JP2017107070A5 - - Google Patents

Description

In order to solve the above problems, the present invention provides an optical device for deforming the optical optical element, a first magnetic member attached to the light optical element, disposed facing the first magnetic member and a non-contact includes a first coil that, and a first actuator unit for deforming the optical element, and a second magnetic member attached to the optical element, a second coil disposed to face the second magnetic members and non-contact And a second actuator unit that deforms the optical element, and a cooling unit that cools the first coil and the second coil , and the thrust generated by the first actuator unit is the thrust generated by the second actuator unit. larger, first cooling power cooling unit cools the first coil, characterized in that the cooling unit is larger than the second cooling power for cooling the second coil.

The thrust required for each actuator unit 103, that is, the amount of heat generation of each coil 105 differs depending on the target shape of the mirror 101. In order to suppress the thermal deformation of the mirror 101 etc., for example, the heat transfer body 124 is made thicker, the thickness of the cooling plate 125 is increased, or the flow rate of the refrigerant is increased in accordance with the coil 105 having the largest calorific value. There is a need to. This leads to an increase in size and cost of the device. The thrust of each actuator unit 103 is determined based on the configuration of the mirror 101, the mirror fixing unit 102 , the reference plate 121, and the target shape of the mirror 101. The calorific value of the coil 105 can be estimated based on the thrust. The configuration of the optical device 100 is determined by the estimated amount of heat generation of the coil 105.

Although the calorific value of the coil fluctuates according to the target shape of the mirror 101, the coil 105a around the mirror fixing portion 102 having a particularly large calorific value also has a large fluctuation range of the calorific value. In the present embodiment, since the current value of the Peltier element 301 is controlled by feedback control, the cooling power (heat release amount) can be controlled (adjusted) in accordance with the heat generation amount of the coil 105 a. Further, since the Peltier element 301 is controlled by the control unit (not shown) based on the temperature of the heat transfer body 124a close to the coil 105a, the coil 105a can be cooled efficiently. If, instead of the Peltier device 301, the use of heat sink coolant at a constant temperature (23 ° C.) is supplied, the cooling efficiency of the coil 105a by the influence of thermal resistance between the heat sink and the coil 105a (such as heat conductor 124a) is It will decline. In the present embodiment, in order to reduce the cooling load of the Peltier device 301, heat conductor 124a is thicker than the heat conductor 124b of the outer peripheral portion of the mirror 101, the thermal resistance between the coil 105a and the Peltier device 301 It is lowered.

Although the Peltier element 301 is used in the present embodiment, a heat sink of a temperature feedback method may be used instead of the Peltier element 301. In that case, the temperature of the refrigerant flowing to each heat sink is feedback-controlled based on the temperature sensor 302. Further, in the present embodiment, the optical element 101 is a mirror, but may be a transmissive optical element. In that case, the actuator unit 103, the cooling plate 125, and the Peltier element 301 are disposed in the non-effective area where the light of the optical element does not pass. Further, may be a structure for cooling the actuator unit 103a directly heat conductor 124a is not always essential.

The heat generated by the coil 105 a and the coil 105 b is transferred to the heat transfer members 124 a and 124 b, transferred to the reference plate 501 through the air layer in the gap 503, and recovered in the flow passage 502. In this case, the cooling effect can be improved by inserting a heat conductive member having a high thermal conductivity into the gap 503. Heat conductor 124a which connects the large coil 105a of the heat generation amount has a Peltier device 301 to the end, supplement the cooling capacity of the channel 502, cooling capacity is enhanced compared to the coil 105b.

The present embodiment is advantageous in terms of apparatus size and apparatus configuration since there is no separate cooling plate 125 as compared with the above embodiment. In particular, since the reference plate 501 passage 50 2 is formed, the temperature of the reference plate 501 becomes substantially equal to the temperature and the refrigerant, even if the environmental temperature that is placed with the optical device 500 fluctuates, the reference plate 501 Temperature fluctuations are reduced. The optical device of the present embodiment also exhibits the same effects as those of the first and second embodiments. The reference plate of the above embodiment may be replaced with the reference plate 501 of this embodiment.

Claims (14)

An optical device for deforming an optical element,
A first actuator unit including a first magnetic member attached to the optical element, and a first coil disposed to face the first magnetic member in a non-contact manner, and for deforming the optical element;
A second actuator unit that includes a second magnetic member attached to the optical element and a second coil disposed to face the second magnetic member in a non-contact manner, and that deforms the optical element;
A cooling unit configured to cool the first coil and the second coil;
The thrust generated by the first actuator unit is larger than the thrust generated by the second actuator unit,
The first cooling power with which the cooling unit cools the first coil is larger than the second cooling power with which the cooling unit cools the second coil.   The optical device according to claim 1, wherein the first cooling power is determined by the calorific value of the first coil, and the second cooling power is determined by the calorific value of the second coil.   The optical device according to claim 1, wherein the calorific value of the first coil is estimated based on a parameter including a thickness of the optical element. A reference plate which holds the optical element and on which the first coil and the second coil are disposed;
The calorific value of the first coil is estimated based on a parameter including the distance between the portion where the reference plate holds the optical element and the position where the first coil is disposed;
The calorific value of the second coil is estimated based on a parameter including a distance between a portion where the reference plate holds the optical element and a position where the second coil is disposed. Or the optical apparatus as described in 2. The cooling unit is connected to the first coil and transmits a heat generated from the first coil. The cooling unit is connected to the second coil and transmits the heat generated from the second coil. A heat transfer body, and
The optical device according to any one of claims 1 to 4, wherein the shape of the first heat transfer body is different from the shape of the second heat transfer body. The optical device according to claim 5, wherein a diameter of the first heat transfer body is larger than a diameter of the second heat transfer body. The optical device according to claim 6, wherein each of the first heat transfer body and the second heat transfer body has a bar-like shape. A measurement unit configured to measure temperatures in the vicinity of the first coil and the second coil;
A control unit that controls the cooling power of the cooling unit;
The optical device according to any one of claims 1 to 7 , wherein the control unit controls the cooling power based on a measurement result of the measurement unit. The first heat transfer body connected to the first coil and transferring the heat generated from the first coil is a first heat radiating portion that adjusts the amount of heat released from the first coil, and the first heat transfer portion from the first coil It has a second heat dissipation unit that uniformly dissipates the transferred heat,
The optical device according to claim 8 , wherein the control unit controls the heat release amount of the first heat release unit based on the measurement result. The optical apparatus according to claim 8 , wherein the measurement unit measures a temperature near the first coil. A reference plate which holds the optical element and on which the first coil and the second coil are disposed;
The optical device according to any one of claims 1 to 10, wherein the cooling unit includes the reference plate internally provided with a flow path through which a refrigerant flows. The optical element is a mirror having a reflective surface on the surface,
The optical device according to any one of claims 1 to 11 , which is provided on the back surface of the mirror. An exposure apparatus comprising the optical device according to any one of claims 1 to 12 . Exposing the substrate using the exposure apparatus according to claim 13 ;
Developing the exposed substrate, and manufacturing an article from the developed substrate.