JP2016211949A - Force detection device and robot - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a force detection device that can reduce variations in output from a piezoelectric element, and a robot.SOLUTION: A force detection device has a piezoelectric element, a container 60 that stores the piezoelectric element, and a pressurization plate 33 that pressurizes the piezoelectric element, where a contact part 34 of the pressurization plate 33 in contact with a lid 62 of the container 60 has a convex shape.SELECTED DRAWING: Figure 4

Description

  The present invention relates to a force detection device and a robot.

  The force detection device is a device used for a force sensor that utilizes the piezoelectric effect of a single crystal such as quartz, and decomposes and detects the applied force component due to the anisotropy of the piezoelectric effect due to the crystal orientation. . In order to improve sensitivity, the quartz-type force sensor applies a certain applied pressure to the force detection device in advance to increase the accuracy of the detected force.

  In addition, for example, in a structure in which stress is applied to a force detection device in which a piezoelectric plate is laminated through a case, the stress is applied uniformly, and a convex portion provided on a lid and a dummy substrate of the force detection device are applied. A technique for fitting and aligning a provided recess is disclosed (for example, see Patent Document 1).

JP 2012-174947 A

  Normally, in a structure in which stress is applied to a force detection device in which piezoelectric plates are stacked via a case, the pressurizing plate is composed of a flat plate. It may not be pushed. As a result, the force actually detected may vary. However, Patent Document 1 does not describe nonuniform pressure due to deformation of a member to be pressurized.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

  Application Example 1 A force detection device according to this application example is a force detection device that includes a piezoelectric element, a container that houses the piezoelectric element, and a pressurizing plate that pressurizes the piezoelectric element. The abutting portion of the pressurizing plate that abuts on the projection has a convex shape.

  According to this application example, in the pressurizing plate that pressurizes with a plurality of screws or the like, a surface that contacts the lid between the plurality of screws is convex. Thereby, stress due to stress can be evenly distributed in the convex bent portion. As a result, variations in the output of the piezoelectric element can be reduced.

  Application Example 2 In the force detection device according to the application example described above, it is preferable that the contact portion of the lid of the container that contacts the pressure plate has a convex shape.

  According to this application example, stress due to stress can be uniformly distributed in the convex bent portion.

  Application Example 3 A robot according to this application example includes the force detection device described above.

  According to this application example, a highly reliable robot can be provided.

The perspective view which shows the force detection apparatus which concerns on this embodiment. Sectional drawing which shows the force detection apparatus which concerns on this embodiment. Sectional drawing which shows the force detection apparatus which concerns on this embodiment. The figure which shows the wall part and sensor device which concern on this embodiment, (A) is a top view which shows a wall part, (B) is sectional drawing which shows a wall part and a sensor device. Sectional drawing which shows the deformation | transformation at the time of pressurization with the contact part of the wall part which concerns on this embodiment, and the contact part of a lid | cover, (A) is sectional drawing which shows the state of a lid | cover when not pressurizing, (B ) Is a cross-sectional view showing the deformed state of the lid and the curved state of the wall during pressurization. The figure which shows the bending state at the time of the pressurization of the wall part which concerns on this embodiment, (A) is the bending state of this embodiment, (B) is a figure which shows the bending state of a prior art. The figure which shows the output measuring method of this embodiment and a prior art, (A) shows measurement arrangement | positioning, (B) is a figure which shows arrangement | positioning of a sensor device. The figure which shows the output variation of this embodiment and a prior art, (A) is the output variation of this embodiment, (B) is a figure which shows the output variation of a prior art. The figure explaining the shift | offset | difference of the translational force which concerns on this embodiment, (A) is a top view which shows a wall part, (B) is sectional drawing which shows a wall part and a sensor device. The figure which shows an example of the single arm robot using the force detection apparatus which concerns on this embodiment. The figure which shows an example of the multi-arm robot using the force detection apparatus which concerns on this embodiment. The figure which shows one example of the electronic component inspection apparatus and electronic component conveyance apparatus which used the force detection apparatus which concerns on this embodiment. The figure which shows one example of the electronic component conveying apparatus using the force detection apparatus which concerns on this embodiment. The figure which shows an example of the components processing apparatus using the force detection apparatus which concerns on this embodiment. The figure which shows an example of the moving body using the force detection apparatus which concerns on this embodiment.

  DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, embodiments of the invention will be described with reference to the drawings. Note that the drawings to be used are appropriately enlarged or reduced so that the part to be described can be recognized.

(Embodiment of force detection device)
FIG. 1 is a perspective view showing a force detection device 1 according to the present embodiment. FIG.2 and FIG.3 is sectional drawing which shows the force detection apparatus 1 which concerns on this embodiment. In the following, the upper side in FIG. 2 is referred to as “upper” or “upper”, and the lower side is referred to as “lower” or “lower”.

  FIG. 3 shows an α axis, a β axis, and a γ axis as three axes orthogonal to each other. FIG. 2 shows only the γ-axis among the three axes.

  As shown in FIG. 1, the force detection device 1 according to the present embodiment has an external force applied to the force detection device 1, that is, a six-axis force (α, β, γ-axis translational force components and α, β, It has a function of detecting a rotational force component around the γ axis.

  As shown in FIG. 2, the force detection device 1 includes a first base 2, a second base 3 that is disposed at a predetermined interval from the first base 2, and that faces the first base 2, and a first base 2. And the side wall part 16 provided in the outer peripheral part of the 2nd base 3, the four analog circuit boards 4 accommodated (provided) between the 1st base 2 and the 2nd base 3, and the 1st base 2 Are mounted (provided) between the second base 3 and the digital circuit board 5 electrically connected to each analog circuit board 4, and one is mounted on each analog circuit board 4, In response, four sensor devices 6 having a charge output element (piezoelectric element) 10 that is an element that outputs a signal (charge) and a package (container) 60 that houses the charge output element 10, eight pressurizing bolts 71, It has.

Below, the structure of each part of the force detection apparatus 1 is explained in full detail.
In the following description, as shown in FIG. 3, among the four sensor devices 6, the sensor device 6 located on the right side is referred to as “sensor device 6 </ b> A”, and hereinafter “sensor device 6 </ b> B” in order counterclockwise. These are referred to as “sensor device 6C” and “sensor device 6D”. Further, when the sensor devices 6A, 6B, 6C, and 6D are not distinguished, they are referred to as “sensor device 6”.

  As shown in FIG. 2, the first base portion 2 has a plate-like bottom plate 22 and four wall portions 24 provided on the upper surface of the end portion of the bottom plate 22 and projecting upward from the upper surface. ing. The planar shape (shape seen from the thickness direction) of the bottom plate 22 (first base 2) is circular. Note that the planar shape of the bottom plate 22 is not limited to the illustrated shape, and examples thereof include a quadrangle such as a square and a rectangle, a polygon such as a pentagon, a hexagon, and an ellipse.

  For example, when the force detection device 1 is provided between a robot arm and an end effector and is used as a force sensor for detecting an external force applied to the end effector, the lower surface 221 of the first base 2 includes the robot It functions as a mounting surface for the arm.

  Each wall portion 24 is fixed (coupled) to the bottom plate 22. Although the fixing method is not particularly limited, in the illustrated configuration, each wall portion 24 is fixed to the bottom plate 22 with a plurality of screws 172.

  Further, convex portions 23 are formed so as to project from the surfaces of the wall portions 24 facing outward. The top surface 231 of each convex portion 23 is a plane perpendicular to the bottom plate 22. Each wall portion 24 is provided with two female screws 241 that are screwed into pressurizing bolts 71 described later (see FIG. 3).

  As shown in FIG. 2, the second base portion 3 is arranged to face the first base portion 2 with a predetermined interval.

  The second base portion 3 includes a plate-like top plate 32 and four wall portions (pressure plates) 33 provided on the lower surface of the end portion of the top plate 32 and projecting downward from the lower surface. Yes. The planar shape of the top plate 32 (second base 3) is not particularly limited, but is preferably a shape corresponding to the planar shape of the bottom plate 22 (first base 2). In the present embodiment, the planar shape of the top plate 32 is preferred. The shape is circular like the planar shape of the bottom plate 22. The top plate 32 is preferably the same size as the bottom plate 22 or a size that includes the bottom plate 22.

  Taking the case where the force detection device 1 is used as a force sensor for the robot as an example, the upper surface 321 of the second base 3 functions as a mounting surface for an end effector attached to the arm of the robot. Further, the upper surface 321 of the second base 3 and the lower surface 221 of the first base 2 described above are parallel in a natural state where no external force is applied.

  Each wall 33 is fixed (coupled) to the top plate 32. Although the fixing method is not particularly limited, in the illustrated configuration, each wall portion 33 is fixed to the top plate 32 with a plurality of screws 173.

  The inner wall surface 331 of each wall portion 33 is a plane perpendicular to the top plate 32. Sensor devices 6 are provided between the top surface 231 of each wall portion 24 and the inner wall surface 331 of each wall portion 33.

  The contact portion 34 (see FIG. 4) of the wall portion 33 that contacts the lid 62 (see FIG. 4) of the package 60 has a convex shape. The shape of the contact portion 34 of the wall portion 33 that contacts the lid 62 of the package 60 is a convex shape. The abutting portion 34 of the wall portion 33 that abuts the lid 62 of the package 60 has a convex shape that is convex toward the lid 62 of the package 60. The contact portion 34 has a convex shape extending in the direction of the lid 62 of the package 60. Of the convex shape of the abutting portion 34 of the wall portion 33, the abutting portion 34 in the direction toward the lid 62 of the package 60 is in the direction of the convex shape of the abutting portion 64 of the lid 62 of the package 60 toward the wall portion 33. The contact portion 64 can be contacted. In addition, although the convex-shaped front-end | tip of the contact part 34 of this embodiment is flat, you may curve.

FIG. 4 is a diagram illustrating the wall 33 and the sensor device 6 according to the present embodiment. FIG. 4A is a plan view showing the wall portion 33, and FIG. 4B is a cross-sectional view showing the wall portion 33 and the sensor device 6. FIG. 5 is a cross-sectional view showing deformation of the contact portion 34 of the wall portion 33 and the contact portion 64 of the lid 62 during pressurization according to the present embodiment. FIG. 5A is a cross-sectional view showing a state of the lid 62 when no pressure is applied, and FIG. 5B is a cross-sectional view showing a deformed state of the lid 62 and a curved state of the wall portion 33 during pressurization. is there.
As shown in FIG. 4B, the contact portion 34 that contacts the sensor device 6 of the wall portion 33 according to the present embodiment has a convex shape. According to this, as shown in FIG. 5B, the lid 62 is deformed at the time of pressurization, so that the deformation stress of the lid 62 is not easily transmitted to the package 60. As a result, output variation of the charge output element 10 in the force detection device 1 can be reduced.

  The first base 2 and the second base 3 are connected and fixed by eight pressurizing bolts 71. That is, each wall part 24 and each wall part 33 are connected and fixed by the two pressurizing bolts 71, respectively. As shown in FIG. 3, there are eight (a plurality) of the pressurizing bolts 71, and two of them are arranged on both sides of each sensor device 6. The number of pressurizing bolts 71 for one sensor device 6 is not limited to two, and may be three or more, for example.

  Moreover, it does not specifically limit as a constituent material of the pressurization volt | bolt 71, For example, various resin materials, various metal materials, etc. can be used.

  Thus, the first base 2 and the second base 3 connected by the pressurizing bolt 71 form a storage space for storing the sensor devices 6A to 6D, the analog circuit board 4, and the digital circuit board 5. The storage space has, for example, a circular or rounded square cross-sectional shape.

  Moreover, as shown in FIG.2 and FIG.3, the side wall part 16 is provided in the outer peripheral part of the 1st base 2 and the 2nd base 3. As shown in FIG. Thereby, in the outer peripheral part of the 1st base 2 and the 2nd base 3, the space between the 1st base 2 and the 2nd base 3 can be sealed, The 1st base 2 and the 2nd base 3 It is possible to prevent dust and dust from entering the space between the two.

  The side wall portion 16 includes a tubular portion 161 that forms a tubular shape, and a flange 162 that is formed on the inner peripheral side surface of the proximal end portion (lower end portion) of the tubular portion 161. The inner shape and the outer shape when viewed from the thickness direction of the first base portion 2 and the second base portion 3 of the cylindrical portion 161 are shapes corresponding to the planar shapes of the first base portion 2 and the second base portion 3, respectively. Yes, in the configuration shown, it is circular.

  The side wall portion 16 has a base end portion, that is, a flange 162 fixed to the first base portion 2. Although the fixing method is not particularly limited, in the illustrated configuration, the flange 162 is fixed to the bottom plate 22 of the first base 2 with a plurality of screws 171.

  In addition, an analog circuit board 4 electrically connected to the sensor device 6 is provided between the first base 2 and the second base 3 as shown in FIG.

  In the portion of the analog circuit board 4 where the sensor device 6 (specifically, the charge output element 10) is disposed, a hole 41 into which each convex portion 23 of the first base 2 is inserted is formed. The hole 41 is a through hole that penetrates the analog circuit board 4.

  Further, as shown in FIG. 3, the analog circuit board 4 is provided with a through hole through which each pressurizing bolt 71 passes, and a portion (through hole) through which the pressurizing bolt 71 of the analog circuit board 4 passes is provided. The pipe 43 made of an insulating material such as a resin material is fixed by fitting, for example.

  Further, as shown in FIG. 2, each analog circuit is located between the first base 2 and the second base 3 at a position different from the position where each analog circuit board 4 is provided on the first base 2. A digital circuit board 5 electrically connected to the board 4 is provided. The digital circuit board 5 is arranged in parallel with the bottom plate 22 of the first base 2 and the top plate 32 of the second base 3. The position of the first base 2 and the second base 3 in the thickness direction of the digital circuit board 5 is not particularly limited as long as it is between the first base 2 and the second base 3. For example, the first base 2 Or in the vicinity of the second base 3, or an intermediate position (center) between the first base 2 and the second base 3. The digital circuit board 5 is fixed to the bottom plate 22. Although the fixing method is not particularly limited, in the illustrated configuration, the digital circuit board 5 is fixed to the bottom plate 22 with a plurality of screws 174.

  The components of the first base 2, the second base 3, and the analog circuit board 4 other than the elements and the wirings, and the components of the digital circuit board 5 other than the elements and the wirings, For example, various resin materials and various metal materials can be used.

  In addition, a through hole 20 is formed in the central portion of the bottom plate 22 of the first base 2, and similarly, a through hole 30 is formed in the central portion of the top plate 32 of the second base 3. Similarly, a through hole 50 is formed in the center of the digital circuit board 5.

Next, the sensor device 6 will be described.
[Sensor device]
As shown in FIGS. 2 and 3, the sensor device 6 </ b> A includes a top surface 231 of one convex portion 23 among the four convex portions 23 of the first base portion 2, and an inner wall surface 331 facing the top surface 231. It is pinched by. Similar to the sensor device 6A, the sensor device 6B is sandwiched between the top surface 231 of one convex portion 23 different from the above and the inner wall surface 331 facing the top surface 231. Further, the sensor device 6C is sandwiched between the top surface 231 of one convex portion 23 different from the above and the inner wall surface 331 facing the top surface 231. Further, the sensor device 6D is sandwiched between the top surface 231 of one convex portion 23 different from the above and the inner wall surface 331 facing the top surface 231. It can also be said that the charge output elements 10 of the sensor devices 6A, 6B, 6C and the sensor device 6D are coupled to the wall 24 and the wall 33, respectively.

  Hereinafter, the direction in which the sensor devices 6A to 6D are sandwiched between the first base 2 and the second base 3 is referred to as “a sandwiching direction SD”. Of the sensor devices 6A to 6D, the direction in which the sensor device 6A is sandwiched is the first sandwiching direction, the direction in which the sensor device 6B is sandwiched is the second sandwiching direction, and the direction in which the sensor device 6C is sandwiched. The third clamping direction and the direction in which the sensor device 6D is clamped may be referred to as a fourth clamping direction.

  As shown in FIG. 2, the sensor device 6 according to the present embodiment is provided on the second base 3 (wall portion 33) side of the analog circuit board 4, but the sensor device 6 is provided on the analog circuit board 4. May be provided on the first base 2 side.

  Further, the sensor device 6A and the sensor device 6B and the sensor device 6C and the sensor device 6D are disposed symmetrically with respect to the central axis 271 along the β axis of the first base portion 2, as shown in FIG. That is, the sensor devices 6 </ b> A to 6 </ b> D are arranged at equiangular intervals around the center 272 of the first base 2. By arranging the sensor devices 6A to 6D in this way, it is possible to detect the external force without bias.

  The arrangement of the sensor devices 6A to 6D is not limited to that shown in the drawing, but the sensor devices 6A to 6D are as far as possible from the center (center 272) of the second base 3 when viewed from the upper surface 321 of the second base 3. It is preferable that they are arranged at spaced positions. Thereby, the external force applied to the force detection apparatus 1 can be detected stably.

  The sensor device 6 arranged in this way has a charge output element 10 and a package 60 that houses the charge output element 10. The contact portion 64 of the lid 62 of the package 60 that contacts the wall portion 33 has a convex shape. According to this, stress due to stress can be uniformly distributed in the convex contact portion 64. In the present embodiment, the sensor devices 6A to 6D have the same configuration. Note that the package may be omitted. In addition, although the convex-shaped front-end | tip of the contact part 64 of this embodiment is flat, you may curve.

  The charge output element 10 has a function of outputting charges in accordance with an external force applied to the force detection device 1, that is, an external force applied to at least one base of the first base 2 or the second base 3.

(Example)
FIG. 6 is a diagram illustrating a curved state of the wall 33 according to the present embodiment during pressurization. FIG. 6A is a curved state of the present embodiment, and FIG. 6B is a diagram showing a curved state of the prior art.
As shown in FIG. 6A, the force detection device 1 according to the present embodiment makes the pressurizing bolt by making the shape of the contact portion 34 of the wall portion 33 that contacts the lid 62 of the package 60 convex. Even if 71 is tightened, the shape of the abutting portion 34 of the wall portion 33 is not curved, and can be accurately pushed perpendicular to the sensor device 6 in a plane. As shown in FIG. 6B, the flat state of the flat wall portion 36 according to the prior art is curved as a whole, so that the contact state with the lid 62 of the package 60 becomes unstable. ing.

Next, output variation comparison between the present embodiment and the prior art will be described.
FIG. 7 is a diagram illustrating a measurement method of output variation comparison between the present embodiment and the prior art. 7A shows the measurement arrangement, and FIG. 7B shows the arrangement of the sensor device 6.
First, as shown in FIG. 7A, the force detection device 1 is attached to the measurement jig 80 so that a force is applied in the shear direction.
Next, the measurement shaft 82 is attached to the top plate 32 side of the force detection device 1.
Next, a 50N weight 86 is suspended from the measurement shaft 82, and the suspension position is moved away from the force detection device 1 to perform measurement.
Next, the force detection device 1 is rotated 45 degrees and the above measurement is repeated. In the force detection device 1, as shown in FIG. 7B, the sensor devices 6 </ b> A to 6 </ b> D are arranged at equiangular intervals around the center 272 of the first base 2. The result of plotting the output result at each position is shown in FIG.

  FIG. 8 is a diagram showing output variations between the present embodiment and the prior art. FIG. 8A shows the output variation of this embodiment, and FIG. 8B shows the output variation of the prior art. In addition, the notation of S0 => S2 is a state in which the sensor device 6 is arranged and gravity acts in the direction from S0 to S2, as shown in FIG. 7B. Hereinafter, similarly, although not shown, the notation of S1⇒S3 is a state where gravity acts in the direction from S1 to S3. The notation of S2⇒S0 is a state where gravity acts in the direction from S2 to S0. The notation of S3⇒S1 is a state where gravity acts in the direction from S3 to S1. In addition, the notation of S0S1⇒S2S3 is a state where gravity acts in the direction from the midpoint between S0 and S1 to the midpoint between S2 and S3. The notation of S1S2⇒S3S0 is a state in which gravity acts in the direction from the midpoint between S1 and S2 to the midpoint between S3 and S0. The notation of S2S3⇒S0S1 is a state where gravity acts in the direction from the midpoint between S2 and S3 to the midpoint between S0 and S1. The notation of S3S0⇒S1S2 is a state where gravity acts in the direction from the midpoint between S3 and S0 to the midpoint between S1 and S2.

  The output characteristics when the shape of the abutting portion 34 of the wall portion 33 that abuts on the lid 62 of the package 60 is a convex shape and when the flat shape of the flat wall portion 36 according to the prior art is not convex are shown in FIG. As shown, there are differences. The variation in output when the weight is suspended in the shearing direction of the force detection device 1 and the position thereof is shifted is as follows. In the configuration of this embodiment, as shown in FIG. 8N. In the prior art, as shown in FIG. 8B, the shift in the translational force is 5.8N.

FIG. 9 is a diagram for explaining the deviation of the translational force according to the present embodiment. FIG. 9A is a plan view showing the wall portion 36, and FIG. 9B is a cross-sectional view showing the wall portion 36 and the sensor device 6.
Next, logic for shifting the translational force will be described (description of FIG. 8B).
As shown in FIG. 9B, the wall portion 36 is curved, so that the contact state with the lid 62 of the package 60 becomes unstable. Since the wall portion 36 and the lid 62 of the package 60 are curved, the wall portion 36 and the lid 62 of the package 60 do not touch the entire surface, resulting in uneven contact. The wall portion 36 and the lid 62 of the package 60 come into contact with each other in the contact region 84 and the contact is nonuniform.

  Originally, when the above measurement is performed, the sensor device 6 generates a force to rotate around the center of the charge output element 10. However, if the contact is not uniform, the rotation center of the sensor device 6 is shifted from the center of the charge output element 10 as shown in FIG. As a result, an error occurs between the translational force value of the prior art and the ideal value (50N).

  According to this embodiment, in the wall part 33 pressurized with the some pressurizing bolt 71 grade | etc., The surface contact | abutted with the lid | cover 62 between the some pressurizing bolts 71 is convex shape. Accordingly, stress due to stress can be uniformly distributed in the convex contact portion 34. As a result, variations in the output of the charge output element 10 can be reduced. Also, output variations can be prevented without increasing costs.

(Embodiment of single-arm robot)
Next, a single-arm robot as a robot according to this embodiment will be described. Hereinafter, the present embodiment will be described with a focus on differences from the above-described embodiments, and description of similar matters will be omitted.

FIG. 10 is a diagram showing an example of a single arm robot 500 using the force detection device 1 according to the present embodiment.
As shown in FIG. 10, the single-arm robot 500 includes a base 510, an arm 520, an end effector 530 provided on the distal end side of the arm 520, and a force provided between the arm 520 and the end effector 530. And a detection device 1. In addition, as the force detection apparatus 1, the thing similar to each embodiment mentioned above is used.

  The base 510 has a function of accommodating an actuator (not shown) that generates power for rotating the arm 520, a control unit (not shown) that controls the actuator, and the like. The base 510 is fixed on, for example, a floor, a wall, a ceiling, or a movable carriage.

  The arm 520 includes a first arm element 521, a second arm element 522, a third arm element 523, a fourth arm element 524, and a fifth arm element 525. It is comprised by connecting so that rotation is possible. The arm 520 is driven by being rotated or bent in a compound manner around the connecting portion of each arm element under the control of the control unit.

  The end effector 530 has a function of gripping an object. The end effector 530 has a first finger 531 and a second finger 532. After the end effector 530 reaches a predetermined operating position by driving the arm 520, the object can be gripped by adjusting the distance between the first finger 531 and the second finger 532.

  Here, the end effector 530 is a hand here, but is not limited to this in the present embodiment. Other examples of the end effector include, for example, a component inspection device, a component transport device, a component processing device, a component assembly device, and a measuring instrument. The same applies to the end effectors in other embodiments.

  The force detection device 1 has a function of detecting an external force applied to the end effector 530. By feeding back the force detected by the force detection device 1 to the control unit of the base 510, the single-arm robot 500 can perform more precise work. Further, the single arm robot 500 can detect contact of the end effector 530 with an obstacle or the like by the force detected by the force detection device 1. Therefore, an obstacle avoidance operation, an object damage avoidance operation, and the like, which are difficult with conventional position control, can be easily performed, and the single-arm robot 500 can perform work more safely.

  In the illustrated configuration, the arm 520 includes a total of five arm elements, but the present embodiment is not limited to this. Within the scope of the present embodiment, the arm 520 is composed of one arm element, is composed of 2 to 4 arm elements, and is composed of 6 or more arm elements. is there.

(Embodiment of double-arm robot)
Next, a multi-arm robot as a robot according to this embodiment will be described. Hereinafter, the present embodiment will be described with a focus on differences from the above-described embodiments, and description of similar matters will be omitted.

FIG. 11 is a diagram illustrating an example of a multi-arm robot 600 using the force detection device 1 according to the present embodiment.
As shown in FIG. 11, the multi-arm robot 600 includes a base 610, a first arm 620, a second arm 630, and a first end effector 640 a provided on the distal end side of the first arm 620. A second end effector 640b provided on the distal end side of the second arm 630, and between the first arm 620 and the first end effector 640a and between the second arm 630 and the second end effector 640b. It has a force detection device 1 provided between them. In addition, as the force detection apparatus 1, the thing similar to each embodiment mentioned above is used.

  The base 610 has a function of accommodating an actuator (not shown) that generates power for rotating the first arm 620 and the second arm 630, a control unit (not shown) that controls the actuator, and the like. Have. The base 610 is fixed on, for example, a floor, a wall, a ceiling, or a movable carriage.

  The first arm 620 is configured by rotatably connecting a first arm element 621 and a second arm element 622. The second arm 630 is configured by rotatably connecting the first arm element 631 and the second arm element 632. The first arm 620 and the second arm 630 are driven by being rotated or bent in a compound manner around the connecting portion of each arm element under the control of the control unit.

  The first and second end effectors 640a and 640b have a function of gripping an object. The first end effector 640a has a first finger 641a and a second finger 642a. The second end effector 640b has a first finger 641b and a second finger 642b. After the first end effector 640a reaches the predetermined operating position by driving the first arm 620, the object is grasped by adjusting the distance between the first finger 641a and the second finger 642a. Can do. Similarly, after the second end effector 640b reaches a predetermined operation position by driving the second arm 630, the distance between the first finger 641b and the second finger 642b is adjusted to thereby adjust the object. It can be gripped.

  The force detection device 1 has a function of detecting an external force applied to the first and second end effectors 640a and 640b. By feeding back the force detected by the force detection device 1 to the control unit of the base 610, the multi-arm robot 600 can perform the operation more precisely. The multi-arm robot 600 can detect contact of the first and second end effectors 640a and 640b with an obstacle by the force detected by the force detection device 1. Therefore, an obstacle avoidance operation, an object damage avoidance operation, and the like that have been difficult with conventional position control can be easily performed, and the multi-arm robot 600 can perform the operation more safely.

  In the illustrated configuration, there are a total of two arms, but the present embodiment is not limited to this. The case where the multi-arm robot 600 has three or more arms is also within the scope of the present embodiment.

(Embodiments of electronic component inspection apparatus and electronic component transport apparatus)
Next, an embodiment of an electronic component inspection device and an electronic component transport device will be described. Hereinafter, the present embodiment will be described with a focus on differences from the above-described embodiments, and description of similar matters will be omitted.

FIG. 12 is a diagram illustrating an example of an electronic component inspection device 700 and an electronic component transport device 740 that use the force detection device 1 according to the present embodiment.
As shown in FIG. 12, the electronic component inspection apparatus 700 includes a base 710 and a support base 720 erected on the side surface of the base 710. On the upper surface of the base 710, an upstream stage 712u on which the electronic component 711 to be inspected is placed and transported, and a downstream stage 712d on which the inspected electronic component 711 is placed and transported are provided. ing. Further, between the upstream stage 712u and the downstream stage 712d, an imaging device 713 for confirming the posture of the electronic component 711, and an inspection table 714 on which the electronic component 711 is set for inspecting electrical characteristics. And are provided. Examples of the electronic component 711 include semiconductors, semiconductor wafers, display devices such as CLD and OLED, crystal devices, various sensors, inkjet heads, various MEMS devices, and the like.

  Further, the support base 720 is provided with a Y stage 731 that is movable in a direction (Y direction) parallel to the upstream stage 712u and the downstream stage 712d of the base 710. An arm portion 732 is extended in a direction (X direction) toward 710. An X stage 733 is provided on the side surface of the arm 732 so as to be movable in the X direction. In addition, the X stage 733 is provided with an imaging camera 734 and an electronic component transfer device 740 incorporating a Z stage movable in the vertical direction (Z direction). In addition, a gripping portion 741 that grips the electronic component 711 is provided on the front end side of the electronic component transport apparatus 740. Further, the force detection device 1 is provided between the tip of the electronic component transport device 740 and the grip portion 741. Further, a control device 750 for controlling the entire operation of the electronic component inspection apparatus 700 is provided on the front side of the base 710. In addition, as the force detection apparatus 1, the thing similar to each embodiment mentioned above is used.

The electronic component inspection apparatus 700 inspects the electronic component 711 as follows.
First, the electronic component 711 to be inspected is placed on the upstream stage 712u and moved to the vicinity of the inspection table 714.

  Next, the Y stage 731 and the X stage 733 are moved, and the electronic component transfer device 740 is moved to a position directly above the electronic component 711 placed on the upstream stage 712u. At this time, the position of the electronic component 711 can be confirmed using the imaging camera 734. Then, when the electronic component transport device 740 is lowered using the Z stage built in the electronic component transport device 740 and the electronic component 711 is gripped by the gripping portion 741, the electronic component transport device 740 is directly placed on the imaging device 713. The position of the electronic component 711 is confirmed using the imaging device 713.

  Next, the attitude of the electronic component 711 is adjusted using a fine adjustment mechanism built in the electronic component transport apparatus 740. Then, after moving the electronic component transport device 740 to above the inspection table 714, the Z stage built in the electronic component transport device 740 is moved to set the electronic component 711 on the inspection table 714. Since the attitude of the electronic component 711 is adjusted using the fine adjustment mechanism in the electronic component conveying apparatus 740, the electronic component 711 can be set at the correct position on the inspection table 714.

Next, after the electrical characteristic inspection of the electronic component 711 is completed using the inspection table 714, the electronic component 711 is picked up from the inspection table 714, the Y stage 731 and the X stage 733 are moved, and the downstream stage 712d is moved. The electronic component conveying device 740 is moved to the position, and the electronic component 711 is placed on the downstream stage 712d.
Finally, the downstream stage 712d is moved to transport the electronic component 711 that has been inspected to a predetermined position.

FIG. 13 is a diagram illustrating an example of an electronic component transport apparatus 740 using the force detection apparatus 1 according to the present embodiment.
As shown in FIG. 13, the electronic component transport device 740 includes a gripping portion 741, a force detection device 1 connected to the gripping portion 741, and a rotating shaft 742 connected to the gripping portion 741 via the force detection device 1. The fine adjustment plate 743 is rotatably attached to the rotation shaft 742. The fine adjustment plate 743 is movable in the X direction and the Y direction while being guided by a guide mechanism (not shown).

  Further, a piezoelectric motor 744θ for rotation direction is mounted toward the end surface of the rotation shaft 742, and a driving convex portion (not shown) of the piezoelectric motor 744θ is pressed against the end surface of the rotation shaft 742. Therefore, by operating the piezoelectric motor 744θ, it is possible to rotate the rotation shaft 742 (and the gripping portion 741) by an arbitrary angle in the θ direction. Further, a piezoelectric motor 744 x for X direction and a piezoelectric motor 744 y for Y direction are provided toward the fine adjustment plate 743, and each drive convex portion (not shown) is a surface of the fine adjustment plate 743. It is pressed against. For this reason, by operating the piezoelectric motor 744x, the fine adjustment plate 743 (and the gripper 741) can be moved by an arbitrary distance in the X direction. Similarly, the fine adjustment can be performed by operating the piezoelectric motor 744y. The plate 743 (and the gripping portion 741) can be moved by an arbitrary distance in the Y direction.

  Further, the force detection device 1 has a function of detecting an external force applied to the grip portion 741. By feeding back the force detected by the force detection device 1 to the control device 750, the electronic component transport device 740 and the electronic component inspection device 700 can perform work more precisely. Further, the contact of the gripping portion 741 with an obstacle can be detected by the force detected by the force detection device 1. Therefore, an obstacle avoidance operation, an object damage avoidance operation, and the like that are difficult with conventional position control can be easily performed, and the electronic component transport device 740 and the electronic component inspection device 700 can perform safer work. is there.

(Embodiment of component processing apparatus)
Next, an embodiment of a component processing apparatus will be described. Hereinafter, the present embodiment will be described with a focus on differences from the above-described embodiments, and description of similar matters will be omitted.

FIG. 14 is a diagram illustrating an example of a component processing apparatus 800 using the force detection apparatus 1 according to the present embodiment.
As shown in FIG. 14, the component processing apparatus 800 includes a base 810, a support column 820 that is erected on the upper surface of the base 810, a feed mechanism 830 that is provided on a side surface of the support column 820, and a lift mechanism 830. The tool displacement unit 840 is attached to the tool, the force detection device 1 is connected to the tool displacement unit 840, and the tool 850 is attached to the tool displacement unit 840 via the force detection device 1. In addition, as the force detection apparatus 1, the thing similar to each embodiment mentioned above is used.

  The base 810 is a base for mounting and fixing the workpiece 860. The column 820 is a column for fixing the feed mechanism 830. The feed mechanism 830 has a function of moving the tool displacement portion 840 up and down. The feed mechanism 830 includes a feed motor 831 and a guide 832 for raising and lowering the tool displacement portion 840 based on an output from the feed motor 831. The tool displacement unit 840 has a function of imparting displacement such as rotation and vibration to the tool 850. The tool displacement portion 840 includes a displacement motor 841, a tool attachment portion 843 provided at the tip of a main shaft (not shown) connected to the displacement motor 841, and a holder attached to the tool displacement portion 840 and holding the main shaft. Part 842. The tool 850 is attached to the tool attachment portion 843 of the tool displacement portion 840 via the force detection device 1 and is used for machining the workpiece 860 in accordance with the displacement given from the tool displacement portion 840. The tool 850 is not particularly limited, and is, for example, a wrench, a Phillips screwdriver, a flat-blade screwdriver, a cutter, a circular saw, a nipper, a cone, a drill, or a milling cutter.

  The force detection device 1 has a function of detecting an external force applied to the tool 850. By feeding back the external force detected by the force detection device 1 to the feed motor 831 and the displacement motor 841, the component processing device 800 can execute the component processing operation more precisely. Further, the contact of the tool 850 with an obstacle or the like can be detected by the external force detected by the force detection device 1. Therefore, an emergency stop can be performed when an obstacle or the like comes in contact with the tool 850, and the component processing apparatus 800 can execute a safer component processing operation.

(Embodiment of moving body)
Next, an embodiment of the moving body will be described. Hereinafter, the present embodiment will be described with a focus on differences from the above-described embodiments, and description of similar matters will be omitted.

FIG. 15 is a diagram illustrating an example of a moving object 900 using the force detection device 1 according to the present embodiment.
As shown in FIG. 15, the moving body 900 can move with the applied power. The moving body 900 is not particularly limited, and is, for example, a vehicle such as an automobile, a motorcycle, an airplane, a ship, or a train, a robot such as a bipedal walking robot, or a wheeled robot.

  The moving body 900 detects a main body 910 (e.g., a vehicle casing, a robot main body, etc.), a power unit 920 that supplies power for moving the main body 910, and an external force generated by the movement of the main body 910. The force detection apparatus 1 of this embodiment and the control part 930 are provided. In addition, as the force detection apparatus 1, the thing similar to each embodiment mentioned above is used.

  When the main body 910 is moved by the power supplied from the power unit 920, vibration, acceleration, and the like are generated with the movement. The force detection device 1 detects an external force caused by vibration, acceleration, or the like that occurs with movement. The external force detected by the force detection device 1 is transmitted to the control unit 930. The control unit 930 can execute control such as posture control, vibration control, and acceleration control by controlling the power unit 920 and the like according to the external force transmitted from the force detection device 1.

  As mentioned above, although the force detection apparatus and robot of this embodiment were demonstrated based on embodiment of illustration, this embodiment is not limited to this, The structure of each part is arbitrary structures which have the same function Can be substituted. In addition, other arbitrary components may be added to the present embodiment.

  In this embodiment, instead of the pressurizing bolt, for example, a device that does not have a function of applying a pressurization to the charge output element (piezoelectric element) may be used, and a fixing method other than the bolt is adopted. May be.

  In the present embodiment, the number of charge output elements is four. However, in the present embodiment, the number of charge output elements may be one, two, three, or five or more.

  In addition, the robot according to the present embodiment is not limited to an arm type robot (robot arm) as long as it has an arm, but may be another type of robot such as a scalar robot or a legged walking (running) robot. May be.

  Further, the force detection device of the present embodiment is not limited to a robot, an electronic component transport device, an electronic component inspection device, a component processing device, and a moving body, but other devices such as other transport devices, other inspection devices, and vibrations. It can also be applied to measuring devices such as gauges, accelerometers, gravimeters, dynamometers, seismometers, inclinometers, and input devices.

  DESCRIPTION OF SYMBOLS 1 ... Force detector 2 ... 1st base 3 ... 2nd base 4 ... Analog circuit board 5 ... Digital circuit board 6, 6A, 6B, 6C, 6D ... Sensor device 10 ... Charge output element (piezoelectric element) 16 ... Side wall part DESCRIPTION OF SYMBOLS 20 ... Through-hole 22 ... Bottom plate 23 ... Convex part 24 ... Wall part 30 ... Through-hole 32 ... Top plate 33 ... Wall part (pressurizing plate) 34 ... Contact part 36 ... Wall part 41 ... Hole 43 ... Pipe 50 ... Through-hole DESCRIPTION OF SYMBOLS 60 ... Package (container) 62 ... Cover 64 ... Contact part 71 ... Pressurizing bolt 80 ... Measuring jig 82 ... Measuring shaft 84 ... Contact area 86 ... Weight 161 ... Cylindrical part 162 ... Flange 171, 172 173, 174 ... Screw 221 ... Lower surface 231 ... Top surface 241 ... Female screw 271 ... Center axis 272 ... Center 321 ... Upper surface 331 ... Inner wall surface 500 ... Single arm robot 510 ... Base 52 ... arm 521 ... first arm element 522 ... second arm element 523 ... third arm element 524 ... fourth arm element 525 ... fifth arm element 530 ... end effector 531 ... first finger 532 ... first Second finger 600 ... Multi-arm robot 610 ... Base 620 ... First arm 621 ... First arm element 622 ... Second arm element 630 ... Second arm 631 ... First arm element 632 ... Second Arm element 640a ... first end effector 640b ... second end effector 641a ... first finger 641b ... first finger 642a ... second finger 642b ... second finger 700 ... electronic component inspection device 710 ... base 711 ... Electronic component 712 d ... Downstream stage 712 u ... Upstream stage 713 ... Imaging device 714 ... Inspection table 7 DESCRIPTION OF SYMBOLS 20 ... Support stand 731 ... Y stage 732 ... Arm part 733 ... X stage 734 ... Imaging camera 740 ... Electronic component conveyance apparatus 741 ... Grasping part 742 ... Rotating shaft 743 ... Fine adjustment plate 744x, 744y, 744θ ... Piezoelectric motor 750 ... Control Device 800 ... Parts processing device 810 ... Base 820 ... Post 830 ... Feeding mechanism 831 ... Feeding motor 832 ... Guide 840 ... Tool displacement part 841 ... Displacement motor 842 ... Holding part 843 ... Tool mounting part 850 ... Tool 860 ... Covered Processed part 900 ... moving body 910 ... main body 920 ... power unit 930 ... control unit SD ... clamping direction.

Claims (3)

A force detection device having a piezoelectric element, a container containing the piezoelectric element, and a pressurizing plate that pressurizes the piezoelectric element,
The force detection device according to claim 1, wherein a contact portion of the pressurizing plate that contacts the lid of the container has a convex shape. The force detection device according to claim 1,
The force detection device according to claim 1, wherein a contact portion of the lid of the container that contacts the pressure plate has a convex shape.   A robot comprising the force detection device according to claim 1.

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