JP2017107641A - Atmospheric pressure plasma apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an atmospheric pressure plasma apparatus excellent in versatility, in which a plasma irradiation area can be changed.SOLUTION: An atmospheric pressure plasma apparatus P includes: a plurality of plasma irradiation paths X1-X5 through which an object C to be irradiated is irradiated with atmospheric pressure plasma; a first exhaust path 6a formed on an outer periphery of the plasma irradiation paths X1-X5 and exhausting atmospheric pressure plasma after irradiation; and a first valve body 2 selectively supplying gas into the plasma irradiation paths X1-X5.SELECTED DRAWING: Figure 1

Description

  The present invention relates to an apparatus for irradiating a specific part of an object to be irradiated with atmospheric pressure plasma.

  Devices that irradiate atmospheric pressure plasma to biological cells and specific parts of the outer skin system for the purpose of care are known. As a specific example, there is an apparatus described in Patent Document 1. The apparatus configuration of this atmospheric pressure plasma apparatus is outlined as follows.

  Another cylindrical body made of an insulating member is provided inside the cylindrical surrounding ring portion. Gas that is the source of plasma is supplied into the cylinder. A rod-shaped inner electrode is arranged inside the cylinder, and an outer electrode that covers the outer periphery of the cylinder and is electrically grounded is arranged outside the cylinder. A predetermined voltage is applied to the inner electrode, and the gas supplied into the cylinder is turned into plasma.

  The gas converted into plasma moves to the living cell side by the gas flowing in the cylinder, and is irradiated on the surface of the affected part of the living cell. The atmospheric pressure plasma irradiated to the biological cells is exhausted to the opposite side of the biological cells through a gap formed between the cylindrical surrounding ring portion and the cylindrical body disposed inside thereof.

JP2014-212839

  The atmospheric pressure plasma apparatus of Patent Document 1 lacks versatility because the irradiation region of plasma irradiated on biological cells is constant. Considering application to the medical and cosmetic fields, the shape and size of the site to be irradiated varies from individual to individual, so that the plasma irradiation region is not constant, and it is desirable that the size of the plasma irradiation region can be changed. Also, in other fields, the size of the object to be irradiated is not always constant, and may vary depending on the type of the object to be irradiated.

  For example, in Patent Document 1, it is possible to widen the plasma irradiation region by separating the device from the biological cells. However, since the radical in the atmospheric pressure plasma has a short life, the radical in the atmospheric pressure plasma does not effectively act on the biological cell by separating the device from the biological cell. In addition, if the gas used for plasma generation is harmful to the organism, such as a bad odor or irritation, the device can be separated from the biological cells to widen the plasma irradiation area, causing the gas to leak out of the device and adversely affect the organism. It is concerned that it will give.

  In addition, when the plasma irradiation area of the device is larger than necessary, plasma is irradiated to an unnecessary part of the biological cell, so that the part that is not the irradiation target is abnormal depending on the type of gas to be converted into plasma. There is concern. Furthermore, if the plasma irradiation area is larger than necessary, extra gas is required for generating unnecessary plasma, and there is a concern that the cost for operating and maintaining the apparatus will increase.

  In view of the above matters, the main object of the present invention is to provide an atmospheric pressure plasma apparatus having excellent versatility in which the plasma irradiation region can be changed.

  An atmospheric pressure plasma apparatus according to the present invention includes a plurality of plasma irradiation paths for irradiating an object to be irradiated with atmospheric pressure plasma, and a first plasma exhaust path formed on an outer periphery of the plasma irradiation path to exhaust the atmospheric pressure plasma after irradiation. And a first valve body that selectively supplies gas to the plasma irradiation path.

  With such an atmospheric pressure plasma apparatus, it is possible to appropriately change the plasma irradiation region on the irradiation target object in accordance with the selection of the plasma irradiation path. Moreover, since the use of unnecessary gas is refrained, it is possible to reduce the cost for operating and maintaining the apparatus.

  A more specific configuration of the atmospheric pressure plasma apparatus includes a coil wound around the outer periphery of the plasma irradiation path and a high-frequency power source connected to the coil.

  By using the inductively coupled plasma method, it is not necessary to arrange an electrode for plasma generation in the plasma irradiation path. This makes it possible to prevent the electrodes in the plasma irradiation path from being sputtered by the plasma and the sputtered particles generated from the electrodes from being scattered to the irradiation target.

  Furthermore, when it is desired to control the size of the plasma irradiation region more precisely, the atmospheric pressure plasma apparatus selectively selects a second exhaust path individually connected to the plasma irradiation path and the second exhaust path. And a second valve body that opens and closes.

  If it is the said structure, it will become possible to prevent reliably that the plasma of the thin density | concentration which can be generated in an unused plasma irradiation path is irradiated to a to-be-irradiated object. Thereby, the size of the plasma irradiation region can be controlled more accurately.

  Moreover, when it is desired to change the plasma irradiation region to the irradiation target two-dimensionally, it is desirable that the plasma irradiation path is composed of multiple tubes.

  Depending on the selection of the plasma irradiation path, it is possible to appropriately change the plasma irradiation region on the irradiation target. Moreover, since the use of unnecessary gas is refrained, it is possible to reduce the cost for operating and maintaining the apparatus.

Schematic sectional view of an atmospheric pressure plasma apparatus according to the present invention 1-1 sectional view of FIG. Block diagram of atmospheric pressure plasma device with plasma temperature control mechanism The schematic diagram which shows the modification of the atmospheric pressure plasma apparatus which concerns on this invention Typical sectional drawing which shows the modification of the atmospheric pressure plasma apparatus which concerns on this invention Typical sectional drawing which shows the modification of the atmospheric pressure plasma apparatus which concerns on this invention 1-1 sectional view of FIG. Typical sectional drawing which shows the modification of the atmospheric pressure plasma apparatus which concerns on this invention

  Hereinafter, the basic embodiment of the present invention will be described with reference to FIGS. 1 and 2.

  FIG. 1 shows a schematic cross-sectional view of an atmospheric pressure plasma apparatus P according to the present invention. The atmospheric pressure plasma apparatus P is an apparatus that irradiates an object to be irradiated C (for example, a biological cell) with atmospheric pressure plasma. The atmospheric pressure plasma apparatus P includes a plurality of plasma irradiation paths X1 to X3 into which gas to be converted into plasma is introduced. A first valve body 2 is provided between the gas supply unit 1 and the plasma irradiation paths X1 to X3 so that gas supply from the gas supply unit 1 to each of the plasma irradiation paths X1 to X3 is selectively performed. It has been. In the embodiment of FIG. 1, for example, a four-way valve is used as the first valve body 2.

  FIG. 2 shows a cross-sectional view of the atmospheric pressure plasma apparatus P taken along line 1-1 shown in FIG. As illustrated in FIG. 2, in the embodiment of FIG. 1, the plasma irradiation paths X1 to X3 are concentric multiple tubes. The coil 3 is wound around the outer periphery of the plasma irradiation path X3 provided on the outermost side. A high frequency power source 4 is connected to both ends of the coil 3 wound around the outer periphery of the plasma irradiation path X3. An encircling ring portion 7 is provided so as to surround the plasma irradiation path X3.

  Depending on the gas to be converted into plasma, it may be harmful to organisms such as odor and irritation. A buffer member 7a is attached to the tip of the surrounding ring portion 7, and the generated plasma is prevented from flowing out to the living organism side by bringing the buffer member 7a into close contact with the surface of the irradiation target C. However, if the gas to be converted into plasma is harmless to living organisms, the tip of the surrounding ring portion 7 may be disposed close to the irradiation target C without providing the buffer member 7a.

  After the buffer member 7a is brought into close contact with the irradiation target C, the plasma irradiation paths X1 to X3 are selected by the first valve body 2. Regarding the selection of the plasma irradiation paths X1 to X3, various combinations are conceivable depending on the size of the object to be irradiated. Specifically, when only the plasma irradiation path X1 is selected, when two irradiation paths of the plasma irradiation path X1 and the plasma irradiation path X2 are selected, or when all of the plasma irradiation paths X1 to X3 are selected, Various selections are made. After the selection of the plasma irradiation path, the gas is supplied from the gas supply unit 1, and the gas is supplied to the predetermined plasma irradiation paths X1 to X3.

  A high-frequency current is applied to the coil 3 in accordance with the supply of gas to the plasma irradiation paths X1 to X3. Thereby, the gas flowing in the predetermined plasma irradiation path is turned into plasma. The plasmaized gas is pushed out by the gas flow flowing in the irradiation path toward the plasma ejection part 5 side of the plasma irradiation path, and is irradiated on the irradiation target C.

  The plasma irradiated on the object C to be irradiated passes through the first exhaust path 6a between the surrounding ring section 7 and the plasma irradiation path X3, and is discharged outside the apparatus by the plasma exhaust section 6 (for example, an exhaust pump). Is done. Note that the exhausted gas may be sent back to the gas supply unit 1 for the purpose of reusing the exhausted gas here as in Patent Document 1.

  With such an atmospheric pressure plasma apparatus, it is possible to appropriately change the plasma irradiation region on the irradiation target object in accordance with the selection of the plasma irradiation path. Moreover, since the use of unnecessary gas is refrained, it is possible to reduce the cost for operating and maintaining the apparatus.

  When the irradiation target C is a biological cell, it is desired that the irradiated plasma temperature can be controlled at a low temperature. In view of this point, the plasma temperature control mechanism disclosed in Japanese Patent Application Laid-Open No. 2010-61938, which is known as the prior art, may be incorporated. The block diagram of FIG. 3 shows a configuration in which a plasma temperature control mechanism is incorporated in the configuration of the present invention.

  The configuration of FIG. 3 will be briefly described. A cooler R and a heater H are provided between the gas supply unit 1 and the first valve body 2 described in FIG. In the cooler R, for example, the gas supplied from the gas supply unit 1 is cooled using liquid nitrogen. In the heater H, the temperature of the gas cooled by the cooler R is adjusted. A temperature measuring device T for measuring the temperature of the gas discharged through the first exhaust passage 6a of the atmospheric pressure plasma apparatus P described in FIG. 1 is provided, and the measurement result measured here is given to the heater H. give feedback. Using this measurement result, the gas temperature is adjusted by the heater H.

  The selection of the plasma irradiation paths X1 to X3 by the first valve body 2 described in FIG. 1 may be performed manually by an operator of the apparatus or automatically using a control device.

  When manually selecting the plasma irradiation paths X1 to X3, it is conceivable to use the following configuration.

  FIG. 4 shows the external appearance of the atmospheric pressure plasma apparatus P. For example, a mark M is provided on the outer peripheral surface of the surrounding ring portion 7 as depicted in FIG. This mark M corresponds to the plasma irradiation paths X1 to X3. The mark M indicating each region of the plasma irradiation paths X1 to X3 corresponds to the plasma irradiation region on the irradiation target. The operator of the apparatus compares the size of the irradiated portion with the mark M and selects a desired combination of the plasma irradiation paths X1 to X3 among the plasma irradiation paths X1 to X3.

In the configuration of FIG. 4, the irradiation target C and the mark M are separated from each other, so that there is a possibility that the plasma irradiation path may be selected by mistake. Considering this point, as shown in FIG. 5, an LED is provided at the end of the plasma irradiation path X1 to X3 on the plasma ejection part 5 side, and the area of the plasma irradiation path X1 to X3 on the surface of the irradiation target C May be configured to be projected directly. L1, L2, and L3 shown correspond to the respective plasma irradiation paths X1, X2, and X3.
Further, since it is difficult to visually recognize the light of each LED irradiated on the surface of the object C to be irradiated, the LEDs L1, L2, and L3 can be turned on for each plasma irradiation path. The LEDs L1, L2, and L3 are provided in such a number that the regions of the plasma irradiation paths X1 to X3 can be recognized.

  On the other hand, when the plasma irradiation paths X1 to X3 are automatically selected, it is conceivable to use the following configuration.

  Prior to the plasma irradiation of the irradiation target C, the irradiated portion is imaged using a camera. The imaging data is transmitted to the control device, and the transmitted data is subjected to image processing to specify the size of the irradiated part. The controller stores data relating to the size of the plasma irradiation region corresponding to various combinations of the plasma irradiation paths X1 to X3. The control device compares this data with the size of the specified irradiated region, selects an appropriate combination of the plasma irradiation paths X1 to X3, and supplies the gas to the predetermined plasma irradiation path. One valve body 2 is opened and closed.

  In the embodiment shown in FIG. 1, the annular plasma irradiation paths X <b> 1 to X <b> 3 are arranged in a multiple manner, but the arrangement, shape, and size of the individual plasma irradiation paths are not limited to such a configuration.

For example, as illustrated in FIGS. 5 and 6, a plurality of plasma irradiation paths may be arranged along one direction. FIG. 6 is a cross-sectional view of the atmospheric pressure plasma apparatus P taken along line 1-1 of FIG. The reference numerals used in the figure that are common to those in FIG. 1 have the same functions as the parts described in FIG.
In the embodiment of FIGS. 5 and 6, five plasma irradiation paths X1 to X5 are provided. Each plasma irradiation path X1 to X5 is arranged side by side along one direction as shown in FIG. In this embodiment, a 6-way valve is used as the first valve body 2 shown in FIG.

  As in this embodiment, even if the arrangement, shape, and size of the plasma irradiation path are changed from those of the embodiment of FIGS. 1 and 2, the same effects as those of the previous embodiments can be obtained. However, in consideration of plasma irradiation on biological cells, it is considered that the irradiation target site changes two-dimensionally on the surface of the biological cells depending on individual differences, so the plasma described in the embodiment of FIGS. It is desirable to use a multi-tube structure that can change the irradiation region two-dimensionally. In addition, when making a several plasma irradiation path into a multiple tube structure, it does not necessarily need to comprise concentric form. For example, it is conceivable to make the cross section of the plasma irradiation path rectangular or elliptical.

  Further, depending on the use environment of the apparatus, the surroundings of the atmospheric pressure plasma apparatus P may be surrounded by an electromagnetic shield in consideration of the influence on surrounding equipment.

  In the embodiments described so far, the inductively coupled plasma generation method is used. However, plasma generation may be performed in each plasma irradiation path using the same configuration as that of Patent Document 1. . In this case, for example, a rod-shaped inner electrode is disposed inside each plasma irradiation path, and an outer electrode is disposed on the outer periphery of each plasma irradiation path. Then, a voltage is applied to the inner electrode of the plasma irradiation path into which the gas is introduced to generate plasma in the specific irradiation path.

  However, when such a configuration is used, since the inner electrode in the plasma irradiation path is exposed to plasma, there is a concern that the electrode may be sputtered by the plasma and eroded. Moreover, since the sputtered particles from the electrode are scattered toward the irradiated object side, it can be considered that the irradiated object is adversely affected. In view of these points, it is desirable to use the inductively coupled plasma generation method described in the above embodiments.

In the embodiment of FIG. 1, when the gas is supplied only to the plasma irradiation path X1, the gas discharged from the plasma ejection section 5 of the plasma irradiation path X1 due to the exhaust action of the plasma exhaust section 6 is unused. It is conceivable that a small amount of gas flows into the plasma irradiation paths X2 and X3, and plasma is also generated in the plasma irradiation paths X2 and X3.
The concentration of the plasma generated in the unused plasma irradiation paths X2 and X3 is very thin, and it is considered that there is almost no influence on the irradiated object C, but there is a concern about an unexpected adverse effect. Therefore, it is desirable to prevent the irradiation target C from being irradiated even with thin plasma generated in the unused plasma irradiation paths X2 and X3.

  In the embodiments described so far, the exhaust by the plasma exhaust unit 6 is performed through the exhaust path 6a formed between the surrounding ring part 7 and the plasma irradiation path. It may be possible to exhaust the inside of the plasma irradiation path where no air pressure is performed. FIG. 8 shows an embodiment according to the same configuration.

  The configuration in FIG. 8 is the same as the configuration in FIG. 1 except for a configuration in which the inside of the plasma irradiation path where no gas is supplied is exhausted. A plasma exhaust path X1 to X3 shown in FIG. 8 is connected to a second exhaust path 6b for exhausting the irradiation path. Further, a second valve element 9 is connected to each exhaust so that opening and closing of each exhaust passage can be selected. Through the second valve body 9, the gas in the tubes of the plasma irradiation paths X1 to X3 is discharged to the outside of the apparatus by the plasma exhaust unit 6.

  A series of exhaust operations will be described with specific examples. The plasma irradiation area is selected according to the size of the object to be irradiated. Selection of the plasma irradiation region is performed by selecting opening / closing of the first valve body 2 for gas supply. Along with opening and closing of the first valve body 2 for gas supply, the second valve body 9 for exhaust is also opened and closed.

  For example, when the gas supply first valve body 2 is opened and closed so that the gas is supplied from the gas supply unit 1 to the plasma irradiation paths X1 and X2, the plasma irradiation path X1. The gas supply path to X2 is opened, and the gas supply path to the plasma irradiation path X3 is closed. In conjunction with the opening / closing operation of the first valve body 2, the opening / closing operation of the second valve body 9 for exhaust is also performed. In the opening / closing operation of the second valve body 9, the second exhaust path 6b of the plasma irradiation paths X1 and X2 is closed, and the second exhaust path 6b of the plasma irradiation path X3 is opened. As a result, the plasma irradiation area for the object C to be irradiated is only the area corresponding to the plasma irradiation paths X1 and X2, and the plasma with a low concentration generated in the plasma irradiation path where the plasma is not ejected is the object to be irradiated. C can be prevented from being irradiated. The exhaust operation by the first valve body 6 is always performed regardless of the open / closed state of the second valve body 9.

  In the embodiments described so far, the configuration is such that one gas supply unit 1 is used for a plurality of plasma irradiation paths, but the configuration of the present invention is not limited to this. For example, the first valve body 2 and the gas supply unit 1 are individually provided for each plasma irradiation path, and each opening and closing of the first valve body 2 is operated to open a predetermined plasma irradiation path. Gas supply may be performed. The second valve body 9 may also be provided individually for each plasma irradiation path.

  Similarly to Patent Document 1, a tube for administering the misted drug to the irradiation target portion may be provided inside the surrounding ring portion 7.

  Of course, various improvements and modifications other than those described above may be made without departing from the scope of the present invention.

DESCRIPTION OF SYMBOLS 1 Gas supply part 2 1st valve body 3 Coil 4 High frequency power supply 5 Plasma ejection part 6 Plasma exhaust part 6a 1st exhaust path 6b 2nd exhaust path 9 2nd valve body X1-X5 Plasma irradiation path P Atmospheric pressure Plasma device

Claims (4)

  A plurality of plasma irradiation paths for irradiating an object to be irradiated with atmospheric pressure plasma, a first exhaust path formed on the outer periphery of the plasma irradiation path for exhausting the atmospheric pressure plasma after irradiation, and the plasma irradiation path A first valve body that selectively supplies the gas. A coil wound around the outer periphery of the plasma irradiation path;
The atmospheric pressure plasma apparatus of Claim 1 provided with the high frequency power supply connected to the said coil. A coil wound around the outer periphery of the plasma irradiation path;
The atmospheric pressure plasma apparatus of Claim 1 or 2 provided with the high frequency power supply connected to the said coil.   The atmospheric pressure plasma apparatus according to any one of claims 1 to 3, wherein the plasma irradiation path is formed of a multiple tube.