JP2017146179A - Workpiece placement table for ultrasonic inspection device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a workpiece placement table for ultrasonic inspection devices with which it is possible to adjust workpiece balance easily in a short time without removing a workpiece from a sample table.SOLUTION: Provided is a workpiece placement table of an ultrasonic inspection device for irradiating a workpiece held in a liquid tank with an ultrasonic wave and inspecting the properties of the workpiece. The workpiece placement table has a base table placed on the bottom plate of the liquid tank. Three legs are mounted upright on the top face of the base table, with a sample stand almost horizontally held on upper ends of the legs. The three legs are screwed into three screw holes formed in the top face of the base table at three peak positions of a triangle, and a height adjustment groove is formed at the upper ends of the legs. A jig is inserted into this height adjustment groove and the screw-in amount of the legs is adjusted, whereby the balance of the workpiece placed on the sample table is adjusted.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a work table for an ultrasonic inspection apparatus, and more particularly to a work table for an ultrasonic inspection apparatus in which a work can be placed in a liquid tank of the ultrasonic inspection apparatus and the balance of the work can be easily adjusted.

Place a sample table on the bottom plate of the water tank, hold a workpiece (for example, a semiconductor package) on the sample table, scan the workpiece with ultrasonic waves irradiated from above the workpiece, and based on the reflected wave, An ultrasonic inspection apparatus that detects an abnormal portion is known (for example, Patent Document 1).
In this ultrasonic inspection apparatus, ultrasonic waves oscillated from an ultrasonic oscillator (ultrasonic probe) abuts on a semiconductor package, and ultrasonic waves reflected therefrom are received by a receiver connected to the ultrasonic probe. .
For this reason, the positional relationship between the ultrasonic probe and the semiconductor package is important during scanning. Usually, since the ultrasonic probe is moved in a horizontal plane, the semiconductor package placed on the sample stage is always adjusted to be balanced so that the upper surface thereof is horizontal.
Specifically, the height is measured by irradiating each position on the upper surface of the semiconductor package mounted on the sample stage to measure the height, and then the semiconductor package is temporarily removed from the sample stage to obtain a predetermined size and thickness. The shim plate is placed at an appropriate position in the placement area (placement position) of the semiconductor package on the sample stage, and the height thereof is adjusted. Next, the operation of returning the semiconductor package onto the sample stage and measuring again with ultrasonic waves is repeated.

JP 2014-215154 A

However, such a conventional ultrasonic inspection apparatus has the following disadvantages.
That is, when adjusting the balance between the ultrasonic probe and the upper surface of the semiconductor package, the operator once removes the semiconductor package from the sample table fixed to the bottom plate of the water tank, and adjusts the height of the semiconductor package with a shim (spacer) of a predetermined size. After performing, the semiconductor package was returned to the sample stage. As described above, since the height adjustment work is manually removing the semiconductor package from the sample stage and re-mounting it, it is difficult to reproduce the placement position of the semiconductor package. The positional relationship with the shim plate also fluctuated, and it was sometimes necessary to change the size of the shim plate again. As a result, this adjustment takes a long time, and it takes a long time to acquire ultrasonic inspection data of the semiconductor package.

  Accordingly, as a result of earnest research, the inventor placed a base base on the bottom plate of the liquid tank, and screwed each screw portion into three screw holes formed at the three vertex positions of the triangle on the upper surface of the base stand. If the legs are erected vertically and the upper end surfaces with height adjustment grooves are exposed at the upper ends of these legs to hold the sample stage, the jigs inserted into the predetermined height adjustment grooves It was found that the distance between the ultrasonic probe and the package can be adjusted over the entire area of the semiconductor package by rotating the leg. This makes it possible to adjust the balance of the semiconductor package easily and in a short time by aligning the distance between the ultrasonic probe and the entire upper surface of the semiconductor package while the semiconductor package is placed on the sample table. The present invention was completed by discovering that the time until acquisition of ultrasonic inspection data of a package can be shortened.

  That is, an object of the present invention is to provide a work table for an ultrasonic inspection apparatus that can easily and quickly adjust the balance of a work without removing the work from the sample table.

  According to the first aspect of the present invention, the workpiece is held in the liquid tank, and the reflected wave of the ultrasonic wave oscillated from the ultrasonic oscillator disposed below the workpiece is received by the receiver under the liquid surface, and the property of the workpiece is received. In the ultrasonic inspection apparatus for inspecting, a base table placed on the bottom plate of the liquid tank, three screw holes formed at three vertex positions of the triangle on the upper surface of the base table, and these screw holes The lower end threaded portion is screwed into each of the three legs and stands vertically from the base table, and the specimen is supported on the upper end of the three legs and is supported substantially horizontally. The upper end surfaces of the three legs are exposed from the upper surface of the sample table, and height adjustment grooves into which jigs for rotating the corresponding legs are inserted are provided on the upper end surfaces. It is the workpiece | work table for ultrasonic inspection apparatuses formed.

According to the first aspect of the present invention, the workpiece is placed on the sample stage below the surface of the liquid (contact medium such as water or oil) in the liquid tank, and the X direction (left-right direction) and Y direction (depth direction) of the workpiece. , Fore-and-aft balance adjustment. At that time, out of the three legs arranged in a triangular shape supporting the sample stage, for example, two legs are arranged in the X direction, and the remaining one is arranged in the Y direction.
At the time of balance adjustment in the X direction, first, (1) the ultrasonic probe is moved in the X direction, and the distance (height) between the ultrasonic probe and the surface of the work is increased at multiple points in the X direction of the work. Measured by oscillation and reception of sound waves. After that, (2) based on these measurement results, the operator inserts a jig into a predetermined height adjusting groove with respect to the two legs arranged in the X direction, and rotates the legs in a predetermined direction. Thus, the screwing amount of the screw portion into the screw hole arranged in the X direction of the base table is changed. Thereafter, (3) the ultrasonic probe is moved in the X direction, the distance between the ultrasonic probe and the workpiece is measured at each measurement point, and the horizontal state of the upper surface of the workpiece in the X direction is confirmed. If the desired inspection result is not obtained, the operations (1) to (3) are repeated until the horizontal adjustment at a plurality of positions in the X direction of the work is completed.

Next, at the time of balance adjustment in the Y direction, first, (4) the ultrasonic probe is moved in the Y direction above the work, and the distance between the ultrasonic probe and the work is set at a predetermined position in the Y direction of the work. taking measurement. Thereafter, (5) based on these measurement results, the operator inserts a jig into the height adjusting groove of one leg arranged in the Y direction, and rotates the leg in a predetermined direction, thereby The screwing amount of the threaded portion into the screw hole arranged in the Y direction is changed. (6) Next, the ultrasonic probe is moved in the Y direction, and the distance between the ultrasonic probe and the workpiece is measured at each measurement point. Thereafter, the operations (4) to (6) are repeated until the height adjustment at a plurality of positions in the Y direction of the work is completed.
In this way, the distance between the ultrasonic probe and the entire upper surface of the workpiece can be made uniform without removing the workpiece from the sample stage, and the workpiece can be easily and quickly balanced with high accuracy. . In addition, it is possible to evaluate the performance of the workpiece waveform that could not be resolved due to the orthogonality problem between the workpiece and the probe. The liquid filled in the liquid tank is water, oil, alcohol, or the like.

  The invention described in claim 2 is the workpiece mounting table for an ultrasonic inspection apparatus according to claim 1, wherein the height adjusting groove is formed in one horizontal character.

  According to the invention of claim 2, since the shape of the height adjusting groove is a horizontal character, each time the leg rotates 90 °, the groove position of its end face is compared to that of the cross hole overlapping the initial position, The groove position of the end face of the leg does not overlap with its initial position until it is rotated 180 ° twice that amount. As a result, the height adjustment amount of the corresponding leg can be roughly grasped visually from the movement angle of the height adjustment groove on the end face of the leg, and as a result, the time required for the balance adjustment of the workpiece is further shortened. be able to.

  According to a third aspect of the present invention, a recess is formed by counterbore on the back surface of the base table, and the recess communicates with an upper space of the base table through a through hole. It is a workpiece mounting base for the described ultrasonic inspection apparatus.

  According to the third aspect of the present invention, a recess made of counterbore is formed on the back surface of the base table, and the recess communicates with the upper space of the base table through the through hole. Therefore, when a contact medium such as water is poured into the liquid tank, the air remaining in the recess of the base table can be extracted from the through hole. In addition, even if a contact medium such as water in the liquid tank is agitated by the moving operation of the ultrasonic probe during ultrasonic inspection and bubbles enter the lower surface of the base table, the bubbles can be easily discharged from the through holes. it can.

Any workpiece can be used as long as ultrasonic inspection is possible. For example, there are various semiconductor packages and resin products.
The property of the workpiece detected by the ultrasonic inspection apparatus is, for example, a void, particle, solder joint failure, mold crack, or the like when the workpiece is a semiconductor package.
The ultrasonic inspection apparatus here oscillates an ultrasonic wave from an ultrasonic generator toward a work (object) under a liquid surface, and receives the reflected wave by a receiver, so that an ultrasonic reflected energy (Echo) is obtained. The internal state of the workpiece is visualized by the strength of the height.
At that time, the ultrasonic probe scans the entire workpiece while moving in the horizontal direction above the workpiece.
As the type of ultrasonic probe, for example, a vertical probe, an oblique probe, a water immersion probe, or the like can be employed. The ultrasonic generator includes an ultrasonic oscillator and a receiver that receives a reflected wave of the ultrasonic wave oscillated from the ultrasonic oscillator.

The material of the base table is not limited. For example, various synthetic resins such as an acrylic resin can be employed. In addition, various kinds of glass may be used.
As the shape of the base table, for example, a rectangular shape, a circular shape, an elliptical shape, or the like can be adopted.
Further, as the base, a recess having a counterbore formed on the back surface and a through hole communicating with the upper space may be formed in this recess. Thereby, for example, when water (or a contact medium such as oil) is poured into the liquid tank, the air remaining in the recess of the base can be discharged from the through hole. Even when water (or oil or other contact medium) in the liquid tank is agitated by the movement of the ultrasonic probe during ultrasonic inspection, and bubbles enter the lower surface of the base table, these bubbles pass through the through holes. It can be easily discharged.

As a triangle in which the three screw holes formed in the base stand are arranged at the positions of the three apexes, for example, an equilateral triangle is preferable, but an isosceles triangle, a right triangle, and the like may be adopted. The length of each side of the triangle is arbitrary.
As the material of each leg, for example, various metals such as stainless steel, iron, and copper, various synthetic resins such as acrylic resin, various glasses, and the like can be employed.
The cross-sectional shape orthogonal to the length direction of each leg is arbitrary. For example, a circle, a quadrilateral polygon including a square, or the like can be employed.
The diameter of the screw part (screw hole) formed in the lower part of each leg is appropriately selected according to the size of the leg.

Here, “the sample stage is supported substantially horizontally by the upper ends of the three legs” means that the sample stage is supported by the upper ends of the three legs so that the height can be adjusted. . To adjust the height of each leg, the operator inserts a jig into the predetermined height adjustment groove of the leg and rotates the leg to change the screwing amount of the threaded portion into the screw hole of the base base. Done in
“The sample stage is supported substantially horizontally” means that the sample stage is supported by the upper ends of the three legs with an angle difference of ± 2 ° with respect to the horizontal plane.
“The upper end surface of the leg is exposed from the upper surface of the sample stage” means that each leg and the sample stage are attached by inserting the upper end of the corresponding leg into a through hole (through hole) formed in the sample stage. , It means that the upper end surface of the leg is exposed to the upper surface of the sample stage through the through hole.

As the shape of the height adjusting groove, for example, one horizontal character (slit) can be adopted. In addition, a cross hole, H shape (Phillips type), S shape, plus / minus, hexagonal hole, square hole may be used.
The kind of jig | tool is suitably changed according to the shape of a height adjustment groove | channel. For example, a minus driver or the like is used when the height adjustment groove is a single horizontal character, and a plus driver is adopted when the height adjustment groove is a cross hole. Use a hexagon wrench for hexagonal holes.

In the invention according to claim 1, in the state where two of the three legs are arranged in the X direction (left and right direction) and the rest are arranged in the Y direction (depth direction, front and rear direction), The workpiece is placed on the sample stage under the liquid level in the tank, and the balance of the workpiece in the X and Y directions is adjusted.
At the time of balance adjustment in the X direction, the ultrasonic probe is first moved in the X direction, and the distance between the ultrasonic probe and the upper surface of the work is measured at a plurality of positions in the X direction of the work. Based on the measurement results, the operator inserts a jig into the height adjustment groove of one leg in the X direction and rotates the leg in a predetermined direction to screw the screw part into the corresponding screw hole of the base stand. To adjust the balance (levelness) of the workpiece in the X direction. Thereafter, these operations are repeated to ensure the horizontal state in the X direction on the upper surface of the workpiece.

Next, at the time of balance adjustment in the Y direction, the ultrasonic probe is moved in the Y direction, and the distance between the ultrasonic probe and the upper surface of the work is measured at a predetermined position in the Y direction of the work. Based on this measurement result, the operator inserts a jig into the height adjustment groove of the leg in the Y direction, and rotates the leg in a predetermined direction to change the screwing amount of the screw portion into the corresponding screw hole of the base base. Then, the balance (levelness) of the workpiece in the Y direction is adjusted. Thereafter, these operations are repeated to ensure the horizontal state of the upper surface of the workpiece in the Y direction.
In this way, the distance between the ultrasonic probe and the entire upper surface of the workpiece can be made uniform without removing the workpiece from the sample stage, and the workpiece can be easily and quickly balanced with high accuracy. . As a result, it has become possible to evaluate the waveform performance of a workpiece that could not be decomposed due to the problem of orthogonality between the workpiece and the probe.

  According to the second aspect of the present invention, since the shape of the height adjusting groove is one horizontal character, the leg has a groove position on its end surface that is overlapped with the initial position every 90 ° of rotation. The groove position on the end face of the leg does not overlap with its initial position until it is rotated 180 ° twice. As a result, it is possible to roughly grasp the height adjustment amount of the corresponding leg visually from the movement angle of the height adjustment groove on the end surface of the leg, and as a result, the work balance adjustment time can be further shortened. it can.

  According to the third aspect of the present invention, when a liquid (contact medium such as water or oil) is poured into the liquid tank, the air remaining in the recess of the base table can be extracted from the through hole. Further, even when the liquid in the liquid tank is stirred by the moving operation of the ultrasonic probe during the ultrasonic inspection and bubbles enter the lower surface of the base table, the bubbles can be easily discharged through the through holes.

It is a front view which shows the workpiece mounting base for ultrasonic inspection apparatuses which concern on Example 1 of this invention. It is a rear view of the workpiece mounting base for ultrasonic inspection apparatuses which concerns on Example 1 of this invention. It is a bottom view of the workpiece mounting base for ultrasonic inspection apparatuses concerning Example 1 of this invention. It is a top view of the work pedestal for ultrasonic inspection devices concerning Example 1 of this invention.

  Embodiments of the present invention will be specifically described below with reference to the drawings. Here, for convenience of explanation, when the work table for the ultrasonic inspection apparatus is viewed in plan, the left direction is the X1 direction, the right direction is the X2 direction, the front direction is the Y1 direction, and the rear direction is the Y2 direction. When viewed from the front, the downward direction is the Z1 direction, and the upward direction is the Z2 direction.

1 to 4, the ultrasonic inspection apparatus according to the first embodiment of the present invention holds a workpiece 12 in a liquid tank 11, and the surface of the liquid (contact medium such as water, in this case, water). The property (abnormal part such as peeling) of the workpiece 12 is inspected by the ultrasonic probe A disposed below the workpiece 12 below.
The workpiece table 10 for an ultrasonic inspection apparatus has a base plate 16 of a plate material having a predetermined thickness placed on a bottom plate 15 that forms a horizontal bottom surface of a box-shaped liquid tank 11 and a top surface of the base table 16. Three screw holes 17 formed at the three vertex positions of the triangle, and a screw portion 18 at the lower end portion are screwed into these screw holes 17, and three legs 19 that stand vertically from the base table 16 The sample stage 20 is supported substantially horizontally by being held at the upper ends of the legs 19.

The liquid tank 11 is a rectangular parallelepiped box-shaped container having a rectangular bottom surface made of an acrylic plate, and a base table 16 is placed at a substantially central portion of the rectangular upper surface of the bottom plate 15.
The base 16 is a thick stainless steel plate that is square in plan view, and a square recess 21 made of counterbore is formed at the center of the back surface. The base 21 is formed by the recess 21 so that the weight of the base 16 is reduced and the gripping is easy. One through hole 22 penetrating the front and back surfaces of the base table 16 is formed in the central portion of the recess 21.
Further, the base 16 has three vertex positions of the equilateral triangle, that is, the corners on the X1-Y1 side, the corners on the X1-Y2 side, and the intermediate part in the length direction of the side part on the Y2 side. A total of three screw holes 17 are formed.
Each leg 19 is screwed into each screw hole 17 through a screw part 18 formed at the lower end thereof. That is, the three legs 19 having the same length are erected vertically on the top surface of the base 16 at the apex position of the triangle. In addition, three spacers 24 are interposed on the upper surface of the formation portion of each screw hole 17 of the base base 16. It should be noted that the screw pitch is that of a fine screw, so that the screwing amount can be finely adjusted.

Each leg 19 is made of, for example, stainless steel having a hexagonal column shape, and an insertion pin portion 25, which is a small diameter cylinder slightly longer than the thickness of the sample table 20, is formed at the upper end portion thereof. Each insertion pin portion 25 has a diameter approximately half that of the corresponding leg 19.
On the upper end surface of each insertion pin portion 25, a height adjustment groove (slit) 26 of one horizontal character exposed from the upper surface of the sample table 20 is formed. Each height adjusting groove 26 is inserted with a minus driver (jig) 27 for rotating the corresponding leg 19.
The sample table 20 is a square thin stainless plate having the same size as the base table 16, and a work (here, a rectangular semiconductor package) 12 is placed on the center of the flat upper surface. The sample stage 20 has a total of the corners on the X1-Y1 side (see FIGS. 3 and 4), the corners on the X2-Y1 side, and the intermediate part in the length direction of the side part on the Y2 side. Three pin insertion holes 28 are formed. Each pin insertion hole 28 is a hole having a slightly larger diameter than the corresponding insertion pin portion 25. Therefore, when attaching the sample stage 20 to each leg 19, the sample stage 20 is inserted into each insertion hole 28 through the insertion holes 28, so that the sample stage 20 appears on the upper surface of the three legs 19. The back surface of the 20 facing portions is held in contact. As a result, the sample stage 20 is supported substantially horizontally at the upper ends of the three legs 19.

Next, with reference to FIGS. 1-4, the ultrasonic inspection method of the workpiece | work 12 using the workpiece mounting base 10 for ultrasonic inspection apparatuses which concerns on Example 1 of this invention is demonstrated.
First, as shown in FIG. 1, the base base 16 is placed on the upper surface of the bottom plate 15 in the liquid tank 11 filled with water. At this time, the base stand 16 is provided with three legs 19 standing upright, of which two legs 19 are spaced apart in the X direction and the remaining one leg 19 is in the Y direction. (See FIGS. 3 and 4). A sample table 20 is held at the upper ends of these three legs 18, and a workpiece 12 is placed at the center of the upper surface of the sample table 20.
Next, with reference to FIGS. 1-4, the balance adjustment of the workpiece | work 12 performed under water surface (underwater) in the X direction and the Y direction is demonstrated.
At the time of balance adjustment in the X direction, first, the ultrasonic probe A soaked in water is moved in the X direction above the workpiece 12, and ultrasonic waves are irradiated at a plurality of locations in the X direction of the workpiece 12, and the reflected waves are irradiated. By receiving, the distance between the ultrasonic probe A and the upper surface of the workpiece 12 is measured.
Next, based on these measurement results, the operator inserts the tip of a minus driver 27 as a jig into the height adjusting groove of the leg 19 in the X1 direction or the X2 direction, and rotates the leg 19 in a predetermined direction. By changing the screwing amount of the screw portion 18 into the corresponding screw hole 17 of the base 16, the horizontal degree of the workpiece 12 in the X direction (balance adjustment) is adjusted. Thereafter, these operations are repeated to ensure a horizontal state (equilibrium state) in the X direction on the upper surface of the workpiece 12.

Next, at the time of balance adjustment in the Y direction, the ultrasonic probe A is moved in the Y direction, and the ultrasonic probe A and the upper surface of the work 12 are Measure the distance between. Based on the measurement result, the operator inserts a flathead screwdriver 27 into the height adjusting groove of the leg 19 in the Y1 direction or the Y2 direction, and rotates the leg 19 in a predetermined direction to the corresponding screw hole 17 of the base base 16. By changing the screwing amount of the screw part 18, the horizontal degree of the workpiece 12 in the Y direction (balance adjustment) is performed. Thereafter, these operations are repeated to ensure the horizontal state (equilibrium state) of the upper surface of the workpiece 12 in the Y direction.
After the leveling of the workpiece 12 is completed as described above, the workpiece 12 is ultrasonically inspected by the ultrasonic inspection apparatus. That is, the entire surface of the workpiece 12 is scanned while moving the ultrasonic probe A in the X direction and the Y direction on the workpiece 12 below the water surface, and the ultrasonic wave generated from the ultrasonic oscillator of the ultrasonic probe A is detected. The reflected wave at the position is received, and the property of the workpiece 12 is inspected. In addition, an image display etc. can be performed about a test result.

By configuring in this way, the distance between the ultrasonic probe A and the entire upper surface of the workpiece 12 is made uniform without removing the workpiece 12 from the sample stage 20, and high-precision balance adjustment of the workpiece 12 is performed. It can be carried out easily and in a short time. As a result, it is possible to evaluate the performance of the workpiece waveform that could not be decomposed due to the problem of orthogonality between the workpiece and the probe.
In addition, since the shape of the height adjusting groove is one horizontal character, the leg 19 is rotated 180 ° twice that of the cross hole in which the groove position of the end surface overlaps the initial position every 90 ° rotation. The groove position of the end surface of the leg 19 does not overlap with the initial position. Accordingly, the height adjustment amount of the corresponding leg 19 can be roughly grasped visually from the movement angle of the height adjusting groove on the end face of the leg 19, and as a result, the time for balance adjustment of the workpiece 12 can be obtained. Can be further shortened.
Further, since the through hole 22 is formed in the central portion of the recess 21 on the back surface of the base table 16, when water is poured into the liquid tank 11, the air remaining in the recess 21 of the base table 16 is extracted from the through hole 22. be able to. Further, even when the water in the liquid tank 11 is agitated by the moving operation of the ultrasonic probe A at the time of ultrasonic inspection and bubbles enter the lower surface of the base table 16, the bubbles can be easily discharged from the through holes 22. it can.

  The present invention is useful as a technique for adjusting the balance between a workpiece placed on a sample stage in a liquid tank and an ultrasonic probe.

10 Work table for ultrasonic inspection equipment,
11 liquid tank,
12 works,
15 Bottom plate,
16 base stand,
17 Screw holes,
18 thread,
19 legs,
20 sample table,
21 recess,
22 through holes,
26 Height adjustment groove,
27 Slotted screwdriver (jig).

Claims (3)

In an ultrasonic inspection apparatus that holds a work in a liquid tank and receives a reflected wave of an ultrasonic wave oscillated from an ultrasonic oscillator arranged above the work below the liquid surface by a receiver, and inspects the work.
A base table placed on the bottom plate of the liquid tank;
Three screw holes formed at the three vertex positions of the triangle on the upper surface of the base table,
Three screws that are respectively screwed into the screw holes at the lower end and stand upright from the base stand;
A sample stage that is supported substantially horizontally at the upper ends of these three legs and on which the workpiece is placed;
Each upper end surface of the three legs is exposed from the upper surface of the sample table, and an ultrasonic inspection in which a height adjusting groove into which a jig for rotating the corresponding leg is inserted is formed on these upper end surfaces. Work table for equipment.   The work table for an ultrasonic inspection apparatus according to claim 1, wherein the height adjusting groove is formed in one horizontal character.   3. The ultrasonic inspection apparatus work according to claim 1, wherein a recess made of counterbore is formed on the back surface of the base table, and the recess communicates with an upper space of the base table through a through hole. Stand.

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