JP2017074736A - Droplet discharge device, electro-optical device, manufacturing method of electro-optical device, and electronic device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a droplet discharge device capable of achieving high productivity.SOLUTION: A droplet discharge device 100 includes: a first carriage unit 121 and a second carriage unit 122, each of which includes a discharge head 50 and a tank 128 for supplying a functional fluid to the discharge head 50; first moving means which moves the first carriage unit 121 in the direction intersecting with a first direction and enables the first carriage unit 121 to move between a drawing area 10 and a maintenance area 20; and second moving means which moves the second carriage unit 122 in a direction intersecting with the first direction and enables the second carriage unit 122 to move between the drawing area 10 and the maintenance area 20. The first moving means and the second moving means are arranged side-by-side in the first direction.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a droplet discharge device, an electro-optical device, a method for manufacturing the electro-optical device, and an electronic apparatus.

Conventionally, a droplet discharge device for industrial use includes a carriage on which a discharge head that discharges functional liquid (ink) and a tank that supplies functional liquid to the discharge head via a supply tube are mounted. When changing the type of functional liquid or when the discharge head deteriorates, it is necessary to replace the carriage.
In such an operation of replacing the carriage, after the apparatus is temporarily stopped and the functional liquid in the supply tube is discharged, both ends of the supply tube, that is, the end of the supply tube connected to the discharge head and the tank It was necessary to remove the connected end, which took a lot of work and a long time.

  For this reason, for example, in Patent Document 1, a carriage having a large amount of remaining functional liquid in a tank is preferentially operated to prevent only functional liquid in a specific tank from being lost due to drawing. There has been proposed a drawing control method for a droplet discharge apparatus that is empty and replaces all carriages at once, thereby reducing the carriage replacement frequency and minimizing apparatus stop time.

JP 2006-061849 A

  However, in the drawing control method of the droplet discharge device described in Patent Document 1, when replacing the carriage, the carriage is moved from the drawing area where drawing is performed to the standby area to perform maintenance work. Must stop. Therefore, there is a problem that the production efficiency is reduced in the small-lot production of various varieties in which the functional fluid must be frequently replaced.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

  [Application Example] In the liquid droplet ejection apparatus according to this application example, the functional liquid is discharged from the nozzles of the ejection head while relatively moving the ejection head and the work arranged in the drawing area in the first direction. A droplet ejection device that ejects droplets, each of which includes the ejection head, a first carriage unit that includes a tank that supplies the functional liquid to the ejection head, a second carriage unit, and the first carriage unit. Moving in a direction intersecting the first direction and moving between the drawing area and the maintenance area, and moving the second carriage unit in a direction intersecting the first direction; Second moving means capable of moving between the drawing area and the maintenance area, wherein the first moving means and the second moving means Characterized in that it is arranged in the first direction.

  According to this configuration, using the first moving unit or the second moving unit, one of the first carriage unit and the second carriage unit is arranged in the drawing area, and the other carriage unit is set in the maintenance area. Can be made to wait. Therefore, the functional liquid of the other carriage unit can be exchanged or maintained at the same time while ejecting liquid droplets from the ejection head of one carriage unit without stopping the liquid droplet ejection apparatus. That is, a droplet discharge device capable of realizing high productivity can be provided.

  In the liquid droplet ejection apparatus according to the application example, the maintenance area includes a cap unit that maintains the ejection head. The first moving unit and the second moving unit include the ejection head, The first carriage unit and the second carriage unit are moved to the maintenance area so as to face the cap unit.

  According to this configuration, the ejection head that has moved to the maintenance area can be allowed to face the cap unit, and functional deterioration due to drying of the ejection head can be prevented.

  The droplet discharge device according to the application example includes an attachment / detachment unit that attaches / detaches the first carriage unit or the second carriage unit between the cap unit and the first moving unit and the second moving unit. It is characterized by.

  According to this configuration, it is possible to easily attach or detach the first carriage unit or the second carriage unit and reduce the replacement work.

  In the droplet discharge device according to the application example, the first moving unit and the second moving unit move the first carriage unit and the second carriage unit from the drawing area to the maintenance area when the workpiece is replaced. It is characterized by moving.

  According to this configuration, maintenance of the ejection heads mounted on the first carriage unit and the second carriage unit is possible.

  [Application Example] In the liquid droplet ejection apparatus according to this application example, the functional liquid is dropped from the nozzles of the ejection head while relatively moving the ejection head and the work arranged in the drawing area in the first direction. A first carriage unit, a second carriage unit, a first carriage unit, and a first carriage unit, each of which includes a discharge tank and a tank that supplies the functional liquid to the discharge head. One of the second carriage units is moved in a second direction intersecting the first direction, and a first moving means for enabling movement between the drawing area and the maintenance area; The first carriage unit and the second carriage unit arranged in a third direction intersecting with two directions are moved in the third direction. A third moving unit that faces the first moving unit, and an attaching / detaching unit that attaches / detaches one of the first carriage unit and the second carriage unit to / from the first moving unit. It is characterized by.

  According to this configuration, by using the first moving unit, one of the first carriage unit and the second carriage unit can be arranged in the drawing area, and the other carriage unit can be put on standby in the maintenance area. it can. Therefore, the functional liquid of the other carriage unit can be exchanged or maintained at the same time while ejecting liquid droplets from the ejection head of one carriage unit without stopping the liquid droplet ejection apparatus. That is, a droplet discharge device capable of realizing high productivity can be provided.

  In the liquid droplet ejection apparatus according to the application example, the maintenance area includes a cap unit that maintains the ejection head, and the third moving unit has the ejection head facing the cap unit. Then, the first carriage unit, the second carriage unit, and the cap unit are moved in the first direction.

  According to this configuration, the ejection head that has moved to the maintenance area can be allowed to face the cap unit, and functional deterioration due to drying of the ejection head can be prevented.

  In the droplet discharge device according to the application example, the attachment / detachment unit attaches / detaches the first carriage unit and the second carriage unit between the first moving unit and the cap unit.

  According to this configuration, the ejection head that does not contribute to the drawing can face the cap unit.

  The droplet discharge device according to the application example is characterized in that the cap unit is disposed along the first direction.

  According to this configuration, when the first carriage unit and the second carriage unit are moved to the maintenance area, the cap unit can be arranged according to the position of the ejection head. For this reason, since the moving distance for bringing the discharge head and the cap unit into contact with each other is reduced, the droplet discharge device can be miniaturized.

  In the liquid droplet ejection apparatus according to the application example, the third direction is substantially the same direction as the first direction.

  According to this configuration, the droplet discharge device can be further downsized.

  The liquid droplet ejection apparatus according to the application example includes fourth moving means for moving the table on which the work is placed in the first direction, and performs drawing on the work having the maximum width that can be placed on the table. The number of the carriage units necessary for this is provided.

  According to this configuration, since there is no extra carriage unit, the space in the maintenance area can be minimized, and the overall size of the apparatus can be suppressed.

  In the droplet discharge device according to the application example, the first moving unit may move the first carriage unit or the second carriage unit located in the drawing area from the drawing area to the maintenance when the workpiece is replaced. It is moved to the area.

  According to this configuration, maintenance of the discharge heads mounted on the first carriage unit and the second carriage unit and replacement of the carriage unit can be performed.

  In the droplet discharge device according to the application example, the first carriage unit and the second carriage unit are mounted with a plurality of the discharge heads and the plurality of tanks, and the plurality of discharge heads are different types. And an ejection head for ejecting the functional liquid.

  According to this configuration, when replacing a carriage unit on which a discharge head or a tank for discharging different types of functional liquid is mounted, the carriage unit can be replaced as a unit.

  [Application Example] An electro-optical device according to this application example uses the droplet discharge device according to the application example described above, and has a film forming unit formed on the workpiece with the functional liquid.

  According to these application examples, it is possible to provide an electro-optical device capable of realizing high productivity by reducing the switching time of the functional liquid.

  [Application Example] A method of manufacturing an electro-optical device according to this application example includes the step of forming a film forming portion with the functional liquid on the workpiece using the droplet discharge device according to the application example. To do.

  According to these application examples, it is possible to manufacture an electro-optical device capable of realizing high productivity by reducing the switching time of the functional liquid.

  [Application Example] An electronic apparatus according to this application example includes the electro-optical device according to the application example described above.

  According to these application examples, it is possible to provide an electronic apparatus having an electro-optical device capable of shortening the switching time of the functional liquid and realizing high productivity.

1 is an external plan view of a droplet discharge device according to a first embodiment. The schematic sectional drawing which shows the structure of an attachment / detachment part and a cap unit. The block diagram which shows the control system of a droplet discharge apparatus. FIG. 3 is an external perspective view illustrating an outline of a configuration of a carriage unit. FIG. 3 is an external perspective view illustrating a configuration of an ink pack. FIG. 3 is an external perspective view illustrating a configuration of a discharge head. The external appearance top view of a droplet discharge device. The external appearance top view of a droplet discharge device. The schematic sectional drawing which shows the structure of an attachment / detachment part and a cap unit. The schematic sectional drawing which shows the structure of an attachment / detachment part and a cap unit. The schematic sectional drawing which shows the structure of an attachment / detachment part and a cap unit. The schematic sectional drawing which shows the structure of an attachment / detachment part and a cap unit. The external appearance top view of a droplet discharge device. The schematic sectional drawing which shows the structure of an attachment / detachment part and a cap unit. The schematic sectional drawing which shows the structure of an attachment / detachment part and a cap unit. The schematic sectional drawing which shows the structure of an attachment / detachment part and a cap unit. The schematic sectional drawing which shows the structure of an attachment / detachment part and a cap unit. FIG. 6 is an external plan view of a droplet discharge device according to a second embodiment. The schematic sectional drawing which shows the structure of an attachment / detachment part and a cap unit. Sectional drawing of the principal part of the display area of the organic electroluminescent apparatus which concerns on 3rd Embodiment. The flowchart explaining the manufacturing method of an organic electroluminescent apparatus. Process drawing explaining formation of an inorganic bank layer. Process drawing explaining formation of an organic substance bank layer. Process drawing explaining the process of forming a positive hole injection / transport layer. Process drawing explaining the state in which the positive hole injection / transport layer was formed. Process drawing explaining the process of forming a blue light emitting layer. Process drawing explaining the state in which the blue light emitting layer was formed. Process drawing explaining the state in which the light emitting layer of each color was formed. Process drawing explaining formation of a cathode. Schematic diagram showing a notebook personal computer. Schematic which shows a flat-screen television (TV).

  DESCRIPTION OF EMBODIMENTS Embodiments embodying the present invention will be described below with reference to the drawings. In the following figures, the scale of each component is described on a scale different from the actual scale so that each component can be recognized on the drawing for easy understanding. There is.

[First Embodiment]
<Droplet ejection device>
The droplet discharge device of this embodiment will be described with reference to FIGS. 1 and 2. FIG. 1 is an external plan view of the droplet discharge device according to the first embodiment.

  As shown in FIG. 1, the droplet discharge device 100 moves the functional liquid (nozzle 51) from the nozzle 51 of the discharge head 50 while relatively moving the discharge head 50 and the work W arranged on the table 11 in the drawing area 10. Hereinafter, it is a device suitable for manufacturing, for example, an organic EL device to be described later.

  Here, the drawing area 10 is an area in which drawing is performed by operating the droplet discharge device 100 to discharge droplets from the nozzle 51 toward the workpiece W. 11 is a region (a hatched portion in FIG. 1) where the carriage unit 120 transported to a position overlapping with 11 and the table 11 overlap. A plurality of ejection heads 50 are mounted on the carriage unit 120.

  When the droplet discharge device 100 is not in operation or when maintenance is performed, the carriage unit 120 is moved to the maintenance area 20 so that the discharge head 50 faces the cap unit 170 (see FIG. 2). Perform maintenance.

  The maintenance performed in the maintenance area 20 refers to, for example, sucking and removing thickened ink from the nozzle 51, discarding and discharging (flushing) ink from the nozzle 51, and discharging in the carriage unit 120 that is not performing the discharge operation. Examples thereof include wiping off foreign matters adhering to the nozzle surface 58a (see FIG. 2) on which the nozzles 51 of the head 50 are arranged, sealing the nozzle surface 58a (capping), and the like.

  A specific configuration of the droplet discharge device 100 will be described below. In the following description, the discharge head 50 and the work W are arranged to face each other and the work W is moved relative to the discharge head 50 in the first direction is referred to as main scanning. The relative movement of the ejection head 50 in the second direction orthogonal to the first direction is called sub-scanning. The droplet discharge device 100 performs drawing by discharging ink from the discharge head 50 toward the workpiece W during the main scanning and the sub-scanning.

The first direction in the main scanning is a main scanning direction, and the second direction is a sub-scanning direction. In the following embodiments, the main scanning direction is displayed as the X-axis direction, and the sub-scanning direction is displayed as the Y-axis direction. Further, a direction orthogonal to the X-axis direction and the Y-axis direction is displayed as the Z-axis direction.
Using the expressions in the X-axis direction, the Y-axis direction, and the Z-axis direction, FIG. 1 is an external plan view of the droplet discharge device viewed from the + Z-axis direction.

  As shown in FIG. 1, the droplet discharge device 100 includes a head carriage 110, a carriage unit 120, a transport unit 130 as a first moving unit, a transfer unit 140 as a third moving unit, and a fourth movement. A scanning unit 150 as means, an attachment / detachment unit 160, a cap unit 170 (see FIG. 2), and a control unit 180 (see FIG. 3) are provided. FIG. 1 shows a drawing pause state.

(Head carriage)
The head carriage 110 has a number of carriage units 120 necessary for drawing, and is moved between the drawing area 10 and the maintenance area 20 by the conveyance unit 130.

  The carriage unit 120 includes a first carriage unit 121 and a second carriage unit 122. The first carriage unit 121 includes four carriage units 120 from the carriage unit 121a to the carriage unit 121d, and is arranged at a predetermined interval along the Y-axis direction.

  The second carriage unit 122 is arranged at an interval in the −X axis direction with respect to the first carriage unit 121. The second carriage unit 122 includes four carriage units 120 from the carriage unit 122a to the carriage unit 122d, and is arranged at a predetermined interval along the Y-axis direction. The number of carriage units 120 in each carriage unit 121, 122 is not limited to four for each carriage unit 121, 122, and may be one, for example.

  In the following description, the first carriage unit 121 and the second carriage unit 122 may be collectively referred to as a carriage unit 120.

(Transport section)
The conveyance unit 130 includes a suspension unit 131 and a servo motor (not shown). The hanging part 131 has a pair of rails along the Y-axis direction between the drawing area 10 and the maintenance area 20.

  The transport unit 130 is a moving unit that reciprocally moves either the first carriage unit 121 or the second carriage unit 122 between the drawing area 10 and the maintenance area 20 by driving a servo motor.

  Whether the first carriage unit 121 and the second carriage unit 122 are arranged in the drawing area 10 or the maintenance area 20 can be independently controlled.

  Specifically, while drawing is performed in the drawing area 10 using the first carriage unit 121, the ink type of the second carriage unit 122 may be exchanged or maintained in the maintenance area 20 at the same time. it can. When the workpiece W is replaced, the first carriage unit 121 and the second carriage unit 122 are moved from the drawing area 10 to the maintenance area 20.

(Transfer section)
The transfer unit 140 is a moving unit that moves a later-described cap unit 170 in the third direction (X-axis direction) and moves one of the carriage units 120 onto the transport unit 130 in the maintenance area 20. In the present embodiment, the third direction is the same as the first direction and is the X-axis direction.

(Scanning part)
The scanning unit 150 is a moving unit that moves the table 11 on which the workpiece W is placed in the drawing area 10 in the X-axis direction. When drawing on the workpiece W, the scanning unit 150 is used to draw using the number of carriage units 120 necessary for drawing on the workpiece W having the maximum width that can be placed in the drawing area 10. . Note that a moving unit that moves the table 11 in the Y-axis direction, that is, sub-scans, may be provided between the scanning unit 150 and the table 11.

(Removable part)
FIG. 2 is a schematic cross-sectional view showing the configuration of the detachable portion and the cap unit. FIG. 2 shows the droplet discharge device 100 as viewed from the + Y-axis direction. As shown in FIG. 2, the head carriage 110 includes a carriage holding portion 161.

  The detachable unit 160 includes a carriage holding unit 161 in the head carriage 110 and a cap lifting unit 174 in the cap unit 170. The attachment / detachment unit 160 is a mechanism for attaching / detaching the carriage unit 120 to / from the head carriage 110 in the maintenance area 20.

  The carriage holding portion 161 is provided with pins 162 for positioning the carriage unit 120 with respect to the carriage holding portion 161. The pin 162 is provided on the surface in the + Z-axis direction of the carriage holding portion 161. By moving the carriage holding portion 161 in the Z-axis direction, a first flange portion 123a and a second flange portion of the carriage unit 120 described later are provided. It arrange | positions so that insertion is possible in the hole 123c provided in 123b.

(Cap unit)
As shown in FIG. 2, the cap unit 170 according to the present embodiment includes four cap units 170 for the four carriage units 121a to 121d in the maintenance area 20, and four cap units for the four carriage units 122a to 122d. A total of eight are arranged.

  Each cap unit 170 includes a cap portion 172, a cap base 173, and a cap lifting / lowering portion 174. The cap part 172 and the cap base 173 are connected to a suction mechanism (not shown).

  The carriage unit 120 and the cap unit 170 can be slid in the X-axis direction by the transfer unit 140 with the discharge head 50 facing the cap unit 172.

  The cap portion 172 protects the nozzle surface 58a by sealing (capping) it, and also serves as a flushing box that receives the discarded discharge of the discharge head 50 at a position slightly away from the discharge head 50. Used for maintenance of clogging.

  The cap base 173 is a substrate on which the cap portion 172 is disposed along the ejection head 50. The cap lifting / lowering unit 174 is a moving unit that moves the cap base 173 in the Z-axis direction to bring the ejection head 50 and the cap unit 172 into contact with or away from each other.

  When drawing is suspended, the cap lifting / lowering unit 174 is operated to move the cap base 173 in the + Z-axis direction so that each cap unit 172 comes into close contact with the corresponding nozzle surface 58a of each ejection head 50. Thereby, all the nozzles 51 of the ejection head 50 are sealed to prevent the ink from drying at each nozzle 51.

  The droplet discharge device 100 includes a suction mechanism (not shown) such as a suction pump or an ejector that sucks ink or the like from the nozzle 51 of the discharge head 50 via the cap portion 172. Waste liquid such as ink removed by suction by the suction mechanism is collected in a waste liquid tank.

  When drawing is once stopped after drawing is stopped, nozzle suction is prevented by driving the suction mechanism as necessary to suck the thickened ink from the nozzle 51. The suction operation by this suction mechanism is also used when initially filling ink.

(Control part)
FIG. 3 is a block diagram showing a control system of the droplet discharge device. As shown in FIG. 3, the control unit 180 of the droplet discharge device 100 includes a drive control unit 181 and an overall control unit 182.

  The drive control unit 181 includes a conveyance unit driver 61 that controls the conveyance unit 130, a transfer unit driver 62 that controls the transfer unit 140, a scanning unit driver 63 that controls the scanning unit 150, and an attachment / detachment unit that controls the attachment / detachment unit 160. A unit driver 64, a head driver 65 for controlling the ejection head 50, a maintenance driver (not shown), an ink supply driver (not shown), and the like.

  On the other hand, the overall control unit 182 includes a CPU 66, a ROM 67, a RAM 68, a hard disk 69, and an interface 71, which are connected to each other by an internal bus 72. The overall control unit 182 has a role of instructing and driving each unit of the apparatus.

  The CPU 66 inputs various detection signals, various commands, various data, and the like according to the control program in the ROM 67, processes various data in the RAM 68, and then outputs various control signals to the drive control unit 181 to The entire droplet discharge device 100 is controlled.

  The ROM 67 stores various control programs in addition to a discharge program for controlling driving of each discharge head 50 processed by the CPU 66.

  The RAM 68 includes various storage units such as a drawing data storage unit that stores drawing data for drawing on the workpiece W, and a position data storage unit that stores position data of the workpiece W and the ejection head 50, for control processing. Used as various work areas.

  A unit number determination program 73 and a unit selection program 75 are installed in the hard disk 69.

The unit number determination program 73 determines the required number of carriage units 120 used for drawing on the basis of the length of the workpiece W in the Y-axis direction (hereinafter referred to as workpiece width).
The unit selection program 75 selects the carriage unit 120 to be actually operated suitable for drawing in light of the calculation result of the unit number determination program 73 described above.

(Carriage unit)
As described above, the head carriage 110 includes a plurality of carriage units 120. One of the plurality of carriage units 120 will be described.

  FIG. 4 is an external perspective view showing an outline of the configuration of the carriage unit. As shown in FIG. 4, the carriage unit 120 includes a carriage body 120 a having a rectangular parallelepiped shape, and a flange portion 123.

  The flange portion 123 has a pair of plate-like first flange portion 123a and second flange portion 123b provided on the + Z-axis direction side of both surfaces in the X-axis direction of the carriage body 120a.

  The first flange portion 123a and the second flange portion 123b are each provided with two holes 123c penetrating in the Z-axis direction. As described above, the hole 123c is used to position and attach / detach the carriage unit 120 to / from the attaching / detaching portion 160.

  The carriage body 120 a includes a discharge head 50 having a nozzle 51, a tube 124, a pressure control valve 125, an intermediate tank 126, a valve 127, and a tank 128.

  The carriage unit 120 is equipped with six ejection heads 50 and six tanks 128, and each ejection head 50 has a plurality of nozzles 51.

The tube 124 is connected to the ejection head 50, the pressure control valve 125, the intermediate tank 126, the valve 127, and the tank 128, and is a flow path for supplying ink.
In FIG. 4, only the configuration of the flow path connected to the discharge head 50 a in the discharge head 50 is illustrated, but the flow paths having the same configuration are also arranged for the other discharge heads 50.

  The pressure control valve 125 is an adjustment valve that adjusts the pressure of ink ejected from the nozzles 51 of the ejection head 50, and is provided at a position close to the ejection head 50. The discharge head 50 is supplied with ink whose water head pressure difference between the discharge head 50 and the intermediate tank 126 is adjusted by the pressure control valve 125, thereby reducing liquid dripping from the discharge head 50. Yes.

  The intermediate tank 126 is provided between the pressure control valve 125 and the valve 127, and is a storage for temporarily storing ink to be supplied to the ejection head 50 inside. The intermediate tank 126 is smaller than the tank 128 and disposed at a position close to the ejection head 50 so that the pressure of the ink ejected from the nozzles 51 of the ejection head 50 can be finely adjusted.

  The valve 127 is opened when drawing is performed in the drawing area 10 or when the ink is discarded and discharged from the nozzle 51 in the maintenance area 20, and is closed when ink is not supplied to the nozzle 51. The pressure of the ink in 124 is adjusted.

  The tank 128 is a storage that stores ink therein to supply ink to the ejection head 50. The tank 128 is of a cartridge type and includes an ink pack 40 that stores ink deaerated beforehand. Details will be described later.

  The number of the pressure control valves 125, the intermediate tank 126, the valve 127, and the tank 128 described above is the same as the number of ejection heads 50 arranged for each carriage unit 120, that is, 6 in the present embodiment. It is provided one by one.

  Therefore, the same type of ink may be ejected from the nozzle 51, and different types of ink may be ejected for each ejection head 50. In addition, ink can be ejected at different times.

  For example, in each carriage unit 120, red (R), green (G), and blue (B) light emitting layers are formed using each of the two ejection heads 50 arranged side by side in the Y-axis direction as one unit. The ink may be selected so that the ink is ejected, or the ink may be selected so that the ink that forms the hole injection layer and the hole transport layer is ejected.

  Further, for example, a plurality of types of inks whose components are adjusted for each product or each customer can be selected for each discharge head 50 and provided in the carriage unit 120.

(Ink pack)
FIG. 5 is an external perspective view showing the configuration of the ink pack. As shown in FIG. 5, the tank 128 includes an ink pack 40 inside. The ink pack 40 can store the ink in an airtight state, deforms as the ink decreases, and can use up the ink to the end.

  The ink pack 40 includes a liquid storage bag 41 and a communication part 45. The liquid containing bag 41 is formed in a bag shape by overlapping two flexible film members 42 and 43 having the same rectangular shape and heat-welding the edges of the four sides.

  For example, the film members 42 and 43 have a laminated structure in which a gas barrier layer such as aluminum deposited between thermoplastic resin layers such as polyethylene films is sandwiched.

  The film members 42 and 43 are formed of the thermoplastic resin layer and a resin that can be thermally welded, whereby the internal space of the liquid storage bag 41 is sealed.

  The communication portion 45 is a cylindrical supply port that is thermally welded to a side 44 that is one of the four sides of the liquid containing bag 41 between two film members 42 and 43. The inside and the outside of the storage bag 41 are communicated.

  The ink pack 40 is filled with ink from the communicating portion 45 using the liquid filling device, so that the ink pack 40 does not contain foreign matter and the like and the cleanliness is ensured in the ink pack 40. Ink can be retained.

  For this reason, if ink is ejected from the ejection head 50 using such an ink pack 40, ink with less foreign matter or the like can be stably ejected onto the work W in the drawing area 10. Here, the foreign matter includes dust mixed from the working environment such as metal powder and fibers, and gelled ink.

(Discharge head)
FIG. 6 is an external perspective view showing the configuration of the ejection head. As shown in FIG. 6, the discharge head 50 is a so-called double head, and includes an introduction portion 53, a head substrate 55, a head main body 56, and the like.

  The introduction part 53 includes two connection needles 54. The connection needle 54 is connected to the tank 128 via the tube 124, and ink is supplied to the flow path in the head (not shown) via the connection needle 54.

  The head substrate 55 is laminated on the introduction portion 53 and includes two connectors 59 that are electrically connected to the head driver 65 via a flexible flat cable (not shown).

  The head body 56 includes a pressure unit 57 and a nozzle plate 58. The pressurizing unit 57 is disposed on the head substrate 55, an in-head flow path for ink is disposed therein, and has a cavity including an actuator (not shown) such as a piezo element. The nozzle plate 58 includes two nozzle rows 52 and 52 arranged parallel to the nozzle surface 58a.

In the two nozzle rows 52 and 52, 180 nozzles 51 are arranged at substantially equal intervals, and are arranged on the nozzle plate 58 with a half nozzle pitch shifted from each other.
The nozzle pitch in this embodiment is approximately 140 μm. Therefore, when viewed from the direction orthogonal to the nozzle row 52, 360 nozzles 51 are arranged at a nozzle pitch of about 70 μm.

  When a drive waveform as an electric signal is applied from the head driver 65 to the actuator, the ejection head 50 changes in volume of the cavity provided for each nozzle 51 of the pressurizing unit 57, and the pump action thereby causes the cavity to enter the cavity. The filled ink is pressurized, and the ink can be ejected as droplets from the nozzle 51 communicating with the cavity.

  The actuator is not limited to a piezo element, and may be, for example, an electrothermal conversion element such as a heater that discharges ink as droplets from the nozzle 51, or an electromechanical conversion element that deforms a diaphragm that forms a cavity with static electricity.

<Selection of carriage unit>
The selection of the carriage unit 120 is determined as follows.
First, when starting drawing on the workpiece W, the CPU 66 activates the unit number determination program 73 and calculates the necessary number of carriage units 120 based on the workpiece width.

  For example, the workpiece W to be set has workpiece widths of 500 mm, 680 mm, and 880 mm. On the other hand, each carriage unit 120 is 271 mm wide and can be drawn in the Y-axis direction.

  That is, in the present embodiment, two carriage units 120 are assigned to drawing for a 500 mm workpiece W, three carriage units 120 for 680 mm, and four carriage units 120 for 880 mm. I have to.

  As a result, it is possible to perform drawing in which the tact time is reduced by the single main scanning (forward movement), that is, the line printing method, over the entire area of the workpiece W of each workpiece width. Therefore, for example, when the workpiece width is input as 880 mm, the unit number determination program 73 determines to perform drawing with the four carriage units 120.

  When the necessary number of carriage units 120 is determined, the unit selection program 75 is operated by the CPU 66. The unit selection program 75 selects the carriage unit 120 that actually operates based on the number of units determined by the unit number determination program 73.

<Method of transferring the carriage unit>
A method for transferring (replacement) the carriage unit 120 will be described with reference to FIGS. 7, FIG. 8, and FIG. 13 are external plan views of the droplet discharge device 100. As in FIG. 1, the droplet discharge device 100 is viewed from the + Z-axis direction. FIGS. 9 to 12 and FIGS. 14 to 17 are schematic cross-sectional views showing the configurations of the attaching / detaching portion 160 and the cap unit 170, and as in FIG. 2, the droplet discharge device 100 is viewed from the + Y-axis direction. .

  In the following description, the method of changing the arrangement of the carriage unit 120 from the state shown in FIG. 7 (this is called the first state) to the state shown in FIG. 8 (this is called the second state) is taken as an example. I will explain.

  As shown in FIG. 7, the first state is a state in which the first carriage unit 121 is waiting on the + X axis direction side of the maintenance area 20, and the second carriage unit 122 is in the drawing area 10. The drawing is in progress.

  As shown in FIG. 8, the second state is a state in which the first carriage unit 121 is drawing in the drawing area 10, and the second carriage unit 122 is in the −X axis direction of the maintenance area 20. It is in a state waiting on the side.

  Specifically, as shown in FIG. 7, first, the transport unit 130 is operated to transport the second carriage unit 122 that has been drawing in the drawing area 10 to the maintenance area 20. FIG. 1 described above shows a state after the second carriage unit 122 is transported to the maintenance area 20.

  The attachment / detachment unit 160 is operated to remove the carriage units 122 a to 122 d of the second carriage unit 122 from the head carriage 110 of the transport unit 130 and move them to the transfer unit 140. Hereinafter, one carriage unit 120 among the four carriage units 120 will be described.

  As shown in FIG. 9, the cap lifting / lowering portion 174 is moved in the + Z-axis direction, and the ejection head 50 of the second carriage unit 122 is brought into contact with the cap portion 172 corresponding to the ejection head 50 to seal. As a result, the ejection head 50 is maintained in a state where the nozzle 51 is prevented from being dried.

  As shown in FIG. 10, the cap lifting / lowering portion 174 is further moved in the + Z-axis direction to remove the pin 162 from the hole 123 c and release the second carriage unit 122 from the carriage holding portion 161.

  As shown in FIG. 11, in the X-axis direction, the carriage holding portions 161 holding the second carriage unit 122 from both sides are slid to the outside of the second carriage unit 122, so that the second carriage unit 122 and the carriage are moved. The holding part 161 is prevented from overlapping in the Z-axis direction.

As shown in FIG. 12, the cap lifting / lowering portion 174 is moved in the −Z-axis direction, and the second carriage unit 122 is detached from the carriage holding portion 161.
At this time, similarly, the cap lifting / lowering portion 174 on which the first carriage unit 121 is mounted is moved in the −Z-axis direction.

  As illustrated in FIG. 13, the transfer unit 140 is operated, and the first carriage unit 121 and the second carriage unit 122 mounted on the transfer unit 140 are simultaneously slid in the −X axis direction. FIG. 13 shows a state after the first carriage unit 121 and the second carriage unit 122 are slid.

  At this time, the first carriage unit 121 is moved to the position where the first carriage unit 121 is mounted on the transport unit 130, that is, the position of the attachment / detachment unit 160, and the second carriage unit 122 is attached / detached as the first carriage unit 121 moves. The portion 160 is moved to the −X axis direction side.

  Next, as shown in FIG. 14, the cap lifting / lowering portion 174 on which the first carriage unit 121 is mounted is moved in the + Z-axis direction so that the hole 123 c is on the + Z-axis direction side with respect to the pin 162 of the carriage holding portion 161. To. In addition, although the cap raising / lowering part 174 on which the second carriage unit 122 is mounted is also moved in the + Z-axis direction synchronously, it is not always necessary to synchronize.

  As shown in FIG. 15, the carriage holding parts 161 arranged on both sides of the first carriage unit 121 are slid in the direction of the first carriage unit 121 in the X-axis direction. At this time, the carriage holding portion 161 is slid so that the pin 162 and the hole 123c of the first carriage unit 121 corresponding to the pin 162 overlap in the Z-axis direction.

  As shown in FIG. 16, the cap lifting / lowering portion 174 is moved in the −Z-axis direction, and the pin 162 of the first carriage unit 121 is inserted into the corresponding hole 123c. The cap lifting / lowering unit 174 on which the second carriage unit 122 is mounted may be moved in the −Z axis direction in synchronization.

  As shown in FIG. 17, the cap elevating unit 174 is further moved in the −Z axis direction to release the ejection head 50 of the first carriage unit 121 from the cap unit 172 and flush the cap unit 170. The nozzle surface 58a of each ejection head 50 is wiped.

  Thereafter, the attaching / detaching unit 160 is operated, the first carriage unit 121 is detached from the transfer unit 140 and placed on the transport unit 130, and the transport unit 130 is operated as shown in FIG. It is transported to the area 10 so that drawing can be performed.

  In this way, the carriage unit 120 can be transferred. That is, in the carriage unit 120 that performs drawing in the drawing area 10, the carriage unit 120 can be exchanged from the second carriage unit 122 to the first carriage unit 121.

From the above, according to the present embodiment, the following effects can be obtained.
(1) Using the conveyance unit 130, one of the first carriage unit 121 and the second carriage unit 122 is arranged in the drawing area 10, and the other carriage unit 120 is put on standby in the maintenance area 20. be able to.
For this reason, the ink of the other carriage unit 120 is exchanged or maintenance is performed while ejecting ink from the ejection head 50 of one carriage unit 120 without stopping the droplet ejection apparatus 100. be able to. That is, it is possible to provide the droplet discharge device 100 that can realize high productivity.

(2) The droplet discharge device 100 is provided with a cap unit 170 for maintaining the discharge head 50 in the maintenance area 20, and the transfer unit 140 is in a state where the discharge head 50 faces the cap unit 170. The carriage unit 120 and the cap unit 170 can be moved in the X-axis direction.
For this reason, the ejection head 50 that has moved to the maintenance area 20 can be made to face the cap unit 170, so that it is possible to prevent functional degradation due to drying of the ejection head 50 or the like.

(3) In the droplet discharge device 100, a plurality of discharge heads 50 and a plurality of tanks 128 are mounted on the first carriage unit 121 and the second carriage unit 122, and the plurality of discharge heads 50 are different types of ink. It has the discharge head 50 which discharges.
Therefore, when replacing the carriage unit 120 on which the ejection head 50 that ejects different types of ink is mounted, the carriage unit 120 can be replaced as a unit.

[Second Embodiment]
<Droplet ejection device>
FIG. 18 is an external plan view of the droplet discharge device according to the second embodiment. FIG. 19 is a schematic cross-sectional view illustrating the configuration of the detachable portion and the cap unit. As shown in FIGS. 18 and 19, the droplet discharge device 200 according to the present embodiment includes a head carriage 210, a transport unit 230, and an attachment / detachment unit 260 compared to the droplet discharge device 100 according to the first embodiment. , Each two are different. The parts common to the first embodiment will be denoted by the same reference numerals, description thereof will be omitted, and parts different from the first embodiment will be mainly described.

  The droplet discharge device 200 includes a head carriage 210, a carriage unit 120, a transport unit 230, a scanning unit 150 as a fourth moving unit, an attachment / detachment unit 260, a cap unit 170, and a control unit 180. ing.

  The conveyance unit 230 includes a first conveyance unit 231 as a first movement unit and a second conveyance unit 232 as a second movement unit. The first transport unit 231 and the second transport unit 232 are arranged side by side in the X-axis direction. The first transport unit 231 includes a first carriage unit 121, and the second transport unit 232 includes a second carriage unit 122.

  The first transport unit 231 and the second transport unit 232 independently drive a servo motor (not shown) provided in each of the first transport unit 231 and the second transport unit 232 so that the head carriage 210 provided in each of the first transport unit 231 and the second transport unit 232 is maintained with the drawing area 10. It is a moving means for reciprocating in the Y-axis direction with the area 20.

  The head carriage 210 includes a first head carriage 211 and a second head carriage 212. The first head carriage 211 has a number of first carriage units 121 necessary for drawing and is moved between the drawing area 10 and the maintenance area 20 by the first transport unit 231.

  Similarly, the second head carriage 212 is mounted with the number of second carriage units 122 necessary for drawing, and is moved between the drawing area 10 and the maintenance area 20 by the second transport unit 232.

  The attaching / detaching unit 260 attaches / detaches the second carriage unit 122 to / from the first transport unit 231 between the first attaching / detaching unit 261 that attaches / detaches the first carriage unit 121 and the second transport unit 232. A detachable portion 262.

From the above, according to the droplet discharge device 200 according to the present embodiment, the following effects can be obtained.
(1) As in the first embodiment, using the transport unit 230, one of the first carriage unit 121 and the second carriage unit 122 is arranged in the drawing area 10, and the other carriage is maintained. The area 20 can be made to wait.
Therefore, the ink of the other carriage unit 120 can be exchanged or maintenance can be performed while ejecting ink from the ejection head 50 of one carriage unit 120 without stopping the droplet ejection apparatus 200. That is, it is possible to provide the droplet discharge device 200 that can realize high productivity.

(2) The droplet discharge device 200 includes a first transport unit 231 and a second transport unit 232 as means for moving the carriage unit 120 between the drawing area 10 and the maintenance area 20. That is, two transport units for moving the carriage unit 120 are provided.
Therefore, the first carriage unit 121 mounted on the first transport unit 231 and the second carriage unit 122 mounted on the second transport unit 232 do not interfere with each other, and the drawing area 10 and the maintenance are maintained. It can be reciprocated between the area 20.
Therefore, for example, in the drawing area 10, drawing may be performed using both the first carriage unit 121 and the second carriage unit 122. For example, when drawing is performed using only the first carriage unit 121. The second carriage unit 122 can be replaced with ink or maintained in the maintenance area 20.

(3) Since the droplet discharge device 200 includes the first transport unit 231 that transports the first carriage unit 121 and the second transport unit 232 that transports the second carriage unit 122, the first carriage Drawing and maintenance can be performed without moving the unit 121 and the second carriage unit 122 in the X-axis direction.
Therefore, the transfer unit 140 described in the first embodiment is not necessary, and the maintenance area 20 can be reduced to reduce the size of the apparatus.

[Third Embodiment]
<Electro-optical device>
Next, as an electro-optical device (flat panel display) manufactured using the droplet discharge device 100 or the droplet discharge device 200 described in the above embodiment, a color filter, a liquid crystal display device, an organic EL device, a plasma display is used. (PDP device), electron emission device (FED device, SED device), and an active matrix substrate included in these display devices can be cited as examples.

  Here, the active matrix substrate is a substrate on which a thin film transistor and a source line and a data line electrically connected to the thin film transistor are arranged. As an example of these electro-optical devices, an organic EL device and a manufacturing method thereof will be described.

(Organic EL device)
FIG. 20 is a cross-sectional view of the main part of the display area of the organic EL device according to the third embodiment. In the organic EL device 600 as the electro-optical device of this embodiment, a circuit element unit 602, a light emitting element unit 603, and a cathode 604 are stacked on a substrate 601.

  In the organic EL device 600, light emitted from the light emitting element portion 603 to the substrate 601 side is transmitted through the circuit element portion 602 and the substrate 601 and emitted to the observer side, and the light emitting element portion 603 is opposite to the substrate 601. After the light emitted to the side is reflected by the cathode 604, the light passes through the circuit element portion 602 and the substrate 601 and is emitted to the observer side.

  A base protective film 606 made of a silicon oxide film is disposed between the substrate 601 and the circuit element portion 602, and an island-shaped semiconductor film 607 made of polycrystalline silicon is disposed on the base protective film 606.

  In the semiconductor film 607, a drain region 607a and a source region 607b are formed by implanting high concentration cations. A central portion where no positive ions are implanted is a channel region 607c.

  In the circuit element portion 602, a transparent gate insulating film 608 covering the base protective film 606 and the semiconductor film 607 is disposed, and the position corresponding to the channel region 607c of the semiconductor film 607 on the gate insulating film 608 is, for example, Al A gate electrode 609 made of Mo, Ta, Ti, W or the like is disposed.

  On the gate insulating film 608 and the gate electrode 609, a transparent first interlayer insulating film 611a and a second interlayer insulating film 611b are disposed. In addition, contact holes 612a and 612b that penetrate through the first interlayer insulating film 611a and the second interlayer insulating film 611b and communicate with the drain region 607a and the source region 607b of the semiconductor film 607, respectively, are disposed.

  A transparent pixel electrode 613 made of ITO or the like is patterned and formed on the second interlayer insulating film 611b, and the pixel electrode 613 is connected to the drain region 607a through the contact hole 612a.

  A power supply line 614 is provided on the first interlayer insulating film 611a, and the power supply line 614 is connected to the source region 607b through a contact hole 612b.

  Thus, the driving thin film transistors 615 connected to the pixel electrodes 613 are arranged in the circuit element portion 602, respectively.

  The light emitting element portion 603 includes a functional layer 617 as a film forming portion stacked on each of the plurality of pixel electrodes 613, and a bank portion that partitions each functional layer 617 provided between each pixel electrode 613 and the cathode 604. 618.

  The pixel electrode 613, the functional layer 617, and the cathode 604 disposed on the functional layer 617 constitute a light emitting element. The pixel electrodes 613 are formed by patterning in a substantially rectangular shape in plan view, and bank portions 618 are disposed between the pixel electrodes 613.

The bank unit 618 includes an inorganic bank layer 618a and an organic bank layer 618b. The inorganic bank layer 618a is formed of an inorganic material such as SiO, SiO ₂ or TiO ₂ , for example. The organic bank layer 618b is laminated on the inorganic bank layer 618a and is formed of a resist having excellent heat resistance and solvent resistance such as acrylic resin and polyimide resin.

  A part of the bank portion 618 is formed in a state of running over the peripheral edge portion of the pixel electrode 613. Between each bank part 618, the opening part 619 which was expanded gradually upwards with respect to the pixel electrode 613 is formed.

  The functional layer 617 includes a hole injection / transport layer 617a stacked on the pixel electrode 613 and a light emitting layer 617b disposed on the hole injection / transport layer 617a in the opening 619. Another functional layer such as an electron transport layer may be further stacked adjacent to the light emitting layer 617b.

  The hole injection / transport layer 617a is a layer that transports holes from the pixel electrode 613 side and injects them into the light emitting layer 617b. The hole injection / transport layer 617a is formed by ejecting ink containing a known hole injection / transport layer forming material.

  The light-emitting layer 617b emits light in red (R), green (G), or blue (B), and is formed by ejecting ink containing a light-emitting layer forming material (light-emitting material).

  As the ink solvent, it is preferable to use a known material insoluble in the hole injection / transport layer 617a. By using such a solvent as the ink for forming the light-emitting layer 617b, the light-emitting layer 617b can be formed without re-dissolving the hole injection / transport layer 617a.

  The light emitting layer 617b is configured such that holes injected from the hole injection / transport layer 617a and electrons injected from the cathode 604 are recombined in the light emitting layer 617b to emit light.

  The cathode 604 is disposed so as to cover the entire surface of the light emitting element portion 603, and plays a role of flowing current to the functional layer 617 in a pair with the pixel electrode 613. Further, a sealing member (not shown) is disposed on the cathode 604.

(Method for manufacturing organic EL device)
Next, a method for manufacturing the organic EL device 600 will be described with reference to FIGS.
FIG. 21 is a flowchart illustrating a method for manufacturing the organic EL device. As shown in FIG. 21, the manufacturing method of the organic EL device 600 includes a bank part forming step (S111), a surface treatment step (S112), a hole injection / transport layer forming step (S113), and a light emitting layer forming step (S114). And a counter electrode forming step (S115).
In addition, the manufacturing method of the organic EL device 600 is not limited to the example illustrated, and the process may be removed or added as necessary.

(1) Step S111 Bank Part Formation Process FIG. 22 is a process diagram for explaining the formation of an inorganic bank layer. As shown in FIG. 22, an inorganic bank layer 618a is formed on the second interlayer insulating film 611b. The inorganic bank layer 618a is formed by forming an inorganic film at a formation position and then patterning the inorganic film by a photolithography technique or the like. At this time, a part of the inorganic bank layer 618 a is formed so as to overlap with the peripheral edge of the pixel electrode 613.

  FIG. 23 is a process diagram for explaining the formation of the organic bank layer. As shown in FIG. 23, after forming the inorganic bank layer 618a, the organic bank layer 618b is formed on the inorganic bank layer 618a. Similarly to the inorganic bank layer 618a, the organic bank layer 618b is also formed by patterning using a photolithography technique or the like.

  In this way, the bank portion 618 is formed. Accordingly, an opening 619 opening upward with respect to the pixel electrode 613 is formed between the bank portions 618. The opening 619 defines a pixel region.

(2) Step S112 Surface Treatment Step Next, a lyophilic process and a liquid repellent process are performed. The regions to be subjected to the lyophilic treatment are the first stacked portion 618aa of the inorganic bank layer 618a and the electrode surface 613a of the pixel electrode 613. These regions are subjected to lyophilic surface treatment by, for example, plasma treatment using oxygen as a treatment gas. The plasma treatment also serves to clean the ITO that is the pixel electrode 613.

  On the other hand, the lyophobic treatment is performed on the wall surface 618s of the organic bank layer 618b and the upper surface 618t of the organic bank layer 618b, and the surface is fluorinated (liquid repellency), for example, by plasma treatment using tetrafluoromethane as a processing gas. Processed).

  By performing the surface treatment step, when the functional layer 617 is formed using the ejection head 50, the ink can be reliably landed on the pixel region. Further, the ink that has landed on the pixel region can be prevented from overflowing from the opening 619.

Through the above steps, an organic EL device substrate 600A is obtained.
The organic EL device substrate 600A is placed on the droplet discharge device 100 shown in FIG. 1 or the table 11 of the droplet discharge device 200 shown in FIG. 18, and the following hole injection / transport layer forming step (S113). ) And the light emitting layer forming step (S114).

(3) Step S113 Hole Injection / Transport Layer Formation Step FIG. 24 is a process diagram illustrating the process of forming the hole injection / transport layer. As shown in FIG. 24, ink containing a material for forming the hole injection / transport layer is ejected from the ejection head 50 into each opening 619 that is a pixel region.

  FIG. 25 is a process diagram illustrating a state in which the hole injection / transport layer is formed. As shown in FIG. 25, a drying process and a heat treatment are performed to evaporate the solvent contained in the ink, thereby forming a hole injection / transport layer 617a on the pixel electrode (electrode surface 613a) 613.

(4) Step S114 Light-Emitting Layer Formation Step As described above, in order to prevent re-dissolution of the hole injection / transport layer 617a, the hole injection / transport layer 617a is used as a solvent for the ink used for forming the light-emitting layer. It is preferable to use an insoluble solvent.

  Further, since the hole injection / transport layer 617a has low affinity for the solvent, the hole injection / transport layer can be used even when the ink containing the light emitting layer forming material and the solvent is ejected onto the hole injection / transport layer 617a. There is a possibility that 617a and the light emitting layer 617b cannot be adhered to each other or the light emitting layer 617b cannot be applied uniformly.

  Therefore, in order to increase the affinity of the surface of the hole injection / transport layer 617a with respect to ink, it is preferable to perform surface treatment (surface modification treatment) before forming the light emitting layer. This surface treatment is performed by applying a surface modifying material, which is the same solvent as the ink solvent used for forming the light emitting layer or a similar solvent, onto the hole injection / transport layer 617a and drying it. .

  By performing such a treatment, the surface of the hole injection / transport layer 617a is easily adapted to the solvent, and the ink is easily applied uniformly to the hole injection / transport layer 617a in the subsequent steps.

  FIG. 26 is a process diagram illustrating a process of forming a blue light emitting layer. As shown in FIG. 26, a predetermined amount of ink corresponding to one of the colors (blue (B) in the example of FIG. 26) is ejected into the pixel region, that is, the opening 619. The ink ejected into the opening 619 spreads on the hole injection / transport layer 617a and fills the opening 619.

  Even when the ink deviates from the pixel area and lands on the upper surface 618t of the bank portion 618, the upper surface 618t is subjected to the liquid repellent treatment as described above, so that the ink rolls into the opening 619. It is easy.

  FIG. 27 is a process diagram for explaining a state in which a blue light emitting layer is formed. As shown in FIG. 27, a drying process or the like is performed to dry the ejected ink, the solvent contained in the ink is evaporated, and the light emitting layer 617b is formed on the hole injection / transport layer 617a. In FIG. 27, a light emitting layer 617b corresponding to blue (B) is formed.

  FIG. 28 is a process diagram for explaining a state where the light emitting layers of the respective colors are formed. As shown in FIG. 28, the same steps as in the case of the light emitting layer 617b corresponding to blue (B) described above are sequentially performed to form the light emitting layers 617b corresponding to red (R) and green (G), respectively.

The formation order of the light emitting layer 617b is not limited to the illustrated order, and may be formed in any order. For example, the order of formation can be determined according to the ink.
Further, as the arrangement pattern of three colors of red (R), green (G), and blue (B), there are a stripe arrangement, a mosaic arrangement, a delta arrangement, and the like.

  As described above, the functional layer 617, that is, the hole injection / transport layer 617a and the light emitting layer 617b are formed on the pixel electrode 613.

(5) Step S115 Counter Electrode Formation Process FIG. 29 is a process diagram for explaining the formation of the cathode. As shown in FIG. 29, a cathode 604 (counter electrode) is formed on the entire surface of the light emitting layer 617b and the organic bank layer 618b by, for example, vapor deposition, sputtering, CVD, or the like.

In the present embodiment, for example, the cathode 604 is formed by laminating a calcium layer and an aluminum layer. On top of the cathode 604, an Al film, an Ag film, and a protective layer such as SiO ₂ or SiN for preventing oxidation thereof are appropriately provided as electrodes.

  In this manner, after forming the cathode 604, the organic EL device 600 is obtained by performing other processes such as a sealing process for sealing the upper part of the cathode 604 with a sealing member and a wiring process.

  Further, as other electro-optical devices, devices such as metal wiring formation, lens formation, resist formation, and light diffuser formation are conceivable. By using the droplet discharge device 100 or the droplet discharge device 200 described above for manufacturing various electro-optical devices (devices), various electro-optical devices can be efficiently manufactured.

[Fourth Embodiment]
<Electronic equipment>
Next, the electronic apparatus of this embodiment will be described with reference to FIGS. FIG. 30 is a schematic diagram illustrating a notebook personal computer, and FIG. 31 is a schematic diagram illustrating a flat-screen television (TV).

  As shown in FIG. 30, a personal computer 1000 as an electronic apparatus includes a main body 1001 and a display unit 1003. Further, the main body portion 1001 includes a keyboard 1002, and the display unit 1003 includes a display portion 1004.

  The display unit 1003 is rotatably supported with respect to the main body 1001 via a hinge structure. In the personal computer 1000, the organic EL device 600 is mounted on the display unit 1004.

  As shown in FIG. 31, a thin-screen television (TV) 1100 as an electronic device has the organic EL device 600 of the above embodiment mounted on a display portion 1101.

  That is, according to these electronic devices, the personal computer 1000 and the thin TV 1100 that can realize high productivity can be provided.

  The electronic device on which the organic EL device 600 is mounted is not limited to the personal computer 1000 or the thin TV 1100. For example, an electronic apparatus having a display unit such as a portable information terminal such as a smartphone or a POS, a navigator, a viewer, a digital camera, or a monitor direct-view video recorder can be given.

  DESCRIPTION OF SYMBOLS 10 ... Drawing area, 11 ... Table, 20 ... Maintenance area, 50 ... Discharge head, 50a ... Discharge head, 51 ... Nozzle, 100 ... Droplet discharge device, 120 ... Carriage unit, 120a ... Carriage main body, 121 ... 1st carriage Unit 122 122 second carriage unit 128 tank 130 transport unit 140 transfer unit 150 scanning unit 160 attaching / detaching unit 170 cap unit 200 droplet discharge device 230 transport unit 231 ... 1st conveyance part, 232 ... 2nd conveyance part, 260 ... Attachment / detachment part, 261 ... 1st attachment / detachment part, 262 ... 2nd attachment / detachment part, 600 ... Organic EL apparatus, 1000 ... Personal computer, 1100

Claims (15)

A liquid droplet ejection apparatus that ejects functional liquid as liquid droplets from the nozzles of the ejection head while relatively moving the ejection head and the work disposed in the drawing area in a first direction,
A first carriage unit and a second carriage unit each comprising a tank for supplying the functional liquid to the ejection head and the ejection head;
First moving means for moving the first carriage unit in a direction intersecting with the first direction so as to be movable between the drawing area and the maintenance area;
A second moving unit configured to move the second carriage unit in a direction intersecting the first direction so as to be movable between the drawing area and the maintenance area;
The liquid droplet ejection apparatus, wherein the first moving unit and the second moving unit are arranged side by side in the first direction.   The maintenance area is provided with a cap unit for maintaining the discharge head, and the first moving means and the second moving means include the first carriage so that the discharge head faces the cap unit. The droplet discharge device according to claim 1, wherein the unit and the second carriage unit are moved to the maintenance area.   3. An attachment / detachment part for attaching / detaching the first carriage unit or the second carriage unit between the cap unit and the first moving unit and the second moving unit. The droplet discharge device according to 1.   2. The first moving unit and the second moving unit move the first carriage unit and the second carriage unit from the drawing area to the maintenance area when the workpiece is replaced. The droplet discharge device according to claim 3. A liquid droplet ejection apparatus that ejects functional liquid as liquid droplets from the nozzles of the ejection head while relatively moving the ejection head and the work disposed in the drawing area in a first direction,
A first carriage unit and a second carriage unit each comprising a tank for supplying the functional liquid to the ejection head and the ejection head;
A first moving unit configured to move one of the first carriage unit and the second carriage unit in a second direction intersecting the first direction so as to be movable between the drawing area and the maintenance area;
In the maintenance area, a third movement that moves the first carriage unit and the second carriage unit arranged in a third direction intersecting the second direction in the third direction to face the first moving means. Means,
An apparatus for ejecting liquid droplets, comprising: an attachment / detachment part for attaching / detaching one of the first carriage unit and the second carriage unit to / from the first moving unit.   The maintenance area is provided with a cap unit for maintaining the discharge head, and the third moving unit is configured such that the first carriage unit and the second carriage in a state where the discharge head faces the cap unit. The droplet discharge device according to claim 5, wherein a carriage unit and the cap unit are moved in the first direction.   The droplet according to claim 5 or 6, wherein the attaching / detaching part attaches / detaches the first carriage unit and the second carriage unit between the first moving means and the cap unit. Discharge device.   The liquid droplet ejection apparatus according to claim 5, wherein the cap unit is disposed along the first direction.   The liquid droplet ejection apparatus according to claim 5, wherein the third direction is substantially the same direction as the first direction. A fourth moving means for moving the table on which the workpiece is placed in the first direction;
The liquid droplet ejection apparatus according to claim 9, comprising a number of the carriage units necessary for performing drawing on the workpiece having the maximum width that can be placed on the table.   The said 1st moving means moves the said 1st carriage unit or the said 2nd carriage unit located in a drawing area from the said drawing area to the said maintenance area at the time of replacement | exchange of the said workpiece | work. The droplet discharge device according to any one of claims 1 to 10.   The first carriage unit and the second carriage unit include a plurality of the ejection heads and a plurality of the tanks, and the plurality of ejection heads include ejection heads that eject different types of functional liquids. The liquid droplet ejection apparatus according to claim 1, wherein the liquid droplet ejection apparatus is a liquid crystal display apparatus.   An electro-optical device using the droplet discharge device according to any one of claims 1 to 12 and having a film forming unit formed on the workpiece with the functional liquid.   13. A method of manufacturing an electro-optical device, comprising: using the droplet discharge device according to claim 1; and forming a film forming portion with the functional liquid on the workpiece. .   An electronic apparatus comprising the electro-optical device according to claim 13.

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