JP2017190211A - Article conveyance device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an article conveyance device which achieves oscillations by an oscillation principle that is completely different from that of a conventional article conveyance device and especially, can convey conveyed articles accurately and stably.SOLUTION: In an article conveyance device in accordance with the invention, a first oscillation means X for oscillating a movable table T in a first horizontal direction, a second oscillation means Y for oscillating the movable table T in a second direction that is horizontal and intersects with the first direction, and a third oscillation means Z for oscillating the movable table T in a third perpendicular direction are assembled independently from each other to a movable part 2 for fixing the movable table. The first, second, third oscillation means X, Y, Z include an oscillator 4 which has an attachment part 41 attached to the movable part 2, a column part 42 extending from the attachment part, and a weight part 43 set at a free end for performing pendulum motion and an oscillation source 5 for oscillating the oscillator 4.SELECTED DRAWING: Figure 2

Description

  The present invention relates to an article transport apparatus that performs at least one of transport and sorting of an article placed on a movable table by vibration of the movable table.

  2. Description of the Related Art Conventionally, various types of article conveying apparatuses are known as articles conveying apparatuses that can convey an article and arbitrarily change the conveying direction on the conveying line.

  As this kind of article conveying device, a fixed portion, a movable base elastically supported by the fixed portion, a first vibration means for vibrating the movable base in a horizontal first direction, A second exciter that vibrates the movable table in a second direction that is horizontal and intersects the first direction; and a third exciting unit that vibrates the movable table in a third direction perpendicular to the first direction. A device that conveys an article placed on a movable table by vibration of the table is known (for example, see Patent Document 1 and Patent Document 2 below).

  In conventional article conveying apparatuses including those described in these patent documents, the first, second, and third vibrating means each have a leaf spring that is fixed at both ends and can vibrate in that direction. Each of these leaf springs is configured such that one leaf spring supporting the movable base is sequentially supported by the other leaf springs via the intermediate base so that mutual vibration is transmitted to the movable base. ing. In other words, the vibration of any leaf spring is transmitted to the movable stand directly or via the intermediate stand and other leaf springs.

JP 2013-018598 A (Patent No. 5803359) JP 2013-121870 A

  However, in the case of what is described in the patent documents as described above, the movable table that conveys the object to be conveyed has a structure that is supported only by the central part of the leaf springs that are fixed at both ends. It is unavoidable to cause the rotation, that is, pitching. In order to avoid such pitching, a weight having a certain mass or more is essential, and as a result, the total weight of the entire apparatus becomes heavy.

  Further, since the leaf springs that vibrate in the respective directions are indirectly connected to each other, the spring deformation is transmitted to each other, and it can be said that the structure is likely to cause unnecessary vibration.

  Further, depending on the specifications of the movable table, the resonance frequency differs in each direction. For this reason, when exchanging the movable base, a spring constant corresponding to a new specification may be set for each direction separately.

  The present invention has been made paying attention to such points, and the main object is to realize vibration on a completely different vibration principle from that of a conventional article conveying device, and in particular, to accurately convey the object to be conveyed. An object of the present invention is to provide an article conveying apparatus capable of conveying stably.

  The present invention takes the following measures in view of the above problems.

  That is, the article conveying apparatus of the present invention includes a fixed portion, a movable base that is elastically supported with respect to the fixed portion, a first vibration unit that vibrates the movable base in a horizontal first direction, Second vibration means for vibrating the movable table in a second direction that is horizontal and intersecting the first direction; and third vibration means for vibrating the movable table in a vertical third direction; An article conveying apparatus for conveying an article placed on a movable table by vibration of the movable table, wherein the first, second, and third vibration means are directly or against the movable table set on one end side. A vibrator having a mounting portion attached indirectly, a column portion extending from the mounting portion, a weight portion set on the other end side which is a free end, and performing a pendulum motion, and the movable base is the transported object And a vibration source for vibrating the vibrator so as to convey To.

  In such a case, since only the linear vibration is transmitted to each part from the pendulum motion of the vibrator, the bending or bending of the attachment portion of the attachment part is minimized, and stable vibration can be obtained. In addition, the vibration frequency can be easily changed by changing or adding the thickness of each part constituting the vibrator or the weight of the weight part. In addition, the vibration frequency can be easily changed by changing the effective length for performing the pendulum motion by moving the attachment position of the weight portion. That is, according to the present invention, it is possible to realize vibration on a vibration principle that is completely different from that of a conventional article conveying apparatus, and in particular, it is possible to provide an article conveying apparatus that can convey an object to be conveyed accurately and stably. Become.

  In order to reliably transmit the vibrations of the vibrators by the movable base, it is desirable to arrange a plurality of vibrators side by side along the first direction or the second direction. Further, if such a configuration is applied, even if only one of the plurality of vibrators is vibrated, other vibrators that are not vibrated vibrate due to resonance, and therefore can be transported. .

  In order to more reliably transmit the pendulum motion of the vibrator to the movable base, the vibrator has a movable portion that is fixed to the movable base and attaches the vibrator, and the movable portion is movable with the fixed portion. It is desirable that the vibrator be accommodated in an internal space formed between the base and the base. In such a configuration, unnecessary weights such as pitching, rolling, and yawing are unlikely to occur, so there is no need for a weight for balancing, and the overall mass is actually about 1/4 to 1/5 compared to the conventional machine. It becomes possible to.

  In order to make it easy to design the position of the center of gravity of the vibrator so as to match the position of the center of gravity of the entire article conveying apparatus, the first, second, and third vibrating means are attached to the movable part independently. I want to do it. In this way, by setting the vibrators constituting the first, second, and third vibrators to arbitrary positions, the barycentric position of the vibrators is made to coincide with the barycentric position of the entire article conveying apparatus. By designing, the generation of rotational moment can be made extremely small, and as a result, stable and constant vibration can be obtained over the entire movable table.

  In order to effectively increase the excitation force for each vibrator, the excitation source is preferably a piezoelectric element. That is, since the vibrator may be deformed in a generally arcuate shape, the excitation force per vibrator can be increased by using a piezoelectric element having a large area.

  As described above, according to the present invention described above, it is possible to vibrate on a vibration principle completely different from that of a conventional article conveying apparatus, and in particular, to provide an article conveying apparatus capable of conveying an object to be conveyed accurately and stably. Is possible.

The front view which shows the article conveyance apparatus which concerns on one Embodiment of this invention. FIG. The AA line end elevation which concerns on FIG. Structure explanatory drawing of the principal part which concerns on the same embodiment. Structure explanatory drawing which concerns on 2nd embodiment of this invention. Explanatory drawing which concerns on the modification of the embodiment. Structure explanatory drawing which concerns on 3rd embodiment of this invention. Structure explanatory drawing which concerns on 4th embodiment of this invention. Explanatory drawing which concerns on the modification of the embodiment. Same as above. Same as above.

  <First embodiment>

  Hereinafter, a first embodiment of the present invention will be described with reference to the drawings.

  As shown in FIGS. 1 and 2 (FIG. 1 is a front view of the article transport device, and FIG. 2 is a side view), the article transport device according to the present embodiment has a trough having a generally rectangular shape in plan view. The movable table T, which is also referred to as a vibration table, is vibrated to convey an object to be conveyed (not shown) placed on the movable table T. Examples of the object to be conveyed include an electronic component of a very small size, but are not particularly limited as long as the movable table T can be conveyed by vibration.

  The article conveying apparatus includes a fixed portion 1, a vibration isolation spring 3 supported by the fixed portion 1, a movable portion 2 directly instructed by the vibration isolation spring 3, and the vibration isolation springs for the fixed portion 1. 3 and a movable table T which is elastically supported via the movable part 2 and is used for placing and transporting articles.

  The fixing | fixed part 1 is fixed directly or indirectly on the floor surface F shown in FIG.1 and FIG.3. In the present embodiment, the base plate 11 fixed on the floor surface F is mainly used. In this embodiment, although the aspect which mounted the fixing | fixed part 1 on the floor surface F is illustrated, the baseplate 11 may be fixed to the floor surface F with the screw (illustration omitted), for example.

  The anti-vibration spring 3 has one end fixed to the spring first mounting portion 1 a provided in the fixed portion 1 and the other end fixed to the spring second mounting portion 2 a provided in the movable portion 2. Since various existing configurations can be applied to specific modes of the anti-vibration spring 3, the detailed description and illustration thereof are omitted.

  The movable table T is also referred to as a trough, and is formed in a rectangular plate shape in plan view. The movable table T is vibrated by being fixed and supported on the upper surface side 2 of the movable unit 2, and the object to be conveyed is conveyed by controlling the vibration generated in the movable table T. As the specific configuration and shape of the movable table T, various existing ones can be applied, and a specific description thereof will be omitted.

  The movable part 2 is supported by the anti-vibration spring 3 and has a movable base T mounted and fixed thereon. In this embodiment, the movable unit 2 vibrates in the second direction that intersects the first direction with the first vibration means X that vibrates the movable table T in the first horizontal direction. The second vibration means Y to be driven and the third vibration means Z to vibrate the movable table T in the third vertical direction are assembled independently. In the present specification, the first direction is the horizontal direction in the plan view of each drawing, and the second direction is the vertical direction.

  Here, in the article conveying apparatus according to the present embodiment, the first, second, and third vibrating means X, Y, and Z are attached directly or indirectly to the movable table T set on one end side. Part 41, column part 42 extending from attachment part 41, weight part 43 set on the other end side which is a free end, vibrator 4 which performs a pendulum motion, and movable base T receive the object to be conveyed. An excitation source 5 that vibrates the vibrator 4 to be conveyed, that is, a piezoelectric element 5 is provided.

  Hereinafter, regarding the movable portion 2 and the first, second, and third vibrating means X, Y, and Z, in particular, the vibrator 4 included in the first, second, and third vibrating means X, Y, and Z, and The configuration of the piezoelectric element 5 will be specifically described.

  In the present embodiment, the movable portion 2 is formed by integrally molding a metal having high rigidity, for example, and has a movable base T fixed to the upper end portion. An annular frame 21 is formed, and a laterally extending portion 22 is installed so as to cross in the up-down direction and the left-right direction inside the annular frame 21. In the present embodiment, as shown in FIG. 2, the first attachment portion 2x is formed so that the first vibration means X can be attached by raising the center of both sides of the annular frame 21 in the width direction. Further, a second attachment portion 2y is formed so that the second vibration means Y can be attached by raising the center of both sides of the annular frame 21 in the vertical direction. As shown in FIGS. 2 and 3, a third attachment portion 2 z capable of attaching the third vibration means Z is formed on the center lower surface side of the horizontal portion 22. In the third mounting portion 2z, two vibrators 4 arranged so that the surface direction of the column portion 42 is the horizontal direction are arranged so as to intersect at a position of the mounting portion 41 so as to be orthogonal to each other. In the present embodiment, the space overlapping the fixed portion 1 and the movable table T in a plan view inside and outside the movable portion 2 is used as an internal space S and used as an arrangement space for the vibrator 4 described later.

  Hereinafter, the vibrator 4 and the vibration source provided in the first, second, and third vibration means X, Y, and Z will be described.

  As shown in FIGS. 1, 2 and particularly FIG. 4, the vibrator 4 includes a mounting portion 41 provided at the center in the longitudinal direction and fixable to the movable portion 2, and a column portion 42 extending from the mounting portion 41. , And weight portions 43 set on both end sides which are free ends. That is, the vibrator 4 is configured mainly by a column portion 42 that can be elastically deformed as an example in the present embodiment, and the attachment portion 41 is provided at the center of the column portion 42 that has a thickness that can be elastically deformed. The weight portion 43 is assembled to the other end portion with a weight screw n2.

  In the present embodiment, the mounting portion 41 of the vibrator 4 is fixed to the first mounting portion 2x, the second mounting portion 2y, and the third mounting portion 2z of the movable portion 2 by four mounting screws n1. It is set as follows.

  The weight portion 43 is assembled to the column portion 42 using weight screws on both end sides which are free ends of the vibrator 4. In the present embodiment, the weight portion 43 is configured separately from the pillar portion 42 and has a contrasting shape with the pillar portion 42 as a boundary. Of course, the weight portion 43 is asymmetric with respect to the pillar portion 42. It may have a shape. Further, the weight portion 43 may be formed integrally with the column portion 42. In the present embodiment, the weight portion 43 has a shape that rises from the column portion 42 and extends toward the mounting portion 41, so that a gap is formed between the weight portion 43 and the column portion 42. The shape of the weight portion 43 is a shape that extends only in the direction orthogonal to the extending direction of the column portion 42, but has no shape boundary with the column portion 42 as a shape in which the column portion 42 is extended as it is. It may be.

  And in the article conveyance apparatus which concerns on this embodiment, it has set so that the vibrator | oscillator 4 may perform a pendulum motion by using the connection location with the pillar part 42 among the attachment parts 41 as a fulcrum. At this time, the column portion 42 of the vibrator 4 behaves like a spring using the elasticity of the material itself.

  In the article transporting apparatus according to the present embodiment, the excitation source 5 that vibrates the vibrator 4 is constituted by the piezoelectric elements 5 provided on both surfaces of the plate-like column part 42, respectively.

  In the present embodiment, the piezoelectric element 5 having a size that can cover most of the region excluding the region near the end of the column portion 42 is applied as an example. Then, the piezoelectric element 5 provided on the opposing surface of the column part 42 is expanded and contracted (for example, a sinusoidal voltage is applied to the piezoelectric element 5 to cause periodic elongation), whereby the column part 42 is attached to the attachment part. 41 is bent in a bow shape as a fulcrum, and the pendulum operation is performed. As a result, the vibrator 4 performs an appropriate pendulum operation in combination with the weight of the weight portion 43, and vibration of the vibrator 4 is generated. Here, the vibration frequency can be easily changed by changing the dimension along the thickness dimension of the column part 42. Even when the thickness dimension of the column part 42 is set large and high-frequency vibration (for example, 1000 Hz to 2000 Hz) is generated, the attachment part 41 of the vibrator 4 with respect to the movable part 2 is firmly fixed by the attachment screw n1. Has been. Thereby, the big bending of the column part 42 at the time of pendulum movement can be supported suitably. In addition, since the column portion 42 is bent and deformed into an arcuate shape, vibration attenuation is small and the vibration amplification factor due to resonance is large, the number of piezoelectric elements 5 necessary to obtain a desired amplitude can be reduced. The piezoelectric element 5 is fixed to the opposing surface of the column portion 42 by an appropriate process such as a sticking process. Since the predetermined gap is secured between the piezoelectric element 5 and the weight part 43 as described above, the situation where the piezoelectric element 5 and the weight part 43 interfere with each other is effectively avoided.

  In the article conveying apparatus according to the present embodiment, when the vibration source 5 is in an operating state (ON state in which the piezoelectric element 5 expands and contracts), the vibrator 4 performs a pendulum operation and vibrates. Vibrates, the vibration propagates to the movable table T, and the movable table T itself also vibrates. Specifically, when the piezoelectric element 5 constituting the excitation source 5 in at least one of the vibrators 4 is expanded and contracted, the column part 42 is flexed and vibrates, and the whole vibrator 4 is fixed to the movable part 2. A pendulum operation is performed in which the free end side is reciprocated in a circular arc shape with a predetermined location (connection location with the column portion 42) of the mounting portion 41 being used as a fulcrum. In particular, since the weight portion 43 is provided on the free end side of the vibrator 4, the reaction force of vibration is increased, and the vibrator 4 can be efficiently operated as a pendulum. Of the two vibrators 4 constituting one pair of vibrators 4, only the piezoelectric element 5 attached to one vibrator 4 is energized and the piezoelectric element attached to the other vibrator 4 is turned on. Even when 5 is in the energized OFF state, the vibrator 4 attached to the energized OFF piezoelectric element 5 vibrates due to resonance.

  In particular, in the article conveying apparatus according to the present embodiment, with respect to the first vibration means X and the second vibration means Y, the points of action of the force applied from the vibrator 4 are distributed in two places. Unnecessary vibrations such as rolling and yawing are unlikely to occur.

  As described above, since the article conveying device according to the present embodiment transmits only linear vibration to each part from the pendulum motion of the vibrator 4, bending and bending of the attachment portion of the attachment part 41 are minimized, and stable vibration is obtained. be able to. In addition, the vibration frequency can be easily changed by changing the thickness of each part constituting the vibrator 4 or changing the mass of the weight part 43. In addition, it is possible to easily change the vibration frequency by changing the effective length that causes the pendulum movement by moving the mounting position of the weight portion 43. That is, according to the present embodiment, it is realized to vibrate on a completely different vibration principle from that of a conventional article conveying apparatus, and in particular, an article conveying apparatus that can convey an object to be conveyed accurately and stably is realized.

  In order to reliably transmit the vibration of the vibrator 4 by the movable table T, it is desirable to arrange a plurality of vibrators 4 side by side along the first direction or the second direction. If such a configuration is applied, even if only one of the plurality of vibrators 4 is vibrated, the other vibrators 4 that are not vibrated vibrate due to resonance and can be transported. It is.

  And in this embodiment, it shall have the movable part 2 which is fixed to the movable stand T and attaches the said vibrator | oscillator 4, and this movable part 2 is made into the internal space formed between the said fixed part 1 and the movable stand T. By configuring so as to accommodate the vibrator 4, the pendulum motion of the vibrator 4 can be more reliably transmitted to the movable table T. Specifically, in such a configuration, unnecessary weights such as pitching, rolling, and yawing are unlikely to occur, so there is no need for a weight for balancing. It becomes possible to make it about 1/5.

  In addition, in the present embodiment, the first, second, and third vibrating means X, Y, and Z are independently attached to the movable portion 2 so that the position of the center of gravity of the vibrator 4 is conveyed. It becomes easy to design so that the center of gravity of the entire apparatus matches, and the center of gravity of the vibrator 4 that actually constitutes the first, second, and third vibrating means X, Y, and Z is determined as the center of gravity of the entire article conveying apparatus. Designed to match the positions, the generation of rotational moment is made extremely small, and as a result, it is possible to obtain a stable and constant vibration throughout the movable table T.

  In addition, in the present embodiment, the excitation source is a piezoelectric element, so that the excitation force for each vibrator 4 is effectively increased. That is, since the transducer 4 may be deformed in a generally arcuate shape, it is possible to increase the excitation force per transducer 4 by using the piezoelectric element 5 having a large area.

  In particular, in this embodiment, the same vibrator 4 is used for all the vibration means X, Y, and Z. In this way, even if the mass of the movable table T changes, the value of “mass versus spring constant” becomes the same in each direction. Therefore, the resonance frequency changes in the same direction in each direction. As a result, there is no need to readjust the resonance frequency. Further, in the case of the present embodiment, in practice, the variation of the resonance frequency due to the change in the weight of the movable table T is extremely small as compared with the conventional case. Therefore, it can be said that it is substantially unnecessary to readjust the resonance frequency.

  Furthermore, in the present embodiment, the column portion 42 of the vibrator 4 is bow-shaped and vibration attenuation is small, and the vibration amplification factor due to resonance is large. Therefore, even when the number of piezoelectric elements 5 is half that of the prior art, practically equivalent amplitude can be obtained. It is done. In other words, if the number of piezoelectric elements 5 is the same, the required current is about half.

  <Second embodiment>

  Hereinafter, other embodiments and modifications of the present invention will be described. About these each embodiment and modification, while attaching | subjecting the same code | symbol about what is corresponded to the component in the said embodiment, the detailed description is abbreviate | omitted.

  In the second embodiment of the present invention, as shown in FIGS. 5 and 6, the movable portion 2 has a connecting frame 26 having a rectangular frame shape in plan view, and the first, The vibrators 4a and 4b constituting the second and third vibrating means X, Y and Z are arranged.

  Further, in this embodiment, as illustrated in FIG. 5A, the column portion 42 is arranged in the vertical direction when arranged on an elevational surface, which is shown on the left side of the figure as corresponding to the vibrator 4 according to the above embodiment. A horizontal vibrator 4a having a horizontal mounting portion 41a capable of vibrating in the horizontal direction, and a vertical mounting portion 41b shown in the right side of FIG. The vertical vibrator 4b is applied. The horizontal vibrator 4a and the vertical vibrator 4b, the shape of the column part 42 and the weight part 43, and the form of the piezoelectric element 5 to be assembled have the same configuration as the above embodiment, although there are differences in shape and size. Make.

  The horizontal vibrator 4a has the horizontal mounting portion 41a as described above. The horizontal mounting portion 41a is assembled to the column portion 42 so that the mounting screw n1 can be assembled in a direction orthogonal to the surface direction of the column portion 42. And when attaching to an elevation surface, the attachment screw n1 makes the structure fastened together with the pillar part 42. FIG.

  As described above, the vertical attachment portion 41b has the vertical attachment portion 41b. The vertical mounting portion 41b is assembled with a mounting screw n1 along the surface direction of the column portion 42, and the mounting screw n1 is mounted on the vertical surface. The pillar portion 42 is separately attached to the horizontal attachment portion 41a by a pillar portion screw n3.

  The horizontal vibrator 4a is applied to the first and second vibration means X and Y, and the vertical vibrator 4b is applied to the third vibration means Z.

  Then, in the article transporting apparatus according to the present embodiment shown in FIG. 5B, the third excitation portion 2z for attaching the four vertical vibrators 4b is provided on the inner surface 26b of the connecting frame 26, thereby providing the third vibration. Means Z are provided. A total of eight horizontal vibrators 4 a are attached to the outer surface 26 a of the connecting frame 26. Specifically, a first mounting portion 2x for assembling a total of four horizontal vibrators 4a, two at the top and bottom in the figure, is provided on the vertical surface of the outer surface 26a facing in the width direction of the figure. Is configured. Further, the second vibration means Y is configured by providing a second mounting portion 2y for assembling a total of four horizontal vibrators 4a on the vertical surface of the outer surface 26a facing the vertical direction in the figure. Has been.

Here, a common configuration of the movable portion 2 applied to the present embodiment will be described with reference to FIG. The movable portion 2 includes a lower plate 23 having a rectangular plate shape supported by the anti-vibration spring 3, and an upper plate 25 that is fixed to the lower surface side of the movable base T and directly transmits the vibration of the movable portion 2 to the movable base T. In this configuration, the support plate 24 is erected from a required portion of the lower plate 23 and connected to the upper plate 25. In the present embodiment, a rectangular frame-shaped connecting frame 26 is further interposed between the lower plate 23 and the upper plate 25 in the center of the lower plate 23 in plan view. In addition, since it becomes the structure of the movable part 2 which is the same or equivalent also in the same embodiment and subsequent embodiment, detailed description below is abbreviate | omitted suitably. Further, regarding the plan view after the embodiment, the illustration of the upper plate 25 and the connecting column 24 is omitted, and the arrangement of the vibration-proof spring 3 is schematically shown.
Further, as a modification of the embodiment, the vibrators 4a and 4b may be arranged as shown in FIG. In the plan view of FIG. 5A, a mode in which the vibrators 4a and 4b are attached to the outer surface 26a of the connecting frame 26 is illustrated. As shown in FIG. 5B, the first mounting portion 2x and the second mounting portion 2y are configured so that the longitudinal direction of the horizontal vibrator 4a is the vertical direction. If it is such, the conveyance which rotates a to-be-conveyed object on the movable stand T is also attained.

  In the configuration according to the embodiment, the plurality of vibrators 4a and 4b are arranged along the first direction and the second direction, and the action points of the force applied from the vibrators 4a and 4b are dispersed in four places. Unnecessary vibrations such as pitching, rolling and yawing are less likely to occur.

  <Third embodiment>

  In the third embodiment of the present invention, as shown in FIG. 7, the vibrator 4 uses, as one aspect of the column portion 42, a divided column portion 43 c that extends in only one direction, and a divided column portion 43 c that forms a pair. The aspect arrange | positioned at the division | segmentation attachment part 41c divided | segmented similarly is shown so that it may each extend in a reverse direction.

  The divided attachment portion 41c is attached to the connection frame 26 by a separate attachment screw n1 while fixing one end portion of the divided pillar portion 43c with a column portion screw n3.

  In the case of the vibrator 4 according to the present embodiment, as shown in FIG. 4B, the split pillar portions 43c extend from both sides of the split mounting portion 41c as in the case of the vibrator 4 according to the embodiment. Although not illustrated, the vibrator 4 may be assembled so that the divided column portion 43c extends only in one direction from the divided mounting portion 41c.

  In the present embodiment, the vibrator 4 is assembled on the outer surface 26 a side of the connection frame 26 to constitute the first vibration means X and the second vibration means Y, and on the inner side of the connection frame 26. Two vibrators 4 are assembled to the lower plate 23 to constitute third vibration means Z. Even if it is such, it can have the same effect as each above-mentioned embodiment.

  <Fourth embodiment>

  In the fourth embodiment of the present invention, as an aspect of the vibrator 4, as shown in FIGS. 8 to 11, an integrated vibrator 40 in which the attachment portion 41, the column portion 42, and the weight portion 43 are integrally formed is applied. ing. And in this embodiment and its modification, the aspect which uses only the thing of the same size as the said integrated vibrator 40, the aspect which used the thing of a different size, and the attachment aspect in the movable part 2 are each varied. The modes will be described sequentially. In this embodiment as well, the piezoelectric element 5 serving as the excitation source 5 has the same configuration as that of the above-described embodiments and modifications attached to both surfaces of the column portion 42. Therefore, in the embodiment, the illustration of the piezoelectric element 5 is omitted.

  As shown in FIG. 8A, the integrated vibrator 40 is an integrally molded product of a material that can be elastically deformed depending on the thickness as an example in the present embodiment, and a column portion 42 having a thickness set so as to be elastically deformable. An attachment portion 41 is formed at one end of the weight, and a weight portion 43 is formed at the other end. That is, the configuration of the mounting portion 41 and the column portion 42 of the integrated vibrator 40 is substantially the same as the split mounting portion 41c and the split column portion 43c in the third embodiment. However, in the present embodiment, these integrated vibrators 40 are individually arranged, and therefore are labeled as an attachment portion 41 and a column portion 42 for convenience.

  In the present embodiment and its modification, as shown in FIG. 8A, one or both of the small type 40s and the large type 40b, which are two types of integrated vibrators 40 having different sizes, are appropriately arranged. Thus, an article conveying apparatus is realized. In the present embodiment, as an example, it is assumed that the large type 40b of the integrated vibrator 40 can generate an excitation force twice that of the small type 40s.

  FIG. 8B shows a mode in which the small type 40 s of the integrated vibrator 40 is applied only to the outer surface 26 a of the connection frame 26 as this embodiment. In the figure, a total of twelve small types 40 s are used, and the first, second, and third vibrating means X, Y, and Z each include four small type 40 s integrated vibrators 40. Here, in the integrated vibrator 40 according to the present embodiment, the extending direction of the column portion 42 with respect to the surface to which the attachment portion 41 is attached is a direction orthogonal to the first, second, and third embodiments. Therefore, specifically, the position where the first vibration means X and the second vibration means Y are provided appears on the side orthogonal to the first and second embodiments.

  FIG. 9 shows, as a modification of the embodiment, two large vibrators 40b of the large type 40b are used for the first and second vibrating means X and Y, and the third vibrating means Z includes A mode in which four same small types 40s are arranged radially is shown. That is, the direction in which the integrated vibrator 40 is arranged in the connection frame 26 can be various directions.

  FIGS. 10A and 10B show, as another modification, two integrated vibrators 40 of the large type 40b are used for each of the first and second vibrating means X and Y and four of the same small size are used. 9 is the same as the embodiment shown in FIG. 9 except that the connection grid plate 27 having a substantially lattice shape in plan view is applied in place of the connection frame 26, and the connection grid 26 is used. A mode in which the integrated vibrator 40 is arranged in each of the rooms partitioned by the plate 27 is shown. In FIGS. 5A and 5B, the arrangement of the integrated vibrator 40 is the same, but the shape of the connecting grid plate 27 is different. Of course, the arrangement of the connection struts 24 (not shown) may be changed as appropriate due to the difference in the shape of the connection grid plate 27.

  FIG. 11 shows another modified example in which each of the integrated vibrators 40 is arranged on the inner surface 28b of the outer frame 28 standing in a rectangular shape on the outer edge of the lower plate 23, instead of the connecting frame 26 and the connecting grid plate 27. The aspect which arranged is shown. Specifically, in FIG. 2A, the large type 40b of the integrated vibrator 40 is applied to the first and second vibrating means X and Y, and the same small size is applied to the third vibrating means Z. Type 40s is applied. FIG. 2B shows a mode in which all the integrated vibrators 40 are small type 40s.

  That is, as in the present embodiment, various modes can be applied to the mode in which the vibrator 4 is arranged on the movable portion 2.

  As mentioned above, although each embodiment of this invention was described, this invention is not limited to the structure of the said embodiment. For example, in the above-described embodiment, a piezoelectric element is applied as the excitation source. However, an excitation source using an electromagnet may be applied as a matter of course.

  Further, for example, in the above-described embodiment, the mode in which each vibrator is fixed to the movable portion is disclosed, but it is possible to adopt a mode in which the arrangement can be changed as appropriate. In addition, various materials can be applied to the material of the vibrator including the column portion that can realize the pendulum operation and the control mode of each vibrator.

  Other configurations can be variously modified without departing from the spirit of the present invention.

DESCRIPTION OF SYMBOLS 1 ... Fixed part attitude | position conversion apparatus 2 ... Movable part 3 ... Anti-vibration spring 4 ... Vibrator 5 ... Excitation source (piezoelectric element)
41 ... Mounting portion 42 ... Column portion 43 ... Weight portion T ... Moving platform X ... First vibration means Y ... Second vibration means Z ... Third Excitation means

Claims (5)

A fixed portion, a movable base elastically supported with respect to the fixed portion, first vibration means for vibrating the movable base in a horizontal first direction, and the movable base horizontal and the first A second vibration means for vibrating in a second direction intersecting the direction and a third vibration means for vibrating the movable table in a third direction perpendicular to the direction, and is placed on the movable table by the vibration of the movable table. An article conveying device for conveying a received article,
The first, second, and third vibration means are attached directly or indirectly to the movable base set on one end side, a pillar portion extending from the attachment portion, and the other end that is a free end A vibrator having a weight portion set on a side and performing a pendulum motion; and a vibration source for vibrating the vibrator so that the movable base conveys the object to be conveyed. Article conveying apparatus. The article conveying apparatus according to claim 1, wherein a plurality of the vibrators are arranged side by side along the first direction or the second direction. It has a movable part that is fixed to the movable base and attaches the vibrator,
The article according to claim 1 or 2, wherein the movable part is configured to accommodate the vibrator in an internal space formed between the fixed part and the movable base. Conveying device. 4. The article transporting apparatus according to claim 3, wherein the first, second, and third vibration means are independently attached to the movable portion. The article conveying apparatus according to claim 1, wherein the excitation source is a piezoelectric element.

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