JP2017047349A - Actuator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a structure which can be downsized, in an actuator capable of displacing a vibrator in a coil in an axial direction.SOLUTION: An actuator 1 is equipped with: a pipe 11 extending in an axial direction; a coil 21 disposed on an outer periphery of the pipe 11; a moving cylinder body 31 which is concentric with the pipe 11 and disposed so as to able to move in the pipe 11, in the pipe 11; and a pair of iron cores 41 and 42 which is configured by magnetic material, disposed in the inside of the moving cylinder body 31 so as to oppose end portions in the axial direction to each other, and in which end portions positioned on the outer side in the axial direction are respectively fixed to the moving cylinder body 31. The moving cylinder body 31 has a spiral portion 32 formed with a spiral slit 32a, and capable of expanding/contracting with the relative movement of the pair of the iron cores 41 and 42.SELECTED DRAWING: Figure 1

Description

  The present invention relates to an actuator that can expand and contract in the axial direction.

  2. Description of the Related Art Conventionally, an actuator that generates vibration in an axial direction by moving a driver element in the axial direction is known. In such an actuator, as disclosed in Patent Document 1, for example, a pair of brackets that hold both ends of the fixed shaft are fitted to the outer end in the axial direction of the cylindrical frame, and the inner peripheral surface of the frame A cylindrical coil is fixed to the frame. The driver having a cylindrical permanent magnet is supported on a fixed shaft so as to be movable in the axial direction, and is supported in the axial direction by a coil spring disposed between the pair of brackets.

  The actuator having the above-described configuration is used as a vibrating body such as a small portable terminal.

JP 2003-117488 A

  By the way, in recent years, smaller actuators have been required due to further miniaturization of portable terminals and the like. In the case of an actuator having a configuration as disclosed in Patent Document 1 described above, if further miniaturization is to be realized, miniaturization of the actuator is limited by the diameter of the wire constituting the coil spring and the manufacturing technology of the coil spring. receive. That is, the diameter of the wire that can be manufactured and the diameter of the helical coil spring that can be manufactured with high dimensional accuracy using the wire each have a limit, and thus there is a limit to downsizing the actuator.

  An object of the present invention is to provide a structure that can be miniaturized in an actuator that can displace a driver in a coil in the axial direction.

  An actuator according to an embodiment of the present invention includes an axially extending pipe, a coil provided on an outer periphery of the pipe, and a pipe that is concentric with the pipe and movable in the pipe. And an end portion located on the outer side in the axial direction is disposed so that the end portions in the axial direction face each other inside the movable cylindrical body. And a pair of core members each fixed to the movable cylinder. The movable cylinder body has a spirally formed slit, and has a spiral portion that can expand and contract with the relative movement of the pair of core members (first configuration).

  Thereby, when a coil is energized, a pair of core members made of a magnetic material are magnetized in the movable cylinder by a magnetic field generated in the coil. The pair of core members are magnetized with different polarities at opposite ends in the movable cylindrical body, so that the ends are attracted. Thereby, a pair of said core materials approach mutually. Each of the pair of core members is fixed at an end located on the outer side in the axial direction in a movable cylinder having a spiral portion. Therefore, when the pair of core members approach each other as described above, the spiral portion of the movable cylinder is deformed, and the movable cylinder contracts in the axial direction.

  On the other hand, when the energization to the coil is stopped, the pair of core members are not magnetized, so that the pair of ends are not attracted to each other. Then, since the spiral portion of the movable cylinder returns to the original state by the elastic restoring force, the movable cylinder extends in the axial direction as compared to when the coil is energized.

  Therefore, an actuator that expands and contracts in the axial direction is obtained by the above-described configuration. In the above-described configuration, the movable cylindrical body and the pair of core members correspond to the actuator driver.

  In the actuator having the above-described configuration, the spiral portion that functions as a spring is positioned in a pipe in which the coil is provided on the outer periphery, so that the size can be reduced as a whole. Therefore, an actuator that can be miniaturized is obtained.

  In the first configuration, the spiral portion is provided in the movable cylinder so as to be positioned inward of the coil (second configuration). Thereby, since the spiral part which functions as a spring can be provided compactly, size reduction of an actuator can be achieved.

  In the first or second configuration, one end of the axial direction of the movable cylinder is fixed to the pipe (third configuration). Thereby, a movable cylinder can be expanded-contracted to the one of the said axial direction by the presence or absence of electricity supply with respect to a coil.

  In any one of the first to third configurations, the spiral portion is provided in the movable cylinder body at two or more locations along the axial direction (fourth configuration). Thereby, a bigger deformation | transformation is obtained by two or more spiral parts by electricity supply with respect to a coil. Therefore, the actuator can be greatly expanded and contracted in the axial direction.

  In the fourth configuration, the movable cylindrical body further includes a guide portion that is formed between the spiral portions and in which the opposed end portions of the pair of core members are positioned (fifth configuration). .

  Thereby, when a pair of core material moves relatively by the presence or absence of electricity supply of a coil, the edge part which opposes in this pair of core material can be guided by the guide part of a movable cylinder. Therefore, the opposing ends of the pair of core members can be smoothly moved within the movable cylinder. Therefore, the actuator can be smoothly expanded and contracted in the axial direction.

  In any one of the first to fifth configurations, the spiral portion has a shape in which a leaf spring is spirally curved in the thickness direction (sixth configuration).

  With such a configuration, when the spiral portion expands and contracts, the movable cylinder rotates with respect to the pipe. Therefore, an actuator that can rotate while the spiral portion expands and contracts in the axial direction is obtained.

  In addition, by forming the spiral portion as described above, the spiral portion can be easily formed by etching using a resist layer as disclosed in Japanese Patent No. 4572303. In the case of a general coil spring, the coil spring is formed by winding a wire in a spiral shape. For this reason, there is a limit to reducing the diameter of the wire, and there is also a limit to reducing the coil diameter when the wire is wound spirally. Therefore, in the case of a coil spring, there is a limit to downsizing the spring.

  On the other hand, in the case of the leaf spring structure as described above, a small spring can be easily obtained by forming a spiral slit in the movable cylinder by etching. Therefore, the actuator can be easily downsized.

  According to the actuator of one embodiment of the present invention, the movable cylinder in the pipe provided with the coil on the outer periphery can be expanded and contracted with the relative movement of the pair of core members arranged in the movable cylinder. Provide a spiral. Thereby, the structure which can reduce the size of an actuator is realizable.

FIG. 1 is a cross-sectional view illustrating a schematic configuration of the actuator according to the embodiment. FIG. 2 is a view corresponding to FIG. 1 schematically showing a part of the magnetic field generated by energizing the coil of the actuator. FIG. 3 is a view corresponding to FIG. 1 showing a state in which a pair of iron cores of the actuator are approaching. FIG. 4 is a diagram illustrating a stroke due to expansion and contraction of the movable cylinder of the actuator. FIG. 5 is a diagram schematically showing a manufacturing method of the actuator. FIG. 6 is a diagram showing a schematic configuration of the movable cylinder. FIG. 7 is a view showing a state in which a pair of iron cores are inserted and fixed in the movable cylinder. FIG. 8 is a diagram illustrating a state in which the movable cylinder in which the pair of iron cores are fixed is inserted into the pipe.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In addition, the same code | symbol is attached | subjected about the same or an equivalent part in a figure, and the description is not repeated. Moreover, the dimension of the structural member in each figure does not faithfully represent the actual dimension of the structural member, the dimensional ratio of each structural member, or the like.

  FIG. 1 shows a schematic configuration of an actuator 1 according to an embodiment of the present invention. The actuator 1 is a device that expands and contracts the movable cylinder fixed to the pair of iron cores 41, 42 in the axial direction by relatively displacing the pair of iron cores 41, 42 (core material) magnetized by energization of the coil 21. It is. Specifically, as shown in FIG. 1, the actuator 1 includes a pipe 11, a coil 21, a movable cylinder 31, and iron cores 41 and 42. In the case of the configuration of the present embodiment, the movable cylinder 31 and the iron cores 41 and 42 constitute a driver of the actuator 1.

  The pipe 11 is a cylindrical member formed of a metal material such as nickel. That is, the pipe 11 is formed in a cylindrical shape extending in the axial direction. The pipe 11 has a through hole 11a that can accommodate a movable cylinder 31 and iron cores 41 and 42, which will be described later.

  The coil 21 is formed by winding an electric wire (for example, a copper wire) on the outer periphery of the pipe 11. For example, the coil 21 is formed in a cylindrical shape concentric with the pipe 11. That is, the coil 21 is formed in a cylindrical shape extending in the axial direction. Thereby, as shown in FIG. 1, the pipe 11 is arrange | positioned so that the coil 21 may be penetrated. The coil 21 may be provided at any position in the axial direction of the pipe 11, but is preferably provided at the central portion of the pipe 11 in the axial direction.

  The movable cylinder 31 is a substantially cylindrical member formed of, for example, a metal material containing nickel. That is, the movable cylinder 31 is formed in a substantially cylindrical shape extending in the axial direction. The movable cylinder 31 has an outer diameter smaller than the inner diameter of the pipe 11, and is disposed concentrically with the pipe 11 in the through hole 11 a of the pipe 11.

  The movable cylinder 31 has a through hole 31 a that can accommodate the iron cores 41 and 42. Although described later in detail, the iron cores 41 and 42 are disposed in the through hole 31a of the movable cylinder 31 so as to be movable in the axial direction in the movable cylinder 31. In the present embodiment, as shown in FIG. 1, a pair of iron cores 41 and 42 are disposed in the movable cylinder 31. In addition, a pair of iron cores 41 and 42 are arrange | positioned at the both ends of the axial direction of the movable cylinder 31, respectively, and are being fixed to the movable cylinder 31 by resistance welding. Although not particularly shown, the movable cylinder 31 is fixed to the pipe 11 by resistance welding at the end in the axial direction on the side where the iron core 41 is disposed.

  The movable cylinder 31 has a spiral portion 32, a guide portion 33, and fixed portions 34 provided at both ends of the movable cylinder 31 in the axial direction. The spiral portion 32 is formed in a spiral shape so as to surround the axis P along the axis P of the movable cylinder 31. That is, the spiral portion 32 is formed in a spiral shape by a slit 32 a formed in a spiral shape on the outer peripheral surface of the movable cylindrical body 31. In the present embodiment, the spiral portion 32 is formed in a spiral shape counterclockwise when viewed in the axial direction from the side of the iron core 42 disposed in the movable cylinder 31. Moreover, the spiral part 32 is provided in two places in the axial direction of the movable cylinder 31 so as to connect the guide part 33 and the fixed part 34 respectively.

  In FIG. 1, a broken line indicating the through hole 31 a of the movable cylinder 31 is drawn on the guide portion 33 and the fixed portion 34, but the broken line indicating the through hole 31 a is omitted in the spiral portion 32. .

  The spiral portion 32 has a shape in which the leaf spring is spirally curved in the thickness direction. That is, the spiral portion 32 is configured by a spiral leaf spring. As a result, when the spiral portion 32 is deformed in the axial direction as will be described later, a force that rotates about the axis P of the movable cylinder 31 is generated in the spiral portion 32. Details of the state of deformation of the spiral portion 32 will be described later.

  The spiral portion 32 is provided on the movable cylinder 31 so as to be located inside the coil 21. Thereby, the helical part 32 functioning as a spring can be arranged compactly with respect to the coil 21. Therefore, the actuator 1 can be made compact.

  The guide part 33 is provided in the central part of the movable cylinder 31 in the axial direction. The guide part 33 is formed in a cylindrical shape. That is, the guide portion 33 is not formed with a slit like the spiral portion 32 described above. One end of the pair of iron cores 41, 42 in the axial direction is positioned in the guide portion 33 in a state where the pair of iron cores 41, 42 are disposed in the movable cylinder 31. Thereby, when the pair of iron cores 41 and 42 are relatively displaced in the movable cylindrical body 31 as described later, one of the end portions of the pair of iron cores 41 and 42 extends along the inner peripheral surface of the guide portion 33. Move in the axial direction. Therefore, the pair of iron cores 41 and 42 can be smoothly displaced in the movable cylinder 31.

  The fixed portions 34 are provided at both ends of the movable cylinder 31 in the axial direction. The fixed portion 34 is also formed in a cylindrical shape like the guide portion 33, and is not formed with a slit like the spiral portion 32 described above. One fixed portion 34 is positioned with the other of the end portions in the axial direction of one iron core 41 of the pair of iron cores 41, 42. Further, the other fixed portion 34 is positioned with the other of the end portions in the axial direction of the other iron core 42 out of the pair of iron cores 41, 42. These fixed portions 34 are connected to the ends of the iron cores 41 and 42 by welding. That is, each of the pair of iron cores 41 and 42 is fixed to a fixing portion 34 formed at the both end portions of the movable cylindrical body 31 at the other end in the axial direction.

  The iron cores 41 and 42 are rod-shaped members made of, for example, a metal material containing iron. The iron cores 41 and 42 are arranged one by one at both ends of the movable cylinder 31 in the axial direction. That is, a pair of iron cores 41 and 42 are arranged in the movable cylinder 31. The pair of iron cores 41 and 42 are disposed in the movable cylindrical body 31 so that one of the end portions in the axial direction has a predetermined interval in the axial direction, and the other end portion in the axial direction is movable. It is being fixed to the fixing | fixed part 34 of the cylinder 31, respectively. Thereby, as for a pair of iron cores 41 and 42 arrange | positioned in the movable cylinder 31, while the other of the edge part of the said axial direction is respectively fixed to the movable cylinder 31, one of the edge parts of the said axial direction is The movable cylinder 31 is disposed so as to be relatively movable.

  The pair of iron cores 41 and 42 are disposed in the movable cylinder 31 so that one of the end portions in the axial direction is opposed to each other inside the coil 21.

(Actuator operation)
Next, the operation of the actuator 1 having the above-described configuration will be described with reference to FIGS.

  By supplying a current from a power source (not shown) to the coil 21 of the actuator 1, the coil 21 generates a magnetic field around it as shown in FIG. In FIG. 2, the direction of the magnetic field is expressed by two arrows for the sake of explanation. However, as a matter of course, a magnetic field is generated three-dimensionally around the coil 21, and the direction of the magnetic field is also It continuously changes around the coil 21. In FIG. 2, illustration of the guide portion 33 of the movable cylinder 31 is omitted for the sake of explanation.

  The pair of iron cores 41 and 42 disposed in the pipe 11 are magnetized by the magnetic field generated by the coil 21. Of the pair of iron cores 41, 42, the ends of the pair of iron cores 41, 42 respectively positioned in the guide portion 33 of the movable cylinder 31 are magnetized to the N pole and the S pole by the magnetic field generated by the coil 21, respectively. (See FIG. 2).

  As described above, when the ends of the pair of iron cores 41 and 42 are magnetized to the N pole and the S pole, respectively, as shown by the white arrows in FIG. Force acts. Then, the fixing portions 34 fixed to the pair of iron cores 41 and 42 are subjected to a force that approaches each other. Since the guide part 33 is provided in the central part of the movable cylinder 31 in the axial direction, when the fixed parts 34 approach each other as described above, the spiral part 32 positioned between the guide part 33 and the fixed part 34. Is compressed in the axial direction. Thereby, as shown in FIG. 3, the spiral portion 32 of the movable cylinder 31 is compressed, and the length of the movable cylinder 31 in the axial direction is shortened. The end portions of the pair of iron cores 41 and 42 are smoothly moved relative to each other in the axial direction by the guide portion 33.

  As described above, the spiral portion 32 has a shape in which the leaf spring is spirally curved in the thickness direction. Therefore, when the spiral portion 32 is compressed as described above, the spiral portion 32 becomes movable movable body 31. Is rotated in the circumferential direction of the movable cylinder 31 (see the thin line arrow in FIG. 3). That is, since the leaf spring is likely to be deformed in the thickness direction, when the spiral portion 32 is deformed in the axial direction, the leaf spring portion constituting the spiral portion 32 is deformed in the thickness direction and the interval between the slits 32a is narrow. Become. In that case, the leaf spring portion constituting the spiral portion 32 rotates in the circumferential direction of the movable cylinder 31 around the axis of the movable cylinder 31.

  By the operation of the actuator 1 as described above, the movable cylinder 31 is compressed in the axial direction by energization of the coil 21, while by stopping the energization of the coil 21, the elastic restoring force of the spiral portion 32 causes the movable cylinder 31 to move. The axial length returns to the original length. Accordingly, the pair of iron cores 41 and 42 in the movable cylinder 31 moves in the axial direction, and the movable cylinder 31 expands and contracts. In FIG. 4, S indicates an expansion / contraction stroke of the movable cylinder 31 of the actuator 1.

(Actuator manufacturing method)
Next, a method for manufacturing the actuator 1 having the above-described configuration will be described with reference to FIG.

  First, as shown in FIG. 5, a plurality of pipes 11 are arranged in the longitudinal direction by passing the core wire 51 through the through holes 11a of the plurality of pipes 11 (five pipes 11 in the example of FIG. 5). Place with. And by winding an electric wire on the outer periphery of one of the plurality of pipes 11 (in the example of FIG. 5, the pipe 11 positioned in the center in the longitudinal direction), the outer periphery of the pipe 11 is wound. A coil 21 is formed thereon. After forming the coil 21, the core wire 51 is pulled out from the through holes 11 a of the plurality of pipes 11. In this embodiment, the coil 21 is formed only on one pipe 11 of the plurality of pipes 11. However, the present invention is not limited to this, and the coil 21 is disposed on a part or all of the plurality of pipes 11. May be formed respectively.

  Here, the manufacturing method of the movable cylinder 31 will be described. First, a nickel cylinder member constituting the movable cylinder 31 is formed. This cylindrical member is obtained by performing gold plating on a stainless steel wire by electrolytic plating and then forming a nickel layer thereon by electrodeposition. Then, after forming a resist layer on the outer peripheral surface of the cylindrical member, a spiral slit is formed by a laser in a portion of the resist layer where the spiral portion 32 is to be formed.

  Thereafter, the nickel layer where the slit is formed is removed by etching. By removing the resist layer on the nickel layer and drawing the wire from the nickel layer, the movable cylinder 31 having the spiral portion 32 is obtained (see FIG. 6). In addition, since the detailed manufacturing method of the movable cylinder 31 is the same as the manufacturing method described in Japanese Patent No. 4572303, detailed description and illustration are omitted.

  A pair of iron cores 41 and 42 are inserted into the movable cylinder 31 formed as described above. In a state where the pair of iron cores 41 and 42 are inserted into the movable cylinder 31, the pair of iron cores 41 and 42 and the fixed portion 34 of the movable cylinder 31 are fixed by welding. At this time, as shown in FIG. 7, the pair of iron cores 41 and 42 are arranged in the movable cylinder 31 so that the ends thereof are opposed to each other in the guide portion 33 of the movable cylinder 31.

  As shown in FIG. 8, the movable cylinder 31 and the pair of iron cores 41 and 42 fixed as described above are inserted into the through hole 11a of the pipe 11 in which the coil 21 is formed on the outer periphery. Thereby, the actuator 1 as shown in FIG. 1 is obtained.

  Although not particularly illustrated, a part of the movable cylindrical body 31 (for example, an end portion in the axial direction) is fixed to the pipe 11 by resistance welding. Specifically, the movable cylinder 31 is fixed to the pipe 11 by a method similar to the fixing method disclosed in, for example, Japanese Patent Application Laid-Open No. 2013-53921. That is, the pipe 11 and the movable cylinder 31 are brought into contact with each other by sandwiching the pipe 11 between the pair of electrodes in a state where the movable cylinder 31 with the iron core 41 fixed is inserted into the pipe 11. In this state, the pipe 11 and the movable cylindrical body 31 are resistance-welded by passing a current through the pair of electrodes.

  In the present embodiment, the movable cylinder 31 having the spiral portion 32 is accommodated in the pipe 11 in which the coil 21 is formed on the outer periphery, and the pair of iron cores 41 and 42 are disposed between the end portions in the movable cylinder 31. Is fixed in a state of being separated at a predetermined interval, the movable cylinder 31 can be expanded and contracted by a magnetic field generated by energization of the coil 21. That is, since the ends of the pair of iron cores 41 and 42 are magnetized in opposite polarities by energization of the coil 21, the pair of iron cores 41 and 42 receive a force in a direction approaching each other. Accordingly, the movable cylinder 31 fixed to the pair of iron cores 41 and 42 is compressed in the axial direction by the spiral portion 32. Therefore, the movable cylinder 31 expands and contracts depending on whether or not the coil 21 is energized.

  With the configuration of the actuator 1 as described above, the spiral portion 32 functions as a spring. And since the movable cylinder 31 in which this spiral part 32 was formed is arrange | positioned in the pipe 11, the actuator 1 can be made into a compact structure as a whole.

  In addition, since the spiral portion 32 that functions as a spring is positioned inside the coil 21, the actuator can be further downsized.

  In the present embodiment, the spiral portion 32 of the movable cylinder 31 is formed by etching using a resist. Thereby, since the fine processing of the spiral part 32 is attained, a smaller spring is obtained compared with a coil spring. Therefore, the actuator 1 can be further downsized.

  Furthermore, in this embodiment, the spiral part 32 of the movable cylinder 31 has a shape in which the leaf spring is spirally curved in the thickness direction. Therefore, when the spiral portion 32 is compressed in the axial direction as described above, the spiral portion 32 rotates about the axis P of the movable cylinder 31. That is, by making the configuration of the spiral portion 32 of the movable cylindrical body 31 as in the present embodiment, the movable cylindrical body 31 can be rotated while being expanded or contracted according to whether the coil 21 is energized.

(Other embodiments)
Although the embodiments of the present invention have been described above, the above-described embodiments are merely examples for carrying out the present invention. Therefore, the present invention is not limited to the above-described embodiment, and the above-described embodiment can be appropriately modified and implemented without departing from the spirit of the invention.

  In the embodiment, the pipe 11 and the movable cylinder 31 are made of nickel, and the pair of iron cores 41 and 42 are made of iron. However, the pipe 11 and the movable cylinder 31 may be made of a metal material other than nickel, a resin material, or the like. Moreover, as long as a pair of iron cores 41 and 42 are also magnetic materials, you may be comprised with materials other than iron.

  In the embodiment, the spiral portions 32 are provided at two locations in the axial direction of the movable cylinder 31. However, the present invention is not limited to this, and the spiral portion 32 may be provided only at one place, or the spiral portions 32 may be provided at three or more places.

  In the embodiment, the spiral portion 32 is formed in a spiral shape counterclockwise when viewed in the axial direction from the iron core 42 side. However, the spiral portion 32 may be formed in a spiral shape opposite to the present embodiment. Thereby, when the helical part 32 is compressed in the said axial direction, the movable cylinder 31 rotates in the reverse direction to this embodiment. Therefore, the rotation direction of the movable cylinder 31 can be changed depending on the shape of the spiral portion 32. Further, by forming the two spiral portions 32 in a spiral shape opposite to each other, the movable cylindrical body 31 can be expanded and contracted in the axial direction without rotating.

  In the said embodiment, a pair of iron cores 41 and 42 are arrange | positioned in the movable cylinder 31 so that the edge parts may oppose the inner side of the coil 21 and the center part of an axial direction. However, the present invention is not limited to this, and the pair of iron cores 41 and 42 may be arranged in the movable cylindrical body 31 so that the ends thereof are opposed to each other at the end of the coil 21 in the axial direction. The pair of iron cores 41 and 42 may be arranged in the movable cylinder 31 so that the end portions face each other outward.

  INDUSTRIAL APPLICABILITY The present invention can be used for an actuator that can extend and contract a driver element in a coil in the axial direction.

DESCRIPTION OF SYMBOLS 1 Actuator 11 Pipe 21 Coil 31 Movable cylinder 32 Spiral part 32a Slit 33 Guide part 34 Fixed part 41, 42 Iron core (core material)
51 Wire S Stroke

Claims (6)

An axially extending pipe;
A coil provided on the outer periphery of the pipe;
A movable cylinder disposed concentrically with the pipe and movably disposed within the pipe;
It is made of a magnetic material, and is arranged so that the end portions in the axial direction face each other inside the movable cylindrical body, and the end portions positioned on the outer side in the axial direction are fixed to the movable cylindrical body, respectively. A pair of core members made,
The movable cylinder is an actuator in which a slit is formed in a spiral shape and has a spiral portion that can expand and contract with relative movement of the pair of core members. The actuator according to claim 1, wherein
The said spiral part is an actuator provided in the said movable cylinder so that it may be located inside the said coil. The actuator according to claim 1 or 2,
The movable cylinder is an actuator in which one end of the axial direction is fixed to the pipe. The actuator according to any one of claims 1 to 3,
The said spiral part is an actuator provided in the said movable cylinder body in two or more places along with the said axial direction. The actuator according to claim 4, wherein
The said movable cylinder is an actuator which is further formed between the said spiral parts, and further has a guide part in which the said opposing edge part is located in a pair of said core material. The actuator according to any one of claims 1 to 5,
The spiral portion is an actuator in which a leaf spring has a shape that is spirally curved in the thickness direction.

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