JP2017156005A - Humidity conditioning device and humidity conditioning method by the same device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a humidity conditioning device and a humidity conditioning method which can quickly and accurately condition humidity in a humidity conditioning space without being affected by an atmospheric temperature and humidity unevenness in the humidity conditioning space.SOLUTION: A humidity conditioning device 1 introduces either humidification gas or dehumidification gas into a prescribed humidity conditioning space S while switching the gas and conditions humidity in the humidity conditioning space S to target humidity while detecting humidity in the humidity conditioning space S by a humidity sensor 45 arranged in the humidity conditioning space S. The humidity sensor 45 is arranged at a position on which the humidification gas or dehumidification gas introduced from a gas supply port 41 in the humidity conditioning space S directly hits and a position where the humidification gas or dehumidification gas introduced from the gas supply port 41 is mixed with gas in the humidity conditioning space S and atmospheric humidity in a target humidity range is produced.SELECTED DRAWING: Figure 3

Description

  The present invention relates to a humidity control system capable of supplying a humidity control gas with a small flow rate to a humidity control space and adjusting the humidity quickly, accurately and stably.

  Conventionally, a humidity control apparatus is known in which a predetermined amount of moisture is added to a gas through a hollow fiber membrane to obtain a humidified gas. In industrial fields, heat treatment atmosphere gas, medical oxygen, and semiconductor manufacturing processes are known. When part of the gas needs to be humidified, a membrane humidifier using a hollow fiber membrane module instead of the conventional bubbler type has begun to be used.

  In recent years, various fields such as industrial fields such as manufacture, measurement, and testing of electronic parts and precision instruments, food fields such as food storage, and biological fields such as incubators for culturing iPS cells, etc. However, there is an increasing demand for supplying a humidity-controlled gas with a small flow rate and humidity adjusted accurately. In such a field that requires the supply of humidity control gas at a small flow rate, it is necessary to prepare many different humidity control environments at the same time, so a large industrial device that generates a large amount of humidity control gas at a constant humidity. Rather, there is a desire to install many inexpensive and compact devices.

  When industrial humidity control equipment is used in a field where supply of humidity control gas with a small flow rate is required, the object may be adversely affected by supplying humidity control gas with an excessive flow rate. For example, when such a humidity control apparatus is used in an incubator, it is conceivable that cells are blown away by supplying a large amount of humidity control gas. Furthermore, in the biological field and the medical field such as an incubator, it is necessary to supply a clean humidity control gas in order to prevent contamination by various bacteria.

  From such a background, a compact and inexpensive humidity control apparatus that can supply a clean humidity control gas conditioned with high accuracy at a small flow rate is desired. For example, Patent Document 1 and Patent Document 2 Humidity control devices have been proposed.

  The humidity control device of Patent Document 1 is composed of a Peltier element, a polymer absorber layer, a humidity sensor, and a controller. An insulating substrate is attached to the upper and lower sides of the Peltier element, and current flowing through the Peltier element is controlled. By changing the direction, the lower insulating substrate and the upper insulating substrate of the Peltier element can be switched between the heat absorption surface and the heat dissipation surface. The polymer absorber layer is made of a material that absorbs moisture in the air when cooled and emits moisture absorbed in the air when heated, and is attached to the upper insulating substrate. The absorber layer and the humidity sensor are installed in the humidity control space, and the controller controls the energization status of the Peltu element according to the detection value of the humidity sensor, so that the humidity control space is maintained at a preset humidity. Yes.

  Moreover, the humidity control apparatus of patent document 2 is comprised from an air blower, a hollow fiber separation membrane module, a controller, and a humidity sensor, The water vapor | steam in the air taken in by the air blower from the exterior of the apparatus is a hollow fiber separation membrane. It is comprised so that the dry air which was isolate | separated by the module and the water | moisture content was removed may be supplied to humidity control space. The humidity sensor is installed in the humidity control space and is connected to the air blower via a controller. The humidity sensor controls the operation of the air blower based on the measured value of the humidity in the humidity control space. The preset humidity is maintained.

  In the humidity control apparatus of Patent Document 1 and Patent Document 2, a humidity sensor is installed in the humidity control space, and the humidity in the humidity control space is controlled by directly measuring the humidity in the humidity control space. If there is a difference in the ambient temperature between the inside and outside of the humidity control space, as in the case of a humidity control device that supplies a humidity control gas adjusted to a predetermined humidity to the humidity control space, the temperature is adjusted within the humidity control space. Since the relative humidity of the wet gas changes, there is no problem that the humidity in the humidity control space may not be accurately controlled.

  On the other hand, since the humidity control apparatus of Patent Document 1 uses a Peltier element, means for cooling the Peltier element is required, which complicates the apparatus and increases the price. Moreover, since the polymer absorber layer is heated or cooled by the Peltier element to adjust the humidity in the humidity control space, the humidity control response in the humidity control space is poor, and the humidity range where humidity control is possible narrow.

  Moreover, in the humidity control apparatus of patent document 2, water vapor | steam contained in the air taken in from the outside of humidity control space is isolate | separated by a hollow fiber separation membrane module, dry air is produced, and the dry air is supplied to humidity control space. Since the humidity is controlled, the humidity range in which humidity can be adjusted is not only narrow, but the humidity inside the humidity control space cannot be humidified beyond the humidity of the outside air.

  The present inventors can solve the above-mentioned problems, are small and simple in construction, are inexpensive, have a stable and high humidification capacity, and efficiently use a clean humidity-conditioned gas conditioned with high accuracy. The humidity control apparatus which can supply well is proposed (refer patent document 3).

Below, the humidity control apparatus of patent document 3 is demonstrated easily. As shown in FIG. 1, the humidity control apparatus 1 includes an apparatus body 2, a container 3 having a humidity control space S therein, and a compression supply source 4.
The apparatus main body 2 has a humidification line 5 having a humidification unit 10 described later, a dehumidification line 6 for dehumidification, and a switching valve mechanism 7. The switching valve mechanism 7 is composed of, for example, an electromagnetic valve, and is provided in the middle of the primary side path 8 that supplies the compressed gas from the compression supply source 4 to the primary side of the humidification unit 10. The primary path 8 is branched to the humidification line 5 and the dehumidification line 6 via the switching valve mechanism 7.

  The humidification unit 10 includes a humidification module 11 and a tank 12, and the humidification module 11 can humidify compressed gas (compressed air) supplied from the compression supply source 4 and flowing through the humidification line 5. A flow rate adjustment valve 13 is provided on the primary side of the humidification unit 10, and the compressed gas whose flow rate is adjusted is supplied to the humidification module 11 via the flow rate adjustment valve 13. This flow control valve 13 prevents application of excessive pressure into the humidification module 11, and sufficient humidification capability can be obtained without causing dew point rise due to pressurization.

  The humidification module 11 includes, for example, a hollow fiber membrane bundle 16 made of a hollow fiber membrane 15 made of a hydrophobic porous membrane or a water vapor permeable nonporous membrane, and a case 17 for housing the hollow fiber membrane bundle 16. ing. The hollow fiber membrane 15 is formed of a hydrophobic porous membrane that is permeable to water vapor and blocking water W. As an example, the hollow fiber membrane 15 has an inner diameter of about φ0.4 mm and an outer diameter. The diameter is about φ0.5 mm and the pore diameter is 0.2 μm or less, and even if bacteria are propagated in the water W, the permeation can be reliably prevented.

  The case 17 is provided with an air vent valve 21 via an inlet 19 of a supply path 18 to which water W made of pure water stored in the tank 12 is supplied, and an air vent path 20. The hollow fiber membrane bundle 16 potted by the potting portion 22 is sealed. The primary side of the humidification module 11 is provided with a primary side path 25 for supplying the compressed gas supplied from the compression supply source 4, and the water W is supplied through the branch path 26 branched from the primary side path 25. The sealed tank 12 communicates with a predetermined pressure.

  The humidifying module 11 is supplied with compressed gas to the inside of the hollow fiber membrane 15 via the primary side path 25, and water W from the tank 12 to the outside (outer periphery) of the hollow fiber membrane 15 via the water W supply path 18. Is supplied to humidify the compressed gas. In addition, since the branch flow path 26 is provided on the secondary side of the flow rate control valve 13 described above, compressed gas having an appropriate pressure is added to the water W in the tank 12. Accordingly, excessive water pressure is not applied to the outside of the hollow fiber membrane 15, and the hollow fiber membrane 15 is ruptured, or water W passes through the hydrophobic pores of the hollow fiber membrane 15 and enters the hollow fiber membrane 15 with water. Appropriate humidification can be performed without intrusion as it is.

  The water W in the tank 12 has potential energy due to its height, and the pressure P1 due to the pressure of the compressed gas on the primary side of the humidifying module 11 and the weight of the water is applied. For convenience, the water pressure P1 is illustrated in the tank 12 in FIG. 1, but the actual P1 indicates the water pressure outside the hollow fiber membrane in the humidification module 11. In the humidity control apparatus 1, the compressed gas in the hollow fiber membrane 15 is humidified from the secondary side of the humidifying module 11 in the relationship of water pressure P1 to which a predetermined pressure of the compressed gas is applied> hollow fiber membrane internal pressure P2. Humidified gas is generated.

  In this case, in the above, by supplying compressed gas from the primary path 25 to the inside of the hollow fiber membrane 15 via the potting portion 22 and water W from the supply path 18 to the outside of the hollow fiber membrane 15, Although the humidified gas is generated, the humidified gas may be generated by supplying compressed gas from the outside of the hollow fiber membrane 15 and water to the inside of the hollow fiber membrane 15.

  In the humidity control apparatus 1 shown in FIG. 1, the pressure by the compressed gas is applied to the water W through the branch path 26 branched from the primary path 25, but the height difference between the tank 12 and the humidification module 11 is different. Is sufficient, and the water pressure P1 due to the potential energy of the water W is a sufficient value, the branch path 26 may be provided and the inside of the water tank 12 may not be pressurized with the compressed gas.

  In the middle of the dehumidifying line 6, a membrane dryer 31 and a flow rate adjusting valve 32 are provided on the secondary side of the membrane dryer 31. The membrane dryer 31 has a hollow fiber membrane bundle 34 made of a hollow fiber membrane 33 made of a water vapor permeable nonporous membrane, and a case 35 for housing the hollow fiber membrane bundle 34, and both ends of the case 35 are potting portions. The hollow fiber membrane bundle 34 potted by 36 is sealed. When compressed gas is supplied under pressure to the inside of the hollow fiber membrane 33 of the membrane dryer 31 by the secondary-side flow control valve 32, only water vapor is discharged to the outside of the hollow fiber membrane 33 to generate dehumidified gas. The dehumidified gas can be supplied while purging a part of the dehumidified gas to the outside of the hollow fiber membrane 33 and performing continuous dehumidification.

  As shown in FIG. 1, the humidification line 5 and the dehumidification line 6 are joined together by a joining path 37, and a humidity control gas pipe 38 is provided on the secondary side of the joining path 37. Then, humidification or dehumidification gas is appropriately introduced into the humidity control space S to adjust the humidity.

  At that time, check valves 39 and 39 are respectively provided in the humidification line 5 and the dehumidification line 6 in front of the merge path 37 of the humidification line 5 and the dehumidification line 6, and are joined via these check valves 39 and 39. A path 37 communicates with the humidity control space S. These check valves 39 prevent the backflow of the humidity control gas from the humidity control space S to the humidification line 5 and the dehumidification line 6, and immediately from the primary side of the check valve 39 in one line when necessary. A humidified gas or a dehumidified gas having sufficient performance can be supplied.

  The container 3 in which the humidity control space S is provided is composed of a container such as a desiccator or a glove box. The container 3 is provided with a gas supply port 41, a sensor port 42, and an exhaust port 43. The gas supply port 41 is connected to a humidity control gas pipe 38 for supplying a humidified gas and a dehumidified gas, and the humidified gas and the dehumidified gas are supplied into the humidity control space S through the gas supply port 41. A cable 44 is inserted into the sensor port 42, and a humidity sensor 45 connected to the cable 44 is provided in the humidity control space S in the container 3. The exhaust port 43 is provided so that no pressure is applied to the inside of the container 3 by supplying humidified gas and dehumidified gas.

  The humidity sensor 45 detects the humidity in the humidity control space S and transmits it to the humidity control mechanism 46, and the humidity control mechanism 46 controls the switching of the switching valve mechanism 7 based on the detection result of the humidity sensor 45. Humidity S is conditioned. That is, when the humidity adjustment space S is excessively humidified, the switching valve mechanism 7 switches the supply destination of the compressed gas supplied from the compression supply source 4 to the dehumidification line 6 so that the dehumidification gas is supplied to the humidity adjustment space S. When the inside of the humidity control space S is excessively dehumidified, the switching valve mechanism 7 switches the supply destination of the compressed gas supplied from the compression supply source 4 to the humidification line 5 so as to supply the humidified gas to the humidity control space S. I have to. In addition, when the humidity in the humidity control space S reaches a predetermined target humidity range, the operation of the switching valve mechanism 7 is stopped, and when it deviates from the target humidity range, the operation is restarted.

As described above, the humidity control apparatus 1 switches the supply destination of the compressed gas supplied from the compression supply source 4 to the humidification line 5 or the dehumidification line 6 by the switching valve mechanism 7, and humidifies the humidified gas or Since the dehumidified dehumidified gas is directly supplied to the humidity control space S to control the humidity in the humidity control space S, the apparatus can be configured in a small and simple manner, and the humidity control in the humidity control space S can be achieved. The response of is extremely good.
Further, the humidity in the humidity control space S is directly detected by the humidity sensor 45 and the operation of the apparatus is controlled to adjust the humidity. Therefore, the humidified gas and the dehumidified gas are mixed to generate a humidity-controlled gas having a predetermined humidity. Then, unlike the humidity control device that supplies to the humidity control space, the relative humidity of the humidity control gas does not change in the humidity control space due to the difference in ambient temperature in the humidity control space, and the humidity control space S The inside can be conditioned with high accuracy.
In addition to this, since the compressed gas supplied from the compression supply source 4 can be humidified to a high humidity by the water W stored in the tank 12 by the humidification module 11, the humidity controllable range in the humidity control space S is increased. Widely selecting the hole diameter of the hollow fiber membrane 15 used in the humidifying module 11 can reliably prevent permeation even if bacteria propagate in the water W. The wet space S can be supplied.

JP 2008-261528 A JP 2002-274608 A JP 2014-1898 A

  The humidity control apparatus of Patent Document 3 has the above-described excellent characteristics, but there is room for further improvement in order to fully exhibit its performance. In this humidity control apparatus, the humidity in the humidity control space S is detected by a humidity sensor provided in the space, and the gas supplied to the humidity control space S is switched to either humidified gas or dehumidified gas according to the result. Since humidity is controlled in the humidity control space S, the humidity sensor needs to correctly detect the humidity in the humidity control space S in order to perform highly accurate humidity control.

  That is, in the humidity control apparatus, the humidity control space S is mixed with the humidity control gas composed of either the humidified gas or the dehumidified gas supplied into the humidity control space S in the atmosphere of the humidity control space S. Although humidity control is performed, the humidity control gas supplied into the humidity control space S is not instantaneously mixed with the atmosphere in the humidity control space S. The supplied humidity control gas diffuses and the humidity control space S It takes a while for the humidity inside to stabilize, and during that time, humidity unevenness occurs in the humidity control space S. Therefore, when the humidity sensor is installed at a position where the humidity unevenness in the humidity control space S is likely to occur, even if the humidity in the humidity control space S eventually reaches the target humidity, the humidified gas or the dehumidified gas until then is reached. Is excessively supplied to the humidity control space S, and the humidity in the space fluctuates until it settles at the target humidity, so that time is required for humidity control, so the quality of humidity control is lowered.

  The present invention has been developed in order to solve the above-described problems, and the object of the present invention is that the humidity in the humidity control space is not affected by the atmospheric temperature and humidity unevenness in the humidity control space. An object of the present invention is to provide a humidity control apparatus and a humidity control method capable of adjusting the humidity quickly and accurately.

  In order to achieve the above-mentioned object, the invention according to claim 1 introduces the humidification gas or the dehumidification gas while switching between the humidification gas and the dehumidification gas into the predetermined humidity control space, and the humidity sensor disposed in the humidity control space is used to In the humidity control apparatus that adjusts the humidity of the humidity control space to the target humidity while detecting the humidity of the humidity control space, the humidification gas or the dehumidification gas introduced from the gas supply port of the humidity control space Is disposed at a position where the humidified gas or the dehumidified gas introduced from the gas supply port is mixed with the gas in the humidity control space and the atmospheric humidity within the target humidity range is created. It is the humidity control device characterized.

  The invention according to claim 2 is the humidity control apparatus, wherein the target humidity range is a humidity range of target humidity (%) ± 3 (%).

  The invention according to claim 3 arranges a humidity sensor at a position where the introduced humidified gas or dehumidified gas directly hits when introducing either the humidified gas or the dehumidified gas into the predetermined humidity control space, A humidity sensor switches the humidified gas or the dehumidified gas so as to detect the target humidity, introduces it into the humidity control space, and diffuses it into the humidity control space, thereby targeting the atmospheric humidity of the humidity control space. It is a humidity control method controlled within the humidity range.

  The invention according to claim 4 is the humidity control method, wherein the target humidity range is a humidity range of target humidity (%) ± 3 (%).

  According to the first aspect of the invention, the humidified gas or the dehumidified gas introduced into the humidity control space from the gas supply port and the gas existing in the humidity control space are mixed to create an atmospheric humidity within the target humidity range. Since the humidity sensor is arranged at the position to be detected, it is possible to quickly and accurately grasp that the humidity of the humidity control gas generated by the humidified gas or the dehumidified gas is within the target humidity range. For this reason, excessive introduction of humidified gas or dehumidified gas into the humidity control space caused by the humidity sensor inaccurately detecting the humidity in the humidity control space is prevented, and the ambient humidity in the humidity control space is quickly set to the target humidity. The humidity can be adjusted within the range.

  According to the second aspect of the present invention, the humidity sensor is arranged at a position where the humidity is adjusted within the target humidity (%) ± 3 (%), and the humidity inside the humidity adjustment space is adjusted based on the detection result. The humidity inside can be adjusted to a humidity within the target humidity (%) ± 3 (%) with high accuracy.

  According to the third aspect of the invention, the humidity sensor is disposed at a position where the humidity control gas introduced into the humidity control space directly hits, and the humidity control chamber needs to be humidified as the humidity control gas. If it is necessary to dehumidify the gas, the dehumidified gas is introduced until the humidity sensor detects the target humidity, and if the humidity sensor detects a change from the target humidity, the humidity sensor detects the target humidity. Since it is repeated that the humidity control gas is switched and introduced so as to recover, the atmospheric humidity in the humidity control space can be quickly adjusted toward the target humidity range and maintained within the target humidity range. it can.

According to the invention of claim 4, the target humidity range is the target humidity (%) ± 3% humidity range (%).
Therefore, the humidity in the humidity control space can be maintained with high accuracy.

It is a schematic diagram explaining the structure of the conventional humidity control apparatus. It is a schematic diagram explaining the humidity control condition in the humidity control space of the conventional humidity control apparatus. It is a schematic diagram explaining arrangement | positioning of the humidity sensor in the humidity control space in this invention. It is a schematic diagram of the test apparatus which confirms the humidity control effect of the humidity control apparatus in this invention with an Example and a comparative example. (A) It is a schematic diagram explaining the installation position of the hygrometer when a humidity sensor is installed in the gas supply port 65 mm position (Example). (B) It is a schematic diagram explaining the installation position of the hygrometer at the time of installing a humidity sensor in the ceiling center part of a container (comparative example). It is the graph which measured the humidity of each part in humidity control space, when humidity control of the capacity | capacitance of 26L is adjusted by the Example. It is the graph which measured the humidity of each part in humidity control space, when the humidity control space of capacity 26L was adjusted by the comparative example. It is the graph which measured the humidity of each part in humidity control space, when the humidity control space of capacity | capacitance 161L is adjusted according to the Example. It is the graph which measured the humidity of each part in humidity control space, when the humidity control space of capacity 161L was adjusted by the comparative example.

Hereinafter, although the humidity control apparatus in this invention is demonstrated, first, knowledge of the present inventors who came to make this invention is demonstrated.
FIG. 2 shows a schematic diagram of the front panel of the humidity control device main body 2 of the humidity control device 1 of FIG. 1 and the inside of the humidity control container 3. The humidity control apparatus 1 generates a humidified gas or a dehumidified gas by switching the supply destination of the compressed gas (compressed air) supplied from the compressed supply source 4 to the humidifying line 5 or the dehumidifying line 6 by the switching valve mechanism 7. Either the humidified gas or the dehumidified gas thus introduced is introduced into the humidity control space S in the humidity control container 3 via the humidity control gas pipe 38 to adjust the humidity. Therefore, either the humidified gas or the dehumidified gas is supplied as the humidity control gas 50 to the humidity control space S in the humidity control container 3.

The inventors of the present invention mix the humidity control gas 50 supplied into the humidity control space S with the gas G existing in the humidity control space S through any process, thereby adjusting the humidity of the humidity control space S. The following knowledge was obtained through experiments and examinations.

Although this humidity control apparatus is for a small flow rate and the supply amount of the humidity control gas is small, the humidity control gas 50 is lightly introduced into the humidity control space S through the humidity control gas supply pipe 38 and the gas supply port 41. Supplied in a spouted state. The humidity control gas 50 supplied into the humidity control space S in a lightly ejected state does not instantaneously mix with the gas G in the humidity control space S, but mixes with the ambient gas G in the humidity control space S. The gas has an atmospheric humidity within the target humidity range (hereinafter, referred to as “mixed gas 51”) at a position advanced by a certain distance L in the humidity control space S. Is formed (hereinafter referred to as “humidity adjustment area 52”). A humidity gradient is formed around the humidity control area 52 in a state as schematically shown by an isohumidity line C in FIG.

The humidity gas 50 continuously supplied becomes the mixed gas 51 within the target humidity range continuously in the humidity adjustment area 52, but the exhaust port 43 is provided in the container 3 in which the humidity adjustment space S is provided. Therefore, the gas G in the humidity control space S is always discharged from the exhaust port 43 to the outside of the container 3 as the humidity control gas 50 is supplied. For this reason, the mixed gas 51 in the humidity control area 52 diffuses to the surroundings so as to be expelled from the humidity control area 52 as shown by an arrow 53 in FIG. The humidity of the entire interior is adjusted within the target humidity range.

Therefore, when the humidity sensor 45 is arranged at a position away from the humidity control area 52 as shown in FIG. 2, the mixed gas 51 diffuses from the humidity control area 52 to the position of the humidity sensor 45, and the humidity sensor 45 sets the target humidity. It takes a certain amount of time to detect. Until the humidity sensor 45 detects that the ambient humidity has reached the target humidity, the humidity control gas, which is either the humidified gas or the dehumidified gas, is continuously supplied into the humidity control space S. 45 detects that the surrounding humidity has reached the target humidity, and the humidity control mechanism 46 stops the supply of the humidity control gas, or a humidity control of a different type from the humidity control gas supplied up to that time At the time of switching to the gas supply, the atmospheric humidity in most parts of the humidity control space S largely deviates from the target humidity to the humidification side or the dehumidification side.

Thereafter, when the supply of the humidity control gas is continued, or when a humidity control gas of a different type from the humidity control gas supplied up to that time is supplied, the atmosphere in the humidity control space S Humidity changes in the opposite direction, but the influence of the change reaches around the humidity sensor 45, and when the supply of the humidity control gas is restarted or the type of the humidity control gas is switched, The humidity in most parts of the humidity control space S deviates greatly from the target humidity in the opposite direction.

For this reason, the atmospheric humidity in the humidity control space S varies between the humidification side and the dehumidification side around the target humidity, and it becomes difficult to control the atmospheric humidity in the humidity control space S so as to converge to the target humidity.

Based on the above knowledge, the inventors create the mixed gas 51 and adjust the humidity within the target humidity range earliest in the humidity control space S, and the mixed gas 51 diffuses into the surrounding atmosphere gas G. If the humidity sensor 45 is installed in the humidity control area 52 which is also the base point, the humidity detected by the humidity sensor 45 is not affected by the humidity unevenness generated in the humidity control space S. Therefore, the position of the humidity control area 52 The conclusion is that this is the most suitable place to install the humidity sensor.

Since the position of the humidity control area 52 is influenced by the humidity control capability of the humidity control device and the size and shape of the humidity control space S, it is necessary to actually measure and determine each humidity control device. As described above, the humidity control gas 50 supplied into the humidity control space S moves forward in the direction of being ejected through the humidity control space S while being mixed with the surrounding atmospheric gas G. The humidity control gas 50 directly hits and the humidity control gas 50 is mixed with the atmospheric gas G present in the humidity control space S to form the mixed gas 51. Therefore, the position of the humidity control area 52 can be obtained by actually measuring the humidity on the extension of the axis of the supply port 41 in a state where the humidity control device is operated.

In FIG. 3, the schematic diagram of one Embodiment of the humidity control apparatus of this invention is shown. In addition, about the part which is common in the humidity control apparatus of this invention and the humidity control apparatus of FIG. 2, the same code | symbol is used and description is abbreviate | omitted.
The difference between the humidity control apparatus of the present invention and the humidity control apparatus of FIG. 2 is only the installation position of the humidity sensor 45, and the other mechanisms are completely the same. In the humidity control apparatus 1 of the present invention, as described above, the humidity control gas 50 supplied from the apparatus main body 2 to the humidity control space S of the container 3 is supplied into the humidity control space S via the supply pipe 38 and the supply port 41. , While being mixed with the surrounding atmosphere gas G, advances in the humidity control space S in the direction of jetting, and within the target humidity range at a position advanced from the supply port 41 through the humidity control space S by a distance L. Based on the knowledge that the mixed gas 51 has an atmospheric humidity and forms the humidity control area 52, the humidity sensor 45 is installed at a position advanced from the supply port 41 toward the center of the humidity control space S by L. Yes.

  Note that if the humidity control gas 50 supplied to the humidity control space S is mixed with the surrounding atmospheric gas G to set the humidity control area at the target humidity, the range is too narrow and not realistic. In general, the humidity control apparatus allows a humidity adjustment error of about ± 3%, so in the present invention, the concept of target humidity range is introduced for the humidity range of target humidity (%) ± 3 (%). Then, a mixed gas 51 having a humidity within the target humidity range is created, and the existing range is defined as a humidity adjustment area 52.

In this embodiment, the humidity control gas supply capacity of the humidity control apparatus is 5 L / min for the humidified gas and 10 L / min for the dehumidified gas, and the position where the humidity control area 52 is formed is from the supply port 41 to the humidity control space. The position was 65 mm toward the center of S.

  When the object 54 is housed in the humidity control space S and the humidity control is performed, the flow of the humidity control gas 50 supplied in a state of being lightly ejected from the supply port 41 into the humidity control space S is affected by the target 54. In response, the formation position of the humidity control area 52 and its three-dimensional shape are deformed. For this reason, after obtaining the formation position of the humidity control area 52, it is necessary to provide a distance D between the humidity control area 52 and the object 54 in order not to change the formation position and the three-dimensional shape thereof. . In this embodiment, it is necessary to secure at least 15 mm as the distance D.

  In the humidity control apparatus of the present invention, the humidity sensor 50 (humidified gas or dehumidified gas) introduced into the humidity control space S becomes the mixed gas 51 within the target humidity range, and the humidity sensor 52 is created at the position where the humidity control area 52 is created. By arranging 45, it is possible to quickly and accurately grasp that the mixed gas 51 produced by the humidity control gas 50 is within the target humidity range. Since the mixed gas 51 in the humidity control area 52 is diffused so as to be pushed into the humidity control space S, the humidity in the humidity control space S is adjusted to be within the target humidity range. The humidity sensor 45 is not affected by humidity unevenness in the humidity control space S.

  In particular, depending on the size and shape of the humidity control space S and the size and shape of the object 54 disposed in the humidity control space S, humidity unevenness is likely to occur in the humidity control space S. Since the humidity sensor 45 is disposed at a position that is not affected by the humidity control, accurate humidity control of the entire humidity control space S is possible without taking various factors into consideration.

  Next, the humidity control method of the present invention will be described. In the humidity control method of the present invention, either a humidified gas or a dehumidified gas is switched as a humidity control gas in the humidity control space, and a humidity sensor is disposed at a position where the introduced humidified gas or dehumidified gas directly hits. This humidity sensor switches the humidified gas or dehumidified gas so as to detect the target humidity, introduces it into the humidity control space and diffuses it into the humidity control space, so that the atmospheric humidity in the humidity control space falls within the target humidity range. It is a humidity control method to be controlled.

  When the humidity in the humidity control space S deviates from the target humidity at the start of humidity control, the humidified gas is used when humidification is necessary, and the dehumidified gas is used when dehumidification is required. The gas 50 is supplied into the humidity control space S. At this time, the humidity control gas 50 is supplied in a state of being lightly jetted into the humidity control space S, advances in the humidity control space S while mixing with the surrounding atmospheric gas G, and travels in the humidity control space S by a distance L. The gas mixture 51 having a humidity within the target humidity range is formed at a position advanced by only a position, and a humidity control area 52 where the gas mixture 51 exists is formed.

  When the humidity sensor 45 is installed in the center of the humidity control area 52 and detects that the humidity of the mixed gas 51 has reached the target humidity, the humidity control gas 50 supplied to the humidity control space S is operated by operating the switching valve mechanism. Since the control is performed to switch, when the atmospheric humidity in the humidity control space S deviates from the target humidity, either the humidified gas or the dehumidified gas is used as the humidity control gas 50 in the humidity control space S. It is possible to supply and adjust the humidity in the humidity control space S quickly toward the target humidity range. Further, by installing the humidity sensor 45 in the center of the humidity control area 52 that is the earliest within the target humidity range in the humidity control space S, it is possible to quickly and accurately grasp that the humidity of the mixed gas 51 is within the target humidity range. can do.

  When the supply of the humidity control gas 50 is continued, the humidity in the humidity control area 52 changes toward the target humidity that is the center of the target humidity range. When the humidity sensor 45 detects that the target humidity has been reached, the humidity control gas 50 supplied to the humidity control space S is immediately switched by operating the switching valve mechanism. However, since the humidified gas or dehumidified gas before switching remaining in the humidity control gas pipe 38 continues to be supplied as the humidity control gas 50 for an extremely short time, the humidity detected by the humidity sensor 45 is adjusted. It will continue to change past the target humidity in the direction of humidity change before switching the wet gas.

  When all the humidity control gas before switching that has remained in the humidity control gas pipe 38 is supplied into the humidity control space S, the supply of the humidity control gas after switching is started. Changes in a direction to return to the target humidity. Thereafter, when the humidity sensor 45 detects the target humidity again, the humidity control gas 50 supplied to the humidity control space S is switched by operating the switching valve mechanism.

  As described above, when the humidity sensor 45 detects the target humidity, the humidity control gas 50 supplied into the humidity control space S is controlled to be switched immediately, so that the humidity in the humidity control area 52 is within the target humidity range. There is no departure.

  Further, the humidity control gas 50 is continuously supplied into the humidity control space S. However, since the exhaust port 43 is provided in the container 3 in which the humidity control space S is provided, the supply of the humidity control gas 50 is performed. Since the amount of atmospheric gas G equal to the amount is continuously discharged out of the humidity control space S from the exhaust port 43, the mixed gas 51 continuously produced in the humidity control area 52 is expelled from the humidity control area 52. Thus, the inside of the humidity control space S is diffused to adjust the humidity inside. Therefore, the atmospheric humidity in the humidity control space S does not deviate from the target humidity range, and the atmospheric humidity in the humidity control space S can be reliably and quickly adjusted to the target humidity range. It can be stably maintained within the humidity range.

  The above has described the humidity control method in which the humidity control gas 50 supplied into the humidity control space S is switched immediately after the humidity sensor 45 detects the target humidity. However, after the humidity sensor 45 detects the target humidity, Even in a humidity control method in which the supply of the humidity control gas 50 immediately supplied into the humidity control space S is stopped, substantially the same effect can be obtained.

  In the case of this humidity control method, the mixed gas 51 in the humidity control area 52 naturally diffuses to the surroundings, whereby the atmospheric gas G in the humidity control space S is adjusted. As a result of natural diffusion of the mixed gas 51 in the humidity control area 52 into the humidity control space S, when the humidity detected by the humidity sensor 45 deviates from the target humidity, the humidity detected by the humidity sensor 45 returns to the target humidity. When the humidified gas or the dehumidified gas is introduced as the humidity control gas and the humidity sensor 45 detects that the humidity has returned to the target humidity, the operation of stopping the supply of the humidity control gas is repeatedly performed. Therefore, in the case of this humidity control method, the humidity control gas 50 is continuously supplied to the humidity control space S described above, and the mixed gas 51 in the humidity control area 52 is pushed into the humidity control space S. Compared to the method of diffusing, it takes time to naturally diffuse the mixed gas 51 in the humidity control area 52, so that the atmospheric humidity in the humidity control space S reaches the target humidity range after the humidity control is started. The time to do becomes longer.

  Next, in order to confirm the effects of the humidity control apparatus and the humidity control method of the present invention, the results of humidity control tests performed by Examples and Comparative Examples will be described.

  In this humidity control test, the humidity of the humidity control area 52 in the present invention is the target humidity in a state where the humidity control apparatus schematically shown in FIG. 4 is used and the object 54 is housed in the humidity control space S of the container 3. The humidity change in the humidity control space S is measured when the humidity sensor 45 detects that the humidity sensor 45 has deviated from the range, and the humidity control method switches the humidity control gas 50 supplied into the humidity control space S. . In addition, since the structure and effect | action of each part of this humidity control apparatus are common in the humidity control apparatus 1 mentioned above, description is abbreviate | omitted using the same code | symbol. Moreover, the humidity control gas supply capability of the humidity control apparatus used for this humidity control test is 5 L / min for the humidified gas and 10 L / min for the dehumidified gas.

  In the embodiment, the humidity sensor is installed at the installation position of the humidity control apparatus of the present invention.In the comparative example, the humidity sensor is installed at a position different from the installation position of the humidity control apparatus of the present invention. Except for the test conditions, as shown in Table 1, the examples and comparative examples are the same.

  As the container 3, two kinds of containers having a capacity of 26L and 161L were used. As can be seen from the specifications shown in Table 1, these containers have the same bottom area, so that the container with a capacity of 26L has a flat shape, and the container with a capacity of 161L has a vertically long shape.

  The container 3 accommodated an object 54 having a volume of 13 L for a container with a capacity of 26 L, a volume of 80 L for a container with a capacity of 161 L, and a half of the container capacity. As can be seen from the specifications shown in Table 1, the shapes of these objects 54 are such that the object 54 having a volume of 13 L is a flat shape, and the object 54 having a volume of 80 L has a vertically long shape and is stored. The shape of the container 3 is adjusted.

  In the embodiment, the humidity sensor 45a is installed at a position 65 mm from the gas supply port 41 that forms the humidity control area in both the container 3 having a capacity of 26L and the container 3 having a capacity of 161L. The distance D between them was 15 mm. In the comparative example, the humidity sensor 45 b was installed at the position of the center of the ceiling inside the container 3.

  The target humidity was set to 25%, the target humidity range was 25 ± 3%, and the humidity control space S of the container 3 was conditioned by the humidity control method of the present invention. At this time, as shown in FIG. 5, in the embodiment, the comparative example is provided at five locations of the back 55, the front 56, the end 57, the ceiling 58, and the gas supply port outlet 59 when the inside of the container 3 is viewed from above. Then, when the inside of the container 3 is viewed from above, humidity sensors are attached to four locations of the back 55, the front 56, the end 57, and the gas supply port discharge port 59, and each position in the humidity control space S during humidity control is attached. Humidity change was measured.

  The humidity and the measured values of the humidity sensors 45a and 45b at the measurement points 55, 56, 57, 58, and 59 in the humidity control space S were obtained by the example and the comparative example configured as described above.

  FIGS. 6 and 7 show the measurement results when the humidity of the object 54 having a volume of 13 L is placed in the container 3 having a capacity of 26 L. FIG. 6 shows measured values when the humidity sensor 45a according to the embodiment is installed at a position 65 mm from the gas supply port 41 to adjust the humidity, and FIG. 7 shows the humidity sensor 45b as a comparative example above the object 54. The measured values when the humidity is adjusted by installing the container 3 on the ceiling surface are shown.

  As is apparent from the measured values shown in FIG. 6, in the embodiment, the detection by the temperature sensor 45a remains in the range of about ± 0.5% around 25% which is the target humidity, and is detected by the humidity sensor 45a. Humidity is not affected by humidity unevenness generated in the humidity control space S. Further, the humidity at each of the measurement points 55, 56, 57, 58, and 59 converges rapidly within the target humidity range, and stably changes within the target humidity range.

  On the other hand, as is apparent from the measurement values shown in FIG. 7, in the comparative example, the detection of the temperature sensor 45b not only fluctuates outside the target humidity range, but also the measurement points 55, 56, 57, 59. The humidity at the time deviates from the target humidity range and does not converge repeatedly. In particular, since the measurement value of the measurement point 59 near the discharge port of the gas supply port 41 fluctuates significantly, the detection of the humidity sensor 45b is greatly affected by the humidity unevenness generated in the humidity control space S. I understand.

  Moreover, in FIG. 8, FIG. 9, the measurement result at the time of putting the 80-L target into the container 3 of a capacity | capacitance 161L and adjusting humidity is shown. FIG. 8 shows measured values when the humidity sensor 45a according to the embodiment is installed at a position 65 mm from the gas supply port 41 to adjust the humidity, and FIG. 9 shows the humidity sensor 45b as a comparative example above the object 54. The measured values when the humidity is adjusted by installing the container 3 on the ceiling surface are shown.

  As is apparent from the measurement values shown in FIG. 8, in the embodiment, the detection by the temperature sensor 45a remains in the range of about ± 0.5% centered on the target humidity of 25%, and each measurement point 55 , 56, 57, 58, and 59 quickly converge within the target humidity range, and thereafter stably move within the target humidity range.

  On the other hand, as is apparent from the measurement values shown in FIG. 9, in the comparative example, the detection of the temperature sensor 45b not only fluctuates outside the target humidity range, but also the measurement points 55, 56, 57, 59. Since the humidity at the point fluctuates outside the target humidity range, it can be seen that the detection by the humidity sensor 45b is greatly influenced by the humidity unevenness generated in the humidity control space S.

  As described above, the humidity sensor is arranged at the center of the humidity control area where the humidity control gas supplied to the humidity control space and the gas in the humidity control space are mixed to create the atmospheric humidity within the target humidity range. The humidity control apparatus and humidity control method of the present invention that switches the humidity control gas according to the detection result is extremely effective for quickly adjusting the atmospheric humidity of the humidity control space within the target humidity range and maintaining it stably. I was able to confirm that.

  In the humidity control apparatus and the humidity control method of the present invention, the humidity sensor is not affected by factors such as the humidity unevenness caused by the size and shape of the humidity control space and the size and shape of the object placed in the humidity control space. Humidity control performance is greatly improved by enabling accurate humidity control of the entire humidity control space without much consideration of the factors. Further, according to the humidity control apparatus and the humidity control method of the present invention, the humidity in the humidity control space can be quickly adjusted toward the target humidity range, and can be stably maintained while maintaining the humidity within the target humidity range. Humidity can be adjusted.

  The humidity control apparatus and humidity control method of the present invention are suitable for spot spaces such as incubators, desiccators, glove boxes, and SPF animal experiment apparatuses, and when humidity is supplied to air to adjust the humidity to a medium humidity range. However, it can also be applied to environmental tests, culture tests, research, precision measurements, various inspections, storage of electronic parts, etc., humidity control of specific gases, and the like. Moreover, since the acquisition price and operation cost of the apparatus are also low, it is particularly suitable when it is necessary to prepare a plurality of different humidity control spaces.

DESCRIPTION OF SYMBOLS 1 Humidity adjustment apparatus 2 Apparatus main body 3 Container 4 Compression supply source 5 Humidification line 6 Dehumidification line 7 Switching valve mechanism 10 Humidification unit 11 Humidification module 12 Tank 31 Dehumidification module 45 Humidity sensor 50 Humidity adjustment gas 51 Mixed gas 52 Humidity adjustment area 54 Target Object W Water S Humidity control space G Atmospheric gas in humidity control space C Isohumidity line L Distance between gas supply port and humidity sensor D Distance between humidity sensor and object

Claims (4)

Introducing either a humidified gas or a dehumidified gas while switching to a predetermined humidity control space, and detecting the humidity of the humidity control space by a humidity sensor arranged in the humidity control space, the humidity of the humidity control space is adjusted. In a humidity control device that adjusts the humidity to the target humidity,
The humidity sensor or the dehumidified gas introduced from the gas supply port is directly in contact with the humidified gas or the dehumidified gas introduced from the gas supply port of the humidity control space. A humidity control apparatus, wherein the humidity control apparatus is arranged at a position where it is mixed with gas in the atmosphere and atmospheric humidity within a target humidity range is created.   The humidity control apparatus according to claim 1, wherein the target humidity range is a humidity range of target humidity (%) ± 3 (%).   When introducing either a humidified gas or a dehumidified gas into a predetermined humidity control space, a humidity sensor is placed at a position where the introduced humidified gas or dehumidified gas directly hits, and the humidity sensor detects the target humidity. The humidity control for controlling the atmospheric humidity in the humidity control space within the target humidity range by switching the humidified gas or the dehumidified gas so as to be introduced into the humidity control space and diffusing in the humidity control space. Method.   The humidity control method according to claim 3, wherein the target humidity range is a humidity range of target humidity (%) ± 3 (%).

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