JP2017050368A - Conveying device, vacuum device and charged particle beam device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a conveying device which can be downsized while sufficiently securing a conveyance distance.SOLUTION: A conveying device 10 comprises a stationary rack 12, a slider 20, a driving part 15, a proximal end arm 30, a distal end arm 40, a holding part 41 and a ring train 50. The ring train 50 includes: a proximal end gear 53 coupled to the stationary rack 12; a stationary gear 54; and a distal end gear 56 which is coupled to the stationary gear 54, of which the ratio of a rotation speed with respect to the stationary gear 54 is set to 2 and which is supported by the proximal end arm 30 in a rotatable manner and fixed to the distal end arm 40. The proximal end arm 30 is rotated relatively to the slider 20. Therefore, the conveying device can be shifted between a first state where the holding part 41 is positioned at an opposite side of a first axis O1 in a first direction L1 with a second axis O2 interposed therebetween and a second state where the holding part 41 is positioned at the opposite side of the first axis O1 in the first direction L1 with the second axis O2 interposed therebetween and positioned at an opposite side of the holding part 41 in the first state in a view from the first axis O1.SELECTED DRAWING: Figure 3

Description

  The present invention relates to a transfer device, a vacuum device, and a charged particle beam device.

  Conventionally, inside a vacuum device such as a charged particle beam device, a transported object such as a sample may be transported by a transport device including a pair of connected arms. For example, the conveyance device described in Patent Literature 1 includes a proximal arm that is rotatably supported at the proximal end portion, and an intermediate arm that is coupled to the distal end portion of the proximal end arm, and is coupled to the distal end portion of the intermediate arm. It is possible to move the tip arm in a straight line. The proximal end arm of the transport device is rotatable about an axis fixedly provided at a predetermined location.

JP 2008-235460 A

  By the way, in the said conventional conveying apparatus, in order to enlarge the conveyance distance of a to-be-conveyed object according to the design requirement etc., it is necessary to form a base end arm and an intermediate | middle arm long. However, if the base end arm and the intermediate arm are formed long, there is a problem that the transport device is enlarged. Moreover, in the vacuum apparatus provided with the conveying apparatus, there is a problem that when the conveying apparatus is enlarged, the volume of the vacuum chamber increases, which is disadvantageous in terms of exhaust characteristics.

  Therefore, the present invention provides a transport device that can be downsized while sufficiently securing a transport distance, a vacuum device including the transport device, and a charged particle beam device.

  The transfer device according to the present invention extends along a predetermined direction, has a fixed rack having a first tooth portion, a slider slidably movable in the predetermined direction, and slides the slider along the predetermined direction. A drive unit that is supported by the slider so as to be rotatable about a first axis and extending along a direction orthogonal to the first axis, and the first axis with respect to the base arm A tip arm that is supported so as to be rotatable around a second axis that is provided in parallel to each other and that extends along a direction orthogonal to the second axis, and that is provided at a tip portion of the tip arm to hold an object to be conveyed. A power transmission mechanism that transmits the power of the drive unit to the base arm and the distal arm, and the power transmission mechanism is disposed coaxially with the first shaft, and includes the first teeth. Connected to the part, A base end rotating body that is rotatably supported by the rider and is fixed to the base end arm, and a fixed rotation that is disposed coaxially with the first shaft and is non-rotatable with respect to the slider. And a rotation ratio with respect to the fixed rotating body is set to 2 and is rotatably supported with respect to the proximal arm. A distal end rotating body fixed to the distal end arm, and the base end arm rotates relative to the slider so that the holding portion holds the first axis in the predetermined direction across the second axis. A first state located on the opposite side of the shaft; and the holding portion is located on the opposite side of the first shaft in the predetermined direction across the second shaft, and the first portion as viewed from the first shaft. Opposite to the holding part in one state A second state that is located on the side, and is capable of migrating between, characterized in that.

According to the present invention, the base end rotating body is provided that is coupled to the first tooth portion of the fixed rack and is rotatably supported with respect to the slider. The rotating body can be rotated with respect to the slider. Since the base end rotating body is fixed with respect to the base end arm, the base end arm can be rotated with respect to the slider by rotating the base end rotating body with respect to the slider. For this reason, the holding portion is located on the opposite side of the first axis in the predetermined direction across the second axis, and the holding portion is located on the opposite side of the first axis in the predetermined direction across the second axis. It is possible to shift between the second state that is located and located on the side opposite to the holding portion in the first state when viewed from the first axis.
Here, in the first state, the first shaft, the second shaft, and the holding portion are arranged in the order of the first shaft, the second shaft, and the holding portion from one side to the other side in the predetermined direction. In the second state, the first shaft, the second shaft, and the holding portion are arranged in the order of the holding portion, the second shaft, and the first shaft from one side to the other side in the predetermined direction. For this reason, when the separation distance between the first axis and the second axis is r1, and the separation distance between the second axis and the holding portion is r2, the transition between the first state and the second state is performed. The holding portion can be moved 2 (r1 + r2) in a predetermined direction as viewed from one axis. Moreover, when moving between the first state and the second state, the slider moves along a predetermined direction. Therefore, the holding unit can be further moved in the predetermined direction by the distance of the slide movement.
As described above, the conveyance distance of the object to be conveyed can be increased without forming the distal end arm and the proximal end arm long. Therefore, it is possible to achieve both the suppression of the increase in size of the transfer device and the increase in the transfer distance, and a transfer device that can be downsized while sufficiently securing the transfer distance.

In the above conveying device, it is desirable that the base end rotating body, the fixed rotating body, and the distal end rotating body are gears.
According to the present invention, the connection between the first tooth portion and the base end rotating body and the connection between the fixed rotating body and the front end rotating body are performed by using, for example, a gear or a toothed belt, or by directly meshing with each other. realizable. For this reason, the motive power of a drive part can be transmitted reliably. Therefore, a transport apparatus that can operate more accurately is obtained.

In the above-described transfer device, it is preferable that the conveyance device includes an intermediate gear that is rotatably supported by the base end arm and meshes with the fixed rotating body and the distal end rotating body.
According to the present invention, the fixed rotating body and the tip rotating body are connected by the intermediate gear. Therefore, the connection between the fixed rotating body and the tip rotating body can be realized with a simple configuration.

In the above conveying apparatus, it is preferable that a separation distance between the holding unit and the second shaft is formed to be equal to a separation distance between the first shaft and the second shaft.
According to the present invention, the holding unit can be moved on a straight line connecting the position of the holding unit in the first state and the position of the holding unit in the second state. Therefore, the object to be transported can be transported linearly, and an increase in the dimension in the direction orthogonal to the transport direction in the mounting destination apparatus can be suppressed.

In the transport apparatus, the drive unit is provided on the slider, extends along the predetermined direction, and has a slider rack having a second tooth portion, and a motor that rotationally drives a pinion that meshes with the second tooth portion. It is desirable to have
According to the present invention, a motor arranged in a fixed state can be used as a drive source. For example, in a vacuum apparatus, the motor main body is arranged on the atmosphere side, and the motor output shaft is rotated and introduced into the vacuum chamber. It becomes possible to do. Therefore, it is not necessary to use a special drive source to arrange the entire drive unit in the vacuum chamber, and the cost of the transport device can be reduced. Furthermore, by arranging the main body of the motor on the atmosphere side, the drive unit can be easily maintained.

In the conveying apparatus, it is desirable that the base end rotating body is a gear and is connected to the first tooth portion via at least one transmission gear.
According to the present invention, the separation distance between the base end rotating body and the first tooth portion can be arbitrarily set. Therefore, it can be set as the conveyance apparatus with a large design freedom.

A vacuum apparatus according to the present invention includes the above-described transport device.
According to the present invention, by providing the above-described transport device, an increase in the volume in the vacuum chamber can be suppressed, and a small vacuum device having excellent exhaust characteristics can be obtained.

The charged particle beam device of the present invention includes the vacuum device described above, a charged particle beam column that irradiates a sample with a charged particle beam, and detection that detects secondary particles emitted from the sample by irradiation with the charged particle beam. And a vessel.
According to the present invention, by providing the above-described vacuum device, an increase in volume in the vacuum chamber can be suppressed, and a small charged particle beam device having excellent exhaust characteristics can be obtained.

  According to the present invention, it is possible to increase the transport distance of the object to be transported without forming the tip arm and the base arm long. Therefore, it is possible to achieve both suppression of the increase in size of the transfer device and increase in the transfer distance, and a transfer device that can be downsized while sufficiently securing the transfer distance.

It is a block diagram of the vacuum apparatus of embodiment. It is sectional drawing in the II-II line of FIG. It is a top view of a conveying apparatus. It is a side view of a conveying apparatus. It is sectional drawing in the VV line | wire of FIG. It is a top view of a conveying apparatus. It is a top view of a conveying apparatus. It is operation | movement explanatory drawing of a vacuum device, and is sectional drawing in the part corresponded to the II-II line | wire of FIG. It is operation | movement explanatory drawing of a vacuum device, and is sectional drawing in the part corresponded to the II-II line | wire of FIG.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
In the present embodiment, a focused ion beam device which is a kind of charged particle beam device will be described as an example of the vacuum device 1.

FIG. 1 is a configuration diagram of a vacuum apparatus according to an embodiment. 2 is a cross-sectional view taken along line II-II in FIG. In addition, the vacuum apparatus 1 is used in the state installed in the horizontal surface.
As shown in FIG. 1, the vacuum apparatus 1 includes a first vacuum chamber 3, a second vacuum chamber 4 disposed on the side of the first vacuum chamber 3, and a transfer disposed inside the second vacuum chamber 4. The apparatus 10 is provided. The vacuum device 1 is placed on a vibration isolation table 2. In the following description, the direction in which the first vacuum chamber 3 and the second vacuum chamber 4 are arranged is defined as the first direction L1 (predetermined direction), and the direction orthogonal to the first direction L1 and the up-down direction is the second direction. It is defined as L2. Further, the reference numeral L3 is attached in the vertical direction.

  The first vacuum chamber 3 is formed in a hollow rectangular parallelepiped shape, for example, with a metal material, and a sample chamber 3a is formed therein. A sample stage (not shown) is arranged in the sample chamber 3a. The sample stage can set a sample holder 9 (conveyed object) to which a sample S such as a wafer is fixed. The sample holder 9 of the present embodiment is provided on a disc-shaped holder main body 9a for fixing the sample S, a holder base 9b for supporting the holder main body 9a from below, and a side of the holder base 9b, which will be described later. And a hook portion 9c into which the holding portion 41 is fitted (see FIG. 2). The sample holder 9 is supported so as to be able to slide in the first vacuum chamber 3 and the second vacuum chamber 4 along the first direction L1. On the side wall of the first vacuum chamber 3 on the second vacuum chamber 4 side, an opening 3b penetrating in the first direction L1 is formed.

  A first exhaust pump (not shown) is connected to the first vacuum chamber 3. The first exhaust pump depressurizes the sample chamber 3a to make it a vacuum state. In addition, an ion beam column 6 (charged particle beam column) and a detector 8 (detector) are disposed on the upper portion of the first vacuum chamber 3. The ion beam column 6 is arranged so as to be able to irradiate an ion beam (charged particle beam) toward the sample S set on the sample stage. The detection unit 8 includes a secondary electron detector that detects secondary electrons (secondary particles) emitted from the sample S when the sample S is irradiated with the ion beam.

  The second vacuum chamber 4 is attached to the first vacuum chamber 3 via a gate valve 5. The second vacuum chamber 4 is formed in a hollow rectangular parallelepiped shape, for example, with a metal material, and a preliminary sample chamber 4a is formed therein. The space volume of the preliminary sample chamber 4a is sufficiently smaller than the space volume of the sample chamber 3a. An opening 4b penetrating in the first direction L1 is formed on the side wall of the second vacuum chamber 4 on the first vacuum chamber 3 side so as to correspond to the opening 3b of the first vacuum chamber 3 when viewed from the first direction L1. ing. The opening 4b and the opening 3b of the first vacuum chamber 3 allow the sample chamber 3a and the preliminary sample chamber 4a to communicate with each other when the gate valve 5 is open. A door 4c that opens the preliminary sample chamber 4a is provided on the opposite side of the second vacuum chamber 4 from the opening 4b in the first direction L1. A second exhaust pump (not shown) is connected to the second vacuum chamber 4. The second exhaust pump depressurizes the preliminary sample chamber 4a to make it a vacuum state.

FIG. 3 is a plan view of the transport device.
As shown in FIG. 3, the transport device 10 includes a fixed rack 12, a slider 20, a drive unit 15, a proximal arm 30, a distal arm 40, and a wheel train 50 (power transmission mechanism). Yes.
The fixed rack 12 is provided on the inner wall of the second vacuum chamber 4. The fixed rack 12 extends along the first direction L1. The fixed rack 12 has a fixed rack tooth portion 12a (first tooth portion) on one side surface in the second direction L2.

  The slider 20 is formed in a rectangular shape in plan view, and is formed in a concave shape that opens downward. A slider rack 16 (drive unit 15) is provided on one side edge of the slider 20 in the second direction L2. The slider rack 16 extends along the first direction L1. The slider rack 16 has a slider rack tooth portion 16a (second tooth portion) on one side surface in the second direction L2. A pinion 18 is engaged with the slider rack tooth portion 16a. The pinion 18 is rotationally driven by a motor 17 (drive unit 15). The output shaft 17a of the motor 17 to which the pinion 18 is attached is rotated and introduced into the preliminary sample chamber 4a. The main body of the motor 17 is disposed outside the second vacuum chamber 4 (see FIG. 1).

FIG. 4 is a side view of the transport device.
As shown in FIG. 4, guide grooves 23 and 24 are formed on the side walls on both sides in the second direction L <b> 2 of the slider 20. The guide grooves 23 and 24 open toward the outside in the second direction L2, respectively, and extend along the first direction L1. Rails (not shown) provided on the inner wall of the second vacuum chamber 4 enter the guide grooves 23 and 24, respectively, so that the slider 20 can be slid along the first direction L1.

  Cutout portions 25 are formed in the side walls on both sides in the first direction L1 of the slider 20, respectively. The pair of notches 25 are formed at the same position when viewed from the first direction L1. Inside the cutout 25, the fixed rack 12 is arranged.

5 is a cross-sectional view taken along line VV in FIG.
As shown in FIG. 5, a support shaft member 27 is inserted through the slider 20 along the vertical direction L3. The support shaft member 27 is disposed closer to the opening 4b than the central portion of the slider 20 in the first direction L1. The support shaft member 27 can be divided in the vertical direction L3. The support shaft member 27 is supported by the slider 20 via the bearing 29 so as to be rotatable about the first axis O1 along the vertical direction L3.

  The proximal arm 30 is fixed to the upper end portion of the support shaft member 27 by bolts 62. The proximal arm 30 is supported so as to be rotatable about the first axis O <b> 1 with respect to the slider 20. The proximal arm 30 extends from a proximal end fixed to the support shaft member 27 along a direction orthogonal to the first axis O1. The proximal arm 30 is formed so as to gradually become narrower as it goes from the proximal end to the distal end (see FIG. 3).

  The distal arm 40 is supported so as to be rotatable around the second axis O <b> 2 via the second bearing 38 with respect to the distal end portion of the proximal arm 30. The second axis O2 is provided in parallel with the first axis O1. The distal arm 40 extends from the proximal end supported by the proximal arm 30 along a direction orthogonal to the second axis O2. The distal arm 40 is formed so as to gradually become narrower from the proximal end toward the distal end (see FIG. 3).

A holding portion 41 is provided at the distal end portion of the distal arm 40. The holding part 41 is formed in a columnar shape protruding upward. The separation distance r2 between the central axis of the holding portion 41 and the second axis O2 is equal to the separation distance r1 between the first axis O1 and the second axis O2. The holding portion 41 can be fitted with a hook portion 9c provided on the sample holder 9 (see FIG. 2).
When the first axis O1 and the second axis O2 are aligned along the first direction L1, the proximal arm 30 and the distal arm 40 are configured such that the holding portion 41 is first in the first direction L1 across the second axis O2. It is connected so as to be located on the side opposite to the axis O1.

  As shown in FIG. 3, the train wheel 50 transmits the power of the drive unit 15 to the proximal arm 30 and the distal arm 40. The train wheel 50 includes a first transmission gear 51 (transmission gear), a second transmission gear 52 (transmission gear), a base gear 53 (base rotation body), a fixed gear 54 (fixed rotation body), and an intermediate gear. A gear 55 and a tip gear 56 (tip rotating body) are provided.

  The first transmission gear 51 is disposed inside the concave slider 20, and is supported so as to be rotatable about an axis along the vertical direction L3 with respect to the upper wall of the slider 20 (see FIG. 5). The first transmission gear 51 is disposed closer to the door 4c than the central portion of the slider 20 in the first direction L1. The first transmission gear 51 meshes with the fixed rack tooth portion 12 a of the fixed rack 12. A meshing portion between the first transmission gear 51 and the fixed rack tooth portion 12 a is visible through a through hole 20 a provided in the upper wall of the slider 20.

  The second transmission gear 52 is disposed inside the concave slider 20 and is supported so as to be rotatable about an axis along the vertical direction L3 with respect to the upper wall of the slider 20 (see FIG. 5). The second transmission gear 52 is disposed closer to the opening 4b in the first direction L1 than the first transmission gear 51. The second transmission gear 52 meshes with the first transmission gear 51.

  As shown in FIG. 5, the proximal gear 53 is disposed coaxially with the first shaft O <b> 1 and is fixed to the lower end portion of the support shaft member 27 by a bolt 63. The proximal gear 53 is supported so as to be rotatable about the first axis O <b> 1 with respect to the slider 20, and is fixed to the proximal end portion of the proximal arm 30. The base end gear 53 meshes with the second transmission gear 52 (see FIG. 3). Accordingly, the base end gear 53 is connected to the fixed rack tooth portion 12 a of the fixed rack 12 via the first transmission gear 51 and the second transmission gear 52.

  The fixed gear 54 is disposed above the slider 20 and coaxially with the first axis O1. A through hole 54 a is formed at the center of the fixed gear 54 and is externally inserted into the bearing 29. The fixed gear 54 is fixed to the upper surface of the slider 20 by a bolt 61 and is provided so as not to rotate with respect to the slider 20.

  The intermediate gear 55 is disposed below the proximal arm 30. The intermediate gear 55 is supported at the intermediate portion in the extending direction with respect to the base end arm 30 via the third bearing 39 so as to be rotatable around an axis along the vertical direction L3. The intermediate gear 55 is in mesh with the fixed gear 54.

  The distal end gear 56 is disposed coaxially with the second axis O2 below the distal end portion of the proximal end arm 30. The distal gear 56 is supported by the distal end portion of the proximal arm 30 via the second bearing 38 so as to be rotatable about the second axis O2. The distal end gear 56 is fixed to the proximal end portion of the distal end arm 40 by a bolt 64. The tip gear 56 meshes with the intermediate gear 55. The number of teeth of the tip gear 56 is set to ½ of the number of teeth of the fixed gear 54. As a result, the tip gear 56 has a rotation ratio of 2 with respect to the fixed gear. That is, when the fixed gear 54 makes one rotation when viewed from the rotation axis (second shaft O2) of the tip gear 56, the tip gear 56 rotates about the second axis O2.

Hereinafter, the operation of the transport apparatus 10 of the present embodiment will be described.
As shown in FIG. 3, in a state where the holding portion 41 is located on the opposite side of the first axis O1 in the first direction L1 across the second axis O2 (hereinafter referred to as “first state”), the first is performed. The axis O1, the second axis O2, and the holding portion 41 are arranged in the order of the first axis O1, the second axis O2, and the holding portion 41 from the opening 4b side to the door 4c side along the first direction L1. .

  In the transport device 10 in the first state, when the slider 20 is slid to the opening 4b side along the first direction L1 by the driving unit 15, the base gear 53 connected to the fixed rack tooth portion 12a of the fixed rack 12 is provided. Rotates clockwise in plan view. More specifically, when the slider 20 is slid and moved toward the opening 4b along the first direction L1, the first transmission gear 51 that meshes with the fixed rack tooth portion 12a of the fixed rack 12 rotates in the clockwise direction in plan view. When the first transmission gear 51 rotates in the clockwise direction in plan view, the second transmission gear 52 that meshes with the first transmission gear 51 rotates in the counterclockwise direction in plan view. When the second transmission gear 52 rotates counterclockwise in plan view, the proximal gear 53 that meshes with the second transmission gear 52 rotates clockwise around the first axis O1 in plan view. The rotation angle θ of the base end gear 53 is θ = 360 ° × L / (2πR), where R is the radius of the base end gear 53 and L is the moving distance of the slider 20.

  The proximal arm 30 is supported so as to be rotatable about the first axis O <b> 1 with respect to the slider 20. Further, a base end gear 53 is fixed to the base end portion of the base end arm 30. For this reason, the base end gear 53 rotates clockwise around the first axis O1 in a plan view, so that the base end arm 30 rotates clockwise around the first axis O1 in a plan view.

  An intermediate gear 55 and a tip gear 56 are rotatably supported on the proximal arm 30. The intermediate gear 55 meshes with a fixed gear 54 disposed coaxially with the first shaft O1. The fixed gear 54 is provided so as not to rotate with respect to the slider 20. For this reason, when the proximal end arm 30 rotates in the clockwise direction around the first axis O1 in plan view, the intermediate gear 55 rotates in the clockwise direction while revolving around the first axis O1 in plan view. . Further, the tip gear 56 rotates around the second axis O2 in the counterclockwise direction while revolving around the first axis O1 in a plan view.

  The distal arm 40 is supported to be rotatable about the second axis O <b> 2 with respect to the distal end portion of the proximal arm 30. A distal end gear 56 is fixed to the proximal end portion of the distal end arm 40. For this reason, as the proximal end arm 30 rotates, the distal end gear 56 rotates counterclockwise around the second axis O2, so that the distal end arm 40 is counterclockwise in a plan view with respect to the proximal end arm 30. Rotate.

  Here, the tip gear 56 is set to have a rotation ratio of 2 with respect to the fixed gear 54. Therefore, when the proximal end arm 30 rotates, for example, by an angle θ around the first axis O1, the distal end gear 56 rotates around the second axis O2 by an angle 2θ when viewed from the proximal end arm 30. Moreover, the separation distance r2 between the central axis of the holding portion 41 provided at the distal end portion of the distal arm 40 and the second axis O2 is equal to the separation distance r1 between the first axis O1 and the second axis O2. For this reason, the holding part 41 is seen from the slider 20 along the first direction L1 from the position in the first state toward the first axis O1 in the plan view and the central axis of the holding part 41 in the first state. It moves on a straight line P passing through one axis O1.

6 and 7 are plan views of the transfer device.
As shown in FIG. 6, when the slider 20 is slid by πR / 2 toward the opening 4 b from the position in the first state shown in FIG. 3 by the driving unit 15, the proximal arm 30 is moved from the first state to the first axis. Rotate 90 ° clockwise around O1. When the proximal arm 30 is rotated by 90 °, the distal arm 40 is rotated by 180 ° around the second axis O2 with respect to the proximal arm 30. As a result, the center axis of the holding portion 41 is in a state of being positioned on the first axis O1 (hereinafter referred to as “intermediate state”). At this time, the holding portion 41 is moved from the first state to the intermediate state, thereby moving r1 + r2 along the first direction L1 from the door 4c side toward the opening 4b side as viewed from the slider 20. Further, the slider 20 has moved by πR / 2 from the position in the first state toward the opening 4b along the first direction L1.

  When the proximal end arm 30 is rotated clockwise from the intermediate state around the first axis O1 by the driving unit 15, the holding unit 41 is separated from the first axis O1 along the first direction L1 while being on the straight line P. Continue moving. As shown in FIG. 7, when the slider 20 slides by πR from the position in the first state shown in FIG. 3 toward the opening 4b, the rotation angle of the proximal end arm 30 from the first state reaches 180 °. When the proximal arm 30 is rotated 180 ° from the first state, the holding portion 41 is located on the opposite side of the first axis O1 in the first direction L1 across the second axis O2, and viewed from the first axis O1. A state (hereinafter referred to as “second state”) located on the opposite side of the holding portion 41 in the first state is obtained. In the second state, the first axis O1, the second axis O2, and the holding portion 41 are arranged along the first direction L1 from the opening 4b side toward the door 4c side, the holding portion 41, the second axis O2, and the first portion. They are arranged in the order of the axis O1. At this time, the holding part 41 moves 2 (r1 + r2) from the door 4c side toward the opening 4b side along the first direction L1 when viewed from the slider 20 by shifting from the first state to the second state. ing. Further, the slider 20 has moved by πR from the position in the first state toward the opening 4b along the first direction L1.

As described above, by sliding the slider 20 by the driving unit 15, the holding unit 41 can be moved by 2 (r1 + r2) + πR on the straight line P along the first direction L1.
In the above description, the case where the transfer device 10 is shifted from the first state to the second state has been described, but the case where the transfer device 10 is shifted from the second state to the first state is driven from the second state. The slider 15 can be similarly slid by the portion 15 along the first direction L1 from the opening 4b side to the door 4c side.

Next, operation | movement of the vacuum apparatus 1 provided with the conveying apparatus 10 is demonstrated.
8 and 9 are explanatory views of the operation of the vacuum apparatus, and are cross-sectional views taken along the line II-II in FIG.

  When the sample S is introduced into the vacuum apparatus 1, as shown in FIG. 8, the door 4c is opened with the gate valve 5 closed, and the preliminary sample chamber 4a is opened. Next, the transfer device 10 is set to the first state, and the holding unit 41 is protruded from the preliminary sample chamber 4a. Next, the hook portion 9 c of the sample holder 9 to which the sample S is fixed is fitted into the holding portion 41, and the sample holder 9 is held by the holding portion 41.

  Next, the slider 15 is moved toward the opening 4b by the drive unit 15 (see FIG. 3), the sample holder 9 is moved linearly, and the sample holder 9 is stored in the preliminary sample chamber 4a. When the sample holder 9 is completely accommodated in the preliminary sample chamber 4a, as shown in FIG. 2, the door 4c is closed and the preliminary sample chamber 4a is evacuated by a second exhaust pump (not shown).

When the degree of vacuum in the preliminary sample chamber 4a reaches a predetermined degree of vacuum, the gate valve 5 is opened. Next, as shown in FIG. 9, the slider 20 is moved toward the opening 4 b by the driving unit 15 (see FIG. 3) to shift to the second state. Thereby, the sample holder 9 held by the holding part 41 passes through the opening 4b and the opening 3b while being moved on the straight line P along the first direction L1, and is conveyed into the sample chamber 3a. Thereby, the sample S can be conveyed in the sample chamber 3a.
Thus, the introduction of the sample S into the sample chamber 3a is completed.
In addition, about the case where the sample S in the sample chamber 3a is conveyed out of the vacuum apparatus 1, it can implement | achieve by performing said series of operation | movement reversely.

  As described above, according to the present embodiment, since the base end gear 53 is connected to the fixed rack tooth portion 12a of the fixed rack 12 and supported rotatably with respect to the slider 20, the slider is driven by the drive unit 15. By sliding 20, the proximal gear 53 can be rotated with respect to the slider 20. Since the base end gear 53 is fixed with respect to the base end arm 30, the base end arm 30 can be rotated with respect to the slider 20 by rotating the base end gear 53 with respect to the slider 20. Therefore, the first state in which the holding unit 41 is located on the opposite side of the first axis O1 in the first direction L1 across the second axis O2, and the first direction L1 across the second axis O2. In the second state, it is possible to shift between a second state located on the opposite side to the first axis O1 and located on the opposite side to the holding portion 41 in the first state when viewed from the first axis O1.

Here, in the first state, the first axis O1, the second axis O2, and the holding portion 41 are the door 4c from the opening 4b side in the first direction L1 in the order of the first axis O1, the second axis O2, and the holding portion 41. Lined up towards the side. In the second state, the first shaft O1, the second shaft O2, and the holding portion 41 are arranged in the order of the holding portion 41, the second axis O2, and the first axis O1, from the opening 4b side in the first direction L1 to the door 4c side. Are lined up towards Therefore, when the separation distance between the first axis O1 and the second axis O2 is r1, and the separation distance between the second axis O2 and the central axis of the holding portion 41 is r2, the distance between the first state and the second state is , The holding portion 41 can be moved 2 (r1 + r2) in the first direction L1 when viewed from the first axis O1. In addition, when transitioning between the first state and the second state, the slider 20 moves along the first direction L1. Therefore, the holding part 41 can be further moved in the first direction L1 by a distance corresponding to the slide movement.
As described above, the transport distance of the sample holder 9 can be increased without forming the distal end arm 40 and the proximal end arm 30 long. Therefore, it is possible to achieve both the suppression of the increase in size of the transfer device 10 and the increase in the transfer distance, and the transfer device 10 that can be downsized while sufficiently securing the transfer distance.

Further, since the train wheel 50 is constituted by a gear, the power of the drive unit 15 can be transmitted more reliably. Therefore, the conveyance apparatus 10 which can operate | move more correctly is obtained.
Further, since the intermediate gear 55 meshes with the fixed gear 54 and the tip gear 56, the fixed gear 54 and the tip gear 56 are connected by the intermediate gear 55. Therefore, the connection between the fixed gear 54 and the tip gear 56 can be realized with a simple configuration.

  Further, since the separation distance r2 between the central axis of the holding portion 41 and the second axis O2 is formed to be equal to the separation distance r1 between the first axis O1 and the second axis O2, the holding distance in the first state is maintained. The holding part 41 can be moved on a straight line P connecting the position of the part 41 and the position of the holding part 41 in the second state. Therefore, the sample holder 9 can be conveyed linearly, and an increase in the dimension in the second direction L2 orthogonal to the conveyance direction (first direction L1) in the vacuum apparatus 1 at the mounting destination can be suppressed.

  The drive unit 15 is provided on the slider 20 and extends along the first direction L1. The motor 17 rotates and drives a slider rack 16 having a slider rack tooth portion 16a and a pinion 18 engaged with the slider rack tooth portion 16a. Therefore, the motor 17 arranged in a fixed state can be used as a drive source. Thereby, for example, in the vacuum apparatus 1, the main body of the motor 17 can be arranged on the atmosphere side, and the output shaft 17 a of the motor 17 can be rotated and introduced into the second vacuum chamber 4. Therefore, it is not necessary to use a special drive source in order to arrange the entire drive unit 15 in the second vacuum chamber 4, and the cost of the transport apparatus 10 can be reduced. Furthermore, the drive unit 15 can be easily maintained by arranging the main body of the motor 17 on the atmosphere side.

  Further, since the base end gear 53 is connected to the fixed rack tooth portion 12a via at least one transmission gear (the first transmission gear 51 and the second transmission gear 52), the base end gear 53 and the fixed rack are connected. The separation distance from the tooth portion 12a can be arbitrarily set. Therefore, it can be set as the conveying apparatus 10 with a large design freedom.

  In addition, since the vacuum apparatus 1 of the present embodiment includes the transfer apparatus 10, an increase in the volume in the vacuum chamber can be suppressed, and a small charged particle beam apparatus with excellent exhaust characteristics can be obtained.

In the above-described embodiment, the gear train 50 using the gears is described as the power transmission mechanism that transmits the power of the driving unit 15 to the proximal arm 30 and the distal arm 40. However, the present invention is not limited to this. .
As the power transmission mechanism, for example, a belt drive mechanism using a belt and a pulley may be applied. That is, a pulley is used as the proximal end rotating body and the distal end rotating body, and a belt is hung on the outer periphery of the proximal end rotating body and the distal end rotating body. As the proximal arm rotates about the first axis O1, the belt rotates relative to the proximal arm. As the belt rotates, the distal end rotating body rotates with respect to the proximal end arm, and the distal end arm rotates about the second axis O2 with respect to the proximal end arm. As described above, the power of the drive unit 15 can be transmitted to the proximal arm and the distal arm.
In addition, a mechanism using a roller chain and a sprocket can be applied as the power transmission mechanism.

The present invention is not limited to the above-described embodiment described with reference to the drawings, and various modifications can be considered within the technical scope thereof.
For example, in the above-described embodiment, the transfer device 10 is used for transferring a sample S such as a wafer, but is not limited thereto, and is applied as a robot arm used for transferring parts in various manufacturing processes, for example. May be.

  In each of the above embodiments, a focused ion beam apparatus has been described as an example of a charged particle beam apparatus. However, the present invention is not limited to this, and a scanning electron microscope or the like may be used. Further, the vacuum apparatus is not limited to the charged particle beam apparatus, and may be an analysis apparatus such as Auger electron spectroscopy or secondary ion mass spectrometry, a scanning probe microscope, a film forming apparatus, a sputtering apparatus, or the like.

  In addition, it is possible to appropriately replace the components in the above-described embodiments with known components without departing from the spirit of the present invention.

  DESCRIPTION OF SYMBOLS 1 ... Vacuum apparatus (charged particle beam apparatus) 6 ... Ion beam column (charged particle beam column) 8 ... Detection part (detector) 9 ... Sample holder (conveyed object) 10 ... Transfer apparatus 12 ... Fixed rack 12a ... Fixed rack tooth portion (first tooth portion) 15 ... drive portion 16 ... slider rack 16a ... slider rack tooth portion (second tooth portion) 17 ... motor 18 ... pinion 20 ... slider 30 ... proximal arm 40 ... tip arm 41 ... Holding unit 50 ... train wheel (power transmission mechanism) 51 ... first transmission gear (transmission gear) 52 ... second transmission gear (transmission gear) 53 ... base end gear (base end rotating body) 54 ... fixed gear (fixed rotating body) 55 ... Intermediate gear 56 ... Tip gear (tip rotating body) L1 ... First direction (predetermined direction) O1 ... First axis O2 ... Second axis

Claims (8)

A fixed rack extending along a predetermined direction and having a first tooth portion;
A slider provided to be slidable in the predetermined direction;
A drive unit that slides the slider along the predetermined direction;
A proximal arm that is rotatably supported about the first axis relative to the slider and extends along a direction perpendicular to the first axis;
A distal arm supported rotatably with respect to a second axis provided in parallel to the first axis with respect to the proximal arm, and extending along a direction perpendicular to the second axis;
A holding portion that is provided at a tip portion of the tip arm and holds an object to be conveyed;
A power transmission mechanism for transmitting the power of the drive unit to the proximal arm and the distal arm;
With
The power transmission mechanism is
A proximal rotator disposed coaxially with the first shaft, coupled to the first tooth portion, rotatably supported with respect to the slider, and fixed with respect to the proximal arm;
A fixed rotating body that is arranged coaxially with the first shaft and is non-rotatable with respect to the slider;
It is arranged coaxially with the second shaft, is connected to the fixed rotating body, has a ratio of the number of rotations to the fixed rotating body set to 2, is supported rotatably with respect to the proximal arm and the distal arm A tip rotating body fixed against
With
By rotating the proximal arm with respect to the slider,
A first state in which the holding portion is located on the opposite side of the first axis in the predetermined direction across the second axis;
The holding part is located on the opposite side to the first axis in the predetermined direction across the second axis, and is located on the opposite side to the holding part in the first state when viewed from the first axis. A second state;
Can be migrated between,
A conveying apparatus characterized by that. The proximal end rotating body, the fixed rotating body, and the distal end rotating body are gears, respectively.
The conveying apparatus according to claim 1. An intermediate gear that is rotatably supported with respect to the proximal arm and meshes with the fixed rotating body and the distal end rotating body;
The conveying apparatus according to claim 2. The separation distance between the holding portion and the second axis is formed to be equal to the separation distance between the first axis and the second axis.
The conveying apparatus according to any one of claims 1 to 3, wherein The drive unit is
A slider rack provided on the slider, extending along the predetermined direction, and having a second tooth portion;
A motor that rotationally drives a pinion that meshes with the second tooth portion;
With
The conveying apparatus according to any one of claims 1 to 4, characterized in that: The base end rotating body is a gear, and is connected to the first tooth portion via at least one transmission gear.
The conveying apparatus according to any one of claims 1 to 5, wherein   A vacuum apparatus comprising the transfer device according to claim 1. A vacuum apparatus according to claim 7;
A charged particle beam column for irradiating the sample with a charged particle beam;
A detector for detecting secondary particles emitted from the sample by irradiation of the charged particle beam;
A charged particle beam device comprising:

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