JP2016186924A - Discharge lamp - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a discharge lamp capable of improving the illuminance.SOLUTION: A discharge lamp 10 comprises: a discharge tube 100; and a first electrode and a second electrode 300 that are a pair of electrodes provided in a longitudinal direction of the discharge tube 100. The second electrode 300 has: a first electrode wire group 310 including a plurality of electrode wires extending in the longitudinal direction; and a second electrode wire group 320 including a plurality of electrode wires extending in a direction crossing the longitudinal direction. The first electrode wire group 310 has: an in-region electrode wire 311 that is composed of a plurality of electrode wires arranged in a light radiation region irradiated with light from the discharge tube 100; and a current density reduction part 312 arranged outside the light radiation region, and that reduces a density of current flowing in the in-region electrode wire 311.SELECTED DRAWING: Figure 4

Description

  The present invention relates to a discharge lamp comprising a discharge tube and a pair of electrodes provided along the longitudinal direction of the discharge tube.

  A discharge lamp such as an excimer lamp including a discharge tube and a pair of electrodes provided along the longitudinal direction of the discharge tube is widely known (for example, see Patent Document 1). In such a discharge lamp, as the pair of electrodes, a plate electrode and a mesh electrode are provided opposite to each other on the outer surface of the discharge tube, and light is irradiated from openings between electrode lines in the mesh electrode. Is done.

JP 2005-322632 A

  Here, in the conventional discharge lamp, there is a demand to improve the illuminance of the discharge lamp by improving the ratio of the opening between the electrode lines in the mesh electrode (hereinafter referred to as the aperture ratio of the mesh electrode). However, in the configuration of the conventional discharge lamp, there is a problem that the illuminance of the discharge lamp cannot be improved because there is the following problem in improving the aperture ratio of the mesh electrode.

  That is, in the conventional discharge lamp, in order to improve the aperture ratio of the mesh electrode, it is necessary to make the electrode wire of the mesh electrode thinner or reduce the number of electrode wires. However, if the electrode wires are thinned or the number is reduced, the current density in the electrode wires increases, the temperature rises, and the electrode wires may be damaged.

  The present invention has been made to solve the above problems, and an object thereof is to provide a discharge lamp capable of improving illuminance.

  In order to achieve the above object, a discharge lamp according to an aspect of the present invention is a discharge lamp including a discharge tube and a pair of electrodes provided along a longitudinal direction of the discharge tube. Any one of the electrodes includes a first electrode line group including a plurality of electrode lines extending in the longitudinal direction, and a second electrode line group including a plurality of electrode lines extending in a direction intersecting the longitudinal direction. The first electrode line group includes a plurality of electrode lines arranged in a light emission region from which light from the discharge tube is emitted, and a region electrode line arranged outside the light emission region. And a current density reducing unit that reduces the density of the current flowing through the in-region electrode line.

  According to this, in the first electrode line group including a plurality of electrode lines extending in the longitudinal direction, the discharge lamp is disposed outside the light emission region and reduces a current density flowing through the in-region electrode line. have. That is, when power is supplied from the longitudinal end portion of the discharge lamp, the current selectively flows through the longitudinal electrode line. Therefore, if the longitudinal electrode line is thinned or the number is reduced, the current in the electrode line is reduced. The current density increases, the temperature rises, and the electrode wire may be damaged. For this reason, in the first electrode line group, by reducing the current density of the electrode lines by the current density reducing unit, it is possible to improve the aperture ratio of the mesh electrode while suppressing damage to the electrode lines. Moreover, it can suppress that a current density reduction part reduces the aperture ratio of a mesh electrode by arrange | positioning a current density reduction part out of a light emission area | region. Thereby, the illumination intensity can be improved in the discharge lamp.

  Further, the second electrode line group may be formed such that the distance between the electrode lines is larger than that of the first electrode line group.

  According to this, in the discharge lamp, the aperture ratio of the mesh electrode can be further improved by forming the second electrode line group so that the distance between the electrode lines is larger than that of the first electrode line group.

  Further, the current density reducing portion may be at least one electrode line formed so that a cross-sectional area is larger than that of the in-region electrode line.

  According to this, in the discharge lamp, the current density reduction portion can be easily formed by increasing the cross-sectional area of some of the electrode lines to form the current density reduction portion.

  The current density reduction unit is at least one electrode line formed to have a line width larger than that of the in-region electrode line, and the current density reduction unit includes a plurality of electrode lines included in the first electrode line group. You may decide to arrange | position at an edge part.

  According to this, in the discharge lamp, when forming the current density reduction part by increasing the line width of some electrode lines, the electrode line is thickened by arranging the current density reduction part at the end. Therefore, it is possible to suppress a decrease in the aperture ratio.

  The pair of electrodes are provided opposite to each other on the outer surface of the discharge tube, and the electrode having the first electrode line group and the second electrode line group among the pair of electrodes is a mesh electrode. Yes, the other electrode may be a plate electrode.

  According to this, since the discharge lamp is an excimer lamp including a mesh electrode and a plate electrode provided on the outer surface of the discharge tube so as to face each other, the aperture ratio of the mesh electrode is improved to improve the illuminance. An excimer lamp that can be used can be realized.

  According to the discharge lamp according to the present invention, the illuminance can be improved.

It is a perspective view which shows typically the external appearance of the discharge lamp which concerns on embodiment of this invention. It is sectional drawing which shows the structure of the discharge lamp which concerns on embodiment of this invention. It is sectional drawing which shows the structure of the discharge lamp which concerns on embodiment of this invention. It is a top view which shows the structure of the 2nd electrode which concerns on embodiment of this invention. It is an expanded sectional view showing composition of the 1st electrode line group of the 2nd electrode concerning an embodiment of the invention. It is a top view which shows the light emission area | region of the 2nd electrode which concerns on embodiment of this invention. It is an expanded sectional view showing the composition of the 1st electrode line group of the 2nd electrode concerning modification 1 of an embodiment of the invention. It is an expanded sectional view showing the composition of the 1st electrode line group of the 2nd electrode concerning modification 2 of an embodiment of the invention. It is an expanded sectional view showing the composition of the 1st electrode line group of the 2nd electrode concerning modification 3 of an embodiment of the invention.

  Hereinafter, a discharge lamp according to an embodiment of the present invention will be described with reference to the drawings. Each of the embodiments described below shows a preferred specific example of the present invention. Numerical values, shapes, materials, constituent elements, arrangement positions and connection forms of the constituent elements, manufacturing steps, order of manufacturing steps, and the like shown in the following embodiments are merely examples, and are not intended to limit the present invention. In addition, among the constituent elements in the following embodiments, constituent elements that are not described in the independent claims indicating the highest concept are described as optional constituent elements. Also, the following figures are schematic diagrams and are not necessarily shown strictly.

(Embodiment)
First, a schematic configuration of the discharge lamp 10 will be described.

  FIG. 1 is a perspective view schematically showing the appearance of a discharge lamp 10 according to an embodiment of the present invention. The discharge lamp 10 has a long shape extending in the X-axis direction in the figure, but in the figure, the long central portion is omitted.

  2 and 3 are cross-sectional views showing the configuration of the discharge lamp 10 according to the embodiment of the present invention. Specifically, FIG. 2 is a view showing a cross section when the discharge lamp 10 shown in FIG. 1 is cut along a plane parallel to the YZ plane including the II-II line. FIG. 3 is a view showing a cross section when the discharge lamp 10 shown in FIG. 1 is cut along a plane parallel to the YZ plane including the III-III line.

  In these drawings, the Z-axis direction is shown as the up-down direction, and in the following description, the Z-axis direction may be described as the up-down direction. For this reason, the Z-axis direction is not limited to the vertical direction. The same applies to the subsequent drawings.

  The discharge lamp 10 is a discharge lamp that uses so-called dielectric barrier discharge, and more specifically, a dielectric such as an ultraviolet lamp such as an excimer lamp that emits ultraviolet light by generating excimer discharge between a pair of electrodes. It is a barrier discharge lamp. For example, the discharge lamp 10 is applied to an ultraviolet irradiation device that performs printing, painting, cleaning, and the like using ultraviolet rays.

  As shown in these drawings, the discharge lamp 10 is composed of a long discharge tube 100 and a pair of electrodes provided facing each other along the longitudinal direction of the discharge tube 100 (X-axis direction in the figure). A first electrode 200 and a second electrode 300 are provided.

  The discharge tube 100 is a flat, straight tube discharge tube, and an inner space is filled with a gas for dielectric barrier discharge. The discharge tube 100 is made of, for example, synthetic quartz glass. Specifically, the discharge tube 100 has a pair of flat upper and lower wall portions 101 and 102 facing each other and a pair of curved side wall portions 103 and 104 facing each other.

  The upper wall portion 101 is a long and flat wall portion that is disposed on the upper portion of the discharge tube 100 (a portion on the positive side in the Z-axis direction) and extends in the longitudinal direction (X-axis direction) of the discharge tube 100. The upper wall 101 is provided with a first electrode 200 on the outer surface (the surface on the plus side in the Z-axis direction). The lower wall portion 102 is a long and flat wall portion that extends in the longitudinal direction (X-axis direction) of the discharge tube 100 and is disposed below the discharge tube 100 (portion on the minus side in the Z-axis direction). is there. The lower wall 102 is provided with a second electrode 300 on the outer surface (the surface on the negative side in the Z-axis direction).

  The side wall 103 is disposed on one side of the discharge tube 100 (portion on the negative side in the Y-axis direction) and has a long and cross-sectional shape extending in the longitudinal direction (X-axis direction) of the discharge tube 100. It is a wall. The side wall 103 is connected to one end of the upper wall 101 and the lower wall 102 (end on the Y axis direction minus side). The side wall 104 is disposed on the other side of the discharge tube 100 (a portion on the Y axis direction plus side) and extends in the longitudinal direction (X axis direction) of the discharge tube 100 and has a semicircular cross section. It is a shape wall. The side wall portion 104 is connected to the other end portions (the end portion on the Y axis direction plus side) of the upper wall portion 101 and the lower wall portion 102.

  As described above, the discharge tube 100 is a long discharge tube having an oval cross section (generally a track shape). Further, both ends in the longitudinal direction of the discharge tube 100 are closed by welding a synthetic quartz block or the like. The cross-sectional shape of the discharge tube 100 is not limited to an oval shape, and may be a circular shape, an elliptical shape, a rectangular shape, or the like. Further, the discharge tube 100 may have a double tube structure.

A space (discharge space) formed inside the discharge tube 100 is filled with a dielectric barrier discharge gas. As the dielectric barrier discharge gas, a rare gas such as xenon (Xe), argon (Ar) or krypton (Kr), or a halogen gas such as fluorine (F ₂ ) or chlorine (Cl ₂ ) is used. be able to. The discharge lamp 10 emits excimer light having different wavelengths (172 nm, 222 nm, 308 nm, etc.) according to the type of dielectric barrier discharge gas. For example, in order to decompose an organic compound, xenon is used as a dielectric barrier discharge gas, and excimer light having a center wavelength of 172 nm is emitted.

  As shown in FIGS. 2 and 3, a reflection film 110 that reflects excimer light generated inside the discharge tube 100 is formed on the inner surface of the discharge tube 100. The reflective film 110 is provided on the inner peripheral surface of the discharge tube 100 along the longitudinal direction. Specifically, the reflective film 110 is provided across the upper wall portion 101, the side wall portion 103, and the side wall portion 104. That is, the reflective film 110 has a shape in which an opening is provided at a position corresponding to the lower wall portion 102 on the inner surface of the discharge tube 100. Excimer light is emitted from this opening. A part of the reflection film 110 may be formed on the lower wall portion 102.

  Here, the reflective film 110 is a film containing silica particles. That is, the reflective film 110 can be formed by mixing the silica powder with a predetermined solvent to produce a slurry and applying the slurry to the inner peripheral surface of the discharge tube 100. Note that a portion where the reflective film 110 is not formed is masked with a masking tape or the like. Note that the reflective film 110 may include alumina particles in addition to silica fine particles.

  The first electrode 200 is a plate electrode provided on the outer surface of the discharge tube 100 so as to face the second electrode 300 along the longitudinal direction (X-axis direction) of the discharge tube 100. That is, the first electrode 200 is a long and flat electrode provided on the upper surface of the discharge tube 100 (the surface on the positive side in the Z-axis direction) extending in the longitudinal direction of the discharge tube 100. The first electrode 200 has a length substantially equal to the discharge space inside the discharge tube 100 in the longitudinal direction, and is disposed above the discharge space so as to sandwich the discharge space with the second electrode 300. ing.

  The first electrode 200 is made of a conductive material such as aluminum, aluminum alloy, and stainless steel. For example, a thin film and flat electrode formed on the outer surface of the discharge tube 100 by plating, spraying, vapor deposition, or sputtering. It is. The first electrode 200 is preferably provided over substantially the entire upper wall portion 101 of the discharge tube 100, but there may be a region that is not partially provided.

  The second electrode 300 is a mesh electrode provided on the outer surface of the discharge tube 100 so as to face the first electrode 200 along the longitudinal direction (X-axis direction) of the discharge tube 100. That is, the second electrode 300 is a long and mesh-like (mesh) electrode that is provided on the lower surface (the surface on the negative side in the Z-axis direction) of the discharge tube 100 and extends in the longitudinal direction of the discharge tube 100. The second electrode 300 has a length substantially equal to the discharge space inside the discharge tube 100 in the longitudinal direction, and is disposed below the discharge space so as to sandwich the discharge space with the first electrode 200. ing.

  Similarly to the first electrode 200, the second electrode 300 is made of a conductive material such as aluminum, an aluminum alloy, and stainless steel, and is formed on the outer surface of the discharge tube 100 by, for example, plating, spraying, vapor deposition, or sputtering. Thin film and mesh electrode. The second electrode 300 is preferably provided over almost the entire lower wall portion 102 of the discharge tube 100, but there may be a region that is not partially provided. A more detailed description of the configuration of the second electrode 300 will be described later.

  In the above configuration, when a high frequency high voltage is applied between the first electrode 200 and the second electrode 300 from a high frequency high voltage power source (not shown), a dielectric is formed in the discharge space inside the discharge tube 100. Barrier discharge occurs. Then, a dielectric barrier discharge gas such as a xenon atom is excited in the discharge space, and when the xenon atom returns to the ground state, a vacuum ultraviolet ray having a center wavelength of 172 nm is emitted (excimer light emission). The vacuum ultraviolet rays are then emitted downward through the mesh opening of the second electrode 300 disposed on the lower surface of the discharge tube 100. Therefore, if the object to be irradiated is irradiated with vacuum ultraviolet rays emitted below the discharge tube 100, the object to be irradiated can be cleaned with light.

  Next, the configuration of the second electrode 300 will be described in detail.

  FIG. 4 is a plan view showing the configuration of the second electrode 300 according to the embodiment of the present invention. Specifically, FIG. 2 is a plan view showing a configuration when the discharge lamp 10 shown in FIG. 1 is viewed from below (Z-axis direction minus side).

  FIG. 5 is an enlarged cross-sectional view showing the configuration of the first electrode line group 310 of the second electrode 300 according to the embodiment of the present invention. Specifically, this figure is an enlarged cross-sectional view showing a portion of the second electrode 300 of the discharge lamp 10 shown in FIG.

  FIG. 6 is a plan view showing a light emission region R of the second electrode 300 according to the embodiment of the present invention. Specifically, FIG. 4 is a plan view showing the position of the light emission region R in the discharge lamp 10 shown in FIG.

  As shown in these drawings, the second electrode 300 is a mesh electrode, and a first electrode line group 310 and a second electrode line group which are a group of two electrode lines (electrode line group) extending in different directions. 320. That is, each of the first electrode line group 310 and the second electrode line group 320 has a plurality of electrode lines, and the electrode lines included in the first electrode line group 310 and the electrodes included in the second electrode line group 320. The lines intersect at right angles and are connected at the intersecting portions.

  The first electrode line group 310 is an electrode line group including a plurality of electrode lines extending in the longitudinal direction (X-axis direction) of the discharge tube 100. The first electrode line group 310 includes an in-region electrode line 311 and a current density reduction unit 312. Specifically, the first electrode line group 310 includes a plurality of (9 in the present embodiment) in-region electrode lines 311 arranged in the Y-axis direction and two current density reduction units 312. ing.

  The in-region electrode line 311 is an electrode line extending in the X-axis direction from the X-axis direction plus side end of the second electrode 300 to the X-axis direction minus side end. A plurality of in-region electrode lines 311 are arranged so as to be arranged at equal intervals in the Y-axis direction. For example, the in-region electrode lines 311 are electrode lines having a line width of 0.3 mm, and are arranged so that pitches (interval A in FIG. 4) are arranged at equal intervals of 2.4 mm in the Y-axis direction. The line width and pitch of the in-region electrode line 311 are not limited to the above values.

  The current density reduction unit 312 is disposed on the side of the plurality of in-region electrode lines 311 and extends in the X-axis direction from the X-axis direction plus side end of the second electrode 300 to the X-axis direction minus side end. It is an electrode wire. That is, the current density reduction unit 312 is an electrode line disposed at an end of a plurality of electrode lines included in the first electrode line group 310. Specifically, two current density reduction units 312 are arranged on both ends of the plurality of electrode lines, that is, on both sides (Y-axis direction plus side and minus side) of the plurality of in-region electrode lines 311. The plurality of in-region electrode lines 311 and the two current density reduction units 312 are arranged at equal intervals in the Y-axis direction.

  The current density reduction unit 312 is at least one electrode line formed so that the line width is larger than the in-region electrode line 311 among the plurality of electrode lines included in the first electrode line group 310. For example, when the line width of the in-region electrode line 311 is 0.3 mm, the current density reduction unit 312 is an electrode line having a line width of 1.3 mm.

  Specifically, as shown in FIG. 5, the current density reducing unit 312 has the same height (projecting height from the lower wall portion 102 of the discharge tube 100) as the in-region electrode line 311, and the in-region electrode line The line width is thicker than 311. As a result, the current density reducing unit 312 has a cross-sectional area larger than that of the in-region electrode line 311 and reduces the density of the current flowing through the in-region electrode line 311.

  The line width of the current density reducing unit 312 is not limited to 1.3 mm, but is 3 to 5 times the line width of the in-region electrode line 311 from the viewpoint of reducing the density of the current flowing through the in-region electrode line 311. It is preferable that the thickness is about 0.9 mm to 1.5 mm.

  The in-region electrode line 311 is disposed in the light emission region where the light from the discharge tube 100 is emitted, and the current density reducing unit 312 is disposed outside the light emission region. Here, the light emission region will be described.

  The discharge lamp 10 radiates ultraviolet rays (excimer light) generated in the discharge space inside the discharge tube 100 from the mesh opening of the second electrode 300. That is, a region covering the mesh opening of the second electrode 300 is a light emission region where light from the discharge tube 100 is emitted. For this reason, the light emission region R shown in FIGS. 5 and 6 (the portion indicated by the arrow in FIG. 5 and the shaded portion in FIG. 6) is a light emission region in which light from the discharge tube 100 is emitted. The light emission region R is a rectangular region that covers all the openings formed in the second electrode 300.

  Accordingly, the in-region electrode line 311 is disposed in the light emission region R, and the current density reduction unit 312 is disposed outside the light emission region R. That is, in the light emission region R, a plurality of in-region electrode lines 311 extending in the X-axis direction are arranged side by side in the Y-axis direction. Then, two current density reduction units 312 are arranged outside the light emission regions R on both sides of the plurality of in-region electrode lines 311 so as to sandwich the plurality of in-region electrode lines 311 in the Y-axis direction.

  As shown in FIG. 4, the second electrode line group 320 is an electrode line group including a plurality of electrode lines extending in a direction intersecting the longitudinal direction of the discharge tube 100 (Y-axis direction). Specifically, the second electrode line group 320 includes a plurality of electrode lines 321 arranged at equal intervals in the X-axis direction. The plurality of electrode lines 321 are electrode lines extending in the Y-axis direction from the Y-axis direction plus side end of the second electrode 300 to the Y-axis direction minus side end. For example, the electrode line 321 is an electrode line having the same line width as the in-region electrode line 311 and 0.3 mm.

  That is, each of the plurality of electrode lines 321 intersects (orthogonally) the plurality of in-region electrode lines 311, and both ends thereof are connected to the two current density reduction units 312. Further, the plurality of electrode lines 321 and the plurality of in-region electrode lines 311 are integrated at the intersection, and the plurality of electrode lines 321 and the two current density reduction units 312 are integrated at the connection part. Yes.

  Here, the second electrode line group 320 is formed such that the distance (pitch) between the electrode lines is larger than that of the first electrode line group 310. That is, the interval between the adjacent electrode lines 321 in the second electrode line group 320 (interval B in FIG. 4) is the interval between the adjacent in-region electrode lines 311 or the in-region electrode line 311 and the current. It is larger than the interval between the density reduction units 312 (interval A in FIG. 4).

  For example, when the interval A is 2.4 mm, the electrode wires 321 are arranged at equal intervals with a pitch (interval B in FIG. 4) of 5.6 mm in the X-axis direction. In addition, the said space | interval B should just be larger than the said space | interval A, for example, may be 2.8 mm. Further, the line width of the electrode line 321 is not limited to the above value.

  As described above, the interval indicates the interval (pitch) between the center lines of the electrode lines, but the gap between the electrode lines (the length between the edges of the electrode lines) It may be defined as an interval. That is, the second electrode line group 320 may be configured to have a larger gap between the electrode lines than the first electrode line group 310.

  With such a configuration, the second electrode 300 is a mesh electrode in which a plurality of rectangular openings extending in the X-axis direction are arranged in the X-axis direction and the Y-axis direction. In the present embodiment, the mesh aperture ratio (percentage of the aperture area) in the second electrode 300 is about 78 to 83%, and the current density reduction unit 312 suppresses the temperature rise while improving the illuminance. Is able to.

  As described above, according to the discharge lamp 10 according to the embodiment of the present invention, in the first electrode line group 310 including a plurality of electrode lines extending in the longitudinal direction, the first electrode line group 310 is disposed outside the light emission region, and the in-region electrode line A current density reduction unit 312 that reduces the density of the current flowing through 311 is provided. That is, when power is supplied from the longitudinal end portion of the discharge lamp 10, the current selectively flows through the longitudinal electrode wire. Therefore, if the longitudinal electrode wire is thinned or the number is reduced, the electrode wire As the current density increases, the temperature rises and the electrode wires may be damaged. For this reason, in the first electrode line group 310, the current density of the electrode line can be reduced by the current density reduction unit 312 to improve the aperture ratio of the second electrode 300 while suppressing damage to the electrode line. it can. In addition, the current density reduction unit 312 is disposed outside the light emission region, whereby the current density reduction unit 312 can be suppressed from reducing the aperture ratio of the second electrode 300. Thereby, the illumination intensity can be improved in the discharge lamp 10.

  In the discharge lamp 10, the aperture ratio of the second electrode 300 can be further improved by forming the second electrode line group 320 such that the distance between the electrode lines is larger than that of the first electrode line group 310. it can.

  Further, in the discharge lamp 10, the current density reducing portion 312 can be easily formed by increasing the cross-sectional area of some electrode lines to form the current density reducing portion 312.

  In the discharge lamp 10, when the current density reduction unit 312 is formed by increasing the line width of some of the electrode lines, the electrode line is thickened by arranging the current density reduction unit 312 at the end. Therefore, it is possible to suppress a decrease in the aperture ratio.

  Further, since the discharge lamp 10 is an excimer lamp including a first electrode 200 that is a plate-like electrode and a second electrode 300 that is a mesh electrode provided on the outer surface of the discharge tube 100 so as to face each other, An excimer lamp that can improve the illuminance by improving the aperture ratio of the electrode 300 can be realized.

(Modification 1)
Next, Modification 1 of the above embodiment will be described. In the above embodiment, the electrode line arranged outside the light emission region among the plurality of electrode lines included in the first electrode line group 310 is the current density reduction unit 312, but in this modification, the light emission region In addition, electrode lines other than the current density reduction unit 312 are also arranged.

  FIG. 7 is an enlarged cross-sectional view showing the configuration of the first electrode line group 310 of the second electrode 300 according to the first modification of the embodiment of the present invention. Specifically, this figure corresponds to FIG. 5 and shows the light emission region R1 of the second electrode 300. FIG.

  As shown in the figure, in the discharge lamp according to this modification, a reflective film 111 is formed instead of the reflective film 110 formed on the discharge tube 100 of the discharge lamp 10 according to the above embodiment. Since other configurations are the same as the configurations included in the discharge lamp 10 according to the above-described embodiment, detailed description thereof is omitted.

  The reflective film 111 is formed up to both end portions of the lower wall portion 102. For this reason, the light emission region R1 is a narrow region that is compressed in the Y-axis direction as compared to the light emission region R in the above embodiment.

  As a result, some of the electrode lines included in the first electrode line group 310 (electrode lines 313 at both ends in the figure) are arranged outside the light emission region R1. That is, the first electrode line group 310 includes the in-region electrode line 311 in the light emission region R1, and the current density reducing unit 312 and the electrode line 313 outside the light emission region R1.

  According to the discharge lamp according to the present modification, the current density reduction unit 312 is arranged outside the light emission region even with this configuration, and therefore, the same effect as in the above embodiment can be obtained. That is, even if electrode wires other than the current density reduction portion are arranged outside the light emission region, the same effect as in the above embodiment can be obtained.

(Modification 2)
Next, a second modification of the above embodiment will be described. In the above embodiment, the current density reduction unit 312 is formed to have the same height as the in-region electrode line 311. However, in this modification, the current density reduction unit is more than the in-region electrode line 311. Is formed so as to have a high height.

  FIG. 8 is an enlarged cross-sectional view showing the configuration of the first electrode line group 310 of the second electrode 300 according to the second modification of the embodiment of the present invention. This figure corresponds to FIG.

  As shown in the figure, the discharge lamp according to the present modification has a current density instead of the current density reduction unit 312 included in the first electrode line group 310 of the second electrode 300 of the discharge lamp 10 according to the above embodiment. A reduction unit 314 is included. Since other configurations are the same as the configurations included in the discharge lamp 10 according to the above-described embodiment, detailed description thereof is omitted.

  The current density reduction unit 314 is formed so as to be higher than the in-region electrode line 311. Specifically, the current density reduction unit 314 is formed so that the line width is larger than the in-region electrode line 311 and the height is higher. The current density reducing unit 314 has the same line width as the intra-region electrode line 311 or a line width larger than the intra-region electrode line 311 as long as the cross-sectional area is larger than that of the intra-region electrode line 311. May be formed thin.

  According to the discharge lamp according to the present modification, the current density reducing unit 314 is formed so as to have a cross-sectional area larger than that of the in-region electrode wire 311 even in this configuration. There is an effect. In particular, since the line width of the current density reduction unit 314 can be made thinner than that in the above embodiment, the aperture ratio of the second electrode 300 can be further improved.

(Modification 3)
Next, Modification 3 of the above embodiment will be described. In the above embodiment, the current density reduction unit 312 is formed to have the same height as the in-region electrode line 311. However, in this modification, the current density reduction unit is more than the in-region electrode line 311. Is also formed to have a low height.

  FIG. 9 is an enlarged cross-sectional view showing a configuration of the first electrode line group 310 of the second electrode 300 according to the third modification of the embodiment of the present invention. This figure corresponds to FIG.

  As shown in the figure, the discharge lamp according to the present modification has a current density instead of the current density reduction unit 312 included in the first electrode line group 310 of the second electrode 300 of the discharge lamp 10 according to the above embodiment. A reduction unit 315 is included. Since other configurations are the same as the configurations included in the discharge lamp 10 according to the above-described embodiment, detailed description thereof is omitted.

  The current density reduction unit 315 is formed so as to be lower than the in-region electrode line 311. Specifically, the current density reduction unit 315 is formed to have a larger line width and a lower height than the current density reduction unit 312 in the above embodiment. Thereby, the current density reduction part 315 is formed so that a cross-sectional area becomes larger than the in-region electrode wire 311.

  According to the discharge lamp according to the present modification, the current density reduction unit 315 is formed so as to have a cross-sectional area larger than that of the in-region electrode wire 311 even in this configuration. There is an effect. In particular, if the line width of the current density reducing unit 315 is increased, the current density reducing unit 315 can be easily formed because it is not necessary to adjust the height to the in-region electrode line 311.

  The discharge lamp according to the embodiment of the present invention and the modification thereof has been described above, but the present invention is not limited to the above embodiment and the modification thereof. In other words, it should be considered that the embodiment and its modification disclosed this time are illustrative and not restrictive in all respects. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

  For example, in the above-described embodiment and its modification, the first electrode line group 310 and the second electrode line group 320 intersect at a right angle. However, the angle at which the first electrode line group 310 and the second electrode line group 320 intersect may not be a right angle.

  Moreover, in the said embodiment and its modification, as for the 1st electrode line group 310 and the 2nd electrode line group 320, all decided that the electrode line was arranged at equal intervals. However, the first electrode line group 310 or the second electrode line group 320 may be arranged so that the interval between the electrode lines gradually increases or decreases, and the interval between the electrode lines increases toward the center. Or may be arranged so as to be narrow.

  Moreover, in the said embodiment and its modification, as for the 1st electrode line group 310 and the 2nd electrode line group 320, all have an electrode line arranged at equal intervals, and the 2nd electrode line group 320 is the 1st electrode line group 320. The electrode lines are formed so that the distance between the electrode lines is larger than that of the electrode line group 310. However, in the first electrode line group 310 or the second electrode line group 320, when the electrode lines are not arranged at equal intervals, the second electrode line group 320 is more of an electrode line than the first electrode line group 310. You may decide to form so that the average value of a space | interval may become large. Alternatively, the second electrode line group 320 may be formed so that the minimum value or the maximum value of the distance between the electrode lines is larger than that of the first electrode line group 310.

  Moreover, in the said embodiment and its modification, the electrode wire (In-region electrode wire, current density reduction part, other electrode wire) contained in the 1st electrode wire group 310 and the 2nd electrode wire group 320 is cross-sectional shape. The (cross-sectional shape in a plane parallel to the YZ plane) is a rectangular shape (rectangular shape). However, the cross-sectional shape of the electrode line is not particularly limited, and may be a semicircular shape, a semi-elliptical shape, a square shape other than a rectangular shape, or the like.

  Moreover, in the said embodiment and its modification, suppose that the discharge lamp was a dielectric barrier discharge lamp. However, the discharge lamp is not limited to the dielectric barrier discharge lamp, and may be an ultraviolet lamp such as a low-pressure mercury lamp having a wavelength of 185 nm or 254 nm.

  Moreover, the form constructed | assembled combining the said embodiment and the said modification arbitrarily is also contained in the scope of the present invention. For example, the modification 2 or 3 may be applied to the modification 1 described above.

  The present invention can be applied to a discharge lamp such as an excimer lamp capable of improving illuminance.

DESCRIPTION OF SYMBOLS 10 Discharge lamp 100 Discharge tube 101 Upper wall part 102 Lower wall part 103, 104 Side wall part 110, 111 Reflective film 200 1st electrode 300 2nd electrode 310 1st electrode line group 311 In-region electrode line 312, 314, 315 Current density Reducer 313 Electrode line 320 Second electrode line group 321 Electrode line

Claims (5)

A discharge lamp comprising a discharge tube and a pair of electrodes provided along the longitudinal direction of the discharge tube,
One electrode of the pair of electrodes includes a first electrode line group including a plurality of electrode lines extending in the longitudinal direction and a second electrode including a plurality of electrode lines extending in a direction intersecting the longitudinal direction. A line group,
The first electrode wire group is:
Intra-region electrode lines that are a plurality of electrode lines disposed in a light emission region where light from the discharge tube is emitted;
A discharge lamp comprising: a current density reducing unit that is disposed outside the light emitting region and reduces a density of a current flowing through the electrode wire in the region. The discharge lamp according to claim 1, wherein the second electrode line group is formed such that an interval between the electrode lines is larger than that of the first electrode line group. 3. The discharge lamp according to claim 1, wherein the current density reduction unit is at least one electrode line formed to have a cross-sectional area larger than that of the in-region electrode line. The current density reduction unit is at least one electrode line formed to have a line width larger than that of the in-region electrode line, and an end of a plurality of electrode lines included in the first electrode line group The discharge lamp according to claim 3, wherein The pair of electrodes are provided opposite to each other on the outer surface of the discharge tube,
The electrode which has said 1st electrode wire group and said 2nd electrode wire group among said pair of electrodes is a mesh electrode, and the other electrode is a plate-like electrode. Discharge lamp.

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