JP2017122616A - Sensor inspecting method and sensor manufacturing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a sensor inspecting method capable of simply and reliably inspecting presence or absence of gas leakage from a measurement chamber for storing a sensor element to the inside a casing member, and to provide a sensor manufacturing method.SOLUTION: An inspection method of a sensor 100 includes: a casing member 10 including a measurement chamber 15 communicating with atmosphere to be detected via a gas introduction port 12h; and a sensor element 60 that is stored inside the measurement chamber and detects predetermined characteristics of the atmosphere to be detected. The measurement chamber is formed while being separated from the inside of the casing member by bottomed cylindrical wall surfaces 12, 30a, 40 in which a side of the gas introduction port is open, and is composed of an annular elastic seal body 40 in which one portion of a cylindrical part on the wall surfaces is compressed. An air hole 80 for allowing the inside and outside of the casing member to communicate each other is provided in the casing member excluding the measurement chamber. When inspection gas G2 at a predetermined flow rate flows from the gas introduction port toward the inside of the measurement chamber, presence or absence of gas leakage from the measurement chamber to the inside of the casing member is inspected based on the flow rate.SELECTED DRAWING: Figure 4

Description

  The present invention relates to a sensor inspection method and a sensor manufacturing method for detecting predetermined characteristics such as gas concentration, temperature, and humidity of a specific component in an atmosphere to be detected.

  In recent years, research on fuel cells has been actively conducted as a highly efficient and clean energy source in response to social demands such as environmental protection and nature protection. In particular, polymer electrolyte fuel cells (PEFC) and hydrogen internal combustion engines that operate at a low temperature and have a high output and a high density are expected for home use and in-vehicle use. However, since these energy sources use hydrogen as a fuel, a sensor for detecting the presence or absence of hydrogen leakage is required.

As a sensor for detecting the concentration of a flammable gas such as hydrogen, a configuration has been developed in which a sensor element is arranged on a circuit board and the circuit board is housed in a resin housing case (casing member) (Patent Document 1). reference). In this sensor, the space between the circuit board and the casing member is hermetically sealed with an annular elastic sealing body made of foamed rubber, and an internal space (measurement chamber) for introducing the detected atmosphere from a gas inlet opening that opens to the casing member is provided. Forming. And the density | concentration of combustible gas is detected with the sensor element accommodated in the inside of a measurement chamber.
The elastic seal body is compressed between the circuit board and the casing member to be in close contact with the circuit board and the casing member, and the measurement chamber is isolated from the inside of the casing member.

US Patent Application Publication No. US2015 / 0143901

However, if the elastic seal body is not attached, the gas in the detected atmosphere introduced into the measurement chamber leaks into the casing member. In addition, when the elastic seal body is not compressed sufficiently, for example, by being attached obliquely, a gap is generated between the elastic seal body and the circuit board or the casing member. In this case also, the gas in the detected atmosphere leaks into the casing member. Sometimes. In these cases, the sensor element inside the measurement chamber is not sufficiently exposed to the atmosphere to be detected or the atmosphere to be detected in the measurement chamber is not sufficiently replaced, so that the gas concentration detection accuracy and responsiveness are reduced. There is a fear.
Further, even when a crack is generated in a part of the circuit board or casing member constituting the measurement chamber, the gas in the detected atmosphere leaks from the measurement chamber into the casing member.

  On the other hand, a defect inspection method using X-rays has been widely known. However, there are problems that the apparatus is expensive and large, and it takes time to analyze the acquired X-ray image. Further, if the defect is a clear defect such as forgetting to attach the elastic seal body or a crack in the circuit board and the casing member, it can be judged from the X-ray image. However, when a slight gap is generated between the circuit board and the casing member due to poor compression of the elastic seal body, it is difficult to determine the gap from the X-ray image. Furthermore, it is difficult to determine from the X-ray image a defect of the elastic seal body itself (for example, a manufacturing defect such that the air permeability is greater than the design value).

  SUMMARY OF THE INVENTION An object of the present invention is to provide a sensor inspection method and a sensor manufacturing method capable of simply and reliably inspecting the presence or absence of gas leakage from a measurement chamber containing a sensor element to the inside of a casing member.

In order to solve the above-described problems, a sensor inspection method according to the present invention includes a casing member having a measurement chamber that communicates with a detected atmosphere via a gas introduction port, and a casing member that is housed in the measurement chamber and that is in the detected atmosphere. A sensor inspection method comprising a sensor element for detecting a predetermined characteristic, wherein the measurement chamber is formed to be isolated from the inside of the casing member by a bottomed cylindrical wall surface that opens on the gas inlet side. And a part of the cylindrical portion of the wall surface is formed of a compressed annular elastic seal body, and an air hole communicating with the inside and outside of the casing member is provided in the casing member excluding the measurement chamber, and the gas When a predetermined flow rate of inspection gas flows from the inlet toward the inside of the measurement chamber, the presence or absence of gas leakage from the measurement chamber to the inside of the casing member is inspected based on the flow rate.
According to this sensor inspection method, the inspection apparatus is simple, and the flow rate of the inspection gas that directly reflects the gas leakage is detected. Therefore, the presence or absence of gas leakage from the measurement chamber to the inside of the casing member can be easily and easily detected. Can be inspected reliably.

The sensor manufacturing method of the present invention includes a casing member having a measurement chamber that communicates with a detected atmosphere via a gas inlet, and a sensor that is housed in the measurement chamber and detects a predetermined characteristic of the detected atmosphere. A sensor manufacturing method comprising an element, wherein the measurement chamber is formed by being separated from the inside of the casing member by a bottomed cylindrical wall surface that opens on the gas inlet side, and a cylindrical portion of the wall surface Is formed of a compressed annular elastic seal body, and air holes communicating with the inside and outside of the casing member are provided in the casing member excluding the measurement chamber, and from the gas inlet to the measurement chamber When a predetermined flow rate of inspection gas flows toward the inside, the presence or absence of gas leakage from the measurement chamber into the casing member is inspected based on the flow rate.
According to this sensor manufacturing method, since the inspection apparatus is simple and detects the flow rate of the inspection gas that directly reflects the gas leakage, the presence or absence of gas leakage from the measurement chamber to the inside of the casing member was inspected. The sensor can be easily manufactured.

  According to this invention, the presence or absence of gas leakage from the measurement chamber that houses the sensor element to the inside of the casing member can be easily and reliably inspected. Further, it is possible to easily manufacture a sensor inspected for gas leakage from the measurement chamber into the casing member.

1 is a perspective view of a sensor to which a sensor inspection method according to an embodiment of the present invention is applied. It is sectional drawing which follows the AA line of FIG. It is a disassembled perspective view of a sensor. It is a figure which shows the test | inspection method of the sensor which concerns on embodiment of this invention.

Hereinafter, embodiments of the present invention will be described.
1 is a perspective view of a sensor 100 to which a sensor inspection method according to an embodiment of the present invention is applied, FIG. 2 is a cross-sectional view taken along line AA in FIG. 1, and FIG. 3 is an exploded perspective view of the sensor 100. is there. In the following description, “upper surface” and “lower surface” are defined according to the vertical direction of FIGS.

As shown in FIG. 1, the sensor 100 includes a substantially rectangular box-shaped casing member 10 formed of plastic or the like. The casing member 10 includes a casing main body portion 11 and a substantially flat upper surface plate 12 that closes an upper surface opening 11 a (see FIG. 3) of the casing main body portion 11.
Flange portions 11b extend outward from the center portions of the two long sides of the casing main body portion 11, and bolt holes 11h are opened at the centers of the flange portions 11b. Then, a bolt (not shown) inserted through the bolt hole 11h is screwed to an attachment target body (for example, a predetermined part of the vehicle) of the sensor 100, so that the sensor 100 is attached to the attachment target body. Further, a cylindrical connector portion 11c for inputting / outputting signals to / from the outside extends from one short side of the casing main body portion 11 toward the outside.

On the other hand, the annular member 12a protrudes upward from the center portion of the upper surface plate 12, and a gas introduction port 12h is opened inside the annular member 12a, and the detected atmosphere is inside and outside of the casing member 10 through the gas introduction port 12h. It has come to circulate. As shown in FIG. 2, the upper surface plate 12 including the annular member 12 a is insert-molded around the annular upper mesh presser 21 and the lower mesh presser 22 in detail, and inside the upper mesh presser 21 and the lower mesh presser 22. The opening is a gas inlet 12h. Further, a metal mesh 20 is sandwiched between the upper mesh presser 21 and the lower mesh presser 22, and the metal mesh 20 covers the gas inlet 12h. Further, a water repellent filter 25 is disposed below the wire mesh 20 and on the lower surface of the lower mesh presser 22 so as to cover the gas inlet 12h, so that water enters the sensor 100 from the gas inlet 12h. It is preventing. The water repellent filter 25 may be disposed on the upper side of the metal mesh 20 (for example, the upper surface of the upper mesh presser 21) so as to cover the gas inlet 12h.
The sensor 100 is a hydrogen gas sensor that measures the hydrogen concentration in the atmosphere to be detected. In addition, the wire mesh 20 has a flame that is generated even when the temperature of the sensor element 60 (see FIGS. 2 and 3) disposed inside the casing member 10 rises above the ignition temperature of hydrogen gas and ignites. This is a flame arrester having an explosion-proof function for preventing the member 10 from going outside. However, for example, when the sensor 100 is a temperature sensor or the like, the explosion proof function is unnecessary, and therefore the wire mesh 20 need not be provided.

As shown in FIGS. 2 and 3, the sensor 100 includes a sensor element 60, a circuit board 30, and the above-described casing member 10 that houses the sensor element 60 and the circuit board 30. A sensor element 60 is mounted (mounted) on an upper surface (element mounting surface) 30a of the circuit board 30 via a rectangular pedestal 35 described later. On the other hand, a plurality of leg portions 11p that contact the lower surface of the circuit board 30 (the surface opposite to the element mounting surface 30a) protrudes upward in the casing main body 11, and the circuit board is disposed inside the casing main body 11. 30 is positioned. When the circuit board 30 is accommodated in the casing main body 11 and the upper surface plate 12 is fitted to the inner edge of the upper surface opening 11a of the casing main body portion 11, the elastic sealing body 40 bonded to the lower surface of the upper surface plate 12 as will be described later. Presses the element mounting surface 30 a of the circuit board 30 to fix the circuit board 30. At this time, the sensor element 60 faces the gas inlet 12h.
The top plate 12 is fixed to the casing body 11 by an adhesive, welding, or the like. Thereby, the fitting part of the upper surface board 12 and the casing main-body part 11 is closely_contact | adhered, and the airtight in a fitting part is hold | maintained. Further, the protrusion 12 p serves as a guide when the upper surface plate 12 is disposed in the upper surface opening 11 a and does not contact the element mounting surface 30 a of the circuit board 30.

A microcomputer for controlling the sensor element 60 and various electronic components (not shown) are mounted on the circuit board 30 by soldering or the like. In addition, a plurality (three in this example) of wiring portions 31a to 31c for electrical connection with the sensor element 60 are formed on the circuit board 30, and through ends are provided on one end sides of the wiring portions 31a to 31c. A hole 31h is formed. The four through holes 31h are respectively provided at the positions of the four corners of the rectangle. Pin-shaped connection terminals 72 are inserted into the respective through holes 31h, and the respective connection terminals 72 project upward from the element mounting surface 30a from the respective through holes 31h. A pedestal 35 is disposed above the element mounting surface 30 a of the circuit board 30, and the protruding portions of the connection terminals 72 support the pedestal 35 in a state of being separated from the circuit board 30 while passing through the four corners of the pedestal 35. ing. Further, the sensor element 60 is placed at the center of the upper surface of the pedestal 35 (the surface facing the gas introduction port 12 h), and the upper end of each connection terminal 72 surrounds the sensor element 60 while protruding upward from the upper surface of the pedestal 35. Yes. On the other hand, a plurality of (four in this example) electrodes are formed on the surface of the sensor element 60 (not shown), and each electrode is connected to a connection terminal 72 protruding from the upper surface of the pedestal 35 via a bonding wire 66. Connected. Each connection terminal 72 is inserted into each through hole 31 h and soldered, and the sensor element 60 is mounted on the circuit board 30. Note that two through holes 31h are formed in the wiring portion 31c which is a common ground wiring, and electrodes 63b and 65b which are ground electrodes are inserted into the two through holes 31h via the connection terminals 72.
Furthermore, on one short side of the circuit board 30, a plurality of (three in this example) through-holes 32 that are electrically connected to the respective wiring portions 31a to 31c are formed. One end of each of the three male connector pins 71 accommodated in the connector portion 11c is inserted into the through hole 32 and soldered.

  The connector portion 11 c extends outward from the side wall of the casing body portion 11, and the male connector pin 71 is insert-molded on the side wall of the casing body portion 11. The side wall is provided with an air hole 80 that communicates the inside and outside of the casing body (casing member) 11. The air hole 80 suppresses thermal expansion or the like of the casing member 10.

On the other hand, an annular gas guide wall 12b surrounding the outer periphery of the gas inlet 12h protrudes downward from the lower surface of the upper surface plate 12. An annular elastic sealing body 40 made of foamed rubber is interposed between the gas guide wall 12b and the element mounting surface 30a of the circuit board 30. The upper surface (end surface facing the casing member) 40a and the lower surface (end surface facing the element mounting surface) 40b of the elastic seal body 40 are flat, and the upper surface 40a is in close contact with the gas guide wall 12b via the adhesive layer 50. The lower surface 40b is in close contact with the element mounting surface 30a. The inner diameter of the elastic seal body 40 is the same as the inner diameter of the gas guide wall 12b, and is disposed so as to overlap the gas guide wall 12b. The elastic seal body 40 has a rectangular cross section.
A measurement chamber in which the inner space of the casing member 10 surrounded by the element mounting surface 30a, the inner surface of the top plate 12 and the inner surface of the elastic seal body 40 communicates with the detected atmosphere while facing the sensor element 60. 15, and the hydrogen gas concentration in the atmosphere to be detected in the measurement chamber 15 is detected by the sensor element 60.

  The element mounting surface 30 a, the upper surface plate 12, and the elastic seal body 40 correspond to “wall surface” in the claims, and the measurement chamber in which the bottomed cylindrical wall surface is isolated from the inside of the casing member 10. 15 is formed.

Here, as shown in FIG. 3, the lower surface 40b of the elastic seal body 40 is in close contact with the annular region 30R of the element mounting surface 30a, and the annular region 30R straddles the wiring portions 31a to 31c. The elastic seal body 40 is made of a flexible foam rubber, and at least a part of the lower surface 40b is flat, so that it comes into surface contact with the annular region 30R. As a result, even if there is unevenness due to the wiring portions 31a to 31c in the close contact portion (annular region 30R) with the element mounting surface 30a, the lower surface 40b can be in close contact with the element mounting surface 30a, and the sealing is ensured.
Further, since the elastic sealing body 40 is made of flexible foam rubber, a sufficient seal can be obtained even when pressed against the circuit board 30 with a lower pressure than the O-ring, and the stress (deflection) applied to the circuit board 30 is reduced. The As a result, the wiring part formed on the circuit board 30 is prevented from being disconnected, and the solder parts such as electronic components and metal fittings (male connector pins 71, connection terminals 72) soldered to the circuit board 30 are prevented from being disconnected. Is done.
Furthermore, since a sufficient seal can be obtained without pressing the elastic seal body 40 against the circuit board 30 with high pressure, the casing member 10 (upper surface plate 12) and the circuit board 30 are firmly fixed via the elastic seal body 40. Not. As a result, even if an impact is applied to the casing member 10 (upper surface plate 12) from the outside or the casing member 10 is thermally expanded, the stress is absorbed by the elastic seal body 40 being displaced, etc. Since it is less likely to be directly applied to 30, disconnection of the above-described wiring portion and solder portion is further suppressed.

In addition, as a foaming rubber which comprises the elastic seal body 40, ethylene propylene rubber (EPDM), urethane rubber, etc. are illustrated. Further, if the elastic seal body 40 is compressed too much at a high pressure, the flexibility is impaired. Therefore, the elastic seal body 40 is pressed (compressed) in a compression rate lower than the porosity (bubble ratio) of the foam rubber constituting the elastic seal body 40, that is, in a state where all of the pores of the foam rubber are not completely crushed. There is a need.
In addition, when the foamed rubber bubbles constituting the elastic seal body 40 are independent (the bubbles are not connected to each other and exist independently), the gas as the detected atmosphere passes through the foamed rubber bubbles to the outside. This is preferable because the sealing property is improved.
In the present embodiment, the elastic seal body 40 is bonded to the casing member (the gas guide wall 12b of the upper surface plate 12), and the inner and outer surfaces of the elastic seal body 40 are exposed.

Next, a sensor inspection method according to an embodiment of the present invention will be described with reference to FIG.
In FIG. 4, the sensor inspection apparatus 200 includes a substrate 202 on which the sensor 100 is installed, a gas pipe 204 through which the inspection gas flows, a flow meter 206 that measures the flow rate of the inspection gas through the gas pipe 204, and a gas pipe 204. A pressure gauge 208 for measuring the pressure of the flowing inspection gas and a regulator 210 for reducing the pressure of the primary gas G1 introduced from the upstream side of the gas pipe 204 to about 10 kPa are provided. The pressure gauge 208 and the flow meter 206 are connected to the gas pipe 204 on the downstream side of the regulator 210 in this order, and can measure the pressure and flow rate of the test gas G2 stepped down by the regulator 210. For example, air can be used as the primary gas G1 (inspection gas G2).
The substrate 202 has a disk-shaped recess 202r, and the recess 202r accommodates the annular member 12a of the sensor 100 turned upside down. A plurality of positioning members 202a protrude from the upper surface of the substrate 202, and the sensor 100 that is turned upside down is placed and positioned inside the positioning member 202a.

  The downstream end of the gas pipe 204 is attached to the central opening of the recess 202r, and an O-ring (not shown) is attached to the upper surface around the central opening. As described above, when the annular member 12a is accommodated in the recess 202r, the inspection gas G2 is supplied from the gas pipe 204 to the gas introduction port in a state where the O-ring is tightly sealed around the gas introduction port 12h of the annular member 12a. Introduced at 12h.

In this way, the inspection gas G2 having a predetermined flow rate (for example, 5.5 L / min) is caused to flow from the gas inlet 12h toward the inside of the measurement chamber 15. At this time, if there is no defect such as a gap or a crack in the wall surface (element mounting surface 30a, upper surface plate 12, elastic seal body 40) forming the measurement chamber 15, the inspection gas G2 introduced into the measurement chamber 15 is the casing member 10. Therefore, the flow rate of the flow meter 206 decreases.
On the other hand, when the wall surface has a defect such as a gap or a crack, the inspection gas G2 introduced into the measurement chamber 15 leaks into the casing member 10 as a leakage gas G3, and this leakage gas G3 passes through the air hole 80 and is casing. It flows out of the member 10. For this reason, the flow rate of the flow meter 206 is increased as compared with the case where the wall surface has no defects such as gaps and cracks.
That is, based on the flow rate of the inspection gas G2, the presence or absence of gas leakage from the measurement chamber 15 into the casing member 10 can be inspected. Here, since the inspection apparatus 200 is simple and detects the flow rate of the inspection gas that directly reflects the gas leakage, the presence or absence of the gas leakage can be easily and reliably inspected. Furthermore, since the change in the flow rate of the inspection gas G2 occurs in a relatively short time (about 10 seconds), the presence or absence of gas leakage can be inspected in a short time.

When inspecting the presence or absence of gas leakage, a sensor having a wall surface free of defects such as gaps and cracks is prepared in advance, the flow rate of the inspection gas G2 introduced into the measurement chamber 15 at that time is measured, and a threshold value is measured. Keep it as Then, in the actual inspection, when the flow rate of the inspection gas G2 is larger than the threshold value, it is considered that the wall surface has a defect such as a gap or a crack, and the corresponding sensor may be discarded.
Even when a defect such as a gap or a crack is generated on the wall surface, the type of the defect can be determined based on the flow rate by classifying the flow rate of the inspection gas G2 according to the defect. For example, (1) Forgetting to attach the elastic seal body or large cracks in the circuit board and casing member, the gas leakage also increases, so that the flow rate of the inspection gas G2 is maximized. (2) Compression of the elastic seal body When a slight gap is generated between the circuit board and the casing member due to a defect, the gas leakage is small, and the flow rate of the inspection gas G2 is smaller than (1).
Therefore, by measuring the flow rate of the inspection gas G2 when the defect corresponding to (1) occurs and setting it as the second threshold value, the flow rate of the inspection gas G2 is larger than the second threshold value in the actual inspection. If this occurs, it can be considered that the defect (1) has occurred, and can be used for finding troubles in the production line of the sensor, finding out whether there is a defect in the delivered elastic seal body 40, or the like.

  In the sensor manufacturing method according to the embodiment of the present invention, the above-described inspection is performed on the manufactured sensor, and the sensor determined to have no gas leakage can be shipped as a final product.

It goes without saying that the present invention is not limited to the above-described embodiment, but extends to various modifications and equivalents included in the spirit and scope of the present invention.
For example, in the above-described embodiment, a hydrogen gas sensor that is one type of gas sensor is illustrated as the sensor 100. However, a combustible gas sensor using an oxide semiconductor, a heating resistor, or a heat conduction element may be used. The sensor 100 is not limited to a gas sensor, and may be another sensor such as a temperature sensor or a humidity sensor.
Further, the shape of the elastic seal body 40 is not limited to the above embodiment. In the above-described embodiment, the elastic seal body 40 has an annular shape, but is not limited thereto, and may be a polygonal ring shape such as a rectangle. The configuration and shape of the wall surface forming the measurement chamber 15 is not limited to the method of the above embodiment.

  Furthermore, the method and apparatus for introducing the inspection gas G2 into the gas inlet 12h is not limited to the method of the above embodiment.

10 Casing member 12 Wall surface (top plate)
12h Gas inlet 15 Measurement chamber 30a Wall surface (element mounting surface)
40 Wall surface (elastic seal body)
60 Sensor element 80 Air hole 100 Sensor G2 Inspection gas

Claims (2)

A sensor inspection method comprising a casing member having a measurement chamber communicating with a detected atmosphere through a gas inlet, and a sensor element housed in the measurement chamber and detecting a predetermined characteristic of the detected atmosphere Because
The measurement chamber is an annular elastic seal body formed by being isolated from the inside of the casing member by a bottomed cylindrical wall surface that opens on the gas inlet side, and a part of the cylindrical portion of the wall surface is compressed. Configured,
An air hole communicating with the inside and outside of the casing member is provided in the casing member excluding the measurement chamber,
Inspection of a sensor for inspecting the presence or absence of gas leakage from the measurement chamber to the inside of the casing member based on the flow rate when a predetermined flow rate of inspection gas flows from the gas inlet toward the inside of the measurement chamber Method. A method for manufacturing a sensor, comprising: a casing member having a measurement chamber communicating with a detected atmosphere through a gas inlet; and a sensor element housed in the measurement chamber and detecting a predetermined characteristic of the detected atmosphere Because
The measurement chamber is an annular elastic seal body formed by being isolated from the inside of the casing member by a bottomed cylindrical wall surface that opens on the gas inlet side, and a part of the cylindrical portion of the wall surface is compressed. Configured,
An air hole communicating with the inside and outside of the casing member is provided in the casing member excluding the measurement chamber,
Manufacture of a sensor for inspecting the presence or absence of gas leakage from the measurement chamber to the inside of the casing member based on the flow rate when a predetermined flow rate of inspection gas flows from the gas inlet to the inside of the measurement chamber Method.

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