JP2017135398A - Thermal treatment apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To allow a nozzle for supplying heat treatment gas to a workpiece to be placed closer to the workpiece, in a thermal treatment apparatus.SOLUTION: A thermal treatment apparatus 1 has an outer tube 4, a boat 11, a closing member 14, and a gas supply device 10. The boat 11 is holding a workpiece 100, and can be put in and out of the outer tube 4. The closing member 14 is provided for closing the lower end 4b of the outer tube, and can move in company with the boat 11 in the vertical direction X1. The gas supply device 10 supplies heat treatment gas to a workpiece 100 in the outer tube 4. The movable section 28 of the gas supply device 10 is movable in company with the closing member 14 in the vertical direction X1. The nozzles 37, 38 of the movable section 28 supply heat treatment gas to the workpiece 100.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a heat treatment apparatus for processing an object to be processed in a heated atmosphere.

  2. Description of the Related Art A heat treatment apparatus for performing a heat treatment on a semiconductor manufacturing wafer is known (for example, see Patent Document 1). As an example of the heat treatment apparatus, the heat treatment apparatus described in Patent Document 1 performs an annealing process on a wafer. This heat treatment apparatus has a reaction tube made of SiC, a heater, a boat, an adapter, a seal cap, and a gas introduction path.

  The reaction tube is formed in a cylindrical shape and is surrounded by a heater. The upper end of the reaction tube is closed. On the other hand, the lower end of the reaction tube is open and connected to a cylindrical adapter. The boat is inserted into the reaction tube through a space surrounded by adapters. The boat is provided to hold a plurality of wafers. When this boat is inserted into the reaction tube, the lower end of the adapter is closed by a seal cap. That is, the space inside the reaction tube is closed.

  When the seal cap closes the lower end of the adapter, gas for heat treatment is supplied into the reaction tube from the gas introduction path. Further, the heater heats the inside of the reaction tube, so that the inside of the reaction tube becomes high temperature. As a result, a silicon oxide layer is formed on the wafer.

JP 2011-176320 A

  The nozzle of the gas introduction path is fixed to the adapter, and the distance to the boat is long. For this reason, the gas blown out from the nozzle causes a reaction action in the reaction tube before reaching the wafer placed on the boat, which is not preferable. Therefore, the nozzle is preferably arranged as close to the wafer as possible. However, while the nozzle is fixed to the adapter, the boat holding the wafer is displaced with respect to the adapter and the reaction tube as work is taken in and out of the reaction tube. For this reason, the nozzle needs to be arranged so as not to contact the boat when the boat is displaced, and there is a limit to shortening the distance between the nozzle and the boat.

  In view of the above circumstances, an object of the present invention is to enable a nozzle unit for supplying a heat treatment gas to an object to be processed such as a wafer in a heat treatment apparatus closer to the object to be processed. And

  (1) In order to solve the above problems, a heat treatment apparatus according to an aspect of the present invention is provided to hold a tube having a shape in which one end is closed and the other end is opened, and an object to be processed. A boat that is displaced in and out of the tube by being displaced along the longitudinal direction of the tube, and is configured to be able to move along with the boat in the longitudinal direction, and the boat is disposed in the tube A closing member for closing the other end of the tube, and a gas supply device for supplying a heat treatment gas to the object to be processed in the tube, wherein the gas supply device includes the closing member And a movable part that can move in the longitudinal direction, and the movable part includes a nozzle part for supplying the heat treatment gas to the workpiece.

  According to this configuration, the movable portion can move along with the boat along the longitudinal direction of the tube. That is, when the boat is taken in and out of the tube, the nozzle portion of the movable portion is displaced with respect to the tube together with the boat and the object to be processed held by the boat. Therefore, when the boat and the object to be processed are taken in and out of the tube, relative movement between the nozzle part and the boat (object to be processed) does not occur, and therefore the nozzle part can be arranged very close to the boat and the object to be processed. it can. As described above, according to the present invention, the nozzle part for supplying the heat treatment gas to the object to be processed can be arranged closer to the object to be processed.

  (2) Preferably, the gas supply device further includes a fixing portion for sending the heat treatment gas to the movable portion, and the closing member is positioned at a closing position for closing the other end portion of the tube. Thus, the movable part and the fixed part are connected, and the connection between the movable part and the fixed part is released when the closing member is displaced from the closed position.

  According to this configuration, when the boat and the object to be processed are taken out of the tube, that is, when the closing member is displaced from the closing position, the connection between the movable portion and the fixed portion is released. Accordingly, for example, the heat treatment gas can be supplied from the outside of the boat to the inside of the boat through the movable portion, and the boat or the like can be raised and lowered with respect to the tube without any trouble. As described above, as a result of the separation of the fixed portion and the movable portion, the operation of removing the movable portion and the like from the closing member is not required when the boat is discharged from the tube.

  (3) More preferably, the movable part has a connection end connected to the fixed part when the closing member is disposed at the closed position, and the gas supply device includes the fixed part and It further has a seal member disposed between the facing portions of the connection end.

  According to this configuration, since the closing member is disposed at the closing position, the space between the fixed portion and the connection end is hermetically sealed. Thereby, it becomes possible to supply the heat treatment gas from the fixed part to the movable part without leakage.

  (4) More preferably, the gas supply device further includes a pressing force adjusting mechanism for adjusting a pressing force that pressurizes the connection end portion toward the fixed portion.

  According to this configuration, the tightening amount of the seal member between the fixed portion and the connecting end portion can be adjusted to an appropriate value. Thereby, the airtightness between a fixing | fixed part and a connection edge part can be improved more reliably.

  (5) More preferably, the pressurizing force adjusting mechanism has a displacement mechanism for displacing the connecting end, and adjusts the pressurizing force by adjusting the position of the connecting end.

  According to this configuration, the airtightness between the fixed portion and the connection end can be more reliably increased with a simple configuration in which the position of the connection end is adjusted.

  (6) Preferably, the movable part further includes a cylindrical part configured to surround the boat, and the nozzle part is formed in the cylindrical part, and is held by the boat. A heat treatment gas is supplied to the object to be processed.

  According to this configuration, the cylindrical portion is disposed so as to surround the object to be processed held on the boat. And the gas for heat processing is supplied toward the said to-be-processed object from the nozzle part provided in this cylindrical part. With such a configuration, the distance between the nozzle portion and the object to be processed can be further reduced. Therefore, the heat treatment apparatus can more reliably supply the heat treatment gas to the object to be processed before the heat treatment gas causes a reaction. Moreover, the to-be-processed object hold | maintained at the boat will be arrange | positioned in the space enclosed by the cylindrical part. For this reason, the gas for heat processing supplied toward the to-be-processed object from the nozzle part can stay in the space of a cylindrical part. Therefore, the concentration of the heat treatment gas in the space surrounded by the cylindrical portion is kept high. Thereby, the heat treatment apparatus can supply the heat treatment gas to the object to be processed in a state where the concentration of the heat treatment gas is high. As described above, in the heat treatment apparatus, the heat treatment gas can be more reliably supplied to the object to be processed before the heat treatment gas causes a reaction action, and the heat treatment gas is supplied in a state where the concentration of the heat treatment gas is high. It can be supplied to the workpiece.

  (7) More preferably, the said nozzle part is formed in multiple places regarding at least one of the axial direction of the said cylindrical part, and the circumferential direction.

  According to this configuration, the concentration of the heat treatment gas in the space in the cylindrical portion can be made more uniform. As a result, the heat treatment apparatus can heat the treatment object more evenly.

  (8) Preferably, the cylindrical part is formed between an inner peripheral part provided with the nozzle part, an outer peripheral part surrounding the inner peripheral part, and the inner peripheral part and the outer peripheral part. A chamber for passing through.

  According to this configuration, the heat treatment gas is temporarily stored in the chamber. Thereby, it can suppress that a pulsation etc. arise in the gas for heat processing injected from a nozzle part. As a result, the heat treatment apparatus can supply the heat treatment gas to the object to be processed in a more stable manner.

  According to the present invention, the nozzle portion for supplying the heat treatment gas to the object to be processed can be disposed closer to the object to be processed.

It is a side view of the heat processing apparatus concerning 1st Embodiment of this invention, and has shown one part in the cross section. It is an enlarged view of the periphery of the obstruction body of the heat treatment apparatus. It is an enlarged view of the periphery of the stand of a heat treatment apparatus, and a part is omitted and shown. It is an enlarged view of the periphery of the gas supply device in the vicinity of the closing member. It is an enlarged view of the periphery of the gas supply apparatus in the vicinity of the upper end part of an inner tube. It is a figure for demonstrating operation | movement of the heat processing apparatus. It is a side view of 2nd Embodiment of this invention, and has shown one part in the cross section. It is an enlarged view of the principal part of 2nd Embodiment of this invention.

  Hereinafter, embodiments for carrying out the present invention will be described with reference to the drawings. Note that the present invention can be widely applied as a heat treatment apparatus for heat-treating an object to be processed.

<First Embodiment>
FIG. 1 is a side view of a heat treatment apparatus 1 according to the first embodiment of the present invention, and a part thereof is shown in cross section. Referring to FIG. 1, heat treatment apparatus 1 is configured to be able to perform heat treatment on the surface of workpiece 100. More specifically, the heat treatment apparatus 1 is configured to perform a heat treatment on the surface of the workpiece 100 by supplying a heated gas (heat treatment gas) toward the workpiece 100. Yes. In the present embodiment, the heat treatment apparatus 1 is a vertical furnace.

  In the present embodiment, the workpiece 100 is a wafer for manufacturing a semiconductor, and is formed in a disk shape. Further, examples of the heat treatment that the heat treatment apparatus 1 performs on the workpiece 100 include annealing treatment, oxidation treatment, diffusion treatment, and reflow treatment. The workpiece 100 is not limited to a wafer, but may be another member.

  The heat treatment apparatus 1 includes a heater 2, a base 3, an outer tube 4, an inner tube 5, an end closing mechanism 6, a driving device 7, a base 8, and a heat barrier 9 provided on the base 8, A gas supply device 10 and a boat 11 are provided.

  The heater 2 is provided to heat the atmosphere (gas) in the outer tube 4. The heater 2 is, for example, an electric heater. The heater 2 is formed in a hollow box shape as a whole, and houses a part of the outer tube 4. The heater 2 has a peripheral wall 2a and a top wall 2b. The peripheral wall 2 a is disposed so as to surround the outer tube 4. The top wall 2 b closes the upper end portion of the peripheral wall 2 a and is located above the outer tube 4. The lower end of the peripheral wall 2 a is received by the pedestal 3.

  The pedestal 3 is provided to support the heater 2. The pedestal 3 is disposed so as to surround the outer tube 4 at an intermediate portion 4c between the upper end portion (one end portion) 4a and the lower end portion (other end portion) 4b of the outer tube 4.

  The outer tube 4 is provided for accommodating the workpiece 100 accommodated in the boat 11 and subjecting the workpiece 100 to heat treatment. The outer tube 4 is an example of the “tube” in the present invention. The outer tube 4 is a heat resistant hollow member formed using, for example, silicon carbide (SiC). The outer tube 4 is formed in a vertically long cylindrical shape, and is elongated in the vertical direction (vertical direction) X1. In the present embodiment, the vertical direction X1 is the longitudinal direction of the outer tube 4. The upper end portion 4a of the outer tube 4 is closed. The lower end 4b of the outer tube 4 is opened downward.

  The upper end portion 4a of the outer tube 4 covers the space in the outer tube 4 from above. The upper end portion 4 a and the intermediate portion 4 c of the outer tube 4 are disposed in a space surrounded by the heater 2. The intermediate portion 4 c of the outer tube 4 is surrounded by an annular spacer 12. The spacer 12 is disposed between the outer tube 4 and the peripheral wall 2 a of the heater 2 and is supported by the pedestal 3. A lower end portion 4 b of the outer tube 4 protrudes from the heater 2 below the heater 2. The lower end portion 4b of the outer tube 4 has a flange portion 4d.

  The flange portion 4 d is an annular flange, and has a shape that protrudes outward in the radial direction of the outer tube 4. The lower end 4 b of the outer tube 4 is closed by the end closing mechanism 6.

  The end closing mechanism 6 is provided to close the space S <b> 1 inside the outer tube 4. The end closing mechanism 6 can switch between a state where the space S1 inside the outer tube 4 is closed and a state where the space S1 inside the outer tube 4 is opened.

  FIG. 2 is an enlarged view of the periphery of the end portion closing mechanism 6 of the heat treatment apparatus 1. With reference to FIG. 2, the end closing mechanism 6 includes an annular portion 13 and a closing member 14.

  The annular portion 13 is an annular portion arranged coaxially with the outer tube 4, and is formed in a cylindrical shape extending downward from the lower end portion 4 b of the outer tube 4. The annular portion 13 is provided as an adapter between the outer tube 4 and the closing member 14.

  The annular portion 13 includes a spacer 15, a spacer 16, a receiving member 17, and a bottom spacer 18, and the spacer 15, the spacer 16, the receiving member 17, and the bottom spacer 18 are in the vertical direction X <b> 1. Are lined up.

  The spacer 15 is an annular portion arranged so as to surround the periphery of the flange portion 4d. The upper end portion of the spacer 15 is received by the lower end portion of the base 3. The spacer 15 has a cross-sectional shape formed in a substantially J-shape, and has a lower end portion disposed below the flange portion 4d. The lower end portion of the spacer 15 receives the lower end surface of the flange portion 4d. An annular groove is formed on the upper surface of the lower end portion of the spacer 15, and the groove holds an O-ring 19 as a seal member. The O-ring 19 hermetically seals between the lower end portion of the spacer 15 and the flange portion 4d. The spacer 15 is in contact with the spacer 16.

  The spacer 16 is disposed below the spacer 15. The upper end portion of the spacer 16 is in close contact with the lower end portion of the spacer 15. A gas discharge pipe 20 is formed at an intermediate portion of the spacer 16. The gas discharge pipe 20 is provided to discharge a gas such as a gas supplied into the outer tube 4 to the outside of the outer tube 4. The gas discharge pipe 20 passes through the spacer 16 and is opened to the space S <b> 1 inside the outer tube 4. The gas discharge pipe 20 is connected to a suction pump (not shown). The spacer 16 is in contact with the receiving member 17.

  The receiving member 17 is an annular plate member disposed below the spacer 16. An annular groove is formed on the upper surface of the receiving member 17, and the groove holds an O-ring 21 as a seal member. The O-ring 21 hermetically seals between the upper end portion of the receiving member 17 and the lower end portion of the spacer 16. The inner peripheral portion of the receiving member 17 receives the inner tube 5.

  With reference to FIG. 1, the inner tube 5 is a cylindrical member disposed inside the outer tube 4. The material of the inner tube 5 is the same as the material of the outer tube 4, for example. The inner tube 5 is formed in a cylindrical shape extending upward from the receiving member 17, and extends to the vicinity of the upper end portion 4 a of the outer tube 4.

  The inner tube 5 is disposed so as to surround the boat 11 and the workpiece 100 during the heat treatment operation in the heat treatment apparatus 1.

  Referring to FIG. 2 again, the receiving member 17 that supports the inner tube 5 is in contact with the bottom spacer 18. The bottom spacer 18 is an annular member disposed below the receiving member 17. The upper part of the bottom spacer 18 is in close contact with the lower surface of the receiving member 17. The bottom spacer 18 has a groove 18a. The groove portion 18 a has a U-shaped cross-sectional shape and is opened toward the outer side in the radial direction of the outer tube 4.

  The groove part 18a is formed over the whole circumferential direction of the bottom spacer 18, for example. A gas supply pipe 22 is connected to the bottom of the groove 18 a, that is, to the middle of the bottom spacer 18. The gas supply pipe 22 is provided, for example, for supplying a gas different from the gas supplied from the gas supply device 10 to the space S <b> 1 in the outer tube 4.

  The gas supply pipe 22 is connected to a gas generation source (not shown). An annular groove is formed on the lower surface of the bottom spacer 18, and the groove holds an O-ring 23 as a seal member. The O-ring 23 is provided to hermetically seal between the lower surface of the bottom spacer 18 and the upper surface of the closing member 14.

  A through hole 18 b is formed in the lower part of the bottom spacer 18. The through hole 18b is provided as a portion into which a first gas pipe 29 of a fixing portion 27 (to be described later) of the gas supply device 10 is inserted, and extends in the vertical direction X1. A closing member 14 is disposed below the bottom spacer 18.

  Referring to FIGS. 1 and 4, the closing member 14 is provided as a lid member for closing the lower end portion 4 b of the outer tube 4 in a state where the boat 11 is disposed in the outer tube 4. The closing member 14 is configured to be movable in the vertical direction X1 relative to the outer tube 4 by moving in the vertical direction X1 with the boat 11.

  As described above, the closing member 14 is displaced in the vertical direction X1 with respect to the outer tube 4, so that the space S1 inside the outer tube 4 is closed and the space S1 inside the outer tube 4 is opened downward. The switched state is switched. In the present embodiment, the position of the closing member 14 when the closing member 14 closes the lower end 4b of the outer tube 4 is referred to as a closing position P1. 1 and 2 show a state in which the closing member 14 is at the closing position P1. In addition, this embodiment demonstrates on the basis of the state which has the closure member 14 in the obstruction | occlusion position P1, when there is no description in particular.

  The closing member 14 is formed in a disk shape, for example. The closing member 14 is formed in a size capable of closing the opening of the bottom spacer 18. When the closing member 14 closes the opening of the bottom spacer 18, the outer periphery of the closing member 14 contacts the O-ring 23. Thereby, the space between the closing member 14 and the bottom spacer 18 is hermetically sealed. The closing member 14 is formed with a plurality of (for example, three) through holes 14a, 14b, and 14c. These through holes 14a, 14b, and 14c penetrate the closing member 14 in the vertical direction X1.

  The through hole 14 a of the closing member 14 is formed so as to line up and down with the through hole 18 b of the bottom spacer 18. In a state where the closing member 14 closes the opening of the bottom spacer 18 (closed state), the through holes 14a and 18b are continuous. In the through holes 14b and 14c of the closing member 14, a second end 33b and a third end 33c of a third gas pipe 33 (to be described later) of the gas supply device 10 are inserted. The closing member 14 having the above configuration is configured to be displaceable in the vertical direction X1 by the driving device 7.

  The drive device 7 includes a beam member 24 and a drive mechanism 25.

  The beam member 24 is a member that extends substantially horizontally, and is fixed to, for example, the lower end of the closing member 14. The beam member 24 is supported by the drive mechanism 25. The drive mechanism 25 includes an electric motor (not shown) and the like, and displaces the beam member 24, the closing member 14, and the like in the vertical direction X1. The closing member 14 supports the gantry 8.

  FIG. 3 is an enlarged view of the periphery of the gantry 8 of the heat treatment apparatus 1, and a part thereof is omitted. With reference to FIG. 3, the gantry 8 includes a column member 26 and a heat barrier 9.

  The column member 26 is formed in a column shape extending upward from the closing member 14. The column member 26 is disposed in a space S <b> 1 surrounded by the outer tube 4 and the end portion closing mechanism 6. The column member 26 includes a lower end member 26a, an inner peripheral portion 26b, an outer peripheral portion 26c, and an upper end member 26d.

  The lower end member 26 a is a block-shaped member formed in an annular shape, and is disposed on the upper surface of the closing member 14. The lower end member 26 a is disposed above the two through holes 14 b and 14 c of the closing member 14. The lower end member 26a supports the inner peripheral portion 26b and the outer peripheral portion 26c.

  The inner peripheral portion 26b and the outer peripheral portion 26c are each formed in a cylindrical shape, and extend upward from the lower end member 26a. The inner peripheral part 26b and the outer peripheral part 26c are coaxially arranged, and the inner peripheral part 26b is surrounded by the outer peripheral part 26c. The upper end portion of the inner peripheral portion 26 b and the upper end portion of the outer peripheral portion 26 c are respectively located in the vicinity of the intermediate portion 4 c of the outer tube 4. The upper end portion of the inner peripheral portion 26b and the upper end portion of the outer peripheral portion 26c are connected to the upper end member 26d.

  The upper end member 26d is, for example, a block-shaped member formed in an annular shape. The upper end member 26d closes the upper end of the space between the inner peripheral portion 26b and the outer peripheral portion 26c. The column member 26 having the above configuration holds the heat barrier 9.

  The heat barrier 9 is provided to prevent heat from the boat 11 from being transmitted to the end closing mechanism 6. The heat barrier 9 is formed using, for example, a material having a relatively low thermal conductivity. The heat barrier 9 is disposed in a space surrounded by the inner peripheral portion 26b of the column member 26, and is supported by the inner peripheral portion 26b. The gas supply device 10 supplies a heat treatment gas toward the workpiece 100 above the gantry 8 having the above-described configuration.

  FIG. 4 is an enlarged view of the periphery of the gas supply device 10 in the vicinity of the closing member 14. FIG. 5 is an enlarged view of the periphery of the gas supply device 10 in the vicinity of the upper end portion of the inner tube 5.

  Referring to FIGS. 1, 4, and 5, gas supply device 10 is provided to supply a heat treatment gas to space S <b> 1 surrounded by outer tube 4 and end portion closing mechanism 6. In the present embodiment, the gas supply apparatus 10 has a configuration for supplying the heat treatment gas from the vicinity of the workpiece 100 as much as possible toward the workpiece 100. In addition, the arrow in the member of the gas supply apparatus 10 has shown an example of the flow of the gas for heat processing. Hereinafter, a more specific configuration of the gas supply device 10 will be described.

  The gas supply device 10 is provided to supply the heat treatment gas generated outside the outer tube 4 toward the workpiece 100 in the outer tube 4. In this embodiment, a part of the gas supply device 10 (movable part 28 described later) is configured to be able to be displaced in the vertical direction X1 together with the closing member 14, the boat 11, the workpiece 100, and the like. As a result of adopting this configuration, the heat treatment gas can be supplied to the object to be processed 100 from a position closer to the object to be processed 100. In the present embodiment, the gas supply device 10 includes a cylindrical portion 36 that surrounds the boat 11. As a result of adopting this configuration, the heat treatment gas can be supplied to the workpiece 100 from a position closer to the workpiece 100.

  The gas supply device 10 includes a fixed portion 27 and a movable portion 28.

  The fixing portion 27 is provided as a portion that is not displaced relative to the outer tube 4 when the workpiece 100 is taken in and out of the inner tube 4. The fixed portion 27 is provided to send a heat treatment gas to the movable portion 28.

  The fixing portion 27 has a first gas pipe 29 and a bottom spacer 18. That is, the bottom spacer 18 is a part of the end closing mechanism 6 and a part of the gas supply device 10.

  The first gas pipe 29 is formed, for example, in an L shape. A part of the first gas pipe 29 is accommodated in the groove 18 a of the bottom spacer 18. One end portion 29 a of the first gas pipe 29 is inserted into the through hole 18 b of the bottom spacer 18 and is fixed to the bottom spacer 18. The other end 29b of the first gas pipe 29 is connected to, for example, a heat treatment gas generator (not shown). The gas in the first gas pipe 29 of the fixed part 27 is sent to the movable part 28.

  The movable portion 28 is provided as a portion that can be displaced in the vertical direction X1 with respect to the outer tube 4 together with the closing member 14, the gantry 8, the boat 11, and the like. The movable portion 28 is configured to be able to move in the vertical direction X1 together with the closing member 14, the gantry 8, and the boat 11.

  The movable part 28 is formed in the second gas pipe 31, the pressure adjusting mechanism 32, the third, fourth, and fifth gas pipes 33, 34, 35, the cylindrical part 36, and the cylindrical part 36. The nozzle portions 37 and 38, the first end wall portion 41, and the second end wall portion 42 are provided.

  The second gas pipe 31 is provided as a part connected to the first gas pipe 29 of the fixed portion 27. The second gas pipe 31 is provided as a connection end of the movable portion 28, and is connected to the bottom spacer 18 of the fixed portion 27 when the closing member 14 is disposed at the closing position P1. The second gas pipe 31 is inserted into the through hole 14 a of the closing member 14. The second gas pipe 31 is connected to one end portion 29 a of the first gas pipe 29.

  The second gas pipe 31 has a flange portion 31a and a second gas pipe main body 31b.

  The flange portion 31a is disposed in the through hole 14a of the closing member 14 so as to face the through hole 18b of the bottom spacer 18 in the vertical direction X1. An annular groove is formed on the upper surface of the flange portion 31a, and an O-ring 43 as a seal member is disposed in the groove. The O-ring 43 is an element of the gas supply device 10 and is in contact with the lower surface of the bottom spacer 18.

  As described above, the O-ring 43 is disposed between the bottom spacer 18 of the fixing portion 27 and the opposing portions of the second gas pipe 31. Thereby, the space between the second gas pipe 31 and the bottom spacer 18 (one end portion 29a of the first gas pipe 29) is hermetically sealed. The flange portion 31a is fixed to the second gas pipe main body 31b.

  The second gas pipe main body 31b extends downward from the flange portion 31a. A groove portion is formed in the lower portion of the second gas pipe main body 31b, and a female screw portion 31d is formed in the groove portion. A movable tube 45 (described later) of the pressure adjusting mechanism 32 is inserted into the female screw portion 31d.

  The pressurizing force adjusting mechanism 32 is provided to adjust the force that pressurizes the second gas pipe 31 toward the bottom spacer 18 of the fixed portion 27. In other words, the pressurizing force adjusting mechanism 32 is provided to adjust the airtightness at the connection portion between the fixed portion 27 and the movable portion 28 of the gas supply device 10. The pressure adjusting mechanism 32 is provided as a displacement mechanism for displacing the second gas pipe 31 with respect to the closing member 14. The pressurizing force adjusting mechanism 32 is configured to adjust the pressurizing force by adjusting the position of the second gas pipe 31 in the vertical direction X1 with respect to the closing member 14.

  The pressure adjusting mechanism 32 includes a base tube 44, a movable tube 45, and a fastening member 46.

  The base tube 44 is provided as a portion fixed to the closing member 14. The base tube 44 has a flange portion 44a and a base tube main body 44b.

  The flange portion 44 a is disposed below the closing member 14. The flange portion 44 a is fixed to the closing member 14 using a fixing member 47 such as a bolt and is received on the lower surface of the closing member 14. The flange portion 44a passes through the base tube main body 44b.

  The base pipe body 44b surrounds the second gas pipe body 31b. An O-ring 48 is disposed at a connection portion between the base tube main body 44b and the flange portion 44a. The O-ring 48 hermetically seals between the base tube main body 44 b and the through hole 14 a of the closing member 14. A lower portion of the base tube main body 44b has a male screw portion 44c and a groove portion 44d.

  The male screw portion 44c is formed on the outer peripheral portion of the lower portion of the base tube main body 44b. The groove 44d is formed on the inner peripheral surface of the lower portion of the base tube main body 44b, and is open to the lower end surface of the base tube main body 44b. The base tube main body 44 b surrounds a part of the movable tube 45.

  The movable tube 45 is provided as a portion that can be displaced in the vertical direction X1 with respect to the second gas tube 31 and that can be displaced in the vertical direction X1 with respect to the base tube 44. The movable tube 45 has a male screw portion 45a and a step portion 45b.

  The male thread portion 45 a of the movable tube 45 is formed on the upper portion of the movable tube 45. The male screw portion 45 a is screwed to the female screw portion 31 d at the lower part of the second gas pipe 31. The amount of protrusion of the second gas pipe 31 from the movable tube 45 can be adjusted by adjusting the amount of coupling between the male screw portion 45a and the female screw portion 31d. A step portion 45b is formed below the male screw portion 45a.

  The step portion 45 b is an annular portion formed by the diameter of the intermediate portion of the movable tube 45 being larger than the diameter of the upper portion of the movable tube 45, and faces upward. An O-ring 49 is disposed between the step 45 b and the lower end surface of the second gas pipe 31. Thereby, the connection portion between the second gas pipe 31 and the movable pipe 45 is hermetically sealed.

  A plurality of O-rings 50 and 51 are attached to the outer periphery of the intermediate portion of the movable tube 45. These O-rings 50 and 51 are accommodated in the groove 44 d of the base tube 44 and hermetically seal between the base tube 44 and the movable tube 45. A cylindrical collar 52 is fixed to the outer peripheral portion of the intermediate portion of the movable tube 45. A part of the collar 52 is disposed in the groove 44d. The collar 52 is formed with an annular step 52a. The step portion 52 a faces downward, and the step portion 45 b is supported by the fastening member 46.

  The fastening member 46 is provided to hold the movable tube 45 on the base tube 44. The fastening member 46 is, for example, a nut member and has a female screw portion 46a. The female thread portion 46 a of the fastening member 46 is screwed to the male thread portion 44 c on the outer periphery of the base tube 44. The fastening member 46 receives an annular stepped portion 52 a of the collar 52. As a result of the fastening member 46 being screwed to the base tube 44, the fastening member 46 supports the collar 52. Accordingly, the downward displacement of the collar 52, the movable tube 45, and the second gas tube 31 is restricted.

  The pressure adjustment by the pressure adjustment mechanism 32 is performed as follows. That is, when adjusting the applied pressure, the worker first adjusts the screw coupling amount between the second gas pipe 31 and the movable pipe 45. Next, the worker screws the fastening member 46 to the base tube 44. Thereby, the movable tube 45 and the second gas tube 31 are defined in the vertical direction X1 with respect to the base tube 44, and as a result, the applied pressure between the second gas tube 31 and the closing member 14 is defined. The pressure adjusting mechanism 32 is connected to the third gas pipe 33.

  The first end 33 a of the third gas pipe 33 is connected to the lower end of the movable pipe 45 of the pressure adjustment mechanism 32. The first end 33a of the third gas pipe 33 has a flexible pipe 33d. The flexible tube 33d is a tube that can expand and contract, and expands and contracts according to the displacement of the tip of the first end 33a of the third gas tube 33 accompanying the displacement of the movable tube 45.

  The middle portion of the third gas pipe 33 is branched into two, and as a result, the third gas pipe 33 has first, second, and third end portions 33a, 33b, and 33c. doing. The second end 33 b of the third gas pipe 33 is inserted into the through hole 14 b of the closing member 14. The third end 33 c of the third gas pipe 33 is inserted into the through hole 14 c of the closing member 14.

  The second end 33 b of the third gas pipe 33 is connected to the fourth gas pipe 34. Specifically, an annular groove is formed in the peripheral edge of the through hole 14b on the upper surface of the closing member 14, and an O-ring 53 is disposed in this groove. The O-ring 53 is in contact with the lower end member 26a of the column member 26 and hermetically seals between the closing member 14 and the lower end member 26a. The second end 33 b of the third gas pipe 33 and the lower end of the fourth gas pipe 34 are connected via a space surrounded by the O-ring 53, the lower end member 26 a, and the closing member 14. .

  The fourth gas pipe 34 is disposed between the inner peripheral portion 26b and the outer peripheral portion 26c of the column member 26, and extends linearly along the vertical direction X1. The upper end portion of the fourth gas pipe 34 is connected to the cylindrical portion 36.

  The third end 33 c of the third gas pipe 33 is connected to the fifth gas pipe 35. Specifically, an annular groove is formed in the peripheral edge of the through hole 14c on the upper surface of the closing member 14, and an O-ring 54 is disposed in this groove. The O-ring 54 is in contact with the lower end member 26a of the column member 26 and hermetically seals between the closing member 14 and the lower end member 26a. The third end 33c of the third gas pipe 33 and the lower end of the fifth gas pipe 35 are connected via a space surrounded by the O-ring 54, the lower end member 26a, and the closing member 14. .

  The fifth gas pipe 35 is disposed between the inner peripheral portion 26b and the outer peripheral portion 26c of the column member 26, and extends linearly along the vertical direction X1. An upper end portion of the fifth gas pipe 35 is connected to the cylindrical portion 36.

  With reference to FIGS. 1 and 5, the cylindrical portion 36 is provided to supply a heat treatment gas toward the workpiece 100 held in the boat 11. The cylindrical portion 36 is disposed in the vicinity of the upper end portion 4 a of the outer tube 4 and is supported by the column member 26 of the gantry 8. The tubular portion 36 surrounds the boat 11. The cylindrical portion 36 is surrounded by the intermediate portion 4 c of the outer tube 4. The cylindrical portion 36 is surrounded by the inner tube 5. In the present embodiment, the cylindrical portion 36 is formed in a cylindrical shape.

  The cylindrical portion 36 includes an inner peripheral portion 36a, an outer peripheral portion 36b, a partition member 36c, a lower end member 36d, and an upper end member 36e.

  Each of the inner peripheral portion 36a and the outer peripheral portion 36b has a shape obtained by bending a plate member having a predetermined thickness into a cylindrical shape. The inner peripheral portion 36a and the outer peripheral portion 36b are arranged coaxially with each other. The outer peripheral part 36b surrounds the inner peripheral part 36a. The inner peripheral part 36 a and the outer peripheral part 36 b are arranged to be separated from each other by a predetermined distance in the radial direction of the cylindrical part 36. A partition member 36c is disposed at an intermediate portion of the inner peripheral portion 36a in the vertical direction X1.

  The partition member 36c is provided in order to divide the space between the inner peripheral part 36a and the outer peripheral part 36b vertically. The partition member 36c is disposed between the inner peripheral portion 36a and the outer peripheral portion 36b, and partitions the space above the partition member 36c and the space below the partition member 36c. The space partitioned by the partition member 36c, the inner peripheral portion 36a, the outer peripheral portion 36b, and the lower end member 36d constitutes the lower chamber 36f. A space partitioned by the partition member 36c, the inner peripheral portion 36a, the outer peripheral portion 36b, and the upper end member 36e constitutes the upper chamber 36g.

  Each of the upper chamber 36g and the lower chamber 36f is a portion through which the heat treatment gas passes, and is formed over the entire circumferential direction of the cylindrical portion 36. A lower end member 36d is fixed to lower end portions of the inner peripheral portion 36a and the outer peripheral portion 36b.

  The lower end member 36 d is provided as a lower end portion of the cylindrical portion 36. The lower end member 36d is formed in a flat plate shape and an annular shape. The lower end member 36d is fixed to the upper end member 26d of the column member 26 of the gantry 8, and is located on the upper end member 26d. More specifically, the outer peripheral portion of the lower end member 36 d is fixed to the upper end member 26 d of the column member 26. The lower end member 36d has gas passages 36h and 36i.

  The gas passage 36 h is formed corresponding to the fourth gas pipe 34. The gas passage 36h extends in the vertical direction X1, and is open to the upper surface of the lower end member 36d. The gas passage 36 h is connected to the upper end portion of the fourth gas pipe 34. The lower end portion of the outer peripheral portion 36b has a portion 36j in which a part of the outer peripheral portion 36b in the circumferential direction extends outward in the radial direction of the outer peripheral portion 36b, and the extended portion 36j includes a gas passage 36h. It is connected to the. Thereby, the gas from the fourth gas pipe 34 is introduced into the lower chamber 36f. On the other hand, the gas from the fifth gas pipe 35 is introduced into the upper chamber 36g through the gas passage 36i and the like.

  The gas passage 36 i is formed corresponding to the fifth gas pipe 35. The gas passage 36i extends in the up-down direction X1, and is open to the upper surface of the lower end member 36d. The gas passage 36 i is connected to the upper end portion of the fifth gas pipe 35. The gas passage 36i is connected to the bypass pipe 36k.

  The bypass pipe 36k is disposed so as to pass through the lower chamber 36f. A lower end portion of the bypass pipe 36k is connected to the gas passage 36i. The upper end portion of the bypass pipe 36k passes through the partition member 36c and is opened to the upper chamber 36g. Thereby, the gas from the fifth gas pipe 35 is not introduced into the lower chamber 36f but is introduced into the upper chamber 36g. An upper end member 36e disposed above the upper chamber 36g is supported by an inner peripheral portion 36a and an outer peripheral portion 36b.

  The upper end member 36e is provided as an upper end portion of the cylindrical portion 36. The upper end member 36e is formed in a flat plate shape and an annular shape, and is fixed to the inner peripheral portion 36a and the outer peripheral portion 36b.

  As described above, the plurality of chambers 36f and 36g are provided in the vertical direction X1, and these chambers 36f and 36g are supplied with the heat treatment gas via the different gas pipes 34 and 35. Thereby, the deviation of the gas supply amount in each chamber 36f, 36g is further reduced. The heat treatment gas is supplied from the chambers 36f and 36g to the workpiece 100 through the nozzle portions 37 and 38.

  The nozzle portions 37 and 38 are provided for supplying a heat treatment gas to the workpiece 100 held in the boat 11. The nozzle portions 37 and 38 are formed on the inner peripheral portion 36a of the cylindrical portion 36, and penetrate the inner peripheral portion 36a. The nozzle portions 37 and 38 are, for example, round hole nozzles. Note that the shapes of the nozzle portions 37 and 38 are not particularly limited as long as the heat treatment gas can be supplied toward the workpiece 100.

  The nozzle portions 37 and 38 face the space S <b> 2 surrounded by the tubular portion 36. The nozzle portion 37 is disposed below the partition member 36c. The nozzle part 37 is continuous with the lower chamber 36f, and the heat treatment gas supplied to the lower chamber 36f is processed from the nozzle part 37 to be processed 100 (space S2) held in the lower half of the boat 11. Supplied towards. Moreover, the nozzle part 38 is arrange | positioned above the partition member 36c. The nozzle part 38 is continuous with the upper chamber 36g, and the gas 100 for heat treatment supplied to the upper chamber 36g is held in the upper half of the boat 11 from the nozzle part 38 (space S2). Supplied towards.

  A plurality of nozzle portions 37 and nozzle portions 38 are provided. Specifically, a plurality of nozzle portions 37 are provided at equal intervals in the axial direction (vertical direction X1) of the cylindrical portion 36. A plurality of nozzle portions 37 are provided at equal intervals in the circumferential direction of the cylindrical portion 36. Similarly, a plurality of nozzle portions 38 are provided at equal intervals in the axial direction of the cylindrical portion 36. A plurality of nozzle portions 38 are provided at equal intervals in the circumferential direction of the cylindrical portion 36.

  The nozzle portion 37 may be formed only at one location in the axial direction of the tubular portion 36 or may be formed only at one location in the circumferential direction of the tubular portion 36. Similarly, the nozzle portion 38 may be formed only at one location in the axial direction of the tubular portion 36, or may be formed only at one location in the circumferential direction of the tubular portion 36. Further, either the nozzle part 37 or the nozzle part 38 may be omitted.

  A first end wall portion 41 and a second end wall portion 42 as a pair of end wall portions are attached to the cylindrical portion 36 having the above configuration. The first end wall portion 41 is provided as a bottom wall that closes the space S <b> 2 surrounded by the tubular portion 36 from the lower side (one side in the axial direction of the tubular portion 36). The second end wall portion 42 is provided as a ceiling wall that closes the space S2 surrounded by the tubular portion 36 from the upper side (the other in the axial direction of the tubular portion 36).

  As a result, the space S <b> 2 surrounded by the tubular portion 36 is a space closed by the tubular portion 36, the first end wall portion 41, and the second end wall portion 42. Accordingly, the heat treatment gas supplied from the nozzle portions 37 and 38 can stay in the space S2 more reliably. Therefore, the heat treatment of the workpiece 100 is more reliably and evenly performed.

  The first end wall portion 41 is disposed at the lower portion of the cylindrical portion 36. The first end wall portion 41 is formed in a disc shape and is fixed to the inner peripheral surface of the inner peripheral portion 36 a of the cylindrical portion 36. The first end wall portion 41 is supplied with a heat treatment gas from the lower chamber 36f.

  Specifically, a relay pipe 55 that connects the first end wall portion 41 and the lower chamber 36f is provided. One end of the relay pipe 55 is connected to the lower chamber 36f. The other end portion of the relay pipe 55 passes through the first end wall portion 41 and is open to the upper surface of the first end wall portion 41. The other end is opened to a space S2 surrounded by the cylindrical portion 36. With such a configuration, the nozzle portion 56 is formed on the upper surface of the first end wall portion 41.

  The nozzle portion 56 is configured to supply a heat treatment gas toward the workpiece 100 held in the boat 11. More specifically, the heat treatment gas from the lower chamber 36f is supplied to the space S2 surrounded by the cylindrical portion 36 via the relay pipe 55 and the nozzle portion 56 of the first end wall portion 41.

  The second end wall portion 42 is disposed at the upper end portion of the tubular portion 36. The 2nd end wall part 42 is formed in disk shape. An annular recess 42 a is formed on the outer periphery of the lower portion of the second end wall portion 42. The recess 42a is placed on the upper end member 36e. A plurality of positioning protrusions 42b are formed in the recess 42a.

  The positioning protrusion 42b is inserted into a positioning hole 36m formed in the upper end member 36e. Thereby, the 2nd end wall part 42 is positioned. The second end wall portion 42 is formed with an exhaust port 42 c for discharging a heat treatment gas (gas) from the space S <b> 2 surrounded by the cylindrical portion 36.

  The exhaust port 42c is disposed above the space S2 and penetrates the second end wall portion 42 up and down. A plurality of exhaust ports 42c are formed, and are arranged so that the amount of gas discharged from the space S2 is more uniform at the upper end of the space S2. The second end wall portion 42 having the above configuration is fixed to the boat 11.

  As described above, the boat 11 is provided to hold the workpiece 100 in the outer tube 4, and is displaced along the vertical direction X <b> 1 (longitudinal direction) in which the outer tube 4 extends. It is put in and out of the tube 4. The boat 11 is disposed in a space S2 surrounded by the cylindrical portion 36, the first end wall portion 41, and the second end wall portion 42, and is configured to be able to be extracted from the space S2. Yes.

  The boat 11 has a bottom portion 11a and a plurality of pillar portions 11b, 11c, and 11d.

  The bottom portion 11a is formed in a disk shape, for example, and is disposed adjacent to the first end wall portion 41. A plurality of positioning holes 11e are formed in the bottom 11a. These positioning holes 11 e are inserted into positioning protrusions 41 a provided in the first end wall portion 41, whereby the bottom portion 11 a is positioned with respect to the first end wall portion 41.

  Further, a vent 11f is formed in the bottom portion 11a. The vent 11f passes through the bottom portion 11a in the vertical direction X1, and allows the heat treatment gas from the nozzle portion 56 formed in the first end wall portion 41 to pass upward from the bottom portion 11a. The bottom part 11a supports a plurality of column parts 11b, 11c, and 11d.

  The column portions 11b, 11c, and 11d are provided as portions on which the workpiece 100 is placed. The column portions 11b, 11c, and 11d are fixed to the outer peripheral portion of the bottom portion 11a. The two column portions 11b and 11d are arranged at a pitch of 180 ° in the circumferential direction of the bottom portion 11a. In addition, one pillar portion 11c is arranged at a pitch of 90 ° in the circumferential direction of the bottom portion 11a from the two pillar portions 11b and 11d.

  By arranging the column portions 11b, 11c, and 11d in this manner, an opening portion 11g is formed at a location facing the one column 11c in the radial direction of the bottom portion 11a. The opening 11g is provided for taking the workpiece 100 into and out of the boat 11. An operator can put the workpiece 100 into and out of the boat 11 through the opening 11g.

  Each column part 11b, 11c, 11d has a plurality of holding grooves 11h. The holding groove 11h is formed inside the pillar portions 11b, 11c, and 11d, and extends in a direction (horizontal direction) orthogonal to the longitudinal direction (vertical direction X1) of the pillar portions 11b, 11c, and 11d. The holding grooves 11h of the three pillar portions 11b, 11c, and 11d receive the outer peripheral edge portion of one workpiece 100 at three locations.

  In each of the column portions 11b, 11c, and 11d, holding grooves 11h are arranged at equal intervals in the vertical direction X1. Thereby, the three pillar parts 11b, 11c, and 11d can hold | maintain these to-be-processed objects 100 in the state which arranged the some to-be-processed object 100 up and down. The upper end portions of the column portions 11b, 11c, and 11d are fixed to the second end wall portion 42. Thereby, the worker can lift the second end wall portion 42 and the boat 11 with respect to the tubular portion 36 by lifting the second end wall portion 42.

  In addition, for example, protruding line portions 11i are formed on the outer surfaces of the column portions 11b and 11d. The ridge portion 11i is a protruding portion extending in the vertical direction X1, and is fitted into a corresponding ridge portion 36n formed on the inner peripheral surface of the inner peripheral portion 36a. The concave strip portion 36n is a groove-shaped portion extending in the up-down direction X1. The boat 11 is positioned with respect to the circumferential direction of the tubular portion 36 by the combination of the protruding portion 11i and the recessed portion 36n.

  The above is the schematic configuration of the heat treatment apparatus 1. Next, an example of the operation in the heat treatment apparatus 1 will be described.

  With reference to FIGS. 1, 4, and 5, when heat treatment is performed on the workpiece 100, the closing member 14 is disposed at the closing position P <b> 1 and the second gas pipe 31 of the movable portion 28. And the bottom spacer 18 (first gas pipe 29) of the fixed portion 27 are connected. In this case, the workpiece 100 is held by the boat 11 and is surrounded by the cylindrical portion 36 in the outer tube 4. In this state, when the gas for heat treatment is supplied to the gas supply device 10, the gas for heat treatment passes from the first gas pipe 29 of the fixed part 27 through the second gas pipe 31 of the movable part 28 and further to the movable pipe. 45 and the third gas pipe 33.

  A part of the heat treatment gas sent to the third gas pipe 33 is sent to the nozzle part 37 via the fourth gas pipe 34 and the lower chamber 36f, and the like, toward the object 100 to be processed. Supplied. Further, a part of the heat treatment gas sent to the third gas pipe 33 is sent to the nozzle part 38 via the fifth gas pipe 35, the bypass pipe 36k, the upper chamber 36g, etc. , And supplied toward the workpiece 100.

  The heat treatment gas supplied to the workpiece 100 reacts with oxygen or the like on the surface of the workpiece 100, and as a result, the workpiece 100 is heat treated. The heat treatment gas supplied to the workpiece 100 is discharged from the space S2 in the cylindrical portion 36 to the outside of the space S2 through the exhaust port 42c, passes through the space radially outward of the inner tube 5, and passes through the gas. It is discharged to the discharge pipe 20.

  After the heat treatment of the workpiece 100 is completed, the closing mechanism 14 is displaced downward from the closing position P1 by operating the drive mechanism 25. Thereby, the boat 11, the movable part 28, the gantry 8, and the closing member 14 are displaced below the outer tube 4 as shown in FIG. Thereby, the connection between the bottom spacer 18 and the first gas pipe 29 of the fixed part 27 of the gas supply device 10 and the second gas pipe 31 of the movable part 28 is released. In this state, a worker (not shown) lifts the second end wall portion 42 to pull out the boat 11 from the tubular portion 36. Thereafter, the worker arranges the boat 11 holding the workpiece 100 to be heat-treated in the heat treatment apparatus 1 in the space S <b> 2 surrounded by the cylindrical portion 36.

  Next, when the heat treatment apparatus 1 performs heat treatment, the driving mechanism 25 operates to move the boat 11, the movable portion 28 such as the tubular portion 36, the gantry 8, and the closing member 14 toward the outer tube 4. The bottom end 4b of the outer tube 4 is closed again. In this state, the heat treatment operation described above is performed again.

  As described above, according to the heat treatment apparatus 1 of the present embodiment, the movable portion 28 of the gas supply apparatus 10 can move along with the boat 11 along the longitudinal direction (vertical direction X1) of the outer tube 4. That is, when the boat 11 is taken in and out of the outer tube 4, the nozzle portions 37 and 38 of the movable portion 28 are displaced with respect to the outer tube 4 together with the boat 11 and the workpiece 100 held by the boat 11. To do. Therefore, when the boat 11 and the object to be processed 100 are put in and out of the outer tube 4, the relative movement between the nozzle portions 37 and 38 and the boat 11 (the object to be processed 100) does not occur. 11 and the workpiece 100 can be arranged very close to each other. Depending on the above, the heat treatment apparatus 1 can arrange the nozzle portions 37 and 38 for supplying the heat treatment gas to the object to be processed 100 closer to the object to be processed 100.

  Further, according to the heat treatment apparatus 1, the closing member 14 is positioned at the closing position P <b> 1 for closing the lower end portion 4 b of the outer tube 4, whereby the second gas pipe 31 of the movable portion 28 and the first gas of the fixed portion 27. The pipe 29 (the lower surface of the bottom spacer 18) is connected, and the closing member 14 is displaced from the closing position P1, whereby the second gas pipe 31 of the movable part 28 and the first gas pipe 29 of the fixed part 27 are connected. Canceled. According to this configuration, when the boat 11 and the object to be processed 100 are in the state of being taken out from the outer tube 4, that is, when the closing member 14 is displaced from the closing position P1, the second gas pipe of the movable portion 28 is used. 31 is disconnected from the first gas pipe 29 of the fixed portion 27. Accordingly, it is possible to supply the heat treatment gas from the lower side to the gantry 8 to the inside of the boat 11 through the gas pipes 33 to 35 and the like, and the boat 11 and the like can be raised and lowered with respect to the outer tube 4 without any trouble. . As described above, the first gas pipe 29 of the fixed portion 27 and the third gas pipe 33 of the movable portion 28 can be separated. As a result, when the boat 11 is discharged from the outer tube 4, the third gas pipe 33 and the like are closed. The work to remove from becomes unnecessary.

  Further, according to the heat treatment apparatus 1, the O-ring 43 of the gas supply apparatus 10 is disposed between the opposed portions of the bottom spacer 18 of the fixing portion 27 and the second gas pipe 31. According to this configuration, since the closing member 14 is disposed at the closing position P1, the space between the bottom spacer 18 of the fixed portion 27 and the second gas pipe 31 is hermetically sealed. As a result, the heat treatment gas can be supplied from the fixed portion 27 to the movable portion 28 without leakage.

  Further, according to the heat treatment apparatus 1, the gas supply apparatus 10 includes the pressurizing mechanism 32 for adjusting the pressurizing force that pressurizes the second gas pipe 31 toward the bottom spacer 18 of the fixed portion 27. According to this configuration, the tightening amount of the O-ring 43 between the bottom spacer 18 of the fixed portion 27 and the second gas pipe 31 can be adjusted to an appropriate value. Thereby, the airtightness between the bottom spacer 18 of the fixed portion 27 and the second gas pipe 31 can be more reliably increased.

  Further, according to the heat treatment apparatus 1, the pressurizing force adjusting mechanism 32 adjusts the pressurizing force by adjusting the position of the second gas pipe 31. According to this configuration, the pressurizing force adjustment mechanism 32 is a simple configuration in which the position of the second gas pipe 31 is adjusted, and the airtightness between the bottom spacer 18 of the fixed portion 27 and the second gas pipe 31 is further improved. It can certainly be increased.

  Further, according to the heat treatment apparatus 1, the cylindrical portion 36 is disposed so as to surround the workpiece 100 held by the boat 11. Then, gas for heat treatment is supplied from the nozzle portions 37 and 38 provided in the cylindrical portion 36 toward the workpiece 100. With such a configuration, the distance between the nozzle portions 37 and 38 and the workpiece 100 can be further reduced. Therefore, the heat treatment apparatus 1 can more reliably supply the heat treatment gas to the workpiece 100 before the heat treatment gas causes a reaction. In addition, the object to be processed 100 held by the boat 11 is arranged in the space S2 surrounded by the cylindrical portion 36. For this reason, the heat treatment gas supplied from the nozzle portions 37 and 38 toward the workpiece 100 can stay in the space S <b> 2 in the cylindrical portion 36. Therefore, the concentration of the heat treatment gas in the space S2 surrounded by the cylindrical portion 36 is kept high. As a result, the heat treatment apparatus 1 can supply the heat treatment gas to the workpiece 100 in a state where the concentration of the heat treatment gas is high. As described above, in the heat treatment apparatus 1, the heat treatment gas can be more reliably supplied to the object to be treated 100 before the heat treatment gas reacts, and the heat treatment gas is used in the state where the concentration of the heat treatment gas is high. A gas can be supplied to the workpiece 100.

  Further, according to the heat treatment apparatus 1, the nozzle portions 37 and 38 are formed at a plurality of locations with respect to at least one of the axial direction and the circumferential direction of the cylindrical portion 36. According to this configuration, the concentration of the heat treatment gas in the space S2 in the cylindrical portion 36 can be made more uniform. As a result, the heat treatment apparatus 1 can heat the workpiece 100 more evenly.

  Further, according to the heat treatment apparatus 1, the heat treatment gas is temporarily stored in the chambers 36f and 36g. Thereby, it can suppress that a pulsation etc. arise in the gas for heat processing injected from the nozzle parts 37 and 38. FIG. As a result, the heat treatment apparatus 1 can supply the heat treatment gas to the workpiece 100 in a more stable manner.

  Further, according to the heat treatment apparatus 1, the first end wall portion 41 of the movable portion 28 has the nozzle portion 56 for supplying the heat treatment gas toward the workpiece 100 held by the boat 11. According to this configuration, the heat treatment gas can be supplied more evenly toward the workpiece 100 surrounded by the cylindrical portion 36.

  Further, according to the heat treatment apparatus 1, the second end wall portion 42 of the movable portion 28 has the exhaust port 42 c for discharging the gas in the cylindrical portion 36. According to this configuration, the heat treatment gas after the reaction action can be smoothly discharged from the space S <b> 2 surrounded by the cylindrical portion 36.

Second Embodiment
FIG. 7 is a side view of the second embodiment of the present invention, and a part thereof is shown in cross section. FIG. 8 is an enlarged view of a main part of the second embodiment of the present invention. In the following, differences from the first embodiment will be mainly described, and the same components as those in the first embodiment will be denoted by the same reference numerals and description thereof will be omitted.

  Referring to FIGS. 7 and 8, the configuration of heat treatment apparatus 1 </ b> A differs from the configuration of heat treatment apparatus 1 mainly as follows. That is, (1) the heat treatment apparatus 1A does not have the cylindrical portion 36, the first end wall portion 41, and the second end wall portion 42, and (2) the boat 11 serves as the upper end member 26dA of the gantry 8. (3) The heat treatment gas from the gas supply device 10A is supplied to the workpiece 100 without going through the cylindrical portion 36.

  More specifically, the upper end member 26dA of the gantry 8 is formed in a disk shape, and the bottom 11a of the boat 11 is placed on the upper surface at the center of the upper end member 26dA. The positioning hole 11e of the bottom portion 11a is fitted in a positioning projection 61 provided on the upper end member 26dA.

  Further, the heat treatment gas in the fourth gas pipe 34 and the heat treatment gas in the fifth gas pipe 35 are released from the gas supply device 10A on the upper surface of the outer peripheral portion of the upper end member 26dA and directed toward the object 100 to be processed. Flowing.

  In this embodiment, the heat treatment gas has been described as an example in which the gas for heat treatment is injected from the fourth gas pipe 34 or the fifth gas pipe 35 toward the workpiece 100 outside the gas supply apparatus 10A. However, this need not be the case. For example, the fourth gas pipe 34 and the fifth gas pipe 35 may be omitted. In this case, the heat treatment gas in the gas supply device 10 </ b> A is discharged from the second end portion 33 b or the third end portion 33 c of the third gas pipe 33 to the outside of the gas supply device 10 </ b> A and supplied to the workpiece 100. . Even in this case, the inner tube 5 is provided, so that the heat treatment gas is guided toward the workpiece 100 more smoothly.

  As mentioned above, although embodiment of this invention was described, this invention is not limited to the above-mentioned embodiment. The present invention can be variously modified as long as it is described in the claims.

  The present invention can be widely applied as a heat treatment apparatus.

1,1A Heat treatment equipment 4 Tube 4a Upper end (one end of the tube)
4b Lower end (the other end of the tube)
DESCRIPTION OF SYMBOLS 10,10A Gas supply apparatus 11 Boat 14 Closing member 27 Fixed part 28 Movable part 31 2nd gas pipe (connection end part)
31a Flange (connection end)
32 Pressure adjustment mechanism (displacement mechanism)
36 cylindrical part 36a inner peripheral part 36b outer peripheral part 36f, 36g chamber 37, 38 nozzle part 43 O-ring (seal member)
100 Workpiece P1 Blocking position X1 Vertical direction (longitudinal direction)

(1) In order to solve the above problems, a heat treatment apparatus according to an aspect of the present invention is provided to hold a tube having a shape in which one end is closed and the other end is opened, and an object to be processed. A boat that is displaced in and out of the tube by being displaced along the longitudinal direction of the tube, and is configured to be able to move along with the boat in the longitudinal direction, and the boat is disposed in the tube A closing member for closing the other end of the tube, and a gas supply device for supplying a heat treatment gas to the object to be processed in the tube, wherein the gas supply device includes the closing member wherein the said longitudinal direction to allow bank moving movable portion, a fixed portion having a first gas pipe for feeding the heat treatment gas to the movable part, closing the other end of the tube The movable member and the fixed portion are connected when the closing member is located at the closed position for connecting, and the movable portion and the fixed portion are connected when the closing member is displaced from the closed position. Is released, and the movable portion is configured to be supplied with the heat treatment gas from the first gas pipe when the closing member is disposed at the closing position, and connected to the fixed portion. A second gas pipe, a pressurizing pressure adjusting mechanism for adjusting the pressurizing force to pressurize the second gas pipe toward the fixed portion, and the heat treatment gas passing through the second gas pipe. a nozzle for supplying the treatment product only contains, further comprising a seal member disposed between the opposed portions of each other the second gas pipe and the fixing unit, the pressure adjusting mechanism, the first The heat treatment gas from two gas pipes A movable tube configured to feed toward the slip portion and screw-coupled to the second gas pipe and supported by the closing member; and adjusting a screw coupling amount of the second gas pipe to the movable tube Accordingly, the pressure is Ru is adjusted.

Further , when the boat and the object to be processed are taken out of the tube, that is, when the closing member is displaced from the closing position, the connection between the movable portion and the fixed portion is released. Accordingly, for example, the heat treatment gas can be supplied from the outside of the boat to the inside of the boat through the movable portion, and the boat or the like can be raised and lowered with respect to the tube without any trouble. As described above, as a result of the separation of the fixed portion and the movable portion, the operation of removing the movable portion and the like from the closing member is not required when the boat is discharged from the tube.

Furthermore , since the closing member is arranged at the closing position, the space between the fixed portion and the second gas pipe is hermetically sealed by the sealing member . Thereby, it becomes possible to supply the heat treatment gas from the fixed part to the movable part without leakage.

Furthermore, since a pressurizing mechanism for adjusting the pressurizing force that pressurizes the second gas pipe toward the fixed portion is provided , the tightening amount of the seal member between the fixed portion and the second gas pipe is appropriately set. Can be adjusted to any value. Thereby, the airtightness between a fixing | fixed part and a 2nd gas pipe can be improved more reliably.

Furthermore , the airtightness between the fixed portion and the second gas pipe can be more reliably increased with a simple configuration in which the position of the second gas pipe is adjusted.
(2) Preferably, the pressurizing force adjusting mechanism is a base tube fixed to the closing member, and a fastening for connecting the movable tube to the base tube by screw connection in such a manner that the relative position can be adjusted in the axial direction. And a member.

( 3 ) Preferably, the movable portion further includes a cylindrical portion configured to surround the boat, and the nozzle portion is formed in the cylindrical portion, and is held by the boat. It is configured to supply the heat treatment gas toward the object to be treated.

( 4 ) More preferably, the said nozzle part is formed in multiple places regarding at least one of the axial direction of the said cylindrical part, and the circumferential direction.

( 5 ) Preferably, the cylindrical part is formed between an inner peripheral part provided with the nozzle part, an outer peripheral part surrounding the inner peripheral part, and the inner peripheral part and the outer peripheral part. A chamber for passing through.

Claims (8)

A tube having a shape with one end closed and the other end open;
A boat that is provided to hold an object to be processed, and is displaced along the longitudinal direction of the tube, and is taken in and out of the tube;
A closing member configured to be able to move along with the boat in the longitudinal direction, and closing the other end of the tube in a state where the boat is disposed in the tube,
A gas supply device for supplying a heat treatment gas to the object to be processed in the tube,
The gas supply device includes a movable portion that can move in the longitudinal direction with the closing member,
The heat treatment apparatus, wherein the movable part includes a nozzle part for supplying the heat treatment gas to the workpiece. The heat treatment apparatus according to claim 1,
The gas supply device further includes a fixed part for sending the heat treatment gas to the movable part,
The movable member and the fixed portion are connected by the closing member being positioned at the closing position for closing the other end of the tube,
The heat treatment apparatus is characterized in that the connection between the movable portion and the fixed portion is released when the closing member is displaced from the closing position. The heat treatment apparatus according to claim 2,
The movable part has a connection end connected to the fixed part when the closing member is disposed at the closed position;
The gas supply apparatus further includes a seal member disposed between opposing portions of the fixed portion and the connection end portion. The heat treatment apparatus according to claim 3,
The said gas supply apparatus further has a pressurization adjustment mechanism for adjusting the pressurization force which pressurizes the said connection edge part toward the said fixing | fixed part, The heat processing apparatus characterized by the above-mentioned. The heat treatment apparatus according to claim 4,
The heat treatment apparatus has a displacement mechanism for displacing the connection end, and adjusts the pressure by adjusting the position of the connection end. . The heat treatment apparatus according to any one of claims 1 to 5,
The movable part further includes a cylindrical part configured to surround the boat,
The nozzle part is formed in the cylindrical part, It is comprised so that the gas for heat processing may be supplied toward the said to-be-processed object hold | maintained at the said boat, The heat processing apparatus characterized by the above-mentioned. The heat treatment apparatus according to claim 6,
The said nozzle part is formed in multiple places regarding at least one of the axial direction of the said cylindrical part, and the circumferential direction, The heat processing apparatus characterized by the above-mentioned. The heat treatment apparatus according to claim 6 or 7,
The cylindrical portion includes an inner peripheral portion provided with the nozzle portion, an outer peripheral portion surrounding the inner peripheral portion, a chamber formed between the inner peripheral portion and the outer peripheral portion and through which the gas for heat treatment passes. The heat processing apparatus characterized by including.

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