JP2017140759A - Liquid jet head, and liquid jet head unit - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a liquid jet head, and a liquid jet head unit which can suppress intrusion of moisture in a space sensitive to humidity such as a piezoelectric element housing space for housing a piezoelectric element.SOLUTION: A liquid jet head (3) includes a nozzle (24) opened on a nozzle surface (25), and a liquid flow channel (26) communicating with the nozzle (24), and jets liquid from the nozzle (24) by driving a drive element (32). The liquid jet head includes first spaces (47a, 47b)isolated from the liquid flow channel (26), and second spaces (56a, 56b) which are isolated from the liquid flow channel (26) and are easier for moisture to intrude from the liquid flow channel (26) than the first spaces (47a, 47b). First atmosphere open passages (59a, 59b) for opening the first spaces (47a, 47b) to an atmosphere have higher flow channel resistance than that of second atmosphere open passages (60a, 60b) for opening the second spaces (56a, 56b) to the atmosphere.SELECTED DRAWING: Figure 6

Description

  The present invention relates to a liquid ejecting head that ejects a liquid from a nozzle by driving a driving element such as a piezoelectric element, and a liquid ejecting head unit including a plurality of the liquid ejecting heads.

  As a liquid ejecting apparatus equipped with a liquid ejecting head, for example, there is an image recording apparatus such as an ink jet printer or an ink jet plotter, but recently, a very small amount of liquid can be accurately landed on a predetermined position. It is also applied to various manufacturing equipments. For example, a display manufacturing apparatus for manufacturing a color filter such as a liquid crystal display, an electrode forming apparatus for forming an electrode such as an organic EL (Electro Luminescence) display or FED (surface emitting display), and a chip for manufacturing a biochip (biochemical element) Applied to manufacturing equipment. The recording head for the image recording apparatus ejects liquid ink, and the color material ejecting head for the display manufacturing apparatus ejects solutions of R (Red), G (Green), and B (Blue) color materials. The electrode material ejecting head for the electrode forming apparatus ejects a liquid electrode material, and the bioorganic matter ejecting head for the chip manufacturing apparatus ejects a bioorganic solution.

  The above-described liquid ejecting head includes a plurality of nozzles, a pressure chamber formed for each nozzle, a common liquid chamber (also referred to as a reservoir or a manifold) that supplies liquid to each pressure chamber, and a pressure fluctuation in the liquid in each pressure chamber. A drive element such as a piezoelectric element for generating the above is provided. A part of the surface defining the common liquid chamber is formed of an elastic film and is configured to absorb internal pressure fluctuations. A compliance space formed on the opposite side of the common liquid chamber across the membrane is open to the atmosphere through a flow path with high flow resistance. In addition, the piezoelectric element accommodation space for accommodating the drive element is also open to the atmosphere so that the humidity is comparable to that of the outside air (for example, Patent Document 1).

  Further, from the viewpoint of miniaturization, a configuration is also adopted in which the compliance space and the piezoelectric element housing space are connected by a flow path so as to be released to the atmosphere collectively. For example, in the conventional liquid jet head 91 shown in FIG. 19, two compliance spaces 92a and 92b and two piezoelectric element accommodation spaces 93a and 93b are opened to the atmosphere through one atmosphere opening 94 formed on the upper surface. ing. Specifically, one side of the compliance space 92a and one side of the piezoelectric element housing space 93a corresponding to the nozzle row on one side (the right side in FIG. 19) of the two nozzle rows are arranged inside the liquid jet head 91. It communicates with the compliance space 92b on the other side corresponding to the nozzle row on the other side (left side in FIG. 19) through the flow path 95. In addition, the piezoelectric element housing space 93b on the other side corresponding to the nozzle row on the other side is also connected to the internal flow path 95 and communicated with the compliance space 92b on the other side. The other compliance space 92 b is opened to the atmosphere via a common atmosphere opening path 96 communicating with the atmosphere opening 94. As a result, the two compliance spaces 92a and 92b and the two piezoelectric element housing spaces 93a and 93b are opened to the atmosphere from the atmosphere opening port 94 common to them.

Japanese Patent Laid-Open No. 2005-131888

  Meanwhile, in the conventional liquid ejecting head 91, there is a possibility that moisture (or moisture) that has permeated the film and entered the compliance spaces 92a and 92b from the common liquid chamber may enter the piezoelectric element housing spaces 93a and 93b. It was. In particular, the compliance space 92 a on one side is communicated with the common atmosphere opening path 96 via the internal flow path 95, so that moisture is difficult to escape to the outside of the liquid jet head 91. For this reason, moisture easily enters the piezoelectric element housing space 93a on one side. When moisture enters the piezoelectric element accommodation space in this way and the humidity in the piezoelectric element accommodation space increases, moisture adheres to the piezoelectric element accommodated in the piezoelectric element accommodation space due to the occurrence of condensation, etc. There was a possibility that the element was destroyed. In addition, as disclosed in Patent Document 1, it is conceivable that the compliance space and the piezoelectric element housing space are individually opened to the atmosphere. However, such a configuration is not sufficient. In other words, since the compliance space and the sealing space are open to the atmosphere in the casing of the liquid ejecting apparatus that is likely to be a humid environment, even if these are individually opened to the atmosphere, moisture sufficiently penetrates into the piezoelectric element housing space. There is a possibility that it cannot be suppressed.

  The present invention has been made in view of such circumstances, and an object of the present invention is to provide a liquid ejecting head that can suppress moisture from entering a moisture-sensitive space such as a piezoelectric element housing space in which a piezoelectric element is housed. And providing a liquid ejecting head unit.

The liquid jet head of the present invention has been proposed in order to achieve the above-described object, and includes a nozzle opened in a nozzle surface and a liquid flow path communicating with the nozzle, and a driving element is driven to drive the liquid jet head. A liquid ejecting head for ejecting liquid from a nozzle,
A first space isolated from the liquid flow path;
A second space that is isolated from the liquid flow path and that allows moisture to enter from the liquid flow path more easily than the first space;
The first atmosphere opening path that opens the first space to the atmosphere has a higher flow path resistance than the second atmosphere opening path that opens the second space to the atmosphere.

  According to the present invention, entry of moisture (or moisture) into the first space can be suppressed. For example, if the first space is a space in which the drive element is accommodated, the adhesion of moisture to the drive element can be suppressed, and consequently the destruction of the drive element can be suppressed.

In the above configuration, the first atmosphere opening path and the second atmosphere opening path are formed in common from the atmosphere opening port communicating with the atmosphere to a branch on the way,
It is desirable that the first branch channel from the branch to the first space has a higher channel resistance than the second branch channel from the branch to the second space.

  According to this configuration, it is possible to suppress moisture from entering the first space from the second space. In addition, since the first atmosphere opening path and the second atmosphere opening path are formed in common from the atmosphere opening to the branch, compared with the case where the first atmosphere opening path and the second atmosphere opening path are separately opened to the atmosphere. The configuration of the liquid jet head can be simplified. In addition, a decrease in strength of the liquid ejecting head can be suppressed as compared with a configuration in which the first atmosphere opening path and the second atmosphere opening path are separately opened to the atmosphere.

  In the above configuration, it is preferable that the first branch channel has a partial channel that extends from the first space along the nozzle surface.

  According to this configuration, even if dew condensation occurs in the first atmosphere open path, this dew condensation can be prevented from entering the first space.

  Furthermore, in the above configuration, it is preferable that at least a part of the first branch channel adopts a configuration formed between the first space and the nozzle surface.

  According to this configuration, even if dew condensation occurs in the first atmosphere open path, it is possible to further suppress the dew penetration into the first space.

Further, in the above configuration, a first liquid channel communicating with the first nozzle group composed of a plurality of nozzles;
A second liquid channel communicating with a second nozzle group comprising a plurality of nozzles formed apart from the first nozzle group;
A first drive element group comprising drive elements provided for each nozzle of the first nozzle group;
A second drive element group comprising drive elements provided for each nozzle of the second nozzle group;
A first space for a first drive element group that is a kind of the first space that houses the first drive element group;
A first space for a second drive element group that is a kind of the first space that houses the second drive element group;
A first liquid channel side second space that is a kind of the second space in which moisture easily enters from the first liquid channel than the first space for the first drive element group;
A second liquid channel side second space that is a kind of the second space in which moisture easily enters from the second liquid channel than the second space for the second drive element group,
A first drive element group side first air release path that opens the first space for the first drive element group to the atmosphere, and a second drive element group side first atmosphere that opens the first space for the second drive element group to the atmosphere. The open path is communicated with the atmosphere through a first space air opening common to the first drive element group side first atmosphere open path and the second drive element group side first atmosphere open path,
The first liquid flow path side second air release path that opens the first liquid flow path side second space to the atmosphere and the second liquid flow path side second air open path that opens the second liquid flow path side second space to the atmosphere It is desirable to adopt a configuration in which the atmosphere communicates with the atmosphere via the second space atmosphere opening port common to the first liquid channel side second atmosphere opening path and the second liquid channel side second atmosphere opening path. .

  According to this configuration, the first space for the first drive element group and the first space for the second drive element group, the first liquid channel side second space, and the second liquid channel side second space are the liquid jet head. In the first liquid channel side second space and the second liquid channel side second space to the first space for the first drive element group and the first space for the second drive element group (or Infiltration of moisture) can be suppressed. Thereby, adhesion of moisture to the drive element can be suppressed, and as a result, destruction of the drive element can be suppressed. In addition, the first drive element group side first atmospheric open path, the second drive element group side first atmospheric open path, the first liquid flow path side second atmospheric open path, and the second liquid flow path side second atmospheric open path are provided. Compared with a configuration in which the atmosphere is separately opened to the atmosphere, a decrease in strength of the liquid jet head can be suppressed.

Further, in the above configuration, the first nozzle group and the second nozzle group are arranged along a first direction,
It is desirable to adopt a configuration in which the first space air opening and the second space air opening are formed apart from each other in the first direction.

  According to this configuration, it is possible to suppress a decrease in the strength of the liquid jet head. Further, the first space for the first drive element group and the second space from the second space on the first liquid flow path side and the second space on the second liquid flow path side via the second space air opening and the first space air opening. It is possible to suppress moisture from entering the first space for the two drive element groups.

Further, in each of the above configurations, the first drive element group side first air release path extends from the first drive element group first space along the nozzle surface to the first drive element group side partial flow path. With
The second drive element group side first air release path employs a configuration including a second drive element group side partial flow path extending along the nozzle surface from the second space for the second drive element group. It is desirable.

  According to this configuration, even if dew condensation occurs in the first air release path on the first drive element group side and in the first air release path on the second drive element group side, this dew condensation is first for the first drive element group. Intrusion into the space and the first space for the second drive element group can be suppressed.

Further, in each of the above-described configurations, at least a part of the first drive element group side first air release path is formed between the first drive element group first space and the nozzle surface,
It is desirable that at least a part of the second drive element group side first air release path adopts a configuration formed between the second drive element group first space and the nozzle surface.

  According to this configuration, even if dew condensation occurs in the first air release path on the first drive element group side and in the first air release path on the second drive element group side, this dew condensation is first for the first drive element group. Intrusion into the space and the first space for the second drive element group can be further suppressed.

The liquid jet head unit of the present invention is a liquid jet head unit including a plurality of liquid jet heads having the above-described configurations,
In the adjacent liquid ejecting heads, an interval between the atmosphere opening port in which the second space of one liquid ejecting head communicates with the atmosphere and the atmosphere opening port in which the second space of the other liquid ejecting head communicates with the atmosphere is: The first space in the same liquid ejecting head is characterized by being narrower than an interval between the atmosphere opening port that communicates with the atmosphere and the atmosphere space opening port that communicates with the second space.

  According to this configuration, it is possible to suppress moisture from entering the first space from the second space via the atmosphere opening for the second space and the atmosphere opening for the first space.

FIG. 3 is a perspective view illustrating a configuration of a printer. FIG. 3 is a plan view of a compliance substrate of the recording head as viewed from above. It is the sectional view on the AA line in FIG. It is the BB sectional view taken on the line in FIG. It is CC sectional view taken on the line in FIG. FIG. 3 is a perspective view that passes through the inside of the recording head. It is sectional drawing of the recording head in 2nd Embodiment. FIG. 10 is a plan view of a compliance substrate of a recording head according to a third embodiment as viewed from above. It is the DD sectional view taken on the line in FIG. It is the EE sectional view taken on the line in FIG. It is the FF sectional view taken on the line in FIG. It is the top view which looked at the compliance board | substrate of the recording head in 4th Embodiment from the upper surface. It is the top view which looked at the compliance board | substrate of the recording head in 5th Embodiment from the upper surface. It is the GG sectional view taken on the line in FIG. It is the HH sectional view taken on the line in FIG. It is a schematic diagram of the recording head unit in 6th Embodiment. FIG. 10 is a schematic diagram of a recording head unit in a seventh embodiment. It is a schematic diagram of the recording head unit in 8th Embodiment. FIG. 6 is a perspective view that penetrates the inside of a conventional liquid jet head.

  DESCRIPTION OF EMBODIMENTS Hereinafter, embodiments for carrying out the present invention will be described with reference to the accompanying drawings. Note that, in the embodiments described below, various limitations are made as preferred specific examples of the present invention. However, the scope of the present invention is not limited to the following description unless otherwise specified. However, the present invention is not limited to this embodiment. In the following description, an ink jet recording head (hereinafter referred to as recording head) 3 mounted on an ink jet printer (hereinafter referred to as printer) 1 which is a kind of liquid ejecting apparatus is taken as an example of the liquid ejecting head of the present invention. Do it.

  The printer 1 is an apparatus that records an image or the like by ejecting ink (a type of liquid) onto the surface of a recording medium 2 (a type of landing target) such as a recording paper. The printer 1 includes a recording head 3, a carriage 4 to which the recording head 3 is attached, a carriage moving mechanism 5 that moves the carriage 4 in the main scanning direction, a conveyance mechanism 6 that transfers the recording medium 2 in the sub scanning direction, and the like. Yes. Here, the ink is stored in an ink cartridge 7 as a liquid supply source. The ink cartridge 7 is detachably attached to the recording head 3. It is also possible to employ a configuration in which the ink cartridge is disposed on the main body side of the printer and supplied from the ink cartridge to the recording head through the ink supply tube.

  The carriage moving mechanism 5 includes a timing belt 8. The timing belt 8 is driven by a pulse motor 9 such as a DC motor. Therefore, when the pulse motor 9 operates, the carriage 4 is guided by the guide rod 10 installed on the printer 1 and reciprocates in the main scanning direction (width direction of the recording medium 2). The position of the carriage 4 in the main scanning direction is detected by a linear encoder (not shown) which is a kind of position information detecting means. The linear encoder transmits the detection signal, that is, the encoder pulse (a kind of position information) to the control unit of the printer 1.

  Next, the recording head 3 will be described. FIG. 2 is a plan view of the compliance substrate 37 of the recording head 3 as viewed from above. 3 is a cross-sectional view taken along line AA, FIG. 4 is a cross-sectional view taken along line BB, and FIG. 5 is a cross-sectional view taken along line CC. FIG. 6 is a perspective view that penetrates the inside of the recording head 3 for explaining the air release paths of the piezoelectric element array housing spaces 46a and 46b and the compliance spaces 56a and 56b. As shown in FIG. 3 and the like, the recording head 3 in the present embodiment includes a nozzle plate 23, a flow path substrate 29, a piezoelectric element 32 (a kind of actuator), a sealing plate 33, a compliance substrate 37, and the like laminated. In the state, it is attached to the head case 19. For convenience, the stacking direction of each member will be described as the vertical direction.

  The flow path substrate 29 in the present embodiment is a silicon substrate (for example, a silicon single crystal substrate) that is long along the nozzle row direction (corresponding to the first direction in the present invention). As shown in FIG. 3 and the like, two elongated communication portions 27 are formed in the flow path substrate 29 along the longitudinal direction of the flow path substrate 29. The communication portion 27 is in communication with the through portion 34 of the sealing plate 33 to form the common liquid chamber 26. A plurality of pressure chambers 30 are juxtaposed along the nozzle row direction in a region sandwiched between the two communicating portions 27 of the flow path substrate 29. The rows of pressure chambers 30 are formed in two rows corresponding to the two communication portions 27. Each pressure chamber 30 communicates with the communication portion 27 via a supply path 28 formed with a narrower width than the pressure chamber 30. It should be noted that the two rows of pressure chambers 30 formed in a row correspond to the arrangement of the nozzles 24 and are displaced from each other by a half pitch in the nozzle row direction.

  The nozzle plate 23 is fixed to the lower surface (surface opposite to the sealing plate 33) of the flow path substrate 29 with an adhesive or the like. The nozzle plate 23 is made of a silicon substrate (for example, a silicon single crystal substrate), and a plurality of nozzles 24 communicating with the pressure chamber 30 are formed in each pressure chamber 30. That is, a plurality of nozzles 24 are provided in the nozzle plate 23 in a straight line shape (in other words, in a row) along the longitudinal direction of the nozzle plate 23. The plurality of nozzles 24 arranged in parallel are provided at equal intervals from the nozzle 24 on one end side to the nozzle 24 on the other end side at a pitch corresponding to the dot formation density. In the present embodiment, two rows of nozzles 24 spaced from each other are formed in two rows corresponding to the rows of pressure chambers 30 formed in two rows. Note that the nozzles 24 included in a row of nozzles 24 on one side (right side in FIG. 3 and the like) (hereinafter referred to as the first nozzle row 44a) and the rows of nozzles 24 on the other side (left side in FIG. 3 and the like) (hereinafter referred to as “first nozzle row 44a”). The nozzles 24 included in the second nozzle row 44b) are alternately arranged with their positions shifted in the nozzle row direction. That is, the first nozzle row 44a and the second nozzle row 44b are arranged so as to be shifted from each other by a half pitch in the nozzle row direction. The first nozzle row 44a corresponds to the first nozzle group in the present invention, and the second nozzle row 44b corresponds to the second nozzle group in the present invention. Further, the lower surface of the nozzle plate 23 (the side opposite to the flow path substrate 29) is a nozzle surface 25 in which the nozzles 24 are opened.

A diaphragm 31 is laminated on the upper surface of the flow path substrate 29 (the surface opposite to the nozzle plate 23). The diaphragm 31 includes, for example, an elastic film made of silicon dioxide (SiO ₂ ) formed on the upper surface of the flow path substrate 29 (that is, the surface opposite to the sealing plate 33 side), and the elastic film on the elastic film. And an insulating film made of zirconium dioxide (ZrO ₂ ). The diaphragm 31 seals the upper opening of the space to be the pressure chamber 30. In other words, the upper surface of the pressure chamber 30 is partitioned by the diaphragm 31. A portion of the diaphragm 31 corresponding to the pressure chamber 30 (specifically, an upper opening of the pressure chamber 30) functions as a displacement portion that displaces in a direction away from or close to the nozzle 24 as the piezoelectric element 32 is bent and deformed. To do. Note that an area of the diaphragm 31 corresponding to the communication portion 27 is an opening from which the diaphragm 31 is removed.

  A region corresponding to each pressure chamber 30 on the upper surface of the diaphragm 31 (specifically, the insulating film of the diaphragm 31) (that is, the surface of the diaphragm 31 opposite to the flow path substrate 29) is a kind of drive element. Each piezoelectric element 32 is laminated. The piezoelectric element 32 in the present embodiment is a so-called flexural mode piezoelectric element. A plurality of the piezoelectric elements 32 are arranged in parallel along the nozzle row direction corresponding to each nozzle 24. That is, for each first piezoelectric element row 45a (corresponding to the first drive element group in the present invention) composed of the piezoelectric elements 32 provided for each nozzle 24 of the first nozzle row 44a, and for each nozzle 24 of the second nozzle row 44b. A second piezoelectric element array 45b (corresponding to the second drive element group in the present invention) composed of the provided piezoelectric elements 32 is formed. Each piezoelectric element 32 is formed by sequentially laminating, for example, a lower electrode layer serving as an individual electrode, a piezoelectric layer, and an upper electrode layer serving as a common electrode in order from the vibration plate 31. Note that the lower electrode layer can be a common electrode and the upper electrode layer can be an individual electrode depending on the convenience of the drive circuit and wiring. The piezoelectric element 32 configured as described above bends and deforms in a direction away from or close to the nozzle 24 when an electric field corresponding to the potential difference between both electrodes is applied between the lower electrode layer and the upper electrode layer. A lead wiring (not shown) extends from each piezoelectric element 32 toward a region on the diaphragm 31 between the first piezoelectric element array 45a and the second piezoelectric element array 45b. An end portion of the lead wiring opposite to the piezoelectric element 32 is a terminal exposed in the connection space 36 and is connected to a terminal (not shown) of the flexible substrate 35 in the connection space 36.

  A sealing plate 33 made of a silicon substrate (for example, a silicon single crystal substrate) is bonded to the upper surface of the vibration plate 31. The sealing plate 33 is formed with a penetrating portion 34 to be the common liquid chamber 26, piezoelectric element array accommodating spaces 46a and 46b (corresponding to the first space in the present invention) isolated from the penetrating portion 34, and the like. Has been. The penetrating part 34 is formed in a state penetrating in the thickness direction at a position corresponding to the communicating part 27. The penetrating portion 34 in the present embodiment is formed long along the nozzle row direction. Note that the width (specifically, the dimension in the direction orthogonal to the nozzle row direction) of the upper part of the penetrating part 34 (in other words, the part on the head case 19 side) is lower than the penetrating part 34 (in other words, on the flow path substrate 29 side). The width is larger than the width of the portion. That is, the inner portion (specifically, the central side in the direction orthogonal to the nozzle row direction) of the upper portion of the through portion 34 is not penetrated in the thickness direction of the sealing plate 33 and the plate from the upper surface of the sealing plate 33 is formed. It is formed in a state of being depressed halfway in the thickness direction. A liquid introduction path 21 described later communicates with a portion recessed from the upper surface of the through portion 34. Further, two penetrating portions 34 in the present embodiment are provided corresponding to the two communicating portions 27. The lower end of each penetration part 34 is in communication with the communication part 27 and constitutes a common liquid chamber 26. That is, the penetrating part 34 is a space that forms the upper part of the common liquid chamber 26.

  The piezoelectric element row accommodating spaces 46a and 46b are formed in two rows corresponding to the rows of the piezoelectric elements 32 formed in two rows. That is, it is a kind of the first space in the present invention that accommodates the first piezoelectric element array housing space 46a that is a kind of the first space in the present invention that accommodates the first piezoelectric element array 45a and the second piezoelectric element array 45b. A second piezoelectric element array accommodating space 46b is formed. As shown in FIG. 2, the first piezoelectric element row housing space 46 a and the second piezoelectric element row housing space 46 b are formed long along the nozzle row direction. The first piezoelectric element array housing space 46a and the second piezoelectric element array housing space 46b are recessed to a size that does not hinder the displacement of the piezoelectric element 32 from the lower surface of the sealing plate 33 to the middle of the plate thickness direction. It is formed in a state. In this embodiment, a part of the first piezoelectric element array housing space 46 a and a part of the second piezoelectric element array housing space 46 b are recessed portions of the corresponding through portions 34 when viewed from the top surface of the sealing plate 33. It is formed to overlap. Further, a connection space 36 in which the sealing plate 33 is removed in the plate thickness direction is formed between the first piezoelectric element row housing space 46a and the second piezoelectric element row housing space 46b. The connection space 36 communicates with an insertion space 20 described later, and an end portion of the flexible substrate 35 inserted into the insertion space 20 is disposed therein. The end of the flexible substrate 35 is connected to the terminal on the diaphragm 31 exposed in the connection space 36.

  Further, as shown in FIGS. 2, 4 and 5, the sealing plate 33 has a first piezoelectric element corresponding to the first branch channel in the present invention for opening the first piezoelectric element array housing space 46a to the atmosphere. A second piezoelectric element row-side first branch passage 47b corresponding to the first branch passage in the present invention for opening the row-side first branch passage 47a and the second piezoelectric element row housing space 46b to the atmosphere is formed. . The first piezoelectric element row-side first branch channel 47a and the second piezoelectric element row-side first branch channel 47b extend along the nozzle surface 25 (horizontal plane in the present embodiment) from the piezoelectric element row housing spaces 46a and 46b, respectively. The horizontal flow path 48 (corresponding to the partial flow path in the present invention) intersects the nozzle surface 25 from the end of the horizontal flow path 48 opposite to the piezoelectric element array housing spaces 46a and 46b (in this embodiment). And a vertical flow path 49 extending along a (perpendicular) direction. As shown in FIG. 5, the horizontal flow path 48 is formed in a state where the open side of the groove formed on the lower surface of the sealing plate 33 is sealed with the flow path substrate 29. Further, as shown in FIG. 2, the horizontal flow path 48 extends outward in the nozzle row direction from the other end (left side in FIG. 2) of the piezoelectric element row housing spaces 46a and 46b in the nozzle row direction. Then, after being bent toward one side in the nozzle row direction (right side in FIG. 2) and outward in the direction orthogonal to the nozzle row direction, it is obliquely extended to a position away from the piezoelectric element row housing spaces 46a and 46. Be present. As shown in FIG. 4, the vertical channel 49 is formed in a state of penetrating the sealing plate 33 in the thickness direction, and the upper end thereof communicates with corresponding common channels 51 a and 51 b (described later).

  A compliance substrate 37 is bonded to the upper surface of the sealing plate 33. The compliance substrate 37 is a substrate that seals the upper surface of the communication portion 27 to partition the common liquid chamber 26, and includes a flexible sealing film 39 and a fixed substrate 38 made of a hard member such as metal. It is made up of layers. The compliance substrate 37 in this embodiment is bonded to the upper surface of the sealing plate 33 with the sealing film 39 disposed below (that is, on the sealing plate 33 side). As shown in FIG. 3, an opening (not shown) that allows the insertion space 20 and the connection space 36 to communicate with each other is formed at a position corresponding to the insertion space 20 in the compliance substrate 37. ing. As shown in FIGS. 2 and 3, a liquid introduction port 53 that connects the liquid introduction path 21 and the common liquid chamber 26 penetrates in the thickness direction at a position corresponding to the liquid introduction path 21 in the compliance substrate 37. It is formed in the state. As shown in FIG. 2, the liquid inlet 53 in the present embodiment is disposed at a position overlapping the piezoelectric element array housing spaces 46 a and 46 b in plan view. Further, as shown in FIGS. 2 and 4, a communication port 54 for communicating the vertical flow path 49 and the common flow paths 51a and 51b is provided in the thickness direction at a position corresponding to the vertical flow path 49 in the compliance substrate 37. It is formed in a penetrating state.

  Then, in the region of the compliance substrate 37 facing the common liquid chamber 26, the region other than the periphery of the liquid inlet 53 is only the sealing film 39 from which the fixed substrate 38 is removed. That is, the portion from which the fixed substrate 38 is removed is a facing space 40 that faces the common liquid chamber 26 with the sealing film 39 interposed therebetween. The facing space 40 communicates with a case space 22 described later and constitutes compliance spaces 56a and 56b (corresponding to the second space in the present invention). The portion consisting only of the sealing film 39 functions as a compliance portion that absorbs the pressure fluctuation of the ink in the common liquid chamber 26. In addition, as shown in FIG. 2, two portions made only of the sealing film 39 are formed corresponding to the two common liquid chambers 26, and each is formed long in the nozzle row direction.

  As shown in FIG. 3, the head case 19 is bonded to the upper surface (that is, the fixed substrate 38) of the compliance substrate 37. The head case 19 in the present embodiment is a box-shaped member made of synthetic resin. An insertion space 20 that is a long space along the nozzle row direction is formed at the center of the head case 19. The insertion space 20 is a space through which the flexible substrate 35 is inserted, and is formed so as to penetrate the head case 19 in the plate thickness direction. A liquid introduction path 21 through which ink introduced from the ink cartridge 7 flows is formed inside the head case 19. The lower end of the liquid introduction path 21 is connected to the common liquid chamber 26 (specifically, the through portion 34) via the liquid introduction port 53. In the present embodiment, corresponding to the two common liquid chambers 26, the liquid introduction paths 21 are formed on both sides in the direction orthogonal to the nozzle row direction with the insertion space 20 therebetween. Furthermore, as shown in FIG. 4, the position facing the upper end opening of the vertical flow path 49 of the first branch flow paths 47 a and 47 b in the head case 19, that is, the direction orthogonal to the nozzle row direction from the area facing the common liquid chamber 26. Common flow paths 51a and 51b are respectively formed at positions deviated from each other. In short, the first piezoelectric element array side common flow path 51a communicating with the first piezoelectric element array side first branch path 47a and the second piezoelectric element array side common flow communicating with the second piezoelectric element array side first branch path 47b. The passage 51b is formed so as to penetrate in the plate thickness direction. As shown in FIG. 6 and the like, these common flow paths 51a and 51b are each opened on the upper surface of the head case 19, and communicate with the atmosphere (specifically, the atmosphere in the casing of the printer 1) (in other words, open to the atmosphere). ) Hereinafter, the opening 58a at the upper end of the first piezoelectric element array side common flow path 51a is referred to as a first piezoelectric element array side common flow path 51a, and the opening 58b at the upper end of the second piezoelectric element array side common flow path 51b is defined as the second opening. This is referred to as a piezoelectric element array side air opening 58b. The first piezoelectric element array side atmosphere opening 58a and the second piezoelectric element array side atmosphere opening 58b correspond to the atmosphere opening in the present invention.

  As shown in FIG. 3 and the like, a portion of the lower surface of the head case 19 corresponding to the common liquid chamber 26 has a case space 22 having a depth that does not hinder flexible deformation of the sealing film 39 from the lower surface. It is formed in a recessed state. A portion of the case space 22 that faces the facing space 40 forms compliance spaces 56 a and 56 b together with the facing space 40. In the present embodiment, two compliance spaces 56 a and 56 b are formed corresponding to the two common liquid chambers 26. Specifically, the first piezoelectric element array side compliance space 56a which is a kind of the second space in the present invention, which is isolated from the common liquid chamber 26 communicating with the first nozzle array 44a by the sealing film 39, and the sealing A common liquid chamber 26 communicating with the second nozzle row 44b by the film 39 and a second piezoelectric element row side compliance space 56b which is a kind of the second space in the present invention are formed. Here, the compliance spaces 56a and 56b are isolated from the common liquid chamber 26 by the sealing film 39. However, the sealing film 39 easily permeates moisture from the common liquid chamber 26, and thus tends to be humid. . In short, the compliance spaces 56 a and 56 b are more likely to allow moisture to enter from the common liquid chamber 26 than the piezoelectric element array housing spaces 46 a and 46 b defined by the hard sealing plate 33 and the flow path substrate 29.

  Further, the case space 22 in the present embodiment extends from the portion that becomes the compliance spaces 56 a and 56 b facing the facing space 40 to the outside of the facing space 40 in a direction orthogonal to the nozzle row direction. That is, as shown in FIGS. 3 and 4, the width of the case space 22 (specifically, the dimension in the direction perpendicular to the nozzle row direction) is formed wider than the width of the common liquid chamber 26 (that is, the facing space 40). Has been. A vertical flow path 49 of the first branch flow paths 47a and 47b is communicated with the end portion of the case space 22 that extends outward from the facing space 40 through the communication port 54. In addition, common flow paths 51 a and 51 b communicate with the upper surface of the case space 22 that faces the communication port 54. In other words, the vertical flow path 49 of the first branch flow paths 47a and 47b and the common flow paths 51a and 51b face up and down at the end of the portion of the case space 22 that extends outside the facing space 40. It is communicated in a state. Then, the space from the portion where the vertical flow path 49 and the common flow paths 51a and 51b are communicated to the compliance spaces 56a and 56b forms the second branch flow paths 57a and 57b. That is, on the lower surface of the head case 19, the first piezoelectric element array side second branch channel 57a communicating with the first piezoelectric element array side compliance space 56a and the second piezoelectric element communicating with the second piezoelectric element array side compliance space 56b are provided. An element array side second branch channel 57b is formed. Since these second branch channels 57a and 57b have a larger channel area and shorter channel lengths than the first branch channels 47a and 47b, the second branch channels 57a and 57b have a channel for gas more than the first branch channels 47a and 47b. The resistance is low (or small). In other words, the first branch channels 47a and 47b have higher (or higher) channel resistance to the gas than the second branch channels 57a and 57b.

  In this way, the first piezoelectric element array side compliance space 56a is a series of flow paths (hereinafter referred to as first piezoelectric elements) including the first piezoelectric element array side second branch flow path 57a and the first piezoelectric element array side common flow path 51a. Through the first piezoelectric element array side air release port 58a through the array side second atmosphere open path 60a). Similarly, the second piezoelectric element array side compliance space 56b is a series of flow paths (hereinafter referred to as second piezoelectric element arrays) including a second piezoelectric element array side second branch flow path 57b and a second piezoelectric element array side common flow path 51b. Through the second piezoelectric element array side atmospheric opening 58b through the second atmospheric opening path 60b). That is, the first piezoelectric element array side second atmosphere opening path 60a and the second piezoelectric element array side second atmosphere opening path 60b correspond to the second atmosphere opening path in the present invention. On the other hand, the first piezoelectric element array accommodating space 46a is a series of flow paths (hereinafter referred to as first piezoelectric element array side first flow paths) including a first piezoelectric element array side first diversion channel 47a and a first piezoelectric element array side common flow path 51a. Through the first piezoelectric element array side air opening 58a through the air opening passage 59a). Similarly, the second piezoelectric element array housing space 46b is a series of flow paths (hereinafter referred to as the second piezoelectric element array side) composed of the second piezoelectric element array side first branch flow path 47b and the second piezoelectric element array side common flow path 51b. Through the second piezoelectric element array side atmosphere opening 58b through the first atmosphere opening path 59b). That is, the first piezoelectric element array side first atmosphere opening path 59a and the second piezoelectric element array side first atmosphere opening path 59b correspond to the first atmosphere opening path in the present invention.

  Here, the first piezoelectric element array side first atmosphere opening path 59a and the first piezoelectric element array side second atmosphere opening path 60a are branched on the way from the first piezoelectric element array side atmosphere opening 58a communicating with the atmosphere ( Specifically, the first piezoelectric element array side first branch channel 47a and the first piezoelectric element array side common channel 51a of the case space 22 are formed in common, and the first piezoelectric element extends from this branch. The first piezoelectric element array side first split flow path 47a that is a flow path to the element array accommodation space 46a is a first piezoelectric element array side second flow path that is a flow path from the same branch to the first piezoelectric element array side compliance space 56a. Since the flow path resistance is higher than that of the branch flow path 57a, the first piezoelectric element array side first atmospheric open path 59a has a higher flow path resistance than the first piezoelectric element array side second atmospheric open path 60a. Yes. Similarly, the second piezoelectric element array side first atmosphere opening path 59b and the second piezoelectric element array side second atmosphere opening path 60b are provided on the way from the second piezoelectric element array side atmosphere opening opening 58b communicating with the atmosphere. A branch (specifically, a portion where the second piezoelectric element array side first flow path 47b and the second piezoelectric element array side common flow path 51b of the case space 22 communicate with each other) is formed in common. The second piezoelectric element array side first split flow path 47b, which is a flow path to the two piezoelectric element array accommodating spaces 46b, is a second piezoelectric element array side, which is a flow path from the same branch to the second piezoelectric element array side compliance space 56b. Since the flow path resistance is higher than that of the second branch flow path 57b, the second piezoelectric element array side first atmospheric open path 59b has a flow path resistance higher than that of the second piezoelectric element array side second atmospheric open path 60b. It has become.

  Thereby, the penetration | invasion of the water | moisture content (or moisture) from the compliance space 56a, 56b to the piezoelectric element row | line accommodation space 46a, 46b can be suppressed. In addition, it is possible to suppress moisture (or moisture) from entering the piezoelectric element array housing spaces 46a and 46b from within the housing of the printer 1 that is likely to become a humid environment. As a result, the adhesion of moisture to the piezoelectric element 32 can be suppressed, and as a result, the destruction of the piezoelectric element 32 can be suppressed. Further, in the present embodiment, the first piezoelectric element array side first atmosphere opening path 59a and the first piezoelectric element array side second atmosphere opening path 60a are shared from the first piezoelectric element array side atmosphere opening port 58a to the branch. Since it is formed, the configuration of the recording head 3 can be simplified as compared with the case where the first piezoelectric element array side first atmosphere opening path and the first piezoelectric element array side second atmosphere opening path are separately opened to the atmosphere. Further, compared with the configuration in which the first piezoelectric element array side first atmosphere opening path and the first piezoelectric element array side second atmosphere opening path are separately opened to the atmosphere, a decrease in strength of the head case 19 can be suppressed, and thus A decrease in strength of the recording head 3 can be suppressed. Further, since the second piezoelectric element array side first atmosphere opening path 59b and the second piezoelectric element array side second atmosphere opening path 60b are formed in common from the second piezoelectric element array side atmosphere opening 58b to the branch, The configuration of the recording head 3 can be simplified as compared with the case where the second piezoelectric element array side first atmosphere opening path and the second piezoelectric element array side second atmosphere opening path are separately opened to the atmosphere. Further, compared with the configuration in which the second piezoelectric element array side first atmosphere opening path and the second piezoelectric element array side second atmosphere opening path are separately opened to the atmosphere, a decrease in strength of the head case 19 can be suppressed, and thus A decrease in strength of the recording head 3 can be suppressed.

  By the way, when the first atmosphere opening path communicates above the piezoelectric element array housing space, there is a possibility that condensation generated in the first atmosphere opening path may drip and enter the piezoelectric element array housing space. However, in the present embodiment, the first branch flow paths 47a and 47b of the first atmospheric release paths 59a and 59b include the horizontal flow path 48 extending along the nozzle surface 25 from the piezoelectric element array housing spaces 46a and 46b. Even if dew condensation occurs in the first atmosphere opening paths 59a and 59b, the dew condensation can be prevented from entering the piezoelectric element array housing spaces 46a and 46b. As a result, moisture adhesion to the piezoelectric element 32 can be further suppressed, and as a result, destruction of the piezoelectric element 32 can be further suppressed.

  The recording head 3 configured as described above introduces ink from the ink cartridge 7 into the pressure chamber 30 via the liquid introduction path 21, the common liquid chamber 26, the individual communication path 28, and the like. In this state, if a drive signal from the control unit is supplied to the piezoelectric element 32 via the flexible substrate 35 or the like, the piezoelectric element 32 is driven and pressure fluctuation occurs in the ink in the pressure chamber 30. The recording head 3 ejects ink droplets from the nozzles 24 by utilizing this pressure fluctuation. A series of flow paths including the liquid introduction path 21, the common liquid chamber 26, the individual communication path 28, and the pressure chamber 30 correspond to the liquid flow path in the present invention.

  By the way, in the above-described first embodiment, the horizontal flow path 48 is connected to the side surfaces of the piezoelectric element array accommodating spaces 46a and 46b, but the present invention is not limited to this. For example, in the second embodiment shown in FIG. 7, the horizontal flow path 48 ′ that is a part of the first branch flow paths 47 a ′ and 47 b ′ is connected to the lower surface (that is, the bottom surface) of the piezoelectric element array housing spaces 46 a and 46 b. Has been. FIG. 7 is a cross-sectional view of the recording head 3 corresponding to a cross section taken along the line CC in the first embodiment.

  Specifically, the horizontal flow path 48 ′ in the present embodiment is formed in a groove shape on the upper surface of the flow path substrate 29 on which the diaphragm 31 is laminated. In short, the diaphragm 31 in an area corresponding to the horizontal flow path 48 ′ is removed, and the flow path substrate 29 in the area is formed to be recessed from the upper surface. The groove in which the flow path substrate 29 is recessed extends from a position overlapping the vertical flow path 49 ′ penetrating the sealing plate 33 to a position overlapping the piezoelectric element array housing spaces 46 a and 46 b. A horizontal flow path 48 ′ is formed by sealing the open side of the groove in which the flow path substrate 29 is recessed with a sealing plate 33. That is, the horizontal flow path 48 ′ in the present embodiment is formed in a state where the open side of the groove of the flow path substrate 29 is sealed with the sealing plate 33. As shown in FIG. 7, the end of the horizontal flow path 48 'opposite to the vertical flow path 49' is located below the piezoelectric element array accommodating spaces 46a and 46b, and at this position, the piezoelectric element array accommodating space. It is connected to the bottom surfaces of 46a and 46b. Thereby, even if dew condensation occurs in the first atmosphere open paths 59a 'and 59b', it is possible to further suppress the dew dripping and entering the piezoelectric element array housing spaces 46a and 46b. Since other configurations are the same as those in the first embodiment described above, description thereof is omitted. In the present embodiment, the horizontal flow path 48 ′ is formed at the interface between the flow path substrate 29 and the sealing plate 33, but the present invention is not limited to this, and at least a part of the first flow path is formed by the piezoelectric element. What is necessary is just to form below the row | line accommodation space (namely, between the piezoelectric element row | line accommodation space and a nozzle surface).

  Further, in the first and second embodiments described above, the first piezoelectric element array housing space 46a and the first piezoelectric element array side compliance space 56a are shared by the first piezoelectric element array side atmosphere opening 58a. The second piezoelectric element array accommodating space 46b and the second piezoelectric element array side compliance space 56b were released to the atmosphere through the second piezoelectric element array side atmosphere opening 58b common to both. Not limited. For example, in the third embodiment shown in FIGS. 8 to 11, the first piezoelectric element array storage space 46 a and the second piezoelectric element array storage space 46 b are opened to the atmosphere through the storage space atmosphere opening 73 common to both. Then, the first piezoelectric element array side compliance space 56a and the second piezoelectric element array side compliance space 56b are opened to the atmosphere through a compliance space atmosphere opening 77 common to both.

  In the following, the third embodiment will be described in detail. FIG. 8 is a plan view of the compliance substrate 37 of the recording head 3 according to the third embodiment as viewed from above. 9 is a diagram schematically showing a cross section taken along the line DD, FIG. 10 is a schematic view taken along the line EE, and FIG. 11 is a cross section taken along the line FF. As shown in FIGS. 8 to 11, in the present embodiment as well, as in the first embodiment described above, the first nozzle row including a plurality of nozzles 24 arranged in parallel on one side (the right side in FIG. 9 and the like). 44a and a second nozzle row 44b composed of a plurality of nozzles 24 arranged in parallel on the other side (left side in FIG. 9 and the like) are formed. Also in the present embodiment, a series of flow paths (hereinafter referred to as the first liquid flow path 68a and the liquid supply path 21, the common liquid chamber 26, the individual communication path 28, and the pressure chamber 30 communicating with the first nozzle row 44a. And a series of flow paths (hereinafter referred to as second liquid flow paths 68b) including a liquid introduction path 21, a common liquid chamber 26, an individual communication path 28, and a pressure chamber 30 communicating with the second nozzle row 44b. It is formed in the recording head 3. Furthermore, also in the present embodiment, the first piezoelectric element array accommodating space 46a (corresponding to the first space for the first drive element group in the present invention) for accommodating the first piezoelectric element array 45a and the second piezoelectric element array 45b are provided. A second piezoelectric element array accommodating space 46b (corresponding to the first space for the second drive element group in the present invention) to be accommodated is formed.

  On the other hand, unlike the first embodiment, the case space 22 ′ recessed from the lower surface of the head case 19 is formed only in a region facing the opposing space 40 partitioned by the sealing film 39. The case space 22 ′ forms compliance spaces 56 a and 56 b together with the facing space 40. In the present embodiment, the first piezoelectric element array side compliance space 56a (the book) is in contact with the first liquid flow path 68a with the sealing film 39 interposed therebetween, and moisture is more likely to enter the first piezoelectric element array accommodating space 46a. Corresponding to the second space on the first liquid flow path side in the invention) and the second liquid flow path 68b with the sealing film 39 interposed therebetween, and the second intrusion of moisture more easily than the second piezoelectric element array accommodation space 46b. A piezoelectric element array side compliance space 56b (corresponding to the second space on the second liquid flow path side in the present invention) is formed. At one end (right side in FIG. 8) of the first piezoelectric element row side compliance space 56a and the second piezoelectric element row side compliance space 56b in the nozzle row direction, along the nozzle surface 25 (horizontal plane in the present embodiment). An extending horizontal channel 75 for compliance space is connected. That is, the first piezoelectric element row side compliance space 56a and the second piezoelectric element row side compliance space 56b are communicated with each other via the compliance space horizontal flow path 75.

  As shown in FIG. 9, the horizontal channel 75 for compliance space in the present embodiment is formed in the compliance substrate 37 and communicates with the facing space 40 of the compliance spaces 56a and 56b. Further, as shown in FIG. 8, the compliance space horizontal flow path 75 extends from the communication position with the first piezoelectric element array side compliance space 56a to the outside in the nozzle array direction of the second piezoelectric element array side compliance space 56b. And is branched to a portion communicating with the second piezoelectric element array side compliance space 56b and a section communicating with the compliance space vertical channel 76 outside the second piezoelectric element array side compliance space 56b. Yes. One of the branches is connected to the second piezoelectric element array side compliance space 56b, and the other is in compliance with a position that is out of the second piezoelectric element array compliance space 56b to the other side in the direction orthogonal to the nozzle array direction. It communicates with the vertical vertical flow path 76. The compliance space vertical channel 76 is a channel formed so as to penetrate the head case 19 in the plate thickness direction, and an upper end thereof is opened on an upper surface of the head case 19. In the following, the opening 77 at the upper end of the compliance space vertical channel 76 is referred to as a compliance space atmosphere opening 77. The horizontal passage for compliance space may be formed on the lower surface of the head case. Alternatively, it may be formed on both the compliance substrate and the head case.

  As described above, the first piezoelectric element array side compliance space 56a is a series of flow paths (hereinafter referred to as the first piezoelectric element array side second atmosphere opening path) composed of the compliance space horizontal flow path 75 and the compliance space vertical flow path 76. 78a), the compliance space is opened to the atmosphere from the atmosphere opening 77 for the compliance space. Similarly, the second piezoelectric element array side compliance space 56b is a series of flow paths (hereinafter referred to as second piezoelectric element array side second atmosphere open paths) including a horizontal space 75 for compliance space and a vertical flow path 76 for compliance space. 78b) and is opened to the atmosphere from the compliance space atmosphere opening 77. That is, the first piezoelectric element array side second atmosphere opening path 78a and the second piezoelectric element array side second atmosphere opening path 78b are shared from the compliance space atmosphere opening 77 to the branch of the compliance space horizontal path 75. It is formed and communicates with the atmosphere via the compliance space atmosphere opening 77. The first piezoelectric element array side second atmosphere opening path 78a corresponds to the first liquid flow path side second atmosphere opening path in the present invention, and the second piezoelectric element array side second atmosphere opening path 78b in the present invention. This corresponds to the liquid channel side second atmosphere opening channel.

  Further, as shown in FIGS. 8 and 11, in this embodiment, a storage space horizontal flow path 70 is connected to the piezoelectric element array storage spaces 46 a and 46 b. Specifically, on the other end (left side in FIG. 8) of the first piezoelectric element array accommodating space 46a and the second piezoelectric element array accommodating space 46b in the nozzle array direction, on the nozzle surface 25 (horizontal plane in the present embodiment). A horizontal flow path 70 for accommodation space extending along the line is connected. That is, the first piezoelectric element array housing space 46a and the second piezoelectric element array housing space 46b are communicated with each other via the housing space horizontal flow path 70. As shown in FIG. 11, the horizontal flow path 70 for the accommodation space in the present embodiment is a flow path on the open side of the groove formed on the lower surface of the sealing plate 33, like the horizontal flow path 48 in the first embodiment. It is formed in a state of being sealed with the substrate 29. Further, as shown in FIG. 8, the horizontal flow path 70 for the accommodation space in the present embodiment is outward from the communication position with the second piezoelectric element row accommodation space 46b in the nozzle row direction of the first piezoelectric element row accommodation space 46a. And is branched to a portion communicating with the first piezoelectric element array housing space 46a and a section communicating with the housing space vertical channel 71 outside the first piezoelectric element array housing space 46a. . One of the branched branches is connected to the first piezoelectric element array accommodating space 46a, and the other is used for the accommodating space at a position deviated from the first piezoelectric element array accommodating space 46a to one side in the direction orthogonal to the nozzle array direction. It communicates with the vertical channel 71.

  As shown in FIG. 10, the storage space vertical channel 71 is formed in a state of penetrating the sealing plate 33 in the thickness direction, similarly to the vertical channel 49 in the first embodiment. The upper end of the accommodation space vertical channel 71 communicates with a case-side vertical channel 72 formed in the head case 19 through a conduction port 54 ′ opened in the compliance substrate 37. The case-side vertical flow path 72 is a flow path formed in a state of penetrating the head case 19 in the thickness direction, similarly to the compliance space vertical flow path 76. The upper end of the case side vertical flow path 72 is opened on the upper surface of the head case 19. Hereinafter, the opening 73 at the upper end of the case-side vertical flow path 72 is referred to as an accommodation space atmosphere opening 73. As shown in FIG. 8, the position where the compliance space horizontal channel 75 communicates with the compliance space vertical channel 76 and the conduction port 54 ′ which communicates with the case-side vertical channel 72 are formed on the upper surface of the compliance substrate 37. Since the storage space atmosphere opening port 73 and the compliance space atmosphere opening port 77 are formed at the diagonal positions, they are formed at the diagonal positions on the upper surface of the recording head 3. In other words, the storage space atmosphere opening 73 is formed at the other end in the nozzle row direction on the upper surface of the head case 19 and at one end in the direction orthogonal to the nozzle row direction. The atmosphere opening port 77 is formed at one end portion in the nozzle row direction on the upper surface of the head case 19 and at the other end portion in the direction orthogonal to the nozzle row direction. In short, the storage space atmosphere opening port 73 and the compliance space atmosphere opening port 77 are formed apart from each other in the nozzle row direction and in the direction perpendicular to the nozzle row direction.

  In this way, the first piezoelectric element array housing space 46a is a series of flow paths (hereinafter referred to as first piezoelectric element arrays) including the housing space horizontal flow path 70, the housing space vertical flow path 71, and the case side vertical flow path 72. Through the first open atmosphere path 74a), the open space 73 is opened to the atmosphere. Similarly, the second piezoelectric element array storage space 46b is a series of flow paths (hereinafter referred to as second piezoelectric element arrays) including a horizontal flow path for storage space 70, a vertical flow path for storage space 71, and a case-side vertical flow path 72. Through the first open atmosphere path 74b), the open space 73 is opened to the atmosphere. In other words, the first piezoelectric element array side first atmosphere opening path 74a and the second piezoelectric element array side first atmosphere opening path 74b are shared from the accommodation space atmosphere opening 73 to the branch of the accommodation space horizontal flow path 70. It is formed and communicated with the atmosphere through the atmosphere opening 73 for the accommodation space. The first piezoelectric element array side first atmosphere opening path 74a corresponds to the first driving element group side first atmosphere opening path in the present invention, and the second piezoelectric element array side first atmosphere opening path 74b in the present invention. This corresponds to the two drive element group side first air release path. Further, a portion of the accommodation space horizontal flow path 70 from the branch to the first piezoelectric element array accommodation space 46a corresponds to a first drive element group side partial flow path. The portion up to the second piezoelectric element array accommodating space 46b corresponds to the second drive element group side partial flow path.

  Here, the first piezoelectric element array side first atmosphere opening path 74a and the second piezoelectric element array side first atmosphere opening path 74b are the first piezoelectric element array side second atmosphere opening path 78a and the second piezoelectric element array side first. 2 It is formed so that the flow path resistance is higher than that of the atmospheric release path 78b. For example, a part or all of the first piezoelectric element array side first atmosphere opening path 74a and the second piezoelectric element array side first atmosphere opening path 74b may be part of the first piezoelectric element array side second atmosphere opening path 78a and the second piezoelectric element. It is formed so that the channel area is smaller than the element array side second atmosphere opening path 78b. Alternatively, the first piezoelectric element array side first atmosphere opening path 74a and the second piezoelectric element array side first atmosphere opening path 74b are replaced by the first piezoelectric element array side second atmosphere opening path 78a and the second piezoelectric element array side second. It is formed so that the length of the flow path becomes longer than the air release path 78b. Accordingly, moisture (or moisture) outside the recording head 3 (specifically, inside the housing of the printer 1) through the first piezoelectric element array side first atmosphere opening path 74a or the second piezoelectric element array side first atmosphere opening path 74b. ) Can be prevented from entering the first piezoelectric element array accommodating space 46a or the second piezoelectric element array accommodating space 46b. As a result, the adhesion of moisture to the piezoelectric element 32 can be suppressed, and as a result, the destruction of the piezoelectric element 32 can be suppressed.

  And according to this embodiment, the 1st piezoelectric element row accommodation space 46a and the 2nd piezoelectric element row accommodation space 46b, the 1st piezoelectric element row side compliance space 56a, and the 2nd piezoelectric element row side compliance space 56b are: Since there is no communication in the recording head 3, moisture from the first piezoelectric element array side compliance space 56a and the second piezoelectric element array side compliance space 56b to the first piezoelectric element array storage space 46a and the second piezoelectric element array storage space 46b (Or moisture) can be prevented from entering. Thereby, the adhesion of moisture to the piezoelectric element 32 can be further suppressed, and as a result, the destruction of the piezoelectric element 32 can be further suppressed. Also, the first piezoelectric element array side first atmosphere opening path, the second piezoelectric element array side first atmosphere opening path, the first piezoelectric element array side second atmosphere opening path, and the second piezoelectric element array side second atmosphere opening path. Compared with a configuration in which the path is opened to the atmosphere separately, a decrease in strength of the recording head 3 can be suppressed. Further, since the accommodation space atmosphere opening 73 and the compliance space atmosphere opening 77 are formed apart from each other in the nozzle row direction, a decrease in strength of the recording head 3 can be suppressed. That is, the first atmosphere opening paths 74a and 74b and the second atmosphere opening paths 78a and 78b are separated from each other as compared with the case where the accommodation space atmosphere opening opening and the compliance space atmosphere opening opening are provided close to each other. Therefore, it is possible to suppress a local decrease in strength of the recording head 3. In addition, from the first piezoelectric element array side compliance space 56a and the second piezoelectric element array side compliance space 56b, the first piezoelectric element array accommodation space 46a via the compliance space atmosphere opening 77 and the accommodation space atmosphere opening 73 is provided. And it can suppress that a water | moisture content penetrate | invades into the 2nd piezoelectric element row | line accommodation space 46b. Further, in the present embodiment, the accommodation space atmosphere opening port 73 and the compliance space atmosphere opening port 77 are formed apart from each other in the direction orthogonal to the nozzle row direction, so the first piezoelectric element row side compliance space is formed. Water from the 56a and second piezoelectric element array side compliance space 56b to the first piezoelectric element array accommodating space 46a and the second piezoelectric element array accommodating space 46b via the compliance space atmosphere opening 77 and the housing space atmosphere opening 73 Can be further suppressed.

  In the present embodiment, the first atmosphere open paths 74a and 74b are provided with the storage space horizontal flow path 70 extending along the nozzle surface 25, so that dew condensation occurs in the first atmosphere open paths 74a and 74b. Even if this occurs, this dew condensation can be prevented from entering the piezoelectric element array housing spaces 46a and 46b. In other words, since the first atmosphere open paths 74a and 74b are connected to the side surfaces of the piezoelectric element array accommodating spaces 46a and 46b, dew drips in the first atmosphere open paths 74a and 74b, and the piezoelectric element array accommodating spaces 46a and 46b. There is no intrusion inside. As a result, moisture adhesion to the piezoelectric element 32 can be further suppressed, and as a result, destruction of the piezoelectric element 32 can be further suppressed. The horizontal space 70 for the accommodation space may be formed in a groove shape on the upper surface of the flow path substrate on which the vibration plates are laminated, like the horizontal flow path 48 ′ of the second embodiment shown in FIG. 7. That is, a configuration is adopted in which the horizontal flow path for the accommodation space is formed in a state where the open side of the groove of the flow path substrate is sealed with a sealing plate, and the end thereof is connected to the bottom surface of the piezoelectric element array accommodation space. You can also. In this way, even if dew condensation occurs in the first piezoelectric element array side first atmosphere opening path and the second piezoelectric element array side first atmosphere opening path, the dew condensation is generated in the first piezoelectric element array housing space. Intrusion into the second piezoelectric element array housing space can be further suppressed. In short, at least a part of the first piezoelectric element array side first atmosphere opening path is formed below the first piezoelectric element array storage space (that is, between the first piezoelectric element array storage space and the nozzle surface), At least a part of the second piezoelectric element array side first atmosphere opening path may be formed below the second piezoelectric element array accommodating space (that is, between the second piezoelectric element array accommodating space and the nozzle surface). desirable. Since other configurations are the same as those in the first embodiment described above, description thereof is omitted.

  Furthermore, in the above-described third embodiment, the storage space atmosphere opening port 73 and the compliance space atmosphere opening port 77 are arranged at diagonal positions in plan view of the recording head 3, but this is not limitative. I can't. For example, in the fourth embodiment shown in FIG. 12, in the plan view of the recording head 3, the accommodation space atmosphere opening 73 'and the compliance space atmosphere opening 77' are substantially at the center in the direction perpendicular to the nozzle row direction. In FIG. 2, the nozzle lines are spaced apart in the nozzle row direction.

  More specifically, as shown in FIG. 12, the compliance space horizontal flow path 75 ′ in the present embodiment is the first from the center of the compliance substrate 37 in the direction orthogonal to the nozzle row direction in plan view of the compliance substrate 37. The flow path to the first piezoelectric element row side compliance space 56a and the flow path from the center of the compliance substrate 37 to the second piezoelectric element row side compliance space 56b in the direction orthogonal to the nozzle row direction are orthogonal to the nozzle row direction. It is formed symmetrically in the direction. And the connection location with the vertical flow path 76 'for the compliance space is between the first piezoelectric element array side compliance space 56a and the second piezoelectric element array side compliance space 56b (in this embodiment, orthogonal to the nozzle array direction). In the direction). For this reason, the compliance space atmosphere opening port 77 ′, which is the upper end of the compliance space vertical channel 76 ′, is one end of the upper surface of the head case 19 in the nozzle row direction and is orthogonal to the nozzle row direction. It is formed at approximately the center in the direction. As a result, the length of the flow path from the compliance space vertical flow path 76 ′ to the first piezoelectric element array side compliance space 56 a and the flow from the compliance space vertical flow path 76 ′ to the second piezoelectric element array side compliance space 56 b. The length of the road can be aligned. As a result, the humidity in the first piezoelectric element array side compliance space 56a and the humidity in the second piezoelectric element array compliance space 56b can be made uniform.

  Further, the accommodation space horizontal flow path 70 ′ in the present embodiment is the center of the compliance substrate 37 in the direction orthogonal to the nozzle row direction at the end opposite to the compliance space horizontal flow path 75 ′ in the nozzle row direction. From the center of the compliance substrate 37 in the direction orthogonal to the nozzle array direction to the second piezoelectric element array storage space 46b is orthogonal to the nozzle array direction. It is formed symmetrically in the direction. And the connection location with vertical flow path 71 'for accommodation space is between the 1st piezoelectric element row accommodation space 46a and the 2nd piezoelectric element row accommodation space 46b (in this embodiment, in the direction orthogonal to the nozzle row direction). It is formed at a position corresponding to substantially the center of the compliance substrate 37. Therefore, the accommodation space atmosphere opening port 73 ′ connected via the accommodation space vertical channel 71 ′ and the conduction port 54 ′ is the other end of the upper surface of the head case 19 in the nozzle row direction. , Formed substantially at the center in the direction orthogonal to the nozzle row direction. As a result, the length of the flow path (ie, corresponding to the second drive element group side partial flow path) from the storage space vertical flow path 71 ′ to the first piezoelectric element array storage space 46 a and the storage space vertical flow path 71. ′ To the second piezoelectric element array housing space 46b can be made to have the same length. As a result, the humidity in the first piezoelectric element array accommodating space 46a and the humidity in the second piezoelectric element array accommodating space 46b can be made uniform. Also in this embodiment, since the accommodation space atmosphere opening port 73 ′ and the compliance space atmosphere opening port 77 ′ are formed apart from each other in the nozzle row direction, it is possible to suppress a decrease in strength of the recording head 3. In addition, the first piezoelectric element array accommodation space from the first piezoelectric element array compliance space 56a and the second piezoelectric element array compliance space 56b via the compliance space atmosphere opening 66 'and the accommodation space opening 73'. It is possible to suppress moisture from entering the 46a and the second piezoelectric element array housing space 46b. Since other configurations are the same as those of the third embodiment described above, description thereof is omitted.

  Further, unlike the first to fourth embodiments described above, the first piezoelectric element array accommodating space 46a, the second piezoelectric element array accommodating space 46b, the first piezoelectric element array side compliance space 56a, and the second piezoelectric element array The side compliance spaces 56b can also be opened to the atmosphere from the individual openings. For example, in the fifth embodiment shown in FIGS. 13 to 15, the first piezoelectric element array housing space 46 a is connected to the first piezoelectric element array housing space air opening 80 a, and the second piezoelectric element array housing space 46 b is connected to the second space. From the atmosphere opening 80b for the piezoelectric element array housing space, the first piezoelectric element array side compliance space 56a is connected to the first piezoelectric element array side compliance space air opening 81a, and the second piezoelectric element array side compliance space 56b is connected to the second piezoelectric element. The element array side compliance space atmosphere opening 81b is open to the atmosphere. FIG. 13 is a plan view of the compliance substrate 37 of the recording head 3 according to the fifth embodiment as viewed from above. 14 is a diagram schematically showing a cross section taken along the line GG, and FIG. 15 is a schematic diagram showing a cross section taken along the line HH.

  In the present embodiment, the compliance space atmosphere opening ports 81a and 81b are opened at one end portion in the nozzle row direction, and the accommodation space atmosphere opening ports 80a and 80b are opened at the other end portion in the nozzle row direction. Has been. As shown in FIGS. 13 and 15, the first piezoelectric element array housing space atmosphere open path 82a (the present invention) that communicates the first piezoelectric element array housing space 46a and the first piezoelectric element array housing space atmosphere opening 80a. And a second piezoelectric element array housing space air opening path 82b (communication between the second piezoelectric element array housing space 46b and the second piezoelectric element array housing space air opening 80b). Each of the first atmospheric open paths in the present invention includes a horizontal flow path 48 ″, a vertical flow path 49 ″, and a housing space case flow path 84. Similarly to the horizontal flow path 48 of the first embodiment, the horizontal flow path 48 ″ extends from the other end in the nozzle array direction of the piezoelectric element array accommodation space 46a to the position where it communicates with the vertical flow path 49 ″. It is the flow path extended along. Further, the vertical flow path 49 ″, like the vertical flow path 49 of the first embodiment, penetrates the sealing plate 33 outside the piezoelectric element row accommodating space 46a in the direction orthogonal to the nozzle row direction. The vertical flow path 49 ″ is communicated with the storage space case flow path 84 through the communication port 54 ″. The storage space case flow path 84 includes two piezoelectric element arrays. Corresponding to the accommodating spaces 46a and 46b, two are formed apart in the direction orthogonal to the nozzle row direction, and the opening at the upper end of the accommodating space case flow path 84 is the accommodating space atmosphere opening 80a. 80b.

  Further, as shown in FIGS. 13 and 14, the first compliance space air opening path 83a (the second in the present invention) that connects the first piezoelectric element array side compliance space 56a and the first compliance space air opening 81a. A kind of atmosphere opening path), and a second compliance space atmosphere opening path 83b (the second atmosphere opening path in the present invention) that connects the second piezoelectric element array side compliance space 56b and the second compliance space atmosphere opening port 81b. 1) each includes a case space 22 ″ and a compliance space case flow path 85. As shown in FIG. 14, the case space 22 ″ in the present embodiment is formed at one end in the nozzle row direction. Compliance from the part that becomes the compliance space 56a, 56b facing the facing space 40 It is extended to the area of communication between a casing channel 85. A compliance space case flow path 85 is communicated with an end portion of the case space 22 ″ that extends to the outside of the facing space 40. The compliance space case flow path 85 includes two cases. Corresponding to the compliance spaces 56a and 56b, two spaced apart in the direction orthogonal to the nozzle row direction are formed, and the opening at the upper end of the housing space case flow path 85 is the compliance space air opening 81a. 81b.

  Also in the present embodiment, the first piezoelectric element array accommodating space atmosphere opening path 82a and the second piezoelectric element array accommodating space atmosphere opening path 82b are the first compliance space atmosphere opening path 83a and the second compliance space. It is formed so that the flow path resistance is higher than that of the air release path 83b. For example, a part or all of the first piezoelectric element array housing space atmosphere opening path 82a and the second piezoelectric element array housing space atmosphere opening path 82b may be part of the first compliance space atmosphere opening path 83a and the second compliance space atmosphere. It is formed so that the channel area is smaller than the open path 83b. Alternatively, the first piezoelectric element array housing space air opening path 82a and the second piezoelectric element array housing space air opening path 82b are more than the first compliance space air opening path 83a and the second compliance space air opening path 83b. It is formed so that the length of the flow path becomes long. As a result, moisture (or moisture) outside the recording head 3 and inside the housing of the printer 1 passes through the first piezoelectric element array housing space atmosphere opening path 82a and the second piezoelectric element array housing space atmosphere opening path 82b. Intrusion into the first piezoelectric element row accommodating space 46a or the second piezoelectric element row containing space 46b can be suppressed. As a result, the adhesion of moisture to the piezoelectric element 32 can be suppressed, and as a result, the destruction of the piezoelectric element 32 can be suppressed. Also in the present embodiment, since the atmosphere opening ports 80a and 80b for the accommodation space and the atmosphere opening ports 81a and 81b for the compliance space are formed apart from each other in the nozzle row direction, a decrease in strength of the recording head 3 is suppressed. it can. Furthermore, it is possible to prevent moisture from entering the piezoelectric element array housing spaces 46a and 46b from the compliance spaces 56a and 56b through the compliance space air opening ports 81a and 81b and the housing space air opening ports 80a and 80b. Since other configurations are the same as those of the third embodiment described above, description thereof is omitted.

  Incidentally, in each of the above-described embodiments, the printer 1 in which only one recording head 3 is mounted on the carriage 4 is illustrated, but the present invention is not limited to this. The present invention can also be applied to a recording head unit composed of a plurality of recording heads mounted on a carriage or a recording head unit (so-called line head) in which a plurality of recording heads are arranged in the width direction of a recording medium.

  As the sixth to eighth embodiments, a recording head unit 87 having a plurality of recording heads 3 (corresponding to the liquid jet head unit in the present invention) will be described as an example. FIG. 16 is a schematic view of the recording head unit 87 according to the sixth embodiment as viewed from above (the side opposite to the nozzle surface 25). The recording head unit 87 according to the present embodiment includes a plurality of recording heads 3 exemplified in the third embodiment in a state where a plurality of (four in the present embodiment) are arranged along a direction orthogonal to the nozzle row direction. It is fixed to a fixing member 88 such as a holder. As described in the third embodiment, the storage space atmosphere opening 73 and the compliance space atmosphere opening 77 are opened at diagonal positions on the upper surface of each recording head 3. Each recording head 3 has an accommodation space air opening 73 on one side (upper side in FIG. 16) in the direction orthogonal to the recording head 3 parallel direction, and a compliance space air opening 77 on the recording head 3. They are arranged side by side so as to be arranged on the other side (lower side in FIG. 16) in the direction orthogonal to the direction of arrangement. For this reason, the interval between the air opening 73 for the accommodation space of one recording head 3 and the air opening 73 for the accommodation space of the other recording head 3 in the adjacent recording heads 3 is for the accommodation space in the same recording head 3. It is narrower than the distance between the air opening 73 and the compliance space air opening 77. Further, the space between the compliance space air opening 77 of one recording head 3 and the compliance space air opening 77 of the other recording head 3 in the adjacent recording heads 3 is also the same as the space for holding space in the same recording head 3. The distance between the opening 73 and the compliance space atmosphere opening 77 is narrower. Accordingly, it is possible to suppress moisture from entering the piezoelectric element array housing spaces 46a and 46b from the compliance spaces 56a and 56b through the compliance space air opening 77 and the housing space air opening 73.

  FIG. 17 is a schematic view of the recording head unit 87 ′ in the seventh embodiment as viewed from above. The recording head unit 87 ′ in this embodiment is fixed to the fixing member 88 ′ in a state where a plurality (three in this embodiment) of the recording heads 3 exemplified in the third embodiment are arranged along the nozzle row direction. Has been. Also in this embodiment, the interval between the compliance space air opening 77 of one recording head 3 and the compliance space air opening 77 of the other recording head 3 in the adjacent recording heads 3 is the same. It is arranged so as to be narrower than the interval between the accommodation space atmosphere opening 73 and the compliance space atmosphere opening 77. Specifically, the even-numbered recording heads 3 counted from one end of the recording heads 3 in the juxtaposed direction are half-rotated with respect to the odd-numbered recording heads 3 and attached to the fixing member 88 ′. . As a result, also in this embodiment, moisture is prevented from entering the piezoelectric element array housing spaces 46a and 46b from the compliance spaces 56a and 56b through the compliance space air opening 77 and the housing space air opening 73. it can.

  18 is a schematic view of the recording head unit 87 ″ according to the eighth embodiment as viewed from above. The recording head unit 87 ″ according to this embodiment includes the recording head 3 illustrated in the fourth embodiment. A plurality (three in the present embodiment) are arranged in the nozzle row direction and are fixed to the fixing member 88 ″. For this reason, in the present embodiment, the accommodation space atmosphere opening 73 ′ and the compliance space are fixed. The air release port 77 ′ for use is aligned at the approximate center in the direction orthogonal to the direction in which the recording heads 3 are arranged in parallel, and also in this embodiment, one recording head 3 in the adjacent recording heads 3. The space between the compliance space atmosphere opening 77 ′ and the other recording head 3 compliance space atmosphere opening 77 ′ is accommodated in the same recording head 3. It is arranged so as to be narrower than the interval between the intermediary air opening 73 ′ and the compliance space air opening 77 ′, specifically, counting from one end of the recording heads 3 in the side-by-side direction. Thus, the even-numbered recording heads 3 are attached to the fixing member 88 ″ by rotating halfway with respect to the odd-numbered recording heads 3. Thereby, also in this embodiment, moisture enters the piezoelectric element array housing spaces 46a and 46b from the compliance spaces 56a and 56b through the compliance space air opening 77 'and the housing space air opening 73'. Can be suppressed. Note that the number of the recording heads 3 provided in the recording head unit 87 in the sixth to eighth embodiments is not limited to the exemplified one. In short, the recording head unit 87 only needs to include two or more recording heads 3.

  In the above description, the so-called flexural vibration type piezoelectric element 32 is exemplified as the driving element. However, the driving element is not limited to this, and for example, a so-called longitudinal vibration type piezoelectric element, a heating element, and a pressure using electrostatic force are used. Various actuators such as an electrostatic actuator that varies the volume of the chamber can be employed. In addition, the atmosphere opening path that opens the compliance space and the piezoelectric element array housing space exemplified in each embodiment to the atmosphere is not limited to the exemplified shape (cross-sectional shape, path, etc.), and may be set to an arbitrary shape. Further, in the above description, the nozzle rows 44a and 44b and the piezoelectric element rows 45a and 45b are formed in a straight line, but the present invention is not limited to this. For example, the present invention can be applied to a recording head having a nozzle group in which a plurality of nozzles are gathered and a piezoelectric element group in which a plurality of piezoelectric elements are gathered. The vertical flow path 49, the accommodation space vertical flow path 71, the case-side vertical flow path 72, the compliance space vertical flow path 76, and the like described above are formed perpendicular to the horizontal plane. I can't. In short, it may be formed in a direction intersecting the horizontal plane. Furthermore, the horizontal flow path 48, the accommodation space horizontal flow path 70, the compliance space horizontal flow path 75, and the like described above are formed along a horizontal plane, but are not limited thereto. For example, they may be inclined with respect to the horizontal plane.

  In the above description, the ink jet recording head 3 which is a kind of liquid ejecting head and the recording head units 87, 87 ′ and 87 ″ which are kinds of liquid ejecting head units are described as examples. Can also be applied to other liquid ejecting heads and liquid ejecting units, such as color material ejecting heads, organic EL (Electro Luminescence) displays, FED (surface) used in the manufacture of color filters such as liquid crystal displays. The present invention is also applied to electrode material ejection heads used for electrode formation such as light-emitting displays, bio-organic matter ejection heads used for the production of biochips (biochemical elements), and various ejection units obtained by unitizing them. In a color material ejecting head for a display manufacturing apparatus or an ejecting unit having the same As a kind of liquid, a solution of each color material of R (Red), G (Green), and B (Blue) is ejected, and an electrode material ejecting head for an electrode forming apparatus or an ejecting unit including the same is regarded as a kind of liquid. A liquid electrode material is ejected, and a bioorganic matter ejecting head for a chip manufacturing apparatus or an ejecting unit including the same ejects a bioorganic solution as a kind of liquid.

  DESCRIPTION OF SYMBOLS 1 ... Printer, 2 ... Recording medium, 3 ... Recording head, 4 ... Carriage, 5 ... Carriage moving mechanism, 6 ... Conveying mechanism, 7 ... Ink cartridge, 8 ... Timing belt, 9 ... Pulse motor, 10 ... Guide rod, 19 DESCRIPTION OF SYMBOLS ... Head case, 20 ... Insertion space, 21 ... Liquid introduction path, 22 ... Case space, 23 ... Nozzle plate, 24 ... Nozzle, 25 ... Nozzle surface, 26 ... Common liquid chamber, 27 ... Communication part, 28 ... Supply path, DESCRIPTION OF SYMBOLS 29 ... Communication board | substrate, 30 ... Pressure chamber, 31 ... Vibrating plate, 32 ... Piezoelectric element, 33 ... Sealing plate, 34 ... Penetration part, 35 ... Flexible board, 36 ... Connection space, 37 ... Compliance board, 38 ... Fixed board 39 ... Sealing film, 40 ... Opposite space, 44a ... First nozzle array, 44b ... Second nozzle array, 45a ... First piezoelectric element array, 45b ... Second piezoelectric element array, 46a ... First piezoelectric element Row accommodating space 46b ... second piezoelectric element row containing space 47a ... first piezoelectric element row side first branch channel 47b ... second piezoelectric element row side first branch channel 48 ... horizontal channel 49 ... vertical flow 1st piezoelectric element array side common flow path, 51b 2nd piezoelectric element array side common flow path, 53 ... Liquid inlet, 54 ... Communication port, 56a ... 1st piezoelectric element array side compliance space, 56b ... Second piezoelectric element array side compliance space, 57a ... first piezoelectric element array side second shunt path, 57b ... second piezoelectric element array side second shunt path, 58a ... first piezoelectric element array side atmosphere opening, 58b ... first. 2 Piezoelectric element array side atmosphere opening, 59a, 74a ... First piezoelectric element array side first atmosphere opening path, 59b, 74b ... Second piezoelectric element array side first atmosphere opening path, 60a, 78a ... First piezoelectric element array Side second atmospheric open path, 60b, 78b, second piezoelectric element array side second Air opening path, 68a ... first liquid channel, 68b ... second liquid channel, 70 ... horizontal channel for accommodating space, 71 ... vertical channel for accommodating space, 72 ... vertical channel for case side, 73 ... accommodating space Air opening for air, 75 ... Horizontal channel for compliance space, 76 ... Vertical channel for compliance space, 77 ... Air opening for compliance space, 80a ... Air opening for first piezoelectric element array housing space, 80b ... Second Piezoelectric element array accommodation space atmosphere opening 81a ... first compliance space atmosphere opening opening, 81b ... second compliance space atmosphere opening opening, 82a ... first piezoelectric element array accommodation space atmosphere opening path, 82b ... second Piezoelectric element array storage space atmosphere release path, 83a ... first compliance space atmosphere release path, 83b ... second compliance space atmosphere release path, 84 ... storage space case flow path, 85 ... Compliance space case flow path, 87... Recording head unit, 88... Fixing member, 91... Liquid ejecting head, 92 a... Compliance space, 92 b. ... Air opening, 95 ... Internal flow path, 96 ... Common air opening

Claims (9)

A liquid ejection head that includes a nozzle that is open on a nozzle surface, and a liquid flow path that communicates with the nozzle;
A first space isolated from the liquid flow path;
A second space that is isolated from the liquid flow path and that allows moisture to enter from the liquid flow path more easily than the first space;
The liquid ejecting head according to claim 1, wherein the first atmosphere opening path that opens the first space to the atmosphere has higher flow path resistance than the second atmosphere opening path that opens the second space to the atmosphere. The first atmosphere opening path and the second atmosphere opening path are formed in common from the atmosphere opening port communicating with the atmosphere to a branch in the middle,
2. The liquid jet head according to claim 1, wherein the first branch channel from the branch to the first space has a higher channel resistance than the second branch channel from the branch to the second space.   The liquid ejecting head according to claim 2, wherein the first branch flow path includes a partial flow path extending from the first space along the nozzle surface.   The liquid ejecting head according to claim 2, wherein at least a part of the first diversion channel is formed between the first space and the nozzle surface. A first liquid channel communicating with a first nozzle group comprising a plurality of nozzles;
A second liquid channel communicating with a second nozzle group comprising a plurality of nozzles formed apart from the first nozzle group;
A first drive element group comprising drive elements provided for each nozzle of the first nozzle group;
A second drive element group comprising drive elements provided for each nozzle of the second nozzle group;
A first space for a first drive element group that is a kind of the first space that houses the first drive element group;
A first space for a second drive element group that is a kind of the first space that houses the second drive element group;
A first liquid channel side second space that is a kind of the second space in which moisture easily enters from the first liquid channel than the first space for the first drive element group;
A second liquid channel side second space that is a kind of the second space in which moisture easily enters from the second liquid channel than the second space for the second drive element group,
A first drive element group side first air release path that opens the first space for the first drive element group to the atmosphere, and a second drive element group side first atmosphere that opens the first space for the second drive element group to the atmosphere. The open path is communicated with the atmosphere through a first space air opening common to the first drive element group side first atmosphere open path and the second drive element group side first atmosphere open path,
The first liquid flow path side second air release path that opens the first liquid flow path side second space to the atmosphere and the second liquid flow path side second air open path that opens the second liquid flow path side second space to the atmosphere The air is communicated with the atmosphere through a second space atmosphere opening common to the first liquid channel side second atmosphere opening path and the second liquid channel side second atmosphere opening path. The liquid ejecting head according to 1. The first nozzle group and the second nozzle group are arranged along a first direction,
The liquid ejecting head according to claim 5, wherein the first space air opening and the second space air opening are formed apart from each other in the first direction. The first drive element group side first atmosphere opening path includes a first drive element group side partial flow path extending along the nozzle surface from the first space for the first drive element group,
The second drive element group side first atmosphere opening path includes a second drive element group side partial flow path extending along the nozzle surface from the second space for the second drive element group. The liquid ejecting head according to claim 5. At least a part of the first drive element group side first atmosphere opening path is formed between the first space for the first drive element group and the nozzle surface,
The at least part of the second driving element group side first atmosphere opening path is formed between the second space for the second driving element group and the nozzle surface. Item 7. The liquid jet head according to Item 6. A liquid ejecting head unit comprising a plurality of liquid ejecting heads according to any one of claims 1 to 8,
In the adjacent liquid ejecting heads, an interval between the atmosphere opening port in which the second space of one liquid ejecting head communicates with the atmosphere and the atmosphere opening port in which the second space of the other liquid ejecting head communicates with the atmosphere is: The liquid ejecting head unit, wherein the first space in the same liquid ejecting head is narrower than an interval between an air opening port that communicates with the atmosphere and an air opening port that communicates the second space with the atmosphere.

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