JP2017219625A - Light source device and projector - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a light source device that can improve efficiency in use of light.SOLUTION: There is provided a light source device comprising: a substrate; a light emitting element that is mounted on the substrate; a prism including an incident surface on which light emitted from the light emitting element is made incident, and a reflection surface that changes a light path of the light made incident on the incident surface; and an alignment pattern that is provided on at least one of the incident surface and the reflection surface for performing alignment between the light emitting element and the prism.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a light source device and a projector.

  A light source device using a solid light source such as a semiconductor laser (LD) or a super luminescent diode (SLD) is known as a light source for a projector or the like. As solid-state light sources, edge-emitting light-emitting elements and surface-emitting light-emitting elements are known. Since the edge-emitting light emitting element can easily increase the resonator length as compared with the surface light emitting element, the output can be increased.

  In such a light source device using an edge-emitting light emitting element, the light emitted from the light emitting element travels in the in-plane direction of the substrate on which the light emitting element is disposed. An optical element to be changed is required. For example, a light source device described in Patent Document 1 includes an optical element including a prism portion that reflects light emitted from a light emitting element in a direction away from a main surface of a substrate (light source substrate) on which the optical element is mounted. I have.

JP 2010-45274 A

  In the light source device including the light emitting element and the optical element described above, high accuracy is required for alignment between the light emitting element and the optical element. In the light source device described in Patent Document 1, an alignment mark is provided on the upper surface of the optical element, and the optical element is aligned with the light source substrate using the alignment mark.

  As described above, in the light source device described in Patent Document 1, the alignment mark is used for alignment between the light source substrate and the optical element, and directly aligns the optical element and the light emitting element. It is not possible. For this reason, in the light source device disclosed in Patent Document 1, it is impossible to align the light emitting element and the optical element with high accuracy in the manufacturing process, and the light use efficiency decreases.

  One of the objects according to some aspects of the present invention is to provide a light source device capable of increasing the light use efficiency. Another object of some aspects of the present invention is to provide a projector including the light source device.

The light source device according to the present invention includes:
A substrate,
A light emitting device mounted on the substrate;
A prism having an incident surface on which light emitted from the light emitting element is incident, and a reflecting surface that changes an optical path of the light incident from the incident surface;
An alignment pattern that is provided on at least one of the incident surface and the reflective surface, and performs alignment between the light emitting element and the prism;
including.

  In such a light source device, since the alignment pattern is provided on at least one of the incident surface and the reflecting surface of the prism, the light emitting element and the prism can be directly aligned in the manufacturing process. Therefore, in such a light source device, the light emitting element and the prism can be aligned with high accuracy in the manufacturing process, and the light use efficiency can be increased.

In the light source device according to the present invention,
The alignment pattern has an opening,
When viewed through the prism, the outer edge of the opening may surround the light emitting element.

  In such a light source device, in the manufacturing process, while confirming the light emitting element and the alignment pattern through the prism, the prism (or the light emitting element) is moved so that the outer edge of the opening surrounds the light emitting element. And the prism can be aligned. Therefore, in such a light source device, the light emitting element and the prism can be aligned with high accuracy in the manufacturing process, and the light use efficiency can be increased.

In the light source device according to the present invention,
The alignment pattern has an opening through which light emitted from the light emitting element passes,
The opening may be provided on the incident surface.

  In such a light source device, the light emitting element and the prism can be aligned by monitoring the amount of light emitted from the exit surface of the prism in the manufacturing process. Therefore, in such a light source device, the light emitting element and the prism can be aligned with high accuracy in the manufacturing process, and the light use efficiency can be increased.

In the light source device according to the present invention,
The shape of the opening may be the same as the cross-sectional shape of light on the incident surface.

  In such a light source device, the light emitting element and the prism can be aligned with high accuracy in the manufacturing process, and the light utilization efficiency can be increased.

In the light source device according to the present invention,
The alignment pattern is provided on the reflecting surface and reflects light incident from the incident surface,
The shape of the alignment pattern may be the same as the cross-sectional shape of light on the reflective surface.

  In such a light source device, the light emitting element and the prism can be aligned by monitoring the amount of light emitted from the exit surface of the prism in the manufacturing process. Therefore, in such a light source device, the light emitting element and the prism can be aligned with high accuracy in the manufacturing process, and the light use efficiency can be increased.

In the light source device according to the present invention,
The light emitting element emits light in an in-plane direction of the first surface on which the light emitting element of the substrate is mounted,
The prism may bend light emitted from the light emitting element in a direction away from the first surface.

In such a light source device, since an edge-emitting light emitting element can be used, for example, light output obtained from one light emitting element can be increased as compared with a case where a surface light emitting element is used. Further, in such a light source device, a plurality of edge-emitting light emitting elements can be mounted on the substrate.

In the light source device according to the present invention,
A plurality of the light emitting elements may be mounted on the substrate.

  In such a light source device, since a plurality of light emitting elements are mounted on the substrate, high output can be achieved.

The projector according to the present invention is
A light source device according to the present invention;
A light modulation device that modulates light emitted from the light source device according to image information;
A projection device for projecting an image formed by the light modulation device;
including.

  Since such a projector includes the light source device according to the present invention, high projection luminance can be realized efficiently.

The top view which shows typically the light source device which concerns on 1st Embodiment. Sectional drawing which shows typically the light source device which concerns on 1st Embodiment. Sectional drawing which shows typically the light source device which concerns on 1st Embodiment. Sectional drawing which expands and shows a part of light source device which concerns on 1st Embodiment. The figure which shows typically the alignment pattern of the light source device which concerns on 1st Embodiment. The figure which shows typically the alignment pattern of the light source device which concerns on 1st Embodiment. The figure which shows the modification of the alignment pattern typically. The figure which shows the modification of the alignment pattern typically. The flowchart which shows an example of the manufacturing method of the light source device which concerns on 1st Embodiment. Sectional drawing which shows typically the manufacturing process of the light source device which concerns on 1st Embodiment. Sectional drawing which shows typically the manufacturing process of the light source device which concerns on 1st Embodiment. Sectional drawing which shows typically the manufacturing process of the light source device which concerns on 1st Embodiment. Sectional drawing which shows typically the manufacturing process of the light source device which concerns on 1st Embodiment. Sectional drawing which shows typically the manufacturing process of the light source device which concerns on 1st Embodiment. Sectional drawing which shows typically the manufacturing process of the light source device which concerns on 1st Embodiment. Sectional drawing which shows typically the light source device which concerns on a 1st modification. The flowchart which shows an example of the manufacturing method of the light source device which concerns on a 2nd modification. Sectional drawing which shows typically the manufacturing process of the light source device which concerns on a 2nd modification. Sectional drawing which shows typically the manufacturing process of the light source device which concerns on a 2nd modification. Sectional drawing which shows typically the manufacturing process of the light source device which concerns on a 2nd modification. Sectional drawing which shows typically the manufacturing process of the light source device which concerns on a 2nd modification. Sectional drawing which shows typically the light source device which concerns on 2nd Embodiment. The figure which shows typically the alignment pattern of the light source device which concerns on 2nd Embodiment. The figure which shows typically the alignment pattern of the light source device which concerns on 2nd Embodiment. Sectional drawing which shows typically the manufacturing process of the light source device which concerns on 2nd Embodiment. Sectional drawing which shows typically the light source device which concerns on the 1st modification of 2nd Embodiment. Sectional drawing which shows typically the light source device which concerns on 3rd Embodiment. FIG. 10 is a diagram schematically illustrating a projector according to a fourth embodiment. Sectional drawing which shows the modification of a light source device typically.

  DESCRIPTION OF EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. The embodiments described below do not unduly limit the contents of the present invention described in the claims. In addition, not all of the configurations described below are essential constituent requirements of the present invention.

1. 1. First embodiment 1.1. First, a light source device according to a first embodiment will be described with reference to the drawings. FIG. 1 is a plan view schematically showing the light source device 100 according to the first embodiment. 2 is a cross-sectional view taken along line II-II in FIG. 1 schematically showing the light source device 100 according to the first embodiment. 3 is a cross-sectional view taken along line III-III in FIG. 1 schematically showing the light source device 100 according to the first embodiment. FIG. 4 is an enlarged cross-sectional view of a part of the light source device 100 according to the first embodiment. 1 to 4 show an X axis, a Y axis, and a Z axis as three axes orthogonal to each other.

  As shown in FIGS. 1 to 4, the light source device 100 includes a light source substrate (an example of a substrate) 10, a light emitting element 20, a prism 30, an alignment pattern 40, wirings 50 and 52, and a collimating lens 60. ,including.

  A plurality of light emitting elements 20 are mounted on the light source substrate 10. The light source substrate 10 includes a base (support substrate) 12 and a submount 14.

  The base 12 is, for example, a plate-shaped member (a rectangular parallelepiped member). The material of the base 12 is, for example, Cu, Al, Mo, W, Si, C, Be, Au, a compound thereof (for example, AlN, BeO), an alloy (for example, CuMo), or the like.

  The submount 14 is joined on the base 12. The submount 14 is, for example, a plate-like member. The material of the submount 14 is, for example, AlN, Si, CuW, SiC, BeO, or CuMo. Further, the submount 14 can also be constituted by a multilayer structure (CMC) of a Cu layer and a Mo layer.

  The thermal conductivity of the base 12 is higher than the thermal conductivity of the submount 14, and the thermal conductivity of the submount 14 is higher than the thermal conductivity of the light emitting element 20. Thereby, the base 12 and the submount 14 can function as a heat sink. The thermal expansion coefficient of the submount 14 is preferably close to the thermal expansion coefficient of the light emitting element 20. For example, although not illustrated, when the light emitting element 20 is directly mounted on the base 12 without using the submount 14, due to the difference in thermal expansion coefficient between the base 12 and the light emitting element 20, due to overheating during mounting or heat generation during driving. The light emitting element 20 may be warped and reliability may be reduced. In the present embodiment, by using the submount 14, it is possible to reduce the warpage of the light emitting element 20 caused by the difference in thermal expansion coefficient between the base 12 and the light emitting element 20 and improve the reliability.

  The light emitting element 20 is mounted on the main surface 11 (mounting surface, first surface) of the light source substrate 10, that is, the upper surface of the submount 14. A plurality of light emitting elements 20 (10 in the illustrated example) are mounted on the light source substrate 10. The plurality of light emitting elements 20 are arranged in a plurality of rows and a plurality of columns (two-dimensional array). In the illustrated example, two rows of five light emitting elements 20 arranged along the Y axis are arranged in the X axis direction. That is, the light emitting elements 20 are arranged in 5 rows and 2 columns. The arrangement of the light emitting elements 20 on the main surface 11 of the light source substrate 10 is not particularly limited.

The light emitting element 20 is an edge emitting semiconductor light emitting element. The light emitting element 20 is, for example, a semiconductor laser or an SLD (super luminescent diode). Since the SLD can emit light with reduced speckle noise compared to a semiconductor laser and can achieve higher output than an LED, for example, the light source device 100 can be used as a light source such as a projector. It is suitable for use. The light emitting element 20 emits light in the in-plane direction of the main surface 11 of the light source substrate 10 (X-axis direction in the illustrated example). Hereinafter, a case where the light emitting element 20 is an InGaAlP-based (red) SLD will be described with reference to FIG.

  As illustrated in FIG. 4, the light emitting element 20 includes a stacked body 201 including an active layer 206, a first electrode 210, and a second electrode 212.

  The stacked body 201 includes a base layer 202, a first cladding layer 204, an active layer 206, and a second cladding layer 208. The stacked body 201 is formed by epitaxially growing the first cladding layer 204, the active layer 206, and the second cladding layer 208 in this order on the base layer 202.

  The base layer 202 includes, for example, a semiconductor substrate and a buffer layer. As the semiconductor substrate, for example, a first conductivity type (for example, n-type) GaAs substrate or the like can be used. The buffer layer is, for example, an n-type GaAs layer, an AlGaAs layer, an InGaP layer, or the like. When the buffer layer is epitaxially grown, the crystallinity of the layer formed thereabove can be improved.

  The first cladding layer 204 is, for example, an n-type InGaAlP layer.

  The active layer 206 is sandwiched between the first cladding layer 204 and the second cladding layer 208. The active layer 206 has, for example, a multiple quantum well (MQW) structure in which three quantum well structures each composed of an InGaP well layer and an InGaAlP barrier layer are stacked.

  The active layer 206 is a layer capable of generating light by being injected with current. A part of the active layer 206 constitutes an optical waveguide 209 that guides light generated in the active layer 206.

  The optical waveguide 209 connects the side surface of the active layer 206 on the −X axis direction side and the side surface of the active layer 206 on the + X axis direction side. Although not shown, the optical waveguide 209 is about 0.5 to 10 degrees with respect to the perpendicular of the light emitting end face 22 when viewed from the Z-axis direction (stacking direction of the active layer 206 and the first cladding layer 204). Inclined to form an angle. Thereby, laser oscillation can be suppressed.

  The light generated in the active layer 206 is emitted in the + X-axis direction from the light emission end face 22 provided on the side surface on the + X-axis direction side of the active layer 206 and is emitted on the side surface on the −X-axis direction side. Injected from the end face 22 in the −X-axis direction.

  The second cladding layer 208 is, for example, a second conductivity type (for example, p-type) InGaAlP layer.

  The first electrode 210 is provided under the second cladding layer 208. A contact layer (not shown) may be provided between the first electrode 210 and the second cladding layer 208. For example, the current path between the electrodes 210 and 212 is determined by the planar shape (the shape viewed from the Z-axis direction) of the contact surface between the first electrode 210 and a layer (contact layer) in ohmic contact with the first electrode 210. As a result, the planar shape of the optical waveguide 209 is determined. The second electrode 212 is provided on the base layer 202. The first electrode 210 is connected to the first wiring 50. The second electrode 212 is connected to the second wiring 52.

The light emitting element 20 is mounted on the light source substrate 10 in a junction-down state. That is, the light emitting element 20 is mounted such that the active layer 206 is positioned closer to the submount 14 than the base layer 202. Thereby, since the active layer 206 which is a heat generation source can be brought close to the submount 14, heat dissipation can be improved.

  The light-emitting element 20 may be a so-called refractive index waveguide type in which light is confined by providing a refractive index difference in the active layer 206, or an optical waveguide generated by injecting a current becomes a waveguide region as it is. A so-called gain waveguide type may be used.

  Although the InGaAlP light emitting element has been described above, any material system capable of forming an optical waveguide can be used as the light emitting element 20. For example, semiconductor materials such as AlGaN, GaN, InGaN, GaAs, AlGaAs, InGaAs, InGaAsP, InP, GaP, AlGaP, and ZnCdSe can be used.

  The prism 30 changes the optical path of the light emitted from the light emitting element 20. Specifically, the prism 30 bends the light emitted from the light emitting element 20 in a direction away from the main surface 11 of the light source substrate 10. In the illustrated example, the prism 30 bends light emitted from the light emitting element 20 and traveling in the X-axis direction in the + Z-axis direction.

  The prism 30 is reflected by the incident surface 32a on which the light emitted from the light emitting element 20 is incident, the reflecting surface 32b that reflects the light incident from the incident surface 32a, and changes the optical path of the light, and the reflecting surface 32b. And an emission surface 32c from which light is emitted.

  The incident surface 32 a is a surface perpendicular to the main surface 11 of the light source substrate 10. Although not shown, an antireflection film may be formed on the incident surface 32a.

  The reflection surface 32 b is inclined 45 degrees with respect to the main surface 11 of the light source substrate 10. That is, the reflecting surface 32 b is inclined 45 degrees with respect to the optical axis of the light emitted from the light emitting element 20. A reflective film 34 is provided on the reflective surface 32b. The reflective film 34 is, for example, a dielectric multilayer film. The light emitted from the light emitting element 20 is reflected by the reflecting surface 32 b and bent in a direction away from the main surface 11 of the light source substrate 10. In addition, the inclination with respect to the optical axis of the light of the reflecting surface 32b is not limited to 45 degrees, and the light traveling in the in-plane direction of the main surface 11 of the light source substrate 10 is bent in the direction away from the main surface 11 (+ Z axis direction side). Any tilt can be used.

  The emission surface 32 c is a surface parallel to the main surface 11 of the light source substrate 10. The exit surface 32 c is a surface from which light is emitted in the prism 30. The exit surface 32 c is connected to the base portion 36 of the optical element 35.

  The optical element 35 includes a plurality of prisms 30. The optical element 35 is an element in which a plurality of prisms 30 are arranged in a plurality of rows and a plurality of columns (array form). That is, the plurality of prisms 30 are integrally formed. The optical element 35 is formed, for example, using a transparent substrate made of an inorganic material such as glass or quartz, or a resin material such as plastic as a base material.

  In the optical element 35, a portion that protrudes in a prism shape from a surface 37 that defines the hollow portion 2 (a surface that defines the bottom surface of the recess) forms a prism 30. One prism 30 is provided for one light emitting end face 22 of the light emitting element 20. The plurality of prisms 30 corresponding to the plurality of light emission end faces 22 arranged along the Y-axis direction may be continuous. In the example illustrated in FIG. 1, a plurality (five) of prisms 30 corresponding to the light emission end faces 22 of the plurality (five) of light emitting elements 20 arranged along the Y axis are continuous.

The optical element 35 has a recess. The concave portion of the optical element 35 forms a space (hollow portion 2) in which the light emitting element 20 is accommodated. Specifically, the optical element 35 constitutes the hollow portion 2 together with the light source substrate 10, and the light emitting element 20 is accommodated in the hollow portion 2. That is, the light emitting element 20 is accommodated in a space (hollow part 2) surrounded by the light source substrate 10 and the optical element 35.

  The optical element 35 has a support portion 38 bonded to the light source substrate 10. The support portion 38 is bonded to the main surface 11 of the light source substrate 10. The light emitting element 20 can be hermetically sealed by the light source substrate 10 and the optical element 35.

  The alignment pattern 40 is a pattern for performing alignment between the light emitting element 20 and the prism 30. The alignment between the light emitting element 20 and the prism 30 means adjusting the relative positional relationship between the light emitting element 20 and the prism 30. By using the alignment pattern 40, the position of the light emitting element 20 with respect to the prism 30 or the position of the prism 30 with respect to the light emitting element 20 can be adjusted.

  The alignment pattern 40 is provided on the incident surface 32 a of the prism 30. The alignment pattern 40 is provided for each light emitting end face 22 of the light emitting element 20. The alignment pattern 40 is composed of, for example, a metal layer (metallized layer). The alignment pattern 40 is not limited to a metal layer, and may be a layer made of a material that allows the shape of the alignment pattern 40 to be confirmed when viewed through the prism 30.

  5 and 6 are diagrams schematically showing the alignment pattern 40. FIG. FIG. 5 is a view of the alignment pattern 40 as seen through the incident surface 32a of the prism 30 (viewed from the direction of arrow A shown in FIG. 4). 6 is a view of the alignment pattern 40 viewed from the exit surface 32c side of the prism 30 (viewed from the direction of arrow B shown in FIG. 4).

  The alignment pattern 40 has an opening 42. When viewed through the prism 30 (viewed from the exit surface 32 c of the prism 30), the outer edge of the opening 42 surrounds the light emitting element 20. That is, the alignment pattern 40 is provided so as to surround the light emitting element 20 when viewed through the prism 30.

  The opening 42 has the same shape as the shape of the light emitting element 20 (that is, the shape of the side surface including the light emitting end face 22 of the light emitting element 20) when viewed through the prism 30. Further, the size (area) of the opening 42 is the same as the size (area) of the light emitting element 20. Therefore, when viewed through the prism 30, the light emitting element 20 and the opening 42 are overlapped (completely overlapped).

  Note that the size of the opening 42 may be larger than the size of the light emitting element 20 when viewed through the prism 30. In this case, the size of the opening 42 is appropriately set according to the required alignment accuracy between the light emitting element 20 and the prism 30.

  Here, viewing through the prism 30 (viewing from the exit surface 32c of the prism 30) refers to viewing through the prism 30, for example, viewing an image reflected on the reflecting surface 32b of the prism 30 from the exit surface 32c. . Further, viewing through the prism 30 is not only when viewing directly from the exit surface 32 c of the prism 30, but also through the base 36 of the optical element 35 and other members such as the collimating lens 60, the exit surface 32 c of the prism 30. Including the case of seeing from.

  The shape of the alignment pattern 40 is not particularly limited as long as the alignment between the light emitting element 20 and the prism 30 can be performed. For example, the alignment pattern 40 may not have the opening 42. As shown in FIGS. 7 and 8, the alignment pattern 40 may be provided only at the corners of the light emitting element 20 when viewed through the prism 30.

  The alignment method using the alignment pattern 40 will be described in “1.2. Manufacturing method of light source device” described later.

  The first wiring 50 is provided on the main surface 11 of the light source substrate 10. The first wiring 50 is electrically connected to the first electrode 210 of the light emitting element 20. The second wiring 52 is provided on the surface 37 of the optical element 35. The second wiring 52 is electrically connected to the second electrode 212 of the light emitting element 20.

  The first wiring 50 and the second wiring 52 are wirings for driving the light emitting element 20. The plurality of light emitting elements 20 arranged along the Y-axis direction are connected in series by the plurality of first wirings 50 and the plurality of second wirings 52. The first wiring 50 drawn out from the space (hollow part 2) in which the light emitting element 20 is accommodated is connected to the flexible substrate 54.

  As shown in FIG. 3, between the adjacent light emitting elements 20, the first wiring 50 connected to the first electrode 210 of one light emitting element 20 and the second electrode 212 of the other light emitting element 20 are connected. The second wiring 52 is connected. In the illustrated example, the first wiring 50 and the second wiring 52 are connected by forming the second wiring 52 on the convex portion 39 provided on the surface 37 of the optical element 35.

  The collimating lens 60 collimates the light reflected by the prism 30 (folded light). Thereby, the light that has passed through the collimating lens 60 is emitted from the collimating lens 60 as parallel light (or substantially parallel light). A plurality of collimating lenses 60 (20 in the illustrated example) are provided in a one-to-one correspondence with the plurality of prisms 30.

  The optical element 65 includes a plurality of collimating lenses 60. The optical element 65 is an element in which a plurality of collimating lenses 60 are arranged in a plurality of rows and a plurality of columns (array form). That is, the plurality of collimating lenses 60 are integrally formed. The optical element 65 is formed using, for example, a transparent substrate made of an inorganic material such as glass or quartz, or a resin material such as plastic. The optical element 65 is bonded onto the optical element 35.

  In the light source device 100, the light emitted from the light emitting end face 22 of the light emitting element 20 is incident from the incident surface 32 a of the prism 30, reflected by the reflecting surface 32 b, and bent in a direction away from the main surface 11 of the light source substrate 10. . The light reflected by the reflecting surface 32 b is collimated by the collimator lens 60 and emitted as parallel light (or substantially parallel light) L. Since the light source device 100 includes the plurality of light emitting elements 20, the light source device 100 can emit a light beam composed of a plurality of parallel lights L.

1.2. Method for Manufacturing Light Source Device Next, a method for manufacturing the light source device 100 according to the first embodiment will be described with reference to the drawings. FIG. 9 is a flowchart illustrating an example of a method for manufacturing the light source device 100 according to the first embodiment. 10 to 15 are cross-sectional views schematically showing the manufacturing process of the light source device 100. 10, 12, and 14 correspond to FIG. 2, and FIGS. 11, 13, and 15 correspond to FIG. 3.

  First, as shown in FIGS. 10 and 11, the alignment pattern 40 and the second wiring 52 are formed on the optical element 35 (step S100).

The alignment pattern 40 is formed on the incident surface 32 a of the prism 30, and the second wiring 52 is formed on the surface 37 of the optical element 35. The alignment pattern 40 and the second wiring 52 are formed by vacuum deposition, sputtering, plating, or the like. The alignment pattern 40 and the second wiring 52 may be formed simultaneously in the same process or may be formed in separate processes.

  Next, an antireflection film (not shown) is formed on the incident surface 32 a of the prism 30, and a reflective film 34 is formed on the reflective surface 32 b of the prism 30. The antireflection film and the reflection film 34 are formed by, for example, a vacuum deposition method or the like. The alignment pattern 40 and the second wiring 52 may be formed after the antireflection film and the reflection film 34 are formed.

  Next, as shown in FIGS. 12 and 13, the light emitting element 20 is aligned with the prism 30 (step S102).

  The alignment of the light emitting element 20 with respect to the prism 30 is performed using the alignment pattern 40. Specifically, as shown in FIG. 12, the light emitting element 20 is moved through the base portion 36 of the optical element 35 through the prism 30 (from the direction of arrow C) while viewing the alignment pattern 40 and the light emitting element 20. Position. As shown in FIG. 6, the alignment is performed so that the outer edge of the opening 42 of the alignment pattern 40 surrounds the light emitting element 20 when viewed through the prism 30 (the opening 42 and the light emitting element 20 completely overlap each other). (Ii) by moving the light emitting element 20.

  When viewing the alignment pattern 40 and the light emitting element 20 through the prism 30, the alignment pattern 40 and the light emitting element 20 may be viewed with the naked eye through the prism 30, or may be magnified with a CCD camera or the like.

  In the present embodiment, the alignment of the light emitting element 20 with respect to the prism 30 can be performed for each light emitting element 20.

  Next, the aligned light emitting element 20 is bonded to the optical element 35 (step S104). The light emitting element 20 is bonded to the optical element 35 using a solder material such as AuSn. At this time, the second electrode 212 of the light emitting element 20 is electrically connected to the second wiring 52 formed in the optical element 35.

  The light emitting element 20 is bonded to the optical element 35 by curing the silver paste in an oven or the like after aligning the light emitting element 20 with the prism 30 in a state where silver paste or the like is applied onto the second wiring 52. May be.

  Next, as shown in FIGS. 14 and 15, the light source substrate 10 is formed by bonding the submount 14 on which the first wiring 50 is formed to the base 12 (step S <b> 106). After forming the light source substrate 10 (after step S106), a step of forming the alignment pattern 40 and the second wiring 52 on the optical element 35 (step S100) and a step of aligning the light emitting element 20 (step S102). ), A step of bonding the light emitting element 20 to the optical element 35 (step S104) may be performed.

  Next, as shown in FIGS. 2 and 3, the light emitting element 20 placed on the optical element 35 is mounted on the light source substrate 10 (step S108). At this time, the support portion 38 of the optical element 35 and the light source substrate 10 (submount 14) are also joined at the same time.

  Specifically, the first electrode 210 of the light emitting element 20 and the first wiring 50 formed on the submount 14 are connected using solder such as AuSn or silver paste, and the first wiring 50 is connected to the first wiring 50. The light emitting element 20 is mounted on the light source substrate 10 by connecting the second wiring 52 formed on the convex portion 39 of the optical element 35.

  The support 38 and the submount 14 are joined using solder, silver paste, UV curable adhesive, thermosetting adhesive, low melting point glass, or the like. In addition, when joining the support part 38 and the submount 14 using a solder or silver paste, it is preferable to perform a metallization process on the joining surface of the support part 38 in advance. By joining the optical element 35 to the light source substrate 10, the hollow portion 2 is formed, and the light emitting element 20 is accommodated in the hollow portion 2.

  Next, the optical element 65 is placed (bonded) on the optical element 35. Next, the flexible substrate 54 is connected to the first wiring 50.

  The light source device 100 can be manufactured through the above steps.

  The light source device 100 has the following features, for example.

  In the light source device 100, the alignment pattern 40 is provided on the incident surface 32 a of the prism 30. Therefore, as described above, in the manufacturing process of the light source device 100, the alignment between the alignment pattern 40 and the light emitting element 20 is performed while checking the alignment pattern 40 and the light emitting element 20 through the prism 30. be able to. That is, in the light source device 100, the light emitting element 20 and the prism 30 can be directly aligned in the manufacturing process. Therefore, in the light source device 100, the light emitting element 20 and the prism 30 can be aligned with high accuracy in the manufacturing process, and the light use efficiency can be increased.

  In the light source device 100, the alignment pattern 40 has an opening 42, and the outer edge of the opening 42 surrounds the light emitting element 20 when viewed through the prism 30. Therefore, in the manufacturing process, while confirming the light emitting element 20 and the alignment pattern 40 through the prism 30, the light emitting element 20 is moved so that the outer edge of the opening 42 surrounds the light emitting element 20. Position alignment with the prism 30 can be performed. Therefore, in the light source device 100, the light emitting element 20 and the prism 30 can be aligned with high accuracy in the manufacturing process, and the light use efficiency can be increased.

  In the light source device 100, the light emitting element 20 emits light in the in-plane direction of the main surface 11 of the light source substrate 10, and the prism 30 separates the light emitted from the light emitting element 20 from the main surface 11 of the light source substrate 10. Bend in the direction. Therefore, in the light source device 100, an edge-emitting light emitting element can be used. For example, the light output obtained from one light emitting element 20 can be increased as compared with a case where a surface emitting light emitting element is used. Further, in the light source device 100, since a plurality of edge-emitting light emitting elements 20 can be mounted on the light source substrate 10, high output can be achieved.

  The manufacturing method of the light source device 100 according to the present embodiment emits light while confirming the alignment pattern 40 and the light emitting element 20 through the step of forming the alignment pattern 40 on the incident surface 32a of the prism 30 and the prism 30. Aligning the element 20 and the prism 30. Therefore, according to this embodiment, the light emitting element 20 and the prism 30 can be directly aligned, and the light emitting element 20 and the prism 30 can be aligned with high accuracy. Therefore, the light source device 100 with high light use efficiency can be manufactured.

1.3. Modified Example Next, a modified example of the light source device 100 according to the first embodiment will be described. Hereinafter, differences from the example of the light source device 100 described above will be described, and description of similar points will be omitted.

(1) First Modification First, a first modification will be described. FIG. 16 is a cross-sectional view schematically showing a light source device 200 according to a first modification of the first embodiment, and corresponds to FIG. Hereinafter, in the light source device 200, members having the same functions as those of the constituent members of the light source device 100 are denoted by the same reference numerals, and detailed description thereof is omitted.

  In the example of the light source device 100 described above, the alignment pattern 40 is provided on the incident surface 32a of the prism 30 as shown in FIG. 4, but in the light source device 200, as shown in FIG. Is provided on the reflecting surface 32 b of the prism 30.

  Since the reflecting surface 32 b of the prism 30 is a surface inclined by 45 degrees with respect to the surface 37 of the prism 30, the alignment pattern 40 can be easily formed in the light source device 200. For example, since the incident surface 32 a of the prism 30 is a surface perpendicular to the surface 37 of the prism 30, it is difficult to form the alignment pattern 40 compared to the reflective surface 32 b.

  The alignment pattern 40 is formed on the reflective film 34 in the illustrated example. The reflection film 34 is, for example, a dielectric multilayer film, and the alignment pattern 40 can be confirmed through the reflection film 34 when alignment between the alignment pattern 40 and the light emitting element 20 is performed.

  In the light source device 200, the shape and size of the alignment pattern 40 when viewed through the prism 30 are the same as those of the light source device 100 described above.

  The manufacturing method of the light source device 200 is the same as the manufacturing method of the light source device 100 described above, and the description thereof is omitted.

  In the light source device 200, the alignment pattern 40 is provided on the reflecting surface 32 b of the prism 30. Therefore, in the light source device 200, as in the light source device 100 described above, the light emitting element 20 and the prism 30 can be aligned with high accuracy in the manufacturing process, and the light use efficiency can be increased.

(2) Second Modification Next, a second modification will be described. FIG. 17 is a flowchart illustrating an example of a method for manufacturing the light source device 100 according to the second modification. In addition, the structure of the light source device which concerns on a 2nd modification is the same as the light source device 100 shown in FIGS. 1-4 mentioned above, and illustration and description are abbreviate | omitted.

  In the manufacturing method of the light source device 100 described above, as shown in FIG. 9, the light emitting element 20 is aligned with the prism 30, and after the light emitting element 20 is bonded to the optical element 35 (after step S104), the optical element The light emitting device 20 placed on the light source substrate 10 was mounted on the light source substrate 10 (step S108).

  On the other hand, in the method for manufacturing the light source device 100 according to the second modified example, as shown in FIG. 17, the prism for the light emitting element 20 is mounted after the light emitting element 20 is mounted on the light source substrate 10 (after step S204). 30 alignment is performed (step S206).

  18-21 is sectional drawing which shows typically the manufacturing process of the light source device 100 which concerns on a 2nd modification. 18 and 20 correspond to FIG. 2, and FIGS. 19 and 21 correspond to FIG.

  First, as shown in FIGS. 10 and 11, the alignment pattern 40 and the second wiring 52 are formed on the optical element 35 (step S200). This step is the same as step S100 described above, and a description thereof is omitted.

  Next, as shown in FIGS. 14 and 15, the light source substrate 10 is formed by bonding the submount 14 on which the first wiring 50 is formed to the base 12 (step S <b> 202). This step is the same as step S106 described above, and a description thereof is omitted.

  Next, as shown in FIGS. 18 and 19, the light emitting element 20 is mounted on the light source substrate 10 (submount 14) (step S204). Specifically, the light emitting element 20 is connected to the light source substrate by connecting the first electrode 210 of the light emitting element 20 and the first wiring 50 formed on the submount 14 using solder such as AuSn or silver paste. 10 is implemented.

  Next, as shown in FIGS. 20 and 21, the prism 30 is aligned with the light emitting element 20 mounted on the light source substrate 10 (step S206).

  The alignment of the prism 30 with respect to the light emitting element 20 is performed using the alignment pattern 40. Specifically, as shown in FIG. 6, while looking at the alignment pattern 40 and the light emitting element 20 through the base 30 of the optical element 35 through the prism 30 (from the direction of arrow D shown in FIG. 20), the optical element 35 is moved to perform alignment between the alignment pattern 40 and the light emitting element 20.

  In this step, since the light emitting element 20 is mounted on the light source substrate 10, the prism 30 is aligned for each light emitting element 20, unlike the alignment step (step S <b> 102) of the light emitting element 20 with respect to the prism 30 described above. I can't. That is, in this step, the optical element 35 (the plurality of prisms 30) is aligned with respect to the entire plurality of light emitting elements 20.

  Next, the aligned optical element 35 is bonded to the light source substrate 10 (step S208). Specifically, the support portion 38 of the optical element 35 is bonded to the submount 14. At this time, the second electrode 212 of the light emitting element 20 is electrically connected to the second wiring 52 formed in the optical element 35.

  Next, as shown in FIGS. 2 and 3, the optical element 65 is placed (bonded) on the optical element 35. Next, the flexible substrate 54 is connected to the first wiring 50.

  The light source device 100 can be manufactured through the above steps.

  According to the method for manufacturing the light source device 100 according to the second modification, the light emitting element 20 and the prism 30 can be directly aligned as in the method for manufacturing the light source apparatus shown in FIG. 20 and the prism 30 can be aligned with high accuracy. Therefore, the light source device 100 with high light use efficiency can be manufactured.

  Note that the method of manufacturing the light source device 100 according to the second modification can also be applied to the light source device 200 according to the first modification.

2. Second Embodiment 2.1. Next, a light source device according to a second embodiment will be described with reference to the drawings. FIG. 22 is a cross-sectional view schematically showing the light source device 300 according to the second embodiment. FIG. 22 corresponds to FIG.

23 and 24 show an alignment pattern 40 of the light source device 300 according to the second embodiment.
FIG. 23 is a view of the alignment pattern 40 as seen through the incident surface 32a of the prism 30 (viewed from the direction of arrow A shown in FIG. 22). 24 is a view of the alignment pattern 40 as viewed from the exit surface 32c side of the prism 30 (viewed from the direction of arrow B shown in FIG. 22).

  Hereinafter, in the light source device 300 according to the second embodiment, members having the same functions as the constituent members of the light source device 100 according to the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

  In the light source device 100 described above, as shown in FIGS. 4, 5, and 6, the alignment pattern 40 is viewed through the prism 30 (viewed from the exit surface 32 c of the prism 30), and the shape of the light-emitting element 20. It had an opening 42 having the same shape.

  On the other hand, in the light source device 300, as shown in FIGS. 22, 23, and 24, the alignment pattern 40 has an opening 44 having the same shape as the cross-sectional shape of the light on the incident surface 32a of the prism 30. Yes.

  The alignment pattern 40 is provided on the incident surface 32 a of the prism 30. The opening 44 is for allowing light emitted from the light emitting element 20 to pass therethrough. That is, the portion other than the opening 44 of the alignment pattern 40 blocks (does not pass) the light emitted from the light emitting element 20. The shape of the opening 44 of the alignment pattern 40 is the same as the cross-sectional shape of the light on the incident surface 32a. Further, the size (area) of the opening 44 of the alignment pattern 40 is the same as the size (area) of the light cross section on the incident surface 32a.

  For example, when one side of the prism 30 is 1 mm, the distance between the light emitting end face 22 of the light emitting element 20 and the incident surface 32a of the prism 30 is, for example, about 50 μm to 100 μm, and the opening 44 of the alignment pattern 40 The size (diameter) is, for example, about 50 μm to 150 μm.

  Note that the size of the opening 44 of the alignment pattern 40 may be larger than the size of the cross section of the light on the incident surface 32a. In this case, the size of the opening 44 of the alignment pattern 40 is appropriately set according to the required alignment accuracy between the light emitting element 20 and the prism 30.

2.2. Method for Manufacturing Light Source Device Next, a method for manufacturing the light source device 300 according to the second embodiment will be described. Hereinafter, the manufacturing method of the light source device 300 according to the second embodiment will be described with respect to differences from the manufacturing method of the light source device 100 according to the first embodiment, and description of similar points will be omitted.

  The manufacturing method of the light source device 300 according to the second embodiment is different from the manufacturing method of the light source device 300 according to the first embodiment shown in FIG. 9 in the step of aligning the light emitting element 20 with respect to the prism 30 (step S102). .

  FIG. 25 is a cross-sectional view schematically showing a manufacturing process of the light source device 300 according to the second embodiment, and corresponds to FIG.

In the present embodiment, the alignment of the light emitting element 20 with respect to the prism 30 is the light L emitted from the exit surface 32 c of the prism 30 through the opening 44 of the alignment pattern 40 while emitting light from the light emitting element 20. The light amount is monitored by the light detection device 4. Specifically, the light emitting element 20 is moved so that the amount of light L emitted from the emission surface 32 c of the prism 30 is maximized, and the light emitting element 20 is aligned.

  The alignment of the light emitting element 20 with respect to the prism 30, that is, the monitoring of the light amount of the light L may be performed for each light emitting element 20, or may be performed for the entire light emitting elements 20 arranged on the optical element 35.

  The light source device 300 has the following features, for example.

  In the light source device 300, the alignment pattern 40 has an opening 44 through which light emitted from the light emitting element 20 passes, and the opening 44 is provided on the incident surface 32 a of the prism 30. The shape of the opening 44 is the same as the cross-sectional shape of the light on the incident surface 32 a of the prism 30. Therefore, as described above, in the manufacturing process of the light source device 300, the alignment of the light emitting element 20 with respect to the prism 30 can be performed by monitoring the amount of light emitted from the exit surface 32c of the prism 30. That is, the light emitting element 20 and the prism 30 can be directly aligned. Therefore, in the light source device 300, the light emitting element 20 and the prism 30 can be aligned with high accuracy in the manufacturing process, and the light use efficiency can be increased.

  Furthermore, since the opening 44 of the alignment pattern 40 is provided on the incident surface 32a of the prism 30, for example, compared to the case where the opening 44 is provided on the reflecting surface 32b and the exit surface 32c of the prism 30, for example. The distance between the light emitting end face 22 of the light emitting element 20 and the opening 44 can be reduced. Therefore, the light emitting element 20 and the prism 30 can be aligned with higher accuracy.

2.3. Modified Example Next, a modified example of the light source device 300 according to the second embodiment will be described. Hereinafter, differences from the example of the light source device 300 described above will be described, and description of similar points will be omitted.

(1) First Modification First, a first modification will be described. FIG. 26 is a cross-sectional view schematically showing a light source device 400 according to a first modification of the second embodiment, and corresponds to FIG. Hereinafter, in the light source device 400, members having the same functions as the constituent members of the light source devices 100 and 300 are denoted by the same reference numerals, and detailed description thereof is omitted.

  In the example of the light source device 300 described above, the alignment pattern 40 is provided on the incident surface 32a of the prism 30 as shown in FIG. 22. However, in the light source device 400, as shown in FIG. Is provided on the reflecting surface 32 b of the prism 30.

  The alignment pattern 40 is a reflective film that reflects light incident from the incident surface 32 a of the prism 30. In the present embodiment, the alignment pattern 40 is provided on the reflecting surface 32 b of the prism 30 without providing the reflecting film 34.

  The shape of the alignment pattern 40 is the same as the cross-sectional shape of the light on the reflecting surface 32 b of the prism 30. Further, the size (area) of the alignment pattern 40 is the same as the size (area) of the light cross section on the reflecting surface 32b of the prism 30, for example.

  Note that the size of the alignment pattern 40 may be larger than the size of the cross section of the light on the reflecting surface 32b. In this case, the size of the alignment pattern 40 is appropriately set according to the required alignment accuracy between the light emitting element 20 and the prism 30.

  In the manufacturing process of the light source device 400, the alignment of the light emitting element 20 is performed by monitoring the amount of light emitted from the exit surface 32c of the prism 30, as in the example of the light source device 300 described above.

  The manufacturing method of the light source device 400 is the same as the manufacturing method of the light source device 300 described above, and the description thereof is omitted.

  In the light source device 400, the alignment pattern 40 is provided on the reflecting surface 32 b of the prism 30, and reflects the light incident from the incident surface 32 a of the prism 30. The shape of the alignment pattern 40 is the same as the cross-sectional shape of the light on the reflecting surface 32b. Therefore, in the light source device 400, as in the light source device 300 described above, in the manufacturing process, the light emitting element 20 and the prism 30 can be aligned with high accuracy, and the light use efficiency can be increased.

(2) Second Modification Next, a second modification will be described. The manufacturing method of the light source device 300 is not limited to the manufacturing method described in “2.2. Manufacturing Method of Light Source Device”. For example, in the manufacturing method of the light source device 300, the manufacturing method described in “(2) Second Modification” in “1.3. Modifications” can be applied.

  That is, in the manufacturing process of the light source device 300, after mounting the light emitting element 20 on the light source substrate 10, the prism 30 (optical element 35) may be aligned with the mounted light emitting element 20.

  According to the manufacturing method of the light source device 300 according to the second modified example, the light emitting element 20 and the prism 30 (the optical element 35) are similar to the manufacturing method of the light source device described in “2.2. Therefore, the light emitting element 20 and the prism 30 (optical element 35) can be aligned with high accuracy. Therefore, the light source device 300 with high light use efficiency can be manufactured.

  Note that the method of manufacturing the light source device 300 according to the second modification can also be applied to the light source device 400 according to the first modification.

3. Third Embodiment Next, a light source device according to a third embodiment will be described with reference to the drawings. FIG. 27 is a cross-sectional view schematically showing a light source device 500 according to the third embodiment, and corresponds to FIG. Hereinafter, in the light source device 500 according to the third embodiment, members having the same functions as the constituent members of the light source devices 100, 200, 300, and 400 described above are denoted by the same reference numerals, and detailed description thereof is omitted. .

  In the light source device 500, as shown in FIG. 27, the alignment pattern 40 is provided on both the incident surface 32a and the reflecting surface 32b of the prism 30. In the illustrated example, the prism 30 is provided with an alignment pattern 40 having an opening 42 on the incident surface 32a. Further, the reflecting surface 32b of the prism 30 is provided with an alignment pattern 40 that has the same shape as the cross-sectional shape of light on the reflecting surface 32b and reflects light.

  The combination of the alignment patterns 40 provided on the incident surface 32a and the reflecting surface 32b of the prism 30 is not limited to this example.

When aligning the light emitting element 20 with respect to the prism 30 in the manufacturing process of the light source device 500, first, using the alignment pattern 40 provided on the incident surface 32a of the prism 30, the alignment pattern 40 over the prism 30 is used. The light emitting element 20 is aligned while looking at the light emitting element 20. Next, using the alignment pattern 40 provided on the reflecting surface 32 b of the prism 30, the amount of light emitted from the emission surface 32 c of the prism 30 is monitored to align the light emitting element 20. Thereby, alignment of the light emitting element 20 can be performed easily and accurately. The same can be done when positioning the prism 30 with respect to the light emitting element 20.

4). Fourth Embodiment Next, a projector according to a fourth embodiment will be described with reference to the drawings. FIG. 28 is a diagram schematically showing a projector 900 according to the fourth embodiment.

  As shown in FIG. 28, the projector 900 includes a red light source 100R that emits red light, green light, and blue light, a green light source 100G, and a blue light source 100B. The red light source 100R, the green light source 100G, and the blue light source 100B are light source devices according to the present invention. Hereinafter, an example in which the light source device 100 is used as the light source device according to the present invention will be described. For the sake of convenience, in FIG. 28, the casing that constitutes the projector 900 is omitted, and the light sources 100R, 100G, and 100B are simplified.

  The projector 900 further includes transmissive liquid crystal light valves (light modulation devices) 904R, 904G, and 904B, and a projection lens (projection device) 908.

  Light emitted from the light sources 100R, 100G, and 100B is incident on the liquid crystal light valves 904R, 904G, and 904B. Each of the liquid crystal light valves 904R, 904G, and 904B modulates incident light according to image information. The projection lens 908 enlarges and projects the image formed by the liquid crystal light valves 904R, 904G, and 904B onto a screen (display surface) 910.

  In addition, the projector 900 can include a cross dichroic prism (color light combining unit) 906 that combines light emitted from the liquid crystal light valves 904R, 904G, and 904B and guides the light to the projection lens 908.

  The three color lights modulated by the liquid crystal light valves 904R, 904G, and 904B are incident on the cross dichroic prism 906. This prism is formed by bonding four right-angle prisms, and a dielectric multilayer film that reflects red light and a dielectric multilayer film that reflects blue light are arranged on the inner surface thereof so as to be orthogonal to each other. These dielectric multilayer films combine the three color lights to form light representing a color image. The synthesized light is projected onto the screen 910 by the projection lens 908 which is a projection optical system, and an enlarged image is displayed.

  Since the projector 900 includes the light source device 200 with high light use efficiency, high projection luminance can be realized efficiently.

  The projector 900 is a method (backlight method) in which the light source device 100 is disposed immediately below the liquid crystal light valves 904R, 904G, and 904B, and condensing and uniform illumination are performed simultaneously using the collimating lens 60 (see FIG. 1). . Therefore, the projector 900 can reduce the loss of the optical system and the number of parts.

In the above example, a transmissive liquid crystal light valve is used as the light modulation device. However, a light valve other than liquid crystal may be used, or a reflective light valve may be used. Examples of such a light valve include a reflection type liquid crystal light valve and a digital micromirror device (Digital Micromirror Device). Further, the configuration of the projection optical system is appropriately changed depending on the type of light valve used.

  Further, the light source 100R, 100G, 100B has scanning means that is an image forming apparatus that displays an image of a desired size on the display surface by causing the light from the light source 100R, 100G, 100B to scan on the screen. The present invention can also be applied to a light source device of a simple scanning image display device (projector).

5). Others The present invention is not limited to the above-described embodiments, and various modifications can be made within the scope of the gist of the present invention.

  In the light source device 100 according to the first embodiment described above, the prism 30 (optical element 35) and the collimator lens 60 (optical element 65) are separate as shown in FIG. 2, but as shown in FIG. In addition, the prism 30 and the collimating lens 60 may be provided integrally.

  As shown in FIG. 29, the plurality of prisms 30 and the plurality of collimating lenses 60 are provided in one optical element 135.

  In the manufacturing process of the light source device 100 shown in FIG. 29, when aligning the light emitting element 20 with respect to the prism 30, the alignment pattern 40 and the light emitting element 20 are viewed through the prism 30 via the collimator lens 60. I do. At this time, a lens that cancels the lens action of the collimating lens 60 may be used. That is, the alignment may be performed by looking at the alignment pattern 40 and the light emitting element 20 through the prism 30 via the lens and the collimating lens 60.

  Further, when the amount of light emitted from the prism 30 is monitored when aligning the light emitting element 20 with respect to the prism 30, the amount of light L collimated by the collimator lens 60 may be monitored. . The alignment of the prism 30 with respect to the light emitting element 20 can be performed in the same manner.

  According to such a light source device 100, since the prism 30 and the collimating lens 60 are integrally configured, the number of components is reduced compared to the case where the prism 30 and the collimating lens 60 are provided as independent optical elements. Can do. Therefore, alignment between parts is easy and manufacturing cost can be reduced.

  Note that the configuration in which the prism 30 and the collimator lens 60 are integrally provided can also be applied to the light source devices 200, 300, 400, and 500 described above.

  The above-described embodiments and modifications are merely examples, and the present invention is not limited to these. For example, each embodiment and each modification can be combined as appropriate.

  The present invention includes configurations that are substantially the same as the configurations described in the embodiments (for example, configurations that have the same functions, methods, and results, or configurations that have the same objects and effects). In addition, the invention includes a configuration in which a non-essential part of the configuration described in the embodiment is replaced. In addition, the present invention includes a configuration that exhibits the same operational effects as the configuration described in the embodiment or a configuration that can achieve the same object. Further, the invention includes a configuration in which a known technique is added to the configuration described in the embodiment.

DESCRIPTION OF SYMBOLS 2 ... Hollow part, 4 ... Light detection apparatus, 10 ... Light source substrate, 11 ... Main surface, 12 ... Base, 14 ... Submount, 20 ... Light emitting element, 22 ... Light emission end surface, 30 ... Prism, 32a ... Incident surface, 32b ... Reflection surface, 32c ... Ejection surface, 34 ... Reflection film, 35 ... Optical element, 36 ... Base part, 37 ... Surface, 38 ... Support part, 39 ... Convex part, 40 ... Alignment pattern, 42 ... Opening part, 44 ... Opening part, 50 ... first wiring, 52 ... second wiring, 54 ... flexible substrate, 60 ... collimating lens, 65 ... optical element, 100 ... light source device, 100R ... blue light source, 100G ... green light source, 100B ... red light source DESCRIPTION OF SYMBOLS 135 ... Optical element 200 ... Light source device 201 ... Laminated body 202 ... Base layer 204 ... First clad layer 206 ... Active layer 208 ... Second clad layer 209 ... Optical waveguide 210 ... First electrode 2 2 ... 2nd electrode, 300 ... Light source device, 400 ... Light source device, 500 ... Light source device, 900 ... Projector, 904R ... Liquid crystal light valve, 904G ... Liquid crystal light valve, 904B ... Liquid crystal light valve, 906 ... Cross dichroic prism, 908 ... projection lens, 910 ... screen

Claims (8)

A substrate,
A light emitting device mounted on the substrate;
A prism having an incident surface on which light emitted from the light emitting element is incident, and a reflecting surface that changes an optical path of the light incident from the incident surface;
An alignment pattern that is provided on at least one of the incident surface and the reflective surface, and performs alignment between the light emitting element and the prism;
A light source device. The alignment pattern has an opening,
The light source device according to claim 1, wherein an outer edge of the opening surrounds the light emitting element when viewed through the prism. The alignment pattern has an opening through which light emitted from the light emitting element passes,
The light source device according to claim 1, wherein the opening is provided in the incident surface.   The light source device according to claim 3, wherein a shape of the opening is the same as a cross-sectional shape of light on the incident surface. The alignment pattern is provided on the reflecting surface and reflects light incident from the incident surface,
The light source device according to claim 1, wherein a shape of the alignment pattern is the same as a cross-sectional shape of light on the reflection surface. The light emitting element emits light in an in-plane direction of the first surface on which the light emitting element of the substrate is mounted,
6. The light source device according to claim 1, wherein the prism bends light emitted from the light emitting element in a direction away from the first surface. 6.   The light source device according to claim 1, wherein a plurality of the light emitting elements are mounted on the substrate. A light source device according to any one of claims 1 to 7,
A light modulation device that modulates light emitted from the light source device according to image information;
A projection device for projecting an image formed by the light modulation device;
Including a projector.