JP2017181394A - Pressure testing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a pressure testing method which enables accurate evaluation of air tightness in consideration of effects of temperature variation and other external disturbances.SOLUTION: A method disclosed herein relates to a pressure testing method for evaluating air tightness by feeding a pressurized test gas to a compartment of fixed volume. The test gas is supplied to the compartment at a constant flow rate, and a state equation is solved based on pressure and temperature of the compartment and supplied volume of the test gas to calculate cumulative volume of the test gas leaking from the compartment in a predetermined period of time, evaluating air tightness thereby.SELECTED DRAWING: Figure 1

Description

  The present disclosure relates to a pressurized test method for evaluating the hermeticity of a compartment by pressurizing and supplying a test gas to the compartment having a constant volume.

  For example, in facilities such as nuclear power plants, sections that should maintain their functions regardless of the influence of the surrounding environment (emergencies, control rooms, etc.) are placed in sections that are isolated from the outside due to their high airtightness. Is done. The airtightness of such a compartment is confirmed by, for example, a concentration decay method using a tracer gas, or air inflow / outflow to the compartment is detected by a sensor, or a differential pressure between adjacent compartments is measured. It is evaluated by.

  For example, Patent Document 1 differs in that the object to be measured is a filter housed in a housing, but by measuring the differential pressure between the compartments with a sensor embedded between the compartments in the housing, A technique for evaluating airtightness is disclosed.

JP 2013-139036 A

  As in the above-mentioned Patent Document 1, in the conventional airtightness evaluation test, it is typical to employ the actual measured pressure value itself as an evaluation index. However, if, for example, the temperature in the compartment changes, the pressure in the compartment will also change proportionally (by Boyle-Charles' law). In the case where there is a disturbance such as a temperature change in this way, in an airtight compartment where particularly accurate measurement is required, an error may occur in the evaluation result due to the influence, and sufficient accuracy may not be obtained.

  At least one embodiment of the present invention has been made in view of the above-described circumstances, and provides a pressure test method capable of performing an accurate airtightness evaluation in consideration of the influence of a disturbance such as a temperature change. Objective.

(1) In order to solve the above-described problem, a pressurization test method according to at least one embodiment of the present invention evaluates the airtightness of the compartment by pressurizing and supplying a test gas to the compartment having a constant volume. A pressure test method for supplying the test gas at a constant flow rate corresponding to the target pressure of the compartment, and after the compartment reaches the target pressure, the pressure and temperature of the compartment over a predetermined period of time, And integrating the amount of the test gas leaking from the compartment in the predetermined period by measuring the supply volume of the test gas and solving the equation of state based on the measured temperature and pressure and the supply volume of the test gas The airtightness is evaluated by calculating the leakage volume.

  According to the above method (1), the pressure in the compartment reaches the target pressure by pressurizing and supplying the test gas at a constant flow rate to the compartment to be tested. Thereafter, the temperature and pressure and the supply amount of the test gas are measured over a predetermined period, and the state leakage equation is solved based on the measurement result, whereby the accumulated leakage volume of the test gas is obtained. Since such airtightness evaluation is obtained based on a state equation including pressure, temperature, and the like as parameters, the influence of disturbance such as temperature change is taken into account, and a test result with excellent reliability can be obtained.

  The integrated leakage volume calculated by the method (1) may be directly used for the airtightness evaluation. For example, by dividing by a predetermined period, the leakage amount per unit time is converted into the airtightness evaluation. Further, it may be used for airtightness evaluation by converting the leakage rate per unit time by dividing by the partition volume.

により算出される。 (2) In some embodiments, in the method of (1), the accumulated leakage volume V _L is the constant volume V _o , the accumulated supply volume V _{supply of the} test gas in the predetermined period, and the start in the predetermined period Using the hour pressure P _start and the end pressure P _end , the _start temperature T _start and the end temperature T _end in the predetermined period, and the reference pressure P _N and the reference temperature T _N ,

Is calculated by

  According to the above method (2), the accumulated leakage volume of the test gas in a predetermined period can be obtained computationally based on a formula derived based on a state equation including pressure and temperature as variable parameters.

(3) In some embodiments, in the method of (1) or (2) above, a temperature adjusting device is installed in the section, and the temperature of the section becomes constant based on the measured temperature. Control the temperature regulator.

  According to the above method (3), the temperature of the compartment can be kept constant by installing the temperature adjusting device in the compartment to be tested and controlling it. Thereby, since the temperature change which is a disturbance factor is suppressed by feedforward, accurate airtightness evaluation becomes possible. Also, when solving the state equation, the temperature, which is one of the variable parameters included in the state equation, can be substantially constant, so that the accumulated leakage volume can be calculated with a simpler calculation.

  In addition, when pressurizing and supplying the test gas to the compartment as in the above method, the flow rate is set so that the pressure in the compartment becomes a target pressure that enables an appropriate test. If there is a disturbance, the pressure in the compartment may be lower than the target pressure, making it difficult to make a proper evaluation. However, by stabilizing the temperature with the temperature adjusting device as in the method (3), it is possible to effectively avoid such a situation that the test itself is not established.

(4) The pressurization test according to at least one embodiment of the present invention is a pressurization test method for evaluating the airtightness by supplying a test gas to a compartment having a constant volume in order to solve the above-mentioned problem. Then, the flow rate of the test gas to the compartment is feedback controlled based on the pressure in the compartment so that the pressure in the compartment approaches the target pressure, and the pressure change in the compartment and the test gas in a predetermined period The airtightness is evaluated by calculating an accumulated leakage volume of the test gas that leaks from the compartment during the predetermined period by solving a state equation based on the flow rate of.

  According to the method (4), the supply flow rate of the test gas is adjusted so that the pressure in the section to be tested becomes the target pressure. The supply flow rate of the test gas is feedback controlled based on the result of detecting the pressure in the compartment by, for example, a sensor. As a result, when the flow rate of the supply gas is kept constant, pressure fluctuation occurs due to the influence of disturbance such as temperature change in the section, and it becomes difficult to perform proper test evaluation by falling below the allowable pressure range of the test. Can be effectively avoided.

  In the method (4), as in the method (1) described above, the integrated leakage amount is calculated by solving the state equation, so that the influence of disturbance such as a temperature change is taken into consideration. Test results are obtained.

により算出される。 (5) In some embodiments, in the method of (4), the cumulative leakage volume V _L is the constant volume V _o , the cumulative supply volume V _{supply of the} test gas in the predetermined period, and the start in the predetermined period Using the hour pressure P _start and the end pressure P _end , the _start temperature T _start and the end temperature T _end in the predetermined period, and the reference pressure P _N and the reference temperature T _N ,

Is calculated by

  According to the above method (5), the accumulated leakage volume of the test gas in a predetermined period can be calculated based on a formula derived based on a state equation including pressure and temperature as variable parameters.

(6) In some embodiments, in the method of (4) or (5), the pressure is measured at a plurality of locations in the compartment, and the measurement is performed based on an average value of the plurality of measured values. Find the pressure change.

  According to the method of (6) above, by calculating the integrated leakage volume based on the average value of the pressure measurement values measured at a plurality of locations in the compartment, for example, when there is a pressure gradient in the compartment Even so, a reliable evaluation can be obtained effectively.

(7) In some embodiments, in the method of (6) above, the flow rate of the test gas is such that the maximum value and the minimum value of the pressures measured at the plurality of locations are within a predetermined allowable pressure range. Control is performed so as not to deviate from the upper limit value and the lower limit value.

  According to the above method (7), the pressure in the compartment is feedback-controlled so as to be within the allowable pressure range in which the pressurization test can be appropriately performed. Therefore, appropriate evaluation can be performed reliably.

(8) In some embodiments, in any of the above methods (4) to (7), a temperature adjusting device is installed in the section, and the temperature of the section becomes constant based on the measured temperature. The temperature adjusting device is controlled as follows.

  According to the method of (8) above, the temperature of the compartment can be kept constant by installing the temperature adjusting device in the compartment to be tested and controlling it. As a result, a change in temperature, which is a disturbance factor, is prevented, so that accurate airtightness evaluation can be performed. Also, when solving the state equation, the temperature, which is one of the variable parameters included in the state equation, can be substantially constant, so that the accumulated leakage volume can be calculated with a simpler calculation.

  According to at least one embodiment of the present invention, it is possible to provide a pressurization test method capable of accurate airtightness evaluation taking into consideration the influence of disturbance such as temperature change.

It is a mimetic diagram showing the whole pressurization test system composition concerning a 1st embodiment. It is a flowchart which shows the pressurization test method which concerns on 1st Embodiment for every process. FIG. 3 is a schematic diagram showing an overall configuration of a pressure test system according to a modification of the first embodiment. It is a flowchart which shows the control method of the pressurization test system of FIG. 3 for every process. It is a flowchart which shows the pressurization test method which concerns on 2nd Embodiment for every process. It is a graph which shows the time-dependent change of the pressure in a division in step S32 of FIG. 5, and the integral supply amount of a test gas. It is a schematic diagram which shows the whole structure of the pressurization test system which concerns on the modification of 2nd Embodiment.

Hereinafter, some embodiments of the present invention will be described with reference to the accompanying drawings. However, the dimensions, materials, shapes, relative arrangements, etc. of the components described in the embodiments or shown in the drawings are not intended to limit the scope of the present invention, but are merely illustrative examples. Absent.
For example, expressions expressing relative or absolute arrangements such as “in a certain direction”, “along a certain direction”, “parallel”, “orthogonal”, “center”, “concentric” or “coaxial” are strictly In addition to such an arrangement, it is also possible to represent a state of relative displacement with an angle or a distance such that tolerance or the same function can be obtained.
In addition, for example, expressions representing shapes such as quadrangular shapes and cylindrical shapes not only represent shapes such as quadrangular shapes and cylindrical shapes in a strict geometric sense, but also within the range where the same effect can be obtained. A shape including a chamfered portion or the like is also expressed.
On the other hand, the expressions “comprising”, “comprising”, “comprising”, “including”, or “having” one constituent element are not exclusive expressions for excluding the existence of the other constituent elements.

(First embodiment)
First, the configuration of a pressure test system used for implementing the pressure test method according to the first embodiment of the present invention will be described. FIG. 1 is a schematic diagram showing an overall configuration of a pressure test system 1 according to the first embodiment.

As shown in FIG. 1, the section 2 that is a test target of the pressure test system 1 is a chamber surrounded by a partition wall, and is configured to have a constant volume V _o . Such a section 2 is a section that should maintain its function regardless of the influence of the surrounding environment in the event of an emergency, such as an emergency response center, emergency control room, or central control room provided in a nuclear power plant building. Countermeasures, control room, etc.) and is a target for which high airtightness is required.

  The pressurization test system 1 can supply the test gas from the storage unit 4 by connecting the storage unit 4 (for example, a cylinder) and the storage unit 4 to the section 2 for storing the test gas (for example, air) in a high pressure state. And the flow rate adjusting valves 8 and 9 provided on the outer side and the inner side of the section 2 on the supply line 6, respectively. The flow rate adjustment valves 8 and 9 are configured such that the opening degree can be controlled based on a control signal from the control device 14 described later. In this embodiment, only the flow rate adjustment valve 8 is provided for the sake of simplicity. The case where the opening degree is controlled will be described (of course, the opening degree of only the flow rate adjusting valve 9 may be controlled, or the opening degree of both the flow rate adjusting valves 8 and 9 may be controlled). As a result, the test gas is supplied from the storage unit 4 to the section 2 at a predetermined supply amount according to the opening degree of the flow regulating valve 8, and the internal space of the section 2 is pressurized to atmospheric pressure or higher.

In the pressurization test performed in the present embodiment, the airtightness is evaluated based on the degree of leakage of the test gas from the section 2 pressurized to atmospheric pressure or higher as described above. A pressure range is defined in advance. The allowable pressure range includes a lower limit pressure value P _lower (higher than atmospheric pressure) and an upper limit pressure value P _upper , and is defined to include a target pressure P _ref described later. Whether or not an appropriate evaluation can be performed according to the specifications may be set experimentally, theoretically, or simulationally, for example.

A pressure sensor 10 and a temperature sensor 12 for measuring the pressure and temperature in the compartment 2 are installed in the internal space of the compartment 2. The pressure sensor 10 is a measuring device capable of outputting an electrical signal corresponding to the pressure value in the compartment 2, and adopts various methods such as resistance wire type, diffusion type, film formation type, capacitance type or mechanical type. Is possible. The temperature sensor 12 is a sensor device that can output an electrical signal corresponding to the temperature in the compartment 2, and various systems such as a resistance temperature sensor, a thermistor element, and a thermocouple can be employed. The measurement results in the pressure sensor 10 and the temperature sensor 12 are sent as electrical signals to the control device 14 described later and used for various controls.
A flow rate sensor 13 for detecting the flow rate of the test gas supplied to the section 2 through the supply line 6 is provided on the downstream side of the supply line 6.

  The control device 14 is a control unit of the pressure test system 1 and is configured by an electronic arithmetic device such as a computer. In FIG. 1, the internal configuration of the control device 14 is functionally shown as a block configuration, and a control unit 16 that controls each component of the pressurization test system 1 and various data obtained in the test are analyzed. And an analysis unit 18 that performs airtightness evaluation.

  Next, a pressure test method performed by the pressure test system 1 having the above configuration will be specifically described. FIG. 2 is a flowchart showing the pressure test method according to the first embodiment for each step.

First, the control device 14 controls the opening degree of the flow rate adjusting valve 8 so that the test gas is supplied to the section 2 at a constant flow rate corresponding to the preset target pressure _Pref (step S10). The constant flow rate set here is selected as a value such that when the test gas is supplied to the section 2 from the supply line 6, the pressure in the section 2 reaches the target pressure _Pref and is maintained thereafter.

Subsequently, the control device 14 determines whether or not the pressure in the section 2 has reached the target pressure P _ref by referring to the measurement result of the pressure sensor 10 while supplying the test gas to the section 2 at a constant flow rate. (Step S11). When the pressure in the compartment 2 reaches the target pressure _Pref (step S11: YES), the control device 14 measures the pressure and temperature of the compartment 2 and the supply volume of the test gas over a predetermined period t (step S12). .
Note that the supply volume of the test gas is calculated based on the measurement value of the flow sensor 13.

により算出する（ステップＳ１４）。ここで、Ｖ_ｏは区画２の体積、Ｖ_{ｓｕｐｐｌｙ}は所定期間ｔに供給ライン６を介して区画２に供給される試験ガスの積算体積（積算供給体積）、並びに、Ｐ_Ｎ及びＴ_Ｎは圧力及び温度をそれぞれ規格化するための基準圧力（１ａｔｍ）及び基準温度（０℃）である。 Then, the control device 14 (analysis unit 18) obtains the _start pressure P _start and the end pressure P _end , the _start temperature T _start and the end temperature T _end in the predetermined period from the measurement results over the predetermined period t (step S13), the integrated leakage volume _VL of the test gas leaking from the compartment 2 during the predetermined period t is expressed by the following equation:

(Step S14). Here, _{V o} is the volume of compartments _{2, V supply} is integrated volume of test gas supplied to the compartment 2 via the supply line 6 to a predetermined time period t (accumulated supply volume), and, _{P N} and _{T N} is the pressure And a reference pressure (1 atm) and a reference temperature (0 ° C.) for normalizing the temperature, respectively.

が得られる。積算漏洩体積Ｖ_Ｌは、次式

であることから、これに代入することにより（１）式が得られる。 Here, the derivation method of the equation (1) will be briefly described. Based on Boyle-Charles' law,

Is obtained. Accumulated leakage volume V _L is

Therefore, the expression (1) is obtained by substituting for this.

Subsequently, the analysis unit 18 uses the integrated leakage volume V _L calculated in step S14, the volume V _{o of the} section 2, and the predetermined period t to calculate the leakage rate GD per unit time as follows: GD = (V _L / V _o ) / T (2)
(Step S15), and the airtightness of the section 2 is evaluated based on the leakage rate GD (step S16).

In addition, although the case where airtightness is evaluated based on the leakage rate GD is illustrated in the above step S16, the airtightness may be evaluated using the integrated leakage volume _VL calculated in step S14 directly. The leakage rate per unit time may be converted by dividing the integrated leakage volume V _L by the volume V _o and used for airtightness evaluation.

As described above, in the first embodiment, the pressure P in the section 2 reaches the target pressure P _ref by pressurizing and supplying the test gas at a constant flow rate to the section 2 to be tested. Thereafter, the temperature and pressure and the supply amount of the test gas are measured over a predetermined period t, and the state equation is solved based on the measurement result, whereby the accumulated leakage volume of the test gas is obtained. Since such airtightness evaluation is obtained based on a state equation including pressure, temperature, and the like as parameters, the influence of disturbance such as temperature change is taken into account, and a test result with excellent reliability can be obtained.

  Here, FIG. 3 is a schematic diagram showing an overall configuration of a pressure test system according to a modification of the first embodiment. This modification is structurally different from the above embodiment in that it further includes a temperature adjustment device 20 installed in the internal space of the section 2. The temperature adjustment device 20 is, for example, a heater or a cooler that can be operated by a power supply (not shown), and is configured to be controllable by the control device 14 based on the measurement result of the temperature sensor 12.

FIG. 4 is a flowchart showing the control method of the pressure test system of FIG. 3 for each process.
First, the control device 14 controls the opening degree of the flow rate adjustment valve 8 so that the test gas is supplied to the section 2 at a constant flow rate corresponding to the preset target pressure P _ref as in step S10. Step S20).

  Subsequently, the control device 14 controls the temperature adjustment device 20 based on the measurement result of the temperature sensor 12 so that the temperature of the section 2 becomes constant (step S21). The control contents in step S21 will be described in detail. In this modification, a target temperature and an allowable temperature range are set in advance for the temperature in the section 2 under test. The allowable temperature range is defined by a lower limit temperature value and an upper limit temperature value centering on the target temperature. When the measurement result of the temperature sensor 12 is lower than the temperature lower limit value, the control device 14 controls the temperature adjusting device 20 so that the atmosphere in the compartment 2 is heated, so that the inside of the compartment 2 is increased so as to approach the target temperature. Warm up. On the other hand, when the measurement result of the temperature sensor 12 is higher than the temperature upper limit value, the control device 14 controls the temperature adjusting device 20 so that the atmosphere in the compartment 2 is cooled, so that the inside of the compartment 2 approaches the target temperature. Cool down. By controlling the temperature adjusting device 20 in a feedback manner based on the measurement result of the temperature sensor 12 in this way, the temperature of the section 2 is converged within the allowable temperature range centered on the target temperature and stabilized.

Subsequently, the control device 14 determines whether or not the pressure in the section 2 has reached the target pressure P _ref by referring to the measurement result of the pressure sensor 10 while supplying the test gas to the section 2 at a constant flow rate. (Step S22) When the pressure in the section 2 reaches the target pressure _Pref (Step S11: YES), the same control as that after Step S12 is performed (Steps S23 to S27).

  Thus, according to this modification, the temperature of the section 2 can be kept constant by installing the temperature adjusting device 20 in the section 2 to be tested and controlling it. Thereby, since the temperature change which is a disturbance factor is suppressed by feedforward, accurate airtightness evaluation becomes possible. Also, when solving the state equation, the temperature, which is one of the variable parameters included in the state equation, can be substantially constant, so that the accumulated leakage volume can be calculated with a simpler calculation.

(Second Embodiment)
Next, a pressure test system according to the second embodiment will be described. The pressurization test system according to the second embodiment has a configuration (FIG. 1) that is structurally similar to that of the first embodiment described above, but has a difference in control contents as described below.
In the following description, components corresponding to those in the above-described embodiment will be denoted by common reference numerals, and repeated description will be omitted as appropriate unless otherwise specified.

FIG. 5 is a flowchart showing the pressure test method according to the second embodiment for each step.
First control unit 14, similarly to steps S10 and S11 described above, as the test gas at a constant flow rate corresponding to the target pressure P _ref which has been set in advance is supplied to the compartment 2, the opening degree of the flow control valve 8 By controlling (step S30) and referring to the measurement result of the pressure sensor 10 while supplying the test gas to the section 2 at a constant flow rate, it is determined whether or not the pressure in the section 2 has reached the target pressure _Pref. (Step S31).

When the pressure in the compartment 2 reaches the target pressure _Pref (step S31: YES), the control device 14 makes the pressure in the compartment 2 approach the target pressure based on the measurement result of the pressure sensor 10. Feedback control of the flow rate of the test gas is started (step S32). The details of the feedback control will be described in detail. The control device 14 sets a pressure lower limit value P1 and a pressure upper limit value P2 that define an allowable pressure range centered on the target pressure _Pref (P1 < _Pref <P2). ) When the pressure P becomes lower than the pressure lower limit value P1, the supply gas flow rate is gradually increased by increasing the opening degree of the flow rate adjusting valve 8 and then reaches the target pressure _Pref. Secure with. On the other hand, when the pressure P becomes higher than the pressure upper limit value P2, the supply gas flow rate is gradually decreased by decreasing the opening degree of the flow rate adjusting valve 8, and then the supply gas amount in a state where the target pressure _Pref is reached. Fix the opening with.

  Here, FIG. 6 is a graph showing the change over time of the pressure in the section 2 and the integrated supply amount of the test gas in step S32 of FIG. As shown in FIG. 6, the flow rate per unit time of the test gas becomes variable by controlling the opening of the flow rate adjusting valve 8 by feedback control (assuming that the flow rate is fixed at a constant value as in the first embodiment). In this case, the characteristic of the integrated supply amount of the test gas is a perfect linear function), so that the pressure in the compartment 2 is kept constant.

  In the processing after step S33, the control device 14 measures the pressure and temperature of the section 2 and the supply volume of the test gas over a predetermined period t, and performs the same control as that after step S12 (steps S33-S37). ). As a result, also in the present embodiment, as in the first embodiment described above, by calculating the integrated leakage amount by solving the state equation, a favorable test result in which the influence of disturbance such as a temperature change is taken into account is obtained. It is done. Particularly in this embodiment, the flow rate of the test gas is controlled as in the first embodiment by controlling the supply flow rate of the test gas in a feedback manner so that the pressure in the section 2 to be tested becomes the target pressure. When the pressure is fixed at a certain level, pressure fluctuations occur due to the influence of disturbances such as temperature changes in section 2, and it becomes difficult to perform proper test evaluation by falling below the allowable pressure range of the test. Can be effectively avoided.

  Also in the second embodiment, as in the modified example of the first embodiment (see FIG. 3), the temperature adjustment device 20 is installed in the section 2, and the temperature of the section 2 is determined based on the measurement result of the temperature sensor 12. The temperature adjusting device 20 may be controlled so that the temperature becomes constant. In this case, since the temperature change which is a disturbance factor is prevented, more accurate airtightness evaluation can be performed. Also, when solving the state equation, the temperature, which is one of the variable parameters included in the state equation, can be substantially constant, so that the accumulated leakage volume can be calculated with a simpler calculation.

Here, FIG. 7 is a schematic diagram showing an overall configuration of a pressure test system according to a modification of the second embodiment. In this modification, the pressurization test system 1 is different in that a plurality of pressure sensors 10 are provided in the internal space of the section 2.
In the following description, components corresponding to those in the above-described embodiment will be denoted by common reference numerals, and repeated description will be omitted as appropriate unless otherwise specified.

により求められる平均値で代用する。すなわち、ステップＳ３５における積算漏洩体積は次式

より求められることとなる。 Each of the plurality of pressure sensors 10 is electrically connected to the control device 14, and the control device 14 is configured to be usable for various controls by acquiring the measurement value of each sensor. Assuming that there are n (n is a natural number of 2 or more) pressure sensors 10, the control device 14 obtains the _start pressure P _start and the end pressure P _end in step S34. Using the measured values P1, P2,..., Pn,

Substitute the average value obtained by. That is, the cumulative leakage volume in step S35 is

It will be more demanded.

  Thus, in this modification, by calculating the integrated leakage volume based on the average value of the pressure measurement values measured at a plurality of locations in the compartment 2, for example, when a pressure gradient exists in the compartment 2 Even so, a reliable evaluation can be obtained effectively.

  The arrangement of the plurality of pressure sensors 10 in the compartment 2 may be arbitrary. However, for example, when the pressure sensors 10 are arranged so as to be widely distributed in the internal space of the compartment 2, there is a pressure gradient in the compartment 2. However, a reliable airtight evaluation may be performed. In addition, when a location in the section 2 where a pressure gradient is likely to occur is known in advance, the layout may be configured so that the pressure sensor 10 is disposed at the location.

  In the present modification, in the feedback control in step S32, the control device 14 specifies the maximum pressure value and the minimum pressure value from the pressures respectively measured by the pressure sensors 10 installed at a plurality of locations in the section 2, and the maximum pressure value is determined. The value and the minimum pressure value may be controlled so as not to deviate from an upper limit value and a lower limit value of a predetermined allowable pressure range. In this case, feedback control is performed so that the pressure in the compartment 2 falls within an allowable pressure range in which the pressurization test can be appropriately performed, so that proper evaluation can be performed reliably.

  In addition, a plurality of temperature sensors 12 may also be provided in the compartment 2 in the same manner as described above in which a plurality of pressure sensors 10 are provided. Similarly, in this case, the integrated leakage volume is calculated based on the average of the measurement values acquired from the plurality of temperature sensors 12, so that, for example, a temperature gradient exists in the section 2. However, a reliable evaluation can be obtained effectively.

  As described above, according to some embodiments of the present invention, it is possible to provide a pressurization test method capable of performing an accurate airtightness evaluation in consideration of the influence of a disturbance such as a temperature change.

DESCRIPTION OF SYMBOLS 1 Pressurization test system 2 Section 4 Storage part 6 Supply line 8, 9 Flow control valve 10 Pressure sensor 12 Temperature sensor 14 Control apparatus 16 Control part 18 Analysis part 20 Temperature adjustment apparatus

Claims (8)

A pressurization test method for evaluating the hermeticity of the compartment by pressurizing and supplying a test gas to the compartment having a constant volume,
Supplying the test gas at a constant flow rate corresponding to the target pressure of the compartment;
After the compartment has reached the target pressure, measure the pressure and temperature of the compartment and the supply volume of the test gas over a predetermined period of time;
By solving the equation of state based on the measured temperature and pressure, and the supply volume of the test gas, the integrated leakage volume of the test gas leaking from the compartment during the predetermined period is calculated, and thereby the airtightness is obtained. A pressure test method characterized by evaluating. The accumulated leakage volume V _L is the constant volume V _o , the accumulated supply volume V _supply of the test gas in the predetermined period, the start pressure P _start and the end pressure P _{end in} the predetermined period, and the start in the predetermined period. Using the temperature T _start and end temperature T _end , the reference pressure P _N and the reference temperature T _N ,

The pressure test method according to claim 1, wherein the pressure test method is calculated by: Install a temperature control device in the compartment,
The pressure test method according to claim 1 or 2, wherein the temperature adjusting device is controlled so that the temperature of the section becomes constant based on the measured temperature. A pressurization test method for evaluating gas tightness by supplying a test gas to a compartment having a constant volume,
Feedback control of the flow rate of the test gas to the compartment based on the pressure in the compartment so that the pressure in the compartment approaches the target pressure;
The airtightness is evaluated by calculating an accumulated leakage volume of the test gas leaking from the compartment during the predetermined period by solving a state equation based on a pressure change in the compartment and a flow rate of the test gas during a predetermined period. A pressure test method characterized by: The accumulated leakage volume V _L is the constant volume V _o , the accumulated supply volume V _supply of the test gas in the predetermined period, the start pressure P _start and the end pressure P _{end in} the predetermined period, and the start in the predetermined period. Using the temperature T _start and end temperature T _end , the reference pressure P _N and the reference temperature T _N ,

The pressure test method according to claim 4, wherein the pressure test method is calculated by:   The pressure test method according to claim 4 or 5, wherein the pressure is measured at each of a plurality of locations in the section, and the pressure change is obtained based on an average value of the plurality of measured values. .   The flow rate of the test gas is controlled such that the maximum value and the minimum value of the pressures measured at the plurality of locations do not deviate from the upper limit value and the lower limit value of the predetermined allowable pressure range. The pressure test method according to claim 6. Install a temperature control device in the compartment,
The pressure test method according to any one of claims 4 to 7, wherein the temperature adjusting device is controlled so that the temperature of the section becomes constant based on the measured temperature.

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