JP2017145726A - Dry vacuum pump device, control method for the same and control program - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a dry vacuum pump device, a control method for the same and a control program capable of minimizing fluctuation in inner pressure of an exhaust object chamber due to instantaneous power failure.SOLUTION: A dry vacuum pump device comprises: a dry vacuum pump 1; a motor 2 which drives the dry vacuum pump 1; an inverter 11 which controls a rotation speed of the motor 2 by supplying the same with variable frequency alternate power; and a control device 4 which controls the inverter 11. The control device 4 has a function to detect power failure and controls the inverter 11 so that the same supplies the motor 2 with electric current 1.5 to 3.0 times larger than rated electric current thereof immediately after recovering from the power failure.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a dry vacuum pump apparatus, a control method thereof, and a control program, and particularly refers to a power failure that occurs in a short time of about 1 second or less. The present invention relates to a dry vacuum pump apparatus capable of returning to the above, a control method thereof, and a control program.

  In production lines for semiconductor devices, liquid crystals, solar panels, LEDs, and the like, dry vacuum pump apparatuses are widely used for evacuating the inside of chambers for various processes. When the pump operation control is stopped by a power failure such as “instantaneous power failure”, which indicates a power failure that occurs in a short time of about 1 second or less, the internal pressure of the chamber realized by exhausting the vacuum pump increases. When the process conditions in the chamber change, the manufacturing process cannot be continued and the production line is stopped. The longer the pump operation control stop time of the dry vacuum pump device due to a power failure, the more serious damage is caused. Therefore, it is desirable to restart the dry vacuum pump device immediately after power recovery. In addition, if the vacuum in the chamber is broken due to a power failure, the product being processed in the chamber is damaged. Therefore, it is desirable to minimize the influence on the chamber internal pressure even if a power failure occurs.

  Generally, a dry vacuum pump device includes a dry vacuum pump, a motor that drives the dry vacuum pump, an inverter that controls the rotational speed (rotational frequency) of the motor, and a control device that controls the operation of the inverter. The operation speed of the dry vacuum pump is controlled by supplying AC power of variable frequency to the motor.

In the dry vacuum pump apparatus provided with the inverter described above, the power supply from the inverter apparatus to the vacuum pump drive motor is stopped due to a power failure, so that the operation of the vacuum pump is stopped and the pump drive motor is decelerated.
Thereafter, when the input power is restored, the output control of the inverter device recovers its function immediately after. However, especially in the case of a DC non-commutator motor that uses a permanent magnet on the rotor side, when this pump motor is in a rotating state, if the inverter output is resumed, it is as if the motor itself supplies power to the inverter output terminal side. Large regenerative power is generated as if it were a generator to be supplied.

  In order to avoid damage to the inverter due to the regenerative power, a general method is to provide a regenerative resistor for consuming regenerative power, and a method for dissipating heat from the regenerative power by this resistor, or a regenerative resistor is not provided. In addition, a method of performing control to return the regenerative power to the power supply side (input side) or a method of spontaneously attenuating the regenerative power from the motor deceleration without returning to the inverter control until the motor reaches a predetermined rotation speed or less is proposed. Has been.

However, when the regenerative power is consumed by the regenerative resistor, a regenerative resistor and a switching mechanism for flowing a regenerative current through the regenerative resistor are required. Therefore, there are problems that the number of parts increases, the entire inverter device becomes larger, and the cost increases.
In addition, when performing control to return the regenerative power to the power supply side (input side), it is difficult to control power devices such as switching elements in the inverter, and the cost of providing a control circuit increases. There is also a problem in the control to return to

  Therefore, in order to eliminate the above-mentioned problems and avoid an increase in equipment cost, normally, in a dry vacuum pump device, the pump / motor is kept below a predetermined rotational speed so that regenerative power does not return to the inverter side at the time of a power failure. Until then, the inverter control does not return, the regenerative power is naturally consumed by the motor deceleration, and the dry vacuum pump is restarted after the pump / motor is below a predetermined number of revolutions.

On the other hand, when the speed of the dry vacuum pump decreases, the pump performance decreases and the exhaust speed of the gas in the chamber decreases, so that the internal pressure of the chamber increases, the vacuum in the chamber is broken, and the manufacturing process is being performed in the chamber. The product is damaged.
When using a dry vacuum pump for semiconductor manufacturing equipment, the SEMI standard established as an industry standard for semiconductor manufacturing equipment has provisions for instantaneous power outages and normal operation when a power outage occurs within 1 second. There is a need for quick pump rotation recovery during continuation and power recovery.
Therefore, in a dry vacuum pump for semiconductor manufacturing equipment, a control method for returning the pump speed after a power failure occurs and power recovery is a major issue.

JP 2010-110139 A JP 2011-69294 A

  The present invention has been made in view of the above circumstances, and provides a dry vacuum pump apparatus that can minimize fluctuations in the internal pressure of a chamber to be exhausted due to an instantaneous power failure, a control method thereof, and a control program. Objective.

  An aspect of the dry vacuum pump apparatus of the present invention includes a dry vacuum pump, a motor that drives the dry vacuum pump, an inverter that supplies AC power of variable frequency to the motor and controls a rotation speed of the motor, and the inverter. A control device for controlling, the control device has a function of detecting a power failure, the control device is 1.5 to 3.0 times the rated current of the inverter after the power is restored from the power failure The inverter is controlled to supply current to the motor.

  In a preferred aspect of the present invention, the control device controls the inverter so that when the speed of the dry vacuum pump returns to a predetermined speed after power recovery, the inverter supplies a current equal to or lower than an inverter rated current to the motor. It is characterized by that.

  In a preferred aspect of the present invention, the rated current of the switching element of the inverter is 1.5 to 3.0 times the rated current of the inverter.

  The aspect of the control method of the dry vacuum pump apparatus of the present invention includes a dry vacuum pump, a motor that drives the dry vacuum pump, and an inverter that supplies AC power of variable frequency to the motor and controls the rotational speed of the motor. In the control method of the dry vacuum pump apparatus provided, the inverter is controlled so that the inverter supplies a current of 1.5 to 3.0 times the rated current of the inverter to the motor after power is restored from a power failure. To do.

In a preferred aspect of the present invention, when the speed of the dry vacuum pump returns to a predetermined speed after the power recovery, the inverter controls the inverter so that a current equal to or lower than an inverter rated current is supplied to the motor. To do.
In a preferred aspect of the present invention, the rated current of the switching element of the inverter is 1.5 to 3.0 times the rated current of the inverter.

  The aspect of the control program of the dry vacuum pump apparatus of the present invention includes a dry vacuum pump, a motor that drives the dry vacuum pump, and an inverter that supplies AC power of variable frequency to the motor and controls the rotational speed of the motor. The dry vacuum pump device includes a control program for the dry vacuum pump device, wherein the inverter causes the inverter to drive a current 1.5 to 3.0 times the inverter rated current after power is restored from a power failure. The inverter is controlled so as to be supplied to the inverter.

  According to a preferred aspect of the present invention, the control program causes the dry vacuum pump device to supply the motor with a current equal to or lower than the inverter rated current when the speed of the dry vacuum pump returns to a predetermined speed after the power recovery. Thus, the inverter is controlled.

  According to the present invention, when an instantaneous power failure is detected and recovered from the instantaneous power failure, the pump speed reduced by the power failure can be immediately recovered by supplying a large current several times the inverter rated current from the inverter to the motor. it can. Therefore, fluctuations in the internal pressure of the chamber exhausted by the dry vacuum pump can be minimized.

FIG. 1 is a schematic diagram showing the overall configuration of a dry vacuum pump apparatus according to the present invention. 2 (a) and 2 (b) are graphs showing the control of the dry vacuum pump apparatus according to the prior art and the control of the dry vacuum pump according to one aspect of the present invention, and FIG. 2 (a) is according to the prior art. The control of the dry vacuum pump apparatus is shown, and FIG. 2B shows the control of the dry vacuum pump apparatus in one embodiment of the present invention. 3A and 3B are graphs showing the control of the dry vacuum pump apparatus according to the prior art and the control of the dry vacuum pump apparatus according to one embodiment of the present invention, and FIG. 3A is a dry vacuum according to the prior art. FIG. 3 (b) shows the control of the dry vacuum pump apparatus in one embodiment of the present invention. FIG. 4 is a graph showing one embodiment of the inverter control method of the present invention. FIG. 5 is a diagram showing a control flow of the inverter of the present invention.

Hereinafter, embodiments of a dry vacuum pump device, a control method thereof, and a control program according to the present invention will be described with reference to FIGS. 1 to 5, the same or corresponding components are denoted by the same reference numerals, and redundant description is omitted.
FIG. 1 is a schematic diagram showing the overall configuration of a dry vacuum pump apparatus according to the present invention. As shown in FIG. 1, the dry vacuum pump device includes a dry vacuum pump 1, a motor 2 that rotationally drives the dry vacuum pump 1, a motor driver 3 that controls the rotational speed of the motor 2, and operations of the motor driver 3. And a control device 4 for controlling. The motor driver 3 is connected to an AC power source 7 such as a commercial power source via a breaker 6. An intake port of the dry vacuum pump 1 is connected to a chamber 5 such as a semiconductor manufacturing apparatus, and the inside of the chamber 5 is configured to be evacuated by the dry vacuum pump 1.

  The motor driver 3 includes a converter 10 that converts AC power supplied from the AC power source 7 into DC power, an inverter 11 that converts the converted DC power into AC power having a desired frequency, and a switching element S1 of the inverter 11. And a driver control unit 12 for sending a gate drive signal for commanding the ON-OFF operation of S6 to the inverter 11. The converter 10 is provided with a capacitor C1 for smoothing the voltage.

  The driver control unit 12 generates a PWM signal based on the operation command speed of the dry vacuum pump 1 and transmits the PWM signal to the inverter 11. The control device 4 is configured to control the overall operation of the driver 3 and to communicate with an external host device. The driver control unit 12 receives a current value supplied from the motor driver 3 to the motor 2 as operation information of the motor 2, calculates the rotational speed of the motor 2 from the current value, and calculates a predetermined target rotational speed and a calculation. A PWM signal is generated based on the difference from the rotation speed thus transmitted, and is transmitted to the inverter 11 of the motor driver 3. The inverter 11 drives the switching elements S <b> 1 to S <b> 6 according to the PWM signal, and applies an input voltage for rotating the motor 2 at the target rotation speed to the motor 2. Further, the control device 4 is configured to transmit a start signal and a stop signal of the dry vacuum pump 1 to the driver control unit 12 in accordance with a user operation.

In the dry vacuum pump apparatus configured as shown in FIG. 1, the dry vacuum pump 1 is shut down during a power failure such as a momentary power failure, but regenerative power is generated in the motor 2 along with the deceleration during the shutdown. . This regenerative power returns to the inverter 11.
In the present invention, at the time of power recovery after a power failure, the controller 4 transmits a start signal for the dry vacuum pump 1 to the motor driver 3 or continues to transmit the start signal even during a power failure, and the AC power source 7 drives the motor to the inverter 11. Since the electric power is supplied, the inverter 11 superimposes the regenerative power from the motor 2 and the motor driving power supplied from the AC power source 7. In other words, since the regenerative current from the motor 2 and the motor driving current from the AC power source 7 are superimposed on the inverter 11, it is necessary to allow the inverter 11 to withstand this large superimposed current. is there. Therefore, in the present invention, a dedicated inverter having a rated current larger than the rated current of the general-purpose inverter is used for the rated current of the switching element of the inverter.

表１では、スイッチング素子の定格電流について、インバータの定格電力毎に、汎用インバータと専用インバータとを比較対比している。表１から明らかなように、本発明においては、スイッチング素子の定格電流（設定）について、汎用インバータの１．５倍〜２．５倍の専用インバータを用いている。本発明者らの知見によれば、汎用インバータに対する本発明の専用インバータの定格電流比は、１．５倍〜２．５倍に限らず、１．５倍〜３．０倍程度の範囲であればよい。 The relationship between the rated power of the general-purpose inverter and the rated current specification of the switching element used employs an original calculation method for each inverter manufacturer. Table 1 shows an example of this and the dedicated inverter used in the present invention. It is a comparison contrast table.

In Table 1, with respect to the rated current of the switching element, the general-purpose inverter and the dedicated inverter are compared and compared for each rated power of the inverter. As is apparent from Table 1, in the present invention, a dedicated inverter that is 1.5 to 2.5 times the general-purpose inverter is used for the rated current (setting) of the switching element. According to the knowledge of the present inventors, the rated current ratio of the dedicated inverter of the present invention to the general-purpose inverter is not limited to 1.5 times to 2.5 times, but in a range of about 1.5 times to 3.0 times. I just need it.

  In this way, by configuring the inverter 11 with an inverter having a switching element capable of withstanding a large current, power from the AC power source 7 is consumed while the regenerative power generated on the motor side at the time of a power failure is consumed by the power device of the inverter 11. It is possible to restart the dry vacuum pump 1 immediately after the occurrence of a power failure for a short time within 1 second and after power recovery.

2 (a) and 2 (b) are graphs showing the control of the dry vacuum pump apparatus according to the prior art and the control of the dry vacuum pump 1 according to one embodiment of the present invention, and FIG. 2 (a) is a prior art. FIG. 2B shows the control of the dry vacuum pump apparatus 1 according to one embodiment of the present invention. 2A and 2B, the horizontal axis represents time (t), and 1 second is represented by 1 s. The vertical axis represents the input voltage (V) to the inverter, the inverter output, the pump speed (rpm), and the chamber internal pressure.
As shown in FIG. 2A, in the prior art, when the input voltage to the inverter is turned off due to momentary power interruption, the inverter output is also turned off. Even if power is restored after a momentary power failure, the inverter output OFF state continues for almost 1 second in order to wait for the motor speed to decrease and regenerative power not to be generated or to be sufficiently reduced. . While the inverter output is OFF, the pump rotation speed decreases and the chamber internal pressure increases. In FIG. 2 (a), three modes are shown for the case where the instantaneous stop time is short, slightly longer, and intermediate, but the inverter output is about 1 second regardless of the short stop time. In any aspect, the degree of decrease in the pump speed and the degree of increase in the chamber internal pressure are substantially the same.

  As shown in FIG. 2 (b), in one aspect of the present invention, when the input voltage to the inverter is turned off due to a momentary power failure, the inverter output is also turned off. The inverter output is turned on immediately without waiting for the regenerative power to drop. In FIG. 2 (b), three modes are shown: a case where the momentary power interruption is short, a case where it is slightly long, and an intermediate case. In any case, the inverter output immediately turns ON when power is restored. Become. As described above, since the inverter output is immediately turned ON after the power recovery, the decrease in the pump rotation speed and the increase in the chamber internal pressure are suppressed.

3A and 3B are graphs showing the control of the dry vacuum pump apparatus according to the prior art and the control of the dry vacuum pump apparatus 1 according to one embodiment of the present invention, and FIG. FIG. 3 (b) shows the control of the dry vacuum pump apparatus 1 according to one embodiment of the present invention. 3A and 3B, the horizontal axis indicates time (t), and 1 second is 1 s. The vertical axis represents the input voltage (V) to the inverter, the inverter output, the pump speed (rpm), and the chamber internal pressure.
As shown in FIG. 3 (a), in the prior art, if a momentary power failure occurs repeatedly in a short time (the figure shows a case where the power failure occurs repeatedly three times every 1 second), When the input voltage to the inverter is turned off due to a stop, the inverter output is turned off. After that, even if power is temporarily restored, the inverter output will be turned on until the next momentary power failure to wait for the regenerative power to decrease. No, the inverter output remains off until the last momentary power failure. When power is restored after the last momentary power failure, the inverter output is turned on with a time delay. As described above, when the instantaneous power failure repeatedly occurs in a short time, the inverter output is turned off for a considerably long time (3 seconds in the illustrated example). In the meantime, the pump rotation speed continues to decrease to 0 rpm. Therefore, the chamber internal pressure rises to the highest level (High).

  As shown in FIG. 3 (b), in one aspect of the present invention, when an instantaneous interruption occurs repeatedly in a short time (in the figure, the case where the instantaneous interruption occurs three times every 1 second) The input voltage to the inverter is turned off each time, and the inverter output is turned off each time, but there is no need to wait for the regenerative power to drop, so when the power is restored, the inverter output is not related to the duration of the instantaneous power failure. In either case, it immediately recovers and turns ON. When a momentary power failure occurs, the pump rotational speed slightly decreases each time, but when the power is restored, the inverter output immediately recovers. Therefore, the pump rotational speed decreases little and the chamber internal pressure increases slightly. Therefore, the chamber internal pressure immediately reaches the lowest level (Low) as the inverter output recovers. As described above, according to the present invention, even if the inverter output is turned off due to a power failure, the inverter output can be turned on immediately after power is restored, and the rotation speed of the vacuum pump can be reduced to the rated rotation speed in a short time. In order to recover, fluctuations in the chamber internal pressure can be suppressed.

  Here, the rated current of the inverter itself is experimentally selected according to specifications required for the pump (exhaust speed, exhaust time, allowable gas flow rate, etc.). The rated current of the inverter is the maximum current value that the inverter can continuously output. Switching elements, other components, cooling mechanisms, and the like inside the inverter are designed so that there is no problem even if the inverter continuously outputs the rated current value of the inverter. Here, in the present invention, the rated current of the switching element of the inverter is 1.5 to 3.0 times the rated current of the inverter. By keeping the rated current of the inverter low compared to the rated current of the switching element, parts other than the switching element of the inverter and the cooling mechanism can be adapted to the low current, avoiding the enlargement of the inverter, Cost reduction is possible.

  The control device 4 of FIG. 1 is provided with a connector (not shown) to which a storage medium reading device is connected. If necessary, the storage medium reading device is connected to transfer a control program and data from an external storage medium. It can be read. As described above, when power is restored from a power failure, a storage medium storing a control program for immediately turning on the inverter output without waiting for the regenerative power to decrease from the motor is prepared. By reading the control program from the storage medium and installing it in the control device 4, the present invention can be executed in the existing vacuum pump device.

In the present invention shown in FIGS. 2B and 3B, the inverter output current supplied from the inverter 11 to the motor 2 is controlled to be equal to or lower than the rated current of the inverter 11 at the time of power recovery after the instantaneous power failure. Yes.
Since the present inventors control the inverter output current supplied from the inverter 11 to the motor 2 at the time of power recovery after a momentary power failure to be equal to or lower than the rated current of the inverter 11, the motor output is limited and the rotation speed of the vacuum pump is reduced. As a result of the restriction, it was noted that the degree of increase in the internal pressure of the chamber is large and the rise time may be longer than in an ideal state.
Therefore, in one aspect of the present invention, the inverter output current supplied from the inverter 11 to the motor 2 at the time of power recovery after a momentary power failure is several times the rated current of the inverter 11. Thereby, the pressure fluctuation of the chamber at the momentary power failure can be further reduced. Hereinafter, this aspect will be described with reference to FIGS.

FIG. 4 is a graph showing one embodiment of the inverter control method of the present invention. In FIG. 4, the horizontal axis represents time (t), and the vertical axis represents power supply voltage (V), pump rotation speed (rpm), chamber internal pressure, and inverter output current (A).
As shown in FIG. 4, when an instantaneous power failure occurs, the power supply voltage is lost and the inverter output current is turned off. Thereby, the rotational speed of the vacuum pump gradually decreases. After the instantaneous power failure is restored and power is restored, the inverter 11 outputs an inverter current 1.5 to 3.0 times, more preferably 2.0 to 3.0 times the inverter rated current, to the motor 2. Thus, since the inverter 11 supplies a large current 1.5 to 3.0 times the rated current of the inverter to the motor 2 after the power recovery, the motor output increases, and the pump rotation speed is as shown in FIG. It rises rapidly and returns to the specified rotational speed in a short time. For this reason, the chamber internal pressure slightly increases after an instantaneous power failure, but the chamber internal pressure quickly returns to the original pressure due to a rapid increase in the rotation speed of the vacuum pump after power recovery. Therefore, the pressure fluctuation in the chamber is small. When the rotation speed of the vacuum pump returns to the specified speed, the inverter output current is reduced below the inverter rated current. In the control for reducing the inverter output current below the inverter rated current, the inverter 11 outputs an inverter current corresponding to the rotation speed of the vacuum pump required from the vacuum pressure on the demand side, that is, the chamber side.

  Since the rated current of the switching element of the present invention is 1.5 to 3.0 times the rated current of the inverter, the inverter 11 is 1.5 to 3.0 times the rated current of the inverter after power recovery at the momentary power failure. Can be supplied to the motor 2.

  Even if an instantaneous power failure occurs and the power supply voltage is lost, the inverter 11 can output a current if the control circuit such as the driver control unit 12 is alive and charges are accumulated in the capacitor C1. The present invention is effective when the power of the capacitor C1 is consumed during a power failure and power supply to the motor 2 becomes impossible.

  In the above description, the dry vacuum pump is a rotary pump such as a roots type dry vacuum pump. However, when the dry vacuum pump is a reciprocating pump, the rotation of the motor is converted into the reciprocating motion of the pump. Therefore, the rotational speed of the pump may be replaced with the reciprocating speed of the pump.

  FIG. 5 is a diagram showing a control flow of the inverter of the present invention. As shown in FIG. 5, when the operation of the inverter 11 is started, the power supply voltage of the AC power supply 7 is measured, the power supply voltage is compared with the specified voltage, and the power supply voltage is lower than the specified voltage (in the case of Yes). Is judged as a power failure, and the inverter 11 does not output (inverter output OFF). If the power supply voltage is higher than the specified voltage (No), the process returns to the power supply voltage measurement step. After the inverter output is turned OFF, the power supply voltage is measured again. If the power supply voltage is higher than the specified voltage (in the case of Yes), it is determined that the power is restored, and the inverter output current (inverter limit current) is 1.5 of the inverter rated current. Increase to ~ 3.0 times. Here, the inverter limit current is a maximum current limit value output from the inverter 11, which is commanded from the control device 4 to the motor driver 3. If the power supply voltage is lower than the specified voltage (No), the process returns to the power supply voltage measurement step. After the step of increasing the inverter output current, the pump speed is compared with a predetermined speed. If the pump speed is higher than the predetermined speed (in the case of Yes), it is determined that the instantaneous power failure recovery operation is completed, and the inverter output current (Inverter current limit) is returned to a normal value equal to or lower than the inverter rated current, and the control flow ends. When the pump speed is lower than the predetermined speed (in the case of No), the process returns to the step of increasing the inverter output current. Here, the predetermined speed is a speed within a range of 90% to 99% of the pump rated speed.

  Regarding the measurement of the power supply voltage, the control device 4 is connected to the AC power supply side so that the power supply voltage can be measured, or the driver controller 12 is connected to the AC power supply side so that the power supply voltage can be measured. .

  In addition, a storage medium storing a control program for controlling the inverter 11 so that the inverter 11 supplies the motor with a current 1.5 to 3.0 times the rated current of the inverter after power recovery from a power failure is prepared. By installing the control program in the control device 4 via the storage medium reader as described above, the present invention can be executed in the existing vacuum pump device.

  In the present invention shown in FIG. 4, the inverter output current during recovery from an instantaneous power failure has reached the limit current during recovery from an instantaneous power failure, but the present invention always limits the output current of the inverter. Does not mean reaching current. Depending on the degree of pressure fluctuation in the chamber, the output current of the inverter exceeds the normal inverter rated current value during recovery from an instantaneous power failure, but the return operation may end without reaching the limit current.

  Up to now, using a inverter with a switching element rated current of 1.5 to 3.0 times, more preferably 2.0 to 3.0 times the rated current of the inverter, performing a recovery operation from an instantaneous power failure However, the present invention can be applied even when a normal inverter, that is, an inverter having a rated current of the switching element equal to or slightly larger than the rated current of the inverter is used. In other words, the current flowing through the switching element for a short period of time is increased by setting the inverter current limit to 1.5 to 3.0 times the inverter rated current only for a short time after power recovery from an instantaneous power failure. The present invention can be applied when there is no problem even if the current is exceeded. This also makes it possible to quickly return the chamber internal pressure to the original pressure due to the rapid increase in the rotation speed of the vacuum pump after power recovery.

  The present invention can be applied not only when a power failure occurs in a short time of about 1 second or less, but also when a short-time voltage drop of about 1 second or less occurs.

  Although the embodiment of the present invention has been described so far, the present invention is not limited to the above-described embodiment, and it is needless to say that the present invention may be implemented in various different forms within the scope of the technical idea.

DESCRIPTION OF SYMBOLS 1 Dry vacuum pump 2 Motor 3 Motor driver 4 Control apparatus 5 Chamber 6 Breaker 7 AC power supply 10 Converter 11 Inverter 12 Driver control part C1 Capacitor S1-S6 Switching element

Claims (8)

A dry vacuum pump,
A motor for driving the dry vacuum pump;
An inverter for supplying AC power of variable frequency to the motor to control the rotational speed of the motor;
A control device for controlling the inverter,
The control device has a function of detecting a power failure,
The control device controls the inverter so that the inverter supplies a current 1.5 to 3.0 times the rated current of the inverter to the motor after the power is restored after a power failure. .   The said control apparatus controls the said inverter so that the said inverter supplies the electric current below an inverter rated current to the motor, when the speed | rate of the said dry vacuum pump returns to predetermined speed after a power recovery. The dry vacuum pump device according to 1.   The dry vacuum pump device according to claim 1, wherein the rated current of the switching element of the inverter is 1.5 to 3.0 times the rated current of the inverter. In a control method of a dry vacuum pump apparatus comprising: a dry vacuum pump; a motor that drives the dry vacuum pump; and an inverter that supplies AC power of variable frequency to the motor and controls a rotation speed of the motor.
A control method for a dry vacuum pump device, comprising: controlling the inverter so that the inverter supplies a current 1.5 to 3.0 times the rated current of the inverter to the motor after power is restored from a power failure.   5. The dry operation according to claim 4, wherein when the speed of the dry vacuum pump returns to a predetermined speed after the power recovery, the inverter controls the inverter so as to supply a current equal to or lower than an inverter rated current to the motor. Control method of vacuum pump device.   The method for controlling a dry vacuum pump device according to claim 4, wherein the rated current of the switching element of the inverter is 1.5 to 3.0 times the rated current of the inverter. A control program for a dry vacuum pump device comprising: a dry vacuum pump; a motor that drives the dry vacuum pump; and an inverter that supplies AC power of a variable frequency to the motor and controls a rotation speed of the motor,
According to the control program, the dry vacuum pump apparatus controls the inverter so that the inverter supplies a current of 1.5 to 3.0 times the rated current of the inverter to the motor after power is restored from a power failure. A control program for a dry vacuum pump device.   According to the control program, the dry vacuum pump device controls the inverter so that when the speed of the dry vacuum pump returns to a predetermined speed after the power recovery, the inverter supplies a current equal to or lower than the rated inverter current to the motor. The control program of the dry vacuum pump apparatus according to claim 7, wherein

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