JP2017069998A5 - - Google Patents

Claims (8)

Possess a longitudinal direction and a lateral direction perpendicular to the longitudinal direction, and a silicon substrate which is a substrate {110},
A piezoelectric element provided on the silicon substrate and having a first electrode, a second electrode, and a piezoelectric body positioned between the first electrode and the second electrode;
A protrusion provided at the distal end in the longitudinal direction and in contact with the driven body;
Equipped with a,
The piezoelectric drive device, wherein the Young's modulus in the short direction of the silicon substrate is smaller than the Young's modulus in the longitudinal direction of the silicon substrate. In claim 1 ,
The longitudinal direction of the silicon substrate is a <110> direction,
The piezoelectric drive device, wherein the lateral direction of the silicon substrate is a <100> direction. In claim 1 ,
The longitudinal direction of the silicon substrate is a <111> direction,
The piezoelectric drive device, wherein the lateral direction of the silicon substrate is a <112> direction. In any one of Claims 1 thru | or 3 ,
The piezoelectric driving device, wherein the piezoelectric body has a thickness of 50 nm or more and 20 μm or less. 2 the direction of Young's modulus for orthogonal Unlike one another in a plane, a step of preparing a silicon wafer which is a substrate {110},
Forming a piezoelectric element having a first electrode, a second electrode, and a piezoelectric body located between the first electrode and the second electrode on the silicon wafer;
Processing the silicon wafer to take out a chip having a silicon substrate having a longitudinal direction and a transverse direction orthogonal to the longitudinal direction, and the piezoelectric element formed on the silicon substrate;
Attaching a protrusion contacting the driven body to the tip in the longitudinal direction of the chip;
Including
A method of manufacturing a piezoelectric drive device, wherein the chips are arranged in the silicon wafer such that a Young's modulus in the short direction of the silicon substrate is smaller than a Young's modulus in the longitudinal direction of the silicon substrate. A piezoelectric driving device according to any one of claims 1 to 4 ,
A rotor rotated by the piezoelectric drive device;
Equipped with a motor. A plurality of links,
A joint part connecting a plurality of the link parts;
The piezoelectric drive device according to any one of claims 1 to 4 , wherein a plurality of the link portions are rotated by the joint portions;
Equipped with a robot. A piezoelectric driving device according to any one of claims 1 to 4 ,
A tube that transports the liquid;
A plurality of fingers for closing the tube by driving the piezoelectric driving device;
Comprising a pump.