JP2017016116A - Photosensitive resin composition, production method of cured film, cured film and liquid crystal display device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a photosensitive resin composition from which an interlayer insulation film also functioning as an alignment film can be formed, and a production method of a cured film, a cured film and a liquid crystal display device using the above composition.SOLUTION: The photosensitive resin composition comprises a polymer component A1 comprising a polymer A1-1 containing a structural unit a1 having a group of an acid group protected by an acid decomposable group, and a photoacid generator B1, and the photosensitive resin composition satisfies at least one of the following conditions 1 to 3 and at least one of the following conditions 4 and 5. 1: The polymer A1-1 further contains a structural unit a2 having a crosslinking group. 2: The composition further contains, as the polymer component A1, a polymer A1-2 containing a structural unit a2 having a crosslinking group. 3: The composition further contains a crosslinking agent C1 having a crosslinking group and a molecular weight of 1,000 or less. 4: The polymer A1-1 or the polymer A1-2 contains a structural unit shown in s1. 5: The composition further contains, as the polymer component A1, a polymer A1-3 containing a specific structural unit.SELECTED DRAWING: None

Description

  The present invention relates to a photosensitive resin composition, a method for producing a cured film, a cured film, and a liquid crystal display device.

Since the liquid crystal display device has an advantage of enabling thinness, light weight and low power consumption, it is widely used in various electronic devices.
In addition, a liquid crystal display device is generally provided with a patterned interlayer insulating film.
For the formation of this interlayer insulating film, photosensitive resin compositions are widely used because the number of steps for obtaining a required pattern shape is small and sufficient flatness is obtained.

  For example, in Patent Document 1, as a so-called chemical amplification type photosensitive resin composition, “(A-1) a polymer component containing a polymer satisfying at least one of the following (1) and (2), (1) (A1-1) a structural unit having a group in which an acid group is protected with an acid-decomposable group, and (a1-2) a polymer having a structural unit having a crosslinkable group, or (2) a structural unit (a1- 1) and a polymer having the structural unit (a1-2), (B-1) a photoacid generator, and (C-1) a photosensitive resin composition containing a solvent ”. [Claim 1]) Further, as an NQD (naphthoquinone diazide) type photosensitive resin composition, “(A-2) (a2-1) a structural unit having an acid group and (a2-2) a crosslinkable group. Polymer component containing structural unit having, (B-2) quinonediazide compound, (C-2) solvent The photosensitive resin composition containing "is described ([Claim 2]).

JP 2014-197155 A

  On the other hand, Patent Document 1 describes a liquid crystal display device having a cured film obtained by curing a photosensitive resin composition as an interlayer insulating film ([0189] [0190]). In a known liquid crystal display device, it is necessary to provide an alignment film on the interlayer insulating film in order to align liquid crystal molecules used in the liquid crystal cell.

  Accordingly, the present invention provides a photosensitive resin composition capable of forming an interlayer insulating film that also serves as an alignment film, a method for producing a cured film using the same, a cured film, and a liquid crystal display device. And

As a result of intensive studies to achieve the above-mentioned problems, the present inventors have blended a polymer having a structural unit having a partial structure such as a fluorine-substituted hydrocarbon group and a structural unit having a photoalignment group. The present inventors have found that an interlayer insulating film that also serves as an alignment film can be formed.
That is, it has been found that the above object can be achieved by the following configuration.

[1] Photosensitive resin composition containing polymer component A1 containing polymer A1-1 containing structural unit a1 having an acid group protected by an acid-decomposable group, and photoacid generator B1 Because
Satisfy at least one of the following 1-3,
1: The polymer A1-1 further contains a structural unit a2 having a crosslinkable group 2: The polymer A1-2 further contains a structural unit a2 having a crosslinkable group as the polymer component A1 3: Crosslinking A photosensitive resin composition further comprising a crosslinking agent C1 having a functional group and a molecular weight of 1,000 or less, and satisfying at least one of the following 4 and 5.
4: The polymer A1-1 or the polymer A1-2 includes a structural unit represented by the following s1. 5: The polymer A1-3 further includes a structural unit represented by the following s1 as the polymer component A1. S1: a structural unit having at least one partial structure selected from the group consisting of a fluorine-substituted hydrocarbon group, a siloxane skeleton, and an alkyl group having 10 to 30 carbon atoms, and a structural unit having a photoalignment group [2] The photosensitive resin composition according to [1], wherein the group in which the acid group is protected with an acid-decomposable group is a group in which the acid group is protected in the form of an acetal.
[3] A photosensitive resin composition containing a polymer component A2 containing a polymer A2-1 containing a structural unit a3 having an acid group, and a quinonediazide compound B2.
Satisfy at least one of the following 1-3,
1: The polymer A2-1 further includes a structural unit a2 having a crosslinkable group 2: The polymer A2-2 further includes a polymer A2-2 including a structural unit a2 having a crosslinkable group as the polymer component A2. A photosensitive resin composition further containing a crosslinking agent C2 having a functional group and a molecular weight of 1,000 or less and satisfying at least one of the following 4 and 5.
4: The polymer A2-1 or the polymer A2-2 includes a structural unit represented by the following s1. 5: The polymer component A2 further includes a polymer A2-3 including a structural unit represented by the following s1. S1: a structural unit having at least one partial structure selected from the group consisting of a fluorine-substituted hydrocarbon group, a siloxane skeleton, and an alkyl group having 10 to 30 carbon atoms, and a structural unit having a photo-alignment group [4] The photosensitive resin composition according to any one of [1] to [3], wherein the photo-alignment group is a group that imparts orientation by a photodimerization reaction.
[5] The photosensitive resin composition according to any one of [1] to [4], wherein the photo-alignment group is a cinnamate group or a chalcone group.
[6] The photosensitive resin composition according to any one of [1] to [5], wherein the crosslinkable group is an epoxy group or an oxetanyl group.
[7] The content of the polymer having the structural unit represented by s1 is 0.1 to 20% by mass with respect to the total solid content of the composition, according to any one of [1] to [6]. Photosensitive resin composition.
[8] The photosensitive resin composition according to any one of [1] to [7], which contains an organic solvent D.
[9] A step of applying the photosensitive resin composition according to [8] to a substrate;
Removing the organic solvent D from the applied photosensitive resin composition;
Exposing the photosensitive resin composition from which the organic solvent D has been removed with actinic radiation;
Developing the exposed photosensitive resin composition with a developer;
And a step of thermally curing the developed photosensitive resin composition to obtain a cured film.
[10] A cured film obtained by curing the photosensitive resin composition according to any one of [1] to [8].
[11] A liquid crystal display device having the cured film according to [10].

  ADVANTAGE OF THE INVENTION According to this invention, the photosensitive resin composition which can form the interlayer insulation film which serves as alignment film, the manufacturing method of a cured film using the same, a cured film, and a liquid crystal display device can be provided. .

Hereinafter, the present invention will be described in detail.
The description of the constituent elements described below may be made based on typical embodiments of the present invention, but the present invention is not limited to such embodiments.
In the present specification, a numerical range expressed using “to” means a range including numerical values described before and after “to” as a lower limit value and an upper limit value.
In the description of the group (atomic group) in this specification, the description which does not describe substitution and non-substitution includes what does not have a substituent and what has a substituent. For example, the “alkyl group” includes not only an alkyl group having no substituent (unsubstituted alkyl group) but also an alkyl group having a substituent (substituted alkyl group).
In this specification, “(meth) acrylate” is a notation representing “acrylate” or “methacrylate”, “(meth) acryl” is a notation representing “acryl” or “methacryl”, and “(meth) The “) acryloyl” is a notation representing “acryloyl” or “methacryloyl”.
In this specification, solid content is solid content in 25 degreeC.
In this specification, the weight average molecular weight and number average molecular weight of a polymer are defined as polystyrene conversion values by GPC (gel permeation chromatography) measurement.

The photosensitive resin composition according to the first aspect of the present invention (hereinafter also referred to simply as “first aspect of the present invention”) has a structural unit a1 having a group in which an acid group is protected with an acid-decomposable group. The polymer component A1 containing the polymer A1-1 containing, and the photoacid generator B1, satisfying at least one of the conditions shown in 1 to 3 described later, and the conditions shown in 4 and 5 described later Is a photosensitive resin composition satisfying at least one of the above.
In addition, the photosensitive resin composition according to the second aspect of the present invention (hereinafter, also simply referred to as “second aspect of the present invention”) includes a polymer A2-1 containing a structural unit a3 having an acid group. A photosensitive resin composition containing a polymer component A2 and a quinonediazide compound B2, containing at least one of the conditions 1 to 3 described below, and satisfying at least one of the conditions 4 and 5 described below It is a thing.

The photosensitive resin composition according to the first and second aspects of the present invention contains a polymer having a structural unit represented by s1 described later as the polymer component A1 or the polymer component A2. Thus, an interlayer insulating film that also serves as an alignment film can be formed.
Although this is not clear in detail, the present inventors presume as follows.
That is, the polymer having a structural unit represented by s1 described later has a structural unit having a photo-alignable group and a structural unit having a partial structure such as a fluorine-substituted hydrocarbon group, whereby the resin composition becomes a substrate ( For example, after coating on a thin film transistor or the like, a polymer containing a structural unit having a photo-alignment group migrates (bleeds) to the vicinity of the surface of the coating film, and after thermal curing, photo-orientation occurs near the surface of the cured film. It is considered that since the functional group is unevenly distributed, it can function as an alignment film (photo-alignment film).
Next, each component such as the polymer component used in the first and second aspects of the present invention will be described in detail.

[First Aspect of the Present Invention]
The first aspect of the present invention contains the following polymer component A1 and photoacid generator B1.

[Polymer component A1]
The polymer component A1 contained in the first aspect of the present invention is a polymer component containing a polymer A1-1 containing a structural unit a1 having a group in which an acid group is protected by an acid-decomposable group.
Here, in the polymer component A1, the deprotection reaction of the acid-decomposable group in the polymer A1-1 proceeds by the action of a catalytic amount of an acidic substance generated from the photoacid generator B1 described later, and the acid group is As a result, a curing reaction is possible.
Moreover, polymer component A1 means what included the other polymer added as needed in addition to the said polymer A1-1.

In the present invention, the polymer contained in the polymer component A1 is preferably an addition polymerization type polymer, and is a polymer containing structural units derived from (meth) acrylic acid and / or its ester. Is more preferable.
Moreover, you may have structural units other than the structural unit derived from (meth) acrylic acid and / or its ester, for example, the structural unit derived from styrene, the structural unit derived from a vinyl compound, etc.
The “structural unit derived from (meth) acrylic acid and / or its ester” is also referred to as “acrylic structural unit”.

The first aspect of the present invention needs to satisfy at least one of the following conditions 1 to 3 and satisfy at least one of the conditions 4 and 5 below.
This has a crosslinkable group that contributes to curing in the polymer A1-1 containing the structural unit a1 having an acid group protected by an acid-decomposable group, or separately from the polymer A1-1. This indicates that a site or a component is necessary, and that a polymer component including a structural unit having a photoalignable group and a structural unit for unevenly distributing it on the surface is necessary.
Therefore, in the following description, it demonstrates focusing on the structural unit in a polymer required as a polymer component instead of every polymer.
(conditions)
1: The polymer A1-1 further contains a structural unit a2 having a crosslinkable group 2: The polymer A1-2 further contains a structural unit a2 having a crosslinkable group as the polymer component A1 3: Crosslinking The polymer A1-1 or the polymer A1-2 further contains a structural unit represented by the following s1 5: As the polymer component A1 It further contains a polymer A1-3 containing the structural unit represented by s1 below. S1: At least one partial structure selected from the group consisting of a fluorine-substituted hydrocarbon group, a siloxane skeleton, and an alkyl group having 10 to 30 carbon atoms. And a structural unit having a photo-alignment group

<Structural unit a1>
The polymer component A1 includes a polymer A1-1 having at least a structural unit a1 having a group in which an acid group is protected with an acid-decomposable group. When the polymer component A1 includes the polymer A1-1 having the structural unit a1, an extremely sensitive chemical amplification type resin composition can be obtained.
As the “group in which the acid group is protected with an acid-decomposable group” in the present invention, those known as an acid group and an acid-decomposable group can be used, and are not particularly limited.
Preferred examples of the acid group include a carboxyl group and a phenolic hydroxyl group.
The acid-decomposable group is a group that is relatively easily decomposed by an acid (for example, an acetal functional group such as an ester structure, a tetrahydropyranyl ester group, or a tetrahydrofuranyl ester group, which will be described later), or a group that is relatively decomposed by an acid. Difficult groups (for example, tertiary alkyl groups such as tert-butyl ester groups and tertiary alkyl carbonate groups such as tert-butyl carbonate groups).

The structural unit a1 having a group in which an acid group is protected with an acid-decomposable group is a structural unit having a protected carboxyl group in which a carboxyl group is protected with an acid-decomposable group (hereinafter referred to as “protection protected with an acid-decomposable group”). Or a structural unit having a protected phenolic hydroxyl group in which the phenolic hydroxyl group is protected with an acid-decomposable group (hereinafter referred to as “protected phenolic hydroxyl group protected with an acid-decomposable group”). It is also preferable that it is also referred to as a “structural unit”.
Hereinafter, the structural unit a1-1 having a protected carboxyl group protected with an acid-decomposable group and the structural unit a1-2 having a protected phenolic hydroxyl group protected with an acid-decomposable group will be described in this order.

<< Structural unit a1-1 having a protected carboxyl group protected with an acid-decomposable group >>
The structural unit a1-1 having a protected carboxyl group protected by the acid-decomposable group is a protective carboxyl group in which the carboxyl group of the structural unit having a carboxyl group is protected by an acid-decomposable group described in detail below. It is a structural unit.
There is no restriction | limiting in particular as a structural unit which has the said carboxyl group which can be used for the structural unit a1-1 which has the protected carboxyl group protected by the said acid-decomposable group, A well-known structural unit can be used. For example, the structural unit a1-1-1 derived from an unsaturated carboxylic acid having at least one carboxyl group in the molecule, such as an unsaturated monocarboxylic acid, an unsaturated dicarboxylic acid, or an unsaturated tricarboxylic acid, or ethylenic The structural unit a1-1-2 which has both an unsaturated group and the structure derived from an acid anhydride is mentioned.
Hereinafter, a structural unit derived from an unsaturated carboxylic acid having at least one carboxyl group in the a1-1-1 molecule used as the structural unit having a carboxyl group, and an a1-1-2 ethylenically unsaturated group And the structural unit having both the structure derived from acid anhydride and the structure derived from acid anhydride will be described in order.

<<< Structural Unit a1-1-1 Derived from Unsaturated Carboxylic Acid Having at least One Carboxyl Group in the Molecule >>>
Examples of the unsaturated carboxylic acid used in the present invention as the structural unit a1-1-1 derived from an unsaturated carboxylic acid having at least one carboxyl group in the molecule include those described in JP-A-2014-238438. And the compounds described in paragraph 0043.
Among them, from the viewpoint of developability, in order to form the structural unit a1-1-1, acrylic acid, methacrylic acid, 2- (meth) acryloyloxyethyl-succinic acid, 2- (meth) acryloyloxy It is preferable to use ethyl hexahydrophthalic acid, 2- (meth) acryloyloxyethyl-phthalic acid, or an anhydride of an unsaturated polyvalent carboxylic acid, and acrylic acid, methacrylic acid, 2- (meth) acryloyloxy More preferably, ethylhexahydrophthalic acid is used.
The structural unit a1-1-1 derived from an unsaturated carboxylic acid having at least one carboxyl group in the molecule may be composed of one kind alone, or may be composed of two or more kinds. Good.

<<< Structural unit a1-1-2 having both an ethylenically unsaturated group and a structure derived from an acid anhydride >>>
The structural unit a1-1-2 having both an ethylenically unsaturated group and a structure derived from an acid anhydride is obtained by reacting a hydroxyl group present in a structural unit having an ethylenically unsaturated group with an acid anhydride. The unit is preferably derived from a monomer.
As the acid anhydride, known ones can be used, and specifically, maleic anhydride, succinic anhydride, itaconic anhydride, phthalic anhydride, tetrahydrophthalic anhydride, hexahydrophthalic anhydride, chlorendic anhydride, etc. Dibasic acid anhydrides; acid anhydrides such as trimellitic anhydride, pyromellitic anhydride, benzophenonetetracarboxylic anhydride, biphenyltetracarboxylic anhydride, and the like. Among these, phthalic anhydride, tetrahydrophthalic anhydride, or succinic anhydride is preferable from the viewpoint of developability.
The reaction rate of the acid anhydride with respect to the hydroxyl group is preferably 10 to 100 mol%, more preferably 30 to 100 mol%, from the viewpoint of developability.

(Acid-decomposable group that can be used for the structural unit a1-1)
As the acid-decomposable group that can be used for the structural unit a1-1 having a protected carboxyl group protected by the acid-decomposable group, the above-mentioned acid-decomposable group can be used.
Among these acid-decomposable groups, the carboxyl group is a protected carboxyl group protected in the form of an acetal, so that the basic physical properties of the resin composition, particularly sensitivity and pattern shape, contact hole formation, and storage of the resin composition It is preferable from the viewpoint of stability. Furthermore, among the acid-decomposable groups, it is more preferable from the viewpoint of sensitivity that the carboxyl group is a protected carboxyl group protected in the form of an acetal represented by the following formula a1-10. In addition, when the carboxyl group is a protected carboxyl group protected in the form of an acetal represented by the following formula a1-10, the entire protected carboxyl group is-(C = O) -O-CR ¹⁰¹ R ¹⁰² ( OR ¹⁰³ ).

In formula a1-10, R ¹⁰¹ and R ¹⁰² each independently represent a hydrogen atom or an alkyl group, except that R ¹⁰¹ and R ¹⁰² are both hydrogen atoms. R ¹⁰³ represents an alkyl group. R ¹⁰¹ or R ¹⁰² and R ¹⁰³ may be linked to form a cyclic ether.

In formula a1-10, R ^{101 to} R ¹⁰³ each independently represents a hydrogen atom or an alkyl group, and the alkyl group may be linear, branched, or cyclic. Here, both R ¹⁰¹ and R ¹⁰² do not represent a hydrogen atom, and at least one of R ¹⁰¹ and R ¹⁰² represents an alkyl group.

In the above formula a1-10, when R ¹⁰¹ , R ¹⁰² and R ¹⁰³ represent an alkyl group, the alkyl group may be linear, branched or cyclic.
The linear or branched alkyl group preferably has 1 to 12 carbon atoms, more preferably 1 to 6 carbon atoms, and still more preferably 1 to 4 carbon atoms. Specifically, methyl group, ethyl group, n-propyl group, i-propyl group, n-butyl group, i-butyl group, sec-butyl group, tert-butyl group, n-pentyl group, neopentyl group, n Examples include -hexyl group, texyl group (2,3-dimethyl-2-butyl group), n-heptyl group, n-octyl group, 2-ethylhexyl group, n-nonyl group, and n-decyl group.

  The cyclic alkyl group preferably has 3 to 12 carbon atoms, more preferably 4 to 8 carbon atoms, and still more preferably 4 to 6 carbon atoms. Examples of the cyclic alkyl group include a cyclopropyl group, a cyclobutyl group, a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, a cyclooctyl group, a norbornyl group, and an isobornyl group.

The alkyl group may have a substituent, and examples of the substituent include a halogen atom, an aryl group, and an alkoxy group. When it has a halogen atom as a substituent, R ¹⁰¹ , R ¹⁰² and R ¹⁰³ become a haloalkyl group, and when it has an aryl group as a substituent, R ¹⁰¹ , R ¹⁰² and R ¹⁰³ become an aralkyl group.
As said halogen atom, a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom are illustrated, Among these, a fluorine atom or a chlorine atom is preferable.
Moreover, as said aryl group, a C6-C20 aryl group is preferable and a C6-C12 aryl group is more preferable. Specifically, a phenyl group, an α-methylphenyl group, a naphthyl group and the like can be exemplified, and as an entire alkyl group substituted with an aryl group, that is, as an aralkyl group, a benzyl group, an α-methylbenzyl group, a phenethyl group, A naphthylmethyl group etc. can be illustrated.
As said alkoxy group, a C1-C6 alkoxy group is preferable, a C1-C4 alkoxy group is more preferable, and a methoxy group or an ethoxy group is still more preferable.
Further, when the alkyl group is a cycloalkyl group, the cycloalkyl group may have a linear or branched alkyl group having 1 to 10 carbon atoms as a substituent, and the alkyl group is linear Or a branched alkyl group, it may have a cycloalkyl group having 3 to 12 carbon atoms as a substituent.
These substituents may be further substituted with the above substituents.

In the above formula a1-10, when R ¹⁰¹ , R ¹⁰² and R ¹⁰³ represent an aryl group, the aryl group preferably has 6 to 12 carbon atoms, and more preferably 6 to 10 carbon atoms. The aryl group may have a substituent, and preferred examples of the substituent include an alkyl group having 1 to 6 carbon atoms. Examples of the aryl group include a phenyl group, a tolyl group, a xylyl group, a cumenyl group, and a 1-naphthyl group.

R ¹⁰¹ , R ¹⁰² and R ¹⁰³ can be bonded together to form a ring together with the carbon atom to which they are bonded. Examples of the ring structure when R ¹⁰¹ and R ¹⁰² , R ¹⁰¹ and R ¹⁰³ or R ¹⁰² and R ¹⁰³ are bonded include a cyclobutyl group, a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, a tetrahydrofuranyl group, an adamantyl group, and a tetrahydropyrani group. And the like.

In the above formula a1-10, it is preferable that any one of R ¹⁰¹ and R ¹⁰² is a hydrogen atom or a methyl group.

  As the radical polymerizable monomer used for forming the structural unit having a protected carboxyl group represented by the formula a1-10, a commercially available one may be used, or one synthesized by a known method may be used. You can also. For example, it can be synthesized by a synthesis method described in paragraphs 0037 to 0040 of JP2011-221494A.

  A first preferred embodiment of the structural unit a1-1 having a protected carboxyl group protected by the acid-decomposable group is a structural unit represented by the following formula.

In the formula, R ¹ and R ² each independently represent a hydrogen atom, an alkyl group or an aryl group, at least ^one of R ¹ and R ² is an alkyl group or an aryl group, and R ³ is an alkyl group or Represents an aryl group, R ¹ or R ² and R ³ may be linked to form a cyclic ether, R ⁴ represents a hydrogen atom or a methyl group, and X represents a single bond or an arylene group;

When R ¹ and R ² are alkyl groups, an alkyl group having 1 to 10 carbon atoms is preferable. When R ¹ and R ² are aryl groups, a phenyl group is preferred. R ¹ and R ² are preferably each independently a hydrogen atom or an alkyl group having 1 to 4 carbon atoms.
R ³ represents an alkyl group or an aryl group, preferably an alkyl group having 1 to 10 carbon atoms,
1-6 alkyl groups are more preferred.
X represents a single bond or an arylene group, and a single bond is preferable.

  A second preferred embodiment of the structural unit a1-1 having a protected carboxyl group protected by the acid-decomposable group is a structural unit represented by the following formula.

In the formula, R ¹²¹ represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, L ¹ represents a carbonyl group or a phenylene group, and R ^{122 to} R ¹²⁸ each independently represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms. Represents an alkyl group.

R ¹²¹ is preferably a hydrogen atom or a methyl group.
L ¹ is preferably a carbonyl group.
R ^{122 to} R ¹²⁸ are preferably a hydrogen atom.

  Preferable specific examples of the structural unit a1-1 having a protected carboxyl group protected by the acid-decomposable group include the following structural units. R represents a hydrogen atom or a methyl group.

<< Structural unit a1-2 having a protected phenolic hydroxyl group protected with an acid-decomposable group >>
Examples of the structural unit a1-2 having a protected phenolic hydroxyl group protected with an acid-decomposable group include a structural unit in a hydroxystyrene-based structural unit and a novolac-based resin.
Among these, a structural unit derived from hydroxystyrene or α-methylhydroxystyrene is preferable from the viewpoint of sensitivity.
Moreover, as a structural unit having a phenolic hydroxyl group, the structural units described in paragraphs 0065 to 0073 of JP-A-2014-238438 are also preferable from the viewpoint of sensitivity.

(Preferred embodiment of the structural unit a1)
When the polymer having the structural unit a1 substantially does not have the following structural unit a2, the structural unit a1 is preferably 20 to 100 mol%, preferably 30 to 90 mol in the polymer having the structural unit a1. % Is more preferable.
When the polymer having the structural unit a1 has the following structural unit a2, the structural unit a1 is preferably 3 to 70 mol% from the viewpoint of sensitivity in the polymer having the structural unit a1 and the structural unit a2. 10-60 mol% is more preferable. In particular, when the structural unit a1 is a structural unit having a protected carboxyl group in which the carboxyl group is protected in the form of an acetal, 20 to 50 mol% is preferable.
In the present invention, when the content of the “structural unit” is defined in terms of molar ratio, the “structural unit” is synonymous with the “monomer unit”. In the present invention, the “monomer unit” may be modified after polymerization by a polymer reaction or the like. The same applies to the following.

  The structural unit a1-1 having a protected carboxyl group protected with an acid-decomposable group is faster in development than the structural unit a1-2 having a protected phenolic hydroxyl group protected with the acid-decomposable group. There is. Therefore, when it is desired to develop quickly, the structural unit a1-1 having a protected carboxyl group protected with an acid-decomposable group is preferred. Conversely, when it is desired to delay development, it is preferable to use the structural unit a1-2 having a protected phenolic hydroxyl group protected with an acid-decomposable group.

<Structural unit a2>
The polymer component A1 preferably contains a polymer having a structural unit a2 having a crosslinkable group. In addition, as shown in the conditions 1-3 mentioned above, when it does not contain the crosslinking agent C1 mentioned later, polymer A1-1 which has at least the structural unit a1 which has the group in which the acid group was protected by the acid-decomposable group. Must further contain a structural unit a2 having a crosslinkable group or another polymer A1-2 having a structural unit a2 having a crosslinkable group.

The crosslinkable group is not particularly limited as long as it is a group that causes a curing reaction by heat treatment.
As a mode of the constituent unit having a preferred crosslinking group, represented by an epoxy group, oxetanyl _{group, -NH-CH 2 -O-R} (R represents a hydrogen atom or an alkyl group having 1 to 20 carbon atoms.) And a structural unit containing at least one selected from the group consisting of a group, an ethylenically unsaturated group, and a blocked isocyanate group, an epoxy group, an oxetanyl group, —NH—CH ₂ —O—R (R is hydrogen It is preferably a structural unit containing at least one selected from the group consisting of a group represented by an atom or an alkyl group having 1 to 20 carbon atoms, a (meth) acryloyl group, and a blocked isocyanate group. , epoxy group, oxetanyl group, _{and, -NH-CH 2 -O-R} (R represents. a hydrogen atom or an alkyl group having 1 to 20 carbon atoms) selected from the group consisting of groups represented by And more preferably a structural unit comprising one or even without.

<< Structural Unit a2-1 Having Epoxy Group and / or Oxetanyl Group >>
The polymer component A1 preferably contains a polymer having a structural unit a2-1 having an epoxy group and / or an oxetanyl group. A 3-membered cyclic ether group is also called an epoxy group, and a 4-membered cyclic ether group is also called an oxetanyl group.
The structural unit a2-1 having the epoxy group and / or oxetanyl group only needs to have at least one epoxy group or oxetanyl group in one structural unit, and includes one or more epoxy groups and one or more epoxy groups. It may have an oxetanyl group, two or more epoxy groups, or two or more oxetanyl groups, and is not particularly limited, but preferably has a total of 1 to 3 epoxy groups and / or oxetanyl groups. It is more preferable to have one or two groups and / or oxetanyl groups in total, and it is even more preferable to have one epoxy group or oxetanyl group.

Specific examples of the radical polymerizable monomer used to form the structural unit having an epoxy group include, for example, glycidyl acrylate, glycidyl methacrylate, glycidyl α-ethyl acrylate, and glycidyl α-n-propyl acrylate. Glycidyl α-n-butyl acrylate, 3,4-epoxybutyl acrylate, 3,4-epoxybutyl methacrylate, 3,4-epoxycyclohexylmethyl acrylate, 3,4-epoxycyclohexyl methacrylate Methyl, α-ethylacrylic acid-3,4-epoxycyclohexylmethyl, o-vinylbenzyl glycidyl ether, m-vinylbenzyl glycidyl ether, p-vinylbenzyl glycidyl ether, described in paragraphs 0031 to 0035 of Japanese Patent No. 4168443 Alicyclic epoch Such compounds may be mentioned containing shea skeleton, the contents of which are incorporated herein.
Specific examples of the radical polymerizable monomer used for forming the structural unit having an oxetanyl group include, for example, a (meth) acryl having an oxetanyl group described in paragraphs 0011 to 0016 of JP-A No. 2001-330953. Acid esters, and the like, the contents of which are incorporated herein.
Specific examples of the radical polymerizable monomer used for forming the structural unit a2-1 having the epoxy group and / or oxetanyl group include a monomer having a methacrylic ester structure and an acrylic ester structure. A monomer is preferred.

  Among these, preferred are glycidyl methacrylate, 3,4-epoxycyclohexylmethyl acrylate, 3,4-epoxycyclohexylmethyl methacrylate, (3-ethyloxetane-3-yl) methyl acrylate, and methacrylic acid. Acid (3-ethyloxetane-3-yl) methyl. These structural units can be used individually by 1 type or in combination of 2 or more types.

  Preferable specific examples of the structural unit a2-1 having an epoxy group and / or oxetanyl group include the following structural units. R represents a hydrogen atom or a methyl group.

<< Structural unit a2-2 having an ethylenically unsaturated group >>
Another example of the structural unit a2 having a crosslinkable group includes a structural unit a2-2 having an ethylenically unsaturated group. The structural unit a2-2 having an ethylenically unsaturated group is preferably a structural unit having an ethylenically unsaturated group in the side chain, having an ethylenically unsaturated group at the terminal, and having 3 to 16 carbon atoms. The structural unit having

  In addition, regarding the structural unit a2-2 having an ethylenically unsaturated group, refer to the description of paragraphs 0072 to 0090 of JP2011-215580A and the description of paragraphs 0013 to 0031 of JP2008-256974A. The contents of which are incorporated herein by reference.

<<<-NH-CH ₂ —O—R (R represents a hydrogen atom or an alkyl group having 1 to 20 carbon atoms) A group having a group represented by a2-3 >>
As another example of the structural unit a2 having the crosslinkable group, it has a group represented by —NH—CH ₂ —O—R (R represents a hydrogen atom or an alkyl group having 1 to 20 carbon atoms). The structural unit a2-3 is also preferable. By having the structural unit a2-3, a curing reaction can be caused by a mild heat treatment, and a cured film having excellent characteristics can be obtained. Here, R is preferably an alkyl group having 1 to 20 carbon atoms, more preferably an alkyl group having 1 to 9 carbon atoms, and still more preferably an alkyl group having 1 to 4 carbon atoms. The alkyl group may be a linear, branched or cyclic alkyl group, but is preferably a linear or branched alkyl group. The structural unit a2-3 is more preferably a structural unit having a group represented by the following formula a2-30.

In Formula a2-30, R ³¹ represents a hydrogen atom or a methyl group, and R ³² represents an alkyl group having 1 to 20 carbon atoms.

R ³² is preferably an alkyl group having 1 to 9 carbon atoms, and more preferably an alkyl group having 1 to 4 carbon atoms. The alkyl group may be a linear, branched or cyclic alkyl group, but is preferably a linear or branched alkyl group.
Specific examples of R ³² include a methyl group, an ethyl group, an n-butyl group, an i-butyl group, a cyclohexyl group, and an n-hexyl group. Of these, an i-butyl group, an n-butyl group, and a methyl group are preferable.

(Preferred embodiment of structural unit a2)
When the polymer having the structural unit a2 does not have the structural unit a1, the structural unit a2 is preferably 5 to 90 mol%, and more preferably 20 to 80 mol%, in the polymer having the structural unit a2.
When the polymer having the structural unit a2 has the structural unit a1, the content of the structural unit a2 is preferably 1 to 70 mol% in the polymer having the structural unit a1 and the structural unit a2, and 3 to 60 Mole% is more preferable.
In the present invention, the structural unit a2 is preferably contained in an amount of 0 to 70 mol%, more preferably 0 to 50 mol% in all the structural units of the polymer component A1, regardless of any embodiment. In addition, as above-mentioned, when content of the structural unit a2 is 0 mol%, it is necessary to contain the crosslinking agent C1 mentioned later.
Within the range of the above numerical values, the etching resist residue on the surface of the cured film after peeling off the etching resist on the inorganic film laminated in the subsequent step of the cured film obtained from the resin composition is small and good.

<Structural unit indicated by s1>
The polymer component A1 contains a polymer containing a structural unit represented by s1 below (hereinafter also referred to as “structural unit s1”). In addition, as shown in the conditions 4 and 5 described above, the polymer A1-1 having at least the structural unit a1 having (a) a group in which an acid group is protected by an acid-decomposable group is further included in the structural unit s1. (B) an embodiment in which another polymer A1-2 having a structural unit a2 having a crosslinkable group further has a structural unit s1, and (c) another polymer A1-3 has a structural unit s1. Any of the embodiments may be used.
s1: a structural unit having at least one partial structure selected from the group consisting of a fluorine-substituted hydrocarbon group, a siloxane skeleton and an alkyl group having 10 to 30 carbon atoms (hereinafter also referred to as “unevenly-distributed group”), and Constituent unit having photo-alignment group

<< Constitutional unit having a partial structure of a fluorine-substituted hydrocarbon group >>
The fluorine-substituted hydrocarbon group may be a hydrocarbon group substituted with at least one fluorine atom, and is at least one of an alkyl group or an alkylene group (hereinafter abbreviated as “alkyl group etc.” in this paragraph). Examples include alkyl groups in which hydrogen atoms are substituted with fluorine atoms, and alkyl groups in which all hydrogen atoms such as alkyl groups are substituted with fluorine atoms are more preferable.

  Such a fluorine-substituted hydrocarbon group is preferably a group represented by the following general formula I from the viewpoint of uneven distribution.

In general formula I, R ² represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, and * represents a site connected to a polymer chain. X represents a single bond or a divalent linking group, m represents an integer of 1 to 3, n represents an integer of 1 or more, and r represents 0 or an integer of 1 to 2. When m is 1, the plurality of R ² may be the same or different.

M in the general formula I represents an integer of 1 to 3, and is preferably 1 or 2.
N in the general formula I represents an integer of 1 or more, preferably an integer of 1 to 10, more preferably an integer of 1 to 4, and particularly preferably 1 or 2.
R in the general formula I represents 0 or an integer of 1 to 2, preferably 1 or 2, and more preferably 2.
Moreover, the connection part to the polymer chain represented by * may be directly connected to the main chain of the polymer such as the above-mentioned polymer A1-1, or a polyoxyalkylene group, an alkylene group, an ester group, a urethane group. And may be bonded via a divalent linking group such as a cyclic alkylene group which may contain a hetero atom, poly (caprolactone), or amino group. It is preferable that they are bonded via a polyoxyalkylene group.

Examples of the alkyl group having 1 to 4 carbon atoms represented by R ² in the general formula I include methyl group, ethyl group, propyl group, isopropyl group, n-butyl group, isobutyl group, tert-butyl group and the like. Preferably a hydrogen atom or a methyl group, more preferably a hydrogen atom.
In the general formula I, when X is a single bond, it means that the polymer main chain and the carbon atom to which R ² is bonded are directly connected.
When X is a divalent linking group, examples of the linking group include —O—, —S—, —N (R ⁴ ) —, —CO—, and the like. Among these, -O- is more preferable. Here, R ⁴ represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms. Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, an isopropyl group, an n-butyl group, an isobutyl group, and a tert-butyl group, and a hydrogen atom and a methyl group are preferable.

  As a method of introducing a fluorine-substituted hydrocarbon group into a polymer, a method of introducing a fluorine-substituted hydrocarbon group into a polymer by a polymer reaction; a monomer having a fluorine-substituted hydrocarbon group (hereinafter referred to as “fluorine-substituted hydrocarbon group-containing” And a method of introducing a structural unit having a fluorine-substituted hydrocarbon group into the polymer.

  In the method of copolymerizing a fluorine-substituted hydrocarbon group-containing monomer and introducing a structural unit having a fluorine-substituted hydrocarbon group into the polymer, the fluorine-substituted hydrocarbon group-containing monomer is a monomer represented by the following general formula II: It is mentioned as preferable.

In General Formula II, R ¹ represents a hydrogen atom, a halogen atom, a methyl group that may have a substituent, or an ethyl group that may have a substituent. R ² , X, m, n and r all have the same meaning as R ² , X, m, n and r in formula I, and preferred examples are also the same.
In addition, as a halogen atom represented by R < ¹ > in General formula II, a fluorine atom, a chlorine atom, a bromine atom is mentioned, for example.

  In addition, regarding the method for producing such a fluorine-substituted hydrocarbon group-containing monomer, for example, “Synthesis and function of fluorine compound” (supervision: Nobuo Ishikawa, published by CMC Co., 1987), pages 117 to 118, “Chemistry of Organic Fluorine Compounds II” (Monograph 187, Ed by Milos Hudricky and Attila E. Pavlath, American Chemical Society, pages 1975-1995).

Specific examples of the monomer represented by the general formula II include tetrafluoroisopropyl methacrylate represented by the following formula (IIa), hexafluoroisopropyl methacrylate represented by the following formula (IIb), and the like.
Other specific examples include compounds described in paragraph numbers [0058] to [0061] of JP 2010-18728 A. Of these, a structure in which a fluorine-substituted hydrocarbon group is bonded to a polyoxyalkylene group is preferable.

<< Constitutional Unit Having Partial Structure of Siloxane Skeleton >>
The siloxane skeleton is not particularly limited as long as it has “—Si—O—Si—”, and preferably contains a polyoxyalkylene group.

In the present invention, from the viewpoint of uneven distribution, the siloxane skeleton is copolymerized with a compound having a (meth) acryloyloxy group and an alkoxysilyl group, and a structural unit having a partial structure of the siloxane skeleton is introduced into the polymer. It is preferable.
Here, as the alkoxysilyl group, for example, a group represented by the following formula (X) is preferable.

In said formula (X), R < ³ > -R < ⁵ > represents a hydrogen atom, a hydroxyl group, a halogen atom, an alkyl group, or an alkoxy group each independently, and at least 1 is an alkoxy group. * Represents a binding position.

In the formula (X), at least one of R ^{3 to} R ⁵ is an alkoxy group, and the alkoxy group is preferably an alkoxy group having 1 to 15 carbon atoms, and an alkoxy group having 1 to 8 carbon atoms. It is more preferably a group, more preferably an alkoxy group having 1 to 4 carbon atoms, and particularly preferably an ethoxy group or a methoxy group.
In the present invention, it is preferable that two of R ^{3 to} R ⁵ are alkoxy groups and one is an alkyl group, or three are alkoxy groups. Among these, an embodiment in which three are alkoxy groups, that is, a trialkoxysilyl group is more preferable.

  Specific examples of the compound having an alkoxysilyl group and a (meth) acryloyloxy group include, for example, 3- (meth) acryloxypropylmethyldimethoxysilane, 3- (meth) acryloxypropyltrimethoxysilane. , 3- (meth) acryloxypropylmethyldiethoxysilane, 3- (meth) acryloxypropyltriethoxysilane, and the like.

  In the present invention, from the viewpoint of uneven distribution, the siloxane skeleton is polymerized with a compound represented by the following structural formula (A) (hereinafter also referred to as “specific siloxane compound”), and the siloxane skeleton is converted into a polymer. It is preferable to introduce.

In the structural formula (A), R ⁷ represents a linear or branched alkylene group having 2 to 6 carbon atoms which may have a substituent such as a hydroxyl group, an amine group, or a halogen atom, or the following structural formula (B ) Represents a divalent linking group.

In the structural formula (B), R ⁴ represents a hydrogen atom, a methyl group, or an ethyl group. n1, n2, and n3 are each independently an integer of 0 to 100. Here, two or more R ^{4 s} exist in the structural formula (B), but they may be different or the same.

In the structural formula (A), x1, x2, and x3 are integers whose total satisfies 1 to 100.
Moreover, y1 is an integer of 1-30.
In the structural formula (A), X ² is a single bond or a divalent group represented by the following structural formula (C).

In the above structural formula (C), R ⁸ represents a linear or branched alkylene group having 1 to 6 carbon atoms which may have a substituent such as a hydroxyl group, an amine group, or a halogen atom, and Q ¹ and Q ² represents an oxygen atom, a sulfur atom, or —NRB—, and Q ¹ and Q ² may be different from each other or the same. RB represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms.
In the structural formula (C), Q ² is bonded to R ⁷ in the structural formula (A).

In the structural formula (A), Y ² represents a monovalent group represented by the following structural formula (D) to the following structural formula (F).

In the structural formulas (D) to (F), R ⁵ represents a hydrogen atom or a linear or branched alkyl group having 1 to 6 carbon atoms.

In the structural formula (A), Z ¹ , Z ² , and Z ³ each independently represent a monovalent group represented by the following structural formula (G).

In the structural formula (G), R ⁶ represents an unsubstituted alkyl group having 1 to 4 carbon atoms, y ² represents an integer of 1 to 100, preferably an integer of 1 to 50, and more preferably 1 to 20 Is an integer.

Examples of the siloxane skeleton include structures described in paragraph numbers [0092] to [0094] of JP 2010-18728 A, but are not limited thereto. Absent.
Of these, a structure in which a siloxane structure is bonded to a polymer via a polyoxyalkylene group is preferable.

<< Constituent unit having a partial structure of an alkyl group having 10 to 30 carbon atoms >>
The alkyl group having 10 to 30 carbon atoms may contain a branched structure or a cyclic structure, but the linear structure portion preferably has a carbon number in the range of 10 to 30, and all have a linear structure. Is more preferable.
Moreover, it is preferable that carbon number of an alkyl group is 10-20.

  Specifically, it is preferable to have a group represented by the following general formula (a3-1) in the side chain of the polymer.

In formula _{(a3-1), n a3} represents an integer of 10 to 30, * represents a position for coupling to the main chain or side chain of the polymer. It is preferable that _na3 is an integer of 10-20.

Although there is no particular limitation on the method for introducing the structure of the general formula (a3-1) into the main chain or side chain of the polymer, for example, a monomer having the structure of (a3-1) is appropriately selected and applied at the time of synthesis. Then, the structure of (a3-1) can be introduced into the repeating unit of the obtained polymer.
Moreover, although the commercially available compound can be used for the monomer which has the structure of the said general formula (a3-1), it is contained in (a3-1) with respect to the commercially available monomer which does not have the structure of (a3-1). A desired structure may be introduced as appropriate. There is no limitation on the method of introducing the structure (a3-1) into a commercially available monomer, and a known method may be applied as appropriate.

  The monomer having the structure of the general formula (a3-1) can be appropriately selected according to the main chain structure of the polymer. For example, if the polymer has a (meth) acrylic structure in the main chain, the following general It is preferable to use a monomer represented by the formula (a3-2).

In the general formula (a3-2), R ³² represents a hydrogen atom, a methyl group, an ethyl group, or a halogen atom, X ³¹ represents a divalent linking group, and R ³³ represents a single bond or an alkyleneoxy group. Represents. Moreover, _na3 is synonymous also including the said general formula (a3-1) and a preferable range.

In General Formula (a3-2), R ³² represents a hydrogen atom, a methyl group, an ethyl group, or a halogen atom, more preferably a hydrogen atom or a methyl group, and still more preferably a methyl group.

In the general formula (a3-2), examples of the divalent linking group as X ³¹ include —O—, —S—, —N (R ⁴ ) —, and the like. Among these, -O- is more preferable.
Here, R ⁴ represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms. The alkyl group may be a linear structure or a branched structure, and examples thereof include a methyl group, an ethyl group, a propyl group, an isopropyl group, an n-butyl group, an isobutyl group, and a tert-butyl group. Preferably, they are a hydrogen atom and a methyl group.

Further, the alkyleneoxy group for R ³³ preferably has 1 to 4 carbon atoms. The alkyleneoxy group may have a branched structure. Moreover, even if it has a substituent, it may be unsubstituted. Examples of the substituent that may have include a halogen atom. Specific examples of the alkyleneoxy group include a methyleneoxy group, an ethyleneoxy group, a propyleneoxy group, a butyleneoxy group, and the like.

Among these, R ³³ is preferably an unsubstituted linear alkyleneoxy group having 1 to 4 carbon atoms or a single bond, and more preferably a single bond.

By using the monomer represented by the general formula (a3-2), a polymer having a repeating unit represented by the following general formula (U-a3-1) can be obtained.
Such a polymer is one of the preferred forms having a repeating unit represented by the general formula (U-a3-1).

In formula _{(U-a3-1), n a3} are synonymous, including the preferred ranges as in the general formula ^{(a3-1), R 32, X} 31, and ^{R 33,} the above general formula (A3- It is synonymous including 2) and a preferable range.

  Specific examples of the monomer represented by general formula (a3-2) are shown below. However, the present invention is not limited to these.

<< Structural Unit Having Photo-Orienting Group >>
The polymer component A1 has a photoalignment group together with the above-described structural unit having at least one partial structure selected from the group consisting of a fluorine-substituted hydrocarbon group, a siloxane skeleton, and an alkyl group having 10 to 30 carbon atoms. A polymer having a structural unit is contained.

Here, the photo-alignment group refers to a photo-reactive group that imparts orientation by a photodimerization reaction or a photoisomerization reaction.
Examples of the group that imparts orientation by a photodimerization reaction include groups introduced from at least one derivative selected from the group consisting of maleimide derivatives, cinnamic acid derivatives, and coumarin derivatives. Preferred examples include cinnamate group and chalcone group. In addition, as the cinnamate group and the chalcone group, for example, the following structure (in the following formula, * represents a connecting site to a polymer chain, and R represents a hydrogen atom or a monovalent organic group) is introduced. In addition, the connecting site to the polymer chain represented by * may be directly connected to the main chain of the polymer such as the above-described polymer A1-1 or bonded via a divalent connecting group. It may be. The monovalent organic group represented by R is preferably an alkyl group or an aryl group. Moreover, 1-10 are preferable and, as for carbon number of the monovalent organic group which R represents, 1-7 are more preferable.

On the other hand, as the reactive group that isomerizes by the action of light, specifically, for example, a group composed of a skeleton of at least one compound selected from the group consisting of an azobenzene compound, a stilbene compound, and a spiropyran compound is preferable. It is mentioned in.
Among these, from the viewpoint of expressing the difference between patterning exposure and alignment exposure, a group that imparts orientation by a photodimerization reaction that reacts with shorter wave light is preferable, and a cinnamate group or a chalcone group is more preferable. In addition, patterning exposure is synonymous with the exposure process in the manufacturing method of the hardened | cured material of this invention mentioned later here, and orientation exposure is in order to provide orientation after the resin composition is apply | coated to the board | substrate. And is the same as the photo-alignment treatment in the method for producing a cured product of the present invention described later.

The main chain skeleton of the polymer having a structural unit having a photo-alignment group is not particularly limited, but the side chain molecular design is diversified, and the main chain formation by radical polymerization reaction of an ethylenically unsaturated compound is simple. For the reason, a polymer having a repeating unit represented by the following general formula (III) is preferable.

(In General Formula (III), R ¹ represents a hydrogen atom or an alkyl group. X represents an arylene group, — (C═O) —O—, or — (C═O) —NR— (R represents a hydrogen atom or Represents an alkyl group having 1 to 4 carbon atoms, L represents a single bond or a divalent linking group, and P represents a photo-alignment group.)

Here, in the general formula (III), R ¹ represents a hydrogen atom or an alkyl group, and the alkyl group is an alkyl group having 1 to 4 carbon atoms (for example, a methyl group, an ethyl group, an n-propyl group, an isopropyl group). , N-butyl group, etc.) are preferable. R ¹ is preferably a hydrogen atom or a methyl group.
In general formula (III), L represents a single bond or a divalent linking group, and the divalent linking group may be -O-, -S-, an alkylene group, an arylene group, or a combination thereof. Is preferred. The alkylene group represented by L may be a linear, branched, or cyclic structure, but is preferably a linear structure. 1-10 are preferable, as for carbon number of the alkylene group which L represents, 1-6 are more preferable, and 2-4 are more preferable. Moreover, as an arylene group which L represents, a phenylene group, a tolylene group, a xylylene group etc. are mentioned, A phenylene group is preferable.
In general formula (III), P represents a photo-alignment group, and specific examples thereof include chalcone group, cinnamate group, stilbenyl group, maleimide group, and azobenzyl group. Of these, chalcone groups and cinnamate groups are more preferred. In addition, the photoalignable group represented by P may have a substituent as long as the photoalignment is not lost. Specific examples of the substituent include a halogeno group, an alkyl group, and an aryl group, and an alkyl group or an aryl group is preferable. 1-10 are preferable and, as for carbon number of said alkyl group or aryl group, 1-7 are more preferable.

  Although the preferable specific example of the polymer which has a repeating unit represented by general formula (III) below is shown, this invention is not limited to these.

The polymer having a repeating unit represented by the general formula (III) may be synthesized by (a) a method in which a corresponding monomer is polymerized to directly introduce a photoreactive group, and (b) any functional group. It may be synthesized by a method in which a photoreactive group is introduced into a polymer obtained by polymerizing a monomer having a polymer reaction. Moreover, it can also synthesize | combine combining the method of (a) and (b).
Here, radical polymerization, cation polymerization, anion polymerization, etc. are mentioned as a polymerization reaction which can be utilized in the method of (a) and (b) mentioned above.

  In addition, the polymer having a repeating unit represented by the general formula (III) may be a copolymer composed of a plurality of repeating units represented by the general formula (III). ) May be a copolymer containing a repeating unit other than (for example, a repeating unit not containing an ethylenically unsaturated group).

(Preferred embodiment of the structural unit s1)
The structural unit s1 is preferably 0.01 to 10 mol%, more preferably 0.1 to 5 mol%, still more preferably 0.1 to 3 mol%, based on the structural units of all polymer components. 1-2 mol% is particularly preferred, and 0.5-2 mol% is most preferred.
When the polymer having the structural unit s1 has the structural unit a1 and the structural unit a2, the content of the structural unit s1 is preferably 20 to 90 mol% with respect to all the structural units of the polymer. Mole% is more preferable, and 20-70 mol% is still more preferable.
When the polymer having the structural unit s1 has only one of the structural unit a1 and the structural unit a2, the content of the structural unit s1 is preferably 30 to 90 mol% with respect to all the structural units of the polymer. 30 to 80 mol% is more preferable, and 30 to 70 mol% is still more preferable.
When the polymer having the structural unit s1 has neither the structural unit a1 nor the structural unit a2, the content of the structural unit s1 is preferably 40 to 95 mol% with respect to all the structural units of the polymer. 40-90 mol% is more preferable, and 40-80 mol% is still more preferable.

<Other structural units>
In the first aspect, the polymer component A1 is a polymer having a structural unit a3 having an acid group in addition to the structural unit a1, the structural unit a2, and the structural unit s1 described above, and a structural unit a4 other than these. You may contain.

<< Structural Unit a3 >>
The polymer component A1 is easily dissolved in an alkaline developer and not only has good developability, but also has excellent sensitivity, and also has excellent fine line adhesion of a cured product after development. It is preferable to contain a polymer having a3.
The acid group in the present invention means a proton dissociable group having a pKa smaller than 11. The acid group is usually incorporated into the polymer as a structural unit containing an acid group using a monomer capable of forming an acid group. By including such a structural unit containing an acid group in the polymer, the polymer tends to be easily dissolved in an alkaline developer.
Examples of the acid group used in the present invention include a carboxylic acid group, a sulfonamide group, a phosphonic acid group, a sulfonic acid group, a phenolic hydroxyl group, a sulfonylimide group, and acid anhydride groups of these acid groups, and these Examples include a group obtained by neutralizing an acid group to form a salt structure, and a carboxylic acid group and / or a phenolic hydroxyl group is preferable. Although there is no restriction | limiting in particular as said salt, An alkali metal salt, alkaline-earth metal salt, and organic ammonium salt can illustrate preferably.
The structural unit containing an acid group used in the present invention is more preferably a structural unit derived from styrene, a structural unit derived from a vinyl compound, a structural unit derived from (meth) acrylic acid and / or an ester thereof. . For example, the compounds described in JP2012-88459A, paragraphs 0021 to 0023 and paragraphs 0029 to 0044 can be used, the contents of which are incorporated herein. Among these, structural units derived from p-hydroxystyrene, (meth) acrylic acid, maleic acid, and maleic anhydride are preferable.

As the structural unit a3 having an acid group, from the viewpoint of sensitivity, a structural unit having a carboxyl group or a structural unit having a phenolic hydroxyl group is preferable, and a structural unit having a carboxyl group is more preferable.
Specific examples of the structural unit a3 having an acid group include the structural unit a1-1-1, derived from an unsaturated carboxylic acid having at least one carboxyl group in the molecule, an ethylenically unsaturated group, and an acid anhydride. Examples thereof include a structural unit a1-1-2 having a structure derived from a product and a structural unit a1-2-1 having a phenolic hydroxyl group, and preferred embodiments thereof are also the same.
Among these, as the structural unit a3 having an acid group, a structural unit derived from a compound selected from the group consisting of methacrylic acid, acrylic acid and p-hydroxystyrene (represented by any one of the following formulas a3-1 to a3-3): The structural unit derived from methacrylic acid (the structural unit represented by the following formula a3-1) or the structural unit derived from acrylic acid (the structural unit represented by the following formula a3-2). It is more preferable that it is a structural unit derived from methacrylic acid (a structural unit represented by the following formula a3-1).

(Preferred embodiment of the structural unit a3)
The structural unit a3 containing an acid group is preferably from 1 to 80 mol%, more preferably from 1 to 50 mol%, still more preferably from 5 to 40 mol%, more preferably from 5 to 30 mol%, based on the structural units of all polymer components. Is particularly preferable, and 5 to 20 mol% is most preferable.
When the polymer having the structural unit a3 has the structural unit a1 and the structural unit a2, the content of the structural unit a3 is preferably 1 to 30 mol% with respect to all the structural units of the polymer, and 3 to 20 More preferably, mol% is more preferable, and 5-15 mol% is still more preferable.
When the polymer having the structural unit a3 has only one of the structural unit a1 and the structural unit a2, the content of the structural unit a3 is preferably 1 to 50 mol% with respect to all the structural units of the polymer. 5-45 mol% is more preferable, and 10-40 mol% is still more preferable.
When the polymer having the structural unit a3 has neither the structural unit a1 nor the structural unit a2, the content of the structural unit a3 is preferably 1 to 50 mol% with respect to all the structural units of the polymer. 2-40 mol% is more preferable, and 3-30 mol% is still more preferable.

<< Structural Unit a4 >>
There is no restriction | limiting in particular as a monomer used as the structural unit a4 other than the structural unit a1, the structural unit a2, the structural unit s1, and the structural unit a3, for example, styrenes, (meth) acrylic acid alkyl ester, (meth) acrylic Examples include acid cyclic alkyl esters, (meth) acrylic acid aryl esters, unsaturated dicarboxylic acid diesters, bicyclounsaturated compounds, maleimide compounds, and unsaturated aromatic compounds.
The monomer which forms the other structural unit a4 can be used individually by 1 type or in combination of 2 or more types.

  Specific examples of the other structural unit a4 include styrene, methylstyrene, α-methylstyrene, acetoxystyrene, methoxystyrene, ethoxystyrene, chlorostyrene, methyl vinylbenzoate, ethyl vinylbenzoate, 4-hydroxybenzoic acid ( 3-methacryloyloxypropyl) ester, methyl (meth) acrylate, ethyl (meth) acrylate, n-propyl (meth) acrylate, isopropyl (meth) acrylate, 2-hydroxyethyl (meth) acrylate, (meth Examples of the structural unit include 2-hydroxypropyl acrylate, benzyl (meth) acrylate, isobornyl (meth) acrylate, acrylonitrile, and ethylene glycol monoacetoacetate mono (meth) acrylate. In addition, compounds described in paragraphs 0021 to 0024 of JP-A No. 2004-264623 can be exemplified.

  In addition, as the other structural unit a4, a structural unit derived from a monomer having a styrene or an aliphatic cyclic skeleton is preferable from the viewpoint of electrical characteristics. Specific examples include styrene, methylstyrene, α-methylstyrene, dicyclopentanyl (meth) acrylate, cyclohexyl (meth) acrylate, isobornyl (meth) acrylate, and benzyl (meth) acrylate.

  Furthermore, as the other structural unit a4, a structural unit derived from a (meth) acrylic acid alkyl ester is preferable from the viewpoint of adhesion. Specific examples include methyl (meth) acrylate, ethyl (meth) acrylate, propyl (meth) acrylate, and n-butyl (meth) acrylate, and methyl (meth) acrylate is more preferable. In all the structural units constituting the polymer, the content of the structural unit a4 is preferably 60 mol% or less, more preferably 50 mol% or less, and still more preferably 40 mol% or less. As a lower limit, although 0 mol% may be sufficient, it is preferable to set it as 1 mol% or more, for example, and it is more preferable to set it as 5 mol% or more. Within the above numerical range, various properties of the cured film obtained from the resin composition are improved.

<Combination of polymers>
As long as the polymer having the structural unit a1, the structural unit a2, the structural unit s1, the structural unit a3, and the structural unit a4 satisfies the above-described conditions 1 to 5, the combination of the structural units and the number of polymers. Is not particularly limited. In addition, as shown in the conditions 1-3 mentioned above, when it does not contain the crosslinking agent C1 mentioned later, polymer A1-1 which has at least the structural unit a1 which has the group in which the acid group was protected by the acid-decomposable group. Must further contain a structural unit a2 having a crosslinkable group or another polymer A1-2 having a structural unit a2 having a crosslinkable group.
Therefore, as the polymer component A1, for example, only the polymer A1-1 containing the structural unit a1 having a group in which an acid group is protected by an acid-decomposable group is contained, and the polymer A1-1 is a crosslinkable group. It may be a polymer that includes all of the structural unit a2, the structural unit s1, and the structural unit a3 having an acid group.
Further, as the polymer component A1, another polymer A1 including a structural unit a2 having a crosslinkable group together with the polymer A1-1 including the structural unit a1 having a group in which an acid group is protected by an acid-decomposable group. -2 may be included, and the polymer A1-2 may be a polymer including the structural unit s1 and the structural unit a3 having an acid group.
In addition, as the polymer component A1, another polymer A1 including a polymer A1-1 including a structural unit a1 having a group in which an acid group is protected by an acid-decomposable group, and a structural unit a2 having a crosslinkable group. -2 and another polymer A1-3 containing structural unit s1 may be sufficient.
Moreover, when it contains the crosslinking agent C1 mentioned later as a resin composition, as polymer component A1, polymer A1-1 containing the structural unit a1 which has the group by which the acid group was protected by the acid-decomposable group, The aspect containing another polymer A1-3 containing structural unit s1 may be sufficient.

In the first aspect of the present invention, the polymer component A1 may include a polymer having only the structural unit a3 and the structural unit a4 described above.
As such a polymer, a resin having a carboxyl group in the side chain is preferable. For example, JP-A-59-44615, JP-B-54-34327, JP-B-58-12777, JP-B-54-25957, JP-A-59-53836, JP-A-59-71048 As described, methacrylic acid copolymer, acrylic acid copolymer, itaconic acid copolymer, crotonic acid copolymer, maleic acid copolymer, partially esterified maleic acid copolymer, etc., and side chain Examples thereof include acidic cellulose derivatives having a carboxyl group, those obtained by adding an acid anhydride to a polymer having a hydroxyl group, and high molecular polymers having a (meth) acryloyl group in the side chain. “Substantially not contained” means that the weight ratio in the polymer is 1% by mass or less.

For example, benzyl (meth) acrylate / (meth) acrylic acid copolymer, 2-hydroxyethyl (meth) acrylate / benzyl (meth) acrylate / (meth) acrylic acid copolymer, described in JP-A-7-140654 2-hydroxypropyl (meth) acrylate / polystyrene macromonomer / benzyl methacrylate / methacrylic acid copolymer, 2-hydroxy-3-phenoxypropyl acrylate / polymethyl methacrylate macromonomer / benzyl methacrylate / methacrylic acid copolymer, 2 -Hydroxyethyl methacrylate / polystyrene macromonomer / methyl methacrylate / methacrylic acid copolymer, 2-hydroxyethyl methacrylate / polystyrene macromonomer / benzyl methacrylate / methacrylic acid Copolymer and the like.
In addition, JP-A-7-207211, JP-A-8-259876, JP-A-10-300922, JP-A-11-140144, JP-A-11-174224, JP-A-2000-56118 Known polymer compounds described in JP-A-2003-233179, JP-A-2009-52020, and the like can be used, and the contents thereof are incorporated herein.
These polymers may contain only 1 type and may contain 2 or more types.

  SMA 1000P, SMA 2000P, SMA 3000P, SMA 1440F, SMA 17352P, SMA 2625P, SMA 3840F (above, manufactured by Sartomer), ARUFON UC-3000, ARUFON UC-3510, ARUFON UC are commercially available as these polymers. -3900, ARUFON UC-3910, ARUFON UC-3920, ARUFON UC-3080 (above, manufactured by Toagosei Co., Ltd.), JONCRYL 690, JONCRYL 678, JONCRYL 67, JONCRYL 586 (above, made by BASF) may be used. it can.

<Molecular weight>
The molecular weight of the polymer in the polymer component A1 is a weight average molecular weight in terms of polystyrene, preferably 1,000 to 200,000, more preferably 2,000 to 50,000, and still more preferably 10,000 to 20,000. It is a range. Various characteristics are favorable in the range of said numerical value. The ratio of the number average molecular weight Mn to the weight average molecular weight Mw (dispersity, Mw / Mn) is preferably 1.0 to 5.0, and more preferably 1.5 to 3.5.
In addition, it is preferable to measure the weight average molecular weight and the number average molecular weight in the present invention by a gel permeation chromatography (GPC) method. Measurement by gel permeation chromatography in the present invention uses HLC-8020GPC (manufactured by Tosoh Corporation), and TSKgel Super HZ M-H, TSKgel Super HZ4000, TSKgel Super HZ200 (manufactured by Tosoh Corporation), 4.6 mmID as columns. It is preferable to use THF (tetrahydrofuran) as an eluent.

<Preparation method>
Various methods for synthesizing the polymer in the polymer component A1 are known. To give an example, radical polymerization including a radically polymerizable monomer used to form each of the above-mentioned structural units. It can synthesize | combine by superposing | polymerizing a monomer mixture in an organic solvent using a radical polymerization initiator. It can also be synthesized by a so-called polymer reaction.

<Content>
In the 1st aspect of this invention, it is preferable that content of polymer component A1 is 20-95 mass% with respect to the total solid of a resin composition, and it is 50-95 mass%. More preferably, it is 55-95 mass%. When the content is within this range, an organic film having good curability can be obtained.

  Moreover, in the 1st aspect of this invention, it is preferable that content of the polymer which has structural unit s1 is 0.1-20 mass% with respect to the total solid of a resin composition, 0.1 More preferably, it is 10 mass%.

[Photoacid generator B1]
The first aspect of the present invention contains a photoacid generator B1.
The photoacid generator B1 is preferably a compound that reacts with an actinic ray having a wavelength of 300 nm or more, preferably 300 to 450 nm and generates an acid, but is not limited to its chemical structure. Further, a photoacid generator that is not directly sensitive to an actinic ray having a wavelength of 300 nm or more can also be used as a sensitizer if it is a compound that reacts with an actinic ray having a wavelength of 300 nm or more and generates an acid when used in combination with a sensitizer. It can be preferably used in combination. The photoacid generator used in the present invention is preferably a photoacid generator that generates an acid having a pKa of 4 or less, more preferably a photoacid generator that generates an acid having a pKa of 3 or less, and an acid of 2 or less. Most preferred are photoacid generators that generate In the present invention, pKa basically refers to pKa in water at 25 ° C. Those that cannot be measured in water refer to those measured after changing to a solvent suitable for measurement. Specifically, the pKa described in the chemical handbook can be referred to. The acid having a pKa of 3 or less is preferably sulfonic acid or phosphonic acid, and more preferably sulfonic acid.

  Examples of the photoacid generator B1 include onium salt compounds, trichloromethyl-s-triazines, sulfonium salts, iodonium salts, quaternary ammonium salts, diazomethane compounds, imide sulfonate compounds, and oxime sulfonate compounds. it can. Among these, onium salt compounds, imide sulfonate compounds, and oxime sulfonate compounds are preferable, and onium salt compounds and oxime sulfonate compounds are particularly preferable. A photo-acid generator can be used individually by 1 type or in combination of 2 or more types.

Specific examples of trichloromethyl-s-triazines, diaryliodonium salts, triarylsulfonium salts, quaternary ammonium salts, and diazomethane compounds include compounds described in paragraphs 0083 to 0088 of JP2011-221494A; And compounds described in paragraph numbers 0013 to 0049 of JP-A-2011-105645, and the contents thereof are incorporated in the present specification.
Specific examples of the imide sulfonate compound include the compounds described in paragraphs 0065 to 0075 of WO2011 / 087011, and the contents thereof are incorporated herein.

Preferred examples of the onium salt include diaryliodonium salts and triarylsulfonium salts.
Diaryliodonium salts include diphenyliodonium trifluoroacetate, diphenyliodonium trifluoromethanesulfonate, 4-methoxyphenylphenyliodonium trifluoromethanesulfonate, 4-methoxyphenylphenyliodonium trifluoroacetate, phenyl, 4- (2′-hydroxy- 1'-tetradecaoxy) phenyliodonium trifluoromethanesulfonate, 4- (2'-hydroxy-1'-tetradecoxy) phenyliodonium hexafluoroantimonate, phenyl, 4- (2'-hydroxy-1'-tetra Decaoxy) phenyliodonium-p-toluenesulfonate is preferred.
Examples of triarylsulfonium salts include triphenylsulfonium trifluoromethanesulfonate, triphenylsulfonium trifluoroacetate, 4-methoxyphenyldiphenylsulfonium trifluoromethanesulfonate, 4-methoxyphenyldiphenylsulfonium trifluoroacetate, 4-phenylthiophenyldiphenylsulfonium. Trifluoromethanesulfonate or 4-phenylthiophenyldiphenylsulfonium trifluoroacetate is preferred.

  Preferred examples of the oxime sulfonate compound, that is, a compound having an oxime sulfonate structure include compounds having an oxime sulfonate structure represented by the following general formula (B1-1).

General formula (B1-1)

In General Formula (B1-1), R ²¹ represents an alkyl group or an aryl group. Wavy lines represent bonds with other groups.

In general formula (B1-1), any group may be substituted, and the alkyl group in R ²¹ may be linear, branched or cyclic. Acceptable substituents are described below.
As the alkyl group for R ²¹ , a linear or branched alkyl group having 1 to 10 carbon atoms is preferable. The alkyl group of R ²¹ is a halogen atom, an aryl group having 6 to 11 carbon atoms, an alkoxy group having 1 to 10 carbon atoms, or a cyclic alkyl group (such as a 7,7-dimethyl-2-oxonorbornyl group). It may be substituted with a bridged alicyclic group, preferably a bicycloalkyl group or the like.
As the aryl group for R ^21, an aryl group having 6 to 11 carbon atoms is preferable, and a phenyl group or a naphthyl group is more preferable. The aryl group of R ²¹ may be substituted with a lower alkyl group, an alkoxy group, or a halogen atom.

  It is also preferable that the compound containing the oxime sulfonate structure represented by the general formula (B1-1) is an oxime sulfonate compound described in paragraphs 0108 to 0133 of JP 2014-238438 A.

  As an imide sulfonate type compound, a naphthalene imide type compound is preferable, the description of international publication WO11 / 087011 pamphlet can be referred to, These content is integrated in this-application specification. In the present invention, in particular, trifluoromethylsulfonyloxybicyclo [2.2.1] hept-5-enedicarboximide, succinimide trifluoromethyl sulfonate, phthalimide trifluoromethyl sulfonate, N-hydroxynaphthalimide methanesulfonate, N-hydroxy- 5-norbornene-2,3-dicarboximidopropanesulfonate is preferred.

  1st aspect of this invention WHEREIN: As for content of photo-acid generator B1, 0.1-20 mass parts is preferable with respect to 100 mass parts of all the solid components of a resin composition. For example, the lower limit is more preferably 0.2 parts by mass or more, and further preferably 0.5 parts by mass or more. For example, the upper limit is more preferably 10 parts by mass or less, and still more preferably 5 parts by mass or less.

[Crosslinking agent C1]
In the first aspect of the present invention, when the above conditions 1 and 2 are not satisfied, that is, when the polymer component A1 does not contain a polymer having a crosslinkable group, the molecular weight is 1,000 or less. Contains a crosslinking agent C1. In addition, even if it is a case where the conditions 1 or 2 mentioned above are satisfy | filled, the crosslinking agent C1 may be contained.
As the crosslinking agent C1, any crosslinking agent can be used as long as it causes a crosslinking reaction by heat.
For example, a compound having two or more epoxy groups or oxetanyl groups in the molecule described below, a blocked isocyanate compound (a compound having a protected isocyanato group), an alkoxymethyl group-containing compound, or at least one ethylenic group. It is preferably at least one selected from the group consisting of compounds having a saturated double bond (ethylenically unsaturated group), from compounds having two or more epoxy groups or oxetanyl groups in the molecule, from blocked isocyanate compounds More preferably, it is at least one selected from the group consisting of:

The addition amount of the crosslinking agent C1 is preferably 0 to 30 parts by mass and more preferably 1 to 20 parts by mass with respect to 100 parts by mass of the total solid content of the resin composition. In addition, a crosslinking agent can also use multiple types together, In that case, addition amount is calculated by the total content which added all the crosslinking agents.
Below, said crosslinking agent C1 preferably used in this invention is demonstrated.

<Compound having two or more epoxy groups or oxetanyl groups in the molecule>
Examples of the cross-linking agent C1 include polyfunctional small ring cyclic ether compounds.
That is, it means a compound having two or more epoxy groups and / or oxetanyl groups in one molecule.

Specific examples of the compound having two or more epoxy groups in the molecule include aliphatic epoxy compounds.
These are available as commercial products. For example, Denacol EX-611, EX-612, EX-614, EX-614B, EX-622, EX-512, EX-521, EX-411, EX-421, EX-313, EX-314, EX-321 , EX-211, EX-212, EX-810, EX-811, EX-850, EX-851, EX-821, EX-830, EX-832, EX-841, EX-911, EX-941, EX -920, EX-931, EX-212L, EX-214L, EX-216L, EX-321L, EX-850L, DLC-201, DLC-203, DLC-204, DLC-205, DLC-206, DLC-301 , DLC-402 (manufactured by Nagase ChemteX Corporation), Celoxide 2021P, 2081, 3000, EHPE31 0, Epolead GT400, Serubinasu B0134, B0177 ((Ltd.) manufactured by Daicel), and the like.
These can be used alone or in combination of two or more.

  As specific examples of the compound having two or more oxetanyl groups in the molecule, Aron oxetane OXT-121, OXT-221, OX-SQ, PNOX (manufactured by Toagosei Co., Ltd.) can be used.

  Moreover, it is preferable to use the compound containing an oxetanyl group individually or in mixture with the compound containing an epoxy group.

<Block isocyanate compound>
As the cross-linking agent C1, a blocked isocyanate compound can also be preferably employed.
The blocked isocyanate compound is not particularly limited as long as it is a compound having a blocked isocyanate group in which the isocyanate group is chemically protected. From the viewpoint of curability, the blocked isocyanate compound is a compound having two or more blocked isocyanate groups in one molecule. Preferably there is.
In addition, the blocked isocyanate group in this invention is a group which can produce | generate an isocyanate group with a heat | fever, For example, the group which reacted the blocking agent and the isocyanate group and protected the isocyanate group can illustrate preferably. Moreover, it is preferable that the said blocked isocyanate group is a group which can produce | generate an isocyanate group with the heat | fever of 90 to 250 degreeC.
Further, the skeleton of the blocked isocyanate compound is not particularly limited and may be any as long as it has two isocyanate groups in one molecule, and may be aliphatic, alicyclic or aromatic. Polyisocyanate may be used, for example, 2,4-tolylene diisocyanate, 2,6-tolylene diisocyanate, isophorone diisocyanate, 1,6-hexamethylene diisocyanate, 1,3-trimethylene diisocyanate, 1,4-tetramethylene Diisocyanate, 2,2,4-trimethylhexamethylene diisocyanate, 2,4,4-trimethylhexamethylene diisocyanate, 1,9-nonamethylene diisocyanate, 1,10-decamethylene diisocyanate, 1,4-cyclohexane diisocyanate, 2, '-Diethyl ether diisocyanate, diphenylmethane-4,4'-diisocyanate, o-xylene diisocyanate, m-xylene diisocyanate, p-xylene diisocyanate, methylene bis (cyclohexyl isocyanate), cyclohexane-1,3-dimethylene diisocyanate, cyclohexane-1, 4-dimethylene diisocyanate, 1,5-naphthalene diisocyanate, p-phenylene diisocyanate, 3,3′-methylene ditolylene-4,4′-diisocyanate, 4,4′-diphenyl ether diisocyanate, tetrachlorophenylene diisocyanate, norbornane diisocyanate, Isocyanate compounds such as hydrogenated 1,3-xylylene diisocyanate and hydrogenated 1,4-xylylene diisocyanate In addition, a prepolymer type skeleton compound derived from these compounds can be preferably used. Among these, tolylene diisocyanate (TDI), diphenylmethane diisocyanate (MDI), hexamethylene diisocyanate (HDI), and isophorone diisocyanate (IPDI) are particularly preferable.

Examples of the matrix structure of the blocked isocyanate compound in the curable composition used in the present invention include biuret type, isocyanurate type, adduct type, and bifunctional prepolymer type.
Examples of the blocking agent that forms the block structure of the blocked isocyanate compound include oxime compounds, lactam compounds, phenol compounds, alcohol compounds, amine compounds, active methylene compounds, pyrazole compounds, mercaptan compounds, imidazole compounds, and imide compounds. be able to. Among these, a blocking agent selected from oxime compounds, lactam compounds, phenol compounds, alcohol compounds, amine compounds, active methylene compounds, and pyrazole compounds is particularly preferable.

Examples of the oxime compound include oxime and ketoxime, and specific examples include acetoxime, formaldoxime, cyclohexane oxime, methyl ethyl ketone oxime, cyclohexanone oxime, and benzophenone oxime.
Examples of the lactam compound include ε-caprolactam and γ-butyrolactam.
Examples of the phenol compound include phenol, naphthol, cresol, xylenol, and halogen-substituted phenol.
Examples of the alcohol compound include methanol, ethanol, propanol, butanol, cyclohexanol, ethylene glycol monoalkyl ether, propylene glycol monoalkyl ether, and alkyl lactate.
As said amine compound, a primary amine and a secondary amine are mentioned, Any of an aromatic amine, an aliphatic amine, and an alicyclic amine may be sufficient, An aniline, diphenylamine, ethyleneimine, polyethyleneimine etc. can be illustrated.
Examples of the active methylene compound include diethyl malonate, dimethyl malonate, ethyl acetoacetate, methyl acetoacetate and the like. Examples of the pyrazole compound include pyrazole, methylpyrazole, dimethylpyrazole and the like.
Examples of the mercaptan compound include alkyl mercaptans and aryl mercaptans.

  The blocked isocyanate compound that can be used in the curable composition used in the present invention is commercially available. For example, Coronate AP Stable M, Coronate 2503, 2515, 2507, 2513, 2555, Millionate MS-50 ( Above, manufactured by Nippon Polyurethane Industry Co., Ltd.), Takenate B-830, B-815N, B-820NSU, B-842N, B-846N, B-870N, B-874N, B-882N (above, Mitsui Chemicals, Inc.) )), Duranate 17B-60PX, 17B-60P, TPA-B80X, TPA-B80E, MF-B60X, MF-B60B, MF-K60X, MF-K60B, E402-B80B, SBN-70D, SBB-70P, K6000 (Above, manufactured by Asahi Kasei Chemicals Corporation), Death Mod BL1100, BL1265 MPA / X, BL3575 / 1, BL3272MPA, BL3370MPA, BL3475BA / SN, BL5375MPA, VPLS2078 / 2, BL4265SN, PL340, PL350, Sumidur BL3175 (above, manufactured by Sumika Bayer Urethane Co., Ltd.) and the like are preferably used can do.

<Alkoxymethyl group-containing crosslinking agent>
As the alkoxymethyl group-containing compound, alkoxymethylated melamine, alkoxymethylated benzoguanamine, alkoxymethylated glycoluril, alkoxymethylated urea and the like are preferable. These can be obtained by converting the methylol group of methylolated melamine, methylolated benzoguanamine, methylolated glycoluril, or methylolated urea to an alkoxymethyl group, respectively. The type of the alkoxymethyl group is not particularly limited, and examples thereof include a methoxymethyl group, an ethoxymethyl group, a propoxymethyl group, and a butoxymethyl group. From the viewpoint of outgas generation amount, A methyl group is particularly preferred.
Among these compounds, alkoxymethylated melamine, alkoxymethylated benzoguanamine, and alkoxymethylated glycoluril are preferable compounds, and alkoxymethylated glycoluril is particularly preferable from the viewpoint of transparency.
As the alkoxymethyl group-containing crosslinking agent, a compound having a molecular weight of 1,000 or less is used for the curable composition.
These alkoxymethyl group-containing compounds are available as commercial products. For example, Cymel 300, 301, 303, 370, 325, 327, 701, 266, 267, 238, 1141, 272, 202, 1156, 1158, 1123 1170, 1174, UFR65, 300 (above, manufactured by Mitsui Cyanamid), Nicarax MX-750, -032, -706, -708, -40, -31, -270, -280, -290, Nicarak MS-11, Nicalac MW-30HM, -100LM, -390 (manufactured by Sanwa Chemical Co., Ltd.) and the like can be preferably used.

[Second embodiment of the present invention]
The second aspect of the present invention contains the following polymer component A2 and quinonediazide compound B2.

[Polymer component A2]
The polymer component A2 contained in the second aspect of the present invention is a polymer component containing a polymer A2-1 containing a structural unit a3 having an acid group.
Moreover, polymer component A2 means what included the other polymer added as needed in addition to the said polymer A2-1.
The polymer contained in the polymer component A2 is preferably an addition polymerization type polymer, like the polymer contained in the polymer component A1 of the first aspect, and (meth) acrylic acid and / or A polymer containing a structural unit derived from the ester is more preferable.

The second aspect of the present invention needs to satisfy at least one of the following conditions 1 to 3 and satisfy at least one of the conditions 4 and 5 below.
This is because a part or component having a crosslinkable group contributing to curing is necessary in the polymer A2-1 containing the structural unit a3 having an acid group, or separately from the polymer A2-1. This indicates that a polymer component including a structural unit having a photo-alignment group and a structural unit for unevenly distributing it on the surface is necessary.
Therefore, in the following description, it demonstrates focusing on the structural unit in a polymer required as a polymer component instead of every polymer.
(conditions)
1: The polymer A2-1 further includes a structural unit a2 having a crosslinkable group 2: The polymer A2-2 further includes a polymer A2-2 including a structural unit a2 having a crosslinkable group as the polymer component A2. Further containing a crosslinking agent C2 having a functional group and a molecular weight of 1,000 or less 4: The polymer A2-1 or the polymer A2-2 contains a structural unit represented by the following s1 5: As the polymer component A2 It further contains a polymer A2-3 containing the structural unit represented by s1 below. S1: At least one partial structure selected from the group consisting of a fluorine-substituted hydrocarbon group, a siloxane skeleton, and an alkyl group having 10 to 30 carbon atoms. And a structural unit having a photo-alignment group

<Structural unit a3>
The polymer component A2 includes a polymer A2-1 having at least a structural unit a3 having an acid group.
Here, the structural unit a3 having an acid group is synonymous with the structural unit a3 having an acid group in the polymer component A1 of the first aspect, and the preferred range is also the same.

  In 2nd aspect, it is preferable that the structural unit a3 is contained 3-70 mol% in all the structural units of a polymer, It is more preferable that 5-60 mol% is contained, 10-50 mol % Content is more preferable. By setting the use ratio of the structural unit a3 within the above range, a resin composition that optimizes solubility and is excellent in sensitivity can be obtained.

<Structural unit a2>
The polymer component A2 preferably contains a polymer having a structural unit a2 having a crosslinkable group. In addition, as shown in the conditions 1-3 mentioned above, when it does not contain the crosslinking agent C2 mentioned later, polymer A2-1 which has at least the structural unit a3 which has an acid group further has the structural unit a2 which has a crosslinkable group. It is necessary to contain another polymer A2-2 having a structural unit a2 having a crosslinkable group.
Here, the structural unit a2 having a crosslinkable group is synonymous with the structural unit a2 having a crosslinkable group in the polymer component A1 of the first aspect, and the preferred range is also the same.

  In 2nd aspect, it is preferable that 0-70 mol% of structural unit a2 is contained in all the structural units of a polymer, and it is more preferable that 0-50 mol% is contained. By setting the use ratio of the structural unit a2 within the above range, a cured film having excellent characteristics can be formed. In addition, as above-mentioned, when content of the structural unit a2 is 0 mol%, it is necessary to contain the crosslinking agent C2 mentioned later.

<Structural unit indicated by s1>
Polymer component A2 contains the polymer containing structural unit s1 shown by the following s1. In addition, as shown in the conditions 4 and 5 described above, the structural unit s1 is an embodiment in which (A) the polymer A2-1 having at least the structural unit a3 having an acid group further includes the structural unit s1, and (a) a crosslinkable group. Either the embodiment in which another polymer A2-2 having a structural unit a2 having a further structural unit s1 and (c) another polymer A2-3 having a structural unit s1 may be employed.
s1: a structural unit having at least one partial structure selected from the group consisting of a fluorine-substituted hydrocarbon group, a siloxane skeleton, and an alkyl group having 10 to 30 carbon atoms, and a structural unit having a photoalignment group The unit s1 is synonymous with the structural unit s1 in the polymer component A1 of the first aspect, and the preferred range is also the same.

  In the second aspect of the present invention, as in the first aspect, the content of the polymer having the structural unit s1 is 0.1 to 20% by mass with respect to the total solid content of the resin composition. Preferably, it is 0.1-10 mass%.

<Other structural units>
In the second embodiment, the polymer component A2 may contain a polymer having the structural unit a5 other than these in addition to the structural unit a3, the structural unit a2, and the structural unit s1 described above.
The monomer to be the structural unit a5 is not particularly limited as long as it is an unsaturated compound other than the structural unit a3 and the structural unit a2.
Specific examples of the radical polymerizable monomer used for forming the structural unit a5 include, for example, methacrylic acid chain alkyl ester, methacrylic acid cyclic alkyl ester, acrylic acid chain alkyl ester, acrylic acid cyclic alkyl ester, methacrylic acid. Acid aryl ester, acrylic acid aryl ester, unsaturated dicarboxylic acid diester, bicyclounsaturated compound, maleimide compound, unsaturated aromatic compound, conjugated diene, tetrahydrofuran skeleton, furan skeleton, tetrahydropyran skeleton, pyran skeleton, formula (4) An unsaturated compound containing a skeleton represented by the above and other unsaturated compounds. As specific examples of the radical polymerizable monomer used for forming the structural unit a5, compounds described in paragraphs 0046 to 0065 of JP2012-88459A can be used, and the contents thereof are described in the present specification. Embedded in the book.

In the formula (4), R ²³ is a hydrogen atom or a methyl group. s is an integer of 1 or more.

Among these structural units a5, a methacrylic acid chain alkyl ester, a methacrylic acid cyclic alkyl ester, a maleimide compound, a tetrahydrofuran skeleton, a furan skeleton, a tetrahydropyran skeleton, a pyran skeleton, and a skeleton represented by the above formula (4). Saturated compounds, unsaturated aromatic compounds, acrylic acid cyclic alkyl esters, and acryloylmorpholine are preferred. Among these, styrene, methyl methacrylate, t-butyl methacrylate, n-lauryl methacrylate, tricyclo [5.2.1.0 ^2,6 ] decan-8-yl methacrylate, p-methoxystyrene, 2- Methyl cyclohexyl acrylate, N-phenylmaleimide, N-cyclohexylmaleimide, tetrahydrofurfuryl (meth) acrylate, polyethylene glycol (n = 2 to 10) mono (meth) acrylate, 3- (meth) acryloyloxytetrahydrofuran-2-one, Acryloylmorpholine is more preferable from the viewpoints of copolymerization reactivity and solubility in an aqueous alkali solution. These compounds may be used alone or in combination of two or more.

  In 2nd aspect, it is preferable that 1-90 mol% of structural unit a5 is contained in all the structural units of a polymer, It is more preferable that 5-80 mol% is contained, 7-60 mol% % Content is more preferable. By setting the use ratio of the structural unit a5 within the above range, a cured film having excellent characteristics can be formed.

[Quinonediazide compound B2]
The second aspect of the present invention contains a quinonediazide compound B2.
As the quinonediazide compound B2, a 1,2-quinonediazide compound that generates a carboxylic acid upon irradiation with actinic rays can be used.
As the 1,2-quinonediazide compound, a condensate of a phenolic compound or an alcoholic compound (hereinafter referred to as “mother nucleus”) and 1,2-naphthoquinonediazidesulfonic acid halide can be used. As specific examples of these compounds, for example, description of paragraphs 0075 to 0078 of JP2012-088459A can be referred to, and the contents thereof are incorporated in the present specification.

  In the condensation reaction of the phenolic compound or alcoholic compound (mother nucleus) and 1,2-naphthoquinonediazide sulfonic acid halide, preferably 30 to 85 moles relative to the number of OH groups in the phenolic compound or alcoholic compound. %, More preferably 1,2-naphthoquinonediazidesulfonic acid halide corresponding to 50 to 70 mol% can be used. The condensation reaction can be carried out by a known method.

  Examples of the 1,2-quinonediazide compound include 1,2-naphthoquinonediazidesulfonic acid amides in which the ester bond of the mother nucleus exemplified above is changed to an amide bond, for example, 2,3,4-triaminobenzophenone-1,2. -Naphthoquinonediazide-4-sulfonic acid amide etc. are also used suitably. Also, 4,4 ′-[1- [4- [1- [4-hydroxyphenyl] -1-methylethyl] phenyl] ethylidene] bisphenol (1.0 mol) and 1,2-naphthoquinonediazide-5-sulfone Condensate with acid chloride (3.0 mol), 1,1,1-tri (p-hydroxyphenyl) ethane (1.0 mol) and 1,2-naphthoquinonediazide-5-sulfonic acid chloride (2.0 mol) Mol)), 2,3,4,4′-tetrahydroxybenzophenone (1.0 mol) and 1,2-naphthoquinonediazide-5-sulfonic acid ester (2.44 mol), etc. It may be used.

These quinonediazide compounds B2 can be used alone or in combination of two or more.
The content of the quinonediazide compound B2 in the second aspect is preferably 1 to 50 parts by mass, more preferably 2 to 40 parts by mass, and 10 to 25 parts by mass with respect to 100 parts by mass of the total solid content in the resin composition. Further preferred.
By setting the blending amount of the quinonediazide compound B2 in the above range, the difference in solubility between the irradiated portion of the actinic ray and the unirradiated portion in the alkaline aqueous solution serving as the developer is large, the patterning performance is improved, and the cured film obtained Good solvent resistance.

[Crosslinking agent C2]
In the second aspect of the present invention, when the above-described conditions 1 and 2 are not satisfied, that is, when the polymer component A2 does not contain a polymer having a crosslinkable group, the molecular weight is 1,000 or less. Contains a crosslinking agent C2. In addition, even if it satisfy | fills the conditions 1 or 2 mentioned above, you may contain the crosslinking agent C2.
Here, the crosslinking agent C2 is synonymous with the crosslinking agent C1 used in the first embodiment, and the preferred range is also the same.

[Organic solvent D]
The photosensitive resin composition according to the first and second aspects of the present invention (hereinafter collectively referred to simply as “the resin composition of the present invention”) preferably contains the organic solvent D. .
As the organic solvent D, known organic solvents can be used, such as ethylene glycol monoalkyl ethers, ethylene glycol dialkyl ethers, ethylene glycol monoalkyl ether acetates, propylene glycol monoalkyl ethers, propylene glycol dialkyl ethers, Propylene glycol monoalkyl ether acetates, diethylene glycol dialkyl ethers, diethylene glycol monoalkyl ether acetates, dipropylene glycol monoalkyl ethers, butylene glycol diacetates, dipropylene glycol dialkyl ethers, dipropylene glycol monoalkyl ether acetates, Examples include alcohols, esters, ketones, amides, lactones, etc. It can be. As specific examples of these organic solvents, reference can be made to paragraph 0062 of JP-A-2009-098616.

  Preferred examples include propylene glycol monomethyl ether acetate, diethylene glycol diethyl ether, diethylene glycol ethyl methyl ether, propylene glycol monomethyl ether, 1,3-butylene glycol diacetate, methoxypropyl acetate, cyclohexanol acetate, propylene glycol diacetate, tetrahydroflur Examples include furyl alcohol.

The boiling point of the organic solvent D is preferably 100 ° C to 300 ° C, more preferably 120 ° C to 250 ° C, from the viewpoint of applicability.
The organic solvent D which can be used for this invention can be used individually by 1 type or in combination of 2 or more types. It is also preferred to use solvents having different boiling points in combination.
In the case of containing the organic solvent D, the content is preferably 100 to 3,000 parts by mass per 100 parts by mass of the total solid content of the resin composition from the viewpoint of adjusting the viscosity to be suitable for coating. More preferably, it is -2,000 mass parts, and it is still more preferable that it is 250-1,000 mass parts.
As solid content concentration of a resin composition, 3-50 mass% is preferable and it is more preferable that it is 20-40 mass%.

[Sensitizer]
The resin composition of the present invention, particularly the photosensitive resin composition according to the first aspect of the present invention, contains a sensitizer in combination with the photoacid generator B1 in order to promote its decomposition. Is preferred.
The sensitizer absorbs actinic rays or radiation and enters an electronically excited state. The sensitizer in an electronically excited state comes into contact with the photoacid generator, and effects such as electron transfer, energy transfer, and heat generation occur. Thereby, a photo-acid generator raise | generates a chemical change and decomposes | disassembles and produces | generates an acid. Examples of preferred sensitizers include compounds belonging to the following compounds and having an absorption wavelength in any of the wavelength ranges from 350 nm to 450 nm.

Polynuclear aromatics (eg, pyrene, perylene, triphenylene, anthracene, 9,10-dibutoxyanthracene, 9,10-diethoxyanthracene, 3,7-dimethoxyanthracene, 9,10-dipropyloxyanthracene), xanthenes (Eg, fluorescein, eosin, erythrosine, rhodamine B, rose bengal), xanthones (eg, xanthone, thioxanthone, dimethylthioxanthone, diethylthioxanthone), cyanines (eg, thiacarbocyanine, oxacarbocyanine), merocyanines (Eg, merocyanine, carbomerocyanine), rhodocyanins, oxonols, thiazines (eg, thionine, methylene blue, toluidine blue), acridines (eg, acridineo , Chloroflavin, acriflavine), acridones (eg, acridone, 10-butyl-2-chloroacridone), anthraquinones (eg, anthraquinone), squariums (eg, squalium), styryls, base styryls ( For example, 2- {2- [4- (dimethylamino) phenyl] ethenyl} benzoxazole), coumarins (eg, 7-diethylamino-4-methylcoumarin, 7-hydroxy-4-methylcoumarin, 2, 3, 6 , 7-tetrahydro-9-methyl-1H, 5H, 11H [1] benzopyrano [6,7,8-ij] quinolidine-11-non).
Among these sensitizers, polynuclear aromatics, acridones, styryls, base styryls, and coumarins are preferable, and polynuclear aromatics are more preferable. Of the polynuclear aromatics, anthracene derivatives are most preferred.

The content of the sensitizer is preferably 0 to 1,000 parts by mass, more preferably 10 to 500 parts by mass with respect to 100 parts by mass of the photoacid generator B1 or the quinonediazide compound B2. More preferably, it is 50-200 mass parts.
Moreover, a sensitizer may be used individually by 1 type and can also use 2 or more types together.

[Basic compounds]
The resin composition of the present invention may contain a basic compound.
The basic compound can be arbitrarily selected from those used in the chemically amplified curable composition. Examples include aliphatic amines, aromatic amines, heterocyclic amines, quaternary ammonium hydroxides, quaternary ammonium salts of carboxylic acids, and the like. Specific examples thereof include compounds described in paragraphs 0204 to 0207 of JP2011-221494A.

Specific examples of the aliphatic amine include trimethylamine, diethylamine, triethylamine, di-n-propylamine, tri-n-propylamine, di-n-pentylamine, tri-n-pentylamine, diethanolamine, triethanolamine, and the like. Examples include ethanolamine, dicyclohexylamine, and dicyclohexylmethylamine.
Examples of the aromatic amine include aniline, benzylamine, N, N-dimethylaniline, diphenylamine and the like.
Examples of the heterocyclic amine include pyridine, 2-methylpyridine, 4-methylpyridine, 2-ethylpyridine, 4-ethylpyridine, 2-phenylpyridine, 4-phenylpyridine, N-methyl-4-phenylpyridine, 4-dimethylaminopyridine, imidazole, benzimidazole, 4-methylimidazole, 2-phenylbenzimidazole, 2,4,5-triphenylimidazole, nicotine, nicotinic acid, nicotinamide, quinoline, 8-oxyquinoline, pyrazine, Pyrazole, pyridazine, purine, pyrrolidine, piperidine, piperazine, morpholine, 4-methylmorpholine, N-cyclohexyl-N ′-[2- (4-morpholinyl) ethyl] thiourea, 1,5-diazabicyclo [4.3.0 ] -5-Nonene, 1,8-di And azabicyclo [5.3.0] -7-undecene, butane-1,2,3,4-tetracarboxylic acid tetrakis (1,2,2,6,6-pentamethyl-4-piperidinyl) and the like.
Examples of the quaternary ammonium hydroxide include tetramethylammonium hydroxide, tetraethylammonium hydroxide, tetra-n-butylammonium hydroxide, and tetra-n-hexylammonium hydroxide.
Examples of the quaternary ammonium salt of carboxylic acid include tetramethylammonium acetate, tetramethylammonium benzoate, tetra-n-butylammonium acetate, and tetra-n-butylammonium benzoate.
Among these, a heterocyclic amine is preferable, and N-cyclohexyl-N ′-[2- (4-morpholinyl) ethyl] thiourea is particularly preferable.

A basic compound may be used individually by 1 type, or may use 2 or more types together.
Moreover, it is preferable that content in the case of containing a basic compound is 0.001-3 mass parts with respect to 100 mass parts of total solids in a resin composition, 0.05-0.5 mass More preferably, it is a part.

[Surfactant]
The resin composition of the present invention may contain a surfactant.
As the surfactant, any of anionic, cationic, nonionic, or amphoteric surfactants can be used, but a preferred surfactant is a nonionic surfactant. As the surfactant, nonionic surfactants are preferable, and fluorine-based surfactants are more preferable.
As the surfactant that can be used in the first embodiment, for example, commercially available products such as Megafac F142D, F172, F173, F176, F177, F183, F479, F482, F554, F780, F781, F781-F, R30, R08, F-472SF, BL20, R-61, R-90 (manufactured by DIC Corporation), Florard FC-135, FC- 170C, FC-430, FC-431, Novec FC-4430 (manufactured by Sumitomo 3M), Asahi Guard AG 7105, 7000, 950, 7600, Surflon S-112, S-113, S-131, S-141, S-145, S-382, SC-101, SC-102, SC-103, SC-104, SC NS It is done. In addition to the above, KP (manufactured by Shin-Etsu Chemical Co., Ltd.), Polyflow (manufactured by Kyoeisha Chemical Co., Ltd.), F-Top (manufactured by Mitsubishi Materials Denka Kasei Co., Ltd.), MegaFuck (manufactured by DIC Corporation) , FLORARD (manufactured by Sumitomo 3M), Asahi Guard, Surflon (manufactured by Asahi Glass Co., Ltd.), PolyFox (manufactured by OMNOVA), and the like.

  Moreover, as surfactant, the compound of Unexamined-Japanese-Patent No. 2014-238438 Paragraph 0151-0155 can also be mentioned as a preferable example.

The content in the case of containing the surfactant is preferably 0.001 to 5.0 parts by mass, more preferably 0.01 to 2.0 parts by mass with respect to 100 parts by mass of the total solid content of the resin composition. .
Only one type of surfactant may be included, or two or more types of surfactants may be included. When two or more types are included, the total amount is preferably within the above range.

[Adhesion improver]
The resin composition of the present invention may contain an adhesion improving agent.
Examples of the adhesion improving agent include alkoxysilane compounds.
The alkoxysilane compound is a compound that improves the adhesion between an insulating material and an inorganic material serving as a base material, for example, a silicon compound such as silicon, silicon oxide, or silicon nitride, or a metal such as gold, copper, molybdenum, titanium, or aluminum. It is preferable.
Specific examples of the adhesion improver include, for example, γ-aminopropyltrimethoxysilane, γ-aminopropyltriethoxysilane, γ-glycidoxypropyltrimethoxysilane, γ-glycidoxypropyltriethoxysilane, γ-glycol. Sidoxypropylmethyldimethoxysilane, γ-methacryloxypropyltrimethoxysilane, γ-methacryloxypropylmethyldiethoxysilane, γ-methacryloxypropyltriethoxysilane, γ-chloropropyltrimethoxysilane, γ-mercaptopropyltrimethoxysilane , Β- (3,4-epoxycyclohexyl) ethyltrimethoxysilane, vinyltrimethoxysilane, and the like. Of these, γ-glycidoxypropyltrimethoxysilane and γ-methacryloxypropyltrimethoxysilane are preferable, and γ-glycidoxypropyltrimethoxysilane is more preferable. These can be used alone or in combination of two or more.
The content of the adhesion improving agent is preferably 0.001 to 15 parts by mass, and more preferably 0.005 to 10 parts by mass with respect to 100 parts by mass of the total solid component of the resin composition. Only one type of adhesion improver may be used, or two or more types may be used. When using 2 or more types, it is preferable that a total amount becomes the said range.

〔Antioxidant〕
The resin composition of the present invention may contain an antioxidant.
As an antioxidant, a well-known antioxidant can be contained. By adding an antioxidant, there is an advantage that coloring of the cured film can be prevented, or a decrease in film thickness due to decomposition can be reduced, and heat resistant transparency is excellent.
Examples of such antioxidants include phosphorus antioxidants, amides, hydrazides, hindered amine antioxidants, sulfur antioxidants, phenol antioxidants, ascorbic acids, zinc sulfate, sugars, Examples thereof include nitrates, sulfites, thiosulfates, and hydroxylamine derivatives. Of these, phenol-based antioxidants, amide-based antioxidants, hydrazide-based antioxidants, and sulfur-based antioxidants are particularly preferable from the viewpoint of coloring the cured film and reducing film thickness, with phenol-based antioxidants being the most preferred. preferable. These may be used individually by 1 type and may mix 2 or more types.
Specific examples include the compounds described in paragraphs 0026 to 0031 of JP-A-2005-29515, the contents of which are incorporated herein.

  Examples of commercially available phenolic antioxidants include ADK STAB AO-15, ADK STAB AO-18, ADK STAB AO-20, ADK STAB AO-23, ADK STAB AO-30, ADK STAB AO-37, ADK STAB AO-40 and ADK STAB AO. -50, ADK STAB AO-51, ADK STAB AO-60, ADK STAB AO-70, ADK STAB AO-80, ADK STAB AO-330, ADK STAB AO-412S, ADK STAB AO-503, ADK STAB A-611, ADK STAB A-612, ADK STAB A -613, ADK STAB PEP-4C, ADK STAB PEP-8, ADK STAB PEP-8W, ADK STAB PEP-24G, ADK STAB PEP-36, ADK STAB PEP-36Z, ADK STAB HP-1 , ADK STAB 2112, ADK STAB 260, ADK STAB 1522, ADK STAB 1178, ADK STAB 1500, ADK STAB 135A, ADK STAB 3010, ADK STAB TPP, ADK STAB CDA-1, ADK STAB CDA-6, ADK STAB ZS-27, ADK STAB ZS 90, ADK STAB ZS 90 -91 (above, manufactured by ADEKA Corporation), Irganox 245FF, Irganox 1010FF, Irganox 1010, Irganox MD1024, Irganox 1035FF, Irganox 1035, Irganox 1098, Irganox 1330, Irganox 1520L, Irganox 3114, Irganox 1726, Irgafos 168, Irgamod 295 (BAS Ltd.), Tinuvin 405 (manufactured by BASF), and the like. Among them, ADK STAB AO-60, ADK STAB AO-80, Irganox 1726, Irganox 1035, Irganox 1098, and Tinuvin 405 can be preferably used.

  When the antioxidant is contained, the content is preferably 0.1 to 10% by mass and more preferably 0.2 to 5% by mass with respect to 100 parts by mass of the total solid content of the resin composition. It is preferably 0.5 to 4% by mass. By setting it within this range, sufficient transparency of the formed film can be obtained, and the sensitivity at the time of pattern formation can be improved.

[Other ingredients]
In addition to the above components, the resin composition of the present invention includes an ultraviolet absorber, a metal deactivator, an acid multiplier, a development accelerator, a plasticizer, a thermal radical generator, and a thermal acid generator as necessary. , Known additives such as thickeners and organic or inorganic suspending agents can be added. Moreover, as these compounds, the description of Paragraph 0201-0224 of Unexamined-Japanese-Patent No. 2012-88459, and Unexamined-Japanese-Patent No. 2014-238438 can also be considered, for example, These content is integrated in this-application specification.

  Further, as other additives, a thermal radical generator described in paragraphs 0120 to 0121 of JP2012-8223A, and a nitrogen-containing compound and a thermal acid generator described in International Publication No. 2011-136704 are also used. The contents of which are incorporated herein by reference.

[Method for preparing photosensitive resin composition]
The resin composition of the present invention can be prepared by mixing each component in a predetermined ratio and by any method, stirring and dissolving. For example, the photosensitive resin composition of the present invention can also be prepared by mixing each component with a predetermined ratio after preparing each solution in advance in a solvent. The composition solution prepared as described above can be used after being filtered using, for example, a filter having a pore diameter of 0.2 μm.

[Method for producing cured film]
The method for producing a cured film of the present invention preferably includes the following steps (1) to (5).
(1) The process of apply | coating the resin composition of this invention containing the organic solvent D to a board | substrate (application | coating process)
(2) Step of removing organic solvent D from the applied resin composition (solvent removal step)
(3) Step of exposing the resin composition from which the organic solvent D has been removed with actinic radiation (exposure step)
(4) Step of developing the exposed resin composition with a developer (development step)
(5) Step of obtaining a cured film by thermosetting the developed resin composition (post-baking step)
Each step will be described below in order.

  In the step (1), it is preferable to apply the resin composition of the present invention on a substrate to form a wet film containing a solvent.

Before performing step (1), the substrate may be cleaned by alkali cleaning, plasma cleaning, or the like. Further, the substrate surface may be treated with hexamethyldisilazane or the like with respect to the cleaned substrate. The method of treating the substrate surface with hexamethyldisilazane is not particularly limited, and examples thereof include a method of exposing the substrate to hexamethyldisilazane vapor.
Examples of the substrate include an inorganic substrate, a resin substrate, a substrate using a composite material of a resin material and an inorganic material.
Examples of the inorganic substrate include a glass substrate, a quartz substrate, a silicone substrate, a silicon nitride substrate, and a composite substrate obtained by depositing molybdenum, titanium, aluminum, copper, or the like on these substrates.
As the resin substrate, polybutylene terephthalate, polyethylene terephthalate, polyethylene naphthalate, polybutylene naphthalate, polystyrene, polycarbonate, polysulfone, polyethersulfone, polyarylate, allyl diglycol carbonate, polyamide, polyimide, polyamideimide, polyetherimide, Fluorine resin such as polybenzazole, polyphenylene sulfide, polycycloolefin, norbornene resin, polychlorotrifluoroethylene, liquid crystal polymer, acrylic resin, epoxy resin, silicone resin, ionomer resin, cyanate resin, crosslinked fumaric acid diester, cyclic polyolefin, Made of synthetic resin such as aromatic ether, maleimide-olefin, cellulose, episulfide compound Plate, and the like.
These substrates may have a multi-layered structure such as a thin film transistor (TFT) element, depending on the form of the final product.
The method for applying the resin composition to the substrate is not particularly limited, and for example, methods such as a slit coating method, a spray method, a roll coating method, a spin coating method, a casting coating method, and a slit and spin method can be used.
In the case of the slit coating method, the relative moving speed between the substrate and the slit die is preferably 50 to 120 mm / sec.
The wet film thickness when the resin composition is applied is not particularly limited, and can be applied with a film thickness according to the application. For example, 0.5-10 micrometers is preferable.
Before applying the resin composition of the present invention to the substrate, it is also possible to apply a so-called pre-wet method as described in JP-A-2009-145395.

  In the step (2), the solvent is removed from the wet film formed by applying the resin composition by vacuum (vacuum) and / or heating to form a dry film on the substrate. The heating conditions for the solvent removal step are preferably 70 to 130 ° C. and about 30 to 300 seconds. When the temperature and time are within the above ranges, when performing the step (4) described later, the adhesion of the pattern tends to be better, and the residue tends to be further reduced.

In the step (3), the substrate provided with the dry film is irradiated with actinic rays having a predetermined pattern. In this step, an acid group such as a carboxyl group or a phenolic hydroxyl group is generated in the exposed area, and the solubility in the developer in the exposed area is improved. That is, in an embodiment including a polymer component having a structural unit having a group in which an acid group is protected by an acid-decomposable group, and a photoacid generator, the photoacid generator is decomposed by irradiation with actinic rays. Acid is generated. Then, the acid-decomposable group contained in the dried film is hydrolyzed by the catalytic action of the generated acid to generate a carboxyl group or a phenolic hydroxyl group. Moreover, in the aspect containing a quinonediazide compound, a carboxyl group is produced | generated from a quinonediazide compound by irradiation of actinic light.
As a light source of actinic light, a low-pressure mercury lamp, a high-pressure mercury lamp, an ultra-high pressure mercury lamp, a chemical lamp, a light emitting diode (LED) light source, an excimer laser generator, etc. can be used, i-line (365 nm), h-line (405 nm), Actinic rays having a wavelength of 300 nm or more and 450 nm or less such as g-line (436 nm) can be preferably used. Moreover, irradiation light can also be adjusted through spectral filters, such as a long wavelength cut filter, a short wavelength cut filter, and a band pass filter, as needed. The exposure amount is preferably 1 to 500 mJ / cm ² .
As the exposure apparatus, various types of exposure machines such as a mirror projection aligner, a stepper, a scanner, a proximity, a contact, a microlens array, a lens scanner, and a laser exposure can be used. In addition, exposure using a so-called super-resolution technique can be performed. Examples of the super-resolution technique include multiple exposure in which exposure is performed a plurality of times, a method using a phase shift mask, and an annular illumination method. By using these super-resolution techniques, it is possible to form a higher definition pattern, which is preferable.

In the step (4), the resin composition is developed using a developer. A positive image is formed by removing an exposed area having a carboxyl group and / or a phenolic hydroxyl group that is easily dissolved in the developer.
The developer used in the development step preferably contains an aqueous solution of a basic compound. Examples of basic compounds include alkali metal hydroxides such as lithium hydroxide, sodium hydroxide, and potassium hydroxide; alkali metal carbonates such as sodium carbonate, potassium carbonate, and cesium carbonate; sodium bicarbonate, potassium bicarbonate Alkali metal bicarbonates such as: tetramethylammonium hydroxide, tetraethylammonium hydroxide, tetrapropylammonium hydroxide, tetrabutylammonium hydroxide, diethyldimethylammonium hydroxide, and other tetraalkylammonium hydroxides: Alkyl) trialkylammonium hydroxides; silicates such as sodium silicate and sodium metasilicate; ethylamine, propylamine, diethylamine, triethylammonium Alkyl amines such as dimethyl alcohol; alcohol amines such as dimethyl ethanol amine and triethanol amine; 1,8-diazabicyclo- [5.4.0] -7-undecene, 1,5-diazabicyclo- [4.3.0 ] Cycloaliphatic amines such as -5-nonene can be used.
Of these, sodium hydroxide, potassium hydroxide, tetramethylammonium hydroxide, tetraethylammonium hydroxide, tetrapropylammonium hydroxide, tetrabutylammonium hydroxide, and choline (2-hydroxyethyltrimethylammonium hydroxide) are preferable.
An aqueous solution obtained by adding an appropriate amount of a water-soluble organic solvent such as methanol or ethanol or a surfactant to the alkaline aqueous solution can also be used as a developer.
The pH of the developer is preferably 10.0 to 14.0.
The development time is preferably 30 to 500 seconds, and the development method may be any of a liquid piling method (paddle method), a shower method, a dipping method, and the like.
A rinsing step can also be performed after development. In the rinsing process, the developed substrate and the development residue are removed by washing the developed substrate with pure water or the like. A known method can be used as the rinsing method. For example, shower rinse and dip rinse can be mentioned.

In the step (5), the obtained positive image is heated to thermally decompose the acid-decomposable group to generate an acid group such as a carboxyl group or a phenolic hydroxyl group, and to crosslink with a crosslinkable group, a crosslinking agent, or the like. By doing so, a cured film can be formed. This heating is preferably performed using a heating device such as a hot plate or an oven. The heating temperature is preferably 200 ° C to 350 ° C, more preferably 250 ° C to 350 ° C. The heating time is preferably 5 to 90 minutes on a hot plate and 30 to 120 minutes for an oven. By proceeding with a cyclization reaction or a crosslinking reaction by heating, a cured film excellent in heat resistance, hardness and the like can be formed. In addition, when the heat treatment is performed in a nitrogen atmosphere, the transparency can be further improved.
Prior to post-baking, post-baking can be performed after baking at a relatively low temperature (addition of a middle baking process). When performing middle baking, it is preferable to post-bake at a high temperature of 200 ° C. or higher after heating at 90 to 150 ° C. for 1 to 60 minutes. Moreover, middle baking and post-baking can be heated in three or more stages. The taper angle of the pattern can be adjusted by devising such middle baking and post baking. These heating methods can use well-known heating methods, such as a hotplate, oven, and an infrared heater.
Prior to post-baking, the entire surface of the patterned substrate was re-exposed with actinic rays (post-exposure), and then post-baked to generate an acid from the photoacid generator present in the unexposed portion, thereby performing a crosslinking step. It can function as a catalyst to promote, and can accelerate the curing reaction of the film. As a preferable exposure amount when the post-exposure step is included, 100 to 3,000 mJ / cm ² is preferable, and 100 to 500 mJ / cm ² is particularly preferable.

  The cured film obtained from the resin composition of the present invention can also be used as a dry etching resist. In the case where a cured film obtained by thermal curing in a post-baking process is used as a dry etching resist, dry etching processes such as ashing, plasma etching, and ozone etching can be performed as the etching process.

  Moreover, it is preferable that the manufacturing method of the cured film of this invention performs a photo-alignment process from a viewpoint of functioning the obtained cured film as an alignment film after the said post-baking process.

  The photo-alignment treatment is not particularly limited except that light having a wavelength of 313 nm or less is used, but it is preferable to use polarized ultraviolet rays for obtaining uniform alignment. In this case, the method of irradiating polarized ultraviolet rays is not particularly limited. In addition, there is no restriction | limiting in particular as polarized light, For example, linearly polarized light, circularly polarized light, elliptically polarized light etc. are mentioned, Among these, linearly polarized light is preferable.

  Moreover, it is only necessary to obtain substantially polarized light, and non-polarized light may be irradiated at an angle inclined from the normal line of the thin film. In other words, non-polarized light may be irradiated from an oblique direction on the surface of the cured film. “Inclined irradiation” is not particularly limited as long as it is a direction inclined by a polar angle θ (0 <θ <90 °) with respect to the normal direction of the surface of the cured film, and can be appropriately selected according to the purpose. However, θ is preferably 20 to 80 °.

Examples of the light source used include a xenon lamp, a high-pressure mercury lamp, an ultra-high pressure mercury lamp, and a metal halide lamp.
By using an interference filter, a color filter, or the like for ultraviolet rays obtained from such a light source, the wavelength range of irradiation can be limited. Moreover, linearly polarized light can be obtained by using a polarizing filter or a polarizing prism for the light from these light sources.

[Curing film]
The cured film of the present invention is a cured film obtained by curing the above-described resin composition of the present invention. Moreover, it is preferable that the cured film of this invention is a cured film obtained by the formation method of the cured film of this invention mentioned above.
The cured film of the present invention can be suitably used as an interlayer insulating film and a protective film. In particular, when used as an interlayer insulating film, the cured film also has a function as an alignment film by performing a photo-alignment treatment in advance. Therefore, it is useful for the use of the liquid crystal display device described later.

[Liquid Crystal Display]
The liquid crystal display device of the present invention has the cured film of the present invention.
The liquid crystal display device of the present invention is not particularly limited as long as an interlayer insulating film formed using the resin composition of the present invention is used, and can be applied to known liquid crystal display devices having various structures. In addition, since the interlayer insulating film formed using the resin composition of the present invention can also serve as an alignment film, a structure in which the alignment film is eliminated from a known liquid crystal display device can be obtained.
For example, specific examples of a thin film transistor (TFT) included in the liquid crystal display device of the present invention include an amorphous silicon TFT, a low temperature polysilicon TFT, an oxide semiconductor TFT, and the like. Since the cured film of the present invention is excellent in electrical characteristics, it can be preferably used in combination with these TFTs.
Liquid crystal driving methods that can be taken by the liquid crystal display device of the present invention include TN (Twisted Nematic) method, VA (Vehicular Alignment) method, IPS (In-Plane-Switching) method, FFS (Frings Field Switching) method, OCB (Optical). Compensated Bend) method and the like.
In the panel configuration, the cured film of the present invention can also be used in a COA (Color Filter on Array) type liquid crystal display device. For example, the organic insulating film (115) of JP-A-2005-284291, or JP-A-2005 -346054 can be used as the organic insulating film (212).
Moreover, the resin composition of this invention and the cured film of this invention are not limited to the said use, It can be used for various uses. For example, in addition to an interlayer insulating film, it is suitably used for a color filter protective film, a spacer for keeping the thickness of a liquid crystal layer in a liquid crystal display device constant, a microlens provided on a color filter in a solid-state imaging device, or the like. be able to.
For details of the liquid crystal display device, the descriptions in Japanese Patent Application Laid-Open Nos. 2007-328210 and 2014-238438 can be referred to, and the contents thereof are incorporated in the present specification.

  Hereinafter, the present invention will be described in more detail based on examples. The materials, amounts used, ratios, processing details, processing procedures, and the like shown in the following examples can be changed as appropriate without departing from the spirit of the present invention. Therefore, the scope of the present invention should not be construed as being limited by the following examples. Unless otherwise specified, “part” and “%” are based on mass.

[Synthesis of Structural Unit (Monomer a-1) Having Photo-Orienting Group]
Methyl trans-4-hydroxycinnamate (manufactured by Tokyo Chemical Industry Co., Ltd., 12.5 g, 0.07 mol) and triethylamine (manufactured by Wako Pure Chemical Industries, Ltd., 7.79 g, 0.07 mol) were added to tetrahydrofuran (hereinafter referred to as “tetrahydrofuran”). , And abbreviated as “THF”) After dissolving in 100 mL and cooling to 0 ° C., methacrylic acid chloride (manufactured by Tokyo Chemical Industry Co., Ltd., 7.33 g, 0.07 mol) was gradually added dropwise.
Next, 500 g of water was added to the cloudy reaction system and stirred for 1 hour, followed by filtration to obtain 14 g of monomer a-1 having a cinnamate group as a photoalignable group. The structure was confirmed by NMR.

[Synthesis of Structural Unit (Monomer a-2) Having Photo-Orienting Group]
Ethyl 4-hydroxy-3-methoxycinnamate (manufactured by Tokyo Chemical Industry Co., Ltd., 22.2 g, 0.1 mol) was dissolved in 150 mL of dimethylacetamide, and potassium carbonate (manufactured by Wako Pure Chemical Industries, Ltd.) 30 g, 0.22 mol) was added and the temperature was raised to 90 ° C.
Next, 4-chlorobutanol (manufactured by Wako Pure Chemical Industries, Ltd., 21.6 g, 0.2 mol) was added dropwise and stirred for 3 hours.
Thereafter, the reaction solution was poured into 1 L of water, neutralized with 2N HCl, extracted with 700 mL of ethyl acetate, washed with saturated brine, and concentrated.
Subsequently, it fractionated by silica gel column chromatography, and 23g of intermediate compounds were obtained.
15 g (0.05 mol) of the intermediate compound and triethylamine (manufactured by Wako Pure Chemical Industries, Ltd., 5.6 g, 0.056 mol) were dissolved in 100 mL of THF and cooled to 0 ° C.
Next, methacrylic acid chloride (manufactured by Tokyo Chemical Industry Co., Ltd., 5.8 g, 0.056 mol) was added dropwise and stirred for 3 hours, and then the reaction solution was poured into 500 g of water, extracted with ethyl acetate, and concentrated.
Subsequently, it fractionated by silica gel column chromatography, and 20g of monomer a-2 which has spacer cinnamate as a photo-alignment group was obtained.

[Synthesis of Structural Unit (Monomer a-3) Having Photo-Orienting Group]
Hydroquinone (Wako Pure Chemical Industries, Ltd., 63.8 g, 0.58 mol) was dissolved in 500 mL of dimethylacetamide, and potassium carbonate (Wako Pure Chemical Industries, Ltd., 40 g, 0.29 mol) was added. The temperature was raised to 90 ° C.
Subsequently, 4-chlorobutyl methacrylate (manufactured by Wako Pure Chemical Industries, Ltd., 25.6 g, 0.145 mol) was added dropwise and stirred for 3 hours.
Thereafter, the reaction solution was poured into 1 L of water, neutralized with 2N HCl, extracted with 700 mL of ethyl acetate, washed with saturated brine, and concentrated. Crude crystals were taken out and fractionated by silica gel column chromatography to obtain 18 g of an intermediate compound.
18 g of the intermediate compound and triethylamine (Wako Pure Chemical Industries, Ltd., 7.79 g, 0.07 mol) were dissolved in 100 mL of THF and cooled to 0 ° C.
Next, cinnamoyl chloride (Tokyo Chemical Industry Co., Ltd., 13.1 g, 0.07 mol) was added dropwise and stirred for 3 hours. The reaction solution was poured into 500 g of water, extracted with ethyl acetate, and concentrated.
Subsequently, it fractionated by silica gel column chromatography, and 22g of monomer a-3 which has a chalcone group as a photo-alignment group was obtained.

[Synthesis of Structural Unit (Monomer a-4) Having Photo-Orienting Group]
Macromolecules 2004, Vol. 37, # 7, p. In the same manner as in 2572, monomer a-4 having an azo group as a photoalignable group was synthesized.

[Synthesis of Structural Unit (Monomer a-5) Having Photo-Orienting Group]
Journal of Polymer Science, Part A: Polymer Chemistry, 2010, Vol. Monomer a-5 having a coumarin group as a photo-alignment group was synthesized in the same manner as in 48, # 19, 4323.

[Synthesis of Structural Unit (Monomer e-1) in which Acid Group is Protected with Acid-Decomposable Group]
Methacrylic acid (Wako Pure Chemical Industries, Ltd., 86 g, 1 mol) was cooled to 15 ° C., and camphorsulfonic acid (Tokyo Chemical Industry Co., Ltd., 4.6 g, 0.02 mol) was added.
Next, 2-dihydrofuran (manufactured by Kawaken Fine Chemical Co., Ltd., 71 g, 1 mol, 1.0 equivalent) was added dropwise to the reaction solution.
After stirring for 1 hour, saturated sodium hydrogen carbonate (500 mL) was added, and the mixture was extracted with ethyl acetate (500 mL).
Subsequently, after drying with magnesium sulfate, the insoluble matter was filtered and concentrated under reduced pressure at 40 ° C. or lower, and the yellow oily residue was distilled under reduced pressure to give a boiling point (bp.) Of 54 to 56 as monomer e-1. 125 g of tetrahydro-2H-furan-2-yl methacrylate as a colorless oily product was obtained (yield 80%).

[Synthesis of structural unit (monomer e-2) in which acid group is protected by acid-decomposable group]
Methacrylic acid (Wako Pure Chemical Industries, Ltd., 86 g, 1 mol) was cooled to 15 ° C., and camphorsulfonic acid (Tokyo Chemical Industry Co., Ltd., 4.6 g, 0.02 mol) was added.
Next, ethyl vinyl ether (manufactured by Tokyo Chemical Industry Co., Ltd., 74 g, 1 mol, 1.0 equivalent) was added dropwise to the reaction solution.
After stirring for 1 hour, saturated sodium hydrogen carbonate (500 mL) was added, and the mixture was extracted with ethyl acetate (500 mL).
Next, after drying with magnesium sulfate, the insoluble matter was filtered and concentrated under reduced pressure at 40 ° C. or lower, and the residual yellow oil was distilled under reduced pressure to give a boiling point (bp.) Of 50 to 52 as monomer e-2. 125 g of ethoxyethyl methacrylate was obtained as a colorless oily product (yield 78%) at a fraction of ° C / 3.5 mmHg.

[Synthesis of Polymer (P1) Having Structural Unit s1]
22 g of diethylene glycol methyl ethyl ether (hereinafter abbreviated as “HS-EDM”) was heated and stirred at 70 ° C. in a nitrogen stream. Synthesized monomer a-1 (11.1 g, 45 mol%), hexafluoroisopropyl methacrylate (hereinafter abbreviated as “HFIP”) (manufactured by Tokyo Chemical Industry Co., Ltd., 3.5 g, 15 mol%), methacrylic acid (hereinafter referred to as “HFIP”) (Hereinafter abbreviated as “MAA”) (manufactured by Wako Pure Chemical Industries, Ltd., 1.7 g, 20 mol%), glycidyl methacrylate (hereinafter abbreviated as “GMA”) (manufactured by Wako Pure Chemical Industries, Ltd.), 2. 8 g, 20 mol%), a mixed solution of radical polymerization initiator (V-65, manufactured by Wako Pure Chemical Industries, Ltd.) 497 mg (2 mol%) and PGMEA (30 g) were added dropwise over 2 hours. After completion of the dropping, the reaction was further performed at 70 ° C. for 4 hours to obtain a PGMEA solution (solid content concentration: 27%) of the polymer P1 having the structural unit s1.

[Synthesis of polymer having structural unit s1 (P2 to P15)]
Polymers P2 to P15 were synthesized in the same manner as the polymer P1, except that the types of the monomer, initiator, and solvent were changed according to Table 1 below. In addition, the numerical value described in the column of each monomer component of the following Table 1 is the usage-amount (mol%) of each monomer with respect to the total amount of a monomer component. Moreover, the numerical value described in the column of a polymerization initiator is mol% when the total amount of monomer components is 100 mol%. Abbreviations used in the examples are as follows.
<Abbreviation>
・ HFIP: Hexafluoroisopropyl methacrylate (manufactured by Tokyo Chemical Industry Co., Ltd.)
・ 6FM: trifluoroethyl methacrylate (manufactured by Osaka Organic Chemical Industry Co., Ltd.)
KBM-503: 3-methacryloxypropyltrimethoxysilane (manufactured by Shin-Etsu Chemical Co., Ltd.)
C18MA: Octadecane methacrylate (manufactured by Tokyo Chemical Industry Co., Ltd.)
・ MAA: Methacrylic acid (manufactured by Wako Pure Chemical Industries, Ltd.)
・ MMA: Methyl methacrylate (manufactured by Wako Pure Chemical Industries, Ltd.)
・ St: Styrene (Wako Pure Chemical Industries, Ltd.)
AA: Acrylic acid (manufactured by Wako Pure Chemical Industries, Ltd.)
・ GMA: Glycidyl methacrylate (manufactured by Tokyo Chemical Industry Co., Ltd.)
OXE-30: (3-ethyloxetane-3-yl) methyl methacrylate (manufactured by Osaka Organic Chemical Industry Co., Ltd.)
DCPM: Dicyclopentanyl methacrylate (Fancryl FA-513M, manufactured by Hitachi Chemical Co., Ltd.)
NBMA: N-butoxymethylacrylamide (manufactured by Mitsubishi Rayon Co., Ltd.)
V-601: radical polymerization initiator (manufactured by Wako Pure Chemical Industries, Ltd.)
V-65: radical polymerization initiator (manufactured by Wako Pure Chemical Industries, Ltd.)
・ PGMEA: Methoxypropylene glycol acetate (manufactured by Daicel Corporation)
HS-EDM: Diethylene glycol methyl ethyl ether (manufactured by Toho Chemical Industry Co., Ltd.)

[Synthesis of other photo-alignment polymers]
<Synthesis of Polymer P16>
A polymer P16 was obtained in the same manner as the specific copolymer P1 described in paragraph [0084] (Synthesis Example 1) of WO2010 / 150748.

<Synthesis of Polymer P17>
A polymer P17 was synthesized in the same manner as the photoalignable polymer (A-1) described in paragraph [0161] (Preparation Example 1) of JP2013-177561A.

[Preparation of polymer having other structural units]
<Synthesis of Polymer A-1 Containing Structural Unit a1 having a Group Protected with Acid-Decomposable Group and Structural Unit a2 Having a Crosslinkable Group>
HS-EDM (82 parts) was heated and stirred at 90 ° C. under a nitrogen stream.
Next, tetrahydro-2H-furan-2-yl methacrylate (43 parts (corresponding to 40.5 mol% in all monomer components)) synthesized as monomer e-1, OXE-30 (48 parts (total single amount) (Corresponding to 37.5 mol% in body components)), MAA (6 parts (corresponding to 9.5 mol% in all monomer components)), hydroxyethyl methacrylate (manufactured by Wako Pure Chemical Industries, Ltd., 11 parts ( A mixed solution of radical polymerization initiator V-601 (4.3 parts) and PGMEA (82 parts) was added dropwise over 2 hours, and 2 By reacting at 90 ° C. for a time, a solution of polymer A-1 (solid content concentration: 40%) was obtained.
In addition, the weight average molecular weight measured by the gel permeation chromatography (GPC) of the obtained polymer A-1 was 15,000.

<Synthesis of Polymer A-2 Containing Structural Unit a1 having an Acid Group Protected with Acid-Decomposable Group>
PGMEA (238 g) was heated and stirred at 90 ° C. under a nitrogen stream.
Subsequently, tetrahydro-2H-furan-2-yl methacrylate synthesized as monomer e-1 (240 g (corresponding to 61.1 mol% in all monomer components)), MAA (50.4 g (total monomer components) ) (Equivalent to 17.6 mol%)), MMA (27.9 g (equivalent to 21.3 mol% in all monomer components)), radical polymerization initiator V-601 (14.7 g), and PGMEA ( 238 g) was added dropwise over 2 hours, and the mixture was further reacted at 90 ° C. for 2 hours. After cooling, PGMEA (42 g) was added to obtain a polymer A-2 solution (solid content concentration: 38%). Obtained.
The weight average molecular weight measured by gel permeation chromatography (GPC) of the obtained polymer A-2 was 15,000.

<Synthesis of Polymer A-3 Containing Structural Unit a3 Having a Crosslinking Group>
HS-EDM (145 g) was heated and stirred at 70 ° C. under a nitrogen stream.
Then, GMA (144.7 g (67.9 mol%)), MAA (16.7 g (12.9 mol%)), St (28.1 g (18.0 mol%)), DCPM (3.87 g (1.17 mol%)) %), Radical polymerization initiator V-65 (20.8 g (5.6 mol% monomer equivalent)), and a mixed solution of HS-EDM (145 g) were added dropwise over 2 hours.
After the completion of dropping, the PGMEA solution (solid content concentration: 35%) of polymer A-3 was obtained by reacting at 70 ° C. for 4 hours.

<Polymer A-4 Containing Structural Unit a3 Having Acid Group and Structural Unit a2 Having a Crosslinkable Group>
After the atmosphere in the flask was replaced with nitrogen, 459.0 g of a diethylene glycol dimethyl ether solution in which 9.0 g of 2,2′-azobisisobutyronitrile was dissolved was charged.
Next, St (22.5 g), MAA (45.0 g), DCPM (67.5 g), and GMA (90.0 g) were charged, and then gently stirring was started.
Subsequently, the temperature of the solution was raised to 80 ° C., and this temperature was maintained for 5 hours, and then heated at 90 ° C. for 1 hour to complete the polymerization.
Thereafter, the reaction product solution was dropped into a large amount of water to coagulate the reaction product. This coagulated product was washed with water, redissolved in THF (200 g), and coagulated again with a large amount of water.
This re-dissolution and coagulation operation was performed three times in total, and then the obtained coagulated product was dried under reduced pressure at 60 ° C. for 48 hours to obtain a polymer A-4. Then, it was set as the polymer A-4 solution using diethylene glycol so that solid content concentration might be 25 weight%.

<Polymer A-5 containing structural unit a3 having acid group>
HS-EDM (11 g) was heated and stirred at 70 ° C. under a nitrogen stream.
Next, MAA (4.3 g (50.0 mol%)), MMA (5.0 g (50.0 mol%)), radical polymerization initiator V-601 (0.497 g (2 mol% monomer amount conversion)), and A mixed solution of HS-EDM (11 g) was added dropwise over 2 hours.
After completion of the dropwise addition, a solution (polymer concentration: 30%) of polymer A-5 was obtained by reacting at 90 ° C. for 2 hours.

<Polymer A-6 containing a structural unit having an acid group and a structural unit having a crosslinking group>
HS-EDM (91 g) was heated and stirred at 70 ° C. under a nitrogen stream.
Next, OXE-30 (75 g (67.9 mol%)), MAA (6.7 g (12.9 mol%)), St (11.3 g (18.0 mol%)), DCPM (1.5 g (1.17 mol%)) %), A radical polymerization initiator V-65 (4.5 g (3.0 mol% monomer equivalent)), and a mixed solution of HS-EDM (91 g) were added dropwise over 2 hours.
After completion of the dropwise addition, a solution (polymer concentration: 30%) of polymer A-6 was obtained by reacting at 70 ° C. for 4 hours.

<Synthesis of non-photoalignable polymer A-7>
Non-photoalignable polymer A-7 was synthesized by the same method as the non-photoalignable polymer (E-1) described in paragraph [0165] (Preparation Example 5) of JP2013-177561A.

[Crosslinking agent]
As the crosslinking agent, those shown below were used.
<C-1>
A polyfunctional epoxy compound (EX-321L, manufactured by Nagase ChemteX Corporation) was used as the crosslinking agent C-1 having a molecular weight of 1,000 or less.
<HMM>
Hexamethoxymethylmelamine (HMM, manufactured by Tokyo Chemical Industry Co., Ltd.)

[Acid generator]
As acid generators (photo acid generator and thermal acid generator), the following compounds were synthesized or used.

<Synthesis of B-1>
Aluminum chloride (10.6 g) and 2-chloropropionyl chloride (10.1 g) were added to a suspension of 2-naphthol (10 g) and chlorobenzene (30 mL), and the mixture was heated to 40 ° C. for 2 hours. I let you. Under ice-cooling, 4N HCl aqueous solution (60 mL) was added dropwise to the reaction solution, and ethyl acetate (50 mL) was added for liquid separation. Potassium carbonate (19.2 g) was added to the organic layer, reacted at 40 ° C. for 1 hour, 2N HCl aqueous solution (60 mL) was added and separated, and the organic layer was concentrated. The slurry was reslurried, filtered and dried to obtain a ketone compound (6.5 g).
Acetic acid (7.3 g) and a 50 mass% aqueous hydroxylamine solution (8.0 g) were added to a suspension of the obtained ketone compound (3.0 g) and methanol (30 mL), and the mixture was heated to reflux. After allowing to cool, water (50 mL) was added, and the precipitated crystals were filtered, washed with cold methanol, and dried to obtain an oxime compound (2.4 g).
The obtained oxime compound (1.8 g) was dissolved in acetone (20 mL), triethylamine (1.5 g) and p-toluenesulfonyl chloride (2.4 g) were added under ice cooling, and the temperature was raised to room temperature. Reacted for hours. Water (50 mL) was added to the reaction solution, and the precipitated crystals were filtered, reslurried with methanol (20 mL), filtered and dried to obtain B-1 (2.3 g).
In addition, the ¹ H-NMR spectrum (300 MHz, CDCl ₃ ) of B-1 is δ = 8.3 (d, 1H), 8.0 (d, 2H), 7.9 (d, 1H), 7. 8 (d, 1H), 7.6 (dd, 1H), 7.4 (dd, 1H), 7.3 (d, 2H), 7.1 (d, 1H), 5.6 (q, 1H) ), 2.4 (s, 3H), 1.7 (d, 3H).

<Synthesis of B-2>
4.0 g of 1-amino-2-naphthol hydrochloride is suspended in 16 g of N-methylpyrrolidone, 3.4 g of sodium bicarbonate is added, and then 4.9 g of methyl 4,4-dimethyl-3-oxovalerate is added dropwise. And heated at 120 ° C. for 2 hours under a nitrogen atmosphere. After allowing to cool, water and ethyl acetate were added to the reaction mixture and the phases were separated, and the organic layer was dried over magnesium sulfate, filtered and concentrated to obtain crude B-2A. Crude B-2A was purified by silica gel column chromatography to obtain 1.7 g of intermediate B-2A.
B-2A (1.7 g) and p-xylene (6 mL) were mixed, 0.23 g of p-toluenesulfonic acid monohydrate was added, and the mixture was heated at 140 ° C. for 2 hours. After allowing to cool, water and ethyl acetate were added to the reaction mixture and the phases were separated, and the organic layer was dried over magnesium sulfate, filtered and concentrated to obtain crude B-2B.
THF (2 mL) and the whole amount of crude B-2B were mixed, 2 mL hydrochloric acid / THF solution 6.0 mL was added dropwise under ice cooling, then isopentyl nitrite (0.84 g) was added dropwise, and the temperature was raised to room temperature (25 ° C.) for 2 hours. Stir. Water and ethyl acetate were added to the obtained reaction mixture for liquid separation, and the organic layer was washed with water, dried over magnesium sulfate, filtered and concentrated to obtain Intermediate Intermediate B-2C.
The total amount of intermediate crude B-2C was mixed with acetone (10 mL), triethylamine (1.2 g) and p-toluenesulfonyl chloride (1.4 g) were added under ice cooling, and the mixture was warmed to room temperature and stirred for 1 hour. did. Water and ethyl acetate were added to the obtained reaction mixture for liquid separation, and the organic layer was dried over magnesium sulfate, filtered and concentrated to obtain crude B-2. Crude B-2 was reslurried with cold methanol, filtered and dried to obtain B-2 (1.2 g).
In addition, the ¹ H-NMR spectrum (300 MHz, CDCl ₃ ) of B-2 is δ = 8.5-8.4 (m, 1H), 8.0-7.9 (m, 4H), 7.7. -7.6 (m, 2H), 7.6-7.5 (m, 1H), 7.4 (d, 2H), 2.4 (s, 3H), 1.4 (s, 9H) there were.

<B-3>
A commercially available acid generator (PAG-103, manufactured by BASF) was used.

<Compound B-4 having the structure shown below>
It was synthesized according to the method described in paragraph number 0128 of WO2011 / 087011.

<Compound B-5 having the structure shown below>
Commercially available triarylsulfonium salt (GSID-26-1, manufactured by BASF)

<TAS-200>
Quinonediazide compound (TAS-200, manufactured by Toyo Gosei Co., Ltd.)

<PTSA>
As the thermal acid generator, paratoluenesulfonic acid monohydrate (PTSA, manufactured by Tokyo Chemical Industry Co., Ltd.) was used.

[Other ingredients]
<Basic compound F-1>
As the basic compound, a compound having the following structure was used.

<F-554>
As the surfactant, a perfluoroalkyl group-containing nonionic surfactant (F-554, manufactured by DIC Corporation) was used.
<KBM-403>
As an adhesion improving agent, γ-glycidoxypropyltrimethoxysilane (KBM-403, manufactured by Shin-Etsu Chemical Co., Ltd.) was used.

[Examples 1 to 74 and Comparative Examples 1 to 4]
Each component shown in Table 2 below is dissolved and mixed in a solvent (PGMEA) until the solid content is 18% by mass, filtered through a polytetrafluoroethylene filter having a diameter of 0.2 μm, and each example and comparative example. A photosensitive resin composition was obtained. In addition, the addition amount in a table | surface represents the addition amount in solid content of each component, and a unit is a mass part.

[Patterning evaluation]
<Sensitivity>
A glass substrate (EAGLE XG, 0.7 mm thickness (manufactured by Corning)) was exposed to hexamethyldisilazane (HMDS) vapor for 30 seconds, and each photosensitive resin composition was spin-coated, followed by a hot plate at 90 ° C./120 seconds. Pre-baking was performed to volatilize the solvent, and a photosensitive resin composition layer having a thickness of 3.0 μm was formed.
Next, the obtained photosensitive resin composition layer was exposed through a predetermined mask using MPA 5500CF (high pressure mercury lamp) manufactured by Canon Inc.
The exposed photosensitive resin composition layer was developed with an alkali developer (0.4% tetramethylammonium hydroxide aqueous solution) at 23 ° C./60 seconds, and then rinsed with ultrapure water for 20 seconds. The sensitivity was the optimum i-line exposure (Eopt) when resolving a 10 μm hole by these operations. The lower the value, the lower the exposure and the higher the sensitivity. The evaluation criteria are as follows. In addition, in AC, it was a range which is satisfactory practically, and D was judged to have a problem. The results are shown in Table 3 below.
A: 150mJ / cm ² less B: 150mJ / cm ² or more, 300 mJ / cm ² less than C: 300mJ / cm ² or more, 600 mJ / cm ² less than D: without opening

<Transparency>
Each photosensitive resin composition was spin-coated on a glass substrate exposed to hexamethyldisilazane (HMDS) vapor for 30 seconds and then pre-baked on a hot plate at 90 ° C. for 120 seconds to evaporate the solvent. A photosensitive resin composition layer having a thickness of 0.0 μm was formed.
Next, using an ultra-high pressure mercury lamp, exposure was performed so that the integrated irradiation amount was 300 mJ / cm ² (energy intensity: 20 mW / cm ² , i-line), and this substrate was heated in an oven at 230 ° C./30 minutes, Furthermore, it heated at 230 degreeC for 2 hours in oven, and obtained the cured film.
The transmittance of this cured film was measured at a wavelength of 400 nm using a spectrophotometer (U-3000: manufactured by Hitachi, Ltd.). The unit is expressed in%. A to C are in a practically acceptable range, and D is determined to have a problem. The results are shown in Table 3 below.
A: 95% or more B: Less than 95%, 90% or more C: Less than 90%, 80% or more D: Less than 80%

(Orientation evaluation)
<Orientation>
Each photosensitive resin composition was applied to the substrate by spin coating, preliminarily dried on a hot plate at 80 ° C. for 1 minute, and then baked in a clean oven at 240 ° C. for 60 minutes to obtain a film thickness of 3 μm. A cured film was formed.
Next, a 1 cm × 1 cm comb-like ITO (Indium Tin Oxide) transparent electrode (In Plane Switching (IPS) type) that can be connected to the outside at the center was formed by sputtering and dry etching.
Thereafter, the substrate described above was subjected to a photo-alignment treatment with polarized light using an ultraviolet polarized light exposure apparatus (HC-2150PUFM, manufactured by Run Technical Service Co., Ltd.).
Next, a cell having a cell gap of 3 μm was produced using an epoxy resin-based sealing material.
A liquid crystal composition MLC-2055 for horizontal alignment manufactured by Merck is injected into the cell, and the injection port is sealed with a UV curable sealant, and then a polarizing plate is attached to both sides of the cell with the alignment direction aligned, and a liquid crystal display An element was produced.
For the evaluation, the orientation of the liquid crystal display element was confirmed on a light box (white light source) at a magnification of 20 times that of a polarizing microscope, and the situation was evaluated. The evaluation criteria are as follows. The results are shown in Table 3 below.
A: No problem B: Light and dark in black display C: Alignment defect and bright spots are visible D: Not aligned and not completely shielded from light

<Orientation sensitivity>
The sensitivity at which the orientation was completed was recorded. The evaluation criteria are as follows. The lower the value, the more the alignment is completed with a low exposure amount, and it can be said that the alignment sensitivity is high. The results are shown in Table 3 below.
A: 300mJ / cm ² less B: 300mJ / cm ² or more, 500 mJ / cm ² less than C: 500mJ / cm ² or more, 1500 mJ / cm ² less than D: 1500mJ / cm ² or more

[Moist heat resistance]
Next, a rectangular wave of ± 5 V, 30 Hz was applied to the liquid crystal display element, and it was confirmed that a 1 cm × 1 cm portion having a transparent electrode was shielded from light (ON / OFF). Ten elements were made and put in a pressure cooker tester (temperature 60 ° C./relative humidity 90%, LH-113 constant temperature and humidity chamber manufactured by Espec Co., Ltd.), and the state of driving after 24 hours was confirmed. The evaluation criteria are as follows. The results are shown in Table 3 below.
A: No change B: Change in 20% of element C: Change in 50% of element D: No drive

From the results shown in Tables 1 to 3, when the polymer having the structural unit s1 is not blended, even if the liquid crystal composition is injected after the photo-alignment treatment, the alignment property and the alignment sensitivity are increased. (Comparative Examples 1 and 2).
Moreover, when the other photo-alignment polymer which does not have structural unit s1 was mix | blended, it turned out that it is inferior to patterning performance (comparative examples 3 and 4).
On the other hand, in any of the first aspect and the second aspect, the photosensitive resin composition containing the polymer having the structural unit s1 that satisfies at least one of the above-described conditions 1 to 3, It was found that the orientation and orientation sensitivity were good and the interlayer insulating film was also used as an alignment film (Examples 1 to 53 (first mode) and Examples 54 to 74 (second mode)).

Claims (11)

A photosensitive resin composition comprising a polymer component A1 containing a polymer A1-1 containing a structural unit a1 having a group in which an acid group is protected with an acid-decomposable group, and a photoacid generator B1. ,
Satisfy at least one of the following 1-3,
1: The polymer A1-1 further includes a structural unit a2 having a crosslinkable group. 2: The polymer component A1 further includes a polymer A1-2 including a structural unit a2 having a crosslinkable group. 3: Crosslinking A photosensitive resin composition further comprising a crosslinking agent C1 having a functional group and a molecular weight of 1,000 or less, and satisfying at least one of the following 4 and 5.
4: The polymer A1-1 or the polymer A1-2 includes a structural unit represented by the following s1. 5: The polymer A1-3 further includes a structural unit represented by the following s1 as the polymer component A1. S1: a structural unit having at least one partial structure selected from the group consisting of a fluorine-substituted hydrocarbon group, a siloxane skeleton, and an alkyl group having 10 to 30 carbon atoms, and a structural unit having a photoalignment group   The photosensitive resin composition according to claim 1, wherein the group in which the acid group is protected with an acid-decomposable group is a group in which the acid group is protected in the form of an acetal. A photosensitive resin composition containing a polymer component A2 containing a polymer A2-1 containing a structural unit a3 having an acid group, and a quinonediazide compound B2,
Satisfy at least one of the following 1-3,
1: The polymer A2-1 further includes a structural unit a2 having a crosslinkable group 2: The polymer A2-2 further includes a polymer A2-2 including a structural unit a2 having a crosslinkable group as the polymer component A2. A photosensitive resin composition further containing a crosslinking agent C2 having a functional group and a molecular weight of 1,000 or less and satisfying at least one of the following 4 and 5.
4: The polymer A2-1 or the polymer A2-2 contains a structural unit represented by the following s1. 5: The polymer component A2 further contains a polymer A2-3 containing a structural unit represented by the following s1. S1: a structural unit having at least one partial structure selected from the group consisting of a fluorine-substituted hydrocarbon group, a siloxane skeleton, and an alkyl group having 10 to 30 carbon atoms, and a structural unit having a photoalignment group   The photosensitive resin composition of any one of Claims 1-3 whose said photo-alignment group is group which provides orientation by photodimerization reaction.   The photosensitive resin composition of any one of Claims 1-4 whose said photo-alignment group is a cinnamate group or a chalcone group.   The photosensitive resin composition of any one of Claims 1-5 whose said crosslinkable group is an epoxy group or an oxetanyl group.   The photosensitivity of any one of Claims 1-6 whose content of the polymer which has a structural unit shown by said s1 is 0.1-20 mass% with respect to the total solid of a composition. Resin composition.   The photosensitive resin composition of any one of Claims 1-7 containing the organic solvent D. Applying the photosensitive resin composition according to claim 8 to a substrate;
Removing the organic solvent D from the applied photosensitive resin composition;
Exposing the photosensitive resin composition from which the organic solvent D has been removed with actinic radiation;
Developing the exposed photosensitive resin composition with a developer;
And a step of thermally curing the developed photosensitive resin composition to obtain a cured film.   The cured film formed by hardening the photosensitive resin composition of any one of Claims 1-8.   A liquid crystal display device comprising the cured film according to claim 10.