JP2017114032A - Liquid injection head and liquid injection device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To solve the problem in which it is difficult to measure dimensions of pressure chambers in a conventional liquid injection head.SOLUTION: A liquid injection head has piezoelectric elements provided at positions overlapping with pressure chambers with partial walls out of walls partitioning pressure chambers capable of introducing liquid out of a plurality of pressure chambers being interposed thereamong. Each of the piezoelectric elements includes: a lower electrode provided at an opposite side to a pressure chamber side of the partial wall; a piezoelectric material provided at an opposite side to a partial wall side of the lower electrode; an upper electrode provided at an opposite side to a lower electrode side of the piezoelectric material; and a lead wiring provided at an opposite side to a piezoelectric material side of the upper electrode. Each lower electrode is individually provided for each piezoelectric element. The upper electrodes are provided across among a plurality of piezoelectric elements. The plurality of pressure chambers includes pressure chambers for inspection. When the pressure chambers for inspection is viewed in a plan view, at least the lower electrodes are provided across regions laid over the pressure chambers for inspection.SELECTED DRAWING: Figure 8

Description

  The present invention relates to a liquid ejecting head that ejects liquid by driving a piezoelectric element, and a liquid ejecting apparatus including the liquid ejecting head.

  The liquid ejecting apparatus includes a liquid ejecting head and ejects various liquids from the ejecting head. As this liquid ejecting apparatus, for example, there is an image recording apparatus such as an ink jet printer or an ink jet plotter, but recently, various types of manufacturing have been made by taking advantage of the ability to accurately land a very small amount of liquid on a predetermined position. It is also applied to devices. For example, a display manufacturing apparatus for manufacturing a color filter such as a liquid crystal display, an electrode forming apparatus for forming an electrode such as an organic EL (Electro Luminescence) display or FED (surface emitting display), a chip for manufacturing a biochip (biochemical element) Applied to manufacturing equipment. The recording head for the image recording apparatus ejects liquid ink, and the color material ejecting head for the display manufacturing apparatus ejects solutions of R (Red), G (Green), and B (Blue) color materials. The electrode material ejecting head for the electrode forming apparatus ejects a liquid electrode material, and the bioorganic matter ejecting head for the chip manufacturing apparatus ejects a bioorganic solution.

  The liquid ejecting head is configured to introduce a liquid into a pressure chamber, cause a pressure fluctuation in the liquid in the pressure chamber, and eject the liquid from a nozzle that communicates with the pressure chamber. A piezoelectric element is preferably used as the pressure generating means for causing the pressure fluctuation in the liquid in the pressure chamber. As this piezoelectric element, for example, in order from the side closer to the pressure chamber, a lower electrode film functioning as an individual electrode provided for each pressure chamber, a piezoelectric layer such as lead zirconate titanate (PZT), and a plurality of pressures The upper electrode film functioning as a common electrode common to the chambers is formed by being laminated by a film forming technique (for example, Patent Document 1). In such a piezoelectric element, in the region corresponding to the pressure chamber, the width of the piezoelectric layer is formed wider than the width of the lower electrode film so that the piezoelectric layer covers the lower electrode film. A portion sandwiched between the upper and lower electrode films in the piezoelectric layer becomes an active part (active part) that is deformed by application of a voltage to the electrode film. Such a piezoelectric element is formed on a diaphragm that partitions one side of the pressure chamber (for example, the side opposite to the nozzle plate on which the nozzle is formed). The diaphragm has flexibility and deforms with the deformation of the piezoelectric element.

  Here, there is a so-called excluded volume as an index of the quality of the liquid jet head. The excluded volume means the amount of change in the volume of the pressure chamber (the volume of liquid excluded from the pressure chamber) when the piezoelectric element is driven by applying a predetermined driving voltage. The amount of liquid ejected changes according to the excluded volume. In order to realize the predetermined liquid ejection, the excluded volume needs to be a predetermined amount. Such an excluded volume increases or decreases according to the size of the pressure chamber. For this reason, it is preferable to measure and manage the dimensions of the pressure chamber.

JP2015-160395A

  As a method for measuring the size of the pressure chamber, for example, a method of optically measuring the size of the pressure chamber with a tool microscope or the like before partitioning the pressure chamber with the nozzle plate in the manufacturing process of the liquid jet head can be given. . However, the liquid ejecting head described in Patent Document 1 has a problem that it is difficult to measure the dimensions of the pressure chamber. In the liquid ejecting head described in Patent Document 1, before joining the nozzle plate, the microscope is focused on the wall surface of the opening of the pressure chamber from the nozzle plate side, and the dimensions of the opening are measured by measuring the dimensions of the opening. A method of measuring dimensions is employed. At this time, the image of the lower electrode and the upper electrode is also reflected in the field of view of the microscope. Since the microscope is focused on the wall surface of the opening, the images of the lower electrode and the upper electrode are blurred depending on the depth of focus. Thereby, the blurred image of the lower electrode or the upper electrode easily interferes with the image of the wall surface of the focused opening. As a result, the contour of the wall surface of the opening becomes unclear and it becomes difficult to grasp the wall surface of the opening, making it difficult to measure the dimensions of the pressure chamber.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

  Application Example 1 A liquid ejecting head according to this application example is a liquid ejecting head capable of ejecting liquid, and defines a plurality of pressure chambers and a pressure chamber into which the liquid can be introduced among the plurality of pressure chambers. A piezoelectric element provided at a position overlapping with the pressure chamber across a part of the walls, and the piezoelectric element is provided on a side opposite to the pressure chamber side of the part of the walls. A lower electrode, a piezoelectric body provided on the opposite side of the wall of the lower electrode, an upper electrode provided on the opposite side of the piezoelectric body to the lower electrode side, and the upper electrode A lead wire provided on the opposite side of the piezoelectric body side, the lower electrode is provided separately for each piezoelectric element, and the upper electrode is provided across the plurality of piezoelectric elements. And the plurality of pressure chambers include a pressure chamber for inspection, and When the inspection pressure chamber is viewed in plan in a direction toward the inspection pressure chamber, at least the lower electrode of the lower electrode, the piezoelectric body, the upper electrode, and the lead wiring that constitute the piezoelectric element. An electrode is provided over a region straddling the pressure chamber for inspection.

  In this application example, when the inspection pressure chamber is viewed in plan in a direction from a part of the walls toward the inspection pressure chamber, the lower electrode is provided over a region straddling the inspection pressure chamber. Therefore, the contour of the lower electrode is located outside the region of the inspection pressure chamber. For this reason, when the inspection pressure chamber is optically observed in a direction from the inspection pressure chamber toward a part of the wall, the contour of the lower electrode is not observed in the region of the inspection pressure chamber. As a result, when the inspection pressure chamber is optically observed, the contour image of the inspection pressure chamber is suppressed from being interfered with the image of the lower electrode. As a result, when the inspection pressure chamber is optically observed, the outline of the inspection pressure chamber can be clearly grasped, so that the dimensions of the inspection pressure chamber can be easily measured.

  Application Example 2 In the liquid ejecting head, when the inspection pressure chamber is viewed in a direction from the partial wall toward the inspection pressure chamber, the piezoelectric body, the upper electrode, and the lead It is preferable that the wiring is provided over a region straddling the inspection pressure chamber.

  According to this application example, in addition to the lower electrode provided over the region straddling the inspection pressure chamber, the piezoelectric body, the upper electrode, and the lead wiring are provided over the region straddling the inspection pressure chamber. The rigidity of some of the walls defining the inspection pressure chamber is increased.

  Application Example 3 A liquid ejecting head according to this application example is a liquid ejecting head capable of ejecting liquid, and divides a plurality of pressure chambers and a pressure chamber into which the liquid can be introduced among the plurality of pressure chambers. A piezoelectric element provided at a position overlapping with the pressure chamber across a part of the walls, and the piezoelectric element is provided on a side opposite to the pressure chamber side of the part of the walls. A lower electrode, a piezoelectric body provided on the opposite side of the wall of the lower electrode, an upper electrode provided on the opposite side of the piezoelectric body to the lower electrode side, and the upper electrode A lead wire provided on the opposite side of the piezoelectric body side, the lower electrode is provided separately for each piezoelectric element, and the upper electrode is provided across the plurality of piezoelectric elements. And the plurality of pressure chambers include a pressure chamber for inspection, and When the inspection pressure chamber is viewed in plan in a direction toward the inspection pressure chamber, the lower electrode constituting the piezoelectric element is provided outside the inspection pressure chamber, and the piezoelectric body constituting the piezoelectric element And the upper electrode is provided over a region across the pressure chamber for inspection.

  In this application example, when the inspection pressure chamber is viewed in plan from a part of the wall toward the inspection pressure chamber, the lower electrode is positioned outside the region overlapping the inspection pressure chamber, and the piezoelectric body and the upper electrode Are provided over a region straddling the pressure chamber for inspection. For this reason, the outline of the lower electrode is located outside the region of the pressure chamber for inspection. In addition, the contour of the piezoelectric body is located outside the region of the pressure chamber for inspection. Further, the contour of the upper electrode is located outside the region of the pressure chamber for inspection. As a result, when the inspection pressure chamber is optically observed in a direction from the inspection pressure chamber toward a part of the wall, the contour of the lower electrode and the contour of the piezoelectric body are not observed in the region of the inspection pressure chamber. . Further, when the piezoelectric body has light transmittance, the contour of the upper electrode is not observed in the region of the pressure chamber for inspection. For this reason, when the inspection pressure chamber is optically observed, it is possible to keep the images of the lower electrode, the piezoelectric body, and the upper electrode from interfering with the contour image of the inspection pressure chamber. As a result, when the inspection pressure chamber is optically observed, the outline of the inspection pressure chamber can be clearly grasped, so that the dimensions of the inspection pressure chamber can be easily measured.

  Application Example 4 A liquid ejecting head according to this application example is a liquid ejecting head capable of ejecting liquid, and partitions a plurality of pressure chambers and a pressure chamber into which the liquid can be introduced among the plurality of pressure chambers. A piezoelectric element provided at a position overlapping with the pressure chamber across a part of the walls, and the piezoelectric element is provided on a side opposite to the pressure chamber side of the part of the walls. A lower electrode, a piezoelectric body provided on the opposite side of the wall of the lower electrode, an upper electrode provided on the opposite side of the piezoelectric body to the lower electrode side, and the upper electrode A lead wire provided on the opposite side of the piezoelectric body side, the lower electrode is provided separately for each piezoelectric element, and the upper electrode is provided across the plurality of piezoelectric elements. And the plurality of pressure chambers include a pressure chamber for inspection, and When the inspection pressure chamber is viewed in plan in a direction toward the inspection pressure chamber, the lower electrode and the piezoelectric body constituting the piezoelectric element are provided outside the inspection pressure chamber, and the piezoelectric element The upper electrode constituting is provided over a region straddling the pressure chamber for inspection.

  In this application example, when the inspection pressure chamber is viewed in plan from a part of the wall toward the inspection pressure chamber, the lower electrode and the piezoelectric body are located outside the region overlapping the inspection pressure chamber, and An electrode is provided over a region across the pressure chamber for inspection. For this reason, the outline of the lower electrode is located outside the region of the pressure chamber for inspection. In addition, the contour of the piezoelectric body is located outside the region of the pressure chamber for inspection. Further, the contour of the upper electrode is located outside the region of the pressure chamber for inspection. As a result, when the inspection pressure chamber is optically observed in a direction from the inspection pressure chamber toward a part of the wall, the contour of the lower electrode and the contour of the piezoelectric body are not observed in the region of the inspection pressure chamber. . Further, the contour of the upper electrode is not observed in the region of the pressure chamber for inspection. For this reason, when the inspection pressure chamber is optically observed, it is possible to keep the images of the lower electrode, the piezoelectric body, and the upper electrode from interfering with the contour image of the inspection pressure chamber. As a result, when the inspection pressure chamber is optically observed, the outline of the inspection pressure chamber can be clearly grasped, so that the dimensions of the inspection pressure chamber can be easily measured.

  Application Example 5 In the liquid ejecting head, when the inspection pressure chamber is viewed in a direction from the partial wall toward the inspection pressure chamber, the lead wiring straddles the inspection pressure chamber. It is preferable that it is provided over the region.

  According to this application example, since the lead wiring is provided over the region across the inspection pressure chamber, the rigidity of a part of the walls defining the inspection pressure chamber can be increased.

  Application Example 6 A liquid ejecting head according to this application example is a liquid ejecting head capable of ejecting liquid, and partitions a plurality of pressure chambers and a pressure chamber into which the liquid can be introduced among the plurality of pressure chambers. A piezoelectric element provided at a position overlapping with the pressure chamber across a part of the walls, and the piezoelectric element is provided on a side opposite to the pressure chamber side of the part of the walls. A lower electrode, a piezoelectric body provided on the opposite side of the wall of the lower electrode, an upper electrode provided on the opposite side of the piezoelectric body to the lower electrode side, and the upper electrode A lead wire provided on the opposite side of the piezoelectric body side, the lower electrode is provided separately for each piezoelectric element, and the upper electrode is provided across the plurality of piezoelectric elements. And the plurality of pressure chambers include a pressure chamber for inspection, and When the inspection pressure chamber is viewed in plan in a direction toward the inspection pressure chamber, the lower electrode and the upper electrode constituting the piezoelectric element are provided outside the inspection pressure chamber, and the piezoelectric element The piezoelectric body and the lead wiring are provided over a region straddling the inspection pressure chamber.

  In this application example, when the inspection pressure chamber is viewed in plan from a part of the wall toward the inspection pressure chamber, the lower electrode and the upper electrode are positioned outside the region overlapping the inspection pressure chamber, and the piezoelectric The body and the lead wiring are provided over a region straddling the pressure chamber for inspection. For this reason, the outline of the lower electrode and the outline of the upper electrode are located outside the region of the pressure chamber for inspection. In addition, the contour of the piezoelectric body is located outside the region of the pressure chamber for inspection. Further, the outline of the lead wiring is located outside the region of the pressure chamber for inspection. As a result, when the inspection pressure chamber is optically observed in the direction from the inspection pressure chamber toward a part of the wall, the contour of the lower electrode and the contour of the upper electrode are not observed in the region of the inspection pressure chamber. . Further, the contour of the piezoelectric body is not observed in the region of the pressure chamber for inspection. In addition, when the piezoelectric body is light transmissive, the outline of the lead wiring is not observed in the region of the pressure chamber for inspection. For this reason, when the inspection pressure chamber is optically observed, it is possible to suppress the interference of the image of the lower electrode, the piezoelectric body, the upper electrode, and the lead wiring with the contour image of the inspection pressure chamber. As a result, when the inspection pressure chamber is optically observed, the outline of the inspection pressure chamber can be clearly grasped, so that the dimensions of the inspection pressure chamber can be easily measured.

  Application Example 7 A liquid jet head according to this application example is a liquid jet head capable of jetting liquid, and divides a plurality of pressure chambers and a pressure chamber into which the liquid can be introduced among the plurality of pressure chambers. A piezoelectric element provided at a position overlapping with the pressure chamber across a part of the walls, and the piezoelectric element is provided on a side opposite to the pressure chamber side of the part of the walls. A lower electrode, a piezoelectric body provided on the opposite side of the wall of the lower electrode, an upper electrode provided on the opposite side of the piezoelectric body to the lower electrode side, and the upper electrode A lead wire provided on the opposite side of the piezoelectric body side, the lower electrode is provided separately for each piezoelectric element, and the upper electrode is provided across the plurality of piezoelectric elements. And the plurality of pressure chambers include a pressure chamber for inspection, and When the inspection pressure chamber is viewed in plan in a direction toward the inspection pressure chamber, the lower electrode, the piezoelectric body, and the upper electrode constituting the piezoelectric element are provided outside the inspection pressure chamber. The lead wiring constituting the piezoelectric element is provided over a region straddling the inspection pressure chamber.

  In this application example, when the inspection pressure chamber is viewed in plan from a part of the wall toward the inspection pressure chamber, the lower electrode, the piezoelectric body, and the upper electrode are positioned outside the region overlapping the inspection pressure chamber. In addition, the lead wiring is provided over a region across the pressure chamber for inspection. For this reason, the outline of the lower electrode, the outline of the piezoelectric body, and the outline of the upper electrode are located outside the region of the pressure chamber for inspection. Also, the outline of the lead wiring is located outside the area of the pressure chamber for inspection. Accordingly, when the inspection pressure chamber is optically observed in the direction from the inspection pressure chamber toward a part of the wall, the contour of the lower electrode, the contour of the piezoelectric body, and the contour of the upper electrode are Not observed in the area. Further, the outline of the lead wiring is not observed in the region of the pressure chamber for inspection. For this reason, when the inspection pressure chamber is optically observed, it is possible to suppress the interference of the image of the lower electrode, the piezoelectric body, the upper electrode, and the lead wiring with the contour image of the inspection pressure chamber. As a result, when the inspection pressure chamber is optically observed, the outline of the inspection pressure chamber can be clearly grasped, so that the dimensions of the inspection pressure chamber can be easily measured.

  Application Example 8 In the liquid jet head, it is preferable that the plurality of pressure chambers are arranged in a predetermined direction, and the inspection pressure chambers are located at an end of the arrangement of the plurality of pressure chambers.

  According to this application example, since the inspection pressure chamber is located at the end of the arrangement of the plurality of pressure chambers, the inspection pressure chamber can be easily distinguished from other pressure chambers.

  Application Example 9 A liquid ejecting apparatus according to this application example includes the liquid ejecting head.

  The liquid ejecting apparatus according to this application example includes a liquid ejecting head that easily measures the size of the pressure chamber. According to this liquid ejecting head, it is easy to manage the level of the liquid ejecting performance of the liquid ejecting head. Therefore, in this liquid ejecting apparatus, the level of the liquid ejecting performance can be easily managed.

FIG. 3 is a perspective view illustrating a configuration of a printer. FIG. 3 is an exploded perspective view of a recording head. FIG. 2 is a plan view of a recording head. FIG. 4 is a schematic diagram of a cross section along a direction orthogonal to a nozzle row, illustrating a configuration of a main part of the recording head. It is AA sectional drawing in FIG. FIG. 6 is a plan view for explaining an arrangement of inspection pressure chambers in an arrangement of pressure chambers of a recording head. It is the top view and sectional drawing explaining the outline of the pressure chamber opening part wall surface, the lower electrode, and the upper electrode observed with the conventional dimension measuring method of a pressure chamber. 1 is a cross-sectional view for explaining Example 1. FIG. FIG. 6 is a cross-sectional view for explaining the manufacturing method according to the first embodiment. FIG. 6 is a cross-sectional view for explaining the manufacturing method according to the first embodiment. FIG. 6 is a cross-sectional view for explaining the manufacturing method according to the first embodiment. FIG. 6 is a cross-sectional view for explaining the manufacturing method according to the first embodiment. FIG. 6 is a cross-sectional view for explaining the manufacturing method according to the first embodiment. FIG. 6 is a cross-sectional view for explaining the manufacturing method according to the first embodiment. FIG. 6 is a cross-sectional view for explaining the manufacturing method according to the first embodiment. FIG. 6 is a cross-sectional view for explaining the manufacturing method according to the first embodiment. 6 is a cross-sectional view for explaining Example 2. FIG. 10 is a cross-sectional view for explaining Example 3. FIG. FIG. 6 is a cross-sectional view for explaining Example 4; 10 is a cross-sectional view for explaining Example 5. FIG. 10 is a cross-sectional view for explaining Example 6. FIG. 10 is a cross-sectional view for explaining Example 7. FIG. 10 is a cross-sectional view for explaining Example 8. FIG. 10 is a cross-sectional view for explaining Example 9. FIG. FIG. 10 is a cross-sectional view for explaining Example 10; FIG. 10 is a cross-sectional view for explaining Example 11; FIG. 12 is a cross-sectional view for explaining Example 12; FIG. 15 is a cross-sectional view for explaining Example 13; FIG. 16 is a cross-sectional view for explaining Example 14;

  DESCRIPTION OF EMBODIMENTS Hereinafter, embodiments for carrying out the present invention will be described with reference to the accompanying drawings. In the embodiments described below, various limitations are made as preferred specific examples of the present invention. However, the scope of the present invention is not limited to the following description unless otherwise specified. However, the present invention is not limited to these embodiments. In the following description, an ink jet printer (hereinafter referred to as a printer) equipped with an ink jet recording head (hereinafter referred to as a recording head), which is a kind of liquid ejecting head, is taken as an example of the liquid ejecting apparatus of the present invention. Further, in the following drawings, the scale of each layer and each member is made different from the actual scale so that each layer and each member can be recognized.

  The configuration of the printer 1 will be described with reference to FIG. The printer 1 is a device that records an image or the like by ejecting liquid ink onto the surface of a recording medium 2 (a kind of landing target) such as recording paper. The printer 1 includes a recording head 3, a carriage 4 to which the recording head 3 is attached, a carriage moving mechanism 5 that moves the carriage 4 in the main scanning direction, a conveyance mechanism 6 that transfers the recording medium 2 in the sub scanning direction, and the like. Yes. Here, the ink is a kind of liquid of the present invention, and is stored in an ink cartridge 7 as a liquid supply source. The ink cartridge 7 is detachably attached to the recording head 3. It is also possible to employ a configuration in which the ink cartridge is disposed on the main body side of the printer and supplied from the ink cartridge to the recording head through the ink supply tube.

  The carriage moving mechanism 5 includes a timing belt 8. The timing belt 8 is driven by a pulse motor 9 such as a DC motor. Accordingly, when the pulse motor 9 is operated, the carriage 4 is guided by the guide rod 10 installed on the printer 1 and reciprocates in the main scanning direction (width direction of the recording medium 2).

  FIG. 2 is an exploded perspective view showing the configuration of the recording head 3 of the present embodiment. FIG. 3 is a plan view (top view) of the recording head 3. In addition, FIG. 3 has shown the state which the sealing plate 20 mentioned later is not joined. That is, FIG. 3 is a plan view of a diaphragm 21 (corresponding to a part of walls defining a pressure chamber in the present invention) in which layers described later are stacked. 4 and 5 are diagrams showing a configuration of a main part of the recording head 3. FIG. 4 is a schematic diagram of a cross section along a direction orthogonal to the nozzle array, and FIG. 5 is a cross section along the nozzle array direction ( It is a schematic diagram of the AA 'cross section in FIG.

  The recording head 3 in this embodiment is configured by stacking a pressure chamber forming substrate 15, a nozzle plate 16, an actuator unit 14, a sealing plate 20, and the like. In this embodiment, the pressure chamber forming substrate 15 is a plate material made of a silicon single crystal substrate. In the pressure chamber forming substrate 15, spaces to be a plurality of pressure chambers 22 (hereinafter referred to as pressure chamber spaces as appropriate) are arranged in parallel with a partition wall 22 a (FIG. 5) interposed therebetween. The plurality of pressure chambers 22 are arranged in a predetermined direction. These pressure chamber spaces are long empty portions in a direction orthogonal to the nozzle row direction, and are provided in one-to-one correspondence with the nozzles 25 of the nozzle plate 16. That is, each pressure chamber space (or pressure chamber 22) is formed at the same pitch as the formation pitch of the nozzles 25 along the nozzle row direction. For this reason, the plurality of pressure chambers 22 are arranged along the direction of the nozzle row.

  In addition, the upper opening (opening opposite to the nozzle 25 side) of the pressure chamber 22 (pressure chamber space) in the present embodiment has a trapezoidal shape as shown in FIG. Moreover, the wall 22b at the nozzle 25 side end in the longitudinal direction of the pressure chamber 22 (pressure chamber space) is partially inclined with respect to the upper and lower surfaces of the pressure chamber forming substrate 15, as shown in FIG. Regarding the size of the pressure chamber 22 (pressure chamber space), the height of the pressure chamber 22 (that is, the thickness of the pressure chamber forming substrate 15) is set to about 70 [μm]. The length in the longitudinal direction of the pressure chamber 22 (dimension in the direction orthogonal to the nozzle row direction) is set to about 360 [μm]. Further, the width w1 (dimension in the nozzle row direction) of the pressure chamber 22 shown in FIG. 5 is set to about 70 [μm]. In addition, the dimension (length and width) of the pressure chamber 22 in this embodiment means the inner dimension of the upper opening (opening on the diaphragm 21 side) of the pressure chamber space.

  Further, as shown in FIG. 2, in the pressure chamber forming substrate 15, the region outside the pressure chamber space in the longitudinal direction of the pressure chamber space (on the side opposite to the communication side with the nozzle 25) A communication portion 23 penetrating the pressure chamber forming substrate 15 is formed along the direction in which the pressure chamber spaces are arranged side by side. This communication part 23 is an empty part common to each pressure chamber space. The communication portion 23 and each pressure chamber space are communicated with each other via an ink supply path 24. The communication portion 23 communicates with a communication opening 26 of the vibration plate 21 and a liquid chamber empty portion 53 of the sealing plate 20 described later, and is a reservoir that is an ink chamber common to each pressure chamber space (pressure chamber 22). (Common liquid chamber) is configured. The ink supply path 24 is formed with a narrower width than the pressure chamber space, and is a portion that provides a flow path resistance with respect to the ink that flows into the pressure chamber space from the communication portion 23.

  A nozzle plate 16 (nozzle forming substrate) is bonded to the lower surface of the pressure chamber forming substrate 15 (the surface opposite to the bonding surface side with the actuator unit 14) via an adhesive, a heat welding film, or the like. . In the nozzle plate 16 in the present embodiment, the nozzles 25 are arranged in parallel at a pitch (a distance between the centers of adjacent nozzles 25) corresponding to a dot formation density (for example, 300 dpi to 600 dpi). Each nozzle 25 communicates with the pressure chamber space at the end opposite to the ink supply path 24. The nozzle plate 16 is made of, for example, a silicon single crystal substrate or a stainless steel plate.

The actuator unit 14 includes a diaphragm 21 and a piezoelectric element 19. The vibration plate 21 includes an elastic film 17 made of silicon oxide (SiOx) (for example, silicon dioxide (SiO ₂ )) formed on the upper surface of the pressure chamber forming substrate 15, and zirconium oxide ( And an insulator film 18 made of ZrOx). The portion of the diaphragm 21 corresponding to the pressure chamber space, that is, the portion that blocks the upper opening of the pressure chamber space and divides a part of the pressure chamber 22 is away from the nozzle 25 along with the bending deformation of the piezoelectric element 19. Alternatively, it functions as a displacement portion that is displaced in the direction of proximity. The thickness of the elastic film 17 is preferably set to 300 to 2000 [nm], and the thickness of the insulator film 18 is preferably set to 30 to 600 [nm]. In addition, as shown in FIG. 2, a communication opening portion 26 that communicates with the communication portion 23 is formed at a portion of the diaphragm 21 corresponding to the communication portion 23 of the pressure chamber forming substrate 15.

  A piezoelectric element 19 is formed on a portion of the vibration plate 21 (insulator film 18) corresponding to the pressure chamber space, that is, on the upper surface of the displacement portion (surface opposite to the nozzle 25 side). The piezoelectric element 19 in the present embodiment is configured by laminating a lower electrode 27, a piezoelectric body 28, and an upper electrode 29 in order from the diaphragm 21 side by a film forming technique. As shown in FIG. 5, the lower electrode 27 is provided independently (individually) for each pressure chamber 22, while the upper electrode 29 is continuous (commonly) over the plurality of pressure chambers 22. Is provided. Accordingly, the lower electrode 27 is an individual electrode for each pressure chamber 22, and the upper electrode 29 is a common electrode common to the pressure chambers 22.

  Specifically, as shown in FIGS. 3 and 5, both end portions of the upper electrode 29 in the nozzle row direction have a plurality of pressure chamber spaces (pressure chambers) arranged beyond the edge of the upper opening of the pressure chamber space. 22) is extended to the outside. Further, as shown in FIGS. 3 and 4, both end portions of the upper electrode 29 in the longitudinal direction of the pressure chamber 22 (direction perpendicular to the nozzle row direction) extend beyond the edge of the upper opening of the pressure chamber space. It extends to the outside of the space (pressure chamber 22). The lower electrode 27 in the longitudinal direction of the pressure chamber 22 extends to a position where the end on one side (the upper side in FIG. 3) overlaps the ink supply path 24 beyond the upper opening edge of the pressure chamber space, and the other side (see FIG. 3 is extended to the lead wiring 41. In this embodiment, as shown in FIG. 5, the width w3 of the lower electrode 27 in the nozzle row direction on the pressure chamber space (region corresponding to the pressure chamber 22) is the width w1 of the pressure chamber 22 in the nozzle row direction. Narrower than that. Further, the piezoelectric body 28 in the pressure chamber space is formed so that the width w2 in the nozzle row direction is narrower than the width w1 in the same direction of the pressure chamber 22 and wider than the width w3 of the lower electrode 27 in the same direction. The lower electrode 27 is covered. That is, the dimensions in the nozzle row direction are reduced in the order of the width of the upper electrode 29, the width w1 of the pressure chamber 22, the width w2 of the piezoelectric body 28, and the width w3 of the lower electrode 27.

  Here, the width w2 of the piezoelectric body 28 in the nozzle row direction in the pressure chamber space is desirably set to 30 to 60 [μm]. The width w3 of the lower electrode 27 is preferably set to 15 to 60 [μm]. Furthermore, the distance w4 from the outer end portion on one side of the lower electrode 27 to the outer end portion on the same side of the piezoelectric body 28 is preferably set to 2.5 to 8.0 [μm].

  Further, in the present embodiment, as shown in FIG. 3, the piezoelectric body 28 is divided for each piezoelectric element 19 by an opening 28 a from which the piezoelectric body 28 is partially removed. Specifically, the piezoelectric body 28 extends beyond both end portions in the longitudinal direction of the pressure chamber 22 (specifically, upper opening edges on both sides of the pressure chamber space) to the outside, and the plurality of pressure chambers 22 It is formed over. A corresponding region of the piezoelectric body 28 is partially removed between the adjacent pressure chambers 22 to form a plurality of openings 28 a where the piezoelectric bodies 28 are not stacked. That is, the plurality of openings 28a are formed at the same pitch as the formation pitch of the pressure chambers 22 (formation pitch of the nozzles 25) along the nozzle row direction. In other words, the piezoelectric elements 19 corresponding to one pressure chamber 22 are formed at the same pitch as the formation pitch of the pressure chambers 22 between the openings 28a. The opening 28a of the present embodiment is formed in a long and narrow hexagonal shape along the longitudinal direction of the pressure chamber 22 in plan view. Further, in the longitudinal direction of the pressure chamber 22, the piezoelectric body 28 in a region outside the opening 28 a is continuously formed across the plurality of pressure chambers 22. Here, the width w2 of the piezoelectric body 28 of the present embodiment is the width of the piezoelectric body 28 formed between the long side of one opening 28a and the long side of the other opening 28a. In short, the width w <b> 1 of the pressure chamber 22, the width w <b> 2 of the piezoelectric body 28, and the width w <b> 3 of the lower electrode 27 are widths of portions where the piezoelectric element 19 substantially vibrates in each pressure chamber 22.

  In the piezoelectric element 19 configured as described above, the region where the lower electrode 27, the piezoelectric body 28 and the upper electrode 29 are laminated, that is, the region where the piezoelectric body 28 is sandwiched between the lower electrode 27 and the upper electrode 29 is both. It becomes an active part (active part) in which piezoelectric distortion is generated by applying a voltage to the electrode films 27 and 29.

  The upper electrode 29 and the lower electrode 27 are made of various metals such as iridium (Ir), platinum (Pt), titanium (Ti), tungsten (W), tantalum (Ta), molybdenum (Mo), alloys thereof, and the like. Is used. In addition, as the piezoelectric body 28, a ferroelectric piezoelectric material such as lead zirconate titanate (PZT), a relaxor ferroelectric body in which a metal such as niobium, nickel, magnesium, bismuth, or yttrium is added thereto is used. It is done. The thickness of the upper electrode 29 is preferably set to 30 to 100 [nm]. The thickness of the lower electrode 27 is preferably set to 50 to 300 [nm]. Furthermore, the thickness of the piezoelectric body 28 (specifically, the thickness of the piezoelectric body 28 in the active portion) is preferably set to 0.7 to 5 [μm].

  A position on the piezoelectric body 28 in a region outside the pressure chamber space longitudinal direction outside the upper opening edge of the pressure chamber space and at a predetermined distance from the upper electrode 29 (left side position in FIG. 4) The lead wiring 41 is formed. As shown in FIG. 4, a through-hole 42 extending from the upper surface of the piezoelectric body 28 to the lower electrode 27 is formed at a position where the lead wiring 41 is formed in the piezoelectric body 28. Is formed. The lead wiring 41 is patterned corresponding to the lower electrode 27 which is an individual electrode. The lead wire 41 is electrically connected to the lower electrode 27 through the through hole 42 described above. Then, a drive voltage (drive pulse) is selectively applied to each piezoelectric element 19 through the lead wiring 41.

  The lead wiring 41 is, for example, nickel (Ni), iridium (Ir), gold (Au), platinum (Pt), tungsten (W), titanium (Ti), tantalum (Ta), molybdenum (Mo), chromium. Various metals such as (Cr) and alloys of these metals, their conductive oxides (such as iridium oxide), composite oxides of strontium (Sr) and ruthenium (Ru), lanthanum (La) and nickel (Ni ) And the like can be used. Further, the lead wiring 41 may be composed of a stack of a plurality of conductive layers or may be composed of a single layer.

  As shown in FIG. 2, a sealing plate 20 having an accommodation space 51 that can accommodate the piezoelectric element 19 is provided on the upper surface opposite to the lower surface, which is a joint surface with the pressure chamber forming substrate 15 in the actuator unit 14. Be joined. The sealing plate 20 is located at a position outside the accommodating space 51 in the direction perpendicular to the nozzle row, and corresponds to the communication opening 26 of the diaphragm 21 and the communication portion 23 of the pressure chamber forming substrate 15. The liquid chamber empty part 53 is provided in the area | region to perform. The liquid chamber cavity 53 is provided along the direction in which the pressure chamber space (pressure chamber 22) is arranged so as to penetrate the sealing plate 20 in the thickness direction, and as described above, the communication opening 26 and the communication portion. 23, a reservoir that communicates in series with each other and serves as a common ink chamber for each pressure chamber space. Although not shown, the sealing plate 20 is provided with a wiring opening that penetrates the sealing plate 20 in the thickness direction in addition to the accommodation space 51 and the liquid chamber space 53, and the wiring opening is formed in the wiring opening. The end portion of the lead wiring 41 is exposed. A terminal of a wiring member (not shown) from the printer main body side is electrically connected to the exposed portion of the lead wiring 41.

  In the recording head 3 configured as described above, when ink is ejected, the ink is taken in from the ink cartridge 7, and the flow path from the reservoir, the ink supply path 24, the pressure chamber 22, and the nozzle 25 is filled with ink. Then, by supplying a drive signal from the printer main body side, an electric field corresponding to the potential difference between the two electrodes is applied between the lower electrode 27 and the upper electrode 29 corresponding to the pressure chamber 22, and the piezoelectric element 19 and the diaphragm The displacement of the displacement portion 21 causes a pressure fluctuation in the pressure chamber 22. By controlling this pressure variation, ink is ejected from the nozzle 25.

  In the recording head 3 having the above-described configuration, an index called an excluded volume is used as an index for determining the amount of ink ejected from the nozzle 25. Excluded volume means when a predetermined potential difference is applied between each of the lower electrode 27 and the upper electrode 29 corresponding to the pressure chamber 22 to drive the piezoelectric element 19 and displace the displacement portion of the diaphragm 21. This is the amount of change in the volume of the pressure chamber 22. The amount of ink ejected varies according to the excluded volume. Therefore, in order to eject a predetermined amount of ink, the excluded volume needs to be a predetermined amount. Such an excluded volume increases or decreases according to the size of the pressure chamber 22. For this reason, it is preferable to measure and manage the dimensions of the pressure chamber 22.

  As a method for measuring the size of the pressure chamber 22, for example, in the manufacturing process of the recording head 3, before the pressure chamber 22 is partitioned by the nozzle plate 16, the size of the pressure chamber 22 is optically measured with a tool microscope or the like. A method is mentioned. Specifically, as shown in FIG. 6, before joining the nozzle plate 16 to the pressure chamber 22 in the recording head 3, the microscope plate is placed on the wall surface 31 of the opening 30 of the pressure chamber 22 from the nozzle plate 16 side. A method of measuring the size of the pressure chamber 22 by measuring the size of the opening 30 of the pressure chamber 22 while focusing is mentioned.

  However, there is a problem that it is difficult to measure the size of the pressure chamber 22 by the above method. In measuring the dimensions of the pressure chamber 22, first, before joining the nozzle plate 16 to the pressure chamber 22, the microscope is focused on the wall surface 31 of the opening 30 from the nozzle plate 16 side to open the opening 30 of the pressure chamber 22. The contour 32 is optically observed. And the dimension of the pressure chamber 22 can be measured by measuring the dimension of the opening part 30 based on the outline 32 of the opening part 30 observed optically. In the present embodiment, the diaphragm 21 is light transmissive.

  At this time, the image of the lower electrode 27 is also reflected through the diaphragm 21 in the image when the outline 32 of the opening 30 is optically observed. In the present embodiment, the piezoelectric body 28 is also light transmissive. For this reason, the image of the upper electrode 29 is also reflected through the piezoelectric body 28 in the image when the outline 32 of the opening 30 is optically observed. Therefore, in addition to the image of the contour 32 of the opening 30, the image of the contour 34 of the lower electrode 27 and the image of the contour 35 of the upper electrode 29 are also displayed in the optically observed image. At this time, since the microscope is focused on the wall surface 31 of the opening 30, the image of the lower electrode 27 and the upper electrode 29 is blurred depending on the depth of focus. That is, the image of the outline 34 of the lower electrode 27 and the outline 35 of the upper electrode 29 is blurred. Thereby, the blurred outline 34 of the lower electrode 27 and the outline 35 of the upper electrode 29 easily interfere with the image of the outline 32 of the opening 30. As a result, the outline 32 of the opening 30 becomes unclear and it becomes difficult to grasp the outline 32 of the opening 30 (it is difficult to observe optically), so it is difficult to measure the dimensions of the pressure chamber 22.

  Therefore, in the present embodiment, an inspection pressure chamber 22 (hereinafter referred to as an inspection pressure chamber 33) is provided. That is, in the present embodiment, in the recording head 3, the plurality of pressure chambers 22 include the inspection pressure chambers 33. In the present embodiment, as shown in FIG. 7, an inspection pressure chamber 33 is located at the end of the array of the plurality of pressure chambers 22. In FIG. 7, the arrangement of a plurality of pressure chambers 22 corresponding to one nozzle row is schematically shown as a plan view. In the example shown in FIG. 7, inspection pressure chambers 33 are provided at both ends of the arrangement of the plurality of pressure chambers 22.

  In the present embodiment, the pressure chambers 22 excluding the test pressure chambers 33 among the plurality of pressure chambers 22 are configured to be able to introduce ink through the reservoir and the ink supply path 24 described above. In the present embodiment, the piezoelectric element 19 is provided for the pressure chambers 22 excluding the inspection pressure chamber 33 among the plurality of pressure chambers 22. The inspection pressure chamber 33 is configured so that the outline 32 of the opening 30 of the inspection pressure chamber 33 can be easily observed optically. Thereby, before joining the nozzle plate 16 to the pressure chamber 22 and the inspection pressure chamber 33 in the recording head 3, the outline 32 of the opening 30 of the inspection pressure chamber 33 of the vibration plate 21 from the nozzle plate 16 side. It is easy to measure the size of the opening of the inspection pressure chamber 33 by focusing the microscope on the microscope. Then, by measuring the dimensions of the inspection pressure chamber 33, the dimensions of the pressure chamber 22 can be measured and managed.

  Note that the arrangement of the inspection pressure chambers 33 in the arrangement of the plurality of pressure chambers 22 is not limited to both ends of the arrangement of the plurality of pressure chambers 22. As an arrangement configuration of the inspection pressure chambers 33 in the arrangement of the plurality of pressure chambers 22, a configuration in which the inspection pressure chambers 33 are arranged only at one end of the arrangement of the plurality of pressure chambers 22 may be employed. In the example shown in FIG. 7, six test pressure chambers 33 are provided in the arrangement of the plurality of pressure chambers 22. However, the number of inspection pressure chambers 33 in the arrangement of the plurality of pressure chambers 22 is not limited to this, and if at least one inspection pressure chamber 33 is provided, the number of inspection chambers 5 or less or six Various numbers may be employed, such as a number exceeding. In the present embodiment, in the arrangement of the plurality of pressure chambers 22, the inspection pressure chamber 33 is located at the end of the arrangement of the plurality of pressure chambers 22. According to this configuration, the plurality of pressure chambers 22 corresponding to one nozzle row are continuously arranged in the nozzle row direction while maintaining the pitch at which the plurality of nozzles 25 forming the nozzle row are arranged. . Thus, ink can be ejected from each nozzle 25 forming the nozzle row at a pitch at which each nozzle 25 is arranged.

  Hereinafter, an embodiment of the inspection pressure chamber 33 will be described with reference to the drawings. In the following, in order to identify the inspection pressure chamber 33 for each embodiment, different alphabetic characters, symbols, and the like are added to the inspection pressure chamber 33 for each embodiment.

Example 1
As shown in FIG. 8, the inspection pressure chamber 33A according to the first embodiment is provided on the opposite side of the diaphragm 21 from the inspection pressure chamber 33A over the region where the lower electrode 27 straddles the opening 30 of the inspection pressure chamber 33A. It has been. That is, in the first embodiment, when the inspection pressure chamber 33A is viewed in a plan view from the vibration plate 21 toward the inspection pressure chamber 33A, the lower electrode 27 is provided over a region straddling the inspection pressure chamber 33A. In the first embodiment, the piezoelectric body 28, the upper electrode 29, and the lead wiring 41 are located outside the region overlapping the inspection pressure chamber 33A. That is, in the first embodiment, when the inspection pressure chamber 33A is viewed in plan from the vibration plate 21 toward the inspection pressure chamber 33A, the piezoelectric body 28, the upper electrode 29, and the lead wiring 41 have the inspection pressure. It does not overlap the area of the chamber 33A.

  Therefore, the contour 34 of the lower electrode 27 is located outside the region of the inspection pressure chamber 33A. Further, the contour of the piezoelectric body 28, the contour 35 of the upper electrode 29, and the contour of the lead wiring 41 are also located outside the region of the inspection pressure chamber 33A. For this reason, when the inspection pressure chamber 33A is optically observed in the direction from the inspection pressure chamber 33A toward the diaphragm 21, the contour 34 of the lower electrode 27 is not observed in the region of the inspection pressure chamber 33A. Further, the contour of the piezoelectric body 28, the contour 35 of the upper electrode 29, and the contour of the lead wiring 41 are not observed in the region of the pressure chamber for inspection 33A. As a result, when the inspection pressure chamber 33A is optically observed, an image of the contour 32 of the opening 30 of the inspection pressure chamber 33A is obtained from the lower electrode 27, the piezoelectric body 28, the upper electrode 29, and the lead wiring 41. Interference with the image is kept low. As a result, when the inspection pressure chamber 33A is optically observed, it becomes easy to clearly grasp the outline 32 of the opening 30 of the inspection pressure chamber 33A. Therefore, in the recording head 3 according to the present embodiment, before joining the nozzle plate 16 to the pressure chamber 22 and the inspection pressure chamber 33A, the opening 30 of the inspection pressure chamber 33A of the diaphragm 21 from the nozzle plate 16 side. It is easy to measure the dimension of the opening of the pressure chamber 33A for inspection by focusing the outline 32 on the microscope. Then, by measuring the dimensions of the inspection pressure chamber 33A, the dimensions of the pressure chamber 22 can be measured and managed.

  Next, the manufacturing method of the said Example 1 is demonstrated, referring FIG. 9A-FIG. 9H. The vibration plate 21 is provided in the inspection pressure chamber 33 and the pressure chamber 22 on the side opposite to the opening 30 (FIG. 9A). When the inspection pressure chamber 33A is viewed in plan from the vibration plate 21 toward the inspection pressure chamber 33A, the surface of the vibration plate 21 opposite to the inspection pressure chamber 33A provided to overlap the inspection pressure chamber 33A. A lower metal film 27a to be the lower electrode 27 is formed on the entire surface by sputtering or the like (FIG. 9B). Thereafter, the lower metal film 27a is patterned by etching so that the lower electrode 27 is formed over a region straddling the inspection pressure chamber 33A (specifically, a resist pattern serving as a mask for etching by photolithography). 9C is provided on the opposite side of the lower metal film 27a from the diaphragm 21, and after etching the lower metal film 27a from the upper surface side with an etching solution such as an aqueous solution, the resist pattern is removed (FIG. 9C). At this time, the individual lower electrode 27 is patterned for each pressure chamber 22 in a region overlapping the pressure chamber 22. Thereby, an individual lower electrode 27 is formed for each pressure chamber 22.

  After the lower electrode 27 is provided on the surface of the vibration plate 21 opposite to the inspection pressure chamber 33A, the lower electrode 27 is located on the opposite side of the vibration plate 21 from the region overlapping the inspection pressure chamber 33A. Thus, the piezoelectric body 28 is provided. A PZT layer 28b to be the piezoelectric body 28 is formed on the entire surface of the vibration plate 21 on which the lower electrode 27 is formed, on the side opposite to the inspection pressure chamber 33A (FIG. 9D). The method for forming the PZT layer 28b is not particularly limited. For example, a so-called sol in which a metal organic substance is dissolved and dispersed in a catalyst is applied and dried to be gelled, and further fired at a high temperature to form the PZT layer 28b made of a metal oxide. The so-called sol-gel method obtained is used. In addition, the PZT layer 28b may be formed by various methods such as sputtering and IJ coating. Thereafter, a resist pattern serving as a mask for etching is formed on the opposite side of the PZT layer 28b from the diaphragm 21 by photolithography, and the individual piezoelectric bodies 28 are formed in regions overlapping the pressure chambers 22 by etching the PZT layer 28b. Then, the resist pattern is removed (FIG. 9E). At this time, the piezoelectric body 28 is not formed in a region overlapping the inspection pressure chamber 33A. That is, the PZT layer 28 b is removed from the region overlapping the pressure chamber 22. For this reason, the piezoelectric body 28 is located outside the region overlapping the inspection pressure chamber 33A.

  Thereafter, an upper metal film 29a to be the upper electrode 29 is formed by sputtering or the like on the entire surface of the vibration plate 21 on which the lower electrode 27 and the piezoelectric body 28 are formed on the side opposite to the inspection pressure chamber 33A (FIG. 9F). . Then, a resist pattern serving as a mask for etching is formed on the opposite side of the upper metal film 29a to the vibration plate 21 by photolithography, and the upper metal film 29a is etched to form an upper electrode in a region overlapping the pressure chamber 22. After patterning so that 29 is positioned, the resist pattern is removed (FIG. 9G). At this time, the upper electrode 29 is not formed in a region overlapping the inspection pressure chamber 33A. That is, the upper metal film 29 a is removed from the region overlapping the pressure chamber 22. For this reason, the upper electrode 29 is located outside the region overlapping the inspection pressure chamber 33A.

  After patterning up to the upper electrode 29, the lead wiring 41 is patterned. First, the metal layer 43 is formed by sputtering or the like on the entire surface of the diaphragm 21 on which the lower electrode 27, the piezoelectric body 28, and the upper electrode 29 are formed on the side opposite to the inspection pressure chamber 33A (FIG. 9H). Then, the lead wiring 41 (FIG. 8) is formed by patterning the metal layer 43 by photolithography and etching. At this time, the lead wiring 41 is not formed in a region overlapping the inspection pressure chamber 33A. That is, the metal layer 43 is removed from the region overlapping the pressure chamber 22. For this reason, the lead wiring 41 is located outside the region overlapping with the inspection pressure chamber 33A. In this way, the actuator unit 14 of this embodiment can be formed.

(Example 2)
As shown in FIG. 10, the inspection pressure chamber 33 </ b> B of the second embodiment is configured such that the lower electrode 27 and the piezoelectric body 28 are provided on the opposite side of the vibration plate 21 from the inspection pressure chamber 33 </ b> B. It is provided over a region that straddles. In other words, in the second embodiment, when the inspection pressure chamber 33B is viewed in a plan view from the diaphragm 21 toward the inspection pressure chamber 33B, the lower electrode 27 and the piezoelectric body 28 are provided over a region across the inspection pressure chamber 33B. It has been. Except for this, the second embodiment has the same configuration as the first embodiment. For this reason, in Example 2, about the structure similar to Example 1, the same code | symbol as Example 1 is attached | subjected and detailed description is abbreviate | omitted.

  In the second embodiment, the upper electrode 29 and the lead wiring 41 are positioned outside the region overlapping the inspection pressure chamber 33B. That is, in the second embodiment, when the inspection pressure chamber 33B is viewed in plan in the direction from the diaphragm 21 toward the inspection pressure chamber 33B, the upper electrode 29 and the lead wiring 41 overlap the region of the inspection pressure chamber 33B. Not.

  Therefore, the contour 34 of the lower electrode 27 and the contour of the piezoelectric body 28 are located outside the region of the inspection pressure chamber 33B. Further, the contour 35 of the upper electrode 29 and the contour of the lead wiring 41 are also located outside the region of the inspection pressure chamber 33B. For this reason, when the inspection pressure chamber 33B is optically observed in the direction from the inspection pressure chamber 33B toward the diaphragm 21, the outline 34 of the lower electrode 27 is not observed in the region of the inspection pressure chamber 33B. The piezoelectric body 28 is provided so as to overlap the lower electrode 27 in the region of the inspection pressure chamber 33B. Therefore, when the inspection pressure chamber 33B is optically observed, an image of the piezoelectric body 28 is not observed in the region of the inspection pressure chamber 33B. Further, neither the contour 35 of the upper electrode 29 nor the contour of the lead wiring 41 is observed in the region of the pressure chamber for inspection 33B. Thus, when the inspection pressure chamber 33B is optically observed, an image of the contour 32 of the opening 30 of the inspection pressure chamber 33B is transferred to the lower electrode 27, the piezoelectric body 28, the upper electrode 29, and the lead wiring 41. Interference is kept low. As a result, when the inspection pressure chamber 33B is optically observed, it becomes easier to clearly grasp the outline 32 of the opening 30 of the inspection pressure chamber 33B. Therefore, in the recording head 3 according to the present embodiment, before joining the nozzle plate 16 to the pressure chamber 22 and the inspection pressure chamber 33B, the opening 30 of the inspection pressure chamber 33B of the vibration plate 21 from the nozzle plate 16 side. It is easy to measure the size of the opening of the pressure chamber 33B for inspection by focusing the microscope on the contour 32 of the inspection. And the dimension of the pressure chamber 22 can be measured and managed by measuring the dimension of the pressure chamber 33B for inspection. Furthermore, since the piezoelectric body 28 is provided, the diaphragm 21 can be reinforced.

  In the manufacturing method of the second embodiment, in the step of patterning the piezoelectric body 28 of the first embodiment, the piezoelectric body 28 is left over a region overlapping the inspection pressure chamber 33B. Other steps are the same as those in the first embodiment, and thus detailed description thereof is omitted.

(Example 3)
As shown in FIG. 11, in the inspection pressure chamber 33C of the third embodiment, the lower electrode 27, the piezoelectric body 28, and the upper electrode 29 are provided with the inspection pressure on the side opposite to the inspection pressure chamber 33C of the diaphragm 21. It is provided over a region straddling the opening 30 of the chamber 33C. That is, in Example 3, when the inspection pressure chamber 33C is viewed in plan from the diaphragm 21 toward the inspection pressure chamber 33C, the lower electrode 27, the piezoelectric body 28, and the upper electrode 29 are connected to the inspection pressure chamber. It is provided over a region straddling 33C. Except for this, the third embodiment has the same configuration as the first embodiment. For this reason, in Example 3, about the structure similar to Example 1, the same code | symbol as Example 1 is attached | subjected and detailed description is abbreviate | omitted.

  In Example 3, the lead wiring 41 is positioned outside the region overlapping the inspection pressure chamber 33C. That is, in Example 3, when the inspection pressure chamber 33C is viewed in a plan view from the vibration plate 21 toward the inspection pressure chamber 33C, the lead wiring 41 does not overlap the region of the inspection pressure chamber 33C.

  Therefore, the contour 34 of the lower electrode 27, the contour of the piezoelectric body 28, and the contour 35 of the upper electrode are located outside the region of the inspection pressure chamber 33C. The outline of the lead wiring 41 is also located outside the region of the inspection pressure chamber 33C. For this reason, when the inspection pressure chamber 33C is optically observed in the direction from the inspection pressure chamber 33C toward the diaphragm 21, the contour 34 of the lower electrode 27 is not observed in the region of the inspection pressure chamber 33C. The piezoelectric body 28 and the upper electrode 29 are provided so as to overlap the lower electrode 27 in the region of the inspection pressure chamber 33C. Therefore, when the inspection pressure chamber 33C is optically observed, images of the piezoelectric body 28 and the upper electrode 29 are not observed in the region of the inspection pressure chamber 33C. Further, the outline of the lead wiring 41 is not observed in the region of the inspection pressure chamber 33C. Thus, when the inspection pressure chamber 33C is optically observed, the image of the outline 32 of the opening 30 of the inspection pressure chamber 33C is transferred to the lower electrode 27, the piezoelectric body 28, the upper electrode 29, and the lead wiring 41. Interference is kept low. As a result, when the inspection pressure chamber 33C is optically observed, it becomes easy to clearly grasp the outline 32 of the opening 30 of the inspection pressure chamber 33C. Therefore, in the recording head 3 according to the present embodiment, before joining the nozzle plate 16 to the pressure chamber 22 and the inspection pressure chamber 33C, the opening 30 of the inspection pressure chamber 33C of the vibration plate 21 from the nozzle plate 16 side. It is easy to measure the dimension of the opening of the pressure chamber 33C for inspection by focusing the outline 32 on the microscope. And the dimension of the pressure chamber 22 can be measured and managed by measuring the dimension of the pressure chamber 33C for inspection. Further, since the piezoelectric body 28 and the upper electrode 29 are provided, the diaphragm 21 can be reinforced.

  In the manufacturing method of the third embodiment, in the process of patterning the upper electrode 29 of the second embodiment, the upper electrode 29 is left over a region overlapping the pressure chamber for inspection 33C. Other steps are the same as those in the second embodiment, and thus detailed description thereof is omitted.

Example 4
As shown in FIG. 12, the inspection pressure chamber 33 </ b> D of the fourth embodiment is configured such that the lower electrode 27, the piezoelectric body 28, and the lead wiring 41 are inspected pressure on the side opposite to the inspection pressure chamber 33 </ b> D of the diaphragm 21. It is provided over a region straddling the opening 30 of the chamber 33D. That is, in Example 4, when the inspection pressure chamber 33D is viewed in plan from the diaphragm 21 toward the inspection pressure chamber 33D, the lower electrode 27, the piezoelectric body 28, and the lead wiring 41 are connected to the inspection pressure chamber. It is provided over a region straddling 33D. Except this, Example 4 has the same configuration as Example 1. For this reason, in Example 4, about the structure similar to Example 1, the same code | symbol as Example 1 is attached | subjected and detailed description is abbreviate | omitted.

  In the fourth embodiment, the upper electrode 29 is positioned outside the region overlapping with the inspection pressure chamber 33D. That is, in Example 4, when the inspection pressure chamber 33D is viewed in a plan view from the vibration plate 21 toward the inspection pressure chamber 33D, the upper electrode 29 does not overlap the region of the inspection pressure chamber 33D.

  Therefore, the outline 34 of the lower electrode 27, the outline of the piezoelectric body 28, and the outline of the lead wiring 41 are located outside the region of the inspection pressure chamber 33D. The contour 35 of the upper electrode 29 is also located outside the region of the inspection pressure chamber 33D. For this reason, when the inspection pressure chamber 33D is optically observed in the direction from the inspection pressure chamber 33D toward the diaphragm 21, the contour 34 of the lower electrode 27 is not observed in the region of the inspection pressure chamber 33D. The piezoelectric body 28 and the lead wiring 41 are provided so as to overlap the lower electrode 27 in the region of the inspection pressure chamber 33D. Accordingly, when the inspection pressure chamber 33D is optically observed, images of the piezoelectric body 28 and the lead wiring 41 are not observed in the region of the inspection pressure chamber 33D. Further, the contour 35 of the upper electrode 29 is not observed in the region of the inspection pressure chamber 33D. Thus, when the inspection pressure chamber 33D is optically observed, an image of the contour 32 of the opening 30 of the inspection pressure chamber 33D is transferred to the lower electrode 27, the piezoelectric body 28, the upper electrode 29, and the lead wiring 41. Interference is kept low. As a result, when the inspection pressure chamber 33D is optically observed, it becomes easier to clearly grasp the outline 32 of the opening 30 of the inspection pressure chamber 33D. Therefore, in the recording head 3 according to this embodiment, before the nozzle plate 16 is joined to the pressure chamber 22 and the inspection pressure chamber 33D, the opening 30 of the inspection pressure chamber 33D of the vibration plate 21 is provided from the nozzle plate 16 side. It is easy to measure the size of the opening of the pressure chamber 33D for inspection by focusing the outline of the microscope on the contour 32. And the dimension of the pressure chamber 22 can be measured and managed by measuring the dimension of the pressure chamber 33D for inspection. Further, since the piezoelectric body 28 and the lead wiring 41 are provided, the diaphragm 21 can be reinforced.

  In the manufacturing method of the fourth embodiment, in the process of patterning the lead wiring 41 of the second embodiment, the lead wiring 41 is left over a region overlapping with the inspection pressure chamber 33D. Other steps are the same as those in the second embodiment, and thus detailed description thereof is omitted.

(Example 5)
As shown in FIG. 13, the inspection pressure chamber 33 </ b> E according to the fifth embodiment has a lower electrode 27, a piezoelectric body 28, an upper electrode 29, and a lead wire 41 on the opposite side of the vibration plate 21 from the inspection pressure chamber 33 </ b> E. Are provided over a region across the opening 30 of the inspection pressure chamber 33E. That is, in the fifth embodiment, when the inspection pressure chamber 33E is viewed in a plan view from the diaphragm 21 toward the inspection pressure chamber 33E, the lower electrode 27, the piezoelectric body 28, the upper electrode 29, and the lead wiring 41 Is provided over a region straddling the inspection pressure chamber 33E. Except for this, the fifth embodiment has the same configuration as the first embodiment. For this reason, in Example 5, about the structure similar to Example 1, the same code | symbol as Example 1 is attached | subjected and detailed description is abbreviate | omitted.

  With the above configuration, in Example 5, the contour 34 of the lower electrode 27, the contour of the piezoelectric body 28, the contour 35 of the upper electrode 29, and the contour of the lead wiring 41 are larger than the region of the inspection pressure chamber 33E. Located outside. For this reason, when the inspection pressure chamber 33E is optically observed in the direction from the inspection pressure chamber 33E toward the diaphragm 21, the contour 34 of the lower electrode 27 is not observed in the region of the inspection pressure chamber 33E. The piezoelectric body 28, the upper electrode 29, and the lead wiring 41 are provided so as to overlap the lower electrode 27 in the region of the inspection pressure chamber 33E. Therefore, when the inspection pressure chamber 33E is optically observed, images of the piezoelectric body 28, the upper electrode 29, and the lead wiring 41 are not observed in the region of the inspection pressure chamber 33E. Thus, when the inspection pressure chamber 33E is optically observed, an image of the outline 32 of the opening 30 of the inspection pressure chamber 33E is transferred to the lower electrode 27, the piezoelectric body 28, the upper electrode 29, and the lead wiring 41. Interference is kept low. As a result, when the inspection pressure chamber 33E is optically observed, it becomes easier to clearly grasp the outline 32 of the opening 30 of the inspection pressure chamber 33E. Therefore, in the recording head 3 according to the present embodiment, before joining the nozzle plate 16 to the pressure chamber 22 and the inspection pressure chamber 33E, the opening 30 of the inspection pressure chamber 33E of the diaphragm 21 from the nozzle plate 16 side. By focusing the microscope on the outline 32, the size of the opening of the pressure chamber 33E for inspection can be easily measured. And the dimension of the pressure chamber 22 can be measured and managed by measuring the dimension of the test pressure chamber 33E. Furthermore, since the piezoelectric body 28, the upper electrode 29, and the lead wiring 41 are provided, the diaphragm 21 can be reinforced.

  In the manufacturing method of the fifth embodiment, in the process of patterning the lead wiring 41 of the third embodiment, the lead wiring 41 is left over a region overlapping the inspection pressure chamber 33E. Other steps are the same as those in the third embodiment, and thus detailed description thereof is omitted.

(Example 6)
As shown in FIG. 14, the inspection pressure chamber 33F according to the sixth embodiment has the lower electrode 27 and the upper electrode 29 on the side opposite to the inspection pressure chamber 33F of the diaphragm 21, and the opening 30 of the inspection pressure chamber 33F. It is provided over a region that straddles. That is, in the sixth embodiment, when the inspection pressure chamber 33F is viewed in plan from the vibration plate 21 toward the inspection pressure chamber 33F, the lower electrode 27 and the upper electrode 29 are provided over a region across the inspection pressure chamber 33F. It has been. Except this, Example 6 has the same configuration as Example 1. For this reason, in Example 6, about the structure similar to Example 1, the same code | symbol as Example 1 is attached | subjected and detailed description is abbreviate | omitted.

  In Example 6, the piezoelectric body 28 and the lead wiring 41 are positioned outside the region overlapping the inspection pressure chamber 33F. That is, in the sixth embodiment, when the inspection pressure chamber 33F is viewed in plan from the vibration plate 21 toward the inspection pressure chamber 33F, the piezoelectric body 28 and the lead wire 41 overlap the region of the inspection pressure chamber 33F. Not.

  Therefore, the outline 34 of the lower electrode 27 and the outline 35 of the upper electrode 29 are located outside the region of the inspection pressure chamber 33F. The contour of the piezoelectric body 28 and the contour of the lead wiring 41 are also located outside the region of the inspection pressure chamber 33F. For this reason, when the inspection pressure chamber 33F is optically observed in the direction from the inspection pressure chamber 33F toward the diaphragm 21, the outline 34 of the lower electrode 27 is not observed in the region of the inspection pressure chamber 33F. The upper electrode 29 is provided so as to overlap the lower electrode 27 in the region of the inspection pressure chamber 33F. Therefore, when the inspection pressure chamber 33F is optically observed, an image of the upper electrode 29 is not observed in the region of the inspection pressure chamber 33F. Further, neither the outline of the piezoelectric body 28 nor the outline of the lead wiring 41 is observed within the region of the inspection pressure chamber 33F. Thus, when the inspection pressure chamber 33F is optically observed, an image of the contour 32 of the opening 30 of the inspection pressure chamber 33F is transferred to the lower electrode 27, the piezoelectric body 28, the upper electrode 29, and the lead wiring 41. Interference is kept low. As a result, when the inspection pressure chamber 33F is optically observed, it becomes easier to clearly grasp the outline 32 of the opening 30 of the inspection pressure chamber 33F. Therefore, in the recording head 3 according to this embodiment, before the nozzle plate 16 is joined to the pressure chamber 22 and the inspection pressure chamber 33F, the opening 30 of the inspection pressure chamber 33F of the diaphragm 21 is formed from the nozzle plate 16 side. It is easy to measure the size of the opening of the pressure chamber 33F for inspection by focusing the microscope on the outline 32. And the dimension of the pressure chamber 22 can be measured and managed by measuring the dimension of the pressure chamber 33F for inspection. Further, since the upper electrode 29 is provided, the diaphragm 21 can be reinforced.

  In the manufacturing method of the sixth embodiment, in the process of patterning the upper electrode 29 of the first embodiment, the upper electrode 29 is left over a region overlapping the pressure chamber for inspection 33F. Other steps are the same as those in the first embodiment, and thus detailed description thereof is omitted.

(Example 7)
As shown in FIG. 15, the inspection pressure chamber 33 </ b> G according to the seventh embodiment is configured such that the lower electrode 27, the upper electrode 29, and the lead wiring 41 are on the opposite side of the diaphragm 21 from the inspection pressure chamber 33 </ b> G. It is provided over a region straddling the opening 30 of the chamber 33G. That is, in the seventh embodiment, when the inspection pressure chamber 33G is viewed in plan from the diaphragm 21 toward the inspection pressure chamber 33G, the lower electrode 27, the upper electrode 29, and the lead wiring 41 are connected to the inspection pressure chamber. It is provided over a region straddling 33G. Except for this, Example 7 has the same configuration as Example 1. For this reason, in Example 7, about the structure similar to Example 1, the same code | symbol as Example 1 is attached | subjected and detailed description is abbreviate | omitted.

  In Example 7, the piezoelectric body 28 is located outside the region overlapping the pressure chamber for inspection 33G. That is, in Example 7, when the inspection pressure chamber 33G is viewed in a plan view from the diaphragm 21 toward the inspection pressure chamber 33G, the piezoelectric body 28 does not overlap the region of the inspection pressure chamber 33G.

  Therefore, the contour 34 of the lower electrode 27, the contour 35 of the upper electrode 29, and the contour of the lead wiring 41 are located outside the region of the inspection pressure chamber 33G. The contour of the piezoelectric body 28 is also located outside the region of the inspection pressure chamber 33G. For this reason, when the inspection pressure chamber 33G is optically observed in the direction from the inspection pressure chamber 33G toward the diaphragm 21, the contour 34 of the lower electrode 27 is not observed in the region of the inspection pressure chamber 33G. The upper electrode 29 and the lead wiring 41 are provided so as to overlap the lower electrode 27 in the region of the pressure chamber for inspection 33G. Therefore, when the inspection pressure chamber 33G is optically observed, images of the upper electrode 29 and the lead wiring 41 are not observed in the region of the inspection pressure chamber 33G. Further, the contour of the piezoelectric body 28 is not observed in the region of the inspection pressure chamber 33G. Thus, when the inspection pressure chamber 33G is optically observed, an image of the contour 32 of the opening 30 of the inspection pressure chamber 33G is transferred to the lower electrode 27, the piezoelectric body 28, the upper electrode 29, and the lead wiring 41. Interference is kept low. As a result, when the inspection pressure chamber 33G is optically observed, it becomes easier to clearly grasp the outline 32 of the opening 30 of the inspection pressure chamber 33G. Therefore, in the recording head 3 according to the present embodiment, before joining the nozzle plate 16 to the pressure chamber 22 and the inspection pressure chamber 33G, the opening 30 of the inspection pressure chamber 33G of the diaphragm 21 from the nozzle plate 16 side. It is easy to measure the size of the opening of the pressure chamber 33G for inspection by focusing the microscope on the outline 32. And the dimension of the pressure chamber 22 can be measured and managed by measuring the dimension of the pressure chamber 33G for inspection. Furthermore, since the upper electrode 29 and the lead wiring 41 are provided, the diaphragm 21 can be reinforced.

  In the manufacturing method of the seventh embodiment, in the step of patterning the lead wiring 41 of the sixth embodiment, the lead wiring 41 is left over a region overlapping the inspection pressure chamber 33G. The other steps are the same as in Example 6, and thus detailed description thereof is omitted.

(Example 8)
As shown in FIG. 16, the inspection pressure chamber 33 </ b> H of the eighth embodiment includes the lower electrode 27 and the lead wiring 41 on the opposite side of the vibration plate 21 from the inspection pressure chamber 33 </ b> H, and the opening 30 of the inspection pressure chamber 33 </ b> H. It is provided over a region that straddles. That is, in Example 8, when the inspection pressure chamber 33H is viewed in a plan view from the diaphragm 21 toward the inspection pressure chamber 33H, the lower electrode 27 and the lead wiring 41 are provided over a region across the inspection pressure chamber 33H. It has been. Except for this, Example 8 has the same configuration as Example 1. For this reason, in Example 8, about the structure similar to Example 1, the same code | symbol as Example 1 is attached | subjected and detailed description is abbreviate | omitted.

  In Example 8, the piezoelectric body 28 and the upper electrode 29 are positioned outside the region overlapping the inspection pressure chamber 33H. That is, in the eighth embodiment, when the inspection pressure chamber 33H is viewed in plan from the diaphragm 21 toward the inspection pressure chamber 33H, the piezoelectric body 28 and the upper electrode 29 overlap the region of the inspection pressure chamber 33H. Not.

  Therefore, the contour 34 of the lower electrode 27 and the contour of the lead wiring 41 are located outside the region of the inspection pressure chamber 33H. The contour of the piezoelectric body 28 and the contour 35 of the upper electrode 29 are also located outside the region of the inspection pressure chamber 33H. For this reason, when the inspection pressure chamber 33H is optically observed in the direction from the inspection pressure chamber 33H toward the diaphragm 21, the contour 34 of the lower electrode 27 is not observed in the region of the inspection pressure chamber 33H. The lead wiring 41 is provided so as to overlap the lower electrode 27 in the region of the inspection pressure chamber 33H. Therefore, when the inspection pressure chamber 33H is optically observed, images of the upper electrode 29 and the lead wiring 41 are not observed in the region of the inspection pressure chamber 33H. Further, neither the contour of the piezoelectric body 28 nor the contour 35 of the upper electrode 29 is observed in the region of the inspection pressure chamber 33H. Thus, when the inspection pressure chamber 33H is optically observed, an image of the contour 32 of the opening 30 of the inspection pressure chamber 33H is transferred to the lower electrode 27, the piezoelectric body 28, the upper electrode 29, and the lead wiring 41. Interference is kept low. As a result, when the inspection pressure chamber 33H is optically observed, the outline 32 of the opening 30 of the inspection pressure chamber 33H can be clearly grasped easily. Therefore, in the recording head 3 according to the present embodiment, before joining the nozzle plate 16 to the pressure chamber 22 and the inspection pressure chamber 33H, the opening 30 of the inspection pressure chamber 33H of the vibration plate 21 from the nozzle plate 16 side. It is easy to measure the size of the opening of the pressure chamber for inspection 33H by focusing the microscope on the contour 32 of FIG. Then, by measuring the dimensions of the inspection pressure chamber 33H, the dimensions of the pressure chamber 22 can be measured and managed. Furthermore, since there is the lead wiring 41, the diaphragm 21 can be reinforced.

  In the manufacturing method of the eighth embodiment, in the step of patterning the lead wiring 41 of the first embodiment, the lead wiring 41 is left over a region overlapping with the inspection pressure chamber 33H. Other steps are the same as those in the first embodiment, and thus detailed description thereof is omitted.

Example 9
As shown in FIG. 17, the inspection pressure chamber 33I according to the ninth embodiment is provided over the region where the upper electrode 29 straddles the opening 30 of the inspection pressure chamber 33I on the side opposite to the inspection pressure chamber 33I of the diaphragm 21. It has been. That is, in the ninth embodiment, when the inspection pressure chamber 33I is viewed in a plan view from the vibration plate 21 toward the inspection pressure chamber 33I, the upper electrode 29 is provided over a region straddling the inspection pressure chamber 33I. Except for this, the ninth embodiment has the same configuration as the first embodiment. For this reason, in Example 9, about the structure similar to Example 1, the same code | symbol as Example 1 is attached | subjected and detailed description is abbreviate | omitted.

  In Example 9, the lower electrode 27, the piezoelectric body 28, and the lead wiring 41 are located outside the region overlapping the pressure chamber for inspection 33I. That is, in Example 9, when the inspection pressure chamber 33I is viewed in plan from the diaphragm 21 toward the inspection pressure chamber 33I, the lower electrode 27, the piezoelectric body 28, and the lead wiring 41 are connected to the inspection pressure. It does not overlap the area of the chamber 33I.

  Therefore, the contour 35 of the upper electrode is located outside the region of the inspection pressure chamber 33I. The contour 34 of the lower electrode 27, the contour of the piezoelectric body 28, and the contour of the lead wiring 41 are also located outside the region of the inspection pressure chamber 33I. For this reason, when the inspection pressure chamber 33I is optically observed in the direction from the inspection pressure chamber 33I toward the diaphragm 21, the contour 35 of the upper electrode 29 is not observed in the region of the inspection pressure chamber 33I. Further, the contour 34 of the lower electrode 27, the contour of the piezoelectric body 28, and the contour of the lead wiring 41 are not observed in the region of the pressure chamber for inspection 33I. Thus, when the inspection pressure chamber 33I is optically observed, an image of the contour 32 of the opening 30 of the inspection pressure chamber 33I is transferred to the lower electrode 27, the piezoelectric body 28, the upper electrode 29, and the lead wiring 41. Interference is kept low. As a result, when the inspection pressure chamber 33I is optically observed, the outline 32 of the opening 30 of the inspection pressure chamber 33I can be easily grasped clearly. Therefore, in the recording head 3 according to the present embodiment, before the nozzle plate 16 is joined to the pressure chamber 22 and the inspection pressure chamber 33I, the opening 30 of the inspection pressure chamber 33I of the diaphragm 21 from the nozzle plate 16 side. It is easy to measure the size of the opening of the inspection pressure chamber 33I by focusing the microscope on the contour 32 of the inspection. And the dimension of the pressure chamber 22 can be measured and managed by measuring the dimension of the pressure chamber 33I for inspection.

  In the manufacturing method of the ninth embodiment, in the step of patterning the lower electrode 27 of the sixth embodiment, the lower metal film 27a is removed from a region overlapping with the inspection pressure chamber 33I. That is, in the manufacturing method of the ninth embodiment, in the step of patterning the lower electrode 27 of the sixth embodiment, the lower electrode 27 is left outside the region overlapping the inspection pressure chamber 33I. The other steps are the same as in Example 6, and thus detailed description thereof is omitted.

(Example 10)
As shown in FIG. 18, the inspection pressure chamber 33J of the tenth embodiment is provided over the region where the lead wiring 41 straddles the opening 30 of the inspection pressure chamber 33J on the opposite side of the vibration plate 21 from the inspection pressure chamber 33J. It has been. That is, in the tenth embodiment, when the inspection pressure chamber 33J is viewed in plan in the direction from the diaphragm 21 to the inspection pressure chamber 33J, the lead wiring 41 is provided over a region straddling the inspection pressure chamber 33J. Except for this, the tenth embodiment has the same configuration as the first embodiment. For this reason, in Example 10, about the structure similar to Example 1, the same code | symbol as Example 1 is attached | subjected and detailed description is abbreviate | omitted.

  In Example 10, the lower electrode 27, the piezoelectric body 28, and the upper electrode 29 are located outside the region overlapping with the inspection pressure chamber 33J. That is, in Example 10, when the inspection pressure chamber 33J is viewed in plan from the diaphragm 21 toward the inspection pressure chamber 33J, the lower electrode 27, the piezoelectric body 28, and the upper electrode 29 are connected to the inspection pressure. It does not overlap the area of the chamber 33J.

  Therefore, the outline of the lead wiring 41 is positioned outside the region of the inspection pressure chamber 33J. The contour 34 of the lower electrode 27, the contour of the piezoelectric body 28, and the contour 35 of the upper electrode 29 are also located outside the region of the inspection pressure chamber 33J. For this reason, when the inspection pressure chamber 33J is optically observed in the direction from the inspection pressure chamber 33J toward the diaphragm 21, the outline of the lead wiring 41 is not observed in the region of the inspection pressure chamber 33J. Further, the contour 34 of the lower electrode 27, the contour of the piezoelectric body 28, and the contour 35 of the upper electrode 29 are not observed within the region of the pressure chamber 33J for inspection. Thus, when the inspection pressure chamber 33J is optically observed, an image of the contour 32 of the opening 30 of the inspection pressure chamber 33J is transferred to the lower electrode 27, the piezoelectric body 28, the upper electrode 29, and the lead wiring 41. Interference is kept low. As a result, when the inspection pressure chamber 33J is optically observed, it becomes easy to clearly grasp the outline 32 of the opening 30 of the inspection pressure chamber 33J. Therefore, in the recording head 3 according to the present embodiment, before the nozzle plate 16 is joined to the pressure chamber 22 and the inspection pressure chamber 33J, the opening 30 of the inspection pressure chamber 33J of the diaphragm 21 from the nozzle plate 16 side. By focusing the microscope on the outline 32, the size of the opening of the pressure chamber 33J for inspection can be easily measured. And the dimension of the pressure chamber 22 can be measured and managed by measuring the dimension of the pressure chamber 33J for inspection.

  In the manufacturing method of the tenth embodiment, in the step of patterning the lower electrode 27 of the eighth embodiment, the lower metal film 27a is removed from a region overlapping the inspection pressure chamber 33J. That is, in the manufacturing method of the tenth embodiment, in the step of patterning the lower electrode 27 of the eighth embodiment, the lower electrode 27 is left outside the region overlapping the inspection pressure chamber 33J. The other steps are the same as in Example 8, and thus detailed description thereof is omitted.

(Example 11)
As shown in FIG. 19, the inspection pressure chamber 33K according to the eleventh embodiment has the piezoelectric body 28 and the upper electrode 29 on the side opposite to the inspection pressure chamber 33K of the diaphragm 21, and the opening 30 of the inspection pressure chamber 33K. It is provided over a region that straddles. That is, in the eleventh embodiment, when the inspection pressure chamber 33K is viewed in plan from the vibration plate 21 toward the inspection pressure chamber 33K, the piezoelectric body 28 and the upper electrode 29 are provided over a region across the inspection pressure chamber 33K. It has been. Except for this, Example 11 has the same configuration as Example 1. For this reason, in Example 11, about the structure similar to Example 1, the same code | symbol as Example 1 is attached | subjected and detailed description is abbreviate | omitted.

  In Example 11, the lower electrode 27 and the lead wiring 41 are located outside the region overlapping the inspection pressure chamber 33K. That is, in Example 11, when the inspection pressure chamber 33K is viewed in plan from the diaphragm 21 toward the inspection pressure chamber 33K, the lower electrode 27 and the lead wire 41 overlap the region of the inspection pressure chamber 33K. Not.

  Accordingly, the contour of the piezoelectric body 28 and the contour 35 of the upper electrode 29 are located outside the region of the inspection pressure chamber 33K. The contour 34 of the lower electrode 27 and the contour of the lead wiring 41 are also located outside the region of the pressure chamber 33K for inspection. For this reason, when the inspection pressure chamber 33K is optically observed in the direction from the inspection pressure chamber 33K toward the diaphragm 21, the outline of the piezoelectric body 28 is not observed in the region of the inspection pressure chamber 33K. In the case where the piezoelectric body 28 has optical transparency, the contour 35 of the upper electrode 29 is not observed in the region of the inspection pressure chamber 33K. Further, neither the contour 34 of the lower electrode 27 nor the contour of the lead wiring 41 is observed in the region of the inspection pressure chamber 33K. Thus, when the inspection pressure chamber 33K is optically observed, an image of the contour 32 of the opening 30 of the inspection pressure chamber 33K is transferred to the lower electrode 27, the piezoelectric body 28, the upper electrode 29, and the lead wiring 41. Interference is kept low. As a result, when the inspection pressure chamber 33K is optically observed, it becomes easier to clearly grasp the outline 32 of the opening 30 of the inspection pressure chamber 33K. Therefore, in the recording head 3 according to the present embodiment, before the nozzle plate 16 is joined to the pressure chamber 22 and the inspection pressure chamber 33K, the opening 30 of the inspection pressure chamber 33K of the diaphragm 21 from the nozzle plate 16 side. It is easy to measure the size of the opening 30 of the inspection pressure chamber 33K by focusing the microscope on the outline 32. And the dimension of the pressure chamber 22 can be measured and managed by measuring the dimension of the pressure chamber 33K for inspection. Furthermore, since the piezoelectric body 28 is provided, the diaphragm 21 can be reinforced.

  In the manufacturing method of Example 11, in the step of patterning the lower electrode 27 of Example 3, the lower metal film 27a is removed from the region overlapping the pressure chamber for inspection 33K. That is, in the manufacturing method of Example 11, in the process of patterning the lower electrode 27 of Example 6, the lower electrode 27 is left outside the region overlapping with the inspection pressure chamber 33K. Other steps are the same as those in the third embodiment, and thus detailed description thereof is omitted.

(Example 12)
As shown in FIG. 20, the inspection pressure chamber 33L of the twelfth embodiment has the piezoelectric body 28, the upper electrode 29, and the lead wiring 41 on the opposite side of the vibration plate 21 from the inspection pressure chamber 33L. It is provided over a region straddling the opening 30 of the chamber 33L. That is, in the twelfth embodiment, when the inspection pressure chamber 33L is seen in a plan view in the direction from the vibration plate 21 toward the inspection pressure chamber 33L, the piezoelectric body 28, the upper electrode 29, and the lead wiring 41 are connected to the inspection pressure chamber. It is provided over a region straddling 33L. Except for this, Example 12 has the same configuration as Example 1. For this reason, in Example 12, about the structure similar to Example 1, the same code | symbol as Example 1 is attached | subjected and detailed description is abbreviate | omitted.

  In the twelfth embodiment, the lower electrode 27 is positioned outside the region overlapping with the inspection pressure chamber 33L. That is, in the twelfth embodiment, when the inspection pressure chamber 33L is viewed in a plan view from the diaphragm 21 toward the inspection pressure chamber 33L, the lower electrode 27 does not overlap the region of the inspection pressure chamber 33L.

  Therefore, the contour of the piezoelectric body 28, the contour 35 of the upper electrode 29, and the contour of the lead wiring 41 are located outside the region of the inspection pressure chamber 33L. The contour 34 of the lower electrode 27 is also located outside the region of the inspection pressure chamber 33L. For this reason, when the inspection pressure chamber 33L is optically observed in the direction from the inspection pressure chamber 33L toward the diaphragm 21, the contour of the piezoelectric body 28 is not observed in the region of the inspection pressure chamber 33L. In the case where the piezoelectric body 28 has optical transparency, neither the contour 35 of the upper electrode 29 nor the contour of the lead wiring 41 is observed in the region of the inspection pressure chamber 33L. Further, the contour 34 of the lower electrode 27 is not observed in the region of the inspection pressure chamber 33L. Thus, when the inspection pressure chamber 33L is optically observed, an image of the contour 32 of the opening 30 of the inspection pressure chamber 33L is transferred to the lower electrode 27, the piezoelectric body 28, the upper electrode 29, and the lead wiring 41. Interference is kept low. As a result, when the inspection pressure chamber 33L is optically observed, it becomes easier to clearly grasp the outline 32 of the opening 30 of the inspection pressure chamber 33L. Therefore, in the recording head 3 according to the present embodiment, before joining the nozzle plate 16 to the pressure chamber 22 and the inspection pressure chamber 33L, the opening 30 of the inspection pressure chamber 33L of the vibration plate 21 from the nozzle plate 16 side. It is easy to measure the size of the opening 30 of the inspection pressure chamber 33L by focusing the microscope on the outline 32 of the microscope. And the dimension of the pressure chamber 22 can be measured and managed by measuring the dimension of the pressure chamber 33L for inspection. Further, since the piezoelectric body 28 and the lead wiring 41 are provided, the diaphragm 21 can be reinforced.

  In the manufacturing method of Example 12, in the step of patterning the lead wiring 41 of Example 11, the lead wiring 41 is left over a region overlapping the inspection pressure chamber 33L. The other steps are the same as in Example 11 and will not be described in detail.

(Example 13)
As shown in FIG. 21, in the inspection pressure chamber 33M of the thirteenth embodiment, the piezoelectric body 28 and the lead wiring 41 are provided on the opposite side of the vibration plate 21 from the inspection pressure chamber 33M. It is provided over a region that straddles. That is, in the thirteenth embodiment, when the inspection pressure chamber 33M is viewed in a plan view from the vibration plate 21 toward the inspection pressure chamber 33M, the piezoelectric body 28 and the lead wiring 41 are provided over a region across the inspection pressure chamber 33M. ing. Except for this, Example 13 has the same configuration as Example 1. For this reason, in Example 13, about the structure similar to Example 1, the same code | symbol as Example 1 is attached | subjected and detailed description is abbreviate | omitted.

  In the thirteenth embodiment, the lower electrode 27 and the upper electrode 29 are located outside the region overlapping with the inspection pressure chamber 33M. That is, in the thirteenth embodiment, when the inspection pressure chamber 33M is viewed in plan from the diaphragm 21 toward the inspection pressure chamber 33M, the lower electrode 27 and the upper electrode 29 overlap the region of the inspection pressure chamber 33M. Not.

  Accordingly, the outline of the piezoelectric body 28 and the outline of the lead wiring 41 are located outside the region of the inspection pressure chamber 33M. The contour 34 of the lower electrode 27 and the contour 35 of the upper electrode 29 are also located outside the region of the inspection pressure chamber 33M. For this reason, when the inspection pressure chamber 33M is optically observed in the direction from the inspection pressure chamber 33M toward the diaphragm 21, the outline of the piezoelectric body 28 is not observed in the region of the inspection pressure chamber 33M. In the case where the piezoelectric body 28 has optical transparency, the outline of the lead wiring 41 is not observed in the region of the inspection pressure chamber 33M. Further, the contour 34 of the lower electrode 27 and the contour 35 of the upper electrode 29 are not observed in the region of the inspection pressure chamber 33M. Thus, when the inspection pressure chamber 33M is optically observed, an image of the outline 32 of the opening 30 of the inspection pressure chamber 33M is transferred to the lower electrode 27, the piezoelectric body 28, the upper electrode 29, and the lead wiring 41. Interference is kept low. As a result, when the inspection pressure chamber 33M is optically observed, it becomes easy to clearly grasp the outline 32 of the opening 30 of the inspection pressure chamber 33M. Therefore, in the recording head 3 according to the present embodiment, before the nozzle plate 16 is joined to the pressure chamber 22 and the inspection pressure chamber 33M, the opening 30 of the inspection pressure chamber 33M of the diaphragm 21 from the nozzle plate 16 side. It is easy to measure the size of the opening 30 of the inspection pressure chamber 33M by focusing the microscope on the outline 32. And the dimension of the pressure chamber 22 can be measured and managed by measuring the dimension of the pressure chamber 33M for inspection. Furthermore, since the piezoelectric body 28 is provided, the diaphragm 21 can be reinforced.

  In the manufacturing method of the thirteenth embodiment, in the step of patterning the piezoelectric body 28 of the tenth embodiment, the piezoelectric body 28 is left over a region overlapping the pressure chamber for inspection 33M. The other steps are the same as in Example 10 and will not be described in detail.

(Example 14)
As shown in FIG. 22, the inspection pressure chamber 33N according to the fourteenth embodiment has the upper electrode 29 and the lead wiring 41 on the side opposite to the inspection pressure chamber 33N of the diaphragm 21, and the opening 30 of the inspection pressure chamber 33N. It is provided over a region that straddles. That is, in Example 14, when the inspection pressure chamber 33N is viewed in plan from the diaphragm 21 toward the inspection pressure chamber 33N, the upper electrode 29 and the lead wiring 41 are provided over a region across the inspection pressure chamber 33N. It has been. Except for this, Example 14 has the same configuration as Example 1. For this reason, in Example 14, about the structure similar to Example 1, the same code | symbol as Example 1 is attached | subjected and detailed description is abbreviate | omitted.

  In Example 14, the lower electrode 27 and the piezoelectric body 28 are located outside the region overlapping the inspection pressure chamber 33N. That is, in Example 14, when the inspection pressure chamber 33N is viewed in plan from the diaphragm 21 toward the inspection pressure chamber 33N, the lower electrode 27 and the piezoelectric body 28 overlap the region of the inspection pressure chamber 33N. Not.

  Therefore, the contour 35 of the upper electrode 29 and the contour of the lead wiring 41 are located outside the region of the inspection pressure chamber 33N. Further, the contour 35 of the lower electrode 27 and the contour of the piezoelectric body 28 are also located outside the region of the pressure chamber 33N for inspection. For this reason, when the inspection pressure chamber 33N is optically observed in the direction from the inspection pressure chamber 33N toward the diaphragm 21, the contour 35 of the upper electrode 29 is not observed in the region of the inspection pressure chamber 33N. The lead wiring 41 is provided so as to overlap the upper electrode 29 in the region of the inspection pressure chamber 33N. Therefore, when the inspection pressure chamber 33N is optically observed, an image of the lead wiring 41 is not observed in the region of the inspection pressure chamber 33N. Further, the contour 34 of the lower electrode 27 and the contour of the piezoelectric body 28 are not observed in the region of the pressure chamber 33N for inspection. Thus, when the inspection pressure chamber 33N is optically observed, an image of the contour 32 of the opening 30 of the inspection pressure chamber 33N is transferred to the lower electrode 27, the piezoelectric body 28, the upper electrode 29, and the lead wiring 41. Interference is kept low. As a result, when the inspection pressure chamber 33N is optically observed, it becomes easier to clearly grasp the outline 32 of the opening 30 of the inspection pressure chamber 33N. Accordingly, in the recording head 3 according to the present embodiment, before the nozzle plate 16 is joined to the pressure chamber 22 and the inspection pressure chamber 33N, the opening 30 of the inspection pressure chamber 33N of the diaphragm 21 from the nozzle plate 16 side. It is easy to measure the size of the opening 30 of the inspection pressure chamber 33N by focusing the microscope on the outline 32. Then, by measuring the dimensions of the inspection pressure chamber 33N, the dimensions of the pressure chamber 22 can be measured and managed. Furthermore, since there is the lead wiring 41, the diaphragm 21 can be reinforced.

  In the manufacturing method of Example 14, in the step of patterning the lead wiring 41 of Example 9, the lead wiring 41 is left over a region overlapping the inspection pressure chamber 33N. The other steps are the same as those in Example 9, and thus detailed description thereof is omitted.

  The present invention is not limited to the above-described embodiment, and various modifications and improvements can be added to the above-described embodiment. In each of the above embodiments, the lower electrode 27, the piezoelectric body 28, the upper electrode 29, the lead wiring 41, and the like are used on the opposite side of the vibration plate 21 from the inspection pressure chamber 33, and the opening 30 of the inspection pressure chamber 33 is formed. Although the example which measures a dimension was shown, it is not limited to this structure. For example, in addition to the lower electrode 27, the piezoelectric body 28, the upper electrode 29, and the lead wiring 41, a light-shielding film may be provided over a region across the opening 30 of the inspection pressure chamber 33. Thus, before the nozzle plate 16 is joined to the pressure chamber 22 and the inspection pressure chamber 33 in the recording head 3, the contour of the opening 30 of the inspection pressure chamber 33 of the vibration plate 21 from the nozzle plate 16 side. The size of the opening 30 of the inspection pressure chamber 33 can be easily measured by focusing the microscope on the microscope 32. Then, by measuring the dimensions of the inspection pressure chamber 33, the dimensions of the pressure chamber 22 can be measured and managed. Further, the diaphragm 21 can be reinforced by providing a light-shielding film.

  DESCRIPTION OF SYMBOLS 1 ... Printer, 3 ... Recording head, 14 ... Actuator unit, 15 ... Pressure chamber formation board, 16 ... Nozzle plate, 17 ... Elastic film, 18 ... Insulator film, 19 ... Piezoelectric element, 20 ... Sealing plate, 21 ... Diaphragm, 22 ... Pressure chamber, 22a ... Partition, 23 ... Communication part, 25 ... Nozzle, 26 ... Communication opening, 27 ... Lower electrode, 27a ... Lower metal film, 28 ... Piezoelectric body, 28b ... PZT layer, 29 ... Upper electrode, 29a ... upper metal film, 30 ... opening, 31 ... wall surface, 32 ... contour, 33, 33A, 33B, 33C, 33D, 33E, 33F, 33G, 33H, 33I, 33J, 33K, 33L, 33M, 33N ... Pressure chamber for inspection, 34 ... Outline, 35 ... Outline, 41 ... Lead wiring, 42 ... Through hole, 43 ... Metal layer.

Claims (9)

A liquid ejecting head capable of ejecting liquid,
Multiple pressure chambers;
A piezoelectric element provided at a position overlapping the pressure chamber across a part of walls defining a pressure chamber into which the liquid can be introduced among the plurality of pressure chambers;
Have
The piezoelectric element is
A lower electrode provided on the side opposite to the pressure chamber side of the partial wall;
A piezoelectric body provided on the side opposite to the wall of the lower electrode;
An upper electrode provided on the opposite side of the piezoelectric body from the lower electrode side;
A lead wire provided on the opposite side of the upper electrode from the piezoelectric body side;
Have
The lower electrode is provided individually for each piezoelectric element,
The upper electrode is provided across a plurality of the piezoelectric elements,
The plurality of pressure chambers include a pressure chamber for inspection,
When the inspection pressure chamber is viewed in plan from the partial wall toward the inspection pressure chamber, the lower electrode, the piezoelectric body, the upper electrode, and the lead wiring constituting the piezoelectric element And at least the lower electrode is provided over a region across the pressure chamber for inspection,
A liquid jet head characterized by that. The liquid ejecting head according to claim 1,
When the inspection pressure chamber is viewed in plan in a direction from the partial wall toward the inspection pressure chamber,
The piezoelectric body, the upper electrode, and the lead wiring are provided over a region across the pressure chamber for inspection,
A liquid jet head characterized by that. A liquid ejecting head capable of ejecting liquid,
Multiple pressure chambers;
A piezoelectric element provided at a position overlapping the pressure chamber across a part of walls defining a pressure chamber into which the liquid can be introduced among the plurality of pressure chambers;
Have
The piezoelectric element is
A lower electrode provided on the side opposite to the pressure chamber side of the partial wall;
A piezoelectric body provided on the side opposite to the wall of the lower electrode;
An upper electrode provided on the opposite side of the piezoelectric body from the lower electrode side;
A lead wire provided on the opposite side of the upper electrode from the piezoelectric body side;
Have
The lower electrode is provided individually for each piezoelectric element,
The upper electrode is provided across a plurality of the piezoelectric elements,
The plurality of pressure chambers include a pressure chamber for inspection,
When the inspection pressure chamber is viewed in plan in a direction from the partial wall toward the inspection pressure chamber,
The lower electrode is positioned outside a region overlapping the pressure chamber for inspection;
The piezoelectric body and the upper electrode are provided over a region straddling the inspection pressure chamber,
A liquid jet head characterized by that. A liquid ejecting head capable of ejecting liquid,
Multiple pressure chambers;
A piezoelectric element provided at a position overlapping the pressure chamber across a part of walls defining a pressure chamber into which the liquid can be introduced among the plurality of pressure chambers;
Have
The piezoelectric element is
A lower electrode provided on the side opposite to the pressure chamber side of the partial wall;
A piezoelectric body provided on the side opposite to the wall of the lower electrode;
An upper electrode provided on the opposite side of the piezoelectric body from the lower electrode side;
A lead wire provided on the opposite side of the upper electrode from the piezoelectric body side;
Have
The lower electrode is provided individually for each piezoelectric element,
The upper electrode is provided across a plurality of the piezoelectric elements,
The plurality of pressure chambers include a pressure chamber for inspection,
When the inspection pressure chamber is viewed in plan in a direction from the partial wall toward the inspection pressure chamber,
The lower electrode and the piezoelectric body are located outside a region overlapping the pressure chamber for inspection,
The upper electrode is provided over a region across the pressure chamber for inspection;
A liquid jet head characterized by that. The liquid ejecting head according to claim 3 or 4,
When the inspection pressure chamber is viewed in plan in a direction from the partial wall toward the inspection pressure chamber,
The lead wiring is provided over a region straddling the inspection pressure chamber,
A liquid jet head characterized by that. A liquid ejecting head capable of ejecting liquid,
Multiple pressure chambers;
A piezoelectric element provided at a position overlapping the pressure chamber across a part of walls defining a pressure chamber into which the liquid can be introduced among the plurality of pressure chambers;
Have
The piezoelectric element is
A lower electrode provided on the side opposite to the pressure chamber side of the partial wall;
A piezoelectric body provided on the side opposite to the wall of the lower electrode;
An upper electrode provided on the opposite side of the piezoelectric body from the lower electrode side;
A lead wire provided on the opposite side of the upper electrode from the piezoelectric body side;
Have
The lower electrode is provided individually for each piezoelectric element,
The upper electrode is provided across a plurality of the piezoelectric elements,
The plurality of pressure chambers include a pressure chamber for inspection,
When the inspection pressure chamber is viewed in plan in a direction from the partial wall toward the inspection pressure chamber,
The lower electrode and the upper electrode are located outside a region overlapping the pressure chamber for inspection,
The piezoelectric body and the lead wiring are provided over a region straddling the inspection pressure chamber,
A liquid jet head characterized by that. A liquid ejecting head capable of ejecting liquid,
Multiple pressure chambers;
A piezoelectric element provided at a position overlapping the pressure chamber across a part of walls defining a pressure chamber into which the liquid can be introduced among the plurality of pressure chambers;
Have
The piezoelectric element is
A lower electrode provided on the side opposite to the pressure chamber side of the partial wall;
A piezoelectric body provided on the side opposite to the wall of the lower electrode;
An upper electrode provided on the opposite side of the piezoelectric body from the lower electrode side;
A lead wire provided on the opposite side of the upper electrode from the piezoelectric body side;
Have
The lower electrode is provided individually for each piezoelectric element,
The upper electrode is provided across a plurality of the piezoelectric elements,
The plurality of pressure chambers include a pressure chamber for inspection,
When the inspection pressure chamber is viewed in plan in a direction from the partial wall toward the inspection pressure chamber,
The lower electrode, the piezoelectric body, and the upper electrode are located outside a region overlapping the pressure chamber for inspection,
The lead wiring is provided over a region straddling the inspection pressure chamber,
A liquid jet head characterized by that. The liquid ejecting head according to any one of claims 1 to 7,
The plurality of pressure chambers are arranged in a predetermined direction,
The inspection pressure chamber is located at an end of the array of the plurality of pressure chambers,
A liquid jet head characterized by that. The liquid ejecting head according to claim 1 is provided.
A liquid ejecting apparatus.

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