JP2016206048A5 - - Google Patents

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Publication number
JP2016206048A5
JP2016206048A5 JP2015089076A JP2015089076A JP2016206048A5 JP 2016206048 A5 JP2016206048 A5 JP 2016206048A5 JP 2015089076 A JP2015089076 A JP 2015089076A JP 2015089076 A JP2015089076 A JP 2015089076A JP 2016206048 A5 JP2016206048 A5 JP 2016206048A5
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JP
Japan
Prior art keywords
input
resistor
output
reference voltage
circuit
Prior art date
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Application number
JP2015089076A
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English (en)
Japanese (ja)
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JP2016206048A (ja
JP6528523B2 (ja
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Application filed filed Critical
Priority to JP2015089076A priority Critical patent/JP6528523B2/ja
Priority claimed from JP2015089076A external-priority patent/JP6528523B2/ja
Priority to US15/130,332 priority patent/US10101158B2/en
Publication of JP2016206048A publication Critical patent/JP2016206048A/ja
Publication of JP2016206048A5 publication Critical patent/JP2016206048A5/ja
Application granted granted Critical
Publication of JP6528523B2 publication Critical patent/JP6528523B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2015089076A 2015-04-24 2015-04-24 物理量センサー用回路、物理量センサー、及び物理量センサーの製造方法 Expired - Fee Related JP6528523B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2015089076A JP6528523B2 (ja) 2015-04-24 2015-04-24 物理量センサー用回路、物理量センサー、及び物理量センサーの製造方法
US15/130,332 US10101158B2 (en) 2015-04-24 2016-04-15 Circuit for physical quantity sensor, physical quantity sensor, and method for manufacturing physical quantity sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015089076A JP6528523B2 (ja) 2015-04-24 2015-04-24 物理量センサー用回路、物理量センサー、及び物理量センサーの製造方法

Publications (3)

Publication Number Publication Date
JP2016206048A JP2016206048A (ja) 2016-12-08
JP2016206048A5 true JP2016206048A5 (cg-RX-API-DMAC7.html) 2018-05-10
JP6528523B2 JP6528523B2 (ja) 2019-06-12

Family

ID=57148614

Family Applications (1)

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JP2015089076A Expired - Fee Related JP6528523B2 (ja) 2015-04-24 2015-04-24 物理量センサー用回路、物理量センサー、及び物理量センサーの製造方法

Country Status (2)

Country Link
US (1) US10101158B2 (cg-RX-API-DMAC7.html)
JP (1) JP6528523B2 (cg-RX-API-DMAC7.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6586735B2 (ja) * 2015-02-20 2019-10-09 セイコーエプソン株式会社 回路装置、物理量検出装置、電子機器及び移動体
JP6492739B2 (ja) 2015-02-20 2019-04-03 セイコーエプソン株式会社 回路装置、物理量検出装置、電子機器及び移動体

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2666505B2 (ja) * 1990-01-31 1997-10-22 松下電器産業株式会社 角速度センサ駆動装置
JP5274803B2 (ja) 2006-09-27 2013-08-28 シチズンホールディングス株式会社 発振装置、および振動ジャイロ
JP4380732B2 (ja) * 2007-06-04 2009-12-09 セイコーエプソン株式会社 検出回路、振動型ジャイロセンサ回路、振動型ジャイロセンサおよび電子機器
JP2009186305A (ja) * 2008-02-06 2009-08-20 Epson Toyocom Corp 物理量センサ
US8421481B2 (en) * 2009-10-20 2013-04-16 Analog Devices, Inc. Detection and mitigation of particle contaminants in MEMS devices
JP6222423B2 (ja) * 2013-03-28 2017-11-01 セイコーエプソン株式会社 物理量センサー、電子機器及び移動体
JP2016194467A (ja) 2015-04-01 2016-11-17 セイコーエプソン株式会社 物理量センサーの検査方法及び物理量センサーの製造方法

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