JP2017047381A - Coating device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a coating device which inhibits a coating liquid residing in a discharge slit during non-coating time from drying to invite clogging in the discharge slit or a decrease in coating quality.SOLUTION: A coating device comprises a coating liquid supply port 2 supplied with a coating liquid, a discharge slit 3 that discharges the coating liquid supplied to the coating liquid supply port 2, a coating head 1 having a lip surface 4 located at the tip of the discharge slit 3 to be capable of holding the coating liquid under surface tension, a coating liquid inflow port 6 provided attachably to and detachably from the lip surface 4 to communicate with the discharge slit 3 when attached to the lip surface 4, a coating liquid recovery member 5 having a coating liquid outflow port 7 out of which the coating liquid having flowed in from the coating liquid inflow port 6 flows, and a coating liquid recovery pipe 8 that returns the coating liquid having flowed out of the coating liquid outflow port 7 into the coating liquid supply port 2, thereby being configured so that the coating liquid recovery member 5 may be attached to the lip surface 4 on non-coating time to make the coating liquid circulate through a circulation path constituted of the coating head 1, the coating liquid recovery member 5, and the coating liquid recovery pipe 8.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a coating apparatus for coating a coating liquid using a coating head having a discharge slit on a substrate.

  As a means for forming a new layer on the base material, there is a means for coating the base material with a coating liquid in which a material to be formed is dissolved or dispersed in a liquid. A portion where the layer is formed is referred to as a coated portion, and a portion where a base material not formed is exposed is referred to as an uncoated portion. Intermittent coating in which a coated portion and an uncoated portion are alternately repeated at a predetermined length may be used when producing fuel cell electrodes or lithium ion battery electrodes.

  As a technique for coating, there is a technique using a coating head having a discharge slit or a spray. The coating method using the coating head is such that the distance between the coating head and the substrate is controlled from several tens of microns to several hundreds of microns, and the coating liquid discharged from the discharge slit of the coating head is applied to the coating head. It is applied to the base material by crosslinking between the base material and the base material.

  Compared with the spray coating method in which the coating liquid is scattered, the present method has an effect of reducing the cost when using an expensive coating liquid because the liquid feeding loss of the coating liquid is small. When performing intermittent coating using this method, the crosslinking state of the coating liquid between the coating head and the substrate is controlled, and the state in which the coating liquid is crosslinked and the state in which the coating liquid is not crosslinked are alternately repeated. .

  The method of applying the coating liquid using a coating head having a discharge slit on the substrate is characterized in that all of the supply circuit of the coating liquid is a sealed system up to the tip of the coating head, The coating liquid is exposed to the outside air at the tip of the discharge slit of the coating head.

  Therefore, when the coating stop time is prolonged, the coating liquid tends to dry at the tip of the discharge slit, and the solidified component of the coating liquid is clogged in the discharge slit or the streaks of the film applied to the substrate. This causes the coating quality to deteriorate.

  Therefore, take measures to discharge the solvent that has entered the inside of the discharge slit and fill the entire width of the tip of the discharge slit by discharging a certain amount of the coating liquid at a dedicated place after the cleaning operation. It has been known. However, in this method, since the discharged coating liquid is discarded, there is a problem that when an expensive coating liquid is used, the loss of the material increases as the discard amount increases.

  As countermeasures, the coating head used for coating has a discharge slit that discharges the coating liquid, a lip surface that is located on both sides of the tip of the discharge slit and can hold the coating liquid by surface tension, and holds it on the lip surface. It has been proposed to provide a suction slit for sucking the applied coating liquid (for example, see Patent Document 1).

  In the coating head having the configuration proposed in Patent Document 1, during the standby of the coating head, that is, during non-coating, the flow of the coating liquid flowing from the discharge slit to the suction slit through the lip surface is generated. be able to. As a result, drying and solidification of the coating liquid at the tip of the discharge slit can be prevented. For this reason, at the start of the next coating, even if the cleaning operation is not performed, no streaks are generated on the next coated surface, and a good coating can be performed.

Japanese Patent Application Laid-Open No. 2004-113954

  However, in the configuration of the above-mentioned conventional Patent Document 1, since the circulation path of the coating liquid is not a closed system, the liquid feeding speed for circulating the coating liquid at the time of non-coating cannot be sufficiently increased, and the discharge The problem is that the slits cannot be sufficiently prevented from clogging.

  In particular, when the coating liquid is composed of easily dried components, the coating liquid staying in the discharge slit during non-coating is dried, and the solidified component of the coating liquid is clogged in the discharge slit. The problem is that the phenomenon of causing streaks in the film coated on the substrate and causing a decrease in coating quality and a phenomenon in which the coating liquid component changes cannot be sufficiently suppressed.

  In the present invention, the coating liquid staying in the discharge slit at the time of non-coating is dried, and the solidified component of the coating liquid causes clogging of the discharge slit and the generation of streaks in the film applied to the substrate. An object of the present invention is to provide a coating apparatus that suppresses a phenomenon that causes a decrease in quality and a phenomenon that a coating liquid component changes.

  In order to solve the above-described conventional problems, the coating apparatus of the present invention is a coating that is detachably provided on the lip surface of the coating head and communicates with the discharge slit of the coating head when mounted on the lip surface. A coating liquid recovery member having a liquid inlet and a coating liquid outlet through which the coating liquid flowing in from the coating liquid inlet flows out, and from the coating liquid outlet of the coating liquid recovery member A coating liquid recovery pipe that returns the flowed coating liquid to the coating liquid supply port of the coating head, and the coating liquid recovery member is mounted on the lip surface of the coating head when not coating. Thus, the coating liquid is configured to circulate through a circulation path composed of a coating head, a coating liquid recovery member, and a coating liquid recovery pipe.

  Thereby, since the circulation path of the coating liquid at the time of non-coating becomes a closed system, the liquid feeding speed for circulating the coating liquid at the time of non-coating can be increased, and clogging of the discharge slit can be prevented. In addition, the coating liquid staying in the discharge slit during non-coating is dried, and the solidified component of the coating liquid causes clogging of the discharge slit and the generation of streaks in the film applied to the substrate. It is possible to suppress a phenomenon that causes a decrease and a phenomenon that a coating liquid component changes.

  According to the present invention, since the circulation path of the coating liquid at the time of non-coating becomes a closed system, the liquid feeding speed for circulating the coating liquid at the time of non-coating can be increased, so that the discharge at the time of non-coating The coating liquid staying in the slit dries, and the solidification component of the coating liquid causes clogging of the discharge slit and the generation of streaks in the film applied to the substrate. The phenomenon that the liquid component changes can be suppressed, and a coating film having a stable coating quality can be formed on the substrate.

  Thereby, the coating film of the stable coating quality can be formed in a base material, reducing material loss as much as possible.

Schematic block diagram schematically showing a coating apparatus according to Embodiment 1 of the present invention Schematic process drawing schematically showing the operation of the coating head with respect to the base material from the standby time to the coating time of the coating apparatus according to Embodiment 1 and Embodiment 2 of the present invention Schematic block diagram schematically showing a coating apparatus according to Embodiment 2 of the present invention

  The coating apparatus of the first invention includes a coating liquid supply port to which a coating liquid is supplied, a discharge slit for discharging the coating liquid supplied to the coating liquid supply port, and a tip of the discharge slit. A coating head having a lip surface positioned and capable of holding the coating liquid by surface tension; and detachably provided on the lip surface, and communicates with the discharge slit when mounted on the lip surface. A coating liquid recovery member comprising: a coating liquid inlet; and a coating liquid outlet from which the coating liquid flowing in from the coating liquid inlet flows out; and the coating liquid recovery member. A coating liquid collecting pipe for returning the coating liquid flowing out from the working liquid outlet to the coating liquid supply port of the coating head, and when the coating liquid is not coated, the coating liquid collecting member is Mounted on the lip surface of the coating head, the coating liquid is applied to the coating head, the coating liquid recovery member, and the coating liquid. Than is configured to circulate the circulation path constituted by the liquid recovery pipe.

  In the above configuration, the coating liquid recovery member is attached to the lip surface of the coating head during non-coating, and the coating liquid is applied to the coating head, the coating liquid recovery member, the coating liquid recovery pipe, By circulating through the circulation path configured by the above, the circulation path of the coating liquid during non-coating becomes a closed system, so that the liquid feeding speed for circulating the coating liquid during non-coating can be increased, and the discharge It can prevent clogging of the slit.

  In addition, the coating liquid staying in the discharge slit during non-coating is dried, and the solidified component of the coating liquid causes clogging of the discharge slit and the generation of streaks in the film applied to the substrate. It is possible to suppress a phenomenon that causes a decrease and a phenomenon that a coating liquid component changes.

  A coating apparatus according to a second aspect of the present invention is the coating apparatus according to the first aspect of the invention, in particular, a coating liquid tank for storing a coating liquid, and the coating liquid in the coating liquid tank as a coating liquid in the coating head. A supply pump supplied to the supply port is interposed in the middle of the coating liquid recovery pipe.

  In the above configuration, at the time of coating, the coating liquid recovery member is not mounted on the lip surface of the coating head, and the coating liquid in the coating liquid tank is discharged from the discharge slit of the coating head by the supply pump. Therefore, the coating liquid in the coating liquid tank can be applied to the substrate.

  In addition, when non-coating, the coating liquid recovery member is mounted on the lip surface of the coating head, and the supply pump supplies the coating liquid in the coating liquid tank to the supply pump, coating head, and coating liquid recovery It is circulated to the coating liquid tank through the member and the coating liquid recovery pipe.

  Accordingly, the coating liquid recovery member is mounted on the lip surface of the coating head when not coated, and the coating liquid in the coating liquid tank is supplied to the supply pump, the coating head, the coating liquid recovery member, and the coating liquid. By circulating the circulation path that returns to the coating liquid tank through the piping for collecting the working liquid, the circulation path of the coating liquid during non-coating becomes a closed system, so the coating liquid is circulated during non-coating. The liquid feeding speed can be increased and clogging of the discharge slit can be prevented.

  In addition, the coating liquid staying in the discharge slit during non-coating is dried, and the solidified component of the coating liquid causes clogging of the discharge slit and the generation of streaks in the film applied to the substrate. It is possible to suppress a phenomenon that causes a decrease and a phenomenon that a coating liquid component changes.

A coating apparatus according to a third invention is provided with a coating liquid tank for storing a coating liquid and a supply pump for supplying the coating liquid in the coating liquid tank during coating, particularly in the coating apparatus according to the first invention. The coating liquid supply device and a coating liquid that is provided so as to be branched from the middle of the coating liquid recovery pipe and connected to the coating liquid supply device are supplied by the supply pump during coating. A coating liquid supply pipe for feeding in the middle of the working liquid recovery pipe, a switching device provided at a branch point where the coating liquid supply pipe branches from the coating liquid recovery pipe, and the coating A circulation pump that is provided in the coating liquid recovery pipe between the outlet of the liquid recovery member and the switching device and circulates the coating liquid in the circulation path when not coated, and the switching device Open the coating liquid supply pipe at the time of coating and the circulation pump and the branch point The coating liquid recovery pipe is closed, and when the coating is not performed, the coating liquid supply pipe is closed and the coating liquid recovery pipe between the circulation pump and the branch point is opened. It is.

  In the above configuration, at the time of coating, the coating liquid recovery member is not attached to the lip surface of the coating head, and the switching device opens the coating liquid supply pipe and applies the coating between the circulation pump and the branch point. The piping for collecting the working liquid is closed, the circulation pump does not operate, the coating liquid in the coating liquid tank of the coating liquid supply device is supplied to the coating liquid supply pipe by the supply pump of the coating liquid supply device, Since it is discharged from the discharge slit of the coating head through the coating liquid recovery pipe downstream of the branch point, the coating liquid in the coating liquid tank can be applied to the substrate.

  When not coated, the coating liquid recovery member is mounted on the lip surface of the coating head, and the switching device closes the coating liquid supply pipe and the coating liquid between the circulation pump and the branch point. The collection pipe is opened, the supply pump does not operate, and the circulation pump causes the coating liquid of the coating head to pass through the coating liquid collection pipe interposing the coating liquid collection member and circulation pump, Circulated to the coating head.

  Therefore, at the time of non-coating, the coating liquid collecting member is mounted on the lip surface of the coating head, and the coating liquid of the coating head is coated with the coating liquid collecting member and the circulation pump. By circulating to the coating head through the recovery pipe, the circulation path of the coating liquid at the time of non-coating becomes a closed system, so the liquid feeding speed for circulating the coating liquid at the time of non-coating is increased. It is possible to prevent the discharge slit from being clogged.

  In addition, the coating liquid staying in the discharge slit during non-coating is dried, and the solidified component of the coating liquid causes clogging of the discharge slit and the generation of streaks in the film applied to the substrate. It is possible to suppress a phenomenon that causes a decrease and a phenomenon that a coating liquid component changes.

  The coating device of the fourth invention is a lip surface cleaning unit for wiping off the coating liquid adhering to the lip surface of the coating head, particularly in the coating device of any one of the first to third inventions, In addition, the lip surface cleaning unit is used immediately before coating to wipe off the coating solution adhering to the lip surface, causing streaks in the coated film and causing a decrease in coating quality. Can be suppressed.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. The present invention is not limited by the embodiment of the present invention.

(Embodiment 1)
FIG. 1 is a schematic configuration diagram schematically showing a coating apparatus according to Embodiment 1 of the present invention. FIG. 2 is a schematic process diagram schematically showing the operation of the coating head with respect to the base material from the standby time to the coating time of the coating apparatus according to the first embodiment of the present invention.

  The coating head 1 is located at a coating liquid supply port 2 to which a coating liquid is supplied, a discharge slit 3 for discharging the coating liquid supplied to the coating liquid supply port 2, and a tip of the discharge slit 3. And a lip surface 4 capable of holding the coating liquid by surface tension.

  The coating liquid recovery member 5 includes a coating liquid inlet 6 communicating with the discharge slit 3 when the lip surface 4 is mounted, and a coating liquid from which the coating liquid flowing in from the coating liquid inlet 6 flows out. It has an outflow port 7, has moving means, and can be attached to and detached from the lip surface 4.

The coating liquid supply device 9 includes a coating liquid tank 10 that stores the coating liquid, a supply pump 11 that supplies the coating liquid in the coating liquid tank 10, and a coating liquid outlet 12 that flows out the coating liquid. The coating liquid in the coating liquid tank 10 flows out from the coating liquid outlet 12 by the supply pump 11.

  The coating liquid outlet 7 of the coating liquid recovery member 5 and the coating liquid tank 10 of the coating liquid supply device 9 are connected by a coating liquid recovery pipe 8. The working liquid outlet 12 and the coating liquid supply port 2 of the coating head 1 are also connected by piping.

  Although not shown, a lip surface cleaning unit is provided at a position close to the lip surface 4 of the coating head 1. This is for wiping off the coating liquid adhering to the lip surface 4 of the coating head 1, having a moving means, and having a sheet-like clean room wiper which is a continuous long-fiber non-woven fabric made of cellulose at the tip. .

  When the coating liquid recovery member 5 is mounted on the lip surface 4, the coating liquid is applied to the coating liquid supply port 2, the discharge slit 3, the coating liquid inlet 6, the coating liquid outlet 7, and the coating. The liquid recovery pipe 8, the coating liquid tank 10, the supply pump 11, the coating liquid outlet 12, the piping, the coating liquid supply port 2, and the circulation path are circulated.

  Next, the operation of the coating apparatus of the present embodiment configured as described above will be described below.

  First, prior to the coating operation, the coating liquid supply port 2 of the coating head 1, the discharge slit 3, the coating liquid inlet 6 of the coating liquid recovery member 5, the coating liquid outlet 7, the coating liquid. The recovery pipe 8, the coating liquid tank 10, the supply pump 11, the coating liquid outlet 12, the piping, and the circulation path of the coating liquid supply port 2 are filled with the coating liquid.

  At the time of non-coating, the coating liquid collecting member 5 is mounted on the lip surface, and the supply pump 11 is operated in this state. Thereby, the coating liquid fed by the supply pump 11 is applied to the coating liquid supply port 2, the discharge slit 3, the coating liquid inlet 6, the coating liquid outlet 7, the coating liquid recovery pipe 8, and the coating liquid. It circulates with the working liquid tank 10, the supply pump 11, the coating liquid outlet 12, the piping, and the coating liquid supply port 2. At the time of non-coating, the supply pump 11 is continuously operated.

  When starting the coating, the supply pump 11 is stopped, the coating liquid recovery member 5 is detached from the lip surface, the coating liquid recovery member 5 is not attached to the lip surface 4, and the moving means The coating liquid adhering to the lip surface is wiped off using a lip surface cleaning unit having

  Next, as shown in the diagram on the left side of FIG. 2, the base material 100 is moved relative to the coating head 1 so that the coating start position of the base material 100 is directly below the discharge slit 3 of the coating head 1. Position and stop at that position.

  Next, as shown in the center diagram of FIG. 2, the coating head 1 is lowered toward the substrate stopped below the discharge slit 3 of the coating head 1, and the lip surface 4 of the coating head 1. Is a position close to the substrate 100. Next, the base material 100 is moved with respect to the coating head 1. The operation of the supply pump 11 is started immediately before or simultaneously with the start of the movement.

  As a result, the coating liquid is supplied from the coating liquid tank 10 to the coating head 1, and the coating liquid is continuously discharged from the discharge slit 3 as shown in the right side of FIG. It is coated on the surface of

  When the application to the base material 100 is continued and the coating end portion is reached, the movement of the base material 100 with respect to the coating head 1 is stopped, and at the same time, the operation of the supply pump 11 is stopped, and the coating head 1 is stopped. Then, the substrate 100 is moved, and the substrate 100 is moved to a position away from the coating head 1.

  Hereinafter, intermittent coating can be performed on the substrate 100 by repeating the same operation.

  In the coating apparatus according to the present embodiment, the coating liquid recovery member 5 is not mounted on the lip surface 4 of the coating head 1 during coating, and the coating liquid tank 10 of the coating liquid supply apparatus 9 is coated. Since the liquid is discharged from the discharge slit 3 of the coating head 1 by the supply pump 11 of the coating liquid supply apparatus 9, the coating liquid in the coating liquid tank 10 of the coating liquid supply apparatus 9 is applied to the substrate 100. Can be applied.

  Further, at the time of non-coating, the coating liquid collecting member 5 is mounted on the lip surface 4 of the coating head 1, and the coating liquid tank of the coating liquid supply apparatus 9 is supplied by the supply pump 11 of the coating liquid supply apparatus 9. 10 coating liquid passes through the supply pump 11 of the coating liquid supply device 9, the coating head 1, the coating liquid recovery member 5, and the coating liquid recovery pipe 8. It is circulated to the working liquid tank 10.

  Therefore, the coating liquid recovery member 5 is mounted on the lip surface 4 of the coating head 1 during non-coating, and the coating liquid in the coating liquid tank 10 of the coating liquid supply device 9 is supplied to the coating liquid. It circulates in the circulation path which returns to the coating liquid tank 10 of the coating liquid supply apparatus 9 through the supply pump 11, the coating head 1, the coating liquid recovery member 5, and the coating liquid recovery pipe 8 of the apparatus 9. Thus, since the circulation path of the coating liquid at the time of non-coating becomes a closed system, the liquid feeding speed for circulating the coating liquid at the time of non-coating can be increased, and the discharge slit 3 can be prevented from being clogged.

  Further, the coating liquid staying in the discharge slit 3 of the coating head 1 at the time of non-coating is dried, and the solidified component of the coating liquid is clogged in the discharge slit 3 or the streaks of the film applied to the substrate 100. It is possible to suppress a phenomenon that causes a decrease in coating quality and a phenomenon that a coating liquid component changes.

  As described above, the coating liquid continuously circulates until immediately before the start of coating, so that the coating liquid staying in the discharge slit 3 at the time of non-coating is dried and the solidified component of the coating liquid is discharged into the discharge slit. 3 and the streaks of the film applied to the base material 100, causing a decrease in coating quality and a phenomenon in which the coating liquid component changes.

  Furthermore, since the coating liquid does not adhere to the lip surface 4, a missing portion that is not applied to the substrate 100 does not occur, and good coating can be performed.

(Embodiment 2)
FIG. 3 is a schematic configuration diagram schematically showing a coating apparatus according to the second embodiment of the present invention. In FIG. 3, the same reference numerals are given to the same constituent members as those in the first embodiment, and detailed description thereof is omitted.

  The schematic diagram schematically showing the coating head tip portion and the substrate in standby of the coating apparatus according to the second embodiment of the present invention is the same as that of the first embodiment, and the coating according to the second embodiment. FIG. 2 is a schematic process diagram schematically showing the operation of the coating head with respect to the base material from the standby time of the coating apparatus to the coating time.

  The circulation pump 13 includes a circulation pump inlet 15 through which the coating liquid flows into the circulation pump 13 and a circulation pump outlet 16 through which the coating liquid flows out of the circulation pump 13.

  The switching device 14 includes a T-shaped pipe, and is connected between the circulation pump outlet 16 of the circulation pump 13 and the coating liquid recovery pipe 8 that connects the coating liquid supply port 2 of the coating head 1. Simultaneously with the connection, it is connected to the coating liquid supply pipe 17 connected to the coating liquid outlet 12 of the coating liquid supply device 9.

  Furthermore, a first on-off valve 18 that opens and closes the passage of the coating liquid between the coating liquid outlet 12 of the coating liquid supply device 9 and the T-shaped pipe, and the circulation pump outlet 16 of the circulation pump 13 and the T A second on-off valve 19 for opening and closing the passage of the coating liquid between the pipe and the pipe, and the opening and closing of the first on-off valve 18 and the second on-off valve 19 can be controlled respectively. The coating liquid can be fed from the coating liquid outlet 12 of the liquid supply device 9 to the coating liquid supply port 2 of the coating head 1, and the coating liquid can be supplied from the circulation pump outlet 16 of the circulation pump 13. The coating liquid can be fed to the coating liquid supply port 2 of the head 1.

  When the coating liquid recovery member 5 is mounted on the lip surface 4, the coating liquid flows through the coating liquid supply port 2, the discharge slit 3, and the coating liquid recovery member 5 of the coating head 1. Inlet 6, coating liquid outlet 7, coating liquid collection pipe 8, circulation pump 13, switching device 14, coating liquid collection pipe 8, circulation through coating liquid supply port 2 of coating head 1 and the circulation path To do.

  Next, the operation of the coating apparatus of the present embodiment configured as described above will be described below.

  Prior to the coating operation, the coating liquid supply port 2 of the coating head 1, the discharge slit 3, the coating liquid inlet 6 of the coating liquid recovery member 5, the coating liquid outlet 7, and the coating liquid recovery The piping 8, the circulation pump 13, the switching device 14, the piping, the circulation path of the coating liquid supply port 2, the coating liquid tank 10, the supply pump 11, the coating liquid outlet 12, and the coating liquid supply pipe 17. Keep it filled with the coating solution.

  At the time of non-coating, the coating liquid collecting member 5 is mounted on the lip surface 4 and the coating device 14 applies the coating liquid between the coating liquid outlet 12 of the coating liquid supply device 9 and the T-shaped pipe. The first on-off valve 18 that opens and closes the liquid passage is closed, and the second on-off valve 19 that opens and closes the coating liquid passage between the circulation pump outlet 16 of the circulation pump 13 and the T-shaped pipe is opened. In this state, the circulation pump 13 is operated.

  Thereby, the coating liquid fed by the circulation pump 13 is applied to the coating liquid supply port 2 of the coating head 1, the discharge slit 3, the coating liquid inlet 6 of the coating liquid recovery member 5, and the coating liquid. It circulates with the outlet 7, the coating liquid collection pipe 8, the circulation pump 13, the switching device 14, the coating liquid collection pipe 8, and the coating liquid supply port 2. At the time of non-coating, the circulation pump 13 is continuously operated.

  When starting the coating, the circulation pump 13 is stopped, the coating liquid recovery member 5 is detached from the lip surface 4, and the coating liquid recovery member 5 is not attached to the lip surface 4 and moved. The coating liquid adhering to the lip surface 4 is wiped off using a lip surface cleaning part having means.

  Next, the switching device 14 opens the first on-off valve 18 that opens and closes the coating liquid passage between the coating liquid outlet 12 of the coating liquid supply device 9 and the T-shaped pipe, and the circulation pump. The second on-off valve 19 for opening and closing the coating liquid passage between the circulation pump outlet 16 and the T-shaped pipe 13 is closed.

  Next, as shown in the diagram on the left side of FIG. 2, the base material 100 is moved relative to the coating head 1 so that the coating start position of the base material 100 is directly below the discharge slit 3 of the coating head 1. Position and stop at that position.

  Next, as shown in the center diagram of FIG. 2, the coating head 1 is lowered toward the base material 100 stopped below the discharge slit 3 of the coating head 1, and the lip surface of the coating head 1. 4 is a position close to the substrate 100.

Next, the base material 100 is moved with respect to the coating head 1. The operation of the supply pump 11 is started immediately before or simultaneously with the start of the movement. As a result, the coating liquid is supplied from the coating liquid tank 10 to the coating head 1, and the coating liquid is continuously discharged from the discharge slit 3 as shown in the right side of FIG. It is coated on the surface of

  When the application to the base material 100 is continued and the coating end portion is reached, the movement of the base material 100 with respect to the coating head 1 is stopped, and at the same time, the operation of the supply pump 11 is stopped, and the coating head 1 is stopped. Then, the substrate 100 is moved, and the substrate 100 is moved to a position away from the coating head 1.

  Hereinafter, intermittent coating can be performed on the substrate 100 by repeating the same operation.

  In the coating apparatus of the present embodiment, at the time of coating, the coating liquid recovery member 5 is not mounted on the lip surface 4 of the coating head 1, and the first on-off valve 18 of the switching device 14 supplies the coating liquid. The piping 17 is opened, the second on-off valve 19 of the switching device 14 closes the coating liquid recovery pipe 8 between the circulation pump 13 and the branch point, the circulation pump 13 does not operate, and the coating liquid The coating liquid in the coating liquid tank 10 of the supply apparatus 9 is supplied from the supply pump 11 of the coating liquid supply apparatus 9 to the coating liquid supply pipe 17 and the coating liquid collection pipe 8 downstream of the branch point. , And is discharged from the discharge slit 3 of the coating head 1, so that the coating liquid in the coating liquid tank 10 can be applied to the substrate 100.

  At the time of non-coating, the coating liquid recovery member 5 is mounted on the lip surface 4 of the coating head 1, and the first on-off valve 18 of the switching device 14 closes the coating liquid supply pipe 17 to switch the coating liquid. The second on-off valve 19 of the device 14 opens the coating liquid recovery pipe 8 between the circulation pump 13 and the branch point, the supply pump 11 does not operate, and the circulation pump 13 applies the coating of the coating head 1. The working liquid is circulated to the coating head 1 through the coating liquid collecting pipe 5 through which the coating liquid collecting member 5 and the circulation pump 13 are interposed.

  Accordingly, the coating liquid recovery member 5 is mounted on the lip surface 4 of the coating head 1 during non-coating, and the coating liquid of the coating head 1 causes the coating liquid recovery member 5 and the circulation pump 13 to pass through. By circulating to the coating head 1 through the intervening coating liquid recovery pipe 8, the circulation path of the coating liquid at the time of non-coating becomes a closed system, so that the coating liquid at the time of non-coating is applied. It is possible to increase the liquid feeding speed for circulating the liquid and to prevent the discharge slit 3 from being clogged.

  In addition, the coating liquid staying in the discharge slit 3 during non-coating is dried, and the solidified component of the coating liquid causes clogging of the discharge slit 3 and streaks of the film applied to the substrate 100. It is possible to suppress a phenomenon that causes a decrease in work quality and a phenomenon that a coating liquid component changes.

  As described above, the coating liquid continuously circulates until immediately before the start of coating, so that the coating liquid staying in the discharge slit 3 at the time of non-coating is dried and the solidified component of the coating liquid is discharged into the discharge slit. 3 and the streaks of the film applied to the base material 100, causing a decrease in coating quality and a phenomenon in which the coating liquid component changes.

  Furthermore, since the coating liquid does not adhere to the lip surface 4, a missing portion that is not applied to the substrate 100 does not occur, and good coating can be performed.

  Since the coating apparatus of the present invention can form a coating film having a stable coating quality on a substrate, intermittent coating is performed by alternately repeating a coated portion and an uncoated portion with a predetermined length. The present invention can be applied to applications such as fuel cell electrodes and lithium ion battery electrodes.

DESCRIPTION OF SYMBOLS 1 Coating head 2 Coating liquid supply port 3 Discharge slit 4 Lip surface 5 Coating liquid collection | recovery member 6 Coating liquid inflow port 7 Coating liquid outflow port 8 Coating liquid collection | recovery piping 9 Coating liquid supply apparatus 10 Coating Industrial liquid tank 11 Supply pump 12 Coating liquid outlet 13 Circulating pump 14 Switching device 15 Circulating pump inlet 16 Circulating pump outlet 17 Coating liquid supply pipe 18 First on-off valve 19 Second on-off valve 100 Base material

Claims (4)

A coating liquid supply port to which the coating liquid is supplied, a discharge slit for discharging the coating liquid supplied to the coating liquid supply port, and a tip of the discharge slit. A coating head having a holdable lip surface;
A coating liquid inlet that is detachably provided on the lip surface and communicates with the discharge slit when mounted on the lip surface, and a coating liquid from which the coating liquid flowing in from the coating liquid inlet flows out A coating liquid collecting member comprising an outlet,
A coating liquid recovery pipe for returning the coating liquid flowing out from the coating liquid outlet of the coating liquid recovery member to the coating liquid supply port of the coating head;
At the time of non-coating, the coating liquid recovery member is attached to the lip surface of the coating head, and the coating liquid is the coating head, the coating liquid recovery member, and the coating liquid recovery A coating device configured to circulate through a circulation path composed of piping. A coating liquid tank that stores the coating liquid and a supply pump that supplies the coating liquid in the coating liquid tank to the coating liquid supply port of the coating head are interposed in the middle of the coating liquid recovery pipe. The coating apparatus according to claim 1. A coating liquid tank that stores the coating liquid, a coating liquid supply device that includes a supply pump that supplies the coating liquid in the coating liquid tank at the time of coating, and a branch from the middle of the piping for collecting the coating liquid A coating liquid supply pipe which is provided so as to be connected to the coating liquid supply device and which is supplied by the supply pump during coating, and which is fed in the middle of the coating liquid recovery pipe; The switching device provided at the branch point where the coating liquid supply pipe branches from the working liquid recovery pipe, and the coating liquid recovery between the outlet and the switching device of the coating liquid recovery member A circulation pump provided in the piping for circulating the coating liquid in the circulation path when not coated,
The switching device opens the coating liquid supply pipe during coating and closes the coating liquid collection pipe between the circulation pump and the branch point, and supplies the coating liquid during non-coating. The coating apparatus according to claim 1, wherein the coating pipe is closed and the coating liquid collection pipe between the circulation pump and the branch point is opened. The coating apparatus according to any one of claims 1 to 3, further comprising a lip surface cleaning unit that wipes off the coating liquid adhering to the lip surface of the coating head.

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