JP2017221994A - Method of correcting end surface of mount flange and cutting device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method of correcting an end surface of a mount flange that is capable of properly and easily determining whether or not correction of an end surface is complete.SOLUTION: A method of correcting an end surface of a mount flange (42) includes a correction step of correcting an end surface with a grinding grindstone (64) of an end surface correction jig (18) by bringing an end surface (42a) of the mount flange into contact with the grinding grindstone while rotating a spindle (40), a measuring step of electrically measuring a state of contact between the grinding grindstone and the end surface by applying a voltage between a holding table (14) bearing the end surface correction jig thereon and the spindle after performing the correction step and bringing the grinding grindstone into contact with the end surface while rotating the spindle, and a determination step of determining that a correction of the end surface is completed when the state of contact measured by the measuring step is stable and that the correction of the end surface is not complete when the state of contact state is unstable.SELECTED DRAWING: Figure 8

Description

  The present invention relates to a method for correcting an end face of a mount flange for correcting an end face of a mount flange that supports a cutting blade, and a cutting apparatus suitable for the end face correcting method.

  In a cutting apparatus that cuts a plate-like workpiece typified by a semiconductor wafer, for example, a cutting blade is attached to the tip of a spindle serving as a rotating shaft via a jig called a mount flange. In this case, the end face of the mount flange that contacts the cutting blade is damaged as the cutting progresses, and the flatness of the end face gradually decreases.

  Further, immediately after the mounting flange is fixed to the spindle, the end surface is not necessarily perpendicular to the holding surface of the holding table that holds the workpiece and the axial direction of the spindle. Therefore, a technique called end surface correction is used in which the shape of the end surface is corrected so that the end surface is vertical and flat with respect to the axial direction of the spindle (the holding surface of the holding table) (see, for example, Patent Document 1). .

JP 2011-11299 A

  After the end face correction described above, for example, it is determined whether or not the end face is appropriately corrected by bringing the probe for measuring the position of the end face into contact with the end face and rotating the spindle. However, in this determination method, it takes time to set the measuring device or perform actual measurement work, and the end surface may be damaged by accidentally colliding the probe with the end surface.

  The present invention has been made in view of such problems, and an object of the present invention is to provide a mounting flange end face correction method or a cutting apparatus that can appropriately and easily determine whether or not end face correction has been completed. It is to be.

  According to one aspect of the present invention, a conductive holding table to which a chuck table for holding a workpiece is mounted, and a conductive mounting flange for supporting a cutting blade for cutting the workpiece are provided at the tip. For supporting the cutting blade using a conductive spindle fixed to the surface, and an end surface correction jig having a conductive grinding wheel and a conductive support base and mounted on the holding table. A mounting flange end surface correcting method for correcting an annular end surface of the mounting flange, the grinding wheel of the end surface correcting jig mounted on the holding table, and the mounting flange fixed to the spindle. A positioning step of positioning the end face at a reference position for initiating correction of the end face; and after performing the positioning step, rotating the spindle A correction step of correcting the end surface with the grinding wheel by moving the end surface in the axial direction of the steel plate and bringing the grinding wheel into contact, and after performing the correction step, the holding table and the spindle A measurement step for electrically measuring the state of contact between the grinding wheel and the end surface by applying a voltage between the grinding wheel and rotating the spindle to bring the grinding wheel into contact with the end surface; When the contact state measured in step S3 is stable, it is determined that the correction of the end face is complete. When the contact state is unstable, the correction of the end face is not completed. A mounting flange comprising: a determining step for determining; and a re-correcting step for correcting the end surface again with the grinding wheel when it is determined that the correction of the end surface is not completed in the determining step. End face correction method provided It is.

  In one aspect of the present invention, in the positioning step, the spindle and the holding table are relatively moved while applying a voltage between the holding table and the spindle, and the grinding wheel and the end surface are brought into contact with each other. Thus, it is preferable that the position to be energized is the reference position.

  Further, according to one aspect of the present invention, a chuck table for holding a workpiece and an end surface correction jig having a conductive grinding wheel and a conductive support base are selectively mounted. A conductive holding table, a cutting unit including a conductive spindle to which a conductive mounting flange for supporting a cutting blade for cutting a workpiece is fixed at the tip, and the end face mounted on the holding table After correcting the annular end surface of the mount flange to support the cutting blade using a correction jig, the grinding wheel and the end surface measured electrically using the end surface correction jig And a determination unit that determines whether or not the correction of the end face is completed based on the state of contact.

  In the method for correcting the end face of the mount flange according to one aspect of the present invention, the end face of the mount flange is corrected using an end face correction jig having a conductive grinding wheel, and then the grinding wheel and the end face are contacted while rotating the spindle. Thus, the contact state between the grinding wheel and the end face is electrically measured, and it is determined whether or not the end face has been corrected based on the measured contact state.

  In other words, according to the method for correcting the end face of the mount flange according to one aspect of the present invention, it is not necessary to use a measuring device different from the end face correction jig. Can be determined. Moreover, according to the cutting device which concerns on 1 aspect of this invention, it can determine appropriately and easily whether the end surface correction method of this mount flange is implemented and the correction of an end surface is completed.

It is a figure which shows the structural example of a cutting device typically. It is a disassembled perspective view for demonstrating the structure of a holding table and an end surface correction jig. It is a perspective view for demonstrating the structure of the lower surface side of an end surface correction jig | tool. It is a perspective view which shows typically the state by which the end surface correction jig was mounted | worn on the upper surface of the holding table. It is a figure which shows a positioning step typically. It is a figure which shows typically a mode that the height of the end surface of a mount flange is adjusted. It is a figure which shows a correction step typically. It is a figure which shows a measurement step typically. FIG. 9A is a graph schematically showing an example of a measurement result when the end face is properly corrected, and FIG. 9B is a case where the end face is not properly corrected. It is a graph which shows typically an example of a measurement result.

  Embodiments according to one aspect of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a diagram schematically illustrating a configuration example of a cutting apparatus according to the present embodiment.

  As shown in FIG. 1, the cutting device 2 includes a base 4 that supports each structure. A cassette support base 6 that can be moved up and down is provided at a corner in front of the base 4. A rectangular parallelepiped cassette 8 for accommodating a plurality of workpieces 11 is placed on the upper surface of the cassette support 6. In FIG. 1, only the outline of the cassette 8 is shown for convenience of explanation.

  The workpiece 11 is, for example, a disk-shaped wafer made of a semiconductor material such as silicon, and the surface side is divided into a central device region and an outer peripheral surplus region surrounding the device region. The device region is further divided into a plurality of regions by division lines (streets) arranged in a lattice pattern, and devices such as ICs and LSIs are formed in each region.

  For example, a dicing tape 13 having a diameter larger than that of the workpiece 11 is attached to the back side of the workpiece 11. An annular frame 15 is fixed to the outer peripheral portion of the dicing tape 13. That is, the workpiece 11 is supported on the frame 15 via the dicing tape 13.

  In the present embodiment, a disk-shaped wafer made of a semiconductor material such as silicon is used as the workpiece 11. However, the material, shape, structure, etc. of the workpiece 11 are not limited. For example, a ceramic substrate, a resin substrate, a metal substrate, or the like made of a material such as glass or sapphire can be used as the workpiece 11.

  A rectangular opening 4 a that is long in the X-axis direction (front-rear direction, processing feed direction) is formed on the side of the cassette support base 6. In the opening 4a, there are an X-axis moving table 10, a ball screw type X-axis moving mechanism (not shown) for moving the X-axis moving table 10 in the X-axis direction, and a dustproof and splash-proof cover 12 covering the X-axis moving mechanism. Is provided.

  Above the X-axis moving table 10, a columnar holding table 14 formed using a conductive material (for example, a metal such as stainless steel or aluminum) is provided. A chuck table 16 for holding the workpiece 11 and an end face correction jig 18 are selectively mounted on the upper surface 14 a of the holding table 14.

  The holding table 14 is connected to a rotation drive source (not shown) such as a motor, and rotates around a rotation axis substantially parallel to the Z-axis direction (vertical direction). The holding table 14 is processed and fed in the X-axis direction by the X-axis moving mechanism described above. Details of the holding table 14 and the end face correction jig 18 will be described later.

  A cantilever-like support structure 22 that supports a cutting unit 20 for cutting the workpiece 11 is disposed at a position adjacent to the opening 4a. A cutting unit moving mechanism 24 that moves the cutting unit 20 in the Y-axis direction (left-right direction, indexing feed direction) and the Z-axis direction (vertical direction) is provided on the upper front surface of the support structure 22.

  The cutting unit moving mechanism 24 includes a pair of Y-axis guide rails 26 arranged in front of the support structure 22 and parallel to the Y-axis direction. A Y-axis moving plate 28 constituting the cutting unit moving mechanism 24 is slidably attached to the Y-axis guide rail 26.

  A nut portion (not shown) is provided on the back side (rear side) of the Y-axis moving plate 28, and a Y-axis ball screw 30 parallel to the Y-axis guide rail 26 is screwed into the nut portion. Yes. A Y-axis pulse motor (not shown) is connected to one end of the Y-axis ball screw 30. When the Y-axis ball screw 30 is rotated by the Y-axis pulse motor, the Y-axis moving plate 28 moves in the Y-axis direction along the Y-axis guide rail 26.

  A pair of Z-axis guide rails 32 parallel to the Z-axis direction are provided on the surface (front surface) of the Y-axis moving plate 28. A Z-axis moving plate 34 is slidably attached to the Z-axis guide rail 32.

  A nut portion (not shown) is provided on the back surface side (rear surface side) of the Z-axis moving plate 34, and a Z-axis ball screw 36 parallel to the Z-axis guide rail 32 is screwed to the nut portion. Yes. A Z-axis pulse motor 38 is connected to one end of the Z-axis ball screw 36. When the Z-axis ball screw 36 is rotated by the Z-axis pulse motor 38, the Z-axis moving plate 34 moves in the Z-axis direction along the Z-axis guide rail 32.

  A cutting unit 20 is provided below the Z-axis moving plate 34. The cutting unit 20 includes a spindle 40 (see FIG. 5 and the like) formed of a conductive material. A disc-shaped mount flange 42 (see FIG. 5 or the like) formed of a conductive material is fixed to the tip (one end) side of the spindle 40.

  On one side (the holding table 14 side) of the mount flange 42, an end face 42a (see FIG. 5 and the like) that contacts the cutting blade 44 for cutting the workpiece 11 is provided. When the cutting blade 44 is mounted on the spindle 40, the side surface of the cutting blade 44 is brought into contact with the end surface 42 a and the cutting blade 44 is held by the mount flange 42.

  A rotation drive source (not shown) such as a motor is connected to the base end (other end) side of the spindle 40, and the cutting blade 44 mounted on the spindle 40 is rotated by a force transmitted from the rotation drive source. To do. Further, a camera 46 for imaging the workpiece 11 and the like held on the chuck table 16 is installed at a position adjacent to the cutting unit 20.

  If the Y-axis moving plate 28 is moved in the Y-axis direction by the cutting unit moving mechanism 24, the cutting unit 20 and the camera 46 are indexed and fed in the Y-axis direction. Further, if the Z-axis moving plate 34 is moved in the Z-axis direction by the cutting unit moving mechanism 24, the cutting unit 20 and the camera 46 are moved up and down.

  A circular opening 4b is formed at a position opposite to the cassette support base 6 with respect to the opening 4a. A cleaning unit 48 for cleaning the workpiece 11 is disposed in the opening 4b. The cleaning unit 48 includes a nozzle 48a that ejects a cleaning liquid or the like.

  Components such as the X-axis moving mechanism, the holding table 14, the cutting unit 20, the cutting unit moving mechanism 24, the camera 46, and the cleaning unit 48 are connected to the control unit 50, respectively. The control unit 50 controls each component described above so that the workpiece 11 can be appropriately cut. The control unit 50 includes a determination unit (determination unit) 50a. Details of the function and the like of the determination unit 50a will be described later.

  When the end surface 42 a of the mount flange 42 is corrected by the cutting device 2, first, a mounting step for mounting the end surface correcting jig 18 on the upper surface 14 a of the holding table 14 is performed. FIG. 2 is an exploded perspective view for explaining the structure of the holding table 14 and the end surface correcting jig 18, and FIG. 3 is a perspective view for explaining the structure of the lower surface side of the end surface correcting jig 18.

  As shown in FIG. 2, a circular recess 14b is formed on the upper surface 14a of the holding table 14 formed in a columnar shape in plan view. One end of a first suction path 52a formed in the holding table 14 is opened at the bottom of the recess 14b. A suction source (not shown) is connected to the other end side of the first suction path 52a via an open / close valve (not shown), and the like, the chuck table 16 disposed on the upper surface 14a, the end face correction jig 18 and the like. The negative pressure of the suction source can be applied to.

  An O-ring 54 that matches the shape of the recess 14b is provided in the recess 14b. The O-ring 54 is formed of, for example, a resin having rubber elasticity, and protrudes from the upper surface 14a in a state where the O-ring 54 is disposed in the recess 14b. With this O-ring 54, the airtightness between the holding table 14 and the chuck table 16 or the end surface correction jig 18 arranged on the upper surface 14a of the holding table 14 can be maintained.

  Around the recess 14b, one end side of two second suction paths 52b formed in the holding table 14 is opened separately from the first suction path 52a. A suction source (not shown) is also connected to the other end side of the second suction path 52b via an on-off valve (not shown). Further, a positioning recess 14c for determining the position of the chuck table 16 and the end surface correction jig 18 is formed on the upper surface 14a.

  The end face correction jig 18 includes a disk-like support plate (support base) 56 formed in a size corresponding to the holding table 14 using a conductive material. The first surface 56 a and the second surface 56 b of the support plate 56 are formed substantially parallel to each other. When the end surface correction jig 18 is placed on the holding table 14, the second surface 56 b of the support plate 56 is formed on the holding table 14. Contact the upper surface 14a.

  As shown in FIG. 3, the second surface 56 b of the support plate 56 has a concave portion 56 c having a position, shape, and size corresponding to the concave portion 14 b of the holding table 14, and a position corresponding to the concave portion 14 c of the holding table 14. A convex portion 56d having a shape and a size is formed. When the end face correction jig 18 is mounted on the holding table 14, the support plate 56 is placed on the holding table 14, and the positions of the concave portion 14b and the concave portion 56c are aligned, and the positions of the concave portion 14c and the convex portion 56d are aligned.

  As a result, the O-ring 54 protruding from the upper surface 14a of the holding table 14 is inserted into the concave portion 56c of the support plate 56, and the convex portion 56d protruding from the second surface 56b of the support plate 56 becomes the concave portion 14c of the holding table 14. Inserted. After that, if the opening / closing valve connected to the other end of the first suction path 52a is opened and the negative pressure of the suction source is applied to the support plate 56, the support plate 56 is fixed in a state where the position relative to the holding table 14 is adjusted. it can.

  Both ends of the suction path 58 formed in the support plate 56 are opened on the first surface 56 a and the second surface 56 b of the support plate 56. The position of the end of the suction path 58 on the second surface 56b side corresponds to the position of one end of the second suction path 52b provided in the holding table 14. Therefore, when the support plate 56 is fixed in a state where the position relative to the holding table 14 is matched, the second surface 56b side of the suction path 58 is connected to one end side of the second suction path 52b.

  In addition, two convex portions 60 are formed on the first surface 56 a of the support plate 56. The convex portion 60 defines the position of the grindstone fixing portion 62 provided on the first surface 56 a side of the support plate 56. The grindstone fixing part 62 is formed in a rectangular parallelepiped shape using, for example, a conductive material, and the first surface 62a and the second surface 62b of the grindstone fixing part 62 are substantially parallel.

  The grindstone fixing part 62 is formed with a rectangular through hole 62c in plan view that penetrates the grindstone fixing part 62 from the first surface 62a to the second surface 62b. When the grindstone fixing part 62 is arranged on the support plate 56, the grindstone fixing part 62 is placed on the support plate 56, and the positions of the two convex parts 60 and the through holes 62 c are aligned, so that the second surface of the grindstone fixing part 62 is placed. 62 b is brought into contact with the first surface 56 a of the support plate 56.

  Thereby, the two convex portions 60 protruding from the first surface 56 a of the support plate 56 are inserted into the through holes 62 c of the grindstone fixing portion 62, and the position of the grindstone fixing portion 62 with respect to the support plate 56 can be roughly adjusted. . Further, the end of the suction path 58 on the first surface 56 a side is closed by the second surface 62 b of the grindstone fixing portion 62.

  The through hole 62 c is formed in such a size that a gap is formed between the through hole 62 c and the convex portion 60 in a state where the two convex portions 60 are accommodated. Therefore, before opening the on-off valve connected to the other end of the second suction path 52b and applying the negative pressure of the suction source to the grindstone fixing part 62, the grindstone is applied to the first surface 56a of the support plate 56. The position of the grindstone fixing part 62 can be adjusted by moving the fixing part 62 in parallel (particularly in the Y-axis direction).

  A grinding wheel 64 for correcting the end face 42 a of the mount flange 42 is fixed to the side of the grinding wheel fixing portion 62. The grinding wheel 64 is also formed using a conductive material. FIG. 4 is a perspective view schematically showing a state in which the end face correction jig 18 is mounted on the upper surface 14 a of the holding table 14. In this mounting step, the on-off valve connected to the other end of the second suction path 52b is closed so that the negative pressure of the suction source does not act on the grindstone fixing portion 62.

  After the mounting step, a positioning step is performed in which the grinding wheel 64 and the end surface 42a of the mount flange 42 are positioned at a reference position for starting correction of the end surface 42a. FIG. 5 is a diagram schematically showing the positioning step.

  In the positioning step, for example, the holding table 14 is moved in the X-axis direction so that a part of the end surface 42 a of the mount flange 42 and the tip surface of the grinding wheel 64 face each other. Next, as shown in FIG. 5, the holding table 14 and the cutting unit 20 are moved relative to each other in the Y-axis direction at an arbitrary speed so that the end surface 42 a of the mount flange 42 contacts the front end surface of the grinding wheel 64. .

  As shown in FIG. 5, for example, a DC power source 72 and a resistor 74 are connected in series between the holding table 14 and the spindle 40. Further, the holding table 14, the spindle 40, the mount flange 42, the support plate 56, the grindstone fixing portion 62, and the grinding grindstone 64 are all conductive.

  Therefore, when the end surface 42a of the mount flange 42 comes into contact with the tip surface of the grinding wheel 64 and the resistance value between the mount flange 42 and the grinding wheel 64 decreases (when electricity is passed between the mount flange 42 and the grinding wheel 64). The voltage applied across the resistor 74 increases. Therefore, by connecting an energization measuring unit 76 such as a voltmeter in parallel to the resistor 74 and measuring the voltage applied to both ends of the resistor 74, the end face 42a of the mount flange 42 and the tip face of the grinding wheel 64 are measured. Can be detected electrically.

  The result of the measurement by the energization measurement unit 76 is sent to, for example, the determination unit 50a included in the control unit 50. The determination unit 50a determines that the end surface 42a of the mount flange 42 and the front end surface of the grinding wheel 64 have come into contact, for example, when the voltage measured by the energization measurement unit 76 exceeds an arbitrary threshold value.

  After it is determined that the end surface 42a of the mount flange 42 and the tip surface of the grinding wheel 64 are in contact with each other, the relative movement between the holding table 14 and the cutting unit 20 is stopped, and the other end of the second suction path 52b. Open the on-off valve connected to the side. As a result, the negative pressure of the suction source can be applied to the grindstone fixing portion 62 to fix the position of the grindstone fixing portion 62 with respect to the support plate 56. The position of the grinding wheel 64 and the mount flange 42 at this time is a reference position for starting correction of the end face 42a.

  After fixing the position of the grindstone fixing portion 62 with respect to the support plate 56, the height of the end face 42a of the mount flange 42 may be adjusted. FIG. 6 is a diagram schematically showing how the height of the end face 42a of the mount flange 42 is adjusted. In the present embodiment, for example, the cutting unit 20 is lowered, and the tip surface of the grinding wheel 64 faces the portion inside the end surface 42 a of the mount flange 42.

  The height of the end surface 42a may be adjusted before fixing the position of the grindstone fixing portion 62 with respect to the support plate 56. Furthermore, when using the end surface correction jig 18 in which the height of the grindstone fixing portion 62 with respect to the end surface 42a is adjusted in advance, the adjustment of the height of the end surface 42a can be omitted.

  After the positioning step, a correction step of correcting the end face 42a of the mount flange 42 with the grinding wheel 64 is performed. FIG. 7 is a diagram schematically showing the correction step. In the correction step, as shown in FIG. 7, the mount flange 42 and the grinding wheel 64 are relatively moved at an arbitrary speed in the X-axis direction while rotating the spindle 40.

  Further, the holding table 14 and the cutting unit 20 are moved in the Y-axis direction at an arbitrary speed (the spindle 40 is moved in the axial direction), and the end face 42 a of the mount flange 42 is pressed against the grinding wheel 64. Thereby, the end surface 42a of the mount flange 42 can be ground with the grinding wheel 64, and the end surface 42a can be corrected perpendicularly and flatly to the Y-axis direction (axial direction of the spindle 40).

  After the correction step, a measurement step for electrically measuring the state of contact between the grinding wheel 64 and the end face 42a of the mount flange 42 is performed. FIG. 8 is a diagram schematically showing the measurement step. In the measurement step, the mount flange 42 and the grinding wheel 64 are relatively moved at an arbitrary speed in the X-axis direction while rotating the spindle 40 as shown in FIG. The operation of each part in this measurement step may be the same as the operation of each part in the correction step. That is, the measurement step can be performed with the same operation as the correction step.

  As shown in FIG. 8, for example, a DC power supply 82 and a resistor 84 are connected in series between the holding table 14 (grinding grindstone 64) and the spindle 40 (mounting flange 42). Further, the holding table 14, the spindle 40, the mount flange 42, the support plate 56, the grindstone fixing portion 62, and the grinding grindstone 64 are all conductive.

  Therefore, a voltage corresponding to the contact state between the mount flange 42 and the grinding wheel 64 is applied to both ends of the resistor 84. Therefore, the contact state measurement unit 86 such as an oscilloscope is connected in parallel to the resistor 84 and the voltage applied to both ends of the resistor 84 is measured, so that the end surface 42a of the mount flange 42 and the tip surface of the grinding wheel 64 are measured. The state of contact with can be measured electrically.

The result of the measurement by the contact state measurement unit 86 is sent to, for example, the determination unit 50a included in the control unit 50. FIG. 9A is a graph schematically showing an example of a measurement result when the correction of the end surface 42a is appropriately completed, and FIG. 9B is a graph where the correction of the end surface 42a is appropriately completed. It is a graph which shows typically an example of a measurement result when there is nothing. 9A and 9B, the horizontal axis indicates time t and the vertical axis indicates voltage V. A distal end surface of the end surface 42a and the grinding wheel 64 of the mounting flange 42 is in contact during a period from time t ₁ to time t _2.

After the measurement step, a determination step is performed to determine whether or not the end face has been corrected. The determination step is performed by a determination unit 50a included in the control unit 50. For example, when the correction of the end surface 42a is appropriately completed, the state of contact between the end surface 42a of the mount flange 42 and the front end surface of the grinding wheel 64 is stabilized, as shown in FIG. voltage V measured in the period from time t ₁ to time t ₂ is stabilized at a high value.

  Therefore, when the contact state between the end surface 42a of the mount flange 42 and the tip surface of the grinding wheel 64 is stable, that is, the determination unit 50a is in contact with the end surface 42a of the mount flange 42 and the tip surface of the grinding wheel 64. When the measured voltage V is stable at a high value, it is determined that the correction of the end face 42a is properly completed.

On the other hand, when the correction of the end surface 42a is not properly completed, the contact state between the end surface 42a of the mount flange 42 and the tip surface of the grinding wheel 64 is not stable, as shown in FIG. , the voltage V also unstable measured in the period from time t ₁ to time t _2.

  Therefore, the determination part 50a is in the case where the contact state between the end surface 42a of the mount flange 42 and the tip surface of the grinding wheel 64 is not stable, that is, the end surface 42a of the mount flange 42 and the tip surface of the grinding wheel 64 are in contact. If the measured voltage V is not stable, it is determined that the correction of the end face 42a has not been completed properly.

More specifically, for example, when the voltage V to be measured exceeds the threshold (voltage) in the entire period from time t ₁ to time t _2, the judgment unit 50a, the correction of the end face 42a is properly completed It is determined that Further, when the voltage V to be measured does not exceed the threshold for some period from time t ₁ to time t ₂ (or the whole), the determination unit 50a, the correction of the end face 42a is not properly completed Is determined. An arbitrary value may be used as a threshold value used as a criterion for determination. For example, using the average value and the standard deviation or the like of the voltage V to be measured in the period from time t ₁ to time t _2, the can be calculated threshold.

  In this determination step, when it is determined that the correction of the end surface 42a is appropriately completed, for example, the cutting blade 44 is attached to the mount flange 42. On the other hand, when it is determined that the correction of the end surface 42a is not properly completed, a re-correction step of correcting the end surface 42a again with the grinding stone 64 is performed. The specific content of the re-correction step may be the same as that of the correction step. In addition, after the re-correction step, it is preferable to determine whether or not the correction of the end face 42a is appropriately completed in the same procedure.

  As described above, in the method for correcting the end face of the mount flange according to the present embodiment, the end face 42a of the mount flange 42 is corrected using the end face correction jig 18 having the conductive grinding stone 64, and then the spindle 40 is rotated. While the grinding wheel 64 and the end surface 42a are brought into contact with each other, the state of contact between the grinding wheel 64 and the end surface 42a is electrically measured, and whether or not the end surface 42a has been corrected based on the measured state of contact. Determine whether.

  That is, according to the end surface correction method of the mount flange according to the present embodiment, it is not necessary to use a measuring device different from the end surface correction jig 18, and therefore it is appropriate and easy to determine whether or not the end surface 42a has been corrected. Can be determined. In addition, according to the cutting device 2 according to the present embodiment, it is possible to appropriately and easily determine whether or not the correction of the end surface 42a has been completed by performing this mount flange end surface correction method.

  In addition, this invention is not limited to description of the said embodiment, A various change can be implemented. For example, in the cutting device 2 according to the above embodiment, a DC power source 72, a resistor 74, and an energization measuring unit 76 different from the DC power source 82, the resistor 84, and the contact state measuring unit 86 are used, but these are the same. Things can be used.

  In the above embodiment, the contact between the end surface 42a of the mount flange 42 and the front end surface of the grinding wheel 64 is detected by measuring the voltage. However, this contact can also be detected by measuring the current. . Similarly, in the above-described embodiment, the state of contact between the end surface 42a of the mount flange 42 and the front end surface of the grinding wheel 64 is measured by measuring the voltage, but this contact state is measured by measuring the current. It can also be measured.

  In addition, the structure, method, and the like according to the above-described embodiment can be appropriately modified and implemented without departing from the scope of the object of the present invention.

DESCRIPTION OF SYMBOLS 2 Cutting device 4 Base 4a, 4b Opening 6 Cassette support stand 8 Cassette 10 X-axis movement table 12 Dust-proof drip-proof cover 14 Holding table 14a Upper surface 14b Recess 14c Recess 16 Chuck table 18 End face correction jig 20 Cutting unit 22 Support structure 24 Cutting unit moving mechanism 26 Y-axis guide rail 28 Y-axis moving plate 30 Y-axis ball screw 32 Z-axis guide rail 34 Z-axis moving plate 36 Z-axis ball screw 38 Z-axis pulse motor 40 Spindle 42 Mount flange 42a End face 44 Cutting blade 46 Camera 48 Cleaning unit 48a Nozzle 50 Control unit (control means)
50a determination unit (determination means)
52a First suction path 52b Second suction path 54 O-ring 56 Support plate (support base)
56a First surface 56b Second surface 56c Concave portion 56d Convex portion 58 Suction path 60 Convex portion 62 Grinding stone fixing portion 62a First surface 62b Second surface 62c Through hole 64 Grinding wheel 72 DC power source 74 Resistor 76 Current measurement unit 82 DC power source 84 Resistor 86 Contact state measurement unit 11 Work piece 13 Dicing tape 15 Frame

Claims (3)

A conductive holding table to which a chuck table for holding the workpiece is mounted; a conductive spindle to which a conductive mounting flange for supporting a cutting blade for cutting the workpiece is fixed to the tip; and An end face correcting jig mounted on the holding table and having a conductive grinding wheel and a conductive support base, and an annular end face of the mount flange for supporting the cutting blade. A method for correcting the end face of the mounting flange to be corrected,
A positioning step for positioning the grinding wheel of the end surface correction jig mounted on the holding table and the end surface of the mount flange fixed to the spindle at a reference position for starting correction of the end surface;
After performing the positioning step, a correction step of correcting the end surface with the grinding wheel by rotating the spindle in the axial direction of the spindle and bringing the end surface into contact with the grinding wheel;
After performing the correction step, a voltage is applied between the holding table and the spindle, and the grinding wheel and the end surface are brought into contact while rotating the spindle, so that the grinding wheel and the end surface are brought into contact with each other. A measurement step for electrically measuring the state of
When the contact state measured in the measurement step is stable, it is determined that the correction of the end surface is completed, and when the contact state is unstable, the correction of the end surface is completed. A determination step for determining that it is not,
And a re-correction step of correcting the end surface again with the grinding wheel when it is determined in the determination step that the correction of the end surface has not been completed.   In the positioning step, the spindle and the holding table are relatively moved while applying a voltage between the holding table and the spindle, and a position where the grinding wheel and the end surface are in contact with each other to be energized is determined. 2. The method for correcting an end face of a mount flange according to claim 1, wherein the reference position is set as a reference position. A conductive holding table to which a chuck table for holding a workpiece, and an end surface correction jig having a conductive grinding wheel and a conductive support base are selectively mounted;
A cutting unit including a conductive spindle to which a conductive mount flange that supports a cutting blade for cutting a workpiece is fixed at a tip;
After the end face correction jig mounted on the holding table is used to correct the annular end face of the mount flange to support the cutting blade, the end face correction jig is used to electrically measure the end face correction jig. And a determining means for determining whether or not the correction of the end face is completed based on a state of contact between the grinding wheel and the end face.