JP2017198563A - Three-dimensional coordinate measuring instrument - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a three-dimensional coordinate measuring instrument capable of suppressing occurrence of a measurement error when a three-dimensional coordinate is measured in a plurality of measurement positions belonging to the same height level.SOLUTION: A three-dimensional coordinate measuring instrument comprises coordinate acquiring means S43 for identifying a position and a posture of a probe for instructing a measurement position of a measuring object and acquiring a coordinate in the measurement position on the basis of the identified position and posture of the probe, and setting means S46 for setting a permissible position range which must be acquired by the coordinate acquiring means. The coordinate acquiring means acquires the coordinate in the measurement position instructed by the probe on the condition that the coordinate is in the permissible position range.SELECTED DRAWING: Figure 76

Description

  The present invention relates to a three-dimensional coordinate measuring instrument.

  A three-dimensional coordinate measuring apparatus is known for detecting the three-dimensional coordinates of the outer contour of an object (workpiece). As the three-dimensional coordinate measuring apparatus, mechanical three-dimensional coordinate measuring instruments such as a portal type having a rigid frame structure and an arm type having a probe at the tip of an articulated arm are widely used. For example, a portal type three-dimensional coordinate measuring apparatus is made based on a design concept that enables highly accurate coordinate detection from a hardware perspective. For this reason, the portal type three-dimensional coordinate measuring apparatus is typically installed and used in a temperature-controlled room, and the operation of the apparatus requires expertise.

  When applying a three-dimensional coordinate measuring apparatus to quality control of industrial products, there is a demand for measuring finished products at a manufacturing site. In an attempt to meet this demand, the present applicant has proposed an optical three-dimensional coordinate measuring instrument in Patent Document 1.

  The optical three-dimensional coordinate measuring device of Patent Document 1 includes a camera, a probe that is held and operated by an operator, and indicates a measurement position, and a table that fixes a workpiece. A marker is provided. This optical three-dimensional coordinate measuring device captures an image of a marker placed on a probe with a camera. And the coordinate of the measurement point of a workpiece can be calculated | required by image processing.

  According to this optical three-dimensional coordinate measuring instrument, a predetermined measurement accuracy can be ensured if the relative relationship between the probe and the camera, that is, the optical relationship, is fixed only at the moment of imaging with the camera. Therefore, the measurement accuracy can be ensured without depending on the hardware, so that it is made small. Therefore, this optical three-dimensional coordinate measuring device can be installed at any place on the manufacturing site where a desired product is manufactured. In addition, since measurement data (measurement coordinates) can be acquired by calculation involving image processing, it is possible to provide convenience that can be easily operated even by an operator at a manufacturing site by devising a GUI (Graphical User Interface).

JP JP-2015-206644 A

  There are cases where a plurality of measurement positions included in an arbitrary height level of a workpiece (including a partial position) are measured using a mechanical and optical three-dimensional coordinate measuring instrument. When this is called the same height level measurement, a three-dimensional coordinate measuring device is used to inspect whether or not the draft is as designed, for example, in a workpiece having a die draft. In addition, for example, in a workpiece having a recess, a three-dimensional coordinate measuring device is used to check whether the diameter of an arbitrary height level of the recess is as designed.

  Conventionally, when measuring a plurality of measurement positions belonging to a predetermined height level, measurement work was performed with a tool such as a caliper positioned in the vicinity of the measurement position in order to confirm the height level. The measurement accuracy depends on the proficiency level of the operator. For example, in the case of a manual portal-type three-dimensional coordinate measuring device, it is normal to have a function of fixing the probe in the vertical direction or the horizontal direction. By using this function, measurement at the same height level can be easily performed. However, there are limitations on the surface that serves as a reference for the height level. If the measurement reference plane is a horizontal plane, a portal-type three-dimensional coordinate measuring device can be applied, but cannot be applied when the measurement reference plane is an inclined plane.

  An object of the present invention is to provide a three-dimensional coordinate measuring instrument capable of suppressing the occurrence of measurement errors when measuring at a plurality of measurement positions belonging to the same height level.

According to the present invention, the above technical problem is
A probe for indicating the measurement position of the measurement object;
Coordinate acquisition means for specifying the position and orientation of the probe and acquiring the coordinates of the measurement position indicated by the probe based on the specified position and orientation of the probe;
Setting means for setting an allowable position range to be acquired by the coordinate acquisition means,
The coordinate acquisition means is achieved by providing a three-dimensional coordinate measuring instrument that acquires the coordinates on the condition that the coordinates of the measurement position indicated by the probe are within the allowable position range.

  The effects and other objects of the present invention will become apparent from the detailed description of the preferred embodiments of the present invention.

It is a perspective view of the system containing the optical three-dimensional coordinate measuring device of an Example. It is a functional block diagram of the three-dimensional coordinate measuring system comprised with a personal computer and an optical three-dimensional coordinate measuring device. It is a side view of the optical three-dimensional coordinate measuring device of an Example. It is a perspective view of the probe contained in the optical three-dimensional coordinate measuring device of an Example. It is a disassembled perspective view for demonstrating the holding member accommodated in the case of a probe, and the optical element accommodated in this holding member. It is sectional drawing of the marker member which is the main components of a probe marker. It is a fragmentary sectional view of the holding member in which the optical element was incorporated. It is a perspective view of the stage unit contained in the optical three-dimensional coordinate measuring device of an Example. It is a perspective view of the optical three-dimensional coordinate measuring device of an Example, and shows the state in which the displaceable table is located in the original position. It is a perspective view of the stage marker unit which can be mounted in a stage unit. It is a top view of a stage marker unit. It is a disassembled perspective view of a stage marker unit. It is sectional drawing along the XIII-XIII line | wire of FIG. It is a perspective view of the optical three-dimensional coordinate measuring device of an Example, and shows the state which the displaceable table rotated from the original position. It is a figure for demonstrating the detection by the main imaging unit mounted in the optical three-dimensional coordinate measuring device of an Example. It is a figure for demonstrating typically the state change which performed measurement operation in the state which displaced the table from the original position. It is a figure for demonstrating the mechanism which specifies the position and attitude | position of a probe and a table optically using a captured image. It is a figure for demonstrating the example which carries out the stereo view of the same imaging space with several main imaging units. It is a perspective view of a stage unit like FIG. 8, and shows the state which removed the stage marker unit. It is a figure for demonstrating the moving mechanism of the X-axis direction of a table. It is a top view of a stage unit, and shows the state where the table was located in the original position. It is sectional drawing along the XXII-XXII line | wire of FIG. It is a perspective view of a stage unit, and shows the state where a table was removed from a stage unit. It is a perspective view of the main resistance mechanism component which is a resistance element with respect to the displacement of a table. It is a top view of main resistance mechanism components. It is sectional drawing along the XXVI-XXVI line of FIG. It is a figure for demonstrating that the gear incorporated in the main resistance mechanism component meshes with the rack member, and the said main resistance mechanism component acts with respect to the displacement of the X-axis direction of a table. It is a figure for demonstrating the relationship between the main resistance mechanism components which act with respect to rotation of a table, and a table. It is sectional drawing for demonstrating the relationship between the main resistance mechanism components which act with respect to rotation of a table, and a table. It is a figure for demonstrating the structure which a table can displace to a X-axis direction, a rotation direction, and a Y-axis direction as a modification. It is a fragmentary perspective view of a stage unit, and shows that the operation lever of a table lock mechanism is arranged at the corner of the stage unit, and here the operation lever is in an unlocked state. It is a fragmentary perspective view of the stage unit which shows the operation lever of a table lock mechanism similarly to FIG. 31, and an operation lever is a locked state here. It is a figure for demonstrating the lock hole which comprises a part of table lock mechanism, and shows the lower surface of the corner | angular part of a table. It is a fragmentary perspective view which shows the corner | angular part of a stage base, and an operation lever is a locked state here, and is in the state which the lock pin protruded upwards in connection with this. It is a whole block diagram of a table locking mechanism, and shows an unlocked state. It is a whole block diagram of a table locking mechanism, and shows a locked state. It is a figure for demonstrating the state of a lock pin when an operation lever exists in an unlock position, (I) is a top view of a lock pin, (II) is sectional drawing of a lock pin. It is a figure for demonstrating the state of the lock pin immediately after positioning an operation lever in a lock position, (I) is a top view of a lock pin, (II) is sectional drawing of a lock pin. It is a figure for demonstrating a state when an operation lever is positioned in a lock position, and a table continues being fixed with a lock pin, (I) is a top view of a lock pin, and (II) is a lock pin. It is sectional drawing. It is a figure for demonstrating the process of calculating | requiring the 1st measurement plane which means the said one end surface when measuring the distance between the one end surface and the other end surface of a workpiece, (a) It is a figure which shows the process made to contact | abut one end surface, (b) is a figure for demonstrating making a contactor contact | abut on four points of one end surface. When measuring the distance between the one end surface and the other end surface of a workpiece, it is a figure for demonstrating the process of calculating | requiring the 2nd measurement plane which means the said other end surface, (a) is a probe contactor. It is a figure which shows the process made to contact | abut on an other end surface, (b) is a figure for demonstrating making a contactor contact | abut on four points of an other end surface. It is a figure for demonstrating the example which displays the 1st measurement plane demonstrated with reference to FIG. 40 on the display part contained in the optical three-dimensional coordinate measuring device of an Example. It is a figure for demonstrating the example which displays the 2nd measurement plane demonstrated with reference to FIG. 41 on the display part contained in the optical three-dimensional coordinate measuring device of an Example. In order to explain an example in which the first and second measurement planes are displayed on the display unit included in the optical three-dimensional coordinate measuring instrument of the embodiment and the distance between the actually measured first and second measurement planes is displayed. FIG. It is a figure which shows the example of the navigation image displayed on a display part during the operation | work which measures the axial distance of the two cylindrical parts contained in a workpiece. FIG. 10 is a diagram showing another example of a navigation image displayed on the display unit during the work when performing measurement related to two cylindrical parts included in the workpiece. It is a flowchart for demonstrating the procedure which performs the measurement relevant to the two cylindrical parts contained in a workpiece. It is a figure which shows an example of the measurement condition setting screen regarding the measurement relevant to two cylindrical parts contained in a workpiece. It is a figure which shows the example of a display of the cylinder file displayed by selecting one of the several choices (cylinder) contained in the measurement condition setting screen of FIG. It is a figure which shows the example of a display of the 3D model of the cylinder of the measuring object which can be displayed on the measurement condition setting screen of FIG. It is a figure for demonstrating the example in which a navigation image is displayed on the measurement condition setting screen of FIG. It is a figure which shows an example of the navigation image displayed on a display part with the setting of a measurement point, and this. It is a figure which expands and shows the example of a display of the cylindrical 3D model of the measurement object which can be displayed on a measurement condition setting screen. It is a figure which shows the example of a display immediately after setting all the items using a measurement condition setting screen. It is a flowchart for demonstrating the procedure when an operator performs a measurement operation. It is a figure which shows an example of the navigation image which an operator can display on a display part during a measurement operation. It is a figure which shows the other example of the navigation image which an operator can display on a display part during a measurement operation | work. It is a figure which shows the example of a display in the time of a series of work being completed. It is a figure which shows an example of the navigation image regarding the table displacement which can be displayed on a display part, when an operator performs a measurement operation | work. It is a figure which shows an example of the warning display displayed on a display part when the point different from the set work point is measured. It is a figure which shows an example of the warning display displayed on a display part, when an operator measures in an unlocked state on condition that the table lock | rock is set. It is a figure for demonstrating the example which displays the range which can displace a table on a display part. It is the figure which looked at the workpiece | work provided with the through hole from the one end side regarding the coaxial measurement which should maintain a measurement precision using the mobility of a table. It is a figure for demonstrating the example which moved the table to the plus side of the X-axis when measuring the opening part of the one end side of the workpiece provided with the through-hole. It is a figure for demonstrating the example which moved the table to the minus side of the X-axis when measuring the opening part of the other end side of the workpiece provided with the through-hole. It is a figure which shows the example which displayed the cylindrical shape of the opening part of the one end side and other end side of the through-hole of a workpiece superimposed. It is a figure which shows a part of measurement condition setting screen which can set a coaxiality measurement mode in a measurement operation. It is a figure for demonstrating the example which rotated the table counterclockwise in the measurement operation | work of a workpiece. It is a figure for demonstrating the example which rotated the table clockwise in the measurement operation | work of a workpiece. It is a figure which shows an example of the setting screen which can be displayed on a display part when measuring the outer peripheral surface or inner peripheral surface of the cylindrical part contained in a workpiece. It is a figure which shows the height level guide column which can be displayed on a display part in relation to the measurement in the same height level. It is a figure which shows an example of the actual measurement screen which can be displayed on a display part during the operation | work of the measurement at the same height level. It is a figure for demonstrating the example of a display of the object part shape selection column preferable to include in the measurement condition setting screen in the case of the measurement at the same height level. It is a figure which shows the example of a display of the operation procedure guide display column preferable to display on a display part in the case of the measurement of the same height level. It is a figure which shows the example of a display of the operation procedure guide display column preferable to display on a display part in the stage which the setting operation | work of the measurement of the same height level was completed. It is a flowchart for demonstrating the procedure of the measurement of the same height level. It is a figure which shows the example which added the height level guide column to the actual measurement screen displayed on a display part when measuring the same height level. It is a figure which shows an example of the warning display which can be displayed on a display part, when measuring at the height level different from the designated height level. It is a figure for demonstrating the example which attaches the image image | photographed with the sub imaging part to the test result of height measurement.

  Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings.

Overall system configuration :
1 to 17 are diagrams for explaining the overall outline of the measurement system. FIG. 1 is a perspective view of a three-dimensional coordinate measuring system including an optical three-dimensional coordinate measuring device CMI according to an embodiment. The optical three-dimensional coordinate measuring machine CMI is designed to be operated by workers at the manufacturing site. Referring to FIG. 1, the optical three-dimensional coordinate measuring device CMI includes a main body 100, a probe 200, and a main body operation unit 300. The probe 200 and the main body operation unit 300 are connected to the main body 100 by wire or wirelessly. The probe 200 is used by an operator to designate a measurement position. The optical three-dimensional coordinate measuring instrument CMI is used by connecting to a personal computer PC. A printer may be connected to the personal computer PC so that the measurement results can be printed out.

  FIG. 2 shows an overall configuration of a three-dimensional coordinate measuring system including a personal computer PC and an optical three-dimensional coordinate measuring device CMI. Referring to FIG. 2, personal computer PC includes a storage unit 2, a control unit (CPU) 4, and an operation unit 6 such as a keyboard and a mouse, as is well known.

  Returning to FIG. 1, the main body 100 includes a horizontal portion 102 and an upright portion 104 that rises from one end of the horizontal portion 102, and a rectangular table 400 is mounted on the other end of the horizontal portion 102 so as to be displaceable. Has been. In addition, the display unit 500 is disposed in an inclined state at a junction between the horizontal portion 102 and the upright portion 104. The display unit 500 displays information related to the three-dimensional coordinate measurement of the measurement object.

  In the horizontal portion 102, a control board (reference numeral 106 in FIGS. 2 and 9) is built in the vicinity of the upright portion 104, that is, between the table 400 and the upright portion 104, although it does not appear in FIG. Has been. On the control board 106, an A / D converter (analog / digital converter) and a FIFO (First In First Out) memory (not shown) are mounted.

Main imaging unit (stationary camera) :
A main imaging unit 600 is disposed at the upper end of the upright portion 104. The main imaging unit 600 may be integrated with the upright portion 104, but is preferably detachable from the upright portion 104. Since the main imaging unit 600 has a detachable structure, the main imaging unit 600 can be transported in a detached state. Therefore, it is not necessary to transport all of the optical three-dimensional coordinate measuring device CMI for the calibration of the main imaging unit 600. A memory (not shown) may be mounted on the main imaging unit 600. Calibration data can be stored in this memory.

  The main imaging unit 600 is, for example, a CCD (charge coupled device) camera. When the marker described later emits infrared rays, the image pickup element of the electronic camera is preferably constituted by a CMOS (complementary metal oxide semiconductor) image sensor that can detect infrared rays correspondingly. The main imaging unit 600 is fixed to the standing portion 104 in a fixed posture so as to image a predetermined imaging space V (FIG. 3 described later). Specifically, the stationary main imaging unit 600 is positioned so that the optical axis of the camera is inclined downward toward the table 400 (FIG. 3).

The display unit 500 is preferably configured by a flat display such as a liquid crystal display panel or an organic EL panel. The display unit 500 displays an image generated by the personal computer PC based on the control by the control board 106 (FIG. 2), an operation procedure screen of the optical three-dimensional coordinate measuring instrument CMI, that is, a navigation screen, or a measurement result. Is done.

Probe : Referring to FIG. 4 that shows an enlarged view of the probe 200, the probe 200 has a substantially T-shaped outer shape. That is, the probe 200 includes a gripper 202 that is gripped by an operator with a hand and operates the probe 200, and a marker installation unit 204 that extends linearly across one end of the gripper 202. One end of the grip portion 202 joins the central portion in the longitudinal direction. The outer shape of the probe 200 will be described in more detail. The gripper 202 extends in a first direction D1, and the marker setting unit 204 extends in a second direction D2 that intersects the first direction D1. If the angle formed by the first direction D1 and the second direction D2 is defined as the angle φ formed by the gripper 202 and the front portion of the marker setting unit 204, the angle φ is preferably an acute angle.

The probe 200 shown in the figure is supplied with power through a wiring 206 connected to the lower end of the gripper 202. However, as a modification, a battery may be incorporated in the probe 200. The probe 200 is not shown for drawing reasons, but has a built-in memory. Calibration data of the probe 200 is stored in this memory.

The probe 200 is of a contact type, and a stylus 208 is attached to one end surface of the marker installation unit 204. The stylus 208 has a spherical contact 208a at its tip. As a modification, the contact 208a may be needle-shaped. Of course, the probe 200 may be a non-contact type.

To make the explanation easier to understand, use the terms front and rear and top and bottom. The terms “front”, “back”, and “upper” are defined in a state when the operator holds the probe 200. The stylus 208 is located at the front end of the marker installation unit 204. And the marker installation part 204 is extended in the front-back direction. The gripper 202 extends downward from the central portion in the longitudinal direction of the marker installation unit 204.

A sub-imaging unit 210 is installed on the front end surface of the marker installation unit 204. The sub-imaging unit 210 is constituted by, for example, a CCD (Charge Coupled Device) camera, and its optical axis is directed forward. The resolution of the sub imaging unit (probe camera) 210 may be lower than the resolution of the main imaging unit (stationary camera) 600. The sub imaging unit 210 is disposed at a position where the positional relationship between the stylus 208 and the contact 208a is known. A light reception signal is output from each pixel of the sub-imaging unit 210 to the control board 106 (FIG. 2).

The marker installation unit 204 has an upper surface 204a. The upper surface 204a is positioned to face the grip portion 202. When the operator grips the probe 200 and performs measurement work, the upper surface 204a can be directed to the main imaging unit (stationary camera) 600.

A plurality of first markers 212 are arranged on the upper surface 204a of the marker installation unit 204 at intervals. When this first marker 212 is referred to as a “probe marker”, a preferred arrangement of the plurality of first probe markers 212 is exemplarily shown in FIG.

Still referring to FIG. 4, the upper surface 204a extending in the front-rear direction is divided into three blocks, and a total of seven probe markers 212 are disposed. The first block 220 is located at the front end portion of the upper surface 204a, and three probe markers 212 are arranged on the first block 220. The second block 222 is located at the center of the upper surface 204a, and two probe markers 212 are arranged on the second block 222. The third block 224 is located at the rear end of the upper surface, and two probe markers 212 are arranged on the third block 224.

Regarding the longitudinal axis of the marker installation unit 204, reference numerals L1, L2, and L3 in FIG. 4 indicate the longitudinal axes of the blocks 220, 222, and 224, respectively. The three probe markers 212 in the first block 220 are optionally arranged at three vertices of an equilateral triangle, and are arranged symmetrically with respect to the longitudinal axis L1 of the upper surface 204a. The two probe markers 212 in the second block 222 are disposed at a distance on the longitudinal axis L2 of the upper surface 204a. The two probe markers 212 in the third block 224 are arranged on a line perpendicular to the longitudinal axis L3 of the upper surface 204a with a space therebetween.

In addition, the first plane PL (1) occupied by the three probe markers 212 of the first block 220, the second plane PL (2) occupied by the two probe markers 212 of the second block 222, and 2 of the third block 224 The third plane PL (3) occupied by the two probe markers 212 is parallel to each other. There is a first height difference between the first plane PL (1) and the second plane PL (2). Similarly, there is a second height difference between the second plane PL (2) and the third plane PL (3). The first height difference and the second height difference may be the same or different. In the probe 200 of the embodiment, as can be seen from the drawing, the second block 222 protrudes outward most.

As described above, it is possible to improve the detection accuracy of the orientation of the probe 200 described later by arranging the plurality of probe markers 212 at intervals. Further, by providing a height difference between the plurality of probe markers 212, the detection accuracy of the orientation of the probe 200 can be further improved. Further, by arranging a plurality of probe markers 212 in each of the plurality of blocks 220, 222, and 224, and by making the arrangement relationship of the probe markers 212 in each of the plurality of blocks 220, 222, and 224 different. The detection accuracy of the orientation of the probe 200 can be further improved.

The probe marker 212 may be a retroreflective type, but is preferably a self-luminous type. In the embodiment, the probe marker 212 is composed of a self-luminous type marker that employs an infrared LED as a light source. An infrared ray having a wavelength of 860 nm is emitted from each probe marker 212 intermittently, preferably periodically. Infrared rays emitted from the plurality of probe markers 212 are imaged by the main imaging unit 600.

5-7 is a figure for demonstrating the internal structure of the probe 200. FIG. The probe 200 has a holding member 230 in a case forming its outer contour. The holding member 230 is made of a material having a low hygroscopic property and a small linear expansion coefficient. The linear expansion coefficient of the holding member 230 is preferably 30 × 10 ⁻⁶ / K or less. As the material of the holding member 230, for example, glass, ceramics, metal, alloy, or glass ceramics is used. In particular, it is preferable to use quartz glass that is light and low in cost. The linear expansion coefficient of quartz glass is 0.5 × 10 ⁻⁶ / K.

The holding member 230 includes a substantially triangular first window 230 a that defines the first block 220, a second window 230 b that defines the second block 222, and a third window 230 c that defines the third block 224. Has been.

Facing the first window 230a, the second window 230b, and the third window 230c, the first to third marker members 232a, 232b, and 232c are located, respectively, and the first to third diffusions are located therebelow. The plates 234a, 234b, 234c are located, and the first to third light emitting substrates 236a, 236b, 236c are located thereunder.

Since the first to third marker members 232a, 232b, and 232c basically have the same configuration, when collectively referred to as the marker member 232, FIG. 6 is a cross-sectional view of the marker member 232. is there. A circular light transmission region CR corresponding to the probe marker 212 described above is formed on one surface (the upper surface in FIG. 6) of the marker member 232.

Referring to FIG. 6, the main material of marker member 232 is plate member GP made of a flat glass plate. The plate-like member GP has high translucency. As a material for the plate member GP, for example, quartz glass or soda glass is used. In particular, quartz glass having a small linear expansion coefficient and low hygroscopicity is preferably used as the material of the plate member GP. The plate member GP is preferably made of the same material as the holding member 230 described with reference to FIG. Further, the smaller the difference between the linear expansion coefficient of the plate-like member GP and the linear expansion coefficient of the holding member 230 (FIG. 5), the easier the temperature correction becomes, and this is preferable. In this embodiment, both the holding member 230 and the plate member GP are made of quartz glass.

The light transmission region CR described above is formed by printing a light-shielding mask MK on one surface of the plate member GP so as to surround the light transmission region CR. That is, the light transmission region CR is defined by the light shielding mask MK. The light shielding mask MK may be formed by sputtering or vapor deposition. As a material for the mask MK, it is preferable to use a metal material having high adsorbability to glass (strong adhesion). A specific example is chromium. The mask MK may be composed of a single light shielding film, or a plurality of light shielding films may be stacked to form the mask MK. The plurality of light shielding films may be made of the same light shielding material, but may be made of different light shielding materials. That is, it is preferable to form a mask MK made of a laminated film having a high film strength by further laminating a light shielding film of another metal material on the light shielding film of the first metal material that is easily adsorbed to glass. Further, the mask MK may be formed using emulsion ink or other organic ink.

The outline of the light transmission region CR that transmits infrared light is not limited to the circular shape described above. The outline shape of the light transmission region CR is arbitrary. The light transmission region CR may have, for example, an arrow outline. By adopting a shape having directionality, the number of light transmission regions CR can be reduced.

Although the example which employ | adopted the flat glass plate as the material of plate-shaped member GP was mentioned above, area | region CR may have hemispherical convex shape. By making the region CR into a hemispherical convex shape, the accuracy of specifying the marker position can be increased.

Still referring to FIG. 6, the first to third diffusion plates 234 a, 234 b, and 234 c described above basically have the same configuration, and hence are collectively referred to as a diffusion plate 234. FIG. 7 is a partial cross-sectional view of the holding member 230. Referring to FIG. 7, diffusion plate 234 is arranged under plate-like member GP (marker member 232). The diffusion plate 234 has a function of transmitting light while diffusing, and is made of, for example, a resin material. The diffusion plate 234 may have a larger area than the marker member 232, and may have a larger area than the first window 230a, the second window 230b, and the third window 230c.

Since the first to third light emitting substrates 236a, 236b, and 236c described above basically have the same configuration, they are collectively referred to as a light emitting substrate 236. A plurality of light emitting elements L are mounted on the upper surface of the light emitting substrate 236. A plurality of light emitting elements L are substantially uniformly disposed on the entire light emitting substrate 236 that is disposed so as to overlap the diffusion plate 234. In this embodiment, each light emitting element L is composed of an infrared LED (light emitting diode). As a modification of the light emitting element L, an LED that emits light of another wavelength may be used, or a filament may be used.

Still referring to FIG. 7, it is preferable that the light emitting substrate 236 and the diffusion plate 234 are arranged apart from each other. And it is good to comprise the surrounding wall of this clearance gap S by the diffuse reflection sheet RS. The diffuse reflection sheet RS has a function of reflecting light while diffusing it. The diffuse reflection sheet RS may be fixed to the holding member 230 with an adhesive. As a modification, a mirror sheet may be used instead of the diffuse reflection sheet RS.

Stage unit : The table 400 will be described in detail with reference to FIGS. The table 400 is supported by a stage base 402. The stage base 402 constitutes a part of the horizontal portion 102 of the main body 100. The stage base 402 may be integrated with the horizontal portion 102, but in this embodiment, the stage base 402 is detachable with respect to the remaining portion of the horizontal portion 102.

  The table 400 is typically composed of an optical surface plate. On the table 400, a workpiece, that is, a measurement object WP is placed. In this example, the table 400 has a substantially square shape. A plurality of screw holes Th are formed in the table 400 so as to be arranged at equal intervals in two directions orthogonal to each other. Thereby, the workpiece WP can be fixed to the table 400 by the upper clamp member and the fixing screw.

As a mechanism for fixing the workpiece WP to the table 400, a system such as magnetic force or adhesion may be adopted. That is, the table 400 may be made of a magnetic material, or adhesiveness may be imparted to the upper surface of the table 400. For example, an adhesive plate or sheet may be fixed on the table 400.

The table 400 has a second marker 410. Although the structure which incorporates the 2nd marker 410 in the table 400 may be employ | adopted, Preferably, the 2nd marker 410 is comprised by the single stage marker unit 412 like this Example, and this stage marker unit 412 is comprised. The table 400 may be detachable. Hereinafter, the second marker 410 is referred to as a “stage marker”.

FIG. 8 shows a stage unit SY composed of a stage base 402 and a table 400 assembled thereto. The stage base 402 is coupled to the horizontal portion 102 of the main body 100 in this state. Referring to FIG. 9, stage marker unit 412 is detachably attached to table 400. The table 400 includes a plurality of positioning pins 414, the stage marker unit 412 is positioned by being guided by the plurality of positioning pins 414, and is fixed to a predetermined position of the table 400 using a fixing screw 416. The stage marker unit 412 is supplied with power through the main body 100. As a modification, a battery for driving the stage marker unit 412 may be incorporated in the marker unit 412.

Referring to FIG. 9, the number and arrangement positions of stage marker units 412 are arbitrary. A plurality of stage marker units 412 may be arranged on the table 400, but in this embodiment, a single stage marker unit 412 is detachably provided on the table 400. Regarding the arrangement of the single stage marker unit 412, it is most preferable that the stage marker unit 412 is arranged in a portion of the rectangular table 400 closest to the main imaging unit 600. The table 400 has a first side edge 400a close to the main imaging unit 600 and a second side edge 400b far away. The single stage marker unit 412 is preferably arranged at the central portion of the first side edge 400 a of the table 400.

The illustrated optical three-dimensional coordinate measuring device CMI is designed so that an operator can access from a position facing the main imaging unit 600. In other words, the operator accesses the optical three-dimensional coordinate measuring device CMI from the side of the second side edge 400b of the table 400 against the upright portion 104 of the main body 100.

Details of Stage Marker Unit : FIGS. 10 to 13 show a stage marker unit 412. FIG. 10 is a perspective view of the stage marker unit 412. FIG. 11 is a plan view of the stage marker unit 412. FIG. 12 is an exploded perspective view of the stage marker unit 412. 13 is a cross-sectional view taken along line XIII-XIII in FIG.

Referring to FIG. 11, stage marker unit 412 has an elongated shape extending linearly and includes a plurality of stage markers 410. It is preferable to provide a height difference between the plurality of stage markers 410. The stage marker unit 412 has three blocks 422a, 422b, and 422c. The first block 422 a is located at one end portion of the stage marker unit 412. The second block 422 b is located at the center portion of the stage marker unit 412. The third block 422 c is located at the other end portion of the stage marker unit 412. There may be a height difference between the first block 422a and the third block 422c and the second block 422b.

In the embodiment, the second block 422b located in the central portion is high, and the first and third blocks 422a and 422c are low. Of course, apart from this, the second block 422b located in the central portion may be low and the first and third blocks 422a and 422c may be high. Preferably, the first and third blocks 422a and 422c may have the same height, but may have different heights. . Further, the first distance between the first block 422a and the second block 422b and the second distance between the second block 422b and the second block 422c may be the same. Thereby, even if the table 400 is displaced in an arbitrary direction, the marker detection accuracy can be maintained constant.

Each of the first to third blocks 422a, 422b, and 422c may have a single stage marker 410, but preferably has a plurality of stage markers 410. In the embodiment, each of the first to third blocks 422a, 422b, and 422c has two stage markers 410, but the first to third blocks 422a, 422b, and 422c have different numbers of stage markers 410. You may have. For example, the first to third blocks 422a and 422b may have two stage markers 410, and the central second block 422b may have three stage markers 410. The plurality of stage markers 410 belonging to each of the blocks 422a, 422b, 422c are preferably spaced apart from each other at the same interval.

Referring to FIG. 11, the two stage markers 410 of the second block 422b are arranged on the longitudinal axis L ₀ of the stage marker unit 412 with a first interval. Two stages markers 410 of the first block 422a is arranged at a second distance on the axis L ₄ intersecting the longitudinal axis L _0. Further, the two stage markers 410 of the third block 422c are arranged on the axis L5 intersecting the longitudinal axis L3 with a _third interval. In the two adjacent blocks 422a, 422b or 422b, 422c, the first arrangement direction of the stage marker 410 of one block 422a or 422c is different from the second arrangement direction of the stage marker 410 of the other block 422b. Yes. Preferably, the first to third intervals are equal. In addition, when viewing FIG. 11, the stage marker 410 is preferably left-right asymmetric.

As described above, there may be a height difference between the first block 422a and the third block 422c and the second block 422b. That is, referring to FIG. 11, the first plane PL (4) occupied by the two stage markers 410 belonging to the first block 422a and the second plane PL (5 occupied by the two stage markers 410 belonging to the second block 422b. ) And the third plane PL (6) occupied by the two stage markers 410 belonging to the third block 422c are parallel to each other. There is a first height difference between the first plane PL (4) and the second plane PL (5). Similarly, there is a second height difference between the second plane PL (5) and the third plane PL (6). The first height difference and the second height difference may be the same or different.

The stage marker 410 may be a retroreflective type similarly to the probe marker 212 described above, but is preferably a self-luminous type. In the embodiment, the stage marker 410 is composed of a self-luminous type marker that employs an infrared LED as a light source. Each stage marker 410 periodically emits infrared light having a wavelength of 860 nm. By incorporating the stage marker unit 412 into the table 400, each stage marker 410 is directed to the main imaging unit 600. Infrared rays emitted from the plurality of stage markers 410 are imaged by the main imaging unit 600.

The case CA of the stage marker unit 412 has the same basic design as the holding member 230 (FIG. 5) of the probe 200 described above. Further, the internal structure (FIGS. 5 to 7) of the stage marker unit 412 has the same basic design as the internal structure of the holding member 230 of the probe 200. Therefore, the stage marker unit 412 will be described using the same reference numerals for the elements common to the probe 200.

Referring to FIG. 12, case CA of stage marker unit 412 may be made of a material having a low hygroscopic property and a low linear expansion coefficient, like holding member 230 (FIG. 5) of probe 200. Therefore, regarding the case CA of the stage marker unit 412, refer to the description of the holding member 230 described above. Of course, the material of the case CA may be, for example, glass, ceramics, metal, alloy, or glass ceramics. In the embodiment, quartz glass is used for the case CA of the stage marker unit 412.

The case CA includes an oval first window 430a that defines the first block 422a, an oval second window 430b that defines the second block 422b, and a third window 430c that defines the third block 422c. And are formed.

The first to third marker members 432a, 432b, and 432c are located facing the first window 430a, the second window 430b, and the third window 430c, respectively, and the first to third diffusions are located therebelow. The plates 434a, 434b, and 434c are located, and the first to third light emitting substrates 436a, 436b, and 436c are located thereunder.

A circular light transmission region CR corresponding to the stage marker 410 is formed on one surface (the upper surface in FIG. 13) of the first to third marker members 432a, 432b, and 432c. Since the first to third marker members 432a, 432b, and 432c basically have the same configuration, they are collectively referred to as a marker member 432.

Referring to FIG. 13, the marker member 432 is the same as the marker member 232 (FIG. 6) of the probe 200, and the main material is a plate member GP made of a flat glass plate. Therefore, it should be understood that the marker member 432 of the stage marker 410 has the same configuration as the marker member 232 (FIG. 6) of the probe 200. Specifically, the plate-like member GP has high translucency. As an example of the material of the plate member GP, quartz glass or soda glass is used. For example, quartz glass having a low linear expansion coefficient and low hygroscopicity is used. The plate member GP is preferably made of the same material as the case CA. In the embodiment, the case CA and the plate member GP are both made of quartz glass.

The light transmission region CR described above is formed by printing a light-shielding mask MK on one surface of the plate member GP so as to surround the light transmission region CR. It should be understood that the light shielding mask MK is the same as the marker member 232 (FIG. 6) of the probe 200. As a material for the mask MK, it is preferable to use a metal material having high adsorbability to glass (strong adhesion). A specific example is chromium. The mask MK may be composed of a single light shielding film, or a plurality of light shielding films may be stacked to form the mask MK. Further, the mask MK may be formed using emulsion ink or other organic ink.

The outline of the light transmission region CR that transmits infrared light is not limited to a circle. The outline shape of the light transmission region CR is arbitrary. The light transmission region CR may have, for example, an arrow outline. By adopting a shape having directionality, the number of light transmission regions CR can be reduced.

Although the example which employ | adopted the flat glass plate as the material of plate-shaped member GP was mentioned above, area | region CR may have hemispherical convex shape. By making the region CR a hemispherical convex shape, the accuracy of specifying the position of the stage marker 410 can be increased.

Referring to FIGS. 12 and 13, first to third diffusion plates 434 a, 434 b, and 434 c have basically the same configuration, and hence are collectively referred to as diffusion plate 434. The diffusion plate 434 is the same as the diffusion plate 234 of the probe 200 (FIG. 7). That is, the diffusion plate 434 has a function of transmitting light while diffusing, and is made of, for example, a resin material. The diffusion plate 434 may have a larger area than the marker member 432, and may have a larger area than the first window 430a, the second window 430b, and the third window 430c.

Referring to FIGS. 12 and 13, the first to third light emitting substrates 436a, 436b, and 436c described above basically have the same configuration, and hence are collectively referred to as a light emitting substrate 436. . A plurality of light emitting elements L are mounted on the upper surface of the light emitting substrate 436 of the stage marker 410. A plurality of light emitting elements L are arranged substantially uniformly on the entire light emitting substrate 436 arranged to overlap the diffusion plate 434. In this embodiment, each light emitting element L is composed of an infrared LED (light emitting diode). As a modification of the light emitting element L, an LED that emits light of another wavelength may be used, or a filament may be used.

Reference numerals 440a, 440b, and 440c shown in FIGS. 10 to 12 denote light shielding sheets. In order to prevent light from leaking from the surroundings of the windows 430a, 430b, and 430c, light leakage prevention means such as light shielding sheets 440a, 440b, and 440c are provided around the windows 430a, 430b, and 430c. Is good.

Table displacement : The table 400 is preferably displaceable. 1 and 9 show a state in which the table 400 is fixed at the original position. FIG. 14 shows a state in which the table 400 is displaced from the original position (FIG. 9). In order to make the explanation of the displacement from the original position of the table 400 easy to understand, FIG. 9 shows the X axis, the Y axis, and the Z axis.

As described above, the optical three-dimensional coordinate measuring machine CMI is opposed to the display unit 500 that is directed obliquely upward while standing on the upright unit 104 and from the second side edge 400b side of the table 400 from the operator side. Is designed to be accessed. When viewed from the operator, the X-axis extends in a direction transverse to the imaging space V, that is, in the left-right direction, the Y-axis extends in a direction that crosses the imaging space V, that is, in the front-rear direction, and the Z-axis is in the vertical direction It extends to.

In the embodiment, the table 400 can translate in the direction of the X axis, that is, the direction crossing the imaging space V. The table 400 can rotate clockwise and counterclockwise about the Z axis. The displacement from the original position of the table 400 is not limited to the X-axis direction and the rotation direction about the Z-axis, and is arbitrary. For example, it may include a so-called tilt displacement in which an arbitrary other side of the rectangular table 400 is displaced up and down, for example, around one side.

The table 400 may be displaceable in the Y-axis direction, that is, the front-rear direction. However, since the front-rear direction (Y-axis direction) may hinder the reading accuracy of the stage marker 410, it is preferable to arrange a plurality of stage marker units 412 on the table 400 so as to complement this.

The table 400 may be displaceable in the Z-axis direction, that is, in the up-down direction. Instead, the main imaging unit 600 may be designed to be displaceable in the Z-axis direction.

System Operation : Referring to FIGS. 1 and 2, the light reception signals output from the main imaging unit 600 and the sub-imaging unit 210 (FIG. 4) of the probe 200 are transmitted by the A / D converter of the control board 106. It is sampled at a constant sampling period and converted into a digital signal. Digital signals output from the A / D converter are sequentially stored in the FIFO memory. The digital signals stored in the FIFO memory are sequentially transferred to the personal computer PC as pixel data.

In the embodiment, the light emission timing of the probe marker 212 and the stage marker 410 and the imaging timing of the main imaging unit 600 are synchronized. Pixel data accumulated during the light emission period of the plurality of markers 212 and 410 is transferred from the control board 180 to the personal computer PC during the extinction period of the next marker 212.

Since the light emission timing of the probe marker 212 and the light emission timing of the stage marker 410 are simultaneous light emission as described above, the probe marker 212 and the stage marker 410 can be easily distinguished. Alternate light emission and simultaneous light emission may be combined. That is, the position information of the probe marker 212 and the stage marker 410 is obtained by alternate light emission, and the accurate position information of the probe marker 212 and the stage marker 410 and the relative position information of the probe marker 212 and stage marker 410 are obtained by the next simultaneous light emission. You may do it.

The storage unit 2 of the personal computer PC includes a ROM (read only memory), a RAM (random access memory), and a hard disk. The storage unit 2 stores a system program. The storage unit 2 is used for processing various data and storing various data such as pixel data given from the optical three-dimensional coordinate measuring device CMI.

The personal computer PC generates image data based on the pixel data given from the three-dimensional coordinate measuring device CMI. Image data is a set of a plurality of pixel data. The personal computer PC calculates the absolute position of the measurement point after calculating the relative position of the contact 208a of the stylus 208 of the probe 200 based on the generated image data.

The operation unit 300 illustrated in FIGS. 1 and 2 is manually operated by an operator for various settings of the three-dimensional coordinate measuring instrument CMI, changing display contents of the display unit 500, and the like.

Calibration : The main imaging unit 600, the probe 200, and the stage marker unit 412 are transported to a calibration facility for calibration. As for the calibration information, the main imaging unit 600, the probe 200, and the stage marker unit 412 are each equipped with a memory.

Calibration information of the main imaging unit 600 is stored in a memory built in the main imaging unit 600. The characteristics of the main imaging unit 600 include an angle of view (viewing angle), a positional relationship between the imaging element and the plurality of lenses, aberrations of the plurality of lenses, and the like. Calibration information of the probe 200 is stored in a memory built in the probe 200. The calibration information of the probe 200 is information for preventing a decrease in measurement accuracy due to individual differences of the probes 200, and includes the relative positional relationship of the plurality of probe markers 212 and the like. Calibration information of the stage marker unit 412 is stored in a memory built in the stage marker unit 412. The calibration information of the stage marker unit 412 is information for preventing a decrease in measurement accuracy due to individual differences of the stage marker unit 412 and includes the relative positional relationship of the plurality of stage markers 410 and the like.

When the main imaging unit 600 and the stage marker unit 412 are assembled to the three-dimensional coordinate measuring device CMI, calibration information of the main imaging unit 600, the probe 200 and the stage marker unit 412 is supplied to the control board 106 and also supplied to the personal computer PC. Is done. The personal computer PC measures the coordinates of the measurement point of the workpiece WP based on the calibration information.

Detection by main imaging unit : FIG. 15 is a diagram for explaining detection by the main imaging unit. The main imaging unit 600 detects infrared rays emitted from the plurality of probe markers 212 of the probe 200 and the plurality of stage markers 410 of the stage marker unit 412. The principle of specifying the positions of the probe marker 212 and the stage marker 410 will be described with reference to FIG. FIG. 15 illustrates the relationship between the main imaging unit 600 and the probe marker 212, but the relationship between the main imaging unit 600 and the stage marker 410 is the same.

With reference to FIG. 15, in order to facilitate understanding, description will be made using an optically simplified model having the same operation as the pinhole camera model. Reference numeral 602 in FIG. 15 indicates an imaging element substrate included in the main imaging unit 600. FIG. 15 illustrates one lens 604 among a plurality of lenses included in the main imaging unit 600. Light is guided to the image sensor (image sensor substrate 602) so as to pass through the principal point 604a of the lens 604.

The main imaging unit 600 has a certain angle of view (viewing angle) θ. The imaging space V is included in the range of the field angle θ of the main imaging unit 600. When a plurality of probe markers 212 are positioned in the imaging space V, infrared rays emitted from the probe markers 212 enter the imaging element (imaging element substrate 602) through the principal point 604a of the lens 604.

Based on the light receiving position P of the image sensor substrate 602, the direction from the principal point 604a of the lens 604 to each probe marker 212 is specified. In the example of FIG. 15, each probe marker 212 is positioned on each straight line passing through each light receiving position P and the main point 604 a of the lens 604, as indicated by a one-dot chain line. As described above, the relative positional relationship between the plurality of probe markers 212 is given from the probe 200 to the control unit 220 as calibration information of the probe 200.

Based on the direction from the principal point 604a of the lens 604 to each probe marker 212 and the positional relationship of the plurality of probe markers 212, the position of the center of each probe marker 212 is uniquely determined. In the present embodiment, the X axis, the Y axis, and the Z axis that are orthogonal to each other are defined, and the absolute position in the imaging space V is represented by three-dimensional coordinates. The personal computer PC calculates the coordinates of the center of each probe marker 212 based on the light receiving position P of the imaging device (imaging device substrate 602) and the positional relationship of the plurality of probe markers 212 stored in advance.

Based on the calculated coordinates of the center of each probe marker 212, the coordinates of the contact position between the contact 208a (FIG. 4) of the probe 200 and the workpiece WP are calculated by the personal computer PC.

For example, the positional relationship between the center of each probe marker 212 and the center of the contact 208a (FIG. 4) is stored in advance in the storage unit 2 of the personal computer PC. Based on the calculated coordinates of the center of each probe marker 212 and the positional relationship between the center of each probe marker 212 and the center of the contact 208a stored in advance, the coordinates of the center of the contact 208a are specified.

Further, the posture of the probe 200 is specified based on the coordinates of the center of each probe marker 212. Thereby, the direction of the stylus 208 is specified. Further, the moving direction of the contact 208a is specified based on the change in the coordinates of the center of each probe marker 212. Usually, the contact 208a is brought close to the perpendicular to the surface of the workpiece WP. Therefore, the relative positional relationship between the center of the contact 208a and the contact position is estimated based on the specified direction of the stylus 208 and the moving direction of the contact 208a. Based on the estimated positional relationship, the coordinates of the contact point between the contact 208a and the workpiece WP are calculated from the coordinates of the center of the contact 208a.

A sensor that detects the direction of the force applied to the contact 208a from the workpiece WP may be provided in the probe 200. In that case, the coordinates of the contact position between the contact 208a and the workpiece WP can be calculated based on the detection result of the sensor.

  FIG. 16 is a diagram for schematically explaining a state change in which a measurement operation is performed in a state where the table 400 is displaced from the original position. For example, when the table 400 to which the workpiece WP is fixed is displaced in the left-right direction as viewed from the X axis (FIG. 9), that is, from the operator, the stage marker 410 is displaced together with the table 400. Accordingly, the light receiving position of the stage marker 410, that is, the light receiving position of the image sensor substrate 602 (FIG. 15) is displaced. Then, the light receiving position of the probe marker 212 is specified in relation to the displaced light receiving position.

  Therefore, the captured image of the main imaging unit (stationary camera) 600 includes the first information on the position and orientation of the probe 200 and the second information on the position and orientation of the table 400. Then, by processing the captured image, position information of the contact 208a (FIG. 4) of the probe 200 can be obtained (FIGS. 16 and 17).

The optical three-dimensional coordinate measuring machine CMI has a plurality of three-dimensional coordinate systems, and measurement or display is performed by appropriately using the plurality of three-dimensional coordinate systems. The plurality of three-dimensional coordinate systems include at least a fixed coordinate system. When this is called an “absolute coordinate system” or “absolute position coordinate”, the “absolute coordinate system” or “absolute position coordinate” is a coordinate system when the workpiece WP is viewed from the operator. Even if the table 400 is displaced, this coordinate system is a fixed coordinate system that does not change. In other words, it is a coordinate system when the workpiece WP is viewed from the stationary main imaging unit 600.

The plurality of three-dimensional coordinate systems also include a coordinate system that moves with the displacement of the table 400. When this is called “relative coordinate system” or “relative position coordinate”, the “relative coordinate system” or “relative position coordinate” is related to the displacement of the workpiece WP in relation to the displacement of the table 400, that is, the displacement of the workpiece WP. However, it is fixed and not displaced when viewed from the workpiece WP.

With reference to FIG. 17, the imaging space of the stationary main imaging unit 600 corresponds to an absolute coordinate system. The main image pickup unit 600 has a plurality of pixels built therein, and will be described using the term “camera coordinate system” which is generally called. In the embodiment, the surface of the image pickup element substrate 602 (FIG. 15) The XY coordinates of the camera coordinate system, that is, the absolute coordinate system are configured.

On the other hand, in the relative coordinate system, for example, the XY coordinate axes are set on the surface of the table 400, that is, the workpiece placement surface. This is called a table coordinate system. The relative coordinate system is not limited to the table coordinate system. For example, when measuring a plurality of measurement points at a constant height level in measurement of a part of the workpiece WP, an XY coordinate axis may be set on a surface serving as a reference for the height level. More specifically, when the workpiece WP includes a cylindrical projection that is a geometric element, when a plurality of measurement points are set on the circumference at a predetermined height level of the cylindrical portion, the cylindrical shape The surface on which the base end of the protrusion is positioned is preferably set as a reference surface, and the XY coordinate axes are set on this reference surface.

In the embodiment, based on image processing, the position and orientation of the probe 200 and the position and orientation of the table 400 are calculated in an absolute coordinate system. That is, in the embodiment, parameters such as the displacement amount and displacement direction of the table 400 from the original position can be substantially detected based on the image optically captured by the main imaging unit 600.

The relative coordinate system is used for extracting geometric elements included in the workpiece WP, for example, points, straight lines, planes, cylinders, spheres, and the like. When the table 400 is moved and the length dimension of the long workpiece WP is measured, the length dimension of the workpiece WP may be obtained by converting from the relative coordinate system to the absolute coordinate system. Of course, the relative position coordinate of the relative coordinate system can be used for local measurement (for example, measurement of the inner diameter of the opening included in the workpiece WP, the diameter of the convex portion or the concave portion, etc.).

The relative coordinate system is used to determine the relative position of a geometric element based on a plurality of relative position coordinates of the workpiece WP and preset geometric elements (point, straight line, plane, cylinder, sphere, etc.). Used.

Regarding the display of the display unit 500, it is preferable to create an image by converting to an absolute coordinate system. For example, when measuring the length dimension of a long WP, when displaying an image of the first plane representing one end surface of the workpiece WP and the second plane representing the other end surface, by displaying in an absolute coordinate system, The first and second planes can be displayed on the display unit 500 in the same state as the operator is viewing.

  A workpiece WP larger than the imaging space V (for example, a horizontally long workpiece) can be measured by a simple operation of displacing the table 400. Further, even if the workpiece WP fits in the imaging space V, if it is difficult to grasp the position of the probe 200 when viewed from the main imaging unit 600, the measurement accuracy can be improved only by a simple operation of rotating the table 400. Decrease can be prevented. Further, the measurement accuracy can be increased by displacing the table 400 and bringing the surface of the workpiece WP to be measured closer to the main imaging unit 600.

  According to the optical three-dimensional coordinate measuring device CMI, even if the table 400 is displaced, the main imaging unit 600 captures an image, and the relatives of the three of the stage marker unit 412, the probe 200, and the main imaging unit 600 are only at that moment. It is sufficient if the positional relationship can be maintained. Therefore, the main imaging unit 600 and the stage marker unit 412 need not always maintain a fixed fixed relative positional relationship. That is, the measurement accuracy of the optical three-dimensional coordinate measuring device CMI does not depend on the hardware configuration. For example, even if the mounting position of the stage marker unit 412 fixed to the table 400 is slightly shifted, the measurement accuracy of the optical three-dimensional coordinate measuring device CMI is not affected.

  In the embodiment, the main imaging unit 600 of the optical 3D coordinate measuring device CMI is single, but as shown in FIG. 18, the optical 3D coordinate measuring device CMI has, for example, two main imaging units 600. (1) and 600 (2) may be provided. When the optical three-dimensional coordinate measuring instrument CMI has a plurality of main imaging units 600 as described above, the same imaging space V is preferably viewed in stereo by the plurality of main imaging units 600.

  According to the optical three-dimensional coordinate measuring instrument CMI, it is possible to ensure a certain measurement accuracy and portability using an optical principle without depending on the hardware configuration. In addition to obtaining the three-dimensional position coordinates by electronically processing the captured image electronically, providing an appropriate GUI provides a simple operability even for operators unfamiliar with computer operations at the work site. can do.

  Further, even if the table 400 is displaced, the measurement position coordinates can be obtained by calculating using the captured image by internal processing of the personal computer PC without imposing a burden on the operator. Further, navigation information related to the measurement operation can be provided to a field worker who is unfamiliar with the three-dimensional coordinate measuring instrument using the display unit 500, and the measurement result can be visually displayed. Furthermore, by storing data related to the measurement including the captured image of the sub-imaging unit 210 provided at the tip of the probe 200, it is possible to establish traceability as to which part of the workpiece WP was measured and how. it can. Of course, by using the printer to print various information created by the optical 3D coordinate measuring machine CMI and personal computer PC, it is possible to thoroughly manage the work and improve the convenience of quality control at the factory (production site). .

Table displacement mechanism :
19 to 30 are diagrams for explaining the stage unit. FIG. 19 shows a stage unit SY including the table 400 and the stage base 402 described above. The stage unit SY is detachable from the main body 100. With reference to FIGS. 9 and 19, in the embodiment, the table 400 is movable in the X-axis direction (left-right direction), and is rotatable about the central axis C of the table 400. FIG. 19 shows the stage marker unit 412 (FIGS. 9 and 10) removed.

  FIG. 20 is a diagram for explaining a moving mechanism of the table 400 in the X-axis direction. The stage base 402 has a pair of linear shafts 702 extending in the X-axis direction and parallel to each other. The pair of linear shafts 702 are fixed to the stage base 402. The table 400 is assembled to the X base 704. The X base 704 has a pair of long holes 704a extending in the X-axis direction, and each linear shaft 702 is inserted into each long hole 704a. Preferably, a rubber sleeve 706 as a friction rubbing element is interposed between the long hole 704a of the X base 704 and the linear shaft 702. The pair of rubber sleeves 706 can constitute a first resistance mechanism that resists movement of the table 400 in the X-axis direction. That is, the table 400 does not move in the X-axis direction unless the operator applies a certain force or more in the X-axis direction to the table 400.

  The table 400 is placed on the X base 704 via a cross roller bearing 708. The table 400 has a circular recess 404 on its bottom surface, in which the cross roller bearing 708 is received. As a result, the table 400 can be rotated about the central axis C only by placing the table 400 on the X base 704. The combination of the circular recess 404 and the cross roller bearing 708 can simplify the rotation mechanism of the table 400. In addition, since the structure in which the X base 704 and the table 400 are close in the vertical direction can be realized, the height position of the table 400 can be lowered. Thereby, workability | operativity when mounting or removing the workpiece WP which is generally a heavy article on the table 400 can be improved. Further, the center of gravity of the stage unit SY can be lowered.

Table displacement resistance mechanism :
FIG. 23 illustrates the stage unit SY with the table 400 removed. The stage unit SY has a main resistance mechanism component 710 related to the displacement of the table 400 in the X-axis direction and the rotation direction about the central axis C. In FIG. 23, in order to distinguish between the main resistance mechanism component relating to the X-axis direction and the main resistance mechanism component relating to the rotation direction, the reference symbol X is added to the X-axis direction main resistance mechanism component, and C is added. In the embodiment, the X-axis direction main resistance mechanism component 710 (X) and the rotation direction main resistance mechanism component 710 (C) have the same configuration. Of course, the X-axis direction main resistance mechanism 710 (X) and the rotation direction main resistance mechanism component 710 (C) may have different configurations, and at least one of them uses an oil damper or electromagnetic fluid. You may comprise with a resistance mechanism.

The main resistance mechanism component 710 will be described with reference to FIGS. The main resistance mechanism component 710 has a case 712 and a gear 714 exposed to the outside. The gear 714 is fixed to one end of a shaft 716 that passes through the case 712. The shaft 716 has a circumferential flange 718 in the middle in the longitudinal direction (FIG. 26). Case 712 has a circular recess 720 that accommodates a circumferential flange 718, which is sealed by a lid member 722.

The circular recess 720 accommodates first and second O-rings 724 and 726 and a grease 728 arranged with a circumferential flange 718 interposed therebetween. A bearing 730 is interposed between the case 712, the lid member 722, and the shaft 716.

By fixing the lid member 722 to the case 712 using a plurality of bolts 732, the first and second O-rings 724 and 726 are in pressure contact with the circumferential flange 718. Thereby, it is possible to resist the rotation of the shaft 716, that is, the gear 714.

Referring to FIG. 26, the first and second O-rings 724 and 726 are crushed, that is, the pressure contact force of the first and second O-rings 724 and 726 against the circumferential flange 718 is adjusted with the lid member 722. A spacer sheet 734 may be interposed between the case 712 and the thickness of the spacer sheet 734 or the number of spacer sheets 734. Thereby, the minimum value of the force required for the rotation of the table 400 and the displacement in the X direction can be adjusted.

Reference numeral 740 shown in FIG. 23 indicates a rack member. The rack member 740 is fixed to the stage base 402 and extends linearly in the X-axis direction. The gear 714 of the X-axis main resistance mechanism component 710 (X) meshes with the rack member 740 (FIG. 27). With this configuration, when an external force in the X-axis direction is applied to the table 400, a constant resistance force is generated by the X-axis direction main resistance mechanism component 710 (X) and other resistance mechanisms.

28 and 29 show parts related to the rotation direction main resistance mechanism component 710 (C) related to the rotation of the table 400. FIG. The gear 714 of the rotational direction main resistance mechanism component 710 (C) meshes with a part of the large-diameter internal gear 742. When an external force is applied to the table 400 in a direction in which the table 400 is rotated about the central axis C, a constant resistance force is generated by the rotation direction main resistance mechanism component 710 (C) and other resistance mechanisms.

With the above configuration, when an external force is applied to the table 400 to which the workpiece WP is bolted or to the workpiece WP, the table 400 is prevented from being displaced unless the external force is a certain force or more. Can do. That is, when an external force is applied in the rotation direction of the table 400, the table 400 has a certain resistance force.

Considering the resistance force of the table 400 to the external force, when the contact 208a of the probe 200 is brought into contact with the workpiece WP, the load when the operator strongly applies the contact 208a to the workpiece WP is about 100 gf. An appropriate load for bringing the contact 208a into contact with the workpiece WP is about 50 gf. It is not desirable that the table 400 be displaced while the operator is performing the operation of placing the contact 208a against the workpiece WP. It is preferable that the table 400 is displaced only when the force intended by the operator is applied to the table 400 or the workpiece WP, and the table 400 is stopped simultaneously with releasing the force. However, requiring a large force to displace the table 400 deteriorates workability. With this in mind, the resistance force of the main resistance mechanism component 710 may be set or adjusted. It is preferable to set the resistance force of the main resistance mechanism component 710 with 500 to 800 gf as an external force at which the main resistance mechanism component 710 starts operation. Of course, any mechanism may be adopted as long as it can realize this.

When the operator applies a force to the table 400 to displace the table 400, the component force in the X-axis direction of the operator's operating force or the component force in the direction in which the table 400 can rotate exceeds the predetermined value. Sometimes the table 400 translates and / or rotates in the X-axis direction. The table 400 stops at the moment when this component force falls below a predetermined value.

  The example in which the table 400 is displaced in the X-axis direction and the rotation direction around the central axis C has been described above. As a modification, the table 400 may be movable in the Y-axis direction (front-rear direction: FIG. 9) in addition to the X-axis direction and the rotation direction. FIG. 30 is a diagram for explaining a configuration in which the table 400 can be displaced in the X-axis direction, the rotation direction, and the Y-axis direction. Referring to FIG. 30, a stage unit 750 according to a modification further includes a pair of Y bases 752 that support the pair of linear shafts 702 described above, and guide rails 754 that guide the Y bases 752. The pair of guide rails 754 are fixed to the stage base 402 and extend in the Y-axis direction (front-rear direction: FIG. 9). Thereby, the X base 704, that is, the table 400 can be guided by the guide rail 754 and moved in the Y-axis direction. Although not shown, the main resistance mechanism component 710 described above is preferably interposed between the Y base 750 and the guide rail 754.

Table lock :
FIGS. 31 to 39 are drawings relating to the locking mechanism of the table 400. The table 400 can be displaced from the original position as described above. The table 400 is optional, but is preferably fixable in its original position (FIGS. 1 and 9). Compared to the case where the table 400 is imaged by the main imaging unit 600 in a non-fixed state, the accuracy is better when the table 400 is imaged by the main imaging unit 600 in the locked state. The stage unit SY has a table lock mechanism 760 for fixing the table 400 in the original position. Referring to FIG. 31 and FIG. 32, the stage base 402 has an operation lever 762 on one side thereof, and the table 400 located at the original position when the operator operates the protruding piece 762a of the operation lever 762. Can be locked or unlocked.

  FIG. 31 shows the unlocked state, and the protruding piece 762a of the operation lever 762 is in the horizontal position. FIG. 32 shows a locked state, in which the protruding piece 762a of the operation lever 762 is in the standing position. FIG. 33 is a view of the corners of the lower surface of the table 400 as viewed from below. The table 400 has a lock hole 764 that is open downward, and the lock hole 764 is configured by a tapered surface 764a at an open end, that is, a lower end. The stage base 402 has a lock pin 766 that can be projected and retracted toward the lock hole 764 (FIG. 34), and the lock pin 766 is disposed at a position corresponding to the lock hole 764 of the table 400 in the original position. .

  35 and 36 are diagrams in which the operation lever 762 and the lock pin 766 are extracted. FIG. 35 shows a state when the operation lever 762 is positioned at the unlock position. FIG. 36 shows a state when the operation lever 762 is positioned at the lock position. Referring to FIGS. 35 and 36, stage base 402 incorporates a lock detection mechanism 770 that detects the state of operation lever 762, that is, the lock state of table 400. The lock detection mechanism 770 includes a light projecting / receiving element 772 and a plate 774 that shields the light projecting / receiving element 772. The light shielding plate 774 is mechanically linked to the operation lever 762. When the operation lever 774 is in the unlock position, the light shielding plate 774 is away from the light projecting / receiving element 772 (FIG. 35). When the operating lever 774 is in the locked position, the light shielding plate 774 enters the light projecting / receiving element 772 and is shielded from light (FIG. 36). The locked state and / or unlocked state detected by the lock detecting mechanism 770 can be recognized by an operator, particularly a field worker, by turning on / off an indicator (not shown), for example.

  FIG. 37 is a view for explaining the state of the lock pin 766 when the operation lever 762 is in the unlock position (FIG. 31). FIG. 38 is a view for explaining the state of the lock pin 766 immediately after the operation lever 762 is positioned at the lock position (FIG. 32). FIG. 39 is a view for explaining a state when the operation lever 762 is positioned at the lock position (FIG. 32) and the table 400 continues to be fixed by the lock pin 766.

  (I) of FIGS. 37 to 39 is a plan view of the lock pin 766 as viewed from above, and (II) is a cross-sectional view of the lock pin 766. The lock pin 766 has a pin head 782 surrounded by a sleeve 780 (FIGS. 35 and 36). 37 to 39, the illustration of the sleeve 780 is omitted. The pin head 782 has a shape in which an upper edge portion 782a is chamfered. The pin head 782 has a shaft portion 782b extending downward. The shaft 782b is received in the guide hole 784a of the base member 784 and can move up and down along the axis of the shaft 782b.

  The pin head 782 is biased upward by a spring 786. The base member 784 is fixed to the base plate 788, and the base plate 788 is mechanically connected to the operation lever 762. When the operation lever 762 is in the unlock position, the base plate 788 is positioned in the lower position (FIG. 37). When the operation lever 762 is operated to take the lock position, the base plate 788 is positioned at the upper position displaced upward (FIGS. 38 and 39).

  Reference numeral 790 shown in FIG. 37 indicates the first axis placed on the stage base 402. One end of a swing link 792 is pivotally supported on the first shaft 790. A second shaft 794 is pivotally supported at the other end of the swing link 792. The second shaft 794 is mechanically linked to the operation lever 762. Referring to FIG. 37, when operation lever 762 is in the unlocked position as described above (FIG. 35), second shaft 794 is positioned in the lower position, and accordingly, base plate 788 is positioned in the lower position. . Thereby, the base member 784 and the pin head 782 are positioned at the lower position. That is, the pin head 782 is positioned at an unlock position that is separated from the lower surface of the table 400. Therefore, since the table 400 is released from the pin head 782, it can be displaced in the X-axis direction or the like.

  Referring to FIG. 38, when operating lever 762 is operated in the locking direction, second shaft 794 is lifted and base plate 788 is raised. As a result, the base member 784 and the pin head 782 are raised, and the pin head 782 enters the lock hole 764 of the table 400. The chamfered tip edge portion 782a of the pin head 782 has a chamfered shape, and the lock hole 764 has a tapered surface 764a. it can.

  Referring to FIG. 39, as described above, when the operation lever 762 takes the locked position (FIG. 36), the base plate 788 is positioned at the upper position by the second shaft 794. As a result, the base member 784 and the pin head 782 are positioned in the upper position, and pushed up by this, the pin head 782 enters the lock hole 764 of the table 400 and is positioned. Since the chamfered tip edge portion 782a of the pin head 782 has a chamfered shape and the lock hole 764 has a tapered surface 764a, the pin head 782 is positioned by the tapered surface 764a of the lock hole 764. In this state, the spring 786 is in a compressed state. As a result, the table 400 continues to be fixed at the original position by the pin head 782.

Operation of optical 3D coordinate measuring instrument :
40 and 41, the illustrated workpiece WP has a rectangular parallelepiped shape. The operation of the optical three-dimensional coordinate measuring device CMI will be described by taking as an example the case where the distance between the one end surface Sa of the workpiece WP and the other end surface Sb opposed thereto is measured using the measuring device CMI.

  (1) Referring to FIG. 40, the operator grasps the probe 200 to bring the contact 208a into contact with one end surface Sa of the workpiece WP, and operates the main body operation unit 300 (FIG. 1). The probe unit 212 is imaged by the imaging unit 600, and the coordinates of the contact point of the contact 208a are calculated based on the image. A first contact point of the one end surface Sa is indicated by a symbol M1a (FIG. 40 (b)).

  (2) By sequentially changing the contact point of the contact 208a of the probe 200 and operating each contact point on the one end surface Sa of the workpiece WP in the same manner as the first contact point M1a, at least The coordinates of the three contact points, for example, the second contact point M2a, the third contact point M3a, and the fourth contact point M4a are calculated.

  (3) Based on the contact points (FIG. 40 (b)) of the four contact points M1a to M4a and the plane of the geometric element, the first measurement plane ML1 corresponding to the one end surface Sa of the workpiece WP is set. The

  (4) Referring to FIG. 41, next, the operator brings the contact 208a into contact with the other end surface Sb of the workpiece WP, and operates the main body operation unit 300 (FIG. 1) to operate the main imaging unit. By capturing the probe marker 212 at 600, the coordinates of the contact point of the contact 208a are calculated based on this captured image. A first contact point of the other end surface Sb is indicated by a symbol M1b.

  (5) By sequentially changing the contact point of the contact 208a of the probe 200 and operating each contact point on the other end surface Sb of the workpiece WP in the same manner as the first contact point M1b, at least The coordinates of the three contact points, for example, the second contact point M2b, the third contact point M3b, and the fourth contact point M4b are calculated.

  (6) Based on the plane of the contact point geometric element of the four contact points M1b to M4b, the second measurement plane ML2 corresponding to the other end surface Sb of the workpiece WP is set (FIG. 41 (b)). .

Subsequently, when the operator operates the main body operation unit 300 (FIG. 1) or the operation unit 6 (FIG. 2) of the personal computer PC, the distance between the first measurement plane ML1 and the second measurement plane ML2 is measured. The That is, the distance between the first measurement plane ML1 and the second measurement plane ML2 is measured based on the relative positions of the first and second geometric elements.

As described above, the table 400 can be displaced. When the table 400 is translated, for example, between the first step for obtaining the first measurement plane ML1 and the second step for obtaining the second measurement plane ML2, the first relative position coordinates and the second relative position are calculated. Based on the coordinates and preset planes, that is, the first measurement plane ML1 and the second measurement plane ML2, the distance between the first measurement plane ML1, the second measurement plane ML2, and the second measurement plane ML2. Is measured.

In the course of the above measurement operation, the operator can use the sub-imaging unit 210 (FIG. 4) arranged at the tip of the probe 200 as necessary. Since the sub-imaging unit 210 is installed on the front end surface of the marker installation unit 204 that extends in front of and behind the probe 200, the front area of the probe 200 can be imaged. Thereby, the whole view of the one end surface Sa and the other end surface Sb of the workpiece WP can be obtained.

Further, the table 400 can be displaced according to the above-described measurement work process. For example, if the workpiece WP is a long object, the probe marker 212 can be placed in the field of view of the main imaging unit 600 by moving the table 400 in the X-axis direction. That is, it is possible to measure a large workpiece WP while being a relatively compact optical three-dimensional coordinate measuring device CMI. Further, when measuring a local part such as a recess of the workpiece WP, the table 400 can be displaced so that a good image can be obtained by the main imaging unit 600. Thereby, a captured image that can be easily processed can be obtained. And this can contribute to the improvement of measurement accuracy.

  As described above, the displacement of the table 400 from the original position is obtained by imaging the stage marker 410 of the stage marker unit 412 mounted on the table 400 with the main imaging unit 600, and based on the captured image, the displacement direction and displacement of the table 400 The amount can be substantially detected. As a modification, the displacement amount and posture of the table 400 may be detected using a sensor 800 (FIG. 2) such as an encoder. If it is those skilled in the art, it is easy to apply the above-mentioned idea about displacing the table 400 from the original position to an arm-type three-dimensional coordinate measuring apparatus provided with a probe at the tip of a conventional articulated arm. Can understand.

  According to the optical three-dimensional coordinate measuring instrument CMI of the embodiment, the table 400 is movable, and the table 400 has the stage marker 410. In addition, referring to FIG. 2, it has a main imaging unit 600 that images the optical three-dimensional coordinate measuring instrument CMI probe marker 212, and further has a sub-imaging unit 210 at the tip of the probe 200. Various information can be provided to the worker using an image acquired using the sub-imaging unit 210. Moreover, the information which proves that the measurement work was performed appropriately can be provided by preserve | saving or outputting this.

GUI :
The optical three-dimensional coordinate measuring device CMI further includes a display unit 500 (FIG. 1). The display unit 500 can be used to provide various information to the worker. The optical three-dimensional coordinate measuring machine CMI is intended to be installed and used on the production line.

  The optical 3D coordinate measuring machine CMI is designed so that it can also be operated by the operator at the manufacturing site, so the operator who accesses the optical 3D coordinate measuring machine CMI is the optical 3D coordinate measuring machine CMI. It is not limited to people who know how to use. It is desirable to display a GUI using the display unit 500 (FIG. 1) so that it can be used by workers on the manufacturing site.

In the optical three-dimensional coordinate measuring device CMI, the GUI using the display unit 500 is a first display mode (“administrator mode”) for a person who is familiar with how to use the optical three-dimensional coordinate measuring device CMI, that is, an administrator. It includes a navigation screen for guiding the operation of the measurement work to the field worker, and has a second display mode (“measurement display mode”) used when performing measurement. For example, the administrator mode and the measurement display mode can be switched using a button (not shown) displayed on the display unit 500.

By using the administrator mode, various settings (“navigation settings”) for guiding the measurement work can be performed so that the field worker can easily perform the operation of the measurement work. For example, a captured image (“navigation image”) captured by the sub-imaging unit 210 is displayed on the display unit 500, and a point to be measured by the operator and a point to be contacted with the contact 208a are superimposed on the navigation image. By looking at the display unit 500, the operator can know the point where the contact 208a should be brought into contact next. In addition, by adding a function of moving the display of the captured image captured by the sub-imaging unit 210 according to the operator's operation, it is possible to provide the operator with information on how much and in what direction the table 400 is displaced. .

An example of display during measurement work will be described with reference to FIG. FIG. 42 is an image displayed when the first measurement plane ML1 corresponding to the one end surface Sa of the workpiece WP is obtained. In FIG. 42, reference symbol VI indicates a measurement region virtual image displayed on the display unit 500. The measurement area virtual image VI is an image that virtually represents the visual field area of the main imaging unit 600. In the measurement area virtual image VI, the origin, X axis, Y axis, and Z axis of the absolute coordinate system are defined. That is, the X axis and the Y axis are set so as to be parallel to and orthogonal to the upper surface of the table 400 at the original position, and the Z axis is set perpendicular to the upper surface of the table 400. The center of the original position table 400 is set to the origin O. Then, the first measurement plane ML1 corresponding to the one end surface Sa of the workpiece WP is superimposed and displayed on the measurement region virtual image VI.

FIG. 43 is an image displayed when the second measurement plane ML2 corresponding to the other end surface Sb of the workpiece WP is obtained. Referring to FIG. 43, in the measurement area virtual image VI, the first measurement plane ML1 corresponding to the one end surface Sa of the workpiece WP and the second measurement plane ML2 corresponding to the other end surface Sb are in the absolute coordinate system. Based on this, it is superimposed on the display unit 500.

  FIG. 44 shows an image displayed after the distance between the first measurement plane ML1 and the second measurement plane ML2 is obtained. As can be seen from FIG. 44, a numerical value “201 mm” representing the distance between the first measurement plane ML1 and the second measurement plane ML2 is displayed with an arrow together with the display of the first measurement plane ML1 and the second measurement plane ML2. Is done. Of course, whether or not the distance “201 mm” is appropriate is determined based on the design drawing of the workpiece WP.

  45, two cylindrical portions 902 and 904 included in the workpiece WP are measured, and the distance between the axes, that is, the first axis of the first cylindrical portion 902 and the second axis of the second cylindrical portion 904 are measured. The procedure in the navigation setting mode will be described as follows, taking as an example the case of measuring the distance between the two (arrow 906 in the figure).

(1) The workpiece WP is fixed to the table 400.
(2) A relative coordinate system based on the measurement reference plane of the workpiece WP is set. The setting of the relative coordinate system will be described later.
(3) A measurement element, that is, a circle (cylinder) is set.
(4) A local captured image is acquired using the navigation image, that is, the sub-imaging unit 210.
(5) Repeat the above (2), (3) and in some cases (4) to measure the measurement element, that is, the two cylindrical parts, and create the distance element by setting the measurement item called the inter-axis distance To do.
(6) When the above series of setting operations is completed, the navigation setting file is stored in the storage unit 2 (FIG. 2) of the personal computer PC.

  An arbitrary plane can be specified as the measurement reference plane in the second step (2).

  The series of steps (3) to (6) will be described with reference to the flowchart of FIG. 47 and FIGS. 48 to 54. 47 and 48, the element creation process can be started by clicking the target part shape selection field 506 on the measurement condition setting screen SC2 displayed on the display unit 500, that is, the creation element button (S1). ). Since the measurement element is a cylinder, when the cylinder button 506e (FIG. 48) is pressed, the cylinder file 550 is opened and displayed on the display unit 500. The cylindrical file 550 is provided with a shooting start button 552 (FIG. 49). Although optional, the sub-imaging unit 210 (FIG. 4) can shoot by depressing the shooting start button 552 when necessary (S2). The image captured by the sub imaging unit 210 is displayed on the display unit 500 (S3). Further, the information is stored in the storage unit 2 (FIG. 2) together with information on the position and orientation of the probe 200 at the time of photographing, that is, the measurement position coordinates. Cylindrical file 550 may include a procedure guide indicated by reference numeral 557 in FIG. The operator can know the operation procedure by referring to the procedure guide 557, and can recognize the recommended position and number of measurement points by looking at the measurement condition setting screen SC2.

  If it is the cylindrical portion to be measured, that is, the first cylinder 902 (FIG. 46), the process proceeds to step S5, and the measurement start button 556 (FIG. 49) is pushed down (S5). The cylindrical file 550 includes a first button 556a for starting measurement of the inner peripheral surface of the hollow cylinder as a measurement start button 556, and a second button 556b for starting measurement of the outer peripheral surface of the cylinder. If the inner peripheral surface of the hollow cylinder is to be measured, the first button 556a is pushed down.

  When the measurement button of the main body operation unit 300 (FIG. 1) is depressed, the data of the position and posture of the table 400 and the position and posture of the probe 200 at that time are captured (S6). Of course, these data are created based on the captured image obtained by capturing the probe marker 212 and the stage marker 410 with the main imaging unit 600 (FIG. 1). The measurement condition setting screen SC2 includes an operation guide display field 558 (FIG. 50) for displaying a cylindrical 3D model. While looking at the displayed 3D model 560 (FIG. 50), a plurality of measurement points P are measured to calculate a cylinder, that is, each measurement point (S7). The coordinates of the plurality of measurement points P are based on a relative coordinate system.

  For example, if all six or more measurement points P related to the first cylinder 902 are set while looking at the 3D model 560, the position, orientation, dimension, etc. of the first cylinder 902 are set to the relative position coordinates of the measurement point P in step S9. Calculated based on

  In addition, if all the measurement points P of, for example, six or more points related to the first cylinder 902 are set, the sub-imaging unit 210 (FIG. 4) may shoot at this point.

  If necessary, the parameter of each element is changed and / or a tolerance is set (S10 in FIG. 47). The captured image, that is, the navigation image captured by the sub-imaging unit 210 is displayed in the navigation image display field 562 of the measurement condition setting screen SC2 (FIG. 51). In the navigation image display field 562, the measurement point set on the navigation image is set. P is superimposed and displayed (S11 in FIG. 47).

  Next, a plurality of measurement points P of the second cylinder 904 (FIG. 45) are set in the same manner (FIG. 52). When all the measurement points P of the second cylinder 904 are set, a distance element between the axis 902a of the first cylinder 902 and the axis 904 of the second cylinder 904 is created as shown in FIG. To do.

  FIG. 54 shows a display state of the measurement condition setting screen SC2 when all the settings are completed. By depressing the OK button 570 (FIG. 47, S12), the element creation process is completed (S13). This completes the creation of the navigation setting file.

  Next, a procedure for an operator to measure the workpiece WP using the navigation setting file will be described with reference to FIGS. When the operator performs the measurement work, the display on the display unit 500 is switched to the measurement display mode.

  First, the worker fixes the workpiece WP to the table 400. When the navigation setting file is selected for display on the display unit 500, an actual measurement screen SC4 shown in FIG. 56 is displayed. The actual measurement screen SC4 has a measurement object display field 580 for extracting and displaying the measurement object, that is, the two cylinders 902 and 904, based on the image captured by the main imaging unit (stationary camera) 600 (FIG. 1). In the measurement object display field 580, a computer graphic (CG) 3D model 582 is preferably displayed. The actual measurement screen SC4 also includes a table navigation information display column (stage guide column) 540, together with a navigation image display column 584 for displaying a navigation image captured by the sub imaging unit (probe camera) 210 (FIG. 4).

  When the navigation setting file is selected with reference to the flowchart of FIG. 55, a navigation image captured by the sub-imaging unit (probe camera) 210 (FIG. 4) is displayed on the actual measurement screen SC4. If there is no navigation image, computer graphics (CG) is displayed in the navigation image display field 584 (S20).

  If there is an element to be measured from the navigation image, the process proceeds from step S21 to S22, and the coordinate system and the position coordinates of the measurement point when the administrator performs the setting work, the current coordinate system, that is, the table 400 and the workpiece WP. The set measurement position is calculated from the position. Also, the current position and orientation of the probe 200 are acquired. Needless to say, the current position of the workpiece WP can be acquired from an image captured by the main imaging unit 600 (FIG. 1). These pieces of information are displayed on the actual measurement screen SC4 (S23).

  In the next step S24, the position and posture of the probe 200 and the position and posture of the table 400 are captured, and the current position and posture of the probe 200 and the position and posture of the table 400 are displayed on the actual measurement screen SC4. (S25). Step S24 is continuously updated. Therefore, the actual measurement screen SC4 displays the positions and orientations of the probe 200 and the table 400 in real time.

  When the operator depresses the measurement start button 586 (FIG. 56) on the actual measurement screen SC4 (S26), the measurement point P is displayed on the navigation image in the navigation image display field 584 (FIG. 57). Viewing this, the operator accesses the probe 200 toward the measurement point P displayed in the navigation image display field 584.

  In the next step S27 (FIG. 55), the current positions and orientations of the table 400 and the probe 200 are captured, and the relative coordinates of the measurement position P with which the contact 208a is brought into contact are calculated in the current coordinate system. The When the measurement of each measurement position P of the first and second cylinders 902 and 904 is completed, the process proceeds from step S29 to step S30, and the relative position coordinates of the measured plurality of measurement positions P, the current state of the table 400 and the probe 200 are displayed. If necessary, the coordinate system is converted based on the position and orientation of the first and second cylinders 902 and 904, the distance between the measurement elements, and the like based on the relative position coordinates or the absolute position coordinates. It is calculated (S30 in FIG. 55). Then, the result is displayed in the result display field 590 (S31 in FIG. 55, FIG. 58). Therefore, the operator repeats the operation of accessing the probe 200 to the measurement position P superimposed on the captured image (navigation image) SI and bringing the contact 208a into contact with the designated measurement position P. Simply, you can virtually complete the same measurements that the administrator made.

  In step S31, the measurement result may be output by, for example, a printer. At that time, in order to know the posture at which the probe 200 is brought into contact with the workpiece WP at each measurement position P, whether or not the actually measured position is the same as the set measurement position P, etc. It is preferable to take a photograph when each measurement position P is measured by the sub-imaging unit 210 and store this together with the position information of the probe 200. And when outputting with a printer, it is good to publish this picked-up image with the measurement position coordinate of each measurement position P, for example.

  As can be readily understood with reference to FIG. 57, in the image (measurement object display field 580) captured by the imaging unit 600 (FIG. 1), only the second cylinder 904 appears in the left corner, and the first cylinder 902 It is not displayed. Information regarding the displacement of the table 400 is displayed to the operator in the table navigation information display field 540. The operator can position the first and second cylinders 902 and 904 in the positions and orientations recommended by the administrator by displacing the table 400 according to the display information in the table navigation information display field 540 (FIG. 59). .

  Regarding the display on the actual measurement screen SC4, the displays of FIGS. 60, 61, and 62 may be added. In FIG. 60, when a position different from the measurement position P set by the administrator is measured, a caution display 592 indicating that the measurement position is different may be displayed. In the example of FIG. 60, “Measurement position is different. Check the measurement position and measure again.” Is displayed as a caution display 592.

  If the administrator wants to force the operator to lock the table 400 using the stage lock mechanism 760, a setting item that can easily set this may be prepared. When the measurement in the locked state is set using the setting file 576, as shown in FIG. 61, when the operator measures without locking the table 400, a warning that the lock is not given on the actual measurement screen SC4. A display 594 is made. In the example of FIG. 61, “The lock state specified in the navigation setting is different. Please change the lock state and measure again.” Is displayed as a warning display 594.

  Regarding the displacement of the movable table 400, a table navigation information display field 540 is preferably displayed on the actual measurement screen SC4. Guided by this display, the operator moves the table 400 according to the table navigation information display field 540, so that the measurement object can be positioned at an appropriate position. In this table navigation information display field 540, it is preferable to indicate a range in which the table 400 may be moved, for example, by a rectangular frame illustrated by a solid line 554 in FIG. Specifically, it is preferable to display the measurable movement range of the table 400 with a display that is easily visible, for example, a square frame 554.

  From the above description, those skilled in the art will immediately recognize that the optical three-dimensional coordinate measuring machine CMI of the embodiment has excellent advantages. In particular, since the movable table 400 is provided, the present invention can be applied to a measurement object having a large size, that is, the workpiece WP. Further, the position and orientation of the probe 200 are detected based on an image obtained by imaging the probe marker 212 by the stationary main imaging unit 600. For this reason, it is desirable that the probe marker 212 at the time of measurement is present in the visual field range that can be properly imaged by the main imaging unit 600 in order to maintain a certain measurement accuracy. From this point of view, the table 400 can be displaced from the original position as necessary. The table 400 cannot be displaced unless a force exceeding a predetermined value is applied by the main resistance mechanism component 710 (FIG. 23). Therefore, the table 400 is immediately stopped when the worker or the manager displaces the table 400 and removes the force at the moment when the table 400 reaches a desired position or posture. Further, even if the contact 208a of the probe 200 is brought into contact with the workpiece WP, the table 400 is not inadvertently displaced by the force generated by the contact.

  In order to maintain the measurement accuracy, a measurement object, that is, a workpiece WP that is preferably measured using the mobility of the table 400 will be exemplarily described with reference to FIG. The image in FIG. 63 is taken from one end side of the workpiece WP. The workpiece WP has a through hole 10 having a circular cross section extending in the longitudinal direction. The through hole 10 has an opening 10a that is open on one end surface and the other end surface of the workpiece WP, respectively.

  A case where the coaxiality of the opening 10a on one end side and the other end side is measured will be described as an example. The coaxiality means the magnitude of the axis that is the measurement object being displaced from the reference axis.

  In order to measure the coaxiality, first, it is necessary to measure the respective cylindrical shapes of the opening 10a on one end side and the other end side. In this measurement, as described above, a creation element button, that is, a “cylindrical” geometric element is selected from the target part shape selection field 506 (FIG. 48) on the measurement condition setting screen SC2, and a minimum of 6 points, preferably 12 is selected. The coordinates of the points above the point are measured, the cylinder is estimated using the coordinates of the measured points, and the estimated diameter, radius, center coordinates, axial vector, cylindricity, etc. of the cylinder are calculated.

  To measure the opening 10a on one end side, first, when the operator applies a force to the table 400 to displace the table 400, the component force in the X-axis direction of the operating force of the operator is the predetermined value. Exceeds 400, the table 400 moves in the X-axis direction. That is, the table 400 can be moved in the X-axis direction by the operator intentionally applying a force (the component force in the X-axis direction is larger than a predetermined value) to the table 400. Then, the table 400 stops at the moment when the operating force is weakened. By moving the table 400 to the right (plus side in the X-axis direction) (FIG. 64), the probe 200 may be placed in the field of view of the main imaging unit 600. Next, in order to measure the opening 10a on the other end side, the table 200 is moved leftward (minus side in the X-axis direction) (FIG. 65), so that the probe 200 is brought into the visual field range of the main imaging unit 600. Just put it in. In this way, it is possible to easily cope with, for example, a large measurement object, that is, the workpiece WP.

  66, after measuring the opening 10a on one end side, the first cylindrical shape 12a, which is the measured geometric element on the one end side, may be superimposed on the measurement region virtual image VI. After that, when the opening 10a on the other end side is measured, the measured second cylindrical shape 12b which is the geometric element on the other end side is preferably superimposed on the measurement region virtual image VI. The cylindrical shapes 12a and 12b on one end side and the other end side are created based on an absolute coordinate system. As a modification, only the cylindrical shapes 12a and 12b, which are the first and second geometric elements corresponding to the openings 10a on the one end side and the other end side, respectively, may be displayed.

  Next, the measurement item selection field 504 and the target part shape selection field 506 on the measurement condition setting screen SC2 shown in FIG. 66 have tabs for basic measurement. When a geometrical tolerance tab is selected from the plurality of tabs, the measurement item selection field 504 and the target part shape selection field 506 are switched to the display in FIG. The coaxiality measurement mode can be set by clicking the coaxiality button 516 included in the display of FIG.

  Next, (1) Measure the coaxiality of the second cylindrical shape 12b on the basis of the first cylindrical shape 12a, (2) Enter the coaxiality tolerance upper limit value, and set it. Set the parameters required for Thereby, the coaxiality of the first cylindrical shape 12a and the second cylindrical shape 12b can be measured. Of course, it is confirmed whether the diameters of the first and second openings 10a, 10b that can be obtained in relation to the coaxiality are as designed (within a tolerance range), It is possible to confirm whether or not the distance between the one end surface where the first opening 10a opens and the other end surface where the second opening 10b opens is as designed.

  That is, for example, a plurality of confirmation contents (a plurality of inspection contents) such as setting a tolerance for each hole diameter, concentricity between the plurality of holes, and distances between the surfaces on which the holes are formed. If all inspection contents are within the tolerance range, OK is displayed as a comprehensive judgment, and if any of them is out of the tolerance range, NG is judged as a comprehensive judgment. You can display.

  According to the optical three-dimensional coordinate measuring device CMI of the embodiment, the coordinates of the measurement position where the contact point 208a of the probe 200 contacts are specified in the relative coordinate system, and the size or geometric feature is estimated by estimating the point or the geometric shape. The amount can be measured. Then, as one use of the optical 3D coordinate measuring instrument CMI, it is possible to inspect the measurement object, that is, the workpiece WP by comparing the preset tolerance with the measured dimensions and geometric features. it can.

  In addition, since the movable table 400 included in the optical three-dimensional coordinate measuring device CMI of the embodiment is rotatable, the probe marker 212 is directly opposed to the stationary main imaging unit 600 by rotating the table 400. Can be made. FIG. 68 shows an example in which the table 400 is rotated counterclockwise. FIG. 69 shows an example in which the table 400 is rotated clockwise.

Measurement at the same height level and GUI :
Among the items that the user wants to measure is, for example, the outer diameter of the cylinder at an arbitrary height level. For example, in the case of a product that includes protrusions or recesses with a draft angle required to take out the product from the mold, measure whether the dimensions or geometric features of the protrusions or recesses are appropriate in consideration of the draft angle. There is a request to do.

  For example, when actually measuring a product including a cylindrical projection, it is necessary to obtain the coordinates of several points at a predetermined level of the cylinder. For this purpose, it is necessary to bring the contact 208a of the probe 200 into contact with a plurality of locations on a specific surface defined by the same height level of the cylinder, but this operation has a problem that it requires skill.

  A GUI for solving this problem will be described with reference to FIGS. When defining a desired height level, it is necessary to identify the plane that serves as the reference. Therefore, first, the contact 208a is brought into contact with a plurality of points belonging to the plane to be used as a reference, and the measurement reference plane is registered based on the coordinates of the plurality of measurement positions. The measurement reference plane may be a horizontal plane or an inclined plane, and a single or a plurality of arbitrary planes can be set as the measurement reference plane.

  FIG. 70 shows the setting screen 20 that can be displayed on the display unit 500 when performing measurement on the outer peripheral surface or inner peripheral surface of the cylinder. This setting screen 20 includes a display item 22 for selecting an object to be measured, which is the cylindrical outer peripheral surface 22a or inner peripheral surface 22b with which the contact 208a is brought into contact. The setting screen 20 also includes a reference plane setting item 24 for setting the above-described measurement reference plane. When there are a plurality of pre-registered measurement reference planes, a desired measurement reference plane can be designated from the drop-down list. In the illustrated example, a plane registered as “Plane 001” is designated.

  The setting screen 20 includes a measurement level, that is, a height level setting item 26 for substantially setting a specific surface. “Measurement height” means the dimension of the reference plane in the normal direction. It is defined as “plus” if it is above the measurement reference plane, and “minus” if it is below. The height from the measurement reference plane can be set by raising and lowering the numerical value of the blank window 26a of the height level setting item 26 and selecting a desired numerical value.

  The setting screen 20 may also include a position range item 28 for setting an upper and lower allowable position range across the set height level. Instead of including the position range item 28, preset upper and lower allowable position ranges may be stored in the memory. By setting the allowable error range, it is possible to determine whether or not to acquire this as measurement data when the operator measures a point that deviates vertically from the set allowable position range. That is, the coordinates of the measurement position of the contact 208a are acquired on the assumption that it is within the set allowable position range.

  Predetermined parameters relating to the measurement of the same height level can be easily set by using the setting screen 20 (FIG. 70). 71 is preferably added to the measurement condition setting screen SC2 or the actual measurement screen SC4 (FIG. 72).

  Referring to FIG. 71, the height level guide column 30 displays at least the horizontal line indicating the set reference height level and the current height level of the contact 208a. Further, preferably, as shown in the figure, the height level guide column 30 indicates a numerical value indicating the current height level of the contact 208a or, as shown, the current contact 208a from the set level. It is preferable to display a numerical value indicating the offset amount.

  By adding the display of the height level guide column 30 to the measurement condition setting screen SC2, the administrator can proceed with the setting operation while viewing the display of the height level guide column 30. Further, by adding the display of the height level guide column 30 to the actual measurement screen SC4, the operator can bring the contact 208a into contact with the workpiece WP while viewing the display of the height level guide column 30.

  In addition, before setting the predetermined items using the setting screen 20 (FIG. 70), it is preferable to select the geometric shape of the part to be measured using the target part shape selection field 506 (FIG. 48). When the target part shape selection column 506 is illustrated again in FIG. 73, a circle 506d is selected in the illustrated example.

  The setting procedure using the measurement condition setting screen SC2 is as described above based on the flowchart of FIG. FIG. 74 shows the display of the operation guide display field 558 described with reference to FIG. The administrator sets a plurality of measurement positions at the same height level in accordance with the display in the operation guide display field 558. The display of the operation guide display field 558 when this setting is completed is shown in FIG. As shown in FIG. 75, it is preferable to superimpose and display a surface 32 that serves as a reference surface for height level measurement.

  When the operator performs measurement work at the same height level, the display is switched to the display of the actual measurement screen SC4 illustrated in FIG. The procedure of the measurement work at the same height level will be described based on the flowchart of FIG.

  Referring to FIG. 76, when the operator depresses the measurement button on actual measurement screen SC4 (S40), it is determined whether “height” is designated (S41). Here, the designation of “height” can enter the measurement mode of the same height level by checking the height setting item 26 described with reference to FIG.

  When the height is not designated in the height setting item 26 (FIG. 70), the coordinates of the measurement point at which the operator brings the contact 208a of the probe 200 into contact with the workpiece WP is acquired (S42).

  When the height is specified in the height setting item 26 (FIG. 70), the relative position coordinates of the measurement point at which the operator brings the contact 208a of the probe 200 into contact with the workpiece WP is acquired (S43). Then, the height from the measurement reference plane is calculated based on the relative position coordinates of the measurement point (S44), and the height level guide column 30 (FIG. 71) is displayed on the actual measurement screen SC4. FIG. 77 shows an actual measurement screen SC4 on which the height level guide column 30 is displayed in a superimposed manner. The height level guide column 30 is preferably displayed in real time on the actual measurement screen SC4 while the operator operates the probe 200. The operator can easily operate the contact 208a to the set measurement position P while viewing the set measurement position P displayed on the actual measurement screen SC4.

  If the measured height of the measurement point P is not the designated height, the process proceeds from step S46 to S47 and waits until the operator performs the measurement again. If the operator does not execute measurement for a predetermined time, the process proceeds to step S48, and a warning “Measurement failed” is displayed on the actual measurement screen SC4 (FIG. 78).

  As a modified example of the warning display, when the height of the measured measurement point P is not the specified height, means for rejecting the measurement may be taken. For example, when the screen displayed on the display unit 500 during the measurement operation includes a measurement start button, the measurement start button may be grayed out (invalidated).

  The operator can complete the measurement at the same height level by simply bringing the contact 208a into contact with the workpiece WP while viewing all the measurement points P set by the administrator while viewing the navigation image on the actual measurement screen SC4. it can. Of course, no tools like calipers are required. Moreover, in the measurement of the same height level, the measurement accuracy does not depend on the skill level of the operator. Needless to say, the GUI and the specific measurement method for the same height level measurement can be generally used in general, such as an optical three-dimensional measuring device or a portal type measuring device.

  In the measurement at the same height level, it is needless to say that the table navigation information display field 540 (stage guide field, for example, FIG. 62) may be superimposed on the actual measurement screen SC4. Further, in the course of a series of operations by the operator, as described above, it is preferable to acquire a local captured image using a navigation image, that is, a sub-imaging unit (probe camera) 210 at a necessary point. Of course, when the navigation image is acquired, the position and orientation of the probe 200 at that time may be stored together with the navigation image.

  FIG. 79 shows an example in which the inspection result of the height measurement is output to the printer. 79 shows necessary items such as a comprehensive judgment result and a measurement result. In addition to this, a navigation image photographed by the sub-imaging unit (probe camera) 210 is attached. By attaching the navigation image, it is possible to prove that the measurement work has been performed properly.

  As mentioned above, although the Example of this invention was described based on the optical three-dimensional coordinate measuring device CMI, this invention is not limited to the optical three-dimensional coordinate measuring device CMI. The present invention can also be suitably applied to mechanical three-dimensional coordinate measuring instruments such as a portal type and an arm type.

CMI optical three-dimensional coordinate measuring instrument PC personal computer 2 storage unit 4 control unit 200 probe 212 sub-imaging unit (probe camera)
212 Probe marker 400 Table 410 Stage marker 412 Stage marker unit 500 Display unit 600 Main imaging unit (imaging device)

Claims (8)

A probe for indicating the measurement position of the measurement object;
Coordinate acquisition means for specifying the position and orientation of the probe and acquiring the coordinates of the measurement position indicated by the probe based on the specified position and orientation of the probe;
Setting means for setting an allowable position range to be acquired by the coordinate acquisition means,
The coordinate acquisition unit is a three-dimensional coordinate measuring instrument that acquires the coordinates on the condition that the coordinates of the measurement position indicated by the probe are within the allowable position range.   The three-dimensional coordinate measuring instrument according to claim 1, wherein the setting means sets the allowable position range by designating a specific surface and a distance from the specific surface.   The three-dimensional coordinate measuring device according to claim 2, wherein the specific surface is set based on a designated reference plane.   The apparatus further comprises a height level guide display means capable of visually confirming the measurement position indicated by the probe and the specific surface when setting a plurality of measurement positions at the same height level by operating the probe. 3. The three-dimensional coordinate measuring instrument according to 3.   When the probe is operated to measure a plurality of measurement positions at the same height level, operation guide display means for displaying a plurality of preset measurement positions and measurement positions indicated by the probe is further provided. The three-dimensional coordinate measuring device according to any one of claims 1 to 4.   The three-dimensional coordinate measuring device according to any one of claims 1 to 5, wherein the three-dimensional coordinate measuring device is an optical three-dimensional coordinate measuring device or a mechanical three-dimensional coordinate measuring device. The probe has a camera;
The three-dimensional coordinate measuring device according to claim 6, wherein a captured image of the camera can be acquired in relation to the coordinates of the measurement position. A stationary main imaging device;
A probe marker disposed on the probe and capable of being imaged by the main imaging device;
The coordinate acquisition unit specifies the position and orientation of the probe with respect to the main imaging device based on the probe marker included in the captured image of the main imaging device. 3D coordinate measuring instrument.