JP2017182000A - Workpiece transporting apparatus, light irradiation device, workpiece transporting method, and light irradiation method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a workpiece transporting apparatus capable of repeating transportation and stopping with high precision of the stop position, which does not deteriorate productivity.SOLUTION: A stage 3 is disposed on a base plate 2 that is disposed on an anti-vibration table 1 with anti-vibration elastic bodies 13, 14, and a workpiece W on the stage 3 is transported by making a moving mechanism 4 move the stage 3. In a moving speed sequence for the stage implemented in a control unit 5, acceleration and deceleration periods are periods with which the first peak of the vibration of the base plate 2 due to the driving reaction torque after the end of the acceleration or deceleration section is equal to or lower than half the maximum value in relation to the natural vibration period of the anti-vibration elastic bodies 13, 14.SELECTED DRAWING: Figure 1

Description

  The invention of this application relates to a work transport technique for transporting a work with high stop position accuracy, such as alignment in an exposure apparatus.

  2. Description of the Related Art Work transfer apparatuses that place an object to be processed (hereinafter referred to as a work) on a stage and transfer it to a predetermined position are widely used in various processing apparatuses. For example, in an exposure apparatus used for the purpose of forming a fine circuit, a work transfer apparatus is used to transfer a work to a predetermined position with respect to an optical system that performs exposure. A workpiece transfer apparatus of this type is required to have a very high stop position accuracy against the background of high performance and high functionality of products. On the other hand, in many cases, the work is divided into segments by design, and it is necessary to process each segment with high positional accuracy. For this reason, this kind of work conveyance device is required to repeat the conveyance and stop at a predetermined position. One example of such an exposure apparatus is an apparatus (stepper) that performs an operation called “step-and-repeat”.

JP2015-170780A

  For workpiece transfer devices that repeat the transfer and stop at a predetermined position as described above, it is required to improve the stop position accuracy and shorten the time until the stop at such a high position accuracy is completed. Is done. More specifically, when the stage is moved from a certain position to a certain position, the stage cannot be stopped immediately at that position. A braking (braking) force acting against the force to continue moving due to inertia acts, and the stage stops when the latter exceeds the former, but the stage slightly moves due to the reaction (residual braking force) Continue. That is, a control system (servo system) that detects the position of the stage and performs feedback control is employed, and therefore, reverse driving is performed so as to eliminate fine movement due to reaction, and as a result, the stage Will vibrate finely. This fine movement (vibration) is attenuated by a frictional force or the like, and the state where the fine movement is sufficiently small is strictly a “stop” state. In this specification, such a state in which the fine movement of the stage is sufficiently small is referred to as “setting”.

  In the case of a workpiece transfer apparatus that repeats transfer and stopping at a predetermined position, it is particularly required to shorten the time required for settling. If a long time is required for settling, the entire processing time becomes longer, and productivity is lowered. Although it is conceivable to increase the conveyance speed, if the conveyance speed is increased, reaction and residual vibration (including those by feedback control) increase, and a long time is required for settling. The extent to which the recoil and residual vibrations should be settled depends on the application (processing performed after settling). In an apparatus such as an exposure apparatus that requires highly accurate alignment, reaction and residual vibration are required to be particularly small, so that the time required for settling is inevitably long. This is a factor that hinders productivity improvement. Moreover, as a technique for removing the residual vibration, an active vibration eliminating technique such as a pneumatic type and a reaction force reducing technique such as a counter mass have been put into practical use, but there are disadvantages that the configuration is complicated and the cost tends to be high.

The above problem is particularly remarkable in the case of an exposure apparatus that performs two-beam interference exposure, which has been studied recently. The two-beam interference exposure refers to a method in which laser light is divided into two light beams and the exposure is performed by causing interference on a workpiece. In this two-beam interference exposure, as disclosed in Patent Document 1, in order to transfer an undistorted image, it has been studied to limit the image to a small area near the optical axis for exposure. The light irradiation area in this exposure is very small. For this reason, it is necessary to repeat exposure, for example, as many as 352 times (Patent Document 1) for one workpiece, and thus it is required to move and stop a very large number of times with high accuracy. Therefore, the problem of prolonging the time required for the settling is serious.
The invention of the present application has been made in order to solve such a problem, and is a work transfer device that is suitably used when an operation of repeating transfer and stop is required and high stop position accuracy is required. Therefore, an object of the present invention is to provide a work transfer device that can sufficiently satisfy the requirements without deteriorating productivity.

In order to solve the above problems, the invention according to claim 1 of this application is
A vibration isolation table having an elastic body for vibration isolation;
A base board placed on a vibration isolation table;
A stage placed on the base board and on which the workpiece is placed;
A moving mechanism that transports the workpiece by moving the stage;
A control unit for controlling the moving mechanism,
The control unit implements a sequence of the stage moving speed by the moving mechanism, and sends a control signal for moving the stage in the mounted sequence to the moving mechanism.
The moving speed sequence is a sequence having an accelerating unit that increases the speed from zero speed to the set conveying speed, a constant speed unit that maintains the set conveying speed, and a decelerating unit that decreases the speed from the setting conveying speed to zero speed. Yes,
The time of the speed reduction part is a time when the first peak of the vibration of the base board due to the driving reaction force after the speed reduction part ends is less than half of the maximum value in relation to the natural vibration period of the vibration isolating elastic body. Have
In order to solve the above-mentioned problem, the invention according to claim 2 is the configuration according to claim 1, wherein the time of the acceleration portion is the first vibration of the base board due to the driving reaction force after the acceleration portion ends. Has a configuration in which the peak is a time that is half or less of the maximum value in relation to the natural vibration period of the vibration-proof elastic body.
In order to solve the above-mentioned problem, the invention according to claim 3 is the sequence according to claim 1 or 2, wherein the acceleration unit linearly increases the moving speed of the stage.
The deceleration unit is a sequence for linearly reducing the moving speed of the stage,
The time of the deceleration portion, the natural vibration period of the vibration isolating elastic body and _{T n,} where n is a natural number, greater than 0 1 / 4T _n or less, or {(n-1) +3/4} T _It has a configuration in which the time is not less than _{n and not} more than (n + 1/4) T _n .
In order to solve the above-mentioned problem, the invention according to claim 4 is the sequence according to claim 2, wherein the acceleration unit linearly increases the moving speed of the stage,
The deceleration unit is a sequence for linearly reducing the moving speed of the stage,
The time of the acceleration section, the natural vibration period of the vibration isolating elastic body and _{T n,} where n is a natural number, greater than 0 1 / 4T _n or less, or {(n-1) +3/4} T _It has a configuration in which the time is not less than _{n and not} more than (n + 1/4) T _n .
In order to solve the above problem, the invention according to claim 5 is the sequence according to claim 1 or 2, wherein the acceleration unit linearly increases the moving speed of the stage.
The deceleration unit is a sequence for linearly reducing the moving speed of the stage,
The time of the deceleration unit is configured to be nT _n time.
In order to solve the above problem, the invention according to claim 6 is the sequence according to claim 2, wherein the acceleration unit linearly increases the moving speed of the stage,
The deceleration unit is a sequence for linearly reducing the moving speed of the stage,
Time of the acceleration section has a configuration in which the time nT _n.
In order to solve the above-mentioned problem, the invention according to claim 7 is the sequence according to claim 1 or 2, wherein the accelerating unit increases the moving speed of the stage non-linearly,
The speed reduction unit is a sequence for nonlinearly reducing the moving speed of the stage,
Time of the deceleration portion, the natural vibration period of the vibration isolating elastic body and _{T n,} where n is a natural number, greater than 0 1 / 2T _n or less, or {(2n-1) +1/2} T or _n (2n + 1/2) has a configuration that is _{T n} less time.
In order to solve the above-mentioned problem, the invention according to claim 8 is the sequence according to claim 2, wherein the accelerating unit is a sequence for nonlinearly increasing the moving speed of the stage,
The speed reduction unit is a sequence for nonlinearly reducing the moving speed of the stage,
The acceleration portion of the time, the natural vibration period of the vibration isolating elastic body and _{T n,} where n is a natural number, greater than 0 1 / 2T _n or less, or {(2n-1) +1/2} T or _n (2n + 1/2) has a configuration that is _{T n} less time.
In order to solve the above problem, the invention according to claim 9 is the sequence according to claim 1 or 2, wherein the accelerating unit is a sequence for nonlinearly increasing the moving speed of the stage.
The speed reduction unit is a sequence for nonlinearly reducing the moving speed of the stage,
Time of the speed reduction unit has a configuration that it is time 2nT _n.
In order to solve the above-mentioned problem, the invention according to claim 10 is the sequence according to claim 2, wherein the accelerating unit increases the moving speed of the stage non-linearly,
The speed reduction unit is a sequence for nonlinearly reducing the moving speed of the stage,
Time of the acceleration section has a configuration that it is time 2nT _n.
In order to solve the above problem, the invention according to claim 11 is the structure according to any one of claims 1 to 10, wherein the natural vibration period of the vibration-proof elastic body is 0.1 seconds or more. Have.

Moreover, in order to solve the said subject, invention of Claim 12 is a workpiece conveyance apparatus in any one of the said Claims 1 thru | or 11,
A light source;
A light irradiation device including an irradiation optical system for irradiating a work placed on the stage with light from a light source;
The irradiation optical system is an optical system that irradiates light with an irradiation pattern smaller than the workpiece,
The moving distance by the moving mechanism is set as a distance where the region irradiated with light with the irradiation pattern is adjacent on the workpiece,
The light source and the irradiation optical system are configured to irradiate the work with light while the stage is stopped.
Moreover, in order to solve the said subject, invention of Claim 13 is a workpiece conveyance apparatus in any one of Claims 1 thru | or 11,
A light source;
A light irradiation device including an irradiation optical system for irradiating a work placed on the stage with light from a light source;
The light source and the irradiation optical system are configured to irradiate light onto the workpiece while the stage is moved by the moving mechanism.

Moreover, in order to solve the said subject, invention of Claim 14 has the vibration isolator which has the elastic body for vibration isolation,
A base board placed on a vibration isolation table;
A stage placed on the base board,
A moving mechanism that transports the workpiece by moving the stage;
A workpiece transfer method for transferring a workpiece using a workpiece transfer device including a control unit that controls a moving mechanism,
A placing step for placing the workpiece on the stage;
A transport step for transporting the work by moving the stage on which the work is placed,
The control unit implements a sequence of the stage moving speed by the moving mechanism, and the conveying step is a step in which the control unit sends a control signal for moving the stage in the mounted sequence to the conveying mechanism to convey the stage. Yes,
The moving speed sequence is a sequence having an accelerating unit that increases the speed from zero speed to the set conveying speed, a constant speed unit that maintains the set conveying speed, and a decelerating unit that decreases the speed from the setting conveying speed to zero speed. Yes,
The time of the deceleration unit is a time when the first peak of the vibration of the base board due to the driving reaction force after the termination of the deceleration unit is less than half of the maximum value in relation to the natural vibration period of the vibration isolating elastic body. Have
In order to solve the above problem, according to a fifteenth aspect of the present invention, in the configuration of the fourteenth aspect, the time of the accelerating unit is the first of the vibrations of the base board due to the driving reaction force after the accelerating unit ends It has a configuration in which the peak is a time that is less than half of the maximum value in relation to the natural vibration period of the vibration-proof elastic body.
In order to solve the above-described problem, the invention according to claim 16 is the sequence according to claim 14 or 15, wherein the accelerating unit linearly increases the moving speed of the stage.
The deceleration unit is a sequence for linearly reducing the moving speed of the stage,
The time of the deceleration portion, the natural vibration period of the vibration isolating elastic body and _{T n,} where n is a natural number, greater than 0 1 / 4T _n or less, or {(n-1) +3/4} T _It has a configuration in which the time is not less than _{n and not} more than (n + 1/4) T _n .
In order to solve the above problem, the invention according to claim 17 is the sequence according to claim 15, wherein the accelerating unit linearly increases the moving speed of the stage,
The deceleration unit is a sequence for linearly reducing the moving speed of the stage,
The time of the acceleration section, the natural vibration period of the vibration isolating elastic body and _{T n,} where n is a natural number, greater than 0 1 / 4T _n or less, or {(n-1) +3/4} T _It has a configuration in which the time is not less than _{n and not} more than (n + 1/4) T _n .
In order to solve the above problem, the invention according to claim 18 is the sequence according to claim 14 or 15, wherein the accelerating unit linearly increases the moving speed of the stage,
The deceleration unit is a sequence for linearly reducing the moving speed of the stage,
The time of the deceleration unit is configured to be nT _n time.
In order to solve the above problem, the invention according to claim 19 is the sequence according to claim 15, wherein the accelerating unit linearly increases the moving speed of the stage,
The deceleration unit is a sequence for linearly reducing the moving speed of the stage,
Time of the acceleration section has a configuration in which the time nT _n.
In order to solve the above-mentioned problem, the invention according to claim 20 is the sequence according to claim 14 or 15, wherein the accelerating unit is a sequence for nonlinearly increasing the moving speed of the stage.
The speed reduction unit is a sequence for nonlinearly reducing the moving speed of the stage,
Time of the deceleration portion, the natural vibration period of the vibration isolating elastic body and _{T n,} where n is a natural number, greater than 0 1 / 2T _n or less, or {(2n-1) +1/2} T or _n (2n + 1/2) has a configuration that is _{T n} less time.
In order to solve the above-described problem, the invention according to claim 21 is the sequence according to claim 15, wherein the accelerating unit is a sequence for nonlinearly increasing the moving speed of the stage,
The speed reduction unit is a sequence for nonlinearly reducing the moving speed of the stage,
The acceleration portion of the time, the natural vibration period of the vibration isolating elastic body and _{T n,} where n is a natural number, greater than 0 1 / 2T _n or less, or {(2n-1) +1/2} T or _n (2n + 1/2) has a configuration that is _{T n} less time.
In order to solve the above-described problem, the invention according to claim 22 is the sequence according to claim 14 or 15, wherein the accelerating unit increases the moving speed of the stage non-linearly,
The speed reduction unit is a sequence for nonlinearly reducing the moving speed of the stage,
Time of the speed reduction unit has a configuration that it is time 2nT _n.
In order to solve the above-described problem, the invention according to claim 23 is the sequence according to claim 14 or 15, wherein the accelerating unit increases the moving speed of the stage non-linearly,
The speed reduction unit is a sequence for nonlinearly reducing the moving speed of the stage,
Time of the acceleration section has a configuration that it is time 2nT _n.
In order to solve the above-mentioned problems, the invention according to claim 24 has the structure according to claims 14 to 235, wherein the natural vibration period of the vibration-proof elastic body is 0.1 second or more.

Moreover, in order to solve the said subject, invention of Claim 25 is the light irradiation method of irradiating light to a workpiece | work using the workpiece conveyance apparatus in any one of Claims 1 thru | or 11,
An irradiation step of irradiating light from a light source with an irradiation pattern smaller than the workpiece with respect to the workpiece placed on the stage when the stage is stopped,
It is a light irradiation method that repeats a transport step of transporting a workpiece by operating the moving mechanism,
The region irradiated with light in each irradiation step has a configuration in which it is adjacent on the workpiece.
Moreover, in order to solve the said subject, invention of Claim 26 is the light irradiation method of irradiating a workpiece | work using the workpiece conveyance apparatus in any one of Claims 1 thru | or 11, Comprising:
When the stage is moved by the moving mechanism, the work placed on the stage is irradiated with light from a light source.

As will be described below, according to any one of claims 1 to 11 and 14 to 24 of this application, in the speed sequence during the movement of the stage, the time of the decelerating portion is the natural vibration of the elastic body for vibration isolation. Since the residual vibration when the stage is stopped is selected to be small in relation to the cycle, the time until the settling at the stop is shortened. For this reason, the number of times of moving and stopping the stage is large, and the effect of improving the productivity is remarkable when applied to workpiece conveyance requiring high stop position accuracy.
According to the invention described in claim 2, 4, 6, 8, 10, 15, 17, 19, 21 or 23, the stage of the acceleration part is also related to the natural vibration period of the vibration isolating elastic body. Since the residual vibration at the time of stopping is selected so as to be reduced, the above effect is further enhanced.
According to the invention described in claim 11 or 24, since the natural vibration period of the vibration isolating elastic body is 0.1 second or more, the above effects can be obtained while obtaining a high vibration isolating effect by the vibration isolating table. Can do.
According to the invention of claim 12, 13, 25 or 26, it is possible to accurately irradiate each region of the work with the above effect.

It is a front section schematic diagram of the work conveyance device of an embodiment. It is the figure shown about the control pattern of moving speed. It is an examination figure about vibration of a structure. It is a figure which shows an example of the vibration waveform of the structure by the drive reaction force in the workpiece conveyance apparatus of embodiment. It is a figure which shows the result of having further analyzed the example of FIG. It is a figure which shows the braking force in S character control. It is the figure which showed the relationship between deceleration time (tau) in the case of S character control, and an initial peak. It is the figure which showed the result of the experiment which confirmed the effect of the workpiece conveyance apparatus of embodiment, and is the figure which showed the result about the workpiece conveyance apparatus of embodiment. It is the figure which showed the result of the experiment which confirmed the effect of the workpiece conveyance apparatus of embodiment, and is the figure which showed the result about the workpiece conveyance apparatus of a reference example.

Next, modes for carrying out the invention of the present application (hereinafter referred to as embodiments) will be described.
FIG. 1 is a schematic front sectional view of a workpiece transfer device according to an embodiment. The workpiece transfer apparatus according to the embodiment is an apparatus that performs an operation of repeating transfer and stop, and that requires high stop position accuracy. As an example of such an apparatus, the workpiece transfer apparatus according to the embodiment is mounted on a light irradiation apparatus. However, the use of the workpiece transfer apparatus of the present invention is not limited to this. Specifically, the light irradiation apparatus is an exposure apparatus, and irradiates a workpiece with a predetermined pattern of light.

In FIG. 1, the light irradiation device includes a workpiece transfer device, a light source (not shown), and an irradiation optical system 7. The workpiece transfer device includes a vibration isolator 1 having vibration isolating elastic bodies 13 and 14, a base board 2 disposed on the vibration isolator 1, a base board 2, and a work W placed thereon. A stage 3 that is moved, a moving mechanism 4 that transports the workpiece W by moving the stage 3, and a control unit 5 that controls the moving mechanism 4.
The exposure apparatus shown in FIG. 1 is installed in a clean room. The vibration isolator 1 is provided to prevent vibration from being transmitted to the stage 3 through the floor surface of the clean room. The moving mechanism 4 and the stage 3 are provided on the base board 2. The base plate 2 is a member for stably supporting the moving mechanism 4 and the stage 3 and is a so-called surface plate, and is a metal (for example, a cast metal) whose internal stress is sufficiently relaxed to prevent distortion and the like. ) Or stone.

  The anti-vibration table 1 includes anti-vibration elastic bodies 13 and 14. The vibration isolator 1 has a box shape and includes a bottom plate portion 11 and a side plate portion 12. A plurality of anti-vibration rubbers 13 are provided on the bottom plate 12 as anti-vibration elastic bodies that support the base board 2. Each side plate portion 12 is provided with a damper 14 as an anti-vibration elastic body in a state of being sandwiched between the side surfaces of the base board 2. Since each part is mounted on such an anti-vibration table 1, the surrounding vibration is not transmitted to the stage 3, and the deterioration of the stop position accuracy of the stage 3 during workpiece transfer is prevented. For example, a robot may be arranged to place the workpiece W on the stage 3 or to remove the processed workpiece W from the stage 3. In this case, even if vibration is generated with the operation of the robot, it is canceled by the vibration isolation table 1 and is not transmitted to the stage 3.

As the moving mechanism 4, a mechanism that can move the stage 3 at least in the XY directions is employed. The XY directions are two directions parallel to the work placement surface of the stage 3 and perpendicular to each other. The optical axis A of the irradiation optical system 7 is perpendicular to the workpiece placement surface.
As such a moving mechanism 4, an H type or a stack type is known, and an arbitrary one can be selected and used. As the drive source 41 for linear movement, a non-contact drive source using a magnet such as a linear motor is preferably used, but a mechanism using a ball screw may be used. In addition to the XY directions, a θ-direction moving mechanism 4 that rotates the stage 3 around an axis perpendicular to the workpiece W placement surface may be added.

  The control unit 5 sends a control signal to the moving mechanism 4 to repeat the movement of the stage 3 and the stop at a predetermined position. The control unit 5 is a programmable control device such as a PLC, and includes a storage unit 51 such as a memory storing information for control, a processor 52, an I / O module 53, and the like.

Further, in order to detect the position of the stage 3 after being moved by the moving mechanism 4, the workpiece transfer device includes a position sensor 6. As the position sensor 6, a laser interferometer is used to detect the position of the stage 3 with high accuracy. A reflection mirror 61 is attached to the stage 3, and the distance to the reflection mirror is measured by irradiating the reflection mirror 61 with laser light and interference between the reflection light and the reference light. Is detected.
The position sensor 6 is connected to the control unit 5, and the detection result of the position of the stage 3 is sent to the control unit 5. The control unit 5 performs feedback control of the moving mechanism 4 according to the detection result of the position of the stage 3 and adjusts the stop position of the stage 3.

A sequence program, which is an important element of the workpiece transfer apparatus according to the embodiment, is installed in the storage unit 51 included in the control unit 5. The sequence program is a program that controls the operation of the moving mechanism 4 by sending a predetermined control signal to the moving mechanism 4 at a predetermined timing.
The sequence control signal sent to the moving mechanism 4 includes information on how much distance stage 3 moves in which direction and information on how fast it moves. First, the former will be described.

The light irradiation device is a device that irradiates light to a set region. Hereinafter, this region is referred to as an irradiation region. Since the apparatus of FIG. 1 is an exposure apparatus, the irradiation optical system 7 irradiates the irradiation area with a predetermined pattern of light. In FIG. 1, the irradiation area is indicated by an arrow R. The irradiation region R is often a square, but may be a circle or an ellipse.
As shown in FIG. 1, the irradiation area R is set as an area smaller than the workpiece W. Therefore, the irradiation pattern is also smaller than the workpiece W. An area irradiated with this irradiation pattern (hereinafter referred to as an irradiated area) is indicated by R ′ in FIG. The workpiece conveyance device of the embodiment conveys the workpiece W to the irradiation region R so that the irradiated region R ′ is adjacent on the workpiece W. “Adjacent” means that the irradiated regions R ′ are not separated from each other, and includes cases where they are in contact with each other (continuous) and partially overlapped.

  In the plane of the surface of the workpiece W (strictly speaking, the surface facing the irradiation optical system 7), the position where each irradiated region R 'should be located is designated in advance. That is, the surface of the workpiece W is divided into segments by design, and each segment is irradiated with light once to form each irradiated region R ′. Therefore, when the direction and distance of movement of the stage 3 in the workpiece transfer apparatus are indicated by an arrow T, the direction and distance of movement correspond to the length and direction of a vector connecting the centers of adjacent segments (X direction). Of course and the sum of the movements in the Y direction). In the case of a projection exposure apparatus such as a stepper, one segment corresponds to one chip area. In the case of a two-beam interference exposure apparatus such as Patent Document 1 and Patent Document 2, one segment is used. This corresponds to a region irradiated with interference light.

  In any case, the control unit 5 causes the moving mechanism 4 to sequentially move in the distance and direction indicated by the arrow T in FIG. 1, and the time when the stage 3 is stopped (strictly settled) between the movements. The work W is irradiated with light in the belt. Then, when the movement of the arrow T is performed, the control unit 5 sends a control signal including information on the moving speed to the moving mechanism 4. There are two control patterns for moving speed. This point will be described with reference to FIG. FIG. 2 is a diagram showing a movement speed control pattern.

  As shown in FIG. 2, the movement speed control pattern includes a non-linear control pattern and a linear control pattern. In this case, the linear type and the non-linear type have the same meanings as differentiable and non-differentiable in calculus. A typical linear control pattern is the trapezoidal control shown in FIG. A typical non-linear control pattern, as shown in FIG. 2 (2), is a trapezoidal control in which the speed change is continuous (continuous in calculus) and is called S-shaped control.

  In any control pattern, from a set constant speed (hereinafter referred to as a set transport speed), a portion that accelerates from zero speed to a set transport speed (hereinafter referred to as an acceleration section), and a set transport speed And a portion that decelerates to zero speed (hereinafter referred to as a deceleration portion). The portion that moves at the set conveyance speed is hereinafter referred to as a constant speed portion. Note that the zero speed includes a state where the speed is substantially zero, that is, a state where the speed is set and can be regarded as substantially zero.

  A control pattern as shown in FIG. 2 is a sequence implemented in the control unit 5. In this embodiment, the sequence is implemented as software, and is a sequence program implemented in the storage unit 51 included in the control unit 5. That is, the sequence program sends a control signal for accelerating at a constant speed part (a part that sends a control signal to move at a set conveyance speed) and an acceleration part (according to (1) or (2) in FIG. 2). And a deceleration part (a part that sends a control signal to decelerate at a deceleration as shown in (1) or (2) of FIG. 2). FIG. 2 can also be said to show the structure of such a sequence program.

The workpiece transfer apparatus of the embodiment optimizes the time of the acceleration unit and the deceleration unit in the sequence program shown in FIG. 2 in order to shorten the time required for settling. Hereinafter, this point will be described in detail.
In the embodiment, the time of the acceleration unit and the deceleration unit (hereinafter referred to as acceleration time and deceleration time) is determined in relation to the natural vibration period of the vibration-proof elastic bodies 13 and 14. The determination of the acceleration time and the deceleration time in relation to the natural vibration period of the vibration-proof elastic bodies 13 and 14 is based on the results of inventor's earnest research on the technical configuration for shortening the settling time. .

  In the workpiece transfer apparatus that employs the vibration isolator 1 as in the embodiment, one having a low natural frequency (one having a small spring constant) is employed as the vibration isolating elastic bodies 13 and 14 in order to improve the vibration isolating performance. There is a tendency. However, according to the inventor's research, as a new problem caused by the lower natural frequency, the base board 2 as a whole sways greatly in a low cycle due to the driving reaction force (reaction force) when the stage 3 moves. I know that That is, since the base board 2 has a high rigidity and a large load, the entire structure including the moving mechanism 4 and the stage 3 on the base board 2 is likely to vibrate greatly on the vibration isolation table 1.

  More specifically, for example, during deceleration, a braking force in the direction opposite to the traveling direction acts on the stage. Then, a reaction (driving reaction force) of the braking force acting on the stage acts in the direction of pushing out the base board 2. In this case, there is no problem if the base board 2 is completely fixed and does not move. However, since the base board 2 is fixed to the vibration isolation table 1 via the vibration isolation rubber 13 and the damper 14, The drive reaction force causes itself to vibrate. Since the stage 3 is a part of the structure, the fact that the structure vibrates greatly means that the stage 3 vibrates.

  The workpiece transfer apparatus includes a position sensor 6 such as a laser interferometer for monitoring the stop position of the stage 3, and a position measurement signal from the position sensor 6 is sent to the control unit 5, and feedback control of the stop position is performed. Is done. In this case, if vibration due to the driving reaction force is generated in the base board 2 at the end of the speed reduction section, the stage 3 on the base board 2 is also vibrating. 5 gives feedback. In this case, the control target of the control unit 5 is the stage 3 and not the base board 2. Even if the control unit 5 sends a control signal to the moving mechanism 4 to operate the moving mechanism 4 in a direction to cancel the vibration, the vibration of the base board 2 is not directly affected, and the vibration is caused by the action of the damper 14 or the like. You need to wait until it is set. At this time, the driving reaction force of the stage 3 trying to follow the vibration of the base board 2 works in a direction to reduce the vibration, but the time until the stage 3 is settled by the influence of the vibration of the base board 2 is very long. It takes time.

  The inventors diligently studied a new problem caused by the interaction between the vibration of the base board 2 and the feedback control of the stop position of the stage 3. In this process, the magnitude of the vibration of the base board 2 is related to the length of the acceleration time and the deceleration time of the stage 3 on the base board 2. As this time is changed, the base board 2 periodically It has been found that there are acceleration times and deceleration times at which vibrations are minimized.

FIG. 3 is a study diagram on the vibration of the structure. As described above, the structure includes the base board 2, the stage 3 on the base board 2, and the moving mechanism 4 thereof. As shown in (1) of FIG. 3, the weight of the structure is M, and the spring constant between the structure and the vibration isolator 1 (the whole spring of the anti-vibration rubber 13 and the damper 14 as an elastic body for vibration isolation). If the constant is k and the viscous friction coefficient is c, the vibration of the structure is given by the equation of motion of Equation 1 below. The external force F (t) here means a driving reaction force (F ′ in FIG. 3).

式２〜式４において、Ｔ_ｎは防振用弾性体１３，１４の固有振動周期（二つの弾性体１３，１４の全体の固有振動周期）であり、ω_ｎはその角振動数である。ここで、図３（２）に示すような台形制御のパターンを前提としてステージ３の停止を検討対象としてみると、外力Ｆ（ｔ）はステージ３への制動力（ブレーキ）に対する駆動反力であるから、制動力が働き始めた時点から時刻τでゼロとなる。時刻τはステージ３への制動力がゼロになった時点であり、図２のシーケンスにおける減速部の終了時刻である。つまり、図３（２）に示すように、駆動反力Ｆ（ｔ）による静荷重変位ξ（ｔ）は、０≦ｔ＜τにおいてξ_ｐの値を有し、ｔ≧τにおいて０の値を有する。この境界条件を前提にし、式４を解いてラプラス逆変換すると、以下の式５が得られる。

Applying each relationship of the following Expression 2 to Expression 1, Expression 3 is obtained. When formula 3 is Laplace transformed, formula 4 is obtained.

In Expressions 2 to 4, T _n is the natural vibration period of the vibration-proof elastic bodies 13 and 14 (the total natural vibration period of the two elastic bodies 13 and 14), and ω _n is the angular frequency thereof. Here, when considering the stop of the stage 3 on the premise of the trapezoidal control pattern as shown in FIG. 3B, the external force F (t) is a driving reaction force against the braking force (brake) to the stage 3. Therefore, it becomes zero at time τ from the time when the braking force starts to work. Time τ is the time when the braking force to the stage 3 becomes zero, and is the end time of the deceleration unit in the sequence of FIG. That is, as shown in FIG. 3 (2), the static load displacement ξ (t) due to the driving reaction force F (t) has a value of ξ _p when 0 ≦ t <τ and a value of 0 when t ≧ τ. Have On the premise of this boundary condition, when the Laplace inverse transform is performed by solving the equation 4, the following equation 5 is obtained.

A graph of an example of the equation of motion of Equation 5 is shown in FIG. FIG. 4 is a diagram illustrating an example of a vibration waveform of a structure due to a driving reaction force in the workpiece transfer apparatus according to the embodiment. In this example, ζ = 0.2, ω _n = 31.4 rad / s, and T _n = 200 milliseconds. The horizontal axis in FIG. 4 is the time normalized by the deceleration time τ, and the vertical axis is the amplitude normalized by the static load displacement ξ _p due to the drive reaction force. FIG. 4 shows the case of τ = 100 milliseconds, 150 milliseconds, and 200 milliseconds.

The inventor further examined the analysis result of FIG. In FIG. 4, the time point t / τ = 1 is the time point when the deceleration time τ ends. Therefore, the magnitude of the first peak of the subsequent vibration (in this example, touching the minus side) becomes a problem. As shown in FIG. 4, the value of the first peak of vibration after the end of deceleration (hereinafter referred to as initial vibration peak) varies depending on the deceleration time τ. The inventor investigated how the initial vibration peak differs when the deceleration time τ was changed, and found that it changed periodically. The periodic change was found that that depends on the natural vibration period T _n of the vibration-proof elastic member 13.

FIG. 5 is a diagram showing the above points, and is a diagram showing the result of further analysis of the example of FIG. The vertical axis in FIG. 5 is the initial peak normalized by the static load displacement ξ _p , and the horizontal axis is the deceleration time τ normalized by the natural vibration period T _n of the vibration isolating elastic bodies 13 and 14. As shown in FIG. 5, the deceleration time τ is set to a natural number multiple of the natural vibration period T _n of the vibration-proof elastic member 13, the initial vibrational peak has a minimum value.

Next, since the inventor has analyzed what happens when the S-shaped control is performed, the result will be described. FIG. 6 is a diagram illustrating a braking force in the S-shaped control. FIG. 7 is a diagram similar to FIG. 5 and shows the relationship between the deceleration time τ and the initial peak in the case of S-shaped control.
As shown in FIG. 6, in this analysis, the time of deceleration is similarly taken, and it is assumed that a braking force (so-called triangular wave) that peaks at an intermediate point in time during the deceleration time τ is applied to the stage 3. Therefore, the conditions of the driving reaction force are the same, and a triangular waveform in which the static load displacement becomes the peak value ξ _p at the intermediate point of the deceleration time τ.

FIG. 7 is a diagram showing a result of examining the dependency of the initial peak on the deceleration time by performing the same analysis under the above conditions. Similarly, the horizontal axis is standardized by the natural vibration period T _n of the vibration-proof elastic member 13, the vertical axis is normalized by the peak value xi] _p static load displacement. As shown in FIG. 7, in the case of S-shaped control, the initial vibration peak has a minimum value when the deceleration time τ is 2n times the natural vibration period T _n of the vibration-proof elastic bodies 13 and 14 (n is a natural number). .

  As can be seen from the above analysis results, in the workpiece transfer apparatus of the embodiment, the deceleration time τ is n times the natural vibration period of the vibration isolating elastic bodies 13 and 14 in the case of trapezoidal control, and in the case of S-shaped control. Is 2n times, the initial vibration peak has a minimum value. As understood from the analysis result of FIG. 4, when the initial vibration peak is small, the time until the vibration is reduced is shortened. That is, the time required for settling is shortened.

  Although detailed description is omitted, the acceleration time for acceleration is set to n times the natural vibration period of the anti-vibration elastic bodies 13 and 14 in the case of trapezoidal control, and 2n times in the case of S-shaped control. If this is done, the initial vibration peak becomes smaller and the time required for settling can be shortened. As for acceleration, vibration due to the driving reaction force starts when the constant speed part (movement at the set conveyance speed) is reached, and the vibration is attenuated during operation of the constant speed part (moves in a state where the vibration is superimposed). ) So the impact is not as serious as in the case of deceleration. That is, the vibration generated by the acceleration unit may be sufficiently damped when it reaches the deceleration unit. Nevertheless, when the time of the constant speed portion is short, there is a possibility that the influence is not a little, so it is preferable to do as described above.

The workpiece transfer apparatus of this embodiment has a configuration in which the sequence in the control unit 5 is optimized based on the above examination and analysis. Specifically, the sequence program stored in the storage unit 51 of the control unit 5 has an acceleration unit and a deceleration unit, and the time of the deceleration unit is the first peak of the vibration of the base board 2 after the termination of the deceleration unit. Is the time that is less than half of the maximum value. Moreover, the time of the acceleration part in the said sequence is time when the first peak of the vibration of the base board 2 after completion | finish of an acceleration part becomes below half of the maximum value.
More specifically, in the case of trapezoidal control, the time of the deceleration unit and the time of the acceleration unit are set to a value that is n times the natural vibration period of the vibration isolating elastic bodies 13 and 14. It is set to a value 2n times the natural vibration period of the elastic elastic bodies 13 and 14 for use. From the viewpoint of increasing productivity, n is preferably as small as possible, and is preferably 1 or 2.

Setting of the deceleration time and the acceleration time is easy for those skilled in the art, but in the case of trapezoidal control, taking n = 1 as an example, an appropriate set transport speed V is first determined, and T _{n is} set with respect to the set transport speed V. Find the acceleration to be Natural vibration period T _n of the vibration-proof elastic member 13 is a value determined by the specification of the vibration isolation 1, a so-called catalog value. Then, the movement distance until the set conveyance speed V is reached with the acceleration is doubled (deceleration is the same gradient as the acceleration), and the remaining distance after subtracting from the necessary entire movement distance is called the movement distance at the set conveyance speed V It will be. After formulating the speed control sequence in this way, it is incorporated into the program.
The natural vibration period of the vibration-proof elastic bodies 13 and 14 is preferably 0.1 seconds or more. This is because the anti-vibration effect is further enhanced as described above.

Control unit 5 executes a sequence program when the transport of the workpiece W, to move the stage 3 in the acceleration time and deceleration time 2nT _n or nT _n. After the sequence of the deceleration unit is completed, the base board 2 vibrates due to the driving reaction force, and the stage 3 also vibrates integrally therewith, but the acceleration time and the deceleration time are optimized, so the vibration occurs within a short period of time. Converge and reach settling.

Next, the result of an experiment that confirms the effect of the workpiece transfer apparatus according to the embodiment will be described. FIG. 8 and FIG. 9 are diagrams showing the results of an experiment confirming the effect of the workpiece transfer device of the embodiment. FIG. 8 shows the result for the workpiece transfer apparatus of the embodiment, and FIG. 9 shows the result for the workpiece transfer apparatus of the reference example.
The embodiment (FIG. 8), the natural period T _n of the vibration-proof elastic member is 200 msec, the acceleration is trapezoidal control, the deceleration was set to S-control. The acceleration time was 200 milliseconds (= T _n ), and the deceleration time was 400 milliseconds (= 2T _n ). FIG. 8 (1) shows the displacement (calculated value, actually measured value) of the base board 2 as the stage 3 moves, and also shows the speed command pattern of the stage 3. Further, FIG. 8 (2) shows a measured value of the displacement amount of the stage 3 when the displacement of the base board 2 shown in FIG. 8 (1) is measured.

For the reference example (FIG. 9), the natural vibration period Tn of the elastic body for vibration isolation is also set to 200 milliseconds, acceleration and deceleration are both S-shaped control, and the acceleration time is 300 milliseconds (= 1. 5T _n ), and the deceleration time was also 300 milliseconds (= 1.5 T _n ).
Similarly, FIG. 9A shows the displacement amount (calculated value, actual measurement value) of the base board 2 as the stage 3 moves together with the speed command pattern of the stage 3 in the apparatus of the reference example. FIG. 9 (2) shows a measured value of the displacement amount of the stage 3 when the displacement of the base board 2 shown in FIG. 9 (1) is measured. In the reference example, when the stage 3 is moved in the Y direction, the stage 3 is also displaced in the X direction, and is also displaced in the θ direction.

As shown in FIG. 8 (1), in the workpiece transfer apparatus of the embodiment, the vibration of the base board 2 converges promptly after the speed reduction portion is finished. Then, as shown in FIG. 8 (2), it can be seen that the stage 3 has reached settling in a short time.
On the other hand, as shown in FIG. 9 (1), in the reference example, the vibration of the base board 2 has a large amplitude and continues for a long time after the end of the deceleration portion. Then, as shown in FIG. 9 (2), the stage 3 vibrates violently not only in the Y direction but also in the X direction and the θ direction after completion of the speed reduction portion, and it takes a long time to settle. I understand that.

The overall operation of the light irradiation apparatus on which the workpiece transfer apparatus of such an embodiment is mounted will be schematically described below. The wafer as the workpiece W is transferred from the previous process to the light irradiation device by a transfer device such as an AGV (Automated Guided vehicle). The stage 3 is waiting in advance at a predetermined load position. A loading mechanism such as a robot operates at the loading position, and the workpiece W is placed on the stage 3. The moving mechanism 4 moves the stage 3 on the base board 2 and stops the stage 3 at a position where the first segment in the workpiece W coincides with the irradiation region R.
In this state, the irradiation optical system 7 irradiates the irradiation area with light. Thereafter, the moving mechanism 4 is operated to move the stage 3 in the X direction and / or the Y direction so that the next segment is positioned in the irradiation region. And light irradiation is repeated similarly.

  In this way, the sequential movement and the light irradiation are repeated, and when the light irradiation is completed for all the segments in one work W, the processing of the work W is completed. Each segment is a region adjacent to each other. Therefore, regions irradiated with light in the irradiation pattern are adjacent to each other. When the processing for one workpiece W is completed, the moving mechanism 4 returns the stage 3 to the loading position. Then, the processed workpiece W is removed from the stage 3, the next workpiece W is placed, and the same steps are repeated.

  In the light irradiation apparatus described above, the stage 3 repeats movement and stop many times in order to irradiate each segment of the workpiece W. However, since the time to settling at the time of stop is short, Light irradiation can be started. For this reason, the entire processing time required for one work W can be significantly shortened. In particular, when the light irradiation apparatus is a two-beam interference exposure apparatus that irradiates the light with the chip area divided into a number of segments, the number of times of movement and stop is very large, so the above effect is remarkable.

  When performing the step-and-repeat light irradiation as described above, the light irradiation may be performed on the entire surface of the workpiece (surface on the side of the irradiation optical system). For example, as disclosed in Optical Patent Document 1, a grid polarizing element, which is a kind of polarizing plate, has been studied as an application of a two-beam interference exposure apparatus. The grid having a polarizing action is a line and space formed on the surface on one side of the substrate, and is formed over the entire surface. For this reason, light irradiation is performed to the whole area.

In the above embodiment, the deceleration time and the acceleration time, nT n in the case of the trapezoid _control, was the 2nT _n in the case of the _S-shaped control, as seen from FIG. 5 and FIG. 7, the time length before and after Even if there is, it is effective. That is, when the S-shaped control is greater 1 / 2T _n less than 0, or {(2n-1) +1/2} T n or (2n + 1/2) may be a _{T n} less time, trapezoidal control more than 0 to 1 / 4T _n or less in the case of, or {(n-1) +3/4} T n or _{(n + 1/4) T} n may be a less time.
In addition, the use of the work transfer device is not limited to an exposure device or other light irradiation device, and may be used for a device that performs processing other than light irradiation, such as a wafer bonding device.

In the above embodiment, the sequence is implemented by software. However, the sequence may be implemented by hardware.
Moreover, in the said embodiment, although the anti-vibration elastic bodies 13 and 14 were interposed between the anti-vibration stand 1 and the base board 2, an elastic body for anti-vibration is an anti-vibration stand and a floor surface. It may be interposed between the two. In this case, the base board corresponds to the vibration isolator.
Although the moving mechanism 4 moves the stage 3 in the XY directions, the stage 3 may be moved only in one direction when the present invention is implemented. In that case, the control unit may instruct the moving mechanism 4 only of the moving distance.

  Moreover, about embodiment of each invention of a light irradiation apparatus or a light irradiation method, there may exist embodiment which light-irradiates to the workpiece | work W, moving the stage 3, other than embodiment which performs step and repeat. Even in such a case, increasing the accuracy of the final stop position of the stage 3 is often beneficial in terms of improving the reproducibility of the processing, and the configuration of the present invention is suitably employed. Can be done.

DESCRIPTION OF SYMBOLS 1 Anti-vibration stand 13 Anti-vibration rubber | gum 14 as a vibration-proof elastic body Damper 2 as a vibration-proof elastic body 2 Base board 3 Stage 4 Moving mechanism 5 Control part 51 Memory | storage part 6 Position sensor 7 Irradiation optical system

Claims (26)

A vibration isolation table having an elastic body for vibration isolation;
A base board placed on a vibration isolation table;
A stage placed on the base board and on which the workpiece is placed;
A moving mechanism that transports the workpiece by moving the stage;
A control unit for controlling the moving mechanism,
The control unit implements a sequence of the stage moving speed by the moving mechanism, and sends a control signal for moving the stage in the mounted sequence to the moving mechanism.
The moving speed sequence is a sequence having an accelerating unit that increases the speed from zero speed to the set conveying speed, a constant speed unit that maintains the set conveying speed, and a decelerating unit that decreases the speed from the setting conveying speed to zero speed. Yes,
The time of the speed reduction part is the time when the first peak of the vibration of the base board due to the driving reaction force after the speed reduction part ends is less than half of the maximum value in relation to the natural vibration period of the vibration isolating elastic body. A workpiece transfer device.   The time of the acceleration part is the time when the first peak of the vibration of the base board due to the driving reaction force after the acceleration part ends is less than half of the maximum value in relation to the natural vibration period of the vibration isolating elastic body. The workpiece transfer apparatus according to claim 1, wherein The acceleration unit is a sequence for linearly increasing the moving speed of the stage,
The deceleration unit is a sequence for linearly reducing the moving speed of the stage,
The time of the deceleration portion, the natural vibration period of the vibration isolating elastic body and _{T n,} where n is a natural number, greater than 0 1 / 4T _n or less, or {(n-1) +3/4} T or _{n (n} + 1/4) work conveying apparatus according to claim 1 or 2, wherein the a T _n less time. The acceleration unit is a sequence for linearly increasing the moving speed of the stage,
The deceleration unit is a sequence for linearly reducing the moving speed of the stage,
The time of the acceleration section, the natural vibration period of the vibration isolating elastic body and _{T n,} where n is a natural number, greater than 0 1 / 4T _n or less, or {(n-1) +3/4} T or _{n (n} + 1/4) work conveying apparatus according to claim 2, characterized in that the T _n less time. The acceleration unit is a sequence for linearly increasing the moving speed of the stage,
The deceleration unit is a sequence for linearly reducing the moving speed of the stage,
The work conveying apparatus according to claim 1, wherein the time of the deceleration unit is nT _n time. The acceleration unit is a sequence for linearly increasing the moving speed of the stage,
The deceleration unit is a sequence for linearly reducing the moving speed of the stage,
The time of the acceleration section, the workpiece transfer apparatus according to claim 2, characterized in that the time nT _n. The acceleration unit is a sequence for nonlinearly increasing the moving speed of the stage,
The speed reduction unit is a sequence for nonlinearly reducing the moving speed of the stage,
Time of the deceleration portion, the natural vibration period of the vibration isolating elastic body and _{T n,} where n is a natural number, greater than 0 1 / 2T _n or less, or {(2n-1) +1/2} T 3. The workpiece transfer apparatus according to claim 1, wherein the time is _n or more and (2n + 1/2) _Tn or less. The acceleration unit is a sequence for nonlinearly increasing the moving speed of the stage,
The speed reduction unit is a sequence for nonlinearly reducing the moving speed of the stage,
The acceleration portion of the time, the natural vibration period of the vibration isolating elastic body and _{T n,} where n is a natural number, greater than 0 1 / 2T _n or less, or {(2n-1) +1/2} T 3. The work conveying apparatus according to claim 2, wherein the time is _n or more and (2n + 1/2) _Tn or less. The acceleration unit is a sequence for nonlinearly increasing the moving speed of the stage,
The speed reduction unit is a sequence for nonlinearly reducing the moving speed of the stage,
The work conveying apparatus according to claim 1, wherein the time of the deceleration unit is a time of 2 nT _n . The acceleration unit is a sequence for nonlinearly increasing the moving speed of the stage,
The speed reduction unit is a sequence for nonlinearly reducing the moving speed of the stage,
The work conveying apparatus according to claim 2, wherein the time of the acceleration unit is a time of 2 nT _n .   The workpiece conveying apparatus according to any one of claims 1 to 10, wherein a natural vibration period of the vibration-proof elastic body is 0.1 seconds or more. A workpiece transfer device according to any one of claims 1 to 11,
A light source;
A light irradiation device including an irradiation optical system for irradiating a work placed on the stage with light from a light source;
The irradiation optical system is an optical system that irradiates light with an irradiation pattern smaller than the workpiece,
The moving distance by the moving mechanism is set as a distance where the region irradiated with light with the irradiation pattern is adjacent on the workpiece,
The light source and the irradiation optical system irradiate the work with light while the stage is stopped. A workpiece transfer device according to any one of claims 1 to 11,
A light source;
A light irradiation device including an irradiation optical system for irradiating a work placed on the stage with light from a light source;
The light source and the irradiation optical system irradiate light onto a workpiece while the stage is moved by the moving mechanism. A vibration isolation table having an elastic body for vibration isolation;
A base board placed on a vibration isolation table;
A stage placed on the base board,
A moving mechanism that transports the workpiece by moving the stage;
A workpiece transfer method for transferring a workpiece using a workpiece transfer device including a control unit that controls a moving mechanism,
A placing step for placing the workpiece on the stage;
A transport step for transporting the work by moving the stage on which the work is placed,
The control unit implements a sequence of the stage moving speed by the moving mechanism, and the conveying step is a step in which the control unit sends a control signal for moving the stage in the mounted sequence to the conveying mechanism to convey the stage. Yes,
The moving speed sequence is a sequence having an accelerating unit that increases the speed from zero speed to the set conveying speed, a constant speed unit that maintains the set conveying speed, and a decelerating unit that decreases the speed from the setting conveying speed to zero speed. Yes,
The time of the deceleration part is the time when the first peak of the vibration of the base board due to the driving reaction force after the end of the deceleration part is less than half of the maximum value in relation to the natural vibration period of the vibration isolating elastic body. A characteristic workpiece transfer method.   The time of the acceleration part is the time when the first peak of the vibration of the base board due to the driving reaction force after the acceleration part ends is less than half of the maximum value in relation to the natural vibration period of the vibration isolating elastic body. The work conveying method according to claim 14, wherein: The acceleration unit is a sequence for linearly increasing the moving speed of the stage,
The deceleration unit is a sequence for linearly reducing the moving speed of the stage,
The time of the deceleration portion, the natural vibration period of the vibration isolating elastic body and _{T n,} where n is a natural number, greater than 0 1 / 4T _n or less, or {(n-1) +3/4} T or _{n (n} + 1/4) according to claim 14 or 15 work transfer method wherein a is _{T n} less time. The acceleration unit is a sequence for linearly increasing the moving speed of the stage,
The deceleration unit is a sequence for linearly reducing the moving speed of the stage,
The time of the acceleration section, the natural vibration period of the vibration isolating elastic body and _{T n,} where n is a natural number, greater than 0 1 / 4T _n or less, or {(n-1) +3/4} T The work conveying method according to claim 15, wherein the time is _n or more and (n + 1/4) T _n or less. The acceleration unit is a sequence for linearly increasing the moving speed of the stage,
The deceleration unit is a sequence for linearly reducing the moving speed of the stage,
The work conveying method according to claim 14 or 15, wherein the time of the decelerating portion is a time of nT _n . The acceleration unit is a sequence for linearly increasing the moving speed of the stage,
The deceleration unit is a sequence for linearly reducing the moving speed of the stage,
The work conveying method according to claim 15, wherein the time of the acceleration unit is nT _n . The acceleration unit is a sequence for nonlinearly increasing the moving speed of the stage,
The speed reduction unit is a sequence for nonlinearly reducing the moving speed of the stage,
Time of the deceleration portion, the natural vibration period of the vibration isolating elastic body and _{T n,} where n is a natural number, greater than 0 1 / 2T _n or less, or {(2n-1) +1/2} T or _n (2n + 1/2) according to claim 14 or 15 work transfer method wherein a is _{T n} less time. The acceleration unit is a sequence for nonlinearly increasing the moving speed of the stage,
The speed reduction unit is a sequence for nonlinearly reducing the moving speed of the stage,
The acceleration portion of the time, the natural vibration period of the vibration isolating elastic body and _{T n,} where n is a natural number, greater than 0 1 / 2T _n or less, or {(2n-1) +1/2} T or _n (2n + 1/2) work transfer method according to claim 15, wherein the a _{T n} less time. The acceleration unit is a sequence for nonlinearly increasing the moving speed of the stage,
The speed reduction unit is a sequence for nonlinearly reducing the moving speed of the stage,
The time of the reduction unit, according to claim 14 or 15 work transfer method according to, characterized in that the time 2nT _n. The acceleration unit is a sequence for nonlinearly increasing the moving speed of the stage,
The speed reduction unit is a sequence for nonlinearly reducing the moving speed of the stage,
The time of the acceleration section, the work conveying method according to claim 15, wherein it is a time 2nT _n.   24. The work conveying method according to claim 14, wherein a natural vibration period of the vibration-proof elastic body is 0.1 second or more. A light irradiation method for irradiating a work with light using the work transfer device according to claim 1,
An irradiation step of irradiating light from a light source with an irradiation pattern smaller than that of the workpiece with respect to the workpiece placed on the stage when the stage is stopped,
It is a light irradiation method that repeats a transport step of transporting a workpiece by operating the moving mechanism,
A light irradiation method characterized in that a region irradiated with light in each irradiation step is adjacent on a workpiece. A light irradiation method for irradiating a work with light using the work transfer device according to claim 1,
A light irradiation method characterized by irradiating light from a light source onto a workpiece placed on the stage when the stage is moved by the moving mechanism.

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