JP2017114676A - Conveying device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a conveying device that can improve a conveyance efficiency and suppress occurrence of vibration.SOLUTION: The conveying device comprises a frame, a first rail and a second rail, a first slider unit, a second slider unit, a driving unit, and a fixed rack gear. The first slider unit comprises: a second movable member that can move together with a first movable member that can move along the first rail and move in a vertical direction; a first movable rack gear and a second movable rack gear disposed along a vertical direction; a first pinion gear engaging with the first movable rack gear; a second pinion gear engaging with the second movable rack gear; and a first table that can move in the vertical direction together with the second movable member. The fixed rack gear is arranged at an intermediate position between two stop positions, and engages with either one of the first pinion gear and the second pinion gear depending on a position of the first slide unit, along the first rail.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a transport apparatus.

  In a manufacturing apparatus or the like, a workpiece (hereinafter referred to as a workpiece) that passes through a plurality of machining steps is conveyed to a position of the next machining machine after machining by a certain machining machine. 2. Description of the Related Art Conventionally, a transport device including a table on which a work is placed and a driving device that moves the table is used to transport the work. In the transfer device, it is preferable that the position where the workpiece is received from the processing machine and the position where the workpiece is transferred to the next processing device are constant. On the other hand, when a workpiece is conveyed by reciprocation of one table, there is a limit to improving the conveyance efficiency. On the other hand, Patent Document 1 describes a transport device that includes two tables and changes the trajectory of the tables so as to avoid mutual interference between the two tables. Thereby, although a material supply position and a material removal position are common in two tables, conveyance efficiency improves compared with the case where a workpiece | work is conveyed by one table.

JP 2008-30867 A

  In the transport device described in Patent Document 1, the table is moved in the vertical direction by the roller rolling on the cam surface. Since the roller rolls on the cam surface, some vibration occurs. Further, since the cam surface is provided from the material supply position to the material removal position, the roller is always in contact with the cam surface. Since the roller is in contact with the cam surface for a long time, vibration may be easily generated.

  The present invention has been made in view of the above-described problems, and an object of the present invention is to provide a transport apparatus that can improve transport efficiency and suppress the occurrence of vibration.

  In order to achieve the above object, a transport device according to the present invention includes a frame, a first rail and a second rail attached to the frame, a first movable member movable along the first rail, and the first rail. A second movable member that can move together with the first movable member and move in the vertical direction; a first movable rack gear and a second movable rack gear that are provided on the second movable member and extend in the vertical direction; and are engaged with the first movable rack gear. A first pinion gear, a second pinion gear meshing with the second movable rack gear, a first slider unit including a first table movable in the vertical direction together with the second movable member, and movable along the second rail. A second slider unit having a second table; and the first slider unit and the second slider unit are moved to a first stop position and a second A drive unit that reciprocates between stop positions; and a fixed rack gear that is disposed at an intermediate position between the first stop position and the second stop position and that extends along the first rail. Meshes with one of the first pinion gear and the second pinion gear according to the position of the first slide unit.

  As a result, the fixed rack gear meshes with one of the first pinion gear and the second pinion gear by the movement of the first slide unit, whereby one of the first pinion gear and the second pinion gear rotates as a drive wheel. For this reason, since a force in the + Z direction is applied to one of the first movable rack gear and the second movable rack gear, the second movable member moves in the + Z direction. Accordingly, the vertical height of the first table changes at the intermediate position. For this reason, the 1st table and the 2nd table can carry a work alternately without interfering with each other by carrying out a three-dimensional intersection. Further, when the first slide unit is located at a position other than the intermediate position, the first pinion gear and the second pinion gear do not mesh with the fixed rack gear, so that vibration is suppressed. Therefore, the transport device can improve the transport efficiency and suppress the occurrence of vibration.

  As a preferred aspect of the present invention, the first pinion gear includes a first shaft rotatably supported by the first movable member, and a first outer gear attached to the first shaft and meshing with the first movable rack gear. And a first inner gear that is attached to the first shaft at a position different from the first outer gear and can mesh with the fixed rack gear, and the second pinion gear is connected to the first movable member. A second shaft rotatably supported, a second outer gear attached to the second shaft and meshing with the second movable rack gear, and attached to the second shaft at a position different from the second outer gear; And a second inner gear that can mesh with the fixed rack gear.

  As a result, the distance between the fixed rack gear and the first movable rack gear and the distance between the fixed rack gear and the second movable rack gear tend to increase. For this reason, interference with the 2nd movable member of a fixed rack gear is prevented.

  ADVANTAGE OF THE INVENTION According to this invention, the conveying apparatus which can improve conveyance efficiency and can suppress generation | occurrence | production of a vibration can be provided.

FIG. 1 is a perspective view showing a transport apparatus according to the present embodiment. FIG. 2 is a front view showing the transport apparatus according to the present embodiment. FIG. 3 is a plan view showing the transport apparatus according to the present embodiment. FIG. 4 is a rear view showing the transport apparatus according to the present embodiment. 5 is a cross-sectional view taken along line AA in FIG. FIG. 6 is an enlarged perspective view showing the first rail and the first movable member according to this embodiment. FIG. 7 is an enlarged perspective view showing the periphery of the second movable member according to the present embodiment. FIG. 8 is a perspective view showing the transport apparatus according to the present embodiment when the first slider unit is located between the first stop position and the intermediate position. FIG. 9 is a perspective view showing the transport apparatus according to the present embodiment when the first slider unit is located at the intermediate position. FIG. 10 is a front view showing the transport apparatus according to the present embodiment when the first slider unit is located at the intermediate position. 11 is a cross-sectional view taken along line BB in FIG.

  DESCRIPTION OF EMBODIMENTS Embodiments (embodiments) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited by the contents described in the following embodiments. The constituent elements described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Furthermore, the constituent elements described below can be appropriately combined.

(Embodiment)
FIG. 1 is a perspective view showing a transport apparatus according to the present embodiment. FIG. 2 is a front view showing the transport apparatus according to the present embodiment. FIG. 3 is a plan view showing the transport apparatus according to the present embodiment. FIG. 4 is a rear view showing the transport apparatus according to the present embodiment. 5 is a cross-sectional view taken along line AA in FIG. FIG. 6 is an enlarged perspective view showing the first rail and the first movable member according to this embodiment. FIG. 7 is an enlarged perspective view showing the periphery of the second movable member according to the present embodiment.

  The transport apparatus 1 according to the present embodiment is used in a manufacturing apparatus such as a semiconductor, for example. After receiving the workpiece 10 from a certain processing machine, the transport device 1 transports the workpiece 10 to the position of the next processing machine. The workpiece 10 conveyed by the conveying device 1 is taken up by the next processing machine.

  As shown in FIGS. 1 to 5, the transport device 1 includes a frame 2, a first rail 3 a, a second rail 3 b, a drive unit 9, a first slider unit 4 a, a second slider unit 4 b, A fixed rack gear 6. In the transport device 1, the workpiece 10 is transported, for example, in the horizontal direction by the first slider unit 4a and the second slider unit 4b. The first slider unit 4a and the second slider unit 4b reciprocate between the first stop position P1 and the second stop position P2, respectively. 1 to 5, the first slider unit 4a is located at the first stop position P1, and the second slider unit 4b is located at the second stop position P2.

  In the following description, the direction parallel to the straight line connecting the first stop position P1 and the second stop position P2 in the horizontal direction is described as the X direction, and the direction orthogonal to the X direction in the horizontal direction is described as the Y direction. The orthogonal direction to both the X direction and the Y direction is referred to as the Z direction. That is, the Z direction is the vertical direction (up and down direction). In addition, a direction from the first stop position P1 to the second stop position P2 in the X direction is described as a + X direction, and a direction opposite to the + X direction is described as a −X direction. The left direction when facing the + X direction on the horizontal plane is described as the + Y direction, and the direction opposite to the + Y direction is described as the −Y direction. The upward direction of the Z direction is described as the + Z direction, and the direction opposite to the + Z direction is described as the −Z direction.

  The frame 2 is a member for supporting the first rail 3a, the second rail 3b, and the drive unit 9. As shown in FIGS. 1 to 3, the frame 2 includes an upper plate 21, a lower plate 22, a horizontal plate 23, a horizontal plate 24, legs 25, and legs 26. The upper plate 21 is a plate-like member having a surface parallel to the horizontal plane, for example. The lower plate 22 is a plate-like member parallel to the upper plate 21 and is disposed with a gap with respect to the upper plate 21. The horizontal plate 23 and the horizontal plate 24 are plate-like members that connect the end portions of the upper plate 21 and the lower plate 22, and regulate the distance from the upper plate 21 to the lower plate 22. The legs 25 and 26 are plate-like members attached to the lower plate 22 and regulate the height of the lower plate 22 in the Z direction.

  As shown in FIGS. 1 to 3, the first rail 3 a is a long member along the X direction, and is attached to the surface of the frame 2 on the + Z direction side. The second rail 3b is a long member along the X direction, and is attached to the surface of the frame 2 on the + Z direction side. The second rail 3b is disposed in parallel to the first rail 3a and is located in the −Y direction with respect to the first rail 3a.

  The drive unit 9 is a device that transmits power to the first slider unit 4a and the second slider unit 4b. The drive unit 9 includes a motor 91, a drive pulley 92, a driven pulley 94, and a belt 93.

  The motor 91 is, for example, a servo motor. As shown in FIG. 2, the motor 91 is supported by the lower plate 22 of the frame 2, for example. Specifically, the motor 91 is disposed at the end of the lower plate 22 in the −X direction. The motor 91 includes a shaft 911 positioned between the upper plate 21 and the lower plate 22. The drive pulley 92 is attached to the shaft 911 and rotates integrally with the shaft 911. The driven pulley 94 is attached to a bearing 941 provided at the end of the lower plate 22 in the + X direction. The belt 93 is an annular member, and is attached to the driving pulley 92 and the driven pulley 94 as shown in FIG. The belt 93 is connected to the first slider unit 4a and the second slider unit 4b. Thereby, the power generated by the motor 91 is transmitted to the first slider unit 4a and the second slider unit 4b via the belt 93. That is, the drive unit 9 constitutes a belt drive as a power transmission mechanism. Since the drive unit 9 can move the first slider unit 4a and the second slider unit 4b by one motor 91, the drive unit 9 is more than the case where the first slider unit 4a and the second slider unit 4b are moved independently. Transport efficiency can be improved while reducing the number of parts.

  The first slider unit 4a is supported by the first rail 3a and can move along the first rail 3a. As shown in FIGS. 1 to 5, the first slider unit 4a includes a first slider 41a, a first movable member 42, a second movable member 43, a first movable rack gear 44R, and a second movable rack gear 44L. The first pinion gear 5R, the second pinion gear 5L, a first belt connecting member 48a, and a first table 49a are provided.

  The first slider 41a is a member attached to the first rail 3a so as to be slidable in the X direction. That is, the first rail 3a guides the first slider 41a in the X direction. As shown in FIG. 6, the first slider 41a includes a first facing surface 411 that can face the surface 31 of the first rail 3a, a second facing surface 412 that can face the side surface 32 of the first rail 3a, Two claw portions 413 projecting from the two opposing surfaces 412 and a rolling element 414 at least partially in contact with the recess 33 of the first rail 3a are provided. The two claw portions 413 are fitted in the recesses 33, respectively. That is, the first slider 41a sandwiches the first rail 3a from both sides in the Y direction. Accordingly, the first slider 41a can slide in the X direction along the first rail 3a. The rolling element 414 is, for example, a ball. The rolling element 414 rolls while contacting the inner wall of the recess 33. That is, the first rail 3a and the first slider 41a constitute a linear ball bearing. When the rolling element 414 rolls along the recess 33, the first slider 41a can smoothly move on the first rail 3a. More specifically, the plurality of rolling elements 414 are arranged in an annular shape and form two rows along the X direction. The rolling elements 414 located in one of the two rows contact the inner wall of the recess 33. The rolling elements 414 located in the other of the two rows are guided by, for example, guide grooves provided on the second facing surface 412. Further, the rolling elements 414 move while rolling. That is, the plurality of rolling elements 414 form an infinite circulation path. The rolling element 414 may be a roller.

  The first movable member 42 is a member that is attached to the first slider 41a and slides in the X direction together with the first slider 41a. As shown in FIG. 5, the first movable member 42 is a substantially L-shaped member when viewed from the X direction, and has a surface orthogonal to the Y direction. For example, the first movable member 42 includes a third slider 421 on the surface in the −Y direction side as shown in FIGS. 5 and 7.

  The second movable member 43 is a member that slides in the X direction together with the first movable member 42 and slides in the Z direction with respect to the first movable member 42. As shown in FIG. 2, the second movable member 43 is a substantially rectangular plate-like member when viewed from the Y direction, and has a surface orthogonal to the Y direction. For example, the second movable member 43 includes a third rail 431 on the surface on the + Y direction side as shown in FIGS. 5 and 7.

  As shown in FIG. 7, the third slider 421 includes a first facing surface 4211 that can face the surface 4311 of the third rail 431, a second facing surface 4212 that can face the side surface 4312 of the third rail 431, Two claw portions 4213 projecting from the two opposing surfaces 4212, and rolling elements 4214 at least partially in contact with the concave portions 4313 of the third rail 431. The two claw portions 4213 are fitted in the recesses 4313, respectively. That is, the third slider 421 sandwiches the third rail 431 from both sides in the X direction. The rolling element 4214 is, for example, a ball. The rolling element 4214 rolls while contacting the inner wall of the recess 4313. That is, the third rail 431 and the third slider 421 constitute a direct acting ball bearing. When the rolling element 4214 rolls along the recess 4313, the third slider 421 can smoothly move on the third rail 431. More specifically, the plurality of rolling elements 4214 are arranged in an annular shape and form two rows along the Z direction. The rolling elements 4214 located in one of the two rows contact the inner wall of the recess 4313. The rolling elements 4214 located in the other of the two rows are guided by, for example, guide grooves provided on the second facing surface 4212. Further, the rolling elements 4214 move while rolling. That is, the plurality of rolling elements 4214 form an infinite circulation path. The rolling element 4214 may be a roller.

  The first movable rack gear 44R is a rack gear provided in the second movable member 43 along the Z direction. That is, the plurality of teeth of the first movable rack gear 44R are arranged in the Z direction. As shown in FIG. 2, the first movable rack gear 44 </ b> R is disposed on the + X side surface of the second movable member 43. For example, the first movable rack gear 44R is formed by cutting the + X side surface of the second movable member 43. That is, the first movable rack gear 44 </ b> R is integral with the second movable member 43.

  The second movable rack gear 44L is a rack gear provided in the second movable member 43 along the Z direction. That is, the plurality of teeth of the second movable rack gear 44L are arranged in the Z direction. As shown in FIG. 2, the second movable rack gear 44 </ b> L is disposed on the −X side surface of the second movable member 43. For example, the second movable rack gear 44L is formed by cutting the surface of the second movable member 43 on the −X side. That is, the second movable rack gear 44L is integral with the second movable member 43. Further, the second movable rack gear 44L and the first movable rack gear 44R are arranged line-symmetrically when viewed from the Y direction.

  The first pinion gear 5 </ b> R is a rotating member that can mesh with the first movable rack gear 44 </ b> R and the fixed rack gear 6. As shown in FIGS. 1 to 5, the first pinion gear 5R includes a first shaft 52R, a first outer gear 51R, and a first inner gear 53R. For example, the first shaft 52R penetrates the first movable member 42 in the Y direction, and is supported by the first movable member 42 via a bearing. The first outer gear 51R is, for example, a spur gear attached to the end portion on the −Y direction side of the first shaft 52R. The first outer gear 51R meshes with the first movable rack gear 44R. The first inner gear 53R is, for example, a spur gear attached to the end portion on the + Y direction side of the first shaft 52R. For example, the gear specifications of the first inner gear 53R are the same as the gear specifications of the first outer gear 51R. The first shaft 52R, the first outer gear 51R, and the first inner gear 53R rotate integrally.

  The second pinion gear 5L is a rotating member that can mesh with the second movable rack gear 44L and the fixed rack gear 6. As shown in FIGS. 2 to 4, the second pinion gear 5L includes a second shaft 52L, a second outer gear 51L, and a second inner gear 53L. For example, the second shaft 52L penetrates the first movable member 42 in the Y direction, and is supported by the first movable member 42 via a bearing. The second outer gear 51L is a spur gear attached to the end portion on the −Y direction side of the second shaft 52L, for example. The second outer gear 51L meshes with the second movable rack gear 44L. When viewed from the X direction, the second outer gear 51L overlaps the first outer gear 51R. That is, as shown in FIG. 3, the position of the second outer gear 51L in the Y direction is equal to the position of the first outer gear 51R in the Y direction, and the position of the second outer gear 51L in the Z direction is the first outer gear 51R. Is equal to the position in the Z direction. The second inner gear 53L is, for example, a spur gear attached to the end portion on the + Y direction side of the second shaft 52L. For example, the gear specifications of the second inner gear 53L are the same as the gear specifications of the second outer gear 51L. The second shaft 52L, the second outer gear 51L, and the second inner gear 53L rotate integrally. Further, when viewed from the X direction, the second inner gear 53R overlaps the first inner gear 53L. That is, the position of the second inner gear 53L in the Y direction is equal to the position of the first inner gear 53R in the Y direction, and the position of the second inner gear 53L in the Z direction is equal to the position of the first inner gear 53R in the Z direction. .

  The first belt connecting member 48a is a member for transmitting the power of the belt 93 to the first slider unit 4a. The first belt connecting member 48 a is formed integrally with the first movable member 42, for example, and is connected to the belt 93. Specifically, the first belt connecting member 48a holds (clamps) the belt 93. The first belt connecting member 48 a moves together with the belt 93 due to the frictional force between the first belt connecting member 48 a and the belt 93. Thereby, the first slider unit 4 a can move together with the belt 93.

  The first table 49a is a member on which the workpiece 10 is placed. The first table 49a is a plate-like member parallel to the horizontal plane, for example. The first table 49 a is attached to the second movable member 43 and is located in the + Z direction of the first movable member 42. For example, when the first slider unit 4a is located at the first stop position P1 or the second stop position P2, the lower surface (the surface on the −Z direction side) of the first table 49a is in contact with the first movable member 42. . In this state, the position of the first table 49a in the Z direction is equal to the position of the second table 49b in the Z direction.

  The second slider unit 4b is supported by the second rail 3b and can move along the second rail 3b. As shown in FIGS. 1 to 5, the second slider unit 4b includes a second slider 41b, a second table 49b, and a second belt connecting member 48b.

  The second slider 41b is a member attached to the second rail 3b so that it can slide in the X direction. That is, the second rail 3b guides the second slider 41b in the X direction. Similarly to the first rail 3a and the first slider 41a described above, the second rail 3b and the second slider 41b constitute a direct acting ball bearing.

  The second table 49b is a member on which the workpiece 10 is placed. The second table 49b is, for example, a plate member parallel to the horizontal plane. The second table 49b is attached to the second slider 41b.

  The second belt connecting member 48b is a member for transmitting the power of the belt 93 to the second slider unit 4b. For example, one end of the second belt connecting member 48b is connected to the second table 49b, and the other end of the second belt connecting member 48b is connected to the belt 93. Specifically, the second belt connecting member 48b holds (clamps) the belt 93. Due to the frictional force between the second belt connecting member 48 b and the belt 93, the second belt connecting member 48 b moves together with the belt 93. Accordingly, the second slider unit 4b can move together with the belt 93.

  The fixed rack gear 6 is a rack gear provided in the frame 2 along the X direction. Specifically, as shown in FIG. 2, the fixed rack gear 6 is disposed at an intermediate position P3 located between the first stop position P1 and the second stop position P2, and is fixed to the lower plate 22 of the frame 2. Has been. For example, the intermediate position P3 is a position equidistant from the first stop position P1 and the second stop position P2. That is, as shown in FIG. 2, the distance D2 from the first stop position P1 to the intermediate position P3 is half of the distance D1 from the first stop position P1 to the second stop position P2. As shown in FIG. 5, the position of the fixed rack gear 6 in the Y direction is equal to the position of the first inner gear 53R in the Y direction. When viewed from the X direction, the teeth of the fixed rack gear 6 overlap the teeth of the first inner gear 53R and the second inner gear 53L. For example, the length L2 in the X direction of the fixed rack gear 6 is equal to the distance L1 in the X direction from the first pinion gear 5R to the second pinion gear 5L.

  FIG. 8 is a perspective view showing the transport apparatus according to the present embodiment when the first slider unit is located between the first stop position and the intermediate position. When the first slider unit 4a moves in the + X direction from the state of FIG. 1, the first inner gear 53R of the first pinion gear 5R reaches the end portion of the fixed rack gear 6 in the −X direction as shown in FIG.

  When the first slider unit 4 a moves in the + X direction from the state of FIG. 8, the first inner gear 53 </ b> R rotates by meshing with the fixed rack gear 6. As a result, the first outer gear 51R rotates together with the first inner gear 53R. Specifically, the first outer gear 51R rotates clockwise as viewed in the + Y direction. Since the first outer gear 51R meshes with the first movable rack gear 44R, a force in the + Z direction is applied from the first outer gear 51R to the first movable rack gear 44R. Therefore, the second movable member 43 moves in the + Z direction according to the rotation of the first outer gear 51R. At this time, since the second outer gear 51L meshes with the second movable rack gear 44L, the second outer gear 51L rotates in the direction opposite to the rotation direction of the first outer gear 51R (counterclockwise when viewed in the + Y direction). On the other hand, the second inner gear 53L is not meshed with the fixed rack gear 6 (is idle).

  FIG. 9 is a perspective view showing the transport apparatus according to the present embodiment when the first slider unit is located at the intermediate position. FIG. 10 is a front view showing the transport apparatus according to the present embodiment when the first slider unit is located at the intermediate position. 11 is a cross-sectional view taken along line BB in FIG. As shown in FIG. 10, when the first slider unit 4a is located at the intermediate position P3, the first table 49a is located in the + Z direction of the second table 49b. Since the position of the first table 49a in the Z direction is shifted from the position of the second table 49b in the Z direction at the intermediate position P3, the first table 49a can three-dimensionally intersect the second table 49b. As shown in FIG. 9, when the first slider unit 4a is located at the intermediate position P3, the first inner gear 53R reaches the end portion of the fixed rack gear 6 in the + X direction. At the same time, the second inner gear 53L reaches the end of the fixed rack gear 6 in the −X direction.

  When the first slider unit 4 a moves in the + X direction from the state shown in FIG. 9, the second inner gear 53 </ b> L rotates by meshing with the fixed rack gear 6. As a result, the second outer gear 51L rotates together with the second inner gear 53L. Specifically, the second outer gear 51L rotates clockwise as viewed in the + Y direction. Since the second outer gear 51L meshes with the second movable rack gear 44L, a force in the −Z direction is applied from the second outer gear 51L to the second movable rack gear 44L. For this reason, the second movable member 43 moves in the −Z direction in accordance with the rotation of the second outer gear 51L. At this time, since the first outer gear 51R meshes with the first movable rack gear 44R, the first outer gear 51R rotates in the direction opposite to the rotation direction of the second outer gear 51L (counterclockwise when viewed in the + Y direction). On the other hand, the first inner gear 53R is not meshed with the fixed rack gear 6 (is idle).

  Thereafter, when the second inner gear 53L reaches the end of the fixed rack gear 6 in the + X direction, the position of the first table 49a in the Z direction is the same as the position of the second table 49b in the Z direction. At this time, when the first table 49a contacts the first movable member 42, the position of the first table 49a in the Z direction is maintained.

  Contrary to the above description, when the first slide unit 4a moves in the −X direction from the second stop position P2, the second inner gear 53L first meshes with the fixed rack gear 6. Thereby, the second movable member 43 moves in the + Z direction. Thereafter, when the first inner gear 53R meshes with the fixed rack gear 6, the second movable member 43 moves in the -Z direction.

  The drive unit 9 is not necessarily a belt drive. For example, the drive unit 9 may be a chain drive including a roller chain and a sprocket. Moreover, the motor 91 with which the drive unit 9 is provided does not necessarily need to be one, for example, the two motors 91 may be provided. For example, the drive unit 9 may move the first slider unit 4 a on one side of the two motors 91 and move the second slider unit 4 b on the other side of the two motors 91. Thereby, conveyance efficiency improves.

  The motor 91 is not limited to a servo motor, and may be a stepping motor or a direct drive motor, for example. Moreover, the drive source with which the drive unit 9 is provided does not necessarily need to be the motor 91, For example, an air cylinder etc. can be used suitably according to a use.

  The first movable rack gear 44R and the second movable rack gear 44L are not necessarily formed integrally with the second movable member 43. For example, the first movable rack gear 44R and the second movable rack gear 44L may be attached to the second movable member 43 as separate members. Further, the gear specifications of the first inner gear 53R and the first outer gear 51R are not necessarily the same, and may have different numbers of teeth, for example. The gear specifications of the second inner gear 53L and the second outer gear 51L are not necessarily the same, and may have different numbers of teeth, for example.

  As described above, the transport apparatus 1 includes the frame 2, the first rail 3 a and the second rail 3 b attached to the frame 2, the first slider unit 4 a, the second slider unit 4 b, and the drive unit 9. And a fixed rack gear 6. The first slider unit 4 a is provided on the first movable member 42 that can move along the first rail 3 a, the second movable member 43 that moves together with the first movable member 42, and can move in the vertical direction, and the second movable member 43. The first movable rack gear 44R and the second movable rack gear 44L along the vertical direction, the first pinion gear 5R meshed with the first movable rack gear 44R, the second pinion gear 5L meshed with the second movable rack gear 44L, and the second The 1st table 49a which can move to the up-down direction with the movable member 43 is provided. The drive unit 9 reciprocates the first slider unit 4a and the second slider unit 4b between the first stop position P1 and the second stop position P2. The fixed rack gear 6 is disposed at an intermediate position P3 located between the first stop position P1 and the second stop position P2, and is along the first rail 3a. The fixed rack gear 6 meshes with one of the first pinion gear 5R and the second pinion gear 5L according to the position of the first slide unit 4a.

  As a result, the fixed rack gear 6 is engaged with one of the first pinion gear 5R and the second pinion gear 5L by the movement of the first slide unit 4a, so that one of the first pinion gear 5R and the second pinion gear 5L serves as a drive wheel. Rotate. For this reason, since a force in the + Z direction is applied to one of the first movable rack gear 44R and the second movable rack gear 44L, the second movable member 43 moves in the + Z direction. Therefore, the height in the vertical direction (Z direction) of the first table 49a changes at the intermediate position P3. For this reason, the 1st table 49a and the 2nd table 49b can convey the workpiece | work 10 alternately, without interfering with each other by carrying out a three-dimensional intersection. Further, when the first slide unit 4a is located at a position other than the intermediate position, the first pinion gear 5R and the second pinion gear 5L do not mesh with the fixed rack gear 6, so that vibration is suppressed. Therefore, the transport device 1 can improve the transport efficiency and suppress the occurrence of vibration.

  In the transport device 1 according to this embodiment, the first pinion gear 5R includes a first shaft 52R that is rotatably supported by the first movable member 42, and a first movable rack gear 44R that is attached to the first shaft 52R. And a first inner gear 53R attached to the first shaft 52R at a position different from the first outer gear 51R and capable of meshing with the fixed rack gear 6. The second pinion gear 5L includes a second shaft 52L that is rotatably supported by the first movable member 42, a second outer gear 51L that is attached to the second shaft 52L and meshes with the second movable rack gear 44L, and a second outer gear A second inner gear 53L which is attached to the second shaft 52L at a position different from the gear 51L and can mesh with the fixed rack gear 6.

  As a result, the distance between the fixed rack gear 6 and the first movable rack gear 44R and the distance between the fixed rack gear 6 and the second movable rack gear 44L tend to increase. For this reason, interference with the 2nd movable member 43 of the fixed rack gear 6 is prevented.

DESCRIPTION OF SYMBOLS 1 Transfer apparatus 10 Work 2 Frame 3a 1st rail 3b 2nd rail 4a 1st slider unit 41a 1st slider 42 1st movable member 421 3rd slider 43 2nd movable member 431 3rd rail 44R 1st movable rack gear 44L 2nd Movable rack gear 48a First belt connecting member 49a First table 4b Second slider unit 41b Second slider 48b Second belt connecting member 49b Second table 5R First pinion gear 51R First outer gear 52R First shaft 53R First inner gear 5L 2nd pinion gear 51L 2nd outer gear 52L 2nd shaft 53L 2nd inner gear 6 fixed rack gear 9 drive unit 91 motor 911 shaft 92 drive pulley 93 belt 94 driven pulley P1 first stop position P2 second stop position P3 intermediate position Place

Claims (2)

Frame,
A first rail and a second rail attached to the frame;
A first movable member that can move along the first rail; a second movable member that moves together with the first movable member and that can move in a vertical direction; and a first movable rack gear that is provided on the second movable member and extends along the vertical direction. And a second movable rack gear, a first pinion gear meshed with the first movable rack gear, a second pinion gear meshed with the second movable rack gear, and a first table movable together with the second movable member in a vertical direction. A first slider unit comprising:
A second slider unit comprising a second table movable along the second rail;
A drive unit for reciprocating the first slider unit and the second slider unit between a first stop position and a second stop position;
A fixed rack gear disposed at an intermediate position between the first stop position and the second stop position and along the first rail;
With
The fixed rack gear is a transfer device that meshes with one of the first pinion gear and the second pinion gear according to the position of the first slide unit. The first pinion gear includes a first shaft rotatably supported by the first movable member, a first outer gear that is attached to the first shaft and meshes with the first movable rack gear, and the first outer gear. A first inner gear attached to the first shaft at a position different from the first inner gear and meshing with the fixed rack gear,
The second pinion gear includes a second shaft that is rotatably supported by the first movable member, a second outer gear that is attached to the second shaft and meshes with the second movable rack gear, and the second outer gear. And a second inner gear that is attached to the second shaft at a position different from that of the fixed rack gear and can mesh with the fixed rack gear.

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