JP2016200399A5 - - Google Patents
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- JP2016200399A5 JP2016200399A5 JP2015078282A JP2015078282A JP2016200399A5 JP 2016200399 A5 JP2016200399 A5 JP 2016200399A5 JP 2015078282 A JP2015078282 A JP 2015078282A JP 2015078282 A JP2015078282 A JP 2015078282A JP 2016200399 A5 JP2016200399 A5 JP 2016200399A5
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- surface shape
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- 238000005259 measurement Methods 0.000 claims 41
- 238000001514 detection method Methods 0.000 claims 13
- 230000003287 optical Effects 0.000 claims 1
Claims (11)
該装置基部に設定され、被測定物を支持するステージと、
該装置基部に設定され、該ステージによって支持されている被測定物の表面形状を測定するための表面形状センサユニットと、
該ステージを該表面形状センサユニットに対して相対的に移動させる移動機構と、
を備える表面形状測定装置であって、
該表面形状センサユニットが、
所定の測定軸線の方向での所定幅をもった検出限界を有し、該測定軸線と交わる物体表面上の点を測定点として、該測定軸線の方向での該検出限界内における該測定点の位置を測定する第１センサと、
該第１センサを保持する第１アクチュエータであって、該検出限界の幅よりも広い該測定軸線の方向での所定幅をもった第１可動範囲を有し、該測定点が該検出限界内に位置するように該第１センサを該第１可動範囲内で該測定軸線の方向で移動させる第１アクチュエータと、
該第１アクチュエータによる該第１センサの移動距離を測定する第２センサと、
該第１アクチュエータを保持する第２アクチュエータであって、該第１可動範囲の幅よりも広い該測定軸線の方向での所定幅をもった第２可動範囲を有し、該第１アクチュエータが該第１センサを該第１可動範囲内で移動させて該測定点を該検出限界内に位置させることができるように、該第１アクチュエータを該第２可動範囲内で該測定軸線の方向で移動させる第２アクチュエータと、
該第２アクチュエータによる該第１アクチュエータの移動距離を測定する第３センサと、を備え、
該移動機構によって該第１センサの該測定点が被測定物の表面上を相対的に移動していくように該ステージと該第１センサとを相対的に移動させたときの、該第１、第２、及び第３センサの出力値に基づいて被測定物の表面形状を測定するようにされた、表面形状測定装置。 A device base;
A stage set at the base of the apparatus and supporting the object to be measured;
A surface shape sensor unit for measuring the surface shape of an object to be measured which is set in the apparatus base and supported by the stage;
A moving mechanism for moving the stage relative to the surface shape sensor unit;
A surface shape measuring device comprising:
The surface shape sensor unit is
A detection limit having a predetermined width in the direction of a predetermined measurement axis, and a point on the surface of the object that intersects the measurement axis as a measurement point, the measurement point within the detection limit in the direction of the measurement axis A first sensor for measuring the position;
A first actuator for holding the first sensor, having a first movable range having a predetermined width in the direction of the measurement axis that is wider than the width of the detection limit, and the measurement point is within the detection limit; A first actuator for moving the first sensor in the direction of the measurement axis within the first movable range so as to be positioned at
A second sensor for measuring a moving distance of the first sensor by the first actuator;
A second actuator that holds the first actuator and has a second movable range having a predetermined width in the direction of the measurement axis that is wider than the width of the first movable range; The first actuator is moved in the direction of the measurement axis within the second movable range so that the first sensor can be moved within the first movable range to position the measurement point within the detection limit. A second actuator,
A third sensor for measuring a movement distance of the first actuator by the second actuator,
The first stage when the stage and the first sensor are moved relative to each other so that the measurement point of the first sensor moves relatively on the surface of the object to be measured by the moving mechanism. A surface shape measuring device configured to measure the surface shape of an object to be measured based on output values of the second and third sensors.
該被測定物の表面上の任意の測定開始点に該第１センサの該測定点が位置するように、該ステージと該表面形状センサユニットとを移動機構によって相対的に移動させるステップと、
該測定点が該検出限界内に位置するように、該第２アクチュエータによって該第１アクチュエータ及び該第１センサを該測定軸線の方向で移動させるステップと、
該測定点が該被測定物の表面上を相対的に移動していくように該移動機構によって該ステージと該表面形状センサユニットとを相対的に移動させるステップと、
該ステージと該表面形状センサユニットとを相対的に移動させるステップの最中に、該測定点が該検出限界内に維持されるように該第１アクチュエータによって該第１センサを該測定軸線の方向で移動させるステップと、
該ステージと該表面形状センサユニットとを相対的に移動させるステップの最中に、該第１乃至第３センサの出力値を読み取るステップと、
該測定点を該検出限界内に維持するために必要とされる該第１センサの移動距離が該第１アクチュエータの可動範囲を超えることになる表面を測定するときに、該移動機構による該ステージと該表面形状センサユニットとの相対的な移動を一旦停止して、該測定点が該検出限界内に位置するように該第２アクチュエータによって該第１アクチュエータ及び該第１センサを該測定軸線の方向で移動させるステップと、
を含む、表面形状測定方法。 A first sensor that has a detection limit with a predetermined width in the direction of a predetermined measurement axis, and that measures a position in the direction of the measurement axis of a measurement point that is a point on the object surface that intersects the measurement axis; A first actuator that holds the first sensor and moves the first sensor in the direction of the measurement axis; a second sensor that measures a moving distance of the first sensor by the first actuator; and the first actuator A surface shape sensor unit comprising: a second actuator that moves the first actuator in the direction of the measurement axis while holding the third sensor; and a third sensor that measures a movement distance of the first actuator by the second actuator, A surface shape measuring method for measuring a surface shape of an object supported on a stage,
Relatively moving the stage and the surface shape sensor unit by a moving mechanism so that the measurement point of the first sensor is positioned at an arbitrary measurement start point on the surface of the object to be measured;
Moving the first actuator and the first sensor in the direction of the measurement axis by the second actuator so that the measurement point is within the detection limit;
Relatively moving the stage and the surface shape sensor unit by the moving mechanism so that the measurement point relatively moves on the surface of the object to be measured;
During the step of relatively moving the stage and the surface shape sensor unit, the first actuator moves the first sensor in the direction of the measurement axis so that the measurement point is maintained within the detection limit. Step to move with,
Reading the output values of the first to third sensors during the step of relatively moving the stage and the surface shape sensor unit;
The stage by the moving mechanism when measuring a surface where the moving distance of the first sensor required to maintain the measuring point within the detection limit exceeds the movable range of the first actuator And the surface shape sensor unit are temporarily stopped, and the first actuator and the first sensor are moved along the measurement axis by the second actuator so that the measurement point is located within the detection limit. Moving in the direction,
A surface shape measuring method.
該第１センサを該測定軸線の方向で移動させるステップが、該測定点が該測定基準点に近づくように該第１アクチュエータによって該第１センサを該測定軸線の方向で連続的に移動させるステップである、請求項９に記載の表面形状測定方法。 The first actuator has a measurement reference point located within the detection limit;
The step of moving the first sensor in the direction of the measurement axis includes the step of continuously moving the first sensor in the direction of the measurement axis by the first actuator so that the measurement point approaches the measurement reference point. The surface shape measuring method according to claim 9, wherein
該ステージと該表面形状センサユニットとを相対的に移動させるステップが、該測定点が該被測定物の該円筒状表面上を移動していくように該回転機構によって該ステージを回転させるステップであり、
該第１乃至第３センサの出力値に基づいて、該被測定物の直径と真円度とのうちの少なくとも一方を求めるようにされた、請求項９又は１０に記載の表面形状測定方法。 The moving mechanism has a rotating mechanism that rotates the stage around a rotation axis perpendicular to the measurement axis, and a vertical moving mechanism that moves the surface shape sensor unit in a direction parallel to the rotating axis. , The object to be measured is a member having a cylindrical surface,
The step of relatively moving the stage and the surface shape sensor unit is a step of rotating the stage by the rotation mechanism so that the measurement point moves on the cylindrical surface of the object to be measured. Yes,
The surface shape measuring method according to claim 9 or 10, wherein at least one of a diameter and a roundness of the object to be measured is obtained based on output values of the first to third sensors.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015078282A JP2016200399A (en) | 2015-04-07 | 2015-04-07 | Surface shape measurement device and surface shape measurement method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015078282A JP2016200399A (en) | 2015-04-07 | 2015-04-07 | Surface shape measurement device and surface shape measurement method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2016200399A JP2016200399A (en) | 2016-12-01 |
| JP2016200399A5 true JP2016200399A5 (en) | 2018-01-11 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015078282A Pending JP2016200399A (en) | 2015-04-07 | 2015-04-07 | Surface shape measurement device and surface shape measurement method |
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| JP (1) | JP2016200399A (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP7198631B2 (en) * | 2018-10-26 | 2023-01-04 | 株式会社ミツトヨ | Shape measuring device and shape measuring method |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0795103B2 (en) * | 1986-09-26 | 1995-10-11 | 日立電子エンジニアリング株式会社 | Mobile stage mechanism |
| JP4676658B2 (en) * | 2001-09-07 | 2011-04-27 | 株式会社ミツトヨ | probe |
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