JP2017110293A5 - - Google Patents
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- Publication number
- JP2017110293A5 JP2017110293A5 JP2016219861A JP2016219861A JP2017110293A5 JP 2017110293 A5 JP2017110293 A5 JP 2017110293A5 JP 2016219861 A JP2016219861 A JP 2016219861A JP 2016219861 A JP2016219861 A JP 2016219861A JP 2017110293 A5 JP2017110293 A5 JP 2017110293A5
- Authority
- JP
- Japan
- Prior art keywords
- carbon film
- forming method
- film forming
- film formation
- etching step
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 2
- 229910052799 carbon Inorganic materials 0.000 claims 2
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 238000005530 etching Methods 0.000 claims 1
- 238000005755 formation reaction Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US15/377,141 US20170170065A1 (en) | 2015-12-15 | 2016-12-13 | Carbon film forming method, carbon film forming apparatus, and storage medium |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015244234 | 2015-12-15 | ||
| JP2015244234 | 2015-12-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2017110293A JP2017110293A (ja) | 2017-06-22 |
| JP2017110293A5 true JP2017110293A5 (fr) | 2019-07-11 |
Family
ID=59079425
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016219861A Pending JP2017110293A (ja) | 2015-12-15 | 2016-11-10 | カーボン膜の成膜方法および成膜装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2017110293A (fr) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10446736B2 (en) * | 2017-11-27 | 2019-10-15 | International Business Machines Corporation | Backside coupling with superconducting partial TSV for transmon qubits |
| JP2022133762A (ja) * | 2021-03-02 | 2022-09-14 | 東京エレクトロン株式会社 | 成膜方法、処理装置及び処理システム |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SG195494A1 (en) * | 2012-05-18 | 2013-12-30 | Novellus Systems Inc | Carbon deposition-etch-ash gap fill process |
| JP6045975B2 (ja) * | 2012-07-09 | 2016-12-14 | 東京エレクトロン株式会社 | カーボン膜の成膜方法および成膜装置 |
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2016
- 2016-11-10 JP JP2016219861A patent/JP2017110293A/ja active Pending