JP2017001097A - Laser processing machine - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a laser processing machine using a fiber laser oscillator or a DDL oscillator which can improve quality of a cutting surface more than the conventional.SOLUTION: A laser processing machine 100 comprises a laser oscillator 11. The laser oscillator 11 excites a beam of a wavelength band of 1 μm or shorter wavelength. One process fiber 12 transmits a laser emitted from a laser oscillator 11. A light-focusing lens 27 constituted by a facet lens is one example of a light-focusing optical element. The light-focusing optical element focuses the laser emitted from the process fiber 12 to plural places in a unit area within a unit time from starting melting and ending melting of a planar material W1 (a workpiece to be processed) in the unit area of a radius of 0.5 mm of the optical axis of the laser when the laser is emitted to the planar material W1.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a laser beam machine and a laser cutting method.

Laser oscillators that emit lasers for cutting materials by laser processing machines include various oscillators such as CO ₂ laser oscillators, YAG laser oscillators, disk laser oscillators, fiber laser oscillators, and direct diode laser oscillators (DDL oscillators). .

International Publication No. 2013/058072

The CO ₂ laser oscillator is large in size and high in cost. On the other hand, fiber laser oscillators and DDL oscillators can be downsized and have low running costs. In recent years, fiber laser oscillators and DDL oscillators have been widely used in laser processing machines. .

When a metal plate (especially stainless steel or aluminum) is cut non-oxidatively with an assist gas such as nitrogen gas, it is cut with a laser processing machine using a CO ₂ laser oscillator, and a fiber laser oscillator or a DDL oscillator is used. Compared with the case of cutting with a laser processing machine, the former has a smaller cut surface roughness than the latter, and the quality of the cut surface is superior. Moreover, in the former, the cut surface roughness is substantially constant regardless of the plate thickness, whereas in the latter, the cut surface roughness is deteriorated as the plate thickness is increased.

  Furthermore, when a thick plate having a thickness of, for example, 3 mm or more is cut by a laser processing machine using a fiber laser oscillator or a DDL oscillator, dross is generated and adheres to the plate material, and the quality of the cut surface deteriorates.

  As described above, the fiber laser oscillator and the DDL oscillator are small and have a low running cost. However, since the quality of the cut surface is not good, the fiber laser oscillator and the DDL are used when a high quality cut surface is required. An oscillator cannot be used.

  A fiber laser oscillator and a DDL oscillator are suitable examples of a laser oscillator that excites a beam having a wavelength band of 1 μm or shorter. The same applies when a disk laser oscillator is used in place of the fiber laser oscillator and the DDL oscillator.

  Therefore, even if a laser oscillator that excites a beam with a wavelength of 1 μm or shorter than that is used, a laser processing machine having a good cut surface quality is strongly desired.

  The present invention provides a laser processing machine and a laser cutting method using a laser oscillator that excites a beam in a wavelength band of 1 μm or shorter, which can improve the quality of a cut surface as compared with the conventional one. Objective.

  In order to solve the problems of the prior art described above, the present invention provides a laser oscillator for exciting a beam having a wavelength band of 1 μm or shorter and a process for transmitting a laser emitted from the laser oscillator. When the workpiece is irradiated with the fiber and the laser emitted from the process fiber, the workpiece is melted from the time when the workpiece within the unit area with a radius of 0.5 mm of the optical axis of the laser starts to melt. There is provided a laser processing machine comprising a condensing optical element for condensing a laser at a plurality of locations within the unit area within a unit time until a time point.

  In the above laser processing machine, it is preferable that the condensing optical element does not individually control the laser output at each condensing point.

  The laser processing machine may further include a collimating lens that collimates the laser emitted from the laser oscillator, and the condensing optical element collects the laser collimated by the collimating lens on the workpiece. A lighted facet lens can be used.

  At this time, it is preferable that the facet lens has a plurality of polygonal planes of quadrilateral or more formed on a laser incident surface.

  In the above laser processing machine, the condensing optical element condenses the laser emitted from the laser oscillator at a plurality of locations of a fiber core of a beam transmission fiber, so that a plurality of lasers within the unit area are collected. You may make it condense on a location.

  In the laser processing machine, the condensing optical element may be a diffractive optical element or a condensing lens that is movable in a direction perpendicular to the optical axis of the laser.

  Further, in order to solve the above-described problems of the conventional technology, the present invention emits a laser by a laser oscillator that excites a beam in a wavelength band of 1 μm or shorter, and the laser emitted from the laser oscillator is When the laser beam transmitted through one process fiber and emitted from the process fiber is irradiated onto the workpiece, the workpiece within a unit area with a radius of 0.5 mm of the optical axis of the laser begins to melt. A laser cutting method is provided in which the workpiece is cut by condensing a laser beam at a plurality of locations within the unit area within a unit time from the point of time until completion of melting.

  In the above laser cutting method, it is preferable that the laser output at each condensing point is not individually controlled when condensing the laser at a plurality of locations within the unit area.

  In the laser cutting method described above, it is preferable to supply an assist gas having an assist gas pressure of 2.0 MPa or more and 3.0 MPa or less to the workpiece when the workpiece is melted by a laser.

  In the laser cutting method, the beam parameter product is preferably 23 mm · mrad or more and 28 mm · mrad or less.

  According to the laser beam machine and the laser cutting method of the present invention, the quality of the cut surface can be improved as compared with the conventional one while using a laser oscillator that excites a beam having a wavelength band of 1 μm or shorter.

It is a perspective view showing the example of the whole composition of the laser beam machine of one embodiment. It is a figure which shows schematic structure at the time of comprising the laser oscillator 11 in FIG. 1 with the fiber laser oscillator 11F. It is a figure which shows schematic structure at the time of comprising the laser oscillator 11 in FIG. 1 with the direct diode laser oscillator 11D. It is sectional drawing for demonstrating the incident angle of the laser which injects into the cutting front of a board | plate material. FIG. 6 is a characteristic diagram showing a relationship between an incident angle with respect to a cutting front and a laser absorption rate when a CO ₂ laser oscillator, a fiber laser oscillator 11F, and a DDL oscillator 11D are used as the laser oscillator 11. It is a conceptual diagram which shows the state in which the laser is injecting into the whole cutting front. FIG. 6 is a characteristic diagram showing the relationship between the plate thickness t and the maximum absorptance condensing diameter damax when a CO ₂ laser oscillator, a fiber laser oscillator 11F, and a DDL oscillator 11D are used as the laser oscillator 11. It is a conceptual perspective view for demonstrating the cutting speed V which cut | disconnects a board | plate material. It is a figure for demonstrating the calculation method of the condensing diameter d. A fiber laser oscillator 11F or a DDL oscillator 11D is used as the laser oscillator 11, and each of the incident angles 78, 80, 82.5, 83, 85.6, and 87 degrees has an absorption rate Ab, an absorption rate maximum condensing diameter damax, and a cutting speed. It is a figure which shows regulation parameter Ab / damax collectively. A fiber laser oscillator 11F or a DDL oscillator 11D is used as the laser oscillator 11, and a plurality of plate thicknesses t and absorption maximum condensing diameter damax are respectively obtained at incident angles of 78, 80, 82.5, 83, 85.6, and 87 degrees. It is a characteristic view which shows the relationship. It is a top view which shows one structural example of a facet lens. It is a characteristic view which shows the relationship between the absorptance maximum condensing diameter damax and the cutting speed regulation parameter Ab / damax, and the relationship between the absorptance maximum condensing diameter damax and the cutting speed V. It is a characteristic view which shows the relationship between the absorptance maximum condensing diameter damax and the cutting surface roughness Ra, and the relationship between the absorptance maximum condensing diameter damax and the cutting speed V. It is a characteristic view which shows the relationship between board thickness t and cut surface roughness Ra of the laser processing machine of one Embodiment, and the laser processing machine of a comparative example. It is a top view which shows a DOE lens roughly.

  Hereinafter, a laser beam machine and a laser cutting method according to an embodiment will be described with reference to the accompanying drawings. In this embodiment, a case where a fiber laser oscillator or a DDL oscillator is used as a laser oscillator that excites a beam in a wavelength band of 1 μm or shorter is described.

  In FIG. 1, a laser processing machine 100 includes a laser oscillator 11 that generates and emits a laser LB, a laser processing unit 15, and a process fiber 12 that transmits the laser LB to the laser processing unit 15. The laser beam machine 100 cuts and cuts the laser beam LB emitted from the laser oscillator 11.

  The laser oscillator 11 is a fiber laser oscillator or a direct diode laser oscillator (hereinafter referred to as a DDL oscillator). The process fiber 12 is mounted along X-axis and Y-axis cable ducts (not shown) arranged in the laser processing unit 15.

  The laser processing unit 15 includes a processing table 21 on which a plate material W1 that is a workpiece is placed, a portal X-axis carriage 22 that is movable in the X-axis direction on the processing table 21, and an X-axis on the X-axis carriage 22 And a Y-axis carriage 23 movable in the Y-axis direction perpendicular to the Y-axis. Further, the laser processing unit 15 has a collimator unit 29 fixed to the Y-axis carriage 23.

  The collimator unit 29 collimates the laser beam LB emitted from the output end of the process fiber 12 into a parallel light beam so as to be a substantially parallel light beam, and the laser beam LB converted into the substantially parallel light beam is perpendicular to the X axis and the Y axis. And a bend mirror 25 that reflects downward in the Z-axis direction. Further, the collimator unit 29 includes a condenser lens 27 that condenses the laser LB reflected by the bend mirror 25 and a processing head 26.

  The collimator lens 28, the bend mirror 25, the condenser lens 27, and the processing head 26 are fixed in the collimator unit 29 with the optical axis adjusted in advance. In order to correct the focal position, the collimating lens 28 may be configured to move in the X-axis direction.

  The collimator unit 29 is fixed to a Y-axis carriage 23 that is movable in the Y-axis direction. The Y-axis carriage 23 is provided on an X-axis carriage 22 that is movable in the X-axis direction. Therefore, the laser processing unit 15 can move the position at which the plate material W1 is irradiated with the laser LB emitted from the processing head 26 in the X-axis direction and the Y-axis direction.

  With the above configuration, the laser processing machine 100 can transmit the laser LB emitted from the laser oscillator 11 to the laser processing unit 15 through the process fiber 12 and irradiate the plate material W1 to cut the plate material W1.

  When cutting the plate material W1, an assist gas for removing the melt is injected onto the plate material W1. In FIG. 1, the illustration of the configuration for injecting the assist gas is omitted.

  FIG. 2 shows a schematic configuration when the laser oscillator 11 is constituted by a fiber laser oscillator 11F. In FIG. 2, each of the plurality of laser diodes 110 emits a laser having a wavelength λ. The excitation combiner 111 spatially combines the laser beams emitted from the plurality of laser diodes 110.

  The laser emitted from the pump combiner 111 is incident on the Yb-doped fiber 113 between the two fiber Bragg gratings (FBGs) 112 and 114. The Yb-doped fiber 113 is a fiber in which a rare earth Yb (ytterbium) element is added to the core.

  The laser incident on the Yb-doped fiber 113 repeats reciprocation between the FBGs 112 and 114, and a laser having a wavelength λ ′ (1 μm band) of approximately 1060 nm to 1080 nm different from the wavelength λ is emitted from the FBG 114. The laser emitted from the FBG 114 is incident on the process fiber 12 via the feeding fiber 115 and the beam coupler 116. The beam coupler 116 includes lenses 1161 and 1162.

  In addition, the process fiber 12 is comprised with one optical fiber, and the laser transmitted with the process fiber 12 is not synthesize | combined with another laser until it irradiates the board | plate material W1.

  FIG. 3 shows a schematic configuration when the laser oscillator 11 is constituted by a DDL oscillator 11D. In FIG. 3, a plurality of laser diodes 117 respectively emit lasers having different wavelengths λ1 to λn. The wavelengths λ1 to λn (wavelength band shorter than 1 μm band) are, for example, 910 nm to 950 nm.

  The optical box 118 spatially couples lasers having wavelengths λ1 to λn emitted from a plurality of laser diodes 117. The optical box 118 includes a collimating lens 1181, a grating 1182, and a condensing lens 1183.

  The collimating lens 1181 collimates a laser having wavelengths λ1 to λn. The grating 1182 bends the direction of the collimated laser beam by 90 degrees and makes it incident on the condenser lens 1183. The condenser lens 1183 collects the incident laser and makes it incident on the process fiber 12.

  In addition, the process fiber 12 is comprised with one optical fiber, and the laser transmitted with the process fiber 12 is not synthesize | combined with another laser until it irradiates the board | plate material W1.

  Next, it will be considered how to use the fiber laser oscillator 11F or the DDL oscillator 11D to improve the quality of the cut surface of the plate material W1.

  FIG. 4 conceptually shows a state in which the laser irradiated from above in the figure is incident on the cutting front W1cf of the plate material W1 and reflected. The angle formed by the laser incident direction and the direction indicated by the broken line perpendicular to the cutting front W1cf is the laser incident angle θ. If the cutting front W1cf is an ideal plane, the angle formed by the bottom surface of the plate material W1 and the cutting front W1cf is also the incident angle.

FIG. 5 shows the relationship between the incident angle θ and the laser absorption rate when a CO ₂ laser oscillator, a fiber laser oscillator 11F, and a DDL oscillator 11D are used as the laser oscillator 11. Here, a characteristic diagram when the plate material W1 is an iron-based material is shown.

As shown in FIG. 5, when the CO ₂ laser oscillator is used, the absorption rate is maximized when the incident angle θ is 87 degrees. When the fiber laser oscillator 11F or the DDL oscillator 11D is used, the absorption rate is maximized when the incident angle θ is 77.5 degrees.

As shown in FIG. 6, when the plate thickness of the plate member W1 is t, the condensing diameter of the laser is d, the angle formed by the laser and the cutting front W1cf is φ, and the laser having the beam diameter d is incident on the entire cutting front W1cf. Assume. At this time, Expression (1) is established. Note that φ = 90−θ.
d = t · tanφ (1)

Based on FIG. 5, the relationship between the plate thickness t and the condensing diameter damax that maximizes the absorptance (hereinafter referred to as the maximum absorptance condensing diameter damax) is obtained using Equation (1) as shown in FIG. become. From FIG. 7, it can be seen that when the fiber laser oscillator 11F or the DDL oscillator 11D is used as the laser oscillator 11, the maximum absorptivity condensing diameter damax is about 4.2 times larger than when the CO ₂ laser oscillator is used. .

  However, if the maximum absorption diameter condensing diameter damax is too large, a sufficient power density cannot be ensured at the processing point, and the cutting speed becomes slow.

  The cutting speed which cut | disconnects board | plate material W1 is demonstrated using FIG. In FIG. 8, the incident beam diameter of the laser incident on the condenser lens 27 is D, and the laser beam condensed by the condenser lens 27 is applied to the plate material W1.

The laser output is P (W) (W = J / s), the absorption rate of the laser to the plate material W1 is Ab, the cutting width is b (mm), the plate thickness is t (mm), and the energy for melting or evaporating the material is E (J / cm ³ ). The cutting speed V (cm / s) when the plate material W1 is cut by the laser is expressed by Expression (2).
V = P · Ab / (E · b · t) (2)

  However, it is assumed that all energy is absorbed by the cutting front W1cf of the cutting kerf, there is no loss due to heat conduction of the material, and the molten metal in the cutting kerf is completely discharged by the assist gas.

  In order to prevent dross from adhering to the plate material W1 and to improve the quality of the cut surface, the assist gas pressure (assist gas pressure) supplied to the plate material W1 should be high. For example, the assist gas pressure is preferably set to 2.0 MPa or more and 3.0 MPa or less.

  From equation (2), it can be seen that the cutting speed V is proportional to the absorption rate Ab and inversely proportional to the cutting width b. The cutting width b decreases as the condensing diameter d decreases.

How the condensing diameter d is obtained will be described with reference to FIG. If the wavelength of the laser is λ, the focal length of the condensing lens 27 is f, and the beam parameter product is BPP (Beam Parameter Products), the condensing diameter d is expressed by Equation (3).
d = (1.27 · π · f · BPP) / D (3)

  BPP is a product of the beam divergence angle and the beam waist (beam diameter), and is an index representing the quality of the beam. In general, a BPP value of 1 is good when a Gaussian beautiful beam profile is ideal. However, when cutting a sheet metal with a beam having a high energy density, particularly when cutting a thick plate having a thickness of 3 mm or more, it is not always necessary to bring the BPP value close to 1 (a process with good surface roughness). It has become clear that it cannot be said to lead to.

  In the case of cutting a thick plate having a thickness of 3 mm or more, it is better to increase the beam diameter. In this case, the BPP is preferably 23 mm · mrad or more and 28 mm · mrad or less.

  When the fiber laser oscillator 11F or the DDL oscillator 11D is used as the laser oscillator 11 and the plate thickness t is 5 mm, the incident angles are 78, 80, 82.5, 83, 85.6, and 87 degrees, respectively, and the absorption rate Ab, FIG. 10 shows a summary of the absorption maximum condensing diameter damax and Ab / damax. Since Ab / damax is a factor that determines the cutting speed V, it is referred to as a cutting speed defining parameter.

  As shown in FIG. 5, the absorption rate Ab becomes maximum when the incident angle θ is 77.5 degrees, and the absorption rate Ab decreases as the incident angle θ increases. However, as shown in FIG. 10, the value of the cutting speed regulation parameter Ab / damax decreases as the incident angle θ decreases from 87 degrees to 78 degrees.

  If the value of the cutting speed regulation parameter Ab / damax is small, the laser power density is small, and it takes a relatively long time to cut the plate material W1. Considering both the absorption rate Ab and the cutting speed regulation parameter Ab / damax, when the plate thickness t is 5 mm as shown in FIG. 10, the incident angle θ is set to about 83 degrees. Is good.

  Furthermore, when the incident angles are 78, 80, 82.5, 83, 85.6, and 87 degrees, and the relationship between the plurality of plate thicknesses t and the maximum absorptance condensing diameter damax is obtained, as shown in FIG. Become.

  Here, a configuration suitable for setting the maximum absorptance condensing diameter damax to an appropriate value will be described. In the present embodiment, a facet lens 27F as shown in FIG. The facet lens 27F has a plurality of hexagonal planes F0 formed on the surface of the convex lens (incident surface on the laser). The facet lens 27F has a plurality of curves on one lens surface.

  In FIG. 10, a standard condensing lens generally used as the condensing lens 27 is used in order to set the maximum absorptance condensing diameter damax to 0.38 mm or less. In FIG. 10, it is preferable to use the facet lens 27 </ b> F as the condensing lens 27 in order to set the maximum absorptance condensing diameter damax to 0.61 mm or more.

  The facet lens 27F is melted from the time when the workpiece within the unit area with a radius of 0.5 mm of the optical axis of the laser starts to melt when the laser emitted from the laser oscillator 11 is irradiated onto the workpiece. It is an example of the condensing optical element which condenses a laser in the several location in a unit area within the unit time to the time of finishing.

  Preferably, the condensing optical element causes the laser beam to fall within a unit area within a unit time from the start of melting the workpiece within a unit area having a radius of 0.4 mm of the optical axis of the laser to the end of melting. Condensate at multiple points. At this time, the condensing optical element does not individually control the laser output at each condensing point. Therefore, there is no difference in light intensity at each condensing point.

  The laser beam machine according to the present embodiment includes a condensing optical element, so that even a thick plate having a thickness of 3 mm or more can be cut with high quality.

  For example, as the condensing condition 1, in order to set the maximum absorptive condensing diameter damax to 0.38 mm, a standard condensing lens having a focal length f of 190 mm can be used. As the condensing condition 2, in order to set the maximum absorptance condensing diameter damax to 0.61 mm, a facet lens 27F having a focal length f of 150 mm can be used. As the condensing condition 3, in order to set the maximum absorptive condensing diameter damax to 1.06 mm, a facet lens 27F having a focal length f of 190 mm can be used.

  The facet lens 27F is not limited to the shape shown in FIG. 12, and may have a configuration having a plurality of rectangular planes on the surface of the convex lens. The facet lens 27 </ b> F only needs to be formed with a plurality of polygonal flat surfaces on the incident surface of the laser.

  The plurality of planes formed on the surface of the facet lens 27F are formed so as to focus on different planar positions. Therefore, the facet lens 27F acts to blur the focus.

  Therefore, when the facet lens 27F is used as the condensing lens 27, the condensing diameter d can be increased as compared with the case where the standard condensing lens is used. The facet lens 27F is suitable for setting the maximum absorptance condensing diameter damax to an appropriate relatively large value.

  FIG. 13 shows the relationship between the maximum absorption rate condensing diameter damax and the cutting speed defining parameter Ab / damax, and the relationship between the maximum absorption rate condensing diameter damax and the cutting rate V in the light collecting conditions 1 to 3. Cutting speed V was 1.2 m / min under condensing condition 1, 0.6 m / min under condensing condition 2, and 0.4 m / min under condensing condition 3. As can be seen from FIG. 13, the inclination of the cutting speed V approximates the inclination of the cutting speed defining parameter Ab / damax.

  FIG. 14 shows the relationship between the maximum absorptance condensing diameter damax and the cut surface roughness Ra for each of the condensing conditions 1 to 3, and the relationship between the maximum absorptance condensing diameter damax and the cutting speed V. FIG. 14 shows a case where a DDL oscillator 11D is used as the laser oscillator 11 and a stainless steel plate having a thickness of 5 mm is cut as the plate material W1. The cut surface roughness Ra may be a cut surface arithmetic average roughness.

  As can be seen from FIG. 14, the condensing conditions 2 and 3 using the facet lens 27 </ b> F as the condensing lens 27 are rougher than the condensing condition 1 using the standard condensing lens as the condensing lens 27. Ra is greatly improved. In particular, under the condensing condition 2 where the maximum absorption diameter condensing diameter damax is 0.61 mm, the cut surface roughness Ra is about 2 μm, which is 1/3 or less compared with the condensing condition 1.

  FIG. 15 shows a laser processing machine of this embodiment using a DDL oscillator 11D as the laser oscillator 11 and a facet lens 27F as the condenser lens 27. The condenser diameter d is 0.61 mm, and the plate thickness W1 is 5 mm. In addition, the cut surface roughness Ra is shown when 3 mm and 4 mm stainless steel is cut. Again, the cut surface roughness Ra may be a cut surface arithmetic average roughness.

For comparison, FIG. 15 shows a plurality of plate thicknesses in each of a laser processing machine using a CO ₂ laser oscillator and a standard condenser lens, and a laser processing machine using a fiber laser oscillator 11F and a standard condenser lens. The cut surface roughness Ra when the stainless steel of t is cut is also shown.

  Although not shown here, when a plurality of plate thicknesses of stainless steel are cut by the laser processing machine of this embodiment using the fiber laser oscillator 11F and the facet lens 27F, the book using the DDL oscillator 11D and the facet lens 27F. It has the same characteristics as the laser processing machine of the embodiment.

  Conversely, when a plurality of stainless steels having a thickness t are cut by a laser processing machine using the DDL oscillator 11D and the standard condenser lens, the same as the laser processing machine using the fiber laser oscillator 11F and the standard condenser lens. Has characteristics.

In the laser processing machine of this embodiment using the fiber laser oscillator 11F or the DDL oscillator 11D and the facet lens 27F as the condenser lens 27, although it is slightly less than the laser processing machine using the CO ₂ laser oscillator, the cut surface The quality of can be greatly improved than before.

  According to the present embodiment, even when a high-quality cut surface is required, a laser processing machine can be configured using the fiber laser oscillator 11F or the DDL oscillator 11D that is small and has low running cost.

  The condensing optical element is not limited to the facet lens 27F. The beam transmission path (beam transmission fiber) between the laser oscillator 11 and the processing head 26 may be divided into two or more, and a beam coupler may be provided between the two fibers. A focus lens in the beam coupler may be used as the above-described condensing optical element.

  In this case, the condensing optical element condenses the laser at a plurality of locations within the unit area by condensing the laser emitted from the laser oscillator 11 at a plurality of locations of the fiber core of the beam transmission fiber.

  The condensing optical element may be a diffractive optical element instead of the facet lens 27F, or may be a condensing lens that is movable in a direction perpendicular to the optical axis.

  When the condensing optical element is a diffractive optical element, for example, a diffractive optical lens (DOE (Diffractive Optical Elements) lens) can be used.

  FIG. 16 schematically shows the DOE lens 30. As shown in FIG. 16, the DOE lens 30 has a plurality of circumferential diffraction grooves 31. The DOE lens 30 can be used as the condenser lens 27 or the collimating lens 28. Although not shown, the bend mirror 25 can be changed to a grating mirror.

  When the condensing optical element is a condensing lens that is movable in a direction perpendicular to the optical axis, for example, the lens 1162 in FIG. 2 can have the function. That is, by rotating the lens 1162 eccentrically in the direction perpendicular to the optical axis, or by moving the lens 1162 up and down or in the front-rear direction in the direction of FIG. The function of the condensing optical element can be realized.

  Condensing the laser beam at a plurality of locations within the unit area within a unit time from the start of melting the workpiece within a unit area with a radius of 0.5 mm of the laser optical axis to the end of melting. When the optical element is used, the beam energy per unit time is irradiated almost uniformly per unit area. Thereby, even a thick plate having a thickness of 3 mm or more can be cut with high quality.

  Laser wavelength, power, energy density, workpiece thickness and cutting width, workpiece laser absorption rate, cutting speed, incident angle, melted workpiece, and assist gas type When the pressure is appropriately combined, a higher quality cutting can be achieved by a synergistic effect thereof.

  In the above description, an iron-based material (stainless steel) is taken as an example of the plate material W1, but the quality of the cut surface is also the same according to the laser processing machine and the laser cutting method of the present embodiment even when aluminum or titanium is used. Can be greatly improved as compared with the prior art.

  The present invention is not limited to the embodiment described above, and various modifications can be made without departing from the scope of the present invention. A disk laser oscillator may be used instead of the fiber laser oscillator and the DDL oscillator.

11 Laser oscillator 11D Direct diode laser oscillator (DDL oscillator)
11F Fiber laser oscillator 15 Laser processing unit 27 Condensing lens 27F Facet lens 28 Collimating lens 30 Diffractive optical lens (DOE lens, diffractive optical element)
100 Laser processing machine W1 Plate material (work material)

The present invention relates to a laser processing machine.

An object of the present invention is to provide a laser processing machine using a laser oscillator that can excite a beam in a wavelength band of 1 μm or shorter than that in the past, which can improve the quality of a cut surface.

In order to solve the problems of the prior art described above, the present invention provides a laser oscillator for exciting a beam having a wavelength band of 1 μm or shorter and a process for transmitting a laser emitted from the laser oscillator. A fiber , a collimating lens for collimating a laser emitted from the process fiber , and a unit having a radius of 0.5 mm of the optical axis of the laser when the workpiece is irradiated with the laser emitted from the collimating lens. wherein in the area in a unit of time to the time to finish molten from the time of starting to melt the workpiece, and a condensed to condensing optical elements in a plurality of locations of the laser within the unit area, said condensing The optical element is formed by forming a plurality of polygonal planes of a quadrangle or more on the incident surface of the laser that has been collimated by the collimating lens, and the incident light on the incident surface. To provide a laser processing machine, which is a facet lens for condensing the the workpiece a.

In order to solve the problems of the prior art described above, the present invention provides a laser oscillator for exciting a beam having a wavelength band of 1 μm or shorter and a process for transmitting a laser emitted from the laser oscillator. When the workpiece is irradiated with the fiber and the laser emitted from the process fiber, the workpiece is melted from the time when the workpiece within the unit area with a radius of 0.5 mm of the optical axis of the laser starts to melt. A condensing optical element for condensing the laser at a plurality of locations within the unit area within a unit time until the time point, and the condensing optical element transmits the laser emitted from the laser oscillator to a beam transmission fiber A laser processing machine is provided, wherein the laser is condensed at a plurality of locations within the unit area by condensing at a plurality of locations of the fiber core.

In the above laser processing machine, it is preferable that the condensing optical element does not individually control the laser output at each condensing point.

According to the laser processing machine of the present invention, the quality of the cut surface can be improved as compared with the conventional one while using a laser oscillator that excites a beam having a wavelength band of 1 μm or shorter.

Claims (11)

A laser oscillator for exciting a beam having a wavelength band of 1 μm or shorter;
One process fiber for transmitting the laser emitted from the laser oscillator;
When the laser beam emitted from the process fiber is irradiated onto the workpiece, from the time when the workpiece within the unit area with a radius of 0.5 mm of the optical axis of the laser starts to melt until the time when the melting is finished A condensing optical element for condensing the laser at a plurality of locations within the unit area within a unit time; and
A laser processing machine comprising:   The laser processing machine according to claim 1, wherein the condensing optical element does not individually control a laser output at each condensing point. A collimating lens that collimates the laser emitted from the laser oscillator;
The laser processing machine according to claim 1, wherein the condensing optical element is a facet lens that condenses the laser beam collimated by the collimating lens onto the workpiece.   The laser processing machine according to claim 3, wherein the facet lens has a plurality of polygonal planes of quadrilateral or more formed on a laser incident surface.   The condensing optical element condenses the laser at a plurality of locations within the unit area by condensing the laser emitted from the laser oscillator at a plurality of locations of the fiber core of the beam transmission fiber. The laser beam machine according to claim 1 or 2, characterized in that   The laser processing machine according to claim 1, wherein the condensing optical element is a diffractive optical element.   The laser processing machine according to claim 1, wherein the condensing optical element is a condensing lens that is movable in a direction perpendicular to the optical axis of the laser. The laser is emitted by a laser oscillator that excites a beam in a wavelength band of 1 μm or shorter,
The laser emitted from the laser oscillator is transmitted through one process fiber,
When the laser beam emitted from the process fiber is irradiated onto the workpiece, from the time when the workpiece within the unit area with a radius of 0.5 mm of the optical axis of the laser starts to melt until the time when the melting is finished A laser cutting method comprising: condensing a laser beam at a plurality of locations within the unit area and cutting the workpiece within a unit time.   9. The laser cutting method according to claim 8, wherein when the laser is focused at a plurality of locations within the unit area, the laser output at each focused point is not individually controlled.   The laser cutting method according to claim 8 or 9, wherein an assist gas having an assist gas pressure of 2.0 MPa to 3.0 MPa is supplied to the workpiece when the workpiece is melted by a laser. .   11. The laser cutting method according to claim 8, wherein the beam parameter product is 23 mm · mrad or more and 28 mm · mrad or less.