JP2017010800A - Lamp heating apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To uniformly heat an entire surface of a tabular work piece without complicating design of a luminous body or complicating exchange work by properly disposing a plurality of linear luminous bodies in relative to the work piece.SOLUTION: Linear luminous bodies 41-43 are disposed at intervals of distances L2 and L3 in a horizontal direction therebetween at height positions of heights h1, h2 and h3 in a normal direction in relative to a top face WA of a square tabular work piece W. The height h1 is longer than the height h2 and the height h2 is longer than the height h3. Linear luminous bodies 44-46 are disposed at position in bilateral symmetry with the linear luminous bodies 41-43. Between the linear luminous body 41 and the linear luminous body 44, an interval of a distance L1 longer than the distance L2 is provided.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a lamp heating apparatus used for heat treatment for heating an object to be processed such as a silicon wafer as a semiconductor material.

  A lamp heating apparatus using a light emitter such as a halogen lamp as a heat source is used for heat treatment for heating a flat plate-like object such as a silicon wafer in the air or in a predetermined atmosphere. The lamp heating device needs to uniformly heat the entire plate-shaped workpiece using a linear or spherical light emitter.

  For example, when a plurality of linear light emitters are arranged at regular intervals in a plane parallel to the object to be processed, the central portion of the object to be processed is irradiated with light from all of the plurality of linear light emitters, The end of the object to be processed is irradiated with light only from some of the linear light emitters. For this reason, when all the linear light emitters are driven with a constant power, the central portion of the object to be processed becomes hotter than the end portions.

  Therefore, as a conventional lamp heating device, there are devices in which various shapes and arrangements of light emitters have been devised, such as disposing each of a plurality of annular lamps having different diameters at positions different from each other (for example, (See Patent Document 1).

Japanese Patent Application Laid-Open No. 2002-075898

  However, if a plurality of light emitters having different shapes are provided, it is difficult to design the light emitters and the replacement work becomes complicated.

  An object of the present invention is to appropriately arrange a plurality of linear light emitters with respect to the object to be processed, so that the flat object to be processed can be obtained without complicating the design of the light emitter and complication of replacement work. An object of the present invention is to provide a lamp heating apparatus capable of uniformly heating the entire surface.

  The lamp heating apparatus according to the present invention includes a plurality of linear light emitters facing each of a first surface and a second surface that are parallel to each other in a flat plate-like workpiece. The plurality of linear light emitters facing the first surface are arranged in parallel to each other in a plane parallel to the first surface, and the distance from the first surface is shortened toward the end of the first surface. Are arranged. The plurality of linear light emitters facing the second surface are arranged in a direction parallel to each other in a plane parallel to the second surface and perpendicular to the plurality of linear light emitters facing the first surface, and the second surface The distance from the second surface is shorter as the position is closer to the end.

  According to this configuration, in the side view of the object to be processed, the plurality of linear light emitters are arranged to face the first surface and the second surface, respectively. The plurality of linear light emitters facing the first surface are arranged closer to the first surface than those located on the end portion side of the first surface, and are viewed from the side of the object to be processed. , The central portion is disposed at a convex position away from the first surface. The plurality of linear light emitters facing the second surface are arranged closer to the second surface than those located on the end portion side of the second surface than those located in the center portion, The central portion is disposed at a convex position away from the second surface.

  In each of the first surface and the second surface of the object to be processed, the distance from the linear light emitter irradiated with light from the normal direction is relative to the central portion where the light is irradiated from all of the plurality of linear light emitters. Long, the distance from the linear light emitter irradiated with light from the normal direction is relatively short at the end receiving light from only a part of the plurality of linear light emitters. Even when driven with the same power, the temperature difference between the central portion and the end portion due to the amount of irradiation light is alleviated.

  In addition, in a plane parallel to the first surface and the second surface, the plurality of linear light emitters facing the first surface and the plurality of linear light emitters facing the second surface are orthogonal to each other. In each of the first surface and the second surface, temperature unevenness due to a difference in facing angle with respect to the plurality of linear light emitters is alleviated.

  In this configuration, it is preferable that all the linear light emitters arranged on the first surface side and the second surface side of the object to be processed have the same shape. The design of the light emitter can be further simplified.

  Moreover, it is preferable that the arrangement position with respect to each to-be-processed object of a some linear light-emitting body is mutually equal in each in the 1st surface side and 2nd surface side of a to-be-processed object. When the workpiece is circular or square, the overall temperature of the workpiece can be made uniform. Moreover, the support member of a linear light-emitting body can be shared by the 1st surface side and the 2nd surface side.

  According to the present invention, it is possible to uniformly heat the entire surface of a plate-like object to be processed without complicating the design of a light emitter and complicating replacement work.

(A) And (B) is the schematic top view and side sectional drawing of the lamp heating apparatus which concern on embodiment of this invention. It is a figure which shows the arrangement position and irradiation light quantity of the linear light-emitting body with respect to the 1st surface of the to-be-processed object by the lamp heating apparatus.

  Hereinafter, a lamp heating apparatus according to an embodiment of the present invention will be described with reference to the drawings.

  As shown to FIG. 1 (A) and (B), the lamp heating apparatus 10 which concerns on embodiment of this invention is the lamp house 1, the processing furnace 2, the support body 3, and the linear light-emitting bodies 41-46, 51-56. The workpiece W is heated to a predetermined temperature. The workpiece W has a square plate shape.

  The lamp house 1 is a hexahedral housing having heat insulation properties, and houses the processing furnace 2 and the linear light emitters 41 to 46 and 51 to 56 therein. FIG. 1A shows a state in which the upper surface 11 of the lamp house 1 is removed.

  The processing furnace 2 is a flat tube body made of a translucent material, and has an opening 21 on the front surface side and a tube portion 22 on the back surface side. The processing furnace 2 is inserted into the lamp house 1 through the opening 121 on the front surface 12 of the lamp house 1, exposing the opening 21 to the outside from the front surface 12, and exposing the tube portion 22 to the outside from the hole 131 on the back surface 13. In this state, it is held in the lamp house 1.

  The support 3 has translucency, and is put into and out of the processing furnace 2 through the opening 21 in a state where the workpiece W is placed on the upper surface. A processing gas is introduced into the processing furnace 2 via the pipe portion 22.

  The linear light emitters 41 to 46 are arranged in parallel to each other outside the processing furnace 2 in the lamp house 1 on the upper surface side which is the first surface of the workpiece W. The linear light emitters 41 to 46 penetrate the left side surface 14 and the right side surface 15 of the lamp house 1. The linear light emitters 51 to 56 are arranged in parallel to each other on the lower surface side, which is the second surface of the workpiece W, outside the processing furnace 2 in the lamp house 1. The linear light emitters 51 to 56 penetrate the front surface 12 and the back surface 13 of the lamp house 1. In plan view, the linear light emitters 51 to 56 are arranged orthogonal to the linear light emitters 41 to 46.

  A total of twelve linear light emitters 41 to 46 and 51 to 56 are tubular lamps such as halogen lamps having the same shape, and are supplied with electric power from one end side exposed to the outside of the lamp house 1. For example, the linear light emitters 41 to 46 have power terminals at the ends exposed from the left side surface 14, and the linear light emitters 51 to 56 have power terminals at the ends exposed from the back surface 13.

  Note that the linear light emitters 41 to 46 and 51 to 56 have a light emission length L that is 2 longer than the work area D that is the length of one side of the workpiece W in order to make the amount of light irradiated to the workpiece W uniform. × 0.8h (where h is the height in the normal direction from the linear light-emitting body to the workpiece W) is preferably longer.

  As shown in FIG. 2, the linear light emitters 41 to 43 are respectively positioned at heights h1, h2, and h3 in the normal direction with respect to the upper surface WA of the rectangular workpiece W. Are arranged with a distance of L2 and L3 in the horizontal direction. The height h1 is longer than the height h2, and the height h2 is longer than the height h3. The linear light emitters 44 to 46 are arranged at positions symmetrical to the linear light emitters 41 to 43. An interval of a distance L1 longer than the distance L2 is provided between the linear light emitter 41 and the linear light emitter 44.

  By arranging the linear light emitters 41 to 46 above the upper surface WA of the workpiece W as described above, the upper surface WA of the workpiece W is closer to the end than the center portion as shown in FIG. The light is irradiated so that the amount of irradiation light increases. Since the temperature drop due to heat dissipation in the workpiece W is larger in the vicinity of the end portion than in the central portion, the upper surface W side of the workpiece W is irradiated by irradiating more light near the end portion than in the central portion. The temperature can be made uniform.

  That is, while confirming the heating state of the workpiece W, the heights h1 to h3 and the distances L1 to L3 are determined so that the light quantity distribution shown in FIG. Thereby, the upper surface WA of the workpiece W can be uniformly heated without changing the driving power of the linear light emitters 41 to 46.

  The linear light emitters 51 to 56 are rotated by 90 degrees with respect to the linear light emitters 41 to 46 in plan view from a position that is vertically symmetric with the linear light emitters 41 to 46 across the workpiece W. Place in position. By causing the longitudinal direction of the linear light emitters 41 to 46 and the longitudinal direction of the linear light emitters 51 to 56 to be orthogonal to each other, occurrence of temperature unevenness of the entire workpiece W can be alleviated.

  As described above, the linear light emitters 41 to 46 and the linear light emitters 51 to 56 are arranged by changing the distance from the workpiece W in accordance with the partial temperature decrease of the workpiece W, thereby forming a line. Each of the light emitters 41 to 46 and the linear light emitters 51 to 56 can have the same specification and the same driving amount. As a result, the entire workpiece W can be heated with light having a uniform color temperature, and the workpiece W can be soaked with higher accuracy. Further, the lifespan can be made uniform by setting the linear light emitters 41 to 46 and the linear light emitters 51 to 56 to the same specifications and the same driving amount.

  The linear light emitters 41 to 46 and the linear light emitters 51 to 56 are fixed to a single support member (not shown) at a portion exposed to the outside of the lamp house 1. Since it is preferable to replace all of the linear light emitters 41 to 46 and the linear light emitters 51 to 56 from the viewpoint of the light emission life, it is preferable to fix a plurality of linear light emitters on a single support member. This simplifies the replacement work. In this case, since the supporting members used for the linear light emitters 41 to 46 and the linear light emitters 51 to 56 can have the same shape, the linear light emitters 41 to 46 and the linear light emitters 51 to 56 are used. Can be integrally fixed to the support member.

  Moreover, the inside of the processing furnace 2 is divided into a plurality of zones such as a central portion, a left portion, a right portion, a front portion, and a rear portion, and the light emission amounts of the linear light emitters 41 to 46 and the linear light emitters 51 to 56 are set. It is preferable to be able to adjust each zone. Thereby, the partial temperature difference of the workpiece due to external factors can be eliminated. For example, when the processing gas is circulated in the processing furnace 2, the temperature on the inflow side of the processing gas is lower than the temperature on the outflow side, but the light emission amount of the linear light emitter located in the inflow side zone is reduced on the outflow side. By making it larger than the light emission amount of the linear light emitter located in the zone, it is possible to equalize the temperature of the object to be processed.

  The above description of the embodiment is to be considered in all respects as illustrative and not restrictive. The scope of the present invention is shown not by the above embodiments but by the claims. Furthermore, the scope of the present invention is intended to include all modifications within the meaning and scope equivalent to the scope of the claims.

1-Lamp House 2-Processing Furnace 41-46, 51-56-Linear Light Emitter 10-Lamp Heating Device

Claims (3)

A plurality of linear light emitters facing each of a first surface and a second surface parallel to each other in a flat plate-shaped workpiece;
The plurality of linear light emitters opposed to the first surface are parallel to each other in a plane parallel to the first surface, and are located closer to the end portion of the first surface. Placed at a short distance,
The plurality of linear light emitters facing the second surface are parallel to each other in a plane parallel to the second surface and orthogonal to the plurality of linear light emitters facing the first surface, The lamp heating apparatus which arrange | positions and arrange | positions the distance with said 2nd surface short, so that it is located in the edge part side of a 2nd surface.   The lamp heating apparatus according to claim 1, wherein all linear light emitters arranged on the first surface side and the second surface side have the same shape.   An arrangement position of each of the plurality of linear light emitters on the first surface side with respect to the object to be processed; an arrangement position of each of the plurality of linear light emitters on the second surface side of the object to be processed; The lamp heating apparatus according to claim 1, wherein the two are equal to each other.

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