JP2017196683A - Robot hand, control method for the same, and robot - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a robot hand reducing a load applied to a pump and being capable of achieving a longer operating life of the pump, and a control method for the robot hand and a robot.SOLUTION: A robot hand includes: a contact section having an adsorption hole adsorbing an object and being in contact with the object; a contact detection section detecting contact between the contact section and the object; a pump connected to the adsorption hole; and a control section controlling actuation of the pump based on a detection result of the contact detection section. Further, when the contact detection section detects the contact between the contact section and the object, the control section causes the adsorption hole to adsorb the object by causing the pump to reduce a pressure in the adsorption hole.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a robot hand, a robot hand control method, and a robot.

  For example, a robot described in Patent Document 1 is known as a robot (industrial robot) used in an industrial product manufacturing process. The robot described in Patent Document 1 includes a base, a first arm connected to the base via a joint, a second arm connected to the first arm via a joint, and a joint. A robot hand connected to the second arm. Further, the robot hand is provided with a suction hole for sucking a workpiece such as a semiconductor wafer and a vacuum pump for supplying a vacuum pressure to the suction hole.

JP 2003-124289 A

  However, since the robot of Patent Document 1 does not have means for detecting contact between the robot hand and the workpiece, when the workpiece is sucked by the robot hand, the vacuum pump is always operated to supply the vacuum pressure to the suction hole. If this is not done, the workpiece cannot be sucked smoothly. For this reason, the burden on the vacuum pump increases, and the life of the vacuum pump decreases.

  An object of the present invention is to provide a robot hand, a robot hand control method, and a robot that can reduce the load on the pump and extend the life of the pump.

Such an object is achieved by the present invention described below.
The robot hand of the present invention has a suction part that sucks an object, and a contact part that makes contact with the object;
A contact detection unit that detects contact between the contact unit and the object;
A pump communicating with the adsorbing portion;
And a control unit that controls the operation of the pump based on a detection result of the contact detection unit.

  Thereby, the robot hand which can reduce the burden concerning a pump and can attain the lifetime of a pump is obtained.

In the robot hand of the present invention, the contact detection unit detects a contact between the contact unit and the object, and outputs a signal.
When the control unit inputs the signal, it is preferable to control the pump so that the pressure in the adsorption unit is reduced.

  Thereby, the operation time of a pump can be shortened and the burden concerning a pump can be reduced.

In the robot hand according to the aspect of the invention, it is preferable that the control unit controls the pump so that the pressure in the suction unit increases, and causes the object to be detached from the suction unit.
Thereby, a target object can be made to detach | leave from an adsorption | suction part more reliably.

In the robot hand according to the aspect of the invention, it is preferable that the contact detection unit includes a pressure sensitive unit.
Thereby, the structure of a contact detection part becomes a comparatively simple thing.

In the robot hand of the present invention, it is preferable that the pressure sensitive part has a resin part containing carbon nanotubes.
Thereby, it becomes a pressure-sensitive part which has the outstanding pressure-sensitive characteristic.

In the robot hand of the present invention, a holding part that holds the contact part;
It is preferable to have a displacement allowing portion that allows displacement of the contact portion relative to the holding portion.

  Thereby, the stress at the time of a contact with a contact part and a target object can be relieve | moderated, and the possibility of the damage of a target object can be reduced.

In the robot hand according to the aspect of the invention, it is preferable that the displacement allowing portion includes a biasing portion that biases the contact portion toward the object.
Thereby, the structure of a displacement permission part becomes a comparatively simple thing.

In the robot hand of the present invention, it is preferable that the pump has a piezoelectric element.
Thereby, for example, the vibration of the pump can be reduced as compared with the case where a motor or the like is used as a drive source. Therefore, it is possible to reduce the vibration of the robot hand caused by the operation of the pump, and it is possible to reduce the decrease in the operation accuracy of the robot hand.

The robot hand of the present invention preferably has a plurality of the contact portions.
Thereby, for example, an object can be grasped.

The control method of the robot hand of the present invention includes a contact part having an adsorption part for adsorbing an object,
A contact detection unit that detects contact between the contact unit and the object;
A pump connected to the suction part,
After the contact detection unit detects contact between the contact unit and the object, the pressure in the adsorption unit is reduced by the pump.
Thereby, the load concerning a pump can be reduced and the lifetime improvement of a pump can be aimed at.

The robot of the present invention includes a base,
An arm rotatably connected to the base;
A robot hand connected to the arm,
The robot hand has a contact part having an adsorption part for adsorbing an object;
A contact detection unit that detects contact between the contact unit and the object;
A pump communicating with the adsorbing portion;
And a control unit that controls the operation of the pump based on a detection result of the contact detection unit.

  Thereby, the robot which can reduce the burden concerning a pump and can attain the lifetime of a pump is obtained.

1 is a side view showing a robot according to a first embodiment of the present invention. It is a perspective view which shows the robot hand with which the robot shown in FIG. 1 is equipped. It is sectional drawing of the robot hand shown in FIG. It is sectional drawing which shows the pressure sensitive part which the robot hand shown in FIG. 2 has. It is sectional drawing which shows the pump which the robot hand shown in FIG. 2 has. It is sectional drawing of the robot hand which concerns on 2nd Embodiment of this invention. FIG. 7 is a perspective view of the robot hand shown in FIG. 6. It is a perspective view which shows the robot hand which concerns on 3rd Embodiment of this invention. It is a block part which shows the control system of the robot hand shown in FIG. It is a perspective view which shows the robot main body which the robot which concerns on 4th Embodiment of this invention has. It is a perspective view which shows the robot main body which the robot which concerns on 5th Embodiment of this invention has.

  Hereinafter, a robot hand, a robot hand control method, and a robot of the present invention will be described in detail based on preferred embodiments shown in the accompanying drawings.

<First Embodiment>
FIG. 1 is a side view showing a robot according to a first embodiment of the present invention. FIG. 2 is a perspective view showing a robot hand provided in the robot shown in FIG. 3 is a cross-sectional view of the robot hand shown in FIG. FIG. 4 is a cross-sectional view showing a pressure-sensitive portion of the robot hand shown in FIG. FIG. 5 is a cross-sectional view showing a pump of the robot hand shown in FIG. In the following, for convenience of explanation, the upper side in FIG. 1 is also referred to as “upper” and the lower side is also referred to as “lower”.

  A robot 10 shown in FIG. 1 includes a robot main body 100 and a robot hand 1 that can be connected to the robot main body 100. The robot hand 1 can be used as an end effector of the robot 10.

[Robot body]
As shown in FIG. 1, the robot body 100 is a horizontal articulated robot (scalar robot), which is fixed to a floor surface (not shown) with a bolt or the like, and is rotatable with respect to the base 110. And an arm 120 connected to the. The arm 120 includes a first arm 130 that is rotatably connected to the base 110 via a joint mechanism, and a second arm that is rotatably connected to the first arm 130 via a joint mechanism. 140 and a work head 150 provided on the second arm 140.

  The base 110 is fixed to a floor surface (not shown) with bolts or the like. A drive unit 191 that rotates the first arm 130 about the axis J <b> 1 with respect to the base 110 is installed in the base 110. In the second arm 140, a drive unit 192 that rotates the second arm 140 about the axis J2 with respect to the first arm 130 is installed.

  In addition, the work head 150 is disposed at the tip of the second arm 140. The working head 150 includes a spline nut 151 and a ball screw nut 152 that are coaxially disposed at the tip of the second arm 140, and a spline shaft 153 inserted through the spline nut 151 and the ball screw nut 152. The spline shaft 153 can rotate around its axis with respect to the second arm 140 and can move (elevate) in the vertical direction. And the robot hand 1 as an end effector is attached to the front-end | tip part (lower end part) of such a spline shaft 153. FIG.

  A rotation motor 194 and a lift motor 195 are disposed in the second arm 140. The driving force of the rotary motor 194 is transmitted to the spline nut 151, and when the spline nut 151 rotates forward and backward, the spline shaft 153 rotates forward and backward around the axis J3. On the other hand, the driving force of the lifting motor 195 is transmitted to the ball screw nut 152, and when the ball screw nut 152 rotates forward and backward, the spline shaft 153 moves up and down.

[Robot hand]
The robot hand 1 shown in FIGS. 2 and 3 can hold a workpiece W as an object by suction. Such a robot hand 1 has a suction hole 23 as a suction portion for sucking the workpiece W, a contact portion 2 that makes contact with the workpiece W, and a contact detection portion 3 that detects contact between the contact portion 2 and the workpiece W. And a pump 4 that is connected to the suction hole 23 and changes the pressure in the suction hole 23, and a control unit 5 that controls the operation of the pump 4 based on the detection result of the contact detection unit 3. As described above, the control unit 5 controls the operation of the pump 4 based on the detection result of the contact detection unit 3, for example, can shorten the operation time of the pump 4, or empty the pump 4 (suction air). Can be prevented. Therefore, the burden on the pump 4 can be reduced, and the life of the pump 4 can be extended. Further, the power consumption of the robot hand 1 can be reduced.

  The control of the control unit 5 will be specifically described. The control unit 5 stops the pump 4 in a state where the contact unit 2 is not in contact with the workpiece W. And if the contact detection part 3 detects the contact of the contact part 2 and the workpiece | work W, a signal will be output. When the control unit 5 receives the signal from the contact detection unit 3, the control unit 5 operates the pump 4 and causes the pump 4 to reduce the pressure in the suction hole 23 (for example, the pump 4 sets the suction hole 23 to a vacuum pressure). Thus, the work W is sucked into the suction hole 23. According to such control, as described above, the operation time of the pump 4 can be shortened, the emptying of the pump 4 can be prevented, and the life of the pump 4 can be extended. Further, since the pump 4 is operated after the contact portion 2 comes into contact with the workpiece W, an air flow due to the operation of the pump 4 is not generated in the suction hole 23 before the contact with the workpiece W, and the position shift of the workpiece W before suction is caused. Hard to occur.

  When the contact detection unit 3 detects the contact between the contact unit 2 and the workpiece W, the control unit 5 may control the operation of the pump 4 so that the suction amount becomes constant. Thereby, the workpiece | work W can be adsorb | sucked more reliably. However, the contact detection part 3 can also detect the contact force (adsorption | suction force) of the contact part 2 and the workpiece | work W so that it may mention later. Therefore, the control unit 5 is configured to adjust the suction amount so that the contact force between the contact unit 2 and the work W is within a predetermined range in a state where the work W is sucked by the suction hole 23. It is also possible to control the operation. Thereby, the possibility that the contact force is too large and the workpiece W is damaged, or the contact force is too weak and the workpiece W is unintentionally detached can be reduced.

  In addition, the control unit 5 causes the pump 4 to increase the pressure in the suction hole 23 in a state where the workpiece W is sucked into the suction hole 23 (for example, the pump 4 causes the pressure of the suction hole 23 to be equal to or higher than atmospheric pressure). The workpiece W is released (removed) from the suction hole 23. Thereby, the workpiece | work W can be released from the adsorption | suction hole 23 more reliably. And if the contact detection part 3 detects that the workpiece | work W was released from the adsorption hole 23, the control part 5 will stop the action | operation of the pump 4. FIG.

  Hereinafter, the robot hand 1 will be described in detail. The workpiece W is not particularly limited, and examples thereof include a semiconductor wafer such as an integrated circuit, an electronic device such as an oscillator and a physical quantity sensor, and the like.

  The robot hand 1 includes a holding unit 6 that holds the contact unit 2 in addition to the contact unit 2, the contact detection unit 3, the pump 4, and the control unit 5 described above, and a displacement that allows displacement of the contact unit 2 relative to the holding unit 6. And an allowance portion 7. The displacement allowance portion 7 exhibits a function like a damper, can relieve an impact when the contact portion 2 is brought into contact with the workpiece W, and the pressing of the contact portion 2 against the workpiece W is excessively strong. Can be prevented. For this reason, the risk of damage to the workpiece W is reduced.

  The holding part 6 has a base part 61 as a connection part connected to the spline shaft 153 of the robot main body 100, and a tubular shaft 62 fixed to the base part 61 and extending downward from the base part 61. . However, the configuration of the holding unit 6 is not particularly limited, and for example, the shaft 62 may be omitted.

  The contact portion 2 is disposed at the tip portion of the shaft 62. The contact portion 2 is composed of a main body portion 21 connected to the shaft 62, a suction pad 22 disposed at the distal end portion of the main body portion 21, and a suction hole that opens to the distal end surface of the suction pad 22. And a hole 23. The suction hole 23 is connected to the pump 4 via a pipe H arranged in the shaft 62. Therefore, the pressure in the suction hole 23 can be changed by operating the pump 4, so that the work W can be sucked by the suction hole 23 or the sucked work W can be released.

  The main body 21 has a long cylindrical shape, and a base end portion thereof is inserted into the shaft 62. Further, the main body 21 is displaceable in the vertical direction (the direction in which the contact portion 2 is moved toward the workpiece W; the axial direction of the main body 21) with respect to the shaft 62. Further, the main body 21 has a flange 211 provided at the base end portion thereof, and the flange 211 abuts on the shaft 62, thereby preventing the main body 21 from being detached from the shaft 62.

  The suction pad 22 is a part that is brought into contact with the workpiece W. The suction pad 22 has elasticity and is elastically deformed when contacting the workpiece W. Therefore, when the contact portion 2 is pressed against the workpiece W, an excessive pressing force is hardly applied to the workpiece W, and the possibility of the workpiece W being damaged is reduced. Further, when the contact portion 2 is pressed against the workpiece W, the contact surface 22a (tip surface) of the suction pad 22 with the workpiece W is deformed following the suction surface W1 of the workpiece W. Can be brought into close contact with the workpiece W. Therefore, the work W can be more reliably adsorbed by the contact portion 2, and the burden on the pump 4 is reduced by the amount of air leakage.

  Although the contact part 2 has been described above, the configuration of the contact part 2 is not limited to this, and for example, the suction pad 22 may be omitted. In this case, the suction hole 23 may be configured by, for example, a through hole that opens to the distal end surface of the main body 21. Further, the shape of the main body 21 is not particularly limited, and may not be long.

  As shown in FIG. 3, the displacement allowing portion 7 has a biasing portion 71 that biases the contact portion 2 toward the workpiece W. The urging portion 71 is disposed in the shaft 62 and urges the contact portion 2 toward the workpiece W (to the tip end side of the shaft 62) with respect to the holding portion 6. Therefore, when the contact part 2 is pressed against the workpiece W, the contact part 2 is displaced upward (in the direction of arrow a in FIG. 3) so that the contact part 2 approaches the holding part 6 against the urging force of the urging part 71. When the pressing is released, the urging force of the urging portion 71 displaces the contact portion 2 downward (in the direction of arrow b in FIG. 3) so as to be separated from the holding portion 6. According to such a configuration, the contact portion 2 can be pressed against the workpiece W with an appropriate pressing force, so that the risk of damage to the workpiece W is reduced and the workpiece W is more reliably attracted by the contact portion 2. It can be carried out. Moreover, the structure of the displacement permission part 7 becomes comparatively simple. The urging portion 71 is not particularly limited as long as the contact portion 2 can be urged against the holding portion 6. For example, an elastic member such as a spring member or a rubber member can be used. In this embodiment, a spring member is used as the urging portion 71 and is housed in the shaft 62 in a slightly contracted state. Also, the arrangement of the urging portion 71 is not particularly limited, and for example, it may be arranged outside the shaft 62.

  The contact detection unit 3 includes a pressure-sensitive unit 31 that is located above the suction pad 22 (on the side opposite to the contact surface with the workpiece W) and is in contact with the suction pad 22. Stress generated by pressing the suction pad 22 against the work W is transmitted to the pressure-sensitive portion 31 via the suction pad 22. The pressure-sensitive part 31 outputs a detection signal corresponding to the received stress, whether or not the contact part 2 and the workpiece W are in contact with each other based on the output detection signal, and further, the contact part 2 When the workpiece W is in contact with the workpiece W, the magnitude of the contact force (adsorption force) can be detected. Thus, since the contact detection unit 3 includes the pressure-sensitive unit 31, the configuration of the contact detection unit 3 is relatively simple. The arrangement of the pressure-sensitive part 31 is not particularly limited as long as it can receive the stress generated by pressing the suction pad 22 against the workpiece W. For example, the pressure-sensitive part 31 may be arranged on the tip surface of the suction pad 22.

  Although it does not specifically limit as the pressure sensitive part 31, For example, it is preferable that it is the structure using a pressure sensitive conductive resin. In this case, as shown in FIG. 4, the pressure-sensitive part 31 includes an electrode layer 31a including a comb electrode (not shown) in which the first electrode and the second electrode are arranged in a comb-teeth shape, and an electrode It can be set as the structure which has the resin part 31b which has been arrange | positioned on the layer 31a and made the pressure-sensitive conductive resin into the sheet form. Moreover, it is preferable that the resin part 31b contains the carbon nanotube. Thereby, the structure of the pressure-sensitive part 31 becomes a comparatively simple thing. In addition, the pressure-sensitive portion 31 can be reduced in size and weight. In particular, when the resin part 31b has a carbon nanotube, the relationship between the pressure received by the pressure-sensitive part 31 and the detection signal output from the pressure-sensitive part 31 can be made linear (proportional). Therefore, excellent pressure-sensitive characteristics can be obtained, and in particular, the contact force (adsorption force) when the workpiece W is adsorbed by the adsorption hole 23 can be detected with higher accuracy. Therefore, the operation control of the pump 4 by the control unit 5 as described above can be performed with higher accuracy.

  In addition, although it does not specifically limit as a resin material contained in the resin part 31b, For example, a polycarbonate resin, a silicone resin, etc. can be used. Moreover, as another structure of the pressure sensitive part 31, the thing which apply | coated the pressure sensitive conductive ink to the base material etc. are mentioned, for example.

  The pump 4 is disposed on the base 61 and is connected to the pipe H. Thus, by arranging the pump 4 on the base 61, the pipe H can be shortened and the pressure loss can be reduced. As shown in FIG. 5, the pump 4 according to the present embodiment is disposed on the base substrate 41, the diaphragm substrate 42 bonded to the base substrate 41 and having the diaphragm 421, and the diaphragm 421. And a piezoelectric element 43 as a driving source to be driven.

  The base substrate 41 is provided with two through holes 411 and 412 that function as suction holes or discharge holes. The through hole 411 is connected to the pipe H, and the through hole 412 is released to the atmosphere.

  The diaphragm 421 provided on the diaphragm substrate 42 is disposed to face the base substrate 41, and a pump chamber P is formed between the diaphragm 421 and the base substrate 41. The diaphragm 421 includes a pump part diaphragm 422 and two valve part diaphragms 423 and 424 arranged with the pump part diaphragm 422 interposed therebetween. The valve portion diaphragms 423 and 424 are arranged to face the through holes 411 and 412, and pedestals 425 and 426 that protrude toward the through holes 411 and 412 are provided in portions overlapping the through holes 411 and 412. Further, packings 441 and 442 are disposed on the lower surfaces of the bases 425 and 426 (surfaces facing the through holes 411 and 412), and the through holes 411 and 412 are closed by the packings 441 and 442 in a normal state. It is kept in the state.

  The piezoelectric element 43 is provided in the pump part diaphragm 422, and the first piezoelectric element 431 that flexes and deforms the pump part diaphragm 422, and the second piezoelectric element that is provided in the valve part diaphragm 423 and flexes and deforms the valve part diaphragm 423. 432 and a third piezoelectric element 433 that is provided in the valve portion diaphragm 424 and flexes and deforms the valve portion diaphragm 424. These three piezoelectric elements 431, 432, and 433 are each independently controlled by the control unit 5. To be driven.

  The through holes 411 and 412 can be opened by moving the valve diaphragms 423 and 424 upward by driving the second and third piezoelectric elements 432 and 433. In addition, gas can be discharged by moving the pump diaphragm 422 upward by driving the first piezoelectric element 431 and moving it downward. Then, by controlling the drive timing of the pump diaphragm 422 and the valve diaphragms 423 and 424, air can be supplied in an arbitrary direction. Therefore, for example, if the gas is sucked from the through hole 411 and the gas is discharged from the through hole 412, the pressure in the suction hole 23 can be reduced, and the work W can be sucked to the contact portion 2. On the contrary, if the gas is sucked from the through hole 412 and discharged from the through hole 411, the pressure in the suction hole 23 (pipe H) can be increased, and the workpiece W can be released from the suction hole 23. it can.

  Thus, since the pump 4 is an intake / exhaust pump capable of intake / exhaust by a single unit, for example, it is not necessary to prepare a suction pump and an exhaust pump separately. Therefore, the robot hand 1 can be reduced in size and weight. Further, since the piezoelectric element 43 is used as a drive source, for example, vibration can be reduced as compared with the case where the drive source is a motor. Therefore, the vibration of the robot hand 1 caused by the operation of the pump 4 can be reduced, and the reduction in the operation accuracy of the robot hand 1 can be reduced.

Second Embodiment
FIG. 6 is a cross-sectional view of a robot hand according to the second embodiment of the present invention. FIG. 7 is a perspective view of the robot hand shown in FIG.

  The robot hand according to the present embodiment is mainly the same as the robot according to the first embodiment described above except that the arrangement of the contact detection unit and the pump is different.

  In the following description, the robot hand according to the second embodiment will be described with a focus on differences from the first embodiment described above, and description of similar matters will be omitted. In FIG. 6, the same reference numerals are given to the same configurations as those in the above-described embodiment.

  In the robot hand 1 of the present embodiment, as shown in FIG. 6, the contact portion 2 is a suction composed of a main body portion 21 connected to the shaft 62 and a through-hole opened to the front end surface of the main body portion 21. And a hole 23. That is, the contact portion 2 of the present embodiment has a configuration in which the suction pad 22 is omitted from the configuration of the first embodiment described above.

  The pressure sensing unit 31 of the contact detection unit 3 is disposed in the shaft 62 and is provided on the proximal end side of the urging unit 71 in contact with the urging unit 71. Therefore, the contact force between the contact portion 2 and the workpiece W is transmitted to the pressure sensitive portion 31 via the main body portion 21 and the urging portion 71.

  In addition, as shown in FIG. 7, the pump 4 is disposed away from the holding portion 6 (base portion 61), and is connected to the suction hole 23 via a pipe H extending from the holding portion 6. ing. Thus, by not arranging the pump 4 in the holding part 6, the weight of the part supported by the robot body 100 of the robot hand 1 can be reduced accordingly. Further, according to such a configuration, since the size and weight of the pump 4 do not affect the movement performance of the robot hand 1, for example, instead of the diaphragm pump used in the first embodiment described above. It is also possible to use a larger pump 4 having a higher suction force. Further, such a pump 4 may be one that can perform both intake and exhaust with one unit, or one that can perform only one of intake and exhaust with one unit. . In the latter case, an intake pump and an exhaust pump may be disposed as the pump 4.

  A valve 8 is provided in the middle of the pipe H. The valve 8 is opened by the control unit 5 when the contact detection unit 3 detects contact between the contact unit 2 and the workpiece W. Then, after the valve 8 is opened (or at the same time), the pump 4 is operated so that the work W is sucked into the suction hole 23.

  The valve 8 is not particularly limited, but is preferably a variable valve (that is, a valve whose opening degree can be adjusted). Thereby, by controlling the valve 8, the pressure in the suction hole 23 can be adjusted, and the contact force (suction force) between the suction hole 23 and the workpiece W can be controlled easily and with high accuracy. Further, the valve 8 may be configured to be open to the atmosphere. While the suction hole 23 is sucking the workpiece W, the pump 4 is stopped and the valve 8 is released to the atmosphere, whereby the inside of the suction hole 23 can be returned to the atmospheric pressure and the workpiece W can be released. According to such a configuration, for example, an exhaust pump can be omitted.

  According to the second embodiment as described above, the same effect as that of the first embodiment described above can be exhibited.

<Third Embodiment>
FIG. 8 is a perspective view showing a robot hand according to the third embodiment of the present invention. FIG. 9 is a block diagram showing a control system of the robot hand shown in FIG.

  The robot hand according to the present embodiment is mainly the same as the robot hand of the first embodiment described above except that it has a plurality of contact portions.

  In the following description, the robot hand according to the third embodiment will be described with a focus on differences from the first embodiment described above, and description of similar matters will be omitted. Moreover, in FIG. 8, the same code | symbol is attached | subjected about the structure similar to embodiment mentioned above.

  As shown in FIG. 8, the robot hand 1 of the present embodiment has three (a plurality) finger portions 24 as the contact portions 2. The holding unit 6 includes a support unit 66 that supports the three finger units 24 and a drive unit 67 that drives the support unit 66. The drive unit 67 can rotate the support unit 66 about the axis J4. Each of the three finger portions 24 is movable in a direction toward and away from the axis J4, and can be operated to close or open the hand, for example. As a result, the robot hand 1 can grip the workpiece W or release (release) the gripped workpiece W.

  The three finger portions 24 are discretely arranged in the circumferential direction of the axis J4 of the support portion 66. These finger parts 24 are connected to the support part 66, a base joint part 241 connected to the support part 66 via a joint mechanism, a middle joint part 242 connected to the base joint part 241, and a middle joint part And a terminal node portion 243 connected to 242. And the suction hole 23 is provided in the belly of the terminal node part 243 of each finger | toe part 24, and the pressure sensitive part 31 is arrange | positioned around the suction hole 23. FIG. Further, as shown in FIG. 9, a dedicated pump 4 is connected to the suction hole 23 of each finger portion 24 via a pipe H, and the control unit 5 controls the operation of each pump 4 independently. Thus, the suction and release of the workpiece W by each finger portion 24 can be controlled independently.

  Also according to the third embodiment, the same effects as those of the first embodiment described above can be exhibited.

<Fourth embodiment>
FIG. 10 is a perspective view showing a robot body included in the robot according to the fourth embodiment of the present invention.

  The robot according to the present embodiment is the same as the robot according to the first embodiment described above except that the configuration of the robot body is mainly different.

  In the following description, the robot of the fourth embodiment will be described with a focus on the differences from the first embodiment described above, and description of similar matters will be omitted.

  A robot main body 200 shown in FIG. 10 is connected to a base 210 that is fixed to, for example, a floor or a ceiling, a base 210 via a joint mechanism 221, and a first arm 231 that rotates around the joint mechanism 221. The second arm 232 is connected to the first arm 231 via the mechanism 222 and rotated about the joint mechanism 222, and is connected to the tip of the second arm 232 via the joint mechanism 223, and the joint mechanism 223 is used as an axis. A third arm 233 that rotates, a fourth arm 234 that is connected to the tip of the third arm 233 via a joint mechanism 224, and that rotates around the joint mechanism 224, and a fourth arm 234 via a joint mechanism 225. A fifth arm 235 that rotates about the joint mechanism 225 as an axis, and a sixth arm that connects to the tip of the fifth arm 235 via the joint mechanism 226 and rotates about the joint mechanism 226 as an axis. It has a beam 236, a. The sixth arm 236 is provided with a hand connection unit 240, and the robot hand 1 can be attached to the hand connection unit 240.

  According to the fourth embodiment, the same effect as that of the first embodiment described above can be exhibited.

<Fifth Embodiment>
FIG. 11 is a perspective view showing a robot body included in the robot according to the fifth embodiment of the present invention.

  The robot according to the present embodiment is the same as the robot according to the first embodiment described above except that the configuration of the robot body is mainly different.

  In the following description, the robot of the fifth embodiment will be described focusing on the differences from the first embodiment described above, and the description of the same matters will be omitted.

  A robot main body 300 shown in FIG. 11 includes a base 310 fixed to, for example, a floor or a ceiling, a body 320 connected to the base 310, and a pair of articulated robot arms 330 connected to the left and right of the body 320. A stereo camera 360 and a signal light 370 provided on the body 320.

  The base 310 has a plurality of wheels (not shown) that facilitate the movement of the robot body 300, a lock mechanism (not shown) that locks each wheel, and a grip when the robot body 300 is moved. A handle 311 is provided. Further, the base 310 is provided with a bumper 312 for contacting the work table, an emergency stop button 313 for stopping the robot main body 300 in an emergency, an input device 314, and the like.

  The body 320 is connected to the base 310 so as to be movable up and down and rotatable. Each articulated robot arm 330 includes a first shoulder 331 connected to the body 320 via a joint mechanism, a second shoulder 332 connected to the first shoulder 331 via a joint mechanism, and a twist. An upper arm 333 connected to the tip of the second shoulder 332 via a mechanism, a first forearm 334 connected to the tip of the upper arm 333 via a joint mechanism, and a first via a twist mechanism. A second forearm 335 connected to the tip of the forearm 334, a wrist 336 connected to the tip of the second forearm 335 via a joint mechanism, and a tip of the wrist 336 via a twist mechanism And a connecting portion 337 that is connected. In addition, a hand portion 338 is provided in the connecting portion 337, and the robot hand 1 can be attached to the hand portion 338.

  According to the fifth embodiment, the same effect as that of the first embodiment described above can be exhibited.

  The robot hand, the robot hand control method, and the robot according to the present invention have been described based on the illustrated embodiment. However, the present invention is not limited to this, and the configuration of each unit has the same function. Any configuration can be substituted. In addition, any other component may be added to the present invention. Moreover, you may combine each embodiment suitably.

  DESCRIPTION OF SYMBOLS 1 ... Robot hand, 2 ... Contact part, 21 ... Main body part, 211 ... Flange, 22 ... Suction pad, 22a ... Contact surface, 23 ... Suction hole, 24 ... Finger part, 241 ... Base joint part, 242 ... Middle joint part Reference numeral 243, end node portion, 3 contact detection portion, 31 pressure-sensitive portion, 31 a electrode layer, 31 b resin portion, 4 pump, 41 base substrate, 411, 412 through-hole, 42 diaphragm substrate, 421 ... Diaphragm, 422 ... Pump part diaphragm, 423, 424 ... Valve part diaphragm, 425, 426 ... Base, 43 ... Piezoelectric element, 431 ... First piezoelectric element, 432 ... Second piezoelectric element, 433 ... Third piezoelectric element, 441 442 ... packing 5 ... control part 6 ... holding part 61 ... base part 62 ... shaft 66 ... support part 67 ... driving part 7 ... displacement allowing part 71 ... biasing part 8 ... valve 10 ... Robot , 100 ... Robot body, 110 ... Base, 120 ... Arm, 130 ... First arm, 140 ... Second arm, 150 ... Working head, 151 ... Spline nut, 152 ... Ball screw nut, 153 ... Spline shaft, 191 and 192 ... Drive unit, 194 ... Rotary motor, 195 ... Raising / lowering motor, 200 ... Robot main body, 210 ... Base, 221,222,223,224,225,226 ... Joint mechanism, 231 ... First arm, 232 ... Second arm 233 ... 3rd arm, 234 ... 4th arm, 235 ... 5th arm, 236 ... 6th arm, 240 ... hand connection part, 300 ... robot body, 310 ... base, 311 ... handle, 312 ... bumper, 313 ... Emergency stop button, 314 ... Input device, 320 ... Body, 330 ... Articulated robot arm, 331 ... 1 shoulder part, 332 ... 2nd shoulder part, 333 ... upper arm part, 334 ... 1st forearm part, 335 ... 2nd forearm part, 336 ... wrist part, 337 ... connection part, 338 ... hand part, 360 ... stereo camera, 370 ... Signal lamp, H ... Piping, J1, J2, J3, J4 ... Shaft, P ... Pump chamber, W ... Workpiece, W1 ... Suction surface, a, b ... Arrow

Claims (11)

A contact part for adsorbing an object, and a contact part for contacting the object;
A contact detection unit that detects contact between the contact unit and the object;
A pump communicating with the adsorbing portion;
And a control unit that controls the operation of the pump based on a detection result of the contact detection unit. The contact detection unit detects a contact between the contact unit and the object and outputs a signal,
The robot hand according to claim 1, wherein when the signal is input, the control unit controls the pump so that a pressure in the adsorption unit is reduced.   The robot hand according to claim 1, wherein the control unit controls the pump so that a pressure in the suction unit increases, and causes the object to be detached from the suction unit.   The robot hand according to claim 1, wherein the contact detection unit includes a pressure-sensitive unit.   The robot hand according to claim 4, wherein the pressure-sensitive part has a resin part including carbon nanotubes. A holding part for holding the contact part;
The robot hand according to claim 1, further comprising a displacement allowing portion that allows displacement of the contact portion relative to the holding portion.   The robot hand according to claim 6, wherein the displacement allowing portion includes a biasing portion that biases the contact portion toward the object.   The robot hand according to claim 1, wherein the pump has a piezoelectric element.   The robot hand according to claim 1, comprising a plurality of the contact portions. A contact part having an adsorption part for adsorbing an object;
A contact detection unit that detects contact between the contact unit and the object;
A pump connected to the suction part,
A method for controlling a robot hand, wherein the pressure in the suction unit is reduced by the pump after the contact detection unit detects contact between the contact unit and the object. The base,
An arm rotatably connected to the base;
A robot hand connected to the arm,
The robot hand has a contact part having an adsorption part for adsorbing an object;
A contact detection unit that detects contact between the contact unit and the object;
A pump communicating with the adsorbing portion;
And a control unit that controls the operation of the pump based on a detection result of the contact detection unit.

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