The present invention made to solve the above problems
A teaching device that places a substrate on a hand and teaches a position where the substrate should be transported to a transport robot that transports the substrate in an in-plane direction and an out-of-plane direction parallel to the substrate. ,
A feature-shaped portion provided in the hand and having a predetermined cross-section parallel to the surface;
A columnar member arranged to extend in the out-of-plane direction at the substrate transfer destination, and a guide pole whose cross section parallel to the surface is a shape corresponding to the predetermined shape;
A guide point provided at a predetermined position in the longitudinal direction of the guide pole;
Is provided.

In performing teaching using this teaching apparatus, first, a guide pole is disposed at the substrate transfer destination. At this time, the guide pole provided on the guide pole has a position corresponding to the point to be taught (teaching point) (for example, a position overlapping the teaching point or a known positional relationship with the teaching point) Position).
Since the characteristic shape portion provided on the hand and the guide pole have a corresponding cross-sectional shape in a plane parallel to the substrate, by bringing them into contact with each other at the corresponding cross-sectional shape portion, The positional relationship between the hand and the guide pole can be fixed within the plane of the parallel plane. Further, since the guide pole is a columnar member having a constant cross-sectional shape, the hand can be slid along the guide pole (that is, along the out-of-plane direction parallel to the substrate) while maintaining the contact state. it can. In teaching, therefore, the hand is first moved in a plane parallel to the substrate to bring the characteristic shape portion and the guide pole into contact with each other to determine the position of the hand in the plane parallel to the substrate. Subsequently, the hand is slid along the guide pole in the contact state, a predetermined portion of the hand is made to coincide with the guide point, and the position of the hand parallel to the substrate is determined in the out-of-plane direction. Thus, the hand can be accurately aligned in a short time at a position corresponding to the teaching point in both the in-plane and out-of-plane directions of the plane parallel to the substrate (that is, at the three-dimensional position). Then, the teaching point can be taught to the transfer robot by storing the position of the hand at this time.

Preferably, in the teaching device,
The characteristic shape portion is a recess cut out in an arc shape;
The guide pole has a convex cross section that swells in an arc shape.

  According to this configuration, it is easy to fix the positional relationship between the hand and the guide pole in the plane parallel to the substrate by bringing the characteristic shape portion and the guide pole into contact with each other. In addition, the hand can be smoothly slid along the guide pole.

Preferably, in the teaching device,
The characteristic shape portion is a recess cut out in an arc shape;
The guide pole is a bar having a circular cross section.

  According to this configuration, it is easy to fix the positional relationship between the hand and the guide pole in the plane parallel to the substrate by bringing the characteristic shape portion and the guide pole into contact with each other. In addition, the hand can be smoothly slid along the guide pole.

Preferably, in the teaching device,
The characteristic shape portion is provided on a jig that is detachably attached to the hand.

  According to this configuration, even if it is difficult to directly provide the characteristic shape portion on the hand itself because the hand is provided with a complicated structure such as a vacuum suction unit or an electrostatic chuck electrode. The characteristic shape portion can be indirectly provided on the hand through the jig.

Preferably, in the teaching device,
The characteristic shape portion is provided directly on the hand.

  According to this configuration, teaching can be easily performed without the need for attaching a jig or the like to the hand.

  By contacting the characteristic shape part provided on the hand with the guide pole and sliding the hand along the guide pole in that state, the hand is aligned with the teaching point, so that the alignment can be accurately performed in a short time. Can be done. Therefore, accurate teaching can be performed in a short time.

The top view which shows a substrate processing apparatus typically. The side view which shows a substrate processing apparatus typically. The figure for demonstrating a feature shape part. The figure for demonstrating the aspect of teaching using the jig | tool for mounting bases, and this. The figure for demonstrating the aspect of teaching using the jig | tool for alignment parts, and this. The figure for demonstrating the aspect of teaching using the jig | tool for process parts, and this.

  Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. The following embodiment is an example embodying the present invention, and does not limit the technical scope of the present invention.

<1. Configuration of Substrate Processing Apparatus 100>
The overall configuration of the substrate processing apparatus 100 according to the embodiment will be described with reference to FIGS. 1 and 2. FIG. 1 is a plan view schematically showing the configuration of the substrate processing apparatus 100. FIG. 2 is a side view schematically showing the configuration of the substrate processing apparatus 100. In FIG. 2, illustration of a part of the substrate processing apparatus 100 is omitted for convenience of explanation.

  The substrate processing apparatus 100 includes a mounting table 1 on which a substrate accommodating portion (generally also referred to as a magazine rack, a cassette, etc.) 90 that stores a plurality of substrates (for example, substantially circular semiconductor substrates) 9 in multiple stages, An alignment unit 2 that corrects the rotational position of the substrate 9, a processing unit 3 that performs a predetermined process on the substrate 9, and a transfer robot 4 that transfers the substrate 9 between these units 90, 2, and 3 are provided. The mounting table 1, the alignment unit 2, and the transfer robot 4 are disposed in the indexer unit 10, and the indexer unit 10 and the processing unit 3 are connected via a gate valve 20. The substrate processing apparatus 100 further includes a control unit 101 that controls each unit included in the substrate processing apparatus 100.

<Place 1>
The mounting table 1 is a table on which the substrate housing unit 90 is mounted. The substrate accommodating portion 90 is a member that accommodates a plurality of substrates 9 in multiple stages, and includes a housing 91 having a back wall and a pair of side walls, and a plurality of shelves 92 provided in multiple stages at equal intervals therein. Prepare. One substrate 9 is placed on each of the plurality of shelves 92. Each shelf 92 is formed with a U-shaped cutout, which prevents the shelf 92 and the hand 411 of the transfer robot 4 from interfering when the transfer robot 4 transfers the substrate 9 to the shelf 92. ing.

  A plurality of regulating members 11 for regulating the position of the substrate housing portion 90 are provided on the top surface of the mounting table 1. Specifically, each regulating member 11 is, for example, an L-shaped member in plan view, and a position corresponding to a corner portion between the back wall and the side wall in the substrate housing portion 90 and / or the front surface on the side wall. Is provided at a position corresponding to a corner portion between the inner wall surface and the inner wall surface. In this configuration, the substrate housing portion 90 is arranged at an appropriate position by arranging the corner portion along the L-shaped portion of the regulating member 11. .

<Alignment unit 2>
The alignment unit 2 includes a holding unit 21 that holds the substrate 9 in a horizontal posture. Specifically, the holding unit 21 includes, for example, a pair of holders 210 that are arranged to face each other with a gap. Each holder 210 includes a horizontal placement surface 211 that contacts the lower surface of the substrate 9 (specifically, a peripheral region portion on the lower surface) and a wall surface 212 that contacts a part of the end surface of the substrate 9. The wall surface 212 is formed in an arc shape when viewed from above, and its radius of curvature is substantially the same as the radius of the substrate 9. The substrate 9 is placed in a horizontal posture on each placement surface 211 of the pair of holders 210 at a position where the center coincides with the center of the pair of holders 210 when viewed from above. At this time, the substrate 9 is in a state in which the position of the substrate 9 is regulated from both sides by the wall surfaces 212 of the pair of holders 210 (that is, in a state of being regulated so as not to be displaced in the horizontal plane). In the holding unit 21, since there is a gap between the pair of holding tools 210, each holding tool 210 and the hand 411 do not interfere with each other when the transport robot 4 delivers the substrate 9 to the holding unit 21. It has become.
The alignment unit 2 further includes a rotation drive unit (not shown) that rotates the holding unit 21 and the substrate 9 held by the holding unit 21 around a vertical rotation axis that passes through the center of the holding unit 21, and a characteristic part of the rotated substrate 9. (Specifically, for example, a detection unit 22 that detects notches and orientation flats formed on the periphery of the substrate 9).

  When correcting the rotation position of the substrate 9 by the alignment unit 2, first, the transfer robot 4 places the substrate 9 held by the hand 411 on the holding unit 21. Subsequently, the rotation driving unit rotates the holding unit 21 and the substrate 9 held by the holding unit 21 once. While the substrate 9 makes one rotation, the detection unit 22 detects a feature formed on the periphery of the substrate 9. When the feature portion is detected, the rotation driving portion rotates the holding portion 21 and the substrate 9 held by the rotation portion so that the feature portion is arranged in a predetermined direction. Thereby, the rotational position of the substrate 9 is corrected.

<Processing unit 3>
The processing unit 3 performs processing (for example, plasma processing in this embodiment) defined on the substrate 9. The processing unit 3 includes a processing chamber 31 and a placement unit 32 disposed therein. The placement portion 32 is a circular flat plate member as viewed from above, and the substrate 9 is placed in a horizontal posture on the upper surface thereof. The mounting portion 32 is provided with a group (three in the example of the figure) of lift pins 321 provided so as to be able to appear and retract with respect to the upper surface thereof, and a lift pin driving mechanism 322 for causing the group of lift pins 321 to appear and disappear in synchronization. Is provided. The group of lift pins 321 are preferably arranged at equal intervals in a region overlapping the peripheral region on the lower surface of the substrate 9 placed on the placement unit 32 when viewed from above.
The processing unit 3 further includes a gas supply unit that supplies various processing gases into the processing chamber 31, a plasma generation unit for generating plasma in the processing chamber 31, an exhaust unit that adjusts the pressure in the processing chamber 31, Etc. (both not shown).

  When processing the substrate 9 by the processing unit 3, first, the transfer robot 4 places the substrate 9 held by the hand 411 on the placement unit 32. Subsequently, after the gate valve 20 is closed and the processing chamber 31 is hermetically sealed, the exhaust unit exhausts the inside of the processing chamber 31. The gas supply unit supplies the processing gas determined in the processing chamber 31, and the plasma generation unit generates plasma in the processing chamber 31. Thereby, plasma processing (for example, plasma etching, plasma ashing, plasma sputtering, plasma deposition, plasma CVD, or the like) is performed on the substrate 9 placed on the placement unit 32. However, the process performed in the processing unit 3 is not necessarily a plasma process, and various processes that do not use plasma (for example, processes such as etching, ashing, sputtering, vapor deposition, CVD, heating, cooling, chemical application, and cleaning) ) May be performed.

<Transport robot 4>
The transfer robot 4 places the substrate 9 on the hand 411, and the hand 411 has an in-plane direction (here, horizontal direction) and an out-of-plane direction of a plane parallel to the main surface of the substrate 9 (here, horizontal plane). This is a device that moves the substrate 9 to a target position by moving in the vertical direction (here, a vertical direction), and includes a transfer arm 41 and a drive mechanism 42 that drives the transfer arm 41.

  The transfer arm 41 includes an elongated plate-like hand 411 that supports a single substrate 9, and a multi-joint mechanism 412 connected to the hand 411. On the upper surface of the hand 411, when the substrate 9 is placed on the upper surface of the hand 411, the position opposite to the vicinity of the center of the lower surface of the substrate 9 is the circumference of two circles having different radii arranged concentrically. A suction part 413 composed of a groove along the line is formed. The suction part 413 is connected to a vacuum line (not shown) in which a valve is inserted. When this valve is opened while the substrate 9 is placed on the hand 411, the vacuum line and the suction part 413 of the hand 411 communicate with each other, the suction part 413 sucks the substrate 9 in vacuum, and the substrate 9 takes the hand. 411 is fixedly held (suction-held).

  The drive mechanism 42 includes a shaft portion 421 that is coupled to the end portion of the multi-joint mechanism 412 in the transport arm 41 (the end portion opposite to the side to which the hand 411 is connected). The shaft portion 421 extends vertically and is connected to the arm stage 422 at the lower end. The arm stage 422 includes various drive mechanisms (specifically, a rotary drive mechanism 423 that rotates the shaft portion 421, an elevating drive mechanism 424 that expands and contracts the shaft portion 421, and a flexure and extension drive mechanism that flexes and stretches the multi-joint mechanism 412. 425) is housed. When the rotation driving mechanism 423 rotates the shaft portion 421, the transport arm 41 turns around the shaft portion 421. The lifting / lowering driving mechanism 424 extends and contracts the shaft portion 421, so that the transport arm 41 moves up and down. The bending / extension driving mechanism 425 bends and stretches the multi-joint mechanism 412 so that the hand 411 of the transfer arm 41 moves forward and backward in the turning radius direction of the transfer arm 41 in the horizontal plane (that is, the direction close to or away from the shaft portion 421). To do.

  With the above-described configuration, the transfer robot 4 can turn the hand 411 in a horizontal plane, move forward and backward along the turning radius direction, and can further move up and down. That is, the hand 411 can be moved in the in-plane direction and the out-of-plane direction of the plane parallel to the main surface of the substrate 9.

  The transfer robot 4 moves the hand 411 under the control of the control unit 101 to access each of the substrate storage unit 90, the alignment unit 2, and the processing unit 3 mounted on each mounting table 1. Then, the substrate 9 is transported between the parts 90, 2, 3.

<2. Teaching device 10>
Next, the teaching apparatus 10 that performs teaching on the position where the substrate 9 should be transferred to the transfer robot 4 will be described. The teaching device 10 includes a characteristic shape portion 53 provided directly or indirectly on the hand 411 and jigs 6, 7, and 8 disposed at the transfer destination of the substrate 9.

<2-1. Characteristic shape portion 53>
<I. Mode in which the characteristic shape portion 53 is indirectly provided on the hand 411>
The characteristic shape portion 53 is formed on, for example, a jig 5 (hereinafter also referred to as “hand side jig”) that is detachably attached to the hand 411. In this case, by attaching the hand side jig 5 to the hand 411, the characteristic shape portion 53 is indirectly provided on the hand 411.

  The hand side jig | tool 5 is demonstrated referring FIG. FIG. 3A is a top view and a side view of the hand side jig 5. FIG.3 (b) is a top view of the hand side jig | tool 5 which concerns on another form. FIG. 3C is a diagram showing a state where the hand side jig 5 is attached to the hand 411.

  The hand side jig 5 is configured to be detachable with respect to the distal end portion of the hand 411, and is used by being attached to the distal end portion of the hand 411 when performing teaching. Specifically, the hand-side jig 5 includes a plate-like member 51 that is slightly larger than the tip of the hand 411 when viewed from above, and the tip of the hand 411 is covered with the plate-like member 51 from above. Thus, the hand side jig 5 is attached to the hand 411. A peripheral wall portion 52 is formed on the back surface of the plate-like member 51 so as to be along the side surface of the tip portion of the hand 411 when the plate member 51 is put on the hand 411, and the peripheral wall portion 52 is a side surface of the tip portion of the hand 411. , The position of the hand side jig 5 and the hand 411 is regulated so as not to be displaced from each other.

  As shown in FIG. 3B, the plate-like member 51 may be provided with a window portion 510 at a portion where the peripheral wall portion 52 and the hand 411 come into contact with each other. According to this configuration, the positional relationship between the peripheral wall portion 52 and the hand 411 can be confirmed from the window portion 510. That is, when the inside of the window 510 is visually confirmed and it can be confirmed that the peripheral wall 52 and the hand 411 are in contact with each other, it can be determined that the hand side jig 5 is appropriately attached to the hand 411. .

  A characteristic shape portion 53 is formed on the surface of the hand side jig 5. The characteristic shape portion 53 is a circular arc-shaped cross section parallel to the main surface of the substrate 9 (the substrate 9 held by the hand 411), and specifically, a concave portion cut out in an arc shape. It is. This arc is preferably an arc having a central angle of 90 ° or more and 180 ° or less, and particularly preferably an arc having a center angle of 180 ° (that is, a semicircle). Further, the characteristic shape portion 53 is preferably formed on the side surface of the hand side jig 5 and at a position corresponding to the most distal portion of the hand 411.

<Ii. Mode in which the characteristic shape portion 53 is provided directly on the hand 411>
The characteristic shape portion 53 may be formed directly on the hand 411.
Also in this case, as in the case where the characteristic shape portion 53 is formed in the hand side jig 5, the characteristic shape portion 53 has a circular cross section parallel to the main surface of the substrate 9 (the substrate 9 held by the hand 411). It is an arc-shaped part, and can be specifically a recess cut out in an arc shape. For example, as shown in FIG. 3 (d), the characteristic shape portion 53 is formed by forming a concave portion cut out in an arc shape on the side surface of the hand 411 and at the most distal portion of the hand 411. be able to.

<2-2. Jig 6, 7, 8>
Next, the jigs 6, 7, and 8 used as a pair with the characteristic shape portion 53 will be described. The jigs 6, 7, and 8 correspond to the transfer destination of the substrate 9 (that is, the position to be taught).
In the following, a jig used for teaching the transfer position when the substrate 9 is transferred onto each shelf 92 of the storage unit 90 mounted on the mounting unit 1 (hereinafter also referred to as “mounting table jig”). 6. Jig (hereinafter also referred to as “alignment unit jig”) 7 used for teaching the transfer position when the substrate 9 is transferred onto the holding unit 21 of the alignment unit 2, and the placement unit of the processing unit 3 Each of jigs 8 (hereinafter also referred to as “processing unit jigs”) 8 used for teaching the transfer position when the substrate 9 is transferred onto the substrate 32 will be described.

<2-2-1. Mounting jig 6>
The mounting table jig 6 will be described with reference to FIG. FIG. 4A is a top view and a side view of the mounting table jig 6. FIG. 4B is a diagram showing a state where the mounting table jig 6 is mounted on the mounting table 1. FIG. 4C is a view for explaining a teaching mode using the mounting table jig 6.

<A. Configuration>
The mounting table jig 6 includes a base portion 61, a guide pole 62 erected on the base portion 61, and guide points 63 formed at predetermined positions in the longitudinal direction of the guide pole 62.

  The base portion 61 is a plate-like member having substantially the same size as the substrate housing portion 90 when viewed from above. At the time of teaching, the base portion 61 is placed at a position where the substrate accommodating portion 90 is placed on the placement table 1. The base portion 61 preferably includes a shape portion 611 that follows the L-shaped portion of each regulating member 11 provided on the mounting table 1. This makes it possible to accurately place the base portion 61 at a position on the placement table 1 where the substrate accommodating portion 90 is placed.

The guide pole 62 is a columnar member, extends in the normal direction of the surface of the base portion 61, and has a lower end fixed to the base portion 61. The guide pole 62 is the center of the substrate 9 that is correctly placed on each shelf 92 of the substrate housing portion 90 that is correctly placed on the placement table 1 when the base portion 61 is placed on the placement table 1. It is formed at a position that overlaps the vertical axis that passes through.
The guide pole 62 has a constant cross-sectional shape parallel to the main surface of the substrate 9 (that is, a cross-sectional shape cut in a direction perpendicular to the longitudinal direction), and the cross-sectional shape corresponds to the characteristic shape portion 53. It has a shape. As described above, in this embodiment, the characteristic shape portion 53 is a concave portion cut out in an arc shape. However, the guide pole 62 is formed by a rod having a circular cross section, and the radius of the circle is the characteristic shape portion 53. It is the same as the radius of curvature of the arc.

  The guide point 63 indicates a predetermined position in the longitudinal direction of the guide pole 62. Specifically, for example, the guide point 63 is formed by a marking line extending in a direction orthogonal to the longitudinal direction of the guide pole 62. The guide point 63 is one shelf selected from among the shelves 92 of the substrate storage unit 90 that is correctly placed on the placement table 1 when the base portion 61 is placed on the placement table 1. 92 (for example, the shelf 92 in the middle in the vertical direction, hereinafter also referred to as the “target shelf 92”) is formed at a position that overlaps the horizontal plane passing through the surface of the substrate 9 that is correctly placed.

<B. Teaching mode>
A mode in which teaching is performed using the mounting table jig 6 will be described. The teaching point in this case is the position of the substrate 9 that is correctly placed on the target shelf 92 in the storage portion 90 that is correctly placed on the placement portion 1. By specifying the teaching point, the position of the hand 411 that can deliver the substrate 9 to the target shelf 92 at the correct position is specified. That is, the delivery position of the substrate 9 with respect to the target shelf 92 is taught.

  First, the base portion 61 of the mounting table jig 6 is mounted on the mounting table 1 at a position where the substrate housing unit 90 is mounted. As described above, at this time, the guide pole 62 is disposed at a position that overlaps the vertical axis passing through the center of the substrate 9 placed on the target shelf 92 of the storage unit 90 placed on the placement unit 1, The guide points 63 are arranged at positions that overlap with a horizontal plane passing through the surface of the substrate 9. That is, the guide point 63 is disposed at a position overlapping the teaching point.

  Subsequently, the hand 411 in which the characteristic shape portion 53 is indirectly formed by attaching the hand side jig 5 (FIG. 3C), or the hand 411 in which the characteristic shape portion 53 is directly formed. (FIG. 3D) is moved in the horizontal plane so that the characteristic shape portion 53 and the guide pole 62 are in contact with each other (specifically, in a meshed state), the hand 411 and the guide pole 62 in the horizontal plane. Is fixed (a top view of FIG. 4C). Thereby, the position of the hand 411 in the horizontal plane is determined. Further, the hand 411 is moved up and down (that is, slid along the guide pole 62) in the engaged state, and the upper surface of the hand 411 or the hand side jig 5 is disposed at the guide point 63, for example. (Side view of FIG. 4C). Thereby, the vertical position of the hand 411 is determined, and the hand 411 is aligned with the teaching point both in the horizontal plane and in the vertical direction (that is, in the three-dimensional position).

  When the hand 411 is aligned with the teaching point, the position of the hand 411 at this time is stored in the storage device of the control unit 101. Thereby, the teaching point is specified, and the delivery position of the substrate 9 with respect to the target shelf 92 is taught based on the specified teaching point. Here, based on the taught delivery position, the delivery positions of the substrates 9 with respect to all other shelves 92 are calculated and stored.

<2-2-2. Alignment Jig 7>
The alignment portion jig 7 will be described with reference to FIG. FIG. 5A is a top view and a side view of the alignment portion jig 7. FIG. 5B is a diagram illustrating a state where the alignment unit jig 7 is placed on the holding unit 21. FIG. 5C is a diagram for explaining a teaching mode using the alignment portion jig 7.

<A. Configuration>
The alignment portion jig 7 includes a base portion 71, a guide pole 72 erected on the base portion 71, and guide points 73 formed at predetermined positions in the longitudinal direction of the guide pole 72.

  The base portion 71 is a plate-like member having substantially the same size as the substrate 9 when viewed from above. In teaching, the base portion 71 is placed on the holding portion 21 of the alignment portion 2. Specifically, the base portion 71 is placed in a horizontal posture on each placement surface 211 of the pair of holders 210 at a position where the center coincides with the center of the pair of holders 210 when viewed from above. Is done. Since the base portion 71 is substantially the same size as the substrate 9 when viewed from above, at this time, the base portion 71 is positioned from both sides by the respective wall surfaces 212 of the pair of holders 210 (that is, in a horizontal plane). The position is regulated so as not to cause a displacement.

The guide pole 72 is a columnar member, extends in the normal direction of the surface of the base portion 71, and has a lower end fixed to the base portion 71. The guide pole 72 is formed at a position that overlaps the vertical axis passing through the center of the substrate 9 correctly held by the holding unit 21 when the base unit 71 is placed on the holding unit 21.
The guide pole 72 has a constant cross-sectional shape parallel to the main surface of the substrate 9 (that is, a cross-sectional shape cut in a direction orthogonal to the longitudinal direction), and the cross-sectional shape corresponds to the characteristic shape portion 53. It has a shape. As described above, in this embodiment, the characteristic shape portion 53 is a concave portion cut out in an arc shape. However, the guide pole 72 is formed by a rod having a circular cross section, and the radius of the circle is the characteristic shape portion 53. It is the same as the radius of curvature of the arc.

  The guide point 73 indicates a predetermined position in the longitudinal direction of the guide pole 72, and is specifically formed by a marking line extending in a direction orthogonal to the longitudinal direction of the guide pole 72, for example. The guide point 73 is a plane parallel to a horizontal plane passing through the surface of the substrate 9 correctly held by the holding unit 21 when the base unit 71 is placed on the holding unit 21, and is separated from the horizontal plane. Is formed at a position overlapping with a known surface (target surface).

<B. Teaching mode>
A mode in which teaching is performed using the alignment unit jig 7 will be described. The teaching point in this case is a position having a known relationship with the position of the substrate 9 correctly held by the holding unit 21. By specifying the teaching point, the position of the hand 411 that can deliver the substrate 9 to the holding unit 21 at the correct position is specified. That is, the delivery position of the substrate 9 with respect to the holding unit 21 is taught.

  First, the base portion 71 of the alignment portion jig 7 is placed on the holding portion 21 (FIG. 5B). As described above, at this time, the guide pole 72 is disposed at a position overlapping the vertical axis passing through the center of the substrate 9 held by the holding unit 21, and the guide point 73 is a horizontal plane passing through the surface of the substrate 9. It is arranged at a position that overlaps the target surface in a known positional relationship. That is, the guide point 73 is disposed at a position overlapping the teaching point.

  Subsequently, the hand 411 in which the characteristic shape portion 53 is indirectly formed by attaching the hand side jig 5 (FIG. 3C), or the hand 411 in which the characteristic shape portion 53 is directly formed. (FIG. 3D) is moved in the horizontal plane, and the positional relationship between the hand 411 and the guide pole 72 is fixed in the horizontal plane in a state where the characteristic shape portion 53 and the guide pole 72 are engaged with each other (FIG. 5 ( c) Top view). Thereby, the position of the hand 411 in the horizontal plane is determined. Further, the hand 411 is moved up and down (that is, slid along the guide pole 72) in the engaged state, and the upper surface of the hand 411 or the hand side jig 5 is arranged at the guide point 73. (Side view of FIG. 5C). Thereby, the vertical position of the hand 411 is determined, and the hand 411 is aligned with the teaching point both in the horizontal plane and in the vertical direction (that is, in the three-dimensional position).

  When the hand 411 is aligned with the teaching point, the position of the hand 411 at this time is stored in the storage device of the control unit 101. Thereby, the teaching point is specified, and the delivery position of the substrate 9 to the holding unit 21 is taught based on the specified teaching point.

<2-2-3. Processing Unit Jig 8>
The processing unit jig 8 will be described with reference to FIG. FIG. 6A is a perspective view of the processing unit jig 8. FIG. 6B is a diagram showing a state in which the processing unit jig 8 is placed on the placement unit 32. FIG. 6C is a diagram for explaining a teaching mode using the processing unit jig 8.

<A. Configuration>
The processing portion jig 8 includes a base portion 81, a guide pole 82 erected on the base portion 81, and guide points 83 formed at predetermined positions in the longitudinal direction of the guide pole 82.

The base portion 81 includes a plurality of lift pin accommodating portions 811 and a thin plate-like support portion 812 that connects and integrally supports them. Each lift pin accommodating portion 811 is a cylindrical member whose upper end is connected to the support member 812, and is disposed at a position corresponding to each of the group of lift pins 321 included in the placement portion 32. Specifically, in this embodiment, each lift pin 321 is disposed at a position corresponding to the apex of the triangle, and correspondingly, each lift pin accommodating portion 811 is also disposed at a position corresponding to the apex of the triangle. The That is, the support portion 812 includes a bent shape portion 813 that extends along two sides of the triangle, and the lift pin accommodating portion 811 is coupled to both end points and the bent portion. The support portion 812 includes a connecting portion 814 that connects intermediate positions between the end points of the shape portion 813 and the bent portion, and a guide pole 82 to be described later is fixed thereto.
In a state where the base portion 81 is placed on the placement portion 32, each lift pin accommodating portion 811 covers each lift pin 321 from the upper side, and the tip portion of each lift pin 321 is accommodated inside the cylinder of each lift pin accommodating portion 811. It becomes a state. As a result, the base portion 81 is in a state in which the position is regulated so as not to cause a positional shift in the horizontal plane.

The guide pole 82 is a columnar member, is fixed to the side surface of the connecting portion 814 of the support member 812 on the side surface, and is arranged to extend in the normal direction of the surface of the support member 812. The guide pole 82 is formed at a position that overlaps the vertical axis passing through the center of the substrate 9 that is correctly placed on the placement portion 32 when the base portion 81 is placed on the placement portion 32. .
The guide pole 82 has a constant cross-sectional shape parallel to the main surface of the substrate 9 (that is, a cross-sectional shape cut in a direction perpendicular to the longitudinal direction), and the cross-sectional shape corresponds to the characteristic shape portion 53. It has a shape. As described above, in this embodiment, the characteristic shape portion 53 is a concave portion cut out in an arc shape, and the guide pole 82 is a rod-like member having a convex cross section swelled in an arc shape (specifically, A rod-like member whose cross section is a semi-oval (ie, a shape obtained by dividing an oval (a figure composed of two equal-length parallel lines and two semi-circles) in half along a dividing line perpendicular to the parallel lines) ), And the radius of curvature of the arc-shaped portion matches the radius of curvature of the arc of the feature-shaped portion 53.

  The guide point 83 indicates a predetermined position in the longitudinal direction of the guide pole 82. Specifically, for example, the guide point 83 is formed by a marking line extending in a direction orthogonal to the longitudinal direction of the guide pole 82. The guide point 83 is a horizontal plane (or parallel to the horizontal plane) that passes through the surface of the substrate 9 that is correctly placed on the placement portion 32 when the base portion 81 is placed on the placement portion 32. , Or a surface with a known separation distance from the horizontal plane).

<B. Teaching mode>
A mode for performing teaching using the alignment portion jig 7 will be described. The teaching point in this case is the position of the substrate 9 that is correctly placed on the placement portion 32 (or a position that has a known relationship with the position). By specifying the teaching point, the position of the hand 411 that can deliver the substrate 9 to the placement unit 32 at the correct position is specified. That is, the delivery position of the substrate 9 with respect to the placement unit 32 is taught.

  First, the base member 81 of the alignment portion jig 7 is placed on the placement portion 32, each lift pin accommodating portion 811 covers each lift pin 321 from above, and the tip of each lift pin 321 is each lift pin accommodating portion 811. It is set as the state accommodated in the pipe | tube inside (FIG.6 (b)). As described above, at this time, the guide pole 82 is disposed at a position overlapping the vertical axis passing through the center of the substrate 9 placed on the placement portion 32, and the guide point 83 passes through the surface of the substrate 9. It is arranged at a position that overlaps the horizontal plane. That is, the guide point 83 is disposed at a position overlapping the teaching point.

  Subsequently, the hand 411 in which the characteristic shape portion 53 is indirectly formed by attaching the hand side jig 5 (FIG. 3C), or the hand 411 in which the characteristic shape portion 53 is directly formed. (FIG. 3D) is moved in the horizontal plane, and the positional relationship between the hand 411 and the guide pole 82 is fixed in the horizontal plane, assuming that the characteristic shape portion 53 and the guide pole 82 are engaged with each other (FIG. 6 ( c) Top view). Thereby, the position of the hand 411 in the horizontal plane is determined. Further, the hand 411 is moved up and down (that is, slid along the guide pole 82) in the engaged state, and the upper surface of the hand 411 or the hand side jig 5 is disposed at the guide point 83, for example. (Side view of FIG. 6C). Thereby, the vertical position of the hand 411 is determined, and the hand 411 is aligned with the teaching point both in the horizontal plane and in the vertical direction (that is, in the three-dimensional position).

  When the hand 411 is aligned with the teaching point, the position of the hand 411 at this time is stored in the storage device of the control unit 101. As a result, the teaching point is specified, and the delivery position of the substrate 9 with respect to the placement unit 32 is taught based on the specified teaching point.

<3. Modification>
The teaching device 10 exemplified above is a concave portion in which the characteristic shape portion 53 is cut out in an arc shape, and each of the jigs 6, 7, 8 used in a pair with the convex shape cross section is expanded in an arc shape. However, the combination of the shapes of the respective parts is not limited to this. For example, the characteristic shape portion 53 is a convex portion that swells in an arc shape, and an arc shape having a curvature radius such that the jigs 6, 7, and 8 used as a pair match the curvature radius of the arc shape. It may have a concave cross section that is recessed.

  In the jigs 6, 7, and 8 exemplified above, the guide points 63, 73, and 83 are composed of marking lines that are formed in the middle of the extension of the guide pole portions 61, 71, and 81. The configuration example is not limited thereto. For example, the upper end positions of the guide pole portions 61, 71, 81 may constitute a guide point.

  In the above-described embodiment, the guide points 63, 73, and 83 are arranged at positions that overlap the teaching points. However, the guide points 63, 73, and 83 are not necessarily arranged at positions that overlap the teaching points. For example, the guide points 63, 73, 83 may be arranged at positions that are away from the teaching point and have a known positional relationship with the teaching point.

  The teaching device 10 exemplified above can be applied to teaching at various positions other than the positions exemplified above.

  The teaching device 10 exemplified above can be used for teaching of various substrate processing apparatuses other than the configuration exemplified above.

DESCRIPTION OF SYMBOLS 1 Mounting stand 2 Alignment apparatus 21 Holding | maintenance part 3 Processing part 32 Mounting part 322 Lift pin 4 Transfer robot 41 Transfer arm 411 Hand 5 Hand side jig | tool 53 Characteristic shape part 6 Mounting stage jig 7 Alignment part jig | tool 8 Processing part Jigs 61, 71, 81 Base portions 62, 72, 82 Guide poles 63, 73, 83 Guide point 10 Teaching device 100 Substrate processing device 101 Control unit

Claims (5)

A teaching device that places a substrate on a hand and teaches a position where the substrate should be transported to a transport robot that transports the substrate in an in-plane direction and an out-of-plane direction parallel to the substrate. ,
A feature-shaped portion provided in the hand and having a predetermined cross-section parallel to the surface;
A columnar member arranged to extend in the out-of-plane direction at the substrate transfer destination, and a guide pole whose cross section parallel to the surface is a shape corresponding to the predetermined shape;
A guide point provided at a predetermined position in the longitudinal direction of the guide pole;
A teaching device. The teaching device according to claim 1,
The characteristic shape portion is a recess cut out in an arc shape;
The guide pole has a convex cross section swelled in an arc shape,
Teaching device. The teaching device according to claim 1 or 2,
The characteristic shape portion is a recess cut out in an arc shape;
The guide pole is a rod having a circular cross section,
Teaching device. The teaching device according to any one of claims 1 to 3,
The characteristic shape portion is provided in a jig that is detachably attached to the hand.
Teaching device. The teaching device according to any one of claims 1 to 3,
The characteristic shape portion is provided directly on the hand,
Teaching device.

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