JP2017019095A5 - Method for manufacturing surface-coated cutting tool - Google Patents

Method for manufacturing surface-coated cutting tool Download PDF

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JP2017019095A5
JP2017019095A5 JP2015229975A JP2015229975A JP2017019095A5 JP 2017019095 A5 JP2017019095 A5 JP 2017019095A5 JP 2015229975 A JP2015229975 A JP 2015229975A JP 2015229975 A JP2015229975 A JP 2015229975A JP 2017019095 A5 JP2017019095 A5 JP 2017019095A5
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cutting tool
volume
coated cutting
layer
length
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基材と、該基材上に形成された被膜とを備えた表面被覆切削工具であって、
前記被膜は、α−Ａｌ2Ｏ3層を含み、
前記α−Ａｌ2Ｏ3層は、複数のα−Ａｌ2Ｏ3の結晶粒を含み、かつ（００１）配向を示し、
前記結晶粒の粒界は、ＣＳＬ粒界と一般粒界とを含み、
前記ＣＳＬ粒界のうちΣ３型結晶粒界の長さは、Σ３−２９型結晶粒界の長さの８０％超であり、かつ前記Σ３−２９型結晶粒界の長さと前記一般粒界の長さとの和である全粒界の合計長さの１０％以上５０％以下であり、
前記（００１）配向を示すとは、（００１）面に対する法線方向が前記α−Ａｌ 2 Ｏ 3 層表面の法線方向に対して±２０°以内となる前記α−Ａｌ 2 Ｏ 3 の結晶粒の割合が前記α−Ａｌ 2 Ｏ 3 層中で５０％以上となる場合を言う、表面被覆切削工具の製造方法であって、
前記α−Ａｌ 2 Ｏ 3 層を化学気相蒸着法により形成する第１工程と、
形成された前記α−Ａｌ 2 Ｏ 3 層をアニールする第２工程と、を含み、
前記第１工程は、原料ガスとして、ＡｌＣｌ 3 、ＨＣｌ、ＣＯ 2 、ＣＯ、Ｈ 2 Ｓ、Ｏ 2 、およびＨ 2 を用い、温度が９５０〜１０５０℃であり、圧力が１〜５ｋＰａであり、ガス流量が５０〜１００Ｌ／ｍｉｎである条件で実行され、
前記第２工程は、温度が１０５０〜１０８０℃であり、圧力が５０〜１００ｋＰａであり、時間が１２０〜３００分である条件で実行される、表面被覆切削工具の製造方法。 A surface-coated cutting tool comprising a base material and a coating formed on the base material,
The coating includes an α-Al 2 O 3 layer,
The α-Al 2 O 3 layer includes a plurality of α-Al 2 O 3 crystal grains and exhibits a (001) orientation;
The grain boundaries of the crystal grains include CSL grain boundaries and general grain boundaries,
Of the CSL grain boundaries, the length of the Σ3-type grain boundary is more than 80% of the length of the Σ3-29-type grain boundary, and the length of the Σ3-29-type grain boundary and the length of the general grain boundary Ri 50% der less than 10% of the total length of all the grain boundaries is the sum of the length,
The (001) orientation means that the α-Al 2 O 3 crystal has a normal direction with respect to the (001) plane within ± 20 ° with respect to the normal direction of the surface of the α-Al 2 O 3 layer. A method for producing a surface-coated cutting tool , which refers to a case where the proportion of grains is 50% or more in the α-Al 2 O 3 layer ,
A first step of forming the α-Al 2 O 3 layer by chemical vapor deposition;
Annealing the formed α-Al 2 O 3 layer,
In the first step, AlCl 3 , HCl, CO 2 , CO, H 2 S, O 2 , and H 2 are used as source gases , the temperature is 950 to 1050 ° C., the pressure is 1 to 5 kPa, Executed under the condition that the gas flow rate is 50 to 100 L / min,
The said 2nd process is a manufacturing method of the surface covering cutting tool performed on the conditions whose temperature is 1050-1080 degreeC, a pressure is 50-100 kPa, and time is 120-300 minutes. 前記原料ガスは、ＡｌＣｌThe source gas is AlCl 3Three を３〜５体積％、ＨＣｌを４〜６体積％、ＣＯ3-5% by volume, HCl 4-6% by volume, CO 22 を０．５〜２体積％、ＣＯを０．１〜１体積％、Ｈ0.5-2% by volume, CO 0.1-1% by volume, H 22 Ｓを１〜５体積％、Ｏ1 to 5% by volume of S, O 22 を０．０００１〜０．０１体積％とし、残部はＨ0.0001 to 0.01% by volume, the balance being H 22 とする配合量で用いられる、請求項１に記載の表面被覆切削工具の製造方法。The method for producing a surface-coated cutting tool according to claim 1, which is used in an amount of 前記原料ガスは、０．１≦ＣＯ／ＣＯThe source gas is 0.1 ≦ CO / CO 22 ≦１、０．１≦ＣＯ≦ 1, 0.1 ≦ CO 22 ／Ｈ/ H 22 Ｓ≦１、０．１≦ＣＯS ≦ 1, 0.1 ≦ CO 22 ／ＡｌＣｌ/ AlCl 3Three ≦１、０．５≦ＡｌＣｌ≦ 1, 0.5 ≦ AlCl 3Three ／ＨＣｌ≦１という体積比で用いられる、請求項１または請求項２に記載の表面被覆切削工具の製造方法。The method for producing a surface-coated cutting tool according to claim 1 or 2, which is used at a volume ratio of / HCl ≦ 1. 前記第２工程は、２０〜３０Ｌ／ｍｉｎの流量のＨThe second step is H at a flow rate of 20-30 L / min. 22 とＡｒとを流す雰囲気で実行される、請求項１〜請求項３のいずれか１項に記載の表面被覆切削工具の製造方法。The manufacturing method of the surface-coated cutting tool of any one of Claims 1-3 performed by the atmosphere which flows Ar and Ar.
JP2015229975A 2015-11-25 2015-11-25 Method for manufacturing surface-coated cutting tool Active JP6439201B2 (en)

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JP2015548512A Division JP5871353B1 (en) 2015-07-13 2015-07-13 Surface coated cutting tool

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JP2017019095A JP2017019095A (en) 2017-01-26
JP2017019095A5 true JP2017019095A5 (en) 2018-02-22
JP6439201B2 JP6439201B2 (en) 2018-12-19

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4562401B2 (en) * 2003-02-17 2010-10-13 京セラ株式会社 Surface coated cutting tool
JP4716252B2 (en) * 2005-05-24 2011-07-06 三菱マテリアル株式会社 Surface-coated cermet cutting tool with excellent chipping resistance thanks to thick α-type aluminum oxide layer
EP2570511B1 (en) * 2011-09-16 2019-03-20 Walter AG Grain boundary engineered alpha-alumina coated cutting tool
JP6198176B2 (en) * 2013-02-26 2017-09-20 三菱マテリアル株式会社 Surface coated cutting tool

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