JP2017098507A - Member with terminal and process for producing the same - Google Patents
Member with terminal and process for producing the same Download PDFInfo
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Abstract
Description
本発明は、端子を備えた部材及びその製造方法に関する。 The present invention relates to a member including a terminal and a method for manufacturing the member.
静電チャック及びＲＦテーブルなどの半導体製造装置などで用いられる基体には、その内部に埋設されるヒータ用電極又は静電吸着用電極、高周波導入用電極などに電圧を印加するために端子を設ける必要がある。 A substrate used in a semiconductor manufacturing apparatus such as an electrostatic chuck and an RF table is provided with a terminal for applying a voltage to a heater electrode, an electrostatic adsorption electrode, a high-frequency introduction electrode or the like embedded therein. There is a need.
従来、このような端子は、基体の表面上に電極となる金属溶射体、絶縁体層を順次溶射で積層形成した後に、基体に穴を開けて、導電体に当接する端子を穴内に設け、端子の先端部と導電体とをロウ付けで固定していた。このとき、接着剤で端子を穴内面に固定することもあった。 Conventionally, such a terminal is formed by sequentially laminating a metal sprayed body that becomes an electrode on the surface of the base body and an insulating layer by thermal spraying, then opening a hole in the base body and providing a terminal in contact with the conductor in the hole, The tip of the terminal and the conductor were fixed by brazing. At this time, the terminal was sometimes fixed to the inner surface of the hole with an adhesive.
また、例えば、特許文献１に記載のように製造されることもあった。すなわち、まず、基体に形成した貫通孔に側面を絶縁被覆した端子を無機接着剤で接着する。この際、基体の上面と端子の上端面とが同じ高さとなるように調節する。その後、端子の上端面をマスクした後、基体の上面に絶縁層を溶射によって形成する。そして、マスクを除去して端子の上端面を露出させ、その上に電極を溶射によって形成し、更にその上に誘電層を溶射によって形成する。 Further, for example, it may be manufactured as described in Patent Document 1. That is, first, a terminal having an insulating coating on the side surface is bonded to the through hole formed in the substrate with an inorganic adhesive. At this time, the upper surface of the base and the upper end surface of the terminal are adjusted to be the same height. Then, after masking the upper end surface of the terminal, an insulating layer is formed on the upper surface of the substrate by thermal spraying. Then, the mask is removed to expose the upper end surface of the terminal, an electrode is formed thereon by thermal spraying, and a dielectric layer is further formed thereon by thermal spraying.
しかしながら、基体に溶射体を積層した後に穴を開ける方法では、導電体の厚さが薄いので、基体に穴を開ける際に、導電体を貫通する、導電体が極薄く破損しやすい、あるいは一般的に導電体の上に積層される絶縁体層は薄く、導電体の露出穴開け加工時に絶縁体層にクラックが発生するなどの理由により、穴開け加工が非常に困難である。また、基体の厚さ方向にかかる応力によって、端子と導電体との接続が解除されるおそれもある。 However, in the method of making a hole after laminating a thermal spray on a substrate, the thickness of the conductor is thin, so when making a hole in the substrate, the conductor penetrates the conductor, the conductor is very thin and easily damaged, or in general In particular, the insulator layer laminated on the conductor is thin, and the drilling process is very difficult because a crack is generated in the insulator layer when the conductor is exposed. Further, the connection between the terminal and the conductor may be released due to the stress applied in the thickness direction of the base.
また、特許文献１に記載された方法では、基体の上面と端子の上端面との高さを合わせることが難しく、また基体と端子との間に接着剤層が存在するため隙間が発生し、この隙間の直上の溶射膜にくぼみやそれに誘起されてクラックが発生する場合がある。 Further, in the method described in Patent Document 1, it is difficult to match the height of the upper surface of the base and the upper end surface of the terminal, and a gap is generated because an adhesive layer exists between the base and the terminal, There may be a case where a dent is formed in the sprayed film immediately above the gap or a crack is induced by the dent.
そこで、本発明は、製造が簡略であり、導電体が破損などするおそれがない、端子を備えた部材及びその製造方法を提供することを目的とする。 Then, an object of this invention is to provide the member provided with the terminal which manufacture is simple and there is no possibility that a conductor will be damaged, and its manufacturing method.
本発明の端子を備えた部材は、基体の表面側に形成された円柱状の穴に、端子の先端部に形成された円柱形状の円柱状部が嵌合されると共に、前記基体の裏面側から前記穴と同一軸心であり連通して形成された雌ねじ穴に、前記端子の前記円柱状部と同一軸心に形成された雄ねじ部が螺合し、前記基体の表面と前記端子の前記円柱状部の先端面とが略面一であって、前記基体の表面上に、前記端子の前記円柱状部の先端面に当接するように導電体が配置されており、前記導電体を含めて前記基体の表面を絶縁体膜が覆っていることを特徴とする。 In the member having the terminal of the present invention, a cylindrical columnar portion formed at the tip of the terminal is fitted into a cylindrical hole formed on the front surface side of the substrate, and the back surface side of the substrate The male screw portion formed on the same axis as the cylindrical portion of the terminal is screwed into the female screw hole formed on the same axis and in communication with the hole, and the surface of the base and the terminal A conductor is disposed on the surface of the base body so as to be in contact with the tip surface of the columnar part of the terminal, including the conductor. The surface of the substrate is covered with an insulating film.
本発明の端子を備えた部材によれば、基体の穴に端子の円柱状部が嵌合されると共に、基体の雌ねじ穴に端子の雄ねじ部が螺合し、基体の表面と端子の円柱状部の先端面とが略面一であって、基体の表面上に端子の円柱状部の先端面と当接するように導電体が配置されている。 According to the member having the terminal of the present invention, the cylindrical portion of the terminal is fitted into the hole of the base, and the male screw portion of the terminal is screwed into the female screw hole of the base, so that the surface of the base and the cylindrical shape of the terminal The conductor is disposed on the surface of the base so as to be in contact with the tip surface of the cylindrical portion of the terminal.
そのため、嵌合及び螺合によって端子が固定された基体の表面上に溶射などで導電体を形成すればよい。よって、上記従来の技術のように、導電体を形成した後に基体に穴を開ける必要がないので、導電体を傷付けるおそれがない。 For this reason, the conductor may be formed by thermal spraying or the like on the surface of the base on which the terminal is fixed by fitting and screwing. Therefore, unlike the prior art described above, there is no need to make a hole in the base after forming the conductor, so there is no risk of damaging the conductor.
また、上記特許文献１に記載にように、接着剤を付けた状態で基体の上面と端子の上端面との高さを合わせる必要がなく、また、基体と端子との間に接着剤層が存在しないので、その直上の溶射膜にくぼみやクラックが発生するおそれもない。 In addition, as described in Patent Document 1, it is not necessary to match the height of the upper surface of the substrate and the upper end surface of the terminal with the adhesive applied, and there is no adhesive layer between the substrate and the terminal. Since it does not exist, there is no possibility that a dent or a crack will occur in the sprayed film immediately above.
さらに、基体の穴に端子の円柱状部が嵌合されているだけでなく、基体の雌ねじ穴と端子の雄ねじ部とが螺合していることにより、端子が基体に固定されている。そのため、基体の厚さ方向（端子の軸線方向）に応力がかかっても、基体に対する端子の位置ずれが生じ難く、端子と導電体との接続の確保を図ることが可能となる。そして、基体の穴に端子の円柱状部が嵌合し、且つ基体の雌ねじ穴と端子の雄ねじ部とが螺合していることにより、基体と端子とは十分な締結力で締結され、接着剤などを用いることなく基体と端子とを強固に締結することが可能となる。 Furthermore, the terminal is fixed to the base by not only fitting the cylindrical portion of the terminal into the hole of the base but also screwing the female screw hole of the base and the male thread of the terminal. For this reason, even if stress is applied in the thickness direction of the base (in the axial direction of the terminal), the position of the terminal relative to the base is unlikely to occur, and the connection between the terminal and the conductor can be ensured. Then, the cylindrical portion of the terminal is fitted in the hole of the base, and the female screw hole of the base and the male screw of the terminal are screwed together, whereby the base and the terminal are fastened with a sufficient fastening force and bonded. It is possible to firmly fasten the base and the terminal without using an agent or the like.
さらに、基体の表面と端子の先端面とが略面一となっている。これらが略面一でないと、端子の円柱状体の先端面上に位置する導電体に落ち込み又は盛り上がりが生じ、導電体又は絶縁体膜にクラックが発生する、又は導電体の電気的接続の不良が発生するおそれがある。 Further, the surface of the base and the tip end surface of the terminal are substantially flush. If these are not substantially flush, the conductor located on the tip surface of the cylindrical body of the terminal will drop or rise, causing cracks in the conductor or insulator film, or poor electrical connection of the conductor. May occur.
なお、基体の表面と端子の先端面とが略面一とは、基体の表面と端子の先端面とが完全に面一である場合だけでなく、一方が他方に対して数十μｍの僅かな段差があるが、端子の円柱状体の先端面上に位置する導電体に左程の落ち込み又は盛り上がりが生じず、導電体又は絶縁体膜にクラックが発生しない程度のものも含まれることを意味する。 The surface of the base and the tip of the terminal are substantially flush with each other, not only when the surface of the base and the tip of the terminal are completely flush with each other, The conductor located on the front end surface of the cylindrical body of the terminal does not drop or rise to the left, and the conductor or insulator film does not crack. means.
本発明の端子を備えた部材において、前記基体の前記穴と前記端子の円柱状部との軸線方向の嵌合長さと、前記基体の前記雌ねじ穴と前記端子の雄ねじ部との軸線方向の螺合長さとの比が、０．０５以上２．０以下であることが好ましい。 In the member provided with the terminal of the present invention, the axial fitting length between the hole of the base and the cylindrical portion of the terminal, and the axial screwing between the female screw hole of the base and the male screw of the terminal are provided. The ratio to the total length is preferably 0.05 or more and 2.0 or less.
前記比が、０．０５未満であれば、端子の円柱状部の嵌合部を保持する基体の肉厚が一般的に薄くなり、端子組立時の応力により、基体の穴の近傍にカケ、割れ、クラックが発生するおそれが高くなる。一方、前記比が２．０を超えると、端子の円柱状部を基体の穴に嵌合する際に必要なトルクが大きくなり、端子の変形、破損などが生じるおそれが高くなるからである。ただし、前記比の好ましい値は、基体の雌ねじ穴、端子の雄ねじなどの寸法に応じて変化する。 If the ratio is less than 0.05, the thickness of the substrate that holds the fitting portion of the cylindrical portion of the terminal is generally thin, and due to the stress during terminal assembly, The risk of cracking and cracking increases. On the other hand, if the ratio exceeds 2.0, the torque required to fit the cylindrical portion of the terminal into the hole in the base increases, and the risk of deformation or breakage of the terminal increases. However, the preferred value of the ratio varies depending on the dimensions of the female screw hole of the base and the male screw of the terminal.
また、本発明の端子を備えた部材において、前記基体の前記穴の外径と前記基体の前記雌ねじ穴とねじ径との比が、０．７５未満であることが好ましい。 Moreover, in the member provided with the terminal of the present invention, it is preferable that the ratio of the outer diameter of the hole of the base to the female screw hole of the base and the screw diameter is less than 0.75.
前記比が０．７５以上であれば、端子の円柱状部を基体の穴に嵌合する際に必要なトルクが大きくなり、端子の変形、破損が生じるおそれが高くなるからである。ただし、前記比の好ましい値は、基体の雌ねじ穴、端子の雄ねじなどの寸法、端子の材質などに応じて変化する。 This is because if the ratio is 0.75 or more, the torque required for fitting the cylindrical portion of the terminal into the hole in the base increases, and the risk of deformation or breakage of the terminal increases. However, the preferable value of the ratio varies depending on the dimensions of the female screw hole of the base, the male screw of the terminal, the material of the terminal, and the like.
導電体は、金属粉末を溶射した金属溶射体であればよいが、これに限定されない。例えば、導電体は、金属やカーボンなどの導電性物質を含有するペーストを印刷し、乾燥、熱処理して形成される導電体、導電性物質のスパッタリングやイオンプレーティングなどのドライプロセスにより形成される導電体、その他導電膜形成手段として公知な手段で形成される導電体であってもよい。 The conductor may be a metal sprayed body obtained by spraying metal powder, but is not limited thereto. For example, the conductor is formed by printing a paste containing a conductive substance such as metal or carbon, drying and heat-treating, and a dry process such as sputtering or ion plating of the conductive substance. The conductor may be a conductor formed by other means known as a conductive film forming means.
本発明の端子を備えた部材の製造方法は、表面側に円柱状の穴が形成され、裏面側から前記円柱状の穴と同一軸心であり連通した雌ねじ穴が形成された基体と、先端に円柱形状の円柱状部、及び前記円柱状部と同一軸心である雄ねじ部を有する端子とを用意する工程と、前記基体の前記穴に前記端子の円柱状部を嵌合させながら、前記基体の前記雌ねじ穴に前記端子の前記雄ねじ部を螺合させて、前記基体の表面と前記端子の前記円柱状部の先端面とが略面一になるように前記基体に前記端子を固定する工程と、前記端子が固定された前記基体の表面上に、前記端子の先端部を覆うように導電体を形成する工程と、前記導電体が形成された前記基体の表面を覆うように非導電性材料粉末を溶射して、絶縁体膜を形成する工程とを備えることを特徴とする。 A method of manufacturing a member having a terminal according to the present invention includes: a base body in which a cylindrical hole is formed on the front surface side, and a female screw hole that is coaxial with and communicated with the cylindrical hole from the back surface side; A step of preparing a cylindrical columnar portion and a terminal having a male screw portion having the same axis as the columnar portion, while fitting the columnar portion of the terminal into the hole of the base, The male screw portion of the terminal is screwed into the female screw hole of the base, and the terminal is fixed to the base so that the surface of the base and the tip end surface of the columnar portion of the terminal are substantially flush with each other. A step of forming a conductor on the surface of the base on which the terminal is fixed so as to cover the tip of the terminal; and a non-conductive state so as to cover the surface of the base on which the conductor is formed Spraying a conductive material powder to form an insulator film. And butterflies.
本発明の端子を備えた部材の製造方法によれば、基体の穴に端子の円柱状部を嵌合させながら、基体の雌ねじ穴に端子の雄ねじ部を螺合させて、基体の表面と端子の円柱状部の先端面とが略面一になるようにして、基体に端子を固定し、この状態で溶射などにより導電体を形成している。 According to the method for manufacturing a member having a terminal of the present invention, the male screw portion of the terminal is screwed into the female screw hole of the base while the cylindrical portion of the terminal is fitted into the hole of the base, and the surface of the base and the terminal The terminal is fixed to the base so that the tip end surface of the cylindrical portion is substantially flush, and in this state, the conductor is formed by thermal spraying or the like.
そのため、上記従来の技術のように、導電体が形成された後に基体に穴を開ける必要がないので、導電体を傷付けるおそれがない。 Therefore, unlike the prior art described above, it is not necessary to make a hole in the base after the conductor is formed, so there is no possibility of damaging the conductor.
また、上記特許文献１に記載のように、接着剤を付けた状態で基体の上面と端子の上端面との高さを合わせる必要がなく、また、基体と端子との間に接着剤層が存在しないので、その直上の溶射膜にくぼみやクラックが発生するおそれもない。 Further, as described in Patent Document 1, it is not necessary to match the height of the upper surface of the substrate and the upper end surface of the terminal with the adhesive applied, and there is no adhesive layer between the substrate and the terminal. Since it does not exist, there is no possibility that a dent or a crack will occur in the sprayed film immediately above.
さらに、基体の穴に端子の円柱状部が嵌合されているだけでなく、基体の雌ねじ穴と端子の雄ねじ部とが螺合することにより、端子が基体に固定されている。そのため、基体の厚さ方向（端子の軸線方向）に応力がかかっても、基体に対する端子の位置ずれが生じ難く、端子と導電体との接続の確保を図ることが可能となる。そして、基体の穴に端子の円柱状部が嵌合し、且つ基体の雌ねじ穴と端子の雄ねじ部とが螺合していることにより、基体と端子とは十分な締結力で締結され、接着剤などを用いることなく基体と端子とを強固に締結することが可能となる。 Further, not only the cylindrical portion of the terminal is fitted into the hole of the base, but also the terminal is fixed to the base by screwing the female screw hole of the base and the male screw of the terminal. For this reason, even if stress is applied in the thickness direction of the base (in the axial direction of the terminal), the position of the terminal relative to the base is unlikely to occur, and the connection between the terminal and the conductor can be ensured. Then, the cylindrical portion of the terminal is fitted in the hole of the base, and the female screw hole of the base and the male screw of the terminal are screwed together, whereby the base and the terminal are fastened with a sufficient fastening force and bonded. It is possible to firmly fasten the base and the terminal without using an agent or the like.
さらに、基体の雌ねじ穴と端子の雄ねじ部との螺合を調整することにより、基体の表面と端子の先端面とを略面一にすることが容易となる。これらが略面一でないと、端子の円柱状体の先端面上に位置する導電体に落ち込み又は盛り上がりが生じ、導電体又は絶縁体膜にクラックが発生する、又は導電体の電気的接続の不良が発生するおそれがある。 Further, by adjusting the screwing between the female screw hole of the base and the male screw portion of the terminal, it becomes easy to make the surface of the base and the tip end surface of the terminal substantially flush. If these are not substantially flush, the conductor located on the tip surface of the cylindrical body of the terminal will drop or rise, causing cracks in the conductor or insulator film, or poor electrical connection of the conductor. May occur.
本発明の端子を備えた部材の一実施形態である溶射部材１００について説明する。 The thermal spray member 100 which is one Embodiment of the member provided with the terminal of this invention is demonstrated.
溶射部材１００は、基体１０、端子２０、金属溶射体（導電体）３０及び絶縁体膜４０を備えている。溶射部材１００は、金属溶射体３０が電極として機能し、この電極に端子２０から電圧が印加されることによって発生するクーロン力により、基板を載置面である基体１０の表面に吸引する静電チャックである。 The thermal spray member 100 includes a base 10, a terminal 20, a metal spray body (conductor) 30, and an insulator film 40. In the thermal spray member 100, the metal spray body 30 functions as an electrode, and electrostatic force that attracts the substrate to the surface of the substrate 10, which is a mounting surface, by Coulomb force generated when a voltage is applied to the electrode from the terminal 20. It is a chuck.
ただし、溶射部材１００は、金属溶射体３０が発熱抵抗体として機能し、載置面である基体１０の表面に載置された基板を加熱するヒータであってもよい。また、溶射部材１００は、金属溶射体３０が抵抗発熱体及び電極として機能し、ヒータ機能付きの静電チャックなどであってもよい。 However, the thermal spray member 100 may be a heater that heats the substrate placed on the surface of the base 10 that is the placement surface, with the metal spray body 30 functioning as a heating resistor. Further, the thermal spray member 100 may be an electrostatic chuck or the like with a heater function in which the metal spray body 30 functions as a resistance heating element and an electrode.
溶射部材１００は、基体１０の表面上に溶射によって金属溶射体３０が形成されており、この金属溶射体３０の裏面に先端が当接する端子２０が基体１０の裏面から突出した構成となっている。そして、金属溶射体３０が設けられた基体１０の表面を覆うように、溶射によって絶縁体膜４０が形成されている。 In the thermal spray member 100, a metal spray body 30 is formed on the surface of the base body 10 by thermal spraying, and a terminal 20 whose tip abuts on the back surface of the metal spray body 30 protrudes from the back surface of the base body 10. . And the insulator film 40 is formed by thermal spraying so that the surface of the base | substrate 10 with which the metal thermal spray body 30 was provided may be covered.
基体１０は、アルミナ（Ａｌ２Ｏ３）、窒化アルミニウム（ＡｌＮ）又はイットリア（Ｙ２Ｏ３）等のセラミックス焼結体などの絶縁性誘電体からなっている。ただし、基体１０は、静電チャック又はヒータの基体の材料として使用される素材からなるものであればよい。 The substrate 10 is made of an insulating dielectric such as a ceramic sintered body such as alumina (Al 2 O 3 ), aluminum nitride (AlN), or yttria (Y 2 O 3 ). However, the base | substrate 10 should just consist of a raw material used as a base material of an electrostatic chuck or a heater.
基体１０は、例えば高純度（例えば純度９９．９％以上）のアルミナ粉末、必要に応じてこれに適量の酸化イットリウム粉末などの焼結助剤が添加された混合原料粉末を成形した成形体をホットプレス焼結することにより形成されている。ただし、基体１０は、成形体を常圧焼結することなどにより形成することもできる。 The substrate 10 is a molded body obtained by molding a mixed raw material powder, for example, a high-purity (for example, purity 99.9% or more) alumina powder and, if necessary, a sintering aid such as an appropriate amount of yttrium oxide powder added thereto. It is formed by hot press sintering. However, the substrate 10 can also be formed by, for example, sintering the molded body at normal pressure.
基体１０には、表面側に円柱状の穴１１が、ミリングなどの研削加工によって形成されている。この穴１１の内径Ｄ１は、１ｍｍ以上２０ｍｍ以下、より好ましくは、３ｍｍ以上５ｍｍ以下である。そして、穴１１の深さＨ１は、１ｍｍ以上５ｍｍ以下、より好ましくは、１ｍｍ以上３ｍｍ以下である。また、穴１１の内径Ｄ１と深さＨ１との比Ｄ１／Ｈ１は、１．０以上５．０以下、より好ましくは、１．０以上２．０以下である。 A cylindrical hole 11 is formed in the base 10 on the surface side by grinding such as milling. The inner diameter D1 of the hole 11 is 1 mm or more and 20 mm or less, more preferably 3 mm or more and 5 mm or less. And the depth H1 of the hole 11 is 1 mm or more and 5 mm or less, More preferably, it is 1 mm or more and 3 mm or less. The ratio D1 / H1 between the inner diameter D1 and the depth H1 of the hole 11 is 1.0 or more and 5.0 or less, more preferably 1.0 or more and 2.0 or less.
さらに、基体１０には、その裏面側から穴１１と同一軸心であり、これに連通した雌ねじ穴１２が、ミリングなどで形成された穴に対してタップなどでねじ切り加工することにより形成されている。この雌ねじ穴１２のねじ径Ｄ２は、３ｍｍ以上２０ｍｍ以下、より好ましくは、４ｍｍ以上６ｍｍ以下である。そして、雌ねじ穴１２の深さＨ２は、２ｍｍ以上、より好ましくは、４ｍｍ以上である。また、雌ねじ穴１２のねじ径Ｄ２と深さＨ２との比Ｄ２／Ｈ２は、０．２５以上、より好ましくは、１．０以上である。 Further, the base 10 has the same axial center as that of the hole 11 from the back surface side, and a female screw hole 12 communicating with the hole 11 is formed by threading a hole formed by milling or the like with a tap or the like. Yes. The screw diameter D2 of the female screw hole 12 is 3 mm or more and 20 mm or less, more preferably 4 mm or more and 6 mm or less. And the depth H2 of the female screw hole 12 is 2 mm or more, More preferably, it is 4 mm or more. The ratio D2 / H2 between the screw diameter D2 and the depth H2 of the female screw hole 12 is 0.25 or more, more preferably 1.0 or more.
なお、実施形態では、穴１１と雌ねじ穴１２とは直接接続されるように形成されているが、穴１１と雌ねじ穴１２との間に、テーパ状などに形成された接続部が存在していてもよい。また、穴１１及び雌ねじ穴１２の個数及び配置は限定されない。 In the embodiment, the hole 11 and the female screw hole 12 are formed so as to be directly connected. However, a connecting portion formed in a tapered shape or the like exists between the hole 11 and the female screw hole 12. May be. Further, the number and arrangement of the holes 11 and the female screw holes 12 are not limited.
端子２０は、チタン（Ｔｉ）、ニッケル（Ｎｉ）などの導電性の優れた金属から形成されている。 The terminal 20 is made of a metal having excellent conductivity such as titanium (Ti) or nickel (Ni).
端子２０は、先端に外観が円柱形状の円柱状部２１を有している。円柱状部２１の外径Ｄ３は、穴１１の内径Ｄ１に比較して僅かに小さく、もしくは大きく、これらの嵌め合い精度はＨ７／ｐ６以上ｈ７／ｈ５以下、より好ましくは、Ｈ７／ｈ７以上Ｈ７／ｈ６以下である。そして、円柱状部２１の長さＨ３は、穴１１の深さＨ１と略同じである。ただし、円柱状部２１の長さＨ３は、穴１１の深さＨ１に対して、多少、例えば、１ｍｍから３ｍｍ程度、長くても短くてもよい。 The terminal 20 has a columnar portion 21 whose appearance is a columnar shape at the tip. The outer diameter D3 of the cylindrical portion 21 is slightly smaller or larger than the inner diameter D1 of the hole 11, and the fitting accuracy thereof is H7 / p6 or more and h7 / h5 or less, more preferably H7 / h7 or more and H7. / H6 or less. The length H3 of the cylindrical portion 21 is substantially the same as the depth H1 of the hole 11. However, the length H3 of the cylindrical portion 21 may be slightly longer or shorter than the depth H1 of the hole 11, for example, about 1 mm to 3 mm.
そして、端子２０は、円柱状部２１と同一軸心に雄ねじが形成された雄ねじ部２２を有している。雄ねじ部２２のねじ径Ｄ４は、雌ねじ穴１２のねじ径Ｄ２と同じである。そして、雄ねじ部２２の長さＨ４は、雌ねじ穴１２の深さＨ２と同一であるか、多少長くなっている。 And the terminal 20 has the external thread part 22 by which the external thread was formed in the same axial center as the cylindrical part 21. FIG. The screw diameter D4 of the male screw portion 22 is the same as the screw diameter D2 of the female screw hole 12. The length H4 of the male screw portion 22 is the same as or slightly longer than the depth H2 of the female screw hole 12.
さらに、本実施形態では、円柱状部２１と雄ねじ部２２との間には、円柱状部２１の外径Ｄ３及び雄ねじ部２２のねじ径Ｄ４より外径が小さな外径Ｄ５を有する円柱状の接続部２３が形成されている。 Further, in the present embodiment, between the columnar portion 21 and the male screw portion 22, a columnar shape having an outer diameter D5 that is smaller than the outer diameter D3 of the columnar portion 21 and the screw diameter D4 of the male screw portion 22. A connecting portion 23 is formed.
ただし、接続部２３の形状は、円柱状部２１の外径Ｄ３及び雄ねじ部２２のねじ径Ｄ４より外周部が大きくないものであれば、円柱形状に限定されず、例えば、角柱状、テーパ状などであってもよい。さらに、円柱状部２１と雄ねじ部２２との間に接続部２３を有さず、円柱状部２１と雄ねじ部２２とが直接接続されるものであってもよい。 However, the shape of the connecting portion 23 is not limited to the cylindrical shape as long as the outer peripheral portion is not larger than the outer diameter D3 of the cylindrical portion 21 and the screw diameter D4 of the male screw portion 22. For example, the shape of the connecting portion 23 is a prismatic shape or a tapered shape. It may be. Furthermore, the cylindrical part 21 and the external thread part 22 may not be connected between the cylindrical part 21 and the external thread part 22, and the cylindrical part 21 and the external thread part 22 may be directly connected.
以上、本発明の実施形態に係る端子を有する溶射部材１００の製造方法について説明する。 In the above, the manufacturing method of the thermal spray member 100 which has the terminal which concerns on embodiment of this invention is demonstrated.
まず、基体１０の穴１１に端子２０の円柱状部２１を嵌合させ、且つ基体１０の雌ねじ穴１２に端子２０の雄ねじ部２２を螺合させながら、基体１０の表面と端子２０の円柱状部２１の先端面とが略面一になるまで端子２０を基体１０にねじ込み、基体１０に端子２０を固定する工程を行う。 First, while the cylindrical portion 21 of the terminal 20 is fitted into the hole 11 of the base 10 and the male screw portion 22 of the terminal 20 is screwed into the female screw hole 12 of the base 10, the surface of the base 10 and the cylindrical shape of the terminal 20 are formed. The process of fixing the terminal 20 to the base 10 by screwing the terminal 20 into the base 10 until the tip surface of the portion 21 is substantially flush is performed.
このとき、基体１０の表面と端子２０の円柱状部２１の先端面とは完全に面一でなくともよい。例えば、基体１０の表面に対して端子２０の円柱状部２１の先端面が、好ましくは５０μｍ以下、より好ましくは３０μｍ以下の僅かな量であれば飛び出していてもよい。また、基体１０の表面に対して端子２０の円柱状部２１の先端面が、好ましくは５０μｍ以下、より好ましくは３０μｍ以下の僅かな量であれば引っ込んでいてもよい。 At this time, the surface of the base 10 and the tip surface of the columnar portion 21 of the terminal 20 may not be completely flush with each other. For example, the tip surface of the columnar portion 21 of the terminal 20 may protrude from the surface of the base 10 as long as it is a small amount of preferably 50 μm or less, more preferably 30 μm or less. Further, the tip surface of the cylindrical portion 21 of the terminal 20 with respect to the surface of the base 10 may be retracted if it is a small amount of preferably 50 μm or less, more preferably 30 μm or less.
このように、基体１０と端子２０とは、嵌め合いとねじ締結の両方で固定されている。このような固定構造であるので、基体１０に対する端子２０の固定位置の調整が簡易であり、基体１０の表面と端子２０の先端面とを容易に略面一にすることができる。また、接着剤などを使用する必要がない。 Thus, the base 10 and the terminal 20 are fixed by both fitting and screw fastening. Because of such a fixing structure, the adjustment of the fixing position of the terminal 20 with respect to the base body 10 is easy, and the surface of the base body 10 and the front end surface of the terminal 20 can be easily made substantially flush. Moreover, it is not necessary to use an adhesive.
また、嵌め合い又はねじ締結の何れか一方で固定する場合と比較して、端子２０の軸線方向の移動に対してはねじ締結が、端子２０のねじ緩みに関しては嵌め合いがそれぞれ予防策となり、長期間に亘って基体１０に対して端子２０を同一位置で固定することができる。 Further, as compared with the case where either the fitting or the screw fastening is fixed, the screw fastening is used for the movement of the terminal 20 in the axial direction, and the fitting is used for the screw loosening of the terminal 20, respectively. The terminal 20 can be fixed to the base 10 at the same position over a long period of time.
次に、端子２０の円柱状部２１を覆うように、端子２０が固定された基体１０の表面上に導電性の金属材料粉末を溶射して、金属溶射体３０を形成する工程を行う。金属溶射体３０の厚さは、好ましくは５０μｍ以上３００μｍ以下、より好ましくは１００μｍ以上２００μｍ以下である。溶射方法は、アーク溶射法又はプラズマ溶射法などであってもよいが、これらに限定されない。 Next, a process of forming a metal spray body 30 is performed by spraying a conductive metal material powder on the surface of the base body 10 to which the terminal 20 is fixed so as to cover the cylindrical portion 21 of the terminal 20. The thickness of the metal spray body 30 is preferably 50 μm or more and 300 μm or less, more preferably 100 μm or more and 200 μm or less. The spraying method may be an arc spraying method or a plasma spraying method, but is not limited thereto.
溶射により金属溶射体３０を形成するとき、金属溶射体３０の領域に応じた形状の開口部を有するマスキング冶具を用いて溶射してもよい。また、金属溶射体３０の領域を含む領域に溶射膜を形成して、ブラスト加工によって金属溶射体３０の領域を除く部分の溶射膜を除去してもよい。 When forming the metal spray body 30 by thermal spraying, you may spray using the masking jig which has an opening part of the shape according to the area | region of the metal spray body 30. FIG. Alternatively, a sprayed film may be formed in a region including the region of the metal sprayed body 30, and a portion of the sprayed film other than the region of the metal sprayed body 30 may be removed by blasting.
次に、金属溶射体３０を覆うように基体１０の表面上に、非導電性材料粉末を溶射して、絶縁体膜４０を形成する工程を行う。溶射方法は、アーク溶射法又はプラズマ溶射法などであってもよいが、限定されない。 Next, a process of forming the insulator film 40 by spraying a non-conductive material powder on the surface of the base 10 so as to cover the metal spray body 30 is performed. The spraying method may be an arc spraying method or a plasma spraying method, but is not limited.
ここでは、絶縁体膜４０は、プラズマに対する耐性に優れたアルミナ（Ａｌ２Ｏ３）又はイットリア（Ｙ２Ｏ３）等のセラミックス粉末を溶射して形成している。 Here, the insulator film 40 is formed by spraying ceramic powder such as alumina (Al 2 O 3 ) or yttria (Y 2 O 3 ) having excellent resistance to plasma.
なお、金属溶射体３０及び絶縁体膜と基体１０との間に、密着性を高めるためのアンダーコート層が存在していていもよい。 Note that an undercoat layer for enhancing adhesion may exist between the metal spray body 30 and the insulator film and the substrate 10.
以上説明したように、基体１０の穴１１に端子２０の円柱状部２１が嵌合されているので、穴１１と円柱状部２１との間に隙間が存在しない。これらの間に隙間が存在すると、この隙間の上に位置する金属溶射体３０が落ち込み、金属溶射体３０にクラックが発生する、又は金属溶射体３０の電気的接続の不良が発生するおそれがある。また、この落ち込みにより金属溶射体３０の上に形成された絶縁体膜４０も落ち込み、表面が仕上がり不良になるおそれもある。 As described above, since the columnar portion 21 of the terminal 20 is fitted into the hole 11 of the base body 10, there is no gap between the hole 11 and the columnar portion 21. If there is a gap between them, the metal spray body 30 located above the gap may drop, causing cracks in the metal spray body 30 or a poor electrical connection of the metal spray body 30. . Moreover, the insulator film 40 formed on the metal spray body 30 also falls due to this drop, and the surface may be poorly finished.
また、前記隙間が存在すると、基体１０の雌ねじ穴１２と端子２０の雄ねじ部２２との間の螺合が緩み、端子２０が基体１０から脱落するおそれも生じる。 In addition, if the gap exists, the screwing between the female screw hole 12 of the base 10 and the male screw portion 22 of the terminal 20 is loosened, and the terminal 20 may fall off the base 10.
さらに、基体１０の穴１１に端子２０の円柱状部２１が嵌合されているだけでなく、基体１０の雌ねじ穴１２と端子２０の雄ねじ部２２とが螺合することにより、端子２０が基体１０に固定されている。 Further, not only the cylindrical portion 21 of the terminal 20 is fitted into the hole 11 of the base body 10 but also the female screw hole 12 of the base body 10 and the male screw portion 22 of the terminal 20 are screwed together, so that the terminal 20 is fixed to the base body. 10 is fixed.
基体１０の穴１１に端子２０の円柱状部２１が嵌合されているだけであり、端子２０を基体１０に圧入する程度の嵌め合い精度でなければ安定的に固定できず、この場合、圧入時に基体１０が破損するおそれがある。また、圧入では基体１０の表面と端子２０の先端面とを面一に調整することが困難である。 The cylindrical portion 21 of the terminal 20 is merely fitted into the hole 11 of the base body 10 and cannot be stably fixed unless the fitting accuracy is such that the terminal 20 is press-fit into the base body 10. Sometimes the substrate 10 may be damaged. In addition, it is difficult to adjust the surface of the base 10 and the tip surface of the terminal 20 to be flush with each other by press-fitting.
また、長期的な熱応力の繰り返しによる端子２０の圧縮及び膨張により、端子２０が軸線方向に位置ずれする、基体１０が破損するなどのおそれがある。 Further, the terminal 20 may be displaced in the axial direction due to the compression and expansion of the terminal 20 due to repeated long-term thermal stress, and the base body 10 may be damaged.
さらに、基体１０の雌ねじ穴１２と端子２０の雄ねじ部２２との螺合を調整することにより、基体１０の表面と端子２０の先端面とを面一にすることが容易となる。これらが面一でないと、端子２０の先端部上に位置する金属溶射体３０に落ち込み又は盛り上がりが生じ、金属溶射体３０にクラックが発生する、又は金属溶射体３０の電気的接続の不良が発生するおそれがある。 Furthermore, by adjusting the screwing between the female screw hole 12 of the base 10 and the male screw portion 22 of the terminal 20, it becomes easy to make the surface of the base 10 and the tip surface of the terminal 20 flush with each other. If they are not flush, the metal spray body 30 located on the tip of the terminal 20 will drop or rise, causing cracks in the metal spray body 30, or poor electrical connection of the metal spray body 30. There is a risk.
また、この落ち込み又は盛り上がりにより金属溶射体３０の上に形成された絶縁体膜４０にも落ち込み又は盛り上がりが発生し、表面が仕上がり不良になる、もしくはクラックが発生するおそれもある。 In addition, due to the sag or swell, the insulator film 40 formed on the metal spray body 30 may also sag or swell, resulting in a poor finish or a crack.
また、基体１０の穴１１と端子２０の円柱状部２１との軸線方向の嵌合長さＨ５と、基体１０の雌ねじ穴１２と端子２０の雄ねじ部２２との軸線方向の螺合長さＨ６との比Ｈ５／Ｈ６が、０．０５以上２．０以下であることが好ましい。 Further, the fitting length H5 in the axial direction between the hole 11 of the base 10 and the cylindrical portion 21 of the terminal 20, and the screwing length H6 in the axial direction between the female screw hole 12 of the base 10 and the male screw portion 22 of the terminal 20 are provided. The ratio H5 / H6 is preferably 0.05 or more and 2.0 or less.
比Ｈ５／Ｈ６が、０．０５未満であれば、端子２０の円柱状部２１の嵌合部を保持する基体１０の肉厚が一般的に薄くなり、端子２０を組立する際の応力により、基体１０の穴１１の近傍にカケ、割れ、クラックが発生するおそれが高くなる。一方、比Ｈ５／Ｈ６が２．０を超えると、端子２０の円柱状部２１を基体１０の穴１１に嵌合する際に必要なトルクが大きくなり、端子２０の変形、破損などが生じるおそれが高くなるからである。ただし、比Ｈ５／Ｈ６の好ましい値は、基体１０の雌ねじ穴１２、端子２０の雄ねじ部２２などの寸法に応じて変化する。 If the ratio H5 / H6 is less than 0.05, the thickness of the base 10 that holds the fitting portion of the columnar portion 21 of the terminal 20 is generally thin, and due to stress when the terminal 20 is assembled, There is a high possibility that cracks, cracks, and cracks are generated in the vicinity of the hole 11 of the substrate 10. On the other hand, if the ratio H5 / H6 exceeds 2.0, the torque required for fitting the cylindrical portion 21 of the terminal 20 into the hole 11 of the base body 10 increases, and the terminal 20 may be deformed or damaged. Because it becomes higher. However, the preferable value of the ratio H5 / H6 varies depending on the dimensions of the female screw hole 12 of the base 10, the male screw part 22 of the terminal 20, and the like.
また、基体１０の穴１１の内径Ｄ１と雌ねじ穴１２とねじ径Ｄ２との比Ｄ１／Ｄ２が、０．７５未満であることが好ましい。 Moreover, it is preferable that ratio D1 / D2 of the internal diameter D1 of the hole 11 of the base | substrate 10, the internal thread hole 12, and the screw diameter D2 is less than 0.75.
比Ｄ１／Ｄ２が０．７５以上であれば、端子２０の円柱状部２１を基体１０の穴１１に嵌合する際に必要なトルクが大きくなり、端子２０の変形、破損が生じるおそれが高くなるからである。ただし、比Ｄ１／Ｄ２の好ましい値は、基体１０の雌ねじ穴１２、端子２０の雄ねじ部２２などの寸法、端子の材質などに応じて変化する。 If the ratio D1 / D2 is 0.75 or more, the torque required for fitting the cylindrical portion 21 of the terminal 20 into the hole 11 of the base body 10 is increased, and there is a high possibility that the terminal 20 is deformed or damaged. Because it becomes. However, the preferable value of the ratio D1 / D2 varies depending on the dimensions of the female screw hole 12 of the base 10 and the male screw portion 22 of the terminal 20, the material of the terminal, and the like.
なお、本発明の導電体は、金属溶射体３０に限定されない。本発明の導電体は、例えば、金属やカーボンなどの導電性物質を含有するペーストを印刷し、乾燥、熱処理して形成される導電体、導電性物質のスパッタリングやイオンプレーティングなどのドライプロセスにより形成される導電体、その他導電膜形成手段として公知な手段で形成される導電体であってもよい。このような導電体であっても、本発明の端子を備えた部材及びその製造方法において、導電体が金属溶射体３０である場合と同じ効果が得られる。 The conductor of the present invention is not limited to the metal spray body 30. The conductor of the present invention is formed by, for example, printing a paste containing a conductive substance such as metal or carbon, drying and heat-treating, a dry process such as sputtering or ion plating of the conductive substance. The conductor formed may be a conductor formed by other means known as conductive film forming means. Even if it is such a conductor, the same effect as the case where a conductor is the metal spray body 30 is acquired in the member provided with the terminal of this invention, and its manufacturing method.
(実施例１）
基体１０として、アルミナ（Ａｌ２Ｏ３）９９．５％からなり、厚さ６．０ｍｍの板材を用意した。この板材に、ミリングによる研削加工によって、直径Ｄ１が５.０ｍｍの貫通孔を形成した。そして、板材の裏面側に、貫通孔と同軸心であり、ねじ穴径Ｄ２が６．０ｍｍ、深さＨ２が５．０ｍｍの雌ねじ穴１２を形成した。これにより、基体１０に直径Ｄ１が５．０ｍｍ、深さＨ１が１．０ｍｍの穴１１が形成された。穴１１の内径Ｄ１と深さＨ１との比Ｄ１／Ｈ１は５．０であり、雌ねじ穴１２のねじ穴径Ｄ２と深さＨ２との比Ｄ２／Ｈ２は１．２であった。
Example 1
As the substrate 10, a plate material made of 99.5% alumina (Al 2 O 3 ) and having a thickness of 6.0 mm was prepared. A through hole having a diameter D1 of 5.0 mm was formed on the plate material by grinding by milling. Then, a female screw hole 12 that is coaxial with the through hole, has a screw hole diameter D2 of 6.0 mm, and a depth H2 of 5.0 mm is formed on the back surface side of the plate material. As a result, a hole 11 having a diameter D1 of 5.0 mm and a depth H1 of 1.0 mm was formed in the base 10. The ratio D1 / H1 between the inner diameter D1 and the depth H1 of the hole 11 was 5.0, and the ratio D2 / H2 between the screw hole diameter D2 and the depth H2 of the female screw hole 12 was 1.2.
端子２０として、チタン（Ｔｉ）からなり、先端に円柱形状の円柱状部２１を有し、この円柱状部２１と同一軸心に、円柱状部２１と連続して、円柱状の接続部２３及び雄ねじ部２２がこの順で形成されているものを作製した。 The terminal 20 is made of titanium (Ti), has a cylindrical columnar portion 21 at the tip, and is connected to the cylindrical portion 21 in the same axial center as the cylindrical portion 21. And what the male screw part 22 was formed in this order was produced.
円柱状部２１は、直径Ｄ３が５．０ｍｍで、長さが１．５ｍｍであった。接続部２３は、直径Ｄ５が４．０ｍｍ、長さが０．５ｍｍであった。雄ねじ部２２は、ねじ穴径Ｄ４が６．０ｍｍ、長さＨ４が４．５ｍｍであった。円柱状部２１の外径Ｄ３と穴１１の内径Ｄ１との嵌め合い精度はＨ７／ｐ６であった。 The cylindrical portion 21 had a diameter D3 of 5.0 mm and a length of 1.5 mm. The connecting portion 23 had a diameter D5 of 4.0 mm and a length of 0.5 mm. The male screw portion 22 had a screw hole diameter D4 of 6.0 mm and a length H4 of 4.5 mm. The fitting accuracy between the outer diameter D3 of the cylindrical portion 21 and the inner diameter D1 of the hole 11 was H7 / p6.
そして、基体１０の穴１１に端子２０の円柱状部２１を嵌合させ、且つ基体１０の雌ねじ穴１２に端子２０の雄ねじ部２２を螺合させながら、端子２０を基体１０にねじ込んだ。このとき、基体１０の表面に対して端子２０の円柱状部２１の先端面は１０μｍ飛び出していた。 Then, the cylindrical portion 21 of the terminal 20 was fitted into the hole 11 of the base 10, and the terminal 20 was screwed into the base 10 while the male screw portion 22 of the terminal 20 was screwed into the female screw hole 12 of the base 10. At this time, the tip surface of the columnar portion 21 of the terminal 20 protruded 10 μm from the surface of the base 10.
そして、この締結状態のまま、端子２０の円柱状部２１を覆うように、端子２０が固定された基体１０の表面上に導電性のアルミニウム（Ａｌ）粉末を溶射して、金属溶射体３０を形成した。金属溶射体３０の厚さは、１００μｍであった。 And in this fastening state, conductive aluminum (Al) powder is sprayed on the surface of the base 10 to which the terminal 20 is fixed so as to cover the cylindrical portion 21 of the terminal 20, and the metal spray body 30 is formed. Formed. The thickness of the metal spray body 30 was 100 μm.
その後、金属溶射体３０を覆うように基体１０の表面上に、酸化イットリウム（Ｙ２Ｏ３）粉末を溶射し、絶縁体膜４０を形成して、溶射部材１００を作製した。絶縁体膜４０の厚さは５００μｍであった。 Thereafter, yttrium oxide (Y 2 O 3 ) powder was sprayed on the surface of the base 10 so as to cover the metal spray body 30 to form the insulator film 40, thereby producing the spray member 100. The thickness of the insulator film 40 was 500 μm.
完成した溶射部材１００の絶縁体膜４０を観察したところ、その表面に窪みやクラックなどは存在せず、表面仕上がりは良好であった。また、基体１０と端子２０は強固に締結されていた。 When the insulator film 40 of the completed sprayed member 100 was observed, there were no depressions or cracks on the surface, and the surface finish was good. Moreover, the base 10 and the terminal 20 were firmly fastened.
(実施例２）
基体１０として、アルミナ（Ａｌ２Ｏ３）９９．９％からなり、厚さ５．９ｍｍの板材を用意した。この板材に、ミリングによる研削加工によって、直径Ｄ１が３ｍｍの貫通孔を形成した。そして、板材の裏面側に、貫通孔と同軸心であり、ねじ穴径Ｄ２が４ｍｍ、深さＨ２が４．９ｍｍの雌ねじ穴１２を形成した。これにより、基体１０に直径Ｄ１が３ｍｍ、深さＨ１が１．０ｍｍの穴１１が形成された。穴１１の内径Ｄ１と深さＨ１との比Ｄ１／Ｈ１は３．０であり、雌ねじ穴１２のねじ穴径Ｄ２と深さＨ２との比Ｄ２／Ｈ２は０．８１であった。
(Example 2)
As the substrate 10, a plate material made of 99.9% alumina (Al 2 O 3 ) and having a thickness of 5.9 mm was prepared. A through hole having a diameter D1 of 3 mm was formed on the plate material by grinding by milling. Then, a female screw hole 12 that is coaxial with the through hole, has a screw hole diameter D2 of 4 mm, and a depth H2 of 4.9 mm is formed on the back surface side of the plate material. As a result, a hole 11 having a diameter D1 of 3 mm and a depth H1 of 1.0 mm was formed in the base 10. The ratio D1 / H1 between the inner diameter D1 and the depth H1 of the hole 11 was 3.0, and the ratio D2 / H2 between the screw hole diameter D2 and the depth H2 of the female screw hole 12 was 0.81.
端子２０として、ニッケル（Ｎｉ）からなり、先端に円柱形状の円柱状部２１を有し、この円柱状部２１と同一軸心に、円柱状部２１と連続して、円柱状の接続部２３及び雄ねじ部２２がこの順で形成されているものを作製した。 The terminal 20 is made of nickel (Ni), has a cylindrical columnar portion 21 at the tip, and is connected to the cylindrical portion 21 on the same axial center as the cylindrical portion 21. And what the male screw part 22 was formed in this order was produced.
円柱状部２１は、直径Ｄ３が３．０ｍｍで、長さが１．５ｍｍであった。接続部２３は、直径Ｄ５が２．０ｍｍ、長さが０．５ｍｍであった。雄ねじ部２２は、ねじ穴径Ｄ４が４ｍｍ、長さＨ４が５．０ｍｍであった。円柱状部２１の外径Ｄ３と穴１１の内径Ｄ１との嵌め合い精度はＨ７／ｈ７であった。 The cylindrical portion 21 had a diameter D3 of 3.0 mm and a length of 1.5 mm. The connecting portion 23 had a diameter D5 of 2.0 mm and a length of 0.5 mm. The male screw portion 22 had a screw hole diameter D4 of 4 mm and a length H4 of 5.0 mm. The fitting accuracy between the outer diameter D3 of the cylindrical portion 21 and the inner diameter D1 of the hole 11 was H7 / h7.
そして、基体１０の穴１１に端子２０の円柱状部２１を嵌合させ、且つ基体１０の雌ねじ穴１２に端子２０の雄ねじ部２２を螺合させながら、端子２０を基体１０にねじ込んだ。このとき、基体１０の表面に対して端子２０の円柱状部２１の先端面は５μｍ引っ込んでいた。 Then, the cylindrical portion 21 of the terminal 20 was fitted into the hole 11 of the base 10, and the terminal 20 was screwed into the base 10 while the male screw portion 22 of the terminal 20 was screwed into the female screw hole 12 of the base 10. At this time, the tip end surface of the columnar portion 21 of the terminal 20 was recessed by 5 μm with respect to the surface of the base body 10.
そして、この締結状態のまま、端子２０の円柱状部２１を覆うように、端子２０が固定された基体１０の表面上に導電性のアルミニウム（Ａｌ）粉末を溶射して、金属溶射体３０を形成した。金属溶射体３０の厚さは、１００μｍであった。 And in this fastening state, conductive aluminum (Al) powder is sprayed on the surface of the base 10 to which the terminal 20 is fixed so as to cover the cylindrical portion 21 of the terminal 20, and the metal spray body 30 is formed. Formed. The thickness of the metal spray body 30 was 100 μm.
その後、金属溶射体３０を覆うように基体１０の表面上に、酸化アルミニウム（Ａｌ２Ｏ３）粉末を溶射し、絶縁体膜４０を形成して、溶射部材１００を作製した。絶縁体膜４０の厚さは５００μｍであった。 Then, on the surface of the substrate 10 so as to cover the metal spraying body 30, and spraying the aluminum oxide (Al 2 O 3) powder, and forming an insulator film 40 to produce a spray member 100. The thickness of the insulator film 40 was 500 μm.
完成した溶射部材１００の絶縁体膜４０を観察したところ、その表面に窪みやクラックなどは存在せず、表面仕上がりは良好であった。また、基体１０と端子２０は強固に締結されていた。 When the insulator film 40 of the completed sprayed member 100 was observed, there were no depressions or cracks on the surface, and the surface finish was good. Moreover, the base 10 and the terminal 20 were firmly fastened.
(実施例３）
基体１０として、酸化イットリウム（Ｙ２Ｏ３）を５％した窒化アルミニウム（ＡｌＮ）からなり、厚さ１０．５ｍｍの板材を用意した。この板材に、ミリングによる研削加工によって、直径Ｄ１が３ｍｍの貫通孔を形成した。そして、板材の裏面側に、貫通孔と同軸心であり、ねじ穴径Ｄ２が６．０ｍｍ、深さＨ２が９．５ｍｍの雌ねじ穴１２を形成した。これにより、基体１０に直径Ｄ１が３ｍｍ、深さＨ１が１．０ｍｍの穴１１が形成された。穴１１の内径Ｄ１と深さＨ１との比Ｄ１／Ｈ１は３．０であり、雌ねじ穴１２のねじ穴径Ｄ２と深さＨ２との比Ｄ２／Ｈ２は０．６３であった。
Example 3
As the substrate 10, a plate material made of aluminum nitride (AlN) containing 5% of yttrium oxide (Y 2 O 3 ) and having a thickness of 10.5 mm was prepared. A through hole having a diameter D1 of 3 mm was formed on the plate material by grinding by milling. Then, a female screw hole 12 that is coaxial with the through hole, has a screw hole diameter D2 of 6.0 mm, and a depth H2 of 9.5 mm is formed on the back surface side of the plate material. As a result, a hole 11 having a diameter D1 of 3 mm and a depth H1 of 1.0 mm was formed in the base 10. The ratio D1 / H1 between the inner diameter D1 and the depth H1 of the hole 11 was 3.0, and the ratio D2 / H2 between the screw hole diameter D2 and the depth H2 of the female screw hole 12 was 0.63.
端子２０として、ニッケル（Ｎｉ）からなり、先端に円柱形状の円柱状部２１を有し、この円柱状部２１と同一軸心に、円柱状部２１と連続して、円柱状の接続部２３及び雄ねじ部２２がこの順で形成されているものを作製した。 The terminal 20 is made of nickel (Ni), has a cylindrical columnar portion 21 at the tip, and is connected to the cylindrical portion 21 on the same axial center as the cylindrical portion 21. And what the male screw part 22 was formed in this order was produced.
円柱状部２１は、直径Ｄ３が３．０ｍｍで、長さが１．０ｍｍであった。接続部２３は、直径Ｄ５が２．０ｍｍ、長さが０．５ｍｍであった。雄ねじ部２２は、ねじ穴径Ｄ４が６．０ｍｍ、長さＨ４が６．５ｍｍであった。円柱状部２１の外径Ｄ３と穴１１の内径Ｄ１との嵌め合い精度はＨ７／ｈ５であった。 The cylindrical portion 21 had a diameter D3 of 3.0 mm and a length of 1.0 mm. The connecting portion 23 had a diameter D5 of 2.0 mm and a length of 0.5 mm. The male screw portion 22 had a screw hole diameter D4 of 6.0 mm and a length H4 of 6.5 mm. The fitting accuracy between the outer diameter D3 of the cylindrical portion 21 and the inner diameter D1 of the hole 11 was H7 / h5.
そして、基体１０の穴１１に端子２０の円柱状部２１を嵌合させ、且つ基体１０の雌ねじ穴１２に端子２０の雄ねじ部２２を螺合させながら、端子２０を基体１０にねじ込んだ。このとき、基体１０の表面に対して端子２０の円柱状部２１の先端面は５μｍ飛び出していた。 Then, the cylindrical portion 21 of the terminal 20 was fitted into the hole 11 of the base 10, and the terminal 20 was screwed into the base 10 while the male screw portion 22 of the terminal 20 was screwed into the female screw hole 12 of the base 10. At this time, the tip end surface of the columnar portion 21 of the terminal 20 protruded 5 μm from the surface of the base 10.
そして、この締結状態のまま、端子２０の円柱状部２１を覆うように、端子２０が固定された基体１０の表面上に導電性のアルミニウム（Ａｌ）粉末を溶射して、金属溶射体３０を形成した。金属溶射体３０の厚さは、１００μｍであった。 And in this fastening state, conductive aluminum (Al) powder is sprayed on the surface of the base 10 to which the terminal 20 is fixed so as to cover the cylindrical portion 21 of the terminal 20, and the metal spray body 30 is formed. Formed. The thickness of the metal spray body 30 was 100 μm.
その後、金属溶射体３０を覆うように基体１０の表面上に、酸化イットリウム（Ｙ２Ｏ３）粉末を溶射し、絶縁体膜４０を形成して、溶射部材１００を作製した。絶縁体膜４０の厚さは５００μｍであった。 Thereafter, yttrium oxide (Y 2 O 3 ) powder was sprayed on the surface of the base 10 so as to cover the metal spray body 30 to form the insulator film 40, thereby producing the spray member 100. The thickness of the insulator film 40 was 500 μm.
完成した溶射部材１００の絶縁体膜４０を観察したところ、その表面に窪みやクラックなどは存在せず、表面仕上がりは良好であった。また、基体１０と端子２０は強固に締結されていた。 When the insulator film 40 of the completed sprayed member 100 was observed, there were no depressions or cracks on the surface, and the surface finish was good. Moreover, the base 10 and the terminal 20 were firmly fastened.
実施例１から実施例３の結果を表１にまとめた。 The results of Example 1 to Example 3 are summarized in Table 1.
１０…基体、 １１…穴、 １２…雌ねじ穴、 ２０…端子、 ２１…円柱状体、 ２２…雄ねじ部、 ３０…金属溶射体（導電体）、 ４０…絶縁体膜、 １００…溶射部材（端子を備えた部材）。 DESCRIPTION OF SYMBOLS 10 ... Base | substrate, 11 ... Hole, 12 ... Female screw hole, 20 ... Terminal, 21 ... Cylindrical body, 22 ... Male screw part, 30 ... Metal spray body (conductor), 40 ... Insulator film, 100 ... Thermal spray member (terminal) A member provided with.
Claims (4)
前記基体の表面上に、前記端子の前記円柱状部の先端面と当接するように導電体が配置されており、
前記導電体を含めて前記基体の表面を絶縁体膜が覆っていることを特徴とする端子を備えた部材。 A cylindrical cylindrical portion formed at the tip of the terminal is fitted into a cylindrical hole formed on the front surface side of the base body, and the same axial center as the hole from the back surface side of the base body is in communication. The male screw portion formed on the same axis as the cylindrical portion of the terminal is screwed into the female screw hole formed as described above, and the surface of the base and the tip surface of the cylindrical portion of the terminal are connected to each other. It ’s almost the same,
On the surface of the base body, a conductor is disposed so as to contact the tip surface of the cylindrical portion of the terminal,
A member provided with a terminal, wherein the surface of the substrate including the conductor is covered with an insulating film.
前記基体の前記穴と前記端子の円柱状部との軸線方向の嵌合長さと、前記基体の前記雌ねじ穴と前記端子の雄ねじ部との軸線方向の螺合長さとの比が、０．０５以上２．０以下であることを特徴とする端子を備えた部材。 A member comprising the terminal according to claim 1,
A ratio of an axial fitting length between the hole of the base body and the cylindrical portion of the terminal to an axial threading length of the female screw hole of the base body and the male screw portion of the terminal is 0.05. The member provided with the terminal characterized by being 2.0 or more and below.
前記基体の前記穴の外径と前記基体の前記雌ねじ穴とねじ径との比が、０．７５未満であることを特徴とする端子を備えた部材。 A member comprising the terminal according to claim 1 or 2,
A member provided with a terminal, wherein a ratio of an outer diameter of the hole of the base to a female screw hole of the base and a screw diameter is less than 0.75.
前記基体の前記穴に前記端子の円柱状部を嵌合させながら、前記基体の前記雌ねじ穴に前記端子の前記雄ねじ部を螺合させて、前記基体の表面と前記端子の前記円柱状部の先端面とが略面一になるように前記基体に前記端子を固定する工程と、
前記端子が固定された前記基体の表面上に、前記端子の先端部を覆うように導電体を形成する工程と、
前記導電体が形成された前記基体の表面を覆うように非導電性材料粉末を溶射して、絶縁体膜を形成する工程とを備えることを特徴とする端子を備えた部材の製造方法。 A base body in which a cylindrical hole is formed on the front surface side and a female screw hole having the same axial center as that of the hole and communicated from the back surface side, a cylindrical columnar part at the tip, and the same axis as the cylindrical part Preparing a terminal having a male screw portion which is a core;
While the cylindrical part of the terminal is fitted into the hole of the base, the male screw part of the terminal is screwed into the female screw hole of the base, and the surface of the base and the cylindrical part of the terminal are Fixing the terminal to the base so that the tip surface is substantially flush,
Forming a conductor on the surface of the base to which the terminal is fixed so as to cover the tip of the terminal;
And a step of thermally spraying a non-conductive material powder so as to cover the surface of the substrate on which the conductor is formed to form an insulator film.
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| CN112739909B (en) * | 2018-09-24 | 2024-02-06 | 保利泰克有限公司 | Down-lead connection system, wind turbine lightning protection system and method for arranging a down-lead connection system |
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