JP2017063928A - Ultrasonic measurement apparatus and ultrasonic probe - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a mechanical scanning type ultrasonic measurement apparatus capable of easily executing highly accurate ultrasonic measurement, and an ultrasonic probe.SOLUTION: An ultrasonic measurement apparatus 1 comprises: an ultrasonic wave device 32 performing at least one of transmission and reception of ultrasonic waves from one surface side; a first acoustic matching layer 21 being disposed at the one surface side of the ultrasonic wave device 32 and having a first surface of an opposite side to one surface; a second acoustic matching layer 22 being disposed at the first surface side of the first acoustic matching layer 21 and having a second surface brought into contact with the first surface; and a movement mechanism 23 relatively moving the ultrasonic wave device 32, the first acoustic matching layer 21 and the second acoustic matching layer 22 in an in-plane direction of the first surface and the second surface.SELECTED DRAWING: Figure 3

Description

  The present invention relates to an ultrasonic measurement device and an ultrasonic probe.

2. Description of the Related Art Conventionally, as an ultrasonic measurement device that transmits and receives ultrasonic waves to acquire an ultrasonic image, the ultrasonic transmission / reception direction of the ultrasonic waves can be mechanically changed. An acoustic wave measuring device is known (see, for example, Patent Document 1).
In Patent Document 1, an ultrasonic probe (ultrasonic probe) in which a piezoelectric element is accommodated in an airtight container, the piezoelectric element is movable in the airtight container, and the airtight container is filled with oil. Acoustic probe).

  In the ultrasonic probe described in Patent Document 1, a space is formed between the piezoelectric element and the inner wall of the casing so that the piezoelectric element can be slidably attached to the casing, and the space is filled with oil. Has been. As this oil, oil whose acoustic impedance is close to that of a living body to be measured is used to reduce ultrasonic propagation loss.

JP 2007-267817 A

  However, in the ultrasonic probe described in Patent Document 1, when bubbles are mixed in the housing, the ultrasonic waves are attenuated by the bubbles, and the measurement accuracy of ultrasonic measurement is lowered. Therefore, in order to perform high-accuracy ultrasonic measurement, it is necessary to prevent air bubbles from being mixed during oil filling, for example, by repeatedly performing a deaeration process and an oil injection process, which takes time for assembly. There was a problem. Moreover, even after assembly, there is a risk that bubbles may be mixed in or oil may leak due to a temperature change or the like. In this case, since it is necessary to remove the mixed bubbles or to refill the oil, there is a problem that the maintenance is troublesome. Therefore, high-accuracy ultrasonic measurement cannot be easily performed.

  An object of the present invention is to provide a mechanical scan type ultrasonic measuring apparatus and an ultrasonic probe capable of easily performing high-accuracy ultrasonic measurement.

  An ultrasonic measurement apparatus according to an application example of the present invention includes an ultrasonic device that performs at least one of transmission and reception of ultrasonic waves from one surface side, and is disposed on the one surface side of the ultrasonic device. Is a first acoustic matching portion having a first surface on the opposite side, and a second acoustic matching portion having a second surface disposed on the first surface side of the first acoustic matching portion and in contact with the first surface; A moving mechanism that relatively moves the ultrasonic device, the first acoustic matching unit, and the second acoustic matching unit in an in-plane direction of the first surface and the second surface. And

In this application example, the first surface of the first acoustic matching unit is disposed so as to contact the second surface of the second acoustic matching unit, and the moving mechanism includes the ultrasonic device, the first acoustic matching unit, and the second acoustic matching unit. The part is relatively moved in the in-plane direction of the first surface and the second surface. That is, in this application example, the first acoustic matching unit and the ultrasonic device are integrally moved relative to the second acoustic matching unit while the second acoustic matching unit is in contact with the measurement target. The one acoustic matching portion and the second acoustic matching portion are slid.
In such a configuration, the acoustic impedance of the first acoustic matching unit and the second acoustic matching unit is appropriately set according to the acoustic impedance of the measurement target and the ultrasonic device, so that The ultrasonic wave can be propagated efficiently.
Further, since the first acoustic matching portion is slid with respect to the second surface of the second acoustic matching portion, no space is formed between the first acoustic matching portion and the second acoustic matching portion. For this reason, there is no need to fill the space with oil unlike conventional mechanical scanning ultrasonic measurement devices, where a space is formed from the ultrasonic device to the measurement target, making assembly and maintenance easy. It is.
As described above, according to the ultrasonic measurement apparatus of this application example, it is possible to easily perform highly accurate ultrasonic measurement.

In the ultrasonic measurement apparatus according to this application example, it is preferable that the acoustic impedance becomes smaller or larger in the order of the ultrasonic device, the first acoustic matching unit, and the second acoustic matching unit.
In this application example, the acoustic impedance decreases or increases in the order of the ultrasonic device, the first acoustic matching unit, and the second acoustic matching unit. That is, when the acoustic impedance of the ultrasonic device is larger than the acoustic impedance to be measured, the acoustic impedances of the ultrasonic device, the first acoustic matching unit, and the second acoustic matching unit are set so that the acoustic impedance becomes smaller in order. By doing so, ultrasonic waves can be propagated efficiently. Further, when the acoustic impedance of the ultrasonic device is smaller than the acoustic impedance of the measurement target, the ultrasonic wave can be efficiently propagated by setting the acoustic impedance so that the acoustic impedance becomes smaller in turn.

  Here, when a space is formed between the first acoustic matching layer on the ultrasonic device side and the second acoustic matching layer in contact with the measurement target, and the space is filled with oil, the living body is measured. Then, the acoustic impedance (for example, 1.3 MRayls) of oil (mineral oil) is usually smaller than that of a living body, and the acoustic impedance of oil is minimized in the ultrasonic wave propagation path. For this reason, the propagation efficiency of ultrasonic waves between the oil and another adjacent medium may be reduced, and the measurement accuracy may be reduced. On the other hand, in this application example, since the acoustic impedance changes so as to increase or decrease in order from the ultrasonic device toward the second acoustic matching unit, the decrease in measurement accuracy due to the decrease in the propagation efficiency is suppressed. be able to.

In the ultrasonic measurement apparatus according to this application example, it is preferable that a biasing unit that biases the first acoustic matching unit toward the second acoustic matching unit is provided.
In this application example, the first acoustic matching portion and the second acoustic matching portion can be brought into close contact with each other by biasing the first acoustic matching portion toward the second acoustic matching portion by the biasing portion. In addition, even when the first acoustic matching unit and the second acoustic matching unit are relatively moved, the state in which the first acoustic matching unit and the second acoustic matching unit are in close contact with each other can be more reliably maintained. Thereby, the fall of the measurement precision by the adhesiveness of a 1st acoustic matching part and a 2nd acoustic matching part falls can be suppressed.

In the ultrasonic measurement apparatus according to this application example, the acoustic matching that reduces friction between the first surface and the second surface when the first acoustic matching unit and the second acoustic matching unit are relatively moved. It is preferable to provide an alignment material supply unit for supplying material.
In this application example, a matching material supply unit that supplies an acoustic matching material that reduces friction between the first surface and the second surface, that is, between the first acoustic matching unit and the second acoustic matching unit is provided. Thereby, the friction at the time of a 1st acoustic matching part and a 2nd acoustic matching part being slid can be reduced. Therefore, the first acoustic matching unit and the second acoustic matching unit can be smoothly moved relative to each other, and the movement by the moving mechanism can be appropriately performed. Moreover, abrasion with a 1st acoustic matching part and a 2nd acoustic matching part can be suppressed.

In the ultrasonic measurement apparatus according to this application example, the matching material supply unit is more than the first acoustic matching unit in a moving direction of relative movement of the ultrasonic device and the first acoustic matching unit with respect to the second acoustic matching unit. It is preferable to have a supply port for supplying the acoustic matching material on the front side.
In this application example, the matching material supply unit supplies the acoustic matching material from the supply port that is located in front of the first acoustic matching unit in the movement direction of the relative movement with respect to the second acoustic matching unit. Thereby, after supplying a gel with respect to the 2nd surface of a 2nd acoustic matching part, the 1st surface of a 1st acoustic matching part can be slid.

In the ultrasonic measurement apparatus according to this application example, the first surface of the first acoustic matching unit is slidably contacted with the second surface, and the distance from the slidable contact surface along the moving direction is as follows. It is preferable to have a curved surface that curves away from the second surface.
In this application example, the first surface of the first acoustic matching unit has a sliding surface and a curved surface. Thereby, the acoustic matching material supplied to the front side in the movement direction with respect to the sliding portion between the first acoustic matching portion and the second acoustic matching portion is changed between the first acoustic matching portion and the second acoustic matching portion. It can be effectively supplied to the sliding part.

In the ultrasonic measurement apparatus according to this application example, the moving mechanism relatively moves the ultrasonic device and the first acoustic matching unit along a first direction, and the ultrasonic device moves along the first direction. Having a one-dimensional array structure having an array region in which a plurality of ultrasonic transducer units are arranged, the second acoustic matching unit has an acoustic lens provided on a surface opposite to the second surface; The acoustic lens is provided at a position overlapping a moving range of the array region according to the movement of the ultrasonic device by the moving mechanism in a plan view seen from the ultrasonic device side, and passes through the center of the array region. It is preferable to have a focal position for converging the ultrasonic wave transmitted from the ultrasonic device in a virtual plane orthogonal to the array region and parallel to the first direction.
Here, the ultrasonic transducer unit includes at least one ultrasonic transducer and functions as one of a transmission channel, a reception channel, and a transmission / reception channel in the one-dimensional array. In the application example, the first direction is a so-called scan direction in the one-dimensional array.
In this application example, the ultrasonic device has a one-dimensional array structure, and is arranged so that the scan direction coincides with the first direction. The acoustic lens is provided along the first direction at a position overlapping the moving range of the array region in accordance with the movement of the ultrasonic device in the plan view, passes through the center of the array region, and is orthogonal to the array region. And a focal position in a virtual plane parallel to the first direction.
In such a configuration, the ultrasonic device is relatively moved along the first direction, and ultrasonic measurement is performed at a plurality of measurement positions, whereby measurement results regarding the cross section along the virtual plane at each measurement position ( For example, a tomographic image) can be acquired.

In the ultrasonic measurement apparatus according to this application example, the moving mechanism relatively moves the ultrasonic device and the first acoustic matching unit along a first direction, and the ultrasonic device is orthogonal to the first direction. A one-dimensional array structure having an array region in which a plurality of ultrasonic transducer portions are arranged along a second direction, and the second acoustic matching portion is disposed on a surface opposite to the second surface, A plurality of acoustic lenses arranged along a first direction, wherein the acoustic lens has a dimension in the first direction equal to or larger than the dimension of the array region, and is a plane viewed from the ultrasonic device side; It is preferable to have a focal position for converging the ultrasonic wave transmitted from the ultrasonic device in a virtual plane that passes through the center of the acoustic lens in vision and is orthogonal to the first direction.
Here, in this application example, the second direction is a so-called scan direction in the one-dimensional array.
In this application example, the ultrasonic device has a one-dimensional array structure, and is arranged so that the scan direction coincides with the second direction. The acoustic lens has a dimension in the first direction equal to or larger than the dimension of the array region. Further, the acoustic lens has a focal position for converging the ultrasonic wave transmitted from the ultrasonic device in a virtual plane passing through the center of the acoustic lens and orthogonal to the first direction in the plan view.
In such a configuration, the ultrasonic device is moved along the first direction, and the ultrasonic measurement is performed with the position where the center of the array region overlaps the center of the acoustic lens in the planar view as a measurement position. The measurement result regarding the cross section along the virtual plane can be acquired. And acquiring the above-mentioned measurement result in the measurement position corresponding to each of a plurality of acoustic lenses provided along the 1st direction, and acquiring the measurement result about a plurality of sections along the 1st direction Can do.

In the ultrasonic measurement apparatus according to this application example, the ultrasonic measurement apparatus, the first acoustic matching unit, and a housing that houses at least the moving mechanism are provided, and the second acoustic matching unit is detachable from the casing. Preferably it is attached.
In this application example, the second acoustic matching unit is detachably attached to a housing that houses at least the ultrasonic device, the first acoustic matching unit, and the moving mechanism. In such a configuration, even if the second acoustic matching portion deteriorates due to wear of the second acoustic matching portion due to the sliding of the first acoustic matching portion relative to the second acoustic matching portion or a change with time, the second acoustic matching portion It is easy to replace the acoustic matching portion, and the ease of maintenance can be improved.

  An ultrasonic probe according to an application example of the present invention is an ultrasonic device that performs at least one of transmission and reception of ultrasonic waves from one surface side, and is disposed on the one surface side of the ultrasonic device. A first acoustic matching portion having a first surface on the opposite side; a second acoustic matching portion having a second surface disposed on the first surface side of the first acoustic matching portion and in contact with the first surface; A moving mechanism that relatively moves the ultrasonic device, the first acoustic matching unit, and the second acoustic matching unit in an in-plane direction of the first surface and the second surface, To do.

In this application example, the first surface of the first acoustic matching unit is disposed so as to contact the second surface of the second acoustic matching unit, and the moving mechanism includes the ultrasonic device, the first acoustic matching unit, and the second acoustic matching unit. The part is relatively moved in the in-plane direction of the first surface and the second surface. That is, in this application example, the first acoustic matching unit and the ultrasonic device are integrally moved relative to the second acoustic matching unit while the second acoustic matching unit is in contact with the measurement target. The one acoustic matching portion and the second acoustic matching portion are slid.
In such a configuration, the acoustic impedance of the first acoustic matching unit and the second acoustic matching unit is appropriately set according to the acoustic impedance of the measurement target and the ultrasonic device, so that The ultrasonic wave can be propagated efficiently.
Further, since the first acoustic matching portion is slid with respect to the second surface of the second acoustic matching portion, no space is formed between the first acoustic matching portion and the second acoustic matching portion. For this reason, it is not necessary to fill the space with oil unlike conventional mechanical scanning ultrasonic probes, where a space is formed from the ultrasonic device to the measurement object, and assembly and maintenance are easy. is there.
As described above, according to the ultrasonic probe of this application example, highly accurate ultrasonic measurement can be easily performed.

1 is a block diagram showing a schematic configuration of an ultrasonic measurement apparatus according to a first embodiment of the present invention. The perspective view which shows schematic structure of the ultrasonic probe with which the ultrasonic measuring device which concerns on 1st embodiment is provided. 1 is a cross-sectional view illustrating a schematic configuration of an ultrasonic probe according to a first embodiment. The perspective view which shows schematic structure inside the ultrasonic probe of 1st embodiment. The top view which looked at the element substrate of the ultrasonic device of a first embodiment from the sealing board side. A sectional view of an ultrasonic device of a first embodiment. The side view which shows schematic structure of the ultrasonic probe and gel supply apparatus of 1st embodiment. The flowchart which shows the ultrasonic measurement process of 1st embodiment. The top view which shows typically the ultrasonic sensor in the ultrasonic probe of 2nd embodiment, the 1st acoustic matching layer, and the 2nd acoustic matching layer. The side view which shows typically the 2nd acoustic matching layer of 2nd embodiment.

[First embodiment]
Hereinafter, an ultrasonic measurement device as an electronic apparatus according to a first embodiment of the present invention will be described with reference to the drawings.
[Configuration of Ultrasonic Measuring Apparatus 1]
FIG. 1 is a block diagram showing a schematic configuration of the ultrasonic measurement apparatus 1.
As shown in FIG. 1, the ultrasonic measurement apparatus 1 according to the present embodiment is an acoustic matching material for improving the lubricity and adhesion of an ultrasonic probe 2 and a sliding portion to be described later of the ultrasonic probe 2. A gel supply device 6 for supplying gel and a control device 10 electrically connected to the ultrasonic probe 2 via a signal line provided inside a cable 7 (see FIG. 2) are provided. The ultrasonic measurement apparatus 1 brings an ultrasonic probe 2 into contact with the surface of a living body such as a human body as a measurement target X (see FIG. 3), and transmits ultrasonic waves from the ultrasonic probe 2 into the living body. In addition, the ultrasonic wave reflected by the organ in the living body is received by the ultrasonic probe 2, and based on the received signal, for example, an internal tomographic image in the living body is obtained, or the state of the organ in the living body (for example, Blood flow etc.).

[Configuration of Ultrasonic Probe 2]
2 is a perspective view showing a schematic configuration of the ultrasonic probe 2, FIG. 3 is a cross-sectional view showing a schematic configuration of the ultrasonic probe 2, and FIG. 4 shows a schematic configuration inside the ultrasonic probe 2. As shown in FIG. It is a perspective view shown. 2 shows a perspective view seen from above when the ultrasonic probe is horizontally arranged. In the following description, the vertical direction is the Z direction, the direction orthogonal to the Z direction is the X direction, the X direction and The direction orthogonal to the Z direction is defined as the Y direction.
The ultrasonic probe 2 includes an ultrasonic sensor 3, a first acoustic matching layer 21, a second acoustic matching layer 22, a moving mechanism 23, and a probe housing 24 that houses these. The ultrasonic probe 2 moves the ultrasonic sensor 3 and the first acoustic matching layer 21 in the ± Y direction along the second acoustic matching layer 22 by the moving mechanism 23, and changes the measurement position by the ultrasonic sensor 3. This is a so-called mechanical scan type ultrasonic probe that can be configured.

[Configuration of ultrasonic sensor 3]
As shown in FIG. 3, the ultrasonic sensor 3 is provided with a sensor casing 31, an ultrasonic device 32 provided in the sensor casing 31, a driver circuit for controlling the ultrasonic device 32, and the like. And a wiring board 33.
The sensor housing 31 shown in FIGS. 3 and 4 is formed in a rectangular box shape in plan view as viewed from the Z direction. An opening 31A is formed on the -Z side of the sensor casing 31 as shown in FIG. The ultrasonic device 32 is arranged such that a transmission / reception surface 32A described later faces the end surface of the opening 31A. The first acoustic matching layer 21 is fixed to the end surface of the opening 31A.

[Configuration of Ultrasonic Device 32]
FIG. 5 is a plan view of the element substrate 41 in the ultrasonic device 32 as viewed from the sealing plate 42 side. 6 is a cross-sectional view of the ultrasonic sensor 3 cut along line BB in FIG.
As shown in FIGS. 5 and 6, the ultrasonic device 32 includes an element substrate 41, a sealing plate 42, and an acoustic matching member 43 (see FIG. 6), and a transmitting / receiving surface 32A on the −Z side (see FIG. 5). 6) to transmit the ultrasonic wave in the −Z direction and receive the ultrasonic wave reflected in the living body and propagated in the + Z direction. This transmission / reception surface 32A corresponds to one surface of the ultrasonic device of the present invention.

(Configuration of element substrate 41)
The element substrate 41 includes a substrate main body 411, a support film 412 stacked on the substrate main body 411, and a piezoelectric element 413 (vibrator) stacked on the support film 412.
The element substrate 41 is provided with an array region Ar1 at the center of the substrate in a plan view as viewed from the thickness direction. In the array region Ar1, a plurality of ultrasonic transducers 51 are arranged in an array to constitute an ultrasonic transducer array 50. A terminal region Ar2 is provided outside the array region Ar1 of the element substrate 41, and electrode lines connected to the ultrasonic transducers 51 are drawn out.

The substrate body 411 is a semiconductor substrate such as Si. In the array region Ar1 of the substrate body 411, openings 411A corresponding to the respective ultrasonic transducers 51 are provided. In addition, a support film 412 is provided on one surface of the substrate body 411, and each opening 411 </ b> A is closed by the support film 412.
The support film 412 is made of, for example, SiO ₂ or a laminate of SiO ₂ and ZrO ₂ and closes one end of the opening 411A as described above.

The piezoelectric element 413 is provided on a support film 412 that closes each opening 411A, and is configured by a laminated body of a lower electrode 414, a piezoelectric film 415, and an upper electrode 416, respectively. Here, the support film 412 and the piezoelectric element 413 constitute the ultrasonic transducer 51 of the present invention.
In such an ultrasonic transducer 51, when a rectangular wave voltage having a predetermined frequency is applied between the lower electrode 414 and the upper electrode 416, the support film 412 in the opening region of the opening 411A is vibrated to generate ultrasonic waves. Can be sent out. Further, when the support film 412 is vibrated by reflected ultrasonic waves, a potential difference is generated above and below the piezoelectric film 415, and the received ultrasonic waves are detected by detecting the potential difference generated between the lower electrode 414 and the upper electrode 416. It becomes possible to detect.

In the present embodiment, as shown in FIG. 5, the ultrasonic transducer 51 as described above is arranged in the X direction (second direction) and the Y direction (first direction) in the array region Ar1 of the element substrate 41. Are arranged along the line.
Here, the lower electrode 414 is formed in a straight line along the X direction, and is provided across the plurality of ultrasonic transducers 51 arranged along the X direction. Further, the end of the lower electrode 414 extends to the terminal region Ar2, and is electrically connected to the wiring board 33 in the terminal region Ar2.
On the other hand, the upper electrode 416 includes a first upper electrode 416A provided across a plurality of ultrasonic transducers 51 arranged in the Y direction, and a second upper electrode 416B that connects ends of the first upper electrode 416A. And. The end portion of the second upper electrode 416B extends to the terminal region Ar2, and is electrically connected to the wiring board 33 in the terminal region Ar2.

  In the ultrasonic transducer array 50 as described above, one ultrasonic transducer group 51A (corresponding to the ultrasonic transducer section of the present invention) is provided by the ultrasonic transducers 51 arranged in the X direction connected by the lower electrode 414. That is, a transmission / reception channel is formed, and a plurality of ultrasonic transducer groups 51A are arranged in the Y direction to form a one-dimensional array structure. In other words, in the present embodiment, the ultrasonic device 32 is arranged such that one transmission / reception channel is along the X direction and a plurality of transmission / reception channels are along the Y direction. In other words, the ultrasonic device 32 is arranged such that the slice direction in the ultrasonic transducer array 50 is along the X direction and the scan direction is along the Y direction.

(Configuration of sealing plate 42)
The sealing plate 42 is provided in order to reinforce the strength of the element substrate 41, and is composed of, for example, a metal plate such as 42 alloy, a semiconductor substrate, or the like, and is bonded to the element substrate 41. Since the material and thickness of the sealing plate 42 affect the frequency characteristics of the ultrasonic transducer 51, it is preferable to set the sealing plate 42 based on the center frequency of ultrasonic waves transmitted and received by the ultrasonic transducer 51.

  The sealing plate 42 is provided with a concave groove 421 at a position overlapping with each opening 411A of the element substrate 41 in plan view. The concave groove 421 is provided to suppress the influence of the back wave of the ultrasonic wave generated by the vibration of the support film 412. That is, each concave groove 421 suppresses inconvenience (crosstalk) in which a back wave generated by one ultrasonic transducer 51 is input to another adjacent ultrasonic transducer 51. Further, the groove depth of the concave groove 421 is set to be an odd multiple of one quarter (λ / 4) of the wavelength λ of the ultrasonic wave. Thus, when the back wave reflected by the sealing plate 42 is input again to the ultrasonic transducer 51, it is emitted from the ultrasonic transducer 51 to the living body side (the side opposite to the sealing plate 42). A phase shift with the ultrasonic wave is suppressed, and attenuation of the ultrasonic wave is suppressed.

(Configuration of acoustic matching member 43)
As shown in FIG. 6, the acoustic matching member 43 is provided on the −Z side of the element substrate 41. Specifically, the acoustic matching member 43 is filled in the opening 411A of the element substrate 41, and is formed with a predetermined thickness dimension from the bottom surface side of the opening 411A. The first acoustic matching layer 21 is provided on the −Z side of the acoustic matching member 43 as described later.
These acoustic matching members 43 efficiently propagate the ultrasonic waves transmitted from the ultrasonic transducer 51 to the first acoustic matching layer 21 and efficiently transmit the ultrasonic waves reflected in the living body to the ultrasonic transducer 51. Propagate. For this reason, the acoustic matching member 43 is set to an acoustic impedance intermediate between the acoustic impedance of the ultrasonic transducer 51 of the element substrate 41 and the acoustic impedance of the living body.

[Configuration of Wiring Board 33]
The wiring substrate 33 is a substrate to which the element substrate 41 and the sealing plate 42 are fixed, and a terminal portion connected to each electrode line (lower electrode 414, upper electrode 416) drawn to the terminal region Ar2 of the element substrate 41. (Not shown). The connection between each electrode line and the terminal portion can be exemplified by a connection using, for example, FPC (Flexible Printed Circuits), a through electrode provided through the sealing plate 42, or the like.
The wiring substrate 33 is provided with a driver circuit for driving the ultrasonic device 32 and is electrically connected to the ultrasonic device 32. Specifically, the wiring board 33 includes a selection circuit 331, a transmission circuit 332, and a reception circuit 333, as shown in FIG.

The selection circuit 331 switches between a transmission connection that connects the ultrasonic device 32 and the transmission circuit 332 and a reception connection that connects the ultrasonic device 32 and the reception circuit 333 based on the control of the control device 10.
The transmission circuit 332 outputs a transmission signal indicating that an ultrasonic wave is transmitted to the ultrasonic device 32 via the selection circuit 331 when the transmission connection is switched under the control of the control device 10.
When the reception circuit 333 is switched to the reception connection under the control of the control device 10, the reception circuit 333 outputs the reception signal input from the ultrasonic device 32 to the control device 10 via the selection circuit 331. The reception circuit 333 includes, for example, a low-noise amplifier circuit, a voltage control attenuator, a programmable gain amplifier, a low-pass filter, an A / D converter, etc., and converts the received signal into a digital signal, removes noise components, is desired After performing each signal processing such as amplification to the signal level, the received signal after processing is output to the control device 10.

[Configuration of the first acoustic matching layer 21]
The first acoustic matching layer 21 corresponds to the first acoustic matching portion of the present invention, and as shown in FIG. 4, is a rectangular plate-like member in a plan view viewed from the Z direction. 6, the ultrasonic device 32 is disposed on the −Z side. Specifically, the first acoustic matching layer 21 is provided in close contact with the acoustic matching member 43 provided on the element substrate 41. Moreover, the outer edge part of the 1st acoustic matching layer 21 is fixed to the sensor housing | casing 31 of the ultrasonic sensor 3, as shown in FIG. The first acoustic matching layer 21 may be bonded to the ultrasonic sensor 3 or may be detachably attached.

FIG. 7 is a side view showing a schematic configuration when the ultrasonic sensor 3, the first acoustic matching layer 21, and the second acoustic matching layer 22 are viewed in the −X direction.
As shown in FIG. 7, the −Z side lower surface 211 of the first acoustic matching layer 21 has a flat surface 211A at the center in the Y direction and curved surfaces 211B at both ends in the Y direction. The first acoustic matching layer 21 contacts the second acoustic matching layer 22 at the flat surface 211A. As will be described later, the first acoustic matching layer 21 is moved along the Y direction together with the ultrasonic sensor 3 by the moving mechanism 23 in a state where the flat surface 211A is in contact with the second acoustic matching layer 22. That is, the lower surface 211 corresponds to the first surface of the present invention, and the flat surface 211A corresponds to the slidable contact surface of the present invention.

  The curved surfaces 211B are formed at both end portions in the Y direction of the lower surface 211, and are curved outwardly from the second acoustic matching layer 22 so as to go outward along the Y direction. Thereby, as will be described later, the gel J supplied by the gel supply device 6 can be reliably supplied by the sliding portions of the first acoustic matching layer 21 and the second acoustic matching layer 22. In FIG. 7, for the sake of explanation, the thickness dimension of the gel supplied between the first acoustic matching layer 21 and the second acoustic matching layer 22 is greatly illustrated. The layer 21 and the second acoustic matching layer 22 are configured to be in close contact with each other.

  The first acoustic matching layer 21 efficiently propagates the ultrasonic wave transmitted from the ultrasonic device 32 to the second acoustic matching layer 22, and efficiently propagates the ultrasonic wave reflected in the living body to the ultrasonic device 32. Let For this reason, the first acoustic matching layer 21 is set to an intermediate acoustic impedance between the ultrasonic device 32 and the second acoustic matching layer 22.

[Configuration of Second Acoustic Matching Layer 22]
The second acoustic matching layer 22 corresponds to the second acoustic matching portion of the present invention, and as shown in FIG. 4, a plate having a rectangular outer shape whose longitudinal direction is the Y direction in a plan view seen from the Z direction. Shaped member. The second acoustic matching layer 22 is detachably attached to the probe housing 24 and is disposed on the lower surface 211 side of the first acoustic matching layer 21 as shown in FIGS. 3 and 4. The second acoustic matching layer 22 propagates the ultrasonic wave transmitted from the ultrasonic device 32 and propagated through the first acoustic matching layer 21 to the living body as the measurement target X, and efficiently reflects the ultrasonic wave reflected in the living body. Propagate to one acoustic matching layer 21. For this reason, the second acoustic matching layer 22 is set to an intermediate acoustic impedance between the first acoustic matching layer 21 and the biological surface (for example, the epidermis).

As shown in FIGS. 3 and 4, the second acoustic matching layer 22 includes a main body part 221, a protruding part 222, and an acoustic lens 223, and these parts 221 to 223 are integrally formed. Composed.
The main body 221 is a rectangular portion in plan view as viewed from the Z direction, and abuts against the flat surface 211A of the first acoustic matching layer 21 at the abutting surface 221A on the + Z side. The contact surface 221A is a surface parallel to the XY plane and corresponds to the second surface of the present invention.

  The protruding portion 222 protrudes in the direction away from the main body portion 221 along the X direction from the ± X side end of the main body portion 221. As will be described later, the protruding portion 222 is inserted into the concave portion 241D of the probe housing 24 as shown in FIG. 3, whereby the second acoustic matching layer 22 is detachably attached to the probe housing 24.

  The acoustic lens 223 moves on the −Z side surface 221B of the main body 221 in the movement range of the array region Ar1 (see FIG. 5) as the ultrasonic device 32 moves along the Y direction in a plan view as viewed from the Z direction. And at least overlap. As shown in FIG. 3, the acoustic lens 223 has a focal point on a virtual plane P1 that passes through the center of the array area Ar1 in the X direction and is parallel to the YZ plane, and is transmitted from the ultrasonic device 32 to the −Z direction. Is converged toward the focal point on the virtual plane P1. As shown in FIG. 3, the acoustic lens 223 is curved so as to protrude in the −Z direction toward the center along the X direction in a cross-sectional view parallel to the XZ plane. It is exposed to the outside and is brought into contact with the measuring object X.

[Configuration of Moving Mechanism 23]
As shown in FIGS. 3 and 4, the moving mechanism 23 is provided inside the probe housing 24 and abuts the flat surface 211 </ b> A of the first acoustic matching layer 21 against the abutting surface 221 </ b> A of the second acoustic matching layer 22. Then, the ultrasonic sensor 3 and the first acoustic matching layer 21 are moved along the contact surface 221A. As shown in FIG. 4, the moving mechanism 23 includes a guide shaft 231, a timing belt 232, pulleys 233 and 234, a motor 235, a power transmission mechanism 236, and a connecting member 237.
The guide shaft 231 is disposed along the Y direction, and both ends thereof are fixed to the probe housing 24 although illustration is omitted. The timing belt 232 is wound around pulleys 233 and 234 and is disposed substantially parallel to the guide shaft 231. The pulleys 233 and 234 are attached to the probe housing 24 so as to be rotatable by a rotation shaft parallel to the Z direction. The motor 235 is a power source that drives the timing belt 232, and rotates the pulley 233 via the power transmission mechanism 236 configured by a plurality of gears and the like to drive the timing belt 232.

The connecting member 237 is a plate-like member that connects the ultrasonic sensor 3 to the moving mechanism 23. The connecting member 237 includes a curved portion 237A that engages with the guide shaft 231, a first end portion 237B that is fixed to the timing belt 232, and a second end portion 237C that is fixed to the sensor housing 31 of the ultrasonic sensor 3. Have.
Further, the connecting member 237 biases the ultrasonic sensor 3 in the −Z direction, thereby causing the flat surface 211 </ b> A of the first acoustic matching layer 21 and the contact surface 221 </ b> A of the second acoustic matching layer 22. Adhere closely. That is, the connection member 237 corresponds to the urging portion of the present invention. As the connection member 237, for example, a leaf spring can be used.

  In the moving mechanism 23 configured as described above, when the motor 235 is driven based on the control signal of the control device 10, the pulley 233 rotates and the timing belt 232 is driven. Then, the connection member 237 is moved in the Y direction along the guide shaft 231 in accordance with the driving of the timing belt. In accordance with the movement of the connecting member 237, the ultrasonic sensor 3 and the first acoustic matching layer 21 are moved in the Y direction.

[Configuration of Gel Supply Device 6]
The gel supply device 6 corresponds to the matching material supply unit of the present invention, and a tank (not shown) that stores the gel as the acoustic matching material, a pump 61 (see FIG. 1) that sends out the stored gel, And a supply pipe 62 (see FIG. 7) for circulating the gel fed from the tank by the pump 61 to the supply position.
As shown in FIG. 7, the supply pipe 62 is inserted into the cable 7, passes through the inside of the sensor housing 31, and is provided at the + Y side end of the −Z side end surface of the sensor housing 31. Connect to port 31B. The supply port 31 </ b> B is provided on the + Y side of the ultrasonic device 32, that is, on one end side in the moving direction of the moving mechanism 23 with respect to the ultrasonic device 32. When the ultrasonic sensor 3 is moved in the Y direction, the supply port 31B is positioned on the front side in the movement direction with respect to the ultrasonic device 32. Therefore, the first acoustic matching layer 21 and the second acoustic matching layer are provided. The gel J can be more reliably supplied to the 22 sliding contact portions.

[Configuration of Probe Housing 24]
As shown in FIG. 3, the probe housing 24 houses the first acoustic matching layer 21, the second acoustic matching layer 22, and the moving mechanism 23. The probe housing 24 includes an arrangement part 241 for arranging the ultrasonic sensor 3, the first acoustic matching layer 21 and the second acoustic matching layer 22, and a slit 242 for inserting the cable 7.
As shown in FIGS. 2 and 3, the slit 242 is provided along the Y direction on one of the side surfaces intersecting the X direction of the probe housing 24. Thereby, the movement of the cable 7 according to the movement of the ultrasonic sensor 3 is not hindered.

  As shown in FIG. 3, the placement portion 241 is provided on the bottom surface portion 24A located on the −Z side of the probe housing 24, and has a pair of side wall portions 241A and 241B parallel to the YZ plane, and the pair of side wall portions 241A. , 241B, and an opening 241C formed at the end on the −Z side. The pair of side wall portions 241A and 241B are separated from each other by substantially the same dimension as the main body portion 221 of the ultrasonic sensor 3, the first acoustic matching layer 21, and the second acoustic matching layer 22 in the X direction. The ultrasonic sensor 3, the first acoustic matching layer 21, and the second acoustic matching layer 22 are inserted between the pair of side wall portions 241A and 241B, and the ultrasonic sensor 3 and the first acoustic matching layer 21 are moved by a moving mechanism. 23 is moved along the side walls 241A and 241B.

Further, the side walls 241A and 241B are provided with a recess 241D into which the protrusion 222 of the second acoustic matching layer 22 is inserted. The second acoustic matching layer 22 is detachably attached to the probe housing 24 by inserting the protrusion 222 into the recess 241D. The second acoustic matching layer 22 attached to the probe housing 24 is exposed from the opening 241C, and the acoustic lens 223 of the second acoustic matching layer 22 protrudes to the −Z side from the opening 241C.
In addition, you may provide the guide part which regulates the movement to the + Z side of the ultrasonic sensor 3. FIG. For example, it is good also as a structure provided with the guide part which protrudes in the -X direction from the side wall part 241B, and extends along the Y direction, and contact | abuts the surface at the side of + Z of the sensor housing | casing 31.

[Configuration of Control Device 10]
As illustrated in FIG. 2, the control device 10 includes, for example, an operation unit 11, a display unit 12, a storage unit 13, and a calculation unit 14. For example, the control device 10 may be a terminal device such as a tablet terminal, a smartphone, or a personal computer, or may be a dedicated terminal device for operating the ultrasonic probe 2.
The operation unit 11 is a UI (User Interface) for the user to operate the ultrasonic measurement apparatus 1 and can be configured by, for example, a touch panel provided on the display unit 12, operation buttons, a keyboard, a mouse, or the like. .
The display unit 12 is configured by a liquid crystal display, for example, and displays an image.
The storage unit 13 stores various programs and various data for controlling the ultrasonic measurement apparatus 1.
The calculation unit 14 is configured by a calculation circuit such as a CPU (Central Processing Unit) and a storage circuit such as a memory. The calculation unit 14 functions as the movement control unit 141, the transmission / reception control unit 142, and the signal processing unit 143 by reading and executing various programs stored in the storage unit 13.
The movement control unit 141 controls the moving mechanism 23 to move the ultrasonic sensor 3 and the first acoustic matching layer 21 along the Y direction to change the measurement position.
For example, a plurality of measurement positions are set in advance along the Y direction. A plurality of measurement results can be obtained by transmitting and receiving ultrasonic waves by the ultrasonic sensor 3 at each measurement position.

It should be noted that a tomographic image (B mode image) continuous along the XY plane can be acquired by appropriately setting the interval between measurement positions. For example, the measurement position interval may be set so that the scan ranges of the ultrasonic devices 32 overlap each other between adjacent measurement positions.
When raster scanning is performed, noise such as flare is likely to occur in a region outside the central region in the Y direction of the scanning range along the ZY plane. Therefore, by setting the measurement position interval so that the central area is adjacent in the Y direction between the adjacent measurement positions, it is possible to continuously increase the height along the XY plane based on the measurement result of the central area at each measurement position. An accurate tomographic image can be acquired. Note that a high-accuracy tomographic image can be acquired by setting the interval between measurement positions to be smaller.

  The transmission / reception control unit 142 controls the transmission / reception of ultrasonic waves by controlling the selection circuit 331, the transmission circuit 332, and the reception circuit 333. Specifically, when transmitting an ultrasonic wave, the transmission / reception control unit 142 controls the selection circuit 331 to output a signal to the transmission circuit 332, and generates and outputs a transmission signal to the transmission circuit 332. Control processing. Further, when receiving the ultrasonic wave, the transmission / reception control unit 142 controls the selection circuit 331 so that a signal can be output to the reception circuit 333, and the reception circuit 333 is configured to set the frequency of the received signal, gain setting, and the like. Control.

  The signal processing unit 143 performs various processes for generating, for example, an ultrasonic image as an ultrasonic measurement result based on the received signal at each measurement position. As various types of processing, for example, harmonic processing for extracting harmonic components (harmonic components) for each reception channel, or conversion of the expression format so that the maximum and minimum portions of the signal strength of the received signal can be easily recognized simultaneously. Nonlinear compression processing such as logarithmic conversion processing, STC (Sensitive Time Control) processing for correcting the degree of amplification (brightness) according to the propagation time (that is, depth) of the reflected wave, and the like can be exemplified. In addition, the signal processing unit 143 generates various ultrasonic images such as a B-mode image and an M-mode image and displays them on the display unit 12.

  The gel supply control unit 144 supplies the gel by controlling the gel supply device 6. That is, the gel supply control unit 144 drives the pump 61 to discharge the gel stored in the tank from the supply port 31B through the supply pipe 62 and supply it to the contact surface 221A of the second acoustic matching layer 22. Let

[Ultrasonic measurement processing by the ultrasonic measurement apparatus 1]
Next, an ultrasonic measurement process in the ultrasonic measurement apparatus 1 of the present embodiment will be described based on the drawings.
In the present embodiment, the ultrasonic measurement apparatus 1 intermittently moves the ultrasonic sensor 3 to a plurality of measurement positions set along the Y direction, and performs ultrasonic measurement at each measurement position. In the following description, as a plurality of measurement positions, the first measurement position is set on the −Y side, the final measurement position is set on the + Y side, and ultrasonic measurement is sequentially performed for each measurement position from the −Y side. To do. Further, it is assumed that a position variable i is attached to each measurement position so that the value increases from the −Y side to the + Y side. That is, i = 1 is assigned to the first measurement position, and the maximum value imax is assigned to the final position.

FIG. 8 is a flowchart illustrating an example of the ultrasonic measurement process.
Upon receiving an instruction to perform the ultrasonic measurement process, the movement control unit 141 controls the movement mechanism 23 to move the ultrasonic sensor 3 to the initial position (set to the −Y side in the movement range in this embodiment) The variable i is initialized (i = 1) (step S1). This initial position is set so that the + Y side end of the ultrasonic sensor 3 is positioned on the −Y side with respect to the −Y side end of the first measurement position when viewed from the Z direction. Thereby, when supplying a gel like the after-mentioned, a gel can be supplied also in the edge part by the side of -Y of a measurement range.

Next, the gel supply control unit 144 supplies the gel onto the contact surface 221A of the second acoustic matching layer 22 by driving the pump 61 and discharging the gel from the supply port 31B. Further, along with the supply of the gel, the movement control unit 141 controls the moving mechanism 23 to move the ultrasonic sensor 3 in the Y direction to the measurement position corresponding to the position variable i (step S2).
The ultrasonic sensor 3 and the first acoustic matching layer 21 are moved together. The first acoustic matching layer 21 is moved in the Y direction with the flat surface 211A in contact with the contact surface 221A of the second acoustic matching layer 22. At this time, since the curved surface 211B is provided in the first acoustic matching layer 21, the gel supplied to the contact surface 221A on the + Y side of the flat surface 211A is placed between the flat surface 211A and the contact surface 221A. Can be efficiently guided to the sliding portion.

When the ultrasonic sensor 3 is moved to the measurement position, the transmission / reception control unit 142 drives the ultrasonic sensor 3 to transmit / receive ultrasonic waves, and performs ultrasonic measurement (step S3).
Next, the signal processing unit 143 acquires a measurement result based on the received signal, and outputs the acquired measurement result (step S4). In the present embodiment, the signal processing unit 143 acquires a B-mode image as a measurement result and causes the display unit 12 to display the B-mode image.
When the measurement result at the current measurement position is acquired, the movement control unit 141 updates the position variable i by adding 1 to the position variable i (step S5).

Next, the movement control unit 141 determines whether or not the position variable i is greater than the maximum value imax, that is, whether or not ultrasonic measurement has been performed for all measurement positions (step S6).
If it is determined as “NO” in step S6, that is, if the position variable i is equal to or less than the maximum value imax, the ultrasonic measurement is not performed at all measurement positions, and thus the processing after step S2 is performed. On the other hand, if “YES” is determined in step S6, that is, if the position variable i is greater than the maximum value imax, the ultrasonic measurement is performed for all measurement positions, and thus the control device 10 performs the processing according to this flowchart. The ultrasonic measurement process is terminated.

[Operational effects of the first embodiment]
In the ultrasonic measurement apparatus 1 of the present embodiment, the moving mechanism 23 makes the first acoustic matching layer 21 contact the contact surface 221A of the second acoustic matching layer 22, while the ultrasonic device 32 and the first acoustic matching layer. 21 is moved along the contact surface 221A. In such a configuration, by appropriately setting the acoustic impedance of the first acoustic matching layer 21 and the second acoustic matching layer 22 according to the acoustic impedance between the measurement target X and the ultrasonic device 32, Ultrasonic waves can be efficiently propagated to and from the sonic device 32.
Further, since the first acoustic matching layer 21 is slid with respect to the contact surface 221 </ b> A of the second acoustic matching layer 22, no space is formed between the first acoustic matching layer 21 and the second acoustic matching layer 22. For this reason, there is no need to fill the space with oil unlike the conventional mechanical scanning ultrasonic measurement apparatus in which a space is formed from the ultrasonic device 32 to the measurement target X, so that assembly and maintenance are possible. Is also easy.
As described above, according to the ultrasonic measurement apparatus 1 of the present embodiment, highly accurate ultrasonic measurement can be easily performed.

In the present embodiment, the acoustic impedance decreases in the order of the ultrasonic device 32, the first acoustic matching layer 21, and the second acoustic matching layer 22. In such a configuration, even when the acoustic impedance of the ultrasonic device 32 is larger than the acoustic impedance of the measurement target X, the ultrasonic wave can be propagated efficiently.
Here, when a space is formed between the first acoustic matching layer 21 on the ultrasonic device 32 side and the second acoustic matching layer 22 in contact with the measurement target X, and the space is filled with oil, When a living body is a measurement target, the acoustic impedance of oil (mineral oil) is usually smaller than that of the living body, and the acoustic impedance of oil is minimized in the propagation path of ultrasonic waves. For this reason, the propagation efficiency of ultrasonic waves between the oil and another adjacent medium may be reduced, and the measurement accuracy may be reduced. On the other hand, in this embodiment, since the acoustic impedance changes so as to decrease in order from the ultrasonic device toward the second acoustic matching layer 22, it suppresses a decrease in measurement accuracy due to a decrease in the propagation efficiency described above. Can do.

  In the present embodiment, the ultrasonic sensor 3 and the first acoustic matching layer 21 are urged toward the second acoustic matching layer 22 by the connecting member 237 of the moving mechanism 23, whereby the first acoustic matching layer 21 and the second acoustic matching layer 21 are urged. The acoustic matching layer 22 can be adhered. Further, when the ultrasonic sensor 3 and the first acoustic matching layer 21 are moved along the second acoustic matching layer 22, the state in which the first acoustic matching layer 21 and the second acoustic matching layer 22 are in close contact with each other is further increased. It can be reliably maintained. Thereby, the fall of the measurement precision by the adhesiveness of the 1st acoustic matching layer 21 and the 2nd acoustic matching layer 22 falls can be suppressed.

  In the present embodiment, a gel supply device 6 that supplies gel to the sliding portion between the first acoustic matching layer 21 and the second acoustic matching layer 22 is provided. Thereby, the friction between the 1st acoustic matching layer 21 and the 2nd acoustic matching layer 22 can be reduced. Therefore, the first acoustic matching layer 21 and the second acoustic matching layer 22 can be smoothly moved relative to each other, and the movement by the moving mechanism 23 can be appropriately performed. Moreover, wear of the first acoustic matching layer 21 and the second acoustic matching layer 22 can be suppressed. Even if a slight gap occurs between the first acoustic matching layer 21 and the second acoustic matching layer 22, the gel can be supplied by the gel supply device 6 and the gap can be filled with the gel. Therefore, it is possible to suppress a decrease in ultrasonic wave propagation efficiency due to the gap, and it is possible to carry out highly accurate ultrasonic measurement.

  In the gel supply device 6, a supply port 31 </ b> B for supplying gel is provided on the + Y side of the ultrasonic device 32. Thereby, the gel can be supplied from the front side in the movement direction (Y direction) rather than the sliding portion between the first acoustic matching layer 21 and the second acoustic matching layer 22, and the second acoustic matching layer 22 abuts. The flat surface 211A of the first acoustic matching layer 21 can be slid after the gel is supplied to the surface 221A.

  In addition, the lower surface 211 that is the surface of the first acoustic matching layer 21 on the second acoustic matching layer 22 side has a flat surface 211A and curved surfaces 211B on both sides in the Y direction of the flat surface 211A. Thereby, the gel supplied to the front side in the movement direction (Y direction) from the sliding part of the first acoustic matching layer 21 and the second acoustic matching layer 22 is converted into the first acoustic matching layer 21 and the second acoustic matching layer. The sliding portion with the layer 22 can be supplied more reliably.

The ultrasonic device 32 has a one-dimensional array structure, and is arranged so that the scan direction coincides with the Y direction. The acoustic lens 223 is provided along the Y direction at a position overlapping the movement range of the array area Ar1 according to the movement of the ultrasonic device 32 in a plan view as viewed from the Z direction, and the center of the array area Ar1 is As shown, the focal point is located in a virtual plane P1 orthogonal to the array region Ar1 and parallel to the Y direction.
In such a configuration, the ultrasonic device 32 is moved along the Y direction, and ultrasonic measurement is performed at a plurality of measurement positions, whereby measurement results regarding the cross section along the virtual plane P1 at each measurement position ( For example, a tomographic image) can be acquired.

  The second acoustic matching layer 22 is detachably attached to the probe casing 24 and is accommodated in the probe casing 24 together with the ultrasonic device 32, the first acoustic matching layer 21, and the moving mechanism 23. In such a configuration, the second acoustic matching layer 22 is deteriorated due to wear of the second acoustic matching layer 22 due to sliding of the first acoustic matching layer 21 with respect to the second acoustic matching layer 22, change with time, or the like. Even so, the replacement of the second acoustic matching layer 22 is easy, and the ease of maintenance can be improved.

[Second Embodiment]
Next, a second embodiment according to the present invention will be described.
In the ultrasonic measurement apparatus 1 of the first embodiment, the ultrasonic device 32 is arranged so that the slice direction in the ultrasonic transducer array 50 that is a one-dimensional array is along the X direction and the scan direction is along the Y direction. It had been. The acoustic lens 223 is configured to converge the ultrasonic wave that propagates in the −Z direction toward the focal point on the virtual plane P1 that passes through the center in the X direction of the array region Ar1 and is parallel to the YZ plane. It was. And it was comprised so that the measurement result of the cross section along the virtual surface P1 parallel to a YZ surface could be acquired by moving the ultrasonic device 32 to a Y direction (refer FIG. 3).
On the other hand, in the second embodiment, the ultrasonic device 32 is arranged on the ultrasonic probe so that the slice direction is along the Y direction and the scan direction is along the X direction, thereby being parallel to the XZ plane. The difference is that the measurement result of the cross section can be acquired.
In the following description, the same components as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted or simplified.

FIG. 9 is a plan view showing a schematic configuration when the ultrasonic sensor 3, the first acoustic matching layer 21, and the second acoustic matching layer 25 provided in the ultrasonic probe 2A of the present embodiment are viewed from the −Z direction. .
In the present embodiment, as in the first embodiment, the first acoustic matching layer 21 is fixed on the −Z side of the ultrasonic sensor 3, and the second acoustic matching layer 25 is on the −Z side of the first acoustic matching layer 21. Be placed.
Although not shown, the ultrasonic sensor 3 and the first acoustic matching layer 21 are moved along the Y direction in a state where the first acoustic matching layer 21 is in contact with the second acoustic matching layer 25 by a moving mechanism. Configured to be possible.
In the present embodiment, the ultrasonic device 32 is configured such that the ultrasonic transducer group 51A, which is one transmission / reception channel, is aligned along the Y direction, and the multiple ultrasonic transducer groups 51A are aligned along the X direction. Be placed.

FIG. 10 is a side view showing a schematic configuration of the second acoustic matching layer 25 viewed along the X direction.
As shown in FIG. 10, the second acoustic matching layer 25 is provided with a plurality of acoustic lenses 251 along the Y direction on the −Z side surface. In addition, about other points, it is comprised similarly to the 2nd acoustic matching layer 22 of 1st embodiment fundamentally.
As shown in FIG. 10, the acoustic lens 251 is curved so as to protrude in the −Z direction as it goes toward the center along the Y direction in a plan view seen along the X direction. The dimension of the acoustic lens 251 in the Y direction is substantially the same as the dimension d (see FIG. 9) of the array region Ar1 in the Y direction. The acoustic lens 251 has a focal point on the virtual plane P3 passing through the center in the Y direction and parallel to the XZ plane, and transmits the ultrasonic wave transmitted from the ultrasonic device 32 and propagated in the −Z direction to the virtual plane P3. Converge towards the top focus.

  In the present embodiment, the measurement position is set so as to correspond to each of the plurality of acoustic lenses 251 provided continuously along the Y direction. That is, a virtual surface P2 (see FIG. 9) passing through the center in the Y direction of the array region Ar1 of the ultrasonic device 32 and parallel to the XZ plane, and the above-described virtual surface P3 (see FIG. 10) of the acoustic lens 251 The position where, coincides is the measurement position of the ultrasonic sensor 3. By moving the ultrasonic sensor 3 to this measurement position, a measurement result (for example, a B-mode image as a tomographic image) in a region along the virtual plane P3 can be acquired. In addition, by performing ultrasonic measurement at measurement positions corresponding to each of the plurality of acoustic lenses 251, measurement results at each measurement position can be acquired. For example, when a tomographic image is acquired as a measurement result, a plurality of tomographic images corresponding to a plurality of measurement positions set along the Y direction can be acquired.

[Operational effects of the second embodiment]
In the present embodiment, the ultrasonic device 32 has a one-dimensional array structure, and is arranged so that the scan direction coincides with the X direction. The acoustic lens 251 has the same dimension in the Y direction as that of the array area Ar1. In addition, the acoustic lens 251 has a focal position in a virtual plane P3 that passes through the center of the acoustic lens 251 and is orthogonal to the Y direction and parallel to the X direction in a plan view viewed from the Z direction. In such a configuration, the ultrasonic device 32 is moved along the Y direction, and the ultrasonic measurement is performed with the position where the center of the array region Ar1 overlaps the center of the acoustic lens 251 in the plan view as described above. The measurement result regarding the cross section along the virtual plane P3 can be acquired. And the measurement result regarding the several cross section along a Y direction can be acquired by acquiring the above-mentioned measurement result in the measurement position corresponding to each of the some acoustic lens 251 provided along the Y direction. it can.

[Modification of Embodiment]
Note that the present invention is not limited to the above-described embodiments, and the present invention includes configurations obtained by modifying, improving, and appropriately combining the embodiments as long as the object of the present invention can be achieved. Is.
For example, in the first embodiment described above, the ultrasonic sensor 3 is moved to a preset measurement position and ultrasonic measurement is performed, and then moved to the next measurement position to perform ultrasonic measurement. However, the present invention is not limited to this. For example, ultrasonic measurement may be performed while moving the ultrasonic sensor 3. In this case, if the ultrasonic sensor 3 is moved at a constant speed v and the elapsed time t from transmission to reception of the ultrasonic wave is t, the moving amount of the ultrasonic sensor 3 is v · t, and the ultrasonic wave reception position Moves by a movement amount v · t. That is, when performing ultrasonic measurement while moving the ultrasonic sensor 3, the reflected position of the received ultrasonic wave using the moving amount v · t based on the moving speed v of the ultrasonic sensor 3 and the elapsed time t. The measurement result can be acquired by performing processing such as calculating.

  In each of the above-described embodiments, the configuration in which the ultrasonic sensor 3 and the first acoustic matching layer 21 are moved along the Y direction as the moving mechanism 23 is exemplified. However, the present invention is not limited to this, and the ultrasonic sensor 3 and the first acoustic matching layer 21 are moved. One acoustic matching layer 21 may be movable along the second acoustic matching layer 22, and may be movable in the X direction and further in the Z direction. Specifically, a moving mechanism that moves the ultrasonic sensor 3 and the first acoustic matching layer 21 in the in-plane direction of the XY plane by combining the X stage that moves in the X direction and the Y stage that moves in the Y direction is used. Can do. Further, a moving mechanism that moves the X stage and the Y stage along the Z direction may be combined.

  The moving mechanism 23 only needs to be able to relatively move the ultrasonic sensor 3 and the first acoustic matching layer 21 and the second acoustic matching layer 22. On the other hand, the second acoustic matching layer 22 may be configured to be movable. For example, a configuration in which the measurement target X and the second acoustic matching layer 22 are integrally moved while the ultrasonic sensor 3 and the first acoustic matching layer 21 are stationary may be employed.

  In addition, when the moving mechanism 23 uses an ultrasonic device that is configured to move the ultrasonic sensor 3 and the first acoustic matching layer 21 along the XY plane and is configured as a unitary array, a plurality of units according to measurement positions are used. The acoustic lens may be provided. For example, in the first embodiment, a plurality of acoustic lenses 223 may be arranged along the X direction, and thereby, along a plurality of virtual planes P1 positioned so as to be orthogonal to the X direction and aligned along the X direction. Measurement results related to the cross section can be obtained.

Moreover, although the connection member 237 of the moving mechanism 23 exemplifies a configuration that functions as an urging unit that urges the first acoustic matching layer 21 toward the second acoustic matching layer 22, the present invention is not limited thereto, A pressing mechanism that presses the ultrasonic sensor 3 in the −Z direction at a plurality of locations or surfaces from the + Z side may be provided. Specifically, a plate-like contact means that extends along the Y direction and contacts the surface of the ultrasonic sensor 3 on the + Z side, and a pressing means such as an actuator that presses the contact means toward the −Z side The structure provided with can be illustrated.
Further, the urging unit may adopt a mechanism that urges the second acoustic matching layer 22 and the measurement target X toward the first acoustic matching layer 21, that is, the first acoustic matching layer 21 and the second acoustic matching layer 21. At least one of biasing the first acoustic matching layer 21 in the −Z direction, biasing the second acoustic matching layer 22 in the + Z direction, and biasing from both sides so as to bring the matching layer 22 into close contact with each other. You may provide the biasing part which implements either.
In addition, even if there is no urging | biasing part, when the 1st acoustic matching layer 21 and the 2nd acoustic matching layer 22 can be stuck, it is good also as a structure which does not provide an urging | biasing part.

In each said embodiment, although the gel supply apparatus 6 illustrated the structure which supplies a gel from the supply port 31B to + Y side of the ultrasonic device 32, this invention is not limited to this, A supply port is set to -Y side. It may be provided. In such a configuration, even when ultrasonic measurement is performed while intermittently moving to the −Y side, the gel can be appropriately supplied.
When the moving mechanism is configured to move the ultrasonic sensor 3 along the X direction as described above, the ultrasonic sensor 3 can be moved by providing a supply port on the ± X side of the ultrasonic device 32. The gel can be properly supplied regardless of the direction. In this case, the gel may be supplied from a supply port provided on the front side in the moving direction of the moving mechanism.

Further, the shape and number of the supply ports are not particularly limited, and for example, a plurality of supply ports may be provided along the X direction at the edge of the ultrasonic sensor 3 on the + Y side, or a slit shape parallel to the X direction. A supply port may be provided. The same applies to the supply ports provided at the edges on the −Y side and ± X side.
If the first acoustic matching layer 21 and the second acoustic matching layer 22 can be sufficiently adhered without supplying the gel, the gel supply device 6 may not be provided.

  In each said embodiment, although the lower surface 211 of the 1st acoustic matching layer 21 was set as the structure which has the curved surface 211B in the both ends side along a Y direction, this invention is not limited to this. For example, it may be provided only on one end side in the Y direction. Moreover, when the X direction is included in the moving direction by the moving mechanism, a bending portion may be provided at both ends along the X direction, or a bending portion may be provided only at one end.

  In each of the above embodiments, a living body or the like having an acoustic impedance smaller than that of the ultrasonic device 32 is set as a measurement target, and the ultrasonic device 32, the first acoustic matching layer 21, the second acoustic matching layer 22, and the measurement target X (for example, a human body) In this example, the acoustic impedance is reduced in the order of the skin), but the present invention is not limited to this. That is, for the measurement target X having higher acoustic impedance than the ultrasonic device 32, the acoustic impedance increases in the order of the ultrasonic device 32, the first acoustic matching layer 21, the second acoustic matching layer 22, and the measurement target X. You may comprise as follows. Even in this case, the ultrasonic wave can be efficiently propagated between the ultrasonic device and the measurement target.

In each said embodiment, although the structure provided with the 1st acoustic matching layer of a single layer was illustrated as a 1st acoustic matching part, a 1st acoustic matching part may be comprised by multiple layers. Similarly, the second acoustic matching section may be composed of a plurality of layers.

  In each of the above embodiments, the configuration in which the ultrasonic sensor 3, the first acoustic matching layer 21, the second acoustic matching layer 22, and the moving mechanism 23 are housed inside the probe housing 24 is illustrated. It is not limited to this, The structure in which at least any one of the ultrasonic sensor 3, the 1st acoustic matching layer 21, the 2nd acoustic matching layer 22, and the moving mechanism 23 is accommodated may be sufficient. For example, the second acoustic matching layer 22 may be disposed outside the probe housing 24 and the second acoustic matching layer 22 may be detachably fixed to the probe housing 24. In this case, the second acoustic matching layer 22 can be easily replaced.

  In each of the above-described embodiments, the configuration using the ultrasonic device 32 having a one-dimensional array structure has been exemplified. However, the present invention is not limited to this, and each ultrasonic transducer arranged in a grid pattern in the array region Ar1 is individually provided. Alternatively, an ultrasonic device having a two-dimensional array structure configured to be drivable may be used. In this case, an acoustic lens is unnecessary.

  In each of the above embodiments, the configuration in which the opening 411A is provided in the element substrate 41 is illustrated as the ultrasonic device 32. However, the present invention is not limited to this, and ultrasonic devices having various configurations may be used. For example, the element substrate 41 is not provided with the opening 411A, and the ultrasonic transducer 51 transmits the ultrasonic wave by vibrating the element substrate 41 itself, and the reception of the ultrasonic wave is detected by the vibration of the element substrate 41. Also good. Also, the lower electrode provided on the element substrate 41, the piezoelectric body, and the upper electrode are laminated, the ultrasonic wave is transmitted by vibrating the piezoelectric body, and the reception of the ultrasonic wave is detected by the vibration of the piezoelectric body. And so on.

In each of the above-described embodiments, the case where a living body is a measurement target is illustrated, but the present invention is not limited thereto, and for example, each organ constituting a living body such as a liver, heart, muscle, and the like may be a measurement target.
In the said embodiment, although the ultrasonic measurement apparatus which makes a measurement object a part of living body was illustrated, this invention is not limited to this. For example, the present invention can be applied to an ultrasonic measurement apparatus that performs detection of defects of a structure or inspection for deterioration with various structures as measurement targets. Further, for example, the present invention can also be applied to an ultrasonic measurement apparatus that detects a defect of the measurement target using a semiconductor package or a wafer as a measurement target.

  In addition, the specific structure for carrying out the present invention may be configured by appropriately combining the above-described embodiments and modifications within the scope that can achieve the object of the present invention, and may be appropriately changed to other structures and the like. May be.

  DESCRIPTION OF SYMBOLS 1 ... Ultrasonic measuring device, 2, 2A ... Ultrasonic probe, 3 ... Ultrasonic sensor, 6 ... Gel supply device, 21 ... First acoustic matching layer, 22, 25 ... Second acoustic matching layer, 23 ... Moving mechanism, 24 ... probe housing 31 ... sensor housing 31B ... supply port 32 ... ultrasonic device 32A ... transmission / reception surface 211 ... lower surface 211A ... flat surface 211B ... curved surface 221A ... contact surface 223 ... Acoustic lens, 237 ... connecting member, Ar1 ... array region, J ... gel, P1 ... virtual surface, P2 ... virtual surface, P3 ... virtual surface, X ... measurement object.

Claims (10)

An ultrasonic device that performs at least one of transmission and reception of ultrasonic waves from one side;
A first acoustic matching portion disposed on the one surface side of the ultrasonic device and having a first surface opposite to the one surface;
A second acoustic matching portion that is disposed on the first surface side of the first acoustic matching portion and has a second surface that contacts the first surface;
A moving mechanism that relatively moves the ultrasonic device, the first acoustic matching unit, and the second acoustic matching unit in an in-plane direction of the first surface and the second surface. Ultrasonic measuring device. The ultrasonic measurement apparatus according to claim 1,
The ultrasonic measurement apparatus, wherein the acoustic impedance decreases or increases in the order of the ultrasonic device, the first acoustic matching unit, and the second acoustic matching unit. In the ultrasonic measuring device according to claim 1 or 2,
An ultrasonic measurement apparatus comprising: an urging unit that urges the first acoustic matching unit toward the second acoustic matching unit. In the ultrasonic measuring device according to any one of claims 1 to 3,
A matching material supply unit that supplies an acoustic matching material that reduces friction between the first surface and the second surface when the first acoustic matching unit and the second acoustic matching unit are relatively moved. An ultrasonic measurement device characterized by that. The ultrasonic measurement apparatus according to claim 4,
The matching material supply unit includes the acoustic matching material on the front side of the first acoustic matching unit in a moving direction of relative movement of the ultrasonic device and the first acoustic matching unit with respect to the second acoustic matching unit. An ultrasonic measurement device comprising a supply port for supply. The ultrasonic measurement apparatus according to claim 5,
The first surface of the first acoustic matching portion is curved so as to move away from the second surface as the slidable contact surface slides on the second surface and away from the slidable surface along the moving direction. An ultrasonic measurement device comprising: a curved surface. In the ultrasonic measuring device according to any one of claims 1 to 6,
The moving mechanism relatively moves the ultrasonic device and the first acoustic matching unit along a first direction,
The ultrasonic device has a one-dimensional array structure having an array region in which a plurality of ultrasonic transducer units are arranged along the first direction,
The second acoustic matching unit has an acoustic lens provided on a surface opposite to the second surface,
The acoustic lens is
In a plan view seen from the ultrasonic device side, provided in a position overlapping the movement range of the array region according to the movement of the ultrasonic device by the moving mechanism,
It has a focal position for converging the ultrasonic wave transmitted from the ultrasonic device in a virtual plane that passes through the center of the array area, is orthogonal to the array area, and is parallel to the first direction. Ultrasonic measuring device. In the ultrasonic measuring device according to any one of claims 1 to 6,
The moving mechanism relatively moves the ultrasonic device and the first acoustic matching unit along a first direction,
The ultrasonic device has a one-dimensional array structure having an array region in which a plurality of ultrasonic transducer portions are arranged along a second direction orthogonal to the first direction,
The second acoustic matching unit has a plurality of acoustic lenses arranged along the first direction on a surface opposite to the second surface,
The acoustic lens is
The dimension in the first direction is not less than the dimension of the array region;
It has a focal position for converging the ultrasonic wave transmitted from the ultrasonic device in a virtual plane passing through the center of the acoustic lens in a plan view viewed from the ultrasonic device side and orthogonal to the first direction. An ultrasonic measurement device characterized by that. In the ultrasonic measuring device according to any one of claims 1 to 8,
A housing that houses at least the ultrasonic device, the first acoustic matching unit, and the moving mechanism;
The ultrasonic measurement apparatus, wherein the second acoustic matching unit is detachably attached to the housing. An ultrasonic device that performs at least one of transmission and reception of ultrasonic waves from one side;
A first acoustic matching portion disposed on the one surface side of the ultrasonic device and having a first surface opposite to the one surface;
A second acoustic matching portion that is disposed on the first surface side of the first acoustic matching portion and has a second surface that contacts the first surface;
A moving mechanism that relatively moves the ultrasonic device, the first acoustic matching unit, and the second acoustic matching unit in an in-plane direction of the first surface and the second surface. Ultrasonic probe.

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