JP2017164829A - Workpiece processing device and processing position correction method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a workpiece processing device and a processing position correction method which can easily and accurately process a workpiece by easily detecting a position deviation amount of a processed part of the workpiece supported by workpiece support means and correcting position data of a workpiece processing tool based on the detected position deviation amount.SOLUTION: Position data of a processed part is corrected based on correction data, which corresponds to a position deviation amount of the processed part determined based on imaging data and reference imaging data, and a workpiece processing tool is controlled to move based on the corrected position data to process the processed part of the workpiece.SELECTED DRAWING: Figure 4

Description

  The present invention relates to a workpiece machining apparatus and a machining capable of correcting and machining a machining position when a workpiece machining position supported (held) by a workpiece supporting means is deviated from a preset machining position. The present invention relates to a position correction method.

The present applicant supports a workpiece support device in a workpiece processing apparatus that performs desired processing on a workpiece supported by the workpiece support device by driving and controlling an industrial robot based on the processing data stored in the storage means in Patent Document 1. A reference pattern is projected onto a predetermined part of the projected workpiece, and imaging data of the predetermined part including the projected reference pattern is compared with reference workpiece data when the workpiece is supported in a normal state by the workpiece support device. We proposed a workpiece processing device with a calibration function that calculates the position deviation data and calibrates the processing data so that the processing origin of the industrial robot matches the processing origin of the workpiece.

In the processing position calibration function of Patent Document 1, since the imaging data at a predetermined location including the reference pattern and the reference work data at the predetermined location are each three-dimensional data, the data amount of the imaging data and the reference work data becomes enormous, There is a problem that it takes time to calculate the amount of misalignment at a predetermined location, and it is difficult to process the workpiece quickly.

Further, since the calibration function is executed based on the imaging data and the reference work data of a part unrelated to the part to be processed of the workpiece, there is a problem that the positional deviation of the part to be processed cannot be configured accurately.

Japanese Patent No. 5622250

  The problem to be solved is that since the imaging data at the predetermined location including the reference pattern and the reference work data at the predetermined location are each three-dimensional data, the data amount of the imaging data and the reference work data becomes enormous, and the predetermined location It takes time to calculate the amount of misalignment, and it is difficult to process the workpiece quickly.

  [Claim 1] In a workpiece machining apparatus for controlling the movement of a workpiece machining tool by a machining means and moving to a workpiece machining position supported (held) by the workpiece support means to perform a desired machining, the workpiece machining position A suction holding member that is attracted and held at the periphery of the processing location, and an imaging member that is controlled to move integrally with the suction holding member and that captures the periphery of the processing location and outputs imaging data; Storage means for storing the imaging data, reference imaging data of a machining location when the workpiece is supported in a positioning state on the workpiece support means, position data of the machining location on the workpiece, and the imaging data and reference imaging data The comparison / determination means for determining the amount of misalignment of the machining location based on the output and outputting the correction data, and correcting the position data of the machining location based on the correction data. And, the most important feature that and a control means for executing processing on the to-be-processed portion by the workpiece machining tool machining means whose movement is controlled based on the corrected position data.

  According to a ninth aspect of the present invention, there is provided a workpiece machining method in which the workpiece machining tool is moved and controlled by the machining means to move to a workpiece position of the workpiece supported (held) by the workpiece support means and the required machining is performed. 1. To image an area to be processed of the work supported (held) by the work supporting means by the imaging member. 2. Compare the imaging data output from the imaging member with the reference imaging data of the processing location in the workpiece supported (held) in the positioning state by the workpiece support means, and determine the amount of positional deviation of the processing location. 3. Correct position data for controlling the movement of the workpiece processing tool to the processing location by using the correction data of the determined positional deviation amount; Based on the corrected position data, the workpiece processing tool is controlled to move to the processing location and moved to the processing origin position, and then the workpiece processing tool is controlled to move based on the processing data to execute the required processing on the workpiece. The main feature is that it consists of 1 to 4.

  The present invention simplifies workpiece machining by simply detecting the amount of misalignment of the workpiece in the workpiece supported by the workpiece support means and correcting the position data of the workpiece processing tool based on the detected amount of misalignment. And make it possible to do exactly.

It is a perspective view which shows the outline of a workpiece | work processing apparatus. It is a schematic perspective view showing an outline of a three-dimensional moving head. It is a perspective view which shows the outline of a back surface support means. FIG. 4 is a longitudinal sectional view taken along line AA in FIG. 3. It is an electrical block diagram of a control means. It is explanatory drawing which shows the support (holding) state of the workpiece back surface by a back surface support means. It is explanatory drawing which shows the position shift detection state of the process location in a workpiece | work back surface. It is explanatory drawing which shows the position shift detection state of the process location in a workpiece | work back surface. It is explanatory drawing which shows the position shift detection state of the process location in a workpiece | work back surface.

  The position data of the processing location is corrected based on the correction data corresponding to the positional deviation amount of the processing location determined based on the imaging data and the reference imaging data, and the workpiece processing tool is moved based on the corrected position data. It is the best embodiment to control and process a workpiece portion.

Embodiments of the present invention will be described below with reference to the drawings.
As shown in FIGS. 1 to 4, the workpiece machining apparatus 1 according to the present invention includes a machining means 3, a workpiece support means 5 on which the workpiece W is placed and supported (held), and a back surface of the workpiece W to be processed. It is comprised with the back surface support means 7 which supports (hold | maintains).

  The processing means 3 is constituted by a conventionally known articulated industrial robot that is controlled so that, for example, a plurality of arms are connected and each arm 9 is independently pivoted and rotated to move the hand portion to a predetermined location. Is done. A workpiece processing tool 13 is detachably attached to the hand portion, or for example, a workpiece is added to a two-dimensional moving head or a movable body that moves in a direction orthogonal to the longitudinal direction of the distal arm and a direction that coincides with the longitudinal direction. The tool 13 is removably attached, or further provided with a three-dimensional moving head 15 that moves in the longitudinal orthogonal direction, the longitudinal direction, the longitudinal orthogonal direction, and the direction orthogonal to the longitudinal direction as will be described later. 13 is detachably attached.

  As the workpiece processing tool 13, a drilling tool such as a drill for forming a hole in a processed portion of the workpiece W, a peripheral portion as a processed portion in the workpiece W, a burr on the inner peripheral edge of the opening Wa, or the like is removed by cutting, or an opening Wa is required. Any of an end mill that cuts into the inner diameter, a cutting blade that cuts the workpiece W, or forms a hole, a laser beam output head, or the like may be used. Further, the workpiece W is applied to a vehicle bumper made of synthetic resin having a different size and shape for each vehicle type, and a vehicle interior panel (dash panel, door panel, etc.).

The X-axis frame 17 of the three-dimensional moving head 15 extends with a predetermined length in the longitudinal orthogonal direction (hereinafter referred to as the X-axis direction) of the distal arm 9, and its longitudinal intermediate portion is the distal arm 9. It is fixed to the output shaft of an electric motor (not shown) such as a servo motor that can be numerically controlled. An X-axis movable body 19 is supported on the X-axis frame 17 so as to be movable in the X-axis direction. The X-axis movable body 19 is reciprocated by the X-axis moving member 21 so as to be numerically controllable in the X-axis direction.

A base end portion of a Y-axis frame 23 extending in a direction orthogonal to the X-axis (Y-axis direction coinciding with the longitudinal direction of the distal arm 9) is fixed to the X-axis movable body 19, and the Y-axis frame The Y-axis movable body 25 is supported by 23 so as to be movable in the Y-axis direction. The Y-axis movable body 25 is reciprocated by the Y-axis moving member 27 so as to be numerically controllable in the Y-axis direction.

A Z-axis direction central portion of a Z-axis frame 29 extending in a direction orthogonal to the X-axis and Y-axis directions (Z-axis direction) is fixed to the Y-axis movable body 25. The movable body 31 is supported so as to be movable in the Z-axis direction. The Z-axis movable body 31 is reciprocated by the Z-axis moving member 33 so as to be numerically controllable in the Y-axis direction.

The X-axis moving member 21, the Y-axis moving member 27, and the Z-axis moving member 33 can be rotated within the corresponding X-axis frame 17, Y-axis frame 23, and Z-axis frame 29 with their axes in the longitudinal direction. And a feed screw (not shown) meshed with a nut (not shown) provided on the corresponding X-axis movable body 19, Y-axis movable body 25, and Z-axis movable body 31. An X-axis movable body 19, a Y-axis movable body 25, and a Z-axis movable body 31 corresponding to the drive of each electric motor are configured by an electric motor such as a numerically controllable servo motor that is drivingly connected to a feed screw. Move in each direction. Reference numerals 21, 27, and 33 denote electric motors that constitute a part of the X-axis moving member 21, the Y-axis moving member 27, and the Z-axis moving member 33.

The work tool 9 described above is attached to the Z-axis movable body 31. The figure shows an example in which an end mill for cutting the inner circumference of the opening Wa formed in advance on the workpiece is attached, and is fixed to the output shaft of the electric motor 35 having an axis line in the Z-axis direction on the Z-axis movable body 31. It is detachably attached to the spindle via a chuck or the like (not shown).

  The workpiece support means 5 supports (holds) the workpiece W to be processed by the processing means 3 in a positioned state. The workpiece support means 5 is provided on the left and right sides of the rear side (the processing means 3 side) of the main body 37 as illustrated. A pair of left and right first support members 39 erected with an interval corresponding to the width in the longitudinal direction of the main body 37, an interval corresponding to the longitudinal width of the workpiece W on the left and right sides of the main body 37 illustrated in the figure. It comprises a pair of left and right second support members 41 erected and a central support member 43 erected in the middle of the illustrated front and rear direction and left and right direction.

  The first and second support members 39, 41 and the central support member 43 support the support portions 39a, 41a, 43a by contacting the back surface of the work W, or suction pads (not shown) provided at the tip portions. To attract and hold the back surface of the workpiece W.

As each 1st and 2nd support member 39,41 and the center support member 43, each 1st support member corresponding to the magnitude | size, shape, etc. of the workpiece | work W which this applicant owns, for example like patent 5787423 invention 39 is configured to be adjustable in the left-right direction and the up-and-down direction, the second support member 41 is illustrated in the front-rear direction, the left-and-right direction, the up-and-down direction, and the center support member 43 in the up-and-down direction. Also good. A mechanism for moving each of the first and second support members 39 and 41 and the central support member 43 in the above-described direction in accordance with the size and shape of the workpiece W is described in the above-mentioned Japanese Patent No. 5787423. Therefore, detailed description thereof is omitted.

On the left and right sides of the central support member 43, the back surface support means 7 is provided on the main body 37 near the first support member 39. Each back support means 7 is an articulated industrial robot in which a plurality of arms 45 are connected so as to swing and rotate with respect to each other like the processing means 3, and is provided at the tip of the tip side arm 45. The suction pad 47, which will be described later, is three-dimensionally moved and controlled so as to be positioned at the peripheral edges of a plurality of machining locations on the back surface of the workpiece W.

A dust collecting member 49 is attached to the front end side arm 45 of the back surface support means 7 through an attachment member 51 to collect cutting waste in proximity to or in contact with the back surface of the workpiece W. The dust collecting member 49 has, for example, a cylindrical shape, and is closed by attaching a transmission plate 53 such as a glass plate or a transparent acrylic plate to an opening 49a on the base end side (on the side opposite to the end close to or in contact with the work W back surface). ing.

A connection port portion 49b communicating with the inside is formed on the outer peripheral surface of the base end side of the dust collection member 49, and the dust collection pipe 55 connected to a negative pressure dust collector (not shown) is connected to the connection port portion 49b. Is connected. An imaging member 57 such as a CCD camera is attached to the attachment member 51 corresponding to the outside of the transmission plate 53 with the axis line oriented in a direction coinciding with the center axis line of the dust collection member 49. Further, a suction holding member having a suction pad 47a which is connected to a negative pressure generator (not shown) on the front end side outer periphery of the dust collecting member 49 and elastically deforms and expands and contracts with the contact with the back surface of the work W. 47 is attached.

A suction detector (not shown) such as a limit switch is attached to the suction holding member 47, and the suction detector is attached to the back surface when the suction pad 47a is elastically deformed and contracted by pressure contact with the back surface of the workpiece W. It is detected that the detection rod has come into contact and is attracted.

Next, the outline of the control of the workpiece machining apparatus 1 capable of correcting the displacement of the machining position will be described. In FIG. 5, the program storage means 61 and the work data storage means 63 are connected to the CPU 59 of the control means 58. Includes: program data for driving and controlling the machining means 3 to execute required machining at a plurality of machining locations in the workpiece W; and machining positions when machining the workpiece W placed on the workpiece support means 5. Program data and the like for detecting and correcting the displacement of the processing position are stored.

  In addition, the work data storage unit 63 stores the three-dimensional position data relating to the processing origin at the processing position set on the workpiece W while the workpiece W is supported (held) on the workpiece support unit 5 in a normal positioning state. An origin data storage area 65, a machining data storage area 67 for storing machining data for performing a desired machining on the workpiece W by the workpiece machining tool 13 that moves by driving the three-dimensional moving head 15 from the machining origin, and the workpiece W supports the workpiece. A reference imaging data storage area 69 for storing reference imaging data of a portion to be processed on the back surface of the workpiece W imaged by the imaging member 57 when supported (held) by the means 5 in a normal positioning state, and supports the workpiece when machining the workpiece. When the workpiece W is actually supported (held) by the means 5, the work piece on the back surface of the workpiece W imaged by the imaging member 57 is displayed. An imaging data storage area 71 that stores the actual imaging data, a correction data storage area 73 that stores at least two-dimensional position correction data determined by the comparison determination means 75 described later, and a two-dimensional position stored in the correction data storage area 73. A work buffer area 75 for storing post-correction machining origin data corrected based on the correction data, machining data read from the machining data storage area 67 and necessary for machining work is provided.

  The machining origin data stored in the machining origin data storage area 65 is obtained by, for example, rotating and rotating the arms 9 while controlling (holding) the workpiece W in a normal positioning state with respect to the workpiece support means 5. The teaching tool is input by moving the processing tool 13 to the processing origin of the processing site or the method of directly inputting the numerical values of the three-dimensional position coordinate data of the processing origin of the processing site.

  The CPU 59 is connected with a comparison / determination unit 77, and when the workpiece W is machined, the suction pad 47 is sucked to the back surface of the workpiece W supported by the workpiece support unit 5, and a suction detection signal is output from the suction detector. The processing origin of the imaging data captured by the imaging member 57 and stored in the imaging data storage area 71 and the processing origin of the reference imaging data stored in the reference imaging data storage area 69 are compared at least at the X axis and The amount of misalignment of the machining origin with respect to the Y-axis direction is determined and stored in the correction data storage area 73 as correction data.

A processing means drive control means 79 is connected to the CPU 59, and the processing means drive control means 79 is based on the three-dimensional position data of the processing position set for the workpiece W stored in the processing position data storage area 65. 3 is controlled to move the work tool 13 to the processing position.

A moving head drive control means 81 is connected to the CPU 59, and the moving head drive control means 81 drives and controls the three-dimensional moving head 15 based on the machining data stored in the machining data storage area 67. To cause the workpiece W to perform the required machining.

Next, the working position correcting action and method by the work machining apparatus will be described. The work in which the inner peripheral edge of the opening Wa is cut by the first and second support members 39 and 41 and the central support member 41 of the work support means 5. After W is placed and supported (held), each arm 45 of the back surface support member 7 is controlled to turn and rotate based on the machining origin data stored in the machining origin data storage area 65, thereby collecting the dust collecting member 49. Is moved so that the upper end opening approaches or comes into contact with the periphery of the opening Wa on the back surface of the workpiece W. At this time, the suction pad 47 is pressed against the periphery of the opening Wa on the back surface of the work W to suck and hold the back surface of the work W. (See Figure 6)

Based on the suction detection signal output from the suction detector in the above state, the imaging member 57 is driven to take an image of the periphery including the opening Wa, and the opening in a state where the workpiece W is actually supported by the workpiece support means 5. The peripheral imaging data is stored in the imaging data storage area 71.

The comparison discriminating means 77 compares the imaging data stored in the imaging data storage area 71 with the reference imaging data of the periphery including the opening Wa stored in the reference imaging data storage area 69, and the two imaging data match. If there is, the CPU 63 attaches the machining origin data stored in the machining origin data storage area 65 to the machining means drive control means 79 as actual machining origin data and also attaches to the opening Wa stored in the machining data storage area 67. These machining data are read out and stored in the work buffer area 75 respectively. (See Figure 7)

After the machining means drive control means 79 controls each arm 9 to turn and rotate based on the actual machining origin data stored in the work buffer area 75, the work machining tool 13 is moved to the machining origin of the opening Wa. The moving head drive control means 81 controls each of the arms 45 based on the machining data stored in the work buffer area 75 to turn and rotate each of the arms 45 to sequentially move the workpiece machining tool 13 from the machining origin. The inner peripheral edge of the opening Wa is cut by controlling movement in the dimension direction.

On the other hand, when the imaging data stored in the imaging data storage area 71 and the reference imaging data of the opening Wa stored in the reference imaging data storage area 69 do not match, the comparison / determination means 77 determines that the reference imaging data and imaging When the amount of positional deviation in the two-dimensional direction at the processing origin set in advance in the data is determined and the correction data is stored in the correction data storage area 73, the CPU 63 performs correction based on the correction data stored in the correction data storage area 73. The actual machining origin data of the opening Wa and the machining data attached to the opening Wa are stored in the work buffer area 75, respectively. (See Figure 8)

In the same manner as described above, the machining means drive control means 79 controls turning and turning of each arm 9 based on the actual machining origin data stored in the work buffer area 75 so that the work tool 13 is actually machined in the opening Wa. After moving to the origin, the moving head drive control means 81 controls each arm 45 to turn and rotate based on the processing data for the opening Wa stored in the work buffer area 75 to control the work processing tool 13. Are sequentially moved in the two-dimensional direction from the actual machining origin to cut the inner periphery of the opening Wa.

Further, when the support position of the workpiece W by the workpiece support means 5 is greatly displaced and the entire image of the opening Wa cannot be imaged by the imaging member 57, that is, when a part of the imaging data of the opening Wa is missing, the positional displacement is caused. It is determined that the amount is large and correction is impossible, and an error signal is output to notify the operator to redo the support state of the workpiece W. (See Figure 9)

At the time of cutting the opening Wa described above, cutting waste is discharged along with the cutting by the workpiece processing tool 13 moving in at least a two-dimensional direction. The discharged cutting waste is close to the periphery of the opening Wa. Alternatively, a negative pressure is formed by contact and collected by the dust collecting member 49 to the cutting waste collecting device to prevent adhesion to the workpiece W.

Further, the above description is given by taking as an example the case of cutting the inner peripheral edge of the opening Wa provided in the work hand, and the correction data is detected by detecting the amount of displacement based on the reference imaging data including the opening Wa and the actual imaging data. However, if there is no feature on the back surface of the workpiece W that is used as a reference for determining the position deviation, such as an opening, the position determination criterion for the position deviation is provided on the back surface of the workpiece W to be processed. Marks such as cruciform lines and protrusions may be provided in advance.

In the above description, the imaging member 57 is provided integrally with the dust collection member 49 and the suction holding member, and the back surface of the periphery of the processing site is controlled in a state in which the back surface of the workpiece W is held by the suction holding member and the displacement is regulated. In the present invention, the imaging member is not necessarily provided integrally with the dust collecting member 49 and the suction holding member 47, and only the imaging member is provided according to the part to be processed. It may be a configuration and method for detecting a displacement by providing at least a two-dimensional direction (movable in the X-axis and Y-axis directions) and capturing an image of the back surface of the periphery of the processed portion.

In this case, since it is necessary to image the back surface of the processing site in a state where the position shift of the processing site in the workpiece is regulated, the suction holding member and the imaging member are provided integrally, and the processing site periphery of the workpiece (imaging location periphery) It is desirable to take an image in a state in which the positional deviation is restricted while holding Further, in order to avoid cutting dust from being attached to the image pickup means and making imaging impossible, the imaging member is provided integrally with the dust holding means together with the suction holding member, and the cutting waste adheres to the imaging member and imaging becomes impossible. It is desirable to prevent this.

However, in the case of using only an imaging member that can move in at least a two-dimensional direction, the imaging member is moved to the back side of the part to be processed at the time of imaging and retracted to a place where attachment of cutting waste can be avoided at the time of processing. You can make it possible.

The above description corrects the machining origin data of the workpiece processing tool set in advance based on the correction data that is compared and discriminated when the imaging data and the reference imaging data do not match, and based on the corrected actual machining origin data. Although the configuration and method of moving and controlling the workpiece processing tool to the actual processing origin, the workpiece processing tool is moved based on the set processing origin data and then the machining limited position set is moved, and then at least X based on the correction data. A configuration and method may be adopted in which machining is performed after the workpiece moving tool is moved from the set machining origin position to the actual machining origin position by correcting the machining origin position by driving and controlling the axis moving member 21 and the Y axis moving member 27.

DESCRIPTION OF SYMBOLS 1 Work processing apparatus 3 Processing means 5 Work support means 7 Back surface support means 9 Arm 13 Work processing tool 15 Three-dimensional moving head 17 X-axis frame 19 X-axis movable body 21 X-axis moving member 23 Y-axis frame 25 Y-axis movable body 27 Y-axis moving member 29 Z-axis frame 31 Z-axis movable member 33 Z-axis moving member 35 Electric motor 37 Main body 39 First support member 39a Support part 41 Second support member 41a Support part 43 Central support member 43a Support part 45 Arm 47 Adsorption Holding member 47a Suction pad 49 Dust collecting member 49a Opening 49b Connection port 51 Mounting member 53 Transmission plate 55 Dust collecting pipe 57 Imaging member 58 Control means 59 CPU
61 Program storage means 63 Work data storage means 65 Processing origin data storage area 67 Processing data storage area 69 Reference imaging data storage area 71 Imaging data storage area 73 Correction data storage area 75 Work buffer area 77 Comparison determination means 79 Processing means drive control means 81 Moving head drive control means W Work Wa Opening as machining location

Claims (12)

In a workpiece processing apparatus that performs a required processing by moving a workpiece processing tool by a processing means to move to a processing position of a workpiece supported (held) by a workpiece support means,
An imaging member that images the periphery of the processing location and outputs imaging data;
The above-mentioned imaging data, the reference imaging data of the processing location when the workpiece is supported (held) in the positioning state by the workpiece support means, the position data of the processing location on the workpiece and the workpiece processing tool are controlled to move the workpiece. Storage means for storing machining data to be executed,
A comparison discriminating means for discriminating a positional deviation amount of a processing portion based on the imaging data and the reference imaging data and outputting correction data;
Control means for correcting the position data of the processing location based on the correction data, and executing processing on the processing location by the work processing tool of the processing means that is controlled to move based on the corrected position data;
Workpiece processing equipment equipped with In claim 1,
Provided with a suction holding member that is controlled to move to the work location of the workpiece and sucks and holds the periphery of the work location, and the imaging member is controlled to move integrally with the suction holding member so that the work location of the work can be imaged. Work processing equipment. In claim 2,
The suction holding member is provided with a dust collecting member that comes into contact with the peripheral edge of the workpiece to be machined and sucks and collects the processing waste discharged during machining by the workpiece machining tool by negative pressure. The member is provided with an imaging member having an imaging axis line that coincides with the central axis of the dust collecting member.
A workpiece processing apparatus that enables an imaging member to image a workpiece periphery of a workpiece when a dust collecting member is brought into contact with the workpiece periphery of the workpiece and the workpiece is held by an adsorption holding member. In claim 3,
Workpiece processing with a transmission window provided in the dust collection member, and an imaging member provided through the transmission window so that the imaging axis line coincides with the surface-center axis of the dust collection member so as to be able to image the workpiece. apparatus. In claim 1,
The work processing tool is a work processing apparatus provided to the processing means via a moving head that moves in at least a two-dimensional direction. In claim 1,
The position data is the machining origin position data of the part to be machined. Based on the machining data after moving the work tool from the set machining origin position to the actual machining origin position based on the machining origin position data corrected based on the correction data A workpiece processing device that performs the required processing on a workpiece by dynamically controlling the workpiece processing tool. In claim 5,
The position data is the processing origin position data of the part to be processed, the workpiece processing tool is moved to the set processing origin position based on the processing origin position data, the driving head is driven and controlled based on the correction data, and the workpiece processing tool is A workpiece machining device that performs required machining on workpieces based on machining data after moving from the set machining origin position to the actual machining origin position. In claim 1,
A workpiece machining apparatus provided with a reference imaging data and a mark serving as a reference for determining positional deviation of imaging data at a workpiece machining location. In a workpiece machining method in which a workpiece machining tool is moved and controlled by a machining means and moved to a workpiece location of a workpiece supported (held) by the workpiece support means to perform a required machining,
1. Imaging the work location of the workpiece supported (held) by the workpiece support means by the imaging member;
2. Comparing the imaging data output from the imaging member and the reference imaging data of the machining location in the workpiece supported (held) in the positioning state by the workpiece support means to determine the amount of positional deviation of the machining location;
3. Correcting the position data for controlling the movement of the work tool to the processing location by the correction data of the determined positional deviation amount;
4). Based on the corrected position data, the workpiece processing tool is controlled to move to the processing location and moved to the processing origin position, and then the workpiece processing tool is controlled to move based on the processing data to execute the required processing on the workpiece.
5. A machining position correction method comprising the above 1 to 4. In claim 9,
A workpiece processing tool is attached to the processing means by providing a moving head that can move at least in a two-dimensional direction, and the workpiece is moved to at least a two-dimensional direction by controlling the movement of the moving head based on the processing data. Machining position correction method that performs the required machining. In claim 9,
The position data is the machining origin position data of the part to be machined. After the workpiece tool is moved to the actual machining origin position based on the machining origin position data corrected based on the correction data, the workpiece machining tool is moved based on the machining data. Machining position correction method that performs the required machining on the workpiece under control. In claim 10,
The position data is the processing origin position data of the part to be processed, the workpiece processing tool is moved to the set processing origin position based on the processing origin position data, the driving head is driven and controlled based on the correction data, and the workpiece processing tool is A machining position correction method for performing a desired machining on a workpiece based on machining data after moving from a set machining origin position to an actual machining origin position.

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