JP2017041282A - Sensor device, input device, and electronic apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a sensor device capable of precisely detecting an operation position and pressing force, an input device and an electronic apparatus.SOLUTION: A sensor device includes: a first conductor layer; a second conductor layer; an electrode substrate; a first support body; and a second support body. The first conductor layer is formed in a deformable sheet. The second conductor layer is disposed facing to the first conductor layer. The electrode substrate has a plurality of first electrode wires and a plurality of second electrode wires which are disposed facing to the plurality of first electrode wires crossing the plurality of first electrode wires, and the electrode substrate is deformably disposed between the first conductor layer and the second conductor layer. The first support body has a plurality of first structures connecting the first conductor layer to the electrode substrate. The second support body has a plurality of second structures connecting the second conductor layer to the electrode substrate.SELECTED DRAWING: Figure 3

Description

  The present technology relates to a sensor device capable of electrostatically detecting an input operation, an input device, and an electronic apparatus.

  As a sensor device for an electronic device, for example, a configuration including a capacitive element and capable of detecting an operation position and a pressing force of an operation element with respect to an input operation surface is known (for example, see Patent Document 1).

JP 2011-170659 A

  In recent years, input methods with a high degree of freedom have been performed by gesture operations using finger movements. However, if the pressing force on the operation surface can be stably detected with high accuracy, more various input operations can be performed. Can be expected to be realized.

  In view of the circumstances as described above, an object of the present technology is to provide a sensor device, an input device, and an electronic apparatus that can detect an operation position and a pressing force with high accuracy.

In order to achieve the above object, a sensor device according to an embodiment of the present technology includes a first conductor layer, a second conductor layer, an electrode substrate, a first support, and a second support. It comprises.
The first conductor layer is formed in a deformable sheet shape.
The second conductor layer is disposed to face the first conductor layer.
The electrode substrate includes a plurality of first electrode lines and a plurality of second electrode lines arranged to face the plurality of first electrode lines and intersecting the plurality of first electrode lines. The first conductor layer is deformably disposed between the first and second conductor layers, and a change in distance from each of the first and second conductor layers can be detected electrostatically.
The first support body includes a plurality of first structures that connect between the first conductor layer and the electrode substrate, and a first structure formed between the plurality of first structures. And a space portion.
The second support is disposed between the plurality of adjacent first structures, the plurality of second structures connecting the second conductor layer and the electrode substrate, and the plurality of the second supports. And a second space formed between the second structures.

  According to the sensor device, the relative distance between each of the first and second conductor layers and the electrode substrate changes when pressed from the first conductor layer, and the pressure or the like is changed based on the change in the distance. Can be detected electrostatically. Therefore, the amount of change in capacitance with respect to the input operation can be increased, and the detection sensitivity can be increased. As a result, not only a conscious pressing operation but also a minute pressing force at the time of a contact operation can be detected, and it can be used as a touch sensor.

  The sensor device does not have a configuration in which the operation element and each electrode wire of the electrode substrate are directly capacitively coupled, but performs an input operation through the first conductor layer, so that a finger wearing a glove, a thin stylus, etc. Even when the operator is used, it is possible to detect an input operation with high accuracy.

The electrode substrate is formed in an intersection region between the plurality of first electrode lines and the plurality of second electrode lines, and has a capacitance according to a relative distance between each of the first and second conductor layers. You may further have a some variable detection part.
Thereby, it is possible to detect an input operation by a so-called mutual capacitance method in which detection is performed based on the amount of change in capacitance between the first and second electrode lines. Accordingly, simultaneous detection of two or more points in the multi-touch operation is facilitated.

The plurality of detection units may be formed to face each of the plurality of first structures.
As a result, when the first structure is displaced toward the second conductor layer by an input operation from the first conductor layer, the detection unit facing the first structure is also associated with the second structure. It will be displaced to the conductor layer side. Therefore, the relative distance between the detection unit and the second conductor layer can be easily changed, and the detection sensitivity can be improved.

Alternatively, the plurality of detection units may be formed to face each of the plurality of second structures.
With the above configuration, the second structure and the detection unit are both configured to face the first space. Thereby, the relative distance between the first conductor layer and the detection unit can be easily changed via the first space portion, and the detection sensitivity can be improved.

The first support body includes a first frame body connected between the first conductor layer and the electrode substrate and disposed along a periphery of the electrode substrate,
The second support body may include a second frame body that is connected between the second conductor layer and the electrode substrate and is disposed to face the first frame body.
By the first and second frame bodies, the peripheral edge of the entire sensor device is reinforced, the strength of the sensor device is improved, and the handleability can be improved.

The second conductor layer may have a step portion.
Thereby, the rigidity of the second conductor layer can be increased and the strength of the entire sensor device can be increased.

Further, in the sensor device according to an embodiment of the present technology, the second structure is not limited to a configuration disposed between the adjacent first structures, for example, the first structure and the second structure. May be arranged opposite to each other.
Thereby, the region where the first structure and the second structure are opposed (overlapping) is not easily deformed, and thus can be a region with low detection sensitivity. Thereby, it becomes possible to control the detection sensitivity in the sensor device, and it is possible to increase the degree of freedom of the device configuration.

  Furthermore, the electrode substrate is not limited to a configuration that electrostatically detects a change in the distance to each of the first and second conductor layers. For example, an operation element made of a conductor and each of the second conductor layers It is good also as a structure which detects the change of this distance electrostatically.

Further, the first support is not limited to the configuration having the first space portion, and the space between the plurality of first structures may be filled with an elastic material or the like.
Or the said 2nd support body is not limited to the structure which has the said 2nd space part, Between the said some 2nd structure bodies may be filled with the elastic material etc.

Each of the plurality of first electrode lines includes a plurality of first unit electrode bodies each including a plurality of first sub-electrodes,
Each of the plurality of second electrode lines includes a plurality of second unit electrode bodies each including a plurality of second sub-electrodes and facing each of the plurality of first unit electrode bodies,
The electrode substrate is
A base material on which the plurality of first electrode lines and the plurality of second electrode lines are disposed;
A plurality of detections in which the plurality of first sub-electrodes of each first unit electrode body and the plurality of second sub-electrodes of each second unit electrode body face each other in the in-plane direction of the electrode substrate May have a part.
As a result, the first electrode line and the second electrode line can be capacitively coupled in the in-plane direction of the electrode substrate. Thereby, the electrode substrate can be thinned, and the entire sensor device can be miniaturized. Furthermore, since the detection unit is configured by the plurality of first and second sub-electrodes, it is possible to increase the amount of capacitive coupling of the detection unit and increase the detection sensitivity as the sensor device.

An input device according to an embodiment of the present technology includes an operation member, a first conductor layer (conductor layer), an electrode substrate, a first support, and a second support.
The operation member has a deformable sheet shape having a first surface that receives an operation by a user and a second surface opposite to the first surface.
The first conductor layer is disposed to face the second surface.
The electrode substrate includes a plurality of first electrode lines and a plurality of second electrode lines arranged to face the plurality of first electrode lines and intersecting the plurality of first electrode lines. The operation member and the conductor layer are arranged so as to be deformable, and it is possible to electrostatically detect a change in the distance from the first conductor layer.
The first support includes a plurality of first structures that connect between the operation member and the electrode substrate, and a first space formed between the plurality of first structures. Have
The second support is disposed between the plurality of adjacent first structures, the plurality of second structures connecting the conductor layer and the electrode substrate, and the plurality of second structures. And a second space formed between the structures.

  According to the above input device, when the operation member is pressed from above, the relative distance between the operation member and each of the conductor layers and the electrode substrate changes, and the input operation such as pressing is electrostatically performed based on the change in the distance. Can be detected automatically. Therefore, the amount of change in capacitance based on the input operation can be increased, and the detection sensitivity can be increased. Accordingly, the input device can detect not only a conscious pressing operation but also a minute pressing force at the time of a contact operation, and can also be used as an input device including a touch sensor.

The operation member further includes a second conductor layer formed on the second surface,
The detection substrate can electrostatically detect a change in the distance between the first conductor layer and the second conductor layer.
In this way, the operation element and each electrode wire of the electrode substrate are not directly capacitively coupled, but an input operation is performed through a metal film, so an operation element such as a finger wearing a glove or a thin stylus is used. Even in this case, the input operation can be detected with high accuracy.

Furthermore, the operation member may include a display unit.
As described above, the input device is not configured to directly capacitively couple each electrode line of the electrode substrate with the operation element. Therefore, when the display unit including the conductive material is disposed between the electrode substrate and the operation element. Even in such a case, the input operation can be detected with high accuracy. That is, it can be set as the structure which has arrange | positioned the sensor apparatus on the back surface of a display part, and deterioration of the display quality of a display part can be suppressed.

The operation member may include a plurality of key areas.
Thereby, the input device can be applied as a keyboard device.

  In addition, the electrode substrate is formed in an intersecting region of the plurality of first electrode lines and the plurality of second electrode lines, and a plurality of detections whose capacitance is variable according to a relative distance from the conductor layer. It may have a part.

Furthermore, a control unit that is electrically connected to the electrode substrate and can generate information related to an input operation for each of the plurality of key regions based on outputs of the plurality of detection units may be further included.
Thereby, the input device can perform control corresponding to the key area where the input operation is performed by the control unit.

Each of the plurality of first structures may be disposed along a boundary between the plurality of key regions.
Thereby, it can be set as the structure where each key area | region opposes the 1st space part. Therefore, the distance between the operation member and the electrode substrate can be easily changed by an input operation into the key area, and the detection sensitivity of the input operation can be increased.

Further, each of the plurality of first electrode lines is a plate-like electrode disposed on the operation member side with respect to the plurality of second electrode lines,
Each of the plurality of second electrode lines may include a plurality of electrode groups.
Thereby, the first electrode line can be connected to the ground and function as an electromagnetic shield. Therefore, even without having a configuration of a metal film or the like formed on the operation member, it is possible to suppress the intrusion of electromagnetic waves from the outside of the electrode substrate and improve the reliability of detection sensitivity.

Further, in the input device according to one embodiment of the present technology, the second structure is not limited to a configuration disposed between adjacent first structures, and for example, the first structure and the second structure. May be arranged opposite to each other in the thickness direction of the input device.
Furthermore, the electrode substrate is not limited to a configuration that electrostatically detects a change in the distance to each of the first and second conductor layers. For example, an operation element made of a conductor and each of the second conductor layers It is good also as a structure which detects the change of this distance electrostatically.
Further, the first support is not limited to the configuration having the first space portion, and the space between the plurality of first structures may be filled with an elastic material or the like.
Or the said 2nd support body is not limited to the structure which has the said 2nd space part, Between the said some 2nd structure bodies may be filled with the elastic material etc.

An input device according to an embodiment of the present technology includes an operation member, a back plate, an electrode substrate, a first support, and a second support.
The operation member is a deformable sheet having a first surface that receives an operation by a user, a second surface opposite to the first surface, and a conductor layer formed on the second surface. It is.
The back plate is disposed to face the second surface.
The electrode substrate includes a plurality of first electrode lines and a plurality of second electrode lines arranged to face the plurality of first electrode lines and intersecting the plurality of first electrode lines. The operation member and the back plate are arranged to be deformable.
The first support includes a plurality of first structures that connect the operation member and the electrode substrate.
The second support includes a plurality of second structures that connect the back plate and the electrode substrate.

Each of the plurality of second electrode lines is a plate-like electrode disposed on the back plate side with respect to the plurality of first electrode lines,
Each of the plurality of first electrode lines may include a plurality of electrode groups.
Accordingly, the second electrode line can be connected to the ground and function as an electromagnetic shield. Therefore, even if the back plate is not a conductor, the intrusion of electromagnetic waves from the outside of the electrode substrate can be suppressed and the reliability of detection sensitivity can be improved.

An electronic apparatus according to an embodiment of the present technology includes an operation member, a conductor layer, an electrode substrate, a first support, a second support, and a controller.
The operation member has a deformable sheet shape having a first surface that receives an operation by a user and a second surface opposite to the first surface.
The conductor layer is disposed to face the second surface.
The electrode substrate includes a plurality of first electrode lines and a plurality of second electrode lines arranged to face the plurality of first electrode lines and intersecting the plurality of first electrode lines. The operation member and the conductor layer are arranged so as to be deformable, and a change in the distance from the conductor layer can be detected electrostatically.
The first support includes a plurality of first structures that connect between the operation member and the electrode substrate, and a first space formed between the plurality of first structures. Have
The second support is disposed between the plurality of adjacent first structures, the plurality of second structures connecting the conductor layer and the electrode substrate, and the plurality of second structures. And a second space formed between the structures.
The controller includes a control unit that is electrically connected to the electrode substrate and capable of generating information related to an input operation for each of the plurality of operation members based on an output of the electrode substrate.

  As described above, according to the present technology, the operation position and the pressing force can be detected with high accuracy.

1 is a schematic cross-sectional view of an input device according to a first embodiment of the present technology. It is a disassembled perspective view of the said input device. It is a schematic sectional drawing of the principal part of the said input device. It is a block diagram of the electronic device using the said input device. It is a schematic sectional drawing which shows the structural example of the conductor layer which concerns on the said input device. It is a schematic diagram explaining the connection method to the ground potential of the metal film which concerns on the said input device, and the said conductor layer. It is a schematic diagram explaining the connection method to the ground potential of the metal film which concerns on a modification, and the said conductor layer. It is typical sectional drawing for demonstrating the structure of the detection part which concerns on the said input device. It is a schematic sectional drawing which shows an example of the formation method of the 1st support body which concerns on the said input device. It is a schematic sectional drawing which shows an example of the formation method of the 2nd support body which concerns on the said input device. It is a schematic sectional drawing which shows the modification of the formation method of the said 1st or 2nd support body. It is a typical top view which shows the example of arrangement | positioning with the 1st and 2nd structure which concerns on the said input device, and a 1st and 2nd electrode line. It is a typical top view showing an example of arrangement of the opening of the above-mentioned conductor layer, the 1st and 2nd structures, and the 1st and 2nd electrode lines. It is a schematic sectional drawing which shows the mode of the force added to the said 1st and 2nd structure when the point of the 1st surface of the said input device is pressed below to the Z-axis direction with the operation element. The typical principal part sectional view showing the mode of the above-mentioned input device when the point on the 1st structure of the above-mentioned 1st surface receives operation by a manipulator, and the output outputted from the above-mentioned detection part at that time It is a figure which shows an example of a signal. FIG. 4 is a schematic cross-sectional view of a main part showing an aspect of the input device when the first surface is operated by an operator, and an example of an output signal output from the detection unit at that time; A shows an example when the operation element is a stylus, and B shows an example when the operation element is a finger. It is a schematic sectional drawing which shows the example of mounting to the electronic device of the said input device. It is a schematic sectional drawing which shows the structure of the modification 1 of the input device shown in FIG. 1, and the example in which the contact bonding layer is formed only in part is shown. It is a figure which shows typically a mode that the flexible display (display part) shown in FIG. 18 was affixed on the whole surface including an outer peripheral part with respect to the metal film shown in the figure. It is a schematic sectional drawing which shows the other structure of the modification 1 of the input device shown in FIG. 1, and is a figure which shows the example by which the contact bonding layer is formed with the predetermined plane pattern. It is a schematic diagram which shows the example of the plane pattern of the contact bonding layer shown in FIG. FIG. 6 is a schematic plan view illustrating a configuration example of first and second electrode lines according to Modification Example 2 of the input device illustrated in FIG. 1, in which A indicates the first electrode line and B indicates the second electrode line. . FIG. 23 is a schematic diagram illustrating a shape example of a unit electrode body according to the first and second electrode lines illustrated in FIG. 22. FIG. 9 is a schematic plan view illustrating an arrangement example of first and second structure bodies and first and second electrode lines according to Modification 3 of the input device illustrated in FIG. 1. FIG. 25 is a schematic cross-sectional view of an essential part showing an aspect of the input device when the first surface of the input device according to FIG. 24 is operated by an operator. It is a schematic sectional drawing which shows the structure of the modification 4 of the input device shown in FIG. It is a schematic sectional drawing of the principal part which shows the structural example 2 of the modification 5 of the input device shown in FIG. It is a schematic sectional drawing of the principal part which shows the structural example 3 of the modification 5 of the input device shown in FIG. It is a schematic sectional drawing of the principal part which shows the structural example 4 of the modification 5 of the input device shown in FIG. It is a schematic sectional drawing of the principal part which shows the structural example 5 of the modification 5 of the input device shown in FIG. It is a schematic sectional drawing of the input device which concerns on the 2nd Embodiment of this technique. It is a schematic sectional drawing which shows the structural example of the operation member which concerns on the said input device. FIG. 32 is an enlarged cross-sectional view illustrating a configuration of a modified example of the input device illustrated in FIG. 31. FIG. 34 is a plan view illustrating an arrangement example of first and second structures of the input device illustrated in FIG. 33, in which A represents the first structure and B represents the second structure. It is a top view which shows the structural example of the some 1st and 2nd electrode line of the input device shown in FIG. 33, A shows about a 1st electrode line and B shows about a 2nd electrode line. FIG. 35 is an enlarged plan view showing an arrangement example of first and second structures shown in FIG. 34. It is a schematic sectional drawing of the electronic device with which the input device which concerns on 3rd Embodiment of this technique was integrated. It is a figure which shows the structure of the input device which concerns on 4th Embodiment of this technique, A is a schematic sectional drawing, B is an expanded sectional view which shows the principal part of A. FIG. 39 is a schematic plan view illustrating a configuration example of first and second electrode lines according to the input device illustrated in FIG. 38, in which A indicates the first electrode line and B indicates the second electrode line. FIG. 39A is a plan view illustrating an arrangement of first and second electrode lines according to the input device illustrated in FIG. 38. B is a cross-sectional view as seen from the A-A direction of A. FIG. It is typical sectional drawing for demonstrating the structure of the detection part shown in FIG. It is a schematic sectional drawing of the input device which concerns on the example of 1 structure of 5th Embodiment of this technique. FIG. 43 is a schematic plan view illustrating an arrangement example of first and second structures and first and second electrode lines according to the input device illustrated in FIG. 42. It is a schematic sectional drawing of the input device which concerns on the other structural example of the 5th Embodiment of this technique. FIG. 45 is a schematic plan view illustrating an arrangement example of first and second structures and first and second electrode lines according to the input device illustrated in FIG. 44. FIG. 43 is a schematic plan view illustrating a configuration example of first and second electrode lines according to a modification of the input device illustrated in FIG. 42, in which A indicates the first electrode line and B indicates the second electrode line. . FIG. 45 is a schematic plan view illustrating a configuration example of first and second electrode lines according to a modification of the input device illustrated in FIG. 44, in which A indicates the first electrode line and B indicates the second electrode line. It is a figure which shows the structure of the input device which concerns on the modification of 6th Embodiment of this technique, A is a perspective view, B is sectional drawing seen from the BB direction of A. FIG. FIG. 49 is a perspective view showing a configuration of a modification of the input device shown in FIG. 48.

  Hereinafter, embodiments according to the present technology will be described with reference to the drawings.

<First Embodiment>
1 is a schematic cross-sectional view of an input device 100 according to the first embodiment of the present technology, FIG. 2 is an exploded perspective view of the input device 100, FIG. 3 is a schematic cross-sectional view of a main part of the input device 100, and FIG. 4 is a block diagram of an electronic device 70 using the device 100. FIG. Hereinafter, the configuration of the input device 100 of the present embodiment will be described. In the figure, the X-axis and the Y-axis indicate directions orthogonal to each other (in-plane direction of the input device 100), and the Z-axis indicates a direction orthogonal to the X-axis and Y-axis (thickness direction or vertical direction of the input device 100). Is shown.

[Input device]
The input device 100 includes a flexible display (display unit) 11 that receives a user's operation and a sensor device 1 that detects the user's operation. The input device 100 is configured as a flexible touch panel display, for example, and is incorporated in an electronic device 70 described later. The sensor device 1 and the flexible display 11 have a flat plate shape extending in a direction perpendicular to the Z axis.

  The flexible display 11 has a first surface 110 and a second surface 120 opposite to the first surface 110. The flexible display 11 has both a function as an input operation unit in the input device 100 and a function as a display unit. In other words, the flexible display 11 causes the first surface 110 to function as an input operation surface and a display surface, and displays an image corresponding to an operation by the user from the first surface 110 facing upward in the Z-axis direction. On the first surface 110, for example, an image corresponding to a keyboard, a GUI (Graphical User Interface), and the like are displayed. Examples of the operator that performs operations on the flexible display 11 include a finger f shown in FIG. 16B and a stylus s shown in FIG. 16A.

  The specific configuration of the flexible display 11 is not particularly limited. For example, as the flexible display 11, so-called electronic paper, an organic EL (electroluminescence) panel, an inorganic EL panel, a liquid crystal panel, or the like can be employed. The thickness of the flexible display 11 is not particularly limited, and is about 0.1 mm to 1 mm, for example.

  The sensor device 1 includes a metal film (first conductor layer or second conductor layer) 12, a conductor layer (second conductor layer or first conductor layer) 50, an electrode substrate 20, and a first support. It has a body 30 and a second support body 40. The sensor device 1 is disposed on the second surface 120 side of the flexible display 11.

  The metal film 12 is configured in a deformable sheet shape. The conductor layer 50 is disposed to face the metal film 12. The electrode substrate 20 includes a plurality of first electrode lines 210 and a plurality of second electrode lines 220 that are arranged to face the plurality of first electrode lines 210 and intersect the plurality of first electrode lines 210. And disposed so as to be deformable between the metal film 12 and the conductor layer 50, and it is possible to electrostatically detect a change in the distance between the metal film 12 and the conductor layer 50. The first support 30 includes a plurality of first structures 310 that connect the metal film 12 and the electrode substrate 20, and a first space formed between the plurality of first structures 310. 330. The second support body 40 is disposed between a plurality of adjacent first structure bodies 310, respectively, and a plurality of second structure bodies 410 connecting the conductor layer 50 and the electrode substrate 20, and a plurality of second structure bodies And a second space portion 430 formed between the structures 410.

  The sensor device 1 (input device 100) according to the present embodiment includes a gap between the metal film 12 and the electrode substrate 20 by the input operation on the first surface 110 of the flexible display 11, and the conductor layer 50 and the electrode substrate 20. The input operation is detected by electrostatically detecting a change in the distance. The input operation is not limited to a conscious pressing (push) operation on the first surface 110 but may be a contact (touch) operation. That is, the input device 100 can detect even a minute pressing force (for example, about several tens of g) applied by a general touch operation, as will be described later. The touch operation is configured to be possible.

  The input device 100 includes a control unit 60, and the control unit 60 includes a calculation unit 61 and a signal generation unit 62. The calculation unit 61 detects an operation by the user based on the change in the capacitance of the detection unit 20s. The signal generator 62 generates an operation signal based on the detection result by the calculator 61.

  The electronic device 70 illustrated in FIG. 4 includes a controller 710 that performs processing based on an operation signal generated by the signal generation unit 62 of the input device 100. The operation signal processed by the controller 710 is output to the flexible display 11 as an image signal, for example. The flexible display 11 is connected to a drive circuit mounted on the controller 710 via a flexible wiring board 113 (see FIG. 2). The drive circuit may be mounted on the wiring board 113.

  In this embodiment, the flexible display 11 is configured as a part of the operation member 10 of the input device 100. That is, the input device 100 includes the operation member 10, the electrode substrate 20, the first support body 30, the second support body 40, and the conductor layer 50. Hereinafter, each of these elements will be described.

(Operation member)
The operation member 10 has a laminated structure of the flexible display 11 including the first surface 110 and the second surface 120 and the metal film 12. That is, the operation member 10 includes a first surface 110 that receives an operation by a user, and a second surface 120 that is formed with the metal film 12 and is opposite to the first surface 110, and is configured in a deformable sheet shape. Is done.

  The metal film 12 is formed in a sheet shape that can be deformed following the deformation of the flexible display 11, and is formed of a metal foil or mesh material such as Cu (copper), Al (aluminum), stainless steel (SUS), or the like. The thickness of the metal film 12 is not particularly limited, and is, for example, several tens of nm to several tens of μm. The metal film 12 is connected to a ground potential, for example. The metal film only needs to function as a conductive layer and is not limited to metal. For example, an oxide conductor such as ITO (indium tin oxide) or an organic conductor such as carbon nanotube may be used. Thereby, the metal film 12 exhibits a function as an electromagnetic shield layer when mounted on the electronic device 70. That is, for example, intrusion of electromagnetic waves from other electronic components or the like mounted on the electronic device 70 and leakage of electromagnetic waves from the input device 100 can be suppressed, which can contribute to the stability of the operation as the electronic device 70. The metal film 12 may have a plurality of layers each connected to the ground potential (see FIG. 7). Thereby, the function as an electromagnetic shielding layer can be strengthened.

  For example, as shown in FIG. 3, the metal film 12 is formed by attaching an adhesive adhesive layer 13 on which a metal foil is formed to the flexible display 11. The material of the adhesive layer 13 is not particularly limited as long as it has adhesiveness, but may be a resin film to which a resin material is applied. Alternatively, it may be composed of a vapor deposition film or a sputtered film directly formed on the flexible display 11, or may be a coating film such as a conductive paste printed on the surface of the flexible display 11. Further, a nonconductive film may be formed on the surface of the metal film 12. As the non-conductive film, for example, a scratch-resistant hard coat layer or a corrosion-resistant antioxidant film can be formed.

(Conductor layer)
The conductor layer 50 constitutes the lowermost part of the input device 100 and is disposed to face the metal film 12 in the Z-axis direction. The conductor layer 50 also functions as a support plate of the input device 100, for example, and is configured to have higher bending rigidity than the operation member 10 and the electrode substrate 20, for example. The conductor layer 50 may be made of a metal plate containing, for example, an Al alloy, an Mg (magnesium) alloy, or other metal material, or a conductor plate such as a carbon fiber reinforced plastic. Alternatively, the conductor layer 50 may have a laminated structure in which a conductor film such as a plating film, a vapor deposition film, a sputtering film, or a metal foil is formed on an insulating layer such as a plastic material. Moreover, the thickness of the conductor layer 50 is not specifically limited, For example, it is about 0.3 mm.

  5A to 5E are schematic cross-sectional views showing examples of the configuration of the conductor layer 50. The conductor layer 50 is not limited to the example configured in a flat plate shape as shown in FIG. 5A, and may have a stepped portion 51 shown in FIGS. 5B, 5C, and 5E. Or the conductor layer 50 may be comprised by the mesh shape in which the opening 50h was provided.

  For example, the conductor layer 50B shown in FIG. 5B has a step part 51B formed by bending the peripheral part upward in the Z-axis direction, and the conductor layer 50C shown in FIGS. The step portions 51C and 51E are formed and recessed downward. Such a stepped portion 51 can increase the bending rigidity of the conductor layer 50 in the Z-axis direction.

  In addition, one or a plurality of openings 50h are provided in the conductor layer 50E shown in FIGS. 5D and 5E. Thus, by providing the opening 50h in the conductor layer 50, heat dissipation can be improved while maintaining rigidity. Therefore, it is possible to suppress problems of the input device 100 and improve reliability. Moreover, the volume of the conductor layer 50 can be reduced by the opening 50h, and the weight of the input device 100 can be reduced. Furthermore, the opening 50h makes it easier for air to flow when the volume of the second space 430 changes due to deformation, and the response time of the electrode substrate 20 is shortened. Here, the response time refers to the time from when the weight applied to the operation member 10 changes until the capacity of the sensor device 1 actually changes.

  Examples of the planar shape of the opening 50h include a polygonal shape such as a triangle and a quadrangle, a circular shape, an elliptical shape, an oval shape, an indefinite shape, and a slit shape, and these shapes may be used alone or in combination of two or more. .

  Moreover, when providing the several opening 50h in the conductor layer 50, the arrangement pattern of the several opening 50h is not specifically limited, For example, it can be set as a regular pattern. Thereby, detection sensitivity can be made more uniform. Furthermore, the regular pattern may be either a one-dimensional array or a two-dimensional array, and may be, for example, a mesh shape as shown in FIG. 5D. Or the some opening 50h may be comprised by stripe shape, and may comprise the geometric pattern as a whole.

  The opening 50h is provided, for example, in a position or region that does not face any of the plurality of second structures 410. That is, the opening 50h and the second structure 410 are provided so as to be shifted in the in-plane (XY plane) direction so as not to overlap in the Z-axis direction (the thickness direction of the input device 100). Thereby, the electrode substrate 20 and the conductor layer 50 can be stably connected by the second structure 410.

  The conductor layer 50 is connected to a ground potential, for example. Thus, the conductor layer 50 exhibits a function as an electromagnetic shield layer when mounted on the electronic device 70. That is, for example, intrusion of electromagnetic waves from other electronic components or the like mounted on the electronic device 70 and leakage of electromagnetic waves from the input device 100 can be suppressed, which can contribute to the stability of the operation as the electronic device 70. Furthermore, the electromagnetic shielding function can be further enhanced by adopting a connection method as described below.

(Connection method to ground potential between metal film and conductor layer)
FIG. 6 is a schematic diagram for explaining a method of connecting the metal film 12 and the conductor layer 50 to the ground potential. As shown in the figure, the metal film 12 and the conductor layer 50 are connected to, for example, the ground of the control unit 60 of the input device 100 and the ground of the controller 710 of the electronic device 70.

  Here, the flexible display 11 is mentioned as one of the apparatuses which influence the detection sensitivity of the sensor apparatus 1. If the metal film 12 and the conductor layer 50 are connected only to the ground of the control unit 60, the flexible display 11 may affect the ground potential of the control unit 60, and the electromagnetic shielding effect is sufficiently obtained. There is a possibility that it cannot be demonstrated. Therefore, by connecting the metal film 12 and the conductor layer 50 to the ground of the controller 710 to which the flexible display 11 is connected, a more stable ground potential can be maintained, and the electromagnetic shielding effect can be improved. . Furthermore, as shown in the figure, the electromagnetic shielding effect can be improved by connecting the metal film 12 and the conductor layer 50 with more contacts.

  Alternatively, as shown in FIG. 7, the metal film 12 may be formed of a plurality of layers. In the example shown in the figure, the metal film 12 includes a first metal film 12a on the flexible display 11 side and a second metal film 12b on the electrode substrate 20 side. Thereby, for example, the first metal film 12a can be connected to the ground of the controller 710, and the second metal film 12b can be connected only to the control unit 60. Alternatively, the second metal film 12b may be connected to both the control unit 60 and the controller 710. Also by this, the electromagnetic shielding effect can be improved.

(Electrode substrate)
The electrode substrate 20 is configured by a laminate of a first wiring substrate 21 having first electrode lines 210 and a second wiring substrate 22 having second electrode lines 220.

  The first wiring board 21 includes a first base material 211 (see FIG. 2) and a plurality of first electrode lines (X electrodes) 210. The first substrate 211 is made of, for example, a flexible sheet material, specifically, an electrically insulating plastic sheet (film) such as PET, PEN, PC, PMMA, or polyimide. The thickness of the 1st base material 211 is not specifically limited, For example, they are several 10 micrometers-several hundred micrometers.

  The plurality of first electrode wires 210 are integrally provided on one surface of the first base material 211. The plurality of first electrode lines 210 are arranged at a predetermined interval along the X-axis direction and are formed substantially linearly along the Y-axis direction. Each of the first electrode wires 210 is drawn out to the edge of the first base material 211 and connected to different terminals. In addition, each of the first electrode lines 210 is electrically connected to the control unit 60 via these terminals.

  Each of the plurality of first electrode lines 210 may be composed of a single electrode line, or may be composed of a plurality of electrode groups 21w (see FIG. 12) arranged along the X-axis direction. May be. In addition, the plurality of electrode lines constituting each electrode group 21w may be connected to a common terminal or may be divided into two or more different terminals.

  On the other hand, the second wiring board 22 includes a second base material 221 (see FIG. 2) and a plurality of second electrode lines (Y electrodes) 220. The second base material 221 is made of, for example, a flexible sheet material like the first base material 211, and specifically, an electrically insulating plastic sheet such as PET, PEN, PC, PMMA, polyimide ( Film) and the like. The thickness of the 2nd base material 221 is not specifically limited, For example, they are several 10 micrometers-several 100 micrometers. The second wiring board 22 is disposed to face the first wiring board 21.

  The plurality of second electrode lines 220 are configured similarly to the plurality of first electrode lines 210. That is, the plurality of second electrode lines 220 are integrally provided on one surface of the second base material 221, arranged at a predetermined interval along the Y-axis direction, and in the X-axis direction. It is formed almost linearly along. Each of the plurality of second electrode lines 220 may be configured by a single electrode line, or may be configured by a plurality of electrode groups 22w (see FIG. 12) arranged along the Y-axis direction. Also good.

  Each of the second electrode lines 220 is drawn out to the edge of the second base material 221 and connected to a different terminal. The plurality of electrode lines constituting each electrode group 22w may be connected to a common terminal or may be divided and connected to two or more different terminals. Each of the second electrode wires 210 is electrically connected to the control unit 60 via these terminals.

  The first electrode line 210 and the second electrode line 220 may be formed using a conductive paste or the like by a printing method such as screen printing, gravure offset printing, or ink jet printing, or a metal foil or metal layer photolithography technique. It may be formed by the patterning method used. Moreover, it can be set as the structure which has flexibility as the electrode substrate 20 whole because both the 1st and 2nd base materials 211 and 221 are comprised with the sheet | seat which has flexibility.

  As shown in FIG. 3, the electrode substrate 20 has an adhesive layer 23 that bonds the first wiring substrate 21 and the second wiring substrate 22 together. The adhesive layer 23 has electrical insulating properties, and is made of, for example, an adhesive cured material, an adhesive material such as an adhesive tape, or the like.

  With such a configuration, the first electrode line 210 is arranged to face the second electrode line 220 and the thickness direction of the electrode substrate 20, that is, the Z-axis direction. Furthermore, the electrode substrate 20 has a plurality of detection units 20 s formed respectively in the intersecting region between the first electrode line 210 and the second electrode line 220.

  FIG. 8A is a schematic cross-sectional view for explaining the configuration of the detection unit 20s. The detection unit 20 s is provided between the first electrode line 210, the second electrode line 220 facing the first electrode line 210 in the Z-axis direction, and the first and second electrode lines 210 and 220. And a capacitance element of a mutual capacitance type having a dielectric layer. 8A and 8B, it is assumed that each of the first and second electrode lines 210 and 220 is composed of a single electrode line.

  FIG. 8A shows an example in which the first electrode line 210 (210x1, 210x2, 210x3) and the second electrode line 220 (220y) are arranged facing each other in the Z-axis direction. In the example shown in FIG. 8A, the first wiring board 21 and the second wiring board 22 are bonded to each other by the adhesive layer 23, and the first base material 211 and the adhesive layer 23 of the first wiring board 21 are Constitutes the dielectric layer. In this case, the detection units 20s1, 20s2, and 20s3 are formed in the intersecting regions where the first electrode lines 210x1, 210x2, and 210x3 and the second electrode lines 220y are capacitively coupled, and the capacitances C1 and C2 , C3 are configured to change according to capacitive coupling between the metal film 12 and the conductor layer 50 and the first electrode lines 210x1, 210x2, 210x3, and the second electrode line 220y. The initial capacity of the detection unit 20 s depends on, for example, the facing area between the first and second electrode lines 210 and 220, the facing distance between the first and second electrode lines 210 and 220, and the dielectric constant of the adhesive layer 23. Is set.

  FIG. 8B shows a modified example of the configuration of the detection unit 20s, and the first electrode line 210D (210Dx1, 210Dx2, 210Dx3) and the second electrode line 220D (220Dy1, 220Dy2, 220Dy3) are the first base. An example is shown in which they are arranged in the same plane on the material 211D and capacitively coupled in the XY plane. In this case, the first electrode line 210D and the second electrode line 220D are arranged to face each other in the in-plane direction (for example, the X-axis direction) of the electrode substrate 20, and for example, the first base material 211D is the detection unit. A dielectric layer of 20Ds (20Ds1, 20Ds2, 20Ds3) is formed. Even in such an arrangement, the capacitances C11, C12, and C13 of the detection units 20Ds1, 20Ds2, and 20Ds3 are capacitively coupled to the metal film 12 and the conductor layer 50 and the first and second electrode lines 210Dx and 220Dy, respectively. Depending on the configuration, it is variably configured. In the above configuration, the second base material and the adhesive layer are not necessary, and the input device 100 can be reduced in thickness.

  In the present embodiment, each of the plurality of detection units 20s is disposed to face a first structure 310 (to be described later) in the Z-axis direction. Or you may arrange | position facing the 2nd structure 410 mentioned later and the Z-axis direction. In the present embodiment, the first wiring board 21 is stacked so as to be an upper layer than the second wiring board 22, but the present invention is not limited to this, and the second wiring board 22 is placed over the first wiring board 21. You may laminate | stack so that it may become an upper layer.

(Control part)
The controller 60 is electrically connected to the electrode substrate 20. More specifically, the control unit 60 is connected to each of the plurality of first and second electrode wires 210 and 220 via terminals. The control unit 60 configures a signal processing circuit capable of generating information related to an input operation on the first surface 110 based on outputs of the plurality of detection units 20s. The control unit 60 acquires the capacitance change amount of each detection unit 20s while scanning each of the plurality of detection units 20s at a predetermined cycle, and generates information related to the input operation based on the capacitance change amount.

  The control unit 60 is typically configured by a computer having a CPU / MPU, a memory, and the like. The control unit 60 may be composed of a single chip component or a plurality of circuit components. The control unit 60 may be mounted on the input device 100 or may be mounted on the electronic device 70 in which the input device 100 is incorporated. In the former case, for example, it is mounted on a flexible wiring board connected to the electrode substrate 20. In the latter case, the electronic device 70 may be integrated with the controller 710.

  As described above, the control unit 60 includes the calculation unit 61 and the signal generation unit 62, and executes various functions according to programs stored in a storage unit (not shown). The calculation unit 61 determines the operation position in the XY coordinate system on the first surface 110 based on electrical signals (input signals) output from the first and second electrode lines 210 and 220 of the electrode substrate 20. The signal generation unit 62 calculates and generates an operation signal based on the result. Thereby, an image based on an input operation on the first surface 110 can be displayed on the flexible display 11.

  3 and 4 calculates the XY coordinates of the operation position by the operator on the first surface 110 based on the output from each detection unit 20s to which the unique XY coordinates are assigned. Specifically, the calculation unit 61 detects each detection unit 20 s formed in the intersection region of each X electrode 210 and Y electrode 220 based on the amount of change in capacitance obtained from each X electrode 210 and Y electrode 220. The amount of change in capacitance at is calculated. The XY coordinates of the operation position by the operator can be calculated from the ratio of the change in capacitance of each detection unit 20s.

  Moreover, the calculating part 61 can determine whether the 1st surface 110 has received operation. Specifically, for example, when the amount of change in the capacitance of the entire detection unit 20s or the amount of change in the capacitance of each detection unit 20s is equal to or greater than a predetermined threshold, the first surface 110 receives an operation. Can be determined. Further, by providing two or more threshold values, for example, it is possible to distinguish and determine a touch operation and a (conscious) push operation. Furthermore, it is also possible to calculate the pressing force based on the amount of change in capacitance of the detection unit 20s.

  The calculation unit 61 can output these calculation results to the signal generation unit 62.

  The signal generation unit 62 generates a predetermined operation signal based on the calculation result of the calculation unit 61. The operation signal is, for example, an image control signal for generating a display image to be output to the flexible display 11, an operation signal corresponding to a key of a keyboard image displayed at an operation position on the flexible display 11, or a GUI (Graphical User It may be an operation signal related to an operation corresponding to (Interface).

  Here, the input device 100 is configured to change the distance between each of the metal film 12 and the conductor layer 50 and the electrode substrate 20 (detection unit 20s) by an operation on the first surface 110. Two supports 30, 40 are provided. Hereinafter, the first and second supports 30 and 40 will be described.

(Basic configuration of first and second supports)
The first support 30 is disposed between the operation member 10 and the electrode substrate 20. The first support 30 has a plurality of first structures 310, a first frame 320, and a first space 330. In this embodiment, the 1st support body 30 is joined on the electrode substrate 20 via the contact bonding layer 35 (refer FIG. 3). The adhesive layer 35 may be an adhesive, or may be composed of an adhesive material such as an adhesive and an adhesive tape.

  As shown in FIG. 3, the first support 30 according to the present embodiment is formed at a predetermined position on the base material 31, the structural layer 32 provided on the surface (upper surface) of the base material 31, and the structural layer 32. A stacked structure of a plurality of bonded portions 341 is provided. The base material 31 is composed of an electrically insulating plastic sheet such as PET, PEN, or PC. The thickness of the base material 31 is not specifically limited, For example, they are several micrometers-several hundred micrometers.

  The structural layer 32 is made of an electrically insulating resin material such as UV resin, and forms a plurality of first convex portions 321, second convex portions 322, and concave portions 323 on the base material 31. Each of the first convex portions 321 has, for example, a columnar shape, a prismatic shape, a frustum shape, or the like protruding in the Z-axis direction, and is arranged on the substrate 31 at a predetermined interval. The second convex portion 322 is formed with a predetermined width so as to surround the periphery of the base material 31.

  In addition, the structural layer 32 is made of a material having a relatively high rigidity so that the electrode substrate 20 can be deformed by an input operation on the first surface 110, but together with the operation member 10 during the input operation. You may comprise a deformable elastic material. That is, the elastic modulus of the structural layer 32 is not particularly limited, and can be appropriately selected as long as the desired operational feeling and detection sensitivity are obtained.

  The concave portion 323 is configured by a flat surface formed between the first and second convex portions 321 and 322. That is, the space area on the recess 323 constitutes the first space 330. Further, in the present embodiment, an adhesion preventing layer 342 made of UV resin having low adhesiveness or the like is formed on the recess 323 (not shown in FIG. 3). The shape of the adhesion preventing layer 342 is not particularly limited, and may be formed in an island shape, or may be formed as a flat film on the recess 323.

  Further, a joint 341 made of an adhesive resin material or the like is formed on each of the first and second convex portions 321 and 322. That is, each of the first structures 310 includes a stacked body of the first convex portion 321 and the joint portion 341 formed thereon, and each of the first frame bodies 320 includes the second convex portion 322. And a joined body 341 formed thereon. Thereby, the thickness (height) of the 1st structure 310 and the 1st frame 320 is comprised substantially the same, and is the range of several micrometers-several 100 micrometers in this embodiment, for example. Note that the height of the adhesion prevention layer 342 is not particularly limited as long as it is lower than the height of the first structure 310 and the first frame 320, and is lower than, for example, the first and second convex portions 321 and 322. Formed to be.

  The plurality of first structures 310 are arranged corresponding to the arrangement of the detection units 20s. In the present embodiment, the plurality of first structures 310 are disposed, for example, facing the plurality of detection units 20s in the Z-axis direction.

  On the other hand, the first frame 320 is formed so as to surround the periphery of the first support 30 along the periphery of the electrode substrate 20. The length of the first frame 320 in the short direction, that is, the width is not particularly limited as long as the strength of the entire first support 30 and the input device 100 can be sufficiently secured.

  On the other hand, the second support body 40 is disposed between the electrode substrate 20 and the conductor layer 50. The second support 40 includes a plurality of second structures 410, a second frame 420, and a second space 430.

  As shown in FIG. 3, in the second support body 40 according to the present embodiment, the second structure body 410 and the second frame body 420 are formed directly on the conductor layer 50. The second structure body 410 and the second frame body 420 are made of, for example, an insulative resin material having adhesiveness, and also serve as a joint portion that joins between the conductor layer 50 and the electrode substrate 20. Although the thickness of the 2nd structure 410 and the 2nd frame 420 is not specifically limited, For example, they are several micrometers-several 100 micrometers.

  The second structures 410 are respectively disposed between the adjacent first structures 310. That is, the second structures 410 are arranged corresponding to the arrangement of the detection units 20s, and are arranged between the adjacent detection units 20s in the present embodiment. On the other hand, the second frame body 420 is formed so as to surround the periphery of the second support body 40 along the periphery of the conductor layer 50. The width of the second frame body 420 is not particularly limited as long as the strength of the second support body 40 and the input device 100 as a whole can be sufficiently ensured.

  Further, the elastic modulus of the second structure body 410 is not particularly limited, as is the case with the structure layer 32 constituting the first structure body 310. That is, it can be appropriately selected within a range in which a desired operation feeling and detection sensitivity can be obtained, and may be made of an elastic material that can be deformed together with the electrode substrate 20 during an input operation.

  The second space 430 is formed between the second structures 410 and constitutes a space area around the second structures 410 and the second frame 420. In the present embodiment, the second space 430 accommodates each detection unit 20s and each first structure 310 when viewed from the Z-axis direction.

  The 1st and 2nd support bodies 30 and 40 of the above structures are formed as follows.

(Method for forming first and second supports)
9A, 9B and 9C are schematic cross-sectional views showing an example of a method for forming the first support 30. FIG. First, a UV resin is arranged on the base material 31a, and a predetermined pattern is formed on the resin. Thereby, as shown in FIG. 9A, a structural layer 32a having a plurality of first and second convex portions 321a and 322a and a concave portion 323a is formed. As the UV resin, a solid sheet material or a liquid UV curable material may be used. Further, the pattern forming method is not particularly limited. For example, the concave / convex pattern of the mold is transferred to the UV resin by a roll-shaped mold on which a predetermined concave / convex pattern is formed, and UV irradiation is performed from the substrate 31a side. A method of performing and curing the UV resin can be applied. In addition to molding using UV resin, for example, it may be formed by general thermoforming (for example, press molding or injection molding) or by discharging a resin material using a dispenser or the like.

  Next, referring to FIG. 9B, a UV resin or the like having low adhesion is applied in a predetermined pattern to the recess 323a by, for example, a screen printing method to form an adhesion preventing layer 342a. Thereby, for example, when the resin material forming the structural layer 32a has high adhesiveness, adhesion between the metal film 12 disposed on the first support 30 and the recess 323 can be prevented. . Note that the adhesion preventing layer 342a may not be formed when the resin material forming the structural layer 32a has low adhesion.

  Further, referring to FIG. 9C, a bonding portion 341a made of UV resin or the like having high adhesiveness is formed on the convex portion 321a by, for example, a screen printing method. The first support 30 and the metal film 12 are bonded by the bonding portion 341a. By the above formation method, the first structure 310 and the first frame 320 having desired shapes can be formed.

  On the other hand, FIG. 10 is a schematic cross-sectional view showing an example of a method for forming the second support 40. In FIG. 10, UV resin or the like having high adhesiveness is applied in a predetermined pattern directly on the conductor layer 50b, for example, by screen printing to form the second structure 410b and the second frame 420b. As a result, the number of processes can be greatly reduced and productivity can be increased.

  The above forming method is an example. For example, the first support 30 may be formed by the method shown in FIG. 10, or the second support 40 may be formed by the method shown in FIG. Moreover, the 1st and 2nd support bodies 30 and 40 can also be formed by the method shown in the following FIG.

  11A and 11B are schematic cross-sectional views showing a modification of the method for forming the first and second supports 30 and 40. FIG. In FIG. 11, description will be made with reference numerals corresponding to the first support 30. In FIG. 11A, UV resin or the like is applied in a predetermined pattern on the base material 31C or the like, for example, by a screen printing method to form first and second convex portions 311c and 312c. Further, a joining portion 341c made of UV resin having high adhesiveness is formed on the first and second convex portions 311c and 312c by, for example, a screen printing method. Accordingly, the first structure 310 (second structure 410) configured by the first convex portion 311c and the joint portion 341c, and the first structure configured by the second convex portion 312c and the joint portion 341c. The frame body 320 (or the second frame body 420) can be formed.

  Next, the planar arrangement of the first and second structures 310 and 410 will be described with reference to the relationship with the first and second electrode lines (X electrode, Y electrode) 210 and 220.

(Example of arrangement of first and second structures)
12A and 12B are schematic plan views showing examples of arrangement of the first and second structures 310 and 410, the first electrode line (X electrode) 210, and the second electrode line (Y electrode) 220. FIG. FIG. 12A and 12B show an example in which each X electrode 210 and each Y electrode 220 have electrode groups 21w and 22w, respectively. In addition, since each detection unit 20s is formed in the intersection region of the X electrode 210 and the Y electrode 220 as described above, in FIG. 12A and FIG. 12B, for example, four detection units 20s surrounded by thick broken lines are arranged. 12A and 12B, the black circle indicates the first structure 310, and the white circle indicates the second structure 410.

  FIG. 12A illustrates an example in which the number of first structures 310 and second structures 410 is substantially the same. That is, the first structure 310 is disposed substantially at the center of the detection unit 20s. The pitch in the X-axis direction and the Y-axis direction of the first structure 310 is the same as the pitch in the X-axis direction and the Y-axis direction of the detection unit 20s, and is P1. Further, the second structure 410 has the same pitch P1 as the first structure 310, and the first structure 310 and the detection unit 20s that are adjacent to each other in an oblique direction that forms about 45 ° with each of the X-axis and Y-axis directions. Are arranged at equal intervals.

  FIG. 12B illustrates an example in which the number of first structures 310 and second structures 410 is different. That is, the first structure 310 is arranged at a pitch P1 substantially on the center of the detection unit 20s, as in the example shown in FIG. 12A. On the other hand, the second structure 410 is different from FIG. 12A in arrangement and number, and is arranged at a pitch P2 that is ½ times the pitch P1 of the first structure 310, when viewed from the Z-axis direction. The second structure 410 is disposed around the first structure 310 and the detection unit 20s. By arranging more second structures 410 than the number of first structures 310, the strength of the entire input device 100 can be increased.

  Further, by adjusting the number and arrangement (pitch) of the first and second structures 310 and 410, the metal film 12 and the conductor layer 50 with respect to the pressing force can be obtained so that a desired operation feeling and detection sensitivity can be obtained. The amount of change in the distance between each and the detection unit 20s can be adjusted.

  When the conductor layer 50 has the opening 50h, the opening 50h, the first and second structures 310 and 410, and the first and second electrode lines 210 and 220 are arranged as follows. It can be.

(Example of arrangement of conductor layer openings)
FIGS. 13A and 13B are schematic plan views showing an arrangement example of the opening 50h of the conductor layer 50, the first and second structures 310 and 410, and the first and second electrode lines 210 and 220. FIG. is there. FIG. 13A shows an example in which the opening 50h has an oval shape, and FIG. 13B shows an example in which the opening 50h has a circular shape. The plurality of openings 50h illustrated in FIGS. 13A and 13B are disposed so as to surround the detection unit 20s as viewed from the Z-axis direction. In addition, the plurality of openings 50h are in-plane with respect to the second structure 410 (in the XY plane) so that none of the first and second structures 310 and 410 and the detection unit 20s overlap in the Z-axis direction. ) Are shifted in the direction.

  As shown in the figure, the opening 50h is disposed at a position not facing the detection unit 20s, for example. That is, the opening 50h and the detection unit 20s are provided so as to be shifted in the in-plane (XY plane) direction so as not to overlap in the Z-axis direction. Thereby, compared with the case where the opening 50h of the conductor layer 50 is disposed at a position facing the detection unit 20s, the change in the initial capacity and the capacity change rate of the detection unit 20s is suppressed, and the change in the input device 100 is achieved. The detection sensitivity can be maintained more uniformly.

  The openings 50h can be arranged at substantially the same cycle as the detection unit 20s, and are arranged symmetrically with respect to the center of the detection unit 20s, for example. More specifically, the opening 50 h is arranged symmetrically with respect to the center line of each of the first and second electrode lines 210 and 220. This can also prevent the detection sensitivity from becoming uneven in the input device 100.

  As described above, the first and second supports 30 and 40 according to the present embodiment are (1) the first and second structures 310 and 410 and the first and second spaces 330 and 430. (2) The first structure 310 and the second structure 410 do not overlap each other when viewed from the Z-axis direction, and the first structure 310 is disposed on the second space 430. It has the feature that. Therefore, as shown below, the metal film 12 and the conductor layer 50 can be deformed even by a minute pressing force of about several tens of grams during operation.

(Operation of the first and second supports)
FIG. 14 is a schematic cross section showing the state of the force applied to the first and second structures 310 and 410 when the point P on the first surface 110 is pressed downward in the Z-axis direction by the operating element h. FIG. The white arrow in the figure schematically shows the magnitude of the force downward in the Z-axis direction (hereinafter simply referred to as “downward”). In FIG. 14, aspects such as the bending of the metal film 12 and the electrode substrate 20 and the elastic deformation of the first and second structures 310 and 410 are not shown. In the following description, even when the user performs a touch operation that is not conscious of pressing, since a minute pressing force is actually applied, these input operations will be collectively described as “pressing”.

  For example, when the point P on the first space portion 330p0 is pressed downward by the force F, the metal film 12 immediately below the point P bends downward. Accordingly, the first structures 310p1 and 310p2 adjacent to the first space 330p0 receive the force F1, elastically deform in the Z-axis direction, and the thickness slightly decreases. Further, due to the bending of the metal film 12, the first structures 310p3 and 310p4 adjacent to the first structures 310p1 and 310p2 also receive a force F2 smaller than F1. Further, force is applied to the electrode substrate 20 by the forces F1 and F2, and the electrode substrate 20 bends downward about the region immediately below the first structures 310p1 and 310p2. As a result, the second structure 410p0 disposed between the first structures 310p1 and 310p2 receives the force F3, elastically deforms in the Z-axis direction, and the thickness slightly decreases. Further, the second structure 410p1, which is disposed between the first structures 310p1, 310p3, and the second structure 410p2, which is disposed between the first structures 310p2, 310p4, also have F4 smaller than F3, respectively. receive.

  Thus, force can be transmitted in the thickness direction by the first and second structures 310 and 410, and the electrode substrate 20 can be easily deformed. Further, the metal film 12 and the electrode substrate 20 are bent, and the influence of the pressing force is exerted in the in-plane direction (direction parallel to the X-axis direction and the Y-axis direction). A force can also be exerted on the neighboring first and second structures 310 and 410.

  Regarding the feature (1), the metal film 12 and the electrode substrate 20 can be easily deformed by the first and second space portions 330 and 430. Further, the first and second structures 310 and 410 configured by columns or the like can apply a high pressure to the electrode substrate 20 with respect to the pressing force of the operation element h, and the electrode substrate 20 can be flexed efficiently. I can do it.

  Furthermore, regarding the feature (2), since the first and second structures 310 and 410 are not overlapped when viewed from the Z-axis direction, the first structure 310 has a second space portion below it. The electrode substrate 20 can be easily bent through 430.

  Hereinafter, an example of the amount of change in the capacitance of the detection unit 20s during a specific operation will be described.

(Example of detector output)
FIGS. 15A and 15B are schematic cross-sectional views showing the main part of the input device 100 when the first surface 110 is operated by the operator h, and output signals output from the detection unit 20s at that time. It is a figure which shows an example. The bar graph shown along the X-axis in FIGS. 15A and 15B schematically shows the amount of change from the reference value of the capacitance in each detection unit 20s. FIG. 15A shows a mode when the operator h presses on the first structure 310 (310a2), and FIG. 15B shows a state when the operator h presses on the first space 330 (330b1). The aspect of is shown.

  In FIG. 15A, the first structure 310a2 immediately below the operation position receives the most force, and the first structure 310a2 itself is elastically deformed and displaced downward. Due to the displacement, the detection unit 20sa2 directly below the first structure 310a2 is displaced downward. As a result, the detection unit 20sa2 and the conductor layer 50 come close to each other through the second space 430a2. That is, the detection unit 20sa2 obtains the capacitance change amount Ca2 by slightly changing the distance to the metal film 12 and greatly changing the distance to the conductor layer 50. On the other hand, the first structures 310a1 and 310a3 are also slightly displaced downward due to the influence of the bending of the metal film 12, and the amount of change in capacitance in the detection units 20sa1 and 20sa3 is Ca1 and Ca3, respectively.

  In the example shown in FIG. 15A, Ca2 is the largest, and Ca1 and Ca3 are substantially the same and smaller than Ca2. That is, as shown in FIG. 15A, the amount of change in capacitance Ca1, Ca2, Ca3 shows a mountain-shaped distribution with Ca2 as the apex. In this case, the calculation unit 61 can calculate the center of gravity and the like based on the ratio of Ca1, Ca2, and Ca3, and can calculate the XY coordinates on the detection unit 20sa2 as the operation position.

  On the other hand, in FIG. 15B, the first structures 310b1 and 310b2 in the vicinity of the operation position are slightly elastically deformed and displaced downward due to the bending of the metal film 12. Due to the displacement, the electrode substrate 20 is bent, and the detection units 20sb1 and 20sb2 immediately below the first structures 310b1 and 310b2 are displaced downward. Accordingly, the detection units 20sb1 and 20sb2 and the conductor layer 50 are brought close to each other through the second space portions 430b1 and 430b2. That is, the detection units 20sb1 and 20sb2 obtain the capacitance change amounts Cb1 and Cb2, respectively, by slightly changing the distance to the metal film 12 and relatively changing the distance to the conductor layer 50.

  In the example shown in FIG. 15B, Cb1 and Cb2 are substantially the same. Thereby, the calculating part 61 can calculate the XY coordinate between detection part 20sb1, 20sb2 as an operation position.

  Thus, according to this embodiment, since both the thickness of the detection unit 20s and the metal film 12, and the detection unit 20s and the conductor layer 50 are variable depending on the pressing force, the capacitance of the detection unit 20s is reduced. The amount of change can be made larger. As a result, it is possible to increase the detection sensitivity of the input operation.

  Further, the XY coordinates of the operation position can be calculated regardless of whether the operation position on the flexible display 11 is on the first structure 310 or the first space 330. That is, when the metal film 12 propagates the influence of the pressing force in the in-plane direction, not only the detection unit 20s just below the operation position but also the detection unit 20s near the operation position when viewed from the Z-axis direction. Changes can be made. Thereby, variation in detection accuracy in the first surface 110 can be suppressed, and high detection accuracy can be maintained over the entire first surface 110.

  Here, a finger and a stylus are often used as an operator. As a feature of both, since the finger has a larger contact area than the stylus, when the same load (pressing force) is applied, the finger has a smaller pressure against the pressing force (hereinafter referred to as operation pressure). . On the other hand, the stylus has a small contact area. For example, in a general mutual capacitance type capacitive sensor, there is a problem that the amount of capacitive coupling with a sensor element is small and the detection sensitivity is low. According to the present embodiment, an input operation can be detected with high accuracy even when any of these operators is used. Hereinafter, a description will be given with reference to FIGS.

  16A and 16B are schematic cross-sectional views showing the main part of the input device 100 when the first surface 110 is operated by a stylus or a finger, and output signals output from the detection unit 20s at that time. FIG. 16A shows a case where the operation element is a stylus s, and FIG. 16B shows a case where the operation element is a finger f. Also, the bar graphs shown along the X axis in FIGS. 16A and 16B schematically show the amount of change from the reference value of the capacitance in each detection unit 20s, as in FIGS. 15A and 15B.

  As shown in FIG. 16A, the stylus s deforms the metal film 12 and exerts a pressing force on the first structure 310c2 immediately below the operation position. Here, since the stylus s has a small contact area, a large operating pressure can be exerted on the metal film 12 and the first structure 310c2. For this reason, the metal film 12 can be largely deformed, and as a result, a large capacitance change can be caused as indicated by the capacitance change amount Cc2 of the detection unit 20sc2. As a result, the capacitance changes Cc1, Cc2, and Cc3 of the detection units 20sc1, 20sc2, and 20sc3 each have a mountain-shaped distribution with Cc2 as the apex.

  As described above, the input device 100 according to the present embodiment can detect the amount of change in capacitance based on the in-plane distribution of the operating pressure. This is because the input device 100 does not detect the amount of change in capacitance due to direct capacitive coupling with the operation element, but the amount of change in capacitance through the deformable metal film 12 and the electrode substrate 20. By detecting. Therefore, even with an operator such as the stylus s having a small contact area, the operation position and the pressing force can be detected with high accuracy.

  On the other hand, as shown in FIG. 16B, since the finger f has a large contact area, the operation pressure is reduced, but the metal film 12 in a wider range than the stylus s can be directly deformed. As a result, the first structures 310d1, 310d2, and 310d3 can be displaced downward to generate the capacitance changes Cd1, Cd2, and Cd3 of the detection units 20sd1, 20sd2, and 20sd3, respectively. Cd1, Cd2, and Cd3 have a gentle mountain distribution as compared with Cc1, Cc2, and Cc3 according to FIG. 16A.

  The input device 100 according to the present embodiment detects the amount of change in capacitance based on capacitive coupling between the metal film 12 and the conductor layer 50 and the detection unit 20s as described above. Even an operator with such a large contact area can cause a sufficient change in capacitance. In determining whether or not an operation has been performed, for example, by using a value obtained by summing the amount of change in capacitance of all the detection units 20sd1, 20sd2, and 20sd3 in which the change in capacitance has occurred, the operation pressure Even when the contact angle is small, the contact can be accurately determined based on the pressing force of the entire first surface 110. Furthermore, since the capacitance changes based on the operation pressure distribution in the first surface 110, the operation position in line with the user's intuition can be calculated based on the ratio of these changes.

  Further, in the case of a general electrostatic capacity sensor, the operation position and the like are detected by using capacitive coupling between the operation element and the X and Y electrodes. That is, when a conductor is disposed between the operation element and the X and Y electrodes, it is difficult to detect an input operation due to capacitive coupling between the conductor and the X and Y electrodes. In addition, in the configuration in which the thickness between the operation element and the X and Y electrodes is large, there is a problem that the amount of capacitive coupling between them becomes small and the detection sensitivity decreases. Under these circumstances, it is necessary to dispose the sensor device on the display surface of the display, and the display quality of the display deteriorates.

  Since the input device 100 (sensor device 1) according to this embodiment uses capacitive coupling between the metal film 12 and the conductor layer 50 and the X and Y electrodes 210 and 220, the input device 100 (the sensor device 1) is electrically conductive between the operator and the sensor device. Even if the body is placed, the detection sensitivity is not affected. Further, it is only necessary that the metal film 12 can be deformed by the pressing force of the operation element, and there are few restrictions on the thickness between the operation element and the X and Y electrodes. Therefore, even when the sensor device 1 is arranged on the back surface of the flexible display 11, the operation position and the pressing force can be detected with high accuracy, and the deterioration of the display characteristics of the flexible display 11 can be suppressed.

  Furthermore, since the thickness of the insulator (dielectric) existing between the operation element and the X and Y electrodes is small, for example, even when the user operates by wearing gloves or the like as an insulator. The detection sensitivity does not decrease. Therefore, it is possible to contribute to improvement of user convenience.

[Electronics]
17A and 17B are diagrams illustrating an example of mounting the input device 100 according to the present embodiment on the electronic device 70. FIG. An electronic device 70a according to FIG. 17A includes a housing 720a including an opening 721a in which the input device 100 is disposed. In addition, a support portion 722a is formed in the opening 721a and supports the peripheral portion of the conductor layer 50 through a joint portion 723a such as an adhesive tape. Moreover, the joining method of the conductor layer 50 and the support part 722a is not limited to the above, For example, you may fix with a screw | thread etc.

  Moreover, since the 1st and 2nd frame 320,420 is formed along the periphery, the input device 100 which concerns on this embodiment can maintain the stable intensity | strength also at the time of mounting.

  An electronic device 70b according to FIG. 17B has a configuration substantially the same as that of the electronic device 70a, and includes a housing 720b including an opening 721a and a support 722a. The difference is that it has at least one auxiliary support portion 724 b that supports the back surface of the conductor layer 50. The auxiliary support part 724b may be joined to the conductor layer 50 with an adhesive tape or the like, or may not be joined. With the above configuration, the input device 100 can be supported more stably.

[Modification 1]
In the first embodiment described above, the metal film 12 has been described as being formed by attaching the adhesive layer 13, which is an adhesive resin film on which a metal foil is formed, to the flexible display 11. However, the present invention is not limited thereto. Not. For example, when the metal film 12 is a metal foil or the like that does not have a resin film, the adhesive layer 13 may be an adhesive, an adhesive, or the like that can affix the metal film 12 to the flexible display 11.

  In this case, the adhesive layer 13 may be provided on the entire surface of the flexible display 11 as shown in FIG. As a result, the metal film 12 and the flexible display 11 are firmly bonded throughout the surface, and uniform sensitivity can be obtained.

  On the other hand, FIG. 18A and 18B are schematic sectional drawings which show the modification by which the contact bonding layer 13 is formed only in part. As shown in FIG. 18A, the adhesive layer 13 may be formed only on the outer peripheral portions of the flexible display 11 and the metal film 12, for example, regions above the first frame 320 and the second frame 420. It may be formed. As a result, the first frame body 320 and the first frame body 320 that have a larger bonding area in the Z-axis direction and are stacked in the Z-axis direction than the first structure body 310 and the second structure body 410 respectively. It is possible to join the metal film 12 and the flexible display 11 above the second frame 420. Therefore, even if a force that causes the operation member 10 to be peeled upward is applied, the first and second structures 310 and 410 are damaged, the electrode substrate 20 and the structures 310 and 410 Can be prevented.

  Or as shown to FIG. 18B, the contact bonding layer 13 may be formed in the area | region containing the display area of the flexible display 11, ie, the center part except an outer peripheral part. Thereby, as shown below, it becomes possible to suppress breakage of the flexible display 11 and abnormality of detection sensitivity.

  19A and 19B are diagrams schematically showing a state in which the flexible display 11 is attached to the entire surface including the outer peripheral portion with respect to the metal film 12. 19A and 19B, the illustration of the adhesive layer 13 is omitted.

  For example, as schematically shown in FIG. 19A, if the outer peripheral portion 11a of the flexible display 11 is provided with wiring, a driver, etc., and there is a bulge or a step, the outer peripheral portion 11a is particularly forced to join. 11a may be damaged. Further, like the region surrounded by the broken line in the figure, a gap may be generated at the boundary between the outer peripheral portion 11a and the other region, resulting in abnormal detection sensitivity.

  Further, as schematically shown in FIG. 19B, even when a sealing material or the like (not shown) is provided on the surface of the flexible display 11 and warping or the like is present, if the outer peripheral portion 11a is forcibly joined, the flexible display 11 is damaged. there's a possibility that. Moreover, there is a possibility that abnormality in detection sensitivity may occur due to the floating of the flexible display 11 as in the region surrounded by the broken line in FIG. That is, the above-mentioned problem can be suppressed by not forcibly joining the flexible display 11 to the outer peripheral portion 11a.

  FIG. 20 is a schematic cross-sectional view showing another modification of the adhesive layer 13. As shown in the figure, the adhesive layer 13 may be formed in a predetermined plane pattern. FIG. 21 is a diagram illustrating an example of a planar pattern of the adhesive layer 13. The adhesive layer 13 may have a columnar pattern as shown in FIG. 21A, a stripe pattern as shown in FIG. 21B, or a lattice pattern as shown in FIG. 21C. When the adhesive layer 13 has such a pattern, it is possible to prevent bubbles from entering the adhesive layer 13 when the flexible display 11 and the metal film 12 are bonded to each other, and to improve the yield.

  Further, when the adhesive layer 13 has a predetermined plane pattern, the thickness of the adhesive layer 13 along the Z-axis direction can be formed thinner than the thickness of the metal film 12. Thereby, the reliability of joining of the flexible display 11 and the metal film 12 can be improved. Furthermore, the predetermined pattern can be configured more finely than the arrangement pattern of the first structures 310. Specifically, the length between the columns in the case of a columnar pattern, or the length between adjacent lines in the case of a stripe shape or a lattice shape is shorter than the size of the adjacent first structure 310. For example, it can be configured with a length of 1/10 or less. Accordingly, it is possible to prevent the pattern of the adhesive layer 13 and the size of the first structure 310 from interfering with each other, thereby causing nonuniformity and periodicity in detection sensitivity.

[Modification 2]
In the first embodiment described above, each of the plurality of first electrode lines 210 and the plurality of second electrode lines 220 may be formed of a single electrode line, or may include a plurality of electrode groups 21w, 22w. Although it may be comprised by, it can be set as the following structures further.

  FIG. 22A is a schematic plan view showing a configuration example of the first electrode wire 210. FIG. For example, the first electrode line 210 includes a plurality of unit electrode bodies 210m and a plurality of connecting portions 210n that connect the plurality of unit electrode bodies 210m. Each unit electrode body 210m includes a plurality of sub-electrodes (electrode elements) 210w. The plurality of sub-electrodes 210w are electrodes composed of a plurality of electrode elements having branched electrode lines, and have a regular or irregular pattern. FIG. 22A shows an example in which the plurality of sub-electrodes 210w have a regular pattern. In this example, the plurality of sub-electrodes 210w are linear conductive members extending in the Y-axis direction, and these conductive members are arranged in stripes. The connecting part 210n extends in the Y-axis direction and connects adjacent unit electrode bodies 210m.

  FIG. 22B is a schematic plan view showing a configuration example of the second electrode line 220. For example, the second electrode line 220 includes a plurality of unit electrode bodies 220m and a plurality of connecting portions 220n that connect the plurality of unit electrode bodies 220m. The unit electrode body 220m includes a plurality of sub-electrodes (electrode elements) 220w. The plurality of sub-electrodes 220w have a regular or irregular pattern, and FIG. 22B shows an example in which the plurality of sub-electrodes 220w have a regular pattern. In this example, the plurality of sub-electrodes 220w are linear conductive members extending in the X-axis direction, and these conductive members are arranged in stripes. The connecting portion 220n extends in the X-axis direction and connects adjacent unit electrode bodies 220m.

  The first and second electrode lines 210 and 220 are arranged so as to intersect so that the unit electrode body 210m and the unit electrode body 220m overlap each other in the Z-axis direction when viewed from the Z-axis direction. The detection unit 20s is configured. The unit electrode bodies 210m and 220m are not limited to the above-described configuration, and various configurations can be adopted.

  FIG. 23A to FIG. 23P are schematic diagrams showing examples of shapes of the unit electrode bodies 210m and 220m. 23A to 23P show examples of the unit electrode body 210m, the unit electrode body 220m may have these shapes.

  FIG. 23A shows an example in which the unit electrode body 210m is composed of an assembly of a plurality of linear electrode patterns extending radially from the central portion. FIG. 23B shows an example in which one of the radial line electrodes shown in the example of FIG. 23A is formed thicker than the other line electrodes. Thereby, the electrostatic capacitance change amount on a thick line electrode can be made higher than on other line electrodes. Further, FIG. 23C and FIG. 23D show an example in which an annular linear electrode is disposed substantially at the center, and radial line electrodes are formed therefrom. Thereby, the concentration of the linear electrodes in the central portion can be suppressed, and the occurrence of the sensitivity reduction region can be prevented.

  FIG. 23E to FIG. 23H show an example in which an aggregate is formed by combining a plurality of linear electrodes formed in an annular shape or a rectangular annular shape. As a result, the density of the electrodes can be adjusted, and the formation of the sensitivity reduction region can be suppressed. FIGS. 23I to 23L show examples in which an aggregate is formed by combining a plurality of linear electrodes arranged in the X-axis direction or the Y-axis direction. By adjusting the shape, length, pitch, and the like of the linear electrode, a desired electrode density can be obtained. Further, FIG. 23M to FIG. 23P are examples in which the line electrodes are arranged asymmetrically in the X-axis direction or the Y-axis direction.

  The combination of the shapes of the unit electrode bodies 210m and 220m of the first and second electrode wires 210 and 220 may be two sets of the same type among the shapes shown in FIGS. 22A, 22B and 23A to 23P. Two different sets may be used. In addition, the shape of parts other than the unit electrode bodies 210m and 220m, such as the connecting portions 210n and 220n, is not particularly limited, and may be, for example, a linear shape.

[Modification 3]
In the first embodiment described above, the first structure 310 has been described as being disposed substantially at the center of the detection unit 20s, but the present invention is not limited to this. For example, the detection unit 20s may be disposed to face the second structure 410, and the second structure 410 may be disposed substantially at the center of the detection unit 20s.

  24A and 24B show an arrangement example of the first and second structures 310 and 410, the first electrode line (X electrode) 210, and the second electrode line (Y electrode) 220 according to this modification. It is a typical top view to show, and is a figure corresponding to Drawing 12A and B.

  FIG. 24A corresponds to FIG. 12A and shows an example in which the number of first structures 310 and second structures 410 is substantially the same. In the present modification, the second structure 410 is disposed substantially at the center of the detection unit 20s. The pitch in the X-axis direction and the Y-axis direction of the second structure 410 is the same as the pitch in the X-axis direction and the Y-axis direction of the detection unit 20s, and is P1. The first structure 310 has the same pitch P1 as the second structure 410 and the second structure 410 and the detection unit 20s adjacent to each other in an oblique direction that forms about 45 ° with each of the X-axis and Y-axis directions. Are arranged at equal intervals.

  FIG. 24B corresponds to FIG. 12B and illustrates an example in which the number of first structures 310 and second structures 410 is different. That is, the second structure 410 is arranged at a pitch P1 substantially on the center of the detection unit 20s, as in the example shown in FIG. 24A. On the other hand, the first structures 310 are different in arrangement and number from those shown in FIG. The first structure 310 is disposed so as to surround the second structure 410 and the detection unit 20s when viewed from the Z-axis direction. By arranging the number of first structures 310 larger than the number of second structures 410, the strength of the entire input device 100 can be increased.

  FIGS. 25A and 25B are schematic cross-sectional views before and after the point P on the first surface 110 is pressed downward in the Z-axis direction by the operation element h with respect to the modified example. FIG. 25A shows a state before actual pressing, and corresponds to FIG. FIG. 25B shows the state of pressing, and corresponds to FIG.

  For example, when the point P on the first space portion 330p0 is pressed downward, the region on the first space portion 330p0 of the metal film 12 bends downward, and the first space portion 330p is crushed in the Z-axis direction, The metal film 12 and the detection unit 20s are close to each other. Furthermore, the first structures 310p1 and 310p2 adjacent to the first space 330p0 also receive force. Thereby, the region of the electrode substrate 20 connected to the first structures 310p1 and 310p2 is also bent downward, and the second structure 410p0 is also elastically deformed in the Z-axis direction, so that the thickness is slightly reduced. That is, the detection unit 20s located below the operation element h and the conductor layer 50 are close to each other.

  As described above, also in the present modification in which the second structure 410 is opposed to the detection unit 20s, the force can be transmitted in the thickness direction by the first and second structures 310 and 410, and the electrode substrate 20 can be attached. It can be easily deformed. As a result, the input device 100 according to this modification can efficiently change the capacitance of the detection unit 20s and detect the pressing force and the pressing position with high accuracy, as in the first embodiment. Become.

  As shown in FIGS. 25A and 25B, the second support body 40 is formed at a predetermined position on the base material 41, the structural layer 42 provided on the surface (upper surface) of the base material 41, and the structural layer 42. Alternatively, a stacked structure of a plurality of joints 441 may be provided. On the other hand, the 1st support body 30 does not need to have such a laminated structure. Thereby, also in this modification, operability can be improved while maintaining the strength of the input device 100.

[Modification 4]
FIG. 26 is a schematic cross-sectional view showing another modification of the present embodiment. As shown in the figure, the operating member 10 may have a protective film 14 disposed on the metal film 12 so as to face the first support 30. That is, the protective film 14 is disposed to face the electrode substrate 20. The protective film 14 may be an antioxidant resin film or the like, and is formed on the metal film 12 by coating or the like, for example. By providing such a protective film 14, it is possible to prevent corrosion and damage of the metal film 12. Therefore, the reliability of the metal film 12 can be improved and good detection sensitivity can be maintained.

[Modification 5]
The electrode substrate 20 is configured by a laminated body of a first wiring substrate 21, a second wiring substrate 22, and an adhesive layer 23 therebetween, and the adhesive layer 35 is interposed on the first wiring substrate 21. The base material 31 of the first support 30 is described as being disposed, but the present invention is not limited to this. For example, the following configuration may be used.

(Configuration example 1)
The input device 100 (sensor device 1) may have an insulating cover layer instead of the base material 31 and the adhesive layer 35. Such a cover layer is formed of, for example, an insulating UV curable resin or a thermosetting resin, and may have a thickness of several μm to several hundreds of μm. The cover layer may be a single layer or may include a plurality of layers. Further, the first structure 310, the first frame 320, and the first space 330 of the first support 30 are disposed on the cover layer. The first structure 310 and the first frame 320 can be formed by, for example, a screen printing method or a UV molding method. With such a configuration, the thickness of the electrode substrate 20 and the first support 30 can be reduced, which can contribute to a reduction in the thickness of the entire input device 100.

(Configuration example 2)
FIG. 27 is a schematic cross-sectional view of the main part showing Configuration Example 2 according to this modification. As shown in the figure, this configuration example includes an insulating layer 24 instead of the first base material 211 and the adhesive layer 23. That is, the insulating layer 24 is formed on the second wiring substrate 22 including the second electrode line 220, and the first electrode line 210 is formed thereon. The insulating layer 24 is formed of, for example, an insulating UV curable resin, a thermosetting resin, or the like, and may have a thickness of several μm to several 100 μm. With such a configuration, the electrode substrate 20 can be thinned, which can contribute to the thinning of the entire input device 100. Note that the input device 100 according to this configuration example may have a cover layer instead of the base material 31 and the adhesive layer 35 as described in the configuration example 1 above.

(Configuration example 3)
28A and 28B are schematic cross-sectional views of the main part showing Configuration Example 3 according to this modification. As shown in FIG. 28A, the electrode substrate 20 according to this configuration example has one base material 211, and the first electrode line 210 and the second electrode line 220 are formed on both surfaces of the base material 211. Yes. That is, the base material 211 has a configuration in which two layers of electrodes are formed by double-sided printing. In this case, as shown in FIG. 28A, the cover layer 25 may be formed on the surface (lower surface) of the base material 211 on which the second electrode lines 220 are formed. The cover layer 25 is formed of, for example, an insulating UV curable resin or a thermosetting resin, and may have a thickness of several μm to several 100 μm. Alternatively, as shown in FIG. 28B, the adhesive layer 23 and the second substrate 221 are formed on the lower surface of the first substrate 211 having the first and second electrode wires 210 and 220 formed on both sides. It may be. Although not shown, the second support 40 may be directly formed on the lower surface of the base material 211. Note that the input device 100 according to this configuration example may have a cover layer instead of the base material 31 and the adhesive layer 35 as described in the configuration example 1 above.

(Configuration example 4)
FIGS. 29A and 29B are schematic cross-sectional views of a main part showing a configuration example 4 according to this modification. As shown in the figure, the electrode substrate 20 according to this configuration example includes a first wiring substrate 21 including a first electrode line 210 and a first base material 211, a second electrode line 220, and a second electrode line. Although the second wiring board 22 including the base material 221 and the adhesive layer 23 are included, the orientation of the second wiring board 22 relative to the first wiring board 21 is different from the configuration shown in FIG. . In other words, the second electrode wire 220 is formed not to face the adhesive layer 23 but to face the second support 40. In this case, as shown in FIG. 29A, an insulating cover layer 25 may be formed on the lower surface of the second base material 221. Alternatively, as illustrated in FIG. 29B, an adhesive layer 252 and a third substrate 251 may be formed on the lower surface of the second substrate 221. Although not shown, the second support 40 may be directly formed on the lower surface of the second base material 221. Note that the input device 100 according to this configuration example may have an insulating cover layer instead of the base material 31 and the adhesive layer 35 as described in the configuration example 1 above.

(Configuration example 5)
FIG. 30 is a schematic cross-sectional view of the main part showing Configuration Example 5 according to this modification. As shown in the figure, the electrode substrate 20 is arranged upside down from the configuration described with reference to FIG. Furthermore, the 1st support body 30 does not have the base material 31, and the 2nd support body 40 has the base material 41 formed in the electrode substrate 20 side. In this case, as shown in FIG. 30, an adhesive layer 45 may be provided between the base 41 of the second support 40 and the first wiring substrate 21 of the electrode substrate 20. And the first support 30 may not have an adhesive layer. Note that this configuration example can be combined with the configurations described as the configuration examples 1 to 4 as appropriate. For example, the base material 41 and the adhesive layer 45 can be used as the cover layer described above.

<Second Embodiment>
FIG. 31 is a schematic cross-sectional view of an input device 100A according to the second embodiment of the present technology. The configuration other than the operation member 10A of the input device 100A according to this embodiment is the same as that of the first embodiment, and the description thereof is omitted as appropriate. FIG. 31 is a diagram corresponding to FIG. 1 according to the first embodiment.

(overall structure)
An input device 100A according to the present embodiment includes a flexible sheet 11A instead of the flexible display, and a sensor device 1 similar to that of the first embodiment. As will be described later, a plurality of key areas 111A are arranged on the flexible sheet 11A, and the input device 100A is used as a keyboard device as a whole.

(Input device)
The flexible sheet 11A is made of an insulating plastic sheet having flexibility such as PET (polyethylene terephthalate), PEN (polyethylene naphthalate), PMMA (polymethyl methacrylate), PC (polycarbonate), PI (polyimide), and the like. The The thickness of the flexible sheet 11A is not particularly limited and is, for example, about several tens of μm to several hundreds of μm.

  Note that the flexible sheet 11A is not limited to a single-layer structure, and may have a configuration in which two or more sheets are laminated. In this case, in addition to the plastic sheet, for example, an insulating plastic sheet having flexibility such as PET, PEN, PMMA, PC, and PI may be laminated as a base material.

  11 A of flexible sheets have 1st surface 110A as an operation surface, and 2nd surface 120A of the back surface of 110 A of 1st surfaces. A plurality of key areas 111A are arranged on the first surface 110A. On the other hand, the metal film 12 is laminated on the second surface 120A.

  The flexible sheet 11A and the metal film 12 may be composed of a composite sheet or the like in which a metal foil is previously attached to the surface of the resin sheet, or may be a vapor deposition film or a sputtered film formed on the second surface 120A. It may be configured. Alternatively, it may be a coating film such as a conductive paste printed on the second surface 120A.

  Each key area 111A corresponds to a key top that is pressed by the user, and has a shape and a size corresponding to the type of key. Each key area 111A may have an appropriate key display. The key display may display a key type or display the position (outline) of each key. It is also possible to display both of them. For the display, an appropriate printing method, for example, screen printing, flexographic printing, gravure printing, or the like can be employed.

  The first surface 110A has a form in which a groove 112A is formed around the key region 111A. Appropriate processing techniques such as press molding, etching, and laser processing can be employed to form the uneven surface corresponding to the key region 111A. Alternatively, the flexible sheet 11A having an uneven surface may be formed by a molding technique such as injection molding.

  The configuration of the flexible sheet 11A is not limited to the above example. For example, FIGS. 32A and 32B are diagrams schematically illustrating a modification of the flexible sheet 11A. A flexible sheet 11Aa shown in FIG. 32A shows an example in which the first surface 110A is a flat surface. In this case, each key area (not shown) may be described by printing or the like, or may be used as a touch sensor without the key area. Further, in the flexible sheet 11Ab shown in FIG. 32B, the flexible sheet 11A is formed by press molding or the like, and each key region 111Ab is configured to be independently deformable in the vertical direction (sheet thickness direction).

  Furthermore, the flexible sheet 11A may be made of a conductive material such as metal. Thereby, the metal film 12 becomes unnecessary and the operation member 10A can be thinned. In this case, the flexible sheet 11A also has a function as the metal film 12, and is connected to a ground potential, for example.

  In the present embodiment, when the user performs a key input operation, the center portion of the key area 111A is pressed. Therefore, the first and second structures 310 and 410 and the detection unit 20s can be arranged as follows.

(Arrangement example 1)
For example, as shown in FIG. 31, the first structure 310 of the first support 30 may be disposed below the key region 111A. In this case, the detection unit 20s is disposed at a position overlapping the first structure 310 when viewed from the Z-axis direction, and the second structure 410 is below the groove 112A between the adjacent first structures 310. Placed in.

  In the arrangement example 1, the position on the first structure 310 is pressed during the key input operation. Accordingly, as described with reference to FIG. 15A, each of the metal film 12 and the conductor layer 50 and the detection unit 20s are close to each other, and a change in capacitance of the detection unit 20s can be obtained.

  Further, the shape of the first structure 310 is not limited to the cylindrical body as shown in FIG. 12, and may be arranged in a wall shape along the groove 112A, for example. In this case, each second structure 410 is arranged along the boundary between the plurality of key regions 111A.

(Arrangement example 2)
In addition, the first structure 310 may be disposed below the groove 112A. In this case, the second structure 410 is disposed below the key region 111A between the adjacent first structures 310. The detection unit 20s is disposed at a position overlapping the first structure 310 as viewed from the Z-axis direction.

  In the arrangement example 2, as described with reference to FIG. 15B, the metal film 12 and the detection unit 20 s come close to each other when the first space 330 is pressed during the key input operation. Further, the first structure 310 adjacent to the first space 330 immediately below the operation position is displaced downward and the electrode substrate 20 is bent, so that the second structure 410 is also slightly elastically deformed. Therefore, each of the metal film 12 and the conductor layer 50 and the detection unit 20s are close to each other, and the capacitance change of the detection unit 20s can be obtained.

  In addition, arrangement | positioning of the detection part 20s is not limited above, For example, you may arrange | position overlapping with the 2nd structure 410.

  The control unit 60 includes the calculation unit 61 and the signal generation unit 62 as described above, and is electrically connected to the electrode substrate 20. Further, in the present embodiment, the control unit 60 is configured to be able to generate information related to an input operation for each of the plurality of key regions 111A based on the outputs of the plurality of detection units 20s. That is, the calculation unit 61 operates in the XY coordinate system on the first surface 110 based on the electrical signals (input signals) output from the first and second electrode lines 210 and 220 of the electrode substrate 20. The position is calculated, and the key area 111A assigned to the operation position is determined. The signal generator 62 generates an operation signal corresponding to the key area 111A where the press is detected.

  The input device 100A can be applied as a keyboard device as described above by being incorporated in an electronic device such as a notebook personal computer or a mobile phone. In addition, the input device 100A includes a communication unit (not illustrated), and is electrically connected to another electronic device such as a personal computer by a wired or wireless connection so that an input operation for controlling the electronic device is possible. May be.

  Furthermore, the input device 100A can be used as a pointing device as described in the first embodiment. That is, two or more threshold values are set for the output of each detection unit 20s, and the calculation unit 61 determines a touch operation and a push operation, whereby an input device that serves as both a pointing device and a keyboard can be obtained. is there.

[Modification]
FIG. 33 is an enlarged cross-sectional view showing an input device 100A of a modified example according to the present embodiment. The input device 100 </ b> A shown in the figure does not have a configuration in which the plurality of second structures 410 are respectively disposed between the plurality of adjacent first structures 310, and the plurality of first structures 310 are not included. At least a part of the first structures 310 is arranged to face at least a part of the second structures 410 of the plurality of second structures 410 in the Z-axis direction. Further, the first structure 310 and the second structure 410 arranged to face each other in the Z-axis direction are arranged to face the groove 112A and the Z-axis direction, and are arranged at a boundary between the plurality of key regions 111A. Is done.

  FIG. 34A is a plan view illustrating an arrangement example of the first structures 310, and FIG. 34B is a plan view illustrating an arrangement example of the second structures 410. FIG. In the present modification, the plurality of first structures 310 and the plurality of second structures 410 are respectively arranged according to the arrangement of the plurality of key regions 111A, as will be described later. Each of the plurality of first structures 310 has a plurality of types of shapes according to the arrangement, and each of the plurality of second structures 410 also has a plurality of types of shapes according to the arrangement. Further, when viewed from the Z-axis direction, the first structure 310e in the first structure 310 shown in FIG. 34A and the second structure 410e in the second structure 410 shown in FIG. 34B. And are configured to overlap.

  35A is a plan view illustrating a configuration example of the plurality of X electrodes 210, and FIG. 35B is a plan view illustrating a configuration example of the plurality of Y electrodes 220. As shown in FIG. 35A, each X electrode 210 has a plurality of unit electrode bodies 210m, and each unit electrode body 210m has a configuration connected in the Y-axis direction by electrode lines. Each unit electrode body 210m includes a plurality of sub-electrodes and is arranged corresponding to each key region 111A. On the other hand, as shown in FIG. 35B, the Y electrode 220 includes an electrode group 22w including a plurality of electrode lines extending in the X-axis direction. An intersection region between each unit electrode body 210m of the X electrode 210 and each electrode group 22w of the Y electrode constitutes a detection unit 20s, and each detection unit 20s is configured to correspond to each key region 111A. The X electrode 210 may include a plurality of electrode groups and the Y electrode 220 may include a plurality of unit electrode bodies.

  In this modification, the intersections of the sub-electrodes in the unit electrode body 210m and the electrode lines in the electrode group 22w are densely arranged at the center of each key region 111A. Thereby, it is possible to improve the detection sensitivity when the key area 111A is pressed.

  FIG. 36 is an enlarged plan view showing an arrangement example of the first structure 310 and the second structure 410, and is a diagram showing one key region 111A. In the figure, for the sake of convenience, the first structure 310 is indicated by reference numerals u1 to u10, and the second structure 410 is indicated by reference signs s1 to s9.

  As shown in the figure, the first structure u9 and the second structure s8, and the first structure u10 and the second structure s4 are in the Y-axis direction indicated by a two-dot chain line around the key region 111A. Are arranged opposite to each other in the Z-axis direction. As described above, in the region where the first structure 310 and the second structure 410 are arranged so as to overlap in the Z-axis direction, the distances between the metal film 12 and the conductor layer 50 and the electrode substrate 20 are unlikely to change. This is a region where the detection sensitivity as a sensor is low. In addition, when the certain key area 111A is pressed, the area is an area in which the deformation of the flexible sheet 11A (metal film 12) and the electrode substrate 20 is difficult to propagate to the other key area 111A. Therefore, by arranging the first structures u9 and u10 and the second structures s8 and s4 facing in the Z-axis direction around the key area 111A, the malfunction particularly between the key areas 111A adjacent in the X-axis direction. Can be prevented.

  Note that the first structure and the second structure facing each other in the Z-axis direction may be disposed on the side along the X-axis direction around the key region 111A. Specifically, the first structure may be disposed on the second supports s1 to s3, s5 to s7. In this case, a malfunction between the key areas 111A adjacent in the Y-axis direction can be prevented.

  Further, as shown in the figure, a plurality of first structures u5 to u8 are arranged inside the key area 111A. Since the first structures u5 to u8 arranged without overlapping with the second structure efficiently deform the flexible sheet 11A (key area 111A) and the electrode substrate 20 as described above, the key area 111A. It is possible to improve the detection sensitivity.

  If only one first structure is arranged inside the key area 111A, the flexible sheet 11A and the electrode substrate 20A can be efficiently moved when the area away from the first structure is pressed. It cannot be deformed. In particular, when a pressing operation is performed with an operation element having a small contact area such as a nail or a stylus, sensitivity may vary depending on the position in the key region 111A. On the other hand, in this modification, the plurality of first structures u5 to u8 are symmetrically arranged in the key area 111A, so that the pressing position and the contact area of the operation element in the key area 111A Regardless, high detection sensitivity can be maintained.

  Furthermore, the intersections of the sub-electrodes in the unit electrode body 210m and the electrode lines in the electrode group 22w are inside the region defined by the first structures u5 to u8 (the region indicated by the dashed line in FIG. 36) and It may be densely arranged in the vicinity. As a result, it is possible to further improve the detection sensitivity when the key area 111A is pressed.

  A second structure s9 is disposed substantially at the center of the key area 111A. If the structure is not arranged in the central portion of the key region 111A, the deformation amount of the flexible sheet 11A and the electrode substrate 20 is likely to be larger in the central portion than in the peripheral portion. As a result, a difference in detection sensitivity may occur between the central portion and the peripheral portion of the key region 111A. Therefore, by arranging the second structure s9 substantially at the center of the key region 111A, it is possible to maintain the detection sensitivity of the central portion and the peripheral portion of the key region 111A uniformly.

  On the other hand, around the key region 111A, the first structures u1 to u4 and the second structures s1 to s3 and s5 to s7 are arranged without overlapping each other. These first and second structures u1 to u4, s1 to s3, and s5 to s7 are configured to be larger than the first and second structures u5 to u8 and s9 arranged inside the key region 111A. The Thereby, the adhesiveness with the 1st and 2nd structure, the electrode substrate 20, flexible sheet 11A, etc. can be improved, and the intensity | strength as input device 100A can be raised. Further, deformation around the key area 111A can be suppressed, and malfunction can be prevented.

  As shown in FIG. 36, it is preferable that the first and second structures arranged around each key area 111A are separated from each other. If the first and second structures surround the key region 111A without a gap, the internal pressure increases in the first space 330 and the second space 430 in the key region 111A, and the flexible sheet 11A and There is a possibility that the return of deformation of the electrode substrate 20 is delayed and the detection sensitivity is lowered. Therefore, by disposing the first and second structures away from each other, the movement of the air in the first space 330 and the second space 430 is not hindered, and a decrease in detection sensitivity is prevented. It becomes possible to do.

<Third Embodiment>
FIG. 37 is a schematic cross-sectional view of an electronic apparatus 70B in which the input device 100B according to the third embodiment of the present technology is incorporated. The configuration other than the operation member 10B of the input device 100B according to this embodiment is the same as that of the first embodiment, and the description thereof will be omitted as appropriate.

  In the input device 100B according to the present embodiment, a part of the housing 720B of the electronic device 70B constitutes a part of the operation member 10B. That is, the input device 100B includes an operation region 721B that constitutes a part of the housing 720B and the sensor device 1 similar to that of the first embodiment. As the electronic device 70B, for example, a personal computer equipped with a touch sensor is applicable.

  The operation member 10B has a laminated structure of the metal film 12 and an operation region 721B that includes the first surface 110B and the second surface 120B and can be deformed. That is, the first surface 110B is one surface of the housing 720B, and the second surface 120B is the back surface (inner surface) of the one surface.

  For example, the operation region 721B may be made of the same material as the other regions of the housing 720B, for example, a conductive material such as an aluminum alloy or a magnesium alloy, or a plastic material. In this case, when the user performs a touch operation or push operation, It is composed of a deformable thickness. Alternatively, the operation region 721B may be made of a material different from that of the other region of the housing 720B. In this case, a material having rigidity smaller than that of the other region can be used.

  A metal film 12 such as a metal foil formed on the adhesive adhesive layer 13 is formed on the second surface 120B. In addition, when the operation area | region 721B is comprised with a conductor material, the metal film 12 becomes unnecessary and the operation member 10B can be reduced in thickness. In this case, the operation region 721B also has a function as the metal film 12, and is connected to, for example, a ground potential.

  As described above, the input device 100B according to the present embodiment can be configured using a part of the housing 720B made of a conductive material or the like. As described above, this is because the input device 100B does not detect the input operation using the capacitive coupling between the operation element and the X and Y electrodes, but the metal film 12 pressed by the operation element and the conductor facing it. This is because the capacitive coupling between each of the layers 50 and the detection unit 20s is used. Therefore, according to the input device 100B, it is possible to reduce the number of parts of the electronic device 70B and further increase the productivity.

  In addition, since the input device 100B according to the present embodiment includes the sensor device 1 similar to that of the first embodiment described above, the operation position and the pressing force can be accurately detected even with a small pressing force. . Therefore, according to this embodiment, there are few restrictions about the material of operation area 721B, and input device 100B with high detection sensitivity can be provided.

<Fourth Embodiment>
FIG. 38A is a schematic cross-sectional view of an input device 100C according to the fourth embodiment of the present technology, and FIG. 38B is an enlarged cross-sectional view showing a main part of the input device 100C. The present embodiment is different from the first embodiment in that the electrode substrate 20 electrostatically detects a change in distance between the metal film 12 and the conductor layer 50 based on a change in capacitive coupling in the XY plane. Is different. That is, the Y electrode 220C has a facing portion that faces the X electrode 210C and the electrode substrate 20C in the in-plane direction, and the facing portion constitutes the detection unit 20Cs.

  The electrode substrate 20 includes a base material 211C on which a plurality of first electrode lines (X electrodes) 210C and a plurality of second electrode lines (Y electrodes) 220C are arranged, and the plurality of X electrodes 210C and Y electrodes 220C are arranged on the same plane.

  An example of the configuration of the X electrode 210C and the Y electrode 220C will be described with reference to FIGS. 39A and 39B. Here, each X electrode 210C and each Y electrode 220C respectively includes a plurality of comb-like unit electrode bodies (first unit electrode bodies) 210m and a plurality of unit electrode bodies (second unit electrode bodies) 220m. An example is shown in which one unit electrode body 210m and one unit electrode body 220m form each detector 20Cs.

  As shown in FIG. 39A, the X electrode 210C includes a plurality of unit electrode bodies 210m, an electrode line portion 210p, and a plurality of connection portions 210z. The electrode line portion 210p extends in the Y-axis direction. The plurality of unit electrode bodies 210m are arranged at regular intervals in the Y-axis direction. The electrode wire portion 210p and the unit electrode body 210m are disposed with a predetermined distance therebetween, and the two are connected by a connecting portion 210z.

  As described above, the unit electrode body 210m has a comb-like shape as a whole. Specifically, the unit electrode body 210m includes a plurality of sub-electrodes 210w and a connecting portion 210y. The plurality of sub-electrodes 210w extend in the X-axis direction. Adjacent sub-electrodes 210w are separated by a predetermined distance. One end of the plurality of sub-electrodes 210w is connected to a connecting portion 210y that extends in the X-axis direction.

  As shown in FIG. 39B, the Y electrode 220C includes a plurality of unit electrode bodies 220m, an electrode line portion 220p, and a plurality of connection portions 220z. The electrode wire portion 220p extends in the X-axis direction. The plurality of unit electrode bodies 220m are arranged at regular intervals in the X-axis direction. The electrode wire portion 220p and the unit electrode body 220m are arranged with a predetermined distance therebetween, and the two are connected by a connecting portion 220z. In addition, the connection part 220z may be omitted, and a configuration in which the unit electrode body 220m is directly provided on the electrode line part 220p may be employed.

  As described above, the unit electrode body 220m has a comb-like shape as a whole. Specifically, the unit electrode body 220m includes a plurality of sub-electrodes 220w and a connecting part 220y. The plurality of sub-electrodes 220w extend in the X-axis direction. Adjacent sub-electrodes 220w are separated by a predetermined distance. One ends of the plurality of sub-electrodes 220w are connected to a connecting portion 220y that extends in the Y-axis direction.

  As shown in FIG. 40A, each detection unit 20Cs is formed in a region where each unit electrode body 210m and each unit electrode body 220m are combined with each other. The plurality of sub-electrodes 210w of the unit electrode body 210m and the plurality of sub-electrodes 220w of the unit electrode body 220m are alternately arranged in the Y-axis direction. That is, the sub-electrodes 210w and 220w are arranged to face each other in the in-plane direction (for example, the Y-axis direction) of the electrode substrate 20C.

  40B is a cross-sectional view seen from the AA direction of FIG. 40A. Similar to the first embodiment, the Y electrode 220 is provided so as to intersect the X electrode 210, but is formed on the same plane as the X electrode 210. Therefore, as shown in FIG. 40B, the region where the X electrode 210 and the Y electrode 220 intersect is configured such that the X electrode 210 and the Y electrode 220 do not directly contact each other. That is, the insulating layer 220r is provided on the electrode line portion 210p of the X electrode 210. A jumper wiring 220q is provided so as to straddle the insulating layer 220r. The electrode wire portion 220p is connected by the jumper wiring 220q.

  FIG. 41 is a schematic cross-sectional view for explaining the configuration of the detection unit 20Cs according to the present embodiment. In the example shown in the figure, in the detection unit 20Cs, the sub electrode 210w1 and the sub electrode 220w1, the sub electrode 220w1 and the sub electrode 210w2, the sub electrode 210w2 and the sub electrode 220w2, the sub electrode 220w2 and the sub electrode 210w3, and the sub electrode 210w3 and the sub electrode 210w3 Each of the electrodes 220w3 is capacitively coupled. That is, with the base material 211C as a dielectric layer, the capacitances Cc11, Cc12, Cc13, Cc14, and Cc15 between the sub-electrodes are the metal film 12, the conductor layer 50, and the first and second electrode lines 210C including the sub-electrodes. , 220C is variably configured according to capacitive coupling.

  With the above configuration, the second base material and the adhesive layer of the electrode substrate are not necessary, and the input device 100C can be reduced in thickness. In addition, many sub-electrodes are capacitively coupled to each other, and the distance between the sub-electrodes that are capacitively coupled can be reduced. Thereby, the capacitive coupling amount as the whole input device 100C can be increased, and detection sensitivity can be improved.

<Fifth Embodiment>
In the input device 100D according to the fifth embodiment of the present technology, one of the X electrode 210 and the Y electrode 220 includes a plurality of electrode groups, whereas the other includes a flat electrode. Different from the first embodiment.

[First structural example]
FIG. 42 is a schematic cross-sectional view of the input device 100D according to the present embodiment. As shown in the figure, the input device 100D includes an operation member 10D, a conductor layer 50, an electrode substrate 20D, a first support body 30, and a second support body 40. The conductor layer 50, the first support 30 and the second support 40 have substantially the same configuration as that of the first embodiment, but the configurations of the operation member 10D and the electrode substrate 20D are different from those of the first embodiment. . Specifically, the operation member 10D does not have a metal film. In addition, regarding the electrode substrate 20D, each of the plurality of X electrodes (first electrode lines) 210D is a flat electrode disposed on the operation member 10D side with respect to the plurality of Y electrodes (second electrode lines) 220D. Each of the plurality of Y electrodes 220D includes a plurality of electrode groups 22Dw. Further, the electrode substrate 20D is configured to be able to electrostatically detect a change in distance between the conductive operator such as a user's finger and the conductor layer 50.

  FIG. 43 is a schematic plan view illustrating an arrangement example of the first and second structures 310 and 410, the X electrode 210D, and the Y electrode 220D. As shown in the figure, each X electrode 210D is a strip-like electrode extending in the Y-axis direction. Each Y electrode 220D extends in the X-axis direction and includes a plurality of electrode groups 22Dw. Similarly to the first embodiment, the detection unit 20Ds is formed in an intersection region between each X electrode 210D and each Y electrode, and is formed to face each of the first structures 210.

  As shown in FIG. 42, the X electrode 210D is connected to a drive side (pulse input side) terminal of the controller 710, for example, and can be switched to a drive pulse potential during detection and to a ground potential during standby, for example. Thereby, the shielding effect with respect to external noise (external electric field) can be exhibited. Thereby, even if the input device 100D has a configuration in which the operation member 10D does not have a metal film, it is possible to maintain a shielding effect against external noise from the operation member 10D side and to omit the metal film. Therefore, the configuration can be simplified and the productivity can be improved. The X electrode 210E may be connected to the ground potential regardless of whether it is detected or in standby.

  Further, by providing the operation member 10 with the metal film 12 and connecting the metal film 12 to the ground potential as in the first embodiment, it is possible to exert a stronger shielding effect. Thereby, it can be set as the detection part 20Ds stable with respect to external noise, and a detection sensitivity can be maintained stably.

[Second structural example]
FIG. 44 is a schematic cross-sectional view of the input device 100E according to the present embodiment. As shown in the figure, the input device 100E includes an operation member 10, a back plate 50E, an electrode substrate 20E, a first support body 30, and a second support body 40. The operation member 10, the first support body 30, and the second support body 40 have substantially the same configuration as that of the first embodiment, but have a back plate 50E instead of the conductor layer, and the electrode substrate 20E. The configuration is different from that of the first embodiment.

  Similar to the conductor layer according to the first embodiment, the back plate 50E constitutes the lowermost part of the input device 100E and faces the metal film (conductor layer) 12 (second surface 120) in the Z-axis direction. Be placed. The back plate 50E functions as a support plate for the input device 100E, and is configured to have higher bending rigidity than, for example, the operation member 10 and the electrode substrate 20E. The material of the back plate 50E is not particularly limited as long as a desired strength is obtained. For example, a resin plate such as reinforced plastic, a metal plate, or the like may be used. Furthermore, as described for the conductor layer in the first embodiment, a step portion may be provided from the viewpoint of increasing rigidity, or it may be configured in a mesh shape or the like from the viewpoint of heat dissipation.

  Similarly to the first embodiment, the electrode substrate 20E includes a plurality of X electrodes (first electrode lines) 210E and a plurality of Y electrodes (second electrode lines) 220E. Each of the Y electrodes 220E is a plate-like electrode disposed on the back plate 50E side with respect to the plurality of X electrodes 210E, and each of the plurality of X electrodes 210E includes a plurality of electrode groups 21Ew. The electrode substrate 20E is configured to be capable of electrostatically detecting a change in the distance from the metal film 12.

  FIG. 45 is a schematic plan view illustrating an arrangement example of the first and second structures 310 and 410, the X electrode 210E, and the Y electrode 220E. As shown in the figure, each X electrode 210E extends in the Y-axis direction and includes a plurality of electrode groups 21Ew. Each Y electrode 220E is a strip-like electrode having a wide configuration extending in the X-axis direction. Similarly to the first embodiment, the detection unit 20Es is formed in an intersection region between each X electrode 210E and each Y electrode, and is formed to face each of the first structures 210.

  As shown in FIG. 44, the Y electrode 220E is connected to a drive side (pulse input side) terminal of the controller 710, for example, and can be switched to a drive pulse potential during detection and to a ground potential during standby, for example. Thereby, the shielding effect with respect to external noise (external electric field) can be exhibited. Thereby, the input device 100E maintains the shielding effect against the external noise from the back plate 50E side even when the back plate 50E is an insulator or is not connected to the ground potential, and the conductor plate 50E. Can be omitted. Therefore, the material selectivity of the back plate 50E can be improved and a cost-effective configuration can be obtained. The Y electrode 220E may be connected to the ground potential regardless of detection or standby.

  Further, by configuring the back plate 50E as a conductor plate and connecting both the Y electrode 220E and the back plate 50E to the ground potential, it is possible to exert a stronger shielding effect. Thereby, it can be set as the detection part 20Es stable with respect to external noise, and a detection sensitivity can be maintained stably.

  In the case of the second structure example, the Y electrode 220E has a flat plate shape, and is configured to be able to detect a change in the distance between the detection unit 20Es and the metal film 12. Thereby, as shown in FIG. 25, the distance between the detection unit 20Es and the metal film 12 can be changed more greatly, and the second structure 410 is arranged to face the detection unit 20Es. preferable. With such a configuration, greater detection sensitivity can be obtained.

[Modification]
(Modification 1)
46 is a schematic plan view showing an electrode configuration according to a modification of the input device 100D (first configuration example), FIG. 46A is a configuration example of the X electrode 210D, and FIG. 46B is a configuration example of the Y electrode 220D. Indicates. As shown in FIGS. 46A and 46B, the X electrode 210D and the Y electrode 220D may include a unit electrode body 210Dm and a unit electrode body 220Dm, respectively. As shown in FIG. 46A, the unit electrode body 210Dm of the X electrode 210D is a flat electrode, and as shown in FIG. 46B, the unit electrode body 220Dm of the Y electrode 220D is composed of a plurality of sub-electrodes 220Dw. Yes. In the present modification, the plurality of sub-electrodes 220Dw of each unit electrode body 220D functions as an electrode group.

(Modification 2)
47 is a schematic plan view showing an electrode configuration according to a modification of the input device 100E (second configuration example), FIG. 47A is a configuration example of the X electrode 210E, and FIG. 47B is a configuration example of the Y electrode 220E. Indicates. 47A and 47B, the X electrode 210E and the Y electrode 220E may have a unit electrode body 210Em and a unit electrode body 220Em, respectively, as in the first modification. As shown in FIG. 47A, the unit electrode body 210Em of the X electrode 210E is composed of a plurality of sub-electrodes 210Ew, and as shown in FIG. 47B, the unit electrode body 220Em of the Y electrode 220E is a flat electrode. In this modification, the plurality of sub-electrodes 210Ew of each unit electrode body 210E function as an electrode group.

(Other variations)
In this embodiment, the configuration of the X electrodes 210D and 210E and the Y electrodes 220D and 220E is not limited to the above configuration, and both the X electrodes 210D and 210E and the Y electrodes 220D and 220E are flat electrodes. It may be configured.

<Sixth Embodiment>
FIG. 48A is a perspective view illustrating an example of the appearance of an input device 100F according to the sixth embodiment of the present technology, and FIG. 48B is an enlarged cross-sectional view viewed from the BB direction of FIG. 48A. The input device 100F according to the sixth embodiment has a cylindrical shape as a whole. Therefore, the first surface 110F that is the input operation surface has a cylindrical surface shape. Other configurations of the input device 100F are the same as those of the input device 100 according to the first embodiment.

  The electrode substrate 20F includes a plurality of detection units 20Fs that are two-dimensionally arranged in a cylindrical in-plane direction. FIG. 48A shows an example in which a plurality of detection units 20Fs are two-dimensionally arranged in the circumferential direction and the axial direction (height direction) of a cylindrical electrode substrate 20F. In the example shown in FIG. 48A, the first and second frames 320F and 420F are arranged in the circumferential direction of the upper and lower ends of the cylinder. Thereby, the intensity | strength of the input device 100F whole can be raised.

  As shown in FIG. 48B, the input device 100F according to the present embodiment has a shape in which the input device 100 according to FIG. 1 is curved with the first surface 110 (110F) facing outward. That is, the input device 100F includes an operation member 10F, a conductor plate 50F, an electrode substrate 20F, a first support 30F, and a second support 40F, and each of these components is cylindrical. It is configured to be curved.

  Even with such an input device 100F, the detection sensitivity at the time of an input operation on the first surface 110F can be increased, and can be used as a touch sensor or a keyboard device. The overall shape of the input device 100F is not limited to a cylindrical shape, and may be, for example, a flat cylindrical shape or a cylindrical shape having a rectangular cross section. 48A shows an example in which the first and second frame bodies 320F and 420F are arranged only in the circumferential direction of the upper and lower ends of the cylinder, but the present invention is not limited to this, and the first and second frames are not limited thereto. The bodies 320F and 420F may be arranged along the vertical direction (the height direction of the cylinder). Thereby, stronger support is possible.

(Modification 1)
FIG. 49A is a perspective view illustrating an example of a configuration of an input device 100F according to a modification of the sixth embodiment of the present technology. The input device 100F according to this modification has a curved surface as a whole. That is, the input device 100F has a configuration in which a rectangular input device is curved. Therefore, the first surface 110F, which is the input operation surface, has a curved surface shape. The electrode substrate (not shown) includes a plurality of detection units 20Fs that are two-dimensionally arranged in a cylindrical in-plane direction. Note that the overall shape of the input device 100F is not limited to the example illustrated in FIG. 49A, and may be a desired curved surface.

(Modification 2)
FIG. 49B is a perspective view illustrating an example of a configuration of an input device 100F according to a modification of the sixth embodiment of the present technology. In the input device 100F according to this modification, two sensor devices formed in a semicircular shape are combined to constitute one input device 100F. That is, the input device 100F has two detection regions 200 corresponding to the sensor devices, and is configured in a cylindrical shape as a whole. Note that the number of detection areas 200 is not limited, and three or more detection areas 200 may be provided. Further, the overall shape of the input device 100F is not limited to a cylindrical shape. For example, the input device 100F may have four detection regions 200, and each of the four detection regions 200 may have a rectangular cross section.

  As mentioned above, although embodiment of this technique was described, this technique is not limited only to the above-mentioned embodiment, Of course, in the range which does not deviate from the summary of this technique, various changes can be added.

  For example, the input device may not have a metal film, and may detect a change in capacitance of the detection unit due to capacitive coupling between the operation element, each of the conductor layers, and the X and Y electrodes. In this case, a flexible sheet made of an insulating material (see the second embodiment) can be used as the operation member. Also with such a configuration, the first and second supports can change the distances between the operation element, the conductor layer, and the detection unit, and an input device with high detection accuracy of the operation position and the pressing force can be obtained.

  Moreover, although the above embodiment demonstrated as a structure by which a detection part is arrange | positioned directly under the 1st structure, it is not limited to this. For example, the detection unit may be formed to face each of the second structures, or may be arranged at a position that does not face both the first and second structures. Even with such a configuration, it is possible to detect the operation position and the pressing force with high accuracy as in the above-described embodiment.

  In the above embodiment, it has been described that the detection unit constitutes a mutual capacitance type capacitive element, but a self capacitance type capacitive element may be constructed. In this case, the input operation can be detected based on the amount of change in capacitance between the metal film and the conductor layer and the electrode layer included in the detection unit.

  In the above embodiment, it has been described that the first space portion is disposed between the plurality of first structures, and the second space portion is disposed between the plurality of second structures. The configuration is not limited to this. For example, an elastic material or the like may be filled in a region corresponding to all or part of the plurality of first and second space portions. The elastic material to be filled is not particularly limited as long as it does not hinder the deformation of the electrode substrate and the operation member.

  Further, the first and second support bodies 30 and 40 may be configured not to have the first and second frame bodies 320 and 330, respectively.

  Further, the input device is not limited to the flat plate-like configuration or the configuration described in the sixth embodiment, and may be configured, for example, as a plate having an irregular first surface. That is, since the sensor device of the present technology has a flexible configuration as a whole, a mounting method with a high degree of freedom is possible.

In addition, this technique can also take the following structures.
(1) a deformable sheet-like first conductor layer;
A second conductor layer disposed opposite the first conductor layer;
A plurality of first electrode lines, and a plurality of second electrode lines arranged opposite to the plurality of first electrode lines and intersecting the plurality of first electrode lines, An electrode substrate that is deformably disposed between the second conductor layers;
A first support having a plurality of first structures connecting between the first conductor layer and the electrode substrate;
A sensor device comprising: a second support body having a plurality of second structures connecting between the second conductor layer and the electrode substrate.
(2) a deformable sheet-like first conductor layer;
A second conductor layer disposed opposite the first conductor layer;
A plurality of first electrode lines, and a plurality of second electrode lines arranged opposite to the plurality of first electrode lines and intersecting the plurality of first electrode lines, An electrode substrate that is deformably disposed between the second conductor layers and capable of electrostatically detecting a change in distance from each of the first and second conductor layers;
A plurality of first structures that connect between the first conductor layer and the electrode substrate; and a first space formed between the plurality of first structures. A support;
Between the plurality of second structures disposed between the plurality of adjacent first structures and connecting between the second conductor layer and the electrode substrate, and the plurality of second structures. A second support body having a second space formed in the sensor device.
(3) The sensor device according to (1) or (2) above,
The electrode substrate is formed in an intersection region between the plurality of first electrode lines and the plurality of second electrode lines, and has a capacitance according to a relative distance between each of the first and second conductor layers. A sensor device further comprising a plurality of variable detection units.
(4) The sensor device according to (3) above,
The plurality of detection units are respectively formed to face each of the plurality of first structures.
(5) The sensor device according to (3) above,
The plurality of detection units are respectively formed to face each of the plurality of second structures.
(6) The sensor device according to any one of (1) to (5) above,
The first support body includes a first frame body connected between the first conductor layer and the electrode substrate and disposed along a periphery of the electrode substrate,
The second support body includes a second frame body that is disposed between the second conductor layer and the electrode substrate so as to face the first frame body.
(7) The sensor device according to any one of (1) to (6) above,
The second conductor layer has a step portion.
(8) The sensor device according to (1) above,
The electrode substrate is configured to be capable of electrostatically detecting a change in distance from each of the first and second conductor layers.
(9) The sensor device according to (1) or (8) above,
The first support is
A sensor device further comprising: a first space portion formed between the plurality of first structures.
(10) The sensor device according to any one of (1), (8), and (9) above,
The second support is
The sensor device further comprising a second space portion formed between the plurality of second structures.
(11) The sensor device according to any one of (1), (2), and (8) to (10),
Each of the plurality of first electrode lines has a plurality of first unit electrode bodies each including a plurality of first sub-electrodes,
Each of the plurality of second electrode lines includes a plurality of second unit electrode bodies each including a plurality of second sub-electrodes and facing each of the plurality of first unit electrode bodies,
The electrode substrate is
A base material on which the plurality of first electrode lines and the plurality of second electrode lines are disposed;
A plurality of detections in which the plurality of first sub-electrodes of each first unit electrode body and the plurality of second sub-electrodes of each second unit electrode body face each other in the in-plane direction of the electrode substrate A sensor device.
(12) a deformable sheet-like operation member having a first surface that receives an operation by a user and a second surface opposite to the first surface;
A conductor layer disposed to face the second surface;
A plurality of first electrode lines; and a plurality of second electrode lines arranged opposite to the plurality of first electrode lines and intersecting the first electrode, the operation member and the conductor layer An electrode substrate disposed so as to be deformable between,
A first support having a plurality of first structures connecting between the operation member and the electrode substrate;
An input device comprising: a second support body having a plurality of second structures that connect between the conductor layer and the electrode substrate.
(13) A deformable sheet-like operation member having a first surface that accepts an operation by a user and a second surface opposite to the first surface;
A first conductor layer disposed opposite to the second surface;
A plurality of first electrode lines; and a plurality of second electrode lines arranged opposite to the plurality of first electrode lines and intersecting the first electrode lines; An electrode substrate that is deformably disposed between one conductor layer and capable of electrostatically detecting a change in distance from the first conductor layer;
A first support body having a plurality of first structures connecting between the operation member and the electrode substrate, and a first space formed between the plurality of first structures; ,
Between the plurality of second structures and the plurality of second structures that are respectively disposed between the plurality of adjacent first structures and that connect the first conductor layer and the electrode substrate. An input device comprising: a second support body having a second space portion formed in
(14) The input device according to (12) above,
The operation member further includes a second conductor layer formed on the second surface,
The input device is capable of electrostatically detecting a change in the distance between the first conductor layer and the second conductor layer.
(15) The input device according to (12) or (13) above,
The operation member is an input device including a display unit.
(16) The input device according to (12) or (13) above,
The operation member includes an input device including a plurality of key areas.
(17) The input device according to (16) above,
The electrode substrate is formed in an intersection region between the plurality of first electrode lines and the plurality of second electrode lines, and has a plurality of capacitances that are variable according to a relative distance from the first conductor layer. An input device further comprising a detection unit.
(18) The input device according to (17) above,
An input device further comprising a control unit electrically connected to the electrode substrate and capable of generating information related to an input operation for each of the plurality of key regions based on outputs of the plurality of detection units.
(19) The input device according to any one of (16) to (18),
Each of the plurality of first structures is arranged along a boundary between the plurality of key regions.
(20) The input device according to any one of (12) to (19),
Each of the plurality of first electrode lines is a flat electrode disposed on the operation member side with respect to the plurality of second electrode lines,
Each of the plurality of second electrode lines includes a plurality of electrode groups.
(21) A deformable sheet-like operation having a first surface that accepts an operation by a user, a second surface opposite to the first surface, and a metal film formed on the second surface. Members,
A back plate disposed to face the second surface;
A plurality of first electrode lines; and a plurality of second electrode lines arranged opposite to the plurality of first electrode lines and intersecting the first electrode lines, the operating member and the back surface An electrode substrate that is arranged between the plates so as to be deformable and can electrostatically detect a change in distance from the metal film;
A first support body having a plurality of first structures connecting between the operation member and the electrode substrate, and a first space formed between the plurality of first structures; ,
Formed between the plurality of second structures and the plurality of second structures arranged between the plurality of adjacent first structures and connecting the back plate and the electrode substrate. An input device comprising: a second support body having a second space portion.
(22) The input device according to (21) above,
Each of the plurality of second electrode lines is a flat electrode disposed on the back plate side with respect to the plurality of first electrode lines,
Each of the plurality of first electrode lines includes a plurality of electrode groups.
(23) a deformable sheet-like operation member having a first surface that accepts an operation by a user and a second surface opposite to the first surface;
A conductor layer disposed to face the second surface;
A plurality of first electrode lines; and a plurality of second electrode lines arranged opposite to the plurality of first electrode lines and intersecting the plurality of first electrode lines; An electrode substrate that is deformably disposed between the conductor layers and capable of electrostatically detecting a change in distance from the conductor layers;
A first support body having a plurality of first structures connecting between the first operation member and the electrode substrate, and a first space formed between the plurality of first structures. When,
Formed between the plurality of second structures and the plurality of second structures arranged between the plurality of adjacent first structures and connecting between the conductor layer and the electrode substrate. A second support having a second space portion;
An electronic device comprising: a controller having a control unit that is electrically connected to the electrode substrate and capable of generating information related to an input operation on each of the plurality of operation members based on an output of the electrode substrate.

DESCRIPTION OF SYMBOLS 1 ... Sensor apparatus 100, 100A, 100B, 100C, 100D, 100E, 100F ... Input device 10, 10A, 10B, 10D, 10F ... Operation member 11 ... Flexible display (display part)
12 ... Metal film (first conductor layer)
20, 20A, 20D, 20E, 20F ... electrode substrate 20s, 20Cs, 20Ds ... detection unit 210 ... first electrode wire 220 ... second electrode wire 30, 30F ... first support 310 ... first structure 320 ... 1st frame 330 ... 1st space part 40, 40F ... 2nd support body 410 ... 2nd structure 420 ... 2nd frame body 430 ... 2nd space part 50, 50B, 50C ... Conductor layer (second conductor layer)
50E, 50F ... Back plate 51, 51B, 51C ... Step part 60 ... Control part 70, 70B ... Electronic device 710 ... Controller

Claims (23)

A deformable sheet-like first conductor layer;
A second conductor layer disposed opposite to the first conductor layer;
A plurality of first electrode lines; and a plurality of second electrode lines arranged opposite to the plurality of first electrode lines and intersecting the plurality of first electrode lines, An electrode substrate that is deformably disposed between the second conductor layers;
A first support having a plurality of first structures connecting between the first conductor layer and the electrode substrate;
A sensor device comprising: a second support body having a plurality of second structures connecting between the second conductor layer and the electrode substrate. A deformable sheet-like first conductor layer;
A second conductor layer disposed opposite to the first conductor layer;
A plurality of first electrode lines; and a plurality of second electrode lines arranged opposite to the plurality of first electrode lines and intersecting the plurality of first electrode lines, An electrode substrate that is deformably disposed between the second conductor layers and capable of electrostatically detecting a change in distance from each of the first and second conductor layers;
A plurality of first structures that connect between the first conductor layer and the electrode substrate; and a first space formed between the plurality of first structures. A support;
Between the plurality of second structures and the plurality of second structures that are respectively disposed between the plurality of adjacent first structures and that connect the second conductor layer and the electrode substrate. A second support body having a second space formed in the sensor device. The sensor device according to claim 1 or 2,
The electrode substrate is formed in an intersection region of the plurality of first electrode lines and the plurality of second electrode lines, respectively, and has a capacitance according to a relative distance between each of the first and second conductor layers. A sensor device further comprising a plurality of variable detection units. The sensor device according to claim 3,
The plurality of detection units are formed to face each of the plurality of first structures, respectively. The sensor device according to claim 3,
The plurality of detection units are formed to face the plurality of second structures, respectively. The sensor device according to any one of claims 1 to 5,
The first support body includes a first frame body that connects between the first conductor layer and the electrode substrate and is disposed along a periphery of the electrode substrate;
The second support body includes a second frame body that is disposed between the second conductor layer and the electrode substrate so as to face the first frame body. The sensor device according to any one of claims 1 to 6,
The second conductor layer has a step portion. The sensor device according to claim 1,
The electrode substrate is configured to be capable of electrostatically detecting a change in distance from each of the first and second conductor layers. The sensor device according to claim 1 or 8,
The first support is
A sensor device further comprising a first space portion formed between the plurality of first structures. The sensor device according to claim 1, 8 or 9,
The second support is
A sensor device further comprising a second space portion formed between the plurality of second structures. A sensor device according to any one of claims 1, 2, 8-10,
Each of the plurality of first electrode lines includes a plurality of first unit electrode bodies each including a plurality of first sub-electrodes,
Each of the plurality of second electrode lines includes a plurality of second unit electrode bodies each including a plurality of second sub-electrodes and facing each of the plurality of first unit electrode bodies,
The electrode substrate is
A base material on which the plurality of first electrode lines and the plurality of second electrode lines are disposed;
A plurality of detections in which the plurality of first sub-electrodes of each first unit electrode body and the plurality of second sub-electrodes of each second unit electrode body face each other in the in-plane direction of the electrode substrate A sensor device. A deformable sheet-like operation member having a first surface for accepting an operation by a user and a second surface opposite to the first surface;
A first conductor layer disposed opposite to the second surface;
A plurality of first electrode lines; and a plurality of second electrode lines arranged opposite to the plurality of first electrode lines and intersecting the first electrode; and the operating member and the conductor layer An electrode substrate disposed so as to be deformable between,
A first support body having a plurality of first structures connecting between the operation member and the electrode substrate;
An input device comprising: a second support having a plurality of second structures that connect between the conductor layer and the electrode substrate. A deformable sheet-like operation member having a first surface for accepting an operation by a user and a second surface opposite to the first surface;
A conductor layer disposed to face the second surface;
A plurality of first electrode lines; and a plurality of second electrode lines arranged opposite to the plurality of first electrode lines and intersecting the first electrode lines, the operation member and the conductor An electrode substrate that is deformably disposed between the layers and capable of electrostatically detecting a change in distance to the conductor layer;
A first support body having a plurality of first structures connecting between the operation member and the electrode substrate, and a first space formed between the plurality of first structures; ,
Formed between the plurality of second structures and the plurality of second structures respectively disposed between the plurality of adjacent first structures and connecting between the conductor layer and the electrode substrate. An input device comprising: a second support body having a second space portion. An input device according to claim 12,
The operation member further includes a second conductor layer formed on the second surface,
The electrode substrate is capable of electrostatically detecting a change in distance between the first conductor layer and the second conductor layer. The input device according to claim 12 or 14,
The operation member includes an input device including a display unit. The input device according to claim 12 or 13,
The input member includes a plurality of key areas. The input device according to claim 16, wherein
The electrode substrate is formed in an intersecting region of the plurality of first electrode lines and the plurality of second electrode lines, and a plurality of capacitors whose capacitance is variable according to a relative distance from the first conductor layer. An input device further comprising a detection unit. An input device according to claim 17,
An input device further comprising a control unit electrically connected to the electrode substrate and capable of generating information related to an input operation for each of the plurality of key regions based on outputs of the plurality of detection units. The input device according to any one of claims 16 to 18, comprising:
Each of the plurality of first structures is arranged along a boundary between the plurality of key regions. The input device according to any one of claims 12 to 19,
Each of the plurality of first electrode lines is a flat electrode disposed on the operation member side with respect to the plurality of second electrode lines,
Each of the plurality of second electrode lines includes a plurality of electrode groups. A deformable sheet-like operation member having a first surface for receiving an operation by a user, a second surface opposite to the first surface, and a conductor layer formed on the second surface;
A back plate disposed to face the second surface;
A plurality of first electrode lines; and a plurality of second electrode lines arranged to face the plurality of first electrode lines and intersecting the first electrode lines, the operating member and the back surface An electrode substrate disposed in a deformable manner between the plates;
A first support body having a plurality of first structures connecting between the operation member and the electrode substrate;
An input device comprising: a second support having a plurality of second structures connecting between the back plate and the electrode substrate. The input device according to claim 21, wherein
Each of the plurality of second electrode lines is a flat electrode disposed on the back plate side with respect to the plurality of first electrode lines,
Each of the plurality of first electrode lines includes a plurality of electrode groups. A deformable sheet-like operation member having a first surface for accepting an operation by a user and a second surface opposite to the first surface;
A conductor layer disposed to face the second surface;
A plurality of first electrode lines; and a plurality of second electrode lines arranged opposite to the plurality of first electrode lines and intersecting the plurality of first electrode lines; An electrode substrate that is deformably disposed between the conductor layers and capable of electrostatically detecting a change in distance to the conductor layers;
A first support body having a plurality of first structures connecting between the first operation member and the electrode substrate, and a first space formed between the plurality of first structures. When,
Formed between the plurality of second structures and the plurality of second structures respectively disposed between the plurality of adjacent first structures and connecting between the conductor layer and the electrode substrate. A second support having a second space portion;
An electronic apparatus comprising: a controller having a control unit that is electrically connected to the electrode substrate and capable of generating information related to an input operation on each of the plurality of operation members based on an output of the electrode substrate.

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