JP2017204425A - Electron spectroscopic device and measuring method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an electron spectroscopic device which can shorten a time required for collecting spectra.SOLUTION: An electron spectroscopic device 100 comprises: an energy spectroscope unit 30 operable to spectrally diffract electrons emitted from a sample by energy; a detector 40 having a plurality of detector units aligned with the energy dispersion direction of electrons subjected to the energy diffraction by the energy spectroscope unit 30; and a processor unit 60 operable to acquire electron spectroscopic spectral data based on a detection result by the detector 40. The processor unit 60 performs: a correction coefficient calculation process for calculating, for each detector unit, a correction coefficient to correct the detection sensitivity of the plurality of detector units; a first measurement result acquisition process for setting an energy range of electrons to be subjected to energy diffraction by the energy spectroscope unit 30 and acquiring results of detection by the plurality of detector units; and a first data acquisition process for correcting, by the correction coefficients, results of detection by the plurality of detector units acquired in the first measurement result acquisition process to acquire first electron spectroscopic spectral data.SELECTED DRAWING: Figure 1

Description

  The present invention relates to an electron spectrometer and a measurement method.

  Electron spectrometers such as Auger Electron Microscope (AES) and X-ray photoelectron spectrometer (XPS) are known as devices for analyzing solid surfaces.

  As a detection device mounted on such an electron spectroscopic device, there is known a device in which a plurality of channeltrons are arranged in the energy dispersion direction of electrons subjected to energy spectroscopy by an energy spectroscopic unit (see, for example, Patent Document 1). A channeltron is a detector having a large variation in detection sensitivity. Therefore, in the case of normal spectrum collection in an electron spectrometer, a mode for detecting a specific channel (hereinafter also referred to as “single mode”) or a mode for adding the results detected by a plurality of effective channels (hereinafter referred to as “mode”). Also referred to as “sum mode”).

  FIG. 16 is a diagram for explaining the single mode. In the example shown in FIG. 16, electrons are detected by using one designated channel tron 2 (+1 channel tron 2) of −2ch to + 2ch channel trons 2.

  FIG. 17 is a diagram for explaining the thumb mode. In the example shown in FIG. 17, the sum of the detection results (electron count values) of two specified channeltrons 2 (0ch channeltron 2 and + 1ch channeltron 2) among the channeltrons 2 of −2ch to + 2ch. Is the detection result of electrons.

JP 2001-312994 A

  FIG. 18 is a diagram for explaining a case where spectrum acquisition is performed in a single mode in a conventional electron spectroscopy apparatus. FIG. 18 shows the energy of electrons that can be detected by five channeltrons (-2ch to + 2ch) from the first measurement to the 100th measurement. Hereinafter, spectrum collection in a conventional electron spectrometer will be described with reference to FIG.

  First, a user sets a spectrum collection condition. The spectrum acquisition conditions include a start energy Es, an end energy Ee, an energy interval I, a designated channel tron P, a measurement time D, and the like.

When these conditions are set, the electron spectrometer changes the energy detected by the designated channel tron P so that the end energy Ee can be detected from the start energy Es by the designated channel tron P, and repeats measurement. . In the example shown in FIG. 18, the start energy Es = E ₁ , the end energy Ee = E ₁₀₀ , and the designated channel tron P = + 1ch are set. Note that the measurement time D is the time for the channeltron to detect electrons in one measurement.

By performing the measurement under the above-mentioned spectrum collection conditions, electron spectroscopic spectrum data in the range of energy E ₁ to energy E ₁₀₀ can be obtained in the designated channel TRON P = + 1ch.

  In the conventional electron spectroscopic device, in order to collect a spectrum as described above, measurement must be repeated many times (100 times in the example shown in FIG. 18), so that the time required for spectrum collection becomes long. There was a problem.

  The present invention has been made in view of the above problems, and one of the objects according to some aspects of the present invention is to provide an electron spectroscopic apparatus and a measurement method that can shorten the time required for spectrum collection. There is to do.

(1) An electron spectrometer according to the present invention is
An energy spectroscopic unit for performing energy spectroscopy on electrons emitted from the sample;
A detection device comprising a plurality of detection units arranged in the energy dispersion direction of electrons subjected to energy spectroscopy by the energy spectroscopy unit;
Based on the detection result of the detection device, including a processing unit for obtaining electron spectrum data,
The processor is
A correction coefficient calculation process for calculating a correction coefficient for correcting the detection sensitivity of the detection unit for each detection unit;
A first measurement result acquisition process for setting an energy range of electrons subjected to energy spectroscopy by the energy spectroscopic unit and acquiring detection results of the plurality of the detection units;
A first data acquisition process for correcting the detection results of the plurality of detection units acquired in the first measurement result acquisition process with the correction coefficient and acquiring first electron spectral data;
I do.

  In such an electron spectroscopic device, the detection sensitivity of the detection unit can be corrected, so that electrons having different energies can be detected simultaneously using a plurality of detection units. Therefore, the time required for spectrum collection can be shortened.

(2) In the electron spectrometer according to the present invention,
The processor is
Second measurement result acquisition for setting the energy range of electrons subjected to energy spectroscopy in the energy spectroscopic unit to a range different from the electron energy range in the first measurement result acquisition process and acquiring detection results of the plurality of detection units Processing,
A second data acquisition process for correcting the detection results of the plurality of detection units acquired in the second measurement result acquisition process with the correction coefficient and acquiring second electron spectral data;
And
Energy detected by the plurality of detection units in the first measurement result acquisition process does not overlap with energy detected by the plurality of detection units in the second measurement result acquisition process.

  In such an electron spectroscopic device, the energy detected by the plurality of detection units in the first measurement result acquisition process and the energy detected by the plurality of detection units in the second measurement result acquisition process do not overlap, and thus the spectrum is collected. The number of repeated measurements can be reduced. Therefore, the time required for spectrum collection can be shortened.

(3) In the electron spectrometer according to the present invention,
The processing unit repeats the process of obtaining the detection results of the plurality of detection units a plurality of times before changing the correction coefficient calculation process, changing the energy range of electrons subjected to energy spectroscopy by the energy spectroscopy unit. 3 Perform the measurement result acquisition process,
In the correction coefficient calculation process, the correction coefficient may be calculated based on the detection results of the plurality of detection units acquired in the third measurement result acquisition process.

  In such an electron spectroscopy apparatus, a correction coefficient for correcting the detection sensitivity of the detection unit can be calculated.

(4) In the electron spectrometer according to the present invention,
The processing unit may perform a third data acquisition process for acquiring third electron spectrum data from detection results of the plurality of detection units acquired in the third measurement result acquisition process.

  In such an electron spectroscopic apparatus, the detection results of the plurality of detection units acquired in the third measurement result acquisition process for calculating the correction coefficient are also used as the electron spectroscopic spectrum data, so that the time required for spectrum collection can be shortened. it can.

(5) In the electron spectrometer according to the present invention,
The detection unit may include a channeltron.

(6) In the electron spectrometer according to the present invention,
The detection unit includes a plurality of channeltrons,
The detection result of the detection unit may be a sum of detection results of the plurality of channeltrons.

(7) The measuring method according to the present invention is:
An electron comprising: an energy spectroscopic unit that performs energy spectroscopy on electrons emitted from a sample; and a detection device that includes a plurality of detection units arranged side by side in the energy dispersion direction of the electrons subjected to energy spectroscopy by the energy spectroscopic unit A measuring method in a spectroscopic device,
A correction coefficient calculating step for calculating a correction coefficient for correcting the detection sensitivity of the detection unit for each detection unit;
A first measurement result acquisition step of setting an energy range of electrons subjected to energy spectroscopy by the energy spectroscopic unit and acquiring detection results of the plurality of the detection units;
A first data acquisition step of correcting the detection results of the plurality of detection units acquired in the first measurement result acquisition step with the correction coefficient to acquire first electron spectral data;
including.

  In such a measurement method, since the detection sensitivity of the detection unit can be corrected, electrons having different energies can be simultaneously detected using a plurality of detection units. Therefore, the time required for spectrum collection can be shortened.

(8) In the measuring method according to the present invention,
Second measurement result acquisition that sets the energy range of electrons subjected to energy spectroscopy by the energy spectroscopic unit to a range different from the electron energy range in the first measurement result acquisition step, and acquires detection results of the plurality of detection units. Process,
A second data acquisition step of correcting the detection results of the plurality of detection units acquired in the second measurement result acquisition step with the correction coefficient to acquire second electron spectral data;
Including
The energy detected by the plurality of detection units in the first measurement result acquisition step does not overlap with the energy detected by the plurality of detection units in the second measurement result acquisition step.

  In such a measurement method, the energy detected by the plurality of detection units in the first measurement result acquisition step does not overlap with the energy detected by the plurality of detection units in the second measurement result acquisition step. The number of repetitions of the measurement can be reduced. Therefore, the time required for spectrum collection can be shortened.

The figure which shows typically the electron spectrometer which concerns on this embodiment. The figure which shows a detection apparatus typically. The figure for demonstrating the function of a detection apparatus. The flowchart which shows an example of the process which collects an Auger electron spectroscopy spectrum. The flowchart which shows an example of the flow of a detection sensitivity measurement. The flowchart which shows an example of the flow of a high-speed measurement. The figure which shows the energy of the electron which can be detected with a some channeltron in a detection sensitivity measurement. The figure which shows an example of the energy of the electron used when calculating a correction coefficient. The figure which shows the energy of the electron which can be detected with a some channeltron in a high-speed measurement. The figure which shows an example of the energy of the electron used as spectrum data. The figure which shows typically the Auger electron spectroscopy spectrum produced | generated by the process part. The figure which shows the energy of the electron which can be detected with a some channeltron in the detection sensitivity measurement in a 1st modification. The figure which shows an example of the energy of the electron used when calculating a correction coefficient in the 1st modification. The figure which shows the energy of the electron which can be detected with a some channeltron in the high-speed measurement in a 1st modification. The figure for demonstrating the function of the detection apparatus in a 2nd modification. The figure for demonstrating single mode. The figure for demonstrating thumb mode. The figure for demonstrating the case where spectrum acquisition is performed in the single mode in the conventional electron spectrometer.

  DESCRIPTION OF EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. The embodiments described below do not unduly limit the contents of the present invention described in the claims. In addition, not all of the configurations described below are essential constituent requirements of the present invention.

  In the following, an Auger electron spectrometer is described as an example of the electron spectrometer according to the present invention, but the electron spectrometer according to the present invention is not limited to this. For example, the electron spectrometer according to the present invention may be an X-ray photoelectron spectrometer.

1. Electron Spectrometer First, an electron spectrometer according to the present embodiment will be described with reference to the drawings. FIG. 1 is a diagram schematically showing an electron spectrometer 100 according to the present embodiment.

  The electron spectroscopic device 100 is a device for analyzing a sample by Auger electron spectroscopy. Auger electron spectroscopy is a technique for performing elemental analysis by measuring the energy of Auger electrons excited from an electron beam or the like and emitted from a sample.

  As shown in FIG. 1, the electron spectrometer 100 includes an electron beam irradiation device 10, a sample stage 20, an energy analyzer 30 (an example of an energy spectroscopy unit), a detection device 40, an irradiation control device 50, and an energy analyzer. A control device 52, a counting operation device 54, and a processing unit 60 are included.

  The electron beam irradiation apparatus 10 irradiates the sample S with an electron beam. The electron beam irradiation apparatus 10 includes an electron gun 12, an electron lens 14, and a deflector 16.

  The electron gun 12 emits an electron beam. The electron lens 14 focuses the electron beam emitted from the electron gun 12. The deflector 16 deflects the electron beam focused by the electron lens 14. The electron beam can be scanned on the sample S by the deflector 16.

  The sample stage 20 can hold the sample S and move the sample S. The sample stage 20 may include, for example, a mechanism (goniometer) that tilts the sample S.

  The energy analyzer 30 performs energy spectroscopy on Auger electrons generated from the sample S when the sample S is irradiated with the electron beam. The energy analyzer 30 includes an input lens 32 and an electrostatic hemispherical analyzer 34.

  The input lens 32 guides incident electrons to the electrostatic hemispherical analyzer 34. Further, the input lens 32 makes the energy resolution variable by decelerating the electrons. In the input lens 32, the resolution is improved as the electrons are decelerated, but the sensitivity is lowered. The input lens 32 includes a plurality of electrostatic lenses 33.

  The electrostatic hemispherical analyzer 34 has an inner hemispherical electrode 35a and an outer hemispherical electrode 35b. In the electrostatic hemispherical analyzer 34, by applying a voltage between the inner hemispherical electrode 35a and the outer hemispherical electrode 35b, electrons in an energy range corresponding to the applied voltage can be taken out.

  The detection device 40 detects electrons subjected to energy spectroscopy by the energy analyzer 30.

  FIG. 2 is a diagram schematically showing the detection device 40. The detection device 40 includes a plurality of channel trons 42. In the example illustrated in FIG. 2, the detection device 40 includes five channel trons 42, but the number is not particularly limited. The channeltron 42 is a detector that detects electrons and outputs an amplified signal.

  The plurality of channeltrons 42 are arranged on the emission surface (energy dispersion surface) of the energy analyzer 30 in the energy dispersion direction of the electrons subjected to energy spectroscopy. Therefore, the plurality of channeltrons 42 can detect electrons having different energies. As a result, the detection device 40 can simultaneously detect electrons of different energies. The plurality of channeltrons 42 are arranged along the direction from the inner hemispherical electrode 35a toward the outer hemispherical electrode 35b.

  FIG. 3 is a diagram for explaining the function of the detection device 40.

As shown in FIG. 3, channel numbers of −2 ch to +2 ch are assigned to the plurality of channel trons 42. Specifically, the channel tron 42 that detects electrons passing through the center between the electrodes 35a and 35b of the electrostatic hemispherical analyzer 34 is 0ch. Further, a channel tron 42 (P = −1ch) and a channel tron 42 (P = −2ch) are arranged in this order from the channel tron 42 (P = 0ch) toward the inner hemispherical electrode 35a. Further, a channel tron 42 (P = + 1ch) and a channel tron 42 (P = + 2ch) are arranged in this order from the channel tron 42 (P = 0ch) toward the outer hemisphere electrode 35b.

  The plurality of channel trons 42 are arranged so that the energy intervals ΔE between the adjacent channel trons 42 are the same. Therefore, when the energy that can be detected by the channeltron 42 (P = 0ch) is E, the energy that can be detected by the channeltron 42 (P = -2ch) is E-2 · ΔE, and the channeltron 42 (P = −1ch). ) Can be detected by E−ΔE. The energy that can be detected by the channeltron 42 (P = + 1ch) is E + ΔE, and the energy that can be detected by the channeltron 42 (P = + 2ch) is E + 2 · ΔE.

  The irradiation control device 50 controls the electron beam irradiation device 10. For example, the irradiation control device 50 controls the electron beam irradiation device 10 so that an electron beam is irradiated to a predetermined position on the sample S based on a control signal from the processing unit 60.

  The energy analyzer control device 52 controls the energy analyzer 30. The energy analyzer control device 52 applies a voltage between the inner hemisphere electrode 35a and the outer hemisphere electrode 35b of the energy analyzer 30 based on, for example, a control signal from the processing unit 60.

  The counting operation device 54 counts electrons detected by the channeltron 42. The counting operation device 54 sends the counting result (that is, the detection result) of the electrons detected by the channeltron 42 to the processing unit 60.

  The processing unit 60 acquires Auger electron spectrum data (an example of electron spectrum data) based on the detection results of the detection device 40 (that is, the detection results of the plurality of channeltrons 42) sent from the counting operation device 54. And processing such as processing for generating control signals for controlling the irradiation control device 50 and the energy analyzer control device 52 are performed. Details of the processing of the processing unit 60 will be described later.

  The function of the processing unit 60 can be realized by executing a program with various processors (CPU, DSP, etc.). Note that at least part of the functions of the processing unit 60 may be realized by a dedicated circuit such as an ASIC (gate array or the like).

2. Operation of Electron Spectrometer Next, the operation of the electron spectrometer 100 will be described.

  The electron beam emitted from the electron gun 12 is focused by the electron lens 14 and irradiated onto the sample S. At this time, an electron beam can be scanned on the surface of the sample S using the deflector 16. Auger electrons, secondary electrons, and the like are emitted from the sample S irradiated with the electron beam.

  Auger electrons emitted from the sample S enter the input lens 32, decelerate by the electrostatic lens 33, and enter the electrostatic hemispherical analyzer 34. The incident Auger electrons are subjected to energy spectroscopy by the electrostatic hemispherical analyzer 34 and dispersed in a predetermined direction (energy dispersion direction) in accordance with energy (kinetic energy) on the exit surface (energy dispersion surface) of the electrostatic hemispherical analyzer 34. Is done.

Auger electrons dispersed according to energy are detected by a plurality of channeltrons 42 arranged side by side in the energy dispersion direction. The electrons detected by the plurality of channeltrons 42 are counted by the counting operation device 54 for each channeltron 42, and the counting result is sent to the processing unit 60.

  Next, the operation at the time of collecting an Auger electron spectrum (hereinafter also simply referred to as “spectrum”) in the electron spectrometer 100 will be described. FIG. 4 is a flowchart illustrating an example of processing for collecting spectra in the electron spectroscopy apparatus 100. FIG. 5 is a flowchart showing an example of the flow of detection sensitivity measurement (step S12). FIG. 6 is a flowchart showing an example of the flow of high-speed measurement (step S16).

(1) Setting of spectrum collection conditions (step S10)
First, the user sets spectrum acquisition conditions. The user operates a setting unit (user interface, not shown) of the electron spectroscopic device 100 to set conditions for spectrum collection. The setting of the spectrum collection condition in the setting unit is reflected in the processing of the processing unit 60.

  The spectrum collection conditions include a start energy Es, an end energy Ee, an energy interval I, an effective channeltron number N, a designated channeltron P, and a measurement time D.

  The start energy Es is energy when starting measurement. The end energy Ee is energy when the measurement is finished. The energy interval I is an energy interval of spectrum data. The number of effective channeltrons is the number of channeltrons 42 used for measurement. The designated channel tron is a reference channel tron. The measurement time D is the time for the channeltron 42 to detect electrons in one measurement.

Hereinafter, start energy Es = E ₁ , end energy Ee = E ₁₀₀ , energy interval I = 1.0 eV, number of effective channel trons N = 5, designated channel tron 42 (P = + 1ch), energy interval between adjacent channel trons A case where ΔE = 1.0 eV is set will be described. Incidentally, the energy difference between the energy _{E n} and energy _{E n + 1} is the 1.0 eV (n is an arbitrary number).

(2) Detection sensitivity measurement (step S12)
Next, the processing unit 60 performs detection sensitivity measurement and acquires detection results of the five channeltrons 42 (P = −2ch to + 2ch).

  FIG. 7 is a diagram showing the energy of electrons that can be detected by the channeltron 42 (P = −2 ch to +2 ch) in the detection sensitivity measurement.

As shown in FIG. 7, in the detection sensitivity measurement, first, an energy range in which energy spectrum is performed by the energy analyzer 30 is set so that the starting energy Es = E ₁ is measured by the designated channeltron 42 (P = + 1ch). Electrons are detected by the channeltron 42 (P = -2ch to + 2ch) (first measurement (n = 1)). In the first measurement, electrons with energy E ₁ and electrons with energy E ₂ are detected, and spectral data (detection results) of energy E ₁ and energy E ₂ can be acquired.

Next, the energy range of electrons subjected to energy spectroscopy by the energy analyzer 30 is shifted by 1.0 eV, and electrons are detected by the channeltron 42 (P = -2ch to + 2ch) (second measurement (n = 2)). . In the second measurement, the energy _{E 1} of the electron, the energy _{E 2} electrons, and electron energy _{E 3} is detected, it can acquire spectral data of the energy _E 1 to E _3.

  In this way, the above measurement is repeated for the number of effective channel trons. That is, here, five measurements are performed while shifting the energy range of electrons subjected to energy spectroscopy by the energy analyzer 30 by 1.0 eV.

In the third measurement (n = 3), electrons of energy E ₁ , electrons of energy E ₂ , electrons of energy E ₃ , and electrons of energy E ₄ are detected, and spectrum data of energy E _{1 to} E ₄ are acquired. it can. In 4 th measurement (n = 4), the energy _{E 1} electron energy _{E 2} electrons, electron energy _{E 3,} the energy _{E 4} electrons, and electron energy _{E 5} is detected, the energy _E 1 to E ₅ spectral data can be acquired. In 5 th measurement (n = 5), the energy _{E 2} electrons, electron energy _{E 3,} the energy _{E 4} electrons, electron energy _{E 5,} and electron energy _{E 6} is detected, the energy _E 3 to E ₆ spectral data can be acquired.

  Next, processing of the processing unit 60 in detection sensitivity measurement will be described with reference to the flowchart shown in FIG.

  First, the processing unit 60 sets an energy range in which the energy is analyzed by the energy analyzer 30, and acquires the detection result of the channeltron 42 (P = -2ch to + 2ch) (step S120).

Specifically, the processing unit 60 generates a control signal for setting the energy range so that the start energy Es = E ₁ is measured by the designated channel tron 42 (P = + 1ch), and the energy analyzer control device 52 Send to. Then, the processing unit 60 receives the detection result of the channel tron 42 (P = −2 ch to +2 ch) from the counting operation device 54. Thereby, the processing unit 60 acquires the detection result of the channeltron 42 (P = -2ch to + 2ch) in the first measurement.

  Next, the processing unit 60 determines whether or not the measurement has been performed for the set number of effective channel trons (N = 5) (step S122).

  When it is determined that the number of effective channel trons has not been measured (No in step S122), the processing unit 60 changes the energy range so that the energy interval I is shifted by 1.0 eV from the first measurement. (Step S124). Specifically, the processing unit 60 generates a control signal for setting the energy range so as to deviate by an energy interval I = 1.0 eV from the first measurement, and sends the control signal to the energy analyzer control device 52.

  Then, the processing unit 60 receives the detection result of the channel tron 42 (P = −2 ch to +2 ch) from the counting operation device 54. Thereby, the processing unit 60 acquires the detection result of the channeltron 42 (P = -2ch to + 2ch) in the second measurement. (Step S120).

  The processing unit 60 repeats the processing of step S120 to step S124 for the number of effective channel trons (N = 5), and the detection result of the channel tron 42 (P = -2ch to + 2ch) in the third to fifth measurements is obtained. get.

  When determining that the number of effective channel trons (N = 5) has been measured (Yes in step S124), the processing unit 60 ends the detection sensitivity measurement process.

(3) Calculation of correction coefficient (step S14)
Next, the processing unit 60 uses the channeltron 42 (P = −2ch˜
The correction coefficient is calculated based on the detection result of (+ 2ch). Here, the correction coefficient is a coefficient for correcting the detection sensitivity of the channeltron 42. The correction coefficient is calculated for each channeltron 42. The detection result (counting result) of the channeltron 42 can be corrected by the correction coefficient, and the influence of variations in the detection sensitivity of the channeltron 42 can be reduced.

As shown in FIG. 8, the processing unit 60 uses the result of detecting electrons of the same energy (energy E _{2 in the} example shown in FIG. 8) in the channeltron 42 (P = −2ch to + 2ch). The correction coefficient is calculated so that the counts of (P = -2ch to + 2ch) are the same.

  Specifically, the processing unit 60 obtains the correction coefficient by calculating the gain (ratio) of the other channel trons 42 with reference to the channel tron 42 (P = + 1ch) set to the designated channel tron. For example, the detection result (counting result) of the channeltron 42 (P = -2ch) is 80, the detection result of the channeltron 42 (P = -1ch) is 150, the detection result of the channeltron 42 (P = 0ch) is 110, When the detection result of the channel tron 42 (P = + 1ch) is 90 and the detection result of the channel tron 42 (P = + 2ch) is 120, the correction coefficients are 0.88 (P = -2ch) and 1.66 (respectively). P = −1ch), 1.22 (P = 0ch), 1.0 (P = + 1ch), 1.33 (P = + 2ch).

(4) High speed measurement (step S16)
Next, the processing unit 60 performs high-speed measurement and acquires the detection result of the channeltron 42 (P = -2ch to + 2ch).

  FIG. 9 is a diagram showing the energy of electrons that can be detected by the channeltron 42 (P = −2 ch to +2 ch) in high-speed measurement.

  In the high-speed measurement, as shown in FIG. 9, the detection result of the channeltron 42 (P = -2ch to + 2ch) is acquired so that the energy of electrons detected by the channeltron 42 (P = -2ch to + 2ch) does not overlap. The processing to be performed is repeated a plurality of times while changing the energy range in which the energy analyzer 30 performs energy spectroscopy.

That is, in the high-speed measurement, the energy E ₇ , E ₈ , E ₉ , E ₁₀ , E ₁₁ detected by the channeltron 42 (P = −2ch to + 2ch) in the sixth measurement (n = 6), 7 The energy E ₁₂ , E ₁₃ , E ₁₄ , E ₁₅ , E ₁₆ detected by the channeltron 42 (P = −2 ch to +2 ch) in the second measurement (n = 7) does not overlap. The same applies to the seventh and subsequent times, and the energy of electrons detected by the channeltron 42 (P = -2ch to + 2ch) does not overlap from the sixth measurement to the 24th measurement.

  For example, by repeating the measurement while shifting the energy range subjected to energy spectroscopy by the energy analyzer 30 by the number of effective channel trons times the energy interval I (energy interval I × effective channel tron number N), as described above, Electron energy detected by the channeltron 42 (P = −2ch to + 2ch) does not overlap. In the example shown in FIG. 9, since the energy interval I is 1.0 eV and the number of effective channeltrons is 5, the energy range is shifted by 5.0 eV, and the measurement is repeatedly performed.

  Next, processing of the processing unit 60 in high-speed measurement will be described with reference to the flowchart shown in FIG.

First, the processing unit 60 sets an energy range in which energy spectrum is performed by the energy analyzer 30, and acquires a detection result of the channeltron 42 (P = -2ch to + 2ch) (step S160).

  Specifically, the processing unit 60 generates a control signal for setting the energy range so as to deviate by +1.0 eV from the fifth measurement, and sends the control signal to the energy analyzer control device 52. Then, the processing unit 60 receives the detection result of the channel tron 42 (P = −2 ch to +2 ch) from the counting operation device 54. Thereby, the processing unit 60 acquires the detection result of the channeltron 42 (P = -2ch to + 2ch) in the sixth measurement.

Next, the processing unit 60 corrects the detection result (counting result) of the channeltron 42 (P = −2ch to + 2ch) in the acquired sixth measurement with the correction coefficient (step S162). Thus, the processing unit 60 obtains the spectral data of the energy _E 7 _{to E 11.}

  As described above, since the correction coefficient is calculated based on the channeltron 42 (P = + 1ch), the detection result of the channeltron 42 (P = + 1ch) need not be corrected.

Next, the processing unit 60 determines whether or not the detection result of the end energy Ee = E ₁₀₀ has been acquired (step S164).

Processor 60 (No in step S164) ends when the energy Ee = detection result of the E ₁₀₀ is determined not to be acquired, the energy range to be energy spectral energy analyzer 30, the energy in the 6 th measurement A process of changing so as not to overlap with the range is performed (step S166). Specifically, the processing unit 60 generates a control signal for setting the energy range so as to deviate by +5.0 eV (energy interval I × effective channel tron number N) from the sixth measurement, and the energy analyzer control device 52.

  Then, the processing unit 60 receives the detection result of the channeltron (P = −2 ch to +2 ch) from the counting operation device 54. Thereby, the processing unit 60 acquires the detection result of the channeltron 42 (P = -2ch to + 2ch) in the seventh measurement (step S160).

Next, the processing unit 60 corrects the detection result of the channeltron 42 (P = −2ch to + 2ch) in the acquired seventh measurement with a correction coefficient (step S162). Thus, the processing unit 60 obtains the spectral data of the energy _E 12 _{to E 16.}

Processing unit 60, until the acquisition end energy Ee ₌ detection result of the _{E 100} is, repeats the processing of step S160~ step S166, it acquires the spectral data of the energy _E 7 _{to E 100.}

Processor 60 (Yes in Step S164) if it is judged that the termination energy Ee ₌ detection result of the _{E 100} is acquired, and terminates the high speed measurement process.

(5) Spectrum generation (step S18)
Then, the processing unit 60 on the basis of the spectral data of the energy _E 1 _{to E 100} acquired to generate a spectrum.

  FIG. 10 is a diagram illustrating an example of energy of electrons used as spectrum data.

The processing unit 60 acquires the spectrum data of the energy E _{1 to} E ₆ acquired by the detection sensitivity measurement in addition to the spectrum data of the energy E _{7 to} E ₁₀₀ acquired by the high speed measurement, and acquires the acquired energy E _{1 to} E _A spectrum is generated from ₁₀₀ spectral data.

The processing unit 60 acquires the detection result of the channeltron 42 obtained by the detection sensitivity measurement (1-5 th measurements) (P = + 1ch) as the spectral data of the energy _E 1 to E _5. The processing unit 60 corrects the detection result of the channeltron 42 obtained by the detection sensitivity measurement (measurement of the fifth) (P = + 2ch) by the correction factor, to obtain the spectral data of the energy E _6.

  FIG. 11 is a diagram schematically showing an Auger electron spectrum generated by the processing unit 60.

As shown in FIG. 11, by performing the above processing, a spectrum in the energy range from the start energy Es = E ₁ to the end energy Ee = E ₁₀₀ can be generated. The processing unit 60 performs control to display the generated spectrum on a display unit (not shown), and the spectrum is displayed on the display unit.

  The electron spectroscopy apparatus 100 according to the present embodiment has the following features, for example.

  In the electron spectroscopic device 100, the processing unit 60 performs the energy spectrum by the correction coefficient calculation process (step S <b> 14) for calculating the correction coefficient for correcting the detection sensitivity of the channeltron 42 for each channeltron 42 and the energy analyzer 30. The first measurement result acquisition process (step S160) for setting the energy range of the electrons to acquire the detection results of the plurality of channeltrons 42 and the detection of the plurality of channeltrons 42 acquired by the first measurement result acquisition process A first data acquisition process (step S162) is performed in which the result is corrected with a correction coefficient and spectrum data is acquired. Therefore, since the electron spectrometer 100 can correct the detection sensitivities of the plurality of channeltrons 42, the plurality of channeltrons 42 can be used to simultaneously detect electrons having different energies. Therefore, in the electron spectrometer 100, the time required for spectrum collection can be shortened.

  In the electron spectroscopic device 100, the processing unit 60 sets the energy range of electrons subjected to energy spectroscopy by the energy analyzer 30 to a range different from the energy range of electrons in the first measurement result acquisition process (step S166), and a plurality of channels. A second measurement result acquisition process for acquiring the detection result of the tron 42, and a second data for acquiring spectrum data by correcting the detection results of the plurality of channel trons 42 acquired by the second measurement result acquisition process with a correction coefficient. The energy detected by the plurality of channeltrons 42 in the first measurement result acquisition process does not overlap with the energy detected by the plurality of channeltrons 42 in the second measurement result acquisition process. Therefore, in the electron spectrometer 100, the time required for spectrum collection can be shortened.

For example, in the conventional example shown in FIG. 18, in order to acquire spectrum data of energies E _{1 to} E ₁₀₀ , 100 measurements had to be performed. On the other hand, in this embodiment, as shown in FIG. 10, the spectrum data of the energy E _{1 to} E ₁₀₀ can be acquired by 24 measurements. Thus, in the present embodiment, the number of repetitions of measurement when collecting spectra can be reduced as compared with the conventional example, so that the time required for collecting spectra can be shortened.

In the electron spectroscopic device 100, the processing unit 60 performs the process of acquiring the detection results of the plurality of channeltrons 42 before the correction coefficient calculation process (step S14), and the energy range of the electrons subjected to the energy spectrum by the energy analyzer 30. The third measurement result acquisition process (step S12) that is changed and repeated a plurality of times is performed. In the correction coefficient calculation process, the correction coefficient is calculated based on the detection results of the plurality of channeltrons 42 acquired in the third measurement result acquisition process. Is calculated. Therefore, the electron spectroscopic device 100 can calculate a correction coefficient for correcting the detection sensitivity of the channeltron 42.

  In the electron spectroscopy apparatus 100, the processing unit 60 performs a third data acquisition process (step S18) for acquiring spectrum data from the detection results of the plurality of channeltrons 42 acquired in the third measurement result acquisition process (step S12). Do. At this time, the processing unit 60 may acquire the spectrum data by correcting the detection results of the plurality of channeltrons 42 with the correction coefficient. In the electron spectroscopic device 100, since the detection result in the detection sensitivity measurement is also used as spectrum data, the time required for spectrum collection can be shortened.

  The measurement method according to the present embodiment includes a correction coefficient calculation step for calculating a correction coefficient for correcting the detection sensitivity of the channeltron 42 for each channeltron 42, and an energy range of electrons subjected to energy spectroscopy by the energy analyzer 30. A first measurement result acquisition step of setting and acquiring detection results of the plurality of channeltrons 42, and correcting the detection results of the plurality of channeltrons 42 acquired in the first measurement result acquisition step with a correction coefficient, A first data acquisition step of acquiring spectrum data. Therefore, according to the measurement method according to the present embodiment, the time required for spectrum collection can be shortened.

  In the measurement method according to the present embodiment, the energy range of electrons subjected to energy spectroscopy by the energy analyzer 30 is set to a range different from the energy range of electrons in the first measurement result acquisition step, and the detection results of the plurality of channeltrons 42 are obtained. A second measurement result acquisition step for acquiring, and a second data acquisition step for acquiring spectrum data by correcting the detection results of the plurality of channeltrons 42 acquired in the second measurement result acquisition step with a correction coefficient. In addition, the energy detected by the plurality of channeltrons 42 in the first measurement result acquisition step does not overlap with the energy detected by the plurality of channeltrons 42 in the second measurement result acquisition step. Therefore, according to the measurement method according to the present embodiment, the time required for spectrum collection can be shortened.

3. Modifications The present invention is not limited to the above-described embodiments, and various modifications can be made within the scope of the gist of the present invention. Hereinafter, a different point from embodiment mentioned above is demonstrated, and description is abbreviate | omitted about the same point.

(1) First Modification In the above-described embodiment, the case where the energy interval I of the spectrum data is equal to the energy interval ΔE between adjacent channeltrons (both 1.0 eV) has been described. It may be different from the energy interval ΔE.

  Hereinafter, the case where the energy interval I of spectral data is I = 1.0 eV and the energy interval ΔE = 0.8 eV between adjacent channeltrons will be described.

  FIG. 12 is a diagram showing the energy of electrons that can be detected by the channeltron 42 (P = + 2ch to −2ch) in the detection sensitivity measurement in the first modification.

In the present modification, the processing unit 60 calculates the correction coefficient by setting the target energy as E _1.0 in the process of calculating the correction coefficient. When the energy of electrons detected other than the designated channeltron 42 (P = + 1ch) does not match the target energy E _1.0 , the value estimated by interpolation of the two energies is used as shown in FIG. The correction coefficient is calculated.

For example, when calculating the correction coefficient of the channeltron 42 (P = + 2ch), the energy is determined from the detection result of the energy E _{0.8 in} the first measurement and the detection result of the energy E _1.8 in the second measurement. The detection result of E _1.0 is estimated by interpolation. A detection result of the estimated energy _{E 1.0,} calculates a correction coefficient channeltron 42 from the detection result of the energy _{E 1.0,} the designated channel Tron 42 (P = + 1ch) ( P = + 2ch). Similarly, for channeltron 42 (P = -2ch, -1ch, 0ch), the detection result of energy E _1.0 is estimated by interpolation from the detection results of the two measurements surrounded by the solid line in FIG. Then, a correction coefficient is calculated.

  FIG. 14 is a diagram showing the energy of electrons that can be detected by the channeltron 42 (P = −2 ch to +2 ch) in the high-speed measurement in the first modification.

  In the present modification, the processing unit 60 repeats the high-speed measurement while shifting the energy range of the energy spectrum by the energy analyzer 30 by +4.0 eV (energy interval I × number of effective channeltrons N = 0.8 eV × 5). Measurement is performed, and the detection result of the channeltron 42 (P = -2ch to + 2ch) is acquired.

Here, the spectrum data to be acquired is the detection result of the energy E _{1 to} E ₁₀₀ , and in the channel trons 42 (P = −2 ch, −1 ch, 0 ch, +2 ch) other than the designated channel tron 42 (P = + 1 ch). , Energies E _{1 to} E ₁₀₀ cannot be detected. Therefore, in this modification, spectrum data of energy E _{1 to} E ₁₀₀ is acquired by interpolation from detection results of a plurality of energies.

For example, the detection result of energy E _5.0 includes the detection result of channel tron 42 (P = + 2ch) in the fifth measurement (detection result of energy E _4.8 ) and the channel tron 42 in the sixth measurement (P = −2ch) from the detection result (detection result of energy E _5.6 ) and estimation by interpolation. Further, for example, the detection result of energy E _6.0 includes the detection result of channeltron 42 (P = −2ch) in the sixth measurement (detection result of energy E _5.6 ) and the channeltron in the sixth measurement. From the detection result of 42 (P = −1ch) (detection result of energy E _6.4 ), it is estimated by interpolation.

In this manner, the processing unit 60 can acquire spectrum data of the energy E _{1 to} E ₁₀₀ .

  According to the first modification, even if the energy interval I of the spectrum data is different from the energy interval ΔE between adjacent channeltrons, the same effects as those of the above-described embodiment can be achieved.

(2) Second Modification In the embodiment described above, one spectrum data is acquired from one channeltron, but one spectrum data may be acquired from a plurality of channeltrons. That is, in the embodiment described above, one channel tron constitutes one detection unit, but a plurality of channel trons may constitute one detection unit.

  FIG. 15 is a diagram for explaining the function of the detection device according to the second modification.

As shown in FIG. 15, the detection device 40 includes nine channel trons 42 (P = −4ch to
+ 4ch). At this time, the processing unit 60 acquires the sum of the detection results (counting results) of the channeltron 42 (P = −4ch, −3ch, −2ch) as the detection result (counting result) of energy E−ΔE. In addition, the processing unit 60 acquires the sum of the detection results of the channeltron 42 (P = −1ch, 0ch, + 1ch) as the detection result of the energy E. Further, the processing unit 60 acquires the sum of the detection results of the channeltron 42 (P = + 2ch, + 3ch, + 4ch) as the detection result of the energy E + ΔE.

  In the present modification, the detection unit for detecting electrons includes a plurality of channeltrons 42, and the detection result of the detection unit is the sum of the detection results of the plurality of channeltrons 42. The amount can be increased. For example, as described above, when three channel trons are used as one detection unit, a signal amount three times as large as that obtained when one channel tron is used as one detection unit can be obtained.

  In addition, embodiment mentioned above and a modification are examples, Comprising: It is not necessarily limited to these. For example, each embodiment and each modification can be combined as appropriate.

  The present invention includes configurations that are substantially the same as the configurations described in the embodiments (for example, configurations that have the same functions, methods, and results, or configurations that have the same objects and effects). In addition, the invention includes a configuration in which a non-essential part of the configuration described in the embodiment is replaced. In addition, the present invention includes a configuration that exhibits the same operational effects as the configuration described in the embodiment or a configuration that can achieve the same object. Further, the invention includes a configuration in which a known technique is added to the configuration described in the embodiment.

DESCRIPTION OF SYMBOLS 10 ... Electron beam irradiation apparatus, 12 ... Electron gun, 14 ... Electron lens, 16 ... Deflector, 20 ... Sample stage, 30 ... Energy analyzer, 32 ... Input lens, 33 ... Electrostatic lens, 34 ... Electrostatic hemisphere type analyzer 35a ... inner hemispherical electrode, 35b ... outer hemispherical electrode, 40 ... detection device, 42 ... channeltron, 50 ... irradiation control device, 52 ... energy analyzer control device, 54 ... counting operation device, 60 ... processing unit, 100 ... electron Spectrometer

Claims (8)

An energy spectroscopic unit for performing energy spectroscopy on electrons emitted from the sample;
A detection device comprising a plurality of detection units arranged in the energy dispersion direction of electrons subjected to energy spectroscopy by the energy spectroscopy unit;
Based on the detection result of the detection device, including a processing unit for obtaining electron spectrum data,
The processor is
A correction coefficient calculation process for calculating a correction coefficient for correcting the detection sensitivity of the detection unit for each detection unit;
A first measurement result acquisition process for setting an energy range of electrons subjected to energy spectroscopy by the energy spectroscopic unit and acquiring detection results of the plurality of the detection units;
A first data acquisition process for correcting the detection results of the plurality of detection units acquired in the first measurement result acquisition process with the correction coefficient and acquiring first electron spectral data;
Performing an electron spectrometer. In claim 1,
The processor is
Second measurement result acquisition for setting the energy range of electrons subjected to energy spectroscopy in the energy spectroscopic unit to a range different from the electron energy range in the first measurement result acquisition process and acquiring detection results of the plurality of detection units Processing,
A second data acquisition process for correcting the detection results of the plurality of detection units acquired in the second measurement result acquisition process with the correction coefficient and acquiring second electron spectral data;
And
An electron spectrometer that does not overlap energy detected by the plurality of detection units in the first measurement result acquisition process and energy detected by the plurality of detection units in the second measurement result acquisition process. In claim 1 or 2,
The processing unit repeats the process of obtaining the detection results of the plurality of detection units a plurality of times before changing the correction coefficient calculation process, changing the energy range of electrons subjected to energy spectroscopy by the energy spectroscopy unit. 3 Perform the measurement result acquisition process,
In the correction coefficient calculation process, the electron spectroscopy apparatus calculates the correction coefficient based on the detection results of the plurality of detection units acquired in the third measurement result acquisition process. In claim 3,
The said processing part is an electron spectrometer which performs the 3rd data acquisition process which acquires 3rd electron spectroscopy spectrum data from the detection result of the said several detection part acquired by the said 3rd measurement result acquisition process. In any one of Claims 1 thru | or 4,
The detection unit is an electron spectrometer configured to include a channeltron. In any one of Claims 1 thru | or 4,
The detection unit includes a plurality of channeltrons,
The detection result of the detection unit is an electron spectroscopy apparatus, which is a sum of detection results of the plurality of channeltrons. An electron comprising: an energy spectroscopic unit that performs energy spectroscopy on electrons emitted from a sample; and a detection device that includes a plurality of detection units arranged side by side in the energy dispersion direction of the electrons subjected to energy spectroscopy by the energy spectroscopic unit A measuring method in a spectroscopic device,
A correction coefficient calculating step for calculating a correction coefficient for correcting the detection sensitivity of the detection unit for each detection unit;
A first measurement result acquisition step of setting an energy range of electrons subjected to energy spectroscopy by the energy spectroscopic unit and acquiring detection results of the plurality of the detection units;
A first data acquisition step of correcting the detection results of the plurality of detection units acquired in the first measurement result acquisition step with the correction coefficient to acquire first electron spectral data;
Including a measuring method. In claim 7,
Second measurement result acquisition that sets the energy range of electrons subjected to energy spectroscopy by the energy spectroscopic unit to a range different from the electron energy range in the first measurement result acquisition step, and acquires detection results of the plurality of detection units. Process,
A second data acquisition step of correcting the detection results of the plurality of detection units acquired in the second measurement result acquisition step with the correction coefficient to acquire second electron spectral data;
Including
The measurement method in which the energy detected by the plurality of detection units in the first measurement result acquisition step does not overlap with the energy detected by the plurality of detection units in the second measurement result acquisition step.

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