JP2017040484A - Electromagnetic device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an electromagnetic device capable of preventing generation of diffraction of electromagnetic wave even when the beam diameter of electromagnetic wave of 0.01-10 mm in wavelength is narrowed.SOLUTION: An electromagnetic wave measurement device (10) has a detect electromagnetic wave passage part (3) in which a specific line in an entrance outer edge shape has a length of 10 times of wavelength of electromagnetic wave; the specific line at exit opening is longer than the specific line at entrance.SELECTED DRAWING: Figure 1

Description

  The present invention relates to an electromagnetic wave handling apparatus that handles electromagnetic waves having a wavelength of 0.01 mm or more and 10 mm or less.

  As an electromagnetic wave measuring apparatus known as a prior art, there is a measuring apparatus that detects an electromagnetic wave having a wavelength of 0.01 mm or more and 10 mm or less. For example, Patent Literature 1 discloses a radiation thermometer that detects infrared rays emitted from a human body and measures body temperature. Patent Document 2 discloses a semiconductor growth apparatus that detects an electromagnetic wave in a microwave band for detecting an average temperature of a substrate. Further, Patent Document 3 discloses a terahertz wave spectrometer that irradiates a target object with terahertz waves emitted from a light source, detects a terahertz wave emitted from the target object, and measures an optical constant of the target object. It is disclosed.

JP 2002-340680 A (released November 27, 2002) JP 2011-048771 A (published March 17, 2011) JP 2012-207975 A (released on October 25, 2012)

  Here, when the measuring device is to be downsized to several mm to several centimeters, the diameter of the electromagnetic wave beam detected by the measuring device (hereinafter referred to as the beam diameter, that is, to face the detection unit detecting the electromagnetic wave). The width of the arranged opening from which the electromagnetic wave is emitted is reduced to about several mm. At this time, when the wavelength of the electromagnetic wave to be measured is 0.01 mm or more and 10 mm or less, the electromagnetic wave emitted from the opening is diffracted, and the traveling direction of a part of the electromagnetic wave is different from a desired direction. As a result, a detection error occurs, and there is a problem that the measurement accuracy of the measuring device is lowered.

  The present invention has been made in view of the above problems, and an object thereof is an electromagnetic wave response device that suppresses the generation of electromagnetic wave diffraction even when the beam diameter of the electromagnetic wave having a wavelength of 0.01 mm to 10 mm is narrowed. Is to provide.

  In order to solve the above problems, a measuring device according to one embodiment of the present invention penetrates through a first light-shielding portion that does not transmit electromagnetic waves having a wavelength of 0.01 mm or more and 10 mm or less, and the first light-shielding portion. A first electromagnetic wave transmitting part that transmits the electromagnetic wave, and among the openings of the first electromagnetic wave transmitting part, a proximal opening that is close to the object of the device and a distal opening that is far from the object Each of the outer edge shapes is a circle or a convex polygon, and the proximal opening is an arbitrary diameter in the diameter of the circle, the shortest side of the triangle that is the convex polygon, or the convex polygon excluding the triangle The length of the specific line that is one of the shortest straight lines connecting one side to the other side that is not in contact with the one side is not more than 10 times the wavelength of the electromagnetic wave, and the specific line in the proximal opening More than The line is long.

  According to one embodiment of the present invention, even when the beam diameter of an electromagnetic wave having a wavelength of 0.01 mm or more and 10 mm or less is narrowed, an electromagnetic wave corresponding device that suppresses generation of electromagnetic wave diffraction can be provided.

It is a perspective view of the electromagnetic wave measuring device concerning Embodiment 1 of the present invention. It is a graph and a table for explaining diffraction when an electromagnetic wave having a wavelength of about sub-mm passes through an opening having a circular outer shape with a radius of several millimeters. (A) is a top view of the electromagnetic wave measuring apparatus shown in FIG. 1, (b) is an AA sectional view of (a), and (c) is a side view of the electromagnetic wave measuring apparatus shown in FIG. (D) is BB sectional drawing of (c). (A) is a top view of the electromagnetic wave measuring device which concerns on Embodiment 2 of this invention, (b) is AA sectional drawing of (a), (c) is sectional drawing of (a). It is a figure which shows another example from (b). (A) is a top view of the electromagnetic wave measuring device which concerns on Embodiment 3 of this invention, (b) is AA sectional drawing of (a). It is a perspective view of the electromagnetic wave measuring device which concerns on Embodiment 4 of this invention. (A) is a side view of the electromagnetic wave measuring apparatus shown in FIG. 6, (b) is BB sectional drawing of (a). It is a perspective view of the electromagnetic wave measuring device which concerns on the modification of this invention. It is a perspective view of the electromagnetic wave irradiation apparatus which concerns on Embodiment 5 of this invention. (A) is a top view of the electromagnetic wave irradiation apparatus shown in FIG. 9, (b) is AA sectional drawing of (a).

Embodiment 1
An embodiment of the present invention will be described below with reference to FIGS.

(Electromagnetic wave measuring apparatus 10)
First, a configuration of a main part of an electromagnetic wave measuring apparatus 10 (electromagnetic wave corresponding apparatus) according to the present embodiment will be described with reference to FIG. FIG. 1 is a perspective view of the electromagnetic wave measuring apparatus 10.

  The electromagnetic wave measuring apparatus 10 is an apparatus that detects an electromagnetic wave emitted from a sample by irradiating the object to be measured (object, hereinafter, sample) with the electromagnetic wave. Hereinafter, the electromagnetic wave applied to the sample is referred to as an irradiation electromagnetic wave, and the electromagnetic wave emitted from the sample is referred to as a detection electromagnetic wave (measurement electromagnetic wave), and these two are distinguished. The electromagnetic wave measuring device 10 is a device that can perform measurement while changing the temperature of the sample. As shown in FIG. 1, the electromagnetic wave measuring apparatus 10 includes an electromagnetic wave source 1, an electromagnetic wave detection unit 2 (detection unit), a detection electromagnetic wave passage unit 3 (first electromagnetic wave transmission unit), a heat transfer unit 4 (wall surface unit), a sample A holding unit 5 (holding unit), a temperature adjusting unit 6, and an irradiation electromagnetic wave passing unit 7 (second electromagnetic wave transmitting unit, see FIG. 3) are provided. In addition, the electromagnetic wave measuring apparatus 10 has a part (hereinafter referred to as a main body part) composed of a detection electromagnetic wave passage part 3, a heat transfer part 4, a sample holding part 5, a temperature adjustment part 6, and an irradiation electromagnetic wave passage part 7 in the order of several mm to several millimeters. The size is cm.

(Electromagnetic wave source 1)
The electromagnetic wave source 1 emits an irradiation electromagnetic wave having a wavelength of about sub-mm (specifically, 0.01 mm or more and 10 mm or less). For example, the electromagnetic wave source 1 is a laser or an LED (light emitting diode), but is not limited to this example as long as it can emit an irradiation electromagnetic wave having a wavelength of about sub-mm.

(Electromagnetic wave detector 2)
The electromagnetic wave detection unit 2 detects a detection electromagnetic wave having a wavelength of about sub-mm. For example, the electromagnetic wave detection unit 2 includes an element for detecting a detected electromagnetic wave, such as a bolometer, a photodetector, and a Schottky diode. However, the configuration is not particularly limited as long as the detected electromagnetic wave of about sub-mm can be detected. The electromagnetic wave detection unit 2 may include an information processing device such as a personal computer that processes the detection result, and a display device such as a display that displays the result processed by the information processing device. Specific examples of electromagnetic waves having a wavelength of about sub-mm include far infrared rays, terahertz waves, and microwaves.

(Heat transfer part 4)
The heat transfer unit 4 is provided so as to surround the sample holding unit 5 that holds the sample, and transmits a temperature change by the temperature adjusting unit 6 to the sample held in the sample holding unit 5. The heat transfer section 4 is preferably a low-cost material having high thermal conductivity and not transmitting electromagnetic waves of about sub-mm, and a metal material such as copper is used, but is not limited to this example. . Moreover, in order to make it easy to change the temperature of the sample uniformly and quickly, it is preferable that the heat transfer section 4 is in contact with the sample in as wide an area as possible.

  In addition, as shown in FIG. 1, in the heat transfer part 4, the part provided between the sample holding part 5 and the electromagnetic wave detection part 2 is expressed as a first light shielding part 4a that does not transmit the detected electromagnetic wave. You can also. Similarly, the portion provided between the electromagnetic wave source 1 and the sample holding unit 5 can also be expressed as a second light shielding unit 4b that does not transmit the irradiated electromagnetic wave.

(Sample holder 5)
The sample holding part 5 is for holding a sample, and is specifically a cavity provided in the heat transfer part 4. Note that the sample may be introduced directly into the cavity, or may be introduced into the cell after inserting a cell or the like into the cavity (see FIG. 3B). Moreover, the sample does not ask | require the form. In other words, any form such as gas, liquid, gel or solid may be used.

(Temperature adjuster 6)
The temperature adjustment unit 6 changes (lifts) the temperature of the sample by heat generation or heat absorption on the surface of the temperature adjustment unit 6 that is in contact with the heat transfer unit 4. The temperature adjusting unit 6 may use a Peltier element, or may be an integrated Peltier element and a material having high thermal conductivity such as copper.

  The surface in contact with the heat transfer unit 4 of the temperature adjustment unit 6 becomes the bottom surface of the sample holding unit 5 (see FIG. 3). That is, the space surrounded by the temperature adjustment unit 6 and the heat transfer unit 4 becomes the sample holding unit 5. In other words, the temperature adjustment unit and the heat transfer unit 4 are provided so as to surround the sample.

(Detected electromagnetic wave passage 3)
The detected electromagnetic wave passage 3 guides the detected electromagnetic wave to the electromagnetic wave detector 2. The detection electromagnetic wave passage part 3 according to the present embodiment is a hole that penetrates the heat transfer part 4, and the detection electromagnetic wave emitted from the sample enters the electromagnetic wave detection part 2 through the detection electromagnetic wave passage part 3. In addition, the detection electromagnetic wave passage 3 may be one in which a hole is filled with a material having a high detection electromagnetic wave transmittance.

  The detection electromagnetic wave passage part 3 according to the present embodiment includes an emission port (distal opening), that is, an end shape on the electromagnetic wave detection unit 2 side, and an incident port (proximal opening), that is, an end part on the sample holding unit 5 side. Are both circular. However, the shape of the entrance and the exit is not limited to this configuration, and may be a convex quadrangle such as a square or a rectangle, or may be another convex polygon.

  The entrance of the detection electromagnetic wave passage 3 has a diameter of the circle when the outer edge shape (opening shape) is circular, the shortest side of the triangle when the outer edge shape is a triangle, and the outer edge shape excludes a triangle. In the case of a convex polygon, the shortest straight line (specific line) connecting any one side of the convex polygon and the other side that is not in contact with the one side is expressed as being 10 times or less the wavelength of the detected electromagnetic wave. You can also

  In addition, as described above, the detection electromagnetic wave passage 3 needs to make the diameter of the outer edge shape of the entrance (hereinafter referred to as the width of the entrance) as small as possible in order to bring the heat transfer section 4 into contact with the sample in as wide an area as possible. There is. For this reason, in the detection electromagnetic wave passage part 3 according to the present embodiment, the width of the entrance is not more than 10 times the wavelength of the detection electromagnetic wave. Here, if the width of the entrance and exit of the detection electromagnetic wave passage 3 is substantially the same, that is, if the width of the exit is also 10 times or less the wavelength of the detection electromagnetic wave, diffraction of the detection electromagnetic wave occurs. This will be described with reference to FIG.

(About electromagnetic wave diffraction)
FIG. 2 is a graph and table for explaining diffraction when an electromagnetic wave having a wavelength of about sub-mm passes through an opening having a circular outer shape with a radius of several millimeters.

FIG. 2A shows a beam when an electromagnetic wave having a frequency of 500 GHz (that is, a wavelength of 0.6 mm) travels 100 mm after passing through openings having a radius of 1.0 mm, 2.5 mm, and 4.0 mm, respectively. It is the graph which plotted what calculated the beam cross-sectional intensity | strength in the position of radial direction by Fraunhofer approximation. According to the Fraunhofer approximation, when the outer edge shape of the opening is circular as described above, the light intensity at the center of the diffraction pattern is I ₀ , the first type Bessel function is J ₁ , the wave number of electromagnetic waves is k, and the radius is A, and the angle between the optical axis of the aperture and the diffracted electromagnetic wave is θ,

It is represented by Further, when the outer edge shape of the opening is a rectangle, the length of the side of the rectangle is a ₁ and a ₂ , and the coordinates in the diffraction image plane are (p, q).

It is represented by The electromagnetic waves are parallel light and have a uniform intensity distribution. Further, the thickness of the opening is not taken into consideration. That is, the member provided with the opening is very thin.

  FIG. 2 (b) shows the beam radius after the electromagnetic wave has advanced 100 mm when the radius of the opening is 1.0 mm, 2.5 mm, and 4.0 mm (the normalized intensity is 1/0 from the center of the beam). This is a table showing the length to the position e, e being the number of Napiers) and the beam divergence angle after the electromagnetic wave has advanced 100 mm (how much the beam diameter has expanded before and after 100 mm).

  According to FIGS. 2A and 2B, the beam radius after traveling 100 mm increases as the radius of the opening decreases. That is, the electromagnetic wave is greatly diffracted as the radius of the opening is reduced. For example, in the case of an opening having a radius of 1.0 mm, the beam radius after traveling 100 mm is 20 mm and the beam divergence angle is 10.8 °. In the case of an opening having a radius of 2.5 mm, The beam radius is 8 mm and the beam divergence angle is 3.1 °. Thus, the electromagnetic wave is diffracted when the width of the opening (in other words, the width of the entrance and exit of the detection electromagnetic wave passage 3) is 10 times or less the wavelength of the electromagnetic wave. In FIG. 2, the thickness of the opening is not taken into account, but diffraction is further increased when the thickness of the opening is taken into consideration.

  From the above, in order to perform the temperature change of the sample uniformly and quickly, it is preferable to reduce the width of the entrance of the detection electromagnetic wave passage 3, which is 10 times the wavelength of the detection electromagnetic wave in view of the apparatus size. The following length is preferable, but if the exit of the detection electromagnetic wave passage portion 3 has substantially the same width as the entrance, the electromagnetic wave is diffracted, resulting in a decrease in measurement accuracy.

  On the other hand, when the width of the opening is longer than 10 times the wavelength of the electromagnetic wave, diffraction of the electromagnetic wave is suppressed. As shown in FIGS. 2 (a) and 2 (b), in the case of an opening having a radius of 4.0 mm, the beam radius after advancing 100 mm is 5 mm and the beam divergence angle is 0.6 °. It can be seen that it is not diffracted.

(About the structure of the detection electromagnetic wave passage part 3 which suppresses diffraction)
Therefore, in the present invention, the diffraction of the electromagnetic wave is suppressed by making the circular diameter, which is the outer edge shape of the exit opening of the detection electromagnetic wave passage part 3, longer than the circular diameter, which is the outer edge shape of the incident opening. This will be described with reference to FIG. 3A is a top view of the electromagnetic wave measuring apparatus 10, FIG. 3B is a cross-sectional view taken along the line AA in FIG. 3, and FIG. 3C is an electromagnetic wave measuring apparatus. FIG. 3D is a cross-sectional view taken along the line BB in FIG. In FIG. 3, the electromagnetic wave source 1 and the electromagnetic wave detector 2 are omitted. In this embodiment, since the outer edge shape of the entrance and the exit of the detection electromagnetic wave passage 3 is circular, the diameter of the outer edge of the exit is longer than the diameter of the outer edge of the entrance. When the outer edge shape of the entrance and exit of the electromagnetic wave passage part 3 is a triangle, the shortest side in the outer edge shape of the exit hole is longer than the shortest side in the outer edge shape of the entrance hole. When the outer edge shape of the entrance and exit is a convex polygon excluding a triangle, the shortest straight line connecting any one side and the other side that is not in contact with the outside edge of the exit edge is the outer edge of the entrance The configuration is longer than the straight line in the shape.

  The detection electromagnetic wave passage part 3 is formed so that the circular diameter which is the outer edge shape thereof becomes longer as it proceeds from the entrance to the exit. As a result, as shown in FIG. 3B, the detected electromagnetic wave passage portion 3 also has a larger circular area (hereinafter referred to as an opening size) as it goes from the entrance to the exit. That is, in the case of this embodiment, the shape of the detection electromagnetic wave passage part 3 is a truncated cone. Note that the shape of the detection electromagnetic wave passage portion 3 is not limited to the truncated cone shape as long as the opening size is increased from the entrance to the exit. In the case of the present embodiment, the detected electromagnetic wave passage 3 has an opening size that changes linearly as shown in FIG. 3B, but the opening size may change in a curved line or a staircase. The shape may change. In other words, in this embodiment, the two lines connecting the entrance and the exit shown in FIG. 3B are straight lines, but this may be a curve or a stepped line. May be.

  Moreover, since the shape of the detection electromagnetic wave passage part 3 according to the present embodiment is a truncated cone, as shown in FIG. 3D, the cross-sectional view seen from above also progresses from the entrance to the exit. However, the opening size is not limited to this example, and the sectional view seen from above is formed so that the opening size does not change even if the opening proceeds from the entrance to the exit. It may be.

  As described above, the detection electromagnetic wave passage 3 has a circular diameter that is the outer edge shape of the exit opening longer than the circular diameter that is the outer edge shape of the entrance opening, and therefore the opening size of the exit opening is larger than the opening size of the entrance opening. It is getting bigger. Here, if the aperture size of the exit port is slightly larger than the aperture size of the entrance port, diffraction of electromagnetic waves can be suppressed as compared with the case where the aperture size is substantially the same as the aperture size of the entrance port. Note that the opening size of the exit port may be determined from the beam radius after the electromagnetic wave travels from the entrance to the exit of the detection electromagnetic wave passage 3 calculated using the Fraunhofer approximation described above. Thereby, the opening size of the emission port is such that the spread beam almost passes through the emission port, and electromagnetic wave diffraction can be hardly generated. Specifically, using the example of FIG. 2, when the wavelength of the electromagnetic wave is 0.6 mm, the width of the entrance is 2.5 mm, and the distance from the entrance to the exit is 100 mm, the Fraunhofer approximation is used. The beam radius after the electromagnetic wave has advanced 100 mm is 8 mm. That is, if the exit port is a circle having a diameter longer than 16 mm, which is twice 8 mm, the electromagnetic wave beam almost passes through the exit port, so that almost no diffraction of the electromagnetic wave occurs.

(Irradiated electromagnetic wave passage 7)
The irradiation electromagnetic wave passage part 7 guides the irradiation electromagnetic wave to the sample holding part 5. The irradiation electromagnetic wave passage part 7 according to the present embodiment is a hole that penetrates the heat transfer part 4, and the irradiation electromagnetic wave emitted from the electromagnetic wave source 1 is irradiated to the sample through the irradiation electromagnetic wave passage part 7. In addition, the irradiation electromagnetic wave passage 7 may be one in which a hole is filled with a material having a high detection electromagnetic wave transmittance.

  The irradiation electromagnetic wave passage 7 according to the present embodiment includes an incident port (distal opening), that is, an end shape on the electromagnetic wave source 1 side, and an exit port (proximal opening), that is, an end portion on the sample holding unit 5 side. Both shapes are circular. However, the shape of the entrance and the exit is not limited to this configuration, and may be a convex quadrangle such as a square or a rectangle, or may be another convex polygon.

  Moreover, the irradiation electromagnetic wave passage part 7 which concerns on this embodiment is the structure which made the diameter in an entrance port and the diameter in an exit port longer than 10 times the wavelength of electromagnetic waves, in order to suppress the diffraction of electromagnetic waves. The opening size of the entrance and the opening size of the exit are substantially the same. That is, the shape of the irradiation electromagnetic wave passage part 7 according to the present embodiment is a cylindrical shape. In addition, the shape of the irradiation electromagnetic wave passage part 7 is not limited to this example. The irradiated electromagnetic wave passage 7 having other shapes will be described in Embodiments 2 and 3 described later.

  In addition, it is preferable that the opening size of the entrance and exit of the irradiated electromagnetic wave passage 7 is sufficiently larger than the beam diameter of the irradiated electromagnetic wave. As a result, all of the irradiated electromagnetic wave enters the irradiated electromagnetic wave passage 7.

  The detection electromagnetic wave passage 3 and the irradiation electromagnetic wave passage 7 are preferably formed such that the electromagnetic wave beam does not hit the wall surfaces of the detection electromagnetic wave passage 3 and the irradiation electromagnetic wave passage 7. As a result, all of the incident irradiated electromagnetic waves and detected electromagnetic waves can be emitted in the incident direction.

  When detecting electromagnetic waves having a wavelength longer than that in the infrared region, background noise is likely to be generated by electromagnetic waves radiated from surrounding objects by black body radiation. For this reason, the electromagnetic wave measuring apparatus 10 according to the present embodiment is directly connected so that there is no gap between the electromagnetic wave source 1 and the irradiated electromagnetic wave passing portion 7, and the electromagnetic wave detecting portion 2 and the detected electromagnetic wave passing portion 3, Or it is preferable that it connects through another passage part which has light-shielding property. Thereby, electromagnetic waves from other than the electromagnetic wave source 1 that cause background noise can be cut. Moreover, if the opening size of the entrance and exit of the detection electromagnetic wave passage 3 and the irradiation electromagnetic wave passage 7 is reduced, the electromagnetic wave radiated from a surrounding object enters the detection electromagnetic wave passage 3 and the irradiation electromagnetic wave passage 7. Since it becomes difficult, background noise can be suppressed. This configuration can be applied to other embodiments and modifications.

(Function and effect)
As described above, in the electromagnetic wave measurement device 10 according to the present embodiment, the width (diameter) of the entrance of the detection electromagnetic wave passage 3 is 10 times or less the wavelength of the detection electromagnetic wave, The opening size of the exit opening is larger than the opening size of the entrance opening.

  Thereby, diffraction of a detection electromagnetic wave can be suppressed and generation | occurrence | production of a measurement error can be suppressed. In addition, since the opening size of the entrance is made as small as possible, the area of the heat transfer section 4 that comes into contact with the sample (or the cell into which the sample is introduced) is increased, and the temperature of the sample can be easily and uniformly changed. it can.

  Further, in the electromagnetic wave measuring apparatus 10 according to the present embodiment, the opening size of the incident port of the irradiation electromagnetic wave passage unit 7 and the opening size of the output port are substantially the same, and the width of the incident port and the output port is irradiated. It is longer than 10 times the wavelength of electromagnetic waves. Thereby, diffraction of irradiation electromagnetic waves can be suppressed.

(Application example)
The electromagnetic wave measuring apparatus 10 according to the present embodiment is, for example, an electromagnetic wave that is irradiated from the electromagnetic wave source 1 and transmitted through the sample and detected by the electromagnetic wave detecting unit 2, and an electromagnetic wave that is detected by the electromagnetic wave detecting unit 2 when there is no sample. Can be applied to an apparatus for measuring the transmittance of electromagnetic waves in the sample. Moreover, it is also possible to apply to the apparatus which measures the reflectance and scattering coefficient of the electromagnetic wave in a sample by adjusting the irradiation electromagnetic wave passage part 7, the detection electromagnetic wave passage part 3, the sample holding part 5, etc. suitably. This application example is the same in Embodiments 2 and 3 described later.

[Embodiment 2]
The following will describe another embodiment of the present invention with reference to FIG. For convenience of explanation, members having the same functions as those described in the embodiment are given the same reference numerals, and descriptions thereof are omitted.

  4A is a top view of the electromagnetic wave measuring apparatus 10a according to the present embodiment, FIG. 4B is a cross-sectional view taken along the line AA in FIG. 4A, and FIG. These are AA sectional drawing of (a) of FIG. 4, Comprising: It is a figure which shows an example different from (b) of FIG. In FIG. 4, the electromagnetic wave source 1 and the electromagnetic wave detector 2 are omitted.

  As shown in FIG. 4B, the electromagnetic wave measurement device 10a according to the present embodiment includes an irradiation electromagnetic wave passage 7a instead of the irradiation electromagnetic wave passage 7 described in the first embodiment. In the following description, the description of the configuration similar to that of the irradiation electromagnetic wave passage 7 in the irradiation electromagnetic wave passage 7a is omitted.

  The shape of the irradiated electromagnetic wave passage portion 7a is different from that of the irradiated electromagnetic wave passage portion 7 described in the first embodiment. Specifically, as shown in FIG. 4B, the irradiation electromagnetic wave passage 7a is formed so that the opening size decreases as it proceeds from the entrance to the exit. Here, since the outer edge shape of the radiation | emission electromagnetic wave passage part 7a and the incident port is circular, the shape of the radiation electromagnetic wave passage part 7a is a truncated cone.

  Note that the shape of the irradiated electromagnetic wave passage portion 7a is not limited to the truncated cone shape as long as the opening size is reduced from the entrance to the exit. In the case of this embodiment, as shown in FIG. 4B, the irradiation electromagnetic wave passage portion 7a has an opening size that changes linearly, but may change in a curved line, or change in a staircase pattern. May be. In other words, in this embodiment, the two lines connecting the entrance and the exit shown in FIG. 4B are straight lines, but this may be a curve or a stepped line. May be.

  Moreover, since the irradiation electromagnetic wave passage part 7a according to the present embodiment has a truncated cone shape, similarly to the irradiation electromagnetic wave passage part 7 described in the first embodiment, the cross-sectional view seen from above also shows from the entrance. The aperture size is formed so that the aperture size decreases as it proceeds to the exit port. However, the present invention is not limited to this example, and in the cross-sectional view seen from above, the aperture size changes even if the entrance port proceeds to the exit port. It may be formed so that there is no.

  As described above, in the electromagnetic wave measurement device 10a according to the present embodiment, the opening size of the emission port of the irradiated electromagnetic wave passage 7a is smaller than the opening size of the incident port. Thereby, since the opening size of the emission port is reduced, the area of the heat transfer section 4 that comes into contact with the sample (or the cell into which the sample is introduced) is increased as compared with the electromagnetic wave measurement apparatus 10 described in the first embodiment. This makes it easy to change the temperature of the sample uniformly and quickly, and enables precise temperature adjustment.

  In addition, the electromagnetic wave measuring apparatus 10a according to the present embodiment excludes a circular diameter (or the shortest side in the triangle, the triangle) which is the outer edge shape of the emission port of the irradiated electromagnetic wave passage part 7a (first electromagnetic wave transmission part). It is preferable that the shortest straight line connecting any one side and the other side not in contact with the one side in the convex polygon has a length of 10 times or less of the wavelength. Thereby, the diffraction of the electromagnetic wave emitted from the irradiated electromagnetic wave passage 7a can be suppressed, and the diffraction of the electromagnetic wave (detection electromagnetic wave) incident on the detection electromagnetic wave passage 3 can be suppressed.

  In the case of this example, a circular diameter (or the shortest side of a triangle, or a convex polygon excluding a triangle, which is the outer edge shape of the entrance of the detection electromagnetic wave passage 3 does not contact the one side. The shortest straight line connecting the other side may not be 10 times or less the wavelength, and the opening size of the exit of the detection electromagnetic wave passage 3 is larger than the opening size of the entrance of the detection electromagnetic wave passage 3 It doesn't have to be big. Specifically, as shown in FIG. 4 (c), the detected electromagnetic wave passage part 3a (third electromagnetic wave transmission part) has a diameter at the incident port and a diameter at the emission port longer than 10 times the wavelength of the electromagnetic wave. In addition, a cylindrical shape in which the opening size of the entrance and the opening size of the exit is substantially the same may be used.

  In the case of this example, as shown in FIG. 4C, the portion provided between the electromagnetic wave source 1 and the sample holding unit 5 in the heat transfer unit 4 does not transmit the irradiated electromagnetic wave. The light shielding part 4c (first light shielding part) can also be expressed. Similarly, a portion provided between the sample holding unit 5 and the electromagnetic wave detection unit 2 can also be expressed as a fourth light shielding unit 4d (third light shielding unit) that does not transmit the detected electromagnetic wave.

[Embodiment 3]
The following will describe still another embodiment of the present invention with reference to FIG. For convenience of explanation, members having the same functions as those described in the embodiment are given the same reference numerals, and descriptions thereof are omitted.

  FIG. 5A is a top view of the electromagnetic wave measuring apparatus 10b according to the present embodiment, and FIG. 5B is a cross-sectional view taken along the line AA in FIG. In FIG. 5, the electromagnetic wave source 1 and the electromagnetic wave detector 2 are omitted.

  As shown in FIG. 5B, the electromagnetic wave measuring device 10b according to the present embodiment replaces the detected electromagnetic wave passage 3 and the irradiated electromagnetic wave passage 7 described in the first embodiment with a detected electromagnetic wave passage 3b and An irradiation electromagnetic wave passage 7b is provided. Hereinafter, in the detection electromagnetic wave passage 3b and the irradiation electromagnetic wave passage 7b, the description of the same configurations as those of the detection electromagnetic wave passage 3 and the irradiation electromagnetic wave passage 7 is omitted.

  Similarly to the detection electromagnetic wave passage part 3, the detection electromagnetic wave passage part 3b has a truncated cone shape formed so that its opening size increases as it proceeds from the entrance to the exit. Further, the irradiated electromagnetic wave passage 7 b has a cylindrical shape like the irradiated electromagnetic wave passage 7.

  In the electromagnetic wave measurement apparatus 10 according to the first embodiment, in order to increase the contact area between the sample (or the cell into which the sample is introduced) and the heat transfer unit 4, the width of the incident port of the detection electromagnetic wave passing unit 3 is the detection electromagnetic wave. The wavelength is 10 times or less. Moreover, in order to suppress the diffraction of the irradiated electromagnetic wave, the width of the exit port of the irradiated electromagnetic wave passage 7 is longer than 10 times the wavelength of the irradiated electromagnetic wave. That is, in the electromagnetic wave measuring apparatus 10 described in the first embodiment, as shown in FIG. 3B, the opening of the entrance of the detection electromagnetic wave passage 3 is larger than the opening size of the exit of the irradiation electromagnetic wave passage 7. The size is getting smaller.

  On the other hand, in the electromagnetic wave measurement device 10b according to the present embodiment, as shown in FIG. 5B, the incident port of the detection electromagnetic wave passage 3b is larger than the opening size of the emission port of the irradiation electromagnetic wave passage 7b. The opening size of is large. Here, in order to increase the contact area between the sample (or the cell into which the sample is introduced) and the heat transfer unit 4, the width of the incident port of the detected electromagnetic wave passage 3b is the same as that of the electromagnetic wave measuring device 10 in order to detect the detected electromagnetic wave. The length is 10 times or less of the wavelength. That is, the electromagnetic wave measurement device 10b according to the present embodiment can also be expressed as the opening size of the exit (and entrance) of the irradiated electromagnetic wave passage 7b is smaller than that of the electromagnetic wave measurement device 10.

  As a result, the width of the exit port of the irradiated electromagnetic wave passage portion 7b is not more than 10 times the wavelength of the irradiated electromagnetic wave, so that the irradiated electromagnetic wave emitted from the exit port is diffracted. However, since the opening size of the entrance of the detection electromagnetic wave passage portion 3b is larger than the opening size of the irradiation electromagnetic wave passage portion 7b, the detection electromagnetic wave passage portion 3b can also pass through the electromagnetic wave that has traveled in a direction other than the desired direction due to diffraction. . Thereby, the electromagnetic waves reflected by the heat transfer section 4 (in other words, do not pass through the detected electromagnetic wave passing section 3b) can be reduced.

  In addition, in order to reduce the electromagnetic wave reflected by the heat transfer part 4, it is preferable to make the opening size of the entrance of the detection electromagnetic wave passage part 3b as large as possible. However, the width is preferably 10 times or less the wavelength of the detected electromagnetic wave at the maximum. Thereby, it is possible to achieve both the function of reducing the electromagnetic wave reflected by the heat transfer section 4 and the function of easily and uniformly changing the temperature of the sample.

[Embodiment 4]
The following will describe still another embodiment of the present invention with reference to FIGS. For convenience of explanation, members having the same functions as those described in the embodiment are given the same reference numerals, and descriptions thereof are omitted.

  FIG. 6 is a perspective view of the electromagnetic wave measurement device 10c according to the present embodiment. 7A is a side view of the electromagnetic wave measuring device 10c, and FIG. 7B is a cross-sectional view taken along the line BB in FIG. 7A. In FIG. 7, the electromagnetic wave source 1 and the electromagnetic wave detector 2 are omitted.

  As shown in FIG. 6 and FIG. 7B, the electromagnetic wave measuring device 10 c according to the present embodiment includes the detection electromagnetic wave passage unit 3, the sample holding unit 5, and the irradiation electromagnetic wave passage unit 7 described in the first embodiment. Instead, a detection electromagnetic wave passage part 3c, a sample holding part 5c, and an irradiation electromagnetic wave passage part 7c are provided. Moreover, the electromagnetic wave measuring apparatus 10c is newly provided with an electromagnetic wave direction conversion unit 8 (prism).

  In the following, in the detection electromagnetic wave passage part 3c, the sample holding part 5c, and the irradiation electromagnetic wave passage part 7c, the same configurations as those of the detection electromagnetic wave passage part 3, the sample holding part 5 and the irradiation electromagnetic wave passage part 7 will be described. Omitted.

  The electromagnetic wave direction conversion unit 8 converts the direction of the incident electromagnetic wave, and is a so-called prism. Specifically, as shown in FIG. 7B, the electromagnetic wave direction conversion unit 8 is a prism having a triangular prism shape whose bottom surface is a right-angled isosceles triangle, and a side surface having the hypotenuse of the right-angled isosceles triangle as one side ( Hereinafter, the hypotenuse side surface is one side surface of the sample holding portion 5c. The remaining two side surfaces of the electromagnetic wave direction changing unit 8 are in contact with the exit port of the irradiated electromagnetic wave passage unit 7c and the entrance port of the detection electromagnetic wave passage unit 3c, respectively. As a result, the irradiated electromagnetic wave incident on the electromagnetic wave direction converting unit 8 from the exit of the irradiated electromagnetic wave passing unit 7c changes its traveling direction and proceeds in the direction of the sample holding unit 5c. Then, the irradiated electromagnetic wave is totally reflected on the side surface of the hypotenuse and proceeds in the direction of the detection electromagnetic wave passage 3c as the detection electromagnetic wave. Finally, when passing through the surface in contact with the detected electromagnetic wave passage 3c, the traveling direction is changed. As a result, the detected electromagnetic wave passes through the detected electromagnetic wave passage 3 c and enters the electromagnetic wave detector 2.

  As mentioned above, about each side surface of the electromagnetic wave direction conversion part 8, the surface which is in contact with the irradiation electromagnetic wave passage part 7c is an incident surface on which the irradiation electromagnetic wave is incident, and the surface which is one side surface of the sample holding unit 5c. Further, it can be expressed that the surface that is a reflection surface that reflects the irradiated electromagnetic wave and that is in contact with the detection electromagnetic wave passage 3c is an emission surface from which the detection electromagnetic wave is emitted.

  The electromagnetic wave direction changing unit 8 is formed of a material that can transmit an electromagnetic wave having a wavelength of about sub-mm, such as silicon, germanium, diamond, or the like.

  Unlike the detection electromagnetic wave passage portion 3 described in the first embodiment, the detection electromagnetic wave passage portion 3 c is not in contact with the sample holding portion 5. Instead, as described above, the incident port of the detection electromagnetic wave passage 3c is in contact with one side surface (outgoing surface) of the electromagnetic wave direction conversion unit 8 having a triangular prism shape.

  Unlike the irradiation electromagnetic wave passage part 7 described in the first embodiment, the emission electromagnetic wave passage part 7 c does not contact the sample holding part 5. Instead, as described above, the emission port of the irradiation electromagnetic wave passage 7c is in contact with one side surface (incident surface) of the triangular-pole electromagnetic wave direction conversion unit 8.

  Unlike the sample holder 5 described in the first embodiment, the sample holder 5c is not in contact with the entrance of the detection electromagnetic wave passage 3c and the exit of the irradiated electromagnetic wave passage 7c. Instead, as described above, the sample holding unit 5c is an electromagnetic wave direction changing unit 8. In other words, the oblique side surface (reflection surface) bears one side surface of the sample holding portion 5c.

  In addition, the incident port of the detection electromagnetic wave passage 3c and the emission surface of the electromagnetic wave direction conversion unit 8, and the emission port of the irradiation electromagnetic wave passage 7c and the incident surface of the electromagnetic wave direction conversion unit 8 are not in direct contact with each other, There may be a configuration in which a heat conduction portion (not shown) made of a material having high heat conductivity is provided (in other words, in contact with the heat conduction portion).

  Here, when the opening size of the emission port of the irradiated electromagnetic wave passage portion 7c is such a size that diffraction of the irradiated electromagnetic wave occurs, specifically, the emission port has a width of 10 times or less the wavelength of the irradiated electromagnetic wave. In this case, the beam diameter of the irradiated electromagnetic wave spreads within the electromagnetic wave direction changing unit 8 and is irradiated to the sample. In other words, since the range of the sample irradiated with the electromagnetic wave becomes different from the beam diameter of the irradiated electromagnetic wave, there is a problem that the range is difficult to understand.

  As an example of a solution for preventing such a problem from occurring, in the electromagnetic wave measuring apparatus 10c according to the present embodiment, the opening size of the exit port of the irradiated electromagnetic wave passage portion 7c is set to the opening size of the entrance port of the detection electromagnetic wave passage portion 3c. It can be larger than the size. Specifically, the width of the entrance of the detection electromagnetic wave passage 3c may be a length that is 10 times or less the wavelength of the detection electromagnetic wave. This is to change the temperature of the sample uniformly and quickly by widening the contact area between the heat transfer section 4 and the electromagnetic wave direction conversion section 8 and reducing the temperature difference between the heat transfer section 4 and the electromagnetic wave direction conversion section 8. This is to make it easier. On the other hand, in the case of this example, the width of the exit of the irradiated electromagnetic wave passage 7c is longer than 10 times the wavelength of the detected electromagnetic wave. Thereby, the diffraction of the irradiation electromagnetic wave which passed through the irradiation electromagnetic wave passage part 7c and entered into the electromagnetic wave direction conversion part 8 can be suppressed.

  Moreover, the electromagnetic wave measuring apparatus 10c according to the present embodiment has a contact area between the sample holding unit 5c and the electromagnetic wave direction changing unit 8, in other words, an area of a region in contact with one side surface of the sample holding unit 5c among the oblique side surfaces. Is wide. This ensures that the sample is irradiated with all irradiated electromagnetic waves.

  As described above, the beam diameter of the irradiated electromagnetic wave is almost unchanged before and after being incident on the electromagnetic wave direction changing unit 8. All of the irradiated electromagnetic waves incident on the electromagnetic wave direction changing unit 8 are reliably irradiated on the sample. This makes it easy to understand the range in which the sample is irradiated with electromagnetic waves. In other words, this range is the range of the beam diameter of the irradiated electromagnetic wave.

  In the electromagnetic wave measurement device 10c according to the present embodiment, the electromagnetic wave does not pass through the sample because the electromagnetic wave is totally reflected by the reflection surface of the electromagnetic wave direction conversion unit 8. That is, the irradiated electromagnetic wave emitted from the electromagnetic wave source 1 immerses in a sample very close to the reflecting surface (that is, a sample in the vicinity of the reflecting surface), interacts, and then enters the detected electromagnetic wave passing portion 3c as a detected electromagnetic wave. It will be. As described above, the electromagnetic wave measurement device 10c according to the present embodiment is configured to be able to measure only the sample in the vicinity of the reflecting surface, and is suitable for measuring a sample or powder having a large amount of electromagnetic wave absorption. .

[Modification 1]
One modification common to Embodiments 1 to 4 described above will be described with reference to FIG. FIG. 8 is a perspective view of an electromagnetic wave measurement device 10d according to this modification.

  In Embodiments 1 to 4 described above, the sample is irradiated with the irradiated electromagnetic wave emitted from the electromagnetic wave source 1. However, the electromagnetic wave measuring apparatus according to the present invention may be configured not to include the electromagnetic wave source 1.

  Specifically, as illustrated in FIG. 8, an electromagnetic wave measurement device 10 d that does not include the electromagnetic wave source 1 may be used. As the sample used in the electromagnetic wave measuring apparatus 10d, one that emits electromagnetic waves having a wavelength of about sub-mm is used. That is, the electromagnetic wave measuring device 10d has a configuration in which an electromagnetic wave (detected electromagnetic wave) radiated from the sample passes through the detected electromagnetic wave passing part 3 and enters the electromagnetic wave detecting part 2. In addition, since the size of the entrance of the detection electromagnetic wave passage 3 is not more than 10 times the wavelength and the size of the exit is larger than the size of the entrance, the temperature of the sample can be easily and uniformly changed. At the same time, the electromagnetic waves radiated from the sample can be detected efficiently.

[Modification 2]
In Embodiments 1 to 4 described above, the heat transfer unit 4 and the temperature adjustment unit 6 are provided. However, the electromagnetic wave measuring apparatus according to the present invention may be configured not to include the heat transfer unit 4 and the temperature adjustment unit 6.

  Specifically, the electromagnetic wave measurement device (not shown) according to the present modification does not include the temperature adjustment unit 6 and includes a first light shielding unit and a second light shielding unit instead of the heat transfer unit 4. It may be. The first light-shielding part and the second light-shielding part are only required to be formed of a material that does not transmit electromagnetic waves of about sub-mm, and the heat transfer part 4 (the first light-shielding part 4a and the second light-shielding part 4b). Thus, it is not necessary to be formed of a material having a high thermal conductivity. The first light-shielding part and the second light-shielding part are formed of, for example, a metal material or a resin material that is opaque with respect to the electromagnetic wave to be used (that is, a resin material having a low transmittance of the electromagnetic wave to be used).

  Similar to the first light shielding part 4a described in the first embodiment, the first light shielding part is provided between the sample holding part 5 and the electromagnetic wave detection part 2, and penetrates the first light shielding part. A detection electromagnetic wave passage 3 for guiding the detection electromagnetic wave to the electromagnetic wave detection unit is provided. The second light shielding part is provided between the electromagnetic wave source 1 and the sample holding part 5, and has an irradiation electromagnetic wave passage part 7 that penetrates the second light shielding part and guides the irradiation electromagnetic wave to the sample. ing.

  In the case of this modification, if the electromagnetic wave causing the background noise is emitted from the same direction as the electromagnetic wave to be irradiated and detected, only the first light shielding part and the second light shielding part are essential. Unlike the heat transfer unit 4 described in the first embodiment, it is not necessary to form the four side surfaces of the sample holding unit 5. In other words, the sample holding unit 5 according to this modification may have a configuration that does not have the front side surface and the back side surface in FIG.

[Modification 3]
In the modified example 1 described above, the electromagnetic wave measuring apparatus that does not include the electromagnetic wave source 1 has been described. In the second modification described above, the electromagnetic wave measurement apparatus that includes the light shielding unit instead of the heat transfer unit 4 and does not include the temperature adjustment unit 6 has been described.

  Furthermore, the electromagnetic wave measuring apparatus according to the present invention may be configured not to include the sample holding unit 5. That is, the electromagnetic wave measuring apparatus according to the present invention surrounds the electromagnetic wave detection unit 2, the detection electromagnetic wave passage unit 3 for guiding the electromagnetic wave to the electromagnetic wave detection unit 2, and the detection electromagnetic wave passage unit 3 (in other words, the detection electromagnetic wave passage). It may be configured to include a light shielding portion (provided with the portion 3).

  The electromagnetic wave measurement device according to this modification is used for a thermometer that measures body temperature by bringing the incident port of the detection electromagnetic wave passage unit 3 into contact with a human body and guiding infrared rays radiated from the human body to the electromagnetic wave detection unit 2, for example. it can. Thereby, when using the incident port of the detection electromagnetic wave passage part 3 in contact with the skin, the size of the incident port is not more than 10 times the wavelength, and the size of the output port is larger than the size of the incident port. , Electromagnetic wave diffraction can be suppressed. Moreover, since the light shielding part which surrounds the detection electromagnetic wave passage part 3 is provided, the background noise of the electromagnetic wave which has passed the detection electromagnetic wave passage part 3 can be suppressed.

[Embodiment 5]
The following will describe still another embodiment of the present invention with reference to FIGS. For convenience of explanation, members having the same functions as those described in the embodiment are given the same reference numerals, and descriptions thereof are omitted.

  In this embodiment, an electromagnetic wave irradiation apparatus for irradiating an irradiation object (hereinafter referred to as a sample) with an electromagnetic wave to process the sample will be described. FIG. 9 is a perspective view of the electromagnetic wave irradiation apparatus 10e according to the present embodiment, FIG. 10A is a top view of the electromagnetic wave irradiation apparatus 10e, and FIG. It is AA sectional drawing of). In addition, since the sample which concerns on this embodiment is solid, it has the structure which does not use a cell unlike other embodiment mentioned above (refer FIG.10 (b)).

  As shown in FIGS. 9 and 10, the electromagnetic wave irradiation device 10 e (electromagnetic wave corresponding device) according to the present embodiment includes an electromagnetic wave source 1, a heat transfer unit 4, a sample holding unit 5, a temperature adjustment unit 6, and an irradiation electromagnetic wave passage unit. 7e (first electromagnetic wave transmitting portion). The electromagnetic wave source 1, the heat transfer unit 4, the sample holding unit 5, and the temperature adjustment unit 6 have already been described in the first embodiment, and thus description thereof is omitted here. In addition, as shown in FIG. 9, in the heat transfer part 4, the part provided between the electromagnetic wave source 1 and the sample holding | maintenance part 5 is the 5th light-shielding part 4e (1st) which does not permeate | transmit electromagnetic waves (irradiated electromagnetic waves). 1 light-shielding portion). Further, when the sample is a solid as in this embodiment, the heat transfer section 4 and the sample may come into contact with each other as shown in FIG. preferable.

  As shown in FIG. 10B, the irradiation electromagnetic wave passing portion 7e is an outer edge shape of the emission port (proximal opening), the circular diameter is 10 times or less the wavelength, and the incident port. It is formed so that the opening size becomes smaller as it goes from the (distal opening) to the emission port. Here, since the outer edge shape of the exit and entrance of the irradiated electromagnetic wave passage 7e is circular, the shape of the irradiated electromagnetic wave passage 7e is a truncated cone.

  Note that the shape of the irradiation electromagnetic wave passage portion 7e is not limited to the truncated cone shape as long as the opening size is reduced from the entrance to the exit. In the case of this embodiment, as shown in FIG. 10B, the irradiation electromagnetic wave passage portion 7e has an opening size that changes linearly, but may change in a curved line, or change in a staircase pattern. May be. In other words, in the present embodiment, the two lines connecting the entrance and the exit shown in FIG. 7B are straight lines, but this may be a curve or a stepped line. May be.

  Moreover, since the irradiation electromagnetic wave passage part 7e which concerns on this embodiment is the truncated cone shape, similarly to the irradiation electromagnetic wave passage part 7 demonstrated in Embodiment 1, it is a cross-sectional view seen from the upper direction from the entrance. The aperture size is formed so that the aperture size decreases as it proceeds to the exit port. However, the present invention is not limited to this example, and in the cross-sectional view seen from above, the aperture size changes even if the entrance port proceeds to the exit port. It may be formed so that there is no.

  Moreover, as for the irradiation electromagnetic wave passage part 7e which concerns on this embodiment, the outer edge shape of an entrance and an exit is both circular. However, it is not limited to this configuration, and the outer edge shape of the entrance and exit may be a convex quadrangle such as a square or a rectangle, or may be another convex polygon. For example, when the outer edge shape is a triangle, the exit of the irradiated electromagnetic wave passage 7a may be a convex polygon excluding the triangle, as long as the shortest side of the triangle has a length equal to or less than 10 times the wavelength. In some cases, the exit opening of the irradiated electromagnetic wave passage 7a may be such that the shortest straight line connecting any one side and the other side not in contact with the one side in the convex polygon has a length of 10 times or less of the wavelength.

(Function and effect)
As described above, in the electromagnetic wave irradiation device 10e according to the present embodiment, the diameter of the outer edge shape of the emission port of the irradiation electromagnetic wave passage 7e is 10 times the wavelength or less, and the opening size of the emission port is incident. It is smaller than the opening size of the mouth. As a result, diffraction of the detected electromagnetic wave can be suppressed, so that the sample can be irradiated with the electromagnetic wave locally, and processing with high spatial resolution becomes possible. Further, since the opening size of the emission port is made as small as possible, the area of the heat transfer section 4 that comes into contact with the sample (or the cell into which the sample is introduced) is increased, and the temperature of the sample can be easily and uniformly changed. it can.

  Note that when there is no need to change the temperature of the sample, the heat transfer section 4 may be replaced with a light shielding section (not shown). In this case, the light shielding portion may be a substance having a low thermal conductivity such as an opaque resin material. In this case, the temperature adjustment unit 6 may be omitted.

(Application example)
The electromagnetic wave irradiation apparatus according to the present embodiment can be applied to an apparatus that processes a sample by, for example, irradiating the sample with an electromagnetic wave and applying energy. What is “processing” here? This includes cutting macroscopically the sample of the part irradiated with electromagnetic waves, and causing structural transformation by cutting the bonds of molecules in the sample.

[Summary]
The electromagnetic wave response device (electromagnetic wave measurement device 10) according to aspect 1 of the present invention includes a first light shielding unit (first light shielding unit 4a) that does not transmit an electromagnetic wave having a wavelength of 0.01 mm or more and 10 mm or less, and the first. A first electromagnetic wave transmission part (detection electromagnetic wave transmission part 3) that transmits the electromagnetic wave through the light shielding part of the first electromagnetic wave transmission part, and is close to the object of the device itself among the openings of the first electromagnetic wave transmission part The outer edge shape of the proximal opening and the distal opening far from the object are both circular or convex polygons, and the proximal opening is the shortest side of the triangle having the circular diameter and the convex polygon. Or the length of the specific line that is one of the shortest straight lines connecting any one side and the other side not in contact with the one side in the convex polygon excluding the triangle is not more than 10 times the wavelength of the electromagnetic wave. Length, at the proximal opening Serial than a certain line, a long the particular line in the distal opening.

  According to the above configuration, the outer edge shape of the proximal opening and the distal opening of the first electromagnetic wave transmitting portion is both a circular shape or a convex polygon, and the proximal opening has a circular diameter and a convex polygon. The length of the specific line which is one of the shortest straight line connecting any one side and the other side not in contact with the one side in the shortest side of the triangle or the convex polygon excluding the triangle is 10 of the wavelength of the electromagnetic wave. The specific line in the distal opening of the first electromagnetic wave transmitting part is longer than the specific line in the proximal opening of the first electromagnetic wave transmitting part.

  Thereby, even if it is a case where the beam diameter of electromagnetic waves is restrict | squeezed by the 1st electromagnetic wave transmission part, generation | occurrence | production of the diffraction of the electromagnetic waves which passed the 1st electromagnetic wave transmission part can be suppressed.

  The electromagnetic wave corresponding device according to aspect 2 of the present invention further includes a detection unit (electromagnetic wave detection unit 2) that detects the electromagnetic wave in the above aspect 1, and the first electromagnetic wave transmission unit includes the object and the detection unit. Between the two.

  According to the above configuration, since the detection unit is provided and the first electromagnetic wave transmission unit is provided between the object and the detection unit, the electromagnetic wave incident on the first electromagnetic wave transmission unit from the object side is 1 passes through the electromagnetic wave transmission part 1 and enters the detection part. Therefore, the electromagnetic wave corresponding device can be configured as a device that detects the electromagnetic wave emitted from the object side. The apparatus can be applied to a measuring apparatus that performs measurement using detected electromagnetic waves. In addition, since the first light-shielding unit is provided, it is possible to suppress incidence of electromagnetic waves from surrounding objects to the detection unit, and thus background noise can be suppressed. Thereby, it can be set as the highly accurate measuring apparatus which can suppress generation | occurrence | production of the diffraction of the electromagnetic waves which suppressed background noise and passed the 1st electromagnetic wave transmission part. In addition, if the first electromagnetic wave transmission part and the detection part are directly connected so that there is no gap between them, or connected through another passage part having a light shielding property, the background noise is further increased. Can be suppressed.

  The electromagnetic wave corresponding apparatus (electromagnetic wave irradiation apparatus 10e) which concerns on aspect 3 of this invention is further equipped with the electromagnetic wave source (electromagnetic wave source 1) which radiate | emits the said electromagnetic wave in the said aspect 1, The said 1st electromagnetic wave transmission part (irradiation electromagnetic wave passage) The part 7e) may be provided between the electromagnetic wave source and the object.

  According to the above configuration, the electromagnetic wave source is provided, and the first electromagnetic wave transmission part is provided between the electromagnetic wave source and the object. Therefore, the electromagnetic wave incident on the first electromagnetic wave transmission part from the electromagnetic wave source is the first electromagnetic wave transmission part. The object is irradiated through the electromagnetic wave transmitting part. Therefore, an electromagnetic wave corresponding apparatus can be comprised as an apparatus which irradiates electromagnetic waves to a target object. The apparatus can be applied to a processing apparatus that processes an object by irradiating the object with electromagnetic waves. In addition, since the first light-shielding portion is provided, it is possible to prevent the object from being irradiated with electromagnetic waves from surrounding objects, and thus it is possible to suppress unnecessary electromagnetic waves from being irradiated to the object. . Thereby, it can be set as the highly accurate processing apparatus which can irradiate only a required electromagnetic wave to a target object and can suppress generation | occurrence | production of the diffraction of the electromagnetic wave which passed the 1st electromagnetic wave transmission part. If the electromagnetic wave source and the first electromagnetic wave transmitting portion are directly connected so that there is no gap between them, or connected through another passage portion having a light shielding property, unnecessary electromagnetic waves are targeted. Irradiation of an object can be further suppressed.

  The electromagnetic wave corresponding apparatus according to aspect 4 of the present invention is the wall surface part (heat transfer part 4) that includes the first light-shielding part and forms a space into which the object is introduced in any one of the aspects 1 to 3. And a temperature adjustment unit (temperature adjustment unit 6) that raises and lowers the temperature of the object and the wall surface part.

  According to said structure, since the temperature adjustment part which raises / lowers the temperature of a target object and the wall surface part containing a 1st light-shielding part is provided, the electromagnetic waves emitted from a target object are detected, changing the temperature of a target object. can do.

  In addition, the outer edge shape of the proximal opening and the distal opening of the first electromagnetic wave transmitting portion is both a circular shape or a convex polygon shape, and the proximal opening has a circular diameter and the shortest side of a triangle that is a convex polygon shape. Or the length of the specific line that is one of the shortest straight lines connecting any one side and the other side not in contact with the one side in the convex polygon excluding the triangle is not more than 10 times the wavelength of the electromagnetic wave. Therefore, the area of the region other than the proximal opening can be widened on the surface where the proximal opening of the first electromagnetic wave transmitting portion is formed. Thereby, the temperature change of the object can be easily and quickly made uniform, and the generation of diffraction of the electromagnetic wave that has passed through the first electromagnetic wave transmitting portion can be suppressed.

  In the electromagnetic wave corresponding apparatus according to aspect 5 of the present invention, the electromagnetic wave source that emits the electromagnetic wave (electromagnetic wave source 1) and the second light-shielding part (second light-shielding part 4b) that does not transmit the electromagnetic wave are provided. And a second electromagnetic wave transmitting part (irradiated electromagnetic wave passing part 7) that penetrates the second light shielding part and transmits the electromagnetic wave, and a detecting part (electromagnetic wave detecting part 2) that detects the electromagnetic wave, One of the first electromagnetic wave transmission part and the second electromagnetic wave transmission part may be provided between the electromagnetic wave source and the object, and the other may be provided between the object and the detection part. .

  According to said structure, it is equipped with an electromagnetic wave source, a 2nd light-shielding part, a 2nd electromagnetic wave transmission part, and a detection part, and the 1st electromagnetic wave transmission part and the 2nd electromagnetic wave transmission part are one side Is provided between the electromagnetic wave source and the object, and the other is provided between the object and the detection unit. Thereby, generation | occurrence | production of the diffraction of electromagnetic waves can be suppressed between an electromagnetic wave source and a target object or between a target object and a detection part.

  Further, the electromagnetic wave incident on the first electromagnetic wave transmission part or the second electromagnetic wave transmission part from the electromagnetic wave source passes through the first electromagnetic wave transmission part or the second electromagnetic wave transmission part and is irradiated to the object. Then, the electromagnetic wave passes through the object (or a new electromagnetic wave is generated from the object) and enters the first electromagnetic wave transmission part or the second electromagnetic wave transmission part, and the first electromagnetic wave transmission part or the second electromagnetic wave transmission part. It passes through the electromagnetic wave passage part and enters the detection part. Therefore, it is possible to configure an apparatus that irradiates an object with an electromagnetic wave emitted from an electromagnetic wave source and detects an electromagnetic wave that has passed through the object (or newly emitted from the object). The apparatus can be applied to a measuring apparatus that performs measurement using detected electromagnetic waves.

  The electromagnetic wave response device according to aspect 6 of the present invention is the above-described aspect 5, wherein the wall surface part (heat transfer part) includes the first light shielding part and the second light shielding part, and forms a space into which the object is introduced. 4) and a temperature adjusting unit for raising and lowering the temperature of the object and the wall surface part may be further provided.

  According to said structure, since the temperature adjustment part which raises / lowers the temperature of a target object and the wall surface part containing a 1st light-shielding part and a 2nd light-shielding part is provided, a target object is changed, changing the temperature of a target object. Electromagnetic waves emitted from can be detected.

  In addition, the outer edge shape of the proximal opening and the distal opening of the first electromagnetic wave transmitting portion is both a circular shape or a convex polygon shape, and the proximal opening has a circular diameter and the shortest side of a triangle that is a convex polygon shape. Or the length of the specific line that is one of the shortest straight lines connecting any one side and the other side not in contact with the one side in the convex polygon excluding the triangle is not more than 10 times the wavelength of the electromagnetic wave. Therefore, the area of the region other than the proximal opening can be widened on the surface where the proximal opening of the first electromagnetic wave transmitting portion is formed. Accordingly, it is possible to realize a highly accurate measuring apparatus that can easily and quickly make the temperature change of the object, and can suppress the generation of diffraction of the electromagnetic wave that has passed through the first electromagnetic wave transmitting portion. it can.

  In the electromagnetic wave corresponding device according to aspect 7 of the present invention, in the above aspect 5 or 6, the first electromagnetic wave transmission part is provided between the object and the detection part, and the second electromagnetic wave transmission part is the above Of the opening of the second electromagnetic wave transmitting portion provided between the electromagnetic wave source and the object, the outer edge shape of the proximal opening close to the object of the own device and the distal opening far from the object are: Both of them are circular or convex polygons, and the proximal opening of the second electromagnetic wave transmitting part is the diameter of the circle, the shortest side of the triangle that is the convex polygon, or the convex polygon excluding the triangle The length of the specific line that is one of the shortest straight lines connecting any one side and the other side that is not in contact with the one side is not more than 10 times the wavelength of the electromagnetic wave, and the first electromagnetic wave The specific line at the proximal opening of the transmission part is the first line. It may be longer than the specific line in the proximal opening of the electromagnetic wave transmitting portion.

  According to said structure, the size of the proximal opening of a 1st electromagnetic wave transmission part will be larger than the size of the proximal opening of a 2nd electromagnetic wave transmission part. That is, in the proximal opening of the second electromagnetic wave transmission part, the length of the specific line is 10 times or less the wavelength of the electromagnetic wave, and the electromagnetic wave that has passed through the second electromagnetic wave transmission part is likely to be diffracted. However, since the size of the proximal opening of the first electromagnetic wave transmitting portion is larger than the size of the proximal opening of the second electromagnetic wave transmitting portion, there is a high possibility that the diffracted electromagnetic wave is incident on the first electromagnetic wave transmitting portion. . Therefore, more electromagnetic waves can be guided to the detection unit.

  Further, since the area of the region other than the proximal opening can be made wider on the surface of the second electromagnetic wave transmitting portion where the proximal opening is formed, the temperature change of the object is provided when the temperature adjusting portion is provided. Can be made more rapid and uniform.

  In the electromagnetic wave corresponding device according to aspect 8 of the present invention, in the aspect 5 or 6, the first electromagnetic wave transmission part is provided between the object and the detection part, and the second electromagnetic wave transmission part is the above Of the opening of the second electromagnetic wave transmitting portion provided between the electromagnetic wave source and the object, the outer edge shape of the proximal opening close to the object of the own device and the distal opening far from the object are: Both are circular or convex polygons, and the diameter of the circle at the proximal opening of the second electromagnetic wave transmission part, the shortest side of the triangle that is the convex polygon, or the convex polygon excluding the triangle The length of the specific line that is one of the shortest straight lines connecting any one side and the other side that is not in contact with the one side may be longer than 10 times the wavelength of the electromagnetic wave.

  According to said structure, in the proximal opening of a 2nd electromagnetic wave transmission part, since the length of a specific line is longer than 10 times the wavelength of an electromagnetic wave, the electromagnetic wave which passed the 2nd electromagnetic wave transmission part hardly diffracts. . Therefore, it can enter into the 1st electromagnetic wave transmission part, without changing the advancing direction of electromagnetic waves.

  In the electromagnetic wave corresponding device according to aspect 9 of the present invention, in any of the above aspects 5 to 8, the first electromagnetic wave transmission part is provided between the object and the detection part, and the second electromagnetic wave transmission part is provided. The prism is provided between the electromagnetic wave source and the object, and includes a prism (electromagnetic wave direction changing unit 8) having an incident surface on which the electromagnetic wave is incident, a reflecting surface that reflects the incident electromagnetic wave, and an outgoing surface that emits the reflected electromagnetic wave. ), The incident surface and the exit surface are respectively opposed to the second electromagnetic wave transmitting portion and the first electromagnetic wave transmitting portion, and the reflecting surface is one side surface of the holding portion for holding the object. It may be.

  According to the above configuration, the prism includes the incident surface on which the electromagnetic wave is incident, the reflecting surface that reflects the incident electromagnetic wave, and the emitting surface that emits the reflected electromagnetic wave, and each of the incident surface and the emitting surface of the prism has the second surface. Since the reflecting surface of the prism is one side surface of the holding unit, the electromagnetic wave emitted from the electromagnetic wave source is incident on the prism and is reflected when reflected by the prism. An apparatus for detecting an electromagnetic wave that affects an object can be configured. The apparatus can be applied to a measuring apparatus that performs measurement using detected electromagnetic waves.

  In addition, when the length of the specific line is made longer than 10 times the wavelength of the electromagnetic wave at the proximal opening of the second electromagnetic wave transmitting part, the electromagnetic wave that has passed through the second electromagnetic wave transmitting part is hardly diffracted. The electromagnetic wave applied to the holding part is substantially unchanged from the time when the beam diameter is emitted from the electromagnetic wave source. Therefore, it becomes easy to understand the range of the object irradiated with the electromagnetic wave.

  In the electromagnetic wave corresponding device according to aspect 10 of the present invention, in any one of the aspects 1 to 9, the length of the specific line in the distal opening of the first electromagnetic wave transmitting portion is the length of the first electromagnetic wave transmitting portion. The electromagnetic wave beam calculated based on the length of the specific line in the proximal opening and the distance from the proximal opening of the first electromagnetic wave transmitting portion to the distal opening of the first electromagnetic wave transmitting portion. May be longer than twice the distance from the center to the position where the intensity of the electromagnetic wave is 1 / e.

  According to the above configuration, the value of the distance from the center of the electromagnetic wave beam to the position where the intensity of the electromagnetic wave becomes 1 / e is twice the value, that is, the diameter of the beam, the distal opening of the first electromagnetic wave transmitting portion. Because the length of the specific line is long, the spread beam will almost pass through the distal opening. Thereby, it can be set as the 1st electromagnetic wave transmission part which diffraction of electromagnetic waves hardly generate | occur | produces.

  According to an eleventh aspect of the present invention, there is provided an electromagnetic wave-compatible device that includes a first light-shielding portion that does not transmit an electromagnetic wave having a wavelength of 0.01 mm or more and 10 mm or less, and a first light-shielding portion that passes through the first light-shielding portion and transmits the electromagnetic wave. Of the first electromagnetic wave transmitting portion, the proximal opening close to the object of the device itself has at least one of an opening size and an opening shape in which diffraction of the electromagnetic wave occurs. And the area of the outer edge shape of the distal opening far from the object is larger than the area of the outer edge shape of the proximal opening.

  According to the above configuration, the area of the outer edge shape of the distal opening is larger than the area of the outer edge shape of the proximal opening having at least one of the opening size and the opening shape in which electromagnetic wave diffraction occurs. Even when the beam diameter of the electromagnetic wave is reduced by the electromagnetic wave transmission part, the generation of diffraction of the electromagnetic wave that has passed through the first electromagnetic wave transmission part can be suppressed.

  In the electromagnetic wave corresponding device according to aspect 12 of the present invention, in the aspect 6, the first electromagnetic wave transmitting part is provided between the object and the detecting part, and the second electromagnetic wave transmitting part is the electromagnetic wave source. The outer edge shape of the proximal opening close to the object and the distal opening far from the object among the openings of the second electromagnetic wave transmitting portion provided between the object and the object is circular. Or a convex polygon, wherein the proximal opening of the second electromagnetic wave transmitting portion is an arbitrary diameter in the circular diameter, the shortest side of the triangle that is the convex polygon, or the convex polygon excluding the triangle A specific line that is one of the shortest straight lines connecting one side to the other side that is not in contact with the one side may be shorter than the specific line in the distal opening of the second electromagnetic wave transmitting unit.

  According to said structure, since the size of the proximal opening of the 2nd electromagnetic wave transmission part will be smaller than the size of the distal opening of the 2nd electromagnetic wave transmission part, the proximal opening of the 2nd electromagnetic wave transmission part In the surface on which is formed, the area of the region other than the proximal opening can be made larger. As a result, it is possible to realize a highly accurate measuring apparatus that can make the temperature change of the object more rapid and uniform and can suppress the diffraction of the electromagnetic wave that has passed through the first electromagnetic wave transmitting part. Can do.

  The present invention is not limited to the above-described embodiments, and various modifications are possible within the scope shown in the claims, and embodiments obtained by appropriately combining technical means disclosed in different embodiments. Is also included in the technical scope of the present invention. Furthermore, a new technical feature can be formed by combining the technical means disclosed in each embodiment.

1 Electromagnetic wave source 2 Electromagnetic wave detection part (detection part)
3 Detection electromagnetic wave passage part (first electromagnetic wave transmission part)
3a Detection electromagnetic wave passage part (third electromagnetic wave transmission part)
4 Heat transfer part (wall surface part)
4a 1st light shielding part 4b 2nd light shielding part 4c 3rd light shielding part (1st light shielding part)
4d 4th light shielding part (3rd light shielding part)
4e 5th light-shielding part (1st light-shielding part)
6 Temperature adjustment part 5 Sample holding part (holding part)
7 Irradiation electromagnetic wave passage part (second electromagnetic wave transmission part)
7a Irradiation electromagnetic wave passage part (first electromagnetic wave transmission part)
7e Irradiation electromagnetic wave passage part (first electromagnetic wave transmission part)
8 Electromagnetic wave direction converter (prism)
10 Electromagnetic wave measuring device (electromagnetic wave compatible device)
10e Electromagnetic wave irradiation device (electromagnetic wave compatible device)

Claims (10)

A first light-shielding portion that does not transmit electromagnetic waves having a wavelength of 0.01 mm or more and 10 mm or less;
A first electromagnetic wave transmission part that penetrates the first light shielding part and transmits the electromagnetic wave,
Out of the openings of the first electromagnetic wave transmitting portion, the outer edge shape of the proximal opening close to the object of the device itself and the distal opening far from the object are both circular or convex polygons,
The proximal opening is the shortest side connecting the one side of the circular diameter, the shortest one side of the triangle that is the convex polygon, or the other side that is not in contact with the one side in the convex polygon excluding the triangle. The length of the specific line that is one of the straight lines is 10 times or less the wavelength of the electromagnetic wave,
The electromagnetic wave response device, wherein the specific line in the distal opening is longer than the specific line in the proximal opening. A detector for detecting the electromagnetic wave;
The electromagnetic wave response device according to claim 1, wherein the first electromagnetic wave transmission unit is provided between the object and the detection unit. Further comprising an electromagnetic wave source that emits the electromagnetic wave,
The electromagnetic wave response device according to claim 1, wherein the first electromagnetic wave transmitting portion is provided between the electromagnetic wave source and the object. A wall surface portion including the first light shielding portion and forming a space into which the object is introduced;
The electromagnetic wave response device according to any one of claims 1 to 3, further comprising a temperature adjustment unit that raises and lowers the temperature of the object and the wall surface part. An electromagnetic wave source that emits the electromagnetic wave;
A second light-shielding portion that does not transmit the electromagnetic wave;
A second electromagnetic wave transmission part that penetrates the second light shielding part and transmits the electromagnetic wave;
A detector for detecting the electromagnetic wave;
One of the first electromagnetic wave transmission part and the second electromagnetic wave transmission part is provided between the electromagnetic wave source and the object, and the other is provided between the object and the detection part. The electromagnetic wave response device according to claim 1, wherein the device is an electromagnetic wave response device. A wall surface portion including the first light shielding portion and the second light shielding portion and forming a space into which the object is introduced;
The electromagnetic wave response device according to claim 5, further comprising a temperature adjustment unit that raises and lowers the temperature of the object and the wall surface part. The first electromagnetic wave transmission part is provided between the object and the detection part,
The second electromagnetic wave transmitting portion is provided between the electromagnetic wave source and the object;
Out of the openings of the second electromagnetic wave transmitting portion, the outer edge shape of the proximal opening close to the object of the own device and the distal opening far from the object are both circular or convex polygons,
The proximal opening of the second electromagnetic wave transmitting portion does not contact the one side with any one side of the circular diameter, the shortest side of the triangle that is the convex polygon, or the convex polygon excluding the triangle The length of the specific line that is one of the shortest straight lines connecting the other side is 10 times or less the wavelength of the electromagnetic wave,
The electromagnetic wave response device according to claim 5 or 6, wherein the specific line in the proximal opening of the first electromagnetic wave transmitting portion is longer than the specific line in the proximal opening of the second electromagnetic wave transmitting portion. . The first electromagnetic wave transmission part is provided between the object and the detection part,
The second electromagnetic wave transmitting portion is provided between the electromagnetic wave source and the object;
Out of the openings of the second electromagnetic wave transmitting portion, the outer edge shape of the proximal opening close to the object of the own device and the distal opening far from the object are both circular or convex polygons,
The proximal opening of the second electromagnetic wave transmitting portion does not contact the one side with any one side of the circular diameter, the shortest side of the triangle that is the convex polygon, or the convex polygon excluding the triangle The electromagnetic wave response device according to claim 5 or 6, wherein the length of the specific line which is one of the shortest straight lines connecting the other side is longer than 10 times the wavelength of the electromagnetic wave. The first electromagnetic wave transmission part is provided between the object and the detection part,
The second electromagnetic wave transmitting portion is provided between the electromagnetic wave source and the object;
Further comprising a prism having an incident surface on which an electromagnetic wave is incident, a reflecting surface that reflects the incident electromagnetic wave, and an exit surface that emits the reflected electromagnetic wave;
The entrance surface and the exit surface are respectively opposite to the second electromagnetic wave transmission part and the first electromagnetic wave transmission part,
The electromagnetic wave response device according to claim 5, wherein the reflection surface is one side surface of a holding unit that holds the object.   The length of the specific line at the distal opening of the first electromagnetic wave transmitting portion is the length of the specific line at the proximal opening of the first electromagnetic wave transmitting portion and the proximal opening of the first electromagnetic wave transmitting portion. Is a value twice the distance from the center of the electromagnetic wave beam to the position where the intensity of the electromagnetic wave is 1 / e, calculated based on the distance from the first electromagnetic wave transmitting part to the distal opening of the electromagnetic wave transmitting part The electromagnetic wave response device according to claim 1, wherein the electromagnetic wave response device is longer.

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